Polishing solution supply rotary joint device for double-sided polishing machine

Abstract

The invention discloses a double-sided polishing machine, and particularly relates to a polishing solution supply rotary joint device for the double-sided polishing machine. The rotary joint comprises a rotary joint body, a first detection inlet component is connected to the vertical upper portion of the rotary joint body, a second detection inlet component is connected to the rotary joint body in the horizontal direction, and a first polishing solution channel and a second polishing solution channel are formed in a rotary shaft of the rotary joint body. A liquid outlet of the first detection inlet component is communicated with a first polishing solution inlet of the first polishing solution channel, and a liquid outlet of the second detection inlet component is communicated with a second polishing solution inlet of the second polishing solution channel. Polishing media are conveyed through the two polishing liquid pipelines, the polishing media can freely enter from the top or the side portion, the sealing effect is good, and the two polishing media can be conveyed at the same time.

Description

Technical Field

[0001] The present invention relates to a double-sided polishing machine, and more particularly to a polishing liquid supply rotary joint device for a double-sided polishing machine. Background Art

[0002] For modern large-scale production, high-speed and efficient processing, and reduction of auxiliary time and downtime are of great significance for enterprises to improve economic efficiency. In the field of semiconductor automatic double-sided polishing equipment, due to the corrosiveness and oxidizability of the polishing medium, when transporting the polishing liquid medium, the previous method was to use a single pipeline for transportation to introduce the polishing liquid into the equipment. Chinese Patent, Patent No. 201520164998.9, discloses "a liquid supply device in the middle of the polishing head of a polishing machine". This device realizes the lifting of the polishing disc by the action of a cylinder and drives the sliding sleeve by the main shaft, thereby realizing the independent control of the polishing disc. The liquid spraying pipe above the main shaft realizes the liquid supply in the middle. It is a single liquid delivery pipeline arranged in the middle of the main shaft to realize the introduction of the polishing liquid. This polishing liquid transportation structure has poor sealing performance. With a single pipeline for transportation, there is a problem that only one type of polishing liquid can be transported. There is only one polishing liquid inlet, and it is impossible to freely select the polishing medium to enter from the top or side according to the working conditions. Summary of the Invention

[0003] The present invention is to solve the above technical problems, and provides a polishing liquid supply rotary joint device for a double-sided polishing machine, aiming to realize the transportation of two polishing liquid pipelines, the polishing medium can freely enter from the top or side, with good sealing effect, and can realize the simultaneous transportation of two polishing media.

[0004] To achieve the above object, the present invention is realized by the following technical solutions: A polishing liquid supply rotary joint device for a double-sided polishing machine, which includes a rotary joint main body. A first detection inlet component is connected above the rotary joint main body vertically, and a second detection inlet component is connected in the horizontal direction of the rotary joint main body. A first polishing liquid channel and a second polishing liquid channel are opened on the rotary shaft of the rotary joint main body. The liquid outlet of the first detection inlet component is communicated with the first polishing liquid inlet of the first polishing liquid channel, and the liquid outlet of the second detection inlet component is communicated with the second polishing liquid inlet of the second polishing liquid channel.

[0005] Preferably, the above-mentioned first detection inlet component is composed of the following structure: a first pipeline joint communicated with the polishing liquid infusion pipeline, the first pipeline joint is communicated with a first flow detection element through a first long straight-through joint, the first flow detection element is fixed on the first connecting plate by screws, the first connecting plate is fixed on the upper end cover of the rotating joint body by screws, the first flow detection element is communicated with a first control valve through a first short straight-through joint, the first control valve is fixed on the first connecting plate by screws, and the first control valve is communicated with a first polishing liquid inlet through a first connecting joint.

[0006] Preferably, the above-mentioned second detection inlet component is composed of the following structure: a second pipeline joint communicated with the polishing liquid infusion pipeline, the second pipeline joint is communicated with a second flow detection element through a second long straight-through joint, the second flow detection element is fixed on the second connecting plate by screws, the second connecting plate is fixed on the upper end cover of the rotating joint body by screws, the second flow detection element is communicated with a second control valve through a second short straight-through joint, the second control valve is fixed on the second connecting plate by screws, and the second control valve is communicated with a second polishing liquid inlet through a second connecting joint.

