Automatic material loading device of zone melting furnace

Through the design area furnace automatic loading device, the servo motor drives the rotating of the carrier barrel and the hydraulic jaws to clamp the crystal rod, the stability problem of crystal rods with different diameters of the carrier is solved, and the efficient and accurate loading process is achieved, and the crystal quality is improved.

CN120210932APending Publication Date: 2025-06-27LIAN KE BAN DAO TI YOU XIAN GONG SI
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Patent Information

Application Number
CN202510394032.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-31
Publication Date
2025-06-27

AI Technical Summary

Technical Problem

The existing furnace material loading device is difficult to stabilize crystal rods of different diameters of the loading material, and it is easy to cause the crystal rod to fall off during long-distance material loading.

Method used

An automatic loading device for zone furnaces is designed, using a servo motor to drive the loading barrel intermittently, combining fixed components and guide devices to ensure the stability of the crystal rod during the loading process. Hydraulic jaws are used to clamp crystal rods at short distances to reduce the risk of shedding and preheat the crystal rods through heaters to reduce thermal stress.

Benefits of technology

Automatically stabilize the carrier for crystal rods of different diameters, improve working efficiency and accuracy, reduce the risk of crystal rod falling off, and improve crystal quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention belongs to the technical field of zone melting furnaces, and particularly relates to a zone melting furnace automatic material loading device which comprises a material loading base. A servo motor is fixedly connected to the top end of the loading base; the outer wall of the output end of the servo motor is fixedly connected with a plurality of loading barrels; a smelting furnace base is arranged on the side portion of the material carrying base. According to the automatic material loading device of the zone melting furnace, automatic stable material loading of crystal bars with different diameters can be achieved, the working efficiency and precision are remarkably improved, under driving of the servo motor, the multiple material loading barrels rotate intermittently, the crystal bars are kept to be perpendicularly arranged in the centers of the material loading barrels through the fixing assemblies and the guiding devices, and the material loading efficiency is improved. And when the loading barrel rotates to be close to the zone melting furnace, the hydraulic clamping jaw clamps the crystal bars from the upper portion of the loading barrel in a short distance to be fed into the zone melting furnace, the connecting rod mechanism is automatically driven through the servo motor, two-way precise control in the crystal bar loading process is achieved, and the working efficiency is improved. And the risk that the crystal bar falls off due to long-distance movement is avoided.
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Description

Technical Field

[0001] The present invention belongs to the technical field of zone melting furnaces, and specifically relates to an automatic loading device for a zone melting furnace. Background Art

[0002] An automatic loading device for a zone melting furnace is an automated auxiliary device for a crystal growth equipment using the zone melting method. It is mainly used in the purification of semiconductor materials and the single crystal growth process. Its core function is to achieve automatic loading, positioning, and movement of materials, thereby improving production efficiency, reducing manual intervention, and ensuring the stability and consistency of the process.

[0003] A patent application with the publication number CN103981567A discloses a loading device for a zone melting furnace and its automatic loading method, including a movable material tray, an upper fixed clamping material tray, a lower fixed clamping material tray, a fixed rod, a rotating clamping block, a rotating shaft, a clamping head, a camera lens, a robotic arm, an image processing system, and a polycrystalline material chuck for clamping polycrystalline materials. This application can achieve stable and reliable clamping of polycrystalline materials, and automatic loading reduces the workload of manual labor and can reduce the preparation time for crystal pulling, thereby improving production efficiency and meeting the loading requirements of large-diameter zone melting furnaces for industrialization.

[0004] When using a zone melting furnace for zone melting crystal purification, although the above-mentioned zone melting furnace loading device can clamp and convey polycrystalline materials, it is prone to falling off during long-distance loading of crystal bar materials, and traditional zone melting furnace loading devices are usually suitable for loading crystal bars of a single model and are difficult to stably load crystal bar materials of different diameters.

[0005] Therefore, the present invention provides an automatic loading device for a zone melting furnace. Summary of the Invention

[0006] In order to make up for the deficiencies of the prior art and solve at least one of the technical problems proposed in the background art.

[0007] The technical solution adopted by the present invention to solve its technical problems is as follows: An automatic loading device for a zone melting furnace according to the present invention includes a loading base; a servo motor is fixedly connected to the top end of the loading base; a plurality of loading cylinders are fixedly connected to the outer wall of the output end of the servo motor; a melting furnace base is provided on the side of the loading base; a sliding frame is slidably connected to the inner wall of the melting furnace base; two zone melting furnaces are fixedly connected to the sliding frame; a fixing component is arranged inside the loading cylinder, and the fixing component is used to adaptively fix the bar material placed inside the loading cylinder.

