Negative hydrogen ion generation device with step-by-step radio frequency discharge control

Abstract

The invention relates to the technical field, in particular to a step-by-step radio frequency discharge control negative hydrogen ion generation device which comprises a case. A discharge chamber and a diffusion chamber are fixedly mounted in the case; a spiral coil is arranged outside the discharge cavity; a sliding ring is fixedly mounted on the spiral coil; a guide rail is fixedly mounted on the mounting frame; a static contact is fixedly mounted on the guide rail; a fixed contact is fixedly mounted on the mounting frame; a movable contact is rotationally mounted on the mounting frame; a mounting frame is fixedly mounted in the case; the discharge chambers are fixedly mounted on the mounting frame, and one discharge chamber is fixedly provided with the valve pipe; a conducting plate and a plurality of groups of closing plates are rotationally mounted on the valve pipe; a step-by-step discharge structure and a conduction structure are arranged on the mounting frame; a reinforcing structure is arranged on the mounting frame; and the reinforcing structure can drive the slip ring to slide on the guide rail, so that the discharge capacity of the spiral coil is reduced or enhanced, the dynamic matching of the magnetic field intensity and the high-energy particles is realized, and low-damage and high-stability discharge starting is realized.

Description

Technical Field

[0001] The present invention relates to the technical field, and specifically to a negative hydrogen ion generation device with step-by-step radio frequency discharge control. Background Art

[0002] A hydrogen negative ion generator is a device specifically used to generate hydrogen negative ions (H⁻, that is, a hydrogen atom carrying two electrons). Such devices have important applications in fields such as nuclear fusion reactors, particle accelerators, semiconductor ion implantation, and plasma chemistry. Its core goal is to use physical or chemical means to enable hydrogen atoms to capture additional electrons to form a stable negative ion beam and achieve high-density and long-life ion output. Common hydrogen negative ion generators are classified into radio frequency drive type and microwave drive type according to the drive method.

[0003] Common radio frequency drive type hydrogen negative ion generators include a gas tank, a processing device, a discharge chamber, and a diffusion chamber. Among them, a spiral coil is wound around the discharge chamber. When the spiral coil is energized, a large number of high-energy particles will be formed in the discharge chamber to collide with hydrogen molecules, thereby obtaining hydrogen negative ions; the diffusion chamber is used to collect the generated hydrogen negative ions.

[0004] Since the number of turns of the common spiral coil wound around the discharge chamber is fixed, the collision kinetic energy of high-energy particles in the energized state is relatively fixed, thus stabilizing the generation efficiency. However, at the moment of power-on, high-energy particles are instantaneously produced in large quantities, and the sudden increase in the density of high-energy particles will cause impedance mismatch; resulting in an increase in reflected power, which may damage the equipment or affect the stability of high-energy particles, and then affect the normal production of hydrogen negative ions. Summary of the Invention

[0005] The purpose of the present invention is to provide a negative hydrogen ion generation device with step-by-step radio frequency discharge control to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention provides the following technical solutions: A negative hydrogen ion generation device with step-by-step radio frequency discharge control, including a chassis; A gas tank, a purification tank, a drying tank, multiple discharge chambers, and a diffusion chamber are fixedly installed inside the chassis; A vacuum pump is provided between multiple discharge chambers, and the discharge chamber is connected to the vacuum pump through a conduit; A spiral coil is sleeved outside the discharge chamber; multiple slip rings are fixedly installed on the spiral coil; a guide rail that is slidably fitted with the slip ring is fixedly installed on the installation frame; multiple static contacts are fixedly installed on the guide rail; A wiring board and multiple fixed contacts are fixedly installed on the installation frame; a moving contact that cooperates with the fixed contact is rotatably installed on the installation frame; The fixed contact is connected to a group of the static contacts through a wire; and the movable contact is connected to another group of the static contacts through a wire; A mounting frame is fixedly installed in the chassis; the discharge chamber is fixedly installed on the mounting frame, a valve tube fixedly installed on the mounting frame is provided between one of the discharge chambers and the drying tank; multiple groups of conduction plates and multiple groups of closing plates are rotatably installed on the valve tube; The mounting frame is provided with a step-by-step discharge structure and a conduction structure; when the conduction structure is in action, it drives the closing plate to rotate, so as to quickly complete the conduction and closing of the valve tube, and the step-by-step discharge structure can drive the moving contact to rotate after the valve tube is reclosed, so as to cooperate with multiple groups of fixed contacts in sequence, so as to energize the multiple spiral coils; The mounting frame is provided with a reinforcement structure; the reinforcement structure can drive the slip ring to slide on the guide rail to increase or shorten the pitch of the spiral coil, thereby reducing or increasing the discharge amount of the spiral coil.

