Quartz tube inner wall hydroxyl removing and polishing device

Abstract

The invention discloses a quartz tube inner wall hydroxyl removing and polishing device which comprises a workbench, and two tube clamp assemblies distributed in parallel are symmetrically arranged on the upper end face of the workbench; a machine plate is vertically fixed to one side of the upper end face of the workbench, a plurality of guide bars are transversely fixed to the machine plate, a positioning seat is installed on the guide bars, and a polishing unit is arranged on the side, close to the machine plate, of the axial end face of the positioning seat. Tube pushing devices for axially pushing the quartz tube are arranged on the outer sides of the two tube clamping assemblies on the working table; according to the polishing unit, the multiple side polishing devices and the center polishing disc can integrally polish the inner wall of the quartz tube in the synchronous rotation process, the polishing efficiency is high, and the tube pushing device can provide axial reciprocating pushing for the quartz tube; therefore, the side polishing device and the center polishing disc can carry out fine polishing and rough polishing operation on all positions of the inner wall of the quartz tube, and consistency and uniformity of polishing are guaranteed.

Description

Technical Field

[0001] The present invention belongs to the technical field of polishing equipment, and specifically relates to a hydroxyl-removing polishing device for the inner wall of a quartz tube. Background Art

[0002] Quartz tubes are widely used in fields such as semiconductors, optical fibers, and photovoltaics due to their high purity, high temperature resistance, and excellent optical properties. However, the residual hydroxyl groups on their inner walls will significantly reduce the light transmittance, heat resistance, and chemical stability. Therefore, it is necessary to improve the inner wall smoothness and reduce light scattering through a polishing process; In the prior art, such as the invention patent with the publication number CN115648049B, the polishing component it adopts can be aligned with the quartz tube body during polishing and perform horizontal polishing operations, ensuring the stability of the quartz tube body and facilitating loading and unloading; however, during use, the polishing component needs to continuously slide into the quartz tube, resulting in low efficiency and a long cycle time. Moreover, during continuous operation, the surface temperature of the polishing component is as high as 120 - 150 °C, leading to a decrease in the hydroxyl desorption efficiency (the efficiency decreases by 40% when the temperature > 100 °C); secondly, a single polishing component cannot achieve compound rough polishing and fine polishing. It is necessary to separately replace different polishing components to complete rough polishing and fine polishing operations, increasing the operation steps and possibly resulting in inconsistent connection between the two operations, affecting the surface quality of the final product.

[0003] Therefore, it is necessary to provide a hydroxyl-removing polishing device for the inner wall of a quartz tube to solve the problems raised in the above background art. Summary of the Invention

[0004] To achieve the above object, the present invention provides the following technical solution: A hydroxyl-removing polishing device for the inner wall of a quartz tube, including a workbench, on the upper end surface of which two parallel distributed tube clamping components are symmetrically arranged. The tube clamping component is provided with a coaxial positioning hole for horizontally clamping the quartz tube to be processed; On one side of the upper end surface of the workbench, a machine plate is vertically fixed. A plurality of guide rods are horizontally fixed on the machine plate. A positioning seat is installed on the guide rods. On the side of the axial end surface of the positioning seat close to the machine plate, a polishing unit is arranged. One end of the polishing unit coaxially extends into the inner cavity of the quartz tube; On the workbench, on the outer sides of the two tube clamping components, a tube pushing device for axially advancing the quartz tube is arranged.

[0005] Further, as a preference, the tube clamping component includes a clamping base, which is fixed on the workbench by bolts. On the upper end surface of the clamping base, a movable clamp seat is vertically slidably connected. Arc-shaped positioning grooves are provided in both the movable clamp seat and the clamping base, and a lining plate is fixed in the arc-shaped positioning groove; One side of the clamping base is fixed with a locking cylinder, and the output end of the locking cylinder is connected to the movable clamp seat.

[0006] Further, as a preference, a plurality of roller units are evenly distributed on the arc-shaped inner walls of the lining plates; and a carrier is fixed on one side of the workbench where one of the pipe clamp assemblies is located, and a rotatable wheel mechanism which can be slidably adjusted is inclinedly installed on the carrier, and the rotatable wheel mechanism abuts against the outer wall of the quartz tube.

[0007] Further, as a preference, the polishing unit includes a fixed shaft which is horizontally fixed on the positioning seat and penetrates through the machine plate, and a plurality of central polishing discs are equidistantly distributed on the fixed shaft; And a plurality of side polishing devices are also assembled on the fixed shaft, and the side polishing devices and the central polishing discs are alternately distributed along the axial direction of the fixed shaft.

