PCB single-side photoetching light path structure adopting displaceable UV-LED lamp source module

By adopting a PCB single-sided lithography path structure with a displacement UV-LED lamp source module, the existing lithography equipment has solved the problem of high cost and low applicability for small enterprises and R&D institutions, and achieved high-precision and low-cost lithography effect.

CN120161687APending Publication Date: 2025-06-17墨科微电子(江苏)有限公司
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Patent Information

Application Number
CN202510580951.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-07
Publication Date
2025-06-17

AI Technical Summary

Technical Problem

Existing lithography equipment is costly and has low applicability for smaller enterprises or R&D institutions, and it is difficult to meet their needs.

Method used

The PCB single-sided lithography optical path structure adopts a displaceable UV-LED lamp source module, including a lamp source switching module, a compound front collimation lens group, a uniform light module and a curved mirror. Different light sources can be selected, with strong applicability and low cost.

Benefits of technology

It can meet the lithography needs of small enterprises or R&D institutions under low cost and strong applicability, and provide high-precision lithography effects.

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Abstract

The invention relates to the technical field of photoetching equipment, and discloses a PCB single-sided photoetching light path structure adopting a displaceable UV-LED lamp source module, which comprises a lamp source switching module, and a compound eye front collimating lens group, a light equalizing module and a curved mirror are sequentially arranged on one side of the lamp source switching module. A multi-band UV-LED multi-lamp module and a single-band UV-LED multi-lamp module which are driven by the light source switching module are arranged on the side, located on the compound eye front collimating lens set, of the light source switching module, a movable transparent photoetching workbench is arranged on the side, reflecting light, of the curved mirror, and the movable transparent photoetching workbench comprises a first face and a second face which are opposite to each other. And a PCB (Printed Circuit Board) fixing structure is arranged on the first surface or the second surface of the displaceable transparent photoetching workbench. Different light sources can be selected, the applicability is high, the cost is low, and the use requirements of small enterprises or research and development institutions can be effectively met.
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Description

Technical Field

[0001] The present invention relates to the technical field of lithography equipment, and particularly relates to a single-sided PCB lithography optical path structure using a displaceable UV-LED light source module. Background Art

[0002] When performing circuit lithography on the surface of a PCB, generally, the light source wavelengths of different devices are different. Large companies usually purchase equipment with multiple different wavelength light sources. However, for smaller enterprises or research institutions, when purchasing a large number of equipment, it requires a large amount of funds and a large area of high-standard sites, resulting in relatively high cost pressure and low usage frequency. Therefore, the existing lithography equipment is not very suitable for smaller enterprises or research institutions. Summary of the Invention

[0003] The present invention provides a single-sided PCB lithography optical path structure using a displaceable UV-LED light source module, which solves the technical problems of high cost and low applicability of the existing lithography equipment for smaller enterprises or research institutions.

[0004] The technical solution adopted by the present invention to solve its technical problems is: a single-sided PCB lithography optical path structure using a displaceable UV-LED light source module, including a light source switching module. On one side of the light source switching module, a pre-compound-eye collimating lens group, a light homogenizing module, and a curved mirror are sequentially arranged. On one side of the pre-compound-eye collimating lens group where the light source switching module is located, a multi-band UV-LED multi-light module and a single-band UV-LED multi-light module driven by it are provided. On the side where the curved mirror reflects light, a displaceable transparent lithography workbench is provided. The displaceable transparent lithography workbench includes opposite first and second surfaces, and a PCB fixing structure is provided on the first surface or the second surface of the displaceable transparent lithography workbench. Different light sources can be selected, with strong applicability and low cost, and it can effectively meet the needs of small enterprises or research institutions.

[0005] Further: The pre-compound-eye collimating lens group includes at least two coaxially arranged pre-compound-eye collimating lenses. It can effectively focus the light emitted by the multi-band UV-LED multi-light module or the single-band UV-LED multi-light module into parallel light and propagate it to the light homogenizing module, with high precision.

[0006] Further: The light homogenizing module includes a coaxial micro-cylindrical mirror array and a condenser lens, and the micro-cylindrical mirror array is located on the side close to the pre-compound-eye collimating lens group. After passing through the light homogenizing module, the light becomes a uniform light spot with a divergence angle, forming the required uniform light field distribution.

[0007] Further: The curved mirror reflects the light passing through the light homogenizing module in the vertical direction onto the PCB fixed on the displaceable transparent lithography workbench.

[0008] Furthermore, a switching driving mechanism and a plurality of light source fixing structures driven by the switching driving mechanism are provided on the light source switching module, and fixing components matching the light source fixing structures are provided on both the multi-band UV-LED multi-light module and the single-band UV-LED multi-light module. The fixing positions of the multi-band UV-LED multi-light module and the single-band UV-LED multi-light module can be interchanged, and the applicability is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a schematic structural diagram of the present invention.

