Beam data acquisition system and data acquisition method of ion implanter

Abstract

The invention provides a beam data acquisition system and a beam data acquisition method of an ion implanter, and relates to the field of semiconductor equipment manufacturing. According to the beam data acquisition system, the intermediate control element communicates with the motion control module and the beam data acquisition module in the same communication mode, so that the synchronism between the motion control module and the beam data acquisition module is ensured, and the communication efficiency of the beam data acquisition system is improved. Moreover, the intermediate controller, the motion control module and the beam data acquisition module can be separated from the upper computer to operate independently, so that the beam data acquisition system can still complete the beam data acquisition function when the upper computer fails or communication is interrupted, and the stability of the beam data acquisition system is improved. In addition, acquisition of various beam data is also realized.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment manufacturing, and particularly to a beam current data acquisition system and a data acquisition method for an ion implanter. Background Art

[0002] An ion implanter is a device used for semiconductor doping and material surface modification. Specifically, an ion implanter can accelerate specific types of ions to a high-energy state to obtain an ion beam current (simply referred to as beam current), thereby precisely controlling the beam current and injecting the beam current into materials such as semiconductors to change the electrical or physical properties of the materials such as semiconductors.

[0003] Refer to Figure 1 As shown, the host computer in the beam current data acquisition system uses different communication methods to communicate with the motion control module and the beam current data acquisition module respectively. The motion control module can drive the beam current data acquisition module to move within a set range, so as to realize the data acquisition of the beam current emitted by the ion implanter by the beam current data acquisition module.

[0004] However, with the above beam current data acquisition system, since the host computer needs to use different communication methods to communicate with the motion control module and the beam current data acquisition module, and the motion control module and the beam current data acquisition module cannot communicate directly, this will lead to poor synchronization and low communication efficiency between different modules in the beam current data acquisition system. Summary of the Invention

[0005] Embodiments of this application provide a beam current data acquisition system and a data acquisition method for an ion implanter, so as to improve the synchronization and communication efficiency between the motion control module and the beam current data acquisition module in the beam current data acquisition system.

[0006] In a first aspect, embodiments of this application provide a beam current data acquisition system for an ion implanter. The beam current data acquisition system includes: an intermediate controller, a motion control module, and a beam current data acquisition module, where

[0007] The intermediate controller receives a data acquisition request from the host computer for the beam current emitted by the ion implanter, and sends a first control instruction to the motion control module and the beam current data acquisition module through a set communication method; the first control instruction is used to instruct the motion control module and the beam current data acquisition module to run synchronously;

[0008] The beam current data acquisition module sends at least one type of beam current data collected to the intermediate controller; each type of beam current data represents a beam current characteristic of the beam current.

[0009] In an alternative embodiment, the beam current data acquisition module includes at least one beam current data acquisition sub-module, and each beam current data acquisition sub-module is used to acquire data on a beam current characteristic of the beam current.

[0010] In an alternative embodiment, the beam current characteristic is beam current parallelism, beam current uniformity, or a two-dimensional beam current characteristic.

[0011] In an alternative embodiment, the intermediate controller is further configured to perform status detection on the motion control module and the beam current data acquisition module to obtain corresponding status detection results; the status detection results are used to indicate whether an abnormality has occurred in the motion control module and / or the beam current data acquisition module.

[0012] In an alternative embodiment, if the status detection result indicates that the motion control module and / or the beam current data acquisition module is in an abnormal state;

[0013] then the intermediate controller sends a second control instruction to the motion control module and the beam current data acquisition module; the second control instruction is used to instruct the motion control module and the beam current data acquisition module to stop running.

[0014] In an alternative embodiment, the intermediate controller is further configured to report the at least one beam current data to the host computer when it is determined that the beam current data acquisition module has completed the data acquisition of the beam current;

[0015] and send a data acquisition end response of the beam current to the host computer.

[0016] In an alternative embodiment, the intermediate controller is further configured to synchronously obtain the position information of the motion control module each time it obtains the beam current data acquired by the beam current data acquisition module.