[0008] Preferably, the fixing component includes a fixing rod, a first elastic member, and a clamping plate; a plurality of the fixing rods are fixedly connected to the inner wall of the loading cylinder; the first elastic member is sleeved on the outer wall of the fixing rod; the clamping plate is slidably connected to the plurality of fixing rods, and one side of the plurality of clamping plates facing each other is inclined, and the first elastic member is located between the outer wall of the clamping plate and the inner wall of the loading cylinder.

[0009] Preferably, an arc-shaped groove is formed on the inclined surface of the clamping plate; a guiding ring is fixedly connected to the top end of the loading cylinder.

[0010] Preferably, a sliding rod is slidably connected to the inner wall of the bottom end of the loading cylinder; a bottom support is fixedly connected to the top end of the sliding rod, and the top end of the bottom support is trumpet-shaped; a second elastic member is sleeved on the outer wall of the sliding rod, and the second elastic member is located between the bottom end of the bottom support and the inner wall of the loading cylinder.

[0011] Preferably, a rotating rod is fixedly connected to the upper surface of the output end of the servo motor; a support frame is fixedly connected to the top end of the loading base, and the rotating rod is rotatably connected to the inner wall of the middle part of the support frame; a fixing frame is fixedly connected to the melting furnace base, and the cross-sectional shape of the fixing frame is L-shaped; a connecting plate is slidably connected to the fixing frame; a sliding block is fixedly connected to the bottom end of the connecting plate; a hydraulic cylinder is fixedly connected to the bottom end of the sliding block; an output end of the hydraulic cylinder is fixedly connected to a hydraulic clamping jaw; a transmission component is arranged on the fixing frame, and the transmission component can drive the sliding block to slide reciprocally as the rotating rod rotates.

[0012] Preferably, the transmission component includes a speed-changing gear set, a first connecting rod, and a second connecting rod; the speed-changing gear set is rotatably connected to the fixing frame, and the speed-changing gear set is connected to the top end of the rotating rod; the first connecting rod is fixedly connected to the top end of the speed-changing gear set; one end of the second connecting rod is hinged to the first connecting rod, and the other end of the second connecting rod is hinged to the connecting plate.

[0013] Preferably, a semi-circular block is fixedly connected to the bottom end of the sliding rod; a guiding plate is fixedly connected to the top end of the loading base near the melting furnace base.

[0014] Preferably, a plurality of connecting rods are fixedly connected to the bottom end of the support frame; a heater is fixedly connected to the bottom end of the connecting rods, and the heater is located directly above the servo motor; a sealing ring is fixedly connected to the output end of the servo motor, and the sealing ring is rotatably connected to the outer wall of the heater; a plurality of air guide pipes are fixedly connected to the sealing ring, and one end of the air guide pipe away from the sealing ring is fixedly connected to the inside of the loading cylinder; a plurality of exhaust holes are formed in the inside of the loading cylinder, and the plurality of exhaust holes can be communicated with the air guide pipes.

[0015] Preferably, a first cover plate is fixedly connected to the outer wall of the support frame; the first cover plate is located above the loading cylinder, and the bottom surface of the first cover plate can be attached to the top surface of the guiding ring.

[0016] Preferably, a second cover plate is fixedly connected to the outer wall of the fixing frame; the bottom surfaces of both ends of the second cover plate can be attached to and seal the top surface of the melting furnace in the sealing area.

[0017] The beneficial effects of the present invention are as follows: 1. The automatic loading device for a zone melting furnace of the present invention can achieve automatic and stable loading of ingots with different diameters, significantly improving work efficiency and accuracy. Driven by a servo motor, multiple loading cylinders rotate intermittently. By using a fixing component and a guiding device, the ingot is kept vertically centered in the loading cylinder, ensuring the stability of the ingot during the loading process and the convenience of taking the ingot. When the loading cylinder rotates close to the zone melting furnace, the hydraulic gripper grabs the ingot from above the loading cylinder at a short distance and sends it into the zone melting furnace. By automatically driving the linkage mechanism by the servo motor, two-way precise control during the ingot loading process is achieved, avoiding the risk of the ingot falling off due to long-distance movement.

