Z-axis transfer platform, displacement device and bonding equipment of TCB process

Abstract

The application provides a Z-axis transfer platform of a TCB process, which comprises a first transmission block, a second transmission block, and a motor. The first transmission block comprises a first inclined surface, and the upper side of the first inclined surface is provided with a plurality of first fixing blocks. The second transmission block is located on the upper side of the first transmission block, and comprises a second inclined surface. The lower side of the second inclined surface is provided with at least one first guide rail, and the first guide rail is slidingly connected to the first fixing block. The motor is connected to the first transmission block, and is used to drive the first transmission block to move along the X-axis direction. According to the technical scheme of the embodiment, when the first transmission block is driven to move along the X-axis direction through the sliding connection between the first inclined surface and the second inclined surface, the first fixing block moves along the first guide rail fixed to the second inclined surface, the second transmission block is driven to move, and the displacement amount of the second transmission block in the Z-axis direction is necessarily smaller than the displacement amount of the first transmission block in the X-axis direction, so that the displacement precision of the Z-axis transfer platform in the Z-axis direction is improved.

Description

Technical Field

[0001] This invention belongs to the field of thermo-press bonding technology, and particularly relates to a Z-axis transfer platform, displacement device and bonding equipment for TCB process. Background Technology

[0002] In the chip manufacturing process, thermal compression bonding (TCB) is used to bond the chip to the substrate. During the bonding process, the chip needs to be driven to move along the Z-axis.

[0003] In the existing technology, the chip is fixed to the carrier board, and the carrier board is directly driven to move up and down along the Z-axis by the Z-axis motor. The movement accuracy of the carrier board depends entirely on the movement accuracy of the Z-axis motor. The displacement of the chip in the Z-axis direction is the same as the displacement of the carrier board driven by the Z-axis motor in the Z-axis direction. However, the minimum movement distance of the Z-axis motor is still too large for the movement distance of the chip bonding in the Z-axis direction, resulting in insufficient movement accuracy of the chip in the Z-axis direction. Summary of the Invention

[0004] This invention provides a Z-axis transfer platform, displacement device, and bonding equipment for the TCB process, which can improve the movement accuracy in the Z-axis direction.

[0005] In a first aspect, embodiments of the present invention provide a Z-axis transfer platform for the TCB process, comprising:

[0006] The first transmission block includes a first inclined surface, and a plurality of first fixing blocks are provided on the upper side of the first inclined surface;

[0007] The second transmission block is located above the first transmission block. The second transmission block includes a second inclined surface, and at least one first guide rail is provided on the lower side of the second inclined surface. The first guide rail is slidably connected to the first fixed block.

[0008] An electric motor is connected to the first transmission block, and the electric motor is used to drive the first transmission block to move along the X-axis direction.

[0009] According to some embodiments of the present invention, it further includes:

[0010] A vertical mounting plate is provided with a second guide rail on its front surface. The second guide rail is arranged along the Z-axis direction. The second transmission block is mounted on the second guide rail and can slide on the second guide rail.

[0011] According to some embodiments of the present invention, it further includes:

[0012] A horizontal mounting plate is vertically fixed to the upper side of the vertical mounting plate. A third guide rail is provided on the upper side of the horizontal mounting plate. The third guide rail is arranged along the X-axis direction. The first transmission block is mounted on the third guide rail and can slide along the third guide rail.

[0013] According to some embodiments of the present invention, it further includes:

[0014] The system includes a coupling and a lead screw. The motor is a servo motor, which includes an output shaft parallel to the X-axis. The output shaft is connected to the coupling, and the coupling is connected to the lead screw. A second fixing block is provided on the lower side of the first transmission block, and the second fixing block has a screw hole through which the lead screw passes.

[0015] According to some embodiments of the present invention, it further includes:

[0016] A limiting plate is vertically fixed to the upper surface of the horizontal mounting plate. A blind hole is provided on the side of the limiting plate near the lead screw. One end of the lead screw is connected to the coupling, and the other end of the lead screw is located inside the blind hole.

[0017] According to some embodiments of the present invention, it further includes:

[0018] The system includes a controller, a grating ruler, and a grating reading head. The grating ruler is fixed to the second transmission block, and the grating reading head is fixed to the vertical mounting plate. The controller is electrically connected to both the motor and the grating reading head.

