Multi-channel pinch assembly and extreme ultraviolet light generating device

Abstract

The invention relates to the technical field of plasmas, in particular to a multi-channel pinch assembly and an extreme ultraviolet light generating device. The multi-channel pinch assembly comprises a magnetic core and a plasma outer channel set, a penetrating plasma central channel is arranged in the middle area of the magnetic core, the plasma outer channel set comprises at least one plasma outer channel, and the two ends of each plasma outer channel are communicated with the two ends of the plasma central channel respectively to form a closed-loop channel. The problems of pollution of electrode fragments to a light source, thermal load of a metal electrode, instability of plasmas and low energy conversion efficiency in the process that existing discharge plasmas generate extreme ultraviolet light are solved.

Description

Technical Field

[0001] The present invention relates to the field of plasma technology, and particularly to a multi-channel pinch assembly and an extreme ultraviolet light generating device.

Background Art

[0002] With the rapid development of the electronic information industry, the integration degree of semiconductor chips has been continuously improved, and the device feature size has been continuously reduced, which makes higher requirements for lithography technology. The most advanced lithography machine today is the EUV lithography machine. Currently, there are three commercially available solutions for generating extreme ultraviolet light: Laser Produced Plasma (LPP), Discharged Produced Plasma (DPP), and Laser-assisted Discharge Plasma (LDP).

[0003] Among them, the DPP method for generating EUV radiation has lower cost and relatively simple process requirements compared with the other two methods, and has good technical prospects. However, there are still many key problems to be solved, such as light source pollution, metal electrode thermal load, stability of discharge plasma, energy conversion efficiency, etc.

Summary of the Invention

[0004] In order to solve the problems of electrode debris pollution to the light source, metal electrode thermal load, plasma instability and low energy conversion efficiency in the process of generating extreme ultraviolet light by the existing discharge plasma, the present invention provides a multi-channel pinch assembly and an extreme ultraviolet light generating device.

[0005] To solve the above technical problems, the present invention provides the following technical solution: A multi-channel pinch assembly includes a magnetic core and a plasma outer channel group. A through plasma central channel is provided in the middle region of the magnetic core. The plasma outer channel group includes at least one plasma outer channel. Both ends of each plasma outer channel are respectively communicated with both ends of the plasma central channel to form a closed-loop channel.

[0006] Preferably, a heat-resistant and corrosion-resistant connection structure is provided between each plasma outer channel and the plasma central channel. The connection structure is provided with connection holes. Each plasma outer channel and the plasma central channel are communicated through the connection holes.

[0007] Preferably, a sleeve is provided in the middle region of the magnetic core, and the plasma central channel is formed inside the sleeve.

[0008] Preferably, the sleeve is detachably connected to the magnetic core.

[0009] Preferably, the inner wall of the sleeve is made of a material that is resistant to high temperatures and plasma corrosion.

[0010] Preferably, a cooling layer is provided between the sleeve and the magnetic core.

[0011] Preferably, a coil winding is wound around the magnetic core along the direction of the plasma central channel, and the coil winding is concentrically arranged with the plasma outer channel.

[0012] Preferably, the number of the coil windings is equal to the number of the plasma outer channels.

[0013] Preferably, the multi-channel pinch assembly further includes a capacitor bank, and the capacitor bank is electrically connected to the coil winding.

[0014] To solve the above technical problems, the present invention provides another technical solution as follows: an extreme ultraviolet light generating device for generating extreme ultraviolet light, the extreme ultraviolet light generating device includes a medium delivery assembly and the multi-channel pinch assembly as described in any one of the above.

[0015] Compared with the prior art, the multi-channel pinch assembly and the extreme ultraviolet light generating device provided by the present invention have the following beneficial effects:

[0016] 1. A multi-channel pinch assembly provided in an embodiment of the present invention includes a magnetic core and a plasma outer channel group. A through plasma central channel is provided in a central region of the magnetic core. The plasma outer channel group includes at least one plasma outer channel. Both ends of each plasma outer channel are respectively communicated with both ends of the plasma central channel to form a closed-loop channel, so as to provide a vacuum chamber outside the magnetic core to accommodate a working medium and provide a guide for the flow of an induced current.

