Optical coating process cavity and multi-cavity continuous vacuum coating machine thereof

Abstract

The invention discloses an optical coating process cavity and a multi-chamber continuous vacuum coating machine thereof.The optical coating process cavity comprises a cavity body, the cavity body is provided with an outlet and an inlet, the outlet and the inlet of the cavity body are formed in the two adjacent faces of the cavity body, and arc-shaped cavity walls are arranged at the opposite positions of the intersection of the faces where the outlet and the inlet of the cavity body are located; the center of the circumference where the arc-shaped cavity wall is located coincides with the rotating center of the rotating frame in the cavity, a film coating assembly is arranged on the arc-shaped cavity wall, the arc-shaped cavity wall deviates to one side of the cavity, and a space is reserved on the other side of the cavity and serves as a matched device installation wall. The multi-cavity continuous vacuum coating machine comprises a pretreatment cavity, at least one optical coating process cavity and a post-treatment cavity which are sequentially connected together, and an inlet of the pretreatment cavity is connected with an outlet of the post-treatment cavity through a connecting platform. The coating efficiency is high.

Description

Technical Field

[0001] The present invention relates to the technical field of multi-chamber vacuum coating, and particularly relates to an optical coating process chamber and a multi-chamber continuous vacuum coating machine. Background Art

[0002] A multi-chamber vacuum coating machine refers to a coating machine in which two or more vacuum chambers are connected in series. The types of vacuum chambers include a pre-treatment chamber, an optical coating process chamber, a post-treatment chamber, etc. A gate valve is provided between the vacuum chambers to seal off or open the vacuum chambers through the gate valve. The workpiece is installed on a turntable, and the turntable needs to automatically rotate between different chambers. When it rotates into the optical coating process chamber, the top of the turntable rotatably arranged on the lifting assembly will support under the turntable to lift the turntable, so that the top of the turntable is connected to the rotating assembly at the top of the chamber, and then the rotating assembly drives the turntable to rotate to achieve uniform coating.

[0003] In the existing multi-chamber vacuum coating machines, multiple vacuum chambers are arranged in a straight line. The inlet and outlet of the multi-chamber vacuum coating machine are located at both ends. The inlet and outlet of the optical coating process chamber therein are also arranged at both ends. The operation of the turntable in the optical coating process chamber is also in a straight line. For example, a multi-chamber vacuum magnetron sputtering coating device disclosed in a Chinese patent with the application number 202122000052.7 includes a plurality of continuously arranged vacuum chambers, and all the plurality of vacuum chambers are located on a straight line. Its coating chamber is the above-mentioned optical coating process chamber, and the inlet and outlet of its coating chamber are located at the left and right ends.

[0004] However, both the above-mentioned existing optical coating process chamber and the multi-chamber vacuum coating machine adopting the existing optical coating process chamber have the problem that the coating distance is relatively large, resulting in a reduction in coating efficiency. For example, Figure 3 As shown, since the inlet and outlet of the existing optical coating process chamber are located at the left and right ends, and the turntable passes through the existing optical coating process chamber in a straight line, the positions of multiple coating components can only be arranged on one of the upper and lower chamber walls, and other devices are arranged on the opposite chamber wall. To ensure uniform coating, multiple coating components need to be arranged on a circumference that coincides with the rotation center of the turntable. In order to prevent the coating components at both ends from interfering with the movement of the turntable, the diameter of the circumference where the coating components are located must be large enough, which results in a relatively large distance between the coating components and the turntable. Since the closer the distance between the coating components and the workpiece on the turntable, the higher the coating efficiency. For example, for a distance of 100 mm, the coating process can be completed in about 20 minutes, while when the distance is 170 mm, the coating process takes about 25 minutes to complete. Therefore, a relatively large distance will affect the overall coating efficiency. Summary of the Invention

[0005] The first object of the present invention is to provide an optical coating process chamber.

[0006] The second object of the present invention is to provide a multi-chamber continuous vacuum coating machine employing the aforesaid optical coating process chamber.

[0007] The first object of the present invention is achieved by the following technical solution:

[0008] An optical coating process chamber, characterized in that: it includes a cavity body, the cavity body is provided with an outlet and an inlet, the outlet and the inlet of the cavity body are arranged on two adjacent surfaces of the cavity body, an arc-shaped cavity wall is arranged at a position opposite to the intersection of the surfaces where the outlet and the inlet of the cavity body are located, the center of the circumference where the arc-shaped cavity wall is located coincides with the rotation center of the turntable in the cavity body, a coating component is arranged on the arc-shaped cavity wall, and the arc-shaped cavity wall is biased towards one side of the cavity body, while a space is reserved on the other side as an installation wall for supporting devices.

[0009] A further technical solution of the present invention is that: the two surfaces where the outlet and the inlet of the cavity body are located are perpendicular to each other.

[0010] A further technical solution of the present invention is that: the installation wall for supporting devices is a straight cavity wall.

[0011] A further technical solution of the present invention is that: the coating component is a sputtering source or an evaporation source.

[0012] A further technical solution of the present invention is that: a lifting component and a turntable transmission and commutation mechanism capable of conveying the turntable and commuting the conveying direction are arranged at the bottom of the cavity body, and a rotation component is arranged at the top of the cavity body.