[0019] According to some embodiments of the present invention, it further includes:

[0020] A first photoelectric switch, a second photoelectric switch, and a baffle are provided. The baffle is fixed to the first transmission block. The first photoelectric switch and the second photoelectric switch are respectively fixed to the upper surface of the horizontal mounting plate. The first photoelectric switch and the second photoelectric switch are electrically connected to the controller. When the first transmission block is located at one end of the third guide rail, the baffle is located inside the groove of the first photoelectric switch. When the first transmission block is located at the other end of the third guide rail, the baffle is located inside the groove of the second photoelectric switch.

[0021] According to some embodiments of the present invention, the number of first guide rails is two, the number of first fixing blocks is four, two first fixing blocks are slidably connected to one first guide rail, and the other two first fixing blocks are slidably connected to another first guide rail, and the two first guide rails are parallel to each other.

[0022] Secondly, embodiments of the present invention also provide a displacement device, including a Z-axis transfer platform using the TCB process as described in the first aspect.

[0023] Thirdly, embodiments of the present invention also provide a bonding apparatus, including a Z-axis transfer platform for the TCB process as described in the first aspect, or including a displacement device as described in the second aspect.

[0024] This invention includes: a first transmission block, the first transmission block comprising a first inclined surface, and a plurality of first fixed blocks disposed on the upper side of the first inclined surface; a second transmission block, the second transmission block being located above the first transmission block, the second transmission block comprising a second inclined surface, and at least one first guide rail disposed on the lower side of the second inclined surface, the first guide rail being slidably connected to the first fixed block; and a motor, the motor being connected to the first transmission block, the motor being used to drive the first transmission block to move along the X-axis direction. According to the technical solution of this embodiment, the first transmission block and the second transmission block are connected by the first guide rail mounted on the second inclined surface. When the motor drives the first transmission block to move along the X-axis direction, the displacement of the second transmission block in the Z-axis direction is the Z-axis component of the displacement of the first transmission block. Since the Z-axis component of the first transmission block is smaller than the X-axis displacement, the larger X-axis displacement of the first transmission block is converted into a smaller Z-axis displacement of the second transmission block. This reduces the Z-axis displacement while the motor provides the same output, thereby improving the displacement accuracy in the Z-axis direction. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the Z-axis transfer platform for the TCB process provided in one embodiment of the present invention;

[0026] Figure 2 This is a bottom cross-sectional view of the Z-axis transfer platform for the TCB process provided in another embodiment of the present invention. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0028] It should be noted that although functional modules are divided in the device schematic diagram and a logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in a different order than the module division in the device or the order in the flowchart. Terms such as "first," "objective," etc., in the specification, claims, or the aforementioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0029] This invention includes: a first transmission block, the first transmission block comprising a first inclined surface, and a plurality of first fixed blocks disposed on the upper side of the first inclined surface; a second transmission block, the second transmission block located above the first transmission block, the second transmission block comprising a second inclined surface, and at least one first guide rail disposed on the lower side of the second inclined surface, the first guide rail being slidably connected to the first fixed block; and a motor connected to the first transmission block, the motor being used to drive the first transmission block to move along the X-axis direction. According to the technical solution of this embodiment, the first transmission block and the second transmission block are connected by the first guide rail mounted on the second inclined surface. When the motor drives the first transmission block to move along the X-axis direction, the displacement of the second transmission block in the Z-axis direction is the component of the displacement of the first transmission block in the Z-axis direction. Since the component of the first transmission block in the Z-axis direction is smaller than the displacement of the first transmission block in the X-axis direction, the larger displacement of the first transmission block in the X-axis direction is converted into a smaller displacement of the second transmission block in the Z-axis direction. This reduces the Z-axis displacement while the motor provides the same output, thereby improving the displacement accuracy of the Z-axis transfer platform in the Z-axis direction.

[0030] Reference Figure 1 The Z-axis transfer platform for the TCB process provided in this embodiment includes:

[0031] The first transmission block 100 includes a first inclined surface, and a plurality of first fixing blocks 110 are provided on the upper side of the first inclined surface.

[0032] The second transmission block 200 is located above the first transmission block 100. The second transmission block 200 includes a second inclined surface. At least one first guide rail 210 is provided on the lower side of the second inclined surface. The first guide rail 210 is slidably connected to the first fixed block 110.

[0033] Motor 300 is connected to the first transmission block 100 and is used to drive the first transmission block 100 to move along the X-axis.