[0018] 2. The automatic loading device for a zone melting furnace of the present invention provides preheating for the ingot inside the loading cylinder through a heater, reducing thermal stress and improving crystal quality. Moreover, through the connection and dislocation design, the opening and closing of heating are effectively controlled, improving the flexibility and work efficiency of the equipment. The cover plate on the fixing frame further enhances the working stability and efficiency of the device, ensuring that each working step is carried out under optimal conditions, thus meeting the requirements of high-precision crystal purification. Description of the Drawings

[0019] The present invention will be further described below with reference to the drawings.

[0020] Figure 1 is a perspective view of the present invention; Figure 2 is a structural schematic diagram of the loading cylinder in the present invention; Figure 3 is a partial structural sectional view of the loading cylinder in the present invention; Figure 4 is a structural schematic diagram of the clamping plate in the present invention; Figure 5 is a structural schematic diagram of the bottom support in the present invention; Figure 6 is a structural schematic diagram of the heater in the present invention; Figure 7 is a structural schematic diagram of the sliding block in the present invention.

[0021] In the figure: 1. Loading base; 11. Servo motor; 12. Loading cylinder; 13. Furnace base; 14. Sliding frame; 15. Zone furnace; 2. Fixed rod; 21. First elastic member; 22. Clamping plate; 3. Arc groove; 31. Guide ring; 4. Sliding rod; 41. Bottom support; 42. Second elastic member; 5. Rotating rod; 51. Support frame; 52. Fixed frame; 53. Connecting plate; 54. Sliding block; 55. Hydraulic cylinder; 56. Hydraulic claw; 6. Variable speed gear set; 61. First connecting rod; 62. Second connecting rod; 7. Semi-circular block; 71. Guide plate; 8. Connecting rod; 81. Heater; 82. Sealing ring; 83. Air duct; 84. Exhaust hole; 9. First cover plate; 91. Second cover plate. Detailed implementation manners

[0022] In order to make the technical means, creative features, achieved purposes and functions of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0023] As Figures 1 to 4 shown, an automatic loading device for a zone furnace according to an embodiment of the present invention includes a loading base 1; a servo motor 11 is fixedly connected to the top end of the loading base 1; a plurality of loading cylinders 12 are fixedly connected to the outer wall of the output end of the servo motor 11; a furnace base 13 is arranged on the side of the loading base 1; a sliding frame 14 is slidably connected to the inner wall of the furnace base 13; two zone furnaces 15 are fixedly connected to the sliding frame 14; a fixing assembly is arranged inside the loading cylinder 12, and the fixing assembly is used for adaptively fixing the rod material placed inside the loading cylinder 12; when performing zone melting crystal purification using a zone furnace, the loading base 1 is used as a support structure for the servo motor 11, and a clamping device is used to intermittently and short-distance clamp and place a plurality of ingots into a plurality of loading cylinders 12. As the output end of the servo motor 11 automatically drives the plurality of loading cylinders 12 to rotate intermittently, the fixing assembly keeps the ingots with different diameters perpendicular to the inside of the loading cylinder 12 until the loading cylinder 12 containing the ingot is stably sent to the zone furnace 15. Then, the clamping device is used again to clamp out the ingot perpendicular to the center of the loading cylinder 12 and short-distance send it into the zone furnace 15. Using the clamping device for a short distance can reduce the risk of the ingot falling off and play a role in assisting loading. Push the zone furnace 15 containing the ingot to slide on the furnace base 13 in cooperation with the sliding frame 14, place another zone furnace 15 without an ingot at the loading position, seal the loaded zone furnace 15, and wait to open and take the material after the ingot is purified in the zone furnace 15, which plays a role in stably loading a plurality of ingots with different diameters and replaces the traditional loading device that is only suitable for a single type of ingot.

[0024] The fixing component includes a fixing rod 2, a first elastic member 21, and a clamping plate 22; a plurality of the fixing rods 2 are fixedly connected to the inner wall of the loading cylinder 12; the first elastic member 21 is sleeved on the outer wall of the fixing rod 2; the clamping plate 22 is slidably connected to a plurality of the fixing rods 2, and one side of the plurality of clamping plates 22 facing each other is inclined, and the first elastic member 21 is located between the outer wall of the clamping plate 22 and the inner wall of the loading cylinder 12; when wafers of different diameters are clamped and sent into the loading cylinder 12, the wafers slide down and squeeze the inclined surfaces of the plurality of clamping plates 22, the clamping plates 22 slide on the outer walls of the plurality of fixing rods 2, the first elastic member 21 is squeezed and contracted to be stressed, and the wafers of different diameters are squeezed by the plurality of clamping plates 22 to the inner center of the loading cylinder 12 until the wafers of different diameters are sent to the feeding position near the zone furnace 15, playing a role in squeezing, straightening, and stably loading wafers of different diameters.

