Radio frequency matcher matching method capable of maintaining stability, electronic equipment and readable medium

Abstract

The invention discloses a radio frequency matcher matching method capable of maintaining stability, electronic equipment and a readable medium, and the method comprises the steps: S1, setting a starting point parameter and a stopping point parameter, and enabling the stopping point parameter to be smaller than the starting point parameter; s2, when it is detected that M continuous standing-wave ratios are larger than the starting point parameter, the radio frequency matcher starts matching, and the value of M is not smaller than 2; and S3, when N continuous standing-wave ratios are detected to be smaller than the stop point parameter, the radio frequency matcher stops matching, and the value of N is not smaller than 2. The matching stability, the anti-interference capability and the matching precision of the radio frequency matcher are remarkably improved by improving the conditions for starting matching and stopping matching.

Description

Background Art

[0002] In the actual application scenario of radio frequency power supply matching, after the matcher successfully achieves matching, the stability of the matching state faces many challenges. Specifically, the matching process mainly relies on two adjustable capacitors for adjustment. By adjusting the values of the CL and CT capacitors, the input impedance of the matcher can be made to match the output impedance of the radio frequency source, and the output impedance to match the load impedance, thereby reducing signal reflection and improving the radio frequency energy transmission efficiency. When the matching is approaching completion and at the stage of completion, that is, when the voltage standing wave ratio (VSWR) is in a state of minimum value, these two adjustable capacitors will exhibit continuous movement phenomena, and it takes a certain period of adjustment process to finally stop moving.

[0003] Currently, a relatively common matching method in the field of radio frequency power supply matching is to control the matching process by setting specific stop points and start points. In this method, generally, the value of the stop point is set to be less than the value of the start point. In this way, when it is detected that the voltage standing wave ratio (VSWR) is less than the value corresponding to the stop point, the matcher will immediately stop the adjustment operation of the capacitor; while when the voltage standing wave ratio (VSWR) is greater than the value corresponding to the start point, the matcher will restart the adjustment of the capacitor. The design intention of this matching method is to set a certain difference range between the stop point and the start point to avoid the matcher from frequently switching back and forth between the stop and start conditions, thereby achieving relative stability of the matching state to a certain extent.

[0004] However, this conventional matching method still has certain limitations. Since the voltage standing wave ratio (VSWR) detected each time is itself in a fluctuating state and not a constant value, although a difference range between the stop point and the start point is set, there will still occasionally be small-amplitude matching fluctuations, and a completely ideal stable matching state cannot be achieved. Such small fluctuations may have a certain impact on the performance and stability of the radio frequency power supply, thereby limiting the use effect of the radio frequency power supply in some application scenarios with high requirements for matching accuracy and stability. Summary of the Invention

[0005] In order to overcome the problem that the existing radio frequency power supply matching method occasionally has small-amplitude matching fluctuations because the voltage standing wave ratio (VSWR) detected each time is fluctuating, the present invention provides a method, an electronic device, and a readable medium for maintaining stable radio frequency matcher matching.

[0006] The technical solution of the present invention is as follows:

[0007] In the first aspect, the present invention provides a method for maintaining stable radio frequency matcher matching, including:

[0008] Step S1: Set the start point parameter and the stop point parameter, where the stop point parameter is less than the start point parameter;

[0009] Step S2: When it is detected that the standing wave ratio is continuously greater than the start point parameter for M times, the RF matcher starts matching, and M is not less than 2;

[0010] Step S3: When it is detected that the standing wave ratio is continuously less than the stop point parameter for N times, the RF matcher stops matching, and N is not less than 2.

[0011] As a preferred solution of the present invention, step S1 further includes: setting a stop deviation parameter;

[0012] In step S3, when it is detected that the standing wave ratio is continuously less than the stop point parameter for N times, and the deviation between the standing wave ratio and the stop point parameter is continuously less than the stop deviation parameter for N times, the RF matcher stops matching.

[0013] As a preferred solution of the present invention, the value of the stop deviation parameter is 0.01 - 0.05.

[0014] As a preferred solution of the present invention, the value of the stop deviation parameter is 0.03.

[0015] As a preferred solution of the present invention, when the RF matcher is matching, the adjustment steps of the CL capacitor and the CT capacitor are calculated through KP, KI, and KD in the PID algorithm. KP is a multiple of the current deviation value, KI is the accumulation of the deviation, and KD is the differential of the deviation.