[0017] In a second aspect, an embodiment of the present application further provides a method for acquiring beam current data of an ion implanter, which is applied to an intermediate controller in the beam current data acquisition system as described in the first aspect. The method includes:

[0018] Receiving a data acquisition request for the beam current emitted by the ion implanter sent by the host computer;

[0019] Sending a first control instruction to the motion control module and the beam current data acquisition module through a set communication method; the first control instruction is used to instruct the motion control module and the beam current data acquisition module to run synchronously;

[0020] Obtaining at least one beam current data acquired by the beam current data acquisition module; wherein each beam current data characterizes a beam current characteristic of the beam current.

[0021] In an alternative embodiment, the method further includes:

[0022] Performing a status detection on the motion control module and the beam current data acquisition module to obtain a status detection result; the status detection result is used to indicate whether an abnormality occurs in the motion control module and / or the beam current data acquisition module;

[0023] If the status detection result indicates that the motion control module and / or the beam current data acquisition module is in an abnormal state, a second control instruction is sent to the motion control module and the beam current data acquisition module; the second control instruction is used to instruct the motion control module and the beam current data acquisition module to stop running.

[0024] In an alternative embodiment, the obtaining at least one beam current data collected by the beam current data acquisition module includes:

[0025] According to a set data acquisition period, simultaneously obtaining the position information of the motion control module and at least one beam current data collected by the beam current data acquisition module.

[0026] The beneficial effects of the present application are as follows:

[0027] In the beam current data acquisition system of the ion implanter provided in the embodiment of the present application, after receiving a data acquisition request for the beam current from the host computer, the intermediate controller can send a first control instruction for instructing the motion control module and the beam current data acquisition module to run synchronously to the motion control module and the beam current data acquisition module through a set communication method, so as to receive at least one beam current data collected by the beam current data acquisition module. It can be seen that the intermediate control component uses the same communication method to communicate with the motion control module and the beam current data acquisition module, ensuring the synchronization between the motion control module and the beam current data acquisition module, and also improving the communication efficiency of the beam current data acquisition system. Moreover, the intermediate controller, the motion control module, and the beam current data acquisition module can operate independently of the host computer, so that when the host computer fails or the communication is interrupted, the beam current data acquisition system can still complete the function of collecting beam current data, thereby improving the stability of the beam current data acquisition system. In addition, the acquisition of beam current data with multiple beam current feature dimensions is also realized.

[0028] In addition, other features and advantages of the present application will be described in the subsequent specification, and, in part, will be obvious from the specification, or will be understood by implementing the present application. The objectives and other advantages of the present application can be achieved and obtained through the structures specifically pointed out in the written specification, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described herein are used to provide a further understanding of the present application, form a part of the present application, and do not constitute an improper limitation to the present application. In the drawings:

[0030] Figure 1 It is a schematic diagram of the system architecture of an existing beam current data acquisition system provided by an embodiment of the present application;

[0031] Figure 2 It is a schematic diagram of the application scenario of a beam current data acquisition system of an ion implanter provided by an embodiment of the present application;

[0032] Figure 3 It is a schematic diagram of the composition structure of a beam current data acquisition module provided by an embodiment of the present application;

[0033] Figure 4 It is a schematic diagram of the implementation process of a beam current data acquisition method provided by an embodiment of the present application. Specific Embodiments

[0034] The following will describe the embodiments of the present application in more detail with reference to the drawings. Although some embodiments of the present application are shown in the drawings, it should be understood that the present application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Instead, these embodiments are provided to more thoroughly and completely understand the present application. It should be understood that the drawings and embodiments of the present application are only for exemplary purposes and are not used to limit the protection scope of the present application.

[0035] It should be understood that the various steps described in the method embodiments of the present application can be executed in different orders and / or in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this regard.

[0036] The term "including" and its variations used herein are open-ended, that is, "including but not limited to". The term "based on" is "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts such as "first" and "second" mentioned in the present application are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependent relationships.

[0037] It should be noted that the modifications of "one" and "multiple" mentioned in this application are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly specified in the context, it should be understood as "one or more".

[0038] The names of the messages or information exchanged between multiple devices in the embodiments of this application are only for illustrative purposes and are not used to limit the scope of these messages or information.

