Superconducting magnetic control single crystal furnace

Abstract

The application relates to the technical field of crystal growth, in particular to a superconducting magnetic control single crystal furnace, wherein a superconducting magnet is arranged at the outer periphery of a single crystal furnace body; a lifting assembly is arranged on a base and used for lifting the superconducting magnet; a stabilizing assembly is arranged on the base and used for supporting the superconducting magnet and connected with the lifting assembly; a coil adjusting assembly is installed on the base and has an output end extending into the inside of the superconducting magnet and used for driving the displacement of a superconducting coil; three superconducting coil groups are arranged in a superconducting coil setting shell, and the spacing between the three superconducting coil groups is adjustable; a magnetic field can be formed by applying direct current excitation to the three superconducting coil groups, so that on one hand, the magnetic field distribution form can be adaptively adjusted according to the crystal pulling quality requirement of the superconducting magnetic control single crystal furnace, and the magnetic field strength at the center of the superconducting magnet can be improved; on the other hand, the uniformity and quality of the single crystal silicon rod can be effectively improved; and through the cooperation of the lifting assembly and the stabilizing assembly, the stability and safety of the magnetic control single crystal furnace can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of crystal growth, in particular to a superconducting magnetic control single crystal furnace. BACKGROUND

[0002] Monocrystalline silicon is a high-purity silicon crystal, whose atoms are arranged in a regular lattice, having a single crystal structure. This material has important applications in the electronics industry due to its unique electrical and physical properties. The production of monocrystalline silicon often relies on a single crystal furnace, and a superconducting magnet is needed to form a magnetic field around the periphery of the single crystal furnace for growing a single crystal silicon. However, the superconducting coils in the prior art cannot be adjusted, and the magnetic field distribution is single, which cannot be adjusted according to different crystal pulling quality requirements, and the versatility is poor. SUMMARY

[0003] The present application provides a superconducting magnetic control single crystal furnace to solve the problem of how to provide a superconducting magnetic control single crystal furnace with variable magnetic field distribution.

[0004] The present application provides a superconducting magnetic control single crystal furnace, comprising:

[0005] A superconducting magnet is arranged around the periphery of the single crystal furnace body;

[0006] A lifting assembly is arranged on the base for lifting the superconducting magnet;

[0007] A stabilizing assembly is arranged on the base for supporting the superconducting magnet, and one side of the lifting assembly is arranged on the stabilizing assembly;

[0008] A coil adjusting assembly is mounted on the base, and the output end extends into the interior of the superconducting magnet for driving the displacement of the superconducting coil inside the superconducting magnet.

[0009] In some embodiments, the superconducting magnet comprises:

[0010] A superconducting coil housing is a hollow cylindrical ring;

[0011] A superconducting coil is arranged in the superconducting coil housing;

[0012] The superconducting coil comprises:

[0013] A first coil is horizontally sleeved in the upper part of the superconducting coil housing;

[0014] A second coil group is arranged in the middle part of the superconducting coil housing;

[0015] A third coil is horizontally sleeved in the lower part of the superconducting coil housing.

[0016] In some embodiments, the second coil set includes at least two second coils, which are evenly installed in the middle part of the superconducting coil installation shell.

[0017] In some embodiments, the interior of the superconducting coil installation shell is provided with a U-shaped framework; the U-shaped framework includes:

[0018] a first U-shaped framework; a screw thread is connected to the upper part of the superconducting coil installation shell, and the first coil is sleeved on the first U-shaped framework;

[0019] a second U-shaped framework; sleeved in the middle part of the superconducting coil installation shell, and the second coil set is arranged on the second U-shaped framework;

[0020] a third U-shaped framework; a screw thread is connected to the lower part of the superconducting coil installation shell, and the third coil is sleeved on the third U-shaped framework.

[0021] In some embodiments, the screw thread direction of the superconducting coil installation shell connected with the first U-shaped framework and the third U-shaped framework is opposite.

