Diagnostic device for inspection device, diagnostic method for inspection device, and program

By introducing a diagnostic device into the inspection device, and using multiple sets of comparisons and main cause analysis to generate new setting data and reference images, the problem of reduced inspection accuracy is solved, and the appropriateness of inspection conditions and product quality is improved.

CN120188032APending Publication Date: 2025-06-20N TECH +2
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Patent Information

Application Number
CN202380078036.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-11-15
Filing Date
2023-11-10
Publication Date
2025-06-20

AI Technical Summary

Technical Problem

In the inspection device, although the setting data and reference images have been adjusted, the inspection accuracy may still be reduced due to environmental changes and equipment aging, making it difficult to detect inappropriate inspection conditions in a timely manner, which will affect the product yield and productivity of the product.

Method used

A diagnostic device is designed to obtain actual setting data and actual inspection images from the inspection device, compare multiple groups with stored standard setting data and reference images, determine differences, and perform main cause analysis to generate new setting data and reference images to ensure inspection accuracy.

Benefits of technology

It can detect and correct inappropriate inspection conditions early, improve the appropriateness of inspection conditions, ensure product yield and productivity, and provide new setting data and reference images that can improve inspection accuracy.

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Abstract

A diagnostic device (50) is provided with an information acquisition unit (61), a storage unit (52), a determination unit (62), and a diagnostic processing unit (63). An information acquisition unit (61) acquires actual setting data (D1) and an actual inspection image (V1) as actual information from an inspection device (20). A storage unit (52) stores standard setting data (D2) and a reference image (V2) as reference information. A determination unit (62) determines the presence or absence of a difference for each group of comparison objects by performing a plurality of groups of comparisons, including a first comparison for comparing the actual setting data (D1) and the standard setting data (D2) and a second comparison for comparing the actual inspection image (V1) and the reference image (V2), between the actual information and the reference information of the same type. A diagnosis processing unit (63) performs a main cause analysis for analyzing the main cause on the basis of a combination relating to the presence or absence of a difference in each group acquired as the result of the determination, and performs a diagnosis of the inspection device (20) using the diagnosis content corresponding to the result of the obtained main cause analysis.
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Description

Technical Field

[0001] The present invention relates to a diagnostic device for an inspection device of a diagnostic inspection device, a diagnostic method for an inspection device, and a program. Background Art

[0002] Techniques for simulating the inspection of an inspection object by an inspection device are disclosed in Patent Documents 1 to 3. For example, Patent Document 1 discloses a setting support system in which a cloud service edits setting data according to an operation from a PC. The cloud service uses the edited setting data and a workpiece image to simulate an image inspection performed by an image processing device. The cloud service sends the inspection result based on the setting data before editing and the simulation result based on the edited setting data to the PC.

[0003] In addition, Patent Document 2 discloses an image processing system for an inspection device that sets appropriate setting data by simulating the inspection of an inspection object by the inspection device. Patent Document 3 also discloses an appearance inspection device that simulates the determination of the quality of an inspection object using a second inspection condition different from the first inspection condition performed by the inspection device.

[0004] In addition, in order for an inspection device to inspect whether an object to be inspected is a good product or a defective product with necessary accuracy, a test (simulation) is performed using a good product image and a defective product image as reference images for testing. In this test, the setting data is re-evaluated until the necessary accuracy is obtained. Therefore, the setting data that can perform the inspection correctly with the necessary accuracy is set. Prior Art Documents Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2019-95983 Patent Document 2: Japanese Unexamined Patent Application Publication No. 2010-102736 Patent Document 3: Japanese Unexamined Patent Application Publication No. 2011-47698 Summary of the Invention Problems to be Solved by the Invention

[0006] However, in an inspection device, even if setting data for performing a test to obtain necessary accuracy is set at startup or when switching objects, there are sometimes cases where the inspection with necessary accuracy is not performed over time. For example, when the lighting (ambient light) in the factory changes, the inspection lighting unit ages or the camera ages, the shooting conditions of the camera change, the image processing conditions of the inspection image change, etc., even if only one of the conditions in the setting data changes, sometimes the necessary inspection accuracy cannot be obtained. Changes in the factory environment, non-update of the version of the inspection application program (software), etc. also cause the failure to obtain the necessary inspection accuracy.

[0007] In this case, the setting data is adjusted by the operation of the operator. However, sometimes the adjustment of the setting data is inappropriate. In addition, even if the setting data is correct, sometimes the reference image for testing is inappropriate. By using the good product image and the defective product image for the reference image for testing, the setting data can be adjusted to be appropriate. However, when there is aging of the above-mentioned lighting unit or camera, environmental changes, etc., sometimes the reference image used when setting the setting data becomes inappropriate. In this case, even if the setting data is readjusted using the reference image for testing, the setting is inappropriate.

[0008] If the setting data is significantly inappropriate, it is possible to notice abnormalities such as good products being judged as defective products relatively early. However, in the case where the setting data is an inspection condition that slightly deviates from the optimal condition, it is difficult to detect this even if an inspection without obtaining the necessary accuracy is performed. And when the discovery of inappropriate inspections is delayed, it leads to a decrease in the product yield or productivity. Therefore, a diagnostic device for an inspection device that can detect early when inspections are performed under inappropriate inspection conditions is desired. Solutions to the problems

[0009] Hereinafter, the solutions to the above problems and their effects will be described. A diagnostic device for an inspection device that solves the above problems diagnoses the inspection device based on actual information obtained from the inspection device. The diagnostic device for the inspection device includes: an information acquisition unit that acquires actual setting data and actual inspection images as the actual information from the inspection device; a storage unit that stores standard setting data and reference images as reference information; a determination unit that determines the presence or absence of differences for each comparison target group by performing multiple comparisons including a first comparison and a second comparison between the actual information and the reference information of the same type, compares the actual setting data and the standard setting data in the first comparison, and compares the actual inspection image and the reference image in the second comparison; and a diagnostic processing unit that performs a main cause analysis for analyzing the main cause according to the combination related to the presence or absence of differences in each group obtained as the determination result, and diagnoses the inspection device with the diagnostic content corresponding to the obtained main cause analysis result.

[0010] According to this configuration, it is possible to diagnose whether the inspection device performs inspections appropriately. For example, inappropriate inspection conditions can be detected and notified early, and thereby, the frequency of appropriate modification of inspection conditions can be increased.

[0011] In the diagnostic device of the above inspection device, it may also be that when the determination result of the determination unit shows no difference in the first comparison and a difference in the second comparison, the diagnostic processing unit performs a diagnosis to analyze the main cause of the image difference. If the image difference is within the allowable range, based on the difference analysis result, the reference image is processed to generate a new reference image, and an inspection accuracy test using the actual set data and the new reference image is performed. When the accuracy result is insufficient, new set data for improving the inspection accuracy is generated.

[0012] According to this configuration, when the inspection device cannot perform inspections with the necessary accuracy due to the inspection image, new set data that can improve the inspection accuracy can be provided. In the diagnostic device of the above inspection device, it may also be that when the determination result of the determination unit shows a difference in the first comparison and no difference in the second comparison, the diagnostic processing unit performs a diagnosis to analyze the main cause of the set data difference. If the set data difference is within the allowable range, an inspection accuracy test using the actual set data and the reference image is performed based on the difference analysis result. When the accuracy result is insufficient, new set data for improving the inspection accuracy is generated.

[0013] According to this configuration, when the inspection device cannot perform inspections with the necessary accuracy due to the set data, new set data that can improve the inspection accuracy can be provided. In the diagnostic device of the above inspection device, it may also be that when the determination result of the determination unit shows a difference in the first comparison and a difference in the second comparison, the diagnostic processing unit performs a diagnosis to analyze the main cause of the image difference. If the image difference is within the allowable range, a further diagnosis to analyze the main cause of the set data difference is performed. If the set data difference is within the allowable range, based on the image difference analysis result, the reference image is processed to generate a new reference image, and an inspection accuracy test using the actual set data and the new reference image is performed. When the accuracy result is insufficient, new set data for improving the inspection accuracy is generated.

[0014] According to this configuration, when the inspection device cannot perform inspections with the necessary accuracy due to the set data and the inspection image, new set data that can improve the inspection accuracy can be enhanced. The diagnostic device of the above inspection device may also include an output unit for outputting data and an input unit for inputting instructions. The diagnostic processing unit outputs the new set data to the output unit, and if an instruction indicating the intention to adopt the new set data is received from the input unit, the standard set data and the reference image are updated based on the new set data.

[0015] According to this configuration, since the standard setting data and the reference image are updated based on the newly adopted setting data, subsequent inspections by the inspection device can be appropriately performed. The diagnostic device of the inspection device may also store the standard setting data and the reference image before being updated based on the new setting data in the storage unit, and store the differences between the data before update and the newly updated data in the storage unit for at least one of the standard setting data and the reference image that has been updated.

[0016] According to this configuration, by reading out at least one of the standard setting data before update, the reference image, and the differences between the data before and after update from the storage unit, the history of the diagnostic device can be confirmed. For example, the history information can be used to restrict recovery or analysis, as well as to prevent the differences in the setting data and the reference image between multiple identical inspection devices from expanding.

