Tail gas dehumidification device and tail gas dehumidification method

Abstract

The invention discloses a tail gas dehumidification device and a tail gas dehumidification method. The device comprises an upper cavity, a lower cavity mounted below the upper cavity, and a liquid collecting box mounted below the lower cavity, wherein the upper cavity is cylindrical; the center of the top surface of the upper cavity is provided with an air outlet, and the axis of the upper cavity is provided with an air outlet pipe extending from the air outlet to the bottom surface of the upper cavity; the bottom surface of the upper cavity is isolated from the top surface of the lower cavity through a partition plate, and the partition plate is provided with a liquid dropping opening for discharging liquid to the lower cavity; the side wall of the upper cavity is provided with a first transverse pipe arranged in the tangential direction, and the position of a connector of the first transverse pipe and the side wall of the upper cavity is higher than the position of the bottom of the air outlet pipe. The tail gas is cleaned through spraying of the nozzle; water vapor is reduced through the air inlet and the first transverse pipe arranged on the upper cavity in the tangential direction.

Description

Technical Field

[0001] The present invention relates to tail gas dehumidification, in particular to a tail gas dehumidification device and a tail gas dehumidification method. Background Art

[0002] A large amount of corrosive, toxic and flammable gases such as fluorine-based, chlorine-based, silane-based, phosphine-based, ammonia-based gases, etc. are used in the manufacturing processes of integrated circuits, display panels, LEDs and semiconductors. These gases often remain in the tail gas after the process reaction and must be purified through tail gas treatment equipment to ensure production safety and meet environmental protection emission standards.

[0003] In response to the needs of process diversification and fine management of production lines, LocalScrubber (local tail gas treatment device) has been widely used in the tail gas treatment of single machines or small areas. Its advantages include fast response speed, small occupied space, flexible installation, and can effectively improve the decentralization and modularization level of tail gas treatment.

[0004] However, in actual applications, the tail gas treated by LocalScrubber often contains a large amount of water vapor. These water vapors come from the by-products of the process reaction. If effective dehumidification treatment is not carried out, the high-humidity gas is likely to react with the residual corrosive components to generate strong acidic liquids, corroding the backend equipment such as metal pipes, fans, valves, etc. and even affecting the safety and stability of tail gas treatment.

[0005] In the prior art, although there are certain tail gas dehumidification means, most of them are designed for large-scale centralized tail gas treatment systems and are difficult to be directly adapted to the LocalScrubber system with limited volume and rapid response. Summary of the Invention

[0006] To solve the above problems, the present invention provides a tail gas dehumidification device and a tail gas dehumidification method.

[0007] The present invention provides the following technical solution: An exhaust gas dehumidification device, comprising an upper cavity, a lower cavity installed below the upper cavity, and a liquid collection tank installed below the lower cavity. The upper cavity is cylindrical; the center of the top surface of the upper cavity has an air outlet, and a gas outlet pipe extending from the air outlet to the bottom surface of the upper cavity is provided along the axis of the upper cavity; the bottom surface of the upper cavity and the top surface of the lower cavity are isolated by a partition, and the partition has a liquid dripping port for draining liquid into the lower cavity; the side wall of the upper cavity has a first horizontal pipe arranged tangentially, and the position of the interface between the first horizontal pipe and the side wall of the upper cavity is higher than the position of the bottom of the gas outlet pipe; the side wall of the lower cavity has a second horizontal pipe, and at least one nozzle for spraying is further provided in the lower cavity. The nozzle is connected to a liquid supply port through a connecting pipe, and the position of the interface between the second horizontal pipe and the side wall of the lower cavity is higher than the position of the nozzle; the bottom surface of the lower cavity has at least one exhaust gas inlet, and the bottom surface of the lower cavity is a porous mesh plate; the first horizontal pipe is connected to an upper pipe, the upper pipe is connected to a lower pipe, the lower pipe is connected to the second horizontal pipe, and the upper pipe has an air inlet; the second horizontal pipe has a compressed air interface.

[0008] In this application, the lower cavity and the liquid collection tank are closed spaces, so that the air pressure in the lower cavity is greater than the air pressure in the upper cavity when the device is operating; the exhaust gas inlet is connected to an external exhaust gas emission device through an opening on the side wall of the lower cavity or the liquid collection tank; the liquid collection tank is detachable to discharge the collected liquid, or a switchable liquid discharge port can be provided on the side wall of the liquid collection tank.

[0009] Further, the upper cavity and the lower cavity are connected by a flange.

