3-pillar boat in load lock chamber and method of manufacturing pillar boat

Abstract

A wafer boat configured to support one or more wafers is provided. The wafer boat includes a first pillar, a second pillar, and a third pillar, each having a plurality of protruding elements. The top surfaces of the first, second and third struts are coupled to the triangular top member, and the bottom surfaces of the first, second and third struts are coupled to the triangular bottom member. The wafer boat defines a central axis extending vertically and parallel to the first, second, and third struts. The protruding elements extend toward the central axis to define a plurality of wafer slots, wherein each wafer slot is configured to support a wafer.

Description

Technical Field

[0001] The present disclosure generally relates to manufacturing semiconductor devices. More specifically, the present disclosure relates to a wafer boat configured to support a plurality of wafers in a load lock chamber. Background Art

[0002] Semiconductor processing systems, such as semiconductor processing systems having a cluster platform, generally include a front end connected to a back end through a load lock. The front end generally connects the semiconductor processing system to an external environment and generally includes a front end robot to transfer substrates between the front end of the semiconductor processing system and the load lock. The back end generally includes processing modules that complete substrate processing and a back end robot that transfers substrates between the load lock and the processing modules. The load lock generally couples the back end of the semiconductor processing system to the front end of the semiconductor processing system and is generally arranged to isolate the environment maintained in the back end of the semiconductor processing system from the environment maintained in the front end of the semiconductor processing system.

[0003] After substrate processing is completed in the processing module, the back end robot transfers the substrate from the processing module to the load lock before the substrate is transferred to the front end module. Thus, after substrate processing, during the transition from the back end module to the front end module, the processed wafers are held in the load lock chamber for cooling. In conventional systems, these wafers are held in a device including four posts having semi-circular protruding elements that extend vertically from the posts in a horizontal direction. Such semi-circular protruding elements are generally flat and have a radius of 15 mm. Since these protruding elements are arranged vertically along the four posts, the posts can be arranged in a manner that defines slots to hold the wafers, where each slot is defined by a corresponding protruding element extending from each of the four posts. Thus, such a conventional arrangement allows the wafers to be stacked on top of each other.

[0004] However, each time a wafer contacts an element of the device, particles are generated. Complete contact of the wafer with each of the four protruding elements results in a large amount of particle residue. In such an arrangement, the wafers are stacked vertically, and any particle residue on the top wafer is deposited on the underlying wafers, and so on. Additionally, in conventional systems, the top and bottom members that support the four posts to form a storage device in the load lock chamber are the same. Thus, during installation of the load lock chamber, the chance of incorrectly switching the device orientation is increased.

[0005] Accordingly, there is a need in the art for an improved load lock device, a semiconductor processing system having a load lock device, a method of depositing a material layer, and a method of manufacturing a load lock device for a semiconductor processing system. The present disclosure provides a solution to such a need. Summary of the Invention

[0006] A wafer boat is provided. The wafer boat is configured to support one or more wafers. The wafer boat includes a first support post having a first plurality of protruding elements, wherein the first support post is defined by a first inner surface, a first outer surface, a first top surface, and a first bottom surface, and wherein the first plurality of protruding elements extend from the first inner surface. The wafer boat further includes a second support post having a second plurality of protruding elements, wherein the second support post is defined by a second inner surface, a second outer surface, a second top surface, and a second bottom surface, and wherein the second plurality of protruding elements extend from the second inner surface. The wafer boat further includes a third support post having a third plurality of protruding elements, wherein the third support post is defined by a third inner surface, a third outer surface, a third top surface, and a third bottom surface, and wherein the third plurality of protruding elements extend from the third inner surface. The wafer boat further includes a triangular top member having a first top joint, a second top joint, and a third top joint, wherein the triangular top plate is coupled to the first support post, the second support post, and the third support post such that the first top surface is coupled to the first top joint, the second top surface is coupled to the second top joint, and the third top surface is coupled to the third top joint. The wafer boat further includes a triangular bottom member having a first bottom joint, a second bottom joint, and a third bottom joint, wherein the triangular bottom plate is coupled to the first support post, the second support post, and the third support post such that the first bottom surface is coupled to the first bottom joint, the second bottom surface is coupled to the second bottom joint, and the third bottom surface is coupled to the third bottom joint. The triangular top member and the triangular bottom member are parallel to each other. The wafer boat defines a central axis that extends vertically and is further parallel to the first support post, the second support post, and the third support post, and wherein the first plurality of protruding elements, the second plurality of protruding elements, and the third plurality of protruding elements extend toward the central axis to define a plurality of wafer slots, wherein each wafer slot is configured to support a wafer.

