Laser direct writing device and method for rapid parallel processing based on multiple rotary channels and application of laser direct writing device and method

Abstract

The invention discloses a laser direct writing device and method for rapid parallel processing based on multiple rotary channels and application. The device comprises a first light source shaping module, a beam splitting module, a movable mask pattern module, a resolution adjustable module and a focusing module. A pre-processed second array light beam with coding information is formed through the fixed mask pattern plate; and the multi-array light beam diaphragm is rotated to control the exposure time of the second array light beam or the array combined light beam, the flexible adjustment of the resolution of the second array light beam or the array combined light beam is realized in combination with the adjustment of the distance between the 4f lens groups, and finally, the rapid parallel processing of multiple channels is realized. The device and the method are used for rapid laser direct writing with any structure and adjustable resolution, high-stability and high-resolution three-dimensional laser processing is realized, and the device and the method have wide application scenes.

Description

Technical Field

[0001] The present invention relates to the field of laser direct writing, especially the fields of micro-nano processing and high-density optical storage, and particularly to a laser direct writing device and method and an application based on rapid parallel processing of a rotating multi-channel. Background Art

[0002] In the traditional semiconductor field, as the process miniaturization gradually approaches the physical limit, the challenges of electronic chips in terms of energy consumption, transmission, storage, etc. are becoming increasingly severe. Optical computing with high throughput, high energy efficiency ratio, and ultra-low latency has become an emerging technology direction. Optical signals have a larger bandwidth and higher frequency than electrical signals, can achieve more efficient computing, and avoid the overheating problem of electronic chips. However, the manufacturing of photonic chips not only requires high-precision lithography, but also flexible direct writing and large-size writing. In addition, the fields of micro-electromechanical systems, micro-nano photonic devices, microfluidic devices, and bioengineering also have urgent requirements for the processing of high-precision and complex three-dimensional nanostructures. Although traditional extreme ultraviolet lithography and electron beam lithography can achieve high resolution at the nanoscale, they are lacking in the ability of arbitrary three-dimensional processing. Laser direct writing technology has both high precision and arbitrary processing capabilities, and is one of the technologies with the greatest potential to solve the processing of the above-mentioned complex high-precision three-dimensional devices in the future. Especially inspired by the stimulated emission depletion (STED) technology proposed by German physicist Hell in 1994, currently, the super-resolution laser direct writing technology based on dual beams has been able to achieve high-precision size writing of 50 nm.

[0003] Traditional laser direct writing technology generally adopts a point-by-point scanning technique, and the processing rate is relatively slow, generally not exceeding 10 6Vosel / s is generally only applied to small-area trial production and principle research, so the efficiency has not been improved. To solve the above problems, there are currently three main technical routes. Among them, the holographic exposure method still lacks in resolution, while the mask-based surface projection method is still essentially limited by the optical diffraction limit. Moreover, the projection method based on the two-beam technology requires more complex mask splitting technology and multi-mask alignment problems (Luo Zhijun, Liu Ziyu, Wang Shuhong, etc. Exploration of Next-Generation Lithography Technology: Concepts, Technologies, and Futures of the Sixth-Generation Two-Beam Super-Resolution Lithography [J]. Laser & Optoelectronics Progress, 2022, 59(09): 464-479). By introducing multi-channel parallel writing methods such as multi-beam splitters, micro-reflection arrays, diffractive optical elements, and spatial light modulators, and realizing the common processing of N focal points, the efficiency can be increased by N times, and it has high potential for large-area processing. However, currently, the dynamic multi-focus modulation based on the spatial light modulator cannot further improve the processing efficiency due to the limitation of the modulator's refresh rate. Although the processing rate can be improved by introducing multiple acousto-optic modulators to individually control the light beams later, it is limited by the environment and high cost in industrial applications (CN 113433803 A, CN116382044 A). Therefore, there is an urgent need to develop a low-cost parallel processing device and method with high resolution and high processing efficiency. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the purpose of the present invention is to propose a laser direct writing device and method for fast parallel processing based on a rotating multi-channel, which can achieve parallel processing with high resolution, high processing efficiency, low cost, and adjustable resolution.

