Full-automatic large-size single-side grinding and polishing equipment and control method thereof

Abstract

The invention relates to full-automatic large-size single-face grinding and polishing equipment and a control method thereof.The full-automatic large-size single-face grinding and polishing equipment comprises a workbench, a grinding device, a polishing device and a control device, and the workbench comprises a rack and a water tank; the moving mechanism comprises a first moving module, a second moving module, a third moving module and a fourth moving module, the first moving module and the second moving module are fixedly installed on the two sides of the workbench respectively, the third moving module is fixedly installed on the rack and penetrates through an avoiding notch formed in the partition part, and the two ends of the fourth moving module are in transmission connection with the first moving module and the second moving module respectively. The fourth moving module is slidably connected with the third moving module, and the first moving module and the second moving module are used for driving the fourth moving module to move longitudinally; the upper grinding and polishing disc module is in transmission connection with the fourth moving module, and the fourth moving module drives the upper grinding and polishing disc module to transversely move to the grinding cavity or the finishing cavity; the trimming module is mounted on the rack and partially located in the trimming cavity; and the cleaning assembly is mounted in the finishing cavity and can move.

Description

Technical Field

[0001] The present invention relates to the technical field of grinding and polishing, and particularly relates to a fully automatic large-size single-sided grinding and polishing device and a control method thereof. Background Art

[0002] In the field of grinding and polishing, there are inevitably operations such as loading and unloading, cleaning and dressing of the grinding and polishing discs. Processing equipment for large-size products has characteristics such as large equipment size and heavy weight. Since the flatness of the surface of the polishing disc will decrease after long-term grinding, affecting the processing quality of workpieces, it is necessary to manually dress the upper grinding disc after the processing is completed and the workpiece is taken out. However, the working radius is very large when manually dressing and cleaning the disc surface, and the upper disc needs to be cleaned after dressing to wash away the residual waste from dressing. The operation is very inconvenient, there are problems that the human body is not easily accessible and the cleaning is incomplete and not thorough, and real-time dressing and cleaning during the processing cannot be achieved, affecting the normal grinding work progress. Summary of the Invention

[0003] Aiming at the deficiencies of the prior art, the present invention provides a fully automatic large-size single-sided grinding and polishing device and a control method thereof, aiming to solve the problem of inability to perform real-time dressing and cleaning of the upper disc.

[0004] To achieve the above object, the present invention adopts the following technical solutions: A fully automatic large-size single-sided grinding and polishing device, comprising: A workbench, including a frame and a water tank. The water tank is fixedly installed on top of the frame, and the water tank is provided with a grinding chamber and a dressing chamber arranged horizontally side by side and isolated by a partition part; A lower grinding disc module, fixedly installed on the frame, and the lower grinding disc of the lower grinding disc module is arranged in the grinding chamber; A moving mechanism, including a first moving module, a second moving module, a third moving module and a fourth moving module. The first moving module and the second moving module are respectively fixedly installed on both sides of the workbench. The third moving module is fixedly installed on the frame and passes through an avoidance notch provided by the partition part. One end of the fourth moving module is in transmission connection with the first moving module, the other end of the fourth moving module is in transmission connection with the second moving module, the fourth moving module is slidably connected with the third moving module, and the first moving module and the second moving module are used to drive the fourth moving module to move longitudinally along the third moving module; An upper grinding and polishing disc module, in transmission connection with the fourth moving module, and the fourth moving module is used to drive the upper grinding and polishing disc module to move horizontally to the grinding chamber or the dressing chamber; The trimming module is fixedly installed on the frame and partially located in the trimming cavity of the water tank, and is used for trimming the upper grinding disc of the upper grinding disc module; The cleaning assembly includes a cleaning module, a driving module, and two sliding rods. The two sliding rods are respectively fixedly installed on both sides of the trimming module. The driving module is fixedly installed in the trimming cavity. The cleaning module is slidably connected to the sliding rods, and the cleaning module is in transmission connection with the driving module. The driving module is used to drive the cleaning module to move longitudinally.

[0005] Further, the cleaning module includes a moving seat, a mounting plate, a plurality of brush hairs and a plurality of nozzles. The two ends of the moving seat are respectively slidably connected to the two sliding rods. The mounting plate is fixedly installed on the moving seat. The plurality of brush hairs are arranged at equal intervals on the mounting plate, and the plurality of nozzles are arranged at equal intervals on the mounting plate.

[0006] Further, the trimming module includes a trimming disc, a bracket and a rotating motor. The bracket is fixedly installed on the frame. The rotating motor is fixedly installed on the bracket. The trimming disc is in transmission connection with the rotating motor and is located in the trimming cavity. A plurality of uniformly distributed diamond pellets are embedded on the surface of the metal matrix of the trimming disc.

[0007] Further, both the first moving module and the second moving module include a first support frame, a translation motor, a first guide rail and a second guide rail. The first support frame is located on one side of the workbench. The translation motor is fixedly installed on the top of the first support frame. The first guide rail and the second guide rail are arranged in parallel and extend along the longitudinal direction. The translation motor is in transmission connection with the fourth moving module. The fourth moving module is slidably connected to the first guide rail and the second guide rail through a slider; The third moving module includes a second support frame and a third guide rail. The bottom of the second support frame is fixedly connected to the frame. The third guide rail is fixedly connected to the top of the second support frame. The fourth moving module is slidably connected to the third guide rail through a slider; The fourth moving module includes a sliding plate, a mounting seat, a driving motor, a fourth guide rail and a rack. One end of the bottom of the sliding plate is in transmission connection with the first moving module, and the other end of the bottom of the sliding plate is in transmission connection with the second moving module. The middle area of the bottom of the sliding plate is slidably connected to the third moving module. The fourth guide rail and the rack are fixedly installed on the top of the sliding plate and extend along the transverse direction. The mounting seat is slidably connected to the fourth guide rail. The driving motor is fixedly installed on the mounting seat. A gear is fixedly connected to the driving shaft of the driving motor. The gear of the driving motor meshes with the rack.

[0008] Further, the fourth moving module further includes a rotation driving assembly and a mounting bracket. The rotation driving assembly is fixedly connected to the mounting base. The mounting bracket is hinged to the mounting base. The rotation driving assembly is in transmission connection with the mounting bracket and is used to drive the mounting bracket to rotate relative to the mounting base. The upper grinding and polishing disc module is fixedly installed on the mounting bracket.