[0017] It can be understood that the connection of multiple plasma outer channels to the plasma central channel causes multiple currents to converge in the plasma central channel, providing a higher axial current for the plasma Z-Pinch, enhancing the radial confinement magnetic field, and suppressing plasma instabilities during the Z-pinch process.

[0018] In addition, the plasma outer channel can accommodate a working medium. By limiting the diffusion of the plasma through the channel wall, the plasma is concentrated in the channel to participate in the work, thereby improving the utilization efficiency of the working medium; and increasing the plasma density in the plasma loop, suppressing filamentary discharge and arc discharge of the plasma, thereby improving the energy conversion efficiency from the power supply to the plasma.

[0019] 2. In each multi-channel pinch assembly provided by the embodiments of the present invention, a connection structure is provided between each plasma outer channel and the plasma central channel. The connection structure is provided with connection holes, and each plasma outer channel communicates with the plasma central channel through the connection holes. The plasma outer channels and the plasma central channel are hermetically connected through the connection structure, effectively restricting the working medium in the channels from diffusing around, thereby effectively improving the utilization efficiency of the working medium.

[0020] 3. A sleeve is provided in the middle region of the magnetic core in the multi-channel pinch assembly provided by the embodiments of the present invention. The plasma central channel is formed inside the sleeve, and the sleeve is detachably connected to the magnetic core.

[0021] It can be understood that the plasma central channel is the Z-pinch generation region. During the Z-pinch process, a high-temperature and high-density plasma will be formed, causing loss to the sleeve. The detachable design of the sleeve and the magnetic core facilitates replacing the damaged sleeve with a new one so that the multi-channel pinch assembly can continue to operate normally.

[0022] 4. The inner wall of the sleeve in the multi-channel pinch assembly provided by the embodiments of the present invention is made of a material with high temperature resistance and anti-plasma corrosion.

[0023] It can be understood that the inside of the sleeve is the Z-pinch generation area. During the Z-pinch process, the high-temperature and high-density plasma generated will directly contact the inner wall of the sleeve, thereby causing damage to it. Using a material with high temperature resistance and anti-plasma corrosion to prepare the inner wall of the sleeve that will directly contact the high-temperature and high-density plasma can effectively prevent the erosion of the high-temperature and high-density plasma in the Z-pinch generation area on the sleeve and extend the service life of the sleeve.

[0024] 5. A cooling layer is provided between the sleeve and the magnetic core in the multi-channel pinch assembly provided by the embodiments of the present invention.

[0025] The power-on heating of the magnetic core and the contact of the sleeve with the high-temperature plasma will both cause the system temperature to rise. By providing a cooling layer between the magnetic core and the sleeve, cooling and protection are provided for the magnetic core and the sleeve, thereby avoiding the decline in device performance and energy loss caused by the increase in the system temperature.

[0026] 6. In the multi-channel pinch assembly provided by the embodiments of the present invention, a coil winding is wound around the magnetic core along the direction of the plasma central channel. The coil winding is concentrically arranged with the plasma outer channels, facilitating the staggered arrangement of the coil winding and reducing the leakage magnetic flux.

[0027] 7. The multi-channel pinch assembly in the multi-channel pinch assembly provided by the embodiments of the present invention further includes a capacitor bank. The capacitor bank is electrically connected to the coil winding to provide an initial current for the multi-channel pinch assembly.

[0028] 8. An extreme ultraviolet light generating device provided by an embodiment of the present invention is used to generate extreme ultraviolet light. The extreme ultraviolet light generating device includes a medium delivery component and the multi-channel pinch component described in any one of the above. It can be understood that the extreme ultraviolet light generating device provided by this embodiment has the same beneficial effects as the multi-channel pinch component described in any one of the above, and will not be elaborated here.

Description of the Drawings

[0029] Figure 1 It is a top view of the multi-channel pinch component provided by the first embodiment of the present invention.

[0030] Figure 2 It is a three-dimensional principle schematic diagram of the multi-channel pinch component provided by the first embodiment of the present invention.

[0031] Figure 3 It is a schematic diagram of the Z-Pinch principle of the multi-channel pinch component provided by the first embodiment of the present invention.