[0008] Further, as a preference, shaft plates are coaxially fixed on one side of each central polishing disc on the fixed shaft, and a connecting shaft is eccentrically rotatably arranged on each shaft plate through a bearing; one end of the connecting shaft is fixed with a transmission tooth; a tooth ring is coaxially fixed at one end of the central polishing disc close to the shaft plate, and the transmission tooth meshes with the tooth ring; A rotating shaft is rotatably arranged in the fixed shaft, and an internal gear one is sleeved on the rotating shaft at each shaft plate position, and the internal gear one meshes with the transmission tooth in a corresponding manner for transmission.

[0009] Further, as a preference, a plurality of polishing plates which can radially slide are evenly distributed on the circumferential side wall of the central polishing disc along the circumference, each polishing plate is radially slidably connected with the central polishing disc through a sliding pair, a sealing cavity corresponding to each polishing plate is formed in the central polishing disc, and a sealing plug fixedly connected with the corresponding polishing plate is slidably assembled in each sealing cavity; A sealing ring is coaxially fixed in the central polishing disc, the sealing ring is sealingly rotatably sleeved outside the fixed shaft, and the two are in sealing cooperation to form an annular structure cavity. A plurality of through holes are circumferentially formed in the sealing ring, and each through hole is correspondingly communicated with the sealing cavity; An oil passage is formed in the fixed shaft, and the oil passage is communicated with each annular structure cavity.

[0010] Further, as a preference, the side polishing device includes two symmetrically arranged sleeve seats, and both sleeve seats are sleeved on the fixed shaft; a roller frame parallel to the fixed shaft is installed on one side of the sleeve seat, and a side polishing roller is rotatably connected to the roller frame; An internal gear two is sleeved on the rotating shaft, and a driven tooth is rotatably arranged outside the fixed shaft. The internal gear two meshes with the driven tooth, and an external tooth fixedly connected with the side polishing roller is rotatably arranged on one side of the roller frame, and the external tooth meshes with the driven tooth.

[0011] Further, as a preference, the sleeve seat is rotatably connected with the fixed shaft, and a guide shaft is slidably connected to the sleeve seat, and the other end of the guide shaft is fixed to the roller frame; One side of the driven tooth is rotatably connected with a fixing rod, and the other end of the fixing rod is rotatably connected with the external tooth.

[0012] Further, as a preference, a telescopic propeller is provided outside the fixed shaft, and a power output end of the telescopic propeller is connected to the fixed rod.

[0013] Further, as a preference, the tube pushing device comprises a side plate, which is slidably positioned and adjustedly mounted on the workbench, a pulse pneumatic actuator is laterally fixed on the side plate, and a vertically arranged paddle is fixed to the output end of the pulse pneumatic actuator, and the upper end of the paddle is in contact with the outer wall of the quartz tube orifice; The pulsed pneumatic actuators in the two tube pushing devices cooperate with each other and realize alternating axial propulsion and reset cycles through the main control system.

[0014] Compared with the prior art, the present invention has the following beneficial effects: In the present invention, the quartz tube can be horizontally mounted on a workbench through a tube clamp assembly, and a plurality of side polishing devices and a center polishing disk in the polishing unit can perform overall polishing on the inner wall of the quartz tube during synchronous rotation, with high polishing efficiency. The tube pushing device also used therein can provide axial reciprocating push to the quartz tube, thereby enabling the side polishing devices and the center polishing disk in the polishing unit to perform fine polishing and rough polishing operations on various locations of the inner wall of the quartz tube, thereby ensuring the consistency and uniformity of the polishing; especially during the polishing operation, the center polishing disk is centrally arranged with the quartz tube, and the polishing plate on its outer circumference can achieve uniform polishing of the entire circumference during rotation, thereby avoiding the problem of over-polishing or under-polishing of a local part; and the side polishing device adopts eccentric contact with the quartz tube, which can concentrate the pressure in the contact area during high-speed rotation operation, thereby improving the local cutting force, and the material removal efficiency is 20% to 30% higher than that of the coaxial method, while enhancing the consistency of the surface texture. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a structural schematic diagram of the pipe clamp assembly in the present invention; Figure 3 It is a structural schematic diagram of the pipe pushing device in the present invention; Figure 4 It is a schematic diagram of the overall structure of the polishing unit in the present invention; Figure 5 Schematic diagram of the internal structure of the polishing unit in the present invention; Figure 6 for Figure 5 A schematic diagram of the structure enlargement in the middle; Figure 7 It is a schematic diagram of the connection structure of the fixed rod, the external teeth and the driven teeth in the present invention; In the figure: 1, workbench; 11, circuit board; 12, guide bar; 13, positioning seat; 2, pipe clamp assembly; 21, clamping base; 22, movable clamp seat; 23, inner lining plate; 24, locking cylinder; 25, roller unit; 26, carrier seat; 27, runner mechanism; 3, polishing unit; 31, fixed shaft; 32, central polishing disc; 33, shaft plate; 34, transmission gear; 35, toothed ring; 36, rotating shaft; 37, first internal tooth; 4, push tube device; 41, side plate; 42, pulsed pneumatic actuator; 43, dial plate; 5, side polishing device; 51, bushing seat; 52, roller frame; 53, side polishing roller; 54, second internal tooth; 55, driven gear; 56, external tooth; 57, guide shaft; 58, fixed rod; 6, polishing plate; 61, sealing cavity; 62, sealing ring; 63, annular structure cavity; 64, through hole; 65, oil passage. Specific implementation manner