[0007] A method of manufacturing a wafer boat is provided. The method includes defining a vertically extending central axis. The method further includes coupling a first support pillar to a triangular top member and a triangular bottom member by coupling a first top surface of the first support pillar to a first top junction of the triangular top member and coupling a first bottom surface of the first support pillar to a first bottom junction of the triangular bottom member, such that a first plurality of protruding elements extend from a first inner surface toward the central axis. The method further includes coupling a second support pillar to the triangular top member and the triangular bottom member by coupling a second top surface of the second support pillar to a second top junction of the triangular top member and coupling a second bottom surface of the second support pillar to a second bottom junction of the triangular bottom member, such that a second plurality of protruding elements extend from a second inner surface toward the central axis. Finally, the method includes coupling a third support pillar to the triangular top member and the triangular bottom member by coupling a third top surface of the third support pillar to a third top junction of the triangular top member and coupling a third bottom surface of the third support pillar to a third bottom junction of the triangular bottom member, such that a third plurality of protruding elements extend from a third inner surface toward the central axis.

[0008] A load lock chamber is provided. The load lock chamber includes a wafer boat having a plurality of support pillars. Each of the plurality of pillars includes a plurality of protruding elements, wherein each protruding element includes a top protruding surface and a bottom protruding surface, wherein the bottom protruding surface is perpendicular to the central axis, and wherein the top protruding surface is coupled to the bottom protruding surface at a protruding angle to form an inclined protruding element.

[0009] The present invention content is provided to introduce some concepts in a simplified form. These concepts are further described in detail in the detailed description of the examples of the following disclosure. The present invention content is not intended to identify the key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] These and other features, aspects, and advantages of the present invention disclosed herein are described below with reference to the drawings of certain embodiments, which are intended to illustrate and not limit the present invention.

[0011] Figure 1 is a plan view of a wafer boat included in a load lock device of a semiconductor processing system according to the present invention;

[0012] Figures 2A to 2C is Figure 1 a perspective view of the top and bottom of a support pillar of the wafer boat;

[0013] Figure 2D is Figure 1 a cross-sectional view of an intermediate portion of a support pillar of the wafer boat;

[0014] Figure 3A is Figure 1 A perspective view of the top member of the wafer boat of

[0015] Figure 3B is Figure 1 A top view of the top member of the wafer boat of

[0016] Figure 4 is Figure 1 A perspective view of the bottom member of the wafer boat of

[0017] Figure 5A is a cross-sectional view of a wafer placed in a slot of a support post of the wafer boat of Figure 1 ;

[0018] Figure 5B is a perspective view of a wafer placed in a slot of a support post of the wafer boat of Figure 1 ;

[0019] Figure 5C is a top view of a wafer placed in a slot of a support post of the wafer boat of Figure 1 ;

[0020] Figure 6 is a block diagram of a method for manufacturing a wafer boat according to the present disclosure.

[0021] It should be understood that the elements in the drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the relative dimensions of some elements in the figures may be exaggerated relative to other elements to help improve understanding of the illustrated embodiments of the present disclosure. Detailed Description

[0022] Reference will now be made to the drawings, in which like reference numerals represent similar structural features or aspects of the subject disclosure. For purposes of explanation and illustration, and not limitation, Figure 1 a view of a boat for holding wafers within a load lock device of a semiconductor processing system in accordance with the present invention is shown and generally designated by reference numeral 100. Other examples or aspects of the boat 100 are provided in FIGS. 2-6, as will be described. The systems and methods of the present disclosure may be used in a semiconductor processing system for manufacturing semiconductor devices, such as a semiconductor processing system that deposits material layers using chemical vapor deposition (CVD) and atomic layer deposition (ALD) techniques during the manufacture of logic and memory devices, although the present disclosure is generally not limited to any semiconductor processing operation or the manufacture of any particular semiconductor device.

