Direct connection method for Ti-Al powder and Ti-Al target material

Abstract

The invention discloses a direct connection method of Ti-Al powder and a Ti-Al target material, which is based on a spark plasma sintering (SPS) technology, and can realize high-quality connection of the powder and the target material by optimizing SPS process parameters and matching with the steps of material preparation, target material pretreatment, die filling, furnace filling, sintering, cooling recovery and the like. According to the direct connection method for the Ti-Al powder and the Ti-Al target material, the recycled Ti-Al target material is treated, and then the treated Ti-Al target material and the Ti-Al nano powder are subjected to spark plasma sintering (SPS), so that the Ti-Al nano powder and the recycled Ti-Al target material are rapidly fused in a short time, and the purpose of repairing the Ti-Al target material is achieved; and the method is short in production period, high in efficiency, uniform in component and structure, small in grain size and few in internal defect, and has great production and popularization value.

Description

Technical Field

[0001] The present invention belongs to the technical field of PVD coating target repair, and specifically relates to a direct connection method for Ti-Al powder and Ti-Al target. Background Art

[0002] With the continuous development of the machining industry, cutting tools will be exposed to harsh environments such as high temperature and high pressure for a long time, which puts higher requirements on the protective performance of cutting tools. TiAlN coating has good stability, oxidation resistance and wear resistance at high temperature, and has been widely used in the surface treatment of materials such as cemented carbide cutting tools, high-speed steel cutting tools, and titanium alloys. As the core raw material for preparing TiAlN coating, factors such as the density, grain size, and microstructure of Ti-Al target will directly affect the deposition efficiency, uniformity, and mechanical properties of the coating; different characteristics of Ti-Al alloy targets can be obtained by adjusting the Al content in the target. During the actual PVD coating process, after the target is sputtered for a long time, annular erosion tracks will appear on its surface, and a large amount of material often remains unused. If an efficient and rapid repair technology can be developed, not only can the recycling of resources be realized, but also the use cost can be effectively reduced. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a direct connection method for Ti-Al powder and Ti-Al target.

[0004] The technical solution of the present invention to solve the above technical problem is as follows: A direct connection method for Ti-Al powder and Ti-Al target includes the following steps: Prepare materials, collect the worn Ti-Al target, and reserve the same kind of Ti-Al nano powder. Pretreat the target, use sandpaper to pre-grind the sintering surface of the Ti-Al target, and then polish the sintering surface with a polishing machine to make the flatness and roughness of the sintering surface meet the connection requirements. Then place the polished Ti-Al target in an ultrasonic cleaning machine for cleaning and vacuum drying to obtain the raw material target. Install the mold, place the raw material target in a graphite mold, and then synchronously put the Ti-Al nano powder so that the Ti-Al nano powder contacts and compacts with the sintering surface. Then use carbon felt to wrap the graphite mold. Load the furnace, place the graphite mold wrapped with carbon felt into the furnace chamber of a spark plasma sintering furnace, then close the spark plasma sintering furnace, turn on the vacuum pump to evacuate the furnace, so that the vacuum degree is lower than 10 Pa, and then apply an initial pressure of 10 MPa to the graphite mold to complete the furnace loading. Sintering: Pass an electric current through the spark plasma sintering furnace to start heating it up at a heating rate of 100 °C / min until the sintering temperature rises to 530 °C. During the heating process, gradually increase the pressure on the graphite mold. When the sintering temperature is reached, the pressure rises to the final pressure of 30 MPa, and then start heat preservation; Cooling and recovery: After heat preservation is completed, turn off the spark plasma sintering furnace, let the graphite mold cool to room temperature with the furnace, take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target.

[0005] Specifically, the graphite mold includes an upper pressure head, a graphite female mold, and a lower pressure head. The upper pressure head and the lower pressure head are placed on the upper and lower sides of the graphite female mold to enclose the graphite female mold and compact the sample inside the graphite female mold. A temperature measuring hole is provided on the side of the graphite female mold.