[0007] As a further solution of the present invention: the conduction structure includes a rotating disk rotatably mounted on the mounting frame; a plurality of groups of first tooth blocks and second tooth blocks are fixedly mounted on the rotating disk; a gear which can mesh with both the first tooth block and the second tooth block is rotatably mounted on one end of the valve tube close to the discharge chamber; a second rotating disk rotatably connected to the valve tube is fixedly mounted on the gear; a plurality of groups of arc-shaped sliding grooves connected to the ends are provided on the second rotating disk; a second sliding column which is slidably engaged with the arc-shaped sliding groove is fixedly mounted on the closing plate; the closing plates are equidistantly distributed along the circumference of the valve tube.

[0008] As a further solution of the present invention: the step-by-step discharge structure includes a conduction turntable rotatably mounted on the mounting frame; the conduction turntable and the rotating disk are connected by a belt; the moving contact is fixedly mounted on the conduction turntable; a fixing ring is fixedly mounted on the mounting frame; the fixed contacts are equidistantly distributed along the circumference of the fixing ring; a resisting contact that resists the conduction turntable is fixedly mounted on the mounting frame; the resisting contact and a group of the static contacts are respectively connected to the positive and negative electrodes of a power supply.

[0009] As a further solution of the present invention: the reinforcement structure includes a screw column and a drive shaft rotatably mounted on the mounting frame; a threaded sleeve is threadedly connected to the screw column; a sliding sleeve is sleeved on the drive shaft and fixedly connected to the threaded sleeve; a plurality of adjustment groove groups interconnected are provided on the drive shaft; a protruding column is fixedly mounted on the sliding sleeve and slidably engages with the adjustment groove group.

[0010] As a further solution of the present invention: the adjustment groove group includes a vertical groove and a first spiral groove; one end of the vertical groove is communicated with one end of the first spiral groove; the other end of the vertical groove is communicated with one end of the first spiral groove in another group of the adjustment groove groups; the other end of the first spiral groove is communicated with one end of the vertical groove in another group of the adjustment groove groups.

[0011] As a further solution of the present invention: the reinforcing structure further includes an adjustment shaft rotatably installed on the installation frame; the slip ring is sleeved on the adjustment shaft; a second spiral groove is formed on the adjustment shaft; a convex column fixedly installed on the slip ring is slidably engaged with the second spiral groove.

[0012] As a further solution of the present invention: a first turntable is rotatably installed at one end of the valve tube away from the discharge chamber; the first turntable is connected to the adjustment shaft by a belt; multiple inclined grooves are formed on the first turntable; a first sliding column slidably engaged with the inclined grooves is fixedly installed on the conduction plate; the conduction plates are equidistantly distributed along the circumferential direction of the valve tube.

[0013] As a further solution of the present invention: notch openings are formed on the conduction plate; the multiple notch openings cooperate with each other.

[0014] As a further solution of the present invention: the moving contact is elastic; and the moving contact is in an "L" shape.

[0015] As a further solution of the present invention: multiple heat dissipation grooves for reducing the temperature inside the installation frame are formed on the installation frame.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: The conduction structure acts to conduct and block the valve tube to ensure that hydrogen can enter smoothly; and during the generation of hydrogen anions, the newly entered hydrogen is prevented from diluting the hydrogen anions; through the interaction between the conduction structure and the step-by-step discharge structure, after hydrogen enters the discharge chamber, the hydrogen is decomposed and energized step by step, which can effectively improve the production efficiency and increase the content of hydrogen anions in the diffusion chamber, avoiding the subsequent workload of purification and impurity removal; after the device is started from the stationary state, by driving the slip ring to move intermittently through the enhancement structure, the kinetic energy of high-energy particles colliding with hydrogen is gradually increased, which can effectively avoid sudden magnetic field impacts (if a high-turns magnetic field is directly applied, impedance mismatch may occur due to the sudden increase in plasma density; such as a sharp increase in radio frequency reflection power). By dynamically matching the ionization process: initially, a low number of turns allows the gas to be fully ionized, and then the magnetic field is gradually enhanced to increase the energy density, avoiding the constraint failure of "strong first and then weak". Through the dynamic matching of the magnetic field strength and high-energy particles, a low-damage and high-stability discharge start is achieved; and as the enhancement structure acts, the distance between the notches on the conduction plate becomes larger and larger, so that under the same conditions, the injection amount of hydrogen gradually increases. That is, in the low-turns state, a small amount of hydrogen is injected to complete the production of hydrogen anions, avoiding the device running without load and causing energy waste, and avoiding excessive injection of hydrogen, which may lead to incomplete electrolysis of hydrogen in the low-turns state and increase the subsequent purification and cleaning work; as the number of turns of the spiral coil gradually increases, the injection amount of hydrogen also increases synchronously. Through the dynamic matching of the hydrogen injection amount and high-energy particles, a low-damage and high-stability discharge start is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 FIG. is a schematic structural diagram of an embodiment of a negative hydrogen ion generation device with step-by-step radio frequency discharge control.