[0022] In some embodiments, the coil adjusting assembly includes:

[0023] a first oil cylinder; installed on the base;

[0024] a second oil cylinder; the output end of the first oil cylinder is connected to one side of the second oil cylinder, and the second oil cylinder is slidingly connected to the base;

[0025] a drive motor; the output end of the second oil cylinder is connected to one end of the drive motor;

[0026] a rotating shaft; the output end of the drive motor is connected to one end of the rotating shaft, and the other end of the rotating shaft extends into the interior of the superconducting coil installation shell;

[0027] wherein, the rotating shaft is provided with a first gear part and a second gear part, and the first U-shaped framework and the third U-shaped framework are provided with matching gears on one side close to the rotating shaft, the first gear part is engaged with the first U-shaped framework, and the second gear part is engaged with the third U-shaped framework.

[0028] In some embodiments, the lifting assembly includes:

[0029] a lead screw; a plurality of lead screws are provided and evenly distributed on the outer periphery of the superconducting magnet, and one end of the lead screw is threadedly connected to the stabilizing assembly;

[0030] a drive assembly; the output end is connected to the other end of the lead screw.

[0031] In some embodiments, the driving assembly comprises:

[0032] Lifters are provided in plurality and are arranged on the base, and the output ends are connected to the other ends of the lead screws one by one;

[0033] A reduction motor is provided in one and is arranged on the base between two adjacent lifters;

[0034] Couplings are provided in plurality, and the lifters are connected to the adjacent next lifters through transmission shafts and the couplings, and the two ends of the reduction motor are connected to the adjacent two lifters through transmission shafts and the couplings.

[0035] In some embodiments, the stabilizing assembly comprises:

[0036] Fixing plates are provided in plurality and are uniformly distributed on the base around the superconducting magnet, and a fixing groove is arranged on the side close to the superconducting magnet, and the lead screw is located inside the fixing groove;

[0037] Connecting rods are arranged between two adjacent fixing plates;

[0038] Supporting seats are provided in plurality, and the top is connected to the bottom of the superconducting magnet, and the bottom is connected to the lead screw thread by thread.

[0039] In some embodiments, the supporting seat comprises:

[0040] L-shaped columns are arranged on the top of the superconducting magnet;

[0041] Supporting plates are arranged on the upper surface of the supporting plates, and the lead screw is connected to the supporting plate by thread;

[0042] Rib plates are arranged on one side of the L-shaped column and on the upper surface of the supporting plate.

[0043] The beneficial effects of the present application are as follows: the superconducting magnetic control single crystal furnace of the present application drives the rotation of the transmission shaft through the reduction motor, and then drives the synchronous rotation of the circumferentially distributed lead screws, so that the stable lifting of the superconducting magnet can be realized, and no deviation will be generated; through the cooperation of the fixing plate, the connecting rod and the support seat, a stable fixing ring can be formed, so that the lower part of the superconducting magnetic control single crystal furnace of the present application is enclosed to prevent safety accidents; through the rotation of the rotating shaft driven by the second oil cylinder, the synchronous rotation of the first U-shaped framework and the third U-shaped framework can be realized, so that the first coil and the third coil can be simultaneously away from / close to the second coil group, and then the magnetic field distribution can be changed. In addition, under the premise that the thread direction of the superconducting coil housing connected with the first U-shaped framework and the third U-shaped framework is opposite, if it is required to adjust the position of the first coil alone, the first gear part is engaged with the first U-shaped framework, the third U-shaped framework is disengaged from the second gear part, and then the first U-shaped framework is driven to rotate by starting the driving motor; if it is required to adjust the position of the third coil alone, the first gear part is disengaged from the first U-shaped framework, the third U-shaped framework is engaged with the second gear part, and then the third U-shaped framework is driven to rotate by starting the driving motor; if it is required to adjust the positions of the first coil and the third coil simultaneously, the first gear part is engaged with the first U-shaped framework, the third U-shaped framework is engaged with the second gear part, and then the relative motion and opposite motion of the first coil and the third coil can be realized through the forward and reverse rotation of the driving motor; when the first coil / third coil does not need to be adjusted, the first gear part and the second gear part are disengaged from the first U-shaped framework and the third U-shaped framework by starting the first oil cylinder to push the second oil cylinder to move. The superconducting magnetic control single crystal furnace provided by the present application not only can make the whole superconducting magnet lift, and the lifting process is stable and will not deviate, and the safety is high, but also can adjust the first coil and the third coil in the superconducting magnet, and form various magnetic field distributions to meet the requirements of different single crystal furnace crystal pulling quality and efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0044] Figure 1 is a structure schematic diagram of some specific embodiments of the superconducting magnetic control single crystal furnace of the present application;