[0006] Specifically, in the mold loading step, the following steps are included: Placing the target: Put the graphite female mold on the lower pressure head, place the raw material target, and make the sintering surface of the raw material target face upward. Then adjust the relative position of the graphite female mold and the lower pressure head so that the sintering surface is located at the temperature measuring hole; Placing the powder: Place the Ti-Al nano powder into the graphite female mold and fill the sintering surface. Then press the upper pressure head into the graphite female mold to evenly compact the Ti-Al nano powder on the sintering surface; Wrapping the mold: Wrap the graphite mold with carbon felt and punch holes in the carbon felt at the position of the temperature measuring hole to expose the temperature measuring hole.

[0007] Preferably, in the furnace loading step, after the graphite mold wrapped with carbon felt is placed in the hearth of the spark plasma sintering furnace, insert an adjustable thermocouple into the temperature measuring hole to monitor the sintering temperature in the graphite mold in real time.

[0008] Specifically, in the sintering step, the heat preservation time is 5 - 20 min.

[0009] Preferably, in the target pre-treatment step, pre-grinding is to pre-grind the sintering surface successively with #800 metallographic sandpaper, #1000 metallographic sandpaper, #1500 metallographic sandpaper, and #2000 metallographic sandpaper. After polishing, the flatness of the sintering surface is not more than 0.1 mm, and the roughness is not more than 0.1 μm.

[0010] Preferably, the heat preservation time is 10 min.

[0011] The present invention has the following beneficial effects: (1) After processing the recycled Ti-Al target, it is fused with Ti-Al nano-powder by spark plasma sintering (SPS) in a short time, so that the Ti-Al nano-powder and the recycled Ti-Al target are rapidly fused, thus achieving the purpose of repairing the Ti-Al target.

[0012] (2) By repairing the Ti-Al target, the recycling of the Ti-Al target is effectively realized, the use cost is greatly reduced, and the recycling treatment cycle is short and the treatment effect is good.

[0013] (3) The direct connection method of Ti-Al powder and Ti-Al target provided by the present invention has a short production cycle, high efficiency, uniform composition and structure, small grain size and few internal defects, and has great production and promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is the grain size of the product prepared in Example 1 of the present invention.

[0015] Figure 2 It is the grain size of the product prepared in Example 2 of the present invention.

[0016] Figure 3 It is the grain size of the product prepared in Example 3 of the present invention.

[0017] Figure 4 It is the grain size of the product prepared in Example 4 of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0018] The present invention will be described in detail below with reference to the embodiments. Embodiment

[0019] A direct connection method of Ti-Al powder and Ti-Al target in Example 1 of the present invention includes the following steps: Prepare materials, collect the worn Ti-Al target, and take the same kind of Ti-Al nano-powder for standby; using the worn Ti-Al target as one of the raw materials realizes the recycling of the Ti-Al target.

[0020] Target pretreatment: successively use #800 metallographic sandpaper, #1000 metallographic sandpaper, #1500 metallographic sandpaper, #2000 metallographic sandpaper to pre-grind the sintering surface of the Ti-Al target, and then polish the sintering surface with a polishing machine so that the flatness of the sintering surface is not greater than 0.1 mm and the roughness is not greater than 0.1 μm, so as to meet the connection requirements. Then place the polished Ti-Al target in an ultrasonic cleaner for cleaning and vacuum drying to obtain the raw material target; by pretreating the target, serving the subsequent sintering process, it can effectively reduce the internal defects after sintering.

[0021] Mold loading: Place the raw material target into the graphite mold. Specifically, the graphite mold includes an upper punch, a graphite female mold, and a lower punch. The upper punch and the lower punch are placed on the upper and lower sides of the graphite female mold to enclose the graphite female mold and compact the sample inside the graphite female mold. A temperature measurement hole is opened on the side of the graphite female mold. Put the graphite female mold on the lower punch, place the raw material target, and make the sintering surface of the raw material target face upward. Then adjust the relative position of the graphite female mold and the lower punch so that the sintering surface is at the position of the temperature measurement hole. Place the Ti-Al nano powder into the graphite female mold and fill the sintering surface. Then press the upper punch into the graphite female mold to evenly compact the Ti-Al nano powder on the sintering surface. Wrap the graphite mold with carbon felt and punch a hole in the carbon felt at the position of the temperature measurement hole to expose the temperature measurement hole.