[0016] As a preferred solution of the present invention, the value of the stop point parameter is 1 - 1.06, and the value of the start point parameter is 1.07 - 1.15.

[0017] As a preferred solution of the present invention, M takes a value of 10 - 100.

[0018] As a preferred solution of the present invention, N takes a value of 2 - 10.

[0019] In a second aspect, the present invention provides an electronic device, including at least one processing unit and at least one storage unit. The storage unit stores program code, and when the program code is executed by the processing unit, the processing unit executes the method for maintaining stable RF matcher matching according to any of the above solutions.

[0020] In a third aspect, the present invention provides a computer-readable medium, storing computer-executable instructions for executing the method for maintaining stable RF matcher matching according to any of the above solutions.

[0021] The present invention according to the above solution has the beneficial effects that:

[0022] A method for matching a stable radio frequency matcher provided by the present invention makes the matching stability of the radio frequency matcher better, the anti-interference ability stronger, and the fault tolerance better by improving the condition for stopping matching; makes the matching of the radio frequency matcher more accurate by improving the condition for stopping matching; effectively avoids frequent fluctuations and misoperations during the matching process by combining an improved PID algorithm, making the matching process more sensitive, precise, and reliable; can better adapt to the complex and changeable working conditions in practical applications, reduce the influence of external interference on the matching result, thereby improving the performance and reliability of the entire radio frequency system, and providing a strong guarantee for the stable operation of radio frequency equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic flow chart of a method for matching a stable radio frequency matcher in an embodiment of the present invention;

[0024] Figure 2 is a schematic flow chart of a method for matching a stable radio frequency matcher in another embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0026] It should be noted that the terms "including" and "having" and any variations thereof in the description and claims of the present invention are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0027] Please refer to Figure 1 , an embodiment of the present invention provides a method for matching a stable radio frequency matcher, including:

[0028] Step S1, set the start point parameter vswr_start and the stop point parameter vswr_stop. The start point parameter vswr_start represents the start condition for starting matching, and the stop point parameter vswr_stop represents the stop condition for completing matching, where the stop point parameter vswr_stop is less than the start point parameter vswr_start.

[0029] Specifically, since the most ideal stop point parameter vswr_stop value is vswr = 1, which is an unattainable value, the present invention sets the value of the stop point parameter vswr_stop within the range of 1 - 1.06. For example, the value of vswr_stop is 1.06, and the stop point parameter vswr_stop should be less than the start point parameter vswr_start. The value of the start point parameter vswr_start can be set within the range of 1.07 - 1.15. For example, the value of the start point parameter vswr_start is 1.1. This setting not only considers the actual situation but also ensures that the matching process can be carried out within a reasonable range, improving the practicality and operability of the method.

[0030] Step S2: When it is detected that the standing wave ratio vswr is continuously greater than the start point parameter vswr_start for M times, the RF matcher starts matching, where M is not less than 2.

[0031] This step starts matching only when it is detected that the standing wave ratio vswr is continuously greater than the start point parameter vswr_start for M times, effectively filtering out momentary standing wave ratio fluctuations and external interferences. For example, in practical applications, there may be a brief abnormal increase in the standing wave ratio, but this increase may be caused by accidental factors and does not really require matching adjustment. The requirement of continuous detection for M times can avoid unnecessary matching starts caused by these accidental factors, thereby improving the anti-interference ability and fault tolerance of the RF matcher; at the same time, since the frequency of matching starts is reduced, it is avoided that the matcher starts frequently under unstable conditions, making the matching process more stable.

[0032] Step S3: When it is detected that the standing wave ratio vswr is continuously less than the stop point parameter vswr_stop for N times, the RF matcher stops matching, where N is not less than 2.

[0033] This step stops matching only when it is detected that the standing wave ratio vswr is continuously less than the stop point parameter vswr_stop for N times, avoiding premature stopping of matching due to small fluctuations in the standing wave ratio. When the matching is approaching completion, the standing wave ratio may fluctuate within a small range near the stop point parameter. If the matching is stopped based on the result of a single detection, it may lead to insufficient matching accuracy. The requirement of continuous detection for N times ensures the stability and accuracy of the matching result, enabling the RF matcher to more precisely meet the matching requirements and reducing the matching error.