[0013] The second object of the present invention is achieved by the following technical solution:

[0014] A multi-chamber continuous vacuum coating machine, characterized in that: it includes a pre-treatment chamber, at least one of the aforesaid optical coating process chambers and a post-treatment chamber which are connected together in sequence, and the inlet of the pre-treatment chamber and the outlet of the post-treatment chamber are connected through a connection platform.

[0015] A further technical solution of the present invention is that: the number of optical coating process chambers of the multi-chamber continuous vacuum coating machine is two, namely a first optical coating process chamber and a second optical coating process chamber, the pre-treatment chamber is connected to the first optical coating process chamber, the post-treatment chamber is connected to the second optical coating process chamber, and the pre-treatment chamber and the post-treatment chamber are located on the same side.

[0016] A further technical solution of the present invention is as follows: The multi-chamber continuous vacuum coating machine has two optical coating process chambers, namely a first optical coating process chamber and a second optical coating process chamber. The pretreatment chamber is connected to the first optical coating process chamber, and the post-treatment chamber is connected to the second optical coating process chamber, and the pretreatment chamber and the post-treatment chamber are located on opposite sides.

[0017] A further technical solution of the present invention is as follows: The chambers of the multi-chamber continuous vacuum coating machine are arranged continuously in a stepped shape.

[0018] A further technical solution of the present invention is as follows: The chambers of the multi-chamber continuous vacuum coating machine are arranged continuously in an S shape.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. In the optical coating process chamber of the present invention, the outlet and inlet of the chamber are arranged on two adjacent surfaces of the chamber, and the coating assembly is arranged on the arc-shaped chamber wall at the position opposite to the intersection of the surfaces where the outlet and inlet of the chamber are located. The path of the turntable passing through the optical coating process chamber will no longer be a straight line but have a corner, so that the coating assembly can be arranged closer to the turntable without affecting the movement of the turntable, thereby improving the coating efficiency.

[0021] 2. The multi-chamber continuous vacuum coating machine of the present invention adopts the above-mentioned optical coating process chamber, and its coating efficiency is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the internal layout structure of the optical coating process chamber in Embodiment 1 of the present invention;

[0023] Figure 2 is a schematic diagram of the internal layout structure of the chambers of the multi-chamber continuous vacuum coating machine in Embodiment 1 of the present invention;

[0024] Figure 3 is a simplified schematic diagram of the movement of the turntable in the existing optical coating process chamber;

[0025] Figure 4 is a simplified schematic diagram of the movement of the turntable in the optical coating process chamber in Embodiment 1 of the present invention;

[0026] Figure 5 is a top view schematic diagram of the multi-chamber continuous vacuum coating machine in Embodiment 1 of the present invention;

[0027] Figure 6 is a top view schematic diagram of the connection platform in Embodiment 1 of the present invention;

[0028] Figure 7 is a front view schematic diagram of the multi-chamber continuous vacuum coating machine in Embodiment 1 of the present invention;

[0029] Figure 8 is a top view schematic diagram of the turntable transmission and commutation mechanism of the embodiment of the present invention;

[0030] Figure 9 is a side view schematic diagram of the turntable transmission and commutation mechanism of the first embodiment of the present invention;

[0031] Figure 10 is a bottom view schematic diagram of the turntable transmission and commutation mechanism of the first embodiment of the present invention;

[0032] Figure 11 is a structural schematic diagram of the cooperation between the transmission wheel and the turntable of the first embodiment of the present invention;

[0033] Figure 12 is a top view schematic diagram of the linear conveying mechanism of the first embodiment of the present invention;

[0034] Figure 13 is a side view schematic diagram of the linear conveying mechanism of the first embodiment of the present invention;

[0035] Figure 14 is a side view schematic diagram of the intermediate conveying mechanism of the first embodiment of the present invention;

[0036] Figure 15 is a top view schematic diagram of the intermediate conveying mechanism of the first embodiment of the present invention;

[0037] Figure 16 is a side view schematic diagram of the support mechanism of the first embodiment of the present invention;

[0038] Figure 17 is a top view schematic diagram of the support mechanism of the first embodiment of the present invention;

[0039] Figure 18 is a structural schematic diagram of the turntable in the process of entering the pre-treatment chamber in the first embodiment of the present invention;

[0040] Figure 19 is a structural schematic diagram of the turntable when it completely enters the pre-treatment chamber in the first embodiment of the present invention;

[0041] Figure 20 is a structural schematic diagram of the turntable in the process of entering the first optical coating process chamber in the first embodiment of the present invention;

[0042] Figure 21 is a structural schematic diagram of the turntable when it completely enters the first optical coating process chamber in the first embodiment of the present invention;

[0043] Figure 22 is a structural schematic diagram of the turntable in the process of entering the second optical coating process chamber in the first embodiment of the present invention;

[0044] Figure 23 It is a schematic structural diagram when the turntable in the first embodiment of the present invention completely enters the second optical coating process chamber;

[0045] Figure 24 It is a schematic structural diagram of the turntable in the first embodiment of the present invention during the process of entering the post-treatment chamber;

[0046] Figure 25 It is a schematic structural diagram when the turntable in the first embodiment of the present invention completely enters the post-treatment chamber.