[0022] Furnace loading: Place the graphite mold wrapped with carbon felt into the furnace chamber of the spark plasma sintering furnace. Insert the adjusted thermocouple into the temperature measurement hole to monitor the sintering temperature in the graphite mold in real time. Then close the spark plasma sintering furnace, turn on the vacuum pump to evacuate the furnace, and make its vacuum degree lower than 10 Pa. Then apply an initial pressure of 10 MPa to the graphite mold to complete the furnace loading. Sintering: Pass an electric current through the spark plasma sintering furnace to start heating, with a heating rate of 100 °C / min until the sintering temperature rises to 530 °C. During the heating process, gradually increase the pressure on the graphite mold. When reaching the sintering temperature, the pressure rises to the final pressure of 30 MPa. Then start heat preservation for 5 minutes. Cooling and recovery: After the heat preservation is completed, turn off the spark plasma sintering furnace, let the graphite mold cool to room temperature with the furnace, take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target, and its crystal size is as Figure 1 shown. Example

[0023] A direct connection method for Ti-Al powder and Ti-Al target in Example 1 of the present invention includes the following steps: Material preparation: Collect the worn Ti-Al target and prepare the same kind of Ti-Al nano powder for use. Using the worn Ti-Al target as one of the raw materials realizes the recycling and reuse of the Ti-Al target.

[0024] Target material pretreatment: successively use #800 emery paper, #1000 emery paper, #1500 emery paper, and #2000 emery paper to pre-grind the sintering surface of the Ti-Al target material. Subsequently, use a polishing machine to polish the sintering surface so that the flatness of the sintering surface is not greater than 0.1 mm and the roughness is not greater than 0.1 μm, thereby meeting the connection requirements. Then, place the polished Ti-Al target material into an ultrasonic cleaning machine for cleaning and vacuum drying to obtain the raw material target material; by pretreating the target material, it serves the subsequent sintering process and can effectively reduce internal defects after sintering.

[0025] Mold loading: Place the raw material target material into a graphite mold. Specifically, the graphite mold includes an upper punch, a graphite female mold, and a lower punch. The upper punch and the lower punch are placed on the upper and lower sides of the graphite female mold to close the graphite female mold and compact the sample inside the graphite female mold. A temperature measurement hole is opened on the side of the graphite female mold. Place the graphite female mold on the lower punch, put in the raw material target material, and make the sintering surface of the raw material target material face upward. Then, adjust the relative position of the graphite female mold and the lower punch so that the sintering surface is located at the temperature measurement hole; place the Ti-Al nano-powder into the graphite female mold and fill the sintering surface. Subsequently, press the upper punch into the graphite female mold to uniformly compact the Ti-Al nano-powder on the sintering surface; use carbon felt to wrap the graphite mold and punch holes in the carbon felt at the position of the temperature measurement hole to expose the temperature measurement hole.

[0026] Furnace loading: Place the graphite mold wrapped with carbon felt into the furnace chamber of a spark plasma sintering furnace. Insert an adjusted thermocouple into the temperature measurement hole to monitor the sintering temperature in the graphite mold in real time. Then, close the spark plasma sintering furnace, turn on the vacuum pump to evacuate the furnace, and make its vacuum degree lower than 10 Pa. Subsequently, apply an initial pressure of 10 MPa to the graphite mold to complete the furnace loading; Sintering: Pass an electric current through the spark plasma sintering furnace to start heating, with a heating rate of 100 °C / min until the sintering temperature rises to 530 °C. During the heating process, gradually increase the pressure on the graphite mold. When reaching the sintering temperature, the pressure rises to a final pressure of 30 MPa. Then, start heat preservation for 10 min; Cooling and recovery: After heat preservation is completed, turn off the spark plasma sintering furnace, let the graphite mold cool to room temperature with the furnace, take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target material, and its crystal size is as Figure 2 shown. Example

[0027] A direct connection method for Ti-Al powder and Ti-Al target material in Example 1 of the present invention includes the following steps: Prepare materials, collect the worn Ti-Al target, and reserve the same kind of Ti-Al nano powder; using the worn Ti-Al target as one of the raw materials, the recycling and reuse of the Ti-Al target are realized.