[0023] As used herein, the term "substrate" can refer to any one or more underlying materials, including any one or more underlying materials that can be modified or on which devices, circuits, or films can be formed. A "substrate" can be continuous or discontinuous; rigid or flexible; solid or porous; and combinations thereof. A substrate can be in any form, such as a powder, a plate, or a workpiece. A plate-shaped substrate can include wafers of various shapes and sizes. The diameter of the wafer can be 200 millimeters, 300 millimeters, or even 450 millimeters. A substrate can be formed of one or more semiconductor materials, including but not limited to silicon, silicon germanium, silicon oxide, gallium arsenide, gallium nitride, and silicon carbide.

[0024] Reference Figure 1 , a wafer boat 100 is shown. The wafer boat 100 can be configured to support a plurality of substrates. The wafer boat 100 is placed in a load lock chamber. In an exemplary embodiment, the material used to fabricate the wafer boat 100 includes a quartz material. In an exemplary embodiment, other materials having a desired quality can be used to fabricate the wafer boat 100. The wafer boat 100 also includes three struts 200a, 200b, and 200c. In an exemplary embodiment, the struts 200a, 200b, and 200c are substantially the same in all respects. The wafer boat 100 also includes a triangular top member 300 and a triangular bottom member 400 that support the struts 200a, 200b, and 200c. In other words, as Figure 1 shown, the triangular top member 300 and the triangular bottom member 400 are separated from each other by the vertical placement of the struts 200a, 200b, and 200c parallel to the vertical axis 102.

[0025] Now refer Figures 2A - 2D , a strut 200 is shown. Figure 2A is a perspective view of the strut 200. The strut 200 includes any one of the struts 200a, 200b, or 200c. As Figure 2A shown, the strut 200 includes a plurality of protruding elements 204 that protrude from the inner surface 220 of the strut 200. In an exemplary embodiment, each strut 200 includes at least twenty-five protruding elements (204-1 to 204-25). Each protruding element 204 is aligned toward its own slot axis 104 (see Figure 5C ). Each slot axis 104 extends through a center point and intersects the vertical axis 102. The protruding elements 204 of each strut 200 are aligned toward its own slot axis 104, thereby forming axes 104, all of which extend through the center point that intersects the vertical axis 102 (see Figure 5C)。Therefore, the protruding elements 204a-1 of the first support pillar 200a, the protruding elements 204b-1 of the second support pillar 200b, and the protruding elements 204c-1 of the third support pillar 200c are aligned along the axis 104-1 to form a groove 214-1. Similarly, each of the protruding elements 204a-n, 204b-n, and 204c-n of the support pillars 200a, 200b, and 200c is aligned along their respective axes 104-n to form a groove 214-n (see Figure 1 ). Each groove 214 is configured to hold a single wafer 550.

[0026] Now referring to Figure 2D , a cross-sectional view of the support pillar 200 is shown. Figure 2D The support pillar 200 in Figure 2D may include any one of the support pillars 200a, 200b, or 200c. As shown in Figure 2D , each protruding element 204 extends in an inclined manner. Each protruding element 204 includes a top surface 232, a side surface 222, and a bottom surface 226. In an exemplary embodiment, the bottom surface 226 extends perpendicularly from the inner surface 220 of the support pillar 200, and the top surface 232 extends from the inner surface 220 at an obtuse angle to form an inclined protruding element. The top surface 232 and the bottom surface 226 are separated by the side surface 222. In an exemplary embodiment, the side surface 222 measures 3 millimeters (mm). In an exemplary embodiment, the angle 224 formed by the top surface 232 and the bottom surface 226 is 5 degrees. In an exemplary embodiment, the bottom surface 226 measures 220 mm. That is, the protruding element 204 extends outward 220 mm. Additionally, in an exemplary embodiment, the distance 236 is defined as the space between the bottom surface of the first protruding element (e.g., 204-1) of the support pillar 200 and the top surface of the next protruding element (e.g., 204-2) of the support pillar 200, and measures 10 mm.

[0027] Briefly referring to Figure 2B and 2C , perspective views of the top 250 and the bottom 260 of the support pillar 200 are shown respectively. As shown in Figure 2A , the support pillar 200 includes a top surface 206 that is coupled to the top member 300 of the boat 100. The top surface 206 is substantially flat to allow for easy coupling with the top member 300. The support pillar 200 also includes an outer surface 210 opposite to the inner surface 220. Thus, the support pillar 200 includes a substantially rectangular cross-section along the axis 102. The rectangular cross-section simplifies the manufacturing process of the support pillar 200 of the boat 100. In an exemplary embodiment, the outer surface 210 may be further marked with linear cutting marks 212 closer to the top surface 206 to mark the orientation. In an exemplary embodiment, the mark 212 may be a 10 mm long and 0.1 mm deep linear incision on the outer surface 210 parallel to the axis 102.