[0007] Preferably, the structure of the above-mentioned rotating joint body is as follows: the lower end of the rotating shaft is connected to the connecting shaft through a positioning pin, an upper end cover is arranged above the rotating shaft, an intermediate gasket is arranged outside the rotating shaft below the upper end cover, the upper end cover and the intermediate gasket are fixedly connected by upper cover connecting screws, an interface flange is arranged outside the rotating shaft below the intermediate gasket, the interface flange is fixedly connected with the shell by screws below, the lower end of the shell is connected to the upper connecting seat by screws, the upper connecting seat is connected to the lower connecting seat by connecting seat connecting screws, and the shell, the upper connecting seat and the lower connecting seat are arranged outside the rotating shaft and the connecting shaft.

[0008] Preferably, the lower end of the above-mentioned lower connecting seat is provided with a threaded hole and a positioning straight port, and is connected to the upper driving reducer of the polishing machine through the threaded hole and the positioning straight port, and the lower end of the connecting shaft is provided with a keyway.

[0009] Preferably, the first polishing liquid channel opened on the above-mentioned rotating shaft is a vertical "1" - shaped channel, and the first polishing liquid inlet is arranged at the top; the second polishing liquid channel opened on the rotating shaft is an "L" - shaped channel, and the second polishing liquid inlet is arranged on the side.

[0010] Preferably, the above-mentioned upper end cover is provided with a first polishing liquid inlet, a sealed cavity is formed between the upper end cover and the rotating shaft, the upper end cover and the intermediate gasket are sealed and connected through an upper end cover O - ring, and a ceramic spring sealing ring is arranged between the rotating shaft, the upper end cover and the intermediate gasket below the cavity.

[0011] Preferably, a seepage channel is opened on one side of the above-mentioned interface flange, a seepage joint is arranged at the overflow liquid outlet of the seepage channel, and a second polishing liquid inlet is opened on the other side of the interface flange.

[0012] Preferably, the upper inner side of the above-mentioned housing and the upper connecting seat are fixedly connected by housing connecting screws. A plug is provided on the housing for maintenance and liquid drainage. A first upper connecting seat O-ring for sealing is provided between the housing and the upper connecting seat. A labyrinth sleeve for sealing is provided outside the rotating shaft inside the housing. An elastic sealing ring is provided between the labyrinth sleeve, the rotating shaft and the interface flange. An interface flange O-ring is provided between the interface flange and the housing. A V-ring for sealing is provided between the labyrinth sleeve and the housing. A labyrinth sleeve O-ring for sealing is provided between the labyrinth sleeve and the rotating shaft. A second upper connecting seat O-ring for sealing is provided between the upper connecting seat and the housing. A rotating bearing is provided at the upper end inside the upper connecting seat, and a connecting seat bearing is provided at the lower end inside the upper connecting seat. The rotating bearing and the connecting seat bearing are in contact connection with the rotating shaft. A retaining ring is provided inside the upper connecting seat, and a positioning sleeve for supporting the connecting seat bearing is provided on the retaining ring.

[0013] Preferably, the lower part of the above-mentioned first polishing liquid channel is sleeved with a first delivery pipe, and the lower part of the second polishing liquid channel is sleeved with a second delivery pipe. Sealing rings are provided between the outside of the first delivery pipe and the second delivery pipe and the upper connecting seat. The liquid outlets of the first delivery pipe and the second delivery pipe pass through the hollow shaft of the upper reducer of the polishing machine and are communicated with the polishing liquid interfaces at the internal workstations of the polishing machine. A delivery pipe O-ring for sealing is provided between the delivery pipe and the rotating shaft.

[0014] Due to the adoption of the above technical solutions, the present invention has the following advantageous effects: The present invention has the following advantages compared with the original polishing liquid delivery structure. The polishing liquid inlet can freely choose to enter from the top or the side according to the working conditions. The sealing surface and the sealing ring are made of special materials, which are anti-wear, long-life, corrosion-resistant, and leak-free. Precision bearings are configured inside, with stable and lasting operation, firmness and flexibility, and a small friction coefficient, so it can operate at high speed. It can realize the simultaneous delivery of two polishing media. The wear condition of the internal seals can be visually observed from the appearance of the product, which can prevent mechanical shutdown or mechanical damage, so as to achieve the preventive effect and reduce losses. The replacement and repair of the seals are simple and easy, without having to purchase new products, saving costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The front view structural schematic diagram of the present invention.