[0028] Pretreat the target. First, use #800 emery paper, #1000 emery paper, #1500 emery paper, and #2000 emery paper to pre-grind the sintering surface of the Ti-Al target in sequence. Then, polish the sintering surface with a polishing machine to make the flatness of the sintering surface no greater than 0.1 mm and the roughness no greater than 0.1 μm, so as to meet the connection requirements. Subsequently, place the polished Ti-Al target into an ultrasonic cleaner for cleaning and vacuum drying to obtain the raw material target; by pretreating the target, it serves the subsequent sintering process and can effectively reduce internal defects after sintering.

[0029] Mold loading. Put the raw material target into a graphite mold. Specifically, the graphite mold includes an upper punch, a graphite female mold, and a lower punch. The upper punch and the lower punch are placed on the upper and lower sides of the graphite female mold to enclose the graphite female mold and compact the sample inside the graphite female mold. A temperature measuring hole is opened on the side of the graphite female mold. Put the graphite female mold on the lower punch, place the raw material target, and make the sintering surface of the raw material target face upward. Then, adjust the relative position of the graphite female mold and the lower punch so that the sintering surface is located at the temperature measuring hole; place the Ti-Al nano powder into the graphite female mold and fill the sintering surface. Then, press the upper punch into the graphite female mold to evenly compact the Ti-Al nano powder on the sintering surface; wrap the graphite mold with carbon felt and punch holes in the carbon felt at the position of the temperature measuring hole to expose the temperature measuring hole.

[0030] Furnace loading. Place the graphite mold wrapped with carbon felt into the furnace chamber of a spark plasma sintering furnace. Insert an adjustable thermocouple into the temperature measuring hole to monitor the sintering temperature in the graphite mold in real time. Then, close the spark plasma sintering furnace, turn on the vacuum pump to evacuate the furnace, so that the vacuum degree is lower than 10 Pa. Then, apply an initial pressure of 10 MPa to the graphite mold to complete the furnace loading; Sintering. Pass an electric current through the spark plasma sintering furnace to start heating, and the heating rate is 100 °C / min until the sintering temperature rises to 530 °C. During the heating process, gradually increase the pressure on the graphite mold. When reaching the sintering temperature, the pressure rises to the final pressure of 30 MPa. Then, start heat preservation for 15 min; Cooling and recovery. After the heat preservation is completed, turn off the spark plasma sintering furnace, let the graphite mold cool to room temperature with the furnace, take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target, and its crystal size is as Figure 3 shown. Example

[0031] A direct connection method for Ti-Al powder and Ti-Al target in Embodiment 1 of the present invention includes the following steps: Prepare materials, collect the worn Ti-Al target, and reserve the same kind of Ti-Al nano powder; using the worn Ti-Al target as one of the raw materials realizes the recycling and reuse of the Ti-Al target.

[0032] Pre-treat the target. Pre-grind the sintering surface of the Ti-Al target successively with #800 emery paper, #1000 emery paper, #1500 emery paper, and #2000 emery paper, and then polish the sintering surface with a polishing machine to make the flatness of the sintering surface not greater than 0.1 mm and the roughness not greater than 0.1 μm, so as to meet the connection requirements. Then place the polished Ti-Al target into an ultrasonic cleaner for cleaning and vacuum drying to obtain the raw material target; by pre-treating the target and serving the subsequent sintering process, internal defects after sintering can be effectively reduced.