[0047] Figure 26 It is a top view schematic diagram of the multi-chamber continuous vacuum coating machine in the second embodiment of the present invention;

[0048] Figure 27 It is a top view schematic diagram of the multi-chamber continuous vacuum coating machine in the third embodiment of the present invention;

[0049] Figure 28 It is a top view schematic diagram of the multi-chamber continuous vacuum coating machine in the fourth embodiment of the present invention.

[0050] Meanings of the reference numerals in the figure:

[0051] 1 - Rotating plate; 1.1 - Reserved hole; 2 - Transmission wheel; 2.1 - Guide groove; 3 - Chain; 4 - Driven rotating shaft; 5 - Wheel seat; 6 - Position sensor; 7 - Driven gear; 8 - Sealed box body; 9 - Turntable transmission and commutation mechanism; 10 - Driving rotating shaft; 11 - Sprocket; 12 - Conveyor motor; 13 - Fixed seat; 14 - Rotating motor; 15 - Motor mounting frame; 16 - Shaft connector; 17 - Magnetic fluid sealing device; 18 - Bottom of the chamber; 19 - Driving gear; 20 - Outer hub of bearing; 21 - Turntable; 22 - Guide rail; 23 - Pretreatment chamber; 24 - First optical coating process chamber; 25 - Second optical coating process chamber; 26 - Post-treatment chamber; 27 - Lifting assembly; 28 - Connection platform; 29 - Linear conveying mechanism; 30 - Hatch door; 31 - Plug valve; 32 - Vacuum pumping device; 33 - Coating assembly; 34 - Installation vacancy for coating assembly; 35 - Support mechanism; 36 - Intermediate conveying mechanism; 37 - Cryogenic device and molecular pump; 38 - Heating device; 39 - Second fixing plate; 40 - Second reserved hole; 41 - Second conveyor motor; 42 - Lifting seat; 43 - Third fixing plate; 44 - Third conveyor motor; 45 - Second motor mounting frame; 46 - Driving helical gear; 47 - Driven helical gear; 48 - First fixing plate; 49 - Arc-shaped chamber wall; 50 - Mounting wall for supporting device; 51 - Entrance of the chamber; 52 - Exit of the chamber; 53 - Entrance of the four-chamber vacuum coating machine; 54 - Exit of the four-chamber vacuum coating machine; 55 - Circumference where the coating assembly is located; 56 - Moving path of the turntable. Detailed implementation manners

[0052] The present invention will be further described below in conjunction with embodiments.

[0053] Embodiment 1:

[0054] As Figure 1 shown, the optical coating process chamber of this embodiment includes a chamber body, the chamber body is provided with an outlet and an inlet, the outlet 52 of the chamber body and the inlet 51 of the chamber body are arranged on two adjacent and perpendicular planes of the chamber body, and an arc-shaped chamber wall 49 is arranged at a position opposite to the intersection of the planes where the outlet 52 and the inlet 51 of the chamber body are located. The center of the circle where the arc-shaped chamber wall 49 is located coincides with the rotation center of the turntable in the chamber body, and the coating assembly 33 is arranged on the arc-shaped chamber wall ( Figure 1 the coating assembly 33 is not shown in , only the installation space 34 for the coating assembly is shown), and a plurality of coating assemblies 33 are arranged in sequence on the circumference of the arc-shaped chamber wall 33. During coating, the distance between the coating assembly 33 on the arc-shaped chamber wall 49 and the turntable is equal. Among them, the coating assembly 33 is a sputtering source or an evaporation source.

[0055] Moreover, the arc-shaped chamber wall 49 is biased towards one side of the chamber body, specifically towards the side where the outlet 52 or the inlet 51 of the chamber body is located, and a space is reserved on the other side as the installation wall 50 for supporting devices. The installation wall 50 for supporting devices in this embodiment is a straight chamber wall. Other devices required for the coating process, such as a cryogenic device and a molecular pump 37, can be installed on the installation wall 50 for supporting devices.

[0056] In this embodiment, a lifting assembly 27 and a turntable transmission and commutation mechanism 9 that can convey the turntable and change the conveying direction are provided at the bottom of the chamber body, and a rotating assembly is provided at the top of the chamber body. During use, the turntable and the workpieces thereon will be conveyed together from the inlet 51 of the chamber body to the turntable transmission and commutation mechanism 9, and then the turntable 21 and the workpieces thereon will be lifted together by the lifting assembly 27 so that the upper end of the turntable 21 is connected to the rotating assembly, and then the rotating assembly drives the turntable to rotate to coat the workpieces on the turntable 21. After the coating process is completed, the lifting assembly 27 descends, the turntable 21 falls back to the transmission and commutation mechanism, and then the transmission and commutation mechanism 9 drives the turntable 21 to rotate and change the direction, and the conveying direction will be towards the outlet 52 of the chamber body, and finally the turntable 21 and the workpieces thereon will be output from the outlet together.