[0018] Figure 2 FIG. is a schematic structural diagram of another perspective of an embodiment of a negative hydrogen ion generation device with step-by-step radio frequency discharge control.

[0019] Figure 3 FIG. is a schematic structural diagram of a drying tank in an embodiment of a negative hydrogen ion generation device with step-by-step radio frequency discharge control.

[0020] Figure 4 FIG. is a schematic structural diagram of a spiral coil in an embodiment of a negative hydrogen ion generation device with step-by-step radio frequency discharge control.

[0021] Figure 5 For Figure 4 the structural diagram at location A in

[0022] Figure 6 FIG. is a schematic structural diagram of a static contact in an embodiment of a negative hydrogen ion generation device with step-by-step radio frequency discharge control.

[0023] Figure 7 Schematic diagram of the structure of the discharge chamber in an embodiment of a negative hydrogen ion generation device for step-by-step radio frequency discharge control.

[0024] Figure 8 For Figure 7 Schematic diagram of the structure at location B in

[0025] Figure 9 Schematic diagram of the structure of the conduction turntable in an embodiment of a negative hydrogen ion generation device for step-by-step radio frequency discharge control.

[0026] Figure 10 For Figure 9 Schematic diagram of the structure at location C in

[0027] Figure 11 Schematic diagram of the structure of the closing plate in an embodiment of a negative hydrogen ion generation device for step-by-step radio frequency discharge control.

[0028] Figure 12 Schematic diagram of the structure of the conduction plate in an embodiment of a negative hydrogen ion generation device for step-by-step radio frequency discharge control.

[0029] Figure 13 Schematic diagram of the structure of the valve tube in a sectional view angle in an embodiment of a negative hydrogen ion generation device for step-by-step radio frequency discharge control.

[0030] In the figure: 1. Chassis; 2. Gas cylinder; 3. Purification tank; 4. Drying tank; 5. Discharge chamber; 6. Diffusion chamber; 7. Installation frame; 701. Heat dissipation groove; 8. Lead screw column; 9. Threaded sleeve; 10. Drive shaft; 1001. Vertical groove; 1002. First helical groove; 11. Sliding sleeve; 1101. Protruding column; 12. Helical coil; 13. Guide rail; 1301. Static contact; 14. Slip ring; 1401. Protruding column; 15. Vacuum pump; 16. Valve tube; 17. First turntable; 1701. Inclined groove; 18. Conduction plate; 1801. First sliding column; 1802. Notch; 19. Rotating disk; 1901. First tooth block; 1902. Second tooth block; 20. Gear; 21. Second turntable; 2101. Arc-shaped chute; 22. Closing plate; 2201. Second sliding column; 23. Conductive turntable; 2301. Moving contact; 24. Contacting contact; 25. Fixed ring; 2501. Fixed contact; 26. Wiring board; 27. Adjusting shaft; 2701. Second spiral groove. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] In addition, an element in the present invention is referred to as being "fixed to" or "disposed on" another element, which can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation manners.

[0033] Please refer to Figures 1 to 13 , in the embodiment of the present invention, a negative hydrogen ion generation device for step-by-step radio frequency discharge control includes a chassis 1; An air tank 2, a purification tank 3, a drying tank 4, multiple groups of discharge chambers 5 and a diffusion chamber 6 are fixedly installed in the chassis 1; A vacuum pump 15 is provided between multiple groups of the discharge chambers 5, and the discharge chambers 5 and the vacuum pump 15 are connected by a conduit; A spiral coil 12 is sleeved outside the discharge chamber 5; multiple groups of slip rings 14 are fixedly installed on the spiral coil 12; a guide rail 13 that is slidably fitted with the slip rings 14 is fixedly installed on the mounting frame 7; multiple groups of static contacts 1301 are fixedly installed on the guide rail 13; A wiring board 26 and multiple groups of fixed contacts 2501 are fixedly installed on the mounting frame 7; a moving contact 2301 that cooperates with the fixed contacts 2501 is rotatably installed on the mounting frame 7; One group of the fixed contacts 2501 and one group of the static contacts 1301 are connected through a wire; and the moving contact 2301 and another group of the static contacts 1301 are connected through a wire; An installation frame 7 is fixedly installed inside the chassis 1; the discharge chamber 5 is fixedly installed on the installation frame 7, and a valve pipe 16 fixedly installed on the installation frame 7 is provided between one of the discharge chambers 5 and the drying tank 4; a plurality of conduction plates 18 and a plurality of closing plates 22 are rotatably installed on the valve pipe 16; A step-by-step discharge structure and a conduction structure are provided on the installation frame 7; when the conduction structure operates, it will drive the closing plate 22 to rotate, so as to quickly complete the conduction and closing of the valve pipe 16, and the step-by-step discharge structure can drive the moving contact 2301 to rotate after the valve pipe 16 is re-closed, so as to cooperate with a plurality of fixed contacts 2501 in sequence, so that a plurality of the spiral coils 12 are energized; An enhancement structure is provided on the installation frame 7; the enhancement structure can drive the slip ring 14 to slide on the guide rail 13, so as to increase or shorten the pitch of the spiral coil 12, thereby reducing or enhancing the discharge amount of the spiral coil 12.

