High-precision measurement system suitable for long-period slowly-varying mechanical quantity signal

Abstract

The invention relates to the field of optical sensing measurement, in particular to a high-precision measurement system suitable for long-period slowly-varying mechanical quantity signals, which comprises a tunable laser, a polarization controller, a coupler, a photoelectric detector, a band-pass filter, a computer, a precision displacement platform, a spring piece, a resonant cavity, a piezoelectric ceramic piece and a signal generator, wherein the emergent end of the tunable laser is connected with the incident end of the coupler through the polarization controller; the emergent end of the coupler is connected with the incident end of the photoelectric detector; the signal output end of the photoelectric detector is connected with the signal input end of the computer through the band-pass filter; the resonant cavity is coupled with the coupling surface of the coupler, and the resonant cavity and the coupler jointly form a sensing unit; and the piezoelectric ceramic piece is fixed on the resonant cavity. The problems that an existing sensing measurement system based on a resonant cavity cannot achieve high-precision measurement of long-period slowly-varying mechanical quantity signals and is limited in application range are effectively solved, and the sensing measurement system is suitable for signal measurement in various fields.

Description

Technical Field

[0001] The present invention relates to the field of optical sensing measurement, and specifically to a high-precision measurement system suitable for long-period and slowly-varying mechanical quantity signals. Background Art

[0002] At present, the sensing measurement system based on a resonator has been widely used in signal measurements in various fields due to its high-Q value characteristics. However, in practical applications, the existing sensing measurement system based on a resonator has the following problems due to its own structural limitations: First, when the existing sensing measurement system based on a resonator measures long-period and slowly-varying mechanical quantity signals, it cannot suppress the interference of common-mode noise on the measurement results, so it cannot achieve high-precision measurement of long-period and slowly-varying mechanical quantity signals. Second, the sensitivity and dynamic range of the existing sensing measurement system based on a resonator are fixed, resulting in its inability to adapt to different application scenarios, thus limiting its scope of application. Based on this, it is necessary to invent a high-precision measurement system suitable for long-period and slowly-varying mechanical quantity signals to solve the problems that the existing sensing measurement system based on a resonator cannot achieve high-precision measurement of long-period and slowly-varying mechanical quantity signals and has a limited scope of application. Summary of the Invention

[0003] In order to solve the problems that the existing sensing measurement system based on a resonator cannot achieve high-precision measurement of long-period and slowly-varying mechanical quantity signals and has a limited scope of application, the present invention provides a high-precision measurement system suitable for long-period and slowly-varying mechanical quantity signals.

[0004] The present invention is implemented by adopting the following technical solutions:

[0005] A high-precision measurement system suitable for long-period and slowly-varying mechanical quantity signals includes a tunable laser, a polarization controller, a coupler, a photodetector, a band-pass filter, a computer, a precision displacement platform, a spring piece, a resonator, a piezoelectric ceramic sheet, and a signal generator;

[0006] Among them, the output end of the tunable laser is connected to the input end of the coupler through the polarization controller; the output end of the coupler is connected to the input end of the photodetector; the signal output end of the photodetector is connected to the signal input end of the computer through the band-pass filter;

[0007] One end of the spring piece is fixed on the precision displacement platform; the resonator is fixed on the front surface of the other end of the spring piece; the resonator is coupled to the coupling surface of the coupler, and the resonator and the coupler together form a sensitive unit; the piezoelectric ceramic sheet is fixed on the resonator; the signal output end of the signal generator is connected to the signal input end of the piezoelectric ceramic sheet.

[0008] It further includes a linear driver and a pressure sensor; the telescopic end of the linear driver faces the back of the other end of the spring piece; the pressure sensor is clamped and fixed between the telescopic end of the linear driver and the back of the other end of the spring piece, and the signal output end of the pressure sensor is connected to the signal input end of the computer.

[0009] The refractive index of the coupler is greater than that of the resonant cavity.

[0010] The coupler can be replaced with a tapered optical fiber, a coupled waveguide, an angled polished optical fiber, or a coupling prism.

[0011] The spring piece uses a low-damping spring piece; the resonant cavity uses a microsphere cavity, a cylindrical cavity, an annular cavity, a crystal cavity, or an on-chip micro-ring cavity; the signal generator uses a function signal generator.