[0034] The method for maintaining a stable radio frequency matcher in the above embodiments significantly improves the matching stability, anti-interference ability, and matching accuracy of the radio frequency matcher by enhancing the conditions for starting and stopping the matching; by reasonably setting the start point parameters and stop point parameters and introducing the condition of the continuous detection times, it effectively avoids frequent fluctuations and misoperations during the matching process, enables the radio frequency matcher to work more precisely and stably, reduces the influence of external interference on the matching result, and thus improves the overall performance and reliability of the radio frequency system.

[0035] In one embodiment, M ranges from 10 to 100, preferably 50. When M ranges from 10 to 100 (preferably 50), it can maximize the matching stability while ensuring timely response to the matching requirements.

[0036] In one embodiment, N ranges from 2 to 10. When N ranges from 2 to 10 (preferably 5), it can maximize the matching accuracy while ensuring the matching efficiency.

[0037] In one embodiment, the present invention provides a method for maintaining a stable radio frequency matcher, including:

[0038] Step A1: Set the start point parameter vswr_start, the stop point parameter vswr_stop, and the stop deviation parameter E. The start point parameter vswr_start represents the start condition for the matching to start, the stop point parameter vswr_stop represents the stop condition for the matching to complete, and the stop point parameter vswr_stop should be less than the start point parameter vswr_start. The stop deviation parameter E is used to compare the deviation value between the detected voltage standing wave ratio vswr and the stop point parameter vswr_stop.

[0039] Specifically, since the most ideal value of the stop point parameter vswr_stop is vswr = 1, which is an unattainable value, the present invention sets the value of the stop point parameter vswr_stop in the range of 1 to 1.06. For example, the value of vswr_stop is 1.06, and since the stop point parameter vswr_stop should be less than the start point parameter vswr_start, the value of the start point parameter vswr_start can be set in the range of 1.07 to 1.15. For example, the value of the start point parameter vswr_start is 1.1. The value of the stop deviation parameter E is 0.01 to 0.05.

[0040] The setting of the stop deviation parameter E provides a more stringent condition for judging whether the matching is completed, further improving the accuracy of the matching completion judgment and avoiding misjudgment due to small fluctuations in the voltage standing wave ratio. The value range of the stop deviation parameter E of 0.01 - 0.05 (preferably 0.03) takes into account both the matching accuracy and the matching efficiency.

[0041] Step A2: When it is detected that the voltage standing wave ratio (VSWR) is continuously greater than the starting point parameter VSWR_start for M consecutive times, where M is not less than 2, the RF matcher starts matching.

[0042] This step starts matching only when it is detected that the VSWR is continuously greater than the starting point parameter VSWR_start for M consecutive times, effectively filtering out instantaneous VSWR fluctuations and external interferences. For example, in practical applications, there may be a temporary abnormal increase in the VSWR, but this increase may be caused by accidental factors and does not really require matching adjustment. The requirement of consecutive M detections can avoid unnecessary matching startups caused by these accidental factors, thereby improving the anti-interference ability and fault tolerance of the RF matcher; at the same time, since the frequency of matching startups is reduced, the matcher is prevented from starting frequently under unstable conditions, making the matching process more stable.

[0043] Step A3: When it is detected that the VSWR is continuously less than the stop point parameter VSWR_stop for N consecutive times, and the deviation between the VSWR and the stop point parameter VSWR_stop is continuously less than the stop deviation parameter E for N consecutive times, the RF matcher stops matching, where N is not less than 2.

[0044] This step stops matching only when it is continuously less than the stop point parameter VSWR_stop and the deviation is less than the stop deviation parameter E for N consecutive times, avoiding premature termination of matching due to small fluctuations in the VSWR. The requirement of consecutive N detections ensures the stability and accuracy of the matching result, enabling the RF matcher to more precisely meet the matching requirements and reducing the matching error.

[0045] Furthermore, when the RF matcher is matching, the adjustment steps of the CL capacitor and the CT capacitor are calculated through KP, KI, and KD in the PID algorithm. KP is a multiple of the current deviation value; KI is the accumulation of deviations, that is, a multiple of the accumulated value of the deviations; KD is the differential of the deviations, that is, a multiple of the difference between the current deviation and the previous deviation.