[0028] As further seen in Figure 2C , the support pillar 200 includes a bottom surface 208 which is coupled to the bottom member 400 of the boat 100. As Figure 2C shown, in an exemplary embodiment, the last protruding element 204-n is configured to be directly coupled to the bottom member 400. Accordingly, the bottom surface 208 of the support pillar 200 coincides with the bottom surface 226 of the last protruding element 204-n. In contrast, the top surface 206 is different from the top surface 232 of the first protruding element 204-1 (see Figure 2B ). Further, unlike the top 250, the bottom 260 does not include the cutting mark 212. Thus, the mark 212 defines the orientation in which the support pillar is assembled with the top member 300 and the bottom member 400 to form the boat 100. Such marking prevents directional manufacturing errors during the manufacture of the boat 100. Thus, during manufacture, the error in coupling the top surface 206 with the bottom member 400 and thus the error in coupling the bottom surface 208 with the top member 300 are greatly minimized.

[0029] Now referring to FIG. 3, a triangular top member 300 is shown. The top member 300 includes an upper surface 310 and a lower surface 312. The top member 300 further includes a triangular portion 350 and a rectangular portion 360. As shown in FIG. 3, the first side 322 intersects the second side 326, and the second side 326 further intersects the third side 324 to form the triangular portion 350 of the top member 300. In an example embodiment, the triangular portion 350 further includes a triangular hole 304, as shown in FIG. 3. The triangular hole 304 results in the formation of three inner sides 352i, 354i, and 356i of the triangular portion 350. The intersection of the inner sides 352i and 354i may be sharp or rounded. Similarly, the intersection of the inner sides 352i and 356i may be sharp and rounded, and the intersection of the inner sides 354i and 356i may be sharp and rounded. Further, the sides 352i and 354i form an acute angle 362c, the sides 352i and 356i form an acute angle 362a, and the sides 354i and 356i form an acute angle 362b. Thus, the triangular hole 304 forms an acute triangular cross-section. In an exemplary embodiment, the angles 362a, 362b, and 362c are equal to form an equilateral triangular cross-section. In other embodiments, two of the angles 362a, 362b, and 362c may be equal to form an isosceles triangular cross-section.

[0030] As further shown in FIG. 3, the outer side 352x is parallel to the inner side 352i and perpendicular to the upper surface 310 and the lower surface 312. The outer side 352x intersects the upper surface 310, the upper surface 310 intersects the inner side 352i, the inner side 352i intersects the lower surface 312, and finally, the lower surface 312 intersects the outer side 352x. Thus, the outer side 352x, the upper surface 310, the lower surface 312, and the inner side 352i together form the first side portion 322. Similarly, the outer side 354x is parallel to the inner side 354i and perpendicular to the upper surface 310 and the lower surface 312. The outer side 354x intersects the upper surface 310, the upper surface 310 intersects the inner side 354i, the inner side 354i intersects the lower surface 312, and finally, the lower surface 312 intersects the outer side 354x. Thus, the outer side 354x, the upper surface 310, the lower surface 312, and the inner side 354i together form the second side portion 324. Finally, the outer side 356x is parallel to the inner side 356i and perpendicular to the upper surface 310 and the lower surface 312. The outer side 356x intersects the upper surface 310, the upper surface 310 intersects the inner side 356i, the inner side 356i intersects the lower surface 312, and finally, the lower surface 312 intersects the outer side 356x. Thus, the outer side 356x, the upper surface 310, the lower surface 312, and the inner side 356i together form at least a part of the third side portion 326.