[0045] Figure 2 is Figure 1 a structure schematic diagram of some specific embodiments of the superconducting magnetic control single crystal furnace of the present application;

[0046] Figure 3 is Figure 1 a structure schematic diagram of some specific embodiments of the lifting assembly in the superconducting magnetic control single crystal furnace of the present application;

[0047] Figure 4 is Figure 1 a structure schematic diagram of some specific embodiments of the stabilizing assembly in the superconducting magnetic control single crystal furnace of the present application;

[0048] Figure 5is Figure 1 FIG. 1 is a structural schematic diagram of some specific embodiments of a coil adjusting assembly in a superconducting magnetic control single crystal furnace.

[0049] In the drawings, 100, superconducting magnet; 110, first coil; 120, second coil group; 121, second coil; 130, third coil; 140, U-shaped framework; 141, first U-shaped framework; 142, second U-shaped framework; 143, third U-shaped framework; 200, lifting assembly; 210, lead screw; 220, drive assembly; 221, elevator; 222, speed reducer motor; 223, coupling; 300, stabilizing assembly; 310, fixed plate; 311, sliding plate; 320, connecting rod; 330, support seat; 331, L-shaped column; 332, support plate; 333, rib plate; 340, directional sliding block; 400, coil adjusting assembly; 410, first oil cylinder; 420, second oil cylinder; 430, drive motor; 440, rotating shaft; 450, first gear part; 460, second gear part. DETAILED DESCRIPTION

[0050] The technical solutions of the present application will be described clearly and completely below in conjunction with embodiments. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0051] At present, the production of single crystal silicon often relies on a single crystal furnace, and a superconducting magnet is needed around the single crystal furnace to form a magnetic field for growing single crystal silicon. The superconducting coil for forming a magnetic field in the prior art cannot be adjusted, the magnetic field distribution form is single, and it cannot be adjusted according to different crystal pulling quality requirements, is not conducive to the production of multiple working conditions, and has poor versatility. Therefore, providing a superconducting magnetic control single crystal furnace with a changeable magnetic field distribution form has become one of the technical problems to be solved by those skilled in the art.

[0052] To solve the above problems, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5The application provides a superconducting magnetic control single crystal furnace, which comprises a superconducting magnet 100, a lifting assembly 200, a stabilizing assembly 300 and a coil adjusting assembly 400. The superconducting magnet 100 is arranged on the outer periphery of a single crystal furnace body; the lifting assembly 200 is arranged on a base and used for lifting the superconducting magnet 100; the stabilizing assembly 300 is arranged on the base and used for supporting the superconducting magnet 100, and one side of the lifting assembly 200 is arranged on the stabilizing assembly 300; and the coil adjusting assembly 400 is mounted on the base and has an output end extending into the inside of the superconducting magnet 100 and used for driving the displacement of a superconducting coil in the inside of the superconducting magnet 100.

[0053] Preferably, the superconducting magnet 100 comprises a superconducting coil accommodating shell and a superconducting coil. The superconducting coil accommodating shell is a hollow circular column body and is used for accommodating the superconducting coil and providing a low-temperature environment for the superconducting coil; the superconducting coil comprises a first coil 110, a second coil group 120 and a third coil 130, and each of the first coil 110, the second coil group 120 and the third coil 130 is a high-temperature superconducting tape and is used for providing a magnetic field for the single crystal furnace body. The first coil 110 is horizontally sleeved on the upper part in the superconducting coil accommodating shell, the second coil group 120 is arranged on the middle part in the superconducting coil accommodating shell, and the third coil 130 is horizontally sleeved on the lower part in the superconducting coil accommodating shell.