[0032] Figure 4 It is a three-dimensional structure schematic diagram of the sleeve of the multi-channel pinch component provided by the first embodiment of the present invention.

[0033] Figure 5 It is one of the connection structure schematic diagrams of the multi-channel pinch component provided by the first embodiment of the present invention.

[0034] Figure 6 It is a side view of the second connection structure schematic diagram of the multi-channel pinch component provided by the first embodiment of the present invention.

[0035] Figure 7 It is a three-dimensional structure diagram of the second connection structure schematic diagram of the multi-channel pinch component provided by the first embodiment of the present invention.

[0036] Figure 8 It is a schematic diagram of the plasma channel connection cross-section of the multi-channel pinch component provided by the first embodiment of the present invention.

[0037] Explanation of the reference numerals in the drawings:

[0038] 10. Multi-channel pinch component; 20. Extreme ultraviolet light generating device;

[0039] 1. Plasma central channel; 2. Sleeve; 3. Cooling layer;

[0040] 4. Magnetic core; 5. Coil winding; 6. Plasma outer channel; 7.

[0041] Capacitor bank; 8. Connection structure; 9. Connection hole.

Detailed Embodiments

[0042] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0043] In the embodiments provided by the present invention, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined according to A. However, it should also be understood that determining B according to A does not mean determining B only according to A, and B can also be determined according to A and / or other information.

[0044] It should be understood that the "one embodiment" or "an embodiment" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present invention. Therefore, the "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. Those skilled in the art should also be aware that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0045] In various embodiments of the present invention, it should be understood that the magnitude of the sequence numbers of the above processes does not necessarily mean the inevitable sequence of execution. The execution sequence of each process should be determined according to its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.

[0046] In the flowcharts and block diagrams in the drawings of the present invention, the possible architectures, functions and operations of systems, methods and computer program products according to various embodiments of the present application are illustrated. In this regard, each block in the flowchart or block diagram may represent a module, a program segment, or a part of code, and the module, program segment, or part of code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementation solutions, the functions marked in the blocks may also occur in a different order from that marked in the drawings. For example, two consecutive blocks shown may actually be executed substantially in parallel, and they may sometimes be executed in the reverse order, which is determined based on the functions involved. It should be particularly noted that each block in the block diagram and / or flowchart, and the combination of blocks in the block diagram and / or flowchart, can be implemented by a dedicated hardware-based system for performing the specified functions or operations, or can be implemented by a combination of dedicated hardware and computer instructions.

[0047] Z-pinch, also known as Z-Pinch, is the self-pinch effect formed in the radial (R direction) of the plasma under the action of the Lorentz force generated by a strong axial (Z direction) current. When the current is strong enough, this pinch effect will generate a huge plasma centripetal implosion and form a high-temperature and high-density plasma near the axis.

[0048] Regarding the electrodeless Z-Pinch extreme ultraviolet light based on the inductive coupling effect, the plasma Z-Pinch process is the light-emitting source point. And since there is no metal electrode participating in the plasma reaction, it can not only inhibit debris pollution, eliminate the electrode heat load problem, better protect optical devices, but also effectively increase the repetition frequency, improve the light source stability of the discharge plasma, and has the advantages of small size, simple structure, high efficiency, low investment and operation costs, and easy operation and maintenance.

[0049] Please refer to Figures 1-3 , the first embodiment of the present invention provides a multi-channel pinch assembly 10 that uses the electrodeless Z-Pinch technology to generate extreme ultraviolet light, including a magnetic core 4 and a plasma outer channel group. A through plasma central channel 1 is provided in the middle region of the magnetic core 4. The plasma outer channel group includes at least one plasma outer channel 6. Both ends of each plasma outer channel 6 are respectively connected to both ends of the plasma central channel 1 to form a closed-loop channel, so as to provide a vacuum chamber outside the magnetic core 4 to accommodate the working medium and provide a guide for the flow of the induced current.