[0017] The diagnostic device of the inspection device may also obtain the actual inspection result as the actual information from the inspection device. When the determination result of the determination unit shows no difference in the first comparison and no difference in the second comparison, the diagnostic processing unit performs a virtual inspection using the actual setting data and the actual inspection image, and conducts a comparative diagnosis between the virtual inspection result and the actual inspection result.

[0018] According to this configuration, when there is a difference between the virtual inspection result and the actual inspection result although neither the setting data nor the inspection image is the cause, it is possible to diagnose whether the inspection process is inappropriate. For example, it is possible to diagnose whether the version of the inspection processing software is inappropriate.

[0019] The diagnostic device of the inspection device may also include a server connected to the inspection device and the terminal via a network. The server includes the information acquisition unit, the storage unit, the determination unit, and the diagnostic processing unit. The server obtains the actual setting data and the actual inspection image from the inspection device and sends the diagnostic result of the diagnostic processing unit to the terminal.

[0020] According to this configuration, the diagnosis of the inspection device can be performed via the network, and the diagnostic result can be confirmed by the terminal via the network. In addition, the server can be either the company's own server or a dedicated diagnostic server provided by the manufacturer, or a cloud server.

[0021] A diagnostic method for an inspection device that solves the above problems diagnoses the inspection device based on actual information obtained from the inspection device. The diagnostic method for the inspection device includes: an information acquisition step in which an information acquisition unit acquires actual setting data and actual inspection images as the actual information from the inspection device; a determination step in which a determination unit determines whether there are differences for each group of comparison objects by performing multiple sets of comparisons including a first comparison and a second comparison between the actual information of the same type with each other and reference information, in the first comparison, the actual setting data and the standard setting data are compared, and in the second comparison, the actual inspection images and the reference images are compared; and a diagnostic processing step in which a diagnostic processing unit diagnoses using diagnostic content corresponding to a combination related to the presence or absence of differences for each of the groups obtained as the determination result.

[0022] According to this method, it is possible to diagnose whether the inspection device is performing inspections appropriately. A program that solves the above problems causes a computer to execute a process of diagnosing the inspection device based on actual information obtained from the inspection device. The program causes the computer to execute: an information acquisition step of acquiring actual setting data and actual inspection images as the actual information from the inspection device; a determination step of determining whether there are differences for each group of comparison objects by performing multiple sets of comparisons including a first comparison and a second comparison between the actual information of the same type with each other and reference information, in the first comparison, the actual setting data and the standard setting data are compared, and in the second comparison, the actual inspection images and the reference images are compared; and a diagnostic processing step of diagnosing using diagnostic content corresponding to a combination related to the presence or absence of differences for each of the groups obtained as the determination result.

[0023] According to this configuration, by a computer executing the program, it is possible to diagnose whether the inspection device is performing inspections appropriately. Advantages of the Invention

[0024] According to the present invention, it is possible to diagnose whether the inspection device is performing inspections appropriately. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic diagram showing an inspection system of an embodiment. Figure 2 is a schematic diagram showing an inspection device. Figure 3 is a schematic diagram showing a reference image stored in a storage unit. Figure 4 is a schematic diagram for explaining an inspection process. Figure 5 is a schematic diagram for explaining an inspection process for extracting defects. Figure 6 is a block diagram showing the electrical configuration of the inspection system. Figure 7 It is a schematic diagram showing data, programs, etc. stored in the second storage unit. Figure 8 It is a diagram showing a decision table. Figure 9 It is a flowchart showing a diagnostic main program. Figure 10 It is a flowchart showing an update process. Figure 11 It is a flowchart showing a diagnostic processing program. Detailed implementation mode

[0026] Hereinafter, the photographing device will be described with reference to the accompanying drawings. <Outline configuration of inspection system 10> Figure 1 Shows the inspection system 10 of this embodiment. The inspection system 10 includes an inspection device 20 and a diagnostic device 50.

[0027] The inspection device 20 is a device for inspecting an inspection object. For example, multiple inspection devices 20 are installed in a factory. The inspection device 20 includes a first computer 31 responsible for control related to inspection. In addition, the inspection device 20 includes: an input operation unit 21 that is operated when a user (operator) gives an instruction to the inspection device 20; and a display unit 22 that displays various menus or setting screens related to inspection. In Figure 1 In the example shown, the inspection device 20 includes a terminal 20T. In addition, the terminal 20T may also be a personal computer independently provided from the inspection device 20. In this case, the terminal 20T may also be communicably connected to multiple inspection devices 20. In short, the terminal 20T only needs to be a device that can be operated and display confirmed by the user of the inspection device 20.

[0028] The diagnostic device 50 diagnoses whether the inspection device 20 performs inspections appropriately. In Figure 1 In the example shown, the diagnostic device 50 is composed of a server 50S connected to the inspection device 20 via a network NW such as the Internet. The server 50S is communicably connected to the inspection device 20 and the terminal 20T via the network NW. In this example, the server 50S is a cloud server 50S, but it may also be a company server 50S or a diagnostic dedicated server 50S provided by the manufacturer. In addition, the diagnostic device 50 includes a second computer 51 responsible for diagnostic processing. The second computer 51 includes a second storage unit 52, and the second storage unit 52 stores information necessary for diagnosis obtained from the inspection device 20. This information includes setting data, inspection images, reference images for testing (simulation), inspection application programs, etc. In addition, the details of the information will be described later.

[0029] <Configuration of inspection device 20> Next, refer to Figure 2 to describe the configuration of the inspection device 20. In addition, Figure 2 This is an example where the article 12 to be inspected is a container.

[0030] As Figure 2 shown, for example, a conveying device 13 is provided in a factory, and the conveying device 13 conveys the article 12 to be inspected. The article 12 is conveyed on a path passing through the inspection area of the inspection device 20 by a conveyor belt 14 of the conveying device 13. The inspection device 20 includes: a lighting unit 23 (light source) that irradiates light to the article 12 located in the inspection area; a camera 24 that captures the article 12; and a sensor 25 that detects the article 12 reaching the inspection area (inspection position).

[0031] When the sensor 25 detects the article 12, the inspection device 20 drives the lighting unit 23 and the camera 24. As a result, the camera 24 captures the article 12 irradiated with light from the lighting unit 23. The image captured by the camera 24 is input as an actual inspection image V1 to the first computer 31. In the inspection device 20, the first computer 31 performs an inspection based on the actual inspection image V1. The inspection result is input to the display unit 22. In addition, when the article 12 inspected by the inspection device 20 is a defective product, a defective product signal is sent to a control device (not shown) of the conveying system. The control device drives a defective product removing mechanism (not shown) based on the defective product signal, thereby removing the article 12 determined to be a defective product from the conveyor belt 14.

[0032] The first computer 31 of the inspection device 20 includes a first storage unit 32. In addition, the first computer 31 includes a control unit 33, a setting processing unit 35, and an inspection processing unit 36. The actual setting data D1, the actual inspection image V1, the actual inspection result data R1, the standard setting data D2, the reference image V2, and the inspection application program AP (hereinafter also simply referred to as "inspection application AP") are stored in the first storage unit 32. In addition, in the present embodiment, the actual setting data D1 and the actual inspection image V1 correspond to an example of the actual information RD. In addition, the standard setting data D2 and the reference image V2 correspond to an example of the reference information SD.

[0033] The control unit 33 controls the lighting unit 23 and the camera 24 based on the detection signal from the sensor 25. The first computer 31 includes: a signal processing unit (not shown) that converts a captured signal obtained from the camera 24 into image data; and an image processing unit (not shown) that performs necessary processing (including image processing) on the image data.

[0034] The setting processing unit 35 sets setting data defined by various setting values by receiving the input values input for each setting item by the user operating the input operation unit 21 in the setting screen (not shown) displayed on the display unit 22. The inspection accuracy varies according to the setting content of the setting data. Therefore, in order to perform the inspection with the required accuracy, it is necessary to set appropriate setting data. The setting data set by the setting processing unit 35 is stored in the first storage unit 32.

[0035] Here, as Figure 2 shown, the setting data includes actual setting data D1 and standard setting data D2. The actual setting data D1 is used for actual inspection, and the standard setting data D2 is set by using the reference image V2 for testing in order to initially determine the setting data. When starting the inspection of the article 12, the standard setting data D2 determined in advance by testing is used as the actual setting data D1. Then, when the inspection accuracy decreases due to various main reasons such as the aging of components such as the lighting unit 23 or the camera 24, or the change of the surrounding or internal environment of the inspection device 20, the user operates the input operation unit 21 to adjust the actual setting data D1.

[0036] For example, when the mounting position or mounting angle of the camera 24 is changed, sometimes the focal length or magnification of the camera 24, and the accompanying shutter speed or aperture value, etc. are changed. The user adjusts the actual setting data D1 by viewing the actual inspection image V1 captured by the camera 24 on the display unit 22 and operating the input operation unit 21 after the display unit 22 displays the setting screen. In this way, the actual setting data D1 is changed.