[0016] Please refer to Figures 1 - 7 , in the embodiment of the present invention, a hydroxyl-removing polishing device for the inner wall of a quartz tube includes a workbench 1, and two parallel-distributed pipe clamp assemblies 2 are symmetrically arranged on the upper end surface thereof. The pipe clamp assembly 2 is provided with a coaxial positioning hole for horizontally clamping a quartz tube to be processed; thus, during use, the staff can horizontally place the quartz tube to be processed in the positioning holes of the two pipe clamp assemblies 2. One side of the upper end surface of the workbench 1 is vertically fixed with a circuit board 11. A plurality of guide bars 12 are horizontally fixed on the circuit board 11. A positioning seat 13 is installed on the guide bars 12. One end of the positioning seat 13 close to the circuit board 11 is provided with a polishing unit 3, and one end of the polishing unit 3 coaxially extends into the inner cavity of the quartz tube; the overall length of the polishing unit 3 is slightly less than the length of the quartz tube to be processed, but greater than three-fourths of the length of the quartz tube, ensuring the integrity during the polishing operation and avoiding missed polishing. On the workbench 1, push tube devices 4 for axially advancing the quartz tube are arranged on both outer sides of the two pipe clamp assemblies 2. The push tube device 4 can provide axial reciprocating advancement to the quartz tube, thereby ensuring that every part of its inner wall can be fully polished, achieving a better polishing effect with better integrity. Moreover, during the polishing operation, there is no need to adjust the position of the polishing unit 3, ensuring polishing consistency, improving the uniformity of the polished surface, and greatly improving work efficiency.

[0017] In this embodiment, the pipe clamp assembly 2 includes a clamping base 21, which is fixed on the workbench 1 by bolts. A movable clamp seat 22 is vertically slidably connected to the upper end surface of the clamping base 21. Arc-shaped positioning grooves are provided in both the movable clamp seat 22 and the clamping base 21, and an inner lining plate 23 is fixed in the arc-shaped positioning grooves. One side of the clamping base 21 is fixedly provided with a locking cylinder 24, and the output end of the locking cylinder 24 is connected to the movable clamping seat 22. The locking cylinder 24 can realize the positioning and clamping of the quartz tube under telescopic control.

[0018] As a preferred embodiment, a plurality of roller units 25 are evenly distributed on the arc-shaped inner wall of each of the inner lining plates 23; and a carrier 26 is fixedly provided on one side of the workbench 1 where one of the tube clamping assemblies 2 is located. A rotatable wheel mechanism 27 is inclinedly installed on the carrier 26 and is in contact with the outer wall of the quartz tube. Therefore, during the polishing operation of the quartz tube, the rotatable wheel mechanism 27 can continuously rotate to keep the quartz tube rotating at a low speed. It should be noted that its rotation direction is opposite to the fine polishing rotation direction of the polishing unit 3.