[0050] It should be noted that a medium delivery device is externally connected to the closed-loop channel formed by the connection of the plasma central channel 1 and the plasma outer channel 6 to deliver the working medium into the closed-loop channel to participate in the Z-pinch process. It should be understood that when no working medium is input, the inside of the closed-loop channel is a vacuum environment to avoid the influence of the existence of impurities on the plasma reaction. The medium delivery device is hermetically connected to the closed-loop channel to prevent external gas from entering the closed-loop channel through its connection end and affecting the Z-pinch process. Flushing the working medium into the vacuum environment is beneficial to the ionization of the working medium; specifically, the medium delivery device further includes a near gas inlet and / or outlet device to control the entry and exit of the working medium in the closed-loop channel, so that when the medium delivery device delivers the working medium to the closed-loop channel, the closed-loop channel can still maintain a closed-loop state and no other miscellaneous substances will enter the closed-loop channel.

[0051] It can be understood that when a pulsed current is received, an induced current will be generated in the closed plasma channel composed of the plasma central channel 1 and each plasma outer channel 6, and the current in each plasma outer channel 6 converges towards the plasma central channel 1. Finally, the current in the plasma central channel 1 is the sum of the currents of all channels. It should be understood that the plasma central channel 1 is the Z-pinch occurrence area.

[0052] The current in all the outer plasma channels 6 converges towards the central plasma channel 1, providing a strong axial current to the central plasma channel 1 to enhance the radial confinement magnetic field in the Z-pinch generation region to confine the activities of the plasma, effectively suppressing the plasma instability during the Z-pinch process.

[0053] Specifically, the outer plasma channel 6 is a vacuum chamber that can accommodate the working medium and confine the plasma. The central plasma channel 1 communicates with the outer plasma channel 6 to form a closed-loop channel, effectively restricting the diffusion of the working medium in the channel into the surrounding space, making the plasma formed by its ionization more concentrated, increasing the carrier density in the plasma loop, and effectively suppressing the filamentary discharge and arc discharge of the plasma, thereby improving the energy conversion efficiency from the power supply to the plasma.

[0054] Optionally, the working medium includes, but is not limited to, one or more of nitrogen, xenon, helium, argon, or other gases or metals that can radiate EUV light, and can be specifically selected according to actual application requirements.

[0055] Furthermore, please refer to Figure 4 together. A sleeve 2 is provided in the middle region of the magnetic core 4, and the central plasma channel 1 is formed within the sleeve 2.

[0056] It should be noted that the magnetic core 4 used in this embodiment is specifically a toroidal magnetic core with a high magnetic permeability and an insulating coating. The high magnetic permeability of the magnetic core 4 can provide a low magnetic resistance and concentrate the magnetic field, thereby reducing the magnetic flux loss; the insulating coating can effectively isolate and reduce the magnetic field interference, reducing the magnetic induction intensity and magnetic energy loss to improve the magnetic energy utilization efficiency.

[0057] In a specific embodiment, the sleeve 2 is embedded in the middle annular hole of the magnetic core 4, and the sleeve 2 has a chamber inside that can accommodate the working medium. When the magnetic core 4 is energized, electrical energy enters the sleeve 2 through electromagnetic induction to ionize the working medium to generate plasma, thereby forming the central plasma channel 1. It should be understood that the circle formed by the magnetic induction lines of the plasma column in the central plasma channel 1 is concentric with the sleeve 2.

[0058] It can be understood that Z-Pinch is caused by an axially flowing current driving a toroidal magnetic field. In this embodiment, the sleeve 2 is concentric with the toroidal magnetic field and is specifically an axially symmetric structure, which can thus stabilize the magnetic field, provide a favorable protection for the Z-Pinch system, enable the Z-Pinch process to proceed smoothly, and generate EUV radiation.

[0059] Furthermore, please refer to Figure 5, a connection structure 8 is provided between each plasma outer channel 6 and the plasma central channel 1. The connection structure 8 is provided with a connection hole 9, and each plasma outer channel 6 communicates with the plasma central channel 1 through the connection hole 9.

[0060] In some specific embodiments, the connection structure 8 is a sheet-like structure that covers the opening of the sleeve 2 and is hermetically connected to the sleeve 2; a connection hole 9 with the same shape and size as the opening of the plasma outer channel 6 is provided on the connection structure 8, and the opening of the plasma outer channel 6 is hermetically connected to the connection hole 9, so as to realize the communication between the plasma central channel 1 and the plasma outer channel 6 to form a closed-loop channel, so as to provide guidance for the flow of the induced current and prevent the working medium from escaping.