[0012] The coupling distance between the coupling surface of the resonant cavity and the coupler satisfies the following formula:

[0013] ;

[0014] In the formula: represents the coupling distance between the coupling surface of the resonant cavity and the coupler; represents the wavelength of the laser in vacuum; represents the refractive index of the resonant cavity; represents the incident angle of the laser when it enters the coupler.

[0015] A high-precision measurement method applicable to long-period slowly varying mechanical quantity signals, which is realized based on a high-precision measurement system for long-period slowly varying mechanical quantity signals described in the present invention, and the method is realized by the following steps:

[0016] First, control the high-precision measurement system to enter the working mode; the working mode is specifically: the tunable laser emits laser in the 1550 nm band; the laser first enters the coupler through the polarization controller, and then enters the resonant cavity through evanescent field coupling to form a local optical field with a resonant mode; the signal generator outputs an excitation signal; the excitation signal is transmitted to the piezoelectric ceramic sheet and converted into a vibration signal by the piezoelectric ceramic sheet; the vibration signal acts on the resonant cavity, causing the resonant mode of the local optical field in the resonant cavity to oscillate periodically; the local optical field returns from the resonant cavity to the coupler and then enters the photodetector, and is converted into an electrical signal by the photodetector; the electrical signal is transmitted to the band-pass filter and converted into the voltage amplitude of the oscillation spectrum line by the band-pass filter; the voltage amplitude of the oscillation spectrum line is transmitted to the computer;

[0017] In the working mode, when a long-period slowly-varying mechanical quantity signal acts on the resonant cavity, the coupling state between the resonant cavity and the coupler changes, causing the intensity of the local optical field in the resonant cavity to change, and thus causing the voltage amplitude of the oscillation spectrum line to change; the computer monitors the change amount of the voltage amplitude of the oscillation spectrum line in real time, and substitutes the change amount of the voltage amplitude of the oscillation spectrum line into the long-period slowly-varying mechanical quantity measurement equation of the high-precision measurement system, thereby calculating the long-period slowly-varying mechanical quantity; the long-period slowly-varying mechanical quantity measurement equation of the high-precision measurement system is expressed as follows:

[0018] ;

[0019] In the formula: represents the change amount of the voltage amplitude of the oscillation spectrum line; represents the change rate of the oscillation spectrum line affected by the long-period slowly-varying mechanical quantity signal; represents the optoelectronic conversion gain coefficient of the high-precision measurement system; represents the long-period slowly-varying mechanical quantity; and are both known quantities.

[0020] This method further includes using a linear driver and a pressure sensor to determine whether the performance indicators of the high-precision measurement system meet the requirements; the specific steps are as follows:

[0021] First, control the high-precision measurement system to enter the working mode;

[0022] In the working mode, the linear driver generates a long-period slowly-varying mechanical quantity signal; on the one hand, the long-period slowly-varying mechanical quantity signal acts on the resonant cavity through the pressure sensor and the spring piece in sequence, causing the voltage amplitude of the oscillation spectrum line to change, and on the other hand, it acts on the pressure sensor; the computer monitors the change amount of the voltage amplitude of the oscillation spectrum line in real time; the pressure sensor monitors the long-period slowly-varying mechanical quantity in real time and transmits the monitoring result to the computer;

[0023] Then, on the one hand, calculate the sensitivity test value of the high-precision measurement system according to the change amount of the voltage amplitude of the oscillation spectrum line and the long-period slowly-varying mechanical quantity, and on the other hand, calculate the sensitivity standard value of the high-precision measurement system according to the theory; the specific calculation formulas are as follows:

[0024] ;

[0025] ;

[0026] In the formula: represents the sensitivity test value of the high-precision measurement system; represents the change amount of the voltage amplitude of the oscillation spectrum line; represents the long-period slowly-varying mechanical quantity; Represents the standard value of the sensitivity of the high-precision measurement system; Represents the change rate of the oscillation spectral line affected by the long-period slowly varying mechanical quantity signal; Represents the optoelectronic conversion gain coefficient of the high-precision measurement system; , Are all known quantities;

[0027] Then, compare the sensitivity test value of the high-precision measurement system with the standard value of the sensitivity of the high-precision measurement system, and judge whether the performance index of the high-precision measurement system meets the requirements according to the comparison result; if the sensitivity test value of the high-precision measurement system coincides with the standard value of the sensitivity of the high-precision measurement system, it indicates that the performance index of the high-precision measurement system meets the requirements; if the sensitivity test value of the high-precision measurement system does not coincide with the standard value of the sensitivity of the high-precision measurement system, it indicates that the performance index of the high-precision measurement system does not meet the requirements.