[0034] It should be noted that the first inclined plane is parallel to the second inclined plane; that is, the first guide rail 210 and the first fixing block 110 installed between the first and second inclined planes will not be subjected to pressure or tension perpendicular to the first inclined plane, which reduces the wear of the first guide rail 210 and the first fixing block 110 and extends the service life of the first guide rail 210 and the first fixing block 110.

[0035] It should be noted that, in order to reduce errors and improve accuracy, the longitudinal sections of the first transmission block 100 and the second transmission block 200 are right-angled triangles, and the first inclined plane is parallel to the second inclined plane, so that the bottom surface of the first transmission block 100 is parallel to the horizontal plane and the top surface of the second transmission block 200 is parallel to the horizontal plane, thereby keeping the carrier board mounted on the top of the second transmission block 200 horizontal and ensuring the accuracy requirements between the chip and the substrate in the TCB process.

[0036] It should be noted that the first guide rail 210 is parallel to the vertical plane, that is, when the second transmission block 200 slides above the first inclined plane through the first guide rail 210 and the first fixed block 110, the second transmission block 200 does not have displacement in the Y-axis direction.

[0037] It should be noted that the first guide rail 210 is slidably connected to multiple first fixed blocks 110, so that the support force received by the second transmission block 200 during its movement along the direction of the first guide rail 210 is more stable.

[0038] It should be noted that when the number of first guide rails 210 set on the lower side of the second inclined plane is greater than or equal to two, and the first guide rails 210 are parallel to each other, if the number of first fixing blocks 110 set on the upper side of the first inclined plane is equal to the number of first guide rails 210, then one first guide rail 210 slides on one first fixing block 110; when the number of first fixing blocks 110 is twice the number of first guide rails 210, then one first guide rail 210 slides on two first fixing blocks 110, making the support force of the first guide rails 210 on the second transmission block 200 more stable.

[0039] It should be noted that the motor 300 drives the first transmission block 100 to generate displacement along the X-axis direction, and the first fixed block 110 fixed to the first inclined surface generates displacement in the X-axis direction. The first transmission block and the second transmission block are connected by the first fixed block 110 fixed to the first inclined surface and the first guide rail 210 mounted on the second inclined surface. Under the drive of the first transmission block 100, the second transmission block 200 has displacement in the X-axis direction and displacement in the Z-axis direction. The displacement of the second transmission block in the Z-axis direction is the Z-axis component of the displacement of the first transmission block. Since the Z-axis component of the first transmission block is less than the X-axis displacement, the Z-axis displacement of the second transmission block 200 is necessarily less than the X-axis displacement of the first transmission block 100. With the motor 300 providing the same output, the sliding connection between the first and second inclined surfaces of this application reduces the Z-axis displacement, thereby improving the Z-axis displacement accuracy.

[0040] Additionally, in one embodiment, reference is made to Figure 1 It also includes:

[0041] A vertical mounting plate 400 is provided with a second guide rail 410 on its front surface. The second guide rail 410 is arranged along the Z-axis direction. A second transmission block 200 is mounted on the second guide rail 410 and can slide on the second guide rail 410.

[0042] It should be noted that the vertical mounting plate 400 and the second guide rail 410 provide a limit for the movement of the second transmission block 200 in the X-axis direction, so that the second transmission block 200 can only move in the Z-axis direction. The second guide rail 410 can more accurately control the displacement of the second transmission block 200 in the Z-axis direction.

[0043] It should be noted that the longitudinal section of the second transmission block 200 is a right-angled triangle, and the second inclined plane is a plane opposite the right angle of the right-angled triangle. The right-angled triangle longitudinal section of the second transmission block 200 makes the contact surface between the second transmission block 200 and the second guide rail 410 perpendicular, providing vertical coarse calibration for the second transmission block 200 mounted on the second guide rail 410, and achieving better Z-axis movement.

[0044] It should be noted that the second guide rail 410 is a cross roller guide rail. The use of cross roller guide rails enables the second transmission block 200 to withstand a larger load in the Z-axis direction and has higher movement accuracy in the Z-axis direction, which can meet the high precision and high pressure requirements in the TCB process.

[0045] It should be noted that when there are two second guide rails 410, the two second guide rails 410 are parallel to each other and are respectively set at both ends of the second transmission block 200, so that the support force on the second transmission block 200 is stable and balanced, and the second transmission block 200 can withstand a larger Z-axis load.

