Cavity penetrating block structure and thin film deposition equipment applying cavity penetrating block structure

Abstract

The invention discloses a cavity-penetrating block structure and thin film deposition equipment applying the same, the cavity-penetrating block structure comprises a first cavity-penetrating block, a second cavity-penetrating block and at least two ventilation assemblies, the first cavity-penetrating block and the second cavity-penetrating block are arranged up and down, and the ventilation assemblies are arranged on the first cavity-penetrating block and the second cavity-penetrating block. The at least two ventilation assemblies are arranged between the first cavity penetrating block and the second cavity penetrating block in a replaceable mode. Wherein each ventilation assembly is provided with a different number of channels. In the specific using process, when gas types or liquid precursors are changed, the cavity penetrating block structure can quickly adapt to process requirement changes by replacing the ventilation assemblies with different channel numbers, the technical problem that a traditional integrated cavity penetrating block structure cannot meet diversified process requirements is solved, meanwhile, the cost is reduced, and the production efficiency is improved. And the production period is shortened.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a cavity-through block structure and a thin film deposition apparatus using the same. Background Art

[0002] In the prior art, in thin film deposition apparatuses represented by metal organic chemical vapor deposition and chemical vapor deposition, the integrated design of the gas path system has a decisive influence on process stability. The gas delivery system of traditional apparatuses usually adopts an integrated cavity-through block structure, which integrates gas channels, liquid source injection holes, sealing components, and temperature control pipelines in a single metal substrate. Although this structure ensures airtightness, it has significant defects in practical applications.

[0003] Among them, the limitation of functional expandability is particularly obvious. When the process requirements change and it is necessary to increase the types of reaction gases or replace liquid precursors, the entire cavity-through block assembly must be replaced. That is to say, the traditional integrated cavity-through block structure cannot meet diverse process requirements. When the process requirements change, the cavity-through block assembly needs to be replaced, which prolongs the entire process cycle and increases costs at the same time. Summary of the Invention

[0004] Embodiments of the present invention provide a cavity-through block structure and a thin film deposition apparatus using the same, which solve the technical problem that the traditional integrated cavity-through block structure cannot meet diverse process requirements.

[0005] To solve the above problems, according to one aspect of the present application, embodiments of the present invention provide a cavity-through block structure, which includes a first cavity-through block, a second cavity-through block, and a ventilation assembly. The first cavity-through block and the second cavity-through block are arranged up and down, and there are at least two ventilation assemblies, and at least two ventilation assemblies can be alternatively arranged between the first cavity-through block and the second cavity-through block; wherein each ventilation assembly has a different number of channels.

[0006] In some embodiments, the ventilation assembly includes a first ventilation module and a second ventilation module. At least two first ventilation modules can be alternatively arranged in the first cavity-through block, at least two second ventilation modules can be alternatively arranged in the second cavity-through block, and at least two first ventilation modules and at least two second ventilation modules are arranged in one-to-one correspondence. The channels of the corresponding first ventilation module and second ventilation module can be communicated to realize the transmission of gas or liquid.

[0007] In some embodiments, the first ventilation module includes a first ventilation block. At least two of the first ventilation blocks can be replaceably disposed in the first fixing holes of the first cavity-passing block, and different first ventilation blocks have different numbers of first channels; the second ventilation module includes a second ventilation block. At least two of the second ventilation blocks can be replaceably disposed in the second fixing holes of the second cavity-passing block, and different second ventilation blocks have different numbers of second channels; wherein, the numbers of the first channels and the second channels correspond one by one, and the first fixing holes and the second fixing holes are vertically corresponding.

[0008] In some embodiments, there is at least one first fixing hole. At least one of the first ventilation blocks is disposed in the corresponding first fixing hole and covers all the first fixing holes, and the first ventilation block in any one of the first fixing holes can be replaceably disposed with the remaining first ventilation blocks;

[0009] There is at least one second fixing hole. At least one of the second ventilation blocks is disposed in the corresponding second fixing hole and covers all the second fixing holes, and the second ventilation block in any one of the second fixing holes can be replaceably disposed with the remaining second ventilation blocks.