[0054] Preferably, the superconducting magnet 100 further comprises a vacuum cavity and a refrigerator. The vacuum cavity is a hollow circular column body and is used for accommodating the superconducting coil accommodating shell and providing a vacuum environment for the superconducting coil accommodating shell; and the refrigerator is mounted on the top surface of the vacuum cavity, and a primary cold head and a secondary cold head of the refrigerator are respectively connected to the superconducting coil accommodating shell and the superconducting coil for heat conduction.

[0055] Preferably, the superconducting magnet 100 further comprises a magnetic shielding body, which accommodates the vacuum cavity, the superconducting coil accommodating shell and the superconducting coil and is used for isolating the magnetic field generated by the superconducting coil after electrification from leakage, so as to protect the safety of external personnel and equipment.

[0056] Specifically, the distance between the horizontal plane where the first coil 110 at the initial position is located and the horizontal plane where the center of the second coil group 120 is located is the same as the distance between the horizontal plane where the third coil 130 at the initial position is located and the horizontal plane where the center of the second coil group 120 is located. In actual application, according to the quality requirement of crystal pulling of the superconducting magnetic control single crystal furnace, the first coil 110 and the third coil 130 can be adjusted to appropriate positions by cooperation of the first coil 110, the third coil 130 and the coil adjusting assembly 400, so as to change the magnetic field distribution form. Meanwhile, the uniformity and quality of the single crystal silicon rod can be effectively improved on the basis of improving the magnetic field strength, and the production efficiency is improved. Compared with the superconducting magnet in the prior art, the magnetic field distribution form of which is single and cannot be changed, the technical scheme disclosed by the application has stronger universality.

[0057] Preferably, the second coil group 120 includes at least two second coils 121, which are evenly arranged in the middle part of the superconducting coil housing in the circumferential direction.

[0058] Specifically, the first coil 110 and the third coil 130 are arranged in the form of a circular ring matching the circumferential direction of the superconducting coil housing, and the second coil 121 is arranged in the form of a circular ring or a rectangle matching the arc direction of the superconducting coil housing. If the second coil 121 is arranged in the form of a circular ring, the diameter of the circular ring is smaller than the width of the second U-shaped frame 142. If the second coil 121 is arranged in the form of a rectangle, the vertical height of the rectangle is smaller than the width of the second U-shaped frame 142. The number of the second coils 121 is preferably four, which are evenly distributed on the second U-shaped frame 142. The angle between the center line of the second U-shaped frame 142 and the line connecting the centers of two adjacent second coils 121 is 90 degrees. The arrangement of the first coil 110, the second coil 121 and the third coil 130 can well adjust the distribution and uniformity of the magnetic field, suppress the thermal convection of the silicon solution in the single crystal furnace, and improve the uniformity and quality of the single crystal silicon rod.

[0059] Further, the centers of the plurality of second coils 121 are located on the same horizontal plane and are parallel to the planes on which the first coil 110 and the third coil 130 are arranged.

[0060] Preferably, the inside of the superconducting coil housing is provided with a U-shaped frame 140. The U-shaped frame 140 includes a first U-shaped frame 141, a second U-shaped frame 142 and a third U-shaped frame 143. The first U-shaped frame 141 is threadedly connected to the upper part of the superconducting coil housing, and the first coil 110 is sleeved on the first U-shaped frame 141. The second U-shaped frame 142 is sleeved on the middle part of the superconducting coil housing, and the second coil group 120 is arranged on the second U-shaped frame 142. The third U-shaped frame 143 is threadedly connected to the lower part of the superconducting coil housing, and the third coil 130 is sleeved on the third U-shaped frame 143.

[0061] Specifically, the width of the inside of the first U-shaped frame 141 is slightly larger than the cross-sectional diameter of the first coil 110, the width of the second U-shaped frame 142 is slightly larger than the diameter or height of the second coil 121, and the width of the third U-shaped frame 143 is slightly larger than the cross-sectional diameter of the third coil 130. The two short sides of the first U-shaped frame 141 and the third U-shaped frame 143 are provided with herringbone teeth, and the bottom plate is provided with threads. The thread directions of the first U-shaped frame 141 and the third U-shaped frame 143 are opposite, so that the first U-shaped frame 141 and the third U-shaped frame 143 move in the same direction or move away from each other, thereby achieving the technical effect of changing the distribution of the magnetic field.