[0009] Further, the upper grinding and polishing disc module includes an upper grinding disc, a lifting driving assembly, a pulling and pressing force sensor, and a rotation driving assembly. The grinding disc has a polishing portion and a mounting portion. The rotation driving assembly is in transmission connection with the upper grinding disc to drive the upper grinding disc to rotate. The lifting driving assembly is in transmission connection with the rotation driving assembly to drive the upper grinding disc to reciprocate in the direction of the connection line between the mounting portion and the polishing portion. The pulling and pressing force sensor is arranged between the lifting driving assembly and the rotation driving assembly and is used to monitor the grinding and polishing pressure applied by the upper grinding disc in real time.

[0010] Further, the rotation driving assembly includes an upper disc tilting driving oil cylinder, an upper disc tilting positioning block, and an upper disc tilting rotating shaft. The upper disc tilting driving oil cylinder is fixedly installed on the mounting base. The upper disc tilting driving oil cylinder is in transmission connection with the mounting bracket. The upper disc tilting positioning block is fixedly connected to the mounting base. The mounting bracket is hinged to the mounting base through the upper disc tilting rotating shaft.

[0011] Further, it further includes a grinding and polishing liquid recovery and supply device. The grinding and polishing liquid recovery and supply device is placed on the machine frame and is communicated with the water tank. The grinding and polishing liquid recovery and supply device includes: A grinding and polishing liquid barrel, which is connected to the grinding chamber and is used to collect the grinding and polishing liquid; An integrated stirring motor, which is fixedly installed on the grinding and polishing liquid barrel and is used to stir the grinding and polishing liquid in the grinding and polishing liquid barrel to prevent the precipitation of the grinding and polishing medium; A thermometer, which is fixedly installed on the grinding and polishing liquid barrel and is used to detect the temperature of the grinding and polishing liquid in the grinding and polishing liquid barrel and feedback it to an external temperature control device; An external temperature control device connection port, which is used to connect to the external temperature control device. The external temperature control device controls the temperature of the grinding and polishing liquid within a set range by adjusting the supply flow rate and temperature of the temperature control liquid.

[0012] Further, it further includes a grasping device. The grasping device includes: The grasping chassis mechanism includes a chassis, a sliding frame, a robotic arm, a fifth guide rail, a mechanical rack, and a mechanical drive motor. The chassis is placed on one side of the workbench. The sliding frame is fixedly connected to the chassis. Two of the fifth guide rails and the mechanical rack are fixedly connected to the top of the sliding frame, and one of the fifth guide rails is fixedly connected to the side of the sliding frame. The robotic arm is slidably connected to the fifth guide rail through a slider. The mechanical drive motor is fixedly connected to the robotic arm, and the gear on the rotating shaft of the mechanical drive motor meshes with the mechanical rack; The lifting mechanism includes a lifting motor, a lifting frame, a lifting guide rail, and a lifting rack. The lifting motor is fixedly connected to the robotic arm. The lifting guide rail and the lifting rack are fixedly connected to the lifting frame. The robotic arm is slidably connected to the lifting guide rail through a slider. The gear on the output shaft of the lifting motor meshes with the lifting rack; The adjusting mechanism includes a lateral adjusting member, a lateral adjusting guide rail, and a lateral drive motor. The lateral adjusting guide rail is fixedly connected to the top of the lateral adjusting member. The bottom of the lifting frame is slidably connected to the lateral adjusting guide rail through the slider. The lateral drive motor is fixedly connected to the lateral adjusting member, and the lateral drive motor is in transmission connection with the lifting frame; The jaw mechanism includes a jaw adjusting member, a jaw guiding rail, a jaw driving cylinder, a jaw mounting block, and jaws. The jaw adjusting member is fixedly connected to the lateral adjusting member. Two of the jaw guiding rails are fixedly connected to the jaw adjusting member and extend longitudinally. Two of the jaw driving cylinders are fixedly connected to the jaw adjusting member and are symmetrically distributed in the longitudinal direction. Two of the jaw mounting blocks are slidably connected to the jaw guiding rail through sliders. Two of the jaw mounting blocks are in transmission connection with two of the jaw driving cylinders. Two of the jaws are respectively fixedly connected to both sides of the jaw mounting blocks. The jaws are provided with clamping openings for clamping the workpiece to be processed; The auxiliary mechanism includes auxiliary stoppers and auxiliary stopper mounting seats. Two of the auxiliary stopper mounting seats are respectively fixedly connected to the lateral two sides of the jaw adjusting member. Two of the auxiliary stoppers are respectively fixedly connected to two of the auxiliary stopper mounting seats; The limiting mechanism includes limiting differential heads and limiting bumpers. Two of the limiting differential heads are respectively fixedly connected to two of the jaw mounting blocks. Two of the limiting bumpers are fixedly connected to the jaw adjusting member. The limiting differential heads cooperate with the limiting bumpers to limit the displacement distance of the jaw mounting blocks.

[0013] A control method for a fully automatic large-size single-sided grinding and polishing equipment includes the following steps: Step 1: The grasping device grasps the workpiece to be processed and places it on the lower grinding disc module; Step 2: The upper grinding and polishing disc module cooperates with the moving mechanism to grind and polish the workpiece to be processed; Step 3: The tensile and compressive force sensor and the thermometer respectively and real-time monitor and feedback the grinding and polishing pressure applied by the upper grinding and polishing disc module to the workpiece to be processed and the temperature of the recycled grinding and polishing liquid. Step 4: The controller adjusts the rotation speed and height of the upper grinding and polishing disc module according to the feedback pressure and temperature in combination with product data, process parameters and maintenance records. Step 5: The moving mechanism moves the upper grinding and polishing disc module from the grinding cavity to the dressing cavity. Step 6: The upper grinding and polishing disc module cooperates with the moving mechanism to contact the dressing module. Step 7: The dressing module dresses the upper grinding disc of the upper grinding and polishing disc module. Step 8: After the dressing is completed, the upper grinding and polishing disc module rises, and the cleaning module of the cleaning assembly moves under the drive of the drive module to the lower part of the upper grinding and polishing disc module. The upper grinding and polishing disc module descends to contact the cleaning module, and the cleaning module cleans the upper grinding disc of the upper grinding and polishing disc module. Step 9: After the cleaning is completed, the moving mechanism moves the upper grinding and polishing disc module from the dressing cavity to the grinding cavity.