[0033] Install the mold. Place the raw material target into a graphite mold. Specifically, the graphite mold includes an upper punch, a graphite female mold, and a lower punch. The upper punch and the lower punch are placed on the upper and lower sides of the graphite female mold to close the graphite female mold and compact the sample in the graphite female mold. A temperature measuring hole is opened on the side of the graphite female mold. The graphite female mold is sleeved on the lower punch, the raw material target is placed, and the sintering surface of the raw material target faces upward. Then adjust the relative position of the graphite female mold and the lower punch so that the sintering surface is located at the temperature measuring hole; place the Ti-Al nano powder into the graphite female mold and fill the sintering surface, and then press the upper punch into the graphite female mold to uniformly compact the Ti-Al nano powder on the sintering surface; wrap the graphite mold with carbon felt and punch a hole in the carbon felt at the position of the temperature measuring hole to expose the temperature measuring hole.

[0034] Load the furnace. Place the graphite mold wrapped with carbon felt into the furnace chamber of a spark plasma sintering furnace. Insert an adjusted thermocouple into the temperature measuring hole for real-time monitoring of the sintering temperature in the graphite mold. Then close the spark plasma sintering furnace, turn on the vacuum pump to evacuate the furnace, so that the vacuum degree is lower than 10 Pa, and then apply an initial pressure of 10 MPa to the graphite mold to complete loading the furnace; Sinter. Pass an electric current through the spark plasma sintering furnace to start heating, and the heating rate is 100 °C / min until the sintering temperature rises to 530 °C. During the heating process, gradually increase the pressure on the graphite mold. When reaching the sintering temperature, the pressure rises to a final pressure of 30 MPa, and then start heat preservation for 20 min; Cooling and recovery: After the heat preservation is completed, turn off the spark plasma sintering furnace, and let the graphite mold cool down to room temperature with the furnace. Take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target. Its crystal size is as Figure 4 shown.

[0035] Comparative Example 1 A direct connection method for Ti-Al powder and Ti-Al target, comprising the following steps: Material preparation: Collect the worn Ti-Al target and prepare the same kind of Ti-Al nano powder for use; Using the worn Ti-Al target as one of the raw materials, the recycling and reuse of the Ti-Al target are realized.

[0036] Target pretreatment: Pre-grind the sintering surface of the Ti-Al target successively with #800 emery paper, #1000 emery paper, #1500 emery paper, and #2000 emery paper, and then polish the sintering surface with a polishing machine to make the flatness of the sintering surface not greater than 0.1 mm and the roughness not greater than 0.1 μm, so as to meet the connection requirements. Then place the polished Ti-Al target into an ultrasonic cleaning machine for cleaning and vacuum drying to obtain the raw material target; By pretreating the target, it serves the subsequent sintering process and can effectively reduce the internal defects after sintering.

[0037] Mold loading: Place the raw material target into the graphite mold. Specifically, the graphite mold includes an upper pressure head, a graphite female mold, and a lower pressure head. The upper pressure head and the lower pressure head are placed on the upper and lower sides of the graphite female mold to close the graphite female mold and compact the sample in the graphite female mold. A temperature measuring hole is opened on the side of the graphite female mold. Sleeve the graphite female mold on the lower pressure head, put in the raw material target, and make the sintering surface of the raw material target face up. Then adjust the relative position of the graphite female mold and the lower pressure head so that the sintering surface is located at the temperature measuring hole; Place the Ti-Al nano powder into the graphite female mold and fill the sintering surface, and then press the upper pressure head into the graphite female mold to evenly compact the Ti-Al nano powder on the sintering surface; Wrap the graphite mold with carbon felt and punch holes in the carbon felt at the position of the temperature measuring hole to expose the temperature measuring hole.

[0038] Furnace loading: Place the graphite mold wrapped with carbon felt into the furnace chamber of the spark plasma sintering furnace, insert an adjustable thermocouple into the temperature measuring hole for real-time monitoring of the sintering temperature in the graphite mold. Then close the spark plasma sintering furnace, turn on the vacuum pump to evacuate the furnace, make its vacuum degree lower than 10 Pa, and then apply an initial pressure of 10 MPa to the graphite mold to complete the furnace loading; Sintering: Pass an electric current through the spark plasma sintering furnace to start heating it up at a heating rate of 100 °C / min until the sintering temperature rises to 470 °C. During the heating process, gradually increase the pressure on the graphite mold. When the sintering temperature is reached, the pressure is increased to the final pressure of 30 MPa, and then start heat preservation for 10 min; Cooling and recovery: After the heat preservation is completed, turn off the spark plasma sintering furnace, let the graphite mold cool down to room temperature with the furnace, take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target.