[0037] The setting data D1, D2 include setting values for determining the shooting conditions of the camera 24, setting values for determining the lighting conditions of the lighting unit 23, setting values for determining the image processing conditions for performing image processing on the inspection image during the inspection process, etc. For example, among the setting values for determining the shooting conditions, there may be mentioned the focal length, magnification, aperture value, shutter speed, gain, etc. In addition, among the setting values for determining the lighting conditions, there may be mentioned the light quantity, light color, emission timing, emission time, etc. In addition, among the setting values for determining the image processing conditions, there may be mentioned the brightness, contrast, other image processing setting values (such as γ correction value, etc.), the threshold value for binarization processing, the setting values for edge processing, etc. In addition, in the case where the camera 24 has a structure in which the focus is fixed and the aperture adjustment or focus adjustment is performed manually, the setting data D1, D2 may not include the setting values related to the aperture value or the focus.

[0038] The inspection processing unit 36 is constructed inside by the first computer 31 executing the inspection application AP read out from the first storage unit 32. The inspection processing unit 36 is composed of software with inspection processing functions. The inspection processing unit 36 is responsible for the inspection processing of the inspection device 20 to inspect the article 12. When using the inspection processing unit 36 (inspection application AP), standard setting data D2 is set for each inspection device 20. In addition, the inspection application AP is upgraded in version regularly or irregularly. The inspection application AP is updated, for example, by downloading a new version of the inspection application AP from the server 50S.

[0039] The inspection processing unit 36 inspects the article 12 using the actual inspection image V1 captured by the camera 24. At this time, the inspection processing unit 36 uses the actual setting data D1 read out from the first storage unit 32. That is, the inspection processing unit 36 inspects the article 12 captured in the actual inspection image V1 by performing processing on the actual inspection image V1 based on the actual setting data D1 (including setting values, thresholds, etc. for image processing). The inspection processing unit 36 determines whether the article 12 is a good product or a defective product during the inspection processing. The inspection processing unit 36 outputs the inspection result of determining whether the article 12 is a good product or a defective product as inspection result data R1. The control unit 33 displays the inspection result data R1 on the display unit 22. In addition, when the inspection result data R1 has a data content indicating a defective product, the control unit 33 controls the above-mentioned defective product removal mechanism.

[0040] The standard setting data D2 and the actual setting data D1 set via the setting processing unit 35 are stored in the first storage unit 32. In addition, a reference image V2 for testing is stored in the first storage unit 32, and the reference image V2 for testing is used to confirm whether the setting content is appropriate when setting the standard setting data D2 or the actual setting data D1. The actual inspection image V1 is also stored in the first storage unit 32, and the actual inspection image V1 is used for actual inspection captured by the camera 24. In addition, the details of the reference image V2 will be described later.

[0041] <Regarding the reference image V2> Next, refer to Figure 3 The reference image V2 for testing will be described. It is described by taking the article 12 as a container as an example. As Figure 3 shown, when the article 12 in the reference image V2 is a container, the article 12 includes a container main body 12A and a label 12B attached to the container main body 12A.

[0042] Before setting the standard setting data D2, the user stores the reference image V2 in the first storage unit 32. As Figure 3As shown, the reference image V2 includes a good product image GV obtained by photographing the good product item 12 with the camera 24 and a defective product image NV obtained by photographing the defective product item 12 with the camera 24. The good product image GV includes various images that should be judged as good products. On the other hand, the defective product image NV includes various images that should be judged as defective products. The defective product image NV includes the defect F of the item 12. The defect F includes dirt F1, breakage F2, etc. In addition, among the defects F, there are printing deviations, scratches, etc. In addition, the inspection processing unit 36 also inspects the misalignment of the label 12B in the item 12, etc., and judges it as a defective product when there is a misalignment of the label 12B. In addition, in the good product image GV, it is also possible to include images of various good products in which defects F such as dirt, breakage, printing deviation, and scratches are within the allowable range assuming that the lighting conditions and shooting conditions are uneven within the allowable range from the central value due to environmental changes, etc.

[0043] The user provides multiple good product images GV and multiple defective product images NV to the inspection processing unit 36 (inspection application AP) for testing (inspection). The setting data is repeatedly adjusted for this test until correct inspection results are obtained with the necessary accuracy in all the good product images GV and all the defective product images NV. The standard setting data D2 is determined through this test. Therefore, if the inspection processing unit 36 performs inspection processing based on the standard setting data D2, the item 12 can be inspected with the necessary inspection accuracy. Therefore, usually, before the item 12 is switched to another number or variety, the standard setting data D2 is used as the actual setting data D1.

[0044] However, for example, if there are problems such as the aging of the components of the inspection device 20 including the lighting unit 23 and the camera 24, the change of the installation position or orientation of the lighting unit 23 or the camera 24, and the environmental change in the factory (for example, including the change of external light, temperature change, etc.), the test time and conditions change. In this case, even if the standard setting data D2 is used as the actual setting data D1, it is sometimes impossible to guarantee the necessary accuracy. For example, if the necessary inspection accuracy is not obtained, the user operates the input operation unit 21 on the setting screen to adjust the actual setting data D1. However, if the adjustment of the actual setting data D1 is inappropriate, the necessary inspection accuracy is not guaranteed. In addition, even if the user performs a test using the reference image V2 to reset the standard setting data D2, there may be a situation where the reference image V2 itself is inappropriate when the conditions or environment change since the generation of the reference image V2. In this case, the necessary inspection accuracy is not guaranteed either.

[0045] Therefore, in the present embodiment, the diagnostic device 50 diagnoses whether the inspection device 20 inspects the inspection object with the necessary accuracy. The diagnostic device 50 not only diagnoses the inspection device 20 to provide a normal / abnormal diagnostic result, but also has an update recommendation function. When the diagnostic result is inappropriate but not abnormal, the update recommendation function provides the user with new data for updating at least one of the standard setting data D2 and the reference image V2. In addition, when the diagnostic device 50 performs diagnosis, the reference image V2 required for diagnosis is stored in the second storage unit 52.

[0046] <Inspection content> Next, refer to Figure 4 , Figure 5 to describe the inspection content. When the actual inspection image V1 shown in Figure 4 is obtained, the inspection processing unit 36 performs edge processing or the like on the actual inspection image V1 to extract the contour line 15 of the article 12. Then, an image of the article 12 is cut out from the actual inspection image V1 along the contour line 15. Next, a defect extraction process for extracting the defect F from the cut-out image of the article 12 is performed. The defect extraction process can be, for example, a binarization process that separates the defect F and other regions with pixel values of 0 and 1, or a comparison process that compares the article image of the inspection object and a good product image (good product sampling image) and extracts the inconsistent region as a defect candidate.

[0047] Through the defect extraction process, for example, candidates for the defect F shown in Figure 5 are extracted. According to the set value of the defect extraction process, the area size of the extracted defect F candidate changes. Therefore, according to the set value, there are cases where a defect region FN with an appropriate shape and size for the actual defect F is extracted, a case where an overly large and inappropriate defect region FL is extracted, or a case where an overly small and inappropriate defect region FS is extracted, etc. In the case of extracting inappropriate defect regions FL and FS, a good product is determined to be a defective product, or a defective product is determined to be a good product. In this case, it is necessary to adjust the set value of the defect extraction process.

[0048] When the defect region FN shown in Figure 5 is determined, the inspection processing unit 36 determines whether the defect candidate is a defect based on at least one parameter. The parameter is, for example, the size (e.g., area) and shape of the defect region FN. The shape can also use, for example, the aspect ratio (ratio of the length and width of the rectangle circumscribing the defect region FN) as a parameter. In addition, a parameter for determining color can also be used. For example, a threshold is set for each parameter. The inspection processing unit 36 determines whether each parameter value exceeds the threshold. Then, the inspection processing unit 36 determines whether the defect F candidate is a defect based on the combination of the determination results of all parameters. In addition, by Figure 4In [reference], the reference image V2 is used to replace the actual inspection image V1, so that the inspection processing unit 36 performs tests using the same inspection processing.

[0049] <Electrical Configuration of Inspection Device 20 and Diagnostic Device 50> Next, refer to Figure 6 The electrical configurations of the inspection device 20 and the diagnostic device 50 will be described. Regarding the inspection device 20, it has a structure partially described in Figure 2 That is, as described above, the inspection device 20 includes an input operation unit 21 and a display unit 22 that constitute the terminal 20T, a lighting unit 23, a camera 24, and a sensor 25 that are components of the imaging system.

[0050] In addition, the inspection device 20 includes a first output unit 38 and a first input unit 39 connected to the network NW. Whenever the inspection device 20 receives an information request from the diagnostic device 50 or whenever a predetermined information providing timing is reached, the first output unit 38 outputs at least one (e.g., all) of the actual setting data D1, the actual inspection image V1, the actual inspection result data R1, the standard setting data D2, and the reference image V2 stored in the first storage unit 32 from the first output unit 38 to the diagnostic device 50 via the network NW. In addition, the first output unit 38 outputs instruction data for updating the actual setting data D1 to the diagnostic device 50. Furthermore, the instruction data is data for instructing to update the data in the inspection device 20 to new data generated by the diagnostic device 50.