[0062] Further, the same size and opposite direction direct current is applied in the first coil 110 and the third coil 130, and the same size and opposite direction direct current is applied in the opposite two second coils 121, so that the magnetic field which is symmetrical up and down and has zero magnetic surface is formed in the center plane of the superconducting coil installation shell.

[0063] Further, the current size in the first coil 110 and the third coil 130 can be different, so that the magnetic field distribution form and the magnetic field strength can be changed. The current size in the second coil 121 can be the same as or different from the current size in the first coil 110 and the third coil 130, that is, in addition to adjusting the position of the first coil 110 and the third coil 130 to change the magnetic field distribution form, the present application can also adjust the magnetic field distribution form and the magnetic field strength by applying the current in different directions and sizes in the first coil 110, the second coil 121 and the third coil 130, which can be set according to the needs of the single crystal silicon growth in the superconducting magnetic control single crystal furnace. Whether it is changed by changing the coil position alone, or the current size or direction alone is adjusted, or the coil position is changed and the size and direction of each coil are adjusted at the same time, the universality of the technical scheme of the present application is stronger.

[0064] Preferably, the thread direction of the superconducting coil installation shell connected with the first U-shaped framework 141 and the third U-shaped framework 143 is opposite.

[0065] Specifically, the first U-shaped framework 141 and the third U-shaped framework 143 rotate in the same direction, and the movement directions are opposite.

[0066] Preferably, the lifting assembly 200 comprises a lead screw 210 and a driving assembly 220. The lead screw 210 is provided with a plurality of lead screws which are uniformly distributed on the outer periphery of the superconducting magnet 100. One end of the lead screw 210 is threadedly connected with the stabilizing assembly 300, and the output end of the driving assembly 220 is connected with the other end of the lead screw 210.

[0067] Specifically, the top of the lead screw 210 is horizontally provided with a rectangular limiting plate which is locked when the lifting assembly 200 rises to the limit position, so as to prevent slipping. In the technical scheme of the present application, the number of the lead screw 210 can be two, three, four or five, preferably four. When the number of the lead screw 210 is two, the two lead screws 210 should be distributed along the radial direction of the superconducting coil installation shell. When the number of the lead screw 210 is three, the three lead screws 210 should be uniformly distributed in the circumferential direction with the axis of the center of the superconducting coil installation shell as the center. When the number of the lead screw 210 is four or five, the distribution form is the same as that of the three lead screws 210, so that the superconducting magnet in the present application is uniformly stressed during lifting.

[0068] Preferably, the driving assembly 220 comprises a plurality of lifting machines 221, one reduction motor 222 and a plurality of couplings 223. The plurality of lifting machines 221 are arranged on the base and connected to the other ends of the plurality of lead screws 210 one by one. The reduction motor 222 is arranged on the base between two adjacent lifting machines 221. The plurality of couplings 223 are arranged between the plurality of lifting machines 221 and the next adjacent lifting machine 221 via a transmission shaft. The two ends of the reduction motor 222 are connected to the two adjacent lifting machines 221 via a transmission shaft and a coupling 223.

[0069] Preferably, the stabilizing assembly 300 comprises a plurality of fixing plates 310, a plurality of connecting rods 320 and a plurality of support seats 330. The plurality of fixing plates 310 are arranged on the base around the superconducting magnet 100 and connected to each other via the plurality of connecting rods 320. The plurality of support seats 330 are arranged on the base and connected to the bottom of the superconducting magnet 100 via the plurality of lead screws 210.

[0070] Specifically, the number of the plurality of fixing plates 310 is the same as the number of the plurality of support seats 330 and the plurality of lead screws 210, which can be two, three, four or five. When the number of the plurality of fixing plates 310 and the plurality of support seats 330 is two, the plurality of fixing plates 310 are distributed along the radial direction of the superconducting coil housing. When the number of the plurality of fixing plates 310 and the plurality of support seats 330 is three, four or five, the plurality of fixing plates 310 are distributed around the center of the superconducting coil housing.