[0039] Comparative Example 2 A direct connection method for Ti-Al powder and Ti-Al target, comprising the following steps: Material preparation: Collect the worn Ti-Al target and prepare the same kind of Ti-Al nano powder for use; Using the worn Ti-Al target as one of the raw materials realizes the recycling and reuse of the Ti-Al target.

[0040] Target pretreatment: Pre-grind the sintering surface of the Ti-Al target successively with #800 emery paper, #1000 emery paper, #1500 emery paper, and #2000 emery paper, and then polish the sintering surface with a polishing machine to make the flatness of the sintering surface not greater than 0.1 mm and the roughness not greater than 0.1 μm, so as to meet the connection requirements. Then place the polished Ti-Al target into an ultrasonic cleaner for cleaning and vacuum drying to obtain the raw material target; By pretreating the target, it serves the subsequent sintering process and can effectively reduce the internal defects after sintering.

[0041] Mold loading: Place the raw material target into the graphite mold. Specifically, the graphite mold includes an upper pressure head, a graphite female mold, and a lower pressure head. The upper pressure head and the lower pressure head are placed on the upper and lower sides of the graphite female mold to close the graphite female mold and compact the sample inside the graphite female mold. A temperature measuring hole is opened on the side of the graphite female mold. Sleeve the graphite female mold on the lower pressure head, put in the raw material target, and make the sintering surface of the raw material target face upward. Then adjust the relative position of the graphite female mold and the lower pressure head so that the sintering surface is located at the temperature measuring hole; Place the Ti-Al nano powder into the graphite female mold and fill the sintering surface, and then press the upper pressure head into the graphite female mold to uniformly compact the Ti-Al nano powder on the sintering surface; Wrap the graphite mold with carbon felt and punch holes in the carbon felt at the position of the temperature measuring hole to expose the temperature measuring hole.

[0042] Loading the furnace: Place the graphite mold wrapped with carbon felt into the furnace chamber of the spark plasma sintering furnace. Insert the adjusted thermocouple into the temperature measurement hole to monitor the sintering temperature in the graphite mold in real time. Then close the spark plasma sintering furnace and turn on the vacuum pump to evacuate the furnace to a vacuum degree lower than 10 Pa. Subsequently, apply an initial pressure of 10 MPa to the graphite mold to complete the furnace loading; Sintering: Pass an electric current through the spark plasma sintering furnace to start heating at a heating rate of 100 °C / min until the sintering temperature reaches 570 °C. Gradually increase the pressure on the graphite mold during the heating process. When the sintering temperature is reached, the pressure is increased to a final pressure of 30 MPa. Then start heat preservation for 10 min; Cooling and recovery: After the heat preservation is completed, turn off the spark plasma sintering furnace and let the graphite mold cool to room temperature with the furnace. Take out the graphite mold and disassemble it to obtain the connector of the Ti-Al powder and the Ti-Al target.

[0043] Compare the connectors of Examples 1-4 with Comparative Examples 1 and 2 in terms of grain size, porosity, and microstructure. The comparison results are shown in the following table.

[0044]

[0045] It can be seen from the data in the above table that compared with Example 2, in Examples 3 and 4, due to the extended heat preservation time, grain growth occurred, resulting in an increase in the porosity of the material; while in Example 1, due to the short heat preservation time, it may have caused incomplete sintering of the powder, also showing a relatively high porosity, but the overall porosity remained below 5%, meeting the usage requirements of the Ti-Al target. Compared with Example 2, in Comparative Example 1, due to the low sintering temperature, it was difficult for the material to achieve densification, resulting in a serious porosity, which obviously did not meet the usage requirements of the Ti-Al target; while in Comparative Example 2, due to the too high sintering temperature, it not only caused grain growth leading to an increase in porosity, but also promoted the alloying reaction, so it was not suitable as the connection process temperature.