[0025] An arc-shaped groove 3 is formed in the inclined surface of the clamping plate 22; a guiding ring 31 is fixedly connected to the top end of the loading cylinder 12; when wafers of different diameters squeeze the clamping plate 22 and enter the loading cylinder 12, the wafers first contact the inclined surface of the guiding ring 31, and the guiding ring 31 guides the wafers into the loading cylinder 12. Subsequently, the wafers contact the inclined surface of the loading cylinder 12, and then the outer wall of the wafer fits and slides down at the arc-shaped groove 3. The arc-shaped grooves 3 of the plurality of clamping plates 22 fit the outer wall of the wafer to keep it at the center of the loading cylinder 12, playing a role in keeping the center of wafers of different diameters fixed and improving the stability of wafer loading.

[0026] As Figures 1 to 5 shown, a sliding rod 4 is slidably connected to the inner wall of the bottom end of the loading cylinder 12; a bottom support 41 is fixedly connected to the top end of the sliding rod 4, and the top end of the bottom support 41 is trumpet-shaped; a second elastic member 42 is sleeved on the outer wall of the sliding rod 4, and the second elastic member 42 is located between the bottom end of the bottom support 41 and the inner wall of the loading cylinder 12; when the wafer falls into the loading cylinder 12, the second elastic member 42 elastically squeezes the bottom support 41 to slide upward. The bottom support 41 can buffer the falling wafer, and the gravity of the wafer squeezes the second elastic member 42 to contract and be stressed, and the sliding rod 4 slides on the inner wall of the bottom end of the loading cylinder 12, playing a role in buffering the wafer feeding. At the same time, the trumpet-shaped opening of the bottom support 41 cooperates with the clamping of the plurality of clamping plates 22 to stably keep the center of wafers of different diameters, facilitating the picking of wafers of different diameters.

[0027] As Figure 1 、 Figure 2 and Figure 7As shown in the figure, a rotating rod 5 is fixedly connected to the upper surface of the output end of the servo motor 11; a support frame 51 is fixedly connected to the top end of the material loading base 1, and the rotating rod 5 is rotatably connected to the inner wall of the middle part of the support frame 51; a fixing frame 52 is fixedly connected to the furnace base 13, and the cross-sectional shape of the fixing frame 52 is L-shaped; a connecting plate 53 is slidably connected to the fixing frame 52; a sliding block 54 is fixedly connected to the bottom end of the connecting plate 53; a hydraulic cylinder 55 is fixedly connected to the bottom end of the sliding block 54; the output end of the hydraulic cylinder 55 is fixedly connected to a hydraulic gripper 56; a transmission component is arranged on the fixing frame 52, and the transmission component can drive the sliding block 54 to slide back and forth as the rotating rod 5 rotates; when short-distance feeding of the crystal rod in the loading cylinder 12 to the vicinity of the zone furnace 15 is carried out, the output end of the servo motor 11 automatically drives the rotating rod 5 to rotate intermittently on the inner wall of the fixing frame 52, the support frame 51 is fixed on the material loading base 1 to support the rotation of the rotating rod 5, the transmission component moves as the rotating rod 5 rotates, the transmission component drives the connecting plate 53 to slide back and forth, and the sliding block 54 also drives the hydraulic gripper 56 at the bottom end of the hydraulic cylinder 55 to slide back and forth accordingly. The distance that the two loading cylinders 12 rotate along with the servo motor 11 can drive the connecting plate 53 to slide back and forth once, so that after the hydraulic gripper 56 clamps the crystal rod in one loading cylinder 12 and sends it into the zone furnace 15, the output end of the servo motor 11 automatically rotates by half the distance between the two loading cylinders 12. Subsequently, the hydraulic gripper 56 slides back to its original position along with the connecting plate 53. At this time, the hydraulic gripper 56 is located directly above the second loading cylinder 12 for clamping and feeding again. The hydraulic gripper 56 can be applicable to short-distance clamping and feeding of crystal rods with different diameters, and plays a role in short-distance conveying and feeding of crystal rods.

