A dust collector for semiconductor industry processing

Abstract

This invention belongs to the field of dust removal technology, and specifically to a dust collector for semiconductor processing. It includes a dust collection box containing three chambers: a first chamber, a second chamber, and a third chamber. A partition plate connects chambers two and three, with a circular opening on the partition plate. A filter cartridge with an open top and a U-shaped cover are fixedly installed at the bottom of the partition plate, with the U-shaped cover fitted over the filter cartridge. A negative pressure fan is fixedly installed on the inner bottom wall of chamber one, and a dust collection cartridge is fixedly installed at the outlet of the negative pressure fan. A vent is fixedly installed at the end of the filter cartridge furthest from the negative pressure fan. This invention uses a crushing mechanism to break up molds inside the furnace, and the crushed molds can be drawn into the dust collection box by the negative pressure fan and a dust extraction mechanism, preventing fragments and dust from flying around after the molds are crushed.

Description

Technical Field

[0001] This invention relates to the field of dust removal technology, and more particularly to a dust collector for semiconductor processing. Background Technology

[0002] Diffusion furnaces are one of the important process equipment in the front-end of semiconductor production lines. They are used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. Diffusion furnaces, together with the quartz tube molds inside, are often used for high-temperature diffusion of semiconductor silicon wafers to produce chips. The quartz tube molds are placed inside the cavity of the diffusion furnace and the furnace is heated to raise the temperature. During the diffusion process, the silicon wafer to be diffused is placed in the center of the quartz tube mold for high-temperature diffusion.

[0003] With prolonged use, quartz tube molds may crack and become damaged. Currently, the common method is to manually break the damaged quartz tube mold and then install a new one. This replacement method is not only time-consuming and labor-intensive, but also prone to dust flying during the breaking process, which poses a safety hazard. Therefore, a dust collector for semiconductor processing is proposed. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, the present invention proposes a dust collector for semiconductor industry processing.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a dust collector for semiconductor processing, comprising a dust collection box, wherein the dust collection box is provided with a first chamber, a second chamber, and a third chamber, a partition plate is provided between the second and third chambers, the partition plate has a circular opening, the second and third chambers are connected through the circular opening, a filter cylinder with an open top and a U-shaped cover are fixedly installed at the bottom of the partition plate, the U-shaped cover is sleeved on the outside of the filter cylinder, a negative pressure fan is fixedly installed on the bottom inner wall of the first chamber, and a [missing information - likely a device or component] is fixedly installed at the air outlet of the negative pressure fan. The dust collector has a vent port fixedly installed at the end of the filter cartridge away from the negative pressure fan, which extends outside the dust collector box. An air guide pipe is fixedly installed on the air inlet of the negative pressure fan, and the top end of the air guide pipe extends into the third chamber. The filter cartridge is equipped with a knocking back-blowing component for cleaning it. A communication mechanism connects the knocking back-blowing component and the top end of the air guide pipe. A connecting pipe is fixedly installed through the side of the dust collector box, and the connecting pipe is connected to the second chamber. A dust suction mechanism and a crushing mechanism are connected to the connecting pipe to crush and absorb the quartz tube mold.

[0006] Preferably, the dust collection mechanism includes a gripping tube, a flexible hose is connected between the gripping tube and the connecting tube, a bracket is fixedly installed on the gripping tube, the dust collection mechanism also includes a locking clamp fixedly connected to the outside of the dust collection box, the crushing mechanism includes a crushing head, the crushing head is provided with two connectors, the end of the gripping tube away from the flexible hose is detachably connected to one of the connectors, the crushing head has a feed inlet, the feed inlet is connected to the gripping tube, air hammers are fixedly installed on both sides of the crushing head, and the crushing mechanism also includes a storage hopper fixedly connected to the outside of the dust collection box.

[0007] Preferably, a door is provided on one side of the second chamber, and a dust collection hood is fixedly installed through the bottom inner wall of the second chamber. A dust collection hopper is provided below the dust collection hood, and the top of the dust collection hopper and the bottom of the dust collection hood are tightly fitted together.