[0031] In an exemplary embodiment, the third side portion 326 is further divided into three sub - parts. Figure 3B A top - view of the top triangular member 300 is shown. The first sub - part includes the outer side 356x, the upper surface 310, the lower surface 312, and the inner side 356i. Further, the second sub - part 380a includes at least a part of the outer side 352x that intersects the side 382a, and the side 382a intersects the side 384a (see Figure 3B ). The side 384a is substantially parallel to the side 352x. Further, the side 382a is perpendicularly aligned with the corresponding axis 104a. Thus, the outer side 352x, the side 382a, the side 384a, at least a part of the top surface 310, and the bottom surface 312 together form the sub - part 380a. As Figure 3B shown, the sub - part 380a is perpendicularly aligned with the axis 104a. Similarly, the third sub - part 380b includes at least a part of the outer side 354x that intersects the side 382b, and the side 382b intersects the side 384b (see Figure 3B ). The side 384b is substantially parallel to the side 354x. Further, the side 382b is perpendicularly aligned with its corresponding axis 104b. Thus, the outer side 354x, the side 382b, the side 384b, at least a part of the top surface 310, and the bottom surface 312 together form the sub - part 380b. As Figure 3BAs shown, sub - part 380b is vertically aligned with axis 104b. Sub - parts 380a and 380b are separated from each other by 356x. As shown in FIG. 3b, side 384a intersects side 356x such that the intersection forms an obtuse angle. Similarly, side 384b intersects side 356x such that the intersection forms an obtuse angle.

[0032] The triangular top member 300 further includes a rectangular portion 360. The rectangular portion 360 includes sides 334, 328, and 332. The rectangular portion 360 further includes an upper surface 310 and a lower surface 312. Sides 334 and 332 are parallel to each other and perpendicular to side 328. Sides 334 and 332 are aligned parallel to axis 104c, and side 328 is aligned on an axis perpendicular to axis 104c. As Figure 3A shown, sides 328, 332, and 334 intersect the upper surface 310 and the lower surface 312 to form the rectangular portion 360. Thus, in the exemplary embodiment, the rectangular portion 360 abuts the triangular portion 350 to form the triangular top member 300, which includes a single upper surface 310, a single lower surface 312, sides 352x, 354x, 356x, 328, 332, 334, 352i, 354i, 356i, 382a, 382b, 384a, and 384b. Additionally, in the example embodiment, the triangular top member 300 includes a single cavity 302 (e.g., a hole). The cavity 302 is formed at axis 102. Thus, axis 102 passes through the cavity 302. In the example embodiment, the cavity 302 is formed at the center of the triangular top member 300.

[0033] Now referring to Figure 4 , a vertical view of the triangular bottom member 400 is shown. As Figure 4 shown, the triangular bottom member 400 is substantially the same as the triangular member 300. However, different from the top member 300, the bottom member 400 includes a plurality of cavities. Like cavity 302, cavity 402 is formed at axis 102. Thus, cavity 402 is aligned with cavity 302, and axis 102 passes through cavity 402. In the example embodiment, the bottom member 400 includes two cavities 446 and 444 located on both sides of cavity 402 and having substantially the same size as cavity 402. Additionally, the bottom member 400 may include a cavity 442 such that cavity 442 is aligned with the support 200c after the boat 100 is formed (see Figure 1 ). The bottom member 400 may further include a cavity 448 opposite to cavity 442. Cavities 402, 442, 444, 446, and 448 are all located along axis 104c (see Figure 5C ). Cavities 444 and 446 located on either side of cavity 402 can be utilized by the lower mounting plate of the load - locking chamber. Since cavities 444 and 446 are not included in the top member 300, the top member 300 is different from the bottom member 400 and prevents the boat 100 from being installed upside - down.

[0034] The bottom member 400 is substantially the same as the top member 400 in all other respects. Similar to the top member 300, the bottom member 400 includes a triangular portion 450 and a rectangular portion 460. As Figure 4 shown, the first side 422 intersects the second side 426, and the second side 426 further intersects the third side 424 to form the triangular portion 450 of the bottom member 400. In the exemplary embodiment, the triangular portion 450 further includes a triangular hole 404, as Figure 4 shown. The triangular hole 404 is similar in size and shape to the triangular hole 304.

[0035] The triangular hole 404 results in the formation of three inner sides 452i, 454i, and 456i of the triangular portion 450. The intersection of the inner sides 452i and 454i can be sharp or rounded. Similarly, the intersection of the inner sides 452i and 456i can be sharp and rounded, and the intersection of the inner sides 454i and 456i can be sharp and rounded. Additionally, sides 452i and 454i form an acute angle 462c, sides 452i and 456i form an acute angle 462a, and sides 454i and 456i form an acute angle 462b. Thus, the triangular hole 404 forms an acute triangular cross-section. In the exemplary embodiment, the angles 462a, 462b, and 462c are equal to form an equilateral triangular cross-section. In other embodiments, two of the angles 462a, 462b, and 462c can be equal to form an isosceles triangular cross-section.