[0057] During use, the path of the turntable 21 passing through the optical coating process chamber will no longer be a straight line but have a turning angle. The path of this embodiment has a right-angle turn. This enables the coating assembly 33 to be arranged at a position closer to the turntable 21 without affecting the movement of the turntable 21, thereby improving the coating efficiency. To better understand why the distance can be closer, we have drawn Figure 3 and Figure 4The schematic diagram shown is specifically explained as follows: Taking the coating assembly 33 with two cylindrical targets 33.1 as an example, three sets of coating assemblies 33 are arranged circumferentially on the cavity wall of the cavity according to process requirements. Figure 3 and Figure 4 The diameter of the turntable 21 is 2000 mm. Figure 3 Fig. is a schematic diagram of the turntable 21 in the existing optical coating process cavity. In Figure 3 the moving path 56 of the turntable is a horizontal straight line. Three sets of coating assemblies 33 are arranged on one side wall of the cavity. To ensure that the coating assemblies on the left and right sides do not affect the movement of the turntable 21, the distance between the circumference 55 where the coating assembly is located and the turntable 21 should be large enough. For example Figure 3 in schematic diagram a, when the distance between the circumference 55 where the coating assembly is located and the turntable 21 is only 100 mm, the coating assemblies on the left and right sides will be on the moving path 56 of the turntable, affecting the movement of the turntable 21; as Figure 3 shown in schematic diagram b, only when the distance between the circumference 55 where the coating assembly is located and the turntable 21 increases to 170 mm, the coating assembly will not affect the movement of the turntable. Figure 4 Fig. is a schematic diagram of the turntable 21 in the optical coating process cavity of this embodiment. In Figure 4 the moving path 56 of the turntable 21 is a right-angle turn. Three sets of coating assemblies 33 are arranged on the arc-shaped cavity wall on one side of the cavity. In this way, the coating assemblies 33 can be arranged on a circumference closer to the turntable 21 without affecting the movement of the turntable 21. As Figure 4 shown, when the distance between the circumference 55 where the coating assembly is located and the turntable 21 is only 100 mm, it will not affect the movement of the turntable. And there is a distance requirement between the coating assembly 33 and the surface of the workpiece to be coated. Generally, the closer the distance, the higher the coating efficiency. It can be seen that the coating efficiency of the optical coating process cavity of this embodiment is higher. In actual coating, the coating time is generally about 25 minutes when the distance from the turntable 21 is 170 mm, and the coating time can be shortened to about 20 minutes when the distance from the turntable 21 is 100 mm.

[0058] As Figure 2 and Figure 5 shown is a multi-chamber continuous vacuum coating machine using the above-mentioned optical coating process cavity. It has four chambers, including a pretreatment chamber 23, two optical coating process chambers, and a post-treatment chamber 26 that are connected together in sequence. The two optical coating process chambers are respectively the connected first optical coating process chamber 24 and the second optical coating process chamber 25. The inlet of the pretreatment chamber and the outlet of the post-treatment chamber are connected by a connecting platform. This multi-chamber continuous vacuum coating machine is a four-chamber vacuum coating machine with a rectangular layout. The specific structure is as follows:

[0059] The outlet 23 of the pre-treatment chamber is connected to the inlet of the first optical coating process chamber 24. The outlet of the first optical coating process chamber 24 is connected to the inlet of the second optical coating process chamber 25. The outlet of the second optical coating process chamber 25 is connected to the inlet of the post-treatment chamber 26. The inlet of the pre-treatment chamber 23 and the outlet of the post-treatment chamber 26 are the inlet and outlet of the four-chamber vacuum coating machine. The pre-treatment chamber 23 and the post-treatment chamber 26 are located on the same side, so that the inlet and outlet of the four-chamber vacuum coating machine are on the same side. A preferred solution is that the inlet 53 of the four-chamber vacuum coating machine is on the left side, and the outlet 54 of the four-chamber vacuum coating machine is on the right side.

[0060] The specific processes of the pre-treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25, and the post-treatment chamber 26 are not fixed. According to needs, corresponding devices can be installed in the pre-treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25, and the post-treatment chamber 26 to achieve different treatment processes. For example: A heating device 38, a cryogenic device, and a molecular pump 37 can be selected to be installed on the chamber wall of the pre-treatment chamber 23 to pre-treat the workpieces on the turntable 21 in the pre-treatment chamber 23; Different coating components 33, a cryogenic device, and a molecular pump 37 can be selected to be installed in the first optical coating process chamber 24 and the second optical coating process chamber 25 to deposit different film layers; A cryogenic device and a molecular pump 37 can be selected to be installed in the post-treatment chamber 26 to perform subsequent process treatment.

[0061] In this embodiment, both the first optical coating process chamber 24 and the second optical coating process chamber 25 are provided with arc-shaped chamber walls 49 at positions opposite to the intersection of the planes where their inlets and outlets are located. The coating components 33 of the first optical coating process chamber 24 and the second optical coating process chamber 25 are installed on the arc-shaped chamber walls 49. In this embodiment Figure 2 The coating component 33 is not shown, only the installation space 34 for the coating component is shown. In this embodiment, the arc-shaped chamber wall 49 of the first optical coating process chamber 24 is biased towards the side where its inlet is located, and the arc-shaped chamber wall 49 of the second optical coating process chamber 25 is biased towards the side where its outlet is located.

[0062] Of course, a slide valve 31 is provided between the connected chambers. When a chamber needs to be evacuated for operation, the chamber is first sealed off from other chambers through the slide valve 31. Conventional sealable hatches 30 are provided at the inlet of the pre-treatment chamber 23 and the outlet of the post-treatment chamber 26 to close and open the inlet and outlet. Conventional lifting components 27 are respectively provided at the bottoms of the pre-treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25, and the post-treatment chamber 26, and conventional rotating components are respectively provided at the tops to lift and rotate the turntable 21. The four-chamber vacuum coating machine is also provided with a conventional vacuum pumping device 32 to evacuate the chambers.