[0008] Preferably, a cover plate is fixedly installed through the top inner wall of the third chamber. The knocking backflushing assembly includes a rocking mechanism connected to the cover plate and a knocking mechanism movably installed inside the filter cartridge. Two transmission screws connect the rocking mechanism and the knocking mechanism. The rocking mechanism includes a rotating prism that passes through the cover plate and is rotatably connected to the cover plate. A crank handle is fixedly installed at the top of the rotating prism. The rocking mechanism also includes multiple L-shaped frames fixedly installed on the top of the partition plate and arranged in a circumferential array. The top of each L-shaped frame is fixedly installed with the same top plate. A connecting plate is fixedly installed at the bottom of each L-shaped frame. The ends of the multiple connecting plates that are close to each other are fixedly installed with the same... A ring-shaped structure contains a rotating disk rotatably mounted inside the ring. A transmission rod and two rotating shafts are rotatably mounted through the rotating disk. The transmission rod passes through a top plate and is rotatably connected to the top plate. The top of the top plate has a groove adapted to a rotating prism. A large gear and two small gears are provided between the top plate and the rotating disk. The two small gears are respectively fixedly sleeved on their corresponding rotating shafts. The large gear is fixedly sleeved on the rotating prism. The top ends of two transmission screws are respectively fixedly connected to the bottom ends of their corresponding rotating shafts. Both small gears are meshed with the large gear, and the two small gears are fitted with the same meshing internal gear ring. The top of the internal gear ring is fixedly connected to the top of the top plate.

[0009] Preferably, the filter cartridge includes a fixing ring fixedly connected to the bottom of the partition plate and a bottom cover located below the fixing ring. Multiple V-shaped filter plates are fixedly installed between the fixing ring and the bottom cover in a circumferential array. The multiple V-shaped filter plates are connected end to end. The striking mechanism includes a horizontal arm. Two transmission screws pass through the horizontal arm and are threadedly connected to the horizontal arm. Two frames are fixedly installed on the top of the horizontal arm. Guide rods are slidably installed through the two frames. Baffles are fixedly installed at the ends of the two guide rods that are close to each other. Striking blocks are fixedly installed at the ends of the two guide rods that are far apart from each other. A spring is slidably sleeved on the guide rod. The two ends of the spring are fixedly connected to the baffle and the frame, respectively.

[0010] Preferably, the top of the two frames is rotatably mounted with the same ring plate 1, and the outer side of the ring plate 1 is fitted with a ring plate 2. A plurality of springs 2 are fixedly installed between the ring plate 1 and the ring plate 2 in a circumferential array. A plurality of V-shaped frames are fixedly installed on the outer side of the ring plate 2 in a circumferential array. The plurality of V-shaped frames are slidably fitted on the corresponding V-shaped filter plates.

[0011] Preferably, the communication mechanism includes an annular box two, the bottom of which is rotatably connected to the top of two annular plates two, an annular plate one is rotatably sleeved on the outside of the annular box two, and multiple nozzles arranged in a circumferential array are fixedly installed on the top of the annular box two. An annular box one is rotatably installed on the inside of the annular box two. Both the outside of the annular box one and the inside of the annular box two are open, and the multiple nozzles are connected to the annular box one through the annular box two. The communication mechanism also includes a three-way pipe fixedly connected to the top port of the air guide pipe. A spiral coiled pipe is connected between the three-way pipe and the annular box one. The spiral coiled pipe passes through one of the connecting plates and is fixedly connected to the connecting plate. Multiple fixed bent rods arranged in a circumferential array are fixedly installed on the outside of the annular plate one, and the ends of the multiple fixed bent rods away from the annular plate one are fixedly connected to the top of the annular box one.

[0012] Preferably, the three-way pipe is provided with pipe head one, pipe head two and pipe head three, the top end of the spiral coiled pipe is fixedly connected to the inner wall of pipe head three, pipe head one is fixedly connected to the inner wall of the top port of the filter cylinder, and check valve one and check valve two are fixedly installed in pipe head three and pipe head two respectively.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] 1. The present invention can crush the mold in the furnace by crushing mechanism, and can also absorb the crushed mold into the dust collection box by negative pressure fan and dust collection mechanism, so as to avoid the situation of fragments flying around and dust flying after the mold is crushed.