[0061] In some other specific embodiments, the connection structure 8 is a boss structure, the middle protruding part of which is in interference connection with the opening end of the sleeve 2, and a connection hole 9 communicating with the plasma outer channel 6 is provided at the top connected to the protruding part. It should be understood that in the actual structure, through holes are also provided in the protruding part of the connection structure 8, and the through holes communicate with the connection hole 9. Therefore, the sleeve 2 and each plasma outer channel 6 are connected through the connection structure 8 to form a closed channel. For details, please refer to Figure 6 and Figure 7 。

[0062] Optionally, the connection structure 8 and the sleeve 2 can be detachably connected or integrally formed.

[0063] In a feasible implementation manner, the connection structure 8 and the sleeve 2 are provided with mating thread structures to make them hermetically connected.

[0064] In another feasible implementation manner, one of the connection structure 8 and the sleeve 2 is provided with a groove, and the other is provided with a protrusion that is in interference fit with it, and the two are snap-connected to make the connection structure 8 and the sleeve 2 hermetically connected.

[0065] It should be understood that connection structures 8 are provided at both ends of the plasma central channel 1 to connect with the plasma outer channels 6.

[0066] Furthermore, the connection structure 8 is provided with medium inlet and outlet holes, and the working medium enters and exits the plasma outer channel 6 and the plasma central channel 1 through the medium inlet and outlet holes.

[0067] In some specific embodiments, in addition to the connection hole 9, the connection structure 8 is also provided with medium inlet and outlet holes to realize the entry and exit of the working medium in the closed-loop channel formed by the communication between the plasma central channel 1 and the plasma outer channel 6, so as to provide materials for the radiation of EUV.

[0068] In some feasible embodiments, the medium inlet / outlet holes include a medium inlet hole and a medium outlet hole, and the medium inlet hole and the medium outlet hole are respectively arranged on two connection structures 8 at both ends of the plasma central channel 1.

[0069] In some other specific embodiments, the medium inlet / outlet holes are opened on the channel walls of the plasma outer channel 6 and / or the plasma central channel 1 and communicate with the channels, so as to realize the inlet and outlet of the working medium in the closed-loop channel and provide materials for the radiation of the EUV source.

[0070] In particular, in the actual embodiment, the connection structure 8 can also be used as the connection between the EUV radiation collection system and the Z-Pinch light source to increase the EUV collection channel.

[0071] Furthermore, the inner wall of the sleeve 2 is made of a material with high temperature resistance and plasma corrosion resistance.

[0072] It can be understood that the inside of the sleeve 2 is the Z-Pinch generation area, and the high-temperature and high-density plasma generated during the Z-Pinch process will directly contact the inner wall of the sleeve 2, thus causing damage to it. Using a material with high temperature resistance and plasma corrosion resistance to prepare the inner wall of the sleeve 2 that will directly contact the high-temperature and high-density plasma can effectively prevent the erosion of the high-temperature and high-density plasma in the Z-Pinch generation area on the sleeve 2 and extend the service life of the sleeve 2.

[0073] Specifically, the sleeve 2 can be entirely made of a material with high temperature resistance and plasma corrosion resistance, or the main body of the sleeve 2 is made of a conventional material, but at least its inner surface is covered with a material coating with high temperature resistance and plasma corrosion resistance to inhibit the erosion of the high-temperature and high-density plasma in the sleeve 2 on the sleeve 2, thereby inhibiting debris contamination.

[0074] It can be understood that during the Z-Pinch process of the multi-channel pinch assembly 10 provided in this embodiment, there is also high-temperature and high-density plasma in each plasma outer channel 6; secondly, the connection structure 8 for connecting the plasma central channel 1 and the plasma outer channel 6 is also exposed to the high-temperature and high-density plasma region.

[0075] Therefore, in this embodiment, the tube walls of each plasma outer channel 6 and the connection structure 8 are both made of a material with high temperature resistance and plasma corrosion resistance, or their outer surfaces are coated with a material coating with high temperature resistance and plasma corrosion resistance to inhibit the erosion of the high-temperature and high-density plasma, thereby extending the service life of the structural device. It should be understood that all device structures that will contact the high-temperature and high-density plasma can be prepared with a material with high temperature resistance and plasma corrosion resistance.