[0046] The traditional matching algorithm of the RF matcher is the phase, mag algorithm, which only uses KP in the PID algorithm, while the matching algorithm of the present invention adds KI and KD in the PID algorithm. For example, phaseError is the deviation of phase, magError is the deviation of mag, phaseError is the angular deviation, the angle is the arctangent trigonometric function of the imaginary part of the impedance divided by the real part of the impedance, magError is the deviation of the real part of the impedance, and these two deviations use the same deviation condition. Only when the deviation value is less than the stop deviation parameter E does it meet the stop matching condition.

[0047] The step calculation formula for the CL capacitor is as follows:

[0048] SML = KL * (maxstep * SML_ALl_Circle_step) * (magErr * g1 + phaseErr * g3) + KI_CL * (KL * (maxstep * SML_ALl_Circle_step)) * sum_error + KD_CL * (KL * (maxstep * SML_ALl_Circle_step)) * KD_error;

[0049] SML is the step size of the CL capacitor;

[0050] (magErr * g1 + phaseErr * g3) is the deviation;

[0051] KI_CL * KL * (maxstep * SML_ALl_Circle_step) is the coefficient of KP;

[0052] KI_CL * (KL * (maxstep * SML_ALl_Circle_step)) is the coefficient of KI;

[0053] sum_error is the accumulated sum of the deviation;

[0054] KD_CL * (KL * (maxstep * SML_ALl_Circle_step)) is the coefficient of KD;

[0055] KD_error is the differential of the deviation.

[0056] The step size calculation formula of the CT capacitor is as follows:

[0057] SMT = KS * (maxstep * SMT_ALl_Circle_step) * (phaseErr * g4 + magErr * g2) + KI_CT * (KS * (maxstep * SMT_ALl_Circle_step)) * sum_error + KD_CT * (KS * (maxstep * SMT_ALl_Circle_step)) * KD_error;

[0058] Wherein, SMT is the step size of the CT capacitor;

[0059] (phaseErr * g4 + magErr * g2) is the deviation;

[0060] KS * (maxstep * SMT_ALl_Circle_step) is the coefficient of KP;

[0061] KI_CT*(KS*(maxstep*SMT_ALl_Circle_step)) is the coefficient of KI;

[0062] sum_error is the sum of the accumulation of deviations;

[0063] KD_CT*(KS*(maxstep*SMT_ALl_Circle_step)) is the coefficient of KD;

[0064] KD_error is the differential of the deviation.

[0065] During the matching process, by introducing KI and KD in the PID algorithm to calculate the adjustment steps of the CL capacitor and the CT capacitor, compared with the traditional phase and mag algorithms that only use KP, it can better handle the accumulation and change rate of deviations. The integral term KI can eliminate the steady-state error of the system, and the differential term KD can predict the change trend of the deviation, improve the response speed and stability of the system, and further improve the accuracy and stability of the matching.

[0066] The radio frequency matcher matching method of the above embodiment, by reasonably setting the start point parameter vswr_start, the stop point parameter vswr_stop and the stop deviation parameter E, and combining with the improved PID algorithm, effectively avoids frequent fluctuations and misoperations during the matching process, making the matching process more sensitive, accurate and reliable; it can better adapt to the complex and changeable working conditions in actual applications, reduce the influence of external interference on the matching result, thereby improving the performance and reliability of the entire radio frequency system, and providing a strong guarantee for the stable operation of radio frequency equipment.

[0067] Those skilled in the art of the present technology can understand that various aspects of the present invention can be implemented as a system, a method or a program product. Therefore, various aspects of the present invention can be specifically implemented in the following forms, that is: a complete hardware implementation, a complete software implementation (including firmware, microcode, etc.), or an implementation combining hardware and software aspects, which can be collectively referred to as "circuit", "module" or "system" here.

[0068] Any combination of a module, sub-module, unit, or sub-unit according to this embodiment, or at least some functions of any combination thereof, may be implemented in one module. Any one or more of the module, sub-module, unit, or sub-unit according to this embodiment may be split into multiple modules for implementation. Any one or more of the module, sub-module, unit, or sub-unit according to this embodiment may be at least partially implemented as a hardware circuit, such as a field programmable gate array (FPGA), programmable logic array (PLA), system on chip, system on substrate, system on package, application specific integrated circuit (ASIC), or may be implemented by hardware or firmware in any other reasonable way of integrating or packaging circuits, or may be implemented in any one of the three implementation manners of software, hardware, and firmware, or in any suitable combination of several of them. Alternatively, one or more of the module, sub-module, unit, or sub-unit according to this embodiment may be at least partially implemented as a computer program module, which can perform corresponding functions when the computer program module is run.