[0028] The transmission component includes a speed-changing gear set 6, a first connecting rod 61 and a second connecting rod 62; the speed-changing gear set 6 is rotatably connected to the fixing frame 52, and the speed-changing gear set 6 is connected to the top end of the rotating rod 5; the first connecting rod 61 is fixedly connected to the top end of the speed-changing gear set 6; one end of the second connecting rod 62 is hinged to the first connecting rod 61, and the other end of the second connecting rod 62 is hinged to the connecting plate 53; when controlling the reciprocating sliding of the connecting plate 53, the output end of the servo motor 11 automatically drives the speed-changing gear set 6 on the rotating rod 5 to rotate, the speed-changing gear set 6 then drives the first connecting rod 61 to rotate, and the second connecting rod 62 pulls or pushes the connecting plate 53 following the rotation of the first connecting rod 61. Due to the presence of the speed-changing gear set 6, when the output end of the servo motor 11 drives the rotating rod 5 to rotate by the distance between the two loading cylinders 12, it can synchronously drive the connecting plate 53 to slide back and forth once, thereby driving the hydraulic gripper 56 at the bottom end of the connecting plate 53 to slide back and forth to clamp the crystal rod.

[0029] As Figures 1 to 3 , Figure 5As shown, a semi-circular block 7 is fixedly connected to the bottom end of the sliding rod 4; a guide plate 71 is fixedly connected to the top end of the material loading base 1 near the furnace base 13; when the output end of the servo motor 11 automatically drives a plurality of material loading cylinders 12 to rotate, the semi-circular block 7 at the bottom end of the sliding rod 4 slides down under the gravity of the ingot. When the semi-circular block 7 moves close to the guide plate 71, as the output end of the servo motor 11 continues to rotate, the semi-circular block 7 slides up along the slope of the guide plate 71. When it reaches the highest point of the guide plate 71, the bottom support 41 above the semi-circular block 7 can push out the top end of the ingot from the inside of the material loading cylinder 12, facilitating the feeding of the ingot inside the material loading cylinder 12.

[0030] As Figures 1 to 3 , Figure 6 , Figure 7 As shown, a plurality of connecting rods 8 are fixedly connected to the bottom end of the support frame 51; a heater 81 is fixedly connected to the bottom end of the connecting rod 8, and the heater 81 is located directly above the servo motor 11; a sealing ring 82 is fixedly connected to the output end of the servo motor 11, and the sealing ring 82 is rotatably connected to the outer wall of the heater 81; a plurality of air guide pipes 83 are fixedly connected to the sealing ring 82, and one end of the air guide pipe 83 away from the sealing ring 82 is fixedly connected to the inside of the material loading cylinder 12; a plurality of exhaust holes 84 are formed in the inside of the material loading cylinder 12, and the plurality of exhaust holes 84 can communicate with the air guide pipes 83; during the process of loading the ingot, the heater 81 is fixed above the output end of the servo motor 11 by using a plurality of connecting rods 8. The output end of the servo motor 11 drives the sealing ring 82 and a plurality of air guide pipes 83 to rotate synchronously. The heater 81 automatically operates to generate hot air, which is sent to the plurality of exhaust holes 84 inside the material loading cylinder 12 through the air guide pipes 83 and blown out, so as to preheat the ingot inside the material loading cylinder 12. The preheating of the ingot can reduce thermal stress, improve the stability of the process, and improve the quality of the crystal. At the same time, when the material loading cylinder 12 containing the ingot rotates close to the zone furnace 15, the air guide pipe 83 on this material loading cylinder 12 is misaligned and blocked with the outer wall of the heater 81, and the hot air no longer enters this air guide pipe 83. When the ingot is taken out of the material loading cylinder 12 and continues to rotate to receive the next ingot, the air guide pipe 83 on the material loading cylinder 12 is communicated with the outer wall of the heater 81, and the hot air enters this air guide pipe 83 again, playing a role in controlling the misaligned opening and closing of the connection part of the air guide pipe 83.

[0031] As Figures 1 to 3As shown, a first cover plate 9 is fixedly connected to the outer wall of the support frame 51; the first cover plate 9 is located above the material loading cylinder 12, and the bottom surface of the first cover plate 9 can fit the top surface of the guide ring 31; when preheating the ingot inside the material loading cylinder 12, first place the ingot into the material loading cylinder 12 for transportation, and then the material loading cylinder 12 with the ingot arrives at the bottom of the first cover plate 9 and continues to be transported. The bottom surface of the first cover plate 9 fits the top surface of the guide ring 31, which can block the inside of the material loading cylinder 12, reduce the heat loss inside the material loading cylinder 12, and improve the preheating effect of the ingot.