[0010] In some embodiments, the first ventilation module further includes a first blind plug block. The first blind plug block or one of the first ventilation blocks is movably disposed in the third fixing hole of the first cavity-passing block; the second ventilation module further includes a second blind plug block. The second blind plug block or one of the second ventilation blocks is movably disposed in the fourth fixing hole of the second cavity-passing block; wherein, the third fixing hole and the fourth fixing hole are vertically corresponding.

[0011] In some embodiments, there is at least one first general ventilation hole on the first cavity-passing block, and there is at least one second general ventilation hole on the second cavity-passing block. The first general ventilation holes and the second general ventilation holes correspond one by one vertically.

[0012] In some embodiments, the cavity-passing block structure further includes a positioning assembly. The positioning assembly is disposed on the docking surface of the first cavity-passing block and the second cavity-passing block; and / or the positioning assembly includes a positioning pin and a fastening screw. The positioning pin makes the first cavity-passing block and the second cavity-passing block vertically match, and the fastening screw is used to fix the first cavity-passing block and the second cavity-passing block.

[0013] In some embodiments, there are rubber ring grooves respectively around the top of the first ventilation block at the periphery of the first channel, around the bottom of the second ventilation block at the periphery of the second channel, and around the bottom of the first ventilation block at the periphery of the first channel or around the top of the second ventilation block at the periphery of the second channel. Rubber rings are disposed in the rubber ring grooves;

[0014] and / or the top of the first general air hole, the bottom of the second general air hole, and the bottom of the first general air hole or the top of the second general air hole are respectively provided with the rubber ring grooves, and the rubber rings are arranged in the rubber ring grooves.

[0015] According to another aspect of the present application, an embodiment of the present invention provides a thin film deposition device, and the thin film deposition device includes the above-mentioned cavity-passing block structure.

[0016] In some embodiments, the thin film deposition device further includes an upper cover plate and a cavity, and the cavity-passing block structure is located between the upper cover plate and the cavity; wherein, the first cavity-passing block is dynamically connected to the upper cover plate through a floating connection structure, and the second cavity-passing block is rigidly connected to the cavity through a fixed sheet metal.

[0017] Compared with the prior art, the cavity-passing block structure of the present invention at least has the following beneficial effects:

[0018] The cavity-passing block structure provided by the present invention includes a first cavity-passing block, a second cavity-passing block and a ventilation component. The first cavity-passing block and the second cavity-passing block are arranged up and down. There are at least two ventilation components, and at least two ventilation components can be alternately arranged between the first cavity-passing block and the second cavity-passing block; wherein each ventilation component has a different number of channels.

[0019] In the specific use process, when changing the gas type or liquid precursor, in this embodiment, by replacing the ventilation components with different numbers of channels, the cavity-passing block structure can quickly adapt to the change of process requirements, solves the technical problem that the traditional integral cavity-passing block structure cannot meet the diverse process requirements, reduces the cost at the same time, and shortens the production cycle.

[0020] The thin film deposition device provided by the present invention is designed based on the above-mentioned cavity-passing block structure, and its beneficial effects can be referred to the beneficial effects of the above-mentioned cavity-passing block structure, which will not be elaborated here one by one.

[0021] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present invention and combines with the attached drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to these drawings.