[0063] The inlet and outlet of the four-chamber vacuum coating machine are directly connected by a straight connecting platform 28. The connecting length of the connecting platform 28 in this embodiment is small, the conveying distance is short, and the occupied area is small.

[0064] In this embodiment, a turntable transmission and commutation mechanism 9 capable of conveying the turntable and commuting the conveying direction is provided in the first optical coating process chamber 24 and the second optical coating process chamber 25, a linear conveying mechanism 29 capable of conveying the turntable in one direction is provided in the pre-treatment chamber 23 and the post-treatment chamber 29, and intermediate conveying mechanisms 36 for supporting and forwardly conveying the turntable 21 are respectively provided at the outlet of the pre-treatment chamber 23, the inlet of the first optical coating process chamber 24, the outlet of the first optical coating process chamber 24, the inlet of the second optical coating process chamber 25, the outlet of the second optical coating process chamber 25, and the inlet of the post-treatment chamber 26. Support mechanisms 35 are respectively provided at the inlet of the pre-treatment chamber 23, the inlet of the second optical coating process chamber 25, and the outlet of the post-treatment chamber 26.

[0065] As Figures 8 to 10 shown, the specific structure of the turntable transmission and commutation mechanism 9 in this embodiment is: including a fixed seat 13, a rotating plate 1, a rotating motor 14, a first conveying motor 12, and a first transmission wheel set.

[0066] The fixed seat 13 is used for fixedly installing on the bottom 18 of the chamber. The rotating plate 1 is in the shape of a disc and is rotatably arranged on the fixed seat 13 through a conventional bearing. The specific structure is: the outer hub 20 of the bearing is fixedly connected to the lower surface of the rotating plate 1, and the inner hub of the bearing is fixedly connected to the upper surface of the fixed seat 13.

[0067] A first reserved hole 1.1 for installing the lifting component 27 is provided between the fixed seat 13 and the rotating plate 1, so that the turntable transmission and commutation mechanism can be installed in the optical coating process chamber in cooperation without affecting the lifting movement of the lifting component 27 inside the chamber.

[0068] The rotating motor 14 is mounted outside the bottom 18 of the chamber through the first motor mounting bracket 15, below the rotating plate, that is, the rotating motor 14 will be located outside the optical coating process chamber and will not be in the vacuum environment of the optical coating process chamber during use. The upper end of the first motor mounting bracket 15 is fixedly connected to the bottom 18 of the chamber by bolts. The rotating motor 14 is in a vertically mounted state. The bottom 18 of the chamber is connected to a conventional magneto - hydrodynamic sealing device 17. The output shaft of the rotating motor 14 is connected to the lower end of the intermediate shaft of the magneto - hydrodynamic sealing device 17 through a shaft connector 16, and a driving gear 19 is connected to the upper end of the intermediate shaft of the magneto - hydrodynamic sealing device 17, thereby connecting the driving gear 19 to the output shaft of the rotating motor 14 and achieving sealing while driving the driving gear 19 to rotate by the rotating motor 14.

[0069] A driven gear 7 is fixedly connected to the outer hub 20 of the bearing. The driven gear 7 is a quarter - turn gear. The center of the driven gear 7 coincides with the center of the rotating plate 1. The driving gear 7 meshes with the driven gear 7, so that the rotating plate 1 can be driven to rotate by the rotating motor 14.

[0070] There are two sets of the first transmission wheel groups, which are respectively arranged on both sides of the upper surface of the rotating plate. Each set of the first transmission wheel groups respectively includes three transmission wheels 2 located on the same conveying path. The conveying paths of the two sets of the first transmission wheel groups are parallel to each other. The transmission wheels 2 of each first transmission wheel group are connected by a first sprocket assembly. The specific structure is as follows: For each transmission wheel 2 of the first transmission wheel group, a wheel seat 5 is provided. The wheel seat 5 is fixedly installed on the upper surface of the rotating plate 1. The transmission wheel 2 is rotatably installed on the wheel seat 5 through a driven rotating shaft 4. The first sprocket assembly includes a chain 3 and sprockets 11 provided on the driven rotating shaft 4. Sprockets 11 are provided at both ends of the driven rotating shaft 4 located in the middle, and the chain 3 connects the sprockets 11 on the adjacent driven rotating shafts 4.

[0071] In this embodiment, a sealed box body 8 is provided on the rotating plate 1, and the first conveying motor 12 is arranged in the sealed box body 8, thereby isolating the first conveying motor 12 from the vacuum environment in the chamber and solving the problem that the motor is prone to sparking during operation in the vacuum environment.

[0072] The driven rotating shafts 4 at one end of the two sets of the first transmission wheel groups are connected by a driving rotating shaft 10. The first conveying motor 12 and the driving rotating shaft 10 are located at the same end of the rotating plate 1. The first conveying motor 12 is connected to the driven rotating shaft 4 at one end of the driving rotating shaft 10, so that the transmission wheel 2 can be driven to rotate by the first conveying motor 12. The rotational sealing connection between the shaft and the sealed box body 8 can be achieved through a conventional magneto - hydrodynamic sealing device or other conventional sealing structures.