[0034] Taking the embodiment combined with all the features described in this application as an example, when in use, the gas tank 2 is filled with hydrogen. After the hydrogen is released, it will enter the purification tank 3 (for purification treatment), and then enter the drying tank 4 (for drying treatment), and then enter a plurality of discharge chambers 5 (for electrolysis treatment to form hydrogen anions). The hydrogen anions will finally flow into the diffusion chamber 6 (for collection treatment).

[0035] The flow of hydrogen and hydrogen anions between the plurality of discharge chambers 5 is driven by the vacuum pump 15. The vacuum pump 15 can maintain a low-pressure environment inside the discharge chamber 5, so as to increase the output of hydrogen anions and prevent too many impurities from flowing into the diffusion chamber 6. The plurality of discharge chambers 5 are sequentially named "primary chamber", "secondary chamber", "tertiary chamber"... according to the flow direction of hydrogen.

[0036] The spiral coil 12 has elasticity (similar to a spring), and after the spiral coil 12 is energized, a large number of high-energy particles will be formed in the discharge chamber 5 to collide with hydrogen molecules; thereby causing the hydrogen molecules to decompose to form hydrogen anions; and the kinetic energy of the high-energy particles colliding with hydrogen molecules in the discharge chamber 5 is related to the number of turns of the spiral coil 12 around the discharge chamber 5. The larger the number of turns, the greater the kinetic energy and the more the output of hydrogen anions.

[0037] A plurality of fixed contacts 2501 are respectively connected to a static contact 1301 on the guide rail 13 connected to one discharge chamber 5, and the other static contact 1301 is connected to one electrode plate of the power supply; and the other electrode plate is connected to the moving contact 2301; when the moving contact 2301 abuts against a fixed contact 2501, the spiral coil 12 connected to this fixed contact 2501 is energized, that is, this discharge chamber 5 is in a working state.

[0038] The conduction structure drives the rotation of the closing plate 22. When multiple closing plates 22 rotate, they will first rotate away from each other to conduct the valve tube 16, so that hydrogen can smoothly enter the discharge chamber 5. After that, the closing plate 22 will stop rotating to ensure the amount of hydrogen entering. Then, the closing plate 22 will continue to rotate to rotate closer to each other, thereby blocking the valve tube 16 and preventing the newly entered hydrogen from diluting the hydrogen anions during the generation of hydrogen anions.

[0039] The step-by-step discharge structure will act when the conduction structure acts to drive the rotation of the moving contact 2301, so as to sequentially contact with multiple fixed contacts 2501, so that the spiral coils 12 on multiple discharge chambers 5 are sequentially energized; to decompose and energize hydrogen step by step, avoid the discharge chamber 5 being in a working state continuously, so as to avoid the influence of high temperature on the stability of the device and improve the service life of the device. And after the closing plate 22 rotates close to and contacts, the moving contact 2301 contacts the fixed contact 2501 connected to the first-stage chamber, so as to avoid the deviation between the discharge node and the hydrogen inlet node, resulting in the inability to generate hydrogen anions or incomplete generation.

[0040] Through the interaction between the conduction structure and the step-by-step discharge structure, to decompose and energize hydrogen step by step after hydrogen enters the discharge chamber 5, it can effectively improve the production efficiency and increase the content of hydrogen anions in the diffusion chamber 6, avoiding the workload of subsequent purification and impurity removal.

[0041] The enhancement structure drives the slip ring 14 to move intermittently, so as to gradually approach the valve tube 16, thereby reducing the pitch of the spiral coil 12, increasing the number of turns of the spiral coil 12 wound on the discharge chamber 5, and thus increasing the kinetic energy of high-energy particles in the discharge chamber 5 after the spiral coil 12 is energized.

[0042] After the device is started from the static state, by driving the slip ring 14 to move intermittently through the enhancement structure, to gradually increase the kinetic energy of high-energy particle collisions with hydrogen, it can effectively avoid sudden magnetic field shocks (if a high-turns magnetic field is directly applied, it may cause impedance mismatch due to a sudden increase in plasma density; such as a sharp increase in radio frequency reflection power). By dynamically matching the ionization process: initially low turns allow the gas to be fully ionized, and then gradually increase the magnetic field to increase the energy density, avoiding the constraint failure of "strong first and then weak".