[0023] Figure 1Shows a cross-sectional view of a cavity-passing block structure provided by an embodiment of the present invention;

[0024] Figure 2 Shows a cross-sectional view of a cavity-passing block structure from another angle provided by an embodiment of the present invention;

[0025] Figure 3 Shows a schematic structural view of a cavity-passing block structure provided by an embodiment of the present invention;

[0026] Figure 4 Shows a schematic structural view of a cavity-passing block structure from another angle provided by an embodiment of the present invention;

[0027] Figure 5 Shows a schematic structural view of a first cavity-passing block in a cavity-passing block structure provided by an embodiment of the present invention;

[0028] Figure 6 Shows a schematic structural view of a second cavity-passing block in a cavity-passing block structure provided by an embodiment of the present invention;

[0029] Figure 7 Shows a schematic structural view of a first ventilation block in a cavity-passing block structure provided by an embodiment of the present invention;

[0030] Figure 8 Shows another schematic structural view of a first ventilation block in a cavity-passing block structure provided by an embodiment of the present invention;

[0031] Figure 9 Shows a schematic structural view of a second ventilation block in a cavity-passing block structure provided by an embodiment of the present invention;

[0032] Figure 10 Shows another schematic structural view of a second ventilation block in a cavity-passing block structure provided by an embodiment of the present invention;

[0033] Figure 11 Shows an exploded view of a cavity-passing block structure provided by an embodiment of the present invention;

[0034] Reference numerals:

[0035] 1, first cavity-passing block; 11, first fixing hole; 12, third fixing hole; 13, first general air hole; 2, second cavity-passing block; 21, second fixing hole; 22, fourth fixing hole; 23, second general air hole; 3, ventilation assembly; 31, first ventilation module; 32, second ventilation module; 33, rubber ring groove; 34, rubber ring; 311, first ventilation block; 312, first blind plug block; 3111, first channel; 321, second ventilation block; 322, second blind plug block; 3211, second channel; 4, positioning assembly; 41, positioning pin; 42, fastening screw. Detailed implementation manners

[0036] To further elaborate on the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following, in conjunction with the accompanying drawings and preferred embodiments, details the specific implementation manners, structures, features, and their effects of the application based on the present invention. In the following description, different "one embodiment" or "embodiments" do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0037] In the description of the present invention, it should be clear that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and do not necessarily need to describe a specific order or sequence; the terms "vertical", "horizontal", "longitudinal", "front", "rear", "left", "right", "up", "down", "horizontal", etc. indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention, rather than meaning that the indicated devices or elements must have a specific orientation or position, so it cannot be understood as a limitation to the present invention.

[0038] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] To better understand the above technical solution, the following will detail the above technical solution in conjunction with the drawings of the specification and specific implementation manners.

[0040] Embodiment 1

[0041] This embodiment provides a cavity-piercing block structure, as Figures 1-11 shown. The cavity-piercing block structure includes a first cavity-piercing block 1, a second cavity-piercing block 2, and a ventilation component 3. The first cavity-piercing block 1 and the second cavity-piercing block 2 are arranged vertically. There are at least two ventilation components 3, and at least two ventilation components 3 can be alternately arranged between the first cavity-piercing block 1 and the second cavity-piercing block 2; each ventilation component 3 has a different number of channels.

[0042] The first cavity-piercing block 1 and the second cavity-piercing block 2 are arranged vertically, and the ventilation component 3 extends from the upper end of the first cavity-piercing block 1 to the lower end of the second cavity-piercing block 2, that is, it penetrates through the first cavity-piercing block 1 and the second cavity-piercing block 2.

[0043] Specifically, the first cavity-piercing block 1 and the second cavity-piercing block 2 are first used to fix and support the ventilation component 3. The first cavity-piercing block 1 and the second cavity-piercing block 2 are arranged vertically to form a stable framework, providing an installation interface for the ventilation component 3. The first cavity-piercing block 1 and the second cavity-piercing block 2 are also used for setting up the main channel. For example, they may include some fixed gas paths or interfaces thereon for connecting to an external gas source or a reaction chamber. The ventilation component 3 is a replaceable module that can provide different numbers of channels and independent paths for different reaction gases or liquid precursors.

[0044] In the specific use process, when changing the gas type or liquid precursor, in this embodiment, by replacing the ventilation component 3 with different numbers of channels, the cavity-piercing block structure can quickly adapt to the change of process requirements, solving the technical problem that the traditional integral cavity-piercing block structure cannot meet the diverse process requirements. At the same time, the cost is reduced and the production cycle is shortened.