[0014] For a full-automatic large-size single-sided grinding and polishing device and its control method described in the present invention, the beneficial effects are as follows: The partition part arranges the grinding cavity and the dressing cavity horizontally side by side and physically isolates them, preventing grinding debris from contaminating the dressing area, improving the cleanliness and processing accuracy of the device. When the upper grinding disc of the upper grinding and polishing disc module grinds the workpiece to be processed, through the linkage of the first moving module, the second moving module, the third moving module and the fourth moving module, the upper grinding and polishing disc module performs a compound movement of "longitudinal" + "lateral" movement in the grinding cavity, and the upper grinding and polishing disc module can completely cover the entire workpiece to be processed, so as to improve the uniformity of product removal. At the same time, the fourth moving module realizes the rapid switching of the upper grinding and polishing disc between the grinding cavity and the dressing cavity stations, reduces the downtime, and improves the automation efficiency. When the upper grinding disc of the upper grinding and polishing disc module needs to be dressed, the upper grinding and polishing disc module is moved to the dressing cavity through the fourth moving module, and the upper grinding disc of the upper grinding and polishing disc module is dressed by the dressing module. After the dressing module completes the dressing, the drive module of the cleaning assembly drives the cleaning module to move longitudinally along the two slide bars so as to cover the entire area of the dressing cavity, ensuring the timely cleaning of the residues after the dressing of the upper grinding disc of the upper grinding and polishing disc module. After the cleaning is completed, the fourth moving module drives the upper grinding and polishing disc module to move laterally to the grinding cavity. Description of the Drawings

[0015] Figure 1 is the overall structural schematic diagram of the full-automatic large-size single-sided grinding and polishing device according to the embodiment of the present invention; Figure 2It is an assembly schematic diagram of a workbench, a dressing module, and a cleaning component according to an embodiment of the present invention; Figure 3 It is an overall structural schematic diagram of the dressing module according to an embodiment of the present invention; Figure 4 It is an overall structural schematic diagram of the cleaning component according to an embodiment of the present invention; Figure 5 It is an assembly schematic diagram of a moving mechanism and an upper polishing disc module according to an embodiment of the present invention; Figure 6 It is an assembly schematic diagram of a rotary drive component and an upper polishing disc module according to an embodiment of the present invention; Figure 7 It is a side view of a rotary drive component and an upper polishing disc module according to an embodiment of the present invention; Figure 8 It is an assembly schematic diagram of the upper polishing disc module according to an embodiment of the present invention; Figure 9 It is an overall structural schematic diagram of a gripping device according to an embodiment of the present invention; Figure 10 It is an assembly schematic diagram of an adjusting mechanism, a jaw mechanism, an auxiliary mechanism, and a limiting mechanism according to an embodiment of the present invention; Figure 11 It is an overall structural schematic diagram of a grinding and polishing fluid recovery and supply device according to an embodiment of the present invention.

[0016] Explanation of reference numerals: 1. Workbench; 11. Frame; 12. Water tank; 121. Grinding chamber; 122. Dressing chamber; 123. Partition part; 124. Avoidance notch; 2. Lower grinding disc module; 3. Moving mechanism; 31. First moving module; 32. Second moving module; 311. First support frame; 312. Translation motor; 313. First guide rail; 314. Second guide rail; 33. Third moving module; 331. Second support frame; 332. Third guide rail; 34. Fourth moving module; 341. Sliding plate; 342. Mounting seat; 343. Driving motor; 344. Fourth guide rail; 345. Rack; 346. Rotary driving assembly; 3461. Upper disc tilting driving oil cylinder; 3462. Upper disc tilting positioning block; 3463. Upper disc tilting rotating shaft; 347. Mounting frame; 4. Upper grinding and polishing disc module; 41. Upper grinding disc; 42. Lifting driving assembly; 43. Tensile and compressive force sensor; 44. Rotating driving assembly; 5. Dressing module; 51. Dressing disc; 511. Metal matrix; 512. Diamond chips; 52. Bracket; 53. Rotating motor; 6. Cleaning assembly; 61. Cleaning module; 611. Moving seat; 612. Mounting plate; 613. Brush bristles; 614. Nozzle; 62. Driving module; 63. Slide bar; 7. Grinding and polishing fluid recovery and supply device; 71. Grinding and polishing fluid barrel; 72. Integrated stirring motor; 73. Thermometer; 74. External temperature control device connection port; 75. Drain valve; 76. Filter tank; 8. Gripping device; 81. Gripping chassis mechanism; 811. Chassis; 812. Sliding frame; 813. Robot arm; 814. Fifth guide rail; 815. Mechanical rack; 816. Mechanical driving motor; 82. Lifting mechanism; 821. Lifting motor; 822. Lifting frame; 823. Lifting guide rail; 824. Lifting rack; 83. Adjusting mechanism; 831. Horizontal adjusting part; 832. Horizontal adjusting guide rail; 833. Horizontal driving motor; 84. Jaw mechanism; 841. Jaw adjusting part; 842. Jaw guiding rail; 843. Jaw driving cylinder; 844. Jaw mounting block; 845. Jaw; 85. Auxiliary mechanism; 851. Auxiliary stop block; 852. Auxiliary stop block mounting seat; 86. Limiting mechanism; 861. Limiting differential head; 862. Limiting impact block; 9. Workpiece to be processed. Detailed implementation manners