[0016] Figure 2 The sectional view structural schematic diagram of the rotating joint main body of the present invention.

[0017] In the figure: 1, swivel joint body; 2, first detection inlet component; 3, second detection inlet component; 11, upper end cover; 12, intermediate gasket sleeve; 13, interface flange; 14, housing; 15, rotary bearing; 1601, connecting shaft; 1602, rotating shaft; 1701, first delivery pipe; 1702, second delivery pipe; 1801, upper connecting seat; 1802, lower connecting seat; 19, labyrinth sleeve; 101, upper cover connecting screw; 102, seepage joint; 103, housing connecting screw; 104, plug; 105, first upper connecting seat O-ring; 106, delivery pipe O-ring; 107, retaining ring; 108, connecting seat connecting screw; 109, positioning pin; 110, positioning sleeve; 111, connecting seat bearing; 112, second upper connecting seat O-ring; 113, labyrinth sleeve O-ring; 114, V-ring; 115, interface flange O-ring; 116, sealing ring; 117, ceramic spring sealing ring; 118, upper end cover O-ring; 201, first pipeline joint; 202, first long straight-through joint; 204, first flow detection element; 205, first short straight-through joint; 206, first control valve; 207, first connecting plate; 208, first connection joint; 301, second pipeline joint; 302, second long straight-through joint; 304, second flow detection element; 305, second short straight-through joint; 306, second control valve; 307, second connecting plate; 308, second connection joint; 401, first polishing liquid inlet; 402, cavity; 403, second polishing liquid inlet; 404, seepage channel; 405, first polishing liquid channel; 406, second polishing liquid channel; 407, keyway; 408, threaded hole; 409, positioning straight port. Detailed implementation mode

[0018] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The protection scope of the present invention is not limited by the embodiments.

[0019] Refer to Figure 1 and Figure 2, a polishing liquid supply rotary joint device for a double-sided polishing machine according to the present invention, which comprises a rotary joint main body 1. A first detection inlet component 2 is connected above the vertical of the rotary joint main body 1, and a second detection inlet component 3 is connected in the horizontal direction of the rotary joint main body 1. A first polishing liquid channel 405 and a second polishing liquid channel 406 are provided on the rotary shaft 1602 of the rotary joint main body 1. The liquid outlet of the first detection inlet component 2 is communicated with the first polishing liquid inlet 401 of the first polishing liquid channel 405, and the liquid outlet of the second detection inlet component 3 is communicated with the second polishing liquid inlet 403 of the second polishing liquid channel 406. The structure of the rotary joint main body 1 is as follows: the lower end of the rotary shaft 1602 is connected with a connecting shaft 1601 through a positioning pin 109. An upper end cover 11 is arranged above the rotary shaft 1602. An intermediate gasket 12 is arranged outside the rotary shaft 1602 below the upper end cover 11. The upper end cover 11 and the intermediate gasket 12 are fixedly connected through an upper cover connecting screw 101. An interface flange 13 is arranged outside the rotary shaft 1602 below the intermediate gasket 12. The interface flange 13 is fixedly connected with a housing 14 through screws. The lower end of the housing 14 is connected with an upper connecting seat 1801 through screws. The upper connecting seat 1801 is connected with a lower connecting seat 1802 through a connecting seat connecting screw 108. The housing 14, the upper connecting seat 1801 and the lower connecting seat 1802 are arranged outside the rotary shaft 1602 and the connecting shaft 1601.

[0020] Reference Figure 1 The first detection inlet component 2 is composed of the following structure: a first pipeline joint 201 communicated with a polishing liquid infusion pipeline. The first pipeline joint 201 is communicated with a first flow detection element 204 through a first long straight-through joint 202. The first flow detection element 204 is fixed on a first connecting plate 207 through screws. The first connecting plate 207 is fixed on the upper end cover 11 of the rotary joint main body 1 through screws. The first flow detection element 204 is communicated with a first control valve 206 through a first short straight-through joint 205. The first control valve 206 is fixed on the first connecting plate 207 through screws. The first control valve 206 is communicated with the first polishing liquid inlet 401 through a first connecting joint 208.