[0071] Further, the reduction motor 222 is a variable frequency reduction motor, and the lead screw 210 is a T-shaped lead screw. When the superconducting magnet 100 is lifted to the upper end of the lead screw 210, the fixing ring formed by the plurality of fixing plates 310 and the plurality of connecting rods 320 can fix the plurality of fixing plates 310, so that the upper end of the lead screw 210 can be restrained by the plurality of fixing plates 310 when the upper end of the lead screw 210 is subjected to a force, thereby further preventing the plurality of fixing plates 310 or the lead screw 210 from shaking, so that the superconducting magnet 100 is more stable during lifting or lowering.

[0072] Further, each of the plurality of connecting rods 320 is subjected to an outward tension force, and the two ends of the connecting rod 320 are fixed between the two adjacent fixing plates 310. Therefore, the plurality of fixing plates 310 are subjected to two forces with the same size but opposite directions, and the plurality of fixing plates 310 generate a mutual interaction force with opposite directions, thereby maintaining the stability of the plurality of fixing plates 310 and the stability of the superconducting magnet 100 during lifting or lowering.

[0073] Preferably, the support base 330 comprises an L-shaped column 331, a support plate 332 and a rib plate 333. The top of the L-shaped column 331 is connected to the bottom of the superconducting magnet 100, the bottom of the L-shaped column 331 is connected to the upper surface of the support plate 332, and the lead screw 210 is threadedly connected to the support plate 332. One side of the rib plate 333 is connected to the L-shaped column 331, and the other side is connected to the upper surface of the support plate 332.

[0074] Specifically, the L-shaped column 331 is fixed at the bottom of the superconducting coil housing, which expands the stress area of the fixing plate 310 without increasing the width, reduces the lifting height of the lead screw 210, and reduces the safety hazard.

[0075] Preferably, the fixing plate 310 is provided with a fixing groove on the side close to the superconducting magnet 100, and the lead screw 210 is located in the fixing groove.

[0076] Further, the fixing groove of the fixing plate 310 is provided with a sliding plate 311 along the height direction, and the sliding plate 311 is uniformly provided with a plurality of positioning protrusions along the vertical direction. The longitudinal section of the positioning protrusion is rectangular. The stable assembly 300 further comprises a directional sliding block 340, and the directional sliding block 340 is provided with a directional groove. The shape of the groove body of the directional groove is matched with the shape of the surface of the sliding plate 311, that is, the directional sliding block 340 is slidably connected with the sliding plate 311 through the directional groove. The bottom of the directional groove is connected to the end of the support plate 332 away from the superconducting coil housing. The directional groove cooperates with the positioning protrusion. On the one hand, through the cooperation of the directional groove and the positioning protrusion, the support plate 332 can be oriented, and the positioning protrusion is clamped in the directional groove, avoiding the rotation of the support base 330 during lifting. On the other hand, through the cooperation of the directional groove and the positioning protrusion, two stress points can be provided for the support plate 332 to reduce the axial stress of the lead screw 210 and prolong the service life of the lead screw 210. When the shape of the positioning protrusion is a quadrangular prism, the maximum stress area can be ensured, and the orientation effect is better.

[0077] Further, the rib plate 333 can make the structure of the stable assembly 300 more firm, like a ribbed rib, preventing the L-shaped column 331 from bending or breaking due to excessive stress, and prolonging its service life.

[0078] Preferably, the coil adjusting assembly 400 comprises a first oil cylinder 410, a second oil cylinder 420, a driving motor 430 and a rotating shaft 440. The first oil cylinder 410 is fixedly installed on the base, the output end of the first oil cylinder 410 is connected with one side of the second oil cylinder 420, the second oil cylinder 420 is slidingly connected on the base, the output end of the second oil cylinder 420 is connected with one end of the driving motor 430, the output end of the driving motor 430 is connected with one end of the rotating shaft 440, and the other end of the rotating shaft 440 extends into the inside of the superconducting coil accommodating shell. The coil adjusting assembly 400 in the application can adjust the positions of the first coil 110 and the third coil 130 relative to the second coil group 120 without changing the structure and volume of the superconducting magnet main body, and can not only adaptively adjust the magnetic field distribution form and the magnetic field strength according to the crystal pulling quality requirement of the superconducting magnetic control single crystal furnace, but also adapt to the assembly and maintenance of the single crystal furnace and ensure the stability and safety of the single crystal furnace.