[0005] To achieve the above object and other related objects, the present invention provides a laser direct writing device for fast parallel processing based on a rotating multi-channel, including a first light source shaping module, a beam splitting module, a movable mask pattern module, a resolution adjustable module, and a focusing module;

[0006] The first light source shaping module is used to form a first light beam; the beam splitting module is used to disperse the first light beam into a first array of light beams; the movable mask pattern module includes a fixed mask pattern plate, which individually controls each light beam of the first array of light beams, thereby forming a second array of light beams with information encoding; the resolution adjustable module includes a multi-array beam aperture and a 4f lens group. By rotating the multi-array beam aperture to control the exposure time of the second array of light beams and combining the adjustment of the 4f lens group spacing, flexible adjustment of the resolution of the second array of light beams is achieved; the focusing module is used to control the axial position of the focused spot of the second array of light beams.

[0007] Further, the device further includes a second light source shaping module, which is used to form an array of vortex beams. The array of vortex beams is combined with the second array of beams before entering the 4f lens group to form an array of combined beams;

[0008] The resolution adjustable module controls the exposure time of the array of combined beams by rotating the multi-array beam aperture, and combines with the adjustment of the 4f lens group spacing to flexibly adjust the resolution of the array of combined beams; the focusing module is used to control the axial position of the focused spot of the array of combined beams.

[0009] Further, the device further includes a servo module, a real-time imaging module and an electronic control module;

[0010] The real-time imaging module is used to image and observe the processing condition of the second array of beams or the array of combined beams on the sample; the servo module detects the focusing condition of the second array of beams or the array of combined beams on the sample; the electronic control module is used to receive the detection results of the processing condition and the focusing condition, and drive the focusing module to move axially and adjust the rotation speed of the multi-array beam aperture in real time to achieve the focusing servo of the second array of beams or the array of combined beams.

[0011] Among them, the first light source shaping module includes a first laser; the beam splitting module includes a first diffractive optical element; the focusing module includes a movable objective lens; the real-time imaging module sequentially includes a filter, an optical fiber and an imaging device along the optical axis; the electronic control module includes a computer;

[0012] Among them, the second light source shaping module includes a second laser, a first vortex phase plate and a second diffractive optical element. The second laser emits a second beam, forms a vortex beam through the first vortex phase plate, and then forms an array of vortex beams through the second diffractive optical element.

[0013] According to the specific embodiment of the present invention, the first light source shaping module sequentially includes a laser, a first lens, a second lens and a movable third lens along the optical axis; the beam splitting module includes a first diffractive optical element and a first mirror; the movable mask pattern module includes n fixed mask pattern plates that can be electrically driven to translate; the resolution adjustable module includes a rotating motor, a multi-array beam aperture and a 4f lens group, where the 4f lens group is composed of a fifth lens and a sixth lens; the focusing module includes a movable objective lens; the real-time imaging module sequentially includes a filter, a fourth lens, an optical fiber and an imaging device along the optical axis; the electronic control module includes a computer; the processed sample is fixed on a three-dimensional displacement stage;

[0014] The second light source shaping module sequentially includes a second laser, a seventh lens, an eighth lens, a first vortex phase plate, a second diffractive optical element, and a second dichroic mirror along the optical axis; wherein the seventh lens and the eighth lens modulate the spot size and parallelism of the second light beam; the second dichroic mirror is used to highly coincide the centers of the array vortex beam and the second array beam in three-dimensional positions to form an array combined beam.

[0015] As an example, the first diffractive optical element and the second diffractive optical element are two-dimensional diffractive elements or three-dimensional diffractive elements.

[0016] As an example, the multi-array beam aperture is an amplitude modulation aperture, a phase modulation aperture, or a polarization modulation aperture.

[0017] The present invention also provides a laser direct writing method based on rapid parallel processing of a rotating multi-channel, including:

[0018] Step 1: A first laser emits a first light beam, which is split by a first diffractive element to form a first array beam with multiple foci.

[0019] Step 2: The first array beam passes through a fixed mask pattern plate to form a pre-processed second array beam with encoded information.