[0015] 2. The U-shaped cover can separate the large and small dust particles during recycling, ensuring that the large dust particles fall directly into the ash hopper under gravity, and ensuring that the filter cartridge filters only the small dust particles that are easy to fly. Then, by knocking the back-blowing component and the back-blowing of the crushing mechanism and negative pressure fan, the filter cartridge can be cleared from the inside out. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a dust collector for semiconductor industry processing proposed in this invention. Figure 1 ;

[0017] Figure 2 This is a schematic diagram of the overall structure of a dust collector for semiconductor industry processing proposed in this invention. Figure 2 ;

[0018] Figure 3 This invention provides a side view of a dust collector for semiconductor processing. Figure 1 ;

[0019] Figure 4 This invention provides a side view of a dust collector for semiconductor processing. Figure 2 ;

[0020] Figure 5 for Figure 2 A magnified structural diagram of part A in the middle;

[0021] Figure 6 This is a schematic diagram of the middle filter cylinder, partition plate, knocking back-blowing assembly, and connecting mechanism of a dust collector for semiconductor industry processing proposed in this invention.

[0022] Figure 7 This is a schematic diagram of the connecting mechanism and the knocking back-blowing component in a dust collector for semiconductor processing proposed in this invention;

[0023] Figure 8 This is a side sectional view of a shaking mechanism in a dust collector for semiconductor processing proposed in this invention;

[0024] Figure 9 This is a schematic diagram of the knocking mechanism in a dust collector for semiconductor processing proposed in this invention;

[0025] Figure 10 This is a schematic diagram of the connecting mechanism in a dust collector for semiconductor processing proposed in this invention;

[0026] Figure 11 This is a partial top sectional view of the connecting mechanism in a dust collector for semiconductor processing proposed in this invention.

[0027] In the diagram: 1. Dust collector; 11. Chamber 1; 12. Chamber 2; 13. Chamber 3; 14. Door; 15. U-shaped hood; 16. Ash hopper; 17. Divider plate; 171. Round opening; 18. Cover plate; 19. Ash collection hood; 2. Connecting pipe; 3. Negative pressure fan; 4. Air guide pipe; 5. Filter cartridge; 51. Fixing ring; 52. V-shaped filter plate; 53. Bottom cover; 6. Dust collection mechanism; 1. Hose; 62. Holding tube; 63. Locking clamp; 64. Bracket; 7. Connecting mechanism; 71. T-joint; 711. Tube end one; 712. Tube end two; 713. Tube end three; 72. Annular box one; 73. Annular box two; 74. Nozzle; 75. Spiral coiled tube; 76. Check valve one; 77. Check valve two; 8. Knocking backflush assembly; 81. Shaking mechanism; 811. 812. Rotating prism; 813. Handle; 814. L-shaped frame; 815. Connecting plate; 816. Ring; 817. Rotating disk; 818. Internal gear ring; 819. Rotating shaft; 8110. Small gear; 8111. Transmission rod; 8112. Top plate; 8113. Rib groove; 82. Transmission screw; 83. Striking mechanism; 831. Cross arm; 832. Frame; 833. Guide rod; 834. Striking block; 835. Baffle; 836. Spring 1; 837. Ring plate 1; 838. Ring plate 2; 839. V-shaped frame; 8310. Spring 2; 8311. Fixed bent rod; 9. Crushing mechanism; 91. Crushing head; 911. Connecting head; 92. Air hammer; 93. Feed inlet; 94. Storage hopper; 10. Dust collector; 101. Vent port. Detailed Implementation