[0079] Wherein, the rotating shaft 440 is provided with a first gear part 450 and a second gear part 460, and the first U-shaped frame 141 and the third U-shaped frame 143 are both provided with a matching gear on the side close to the rotating shaft 440, such as a herringbone gear, the first gear part 450 can be engaged with the first U-shaped frame 141 for transmission, and the third U-shaped frame 143 can be engaged with the second gear part 460 for transmission.

[0080] Specifically, the length of the first gear part 450 is twice the width of the first U-shaped frame 141, and the length of the second gear part 460 is twice the width of the third U-shaped frame 143. Figure 5 As shown in the figure, if it is required to simultaneously adjust the positions of the first coil 110 and the third coil 130 relative to the second coil group 120, the first gear part 450 and the second gear part 460 on the rotating shaft 440 are engaged with the first U-shaped frame 141 and the third U-shaped frame 143 for transmission respectively; if it is required to separately adjust the first U-shaped frame 141, the rotating shaft 440 is driven downward by the second oil cylinder 420, so that the second gear part 460 is disengaged from the third U-shaped frame 143, at this time, the upper half of the first gear part 450 is engaged with the first U-shaped frame 141, and then the position adjustment of the first coil 110 in the vertical position is realized; if it is required to separately adjust the position of the third U-shaped frame 143, the rotating shaft 440 is driven upward by the second oil cylinder 420, so that the first gear part 450 is disengaged from the first U-shaped frame, at this time, the lower half of the second gear part 460 is engaged with the third U-shaped frame 143, and then the position adjustment of the third coil 130 in the vertical direction is realized.

[0081] Further, the length of the short side of the first U-shaped frame 141 and the third U-shaped frame 143 in the application is greater than the length of the short side of the second U-shaped frame 142, and the length difference is greater than the depth of the herringbone gear, so as to avoid that the first gear part 450 or the second gear part 460 is stuck at the second U-shaped frame 142.

[0082] Further, the rotating shaft 440 penetrates the outer shell of the superconducting coil installation shell and extends into the interior of the outer shell, and the opening is a sliding opening structure, which ensures the sealing performance and prevents magnetic leakage.

[0083] The present application can form a plurality of magnetic field distribution forms by adjusting the spacing, the current direction and the current size of the three groups of superconducting coils, and exciting the three groups of superconducting coils by applying a direct current, because the spacing, the current direction and the current size of the coils can be adjusted. On the one hand, the magnetic field distribution form can be adjusted adaptively and the magnetic field strength in the center of the superconducting magnet can be improved according to the crystal pulling quality requirement of the superconducting magnetic control single crystal furnace. On the other hand, the uniformity and quality of the single crystal silicon rod can be effectively improved on the basis of improving the magnetic field strength.

[0084] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0085] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0086] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated. It can be mechanically connected, or it can be electrically connected or in communication with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication or interaction relationship of two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0087] In this disclosure, the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" mean that a particular feature, structure, material, or characteristic is included in at least one embodiment or example of the present disclosure. The illustrative appearances of the above-mentioned terms in various places in the specification are not necessarily referred to the same embodiment or example. Moreover, the particular features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples. Furthermore, the terminology "comprising" is used in the disclosure as comprising but not limited to, that is, it is open-ended and does not exclude the presence of additional features, structures, materials, or characteristics.

[0088] Although the embodiments of the present disclosure have been shown and described above, it is understood that the above-described embodiments are exemplary, and are not to be interpreted as limiting the present disclosure, and the ordinary skilled person in the art can make changes, modifications, replacements, and variations to the above-described embodiments within the scope of the present disclosure.