[0020] Step 3: The rotating multi-array beam aperture controls the exposure time of the second array beam or the array combined beam, and combines the adjustment of the 4f lens group spacing to flexibly adjust the resolution of the second array beam or the array combined beam.

[0021] Step 4: Focus the second array beam or the array combined beam with the adjusted resolution on the sample.

[0022] Furthermore, a laser direct writing method based on rapid parallel processing of a rotating multi-channel includes:

[0023] Step 1: A first laser emits a first light beam, which is split by a first diffractive element to form a first array beam with multiple foci.

[0024] Step 2: The first array beam passes through a fixed mask pattern plate to form a pre-processed second array beam with encoded information.

[0025] Step 3: The rotating multi-array beam aperture controls the exposure time of the second array beam or the array combined beam, and combines the adjustment of the 4f lens group spacing to flexibly adjust the resolution of the second array beam or the array combined beam.

[0026] The formation process of the array combined beam is as follows: The second laser emits the second beam, which forms a vortex beam through the first vortex phase plate, and then forms an array vortex beam through the second diffractive optical element. The array vortex beam and the second array beam are combined before entering the 4f lens group to form an array combined beam;

[0027] Step 4: Focus the second array beam or the array combined beam with the adjusted resolution through the focusing module on the sample;

[0028] Step 5: Image and observe the processing status of the second array beam or the array combined beam on the sample, and detect the focusing situation of the second array beam or the array combined beam on the sample; The electronic control module receives the detection results of the processing status and the focusing situation, and drives the focusing module to move axially and adjust the rotation speed of the multi-array beam aperture in real time.

[0029] Further, on the basis of the focusing servo in Step 5, different fixed mask pattern plates are replaced to form second array beams written in parallel with different shapes. The electronic control module controls the movement of the second array beam or the array combined beam on the sample, and performs different periodic transformations on the second array beam or the array combined beam by adjusting the distance between the 4f lens groups, so as to realize fast parallel processing of multiple modules and multiple channels.

[0030] Further, by modulating the constant angular velocity, constant linear velocity and / or variable velocity of the rotation of the multi-array beam aperture, the exposure time of the beam is controlled.

[0031] The present invention also provides an application of the laser direct writing device in optical storage information recording. The focusing module controls the axial position of the focusing spot of the second array beam or the array beam, so that the second array beam or the array combined beam is focused on the selected information recording layer of the optical storage medium.

[0032] The present invention also provides an application of the laser direct writing method in optical storage information recording. The sample is an optical storage medium, and the second array beam or the array combined beam with the adjusted resolution is focused on the selected information recording layer of the optical storage medium through the focusing module, so as to realize information writing.

[0033] As described above, a laser direct writing device and method based on fast parallel processing of a rotating multi-channel according to the present invention have the following beneficial effects:

[0034] (1) Compared with the existing laser direct writing scheme for fast parallel processing of multiple channels, the present invention does not need to control multiple beams through a spatial light, acousto-optic modulator or micro mirror array, and controls the beam through a rotating motor and a disk aperture, so as to realize large-area laser direct writing;

[0035] (2) During the writing process, the present invention can individually control the array of light beams through multiple translation masks, arbitrarily adjust the resolution of the input structure through a 4f lens group, and control different exposure times by adjusting the rotation speed of the rotation motor, thereby achieving writing of different structures and sizes.

[0036] (3) During the writing process, the servo control module can dynamically control the objective lens and the rotation speed of the turntable in real time to achieve focusing servo, and ultimately achieve high-stability structure processing.

[0037] (5) The present invention has the capabilities of high-resolution, high processing efficiency, adjustable resolution, and low-cost laser processing, and has lower equipment costs compared to other parallel processing equipment and methods such as those based on spatial light modulators, acousto-optic modulators, and micro-mirror arrays.