[0028] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Please refer to Figures 1-11This invention provides a technical solution: a dust collector for semiconductor processing, comprising a dust collection box 1, which contains a first chamber 11, a second chamber 12, and a third chamber 13. A partition plate 17 is provided between the second chamber 12 and the third chamber 13, and a circular opening 171 is provided on the partition plate 17. The second chamber 12 and the third chamber 13 are connected through the circular opening 171. A filter cylinder 5 with an open top and a U-shaped cover 15 are fixedly installed at the bottom of the partition plate 17. The U-shaped cover 15 is fitted over the outside of the filter cylinder 5. A negative pressure fan 3 is fixedly installed on the bottom inner wall of the first chamber 11, and a negative pressure fan 3 is fixedly installed at the air outlet of the negative pressure fan 3. There is a dust collector 10, and a vent 101 is fixedly installed at the end of the filter cartridge 5 away from the negative pressure fan 3. The vent 101 extends to the outside of the dust collector 1. A guide pipe 4 is fixedly installed on the air inlet of the negative pressure fan 3. The top end of the guide pipe 4 extends into the third chamber 13. The filter cartridge 5 is equipped with a knocking back-blowing component 8 for cleaning. A connecting mechanism 7 connects the knocking back-blowing component 8 and the top end of the guide pipe 4. A connecting pipe 2 is fixedly installed through the side of the dust collector 1. The connecting pipe 2 is connected to the second chamber 12. A dust collection mechanism 6 and a crushing mechanism 9 are connected to the connecting pipe 2 to crush and absorb the quartz tube mold.

[0030] The dust collection mechanism 6 includes a gripping tube 62, a flexible hose 61 connecting the gripping tube 62 and the connecting tube 2, a bracket 64 fixedly installed on the gripping tube 62, and a locking clamp 63 fixedly connected to the outside of the dust collection box 1. The crushing mechanism 9 includes a crushing head 91, which has two connectors 911. The end of the gripping tube 62 away from the flexible hose 61 is detachably connected to one of the connectors 911. The crushing head 91 has a feed inlet 93 connected to the gripping tube 62. Air hammers 92 are fixedly installed on both sides of the crushing head 91. The crushing mechanism 9 also includes a storage hopper 94 fixedly connected to the outside of the dust collection box 1.

[0031] Furthermore, connector 911 is in a closed state when not connected to grip tube 62, and in an open state when connected to grip tube 62. By installing another spare grip tube 62 on another connector 911 that is not connected to grip tube 62, and sealing the end of grip tube 62 away from connector 911, the crushing head 91 can be operated by holding both grip tubes 62 at both ends of the furnace. This makes the operation more labor-saving. A camera can also be installed on bracket 64 to observe the position of the mold that needs to be struck in real time.

[0032] A door 14 is provided on one side of the second chamber 12. A dust collection hood 19 is fixedly installed through the bottom inner wall of the second chamber 12. A dust collection hopper 16 is provided below the dust collection hood 19. The top of the dust collection hopper 16 and the bottom of the dust collection hood 19 are tightly fitted together.

[0033] Furthermore, the bottom of the ash hopper 16 is equipped with multiple casters. When the dust in the ash hopper 16 needs to be emptied, the ash hopper 16 can be pulled out from under the ash collection hood 19. The two sides of the ash hopper 16 are detachably connected to the inner walls of the dust collection box 1 by snap fasteners. When the ash hopper 16 and the dust collection box 1 are connected, they can be connected as a whole and moved by snap fasteners. One side of the opening of the U-shaped cover 15 abuts against the door 14.