[0039] First, a brief introduction to the design concept of the embodiments of this application is as follows:

[0040] As Figure 1 shown, the beam current data acquisition system for the beam current emitted by an ion implanter generally consists of three parts: a host computer, a motion control module, and a beam current data acquisition module. Due to the differences between the motion control module and the beam current data acquisition module, the host computer usually uses different communication methods to communicate with the motion control module and the beam current data acquisition module. Moreover, the motion control module and the beam current data acquisition module do not communicate with each other. Therefore, it is impossible to determine whether the other party is in a normal working state, and the host computer needs to complete data verification to ensure the synchronization of data between the two. It can be seen that the synchronization between different modules in the existing beam current data acquisition system is poor and the communication efficiency is low.

[0041] In view of this, in order to improve the problems of poor synchronization and low communication efficiency between different modules (i.e., the motion control module and the beam current data acquisition module) in the beam current data acquisition system. The embodiments of this application provide a schematic diagram of an application scenario of a beam current data acquisition system. Refer to Figure 2 shown, this application scenario includes a host computer 21 and a beam current data acquisition system 22 of an ion implanter. Among them, the beam current data acquisition system 22 may include: an intermediate controller 221, a motion control module 222, and a beam current data acquisition module 223. Information interaction can be carried out between the intermediate controller 221, the host computer 21, the motion control module 222, and the beam current data acquisition module 223 through a communication network. Among them, the communication methods adopted by the aforementioned communication network may include: wireless communication methods and wired communication methods.

[0042] Exemplarily, the intermediate controller 221 can access the network through cellular mobile communication technology and communicate with the host computer 21, the motion control module 222, and the beam current data acquisition module 223. Among them, the cellular mobile communication technology, for example, includes the fifth generation mobile networks (5G) technology or the next generation mobile communication technology.

[0043] Optionally, the intermediate controller 221 can access the network through short-range wireless communication and communicate with the host computer 21, the motion control module 222, and the beam current data acquisition module 223. Among them, the short-range wireless communication method, for example, includes wireless fidelity (Wi-Fi) technology.

[0044] It should also be noted that the above-mentioned communication devices or communication modules may have other names, which are not specifically limited in the embodiments of the present application. Exemplarily, the motion control module 222 may also be referred to as a motion control component, and the beam current data acquisition module 223 may also be referred to as a beam current acquisition component.

[0045] The embodiments of the present application do not impose any restrictions on the number of communication devices or communication modules involved in the above application scenarios. For example, the above application scenarios may include more host computers, or may not include a host computer, or may also include other network devices. As Figure 2 shown, only the host computer 21, the intermediate controller 221, the motion control module 222, and the beam current data acquisition module 223 are taken as examples for description. Below, a brief introduction to the above-mentioned communication devices or communication modules and their respective functions is given.

[0046] The host computer 21 refers to a computer that can directly issue control instructions, and generally can provide a user operation interaction interface and display feedback data to the user. Exemplarily, the host computer 21 may include, but is not limited to: mobile phones, tablet computers, laptop computers, palmtop computers, mobile internet devices (MIDs), wearable devices, virtual reality (VR) devices, augmented reality (AR) devices, wireless terminal devices in industrial control, wireless terminal devices in unmanned driving, wireless terminal devices in smart grids, wireless terminal devices in transportation safety, wireless terminal devices in smart cities, or wireless terminal devices in smart homes, etc.

[0047] The host computer 21 usually can send control instructions to the lower computer. After receiving the control command, the lower computer executes corresponding actions and feeds back the obtained results to the host computer. Conceptually, the controller and the service provider are the host computer 21, and the controlled and the serviced are the lower computer, which can also be understood as the relationship between the host and the slave. It should be noted that the host computer 21 and the lower computer are relative, and the host computer 21 and the lower computer can be converted.

[0048] Exemplarily, in the embodiment of the present application, the intermediate controller 221 may be a slave computer of the host computer 21. That is, the host computer 21 may send a data acquisition request for the beam current emitted by the ion implanter to the intermediate controller 221, so that the intermediate controller 221 executes the subsequent beam current data acquisition method. Among them, the aforementioned data acquisition request may be an instruction for instructing the intermediate controller 221 to start beam current data acquisition. It can be seen that when the host computer 21 controls the beam current data acquisition system, it only needs to interact with the intermediate controller 221, and the communication content is relatively simple. To a certain extent, this also enables the beam current data acquisition system to operate independently of the host computer 21. When the host computer 21 fails or the communication is interrupted, the beam current acquisition function can still be completed. Moreover, when the beam current data acquisition system executes beam current data acquisition, only one start instruction (i.e., data acquisition request) needs to be sent by the host computer 21, and the subsequent beam current data acquisition process is completed by the intermediate controller 221, and the acquisition process is simple and efficient.