[0010] Further, the mating surface of the flanges of the upper cavity and the lower cavity has a seal.

[0011] Further, the upper cavity and the lower cavity are connected by welding.

[0012] Further, the lower cavity and the liquid collection tank are connected by a flange.

[0013] Further, the lower cavity and the liquid collection tank are connected by welding.

[0014] Further, the upper pipe is connected to the air inlet, the upper pipe is connected to the lower pipe, the lower pipe is connected to the second horizontal pipe, and the second horizontal pipe is connected to the compressed air interface through a clamp.

[0015] A tail gas dehumidification method based on the above-mentioned tail gas dehumidification device includes the following steps: The tail gas is introduced into the lower cavity through the tail gas inlet. The compressed air interface is connected to an air compressor, so that compressed air is introduced into the lower cavity through the second horizontal pipe. At the same time, the nozzle sprays water mist on the tail gas to clean the tail gas. The cleaned gas mixed with the compressed air enters the lower pipe through the second horizontal pipe, and then enters the upper pipe. At the same time, dry air is introduced into the upper pipe through the air inlet to reduce the air humidity. The mixed air is tangentially sent into the upper cavity through the first horizontal pipe, so as to form a cyclone around the inner wall of the upper cavity, further separating water vapor; The separated air is discharged from the upper cavity through the air outlet via the air outlet pipe; The air separated in the upper cavity enters the lower cavity through the partition plate, drips into the bottom of the lower cavity through the liquid dripping port, and enters the liquid collecting box through the porous mesh plate.

[0016] In some embodiments, the air outlet can also be connected to an air extraction device to accelerate the air flow and make the processing speed of the device faster.

[0017] The beneficial effects of the present invention are as follows: (1) A pressure difference is generated between the lower cavity and the upper cavity through the tail gas inlet and the compressed air interface, so that air flows from the lower cavity to the upper cavity; (2) The tail gas is cleaned by spraying with the nozzle; (3) The water vapor is reduced through the air inlet and the first horizontal pipe arranged tangentially to the upper cavity; (4) The water vapor is concentrated through the settings of the partition plate, the liquid dripping port, the porous mesh plate and the liquid collecting box, enabling the device to operate continuously. Description of the Drawings

[0018] Figure 1 It is a cross-sectional view of the tail gas dehumidification device of Embodiment 1 of the present invention; Figure 2 It is Figure 1 The enlarged view of part A in Figure 3 It is the working principle diagram of the tail gas dehumidification method of Embodiment 2 of the present invention; Figure 4 It is a cross-sectional view of the tail gas dehumidification device of Embodiment 3 of the present invention; Wherein, the upper cavity 1, the air outlet 1-1, the air outlet pipe 1-2, the first flange 1-3, the lower cavity 2, the nozzle 2-1, the connecting pipe 2-2, the liquid supply port 2-3, the tail gas inlet 2-4, the porous mesh plate 2-5, the second flange 2-6, the liquid collecting box 3, the partition plate 4, the liquid dripping port 4-1, the first horizontal pipe 5, the second horizontal pipe 6, the upper pipe 7, the lower pipe 8, the air inlet 9, the compressed air interface 10, the fastening member 11, the sealing member 12. Detailed Embodiments

[0019] To further elaborate on the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following, in conjunction with the accompanying drawings and preferred embodiments, details the specific implementation manners, structures, features and their effects of the present invention as follows.

[0020] The present invention cleans the tail gas through the spraying of a nozzle; reduces water vapor through the air inlet and the first horizontal pipe disposed tangentially to the upper cavity.

[0021] The following further describes the embodiments of the present invention in multiple embodiments.

[0022] Embodiment 1 As Figures 1-2 , a tail gas dehumidification device includes an upper cavity 1, a lower cavity 2 installed below the upper cavity 1, and a liquid collection tank 3 installed below the lower cavity 2. The upper cavity 1 is cylindrical; the center of the top surface of the upper cavity 1 has an air outlet 1-1, and the axis of the upper cavity 1 has an air outlet pipe 1-2 extending from the air outlet 1-1 to the bottom surface of the upper cavity 1; the bottom surface of the upper cavity 1 and the top surface of the lower cavity 2 are isolated by a partition plate 4, and the partition plate 4 has a liquid dripping port 4-1 for draining liquid to the lower cavity 2; the side wall of the upper cavity 1 has a first horizontal pipe 5 disposed tangentially, and the position of the interface between the first horizontal pipe 5 and the side wall of the upper cavity 1 is higher than the position of the bottom of the air outlet pipe 1-2; the side wall of the lower cavity 2 has a second horizontal pipe 6, and the lower cavity 2 also has two nozzles 2-1 for spraying. The nozzles 2-1 are connected to a liquid supply port 2-3 through a connecting pipe 2-2. The position of the interface between the second horizontal pipe 6 and the side wall of the lower cavity 2 is higher than the position of the nozzles 2-1; the bottom surface of the lower cavity 2 has two tail gas inlets 2-4, and the bottom surface of the lower cavity 2 is a porous mesh plate 2-5; the first horizontal pipe 5 is connected to an upper pipe 7, the upper pipe 7 is connected to a lower pipe 8, the lower pipe 8 is connected to the second horizontal pipe 6, and the upper pipe 7 has an air inlet 9; the second horizontal pipe 6 has a compressed air interface 10.