[0076] Optionally, materials resistant to high temperatures and plasma corrosion include, but are not limited to, stainless steel (304, 316), aluminum alloy, high carbon steel, alumina, silicon carbide, graphite, tungsten, etc., and specific selections can be made according to actual situations without excessive limitations herein.

[0077] Furthermore, the sleeve 2 is detachably connected to the magnetic core 4.

[0078] It can be understood that the inside of the sleeve 2 is the Z-Pinch generation area. During the Z-Pinch process, a high-temperature and high-density plasma is formed, which causes loss to the sleeve 2. The detachable design of the sleeve 2 and the magnetic core 4 enables the sleeve 2 to be replaced with a new one when it is damaged, so that the multi-channel pinch assembly 10 can continue to operate normally.

[0079] Furthermore, a cooling layer 3 is provided between the sleeve 2 and the magnetic core 4.

[0080] It can be understood that during the Z-Pinch generation process, the magnetic core 4 heats up due to the input of current, causing its own temperature to rise; the working gas inside the sleeve 2 is ionized under the action of electromagnetic induction to generate a high-temperature and high-density plasma, and the temperature of the sleeve 2 also increases due to direct contact with the high-temperature and high-density plasma. That is, the temperature of the multi-channel pinch assembly 10 rises with the occurrence of Z-Pinch, resulting in a decline in device performance, an increase in energy consumption, and a reduction in energy conversion efficiency.

[0081] Therefore, in this embodiment, a cooling layer 3 is provided in the interlayer between the sleeve 2 and the magnetic core 4, and a cooling medium is filled therein to cool and protect the multi-channel pinch assembly 10, thereby avoiding problems such as a decline in device performance, energy loss, and reduction in energy conversion efficiency caused by an increase in system temperature.

[0082] Optionally, the cooling medium that can be filled in the cooling layer 3 includes, but is not limited to, gases, liquids, solids, and their mixtures, etc., as long as it can play a cooling role, and specific selections can be made according to actual situations without excessive limitations herein.

[0083] Furthermore, a coil winding 5 is wound around the magnetic core 4 along the direction of the plasma central channel 1, and the coil winding 5 is concentrically arranged with the plasma outer channel 6, which is convenient for the coil winding 5 to be arranged in a staggered manner to reduce leakage magnetic flux.

[0084] Specifically, the multi-channel pinch assembly 10 further includes a capacitor bank 7, and the capacitor bank 7 is electrically connected to the coil winding 5 to provide an initial current for the multi-channel pinch assembly.

[0085] In a specific embodiment, the capacitor bank 7 is electrically connected to the coil winding 5. When the capacitor bank 7 inputs a pulsed current into the coil winding 5, due to the change in current, it will cause a change in the magnetic flux in the magnetic core 4, thereby generating an induced electromotive force, ionizing the working medium in the plasma central channel 1 and all plasma outer channels 6, and forming a plasma loop. When the current pulses are continuously input, an induced current will be generated in the closed channel composed of the plasma central channel 1 and the plasma outer channels 6, thereby generating a radial magnetic field and exciting the plasma z-pinch process. At the same time, the plasma density rapidly increases, the temperature rises, the thermal pressure increases, and a variety of plasma radiations are generated, including EUV radiation.

[0086] It can be understood that the electrical energy output by the capacitor bank 7 is coupled to the plasma in the multi-channel pinch assembly 10 in a manner of electromagnetic induction, thereby forming a concentric structure of the plasma central channel 1, the magnetic core 4, and the plasma outer channels 6. Specifically, each plasma outer channel 6 is concentric with the plasma central channel 1 and the magnetic core 4, and the coil winding 5 is wound around the magnetic core 4 along the direction of the plasma central channel 1, that is, the coil winding 5 and the plasma outer channels 6 are also concentric structures.

[0087] In particular, the coil windings 5 are symmetrically distributed circumferentially around the magnetic core 4.

[0088] Furthermore, the number of coil windings 5 is equal to the number of plasma outer channels 6, which can not only control the stray inductance but also reduce the magnitude of the input current of the capacitor bank 7.