[0038] (6) The parallel laser direct writing device based on a rotating multi-channel with adjustable resolution can be used for laser direct writing and can also be used for high-density optical storage information recording and writing. The parallel laser direct writing device based on a rotating multi-channel with adjustable resolution can be used for parallel writing with a single-beam light source and can also be used for super-resolution parallel writing with a dual-beam light source. Description of the Drawings

[0039] Figure 1 is an overall architecture schematic diagram of a laser direct writing device for fast parallel processing based on a rotating multi-channel;

[0040] Figure 2 is another overall architecture schematic diagram of a laser direct writing device for fast parallel processing based on a rotating multi-channel;

[0041] Figure 3 is a schematic diagram of a specific implementation of a laser direct writing device for fast parallel processing based on a rotating multi-channel;

[0042] Figure 4 is another schematic diagram of a specific implementation of a laser direct writing device for fast parallel processing based on a rotating multi-channel;

[0043] Figure 5 is a schematic diagram of a specific implementation of a fixed mask pattern board for a 4x4 multi-focus array;

[0044] Figure 6 is a schematic diagram of a specific implementation of a disk aperture for beam modulation after a diffraction element;

[0045] Figure 7 is a working flowchart of a laser direct writing method for fast parallel processing based on a rotating multi-channel;

[0046] Figure 8It is a flowchart of another laser direct writing method based on rapid parallel processing with a rotating multi-channel.

[0047] Component label description

[0048] 10 First light source shaping module

[0049] 101 First laser

[0050] 102 First lens

[0051] 103 Second lens

[0052] 104 Movable third lens

[0053] 201 First dichroic mirror

[0054] 30 Real-time imaging module

[0055] 301 Filter

[0056] 302 Fourth lens

[0057] 303 Optical fiber

[0058] 304 Imaging device

[0059] 40 Beam splitting module

[0060] 401 First diffractive optical element

[0061] 402 First reflector

[0062] 60 Movable mask pattern module

[0063] 601 Fixed mask pattern board

[0064] 701 Rotating motor

[0065] 702 Disk-shaped multi-array beam aperture

[0066] 703 4f lens group

[0067] 7031 Fifth lens

[0068] 7032 Sixth lens

[0069] 80 Focusing module

[0070] 801 Movable objective lens

[0071] 1001 Three-dimensional displacement stage

[0072] 110 Servo module

[0073] 120 Electronic control module

[0074] 1201 Computer

[0075] 1301 Second Laser

[0076] 1302 Seventh Lens

[0077] 1303 Eighth Lens

[0078] 1304 First Vortex Phase Plate

[0079] 1305 Second Diffractive Optical Element

[0080] 1306 Second Dichroic Mirror

[0081] 001 Sample Detailed Embodiment

[0082] The following specific embodiments illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0083] It should be noted that the structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in the art to understand and read, and are not used to limit the limited conditions under which the present invention can be implemented. Therefore, they do not have substantial technical significance. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed in the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear description and are not used to limit the scope within which the present invention can be implemented. The change or adjustment of their relative relationships, without substantial change in the technical content, should also be regarded as the scope within which the present invention can be implemented.

[0084] The following will be further described in detail with reference to the accompanying drawings.

[0085] As Figure 1As shown in the figure, a laser direct writing device for fast parallel processing based on a rotating multi-channel proposed by the present invention includes a first light source shaping module 10, a beam splitting module 40, a movable mask pattern module 60, a resolution adjustable module 70, and a focusing module 80. The first light source shaping module 10 is used to form a first light beam; the beam splitting module 40 is used to disperse the first light beam into a first array of light beams; the movable mask pattern module 60 includes a fixed mask pattern plate 601, which individually regulates each light beam of the first array of light beams, thereby forming a second array of light beams with information encoding; the resolution adjustable module 70 includes a multi-array beam aperture 702 and a 4f lens group 703. By rotating the multi-array beam aperture 702, the exposure time of the second array of light beams is controlled, and in combination with the adjustment of the spacing of the 4f lens group, flexible adjustment of the resolution of the second array of light beams is achieved; the focusing module 80 is used to control the axial position of the focused spot of the second array of light beams.

[0086] As Figure 2 shown in the figure, another laser direct writing device for fast parallel processing based on a rotating multi-channel proposed by the present invention. In order to achieve high-stability structural processing, a servo module 110, a real-time imaging module 30, and an electronic control module 120 are added to the Figure 1 device. The real-time imaging module 30 is used to image and observe the processing status of the second array of light beams on the sample 001; the servo module 110 detects the focusing condition of the second array of light beams on the sample 001; the electronic control module 120 is used to receive the detection results of the processing status and the focusing condition, and drive the focusing module 80 to move axially and adjust the rotation speed of the multi-array beam aperture 702 in real time to achieve the focusing servo of the second array of light beams.