[0049] The intermediate controller 221 may receive the data acquisition request sent by the host computer 21, and then send a first control instruction to the motion control module 222 and the beam current data acquisition module 223 through a set communication method. Among them, the aforementioned first control instruction is used to instruct the motion control module 222 and the beam current data acquisition module 223 to run synchronously. In other words, after receiving the data acquisition request from the host computer 21, the intermediate controller 221 can start the acquisition of beam current data, and then send start instructions (i.e., the first control instruction) to the motion control module 222 and the beam current data acquisition module 223 simultaneously through a set communication method, thereby ensuring the synchronous operation of the motion control module 222 and the beam current data acquisition module 223.

[0050] Specifically, during the acquisition process of beam current data, the motion control module 222 moves the beam current data acquisition module 223 within a specified range to realize the acquisition of beam current data by the beam current data acquisition module 223.

[0051] The aforementioned set communication method may be a communication method based on Ethernet Control Automation Technology (EtherCAT). Of course, it may also be other communication methods, and the embodiment of the present application does not make specific limitations in this regard. By adopting this communication method, when the intermediate controller 221 communicates with the motion control module 222 and the beam current data acquisition module 223, the communication cycle is the same and fixed, so that the acquired data has high synchronization and stability.

[0052] Further, the intermediate controller 221 can obtain at least one type of beam current data collected by the beam current data acquisition module 223; wherein, each type of beam current data characterizes a beam current feature of the beam. Optionally, the aforementioned beam current feature may be beam current parallelism, beam current uniformity, or beam current two-dimensional feature. Among them, beam current parallelism refers to the straightness or parallelism of the beam in a specific direction, which can affect the focusing and transmission efficiency of the beam, and further affect the overall performance of the ion implanter. For example, a beam with high beam current parallelism can be more effectively focused on the target, thereby improving the stability and efficiency of the ion implanter. Beam current uniformity refers to the degree of uniformity of the beam current density extracted from the entire extraction plane of the gate of the ion implanter (or called ion booster), usually represented by beam straightness, and is an important indicator for measuring or evaluating the performance of the ion implanter. The beam current data corresponding to the beam current two-dimensional feature is also the two-dimensional (projection or image) data of the beam, which is obtained by the projection of the beam on a set plane. Therefore, the beam current two-dimensional feature can be used to provide the shape and structure information of the beam on the set plane.

[0053] Optionally, the aforementioned beam current feature may further include beam current three-dimensional feature, etc., and the embodiments of the present application do not make specific limitations thereon. Among them, the beam current data corresponding to the beam current three-dimensional feature is also the three-dimensional (projection or image) data of the beam, which is three-dimensional image data with depth information obtained by processing and reconstructing the two-dimensional (projection or image) data. Therefore, the beam current three-dimensional feature can be used to provide the three-dimensional structure information of the beam, and is more suitable for applications that require precise analysis.

[0054] In an optional implementation manner, the beam current data acquisition module 223 may include at least one beam current data acquisition sub-module, and each beam current data acquisition sub-module is used to collect data of a beam current feature of the beam. Among them, the aforementioned beam current acquisition sub-module may also be called a beam current acquisition cup or a beam current data acquisition cup, etc.

[0055] For example, referring to Figure 3 As shown, taking the beam current data acquisition module 223 including 3 beam current data acquisition sub-modules as an example. Among them, the first beam current data acquisition sub-module 2231 is used to collect the first type of beam current data of the beam, and the first type of beam current data is used to characterize the beam current parallelism of the beam. The second beam current data acquisition sub-module 2232 is used to collect the second type of beam current data of the beam, and the second type of beam current data is used to characterize the beam current uniformity of the beam. The third beam current data acquisition sub-module 2233 is used to collect the third type of beam current data of the beam, and the third type of beam current data is used to characterize the two-dimensional feature of the beam.