[0043] Through the dynamic matching of the magnetic field intensity and high-energy particles, a low-damage and high-stability discharge start is achieved.

[0044] In another embodiment of the present invention, the conduction structure includes a rotating disc 19 rotatably mounted on the mounting frame 7; a plurality of groups of first tooth blocks 1901 and second tooth blocks 1902 are fixedly mounted on the rotating disc 19; a gear 20 that can be meshed with both the first tooth block 1901 and the second tooth block 1902 is rotatably mounted on one end of the valve tube 16 close to the discharge chamber 5; a second rotating disc 21 rotatably connected to the valve tube 16 is fixedly mounted on the gear 20; a plurality of arc-shaped chutes 2101 connected end to end are formed on the second rotating disc 21; a second sliding column 2201 slidably fitted with the arc-shaped chutes 2101 is fixedly mounted on the closing plate 22; the closing plates 22 are equidistantly distributed along the circumference of the valve tube 16.

[0045] Taking the embodiment combined with all the features described in this application as an example, when in use, the rotating disc 19 is driven to rotate independently by the driving component, so as to drive a plurality of first tooth blocks 1901 and a plurality of second tooth blocks 1902 to rotate synchronously, thereby realizing the alternating meshing between the first tooth block 1901 and the second tooth block 1902 and the gear 20.

[0046] In the initial state, the closing plates 22 are in contact with each other to block the valve tube 16. At this time, the second sliding column 2201 is located at the connection of the two arc-shaped chutes 2101.

[0047] When the first tooth block 1901 is meshed with the gear 20, the gear 20 will rotate at this time, so as to drive the second rotating disc 21 to rotate, thereby driving a plurality of arc-shaped chutes 2101 to rotate synchronously, so as to drive the second sliding column 2201 to slide in the arc-shaped chutes 2101; to drive the closing plates 22 to rotate, so that a plurality of closing plates 22 rotate away from each other to conduct the valve tube 16; and when the first tooth block 1901 is disengaged from the gear 20, the second sliding column 2201 is located at the apex position of the arc-shaped chutes 2101, and at this time the valve tube 16 is completely opened.

[0048] After that, the second tooth block 1902 is meshed with the gear 20, so as to drive the second rotating disc 21 to rotate, thereby driving the arc-shaped chutes 2101 to continue to rotate, so as to drive the closing plates 22 to rotate close to each other through the sliding fit between the second sliding column 2201 and the arc-shaped chutes 2101, so as to re-block the valve tube 16. When the second tooth block 1902 is disengaged from the gear 20, the second sliding column 2201 is located at the connection of the two arc-shaped chutes 2101.

[0049] The conduction structure drives the rotation of the closing plate 22 to conduct with the closing valve tube 16, so as to avoid the newly introduced hydrogen from diluting the hydrogen negative ions during the generation process of hydrogen negative ions; the conduction and closing duration is controlled by the rotation speed of the rotating disc 19, that is, by controlling the rotation speed of the rotating disc 19, the on-off time of the valve tube 16 can be controlled once, so as to control the injection amount of hydrogen once, and avoid too much or too little hydrogen entering the discharge chamber 5 after the device works stably, resulting in incomplete or excessive electrolysis of hydrogen and affecting the generation efficiency of hydrogen negative ions.

[0050] In another embodiment of the present invention, the step-by-step discharge structure includes a conduction turntable 23 rotatably installed on the installation frame 7; the conduction turntable 23 is connected to the rotating disc 19 by a belt; the moving contact 2301 is fixedly installed on the conduction turntable 23; a fixed ring 25 is fixedly installed on the installation frame 7; the fixed contacts 2501 are equidistantly distributed along the circumference of the fixed ring 25; a contact touch 24 in contact with the conduction turntable 23 is fixedly installed on the installation frame 7; the contact touch 24 and a group of the static contacts 1301 are respectively connected to the positive and negative electrodes of the power supply.

[0051] Taking the embodiment combined with all the features described in this application as an example, when the rotating disc 19 rotates, it will drive the conduction turntable 23 to rotate through the belt, so as to drive the moving contact 2301 to rotate.

[0052] The moving contact 2301 is connected to the other electrode plate of the power supply through the contact touch 24. When the moving contact 2301 contacts the fixed contact 2501, the spiral coil 12 will be energized.

[0053] When the moving contact 2301 rotates, it contacts a plurality of fixed contacts 2501 in turn, so that the spiral coils 12 on a plurality of discharge chambers 5 are energized in turn; to decompose and empower hydrogen step by step, avoid the discharge chamber 5 from being continuously in a working state, so as to avoid the influence of high temperature on the stability of the device, and improve the service life of the device. And after the closing plate 22 rotates close to the contact, the moving contact 2301 contacts the fixed contact 2501 connected to the first-stage chamber, so as to avoid the deviation between the discharge node and the hydrogen inlet node, and the inability to generate hydrogen negative ions or incomplete generation.