[0087] Figure 3 Shows a specific implementation of the laser direct writing device for fast parallel processing based on a rotating multi-channel of the present invention. The first light source shaping module 10 sequentially includes a first laser 101, a first lens 102, a second lens 103, a movable third lens 104, and a first dichroic mirror 201 along the optical axis; the beam splitting module 40 includes a first diffractive optical element 401 and a first mirror 402; the movable mask pattern module 60 includes n fixed mask pattern plates 601 that can be electrically driven to translate; the resolution adjustable module 70 includes a rotating motor 701, a multi-array beam aperture 702, and a 4f lens group, where the 4f lens group is composed of a fifth lens 7031 and a sixth lens 7032; the focusing module 80 includes a movable objective lens 801; the real-time imaging module 30 sequentially includes a filter 301, a fourth lens 302, an optical fiber 303, and an imaging device 304 along the optical axis; the electronic control module 120 includes a computer 1201. The processed sample is fixed on a three-dimensional displacement stage 1001.

[0088] n different electrically drivable translatable fixed mask pattern plates, respectively labeled as A1, A2, A3, ……, An. The multi-array beam aperture 702 is preferably designed in a disc shape for more convenient rotation.

[0089] The laser emitted by the first laser 101 is modulated in spot size and parallelism through the first lens 102, the second lens 103, and the movable third lens 104 to obtain the first beam. Subsequently, the optical path direction is changed by the first dichroic mirror 201, and then the first beam is split by the first diffractive optical element 401 to form the first array beam. Next, it enters the movable mask pattern module 60 through the first mirror 402. The fixed mask pattern plate is selected according to the pattern structure to be written, and the second array beam with information encoding is formed. Subsequently, the second array beam enters the rotating multi-array beam aperture 702, and passes through the fifth lens 7031 and the sixth lens 7032 to enter the movable objective lens 801, and the second array beam acts on the sample on the three-dimensional displacement stage 1001 to complete multi-channel laser processing. The processing condition is observed in real time through the imaging by the filter 301, the fourth lens 302, the optical fiber 303, and the imaging device 304; the servo module 110 detects the focusing condition of the second array beam on the sample. And the entire device controls the servo module 110, the electric three-dimensional moving stage 1001, the rotating motor 701, the movable mask pattern module 60, the movable objective lens 801, the movable third lens 104, and the imaging device 304 through the computer 1201 to achieve the synchronization and real-time dynamic modulation of multiple modules and complete high-precision laser processing. The computer 1201 receives the detection results of the processing condition and the focusing condition, and drives the movable objective lens 801 to move axially and drives the rotating motor 701 to adjust the rotation speed of the multi-array beam aperture 702 in real time to achieve the focusing servo of the second array beam. The computer 1201 controls the moving direction and speed of the three-dimensional displacement stage 1001 to control the movement of the second array beam on the sample. The computer 1201 controls the axial movement of the movable third lens 104 to change the spot size of the first beam. And different periodic transformations are performed on the second array beam through the fifth lens 7031 and the sixth lens 7032.

[0090] In order to achieve faster multi-channel parallel laser direct writing, the computer 1201 can partition according to the pattern structure to be written and perform layout design on the fixed mask pattern plates A1, A2, A3, ……, An according to different structures to complete the disassembly of the pattern structure, and then instruct the movable mask pattern module 60 to select and replace the fixed mask pattern plates according to the layout design. With the device of the present invention, the movable mask pattern module 60 can include more than 10 fixed mask pattern plates, so as to achieve the rapid replacement of the multi-array beam structure.