[0019] In this embodiment, the polishing unit 3 includes a fixed shaft 31 which is horizontally fixed on the positioning seat 13 and penetrates through the machine plate 11. A plurality of central polishing discs 32 are equidistantly distributed on the fixed shaft 31; And a plurality of side polishing devices 5 are also assembled on the fixed shaft 31. The side polishing devices 5 and the central polishing discs 32 are alternately distributed along the axial direction of the fixed shaft 31. Among them, the central polishing discs 32 can realize the rough polishing operation of the inner wall of the quartz tube during the rotational movement, and the side polishing devices 5 can realize the fine polishing operation of the inner wall of the quartz tube. Therefore, during the specific polishing, the push tube device 4 intermittently pushes the quartz tube to perform axial reciprocating movement, so as to ensure that different regions of the inner wall of the quartz tube can pass through the rough polishing and fine polishing regions in sequence, thereby realizing an overall uniform polishing effect and ensuring the consistency and stability of the inner wall polishing; it should be noted that the plurality of side polishing devices 5 are in eccentric contact with the quartz tube. In this way, during the high-speed rotation operation, the pressure can be concentrated in the contact area, and the contact stress distribution shows a gradient characteristic (the peak pressure can reach 1.5 - 2.5 MPa), which is 3 - 4 times that of coaxial contact. The local cutting force is increased, and the material removal efficiency is 20% - 30% higher than that of the coaxial method, so that the crushing efficiency of the hydroxyl layer is improved (the crushing rate > 90%), and at the same time, the surface texture consistency is enhanced; in particular, in combination with the pushing action of the push tube device 4, the eccentric rotation is superimposed on the axial feed to form a composite trajectory of a spiral line + a cycloid (the trajectory density is increased by 50%), avoiding the repeated patterns generated by coaxial polishing; and the high pressure in the eccentric contact area leads to a micro-region temperature rise (80 - 100 °C), promoting the thermal dissociation of hydroxyl groups (the activation energy is reduced by 30%); the non-contact area can be quickly cooled by the coolant (the temperature difference gradient < 10 °C / mm), and the intermittent high-pressure contact reduces the overall heat accumulation, and the thermal expansion amount of the tube body is controlled within ±2 μm / m (coaxial continuous contact results in > 10 μm / m).

[0020] In this embodiment, a shaft plate 33 is coaxially fixed on one side of each central polishing disc 32 on the fixed shaft 31. A connecting shaft is eccentrically rotatably arranged on each shaft plate 33 through a bearing, and a transmission gear 34 is fixed at one end of the connecting shaft; a toothed ring 35 is coaxially fixed at one end of the central polishing disc 32 close to the shaft plate 33, and the transmission gear 34 meshes with the toothed ring 35; A rotating shaft 36 is rotatably arranged in the fixed shaft 31. An internal gear 37 is sleeved on the rotating shaft 36 at each shaft plate 33. The internal gear 37 is correspondingly meshed and driven with the transmission gear 34. That is to say, in the specific polishing operation, the rotating shaft 36 continuously rotates in a circle through an external driving part, while the fixed shaft 31 is in a static state. At this time, each central polishing disc 32 can be driven to rotate through the conduction of the internal gear 37. The rotation direction is opposite to that of the rotating shaft 36, and the rotation direction of the central polishing disc 32 is the same as that of the quartz tube. It can rotate relative to the quartz tube at a high speed, so as to realize the rough polishing operation of the inner wall of the quartz tube.

[0021] In this embodiment, a plurality of polishing plates 6 that can slide radially are evenly distributed along the circumference on the circumferential side wall of the central polishing disc 32. Each polishing plate 6 is radially slidably connected to the central polishing disc 32 through a sliding pair. A sealing cavity 61 corresponding to each polishing plate 6 is opened in the central polishing disc 32. A sealing plug fixedly connected to the corresponding polishing plate 6 is slidably assembled in each sealing cavity 61; the polishing plates 6 can be disassembled and replaced, which is convenient for adapting to different polishing industries. It should be noted that a spring is installed in the sealing cavity 61, and it can make the polishing plates 6 contract towards the center of the central polishing disc 32 under the action of elastic force; A sealing ring 62 is coaxially fixed in the central polishing disc 32. The sealing ring 62 is sealingly rotatably sleeved outside the fixed shaft 31, and the two are sealingly matched to form an annular structure cavity 63. A plurality of through holes 64 are circumferentially opened in the sealing ring 62, and each through hole 64 is correspondingly communicated with the sealing cavity 61; An oil passage 65 is opened in the fixed shaft 31. The oil passage 65 is communicated with each annular structure cavity 63. Hydraulic oil is conveyed in the oil passage 65, and it can enter each annular structure cavity 63 under the high-pressure transmission of a hydraulic pump, so as to enter the sealing cavity 61 through the through holes 64, so as to radially push each polishing plate 6 on the circumference of the central polishing disc 32, so that the polishing plates 6 can better fit the inner wall of the quartz tube during rotation, thereby enhancing the polishing effect.