[0089] Optionally, the number of coil windings 5 can be 3, 4, 6, 9, etc., and the number of plasma outer channels 6 can also be 3, 4, 6, 9, etc. Specifically, it is selected according to the actual application requirements and the complexity of the device, and no further limitations are imposed here.

[0090] Please refer to Figure 8 , in some specific embodiments, the multi-channel pinch assembly 10 is provided with three plasma outer channels 6, and the magnetic core 4 is wound circumferentially with three groups of coil windings 5. The plasma central channel 1, the coil windings 5, and the plasma outer channels 6 are concentrically arranged, and the included angles between adjacent plasma outer channels 6 and coil windings 5 are all 120 degrees.

[0091] Specifically, the plasma outer channels 6 and the coil windings 5 are arranged in a circumferentially staggered manner to reduce the leakage magnetic flux.

[0092] It should be noted that each coil winding 5 is electrically connected to a capacitor bank 7. In this embodiment, each of the three groups of coil windings 5 is connected to a capacitor bank 7, and these three capacitor banks 7 are connected in parallel with each other to provide an initial current for the multi-channel pinch assembly 10.

[0093] Understandably, the capacitor bank 7 is connected in parallel to provide an initial current to the multi-channel pinch assembly 10, effectively avoiding the interruption of power transmission caused by the failure of a single capacitor bank 7, and providing a more stable and reliable power support for the multi-channel pinch assembly 10.

[0094] Specifically, the selection of the parameters of the capacitor bank 7 depends on the pulse energy and pulse width required by the multi-channel pinch assembly 10.

[0095] Furthermore, the second embodiment of the present invention also provides an extreme ultraviolet light generating device 20 for generating extreme ultraviolet light. The extreme ultraviolet light generating device 20 includes a medium delivery assembly and the multi-channel pinch assembly described in any one of the above. It has the same beneficial effects as the multi-channel pinch assembly provided in the first embodiment, which will not be elaborated here.

[0096] Compared with the prior art, a multi-channel pinch assembly and an extreme ultraviolet light generating device provided by the present invention have the following beneficial effects:

[0097] 1. A multi-channel pinch assembly provided in an embodiment of the present invention includes a magnetic core and a plasma outer channel group. A through plasma central channel is provided in the middle region of the magnetic core. The plasma outer channel group includes at least one plasma outer channel. Both ends of each plasma outer channel are respectively connected to both ends of the plasma central channel to form a closed-loop channel, so as to provide a vacuum chamber outside the magnetic core to accommodate the working medium and provide a guide for the circulation of the induced current.

[0098] Understandably, the connection of multiple plasma outer channels to the plasma central channel converges multiple-channel currents in the plasma central channel, providing a higher axial current for the plasma Z-Pinch, enhancing the radial confinement magnetic field, and suppressing plasma instabilities during the Z-pinch process.

[0099] In addition, the plasma outer channel can accommodate the working medium. By limiting the diffusion of the plasma through the channel wall, it is concentrated in the channel to participate in the work, thereby improving the utilization efficiency of the working medium; and increasing the plasma density in the plasma loop, suppressing filamentary discharge and arc discharge of the plasma, thereby improving the energy conversion efficiency from the power supply to the plasma.

[0100] 2. A connection structure is provided between each plasma outer channel and the plasma central channel in the multi-channel pinch assembly provided in the embodiment of the present invention. The connection structure is provided with connection holes, and each plasma outer channel and the plasma central channel are connected through the connection holes. The plasma outer channel and the plasma central channel are hermetically connected through the connection structure, effectively restricting the diffusion of the working medium in the channel to the surroundings, thereby effectively improving the utilization efficiency of the working medium.

[0101] 3. In the multi-channel pinch assembly provided by the embodiment of the present invention, a sleeve is provided in the middle region of the magnetic core, a plasma central channel is formed inside the sleeve, and the sleeve is detachably connected to the magnetic core.

[0102] It can be understood that the plasma central channel is the Z-pinch generation region. During the Z-pinch process, a high-temperature and high-density plasma will be formed, which will cause loss to the sleeve. The detachable design of the sleeve and the magnetic core facilitates replacing the damaged sleeve with a new one so that the multi-channel pinch assembly can continue to operate normally.