[0017] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0018] As Figure 1 shown in Figure 2 the figure, the present invention provides a fully automatic large-size single-sided grinding and polishing equipment, including: A workbench 1, including a frame 11 and a water tank 12, the water tank 12 is fixedly installed on the top of the frame 11, and the water tank 12 is provided with a grinding chamber 121 and a dressing chamber 122 which are arranged horizontally side by side and separated by a partition part 123; The lower grinding platen module 2 is fixedly installed on the frame 11, and the lower grinding platen of the lower grinding platen module is arranged in the grinding cavity 121; The moving mechanism 3 includes a first moving module 31, a second moving module 32, a third moving module 33 and a fourth moving module 34. The first moving module 31 and the second moving module 32 are respectively fixedly installed on both sides of the workbench 1. The third moving module 33 is fixedly installed on the frame 11 and passes through the avoidance notch 124 arranged in the partition part 123. One end of the fourth moving module 34 is in transmission connection with the first moving module 31, the other end of the fourth moving module 34 is in transmission connection with the second moving module 32, the fourth moving module 34 is slidably connected with the third moving module 33, and the first moving module 31 and the second moving module 32 are used to drive the fourth moving module 34 to move longitudinally along the third moving module 33; The upper grinding and polishing platen module 4 is in transmission connection with the fourth moving module 34, and the fourth moving module 34 is used to drive the upper grinding and polishing platen module 4 to move horizontally to the grinding cavity 121 or the dressing cavity 122; The dressing module 5 is fixedly installed on the frame 11 and partially passes through the dressing cavity 122 of the water tank 12, and is used to dress the upper grinding platen 41 of the upper grinding and polishing platen module 4; The cleaning assembly 6 includes a cleaning module 61, a driving module 62 and two slide bars 63. The two slide bars 63 are respectively fixedly installed on both sides of the dressing module 5. The driving module 62 is fixedly installed in the dressing cavity 122. The cleaning module 61 is slidably connected with the slide bars 63, and the cleaning module 61 is in transmission connection with the driving module 62. The driving module 62 is used to drive the cleaning module 61 to move longitudinally.

[0019] The partition part 123 arranges the grinding cavity 121 and the dressing cavity 122 side by side horizontally and physically isolates them, preventing grinding debris from contaminating the dressing area, improving the cleanliness and processing accuracy of the equipment. When the upper grinding and polishing disc module 4 grinds the workpiece 9 to be processed on the upper grinding disc 41, through the linkage of the first moving module 31, the second moving module 32, the third moving module 33 and the fourth moving module 34, the upper grinding and polishing disc module 4 performs a combined movement of "longitudinal" + "lateral" movement in the grinding cavity 121, and the upper grinding and polishing disc module 4 can completely cover the entire workpiece to be processed, so as to improve the uniformity of product removal. At the same time, the fourth moving module 34 realizes the rapid switching of the upper grinding and polishing disc between the grinding cavity 121 and the dressing cavity 122 workstations, reducing the downtime and improving the automation efficiency. When the upper grinding disc 41 of the upper grinding and polishing disc module 4 needs to be dressed, the upper grinding and polishing disc module 4 is moved to the dressing cavity 122 through the fourth moving module 34, and the upper grinding disc 41 of the upper grinding and polishing disc module 4 is dressed by the dressing module 5. After the dressing module 5 finishes dressing, the driving module 62 of the cleaning component 6 drives the cleaning module 61 to move longitudinally along the two slide rods 63 so as to cover the entire area of the dressing cavity 122, ensuring the timely cleaning of the residues after the dressing of the upper grinding disc 41 of the upper grinding and polishing disc module 4. After the cleaning is completed, the fourth moving module 34 drives the upper grinding and polishing disc module 4 to move laterally to the grinding cavity 121.

[0020] As Figure 4 shown, in some embodiments, the cleaning module 61 includes a moving seat 611, a mounting plate 612, a plurality of bristles 613 and a plurality of nozzles 614. The two ends of the moving seat 611 are respectively slidably connected to the two slide rods 63, the mounting plate 612 is fixedly installed on the moving seat 611, the plurality of bristles 613 are arranged equidistantly on the mounting plate 612, and the plurality of nozzles 614 are arranged equidistantly on the mounting plate 612.

[0021] When the dressing module 5 is dressing the upper grinding disc 41 of the upper grinding and polishing disc module 4, the cleaning module 61 is in a "retracted state". At this time, the cleaning module 61 and the dressing module 5 are located at different positions in the longitudinal direction and are completely separated to avoid the moving space required by the upper grinding disc 41 when the dressing module 5 is out of the repairing state; when the dressing module 5 completes the repairing of the upper grinding disc 41, the cleaning module 61 is in an "extended state" driven by the driving module 62. At this time, the cleaning module 61 is located above the dressing module 5, and the structure of the moving seat 611 guided by the slide bar 63 ensures the running stability of the cleaning module 61. The cleaning of the upper grinding disc 41 is achieved by utilizing the repairing stroke of the upper grinding and polishing disc module 4 instead of adding a new stroke. The cleaning device is mainly composed of a plurality of bristles 613 and a plurality of nozzles 614 arranged equidistantly on the mounting plate 612. The integrated design (equidistant arrangement) of the bristles 613 and the nozzles 614 can simultaneously brush and rinse the surface of the upper grinding disc 41. The cleaning is coordinated by the two methods of "brushing" + "spraying water to rinse", which can improve the cleaning efficiency and avoid the drying and residue of the polishing liquid.

[0022] like Figure 3 As shown, in some embodiments, the trimming module 5 includes a trimming disk 51, a bracket 52 and a rotating motor 53. The bracket 52 is fixedly mounted on the frame 11, and the rotating motor 53 is fixedly mounted on the bracket 52. The trimming disk 51 is transmission-connected to the rotating motor 53 and is located in the trimming cavity 122. A plurality of evenly distributed diamond pellets 512 are inlaid on the surface of the metal base 511 of the trimming disk 51.

[0023] The dressing disc 51 inlaid with diamond pellets 512 has high wear resistance, which prolongs the service life of the dressing module 5 and ensures the surface flatness of the upper grinding disc 41 .

[0024] The independently driven dressing disc 51 can independently rotate forward and reverse and adjust the speed in real time through the driving motor 343, adapting to the dressing needs of the upper grinding disc 41 with different degrees of wear, and realizing the sharpening and homogenization of the polishing pad of the upper grinding disc 41, thereby improving the consistency of the grinding and polishing process in terms of removal efficiency, removal uniformity, etc.