[0022] As a preferred embodiment, the side polishing device 5 includes two symmetrically arranged sleeve seats 51. Both sleeve seats 51 are sleeved on the fixed shaft 31; a roller frame 52 parallel to the fixed shaft 31 is installed on one side of the sleeve seat 51, and a side polishing roller 53 is rotatably connected to the roller frame 52; A second internal gear 54 is sleeved on the rotating shaft 36, and a driven gear 55 is rotatably arranged outside the fixed shaft 31. The second internal gear 54 meshes with the driven gear 55. One side of the roller frame 52 is rotatably provided with an external gear 56 fixed to the side polishing roller 53, and the external gear 56 meshes with the driven gear 55. Among them, the side polishing roller 53 can rotate in the same direction as the rotating shaft 36 under the conduction of the driven gear 55 and in the opposite direction to the rotating direction of the quartz tube, further enhancing the polishing effect.

[0023] In this embodiment, the bushing seat 51 is rotatably connected to the fixed shaft 31, and a guide shaft 57 is slidably connected to the bushing seat 51. The other end of the guide shaft 57 is fixed to the roller frame 52; One side of the driven gear 55 is rotatably connected to a fixed rod 58, and the other end of the fixed rod 58 is rotatably connected to the external gear 56.

[0024] In this embodiment, a telescopic pusher (not shown in the figure) is arranged outside the fixed shaft 31, and the power output end of the telescopic pusher is connected to the fixed rod 58. That is to say, under the telescopic push of the telescopic pusher, the bushing seat 51 can be deflected around the axis of the fixed shaft 31. At this time, since the external gear 56 and the driven gear 55 are connected by the fixed rod 58, the external gear 56 and the driven gear 55 are always in mesh. Therefore, when the bushing seat 51 deflects, a relative sliding occurs between the roller frame 52 and the bushing seat 51 through the guide shaft 57, thereby changing the center distance between the external gear 56 and the fixed shaft 31, effectively adjusting the polishing intensity of the side polishing roller 53 (when the extension line of the fixed rod 58 and the center of the fixed shaft 31 are on the same straight line, this is the maximum polishing distance of the side polishing roller 53).

[0025] In this embodiment, the tube pushing device 4 includes a side plate 41, which is slidably and position-adjustably installed on the workbench 1. A pulsed pneumatic actuator 42 is horizontally fixed on the side plate 41. The output ends of the pulsed pneumatic actuators 42 are both fixed with vertically arranged dial plates 43, and the upper ends of the dial plates 43 are in abutting contact with the outer wall of the quartz tube nozzle; The pulsed pneumatic actuators 42 in the two tube pushing devices 4 cooperate with each other and realize an alternating axial pushing and resetting cycle through the main control system.

[0026] The above is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.

Claims

1. A quartz tube inner wall dehydroxylation polishing device, characterized in that: The invention comprises a workbench (1), on the upper end surface of which two tube clamp assemblies (2) are symmetrically arranged in parallel, and the tube clamp assemblies (2) are provided with coaxial positioning holes for horizontally clamping a quartz tube to be processed; an organic plate (11) is vertically fixed on one side of the upper end surface of the workbench (1), a plurality of guide rods (12) are transversely fixed on the plate (11), a positioning seat (13) is installed on the guide rod (12), and a polishing unit (3) is arranged on the side of the axial end surface of the positioning seat (13) close to the plate (11), and one end of the polishing unit (3) coaxially extends into the inner cavity of the quartz tube; a tube pushing device (4) for axially pushing the quartz tube is arranged on the outer sides of the two tube clamp assemblies (2) on the workbench (1); The polishing unit (3) comprises a fixed shaft (31) which is transversely fixed on a positioning seat (13) and is arranged through the machine plate (11); a plurality of center polishing discs (32) are evenly distributed on the fixed shaft (31); and a plurality of side polishing devices (5) are also mounted on the fixed shaft (31); the side polishing devices (5) and the center polishing discs (32) are alternately distributed along the axial direction of the fixed shaft (31); the side polishing devices (5) comprise two shaft sleeve seats (51) which are symmetrically arranged, and the two shaft sleeve seats (51) are both sleeved on the fixed shaft (31); a roller frame (52) parallel to the fixed shaft (31) is installed on one side of the shaft sleeve seat (51), and a side polishing roller (53) is rotatably connected to the roller frame (52).