[0054] The mutual cooperation of the conduction structure and the step-by-step discharge structure, by controlling the time difference between the time node of the conduction and closing of the valve tube 16 and the time node of the contact between the moving contact 2301 and the fixed contact 2501, to decompose and empower hydrogen step by step after hydrogen enters the discharge chamber 5, can effectively improve the production efficiency, and increase the content of hydrogen negative ions in the diffusion chamber 6, and avoid the subsequent workload of purification and impurity removal.

[0055] In another embodiment of the present invention, the reinforcement structure includes a lead screw column 8 and a drive shaft 10 rotatably mounted on the mounting frame 7; a threaded sleeve 9 is threadedly connected to the lead screw column 8; a sliding sleeve 11 fixedly connected to the threaded sleeve 9 is sleeved on the drive shaft 10; a plurality of groups of interconnected adjustment groove groups are formed on the drive shaft 10; a protruding column 1101 slidably fitted with the adjustment groove groups is fixedly installed on the sliding sleeve 11.

[0056] In another embodiment of the present invention, the adjustment groove groups include a vertical groove 1001 and a first spiral groove 1002; one end of the vertical groove 1001 communicates with one end of the first spiral groove 1002; the other end of the vertical groove 1001 communicates with one end of the first spiral groove 1002 in another group of the adjustment groove groups; the other end of the first spiral groove 1002 communicates with one end of the vertical groove 1001 in another group of the adjustment groove groups.

[0057] Taking the embodiment combined with all the features described in this application as an example, when in use, the lead screw column 8 is driven to rotate separately by another group of drive components, and the threaded sleeve 9 is driven to move along the length direction of the lead screw column 8 through threaded cooperation.

[0058] The sliding sleeve 11 moves synchronously with the movement of the threaded sleeve 9, thereby driving the protruding column 1101 to slide in the adjustment groove groups.

[0059] When the protruding column 1101 slides in the vertical groove 1001, the drive shaft 10 does not rotate. At this time, the slip ring 14 does not move, and the pitch of the spiral coil 12 does not change.

[0060] When the protruding column 1101 slides in the first spiral groove 1002, through the mutual extrusion between the protruding column 1101 and the first spiral groove 1002, the drive shaft 10 can be driven to rotate, thereby driving the slip ring 14 to move to shorten the pitch of the spiral coil 12, so as to increase the number of turns of the spiral coil 12 wrapped around the discharge chamber 5.

[0061] When the protruding column 1101 slides in multiple adjustment groove groups, the slip ring 14 can be intermittently moved, thereby gradually increasing the number of turns of the spiral coil 12 wrapped around the discharge chamber 5.

[0062] After the device is started from the stationary state, by driving the slip ring 14 to move intermittently through the reinforcement structure, the kinetic energy of the high-energy particles colliding with hydrogen can be gradually increased, which can effectively avoid sudden magnetic field shocks (if a high-turn magnetic field is directly applied, impedance mismatch may occur due to a sudden increase in plasma density; such as a sharp increase in radio frequency reflected power). By dynamically matching the ionization process: initially, a low number of turns allows the gas to be fully ionized, and then the magnetic field is gradually enhanced to increase the energy density, avoiding the constraint failure of "strong first and then weak".

[0063] By dynamically matching the magnetic field intensity with high-energy particles, a low-damage and high-stability discharge startup is achieved.

[0064] Moreover, through the threaded fit and the sliding fit between the protruding column 1101 and the adjustment groove group, the rate and amount of increase in the number of turns of the spiral coil 12 surrounded by the discharge chamber 5 can be effectively controlled, avoiding fluctuations in the rate and amount of increase in the number of turns caused by frequent startup and sudden stop of the drive assembly, which reduces the control accuracy and affects the precise control of the generation efficiency of hydrogen negative ions.

[0065] In another embodiment of the present invention, the reinforcement structure further includes an adjustment shaft 27 rotatably mounted on the mounting frame 7; the slip ring 14 is sleeved on the adjustment shaft 27; a second spiral groove 2701 is provided on the adjustment shaft 27; and a protruding column 1401 slidably engaged with the second spiral groove 2701 is fixedly installed on the slip ring 14.

[0066] Taking the embodiment combined with all the features described in this application as an example, when in use, when the drive shaft 10 rotates, it can drive the adjustment shaft 27 to rotate through a belt, thereby driving the rotation of the second spiral groove 2701, and driving the slip ring 14 to move through the sliding fit with the protruding column 1401.