[0036] As Figure 4Further shown, the outer side 452x is parallel to the inner side 452i and perpendicular to the upper surface 410 and the lower surface 412. The outer side 452x intersects the upper surface 410, the upper surface 410 intersects the inner side 452i, the inner side 452i intersects the lower surface 412, and finally, the lower surface 412 intersects the outer side 452x. Thus, the outer side 452x, the upper surface 410, the lower surface 412, and the inner side 452i together form the first side portion 422. Similarly, the outer side 454x is parallel to the inner side 454i and perpendicular to the upper surface 410 and the lower surface 412. The outer side 454x intersects the upper surface 410, the upper surface 410 intersects the inner side 454i, the inner side 454i intersects the lower surface 412, and finally, the lower surface 412 intersects the outer side 454x. Thus, the outer side 454x, the upper surface 410, the lower surface 412, and the inner side 454i together form the second side portion 424. Finally, the outer side 456x is parallel to the inner side 456i and perpendicular to the upper surface 410 and the lower surface 412. The outer side 456x intersects the upper surface 410, the upper surface 410 intersects the inner side 456i, the inner side 456i intersects the lower surface 412, and finally, the lower surface 412 intersects the outer side 456x. Thus, the outer side 456x, the upper surface 410, the lower surface 412, and the inner side 456i together form at least a part of the third side portion 426.

[0037] In an exemplary embodiment, the third side portion 426 is divided into three sub - parts. The first sub - part includes the outer side 456x, the upper surface 410, the lower surface 412, and the inner side 456i (see the top view of the bottom member 400 shown in Figure 5C ). In addition, the second sub - part 480a includes at least a part of the outer side 452x that intersects the side 482a, and the side 482a intersects the side 484a (see Figure 5C ). The side 484a is substantially parallel to the side 452x. In addition, the side 482a is perpendicularly aligned with the corresponding axis 104a. Thus, the outer side 452x, the side 482a, the side 484a, at least a part of the top surface 410, and the bottom surface 412 together form the sub - part 480a, which is perpendicularly aligned with the axis 104a (see Figure 5C ). Similarly, the third sub - part 480b includes at least a part of the outer side 454x that intersects the side 482b, and the side 482b intersects the side 484b (see Figure 5C ). The side 484b is substantially parallel to the side 454x. In addition, the side 482b is perpendicularly aligned with its corresponding axis 104b. Thus, the outer side 454x, the side 482b, the side 484b, at least a part of the top surface 410, and the bottom surface 412 together form the sub - part 480b, and the sub - part 480b is perpendicularly aligned with the axis 104b (see Figure 5C)。Sub-parts 480a and 480b are separated from each other by 456x. Side 484a intersects side 456x such that the intersection forms an obtuse angle. Similarly, side 484b intersects side 456x such that the intersection forms an obtuse angle (see Figure 5C ).

[0038] The triangular bottom member 400 also includes a rectangular portion 460. The rectangular portion 460 includes sides 434, 428, and 432. The rectangular portion 460 also includes an upper surface 410 and a lower surface 412. Sides 434 and 432 are parallel to each other and perpendicular to side 428. Sides 434 and 432 are aligned parallel to axis 104c, and side 428 is aligned on an axis perpendicular to axis 104c. As Figure 4 shown, sides 428, 432, and 434 intersect the upper surface 410 and the lower surface 412 to form the rectangular portion 460. Thus, in the exemplary embodiment, the rectangular portion 460 abuts the triangular portion 450 to form the triangular bottom member 400, which includes a single upper surface 410, a single lower surface 412, sides 452x, 454x, 456x, 428, 432, 434, 452i, 454i, 456i, 482a, 482b, 484a, and 484b.

[0039] Returning to the reference Figure 1 , the top member 300 and the bottom member 400 are separated by struts 200a, 200b, and 200c to form the boat 100. As Figure 1 shown, the top member 300 and the bottom member 400 are arranged such that the holes 304 are vertically aligned with the holes 404 along an