[0056] Since the beam current data acquisition module 223 includes various types of beam current data acquisition sub-modules (such as the first beam current data acquisition sub-module 2231, the second beam current data acquisition sub-module 2232, and the third beam current data acquisition sub-module 2233), it is possible to simultaneously acquire various types of beam current data, avoiding the problem that the existing beam current data acquisition system can only acquire one type of beam current data and cannot simultaneously acquire multiple types of beam current data, resulting in a single function.

[0057] Exemplarily, the existing beam current acquisition system can acquire beam current data representing the beam parallelism, but cannot acquire the beam current data corresponding to the beam uniformity and the two-dimensional characteristics of the beam respectively.

[0058] Moreover, the existing beam current data acquisition system only acquires one beam current characteristic in a single acquisition. If multiple beam current characteristics need to be acquired, multiple beam current data acquisition modules and multiple acquisitions are required to complete the acquisition work, resulting in low efficiency. Therefore, the beam current data acquisition module 223 provided by the embodiments of the present application improves the acquisition efficiency of beam current data.

[0059] It should be understood that simultaneously acquiring multiple types of beam current data only requires the motion control module 222 to move once, without any other actions or repeated movements, reducing the energy consumption and cost caused by the multiple movements of the motion control module 222.

[0060] In an alternative implementation, the intermediate controller 221 can also be used to detect the states of the motion control module 222 and the beam current data acquisition module 223, and obtain corresponding state detection results. The foregoing state detection results can be used to indicate whether the motion control module 222 and / or the beam current data acquisition module 223 has an abnormality.

[0061] Exemplarily, the intermediate controller 221 can detect the states of the motion control module 222 and the beam current data acquisition module 223 according to a set state detection period (such as 1 minute) to obtain corresponding state detection results. Of course, the intermediate controller 221 can also perform real-time state detection on the motion control module 222 and the beam current data acquisition module 223.

[0062] If the status detection result is (or indicates) that the motion control module 222 and / or the beam current data acquisition module 223 is in an abnormal state, the intermediate controller 221 may send a second control instruction to the motion control module 222 and the beam current data acquisition module 223. Among them, the foregoing second control instruction may be used to instruct the motion control module 222 and the beam current data acquisition module 223 to stop operating. In this way, during the process of beam current data acquisition, if any one of the motion control module 222 and the beam current data acquisition module 223 is abnormal, the beam current data acquisition process is aborted, which not only ensures the accuracy of the acquired beam current data, but also reduces the acquisition of invalid beam current data.

[0063] For example, during the operation of the beam current data acquisition system, once it is found that any one of the motion control module 222 and the beam current data acquisition module 223 is abnormal, the intermediate controller 221 can abort the motion control module 222 and the beam current data acquisition module 223 within a set time (e.g., 1 ms). That is, stop the beam current data acquisition work of the beam current data acquisition system.

[0064] In an alternative implementation, the intermediate controller 221 can also be used to report at least one type of beam current data collected to the host computer 21 when it is determined that the beam current data acquisition module 223 has completed the data acquisition of the beam current; and send a beam current data acquisition end response to the host computer 21. In this way, the host computer 21 can obtain the complete beam current data (i.e., the foregoing at least one type of beam current data) collected by the beam current data acquisition module 223 without participating in the specific beam current data acquisition process, thereby reducing the risk of beam current data acquisition failure caused by abnormal communication of the host computer 21.

[0065] In an alternative implementation, the intermediate controller 221 can also be used to synchronously obtain the position information of the motion control module 222 each time it obtains the beam current data collected by the beam current data acquisition module 223. Exemplarily, the intermediate controller 221 can simultaneously obtain the position information of the motion control module 222 and at least one type of beam current data collected by the beam current data acquisition module 223 according to a set data acquisition period (e.g., every 20 s). It should be noted that the position information of the motion control module 222 can determine or represent the position information of the beam current data acquisition module 223.