[0046] The above content is a further detailed description of the present invention in combination with specific preferred embodiments. It cannot be determined that the specific implementation of the present invention is only limited to these descriptions. For those of ordinary skill in the technical field to which the present invention belongs, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should all be regarded as belonging to the protection scope of the present invention.

Claims

1. A method for directly connecting Ti-Al powder and Ti-Al target, characterized in that: The steps include: Material preparation: collecting the worn Ti-Al target and taking the same kind of Ti-Al nano powder for later use; Target material pretreatment: using sandpaper to pre-grind the sintered surface of the Ti-Al target material, and then polishing the sintered surface with a polishing machine to make the flatness and roughness of the sintered surface meet the connection requirements, and then placing the polished Ti-Al target material in an ultrasonic cleaning machine for cleaning and vacuum drying to obtain a raw target material; Mold loading: put the raw material target into the graphite mold, then put the Ti-Al nano powder into it simultaneously, make the Ti-Al nano powder contact and compact with the sintering surface, and then wrap the graphite mold with carbon felt; Loading the furnace, placing the graphite mold wrapped with carbon felt into the furnace of the spark plasma sintering furnace, then closing the spark plasma sintering furnace, turning on the vacuum pump to evacuate the furnace to a vacuum degree lower than 10Pa, then loading the graphite mold with an initial pressure of 10MPa to complete the loading of the furnace; Sintering, current is passed through the spark plasma sintering furnace to start heating, the heating rate is 100°C / min, until the sintering temperature rises to 530°C, the pressure on the graphite mold is gradually increased during the heating process, and when the sintering temperature is reached, the pressure is increased to a final pressure of 30MPa, and then the heat preservation is started; After cooling and recovery, and insulation is completed, the spark plasma sintering furnace is turned off, and the graphite mold is allowed to cool to room temperature with the furnace. The graphite mold is taken out and disassembled to obtain the connecting parts of Ti-Al powder and Ti-Al target.

2. The method for directly connecting Ti-Al powder and Ti-Al target according to claim 1, characterized in that: The graphite mold comprises an upper pressure head, a graphite female mold and a lower pressure head. The upper pressure head and the lower pressure head are placed on the upper and lower sides of the graphite female mold to close the graphite female mold and compact the sample in the graphite female mold. A temperature measuring hole is opened on the side of the graphite female mold.

3. The method for directly connecting Ti-Al powder and Ti-Al target according to claim 2, characterized in that: The mold installation step includes the following steps: Placing the target material, putting the graphite female mold on the lower pressure head, putting the raw material target material in, and making the sintering surface of the raw material target material face upward, and then adjusting the relative position of the graphite female mold and the lower pressure head so that the sintering surface is located at the temperature measuring hole; Placing powder, placing Ti-Al nano powder into the graphite female mold and filling the sintering surface, then pressing the upper pressing head into the graphite female mold to evenly compact the Ti-Al nano powder on the sintering surface; Wrap the mold, use carbon felt to wrap the graphite mold, and punch holes in the carbon felt at the location of the temperature measuring hole to expose the temperature measuring hole.

4. The method for directly connecting Ti-Al powder and Ti-Al target according to claim 3, characterized in that: In the furnace loading step, after the graphite mold wrapped with carbon felt is placed in the furnace of the spark plasma sintering furnace, an adjustment thermocouple is inserted into the temperature measuring hole for real-time monitoring of the sintering temperature in the graphite mold.

5. The method for directly connecting Ti-Al powder and Ti-Al target according to any one of claims 1 to 4, characterized in that: In the sintering step, the holding time is 5 to 20 minutes.

6. The method for directly connecting Ti-Al powder and Ti-Al target according to claim 5, characterized in that: In the target material pretreatment step, the pre-grinding is to use #800 metallographic sandpaper, #1000 metallographic sandpaper, #1500 metallographic sandpaper, and #2000 metallographic sandpaper to pre-grind the sintered surface in sequence, and the flatness of the sintered surface after polishing is not greater than 0.1mm, and the roughness is not greater than 0.1μm.

7. The method for directly connecting Ti-Al powder and Ti-Al target according to claim 5, characterized in that: The insulation time is 10 minutes.

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