[0046] Additionally, in one embodiment, reference is made to Figure 1 It also includes:

[0047] A horizontal mounting plate 500 is vertically fixed to the upper side of a vertical mounting plate 400. A third guide rail 510 is provided on the upper side of the horizontal mounting plate 500. The third guide rail 510 is arranged along the X-axis direction. A first transmission block 100 is mounted on the third guide rail 510 and can slide along the third guide rail 510.

[0048] It should be noted that by setting the horizontal mounting plate 500 and the third guide rail 510, the first transmission block 100 moves along the third guide rail 510 under the drive of the motor 300, ensuring that the first transmission block 100 moves only in the X-axis direction, and preventing the first guide rail 210 from being damaged by deviation in the movement direction of the first transmission block 100.

[0049] It should be noted that the longitudinal section of the first transmission block 100 is a right-angled triangle, and the first inclined plane is a plane opposite to the right angle of the right-angled triangle. The right-angled triangle longitudinal section of the first transmission block 100 makes the contact surface between the first transmission block 100 and the third guide rail 510 a horizontal plane, providing a horizontal coarse calibration for the first transmission block 100 mounted on the third guide rail 510, and achieving better X-axis displacement accuracy.

[0050] Additionally, in one embodiment, reference is made to Figure 1 and Figure 2 It also includes:

[0051] The coupling 610 and the lead screw 620 are included. The motor 300 is a servo motor. The servo motor 300 includes an output shaft that is parallel to the X-axis direction. The output shaft is connected to the coupling 610, and the coupling 610 is connected to the lead screw 620. A second fixing block 120 is provided on the lower side of the first transmission block 100. The second fixing block 120 is provided with a screw hole, and the lead screw 620 passes through the screw hole.

[0052] It should be noted that the coupling 610, lead screw 620 and output shaft are all parallel to the X-axis direction. The servo motor 300 drives the second fixed block 120 to move along the X-axis direction through the coupling 610 and lead screw 620, so that the first transmission block 100 moves linearly along the X-axis direction.

[0053] It should be noted that by using the coupling 610 and the lead screw 620, different specifications of the lead screw 620 can be replaced according to actual needs to meet the displacement accuracy requirements of the first transmission block 100 in the X-axis direction, thereby further improving the displacement accuracy of the second transmission block 200 in the Z-axis direction.

[0054] Additionally, in one embodiment, reference is made to Figure 1 and Figure 2 It also includes:

[0055] The limiting plate 630 is vertically fixed to the upper surface of the horizontal mounting plate 500. A blind hole is provided on the side of the limiting plate 630 near the lead screw 620. One end of the lead screw 620 is connected to the coupling 610, and the other end of the lead screw 620 is located inside the blind hole.

[0056] It should be noted that the limiting plate 630 provides a limit in the X-axis direction for the second fixed block 120 that moves on the lead screw 620, preventing the second fixed block 120 from continuously moving away from the coupling 610 under the drive of the servo motor 300 and the lead screw 620, causing the second fixed block 120 to fall off the lead screw 620, so that the second fixed block 120 is located between the limiting plate 630 and the coupling 610.

[0057] Additionally, in one embodiment, reference is made to Figure 1 It also includes:

[0058] The controller, grating ruler 710, and grating reading head 720 are included. The grating ruler 710 is fixed to the second transmission block 200, and the grating reading head 720 is fixed to the vertical mounting plate 400. The controller is electrically connected to the motor 300 and the grating reading head 720 respectively.

[0059] It should be noted that the precise displacement of the second transmission block 200 in the Z-axis direction is obtained by the mutual displacement between the grating ruler 710 and the grating reading head 720; the controller obtains the feedback signal from the grating reading head 720 and controls the motor 300 based on the feedback signal to more accurately control the displacement of the second transmission block 200, so as to meet the chip displacement accuracy requirements in the TCB process.

[0060] Additionally, in one embodiment, reference is made to Figure 1 It also includes:

[0061] A first photoelectric switch 810, a second photoelectric switch 820, and a baffle 830 are provided. The baffle 830 is fixed to the first transmission block 100. The first photoelectric switch 810 and the second photoelectric switch 820 are respectively fixed to the upper surface of the horizontal mounting plate 500. The first photoelectric switch 810 and the second photoelectric switch 820 are electrically connected to the controller. When the first transmission block 100 is located at one end of the third guide rail 510, the baffle 830 is located inside the groove of the first photoelectric switch 810. When the first transmission block 100 is located at the other end of the third guide rail 510, the baffle 830 is located inside the groove of the second photoelectric switch 820.