[0028] This method also includes using a precision displacement platform to adjust the sensitivity and dynamic range of the high-precision measurement system; the specific steps are as follows:

[0029] Start the precision displacement platform, and the precision displacement platform drives the spring piece and the resonant cavity to move together, so that the initial coupling state between the resonant cavity and the coupler changes, thereby changing the sensitivity and dynamic range of the high-precision measurement system.

[0030] Compared with the existing resonant cavity-based sensing measurement system, the high-precision measurement system for long-period slowly varying mechanical quantity signals described in the present invention has the following advantages by adopting a new sensing mechanism: First, by introducing a piezoelectric ceramic sheet, the present invention makes the resonance mode of the local optical field in the resonant cavity generate periodic oscillations, and measures the long-period slowly varying mechanical quantity signal based on the change amount of the voltage amplitude of the oscillation spectral line, thereby realizing the rapid decoupling of the long-period slowly varying mechanical quantity signal and the common-mode noise, effectively suppressing the interference of the common-mode noise on the measurement result, and further realizing the high-precision measurement of the long-period slowly varying mechanical quantity signal. Second, by introducing a precision displacement platform, the present invention enables both the sensitivity and the dynamic range to be adjusted, thereby being able to adapt to different application scenarios, so that the applicable range is no longer limited.

[0031] The present invention effectively solves the problems that the existing resonant cavity-based sensing measurement system cannot achieve high-precision measurement of long-period slowly varying mechanical quantity signals and has a limited applicable range, and is applicable to signal measurement in various fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 Is a schematic structural diagram of the present invention.

[0033] Figure 2 Is a partial schematic structural diagram of the present invention.

[0034] Figure 3 is Figure 2 the bottom view of

[0035] In the figure: 101 - tunable laser, 102 - polarization controller, 103 - coupler, 104 - photodetector, 105 - band - pass filter, 106 - computer, 201 - precision displacement platform, 202 - spring piece, 203 - resonant cavity, 204 - piezoelectric ceramic sheet, 205 - signal generator, 206 - linear driver, 207 - pressure sensor. Specific embodiments

[0036] A high - precision measurement system applicable to long - period slowly - varying mechanical quantity signals, comprising a tunable laser 101, a polarization controller 102, a coupler 103, a photodetector 104, a band - pass filter 105, a computer 106, a precision displacement platform 201, a spring piece 202, a resonant cavity 203, a piezoelectric ceramic sheet 204, and a signal generator 205;

[0037] Among them, the output end of the tunable laser 101 is connected to the input end of the coupler 103 through the polarization controller 102; the output end of the coupler 103 is connected to the input end of the photodetector 104; the signal output end of the photodetector 104 is connected to the signal input end of the computer 106 through the band - pass filter 105;

[0038] One end of the spring piece 202 is fixed on the precision displacement platform 201; the resonant cavity 203 is fixed on the front of the other end of the spring piece 202; the coupling surface of the resonant cavity 203 is coupled with the coupler 103, and the resonant cavity 203 and the coupler 103 together form a sensitive unit; the piezoelectric ceramic sheet 204 is fixed on the resonant cavity 203; the signal output end of the signal generator 205 is connected to the signal input end of the piezoelectric ceramic sheet 204.

[0039] It further includes a linear driver 206 and a pressure sensor 207; the telescopic end of the linear driver 206 faces the back of the other end of the spring piece 202; the pressure sensor 207 is clamped and fixed between the telescopic end of the linear driver 206 and the back of the other end of the spring piece 202, and the signal output end of the pressure sensor 207 is connected to the signal input end of the computer 106.

[0040] The refractive index of the coupler 103 is greater than that of the resonant cavity 203.

[0041] The coupler 103 can be replaced by a tapered optical fiber or a coupled waveguide or an angled - polished optical fiber or a coupling prism.

[0042] The spring piece 202 adopts a low - damping spring piece; the resonant cavity 203 adopts a micro - sphere cavity or a cylindrical cavity or an annular cavity or a crystal cavity or a on - chip micro - ring cavity; the signal generator 205 adopts a function signal generator.