[0034] A cover plate 18 is fixedly installed through the top inner wall of chamber 3 13. The knocking backflushing assembly 8 includes a rocking mechanism 81 connected to the cover plate 18 and a knocking mechanism 83 movably installed inside the filter cartridge 5. Two transmission screws 82 are connected between the rocking mechanism 81 and the knocking mechanism 83. The rocking mechanism 81 includes a rotating prism 811 that passes through the cover plate 18 and is rotatably connected to the cover plate 18. A crank handle 812 is fixedly installed at the top of the rotating prism 811. The rocking mechanism 81 also includes multiple L-shaped frames 813 fixedly installed on the top of the partition plate 17 and arranged in a circumferential array. The top of the L-shaped frames 813 is fixedly installed with the same top plate 8112. The bottom ends of the multiple L-shaped frames 813 are all fixedly installed with connecting plates 814. The ends of the multiple connecting plates 814 that are close to each other are fixedly installed with the same annular ring 815. A rotating disk is rotatably installed inside the annular ring 815. 816, a transmission rod 8111 and two rotating shafts 819 are rotatably mounted through the rotating disk 816. The transmission rod 8111 passes through the top plate 8112 and is rotatably connected to the top plate 8112. The top plate 8112 has a groove 8113 adapted to the rotating prism 811 at its top end. A large gear 818 and two small gears 8110 are provided between the top plate 8112 and the rotating disk 816. The two small gears 8110 are fixedly sleeved on the corresponding rotating shafts 819. The large gear 818 is fixedly sleeved on the rotating prism 811. The top ends of the two transmission screws 82 are fixedly connected to the bottom ends of the corresponding rotating shafts 819. The two small gears 8110 are meshed with the large gear 818. The two small gears 8110 are fitted with the same internal gear ring 817. The top of the internal gear ring 817 is fixedly connected to the top of the top plate 8112.

[0035] The filter cartridge 5 includes a fixing ring 51 fixedly connected to the bottom of the partition plate 17 and a bottom cover 53 located below the fixing ring 51. Multiple V-shaped filter plates 52 arranged in a circumferential array are fixedly installed between the fixing ring 51 and the bottom cover 53. The multiple V-shaped filter plates 52 are connected to each other end to end. The striking mechanism 83 includes a horizontal arm 831. Two transmission screws 82 pass through the horizontal arm 831 and are threadedly connected to the horizontal arm 831. Two frames 832 are fixedly installed on the top of the horizontal arm 831. Guide rods 833 are slidably installed through the two frames 832. Baffles 835 are fixedly installed at the ends of the two guide rods 833 that are close to each other. Striking blocks 834 are fixedly installed at the ends of the two guide rods 833 that are far from each other. A spring 836 is slidably sleeved on the guide rod 833. The two ends of the spring 836 are fixedly connected to the baffles 835 and the frames 832, respectively.

[0036] The top of the two frames 832 is rotatably mounted with the same ring plate 837. The outer side of the ring plate 837 is fitted with a ring plate 838. A number of springs 8310 arranged in a circular array are fixedly installed between the ring plate 837 and the ring plate 838. A number of V-shaped frames 839 arranged in a circular array are fixedly installed on the outer side of the ring plate 838. The multiple V-shaped frames 839 are slidably fitted on the corresponding V-shaped filter plates 52.

[0037] Furthermore, with the cooperation of spring 836, during the rotation of the cross arm 831, the two guide rods 833 will drive the two striking blocks 834 to strike each V-shaped frame 839 in sequence. After being struck, the V-shaped frame 839 can transmit the vibration to the V-shaped filter plate 52 that is in contact with it.

[0038] The connecting mechanism 7 includes an annular box 2 73, the bottom of which is rotatably connected to the top of two annular plates 2 838. An annular plate 1 837 is rotatably sleeved on the outside of the annular box 2 73. Multiple nozzles 74 arranged in a circular array are fixedly installed on the top of the annular box 2 73. An annular box 1 72 is rotatably installed on the inside of the annular box 2 73. Both the outside of the annular box 1 72 and the inside of the annular box 2 73 are open. The multiple nozzles 74 are connected to the annular box 1 72 through the annular box 2 73. The connecting mechanism 7 also includes a three-way pipe 71 fixedly connected to the top port of the air guide pipe 4. A spiral coiled pipe 75 is connected between the three-way pipe 71 and the annular box 1 72. The spiral coiled pipe 75 passes through one of the connecting plates 814 and is fixedly connected to the connecting plate 814. Multiple fixed bent rods 8311 arranged in a circular array are fixedly installed on the outside of the annular plate 1 837. The ends of the multiple fixed bent rods 8311 away from the annular plate 1 837 are fixedly connected to the top of the annular box 1 72.