[0067] In the initial state, the amount of slip rings 14 between the two slip rings 14 in contact with the static contact 1301 is small. When the slip ring 14 moves, the distance between the slip rings 14 will gradually decrease; so that one slip ring 14 in contact with the static contact 1301 is disengaged, and the other slip ring 14 will gradually come into contact with the static contact 1301. After re-contact, the amount of slip rings 14 between the two slip rings 14 will increase, thereby increasing the number of turns of the spiral coil 12 surrounding the outside of the discharge chamber 5, and thus increasing the collision kinetic energy of high-energy particles.

[0068] After the device is started from the stationary state, by means of the reinforcement structure driving the slip ring 14 to move intermittently, the kinetic energy of high-energy particles colliding with hydrogen can be gradually increased, effectively avoiding sudden magnetic field shocks (if a high-turns magnetic field is directly applied, impedance mismatch may occur due to a sudden increase in plasma density; such as a sharp increase in radio frequency reflected power), and through dynamic matching of the ionization process: initially low turns allow the gas to be fully ionized, and then the magnetic field is gradually enhanced to increase the energy density, avoiding the constraint failure of "strong first and then weak".

[0069] By dynamically matching the magnetic field intensity with high-energy particles, a low-damage and high-stability discharge startup is achieved.

[0070] Moreover, through the sliding fit between the convex column 1401 and the second helical groove 2701, the pitches of the helical coil 12 surrounded by the discharge chamber 5 are substantially the same, so that the collision kinetic energies of the high-energy particles in the discharge chamber 5 are relatively balanced, thereby enabling the hydrogen to be electrolyzed uniformly in the discharge chamber 5, and thus reducing the impurity content in the subsequent diffusion chamber 6.

[0071] In another embodiment of the present invention, a first turntable 17 is rotatably installed at one end of the valve tube 16 away from the discharge chamber 5; the first turntable 17 is connected to the adjusting shaft 27 by a belt; multiple inclined grooves 1701 are formed on the first turntable 17; a first sliding column 1801 slidably engaged with the inclined groove 1701 is fixedly installed on the conduction plate 18; the conduction plates 18 are equidistantly distributed along the circumferential direction of the valve tube 16.

[0072] Taking the embodiment in which all the features described in this application are combined as an example, when in use, when the adjusting shaft 27 rotates, it can drive the first turntable 17 to rotate through the belt, thereby driving the inclined groove 1701 to rotate.

[0073] Through the sliding fit between the inclined groove 1701 and the first sliding column 1801, the conduction plate 18 can be driven to rotate, thereby gradually increasing the conduction area between the valve tube 16 and the drying tank 4.

[0074] In the initial stage of the device startup, the conduction area between the valve tube 16 and the drying tank 4 is small; since the number of turns of the helical coil 12 surrounded by the discharge chamber 5 is small and the collision kinetic energy of the high-energy particles is low, the vacuum pump 15 controls the amount of hydrogen entering the discharge chamber 5 to be small, so as to avoid excessive hydrogen entering the discharge chamber 5 and causing incomplete reaction, resulting in a high impurity content in the diffusion chamber 6.

[0075] As the number of turns of the helical coil 12 surrounded by the discharge chamber 5 increases step by step, the conduction area between the valve tube 16 and the drying tank 4 also gradually increases, and the amount of hydrogen entering also increases; the relatively balanced increase amount can effectively improve the production efficiency of the device; through the dynamic matching of the hydrogen injection amount and the high-energy particles, a low-damage and high-stability discharge startup is achieved.

[0076] In another embodiment of the present invention, notch openings 1802 are formed on the conduction plate 18; the multiple notch openings 1802 cooperate with each other.

[0077] Taking the embodiment in which all the features described in this application are combined as an example, when in use, when the conduction plates 18 are in contact with each other, the multiple notch openings 1802 cooperate with each other to form a channel, and at this time, hydrogen can smoothly enter the discharge chamber 5; when the conduction plates 18 rotate away from each other, the notch openings 1802 are disengaged from each other and move away from each other, thereby increasing the conduction area of the valve tube 16.

[0078] In another embodiment of the present invention, the moving contact 2301 is elastic; and the moving contact 2301 is in an "L" shape.

[0079] Taking the embodiment combined with all the features described in this application as an example, during use, the moving contact 2301 is in elastic contact with the fixed contact 2501, thereby avoiding poor contact of the contacts. By cooperating with its "L" shape characteristic, it can compensate for the frictional consumption and avoid poor contact of the contacts caused by the frictional consumption of the moving contact 2301 after long-term use.

[0080] In another embodiment of the present invention, a plurality of heat dissipation grooves 701 for reducing the temperature inside the mounting frame 7 are provided on the mounting frame 7.

[0081] Taking the embodiment combined with all the features described in this application as an example, during use,. The stability inside the mounting frame 7 is reduced through the heat dissipation grooves 701, and the heat accumulation generated when the discharge chamber 5 operates is avoided, thereby improving the stability of the device.