[0043] The coupling distance between the coupling surfaces of the resonant cavity 203 and the coupler 103 satisfies the following formula:

[0044] ;

[0045] In the formula: represents the coupling distance between the coupling surfaces of the resonant cavity 203 and the coupler 103; represents the wavelength of the laser in vacuum; represents the refractive index of the resonant cavity 203; represents the incident angle when the laser enters the coupler 103.

[0046] A high-precision measurement method applicable to long-period slowly-varying mechanical quantity signals, which is realized based on a high-precision measurement system for long-period slowly-varying mechanical quantity signals described in the present invention, and the method is realized by the following steps:

[0047] First, control the high-precision measurement system to enter the working mode; the working mode is specifically: the tunable laser 101 emits laser in the 1550 nm band; the laser first enters the coupler 103 through the polarization controller 102, and then enters the resonant cavity 203 through evanescent field coupling to form a local optical field with a resonant mode; the signal generator 205 outputs an excitation signal; the excitation signal is transmitted to the piezoelectric ceramic sheet 204 and is converted into a vibration signal by the piezoelectric ceramic sheet 204; the vibration signal acts on the resonant cavity 203, causing the resonant mode of the local optical field in the resonant cavity 203 to oscillate periodically; the local optical field returns from the resonant cavity 203 to the coupler 103 and then is incident on the photodetector 104, and is converted into an electrical signal by the photodetector 104; the electrical signal is transmitted to the band-pass filter 105 and is converted into the voltage amplitude of the oscillation spectrum line by the band-pass filter 105; the voltage amplitude of the oscillation spectrum line is transmitted to the computer 106;

[0048] In the working mode, when the long-period slowly-varying mechanical quantity signal acts on the resonant cavity 203, the coupling state between the resonant cavity 203 and the coupler 103 changes, causing the intensity of the local optical field in the resonant cavity 203 to change, thereby causing the voltage amplitude of the oscillation spectrum line to change; the computer 106 monitors the change amount of the voltage amplitude of the oscillation spectrum line in real time, and substitutes the change amount of the voltage amplitude of the oscillation spectrum line into the long-period slowly-varying mechanical quantity measurement equation of the high-precision measurement system, thereby calculating the long-period slowly-varying mechanical quantity; the long-period slowly-varying mechanical quantity measurement equation of the high-precision measurement system is expressed as follows:

[0049] ;

[0050] In the formula: represents the change amount of the voltage amplitude of the oscillation spectrum line; Indicates the change rate of the oscillating spectral line affected by the long-period slowly varying mechanical quantity signal; Indicates the optoelectronic conversion gain coefficient of the high-precision measurement system; Indicates the long-period slowly varying mechanical quantity; 、 Are all known quantities.

[0051] This method further includes using the linear driver 206 and the pressure sensor 207 to determine whether the performance indicators of the high-precision measurement system meet the requirements; the specific steps are as follows:

[0052] First, control the high-precision measurement system to enter the working mode;

[0053] In the working mode, the linear driver 206 generates a long-period slowly varying mechanical quantity signal; on the one hand, the long-period slowly varying mechanical quantity signal acts on the resonant cavity 203 through the pressure sensor 207 and the spring piece 202 in sequence, causing the voltage amplitude of the oscillating spectral line to change, and on the other hand, it acts on the pressure sensor 207; the computer 106 monitors the change amount of the voltage amplitude of the oscillating spectral line in real time; the pressure sensor 207 monitors the long-period slowly varying mechanical quantity in real time and transmits the monitoring result to the computer 106;

[0054] Then, on the one hand, calculate the sensitivity test value of the high-precision measurement system according to the change amount of the voltage amplitude of the oscillating spectral line and the long-period slowly varying mechanical quantity, and on the other hand, calculate the sensitivity standard value of the high-precision measurement system according to the theory; the specific calculation formulas are as follows:

[0055] ;

[0056] ;

[0057] In the formula: Indicates the sensitivity test value of the high-precision measurement system; Indicates the change amount of the voltage amplitude of the oscillating spectral line; Indicates the long-period slowly varying mechanical quantity; Indicates the sensitivity standard value of the high-precision measurement system; Indicates the change rate of the oscillating spectral line affected by the long-period slowly varying mechanical quantity signal; Indicates the optoelectronic conversion gain coefficient of the high-precision measurement system; 、 Are all known quantities;

[0058] Then, compare the sensitivity test value of the high-precision measurement system with the sensitivity standard value of the high-precision measurement system, and judge whether the performance index of the high-precision measurement system meets the requirements according to the comparison result; if the sensitivity test value of the high-precision measurement system coincides with the sensitivity standard value of the high-precision measurement system, it indicates that the performance index of the high-precision measurement system meets the requirements; if the sensitivity test value of the high-precision measurement system does not coincide with the sensitivity standard value of the high-precision measurement system, it indicates that the performance index of the high-precision measurement system does not meet the requirements.