[0073] In this embodiment, a guide groove 2.1 is provided on the periphery of the transmission wheel 2, and the guide groove 2.1 is used to cooperate with the guide rail 22 at the bottom of the turntable 21. As Figure 11As shown, when transporting the transfer rack 21, the bottom of the guide rail 22 will be embedded in the guide groove 2.1.

[0074] As Figure 12 and Figure 13 As shown in the figure, the linear conveying mechanism 29 of this embodiment includes a second fixing plate 39, a second conveying motor 41, and a second transmission wheel set. The second fixing plate 29 is rectangular in shape. The second fixing plate 29 is fixed to the bottom of the chamber through a heightening seat 42. The heightening seat 42 is used to lift the height of the second fixing plate 29. The bottom of the heightening seat 42 is fixedly connected to the bottom of the chamber, and the top is fixedly connected to the second fixing plate 39. A second reserved hole 40 for installing a lifting component is provided in the middle of the second fixing plate 39. The second conveying motor 41 and the second transmission wheel set are both arranged on the upper surface of the second fixing plate 39. The second transmission wheel set is driven by the second conveying motor 41.

[0075] There are two sets of the second transmission wheel sets, which are respectively arranged on both sides of the upper surface of the second fixing plate 39. The structure of the second transmission wheel set is the same as that of the first transmission wheel set, and both include a transmission wheel 2 rotatably installed on a wheel seat 5 through a driven rotating shaft 4. The transmission wheels 2 of each second transmission wheel set are connected by a second sprocket component. The structure of the second sprocket component is also the same as that of the first sprocket component, and both include a chain 3 and a sprocket 11 arranged on the driven rotating shaft 4.

[0076] A sealing box body 8 is also provided on the second fixing plate. The second conveying motor 41 is installed in the sealing box body 8 on the second fixing plate 39.

[0077] The second conveying motor 41 is connected to the driven rotating shaft 4 at one end of the second transmission wheel set, so that the transmission wheel 2 can be driven to rotate through the second conveying motor 41. The rotational sealing connection between the shaft and the sealing box body 8 can be achieved through a conventional magnetic fluid sealing device or other conventional sealing structures.

[0078] As Figure 14 and Figure 15 As shown in the figure, the intermediate conveying mechanism 36 of this embodiment includes a third fixing plate 43, two transmission wheels 2, and a third conveying motor 44. The third fixing plate 43 is long strip-shaped. The two transmission wheels 2 are respectively rotatably installed on the wheel seats 5 at both ends of the third fixing plate 43 through driven rotating shafts 4. The driven rotating shafts 4 at both ends are connected by a driving rotating shaft 10. The outer end of the driven rotating shaft 4 at one end is connected with a driven bevel gear 47.

[0079] The third conveying motor 44 is mounted outside the bottom 18 of the chamber through the second motor mounting bracket 45, that is, the third conveying motor 44 will be located outside the chamber and will not be in the vacuum environment of the chamber during use. The upper end of the second motor mounting bracket 45 is fixedly connected to the bottom 18 of the chamber by bolts. The third conveying motor 44 is vertically mounted. The bottom 18 of the chamber is connected to a conventional magneto - hydrodynamic sealing device 17. The output shaft of the third conveying motor 44 is connected to the lower end of the intermediate shaft of the magneto - hydrodynamic sealing device 17 through a shaft connector 16. And an active bevel gear 46 is connected to the upper end of the intermediate shaft of the magneto - hydrodynamic sealing device 17, so as to connect the active bevel gear 46 with the output shaft of the third conveying motor 44, and realize sealing while driving the active bevel gear 46 to rotate by the third conveying motor 44. The active bevel gear 46 meshes with the driven bevel gear 47, so that the transmission wheel 2 of the intermediate conveying mechanism 36 can be driven by the third conveying motor 44.

[0080] As Figure 16 and Figure 17 shown, the support mechanism 35 of this embodiment includes a first fixing plate 48 and two transmission wheels 2. The first fixing plate 48 is in a long strip shape. The two transmission wheels 2 are respectively rotatably mounted on the wheel seats 5 at both ends of the first fixing plate 48 through driven rotating shafts 4, and the driven rotating shafts 4 at both ends are connected by a driving rotating shaft 10. The transmission wheels 2 of the support mechanism 35 play a transitional support role for the turntable 21 and do not have power.

[0081] This embodiment also has corresponding position sensors 6 on the mechanism. The specific distribution of the position sensors 6 is as follows: a first position sensor 6.1 is provided in front of the support mechanism 35 at the entrance of the pre - treatment chamber 23; a second position sensor 6.2 is provided behind the intermediate conveying mechanism 36 at the exit of the pre - treatment chamber 23; a third position sensor 6.3 and a fourth position sensor 6.4 are respectively provided at both ends of the conveying path of the turntable transmission and commutation mechanism 9 in the first optical coating process chamber 24; a fifth position sensor 6.5 and a sixth position sensor 6.6 are respectively provided at both ends of the conveying path of the turntable transmission and commutation mechanism 9 in the second optical coating process chamber 25; a seventh position sensor 6.7 is provided in front of the intermediate conveying mechanism 36 at the entrance of the post - treatment chamber 26; an eighth position sensor 6.8 is provided behind the support mechanism 35 at the exit of the post - treatment chamber 26. The above - mentioned position sensors 6 are all on the movement path of the guide rail 22 at the bottom of the turntable, and the position sensors 6 are triggered by the contact between the guide rail 22 and the position sensors 6.