[0025] like Figure 5 As shown, in some embodiments, the first moving module 31 and the second moving module 32 both include a first support frame 311, a translation motor 312, a first guide rail 313 and a second guide rail 314, the first support frame 311 is located on one side of the workbench 1, the translation motor 312 is fixedly installed on the top of the first support frame 311, the first guide rail 313 and the second guide rail 314 are arranged in parallel and extend in the longitudinal direction, the translation motor 312 is transmission-connected to the fourth moving module 34, and the fourth moving module 34 is slidably connected to the first guide rail 313 and the second guide rail 314 through a slider; The third moving module 33 includes a second support frame 331 and a third guide rail 332. The bottom of the second support frame 331 is fixedly connected to the frame 11, and the third guide rail 332 is fixedly connected to the top of the second support frame 331. The fourth moving module 34 is slidably connected to the third guide rail 332 through a slider; The fourth moving module 34 includes a sliding plate 341, a mounting seat 342, a driving motor 343, a fourth guide rail 344 and a rack 345. One end of the bottom of the sliding plate 341 is drivingly connected to the first moving module 31, the other end of the bottom of the sliding plate 341 is drivingly connected to the second moving module 32, and the middle area of the bottom of the sliding plate 341 is slidably connected to the third moving module 33. The fourth guide rail 344 and the rack 345 are fixedly installed on the top of the sliding plate 341 and extend horizontally. The mounting seat 342 is slidably connected to the fourth guide rail 344. The driving motor 343 is fixedly installed on the mounting seat 342. A gear is fixedly connected to the driving shaft of the driving motor 343, and the gear of the driving motor 343 meshes with the rack 345.

[0026] The rack and pinion 345 drive (module ≥ 2) provides high-precision lateral displacement control to ensure that the positioning error of the upper grinding and polishing disc is ≤ 0.1 mm. The composite connection structure of the sliding plate 341 and multiple guide rails disperses the load, reduces the risk of single guide rail wear, and extends the service life of the equipment.

[0027] As Figure 6 And Figure 7 As shown, in some embodiments, the fourth moving module 34 further includes a rotary drive assembly 346 and a mounting bracket 347. The rotary drive assembly 346 is fixedly connected to the mounting seat 342. The mounting bracket 347 is hinged to the mounting seat 342. The rotary drive assembly 346 is drivingly connected to the mounting bracket 347 for driving the mounting bracket 347 to rotate relative to the mounting seat 342. The upper grinding and polishing disc module 4 is fixedly installed on the mounting bracket 347.

[0028] The rotary drive assembly 346 is drivingly connected to the mounting bracket 347 for driving the mounting bracket 347 to rotate relative to the mounting seat 342 so that the upper grinding disc 41 moves to a set position, and then there is enough space between the upper grinding disc 41 and the lower grinding disc module 2 for the workpiece 9 to move.

[0029] As Figure 8As shown, in some embodiments, the upper polishing disc module 4 includes an upper polishing disc 41, a lifting drive assembly 42, a tensile and compressive force sensor 43, and a rotational drive assembly 44. The polishing disc has a polishing portion and a mounting portion. The rotational drive assembly 44 is in transmission connection with the upper polishing disc 41 to drive the upper polishing disc 41 to rotate. The lifting drive assembly 42 is in transmission connection with the rotational drive assembly 44 to drive the upper polishing disc 41 to reciprocate in the direction of the connection line between the mounting portion and the polishing portion. The tensile and compressive force sensor 43 is arranged between the lifting drive assembly 42 and the rotational drive assembly 44 for monitoring in real time the polishing pressure applied by the upper polishing disc 41.

[0030] When the upper polishing disc module 4 processes the workpiece 9 to be processed, the lifting drive assembly 42 drives the upper polishing disc 41 to move downward to contact the workpiece 9 placed on the lower polishing disc module 2 and apply an appropriate pressure. The pressure is determined by the tensile and compressive force sensor 43. Then, the rotational drive assembly 44 drives the upper polishing disc 41 to polish the workpiece 9 to be processed. At the same time, the tensile and compressive force sensor 43 monitors in real time the pressure of the upper polishing disc 41 on the workpiece 9 to be processed, and thus feeds back to the controller to adjust the height of the upper polishing disc in real time through the lifting drive assembly 42 to ensure that sufficient pressure is given by the upper polishing disc. The lifting drive assembly 42 realizes stepless adjustment of the polishing pressure (range 50 - 500 N) to meet the polishing requirements of materials with different hardnesses. The separate design of the rotational drive assembly 44 and the lifting mechanism 82 avoids overload of the transmission system and improves the power transmission efficiency.

[0031] When the upper polishing disc 41 of the upper polishing disc module 4 needs to be trimmed, the fourth moving module 34 drives the upper polishing disc module 4 to move from the grinding cavity 121 to the trimming area. The lifting drive assembly 42 drives the upper polishing disc 41 to move downward to contact the trimming disc 51 and apply an appropriate pressure. The trimming disc 51 trims the upper polishing disc 41 of the upper polishing disc module 4 under the drive of the rotation motor 53.

[0032] As Figure 6 and Figure 7 shown, in some embodiments, the rotary drive assembly 346 includes an upper disc tilting drive oil cylinder 3461, an upper disc tilting positioning block 3462, and an upper disc tilting rotating shaft 3463. The upper disc tilting drive oil cylinder 3461 is fixedly installed on the mounting seat 342. The upper disc tilting drive oil cylinder 3461 is in transmission connection with the mounting frame 347. The upper disc tilting positioning block 3462 is fixedly connected to the mounting seat 342. The mounting frame 347 and the mounting seat 342 are hinged through the upper disc tilting rotating shaft 3463.

[0033] When loading and unloading are required, the upper disc tilting drive oil cylinder 3461 drives the mounting frame 347 to tilt through the upper disc tilting rotating shaft 3463, so that there is enough space between the upper polishing disc 41 and the lower polishing disc module 2 for the workpiece 9 to move.