[0059] This method further includes using the precision displacement platform 201 to adjust the sensitivity and dynamic range of the high-precision measurement system; the specific steps are as follows:

[0060] Start the precision displacement platform 201, and the precision displacement platform 201 drives the spring piece 202 and the resonant cavity 203 to move together, so that the initial coupling state between the resonant cavity 203 and the coupler 103 changes, thereby changing the sensitivity and dynamic range of the high-precision measurement system.

[0061] Although the specific implementation manners of the present invention have been described above, those skilled in the art should understand that these are only examples, and the protection scope of the present invention is defined by the appended claims. Without departing from the principle and essence of the present invention, those skilled in the art can make various changes or modifications to these implementation manners, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals, characterized in that: It includes a tunable laser (101), a polarization controller (102), a coupler (103), a photodetector (104), a band-pass filter (105), a computer (106), a precision displacement platform (201), a leaf spring (202), a resonant cavity (203), a piezoelectric ceramic sheet (204), and a signal generator (205); Among them, the output end of the tunable laser (101) is connected to the input end of the coupler (103) through the polarization controller (102); the output end of the coupler (103) is connected to the input end of the photodetector (104); the signal output end of the photodetector (104) is connected to the signal input end of the computer (106) through the band-pass filter (105); One end of the leaf spring (202) is fixed on the precision displacement platform (201); the resonant cavity (203) is fixed on the front of the other end of the leaf spring (202); the coupling surface of the resonant cavity (203) is coupled with the coupler (103), and the resonant cavity (203) and the coupler (103) together form a sensitive unit; the piezoelectric ceramic sheet (204) is fixed on the resonant cavity (203); the signal output end of the signal generator (205) is connected to the signal input end of the piezoelectric ceramic sheet (204).

2. The high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals according to claim 1, characterized in that: It further includes a linear driver (206) and a pressure sensor (207); the telescopic end of the linear driver (206) faces the back of the other end of the leaf spring (202); the pressure sensor (207) is clamped and fixed between the telescopic end of the linear driver (206) and the back of the other end of the leaf spring (202), and the signal output end of the pressure sensor (207) is connected to the signal input end of the computer (106).

3. The high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals according to claim 1, characterized in that: The refractive index of the coupler (103) is greater than the refractive index of the resonant cavity (203).

4. The high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals according to claim 1, characterized in that: The coupler (103) can be replaced with a tapered optical fiber or a coupled waveguide or an angled polished optical fiber or a coupling prism.

5. The high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals according to claim 1, characterized in that: The leaf spring (202) uses a low-damping leaf spring; the resonant cavity (203) uses a microsphere cavity or a cylindrical cavity or an annular cavity or a crystal cavity or a on-chip micro-ring cavity; the signal generator (205) uses a function signal generator.

6. The high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals according to claim 1, characterized in that: The coupling distance of the coupling surface between the resonant cavity (203) and the coupler (103) satisfies the following formula: ； Wherein: represents the coupling distance of the coupling surface between the resonant cavity (203) and the coupler (103); represents the wavelength of the laser in vacuum; represents the refractive index of the resonant cavity (203); represents the incident angle when the laser enters the coupler (103).