[0051] The first input unit 39 is, for example, an input interface that can be connected to the network NW. The first input unit 39 inputs data or notifications sent from the diagnostic device 50. The notifications include notifications of diagnostic results. Specifically, in the notification of the diagnostic result, in addition to "normal" and "abnormal", there is also "update recommended" which is not abnormal but recommends the update of the actual setting data D1 or the reference image V2. "Update recommended" includes the update of the actual setting data D1, the update of the reference image V2, the update of the standard setting data D2, etc. When receiving the notification of this update recommendation, new data for updating is sent together. When the first input unit 39 receives the notification of the inspection result, it outputs from the first output unit 38 to the diagnostic device 50 via the network NW.

[0052] The first computer 31 includes a first storage unit 32. The above-mentioned actual setting data D1, actual inspection image V1, inspection result data R1, standard setting data D2, and reference image V2 are stored in the first storage unit 32. In addition, the above-mentioned inspection application AP and other control programs (not shown in the figure) are stored in the first storage unit 32. The first computer 31 executes various programs including the inspection application AP read from the first storage unit 32, thereby including a control unit 33, a setting processing unit 35, an inspection processing unit 36, and an update processing unit 37 as processing function units constituted by software. In particular, the inspection processing unit 36 ​​is constructed as software in its interior by executing the inspection application AP read from the first storage unit 32 by the first computer 31.

[0053] If used Figure 2 As described above, the control unit 33 controls the lighting unit 23 and the camera 24 based on the detection signal from the sensor 25. The first computer 31 includes a signal processing unit (not shown) that converts the shooting signal obtained from the camera 24 into image data, and an image processing unit (not shown) that performs necessary processing (including image processing) on ​​the image data.

[0054] In addition, if you use Figure 2 As described above, the setting processing unit 35 performs setting processing for setting the actual setting data D1 based on the input value from the input operation unit 21 and adjustment processing for adjusting the actual setting data D1. Due to environmental changes such as deterioration of the lighting unit 23 or the camera 24, changes in the temperature around or inside the inspection device 20, or switching of the article 12 to be inspected (for example, a change in type or a change in number), the user may operate the input operation unit 21 to adjust the actual setting data D1.

[0055] When the article 12 is switched, the reference image V2 for testing is changed according to the switched article 12. Then, by using the reference image V2 (refer to Figure 3 ) is tested to set the standard setting data D2 that satisfies the necessary inspection accuracy. Then, the setting processing unit 35 stores the standard setting data D2 in the first storage unit 32.

[0056] Furthermore, if using Figure 2 As described above, the inspection processing unit 36 ​​is constructed in the first computer 31 by the first computer 31 executing the inspection application AP read from the first storage unit 32. The inspection processing unit 36 ​​(inspection application AP) determines whether the article 12 in the actual inspection image V1 is a good product or a defective product by performing a predetermined process based on the standard setting data D2 on the actual inspection image V1. The inspection processing unit 36 ​​outputs the inspection result as the actual inspection result data R1.

[0057] The update processing unit 37 performs processing to update the actual setting data D1, the standard setting data D2, and the reference image V2. When the diagnostic device 50 gives a diagnostic result recommending data update, the new data D3 and V3 for update and the diagnostic result are downloaded from the diagnostic device 50. The inspection device 20 receives the notification of the new data D3 and V3 and the diagnostic result from the diagnostic device 50 together. In this example, regarding whether to update to the new data D3 and V3, it is determined by the user confirming the content of the diagnostic result and the update recommendation information displayed on the user confirmation display unit 22. In the case of selecting an update, the user operates the input operation unit 21 to perform an update approval operation. Then, the update processing unit 37 updates the data D2 and V2 before update to the new data D3 and V3. In addition, the object data to be updated may be only the standard setting data D2, only the reference image V2, or both.

[0058] <Diagnostic device 50> Next, refer to Figure 6 , Figure 7 to describe the detailed configuration of the diagnostic device 50. The diagnostic device 50 acquires the actual information RD and the reference information SD from the inspection device 20. Then, the diagnostic device 50 uses the actual information RD and the reference information SD acquired from the inspection device 20 to diagnose whether the inspection device 20 performs an appropriate inspection with the inspection accuracy that should be guaranteed. In addition, the reference information SD initially only acquires the initial reference information SD, and then the diagnostic device 50 itself updates and manages the reference information SD. Therefore, the diagnostic device 50 does not have to acquire the reference information SD from the inspection device 20 every time it diagnoses.

[0059] As Figure 6 shown, the diagnostic device 50 includes a second computer 51, a second input unit 53 as an example of an input unit, and a second output unit 54 as an example of an output unit. The second computer 51 includes a second storage unit 52. That is, the diagnostic device 50 includes a second storage unit 52 as an example of a storage unit.

[0060] The second input unit 53 inputs various data from the inspection device 20 and the terminal 20T via the network NW. The second input unit 53 is, for example, an input interface that can be connected to the network NW.

[0061] The second output unit 54 outputs various notifications and various data to the inspection device 20 and the terminal 20T via the network NW. The notifications include the notification of the diagnostic result. In addition, the data includes new data ND (refer to Figure 7 ). The new data ND is new data that should be updated in place of the current data when the diagnostic result is the content of recommending data update.

[0062] The program PR, decision table TD, various data D1, V1, R1, D2, V2, D3, V3, ΔD, and ΔV are stored in the second storage unit 52. The program PR includes a diagnostic program PR1 and an inspection application AP.

[0063] Specifically, as Figure 7 shown, the program PR, decision table TD, actual information RD, reference information SD, new data ND, difference data DD, virtual inspection result data R2, etc. are stored in the second storage unit 52. The actual information RD includes actual setting data D1, actual inspection image V1, and actual inspection result data R1. The reference information SD includes standard setting data D2 and reference image V2. The new data ND includes new setting data D3 and new reference image V3. The difference data DD includes data on setting data difference ΔD and image difference ΔV. The data stored in the second storage unit 52 includes various data obtained from the inspection device 20 for diagnosis.

[0064] The second computer 51 has various processing functional units formed by software by executing the program PR read from the second storage unit 52. That is, the second computer 51 has an information acquisition unit 61, a determination unit 62, a diagnostic processing unit 63, an inspection processing unit 64 (inspection application AP), and a notification unit 65 as processing functional units formed by software. The diagnostic processing unit 63 includes a difference main cause analysis unit 71 (hereinafter also simply referred to as the main cause analysis unit 71) and a new data generation unit 72.

[0065] The second computer 51 has an inspection processing unit 64 formed by software, and the inspection processing unit 64 has the same inspection processing function as the inspection processing unit 36 in the inspection device 20. By the second computer 51 reading and executing the same inspection application AP as the inspection application AP used in the inspection device 20 from the second storage unit 52, the inspection processing unit 64 is constructed inside. In the case of a diagnostic result that recommends updating to new data, the inspection processing unit 64 is used for the following verification test: verifying whether the new setting data can guarantee the required accuracy before being provided for update. In addition to the verification test, the inspection processing unit 64 also performs extraction of new setting data or optimization of new setting data by repeatedly performing inspection simulations using the extracted new setting data. In addition, since the inspection application AP is upgraded regularly or irregularly, the diagnostic device 50 obtains the inspection application AP actually used in the inspection device 20 from the inspection device 20. And by the second computer 51 executing the obtained inspection application AP, the inspection processing unit 64 is formed inside the second computer 51.

[0066] When it becomes the information acquisition period or the diagnosis period for diagnostic preparation, the information acquisition unit 61 acquires the actual information RD and the reference information SD from the inspection device 20. The actual information RD includes the actual setting data D1, the actual inspection image V1, and the actual inspection result data R1. The reference information SD includes the standard setting data D2 and the reference image V2. The information acquisition unit 61 may also acquire the reference information SD from the inspection device 20, for example, during the information acquisition period before the diagnosis period. In this case, as described above, the information acquisition unit 61 may acquire only the initial reference information SD during the first information acquisition period when the reference information SD is set in the inspection device 20. The information acquisition unit 61 may also acquire only the actual information RD from the inspection device 20, for example, during the diagnosis period. Thus, the acquisition periods of the actual information RD and the reference information SD may be the same or different. The actual information RD and the reference information SD are used in the determination process of the determination unit 62. The information acquisition unit 61 stores the acquired actual information RD and reference information SD in the second storage unit 52. The second storage unit 52 stores the actual setting data D1, the actual inspection image V1, the actual inspection result data R1, the standard setting data D2, the reference image V2, etc. acquired from the inspection device 2.

[0067] The determination unit 62 performs a plurality of sets of comparisons including a first comparison and a second comparison between the actual information RD and the reference information SD of the same type. The first comparison compares the actual setting data D1 and the standard setting data D2, and the second comparison compares the actual inspection image V1 and the reference image V2 for testing. In the present embodiment, the first comparison is a setting data comparison process for comparing the actual setting data D1 and the standard setting data D2. The second comparison is an image comparison process for comparing the actual inspection image V1 and the reference image V2 for testing. Based on the comparison result of the first comparison, it is determined whether there is a difference between the setting data D1 and D2. In addition, based on the comparison result of the second comparison, it is determined whether there is a difference between the images V1 and V2. Thus, the determination unit 62 determines whether there is a difference for each group of comparison objects.