[0023] In this embodiment, the upper cavity 1 and the lower cavity 2 are connected by a first flange 1-3 and a second flange 2-6, and the first flange 1-3 and the second flange 2-6 are fixed by a fastening member 11. Similarly, the lower cavity 2 and the liquid collection tank 3 are also connected by a flange and fixed by a fastening member.

[0024] In this embodiment, the lower pipe 8 is a corrugated pipe, and ordinary pipe fittings can also be used.

[0025] In this embodiment, the upper pipe 7 and the air inlet 9, the upper pipe 7 and the lower pipe 8, the lower pipe 8 and the second horizontal pipe 6, and the second horizontal pipe 6 and the compressed air interface 10 are all connected by clamps. In some embodiments, other connection methods can also be used.

[0026] Embodiment 2, as Figure 3, the tail gas dehumidification method using the tail gas dehumidification device of Embodiment 1 includes the following steps: Introduce the tail gas into the lower cavity 2 through the tail gas inlet 2-4. Connect the compressed air interface 10 to an air compressor, and thus introduce compressed air into the lower cavity 2 through the second horizontal pipe 6. At the same time, the nozzle 2-1 sprays water mist on the tail gas to clean the tail gas. The gas mixture after cleaning and the compressed air enter the lower pipe 8 through the second horizontal pipe 6, and then enter the upper pipe 7. At the same time, dry air is introduced into the upper pipe 7 through the air inlet 9 to reduce the air humidity. The mixed air is tangentially fed into the upper cavity 1 through the first horizontal pipe 5 to form a cyclone around the inner wall of the upper cavity 1, thereby further separating water vapor; the air after separation is discharged from the upper cavity 1 through the air outlet pipe 1-2 via the air outlet 1-1; the air separated in the upper cavity 1 enters the lower cavity 2 through the partition plate 4, drips into the bottom of the lower cavity 2 through the liquid dripping port 4-1, and enters the liquid collection tank 3 through the porous mesh plate 2-5.

[0027] Embodiment 3 As Figure 4 , a tail gas dehumidification device includes an upper cavity 1, a lower cavity 2 installed below the upper cavity 1, and a liquid collection tank 3 installed below the lower cavity 2. The upper cavity 1 is cylindrical; the center of the top surface of the upper cavity 1 has an air outlet 1-1, and the axis of the upper cavity 1 has an air outlet pipe 1-2 extending from the air outlet 1-1 to the bottom surface of the upper cavity 1; the bottom surface of the upper cavity 1 and the top surface of the lower cavity 2 are separated by a partition plate 4, and the partition plate 4 has a liquid dripping port 4-1 for discharging liquid to the lower cavity 2; the side wall of the upper cavity 1 has a first horizontal pipe 5 arranged tangentially, and the position of the interface between the first horizontal pipe 5 and the side wall of the upper cavity 1 is higher than the position of the bottom of the air outlet pipe 1-2; the side wall of the lower cavity 2 has a second horizontal pipe 6, and there are also four nozzles 2-1 for spraying in the lower cavity 2. The nozzles 2-1 are connected to the liquid supply port 2-3 through the connecting pipe 2-2, and the position of the interface between the second horizontal pipe 6 and the side wall of the lower cavity 2 is higher than the position of the nozzles 2-1; the bottom surface of the lower cavity 2 has a tail gas inlet 2-4, and the bottom surface of the lower cavity 2 is a porous mesh plate 2-5; the first horizontal pipe 5 is connected to the upper pipe 7, the upper pipe 7 is connected to the lower pipe 8, the lower pipe 8 is connected to the second horizontal pipe 6, and the upper pipe 7 has an air inlet 9; the second horizontal pipe 6 has a compressed air interface 10.