7. A high-precision measurement method applicable to long-period slowly-varying mechanical quantity signals, which is implemented based on the high-precision measurement system applicable to long-period slowly-varying mechanical quantity signals according to claim 1, characterized in that: This method is implemented by the following steps: First, control the high-precision measurement system to enter the working mode; the working mode is specifically as follows: the tunable laser (101) emits laser light in the 1550 nm band; the laser light first enters the coupler (103) through the polarization controller (102), and then enters the resonant cavity (203) through evanescent field coupling to form a local optical field with resonant modes; the signal generator (205) outputs an excitation signal; the excitation signal is transmitted to the piezoelectric ceramic sheet (204) and converted into a vibration signal by the piezoelectric ceramic sheet (204); the vibration signal acts on the resonant cavity (203), causing the resonant modes of the local optical field in the resonant cavity (203) to oscillate periodically; the local optical field returns from the resonant cavity (203) to the coupler (103) and then enters the photodetector (104), and is converted into an electrical signal by the photodetector (104); the electrical signal is transmitted to the band-pass filter (105) and converted into the voltage amplitude of the oscillation spectrum line by the band-pass filter (105); the voltage amplitude of the oscillation spectrum line is transmitted to the computer (106); In the working mode, when a long-period slowly-varying mechanical quantity signal acts on the resonant cavity (203), the coupling state between the resonant cavity (203) and the coupler (103) changes, causing the intensity of the local optical field in the resonant cavity (203) to change, thereby causing the voltage amplitude of the oscillation spectrum line to change; the computer (106) monitors the change amount of the voltage amplitude of the oscillation spectrum line in real time, and substitutes the change amount of the voltage amplitude of the oscillation spectrum line into the long-period slowly-varying mechanical quantity measurement equation of the high-precision measurement system, thereby calculating the long-period slowly-varying mechanical quantity; the long-period slowly-varying mechanical quantity measurement equation of the high-precision measurement system is expressed as follows: ； In the formula: represents the change in the voltage amplitude of the oscillating spectral line; represents the change rate of the oscillating spectral line affected by the long-period slowly varying mechanical quantity signal; represents the optoelectronic conversion gain coefficient of the high-precision measurement system; represents the long-period slowly varying mechanical quantity; and are all known quantities.

8. The high-precision measurement method applicable to long-period slowly-varying mechanical quantity signals according to claim 7, characterized in that: This method further includes using the linear driver (206) and the pressure sensor (207) to determine whether the performance indicators of the high-precision measurement system meet the requirements; the specific steps are as follows: First, control the high-precision measurement system to enter the working mode; In the working mode, the linear driver (206) generates a long-period slowly-varying mechanical quantity signal; the long-period slowly-varying mechanical quantity signal acts on the resonant cavity (203) through the pressure sensor (207) and the spring piece (202) in sequence, causing the voltage amplitude of the oscillation spectrum line to change, and on the other hand acts on the pressure sensor (207); the computer (106) monitors the change amount of the voltage amplitude of the oscillation spectrum line in real time; the pressure sensor (207) monitors the long-period slowly-varying mechanical quantity in real time and transmits the monitoring result to the computer (106); Then, on the one hand, calculate the sensitivity test value of the high-precision measurement system according to the change amount of the voltage amplitude of the oscillation spectrum line and the long-period slowly-varying mechanical quantity, and on the other hand, calculate the sensitivity standard value of the high-precision measurement system according to the theory; the specific calculation formulas are as follows: ； ； Wherein: represents the sensitivity test value of the high-precision measurement system; represents the change in the voltage amplitude of the oscillation spectral line; represents the long-period slowly varying mechanical quantity; represents the sensitivity standard value of the high-precision measurement system; represents the change rate of the oscillation spectral line affected by the long-period slowly varying mechanical quantity signal; represents the optoelectronic conversion gain coefficient of the high-precision measurement system; 、 are all known quantities; Then, compare the sensitivity test value of the high-precision measurement system with the sensitivity standard value of the high-precision measurement system, and judge whether the performance indicators of the high-precision measurement system meet the requirements according to the comparison result; if the sensitivity test value of the high-precision measurement system coincides with the sensitivity standard value of the high-precision measurement system, it indicates that the performance indicators of the high-precision measurement system meet the requirements; if the sensitivity test value of the high-precision measurement system does not coincide with the sensitivity standard value of the high-precision measurement system, it indicates that the performance indicators of the high-precision measurement system do not meet the requirements.

9. The high-precision measurement method applicable to long-period slowly-varying mechanical quantity signals according to claim 7, characterized in that:This method further includes using a precision displacement platform (201) to adjust the sensitivity and dynamic range of the high-precision measurement system; the specific steps are as follows: Start the precision displacement platform (201), and the precision displacement platform (201) drives the spring piece (202) and the resonant cavity (203) to move together, so that the initial coupling state between the resonant cavity (203) and the coupler (103) changes, thereby changing the sensitivity and dynamic range of the high-precision measurement system.

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