[0091] At Figure 1On the basis of the device, a second light source shaping module is added. The second light source shaping module is used to form an array of vortex beams. The array of vortex beams is combined with the second array of beams before entering the 4f lens group to form an array of combined beams. Each combined beam in the array of combined beams is formed by the coincidence of a vortex beam (i.e., a hollow beam) and a solid beam at the center. The combined beam is based on the principle of dual-beam super-resolution, such as the stimulated emission depletion principle, the edge light suppression principle, the triplet-triplet absorption principle, etc. The wavelengths of the dual beams used for direct writing are selected according to the principle and material characteristics. The device is added with a second light source shaping module and is suitable for laser direct writing of super-resolution parallel processing. The array of vortex beams can be synchronously exposed with the second array of beams (combined before the multi-array beam aperture), or can be continuously exposed alone (such as Figure 4 shown by combining after the multi-array beam aperture 702).

[0092] Figure 4 Another specific implementation of the laser direct writing device based on the fast parallel processing of the rotating multi-channel of the present invention is shown. The direct writing device is as shown in Figure 4 shown, in Figure 3On the basis of the device, a second light source shaping module is added, which sequentially includes a second laser 1301, a seventh lens 1302, an eighth lens 1303, a first vortex phase plate 1304, a second diffractive optical element 1305, and a second dichroic mirror 1306 along the optical axis. The second laser 1301 emits a second beam, which is modulated in spot size and parallelism by the seventh lens 1302 and the eighth lens 1303, and then forms a vortex beam through the first vortex phase plate 1304 and forms an array of vortex beams through the second diffractive optical element 1305. After passing through the second dichroic mirror 1306, the centers of the array of vortex beams and the second array of beams coincide in three-dimensional position and height, forming an array of combined beams, where the vortex beam suppresses the edge of the solid beam. Then, it enters the movable objective lens 801 through the fifth lens 7031 and the sixth lens 7032, and the array of combined beams acts on the sample on the three-dimensional displacement stage 1001 to jointly complete multi-channel super-resolution laser processing. The processing condition is observed in real time through imaging by the filter 301, the fourth lens 302, the optical fiber 303, and the imaging device 304; the servo module 110 detects the focusing condition of the array of combined beams on the sample. The entire device controls the servo module 110, the electric three-dimensional moving stage 1001, the rotary motor 701, the movable mask pattern module 60, the movable objective lens 801, the movable third lens 104, and the imaging device 304 through the computer 1201 to achieve synchronization and real-time dynamic modulation of multiple modules and complete high-precision laser processing. The computer 1201 receives the detection results of the processing condition and the focusing condition, and drives the movable objective lens 801 to move axially and drives the rotary motor 701 to adjust the rotation speed of the multi-array beam aperture 702 in real time to achieve focusing servo of the array of combined beams. The computer 1201 controls the moving direction and speed of the three-dimensional displacement stage 1001 to control the movement of the array of combined beams on the sample. The computer 1201 controls the axial movement of the movable third lens 104 to change the spot size of the first beam. And the array of combined beams is subjected to different periodic transformations through the fifth lens 7031 and the sixth lens 7032.

[0093] Figure 5 FIG. 4 is a schematic diagram of a specific implementation of the fixed mask pattern plate of the 4x4 multi-focus array provided in this embodiment. It is divided into regions according to the number of array foci, and is divided into 4 sub-blocks in total. A fixed mask pattern plate is designed for each sub-block, corresponding to the fixed mask pattern plates marked as A1, A2, A3, and A4 respectively. The first array of beams passes through different fixed mask pattern plates to achieve dynamic regulation of the second array of beams.

[0094] Figure 6 FIG. 8 is a schematic diagram of a specific implementation of a disk aperture for modulating a beam after a diffractive element. The disk aperture is designed differently according to different beam modulation positions. The beam after the diffractive element is an array of beams, and multiple beams need to be synchronously modulated.

[0095] Figure 7 It is a workflow diagram of a laser direct writing method based on rotating multi-channel and fast parallel processing. It mainly includes the following steps:

[0096] Step 1: The first laser emits laser light, which is split by the first diffraction element to form a first array of multi-focal beams;

[0097] Step 2: The first array of beams passes through a fixed mask pattern plate to form a second array of pre-processed beams with encoded information;

[0098] Step 3: The rotating multi-array beam aperture controls the exposure time of the second array of beams, and in combination with the adjustment of the 4f lens group spacing, realizes flexible adjustment of the resolution of the second array of beams;

[0099] Step 4: The second array of beams after the above resolution adjustment is focused on the sample to achieve fast parallel processing of multiple channels.