[0068] The determination unit 62 of the present embodiment outputs, for example, a combined result of presence or absence of differences obtained as a result of performing a plurality of sets of comparisons between the actual information RD and the reference information SD of the same type as a determination value of a predetermined number of bits. For example, a determination table TD shown in Figure 8 is stored in the second storage unit 52. The determination unit 62 refers to the determination table TD, acquires, for example, a combined result of presence or absence of differences obtained as a determination result, and uses it as a 2-bit difference determination value. In the Figure 8 example shown, the presence or absence of difference in the first comparison result is represented by the second bit of the 2-bit value, and the presence or absence of difference in the second comparison result is represented by the first bit of the 2-bit value.

[0069] In Figure 8In the example of the determination table TD shown, when it is set that there is no difference between the setting data D1 and D2 and there is also no difference between the images V1 and V2, the difference determination value is "00". Further, when it is set that there is a difference between the setting data D1 and D2 and there is no difference between the images V1 and V2, the difference determination value is "10". Additionally, when it is set that there is no difference between the setting data D1 and D2 and there is a difference between the images V1 and V2, the difference determination value is "01". Moreover, when it is set that there is a difference between the setting data D1 and D2 and there is also a difference between the images V1 and V2, the difference determination value is "11". The determination unit 62 sends the determination result, for example, as a 2-bit difference determination value to the diagnosis processing unit 63.

[0070] The diagnosis processing unit 63 performs diagnosis processing. Specifically, the diagnosis processing unit 63 performs a main cause analysis for analyzing the main cause based on the combination related to the presence or absence of differences for each group obtained as the determination result, and diagnoses the inspection device 20 with the diagnosis content corresponding to the obtained main cause analysis result. The main cause analysis is performed by the main cause analysis unit 71.

[0071] The new data generation unit 72 generates new data ND based on the main cause of the difference analyzed by the main cause analysis unit 71. The new data generation unit 72 generates at least one of a new setting data D3 and a new reference image V3 based on the main cause of the difference. The new setting data D3 and the new reference image V3 generated by the new data generation unit 72 are stored as new data ND in the second storage unit 52.

[0072] The diagnosis processing unit 63 applies the new data ND to the inspection processing unit 64 (inspection application AP) to perform a virtual inspection test. That is, the diagnosis processing unit 63 uses the new data ND to cause the inspection processing unit 64 to perform inspection processing. Since this inspection processing uses the same inspection application AP as the inspection processing unit 36 in the inspection device 20, the diagnosis device 50 performs a virtual inspection with the same inspection content as the inspection device 20.

[0073] <Function> Next, refer to Figures 9 - 11 to explain the function of the diagnosis device 50. The CPU of the second computer 51 (hereinafter also simply referred to as the computer 51) executes the program PR. In addition, the program PR causes the computer 51 to execute the process of diagnosing the inspection device 20 based on the actual information RD and the reference information SD obtained from the inspection device 20.

[0074] First, refer to Figure 9 to explain the diagnosis main program. In Figure 9 , first, in step S11, it is determined whether it is the diagnosis period. If it is the diagnosis period, the process proceeds to step S12, and if it is not the diagnosis period, the process ends.

[0075] In step S12, the computer 51 acquires the actual information RD and the reference information SD. The computer 51 acquires the actual information RD from the inspection device 20 via the network NW. Regarding the reference information SD, since it has been stored in the second storage unit 52 for each number of the article 12 to be inspected, the computer 51 acquires the reference information SD by reading it out from the second storage unit 52. As the actual information RD, the actual setting data D1 and the actual inspection image V1 are acquired. Further, as the reference information SD, the standard setting data D2 and the reference image V2 are acquired. Furthermore, as the actual information RD, the actual inspection result data R1 may also be acquired. Regarding the reference information SD, it may also be acquired from the inspection device 20 via the network NW when there is no data or an abnormality, etc. In addition, the process of this step S11 corresponds to an example of an information acquisition step of acquiring the actual setting data D1 and the actual inspection image V1 as the actual information RD from the inspection device 20.

[0076] In the next step S13, the computer 51 executes a diagnostic process. Details of this diagnostic process are described later with reference to Figure 11 the diagnostic process program. In the diagnostic process, the inspection device 20 is diagnosed based on the actual information RD and the reference information SD acquired from the inspection device 20. As the diagnostic result, there are "normal", "abnormal", "abnormal setting data", "inappropriate actual setting data", "abnormal image", etc.

[0077] In the next step S14, the computer 51 notifies the diagnostic result. Specifically, when the diagnostic result is "normal", the computer 51 notifies the inspection device 20 or the terminal 20T of the meaning of normal. In addition, when the diagnostic result is "inappropriate setting data", the computer 51 notifies the inspection device 20 or the terminal 20T of the meaning of inappropriate setting data and the meaning of urging the update of the actual setting data D1. At this time, the new setting data D3 for updating the actual setting data D1 (or the standard setting data D2) is sent to the inspection device 20 or the terminal 20T. In addition, when the diagnostic result is "inappropriate reference image", the computer 51 notifies the inspection device 20 or the terminal 20T of the meaning of inappropriate reference image and the meaning of urging the update of the reference image V2. At this time, the new reference image V3 for updating the reference image V2 is sent to the inspection device 20 or the terminal 20T. Furthermore, when the diagnostic result is "abnormal", the computer 51 notifies the inspection device 20 or the terminal 20T of the confirmation of the main cause of the abnormality determination and the meaning of urging the suspension of the operation of the inspection device 20.

[0078] <Diagnostic Process Program> Next, with reference to Figure 11 the diagnostic process program will be described. First, in step S21, the computer 51 performs set data comparison processing and image comparison processing. Specifically, as the set data comparison processing, the computer 51 compares the actual set data D1 and the standard set data D2 to obtain the differences (change points). At the same time, as the image comparison processing, the computer 51 compares the actual inspection image V1 and the reference image V2 to obtain the differences. In addition, in the present embodiment, the processing of this step S21 corresponds to an example of a determination step.

[0079] The computer 51 performs multiple sets of comparisons between the actual information RD and the reference information SD of the same type. The multiple sets of comparisons include a first comparison as the set data comparison processing and a second comparison as the image comparison processing. Thereby, the computer 51 determines whether there are differences for each set of comparison objects.

[0080] Specifically, the type of a set of data for comparison is "set data". The computer 51 determines whether there are differences in the set data by comparing the actual information RD (actual set data D1) and the reference information SD (standard set data D2) between the set data. That is, the computer 51 determines whether the actual set data D1 has changed from the standard set data D2 through the first comparison.

[0081] The type of another set of data for comparison is "inspection image". The computer 51 determines whether there are differences in the inspection images by comparing the actual information RD (actual inspection image VI) and the reference information SD (reference image V2) between the inspection images. That is, the computer 51 determines whether there are differences between the actual inspection image V1 and the reference image V2 through the second comparison.

[0082] In step S22, the computer 51 determines whether the difference determination value is "00". If the difference determination value is "00", the computer 51 proceeds to step S38. If it is not "00", it proceeds to step S23. That is, if the actual set data D1 has no change points and the actual inspection image V1 has no differences (if it is 00), it proceeds to step S38. On the other hand, if the actual set data D1 has change points or the actual inspection image V1 has differences (if it is not 00), it proceeds to step S23.

[0083] In step S23, the computer 51 determines whether the difference determination value is "01" or "11". If the difference determination value is "01" or "11", the computer 51 proceeds to step S24. If it is not any one of "01" and "11" (that is, if it is "10"), it proceeds to step S26.

[0084] In step S24, the computer 51 performs an image difference analysis. The image difference analysis is a process of analyzing the image parts with differences. In the image difference analysis, it is also possible to perform an extraction of the main cause of the image difference for extracting the main cause based on the differences obtained through the analysis. The main cause extracted in the extraction of the main cause of the image difference is used to determine the allowable range to be used in the next determination.

[0085] In step S25, the computer 51 determines whether the difference is within the allowable range. That is, the computer 51 determines whether the image difference is within the allowable range set separately for each main cause of the difference. If the difference is within the allowable range, it proceeds to step S26, and if the difference is not within the allowable range, it proceeds to step S27.

[0086] In step S27, the computer 51 sets the diagnosis result to "image abnormality". In step S26, the computer 51 determines whether the difference determination value is "10" or "11". If the difference determination value is "10" or "11", the computer 51 proceeds to step S28, and if it is not either of "10" and "11" (i.e., if it is not "01"), it proceeds to step S30.

[0087] In step S28, the computer 51 performs a set data difference analysis. The set data difference analysis is a process of analyzing the different (changed) parameters among the multiple parameters included in the actual set data D1 and the amount of the difference (change amount) thereof. In the case where there are multiple different parameters, it is also possible to analyze the combination of the different parameters. In this set data difference analysis, it is also possible to perform an extraction of the main cause of the set data difference for extracting the main cause based on the differences obtained through the analysis. The main cause extracted in the extraction of the main cause of the set data difference is used to determine the allowable range to be used in the next determination.