[0039] The three-way pipe 71 is provided with pipe head 1 711, pipe head 2 712 and pipe head 3 713. The top end of the spiral coiled pipe 75 is fixedly connected to the inner wall of pipe head 3 713. Pipe head 1 711 is fixedly connected to the inner wall of the top end of the filter cylinder 5. Check valve 1 76 and check valve 2 77 are fixedly installed in pipe head 3 713 and pipe head 2 712 respectively.

[0040] Furthermore, during vacuuming, external air enters the grip tube 62 through the feed inlet 93, then flows through the hose 61 and connecting tube 2 before entering the second chamber 12. After being filtered by the filter cartridge 5, the air enters the third chamber 13 through the top opening of the filter cartridge 5. Subsequently, the air flows through the second tube head 712, through the first tube head 711, and then into the air guide tube 4. During this process, the second check valve 77 is in the open state, while the first check valve 76 is in the closed state.

[0041] When the filter cartridge 5 is backflushed for dust removal, the air discharged from the air guide pipe 4 enters the first pipe head 711 and then enters the spiral coiled pipe 75 through the third pipe head 713. During this process, the second check valve 77 is in the closed state and the first check valve 76 is in the open state.

[0042] In this embodiment: When in use, the negative pressure fan 3 is started to make the grip tube 62 negative pressure, and the two air hammers 92 are connected to the pipes supplying compressed air. When crushing the mold in the furnace, the crushing head 91 is aligned with the mold in the furnace by gripping the grip tube 62, and the feed port 93 faces the mold. When the crushing head 91 is close to the mold, the two air hammers 92 that are supplied with compressed air will drive the crushing head 91 to strike the mold at a high frequency. The mold dust that is crushed by the impact enters the grip tube 62 through the feed port 93, and then enters the second chamber 12 through the hose 61 and the connecting pipe 2.

[0043] The mold dust entering the second chamber 12 will cause large dust particles to fall automatically after hitting the U-shaped cover 15 and be collected in the dust collection hopper 16 through the dust collection cover 19, while small dust particles will adhere to the outer wall of the filter cartridge 5.

[0044] When excessive dust on the outer wall of the filter cartridge 5 causes poor air permeability, the negative pressure fan 3 is started to back-blown. External air enters the dust collector 10 through the ventilation port 101 and is then filtered by the dust collector 10 and discharged through the air guide pipe 4. The back-blowing air enters the first pipe head 711 and is discharged through the third pipe head 713 and enters the spiral coiled pipe 75. The back-blowing air then enters the first annular box 72 and the second annular box 73 and is then sprayed out through multiple nozzles 74. The back-blowing air sprayed from the multiple nozzles 74 will back-blown and unclog the filter cartridge 5 from the inside to the outside.

[0045] When backflushing the filter cartridge 5, the crank handle 812 can be turned to drive the rotating prism 811 to rotate. The rotating prism 811 then drives the transmission rod 8111 to rotate, which in turn drives the large gear 818 to rotate. The rotating large gear 818 engages with the internal gear ring 817, causing the two small gears 8110 to drive the two rotating shafts 819 to revolve around the transmission rod 8111 while also rotating on their own axes. The two rotating transmission screws 82 will drive the horizontal arm 831 to move up and down inside the filter cartridge 5. As the horizontal arm 831 drives the multiple V-shaped brackets 839 to move up and down inside the filter cartridge 5, the two transmission screws 82 will also drive the horizontal arm 831 to rotate on its own axes. The rotating horizontal arm 831, through two frames 832, drives two striking blocks 834 to strike each V-shaped frame 839 in sequence. After being struck, the vertically moving V-shaped frame 839 can transmit vibration to each V-shaped filter plate 52. After being vibrated, the V-shaped filter plate 52 can shake off the dust attached to its outside. In addition, the horizontal arm 831 also drives the annular box 73 to rotate during its rotation. The annular box 73 then drives multiple nozzles 74 to rotate. Therefore, as the annular box 73 moves up and down inside the filter cylinder 5, the multiple nozzles 74 will also move up and down spirally inside the filter cylinder 5, thereby enabling all-round backflushing inside the filter cylinder 5.