[0032] As Figure 1 and Figure 7 shown, a second cover plate 91 is fixedly connected to the outer wall of the fixing frame 52; both bottom ends of the second cover plate 91 can fit the top surface of the sealing area melting furnace 15; when the ingot is fed into the melting furnace 15 inside for purification, the hydraulic gripper 56 grabs the ingot and feeds it into the melting furnace 15. A power source can be added to automatically push the sliding frame 14 to slide, place the melting furnace 15 without an ingot below the hydraulic gripper 56, and the melting furnace 15 where the ingot starts to be purified slides to the lower part of one end of the second cover plate 91. The second cover plate 91 can fit and seal the top surface of the melting furnace 15, which is convenient for purifying the ingot. After the ingot purification is completed, push the sliding frame 14 in the reverse direction, push the melting furnace 15 that has been purified to half of the position below the hydraulic gripper 56, take out the purified ingot, continue to push the sliding frame 14, and send the melting furnace 15 from which the ingot has been taken out to directly below the hydraulic gripper 56 to wait for feeding, playing a role in controlling and sealing the top end of the melting furnace 15.

[0033] Working process: When using a zone melting furnace to purify crystals by zone melting, the carrier base 1 is used as the support structure of the servo motor 11, and a plurality of crystal rods are intermittently clamped into the interior of a plurality of carrier barrels 12 by a clamping device at a short distance. As the output end of the servo motor 11 automatically drives the plurality of carrier barrels 12 to rotate intermittently, the fixing assembly keeps the crystal rods of different diameters vertically inside the carrier barrels 12 until the carrier barrels 12 containing the crystal rods are stably delivered to the zone melting furnace 15, and the clamping device is used again to clamp the vertically The crystal ingot is clamped out from the center of the loading tube 12 and sent to the zone melting furnace 15 over a short distance. The use of the clamping claw device over a short distance can reduce the risk of the crystal ingot falling off and play a role in assisting the loading. The zone melting furnace 15 loaded with the crystal ingot is pushed to slide on the melting furnace base 13 in cooperation with the sliding frame 14, and another zone melting furnace 15 without the crystal ingot is placed at the loading position. The zone melting furnace 15 after loading is blocked, and the crystal ingot is opened to take out the material after being purified in the zone melting furnace 15, which plays a role in stabilizing the loading of multiple crystal ingots of different diameters, replacing The conventional crystal rod loading device is only suitable for a single type of model; when crystal rods of different diameters are clamped and sent to the inside of the loading barrel 12, the crystal rods slide down and squeeze the inclined surfaces of multiple clamping plates 22, and the clamping plates 22 slide on the outer walls of multiple fixed rods 2, and the first elastic member 21 is squeezed and contracted. Crystal rods of different diameters are squeezed by multiple clamping plates 22 at the inner center of the loading barrel 12 until the crystal rods of different diameters are sent to the place close to the zone melting furnace 15 for loading, which plays the role of squeezing, straightening and stabilizing the loading of crystal rods of different diameters. When the crystal rods with different diameters are squeezed by the clamping plates 22 to enter the interior of the loading tube 12, the crystal rod first contacts the inclined surface of the guide ring 31, and the guide ring 31 guides the crystal rod to enter the interior of the loading tube 12. The crystal rod then contacts the inclined surface of the loading tube 12, and then the outer wall of the crystal rod fits in the arc groove 3 and slides down. The arc grooves 3 of multiple clamping plates 22 fit in the outer wall of the crystal rod to hold it in the center of the loading tube 12, which plays a role in keeping the center of crystal rods with different diameters fixed, thereby improving the stability of the crystal rod loading; When the crystal ingot falls into the interior of the loading tube 12, the elastic force of the second elastic member 42 squeezes the bottom support 41 to slide upward, and the bottom support 41 can buffer the falling crystal ingot. The gravity of the crystal ingot squeezes the second elastic member 42 to contract, and the sliding rod 4 slides on the inner wall of the bottom end of the loading tube 12, playing a role in buffering the feeding of the crystal ingot. At the same time, the flared mouth of the bottom support 41 cooperates with the clamping of multiple clamping plates 22 to stably maintain the center of crystal ingots of different diameters, which is convenient for picking up crystal ingots of different diameters. When the crystal bar is fed in a short distance to the zone furnace 15 by the loading cylinder 12, the output end of the servo motor 11 automatically drives the rotating rod 5 to rotate intermittently on the inner wall of the fixed frame 52. The support frame 51 is fixed on the loading base 1 to support the rotation of the rotating rod 5. During the rotation of the rotating rod 5, the transmission component is driven