[0082] Both ends of the connection platform 28 in this embodiment are respectively close to the inlet 53 and the outlet 54 of the four-chamber vacuum coating machine. Rotating frame transmission and commutation mechanisms 9 are respectively arranged corresponding to the bottoms of both ends of the connection platform 28, and a linear conveying mechanism 29 is arranged in the middle of the connection platform 28, so as to realize the transfer and conveying. In the figure, the linear conveying mechanism 29 in the middle of the connection platform 28 is blocked by the panel, and only the transmission wheel 2 is exposed.

[0083] The operation process of the four-chamber vacuum coating machine in this embodiment is as follows:

[0084] P1, Load the workpiece to be coated onto the rotating frame 21 at one end of the connection platform 28 close to the inlet 53 of the four-chamber vacuum coating machine;

[0085] P2, After loading is completed, the rotating frame transmission and commutation mechanism 9 of the connection platform 28 sends the rotating frame 21 together with the workpiece thereon into the pre-treatment chamber 23. As Figure 18 shown, during the feeding process, the guide rail 22 of the rotating frame 21 first triggers the first position sensor 6.1. After the first position sensor 6.1 is triggered, the second conveying motor 41 of the linear conveying mechanism 29 in the pre-treatment chamber 23 will be started. After the rotating frame 21 continues to enter, the guide rail 22 will be correspondingly clamped onto the transmission wheel 2 of the linear conveying mechanism 29 in the pre-treatment chamber 23. Finally, the rotating frame 21 completely moves onto the linear conveying mechanism 29 in the pre-treatment chamber 23. At this time, the guide rail 22 disengages from the first position sensor 6.1, and the second conveying motor 41 of the linear conveying mechanism 29 stops. At this time, as Figure 19 shown, the hatch door 30 and the corresponding flap valve 31 are closed, and the vacuum is pumped. The rotating frame 21 will stay in the pre-treatment chamber 23 for pre-treatment;

[0086] P3, After the pre-treatment is completed, the corresponding flap valve 31 is opened, and the linear conveying mechanism 29 in the pre-treatment chamber 23 is started to convey the rotating frame 21 to the first optical coating process chamber 24. As Figure 20 shown, during the conveying process, the guide rail 22 first triggers the second position sensor 6.2, and the intermediate conveying mechanism 36 at the outlet of the pre-treatment chamber 23 is started. Then, after entering the first optical coating process chamber 24, the third position sensor 6.3 is triggered, and the intermediate conveying mechanism 36 at the inlet of the first optical coating process chamber 24 and the first conveying motor of the rotating frame transmission and commutation mechanism 9 in the first optical coating process chamber 24 are started. Finally, the rotating frame 21 completely moves onto the rotating frame transmission and commutation mechanism 9 in the first optical coating process chamber 24. At this time, the fourth position sensor 6.4 will be triggered and the motor stops. At this time, as Figure 21 shown, then the corresponding flap valve 31 is closed, and the vacuum is pumped. The first coating process is carried out in the first optical coating process chamber 24;

[0087] After P4 and the completion of the first coating process, the corresponding flap valve 31 opens, and the rotating motor of the turntable transmission and commutation mechanism 9 in the first optical coating process chamber 24 starts, causing the turntable 21 to rotate 90°. Then, the first conveyor motor of the turntable transmission and commutation mechanism 9 in the first optical coating process chamber 24 and the intermediate conveyor mechanism 36 at the outlet of the first optical coating process chamber 24 start to convey it to the second optical coating process chamber 25. As shown in Figure 22 As shown, during the conveying process, when the guide rail 22 triggers the fifth position sensor 6.5, the intermediate conveyor mechanism 36 at the inlet of the second optical coating process chamber 25 and the first conveyor motor of the turntable transmission and commutation mechanism 9 in the second optical coating process chamber 25 start. Finally, the turntable 21 completely moves onto the turntable transmission and commutation mechanism 9 in the second optical coating process chamber 25. At this time, the sixth position sensor 6.6 will be triggered and the motor stops. As shown in Figure 23 As shown, then the corresponding flap valve 31 closes, the vacuum is pumped, and the second coating process is carried out in the second optical coating process chamber 25;

[0088] After P5 and the completion of the second coating process, the corresponding flap valve 31 opens, and the rotating motor of the turntable transmission and commutation mechanism 9 in the second optical coating process chamber 25 starts, causing the turntable 21 to rotate 90°. Then, the first conveyor motor of the turntable transmission and commutation mechanism 9 in the second optical coating process chamber 25 and the intermediate conveyor mechanism 36 at the outlet of the second optical coating process chamber 25 start to convey it to the post-treatment chamber 26. As shown in Figure 24 As shown, during the conveying process, when the guide rail 22 triggers the seventh position sensor 6.7, the intermediate conveyor mechanism 36 and the linear conveyor mechanism 29 in the post-treatment chamber 26 start. Finally, the turntable 21 is conveyed onto the linear conveyor mechanism 29 in the post-treatment chamber 26. At this time, the guide rail disengages from the seventh position sensor 6.7 and the motor stops. As shown in Figure 25 As shown, the corresponding flap valve 31 closes, and post-treatment is carried out in the post-treatment chamber 26;