[0069] In one embodiment, the present invention provides an electronic device that may include at least one processing unit and at least one storage unit. Among them, the storage unit stores program code, and when the program code is executed by the processing unit, the processing unit is caused to execute the steps in the maintenance of a stable radio frequency matcher matching according to various exemplary embodiments of the present invention described above in this specification. For example, the processing unit may execute the process of the method for maintaining a stable radio frequency matcher matching as shown in Figure 1 Or Figure 2 The process of the method for maintaining a stable radio frequency matcher matching.

[0070] In one embodiment, the present invention provides a computer-readable medium that stores computer-executable instructions for executing the steps in the method for maintaining a stable radio frequency matcher matching according to various exemplary embodiments of the present invention described above in this specification.

[0071] The readable medium may be a readable signal medium or a readable storage medium. The readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the above. The readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, in which the readable program code is carried. The readable signal medium may also be any readable medium other than the readable storage medium, and this readable medium may send, propagate, or transmit a program for use by or in connection with an instruction execution system, apparatus, or device. The program code included on the readable medium may be transmitted by any suitable medium, including - but not limited to - wireless, wired, optical cable, RF, etc., or any suitable combination of the above.

[0072] In addition, although the operations of the method of the present invention are described in a specific order in the drawings, this does not require or imply that these operations must be performed in that specific order, or that all the operations shown must be performed to achieve the desired result. Additionally or alternatively, some steps may be omitted, multiple steps may be combined into one step for execution, and / or one step may be decomposed into multiple steps for execution.

[0073] It should be understood that those of ordinary skill in the art can make improvements or transformations based on the above description, and all such improvements and transformations shall fall within the protection scope of the appended claims of the present invention.

[0074] The above has made an exemplary description of the present invention patent in conjunction with the drawings. Obviously, the implementation of the present invention patent is not limited by the above-mentioned manner. As long as various improvements are made by adopting the method concept and technical solution of the present invention patent, or the concept and technical solution of the present invention patent are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A method for maintaining stable radio frequency matching, characterized in that: include: Step S1, setting a starting point parameter and a stopping point parameter, wherein the stopping point parameter is smaller than the starting point parameter; Step S2: when it is detected that the standing wave ratio is greater than the starting point parameter for M consecutive times, the RF matching device starts matching, and the value of M is not less than 2; Step S3: When it is detected that the standing wave ratio is smaller than the stop point parameter for N consecutive times, the RF matching device stops matching, and the value of N is not less than 2.

2. The method for maintaining stable RF matching according to claim 1, characterized in that: Step S1 also includes: setting a stop deviation parameter; In step S3, when it is detected that the standing wave ratio is smaller than the stop point parameter for N consecutive times, and the deviation between the standing wave ratio and the stop point parameter is smaller than the stop deviation parameter for N consecutive times, the RF matcher stops matching.

3. The method for maintaining stable RF matching according to claim 2, characterized in that: The value of the stop deviation parameter is 0.01-0.

05.

4. The method for maintaining stable RF matching according to claim 3, characterized in that: The value of the stop deviation parameter is 0.

03.

5. The method for maintaining stable RF matching according to claim 2, characterized in that: When the RF matcher is matched, the adjustment step of the CL capacitor and the CT capacitor is calculated by KP, KI and KD in the PID algorithm, KP is a multiple of the current deviation value, KI is the accumulation of the deviation, and KD is the differential of the deviation.

6. The method for maintaining stable RF matching according to claim 1, characterized in that: The value of the stop point parameter is 1-1.06, and the value of the start point parameter is 1.07-1.

15.

7. The method for maintaining stable RF matching according to claim 1, characterized in that: The value of M is 10-100.

8. The method for maintaining stable RF matching according to claim 1, characterized in that: The value of N is 2-10.

9. An electronic device, characterized in that: It comprises at least one processing unit and at least one storage unit, wherein the storage unit stores program code, and when the program code is executed by the processing unit, the processing unit executes the method for maintaining stable RF matching as claimed in any one of claims 1 to 8.

10. A computer-readable medium storing computer-executable instructions, characterized in that: The computer executable instructions are used to execute the method for maintaining stable RF matching according to any one of claims 1 to 8.

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