to move. The transmission component drives the connecting plate 53 to slide reciprocally. The sliding block 54 also drives the hydraulic claw 56 at the bottom end of the hydraulic cylinder 55 to slide reciprocally. The distance that the two loading cylinders 12 rotate with the servo motor 11 can drive the connecting plate 53 to slide back and forth once. After the hydraulic claw 56 clamps the crystal bar in one loading cylinder 12 and sends it into the zone furnace 15, the output end of the servo motor 11 automatically rotates half of the distance between the two loading cylinders 12. Subsequently, the hydraulic claw 56 slides back to its original position with the connecting plate 53. At this time, the hydraulic claw 56 is directly above the second loading cylinder 12 for clamping and feeding again. The hydraulic claw 56 can be applied to clamp and feed crystal bars with different diameters in a short distance, playing a role in short-distance conveying and feeding of crystal bars. When controlling the reciprocating sliding of the connecting plate 53, the output end of the servo motor 11 automatically drives the speed-changing gear set 6 on the rotating rod 5 to rotate. The speed-changing gear set 6 drives the first connecting rod 61 to rotate accordingly. The second connecting rod 62 pulls or pushes the connecting plate 53 following the rotation of the first connecting rod 61. Due to the existence of the speed-changing gear set 6, when the output end of the servo motor 11 drives the rotating rod 5 to rotate the distance between the two loading cylinders 12, it can synchronously drive the connecting plate 53 to slide reciprocally once, thereby driving the hydraulic claw 56 at the bottom end of the connecting plate 53 to slide reciprocally to clamp the crystal bar. When the output end of the servo motor 11 automatically drives multiple loading cylinders 12 to rotate, the semi-circular block 7 at the bottom end of the sliding rod 4 slides down under the gravity of the crystal bar. When the semi-circular block 7 moves closer to the guide plate 71, as the output end of the servo motor 11 continues to rotate, the semi-circular block 7 slides up along the slope of the guide plate 71. When it reaches the highest point of the guide plate 71, the bottom support 41 above the semi-circular block 7 can push out the top end of the crystal bar from the inside of the loading cylinder 12, facilitating the feeding of the crystal bar inside the loading cylinder 12. When loading the crystal bar, a plurality of connecting rods 8 are used to fix the heater 81 above the output end of the servo motor 11. The output end of the servo motor 11 drives the plugging ring 82 and a plurality of air guide pipes 83 to rotate synchronously. The heater 81 automatically operates to generate hot air, which is sent through the air guide pipes 83 to blow out from a plurality of exhaust holes 84 inside the loading cylinder 12, so as to preheat the crystal bar inside the loading cylinder 12. Preheating the crystal bar can reduce thermal stress, improve the stability of the process, and improve the quality of the crystal. At the same time, when the loading cylinder 12 containing the crystal bar rotates close to the zone melting furnace 15, the air guide pipe 83 on this loading cylinder 12 is misaligned and plugged with the outer wall of the heater 81, and the hot air no longer enters this air guide pipe 83. When the crystal bar is taken out of the loading cylinder 12 and the loading cylinder 12 continues to rotate to receive the next crystal bar, the air guide pipe 83 on the loading cylinder 12 is communicated with the outer wall of the heater 81, and the hot air enters this air guide pipe 83 again, playing a role in controlling the misaligned opening and closing of the connection part of the air guide pipe 83; When preheating the crystal bar inside the loading cylinder 12, first place the crystal bar inside the loading cylinder 12 for transportation. Subsequently, the loading cylinder 12 with the crystal bar arrives at the bottom of the first cover plate 9 and continues to be transported. The bottom surface of the first cover plate 9 fits the top surface of the guide ring 31, which can block the inside of the loading cylinder 12, reduce the heat loss inside the loading cylinder 12, and improve the preheating effect of the crystal bar; When the crystal bar is sent into the zone melting furnace 15 for purification, the hydraulic gripper 56 grabs the crystal bar and sends it into the zone melting furnace 15. A power source can be added to automatically push the sliding frame 14 to slide, place the zone melting furnace 15 without a crystal bar below the hydraulic gripper 56, and the zone melting furnace 15 where the crystal bar starts to be purified slides to the lower end of the second cover plate 91. The second cover plate 91 can fit and block the top surface of the zone melting furnace 15, which is convenient for purifying the crystal bar. After the purification of the crystal bar is completed, push the sliding frame 14 in the reverse direction, push the zone melting furnace 15 that has been purified to half of the position below the hydraulic gripper 56, take out the purified crystal bar, continue to push the sliding frame 14, and send the zone melting furnace 15 from which the crystal bar has been taken out to directly below the hydraulic gripper 56 to wait for feeding, playing a role in controlling the blocking of the top of the zone melting furnace 15.