[0066] Based on the above method, the intermediate controller 221 can determine the synchronization between the motion control module 222 and the beam current data acquisition module 223 while obtaining the corresponding position information when obtaining the beam current data. That is, it can be determined whether the beam current data reported by the beam current data acquisition module 223 to the intermediate controller 221 is the beam current data collected by the beam current data acquisition module 223 driven by the motion control module 222 by analyzing the beam current data and the position information at the same moment.

[0067] In summary, in the beam current data acquisition system of the ion implanter provided by the embodiments of the present application, the intermediate controller communicates with the motion control module and the beam current data acquisition module at a fixed frequency through the set communication method, ensuring the synchronization of motion and data acquisition. Moreover, the host computer only needs to send a start instruction (i.e., a data acquisition request) for the beam current data acquisition system to the intermediate controller, without participating in the specific process of beam current data acquisition, making the beam current data acquisition system more concise and efficient, and also reducing the risk of acquisition failure caused by abnormal communication of the host computer. In addition, various beam current data can be acquired through the beam current data acquisition module, improving the applicable range of the beam current data acquisition system.

[0068] Furthermore, based on the same technical concept, the embodiments of the present application also provide a method for acquiring beam current data of an ion implanter to improve the synchronization and communication efficiency between the motion control module and the beam current data acquisition module in the beam current data acquisition system. Exemplarily, refer to Figure 4 As shown, it is a schematic flowchart of the implementation process of a method for acquiring beam current data provided by the embodiments of the present application. Taking the intermediate controller in the beam current data acquisition system shown above Figure 2 as an example, the specific implementation process of this method is as follows:

[0069] S401: Receive a data acquisition request for the beam current emitted by the ion implanter sent by the host computer.

[0070] Specifically, when performing step S401, the target user can send a data acquisition request for the beam current emitted by the ion implanter to the intermediate controller through the host computer. Correspondingly, the intermediate controller can receive the data acquisition request for the beam current emitted by the ion implanter sent by the host computer. The above data acquisition request is also the start request of the beam current data acquisition system.

[0071] S402: Send a first control instruction to the motion control module and the beam current data acquisition module through the set communication method.

[0072] Among them, the above set communication method can be a communication method based on EtherCAT, and the above first control instruction can be used to instruct the motion control module and the beam current data acquisition module to run synchronously. It should be noted that the above first control instruction is also the start instruction for the motion control module and the beam current data acquisition module to acquire beam current data.

[0073] S403: Obtain at least one type of beam current data collected by the beam current data acquisition module.

[0074] Among them, each beam current data can characterize a beam current feature of the beam current. For example, the aforementioned indicating a kind of beam current data may include beam current data for characterizing beam current parallelism, beam current uniformity, or two-dimensional beam current features.

[0075] To verify the synchronization between the motion control module and the beam current data acquisition module (i.e., the synchronization between motion and acquisition), when performing step S403, the intermediate controller can simultaneously obtain the position information of the motion control module and at least one kind of beam current data collected by the beam current data acquisition module according to a set data acquisition period (e.g., once every 1 minute). By analyzing the beam current data and the position information at the same moment, it is determined whether the beam current data reported by the beam current data acquisition module to the intermediate controller is the beam current data collected by the beam current data acquisition module driven by the motion control module.

[0076] In an optional implementation manner, the intermediate controller can also perform state detection on the motion control module and the beam current data acquisition module to obtain a state detection result. Among them, the state detection result is used to indicate whether the motion control module and / or the beam current data acquisition module has an abnormality. If the aforementioned state detection result indicates that the motion control module and / or the beam current data acquisition module is in an abnormal state, a second control instruction is sent to the motion control module and the beam current data acquisition module; wherein, the second control instruction is used to indicate the motion control module and the beam current data acquisition module to stop running.

[0077] On the contrary, if the state detection result indicates that the motion control module and / or the beam current data acquisition module is in a normal state, there is no need to send a second control instruction to the motion control module and the beam current data acquisition module.

[0078] In this way, once it is found that the motion control module and the beam current data acquisition module have an abnormality, the acquisition of the beam current data can be aborted, which not only ensures the accuracy of the collected beam current data but also reduces the acquisition of invalid beam current data.