[0045] In a specific embodiment, the ventilation component 3 includes a first ventilation module 31 and a second ventilation module 32. At least two of the first ventilation modules 31 can be replaceably arranged in the first cavity-piercing block 1, and at least two of the second ventilation modules 32 can be replaceably arranged in the second cavity-piercing block 2. And at least two of the first ventilation modules 31 and at least two of the second ventilation modules 32 are arranged in one-to-one correspondence. The channels of the corresponding first ventilation module 31 and second ventilation module 32 can be communicated to realize the transmission of gas or liquid.

[0046] There are at least two ventilation components 3, so there are also at least two first ventilation modules 31 and second ventilation modules 32 respectively.

[0047] In this embodiment, the first ventilation module 31 is embedded into the first cavity-piercing block 1 in a replaceable manner and may be fixed by a card slot, bolts or a sealing and pressing structure. The second ventilation module 32 is embedded into the second cavity-piercing block 2 in a replaceable manner and corresponds to the first ventilation module 31 vertically. Each first ventilation module 31 is paired with a second ventilation module 32, and the channels of the two are communicated through the alignment of the upper and lower cavity-piercing blocks. The first ventilation module 31 is responsible for receiving an external gas source or liquid precursor and delivering the fluid to the second ventilation module 32 through its internal channel. The second ventilation module 32 receives the fluid from the first ventilation module 31 and guides the fluid to the reaction chamber through the channel.

[0048] In a specific embodiment, the first ventilation module 31 includes a first ventilation block 311. At least two of the first ventilation blocks 311 are replaceably disposed in the first fixing holes 11 of the first through-cavity block 1, and different first ventilation blocks 311 have different numbers of first channels 3111. The second ventilation module 32 includes a second ventilation block 321. At least two of the second ventilation blocks 321 are replaceably disposed in the second fixing holes 21 of the second through-cavity block 2, and different second ventilation blocks 321 have different numbers of second channels 3211. Wherein, the numbers of the first channels 3111 and the second channels 3211 correspond one by one, and the first fixing holes 11 and the second fixing holes 21 are vertically corresponding.

[0049] The first ventilation block 311 serves as an input carrier for gases or liquid precursors, and directly carries and transports reaction gases or liquid precursors through the first channels 3111 inside it. Different first ventilation blocks 311 have different numbers of first channels 3111, such as single-channel, double-channel, multi-channel, to flexibly adjust the number of gas paths and adapt to the requirements of different processes for gas types or shunt paths. The second ventilation block 321 receives the fluid from the first ventilation block 311 and transports the fluid to the reaction chamber through the second channels 3211 inside it. The numbers of the second channels 3211 correspond one by one to the first channels 3111 to ensure that the upper and lower channels form a continuous and leak-free transmission path. In this embodiment, by designing the first ventilation blocks 311 and the second ventilation blocks 321 with different channel numbers, rapid reconstruction of the gas path system is achieved, and the problem of poor process adaptability caused by the fixed number of channels in the traditional integrated through-cavity block is solved.

[0050] In a specific embodiment, the first fixing holes 11 have at least one, the number of the first ventilation blocks 311 is greater than the number of the first fixing holes 11, at least one of the first ventilation blocks 311 is disposed in the corresponding first fixing hole 11 and covers all the first fixing holes 11, and the first ventilation block 311 in any one of the first fixing holes 11 can be replaceably disposed with the remaining first ventilation blocks 311. The second fixing holes 21 have at least one, the number of the second ventilation blocks 321 is greater than the number of the second fixing holes 21, at least one of the second ventilation blocks 321 is disposed in the corresponding second fixing hole 21 and covers all the second fixing holes 21, and the second ventilation block 321 in any one of the second fixing holes 21 can be replaceably disposed with the remaining second ventilation blocks 321.