[0062] It should be noted that the first photoelectric switch 810 and the second photoelectric switch 820 are slot-type photoelectric switches. The two sides inside the slot of the slot-type photoelectric switch are the infrared light emitting end and the infrared light receiving end, respectively. When the L-shaped piece is located at the first photoelectric switch 810 or the second photoelectric switch 820, and the L-shaped piece is located between the emitting end and the receiving end, the receiving end cannot receive the light signal. When this happens, an electrical signal is sent to the host computer, and the host computer controls the motor 300 to stop running and no longer drives the first transmission block 100 to continue moving in the same direction, so as to avoid the first transmission block 100 from damaging the third guide rail 510.

[0063] Additionally, in one embodiment, reference is made to Figure 1 and Figure 2 There are two first guide rails 210 and four first fixing blocks 110. Two first fixing blocks 110 are slidably connected to one first guide rail 210, and the other two first fixing blocks 110 are slidably connected to another first guide rail 210. The two first guide rails 210 are parallel to each other.

[0064] It should be noted that the first fixing block 110 is slidably mounted on the first guide rail 210, and relative movement is possible between the first fixing block 110 and the first guide rail 210. Two parallel first guide rails 210 are provided, and the number of first fixing blocks 110 is four. Increasing the number of first fixing blocks 110 mounted on the first guide rails 210 distributes the load pressure on the first guide rails 210, making the supporting force on the second transmission block 200 balanced and stable, and reducing vibration during the movement of the second transmission block 200.

[0065] It should be noted that the servo motor 300, through the coupling 610 and the lead screw 620, drives the second fixed block 120 to move along the direction of the lead screw 620, thereby driving the first transmission block 100 to move along the third guide rail 510. When the servo motor 300 drives the first transmission block 100 to approach the second transmission block 200 along the X-axis, the first fixed block 110 generates a thrust perpendicular to the first inclined plane on the second transmission block 200 through the first guide rail 210. The thrust has components in the X-axis direction and the Z-axis direction. The component of the thrust in the Z-axis direction causes the second transmission block 200 to rise along the Z-axis direction. When the servo motor 300 drives the first transmission block 100 to move away from the second transmission block 200 along the X-axis direction, the first fixed block 110 generates a pull force perpendicular to the first inclined plane on the second transmission block 200 through the first guide rail 210. The pull force has components in the X-axis direction and the Z-axis direction. The component of the pull force in the Z-axis direction causes the second transmission block 200 to fall along the Z-axis direction. When the second transmission block 200 moves to the second guide rail 410, the grating reading head 720 sends a signal to the controller. The controller controls the servo motor 300 based on the signal from the grating reading head 720 to control the displacement of the second transmission block 200 in the Z-axis direction. When the first transmission block 100 moves to the end of the third guide rail 510, the baffle 830 is located inside the groove of the first photoelectric switch 810. The first photoelectric switch 810 sends an electrical signal to the controller, and the controller shuts down the servo motor 300 to prevent the first transmission block 100 from damaging the third guide rail 510.

[0066] For example, when the angle between the first inclined plane and the horizontal plane is 45°, the first transmission block 100 moves along the X-axis direction under the drive of the servo motor 300, moving towards the direction of the second transmission block 200. The displacement of the first transmission block 100 is 1 cm, the displacement of the first fixed block 110 in the X-axis direction is 1 cm, the first guide rail 210 slides on the first fixed block 110 along the direction of the first inclined plane, and the second transmission block 200 is subjected to a thrust perpendicular to the second inclined plane. The thrust has components in the X-axis direction and the Z-axis direction. The vertical mounting plate 400 and the second guide rail 410 provide support force in the X-axis direction for the second transmission block 200, so that the second transmission block 200 does not have displacement in the X-axis direction, and the second transmission block 200 only slides on the second guide rail 410. Under ideal conditions, the second transmission block 200, driven by the Z-axis component of the thrust, rises 0.5 cm along the Z-axis. This means the displacement of the second transmission block 200 along the Z-axis is equal to the Z-axis component of the first transmission block 100, thus ensuring that the Z-axis displacement of the second transmission block 200 is less than the X-axis displacement of the first transmission block 100 driven by the servo motor 300. With the same output from the motor 300, this improves the Z-axis movement accuracy of the second transmission block 200.

[0067] In one embodiment, the present invention also provides a displacement device, including a Z-axis transfer platform using the TCB process as described above.