[0082] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0083] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A negative hydrogen ion generating device controlled by step-by-step radio frequency discharge, comprising a chassis; It is characterized in that A gas tank, a purification tank, a drying tank, multiple groups of discharge chambers and a diffusion chamber are fixedly installed in the chassis; A vacuum pump is provided between the multiple groups of discharge chambers, and the discharge chambers are connected to the vacuum pump via a conduit; The outer sleeve of the discharge chamber is provided with a spiral coil; a plurality of slip rings are fixedly installed on the spiral coil; a guide rail slidably engaged with the slip ring is fixedly installed on the mounting frame; a plurality of static contacts are fixedly installed on the guide rail; The mounting frame is fixedly mounted with a wiring board and a plurality of fixed contacts; the mounting frame is rotatably mounted with a movable contact that cooperates with the fixed contacts; The fixed contact is connected to a group of the static contacts through a wire; and the movable contact is connected to another group of the static contacts through a wire; A mounting frame is fixedly installed in the chassis; the discharge chamber is fixedly installed on the mounting frame, a valve tube fixedly installed on the mounting frame is provided between one of the discharge chambers and the drying tank; multiple groups of conduction plates and multiple groups of closing plates are rotatably installed on the valve tube; The mounting frame is provided with a step-by-step discharge structure and a conduction structure; when the conduction structure is in action, it drives the closing plate to rotate, so as to quickly complete the conduction and closing of the valve tube, and the step-by-step discharge structure can drive the moving contact to rotate after the valve tube is reclosed, so as to cooperate with multiple groups of fixed contacts in sequence, so as to energize the multiple spiral coils; The mounting frame is provided with a reinforcement structure; the reinforcement structure can drive the slip ring to slide on the guide rail to increase or shorten the pitch of the spiral coil, thereby reducing or increasing the discharge amount of the spiral coil.

2. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 1, characterized in that: The conduction structure includes a rotating disk rotatably mounted on the mounting frame; a plurality of groups of first tooth blocks and second tooth blocks are fixedly mounted on the rotating disk; a gear that can mesh with both the first tooth block and the second tooth block is rotatably mounted on one end of the valve tube close to the discharge chamber; a second rotating disk rotatably connected to the valve tube is fixedly mounted on the gear; a plurality of groups of arc-shaped sliding grooves connected to the ends are provided on the second rotating disk; a second sliding column that is slidably engaged with the arc-shaped sliding groove is fixedly mounted on the closing plate; and the closing plates are equidistantly distributed along the circumference of the valve tube.

3. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 2, characterized in that: The step-by-step discharge structure includes a conduction turntable rotatably mounted on the mounting frame; the conduction turntable and the rotating disk are connected via a belt; the moving contact is fixedly mounted on the conduction turntable; a fixing ring is fixedly mounted on the mounting frame; the fixed contacts are equidistantly distributed along the circumference of the fixing ring; a resisting contact that resists the conduction turntable is fixedly mounted on the mounting frame; the resisting contact and a group of the static contacts are respectively connected to the positive and negative electrodes of a power source.

4. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 1, characterized in that: The reinforcement structure includes a screw column and a drive shaft rotatably mounted on the mounting frame; a threaded sleeve is threadedly connected to the screw column; a sliding sleeve is sleeved on the drive shaft and fixedly connected to the threaded sleeve; a plurality of mutually connected adjustment groove groups are provided on the drive shaft; a protruding column is fixedly mounted on the sliding sleeve and slidably engages with the adjustment groove group.

5. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 4, characterized in that: The adjustment groove group includes a vertical groove and a first spiral groove; one end of the vertical groove is connected to one end of the first spiral groove; the other end of the vertical groove is connected to one end of the first spiral groove in another group of the adjustment groove group; the other end of the first spiral groove is connected to one end of the vertical groove in another group of the adjustment groove group.

6. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 4, characterized in that: The reinforcement structure also includes an adjustment shaft rotatably mounted on the mounting frame; the slip ring is sleeved on the adjustment shaft; a second spiral groove is provided on the adjustment shaft; and a protruding column is fixedly mounted on the slip ring and is slidably engaged with the second spiral groove.

7. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 6, characterized in that: A first turntable is rotatably mounted on one end of the valve tube away from the discharge chamber; the first turntable is connected to the adjustment shaft via a belt; a plurality of groups of inclined grooves are provided on the first turntable; a first sliding column slidably engaged with the inclined grooves is fixedly mounted on the conduction plate; the conduction plates are equidistantly distributed along the circumference of the valve tube.

8. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 1, characterized in that: The conduction plate is provided with slots; a plurality of the slots cooperate with each other.

9. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 1, characterized in that: The moving contact is elastic and is in an "L" shape.

10. The negative hydrogen ion generating device controlled by step-by-step radio frequency discharge according to claim 1, characterized in that: The installation frame is provided with a plurality of heat dissipation slots for reducing the temperature inside the installation frame.

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