[0051] In the above structure, the first fixing hole 11 is a reserved hole position on the first through-block 1, which is used to fix and position the first ventilation block 311 to ensure that the first channel 3111 is precisely aligned with the second channel 3211 of the second ventilation block 321 below. The second fixing hole 21 corresponds to the first fixing hole 11 up and down, and is used to fix the second ventilation block 321 to ensure that its channel (the second channel 3211) is strictly aligned with the channel of the first ventilation block 311.

[0052] To clearly explain this embodiment, if there are N first fixing holes 11, then there need to be at least N + 1 first ventilation blocks 311, aiming to provide spare modules or multiple configuration options. For example, assume that there are two first fixing holes 11 and three first ventilation blocks 311. The three first ventilation blocks 311 are respectively two "double-channel" ventilation blocks and one "triple-channel" ventilation block. In the initial installation stage, the two "double-channel" ventilation blocks are installed in the two first fixing holes 11 to cover all the hole positions, and at the same time, there is an extra "triple-channel" ventilation block as a spare; when the reaction changes and the amount of reaction gas increases, one of the "double-channel" ventilation blocks can be replaced with the spare "triple-channel" for ventilation. This setting method enables this embodiment to adjust the gas path configuration (such as increasing the number of channels) by replacing some modules, without replacing all modules as a whole.

[0053] As Figure 5 shown, there is one first fixing hole 11, Figure 7 and Figure 8 two first ventilation blocks 311 that cooperate with the first fixing hole 11. One of the first ventilation blocks 311 has two channels, and the other first ventilation block 311 has three channels. In this way, the two first ventilation blocks 311 can be alternately arranged in the first fixing hole 11 to achieve different channel settings, which can correspond to different reaction requirements.

[0054] Similarly, as Figure 6 described, there is one second fixing hole 21, as Figure 9 and Figure 10 two second ventilation blocks 321 that cooperate with the second fixing hole 21. One of the second ventilation blocks 321 has two channels, and the other second ventilation block 321 has three channels. In this way, the two second ventilation blocks 321 can be alternately arranged in the second fixing hole 21 to achieve different channel settings, which can correspond to different reaction requirements.

[0055] In a specific embodiment, the first ventilation module 31 further includes a first blind plug 312, and the first blind plug 312 or one of the first ventilation blocks 311 is movably disposed in the third fixing hole 12 of the first cavity-passing block 1; the second ventilation module 32 further includes a second blind plug 322, and the second blind plug 322 or one of the second ventilation blocks 321 is movably disposed in the fourth fixing hole 22 of the second cavity-passing block 2; wherein, the third fixing hole 12 and the fourth fixing hole 22 are vertically corresponding.

[0056] Assume that the third fixing hole 12 corresponds to a reserved gas path for process gases that may be added in the future (such as special doping gases). The current process does not require this gas path. Installing the first blind plug 312 can completely seal this channel, avoiding the risk of incorrect gas passage or leakage. If the gas path needs to be enabled in the future process, only need to replace the first blind plug 312 with the first ventilation block 311 (with an internal channel), then the new gas can be accessed without modifying the structure of the cavity-passing block.

[0057] Moreover, the addition of the first blind plug 312 enables the cavity-passing block structure provided in this embodiment to quickly switch between two processes. First, use the first blind plug 312 to seal the third fixing hole 12 and only operate the basic gas path; second, replace the first blind plug 312 with a ventilation block to enable the optional gas path of the third fixing hole 12 to support more complex reaction requirements.

[0058] In addition, the third fixing hole 12, as a reserved installation position on the first cavity-passing block 1, corresponds vertically to the fourth fixing hole 22 and is designed to install two functional modules: the first is to install the first blind plug 312 to seal the channel and disable the gas path function at this position; the second is to install the first ventilation block 311 to enable the channel and serve as a carrier for the optional gas path. In this embodiment, the same installation position (the third fixing hole 12) can achieve two states of "sealing" or "ventilating" through module replacement, expanding the configuration dimension of the cavity-passing block.

[0059] The second blind plug 322 has the same function as the above-mentioned first blind plug 312, and the fourth fixing hole 22 has the same function as the above-mentioned third fixing hole 12.