[0100] As Figure 8 shown, it is a workflow diagram of another laser direct writing method based on rotating multi-channel and fast parallel processing proposed by the present invention. It mainly includes the following steps:

[0101] Step 1: The first laser emits laser light, which is split by the first diffraction element to form a first array of multi-focal beams;

[0102] Step 2: The first array of beams passes through a fixed mask pattern plate to form a second array of pre-processed beams with encoded information;

[0103] Step 3: The rotating multi-array beam aperture controls the exposure time of the second array of beams, and in combination with the adjustment of the 4f lens group spacing, realizes flexible adjustment of the resolution of the second array of beams;

[0104] Step 4: The second array of beams after the above resolution adjustment is focused on the sample through a focusing module;

[0105] Step 5: Image observation and detection are carried out on the processing status of the second array of beams on the sample, and detection of the focusing situation of the second array of beams on the sample is carried out;

[0106] Step 6: The electronic control module receives the detection results of the processing status and the focusing situation, and in real time drives the focusing module to move axially and adjusts the rotation speed of the multi-array beam aperture to achieve fast parallel processing of multiple channels.

Claims

1. A laser direct writing device based on rapid parallel processing of rotating multi-channels, characterized in that: It includes a first light source shaping module, a beam splitting module, a movable mask pattern module, a resolution adjustable module, and a focusing module; The first light source shaping module is used to form a first light beam; the beam splitting module is used to disperse the first light beam into a first array light beam; the moving mask graphic module includes a fixed mask graphic plate, and each light beam of the first array light beam is individually regulated to form a second array light beam with information coding; the resolution adjustable module includes a multi-array beam diaphragm and a 4f lens group, and the exposure time of the second array light beam is controlled by rotating the multi-array beam diaphragm, and the resolution of the second array light beam is flexibly adjusted in combination with the adjustment of the spacing of the 4f lens group; the focusing module is used to control the axial position of the focusing spot of the second array light beam.

2. The laser direct writing device according to claim 1, characterized in that: The device also includes a second light source shaping module, which is used to form an array vortex beam, and the array vortex beam is combined with the second array beam before entering the 4f lens group to form an array combined beam; The adjustable resolution module controls the exposure time of the array combined beam by rotating the multi-array beam diaphragm, and combines the adjustment of the 4f lens group spacing to achieve flexible adjustment of the resolution of the array combined beam; the focusing module is used to control the axial position of the focusing spot of the array combined beam.

3. The laser direct writing device according to claim 1 or 2, characterized in that: The device also includes a servo module, a real-time imaging module and an electronic control module; The real-time imaging module is used to perform imaging observation and detection on the processing condition of the second array beam or the array combined beam on the sample; the servo module detects the focusing condition of the second array beam or the array combined beam on the sample; the electronic control module is used to receive the detection results of the processing condition and the focusing condition, and drive the focusing module to move axially and adjust the rotation speed of the multi-array beam aperture in real time to realize the focusing servo of the second array beam or the array combined beam.

4. The laser direct writing device according to claim 3, characterized in that: The first light source shaping module includes a first laser; the beam splitting module includes a first diffractive optical element; the focusing module includes a movable objective lens; the real-time imaging module includes a filter, an optical fiber and an imaging device in sequence along the optical axis; the electronic control module includes a computer; The second light source shaping module includes a second laser, a first vortex phase plate and a second diffractive optical element. The second laser emits a second light beam, which forms a vortex beam through the first vortex phase plate and then forms an array vortex beam through the second diffractive optical element.