[0021] Reference Figure 1The second detection inlet component 3 is composed of the following structure: a second pipeline joint 301 communicated with the polishing liquid infusion pipeline, the second pipeline joint 301 is communicated with a second flow detection element 304 through a second long straight-through joint 302, the second flow detection element 304 is fixed on a second connecting plate 307 by screws, the second connecting plate 307 is fixed on the upper end cover 11 of the rotary joint body 1 by screws, the second flow detection element 304 is communicated with a second control valve 306 through a second short straight-through joint 305, the second control valve 306 is fixed on the second connecting plate 307 by screws, and the second control valve 306 is communicated with a second polishing liquid inlet 403 through a second connecting joint 308.

[0022] Reference Figure 2 , a threaded hole 408 and a positioning straight port 409 are provided at the lower end of the lower connecting seat 1802, and it is connected to the upper driving reducer of the polishing machine through the threaded hole 408 and the positioning straight port 409. A keyway 407 is provided at the lower end of the connecting shaft 1601, and the keyway 407 is used to connect to the hollow shaft of the upper reducer of the polishing machine. The first polishing liquid channel 405 opened on the rotating shaft 1602 is a vertical "1"-shaped channel, and the first polishing liquid inlet 401 is arranged at the top; the second polishing liquid channel 406 opened on the rotating shaft 1602 is an "L"-shaped channel, and the second polishing liquid inlet 403 is arranged on the side. A first polishing liquid inlet 401 is opened on the upper end cover 11, a sealed cavity 402 is formed between the upper end cover 11 and the rotating shaft 1602, the upper end cover 11 and the intermediate gasket 12 are sealed and connected through an upper end cover O-ring 118, and a ceramic spring sealing ring 117 is provided between the rotating shaft 1602, the upper end cover 11 and the intermediate gasket 12 below the cavity 402, and the rotating shaft 1602, the upper end cover 11 and the intermediate gasket 12 are sealed and connected through the ceramic spring sealing ring 117.

[0023] Reference Figure 2 , a seepage channel 404 is opened on one side of the interface flange 13, and a seepage joint 102 is provided at the overflow liquid outlet of the seepage channel 404. When the sealing component fails, the liquid flows into the cavity and is discharged through here. A second polishing liquid inlet 403 is opened on the other side of the interface flange 13.

[0024] Reference Figure 2, the upper inner side of the housing 14 and the upper connecting seat 1801 are fixedly connected by housing connecting screws 103. A plug 104 is provided on the housing 14 for maintenance and liquid drainage; a first upper connecting seat O-ring 105 for sealing is provided between the housing 14 and the upper connecting seat 1801; a labyrinth sleeve 19 for sealing is provided outside the rotating shaft 1602 inside the housing 14. An elastic sealing ring 116 is provided between the labyrinth sleeve 19, the rotating shaft 1602 and the interface flange 13. An interface flange O-ring 115 is provided between the interface flange 13 and the housing 14. A V-ring 114 for sealing is provided between the labyrinth sleeve 19 and the housing 14. A labyrinth sleeve O-ring 113 for sealing is provided between the labyrinth sleeve 19 and the rotating shaft 1602. A second upper connecting seat O-ring 112 for sealing is provided between the upper connecting seat 1801 and the housing 14. A rotating bearing 15 is provided at the upper inner end of the upper connecting seat 1801, and a connecting seat bearing 111 is provided at the lower inner end of the upper connecting seat 1801. The rotating bearing 15 and the connecting seat bearing 111 are in contact connection with the rotating shaft 1602. A retaining ring 107 is provided inside the upper connecting seat 1801, and a positioning sleeve 110 for supporting the connecting seat bearing 111 is provided on the retaining ring 107.

[0025] Reference Figure 2 , a first delivery pipe 1701 is sleeved on the lower part of the first polishing liquid channel 405, and a second delivery pipe 1702 is sleeved on the lower part of the second polishing liquid channel 406. A sealing ring is provided between the outer sides of the first delivery pipe 1701 and the second delivery pipe 1702 and the upper connecting seat 1801; the liquid outlets of the first delivery pipe 1701 and the second delivery pipe 1702 pass through the hollow shaft of the upper reducer of the polishing machine and are communicated with the polishing liquid interfaces at the internal workstations of the polishing machine; a delivery pipe O-ring 106 for sealing is provided between the delivery pipe 1702 and the rotating shaft 1602.