[0060] In a specific embodiment, the first cavity-passing block 1 has at least one first general air hole 13, and the second cavity-passing block 2 has at least one second general air hole 23, and the first general air hole 13 and the second general air hole 23 correspond to each other vertically one by one. No replacement is required at the first general air hole 13 and the second general air hole 23, and they assist in the transmission of gases, such as carrier gas, inert gas, or purge gas, etc.

[0061] In a specific embodiment, the cavity-passing block structure further includes a positioning component 4, and the positioning component 4 is disposed on the docking surface of the first cavity-passing block 1 and the second cavity-passing block 2. The positioning component 4 is used to ensure the precise alignment and stable connection of the first cavity-passing block 1 and the second cavity-passing block 2, guarantee the strict alignment of the channels of the first ventilation block 311 and the second ventilation block 321, and avoid leakage or uneven flow caused by misalignment.

[0062] The positioning component 4 includes a positioning pin 41 and a fastening screw 42. The positioning pin 41 makes the first cavity-passing block 1 and the second cavity-passing block 2 match up and down, and the fastening screw 42 is used to fix the first cavity-passing block 1 and the second cavity-passing block 2.

[0063] The positioning pin 41, through the pin-hole fit, forcibly restricts the lateral displacement of the first cavity-passing block 1 and the second cavity-passing block 2, ensures the precise matching of the installation positions of the first cavity-passing block 1 and the second cavity-passing block 2, and at the same time can prevent the first cavity-passing block 1 and the second cavity-passing block 2 from rotating during the installation process, guaranteeing the vertical penetration of the gas path channels. The fastening screw 42 applies a pressing force in the vertical direction through the thread, making the docking surfaces of the first cavity-passing block 1 and the second cavity-passing block 2 closely fit to ensure the sealing performance.

[0064] In the specific use process, first insert the positioning pin 41 into the pre-processed pin holes of the first cavity-passing block 1 and the second cavity-passing block 2, and use the interference fit between the pin and the hole to forcibly align the first cavity-passing block 1 and the second cavity-passing block 2. At this time, the docking surfaces of the first cavity-passing block 1 and the second cavity-passing block 2 and the gas path channels (such as general air holes, ventilation modules) have achieved precise alignment. After the positioning pin 41 completes the alignment, manually or with the assistance of tools, insert the fastening screw 42 into the threaded holes around the cavity-passing block and initially tighten it to initially fix the first cavity-passing block 1 and the second cavity-passing block 2. Finally, use a torque wrench to gradually tighten the fastening screw 42 in a symmetric order to ensure that the pressing force is evenly distributed and avoid deformation or sealing failure of the first cavity-passing block 1 and the second cavity-passing block 2 due to uneven stress.

[0065] In a specific embodiment, there are respectively rubber ring grooves 33 around the top of the first ventilation block 311 at the periphery of the first channel 3111, around the bottom of the second ventilation block 321 at the periphery of the second channel 3211, around the bottom of the first ventilation block 311 at the periphery of the first channel 3111, or around the top of the second ventilation block 321 at the periphery of the second channel 3211, and rubber rings 34 are arranged in the rubber ring grooves 33;

[0066] The rubber ring 34 at the top of the first ventilation block 311 can seal the external gas source interface. When the top of the first ventilation block 311 is connected to the external gas source pipeline, the rubber ring 34 fills the interface gap to prevent gas or liquid from leaking from the connection between the module and the external pipeline. Moreover, during the operation of the equipment or pipeline vibration, the rubber ring 34 compensates for the tiny displacement through elastic deformation to maintain the sealing reliability. The rubber ring 34 at the bottom of the first ventilation block 311 can seal the docking surface between the upper and lower modules. When the first ventilation block 311 is docked with the second ventilation block 321, the rubber ring 34 fills the microscopic unevenness of the contact surface between the two to prevent gas / liquid from leaking from the docking seam. The rubber ring 34 at the top of the second ventilation block 321 cooperates with the bottom of the first ventilation block 311 for sealing: it forms an upper and lower double-sealing structure with the rubber ring 34 at the bottom of the first ventilation block 311 to enhance the airtightness of the docking surface. The rubber ring 34 at the bottom of the second ventilation block 321 can seal the reaction chamber inlet. When the bottom of the second ventilation block 321 is connected to the reaction chamber body, the rubber ring 34 seals the interface between the module and the chamber body to prevent process gas from leaking to the external environment.