[0034] like Figure 11 As shown, in some embodiments, it also includes: a grinding and polishing liquid recovery supply device 7, which is placed on the frame 11 and connected to the water tank 12, and the grinding and polishing liquid recovery supply device 7 includes: A grinding and polishing liquid barrel 71, connected to the grinding chamber 121, for collecting the grinding and polishing liquid; An integrated stirring motor 72 is fixedly mounted on the grinding and polishing liquid barrel 71 and is used to stir the grinding and polishing liquid in the grinding and polishing liquid barrel 71 to prevent the grinding and polishing medium from settling; The thermometer 73 is fixedly mounted on the grinding and polishing liquid barrel 71 and is used to detect the temperature of the grinding and polishing liquid in the grinding and polishing liquid barrel 71 and feed it back to the external temperature control device; The external temperature control device connection port 74 is used to connect to an external temperature control device. The external temperature control device controls the temperature of the grinding and polishing liquid within a set range by adjusting the supply flow and temperature of the temperature control liquid.

[0035] The external temperature control device is linked to the thermometer 73 through the external temperature control device connection port 74 to control the polishing liquid temperature within ±1°C to prevent the performance of the polishing liquid from being deteriorated due to temperature fluctuations. The integrated stirring motor 72 continuously stirs the polishing liquid, and the uniformity of the distribution of the grinding media is improved by 30%, avoiding uneven processing caused by precipitation.

[0036] The grinding and polishing liquid recovery and supply device 7 also includes: a drain valve 75 and a filter tank 76. The drain valve 75 is fixedly installed on the grinding and polishing liquid barrel 71 and is used to discharge the liquid in the grinding and polishing liquid barrel 71. The filter tank 76 is fixedly installed on the grinding and polishing liquid barrel 71 and is used to filter large-volume residues in the recovered grinding and polishing liquid.

[0037] like Figure 9 and Figure 10 As shown, in some embodiments, a gripping device 8 is further included, and the gripping device 8 includes: The grabbing chassis 811 mechanism includes a chassis 811, a sliding frame 812, a mechanical arm 813, a fifth guide rail 814, a mechanical rack 815 and a mechanical drive motor 816. The chassis 811 is placed on one side of the workbench 1, the sliding frame 812 is fixedly connected to the chassis 811, two fifth guide rails 814 and a mechanical rack 815 are fixedly connected to the top of the sliding frame 812, one fifth guide rail 814 is fixedly connected to the side of the sliding frame 812, the mechanical arm 813 is slidably connected to the fifth guide rail 814 through a slider, the mechanical drive motor 816 is fixedly connected to the mechanical arm 813, and the gear of the rotating shaft of the mechanical drive motor 816 is meshed with the mechanical rack 815; The lifting mechanism 82 includes a lifting motor 821, a lifting frame 822, a lifting guide rail 823 and a lifting rack 824. The lifting motor 821 is fixedly connected to the robotic arm 813. The lifting guide rail 823 and the lifting rack 824 are fixedly connected to the lifting frame 822. The robotic arm 813 is slidably connected to the lifting guide rail 823 through a slider. The gear on the output shaft of the lifting motor 821 meshes with the lifting rack 824; The adjusting mechanism 83 includes a lateral adjusting member 831, a lateral adjusting guide rail 832 and a lateral driving motor 833. The lateral adjusting guide rail 832 is fixedly connected to the top of the lateral adjusting member 831. The bottom of the lifting frame 822 is slidably connected to the lateral adjusting guide rail 832 through a slider. The lateral driving motor 833 is fixedly connected to the lateral adjusting member 831, and the lateral driving motor 833 is drivingly connected to the lifting frame 822; The jaw mechanism 84 includes a jaw adjusting member 841, a jaw guiding rail 842, a jaw driving cylinder 843, a jaw mounting block 844 and jaws 845. The jaw adjusting member 841 is fixedly connected to the lateral adjusting member 831. Two jaw guiding rails 842 are fixedly connected to the jaw adjusting member 841 and extend longitudinally. Two jaw driving cylinders 843 are fixedly connected to the jaw adjusting member 841 and are symmetrically distributed in the longitudinal direction. Two jaw mounting blocks 844 are slidably connected to the jaw guiding rails 842 through sliders. Two jaw mounting blocks 844 are drivingly connected to two jaw driving cylinders 843. Two jaws 845 are respectively fixedly connected to both sides of the jaw mounting blocks 844. The jaws 845 are provided with clamping openings for clamping the workpiece 9 to be processed; The auxiliary mechanism 85 includes auxiliary stoppers 851 and auxiliary stopper mounts 852. Two auxiliary stopper mounts 852 are respectively fixedly connected to the lateral two sides of the jaw adjusting member 841. Two auxiliary stoppers 851 are respectively fixedly connected to the two auxiliary stopper mounts 852; The limiting mechanism 86 includes limiting differential heads 861 and limiting bumpers 862. Two limiting differential heads 861 are respectively fixedly connected to the two jaw mounting blocks 844. Two limiting bumpers 862 are fixedly connected to the jaw adjusting member 841. The limiting differential heads 861 cooperate with the limiting bumpers 862 to limit the displacement distance of the jaw mounting blocks 844.

[0038] The mechanical drive motor 816 drives the carriage 812 to move between the grinding chamber 121 and the loading / unloading area. The lifting motor 821 drives the lifting frame 822 to lift along the lifting guide rail 823 to an appropriate height. The lateral drive motor 833 drives the lateral adjustment member 831 to adjust the position of the jaw mechanism 84 along the lateral adjustment guide rail 832. The multi-degree-of-freedom gripping device 8 (lateral / longitudinal / lifting / gripping adjustment) realizes full-automatic loading and unloading, reducing the manual intervention frequency by 90%. This enables the auxiliary stop block 851 of the auxiliary mechanism 85 to be placed on both sides of the workpiece to be processed 9 for limiting to prevent workpiece offset. The jaw drive cylinder 843 drives the jaw mounting block 844 to move. The jaws 845 can clamp both sides of the workpiece to be processed 9 through the bayonet and tighten to complete the picking. At the same time, the limit differential head 861 and the limit bumper 862 cooperate to control the displacement accuracy of the jaws 845 (±0.05 mm), preventing damage to the workpiece during gripping and adapting to the safe handling of large-sized (≥500 mm) wafers.