[0089] After the post-treatment is completed, the hatch 30 and the corresponding flap valve 31 are opened for unloading. The linear conveyor mechanism 29 in the post-treatment chamber 26 starts, and the turntable 21 is transported onto the turntable transmission and commutation mechanism 9 near the outlet of the four-chamber vacuum coating machine on the connection platform 29. When the sensor on the connection platform 28 is triggered, the first conveyor motor of the turntable transmission and commutation mechanism 9 on the connection platform starts. Finally, the turntable 21 completes unloading and stays on the turntable transmission and commutation mechanism 9 on the connection platform 28. The rotating motor of the turntable transmission and commutation mechanism 9 on the connection platform 28 starts and rotates 90°. Then, it is conveyed in cooperation with the linear conveyor mechanism 29 on the connection platform 28. Finally, it reaches the turntable transmission and commutation mechanism 9 on the left side of the connection platform 28. Unloading and loading are carried out here, and then the above steps are repeated to process the workpiece, and so on in a cycle.

[0090] Of course, after the turntable transmission and commutation mechanism 9 completes the rotational commutation and conveys the turntable 21 out, it will rotate back to its original position.

[0091] Embodiment Two:

[0092] The multi-chamber continuous vacuum coating machine of Embodiment Two has multiple chambers, including a pretreatment chamber 23, multiple optical coating process chambers, and a post-treatment chamber 26 that are connected in sequence. After being connected, the chambers are arranged continuously in a stepped shape, as Figure 26 shown.

[0093] Embodiment Three:

[0094] The multi-chamber continuous vacuum coating machine of Embodiment Three also has four chambers, namely a pretreatment chamber 23, a first optical coating process chamber 24, a second optical coating process chamber 25, and a post-treatment chamber 26 that are connected in sequence. However, the pretreatment chamber and the post-treatment chamber are located on opposite sides, making the overall shape Z-shaped, as Figure 27 shown.

[0095] Embodiment Four:

[0096] The multi-chamber continuous vacuum coating machine of Embodiment Four has multiple chambers, including a pretreatment chamber 23, multiple optical coating process chambers, and a post-treatment chamber 26 that are connected in sequence. After being connected, the chambers are arranged continuously in an S shape, as Figure 28 shown.

[0097] The above embodiments of the present invention do not limit the protection scope of the present invention. The implementation manners of the present invention are not limited to this. All these, based on the above content of the present invention, according to the common general technical knowledge and customary means in the art, without departing from the above basic technical idea of the present invention, any other various forms of modification, replacement, or change made to the above structure of the present invention shall fall within the protection scope of the present invention.

Claims

1. An optical coating process chamber, characterized in that: The invention comprises a cavity, wherein the cavity is provided with an outlet and an inlet, wherein the outlet and the inlet of the cavity are arranged on two adjacent surfaces of the cavity, and an arc-shaped cavity wall is arranged at a position opposite to the intersection of the surfaces where the outlet and the inlet of the cavity are located, and the center of the circle where the arc-shaped cavity wall is located coincides with the rotation center of the rotating frame in the cavity, and a coating component is arranged on the arc-shaped cavity wall, and the arc-shaped cavity wall is biased to one side of the cavity, and space is reserved on the other side as a mounting wall for a matching device.

2. The optical coating process chamber according to claim 1, characterized in that: The two surfaces where the outlet and the inlet of the cavity are located are perpendicular to each other.

3. The optical coating process chamber according to claim 1, characterized in that: The matching device installation wall is a straight cavity wall.

4. The optical coating process chamber according to claim 1, characterized in that: The coating component is a sputtering source or an evaporation source.

5. The optical coating process chamber according to claim 1, characterized in that: A lifting assembly and a turntable transmission and reversing mechanism capable of conveying the turntable and reversing the conveying direction are arranged at the bottom of the cavity, and a rotating assembly is arranged at the top of the cavity.

6. A multi-chamber continuous vacuum coating machine, characterized in that: It comprises a pre-treatment chamber, at least one optical coating process chamber according to any one of claims 1 to 5, and a post-treatment chamber which are connected in sequence, wherein the inlet of the pre-treatment chamber and the outlet of the post-treatment chamber are connected via a connecting platform.

7. The multi-chamber continuous vacuum coating machine according to claim 6, characterized in that: The number of the optical coating process chambers of the multi-chamber continuous vacuum coating machine is two, namely a first optical coating process chamber and a second optical coating process chamber, the pre-treatment chamber is connected to the first optical coating process chamber, the post-treatment chamber is connected to the second optical coating process chamber, and the pre-treatment chamber and the post-treatment chamber are located on the same side.

8. The multi-chamber continuous vacuum coating machine according to claim 6, characterized in that: The multi-chamber continuous vacuum coating machine has two optical coating process chambers, namely a first optical coating process chamber and a second optical coating process chamber. The pre-treatment chamber is connected to the first optical coating process chamber, and the post-treatment chamber is connected to the second optical coating process chamber, and the pre-treatment chamber and the post-treatment chamber are located on opposite sides.

9. The multi-chamber continuous vacuum coating machine according to claim 6, characterized in that: The chambers of the multi-chamber continuous vacuum coating machine are continuously arranged in a stepped shape.

10. The multi-chamber continuous vacuum coating machine according to claim 6, characterized in that: The chambers of the multi-chamber continuous vacuum coating machine are arranged continuously in an S shape.

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