[0079] In an optional implementation manner, after performing step S403, the intermediate controller can also report at least one kind of beam current data to the host computer when determining that the beam current data acquisition module has ended the data acquisition of the beam current; and send a beam current data acquisition end response to the host computer. In this way, the host computer can obtain complete beam current data without participating in the specific beam current data acquisition process, thereby reducing the risk of beam current data acquisition failure caused by abnormal host computer communication.

[0080] Based on the beam current data acquisition method described in the above steps S401 to S403, it is possible to communicate with both the motion control module and the beam current data acquisition module simultaneously through the set communication method, ensuring the synchronization of motion and data acquisition. Moreover, the host computer only needs to send a data acquisition request for the beam current data acquisition system to the intermediate controller and does not need to participate in the specific process of beam current data acquisition, reducing the risk of acquisition failure caused by abnormal communication of the host computer. In addition, through the beam current data acquisition module, it is also possible to achieve the acquisition of various beam current data, improving the applicable range of the beam current data acquisition system.

[0081] Moreover, it should be understood that the above-disclosed is only a preferred embodiment of the present application, and of course, it cannot be used to limit the scope of the rights of the present invention. Therefore, equivalent changes made according to the claims of the present invention still fall within the scope covered by the present application.

Claims

1. A beam data acquisition system for an ion implanter, characterized in that: include: Intermediate controller, motion control module and beam data acquisition module, among which, The intermediate controller receives a data collection request from the host computer for the beam emitted by the ion implanter, and sends a first control instruction to the motion control module and the beam data collection module through a set communication method; the first control instruction is used to instruct the motion control module and the beam data collection module to operate synchronously; The beam data acquisition module sends at least one type of beam data acquired to the intermediate controller; wherein each type of beam data represents a beam feature of the beam.

2. The system according to claim 1, characterized in that The beam data acquisition module includes at least one beam data acquisition submodule, and each beam data acquisition submodule is used to acquire data on a beam characteristic of the beam.

3. The system according to claim 1 or 2, characterized in that: The beam characteristics are beam parallelism, beam uniformity or beam two-dimensional characteristics.

4. The system according to claim 1 or 2, characterized in that: The intermediate controller is further used to perform status detection on the motion control module and the beam data acquisition module to obtain corresponding status detection results; the status detection results are used to indicate whether an abnormality occurs in the motion control module and / or the beam data acquisition module.

5. The system according to claim 4, characterized in that If the state detection result is that the motion control module and / or the beam data acquisition module is in an abnormal state; Then the intermediate controller sends a second control instruction to the motion control module and the beam data acquisition module; the second control instruction is used to instruct the motion control module and the beam data acquisition module to stop running.

6. The system according to claim 1 or 2, characterized in that: The intermediate controller is further configured to report the at least one beam data to the host computer when determining that the beam data acquisition module has finished acquiring the data of the beam; And, sending a data collection completion response of the beam to the host computer.

7. The system according to claim 1 or 2, characterized in that: The intermediate controller is also used to synchronously acquire the position information of the motion control module each time the beam data collected by the beam data collection module is acquired.

8. A beam data acquisition method for an ion implanter, characterized in that: An intermediate controller used in a beam data acquisition system of an ion implanter according to any one of claims 1 to 7, comprising: Receive a data collection request for the beam emitted by the ion implanter sent by the host computer; Sending a first control instruction to the motion control module and the beam data acquisition module through a set communication method; the first control instruction is used to instruct the motion control module and the beam data acquisition module to operate synchronously; At least one type of beam data collected by the beam data collection module is acquired; wherein each type of beam data represents a beam characteristic of the beam.

9. The method according to claim 8, characterized in that The method further comprises: Performing status detection on the motion control module and the beam data acquisition module to obtain status detection results; the status detection results are used to indicate whether an abnormality occurs in the motion control module and / or the beam data acquisition module; If the state detection result shows that the motion control module and / or the beam data acquisition module is in an abnormal state, a second control instruction is sent to the motion control module and the beam data acquisition module; the second control instruction is used to instruct the motion control module and the beam data acquisition module to stop running.

10. The method according to claim 8 or 9, characterized in that The acquiring at least one type of beam data collected by the beam data collection module includes: According to a set data acquisition cycle, the position information of the motion control module and at least one beam data collected by the beam data acquisition module are simultaneously acquired.

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