[0046] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A dust collector for semiconductor industry processing, comprising a dust collection box (1), characterized in that: The dust collector (1) is provided with chamber one (11), chamber two (12) and chamber three (13). A partition plate (17) is provided between chamber two (12) and chamber three (13). A round opening (171) is provided on the partition plate (17). Chamber two (12) and chamber three (13) are connected through the round opening (171). A filter cylinder (5) with an open top and a U-shaped cover (15) are fixedly installed at the bottom of the partition plate (17). The U-shaped cover (15) is fitted on the outside of the filter cylinder (5). A negative pressure fan (3) is fixedly installed on the bottom inner wall of chamber one (11). A dust collector cylinder (10) is fixedly installed on the air outlet of the negative pressure fan (3). The filter cylinder (5) is far away from the negative pressure fan. A ventilation port (101) is fixedly installed at one end of the blower (3), the ventilation port (101) extends to the outside of the dust collector (1), a guide pipe (4) is fixedly installed on the air inlet of the negative pressure blower (3), the top end of the guide pipe (4) extends into the third chamber (13), a knocking back-blowing assembly (8) for cleaning is provided in the filter cartridge (5), a connecting mechanism (7) is connected between the knocking back-blowing assembly (8) and the top end of the guide pipe (4), a connecting pipe (2) is fixedly installed through the side of the dust collector (1), the connecting pipe (2) is connected to the second chamber (12), and a dust suction mechanism (6) and a crushing mechanism (9) for crushing and absorbing the quartz tube mold are connected to the connecting pipe (2). A cover plate (18) is fixedly installed through the top inner wall of the third chamber (13). The knocking back-blowing assembly (8) includes a rocking mechanism (81) connected to the cover plate (18) and a knocking mechanism (83) movably installed inside the filter cartridge (5). Two transmission screws (82) are connected between the rocking mechanism (81) and the knocking mechanism (83). The rocking mechanism (81) includes a rotating prism (811) that penetrates the cover plate (18) and is rotatably connected to the cover plate (18). 1) A crank handle (812) is fixedly installed at the top. The cranking mechanism (81) also includes multiple L-shaped frames (813) fixedly installed on the top of the partition plate (17) and arranged in a circular array. The top of the L-shaped frames (813) is fixedly installed with the same top plate (8112). The bottom ends of the multiple L-shaped frames (813) are all fixedly installed with connecting plates (814). The ends of the multiple connecting plates (814) that are close to each other are fixedly installed with the same annular ring (815). The annular ring (815) is rotatably installed inside. A rotating disk (816) is provided, on which a transmission rod (8111) and two rotating shafts (819) are rotatably mounted. The transmission rod (8111) passes through a top plate (8112) and is rotatably connected to the top plate (8112). The top plate (8112) has a groove (8113) at its top end that matches the rotating prism (811). A large gear (818) and two small gears (8110) are provided between the top plate (8112) and the rotating disk (816). Gears (8110) are fixedly sleeved on the corresponding rotating shafts (819), the large gear (818) is fixedly sleeved on the rotating prism (811), the top ends of the two transmission screws (82) are fixedly connected to the bottom ends of the corresponding rotating shafts (819), the two small gears (8110) are meshed with the large gear (818), and the two small gears (8110) are fitted with the same internal gear ring (817), the top of the internal gear ring (817) is fixedly connected to the top of the top plate (8112).

2. A dust collector for semiconductor industry processing according to claim 1, characterized in that: The dust collection mechanism (6) includes a grip tube (62), a hose (61) is connected between the grip tube (62) and the connecting tube (2), a bracket (64) is fixedly installed on the grip tube (62), the dust collection mechanism (6) also includes a locking clamp (63) fixedly connected to the outside of the dust collection box (1), the crushing mechanism (9) includes a crushing head (91), two connectors (911) are provided on the crushing head (91), one end of the grip tube (62) away from the hose (61) is detachably connected to one of the connectors (911), a feed inlet (93) is opened on the crushing head (91), the feed inlet (93) is connected to the grip tube (62), air hammers (92) are fixedly installed on both sides of the crushing head (91), the crushing mechanism (9) also includes a storage hopper (94) fixedly connected to the outside of the dust collection box (1).