[0010] The marks in the figure are: light source switching module 100, multi-band UV-LED multi-light module 210, single-band UV-LED multi-light module 220, pre-compound-eye collimating lens group 300, light homogenizing module 400, curved mirror 500, displaceable transparent lithography workbench 600. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0011] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0012] As Figure 1 shown, a PCB single-sided lithography optical path structure using a displaceable UV-LED light source module includes a light source switching module 100. A pre-compound-eye collimating lens group 300, a light homogenizing module 400, and a curved mirror 500 are sequentially arranged on one side of the source module switching module (100). A multi-band UV-LED multi-light module 210 and a single-band UV-LED multi-light module 220 driven by the light source switching module 100 are arranged on one side of the pre-compound-eye collimating lens group 300. A displaceable transparent lithography workbench 600 is arranged on the side where the curved mirror 500 reflects light. The displaceable transparent lithography workbench 600 includes an opposite first surface and second surface, and a PCB fixing structure is arranged on the first surface or the second surface of the displaceable transparent lithography workbench 600. In a specific implementation, the light source switching module 100 is used to drive the multi-band UV-LED multi-light module 210 and the single-band UV-LED multi-light module 220 to move to select a suitable light source. The light source is focused into parallel light rays after passing through the pre-compound-eye collimating lens group 300 and propagates to the light homogenizing module 400. The parallel light rays become a uniform light spot with a divergence angle after passing through the light homogenizing module 400 to form a required uniform light field distribution. The curved mirror 500 changes the direction of the light rays and reflects the light rays onto the PCB fixed on the displaceable transparent lithography workbench 600. The displaceable transparent lithography workbench 600 cooperates to perform lithography on the PCB. Different light sources can be selected, with strong applicability and low cost, and can effectively meet the use of small enterprises or research institutions.

[0013] On the basis of the above, as Figure 1As shown, the pre - collimating lens group 300 in front of the compound eye includes at least two pre - collimating lenses arranged coaxially. It can effectively focus the light emitted by the multi - band UV - LED multi - lamp module 210 or the single - band UV - LED multi - lamp module 220 into parallel light and transmit it to the light - homogenizing module 400 with high precision.

[0014] On the basis above, as Figure 1 shown, the light - homogenizing module 400 includes a micro - cylindrical mirror array and a condenser lens arranged coaxially, and the micro - cylindrical mirror array is located on the side close to the pre - collimating lens group 300 in front of the compound eye. After passing through the light - homogenizing module 400, the light becomes a uniform light spot with a divergence angle, forming the required uniform light - field distribution.

[0015] On the basis above, as Figure 1 shown, the curved mirror 500 reflects the light passing through the light - homogenizing module 400 in the vertical direction onto the PCB fixed on the displaceable transparent lithography workbench 600.

[0016] On the basis above, as Figure 1 shown, the lamp - source switching module 100 is provided with a switching driving mechanism and a plurality of lamp - source fixing structures driven by the switching driving mechanism. The multi - band UV - LED multi - lamp module 210 and the single - band UV - LED multi - lamp module 220 are both provided with fixing components matching the lamp - source fixing structures. The fixing positions of the multi - band UV - LED multi - lamp module 210 and the single - band UV - LED multi - lamp module 220 can be interchanged, and the applicability is better.

[0017] The above - mentioned specific embodiments have further elaborated on the purpose, technical solutions, and beneficial effects of the present invention. It should be understood that the above - mentioned are only specific embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A PCB single-sided photolithography optical path structure using a displaceable UV-LED light source module, characterized in that: The invention comprises a light source switching module (100), wherein one side of the light source switching module (100) is provided with a compound eye front collimating lens group (300), a light averaging module (400) and a curved mirror (500) in sequence; the light source switching module (100) is provided with a multi-band UV-LED multi-lamp module (210) and a single-band UV-LED multi-lamp module (220) driven by the compound eye collimating lens group (300) on one side thereof; a displaceable transparent photolithography workbench (600) is provided on the side of the curved mirror (500) that reflects light; the displaceable transparent photolithography workbench (600) comprises a first surface and a second surface that are opposite to each other; and a PCB fixing structure is provided on the first surface or the second surface of the displaceable transparent photolithography workbench (600).

2. The PCB single-sided photolithography optical path structure using a displaceable UV-LED module according to claim 1, characterized in that: The compound eye front collimating lens group (300) comprises at least two coaxially arranged compound eye front collimating lenses.

3. The PCB single-sided photolithography optical path structure using a displaceable UV-LED module according to claim 1, characterized in that: The light-homogenizing module (400) comprises a coaxially arranged micro-cylindrical mirror array and a condenser, wherein the micro-cylindrical mirror array is located on a side close to the collimating lens group (300) behind the compound eye.

4. The PCB single-sided photolithography optical path structure using a displaceable UV-LED module according to claim 1, characterized in that: The curved mirror (500) reflects the light passing through the light-homogenizing module (400) in a vertical direction onto a PCB fixed on a movable transparent photolithography workbench (600).

5. The PCB single-sided photolithography optical path structure using a displaceable UV-LED module according to claim 1, characterized in that: The light source switching module (100) is provided with a switching drive mechanism and a plurality of light source fixing structures located on the switching drive mechanism and driven by the switching drive mechanism, and both the multi-band UV-LED multi-lamp module (210) and the single-band UV-LED multi-lamp module (220) are provided with fixing components matching the light source fixing structures.