[0068] It should be noted that the displacement device can be the Z-axis transfer platform of the TCB process itself, or other equipment that uses the Z-axis transfer platform of the TCB process, such as the rectangular coordinate transfer platform of the TCB process. The rectangular coordinate transfer platform of the TCB process can realize the movement of the carrier plate installed on the rectangular coordinate transfer platform in the X-axis direction, Y-axis direction and Z-axis direction. This embodiment does not limit the specific type of displacement device, as long as the above-mentioned Z-axis transfer platform of the TCB process can be used.

[0069] In addition, embodiments of the present invention also provide a bonding apparatus, including a Z-axis transfer platform for the TCB process as described above, or including a displacement device as described above.

[0070] It should be noted that the bonding equipment can be the displacement device itself, such as the Cartesian coordinate transfer platform of the TCB process, or other equipment that uses the TCB process Z-axis transfer platform, such as chip bonding equipment. This embodiment does not limit the specific type of bonding equipment, as long as it can use the above-mentioned TCB process Z-axis transfer platform.

[0071] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the embodiments disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein.

[0072] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

[0073] The above is a detailed description of the preferred embodiments of the present invention. However, the present invention is not limited to the above embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention. All such equivalent modifications or substitutions are included within the scope defined by the claims of the present invention.

Claims

1. A Z-axis transfer platform of a TCB process, characterized in that, It comprises: The first transmission block comprises a first inclined surface, and the upper side of the first inclined surface is provided with a plurality of first fixed blocks; The second transmission block is located on the upper side of the first transmission block, and the second transmission block comprises a second inclined surface, and the lower side of the second inclined surface is provided with at least one first guide rail which is slidingly connected to the first fixed block; The motor is connected to the first transmission block, and the motor is used to drive the first transmission block to move along the X-axis direction; The front surface of the vertical mounting plate is provided with a second guide rail which is arranged along the Z-axis direction, and the second transmission block is mounted on the second guide rail and can slide on the second guide rail; The horizontal mounting plate is vertically fixed on the upper side of the vertical mounting plate, and the upper side of the horizontal mounting plate is provided with a third guide rail which is arranged along the X-axis direction, and the first transmission block is mounted on the third guide rail and can slide along the third guide rail.

2. The Z-axis transfer platform of the TCB process according to claim 1, wherein, It further comprises: The motor is a servo motor, the servo motor comprises an output shaft which is parallel to the X-axis direction, the output shaft is connected to the coupling, the coupling is connected to the lead screw, the lower side of the first transmission block is provided with a second fixed block, the second fixed block is provided with a screw hole, and the lead screw is arranged in the screw hole.

3. The Z-axis transfer platform of the TCB process according to claim 2, wherein, It further comprises: The limiting plate is vertically fixed on the upper surface of the horizontal mounting plate, and the side of the limiting plate close to the lead screw is provided with a blind hole, one end of the lead screw is connected to the coupling, and the other end of the lead screw is located in the blind hole.

4. The Z-axis transfer platform of the TCB process according to claim 1, wherein, It further comprises: The controller, the grating ruler and the grating reading head, the grating ruler is fixed to the second transmission block, the grating reading head is fixed to the vertical mounting plate, and the controller is electrically connected to the motor and the grating reading head respectively.

5. The Z-axis transfer platform of the TCB process according to claim 4, wherein, It further comprises: The first photoelectric switch, the second photoelectric switch and the baffle, the baffle is fixed to the first transmission block, the first photoelectric switch and the second photoelectric switch are fixed to the upper surface of the horizontal mounting plate respectively, the first photoelectric switch and the second photoelectric switch are electrically connected to the controller, when the first transmission block is located at one end of the third guide rail, the baffle is located in the groove of the first photoelectric switch, and when the first transmission block is located at the other end of the third guide rail, the baffle is located in the groove of the second photoelectric switch.

6. The Z-axis transfer platform of the TCB process according to claim 1, wherein The number of the first guide rails is two, the number of the first fixed blocks is four, two of the first fixed blocks are slidingly connected to one of the first guide rails, and the other two of the first fixed blocks are slidingly connected to the other of the first guide rails, and the two first guide rails are parallel to each other.

7. A displacement device characterized by: The TCB process Z-axis transfer platform according to any one of claims 1 to 6.

8. A bonding apparatus characterized by comprising: The TCB process Z-axis transfer platform according to any one of claims 1 to 6, or the displacement device according to claim 7.

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