3. A dust collector for semiconductor industry processing according to claim 1, characterized in that: A door (14) is provided on one side of the second chamber (12). A dust collection hood (19) is fixedly installed through the bottom inner wall of the second chamber (12). A dust collection hopper (16) is provided below the dust collection hood (19). The top of the dust collection hopper (16) and the bottom of the dust collection hood (19) are tightly fitted together.

4. A dust collector for semiconductor industry processing according to claim 1, characterized in that: The filter cartridge (5) includes a fixing ring (51) fixedly connected to the bottom of the partition plate (17) and a bottom cover (53) located below the fixing ring (51). A plurality of V-shaped filter plates (52) arranged in a circumferential array are fixedly installed between the fixing ring (51) and the bottom cover (53). The plurality of V-shaped filter plates (52) are connected end to end to each other. The striking mechanism (83) includes a horizontal arm (831). Two transmission screws (82) pass through the horizontal arm (831) and are threadedly connected to the horizontal arm (831). Two frames (832) are fixedly installed on the top of (831). Guide rods (833) are slidably installed through the two frames (832). Baffles (835) are fixedly installed at the ends of the two guide rods (833) that are close to each other, and knocking blocks (834) are fixedly installed at the ends of the two guide rods (833) that are far apart from each other. A spring (836) is slidably sleeved on the guide rod (833). The two ends of the spring (836) are fixedly connected to the baffle (835) and the frame (832) respectively.

5. A dust collector for semiconductor industry processing according to claim 4, characterized in that: The top of the two frames (832) is rotatably mounted with the same ring plate 1 (837). The outer side of the ring plate 1 (837) is fitted with a ring plate 2 (838). A plurality of springs 2 (8310) arranged in a circular array are fixedly installed between the ring plate 1 (837) and the ring plate 2 (838). A plurality of V-shaped frames (839) arranged in a circular array are fixedly installed on the outer side of the ring plate 2 (838). The plurality of V-shaped frames (839) are slidably fitted on the corresponding V-shaped filter plates (52).

6. A dust collector for semiconductor industry processing according to claim 5, characterized in that: The connecting mechanism (7) includes an annular box two (73), the bottom of which is rotatably connected to the top of two annular plates two (838). Annular plate one (837) is rotatably sleeved on the outside of annular box two (73). Multiple nozzles (74) arranged in a circular array are fixedly installed on the top of annular box two (73). Annular box one (72) is rotatably installed on the inside of annular box two (73). Both the outside of annular box one (72) and the inside of annular box two (73) are open. The multiple nozzles (74) are connected to annular box one (73) through annular box two (73). 2) Connecting, the connecting mechanism (7) also includes a three-way pipe (71) fixedly connected to the top port of the air guide pipe (4), and a spiral coiled pipe (75) is connected between the three-way pipe (71) and the annular box (72). The spiral coiled pipe (75) passes through one of the connecting plates (814) and is fixedly connected to the connecting plate (814). Multiple fixed bent rods (8311) are fixedly installed on the outer side of the annular plate (837) in a circular array. The ends of the multiple fixed bent rods (8311) away from the annular plate (837) are all fixedly connected to the top of the annular box (72).

7. A dust collector for semiconductor industry processing according to claim 6, characterized in that: The three-way pipe (71) is provided with a pipe head one (711), a pipe head two (712) and a pipe head three (713). The top end of the spiral coiled pipe (75) is fixedly connected to the inner wall of the pipe head three (713). The pipe head one (711) is fixedly connected to the inner wall of the top end port of the filter cylinder (5). Check valve one (76) and check valve two (77) are fixedly installed in the pipe head three (713) and the pipe head two (712) respectively.

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