[0026] The component parts of the rotary joint body 1 of the present invention, namely the upper end cover 11, the intermediate gasket 12, the interface flange 13, the housing 14, the connecting shaft 1601, the rotating shaft 1602, the delivery pipe 17, the upper connecting seat 1801, the lower connecting seat 1802, and the labyrinth sleeve 19, are preferably made of corrosion-resistant stainless steel material and / or plastic material. The first polishing liquid inlet 401 provided on the end cover 11 of the rotary joint body 1 can be a threaded hole or a straight through hole; an upper O-ring for sealing is provided between the intermediate gasket 12 and the interface flange 13, and the material of the upper O-ring is preferably NBR and FKM materials. An interface flange O-ring 115 for sealing is provided between the interface flange 13 and the housing 14 when they are connected, and the material of the interface flange O-ring 115 is preferably NBR and FKM materials. The second polishing liquid inlet 403 provided on the interface flange 13 can be a threaded hole or a straight through hole.

[0027] The seepage channel 404 provided on the interface flange 13 of the rotary joint body 1 can be a threaded channel or a straight-through channel. The material of the seepage joint 102 is preferably corrosion-resistant stainless steel or plastic; the plug 104 provided on the housing 14 is preferably corrosion-resistant stainless steel or plastic; the rotary bearing 15 is preferably an angular contact ball bearing; a ceramic spring seal ring 116 is provided between the rotary shaft 1602 and the labyrinth sleeve 19, and preferably the sealing body is made of ceramic wear-resistant material and the spring is made of corrosion-resistant stainless steel; the first polishing liquid channel 405 and the second polishing liquid channel 406 are preferably circular slender channels; the pipe joint materials of the first detection inlet component 2 and the second detection inlet component 3 are preferably corrosion-resistant plastic materials; the flow detection elements of the first detection inlet component 2 and the second detection inlet component 3 are preferably made of PFA materials; the control valves of the first detection inlet component 2 and the second detection inlet component 3 are preferably made of plastic materials.

[0028] The first flow detection element 204 and the second flow detection element 304 can detect the flow information of the polishing liquid when the polishing liquid passes through, and the control valves 206 and 306 can control the on-off of the polishing liquid, so as to realize more precise flow and on-off control of the input polishing liquid.