[0067] The top of the first common air hole 13, the bottom of the second common air hole 23, and the bottom of the first common air hole 13 or the top of the second common air hole 23 are respectively provided with the rubber ring grooves 33, and the rubber ring 34 is arranged in the rubber ring grooves 33.

[0068] The rubber rings 34 at the top of the first common air hole 13, the bottom of the second common air hole 23, and the bottom of the first common air hole 13 or the top of the second common air hole 23 are all used to seal the corresponding common air hole and the external pipeline or the reaction chamber. The rubber ring 34 in this embodiment provides dynamic sealing guarantee at the key nodes of the gas path system through elastic sealing and error compensation, and is the core component for the cavity-piercing block structure to achieve high airtightness and long service life.

[0069] Embodiment 2

[0070] This embodiment provides a thin film deposition device, and the thin film deposition device includes the cavity-piercing block structure described in Embodiment 1.

[0071] In a specific embodiment, the thin film deposition equipment further includes an upper cover plate and a cavity, and the through-cavity block structure is located between the upper cover plate and the cavity; wherein, the first through-cavity block 1 is dynamically connected to the upper cover plate through a floating connection structure, and the second through-cavity block 2 is rigidly connected to the cavity through a fixed sheet metal. Among them, the floating connection structure is a mechanical design that allows the connected components to have limited degrees of freedom displacement in a specific direction or angle, aiming to compensate for the deformation caused by assembly errors, thermal expansion, vibration or external loads, while maintaining the stability and functional integrity of the overall structure. For example, the floating connection structure is a spring guide pin system. A spring-loaded guide pin is arranged between the first through-cavity block 1 and the upper cover plate. There is a small gap between the pin body and the guide hole. The spring pre-tightening force keeps the through-cavity block centered, and at the same time allows it to offset when subjected to external forces. When closing the cavity, the spring compresses to absorb the impact of cavity closing, and the guide pin guides the through-cavity block to finely adjust the position to ensure that the upper and lower ventilation holes are automatically aligned.

[0072] In the prior art, the first through-cavity block and the second through-cavity block are fastened to the cover plate and the cavity by screws. Through the design of the cavity hinge, the upper and lower through-cavity blocks are aligned in the cavity-closed state to ensure that the ventilation holes of the upper and lower through-cavity blocks are concentric. Due to the mechanical clearance existing in the hinge structure itself, it is difficult to completely eliminate the misalignment when manually adjusting the screws. Therefore, this method will cause the air path to be poorly sealed or the flow rate to be uneven. Moreover, frequent opening and closing of the cavity causes wear of the hinge pin or bearing, gradually amplifying the alignment error, and components need to be replaced regularly. After adopting the structure of this embodiment, due to the setting of the floating connection structure, the first through-cavity block 1 is allowed to perform fine adjustment to automatically compensate for the error. The second through-cavity block 2 is fixed to the cavity through a high-rigidity sheet metal, serving as the reference plane of the overall structure to ensure the absolute alignment of the air path outlet and the reaction chamber inlet.

[0073] This embodiment combines dynamic error compensation and static stability through a composite design of floating connection and rigid reference, solving the defects of the traditional hinge screw scheme.

[0074] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A cavity-penetrating block structure, characterized in that: The cavity-penetrating block structure includes a first cavity-penetrating block, a second cavity-penetrating block and a ventilation component. The first cavity-penetrating block and the second cavity-penetrating block are arranged up and down. There are at least two ventilation components, and at least two ventilation components can be replaceably arranged between the first cavity-penetrating block and the second cavity-penetrating block; each of the ventilation components has a different number of channels.