2. A quartz tube inner wall dehydroxylation polishing device according to claim 1, characterized in that: The pipe clamp assembly (2) comprises a clamping base (21) which is fixed to the workbench (1) by bolts, the upper end surface of the clamping base (21) is vertically slidably connected to a movable clamping base (22), the movable clamping base (22) and the clamping base (21) are both provided with arc-shaped positioning grooves, and an inner lining plate (23) is fixed in the arc-shaped positioning groove; A locking cylinder (24) is fixed to one side of the clamping base (21), and an output end of the locking cylinder (24) is connected to the movable clamping base (22).

3. A quartz tube inner wall dehydroxylation polishing device according to claim 2, characterized in that: A plurality of roller units (25) are evenly distributed on the arc-shaped inner wall of each of the inner lining plates (23); and a carrier (26) is fixed on one side of one of the tube clamp assemblies (2) on the workbench (1), and a slidably adjustable rotating wheel mechanism (27) is obliquely mounted on the carrier (26), and the rotating wheel mechanism (27) is in contact with the outer wall of the quartz tube.

4. A quartz tube inner wall dehydroxylation polishing device according to claim 1, characterized in that: A shaft plate (33) is coaxially fixed on the fixed shaft (31) at one side of each center throwing disc (32), and a connecting shaft is eccentrically rotatably arranged on each shaft plate (33) via a bearing, and a transmission tooth (34) is fixed on one end of the connecting shaft; a gear ring (35) is coaxially fixed on one end of the center throwing disc (32) close to the shaft plate (33), and the transmission tooth (34) meshes with the gear ring (35); A rotating shaft (36) is rotatably arranged inside the fixed shaft (31), and each shaft plate (33) is sleeved with an inner tooth (37) on the rotating shaft (36), and the inner tooth (37) is meshed with the transmission tooth (34) for transmission.

5. A quartz tube inner wall dehydroxylation polishing device according to claim 4, characterized in that: A plurality of radially slidable polishing plates (6) are evenly distributed along the circumference on the circumferential side wall of the central polishing disc (32), each polishing plate (6) being radially slidably connected to the central polishing disc (32) via a sliding pair, a sealing cavity (61) corresponding to each polishing plate (6) is provided in the central polishing disc (32), and a sealing plug fixedly connected to the corresponding polishing plate (6) is slidably mounted in each sealing cavity (61); A sealing ring (62) is coaxially fixed inside the central throwing disc (32), and the sealing ring (62) is sealingly rotatably sleeved outside the fixed shaft (31), and the two cooperate in a sealing manner to form an annular structural cavity (63). The sealing ring (62) is provided with a plurality of through holes (64) in the circumferential direction, and each of the through holes (64) is correspondingly connected to the sealing cavity (61); An oil passage (65) is provided in the fixed shaft (31), and the oil passage (65) is in communication with each annular structure cavity (63).

6. A quartz tube inner wall dehydroxylation polishing device according to claim 5, characterized in that: The rotating shaft (36) is sleeved with a second inner tooth (54), and the fixed shaft (31) is rotatably provided with a driven tooth (55), the second inner tooth (54) meshing with the driven tooth (55), and one side of the roller frame (52) is rotatably provided with an outer tooth (56) fixed to the side throwing roller (53), the outer tooth (56) meshing with the driven tooth (55).

7. A quartz tube inner wall dehydroxylation polishing device according to claim 6, characterized in that: The shaft sleeve seat (51) is rotatably connected to the fixed shaft (31), and a guide shaft (57) is slidably connected to the shaft sleeve seat (51), and the other end of the guide shaft (57) is fixed to the roller frame (52); One side of the driven tooth (55) is rotatably connected to a fixing rod (58), and the other end of the fixing rod (58) is rotatably connected to the external tooth (56).

8. A quartz tube inner wall dehydroxylation polishing device according to claim 7, characterized in that: A telescopic propeller is disposed outside the fixed shaft (31), and a power output end of the telescopic propeller is connected to the fixed rod (58).

9. A quartz tube inner wall dehydroxylation polishing device according to claim 1, characterized in that: The tube pushing device (4) comprises a side plate (41) which is slidably positioned and adjustable on the workbench (1); a pulse pneumatic actuator (42) is laterally fixed on the side plate (41); a vertically arranged shifting plate (43) is fixed to the output end of each pulse pneumatic actuator (42); and the upper end of the shifting plate (43) is in contact with the outer wall of the quartz tube orifice; The pulsed pneumatic actuators (42) in the two tube pushing devices (4) work in coordination with each other and realize alternating axial pushing and resetting cycles through a main control system.

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