[0029] The assembly and working principle of the present invention are as follows: The upper end cover 11 is provided with a first polishing liquid inlet 401, which is used to connect to the first detection inlet component 2, that is, to connect to the first polishing liquid pipeline. A cavity 402 is formed between the upper end cover 11 and the sealing ring 117. The first polishing liquid inlet 401 is connected to the first detection inlet component 2, and the polishing liquid through this branch can enter the cavity 402. The interface flange 13 is provided with a second polishing liquid inlet 403, which is used to connect to the second detection inlet component 3, that is, to connect to the second polishing liquid pipeline. The interface flange 3 is provided with a seepage channel 404, and a seepage joint 102 is provided, which is used to guide the seepage liquid when some sealing components fail. The shell 14 is provided with a plug 104, which is also used to guide the accumulated seepage liquid. A connection seat bearing 111 is provided at the lower part of the upper support seat 1801, and a positioning sleeve 110 is provided below the connection seat bearing 111. A retaining ring 107 is provided on the upper support seat 1801 below the positioning sleeve 110, and together with a ceramic spring seal ring 116 with elastic preload, the connection seat bearing 111 can be axially fixed. The rotating shaft 1602 is axially positioned by the rotating bearing 15 inside the upper support seat 1801, and the first polishing liquid channel 405 and the second polishing liquid channel 406 are respectively independent, wherein the first polishing liquid channel 405 is used to transport the polishing liquid from the first detection inlet component 2, that is, the first polishing liquid pipeline, and the second polishing liquid channel 406 is used to transport the polishing liquid from the second detection inlet component 3, that is, the second polishing liquid pipeline, and the lower parts of the first polishing liquid channel 405 and the second polishing liquid channel 406 are respectively provided with a delivery pipe 1701 and a delivery pipe 1702. The connecting shaft 1601 and the rotating shaft 1602 are respectively provided with two corresponding long holes through the middle, which are used to pass the delivery pipes 1701 and 1702. The connecting shaft 1601 is provided with a keyway 407, which is used to connect with the hollow shaft of the upper driving reducer of the polishing machine. The lower connecting seat 1802 is provided with a threaded hole 408 and a positioning straight port 409, which is used to be installed on the fixed housing (non-rotating part) of the upper driving reducer of the polishing machine. The hollow shaft of the upper driving reducer of the polishing machine is a rotating part, which drives the connecting shaft 1601 and the rotating shaft 1602 connected thereto to rotate together, and the polishing liquid is delivered to the driving center position of the polishing machine through the two polishing liquid channels on the connecting shaft 1601 and the rotating shaft 1602 and the delivery pipes 1701 and 1702. The various parts in the first detection inlet component 2 and the second detection inlet component 3 are connected to form two polishing liquid supply passages, which are respectively connected to the first polishing liquid inlet 401 and the second polishing liquid inlet 403. The first flow detection element 204 and the second flow detection element 304 can detect the flow information of the polishing liquid when the polishing liquid passes through, and the control valves 206 and 306 can control the on and off of the polishing liquid, thereby achieving more precise flow and switch control of the input polishing liquid.The hollow shaft of the reducer of the polishing machine drives the connecting shaft 1601 to rotate, the connecting shaft 1601 drives the rotating shaft 1602 to rotate, and two polishing liquid channels opened in the rotating shaft 1602 convey the polishing liquid to the working station of the polishing machine. The liquid inlet ports of the two polishing liquid channels are respectively arranged at the top and the side, and the polishing liquid is conveyed through their respective detection inlet components respectively.

Claims

1. A polishing liquid supply rotary joint device for a double-sided polishing machine, comprising a rotary joint body (1), characterized in that A first detection inlet component (2) is connected vertically above the rotary joint body (1), and a second detection inlet component (3) is connected horizontally to the rotary joint body (1). A first polishing liquid channel (405) and a second polishing liquid channel (406) are provided on the rotating shaft (1602) of the rotary joint body (1). The liquid outlet of the first detection inlet component (2) is connected to a first polishing liquid inlet (401) of the first polishing liquid channel (405), and the liquid outlet of the second detection inlet component (3) is connected to a second polishing liquid inlet (403) of the second polishing liquid channel (406).

2. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 1, characterized in that The first detection inlet component (2) is composed of the following structure: a first pipeline joint (201) connected to the polishing liquid infusion pipeline, the first pipeline joint (201) is connected to the first flow detection element (204) through a first long straight joint (202), the first flow detection element (204) is fixed to the first connecting plate (207) by screws, the first connecting plate (207) is fixed to the upper end cover (11) of the rotary joint body (1) by screws, the first flow detection element (204) is connected to the first control valve (206) through the first short straight joint (205), the first control valve (206) is fixed to the first connecting plate (207) by screws, and the first control valve (206) is connected to the first polishing liquid inlet (401) through the first connecting joint (208).

3. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 1, characterized in that The second detection inlet component (3) is composed of the following structure: a second pipeline joint (301) connected to the polishing liquid infusion pipeline, the second pipeline joint (301) is connected to the second flow detection element (304) through a second long straight joint (302), the second flow detection element (304) is fixed to the second connecting plate (307) by screws, the second connecting plate (307) is fixed to the upper end cover (11) of the rotary joint body (1) by screws, the second flow detection element (304) is connected to the second control valve (306) through the second short straight joint (305), the second control valve (306) is fixed to the second connecting plate (307) by screws, and the second control valve (306) is connected to the second polishing liquid inlet (403) through the second connecting joint (308).

4. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 1, characterized in that The structure of the rotary joint body (1) is as follows: the lower end of the rotary shaft (1602) is connected to the connecting shaft (1601) via a positioning pin (109); an upper end cover (11) is arranged above the rotary shaft (1602); an intermediate sleeve (12) is arranged outside the rotary shaft (1602) below the upper end cover (11); the upper end cover (11) and the intermediate sleeve (12) are fixedly connected via an upper cover connecting screw (101); the rotary shaft (1602) below the intermediate sleeve (12) is fixedly connected to the intermediate sleeve (12); 2) An interface flange (13) is provided outside, the lower part of the interface flange (13) is fixedly connected to the housing (14) by screws, the lower end of the housing (14) is connected to the upper connecting seat (1801) by screws, the upper connecting seat (1801) is connected to the lower connecting seat (1802) by connecting seat connecting screws (108), and the housing (14), the upper connecting seat (1801) and the lower connecting seat (1802) are arranged outside the rotating shaft (1602) and the connecting shaft (1601).

5. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 4, characterized in that The lower end of the lower connecting seat (1802) is provided with a threaded hole (408) and a positioning straight opening (409), and is connected to the upper driving reducer of the polishing machine through the threaded hole (408) and the positioning straight opening (409). The lower end of the connecting shaft (1601) is provided with a keyway (407).

6. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 1, characterized in that The first polishing liquid channel (405) opened on the rotating shaft (1602) is a vertical "1"-shaped channel, and the first polishing liquid inlet (401) is arranged at the top; the second polishing liquid channel (406) opened on the rotating shaft (1602) is an "L"-shaped channel, and the second polishing liquid inlet (403) is arranged on the side.

7. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 1, characterized in that The upper end cover (11) is provided with a first polishing liquid inlet (401), a sealed cavity (402) is formed between the upper end cover (11) and the rotating shaft (1602), the upper end cover (11) and the middle gasket (12) are sealedly connected via an upper end cover O-ring (118), and a ceramic spring sealing ring (117) is provided between the rotating shaft (1602), the upper end cover (11) and the middle gasket (12) below the cavity (402).

8. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 4, characterized in that A seepage channel (404) is provided on one side of the interface flange (13), a seepage joint (102) is provided at the overflow liquid outlet of the seepage channel (404), and a second polishing liquid inlet (403) is provided on the other side of the interface flange (13).

9. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 4, characterized in that The shell (14) is fixedly connected to the inner side of the upper part of the upper connecting seat (1801) by means of shell connecting screws (103); a plug (104) is provided on the shell (14) for maintenance and drainage; a first upper connecting seat O-ring (105) for sealing is provided between the shell (14) and the upper connecting seat (1801); a labyrinth sleeve (19) for sealing is provided outside the rotating shaft (1602) in the shell (14); an elastic sealing ring (116) is provided between the labyrinth sleeve (19), the rotating shaft (1602) and the interface flange (13); an interface flange O-ring (115) is provided between the interface flange (13) and the shell (14); and a sealing ring (116) is provided between the labyrinth sleeve (19) and the shell (14). A V-shaped ring (114) is provided, a labyrinth sleeve O-ring (113) for sealing is provided between the labyrinth sleeve (19) and the rotating shaft (1602), a second upper connecting seat O-ring (112) for sealing is provided between the upper connecting seat (1801) and the housing (14), a rotating bearing (15) is provided at the upper end of the upper connecting seat (1801), a connecting seat bearing (111) is provided at the lower end of the upper connecting seat (1801), the rotating bearing (15) and the connecting seat bearing (111) are in contact with and connected to the rotating shaft (1602), a retaining ring (107) is provided in the upper connecting seat (1801), and a positioning sleeve (110) for supporting the connecting seat bearing (111) is provided on the retaining ring (107).

10. A polishing liquid supply rotary joint device for a double-sided polishing machine according to claim 1, characterized in that The lower part of the first polishing liquid channel (405) is provided with a first delivery pipe (1701), and the lower part of the second polishing liquid channel (406) is provided with a second delivery pipe (1702). A sealing ring is provided between the outside of the first delivery pipe (1701) and the second delivery pipe (1702) and the upper connecting seat (1801); the liquid outlets of the first delivery pipe (1701) and the second delivery pipe (1702) pass through the hollow shaft of the upper reducer of the polishing machine and are connected to the polishing liquid interface of the internal workstation of the polishing machine; and a delivery pipe O-ring (106) for sealing is provided between the delivery pipe (1702) and the rotating shaft (1602).

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