[0039] The present invention also provides a control method for a full-automatic large-sized single-sided grinding and polishing device, including the following steps: Step 1: The gripping device 8 grabs the workpiece to be processed 9 and places it on the lower grinding disc module 2; Step 2: The upper grinding and polishing disc module 4 cooperates with the moving mechanism 3 to grind and polish the workpiece to be processed 9; Step 3: The tensile pressure sensor 43 and the thermometer 73 respectively monitor and feedback in real time the grinding and polishing pressure applied by the upper grinding and polishing disc module 4 to the workpiece to be processed 9 and the temperature of the recycled grinding and polishing liquid; Step 4: The controller adjusts the rotation speed and height of the upper grinding and polishing disc module 4 according to the feedback pressure and temperature in combination with product data, process parameters, and maintenance records; Step 5: The moving mechanism 3 moves the upper grinding and polishing disc module 4 from the grinding chamber 121 to the dressing chamber 122; Step 6: The upper grinding and polishing disc module 4 cooperates with the moving mechanism 3 to contact the dressing module 5; Step 7: The dressing module 5 dresses the upper grinding disc 41 of the upper grinding and polishing disc module 4; Step 8: After the dressing is completed, the upper grinding and polishing disc module 4 rises. The cleaning module 61 of the cleaning assembly 6 moves under the drive of the drive module 62 to the lower part of the upper grinding and polishing disc module 4. The upper grinding and polishing disc module 4 descends to contact the cleaning module 61, and the cleaning module 61 cleans the upper grinding disc 41 of the upper grinding and polishing disc module 4; Step 9: After the cleaning is completed, the moving mechanism 3 moves the upper grinding and polishing disc module 4 from the dressing chamber 122 to the grinding chamber 121.

[0040] As described above, this is only a preferred embodiment of the present invention and does not impose any limitation on the technical scope of the present invention. Therefore, any minor modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A fully automatic large-size single-sided grinding and polishing equipment, characterized in that, Comprising: A workbench, including a frame and a water tank, the water tank is fixedly installed on the top of the frame, and the water tank is provided with a grinding cavity and a dressing cavity arranged horizontally side by side and isolated by a partition part; A lower grinding disc module, fixedly installed on the frame, and the lower grinding disc of the lower grinding disc module is arranged in the grinding cavity; A moving mechanism, including a first moving module, a second moving module, a third moving module and a fourth moving module, the first moving module and the second moving module are respectively fixedly installed on both sides of the workbench, the third moving module is fixedly installed on the frame and passes through an avoidance notch arranged in the partition part, one end of the fourth moving module is in transmission connection with the first moving module, the other end of the fourth moving module is in transmission connection with the second moving module, the fourth moving module is slidably connected with the third moving module, and the first moving module and the second moving module are used for driving the fourth moving module to move longitudinally along the third moving module; An upper grinding and polishing disc module, in transmission connection with the fourth moving module, and the fourth moving module is used for driving the upper grinding and polishing disc module to move horizontally to the grinding cavity or the dressing cavity; A dressing module, fixedly installed on the frame and partially located in the dressing cavity of the water tank, for dressing the upper grinding disc of the upper grinding and polishing disc module; A cleaning assembly, including a cleaning module, a driving module and two sliding rods, the two sliding rods are respectively fixedly installed on both sides of the dressing module, the driving module is fixedly installed in the dressing cavity, the cleaning module is slidably connected with the sliding rods, the cleaning module is in transmission connection with the driving module, and the driving module is used for driving the cleaning module to move longitudinally.

2. The fully automatic large-size single-sided grinding and polishing equipment according to claim 1, wherein The cleaning module includes a moving seat, a mounting plate, a plurality of brush hairs and a plurality of nozzles, both ends of the moving seat are respectively slidably connected to the two sliding rods, the mounting plate is fixedly installed on the moving seat, the plurality of brush hairs are arranged equidistantly on the mounting plate, and the plurality of nozzles are arranged equidistantly on the mounting plate.

3. The fully automatic large-size single-sided grinding and polishing equipment according to claim 1, wherein The dressing module includes a dressing disc, a bracket and a rotating motor, the bracket is fixedly installed on the frame, the rotating motor is fixedly installed on the bracket, the dressing disc is in transmission connection with the rotating motor and is located in the dressing cavity, and a plurality of uniformly distributed diamond chips are embedded on the metal matrix surface of the dressing disc.

4. The fully automatic large-size single-sided grinding and polishing equipment according to claim 1, wherein, Both the first moving module and the second moving module include a first support frame, a translation motor, a first guide rail and a second guide rail, the first support frame is located on one side of the workbench, the translation motor is fixedly installed on the top of the first support frame, the first guide rail and the second guide rail are arranged in parallel and extend along the longitudinal direction, the translation motor is in transmission connection with the fourth moving module, and the fourth moving module is slidably connected with the first guide rail and the second guide rail through a slider; The third moving module includes a second support frame and a third guide rail, the bottom of the second support frame is fixedly connected to the frame, the third guide rail is fixedly connected to the top of the second support frame, and the fourth moving module is slidably connected with the third guide rail through a slider; The fourth moving module includes a sliding plate, a mounting seat, a driving motor, a fourth guide rail and a rack. The bottom of one end of the sliding plate is in transmission connection with the first moving module. The bottom of the other end of the sliding plate is in transmission connection with the second moving module. The bottom of the middle area of the sliding plate is slidably connected with the third moving module. The fourth guide rail and the rack are fixedly installed on the top of the sliding plate and extend horizontally. The mounting seat is slidably connected with the fourth guide rail. The driving motor is fixedly installed on the mounting seat. A gear is fixedly connected to the driving shaft of the driving motor. The gear of the driving motor meshes with the rack.

5. The fully automatic large-size single-sided grinding and polishing equipment according to claim 4, wherein The fourth moving module further includes a rotary driving assembly and a mounting bracket. The rotary driving assembly is fixedly connected to the mounting seat. The mounting bracket is hinged to the mounting seat. The rotary driving assembly is in transmission connection with the mounting bracket and is used to drive the mounting bracket to rotate relative to the mounting seat. The upper grinding and polishing disc module is fixedly installed on the mounting bracket.