2. The cavity-penetrating block structure according to claim 1, characterized in that: The ventilation assembly includes a first ventilation module and a second ventilation module, at least two of the first ventilation modules can be replaceably arranged in the first cavity block, at least two of the second ventilation modules can be replaceably arranged in the second cavity block, and at least two of the first ventilation modules and at least two of the second ventilation modules are arranged in a one-to-one correspondence, and the corresponding channels of the first ventilation modules and the second ventilation modules can be connected to realize the transmission of gas or liquid.

3. The cavity-penetrating block structure according to claim 2, characterized in that: The first ventilation module includes a first ventilation block, at least two of which can be replaceably disposed in the first fixing hole of the first cavity-penetrating block, and different first ventilation blocks have different numbers of first channels; the second ventilation module includes a second ventilation block, at least two of which can be replaceably disposed in the second fixing hole of the second cavity-penetrating block, and different second ventilation blocks have different numbers of second channels; wherein the numbers of the first channels and the second channels correspond one to one, and the first fixing hole and the second fixing hole correspond up and down.

4. The cavity-penetrating block structure according to claim 3, characterized in that: There is at least one first fixing hole, at least one first ventilation block is arranged in the corresponding first fixing hole and covers all the first fixing holes, and the first ventilation block in any one of the first fixing holes can be replaced with the remaining first ventilation blocks; There is at least one second fixing hole, at least one second ventilation block is arranged in the corresponding second fixing hole and covers all the second fixing holes, and the second ventilation block in any one of the second fixing holes can be replaced with the remaining second ventilation blocks.

5. The cavity-penetrating block structure according to claim 3, characterized in that: The first ventilation module also includes a first blind block, and the first blind block or one of the first ventilation blocks is movably set in the third fixing hole of the first cavity block; the second ventilation module also includes a second blind block, and the second blind block or one of the second ventilation blocks is movably set in the fourth fixing hole of the second cavity block; wherein the third fixing hole and the fourth fixing hole correspond to each other up and down.

6. The cavity-penetrating block structure according to claim 3, characterized in that: The first cavity-penetrating block has at least one first general air hole, and the second cavity-penetrating block has at least one second general air hole, and the first general air hole corresponds to the second general air hole one by one in the upper and lower directions.

7. The cavity-penetrating block structure according to any one of claims 1 to 6, characterized in that: The cavity-penetrating block structure also includes a positioning component, which is arranged on the mating surface of the first cavity-penetrating block and the second cavity-penetrating block; and / or the positioning component includes a positioning pin and a fastening screw, the positioning pin makes the first cavity-penetrating block and the second cavity-penetrating block match up and down, and the fastening screw is used to fix the first cavity-penetrating block and the second cavity-penetrating block.

8. The cavity-penetrating block structure according to claim 6, characterized in that: The top of the first ventilation block is located at the periphery of the first channel, the bottom of the second ventilation block is located at the periphery of the second channel, and the bottom of the first ventilation block is located at the periphery of the first channel or the top of the second ventilation block is located at the periphery of the second channel. There are rubber ring grooves, and rubber rings are arranged in the rubber ring grooves; And / or the top of the first general air hole, the bottom of the second general air hole, and the bottom of the first general air hole or the top of the second general air hole respectively have the rubber ring groove, and the rubber ring is arranged in the rubber ring groove.

9. A thin film deposition device, characterized in that: The thin film deposition arrangement comprises a cavity-penetrating block structure as described in any one of claims 1-8.

10. The thin film deposition device according to claim 9, characterized in that: The thin film deposition equipment also includes an upper cover plate and a cavity, and the cavity-penetrating block structure is located between the upper cover plate and the cavity; wherein the first cavity-penetrating block is dynamically connected to the upper cover plate through a floating connection structure, and the second cavity-penetrating block is rigidly connected to the cavity through a fixed sheet metal.

Images