[0088] In the next step S29, the computer 51 determines whether the difference is within the allowable range. That is, the computer 51 determines whether the set data difference is within the allowable range set separately for each main cause of the difference. For example, the computer 51 refers to table data or the like that correlates the main cause with the allowable range, and obtains the allowable range corresponding to the main cause. If the difference is within the allowable range, the computer 51 proceeds to step S30, and if the difference is not within the allowable range, it proceeds to step S31.

[0089] In step S31, the computer 51 sets the diagnosis result to "set data abnormality". In step S30, the computer 51 determines whether the difference determination value is "01" or "11". If the difference determination value is "01" or "11", the computer 51 proceeds to step S32. If it is not either "01" or "11" (i.e., if it is not "10"), it proceeds to step S33.

[0090] In step S32, the computer 51 generates a new reference image based on the main cause of the image difference. This process is performed by the new data generation unit 72. The new data generation unit 72 generates a new reference image V3 by processing the reference image V2 based on the main cause of the image difference.

[0091] In the next step S33, the computer 51 performs a precision verification test. This process is performed by the inspection processing unit 64 (inspection application AP). Here, in this precision verification process, the inspection precision is verified by performing a virtual inspection based on the inspection application AP. Depending on the difference determination value, the setting data and the reference image applicable to the virtual inspection are different.

[0092] Specifically, when the difference determination value is "10", only the setting data is different. Therefore, even with this difference, it is verified whether the inspection precision is ensured. At this time, since there is no difference between the actual inspection image V1 and the reference image V2, the inspection result is obtained using the reference image V2.

[0093] On the other hand, when the difference determination value is "01" or "11", there is an image difference between the actual inspection image V1 and the reference image V2. Therefore, even with this image difference, it is verified whether the inspection precision is ensured by a virtual inspection. At this time, since there is a difference between the actual inspection image V1 and the reference image V2, first, a new reference image V3 for update is generated to eliminate or reduce this difference (S32). And in this step, the computer 51 performs a virtual inspection by executing the inspection application AP using the actual setting data D1 and the new reference image V3, and performs precision verification based on the result of this virtual inspection. That is, if it is updated to the new reference image V3, the computer 51 verifies whether the inspection precision is ensured based on the result of the virtual inspection using the new reference image V3.

[0094] Here, the reason for performing the image difference analysis prior to the set data difference analysis is that if the set data difference analysis is performed without confirming that the reference image V2 is appropriate, there may be a misdiagnosis of abnormal set data. In the present embodiment, when the difference determination value is "11", the computer 51 processes in the order of image difference analysis (S24) and set data difference analysis (S28), thereby diagnosing the set data D1 on the basis of excluding image abnormalities (S27), so that abnormal set data can be correctly diagnosed.

[0095] In step S34, the computer 51 determines whether the inspection accuracy is within the allowable range. If the inspection accuracy is not within the allowable range, the computer 51 proceeds to step S35. If the inspection accuracy is not within the allowable range, it proceeds to step S36.

[0096] In step S35, the computer 51 sets the diagnosis result as "normal". In step S36, the computer 51 performs set data optimization processing. This processing is performed by the new data generation unit 72. The new data generation unit 72 generates new set data D3 by processing the actual set data D1 based on the main cause of the set data difference.

[0097] In step S37, the computer 51 sets the diagnosis result as "actual set data is inappropriate". In addition, when it is "actual set data is inappropriate", it is recommended to update to the new set data D3.

[0098] On the other hand, when the difference determination value is "00", the computer 51 performs the processing of steps S38 to S42. In step S38, the computer 51 performs virtual inspection processing.

[0099] In the next step S39, the computer 51 compares the virtual inspection result and the actual inspection result. In step S40, the computer 51 determines whether there is a difference. If there is no difference, it proceeds to step S41. If there is a difference, it proceeds to step S42.

[0100] In step S41, the computer 51 sets the diagnosis result as "normal". In step S42, the computer 51 sets the diagnosis result as "abnormal". In addition, in the present embodiment, in Figure 11 the processes of steps S24, S25, S27 to S29, S31 to S42, which diagnose using the diagnostic content corresponding to the combination (difference determination values 00, 10, 01, 11) related to the presence or absence of differences in each group obtained as the determination result, are an example of diagnostic processing steps.

[0101] Thus, when the difference determination value is "01", that is, when the determination result of the determination unit 62 shows no difference in the first comparison and a difference in the second comparison, the diagnosis processing unit 63 diagnoses the main cause of the analysis image difference. And if the image difference is within the allowable range, the diagnosis processing unit 63 processes the reference image V2 based on the difference analysis result to generate a new reference image V3. Further, the diagnosis processing unit 63 conducts an inspection accuracy test using the actual setting data D1 and the new reference image V3, and when the accuracy result is insufficient, generates new setting data D3 for improving the inspection accuracy.

[0102] In addition, when the difference determination value is "10", that is, when the determination result of the determination unit 62 shows a difference in the first comparison and no difference in the second comparison, the diagnosis processing unit 63 diagnoses the main cause of the analysis setting data difference. And if the setting data difference is within the allowable range, the diagnosis processing unit 63 conducts an inspection accuracy test using the actual setting data D1 and the reference image V2 based on the difference analysis result. When the accuracy result is insufficient, the diagnosis processing unit 63 generates new setting data D3 for improving the inspection accuracy.

[0103] Furthermore, when the difference determination value is "11", that is, when the determination result of the determination unit 62 shows a difference in the first comparison and also a difference in the second comparison, the diagnosis processing unit 63 diagnoses the main cause of the analysis image difference. And if the image difference is within the allowable range, the diagnosis processing unit 63 further diagnoses the main cause of the analysis setting data difference. Further, if the setting data difference is within the allowable range, the diagnosis processing unit 63 processes the reference image V2 based on the image difference analysis result to generate a new reference image V3. The diagnosis processing unit 63 conducts an inspection accuracy test using the actual setting data D1 and the new reference image V3, and when the accuracy result is insufficient, generates new setting data D3 for improving the inspection accuracy.

[0104] In addition, when the difference determination value is "00", that is, when the determination result of the determination unit 62 shows no difference in the first comparison and no difference in the second comparison, the diagnosis processing unit 63 conducts an inspection (virtual inspection) using the actual setting data D1 and the actual inspection image V1. And the diagnosis processing unit 63 compares and diagnoses the virtual inspection result and the actual inspection result using the actual inspection result data R1 and the virtual inspection result data R2. If there is a difference in this comparison diagnosis, it is presumed, for example, that there is an abnormality such as an inappropriate version of the inspection application AP (inspection processing software).

[0105] <New Data Update Processing> Next, the update process for new data will be described. In the case where the actual set data is inappropriate or the diagnosis result of the image is abnormal, the user who views the diagnosis result on the display unit 22 of the inspection device 20 or the terminal 20T is recommended to update to new data. When the user wishes to update to new data, the input operation unit 21 is operated to instruct an update to new data. Instruction data is sent from the inspection device 20 or the terminal 20T to the diagnosis device 50 via the network NW. On the other hand, after the second computer 51 of the diagnosis device 50 notifies the diagnosis result in Figure 9 step S14, it starts Figure 10 the update processing program shown, and waits for the reception of instruction data from the inspection device 20 or the terminal 20T. Hereinafter, with reference to Figure 10 , the update processing program executed by the second computer 51 will be described.

[0106] In step S51, the computer 51 determines whether instruction data has been received. If instruction data has been received, it proceeds to step S52; if instruction data has not been received, the program ends. In addition, in the case where instruction data is not received even after waiting for a certain period of time from the notification of the diagnosis result, or in the case where unnecessary data indicating that there is no need to update new data is received, the computer 51 determines that instruction data has not been received.

[0107] In step S52, the computer 51 performs the update process. That is, the computer 51 accesses the inspection device 20 and updates the data before the update to the new data ND. Specifically, when the new data ND is the new set data D3, the computer 51 updates the standard set data D2 in the inspection device 20 to the new set data D3. On the other hand, when the new data ND is the new reference image V3, the computer 51 updates the reference image V2 in the inspection device 20 to the new reference image V3. Further, the computer 51 accesses the second storage unit 52 and performs the update process of updating the data before the update to the new data ND. That is, the computer 51 performs the above-mentioned update process from the data before the update to the new data ND on the data in the second storage unit 52 in the same way as for the inspection device 20. In this way, the data after the update matches between the inspection device 20 and the diagnosis device 50.

[0108] In the next step S53, the computer 51 extracts the difference before and after the update. That is, the computer 51 extracts the difference between the data before the update and the updated new data ND. Specifically, when the new data ND is the new set data D3, the computer 51 extracts the set data difference ΔD that is the difference between the standard set data D2 before the update and the new set data D3. On the other hand, when the new data ND is the new reference image V3, the computer 51 extracts the image difference ΔV that is the difference between the reference image V2 before the update and the new reference image V3.