[0034] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic loading device for a zone melting furnace, characterized in that: It includes a loading base; a servo motor is fixedly connected to the top of the loading base; a plurality of loading barrels are fixedly connected to the outer wall of the output end of the servo motor; a furnace base is arranged on the side of the loading base; a sliding frame is slidably connected to the inner wall of the furnace base; two zone furnaces are fixedly connected to the sliding frame; a fixing component is arranged inside the loading barrel, and the fixing component is used to adapt and fix the rod material placed inside the loading barrel.

2. The automatic loading device for a zone melting furnace according to claim 1, characterized in that: The fixing assembly includes a fixing rod, an elastic member No. 1 and a clamping plate; a plurality of the fixing rods are fixedly connected to the inner wall of the loading barrel; the elastic member No. 1 is sleeved on the outer wall of the fixing rod; the clamping plate is slidably connected to the plurality of fixing rods, the opposite sides of the plurality of clamping plates are inclined, and the elastic member No. 1 is located between the outer wall of the clamping plate and the inner wall of the loading barrel.

3. The automatic loading device for a zone melting furnace according to claim 2, characterized in that: The inclined surface of the clamping plate is provided with an arc groove; the top end of the loading tube is fixedly connected with a guide ring.

4. The automatic loading device for a zone melting furnace according to claim 1, characterized in that: The inner wall of the bottom end of the material loading barrel is slidably connected with a sliding rod; the top of the sliding rod is fixedly connected with a base, and the top of the base is trumpet-shaped; the outer wall of the sliding rod is sleeved with a No. 2 elastic member, and the No. 2 elastic member is located between the bottom end of the base and the inner wall of the material loading barrel.

5. The automatic loading device for a zone melting furnace according to claim 3, characterized in that: A rotating rod is fixedly connected to the upper surface of the output end of the servo motor; a supporting frame is fixedly connected to the top of the loading base, and the rotating rod is rotatably connected to the middle inner wall of the supporting frame; a fixed frame is fixedly connected to the furnace base, and the cross-sectional shape of the fixed frame is L-shaped; a connecting plate is slidably connected to the fixed frame; a sliding block is fixedly connected to the bottom end of the connecting plate; a hydraulic cylinder is fixedly connected to the bottom end of the sliding block; a hydraulic clamp is fixedly connected to the output end of the hydraulic cylinder; a transmission assembly is arranged on the fixed frame, and the transmission assembly can drive the sliding block to slide back and forth as the rotating rod rotates.

6. The automatic loading device for a zone melting furnace according to claim 5, characterized in that: The transmission assembly includes a speed gear set, a No. 1 connecting rod and a No. 2 connecting rod; the speed gear set is rotatably connected to the fixed frame, and the speed gear set is connected to the top of the rotating rod; the No. 1 connecting rod is fixed to the top of the speed gear set; one end of the No. 2 connecting rod is hinged on the No. 1 connecting rod, and the other end of the No. 2 connecting rod is hinged on the connecting plate.

7. The automatic loading device for a zone melting furnace according to claim 4, characterized in that: A semicircular block is fixedly connected to the bottom end of the sliding rod; a guide plate is fixedly connected to the top end of the loading base near the furnace base.

8. The automatic loading device for a zone melting furnace according to claim 5, characterized in that: A plurality of connecting rods are fixedly connected to the bottom end of the support frame; a heater is fixedly connected to the bottom end of the connecting rod, and the heater is located directly above the servo motor; a sealing ring is fixedly connected to the output end of the servo motor, and the sealing ring is rotatably connected to the outer wall of the heater; a plurality of air guide tubes are fixedly connected to the sealing ring, and one end of the air guide tubes away from the sealing ring is fixedly connected to the inside of the loading barrel; a plurality of exhaust holes are opened inside the loading barrel, and the plurality of exhaust holes can be communicated with the air guide tubes.

9. The automatic loading device for a zone melting furnace according to claim 5, characterized in that: A No. 1 cover plate is fixedly connected to the outer wall of the support frame; the No. 1 cover plate is located above the material loading barrel, and the bottom surface of the No. 1 cover plate can fit the top surface of the guide ring.

10. The automatic loading device for a zone melting furnace according to claim 5, characterized in that: The outer wall of the fixing frame is fixedly connected with a No. 2 cover plate; the bottom surfaces at both ends of the No. 2 cover plate can fit the top surface of the melting furnace in the blocking area.

Citation Information

Patent Citations

  • Material loading device for zone melting furnace and automatic material loading method thereof

    CN103981567A