5. The laser direct writing device according to claim 4, characterized in that: The first light source shaping module includes a laser, a first lens, a second lens and a movable third lens in sequence along the optical axis; the beam splitting module includes a first diffractive optical element and a first reflector; the movable mask pattern module includes n electrically driven fixed mask pattern plates that can be translated; the resolution adjustable module includes a rotary motor, a multi-array beam aperture and a 4f lens group, wherein the 4f lens group is composed of a fifth lens and a sixth lens; the focusing module includes a movable objective lens; the real-time imaging module includes a filter, a fourth lens, an optical fiber and an imaging device in sequence along the optical axis; the electronic control module includes a computer; the processed sample is fixed on a three-dimensional displacement table; The second light source shaping module includes a second laser, a seventh lens, an eighth lens, a first vortex phase plate, a second dichroic mirror along the optical axis in sequence; wherein the seventh lens and the eighth lens modulate the spot size and parallelism of the second light beam; the second dichroic mirror is used to make the centers of the array vortex beam and the second array beam highly overlap in a three-dimensional position to form an array combined beam.

6. The laser direct writing device according to claim 4, characterized in that: The first diffractive optical element and the second diffractive optical element are two-dimensional diffractive elements or three-dimensional diffractive elements.

7. The laser direct writing device according to claim 1 or 2, characterized in that: The multi-array beam aperture is an amplitude modulation aperture, a phase modulation aperture or a polarization modulation aperture.

8. A laser direct writing method based on rapid parallel processing of rotating multi-channels, characterized in that: include: Step 1: The first laser emits a first light beam, which is split by a first diffraction element to form a first array light beam with multiple focal points; Step 2: The first array beam passes through a fixed mask pattern plate to form a pre-processed second array beam with coded information; Step 3: Rotate the multi-array beam diaphragm to control the exposure time of the second array beam or the array combined beam, and adjust the spacing of the 4f lens group to achieve flexible adjustment of the resolution of the second array beam or the array combined beam; Step 4: Focus the second array beam or the array combined beam with the above-mentioned resolution adjustment on the sample.

9. The laser direct writing method according to claim 8, characterized in that: include: Step 1: The first laser emits a first light beam, which is split by a first diffraction element to form a first array light beam with multiple focal points; Step 2: The first array beam passes through a fixed mask pattern plate to form a pre-processed second array beam with coded information; Step 3: Rotate the multi-array beam diaphragm to control the exposure time of the second array beam or the array combined beam, and adjust the spacing of the 4f lens group to achieve flexible adjustment of the resolution of the second array beam or the array combined beam; The formation process of the array combined beam is as follows: the second laser emits the second beam, which passes through the first vortex phase plate to form a vortex beam, and then passes through the second diffractive optical element to form an array vortex beam. The array vortex beam and the second array beam are combined before entering the 4f lens group to form an array combined beam; Step 4: focusing the second array beam or the array combined beam after the resolution adjustment on the sample through a focusing module; Step 5: Perform imaging observation and detection on the processing condition of the second array beam or the array combined beam on the sample, and detect the focusing condition of the second array beam or the array combined beam on the sample; the electronic control module receives the detection results of the processing condition and the focusing condition, and drives the focusing module to move axially and adjust the rotation speed of the multi-array beam aperture in real time.

10. The laser direct writing method according to claim 8, characterized in that: include: On the basis of the focusing servo in step 5, different fixed mask graphic plates are replaced to form second array beams of different shapes for parallel writing. The electronic control module controls the movement of the second array beam or the array combined beam on the sample and performs different periodic transformations on the second array beam or the array combined beam by adjusting the spacing of the 4f lens group, thereby realizing rapid parallel processing of multiple modules and multiple channels.

11. The laser direct writing method according to claim 8, characterized in that: The exposure time of the light beam is controlled by constant angular velocity modulation, constant linear velocity modulation and / or variable velocity modulation of the rotation of the multi-array light beam aperture.

12. Application of the laser direct writing device according to any one of claims 1 to 7 in optical storage information recording, characterized in that: The focusing module controls the axial position of the second array beam or the focusing spot of the array beam so that the second array beam or the array combined beam is focused on the selected information recording layer of the optical storage medium.

13. Application of the laser direct writing method according to any one of claims 8 to 11 in optical storage information recording, characterized in that: The sample is an optical storage medium, and the second array light beam or the array combined light beam after the resolution adjustment is focused on the selected information recording layer of the optical storage medium through a focusing module, thereby realizing information writing.

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