[0109] In the next step S54, the computer 51 stores the differences. That is, the computer 51 stores at least one of the set data difference ΔD and the image difference ΔV extracted in step S53 in the second storage unit 52. In addition, at least one of the set data difference ΔD and the image difference ΔV may be stored in the first storage unit 32 on the inspection device 20 side.

[0110] <Effects of the Embodiment> According to the embodiment described in detail above, the following effects are obtained. (1) The diagnostic device 50 diagnoses the inspection device 20 based on the actual information RD obtained from the inspection device 20. The diagnostic device 50 includes an information acquisition unit 61, a storage unit 52, a determination unit 62, and a diagnostic processing unit 63. The information acquisition unit 61 acquires the actual set data D1 and the actual inspection image V1 as the actual information RD from the inspection device 20. The storage unit 52 stores the standard set data D2 and the reference image V2 as the reference information SD. The determination unit 62 determines whether there is a difference for each comparison target group by performing a plurality of comparisons including a first comparison and a second comparison between the actual information RD and the reference information SD of the same type, where the first comparison compares the actual set data D1 and the standard set data D2, and the second comparison compares the actual inspection image V1 and the reference image V2. The diagnostic processing unit 63 performs a main cause analysis for analyzing the main cause based on the combination related to the presence or absence of difference for each group obtained as the determination result, and diagnoses the inspection device 20 with the diagnostic content corresponding to the obtained main cause analysis result. According to this configuration, it is possible to diagnose whether the inspection device 20 performs inspections appropriately. For example, inappropriate inspection conditions can be detected and notified at an early stage, and thus the frequency of appropriateness improvement for appropriately modifying inspection conditions can be increased.

[0111] (2) When the determination result of the determination unit 62 shows no difference in the first comparison and there is a difference in the second comparison, the diagnostic processing unit 63 performs a diagnosis for analyzing the main cause of the image difference. And if the image difference is within the allowable range, the diagnostic processing unit 63 processes the reference image V2 based on the difference analysis result to generate a new reference image V3. Further, the diagnostic processing unit 63 performs an inspection accuracy test using the actual set data D1 and the new reference image V3, and generates new set data D3 for improving the inspection accuracy when the accuracy result is insufficient. According to this configuration, when the inspection device 20 cannot perform inspections with the necessary accuracy due to the inspection image, new set data D3 that can improve the inspection accuracy can be provided.

[0112] (3) When the determination result of the determination unit 62 shows a difference in the first comparison and no difference in the second comparison, the diagnosis processing unit 63 diagnoses the main cause of the analysis setting data difference. And if the setting data difference is within the allowable range, the diagnosis processing unit 63 performs an inspection accuracy test using the actual setting data D1 and the reference image V2 based on the difference analysis result. When the accuracy result is insufficient, the diagnosis processing unit 63 generates new setting data D3 for improving the inspection accuracy. According to this configuration, when the inspection device 2 cannot perform inspections with the necessary accuracy due to the setting data, new setting data D3 that can improve the inspection accuracy can be provided.

[0113] (4) When the determination result of the determination unit 62 shows a difference in the first comparison and a difference in the second comparison, the diagnosis processing unit 63 diagnoses the main cause of the analysis image difference. And if the image difference is within the allowable range, the diagnosis processing unit 63 further diagnoses the main cause of the analysis setting data difference. Further, if the setting data difference is within the allowable range, the diagnosis processing unit 63 processes the reference image V2 based on the image difference analysis result to generate a new reference image V3. The diagnosis processing unit 63 performs an inspection accuracy test using the actual setting data D1 and the new reference image V3, and when the accuracy result is insufficient, generates new setting data D3 for improving the inspection accuracy. According to this configuration, when the inspection device 20 cannot perform inspections with the necessary accuracy due to the setting data and the inspection image, new setting data D3 that can improve the inspection accuracy can be improved.

[0114] (5) The diagnostic device 50 includes an output unit 54 for outputting data and an input unit 53 for inputting instructions. The diagnosis processing unit 63 outputs the new setting data D3 from the output unit 54. And when the diagnosis processing unit 63 receives an instruction indicating the intention to adopt the new setting data D3 from the input unit 53, it updates the standard setting data D2 and the reference image V2 based on the new setting data D3. According to this configuration, since the standard setting data D2 and the reference image V2 are updated based on the adopted new setting data D3, subsequent inspections of the inspection device 20 can be appropriately performed.

[0115] (6) The diagnostic device 50 stores the standard setting data D2 and the reference image V2 before being updated based on the new setting data D3 in the storage unit 52. Further, the diagnostic device 50 stores the differences ΔD and ΔV between the pre-updated data and the updated new data D3 and V3 for at least one of the standard setting data D2 and the reference image V2 in the storage unit 52.

[0116] According to this configuration, by reading out at least one of the pre-update standard setting data D2, the reference image V2, and the differences ΔD and ΔV between the data before and after the update from the storage unit 52, the history of the diagnostic device 50 can be confirmed. For example, the history information can be used to limit recovery or analysis and the expansion of differences in setting data and the reference image V2 between multiple identical inspection devices 20.

[0117] (7) The actual inspection result data R1 is obtained from the inspection device 20 as the actual information RD. When the determination result of the determination unit 62 shows no difference in the first comparison and no difference in the second comparison, the diagnostic processing unit 63 performs a virtual inspection using the actual setting data D1 and the actual inspection image V1. Further, the diagnostic processing unit 63 performs a comparison diagnosis between the virtual inspection result and the actual inspection result. According to this configuration, when there is a difference between the virtual inspection result and the actual inspection result although neither the setting data nor the inspection image is the cause, it can be diagnosed that the inspection process itself is inappropriate. For example, it can be diagnosed that the version of the inspection processing software is inappropriate.

[0118] (8) The diagnostic device 50 includes a server 50S connected to the inspection device 20 and the terminal 20T via the network NW. The server 50S includes an information acquisition unit 61, a storage unit 52, a determination unit 62, and a diagnostic processing unit 63. The server 50S acquires the actual setting data D1 and the actual inspection image V1 from the inspection device 20 and sends the diagnostic result of the diagnostic processing unit 63 to the terminal 20T. According to this configuration, the inspection device 20 can be diagnosed via the network NW, and the diagnostic result can be confirmed with the terminal 20T via the network NW.

[0119] (9) A diagnostic method for the inspection device 20 that diagnoses the inspection device 20 based on the actual information RD obtained from the inspection device 20 includes an information acquisition step, a determination step, and a diagnostic processing step. In the information acquisition step, the information acquisition unit 61 acquires the actual setting data D1 and the actual inspection image V1 from the inspection device 20 as the actual information RD. In the determination step, the determination unit 62 determines whether there is a difference for each comparison object group by performing multiple sets of comparisons between the actual information RD of the same type with each other and the reference information SD. The multiple sets of comparisons include a first comparison of the actual setting data D1 and the standard setting data D2 and a second comparison of the actual inspection image V1 and the reference image V2. In the diagnostic processing step, the diagnostic processing unit 63 performs a diagnosis using the diagnostic content corresponding to the combination related to the presence or absence of difference in each group obtained as the determination result. According to this method, it can be diagnosed whether the inspection device 20 performs the inspection appropriately.

[0120] (10) Program PR causes a computer to execute a process of diagnosing inspection device 20 based on actual information RD obtained from inspection device 20. Program PR causes the computer to execute an information acquisition step, a determination step, and a diagnostic process step. In the information acquisition step, actual setting data D1 and actual inspection image V1 are obtained from inspection device 20 as actual information RD. In the determination step, by performing multiple sets of comparisons including a first comparison and a second comparison between actual information RD of the same type with each other and reference information SD, the presence or absence of a difference is determined for each comparison object group. The first comparison compares actual setting data D1 and standard setting data D2, and the second comparison compares actual inspection image V1 and reference image V2. The diagnostic process step diagnoses using diagnostic content, and the diagnostic content corresponds to a combination related to the presence or absence of a difference in each group obtained as the determination result. According to this program PR, by being executed by computer 51, it is possible to diagnose whether inspection device 20 appropriately performs inspections.

[0121] The implementation mode is not limited to the above, and can also be changed to the following mode. · Diagnostic device 50 is not limited to a server. In this case, inspection device 20 and diagnostic device 50 can also be connected via a LAN. For example, multiple inspection devices 20 within a factory can also be connected to a single shared diagnostic device 50 via the factory LAN. Additionally, diagnostic device 50 can also be installed within terminal 20T. Further, diagnostic device 50 can also be installed into inspection device 20. In this case, the first computer 31 of inspection device 20 and the second computer 51 of diagnostic device 50 can be separate from each other, or can be a single computer shared by inspection device 20 and diagnostic device 50.

[0122] · Terminal 20T can either be structured to be assembled within inspection device 20, or can be communicably connected to inspection device 20 via a LAN. · It can also be configured to be able to preset an automatic update mode from inspection device 20 or the corresponding terminal 20T. In this case, inappropriate setting data D1 or inappropriate actual inspection image V1 can also be automatically updated to new data during the automatic update mode.