[0028] In this embodiment, the upper cavity 1 and the lower cavity 2 are connected by a first flange 1-3 and a second flange 2-6, and the first flange 1-3 and the second flange 2-6 are fixed by a fastening member 11. Similarly, the lower cavity 2 and the liquid collection tank 3 are also connected by a flange and fixed by a fastening member.

[0029] In this embodiment, the lower pipe 8 is a corrugated pipe, and ordinary pipe fittings can also be used.

[0030] In this embodiment, the upper pipe 7 is connected to the air inlet 9, the upper pipe 7 is connected to the lower pipe 8, the lower pipe 8 is connected to the second horizontal pipe 6, and the second horizontal pipe 6 is connected to the compressed air interface 10 by clamps. In some embodiments, other connection methods can also be used.

[0031] In some embodiments, the upper cavity 1 and the lower cavity 2 can be connected by welding, and the lower cavity 2 and the liquid collection tank 3 can be connected by welding.

[0032] The above are only the preferred embodiments of the present invention, and do not impose any formal limitations on the present invention. Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to equivalent embodiments by using the disclosed technical content within the scope of the technical solution of the present invention. However, as long as it does not depart from the content of the technical solution of the present invention, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. An exhaust gas dehumidification device, characterized in that, It includes an upper cavity, a lower cavity installed under the upper cavity, and a liquid collection tank installed under the lower cavity. The upper cavity is cylindrical; there is an air outlet at the center of the top surface of the upper cavity, and a gas outlet pipe extending from the air outlet to the bottom surface of the upper cavity along the axis of the upper cavity; the bottom surface of the upper cavity is isolated from the top surface of the lower cavity by a partition board, and the partition board has a drip port for draining liquid into the lower cavity; the side wall of the upper cavity has a first horizontal pipe arranged tangentially, and the position of the interface between the first horizontal pipe and the side wall of the upper cavity is higher than the position of the bottom of the gas outlet pipe; the side wall of the lower cavity has a second horizontal pipe, and there is at least one nozzle for spraying in the lower cavity. The nozzle is connected to a liquid supply port through a connecting pipe, and the position of the interface between the second horizontal pipe and the side wall of the lower cavity is higher than the position of the nozzle; the bottom surface of the lower cavity has at least one tail gas inlet, and the bottom surface of the lower cavity is a porous mesh plate; the first horizontal pipe is connected to an upper pipe, the upper pipe is connected to a lower pipe, the lower pipe is connected to the second horizontal pipe, and the upper pipe has an air inlet; the second horizontal pipe has a compressed air interface.

2. The tail gas dehumidification device according to claim 1, characterized in that, The upper cavity and the lower cavity are connected by a flange.

3. The tail gas dehumidification device according to claim 2, characterized in that, The mating surface of the flanges of the upper cavity and the lower cavity has a sealing member.

4. The tail gas dehumidification device according to claim 1, characterized in that, The upper cavity and the lower cavity are connected by welding.

5. The tail gas dehumidification device according to claim 1, characterized in that, The lower cavity and the liquid collection tank are connected by a flange.

6. The tail gas dehumidification device according to claim 1, characterized in that The lower cavity and the liquid collection tank are connected by welding.

7. The tail gas dehumidification device according to claim 1, characterized in that, The connections between the upper pipe and the air inlet, the upper pipe and the lower pipe, the lower pipe and the second horizontal pipe, and the second horizontal pipe and the compressed air interface are all connected by clamps.

8. A method for dehumidifying tail gas of the tail gas dehumidifying device according to claim 1, characterized in that, It includes the following steps: introducing the tail gas into the lower cavity through the tail gas inlet, connecting the compressed air interface to an air compressor, so as to introduce compressed air into the lower cavity through the second horizontal pipe. At the same time, the nozzle sprays water mist on the tail gas to clean the tail gas. The cleaned gas mixed with the compressed air enters the lower pipe through the second horizontal pipe, and then enters the upper pipe. At the same time, dry air is introduced into the upper pipe through the air inlet to reduce the air humidity. The mixed air is tangentially sent into the upper cavity through the first horizontal pipe, so as to form a cyclone around the inner wall of the upper cavity to further separate water vapor. The air after separation is discharged from the upper cavity through the gas outlet pipe via the air outlet; the air separated in the upper cavity enters the lower cavity through the partition board, drips into the bottom of the lower cavity through the drip port, and enters the liquid collection tank through the porous mesh plate.

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