6. The fully automatic large-size single-sided grinding and polishing equipment according to claim 5, characterized in that, The upper grinding and polishing disc module includes an upper grinding disc, a lifting driving assembly, a pulling and pressing force sensor and a rotary driving assembly. The grinding disc has a polishing part and a mounting part. The rotary driving assembly is in transmission connection with the upper grinding disc to drive the upper grinding disc to rotate. The lifting driving assembly is in transmission connection with the rotary driving assembly to drive the upper grinding disc to reciprocate in the direction of the connection line between the mounting part and the polishing part. The pulling and pressing force sensor is arranged between the lifting driving assembly and the rotary driving assembly and is used to monitor the grinding and polishing pressure applied by the upper grinding disc in real time.

7. The fully automatic large-size single-sided grinding and polishing equipment according to claim 5, characterized in that, The rotary driving assembly includes an upper disc tilting driving oil cylinder, an upper disc tilting positioning block and an upper disc tilting rotating shaft. The upper disc tilting driving oil cylinder is fixedly installed on the mounting seat. The upper disc tilting driving oil cylinder is in transmission connection with the mounting bracket. The upper disc tilting positioning block is fixedly connected to the mounting seat. The mounting bracket is hinged to the mounting seat through the upper disc tilting rotating shaft.

8. The fully automatic large-size single-sided grinding and polishing equipment according to claim 1, wherein, It further includes: A grinding and polishing liquid recycling and supply device, which is placed inside the frame and communicated with the water tank. The grinding and polishing liquid recycling and supply device includes: A grinding and polishing liquid bucket, which is connected to the grinding chamber and is used to collect the grinding and polishing liquid; An integrated stirring motor, which is fixedly installed on the grinding and polishing liquid bucket and is used to stir the grinding and polishing liquid in the grinding and polishing liquid bucket to prevent the precipitation of the grinding and polishing medium; A thermometer, which is fixedly installed on the grinding and polishing liquid bucket and is used to detect the temperature of the grinding and polishing liquid in the grinding and polishing liquid bucket and feedback it to an external temperature control device; An external temperature control device connection port, which is used to connect with the external temperature control device. The external temperature control device controls the temperature of the grinding and polishing liquid within a set range by adjusting the supply flow rate and temperature of the temperature control liquid.

9. The fully automatic large-size single-sided grinding and polishing equipment according to claim 1, wherein, It further includes a grasping device, and the grasping device includes: The grasping chassis mechanism includes a chassis, a sliding frame, a robotic arm, a fifth guide rail, a mechanical rack, and a mechanical drive motor. The chassis is placed on one side of the workbench. The sliding frame is fixedly connected to the chassis. Two of the fifth guide rails and the mechanical rack are fixedly connected to the top of the sliding frame, and one of the fifth guide rails is fixedly connected to the side of the sliding frame. The robotic arm is slidably connected to the fifth guide rail through a slider. The mechanical drive motor is fixedly connected to the robotic arm, and the gear on the rotating shaft of the mechanical drive motor meshes with the mechanical rack; The lifting mechanism includes a lifting motor, a lifting frame, a lifting guide rail, and a lifting rack. The lifting motor is fixedly connected to the robotic arm. The lifting guide rail and the lifting rack are fixedly connected to the lifting frame. The robotic arm is slidably connected to the lifting guide rail through a slider. The gear on the output shaft of the lifting motor meshes with the lifting rack; The adjusting mechanism includes a lateral adjusting member, a lateral adjusting guide rail, and a lateral drive motor. The lateral adjusting guide rail is fixedly connected to the top of the lateral adjusting member. The bottom of the lifting frame is slidably connected to the lateral adjusting guide rail through the slider. The lateral drive motor is fixedly connected to the lateral adjusting member and is in transmission connection with the lifting frame; The jaw mechanism includes a jaw adjusting member, a jaw guiding rail, a jaw driving cylinder, a jaw mounting block, and jaws. The jaw adjusting member is fixedly connected to the lateral adjusting member. Two of the jaw guiding rails are fixedly connected to the jaw adjusting member and extend longitudinally. Two of the jaw driving cylinders are fixedly connected to the jaw adjusting member and are symmetrically distributed in the longitudinal direction. Two of the jaw mounting blocks are slidably connected to the jaw guiding rail through sliders. Two of the jaw mounting blocks are in transmission connection with two of the jaw driving cylinders. Two of the jaws are respectively fixedly connected to both sides of the jaw mounting blocks. The jaws are provided with clamping openings for clamping the workpiece to be processed; The auxiliary mechanism includes auxiliary stoppers and auxiliary stopper mounting seats. Two of the auxiliary stopper mounting seats are respectively fixedly connected to the lateral sides of the jaw adjusting member. Two of the auxiliary stoppers are respectively fixedly connected to two of the auxiliary stopper mounting seats; The limiting mechanism includes limit differential heads and limit bumpers. Two of the limit differential heads are respectively fixedly connected to two of the jaw mounting blocks. Two of the limit bumpers are fixedly connected to the jaw adjusting member. The limit differential heads cooperate with the limit bumpers to limit the displacement distance of the jaw mounting blocks.

10. A control method for a fully automatic large-size single-sided grinding and polishing equipment, characterized in that, It includes the following steps: Step 1: The grasping device grasps the workpiece to be processed and places it on the lower grinding disc module; Step 2: The upper grinding and polishing disc module cooperates with the moving mechanism to grind and polish the workpiece to be processed; Step 3: The tensile force sensor and the thermometer respectively and real-time monitor and feedback the grinding and polishing pressure applied by the upper grinding and polishing disc module to the workpiece to be processed and the temperature of the recycled grinding and polishing liquid; Step 4: The controller adjusts the rotation speed and height of the upper grinding and polishing disc module according to the feedback pressure and temperature in combination with product data, process parameters, and maintenance records; Step 5: The moving mechanism moves the upper grinding and polishing disc module from the grinding chamber to the dressing chamber; Step 6: The upper polishing disc module cooperates with the moving mechanism to contact the dressing module; Step 7: The dressing module dresses the upper polishing disc of the upper polishing disc module; Step 8: After the dressing is completed, the upper polishing disc module rises, and the cleaning module of the cleaning assembly moves under the drive of the drive module to the lower part of the upper polishing disc module. The upper polishing disc module descends to contact the cleaning module, and the cleaning module cleans the upper polishing disc of the upper polishing disc module; Step 9: After the cleaning is completed, the moving mechanism moves the upper polishing disc module from the dressing chamber to the grinding chamber.

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