[0123] · Send the newly recommended updated data together with the determination result to the user-side inspection device 20 or terminal 20T, and entrust the user with whether to update to the new data. · Diagnostic device 50 can also be configured to be able to receive a diagnostic instruction from inspection device 20 or terminal 20T. When diagnostic device 50 receives a diagnostic instruction, it performs a diagnostic process and sends the diagnostic result to inspection device 20 or terminal 20T. For example, when adjusting actual setting data D1, it is possible to confirm with diagnostic device 50 whether this adjustment can ensure the necessary accuracy.

[0124] · The multiple sets of comparisons made between the actual information RD and the reference information SD of the same type are not limited to the first comparison and the second comparison. For example, it can be set to three groups by adding a third comparison, or further set to four groups by adding a fourth comparison. For example, the determination unit 62 can also compare the actual inspection result data R1 and the inspection result data R2 during testing as the third comparison and determine whether there is a difference between the two.

[0125] · The determination unit 62 does not have to perform root cause analysis on all of the multiple combinations obtained by determining whether there is a difference for each group of comparison objects. It can also perform root cause analysis on at least one combination. For example, in the above-described embodiment, the processing of steps S37 to S40 Figure 11 may not be performed.

[0126] · In the above-described embodiment, it can also be configured to send only whether it is normal or abnormal as the diagnostic result of the diagnostic device 50 to the inspection device 20 or the terminal 20T. · In the above-described embodiment, the diagnostic results of normal, abnormal, and inappropriate are sent as the diagnostic results of the diagnostic device 50 to the inspection device 20 or the terminal 20T. However, it can also be configured not to generate new data for recommended updates. That is, the update operation and the content of the update can also be entrusted to the user.

[0127] · The program PR can also be sold, etc. in a state stored in a storage medium such as a CD or a DVD. · The inspection object of the inspection device 20 with the diagnostic device 50 as the diagnostic object is not particularly limited. The inspected item 12 is not limited to containers, etc. The inspection object can also be various components such as electronic components or mechanical components, various products such as electrified products or mechanical products, and processed products on the production line for transporting and manufacturing products. In addition, the inspection can be an inspection of components, an inspection before shipment of components or products. In addition, the inspection of the inspection device 20 can also be a non-destructive inspection using X-rays or ultrasonic waves, etc. Description of Reference Numerals

[0128] 10... Inspection system, 11... Conveyor device, 12... Article, 12A... Container body, 12B... Label, 13... Conveyor device, 14... Conveyor belt, 15... Outline, 20... Inspection device, 20T... Terminal, 21... Input operation unit, 22... Display unit, 23... Lighting unit, 24... Camera, 25... Sensor, 31... First computer, 32... First storage unit, 33... Control unit, 35... Setting processing unit, 36... Inspection processing unit, 37... Update processing unit, 38... First output unit, 39... First input unit, 50... Diagnostic device, 50S... Server (cloud server), 51... Second computer, 52... Second storage unit as an example of the storage unit, 53... Second input unit as an example of the input unit, 54... Second output unit as an example of the output unit, 61... Information acquisition unit, 62... Judgment unit, 63... Diagnostic processing unit, 64... Inspection processing unit (inspection application), 65... Notification unit, 71... Main cause analysis unit (difference main cause analysis unit), 72... Inspection processing unit, NW... Network, AP... Inspection application program (inspection application), PR... Program, PR1... Diagnostic program, GV... Good product image, NV... Defective product image, F... Defect, F1... Dirt, F2... Breakage, FN... Appropriate defect area, FL... Excessive defect area, FS... Insufficient defect area, TD... Judgment table, RD... Actual information, SD... Reference information, D1... Actual setting data, V1... Actual inspection image, R1... Actual inspection result data, D2... Standard setting data, V2... Test reference image, R2... Virtual inspection result data, ND... New data, D3... New setting data as an example of new data, V3... New reference image as an example of new data, DD... Difference data, ΔD... Difference (setting data difference), ΔV... Difference (image difference).

Claims

1. A diagnostic device for an inspection device that diagnoses the inspection device based on actual information obtained from the inspection device. The diagnostic device for the inspection device is characterized by comprising: An information acquisition unit that acquires actual setting data and actual inspection images as the actual information from the inspection device; A storage unit that stores standard setting data and reference images as reference information; A determination unit determines whether there is a difference for each comparison object group by performing multiple groups of comparisons including a first comparison and a second comparison between the actual information and the reference information of the same type. In the first comparison, the actual setting data and the standard setting data are compared, and in the second comparison, the actual inspection image and the reference image are compared; And A diagnosis processing unit performs a main cause analysis for analyzing the main cause based on the combination related to the presence or absence of difference in each group obtained as the determination result, and diagnoses the inspection device with the diagnosis content corresponding to the obtained main cause analysis result.

2. The diagnostic device for the inspection device according to claim 1, characterized in that: When the determination result of the determination unit is that there is no difference in the first comparison and there is a difference in the second comparison, the diagnosis processing unit performs a diagnosis for analyzing the main cause of the image difference. If the image difference is within the allowable range, the reference image is processed based on the difference analysis result to generate a new reference image, and an inspection accuracy test using the actual setting data and the new reference image is performed. When the accuracy result is insufficient, new setting data for improving the inspection accuracy is generated.

3. The diagnostic device for the inspection device according to claim 1, characterized in that: When the determination result of the determination unit is that there is a difference in the first comparison and there is no difference in the second comparison, the diagnosis processing unit performs a diagnosis for analyzing the main cause of the setting data difference. If the setting data difference is within the allowable range, an inspection accuracy test using the actual setting data and the reference image is performed based on the difference analysis result. When the accuracy result is insufficient, new setting data for improving the inspection accuracy is generated.

4. The diagnostic device for the inspection device according to claim 1, characterized in that: When the determination result of the determination unit is that there is a difference in the first comparison and there is a difference in the second comparison, the diagnosis processing unit performs a diagnosis for analyzing the main cause of the image difference. If the image difference is within the allowable range, a diagnosis for analyzing the main cause of the setting data difference is further performed. If the setting data difference is within the allowable range, the reference image is processed based on the image difference analysis result to generate a new reference image, and an inspection accuracy test using the actual setting data and the new reference image is performed. When the accuracy result is insufficient, new setting data for improving the inspection accuracy is generated.

5. The diagnostic device for the inspection device according to any one of claims 2 to 4, characterized in that: An output unit for outputting data and an input unit for inputting instructions are provided, The diagnosis processing unit Outputs the new setting data to the output unit, If an instruction indicating the intention to adopt the new setting data is received from the input unit, the standard setting data and the reference image are updated based on the new setting data.

6. The diagnostic device for the inspection device according to claim 5, characterized in that: Stores the standard setting data and the reference image before being updated based on the new setting data in the storage unit, and stores the difference between the data before update and the newly updated data for at least one of the standard setting data and the reference image in the storage unit.

7. The diagnostic device for the inspection device according to any one of claims 2 to 4, characterized in that: Obtains the actual inspection result as the actual information from the inspection device, When the determination result of the determination unit is that there is no difference in the first comparison and no difference in the second comparison, the diagnosis processing unit performs a virtual examination using the actual setting data and the actual examination image, and performs a comparative diagnosis between the virtual examination result and the actual examination result.

8. The diagnostic device for the inspection device according to any one of claims 1 to 4, characterized in that: There is a server connected to the examination device and the terminal via a network. The server is provided with the information acquisition unit, the storage unit, the determination unit, and the diagnosis processing unit. acquires the actual setting data and the actual examination image from the examination device. sends the diagnosis result of the diagnosis processing unit to the terminal.

9. The diagnostic device for the inspection device according to claim 5, characterized in that: There is a server connected to the examination device and the terminal via a network. The server is provided with the information acquisition unit, the storage unit, the determination unit, and the diagnosis processing unit. acquires the actual setting data and the actual examination image from the examination device. sends the diagnosis result of the diagnosis processing unit to the terminal.

10. A diagnostic method for an inspection device that diagnoses the inspection device based on actual information obtained from the inspection device. The diagnostic method for the inspection device is characterized by including: An information acquisition step, in which the information acquisition unit acquires the actual setting data and the actual examination image as the actual information from the examination device. A determination step, in which the determination unit determines whether there is a difference for each group of comparison objects by performing multiple groups of comparisons including a first comparison and a second comparison between the actual information of the same type and the reference information. In the first comparison, the actual setting data and the standard setting data are compared, and in the second comparison, the actual examination image and the reference image are compared. And A diagnosis processing step, in which the diagnosis processing unit diagnoses using the diagnosis content corresponding to the combination related to the presence or absence of difference of each group obtained as the determination result.

11. A program that causes a computer to execute a process of diagnosing the inspection device based on actual information obtained from the inspection device. The program causes the computer to execute: An information acquisition step of acquiring actual setting data and actual inspection images as the actual information from the inspection device; A determination step, in which it is determined whether there is a difference for each group of comparison objects by performing multiple groups of comparisons including a first comparison and a second comparison between the actual information of the same type and the reference information. In the first comparison, the actual setting data and the standard setting data are compared, and in the second comparison, the actual examination image and the reference image are compared. And A diagnosis processing step, in which it diagnoses using the diagnosis content corresponding to the combination related to the presence or absence of difference of each group obtained as the determination result.

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