Claims

1. A superconducting magnetic control single crystal furnace, characterized by, include: Superconducting magnet (100); disposed on the outer periphery of the single crystal furnace body; Lifting assembly (200); mounted on the base, used for lifting the superconducting magnet (100). A stabilizing component (300) is disposed on the base for supporting the superconducting magnet (100) and connected to the lifting component (200); A coil adjustment assembly (400) is mounted on a base and its output end extends into the superconducting magnet (100) for driving the displacement of the superconducting coil inside the superconducting magnet (100). The superconducting magnet (100) includes: Superconducting coil housing; a cylinder with a hollow circular cross-section; Superconducting coil; disposed within the superconducting coil housing; The superconducting coil includes: First coil (110); horizontally sleeved in the upper part of the superconducting coil housing; The second coil group (120) is circumferentially disposed in the middle of the superconducting coil housing. The third coil (130); is horizontally sleeved in the lower part of the superconducting coil housing; The superconducting coil housing is further provided with a U-shaped frame (140); the U-shaped frame (140) includes: The first U-shaped frame (141) is threadedly connected to the upper part of the superconducting coil housing, and the first coil (110) is sleeved on the first U-shaped frame (141). The second U-shaped frame (142) is fitted in the middle of the superconducting coil housing, and the second coil group (120) is mounted on the second U-shaped frame (142). The third U-shaped frame (143) is threaded to the lower part of the superconducting coil housing, and the third coil (130) is sleeved on the third U-shaped frame (143). The threads connecting the superconducting coil mounting shell to the first U-shaped frame (141) and the third U-shaped frame (143) are opposite in direction; used to adjust the spacing between the first coil and the second coil group and / or the spacing between the third coil and the second coil group; The coil adjustment assembly (400) includes: First hydraulic cylinder (410); mounted on the base; The second hydraulic cylinder (420); the output end of the first hydraulic cylinder (410) is connected to one side of the second hydraulic cylinder (420), and the second hydraulic cylinder (420) is slidably connected to the base; Drive motor (430); the output end of the second oil cylinder (420) is connected to one end of the drive motor (430); A rotating shaft (440); the output end of the drive motor (430) is connected to one end of the rotating shaft (440), and the other end of the rotating shaft (440) extends into the interior of the superconducting coil housing; The rotating shaft (440) is provided with a first gear part (450) and a second gear part (460). The first U-shaped frame (141) and the third U-shaped frame (143) are provided with a mating gear on the side near the rotating shaft (440). The first gear part (450) meshes with the first U-shaped frame (141), and the second gear part (460) meshes with the third U-shaped frame (143).

2. A superconducting magnetic single crystal furnace as defined in claim 1, wherein The second coil group (120) comprises at least two second coils (121) which are uniformly arranged in the middle of the superconducting coil housing.

3. A superconducting magnetic single crystal furnace as claimed in claim 1 or 2, characterized in that The lifting assembly (200) comprises: a plurality of lead screws (210) which are uniformly distributed around the periphery of the superconducting magnet (100), one end of each of the lead screws (210) being threadedly connected to the stabilizing assembly (300); a driving assembly (220) having an output end connected to the other end of each of the lead screws (210).

4. A superconducting magnetic single crystal furnace as defined in claim 3, wherein The driving assembly (220) comprises: a plurality of lifters (221) which are arranged on the base and have output ends one-to-one connected to the other end of each of the lead screws (210); one speed-reducing motor (222) arranged on the base between two adjacent lifters (221); a plurality of couplings (223) through which the lifters (221) are connected to the next adjacent lifters (221) via transmission shafts, and through which the speed-reducing motor (222) is connected to the adjacent lifters (221) via transmission shafts.

5. A superconducting magnetic single crystal furnace as defined in claim 3, wherein The stabilizing assembly (300) comprises: a plurality of fixed plates (310) which are uniformly distributed around the periphery of the base of the superconducting magnet (100), each of the fixed plates (310) having a fixing groove formed on the side close to the superconducting magnet (100) and in which the lead screw (210) is located; a connecting rod (320) connecting two adjacent fixed plates (310); a plurality of support seats (330) having top portions connected to the bottom of the superconducting magnet (100) and bottom portions threadedly connected to the lead screws (210) one-to-one.

6. A superconducting magnetic single crystal furnace as defined in claim 5, wherein The support seat (330) comprises: an L-shaped column (331) having a top portion connected to the bottom of the superconducting magnet (100); a support plate (332) having a top surface connected to the bottom of the L-shaped column (331) and in which the lead screw (210) is threadedly connected; a rib plate (333) having one side connected to the L-shaped column (331) and the other side connected to the top surface of the support plate (332).

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