[0103] 4. The inner wall of the sleeve in the multi-channel pinch assembly provided by the embodiment of the present invention is made of a material with high temperature resistance and anti-plasma corrosion.

[0104] It can be understood that the inside of the sleeve is the Z-pinch generation area. During the Z-pinch process, the high-temperature and high-density plasma generated will directly contact the inner wall of the sleeve, thereby causing damage to it. Using a material with high temperature resistance and anti-plasma corrosion to prepare the inner wall of the sleeve that will directly contact the high-temperature and high-density plasma can effectively prevent the erosion of the high-temperature and high-density plasma in the Z-pinch generation area to the sleeve and extend the service life of the sleeve.

[0105] 5. A cooling layer is provided between the sleeve and the magnetic core in the multi-channel pinch assembly provided by the embodiment of the present invention.

[0106] The power-on heating of the magnetic core and the contact of the sleeve with the high-temperature plasma will both cause the system temperature to rise. By providing a cooling layer between the magnetic core and the sleeve, cooling protection is provided for the magnetic core and the sleeve, thereby avoiding the decline in device performance and energy loss caused by the increase in the system temperature.

[0107] 6. In the multi-channel pinch assembly provided by the embodiment of the present invention, a coil winding is wound around the magnetic core along the direction of the plasma central channel, and the coil winding is concentrically arranged with the plasma outer channel, which is convenient for the coil winding to be arranged in a staggered manner to reduce the leakage magnetic flux.

[0108] 7. The multi-channel pinch assembly in the multi-channel pinch assembly provided by the embodiment of the present invention further includes a capacitor bank, and the capacitor bank is electrically connected to the coil winding to provide an initial current for the multi-channel pinch assembly.

[0109] 8. An extreme ultraviolet light generating device provided by the embodiment of the present invention is used to generate extreme ultraviolet light. The extreme ultraviolet light generating device includes a medium delivery assembly and the multi-channel pinch assembly as described in any one of the above. It can be understood that the extreme ultraviolet light generating device provided in this embodiment has the same beneficial effects as the multi-channel pinch assembly as described in any one of the above, and will not be elaborated here.

[0110] The above has introduced in detail a multi-channel pinch assembly and an extreme ultraviolet light generating device disclosed in the embodiments of the present invention. Specific examples are used herein to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention. Any modifications, equivalent substitutions, and improvements made within the principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-channel pinch assembly, characterized in that: It includes a magnetic core and a plasma outer channel group. A through plasma central channel is provided in the middle region of the magnetic core. The plasma outer channel group includes at least one plasma outer channel. Both ends of each plasma outer channel are respectively communicated with both ends of the plasma central channel to form a closed-loop channel.

2. The multi-channel pinch assembly according to claim 1, wherein: A connection structure is provided between each plasma outer channel and the plasma central channel. The connection structure is provided with connection holes. Each plasma outer channel and the plasma central channel are communicated through the connection holes.

3. The multi-channel pinch assembly according to claim 1, characterized in that: A sleeve is provided in the middle region of the magnetic core. The plasma central channel is formed inside the sleeve.

4. The multi-channel pinch assembly according to claim 3, wherein: The sleeve is detachably connected to the magnetic core.

5. The multi-channel pinch assembly according to claim 3, characterized in that: The inner wall of the sleeve is made of a material that is resistant to high temperature and plasma corrosion.

6. The multi-channel pinch assembly according to claim 3, characterized in that: A cooling layer is provided between the sleeve and the magnetic core.

7. The multi-channel pinch assembly according to claim 1, wherein: The magnetic core is wound with a coil winding along the direction of the plasma central channel. The coil winding and the plasma outer channels are concentrically arranged.

8. The multi-channel pinch assembly according to claim 7, characterized in that: The number of the coil windings is equal to the number of the plasma outer channels.

9. The multi-channel pinch assembly according to claim 7, characterized in that: The multi-channel pinch assembly further includes a capacitor bank, and the capacitor bank is electrically connected to the coil winding.

10. An extreme ultraviolet light generating device for generating extreme ultraviolet light, characterized in that: The extreme ultraviolet light generating device includes a medium delivery assembly and the multi-channel pinch assembly according to any one of claims 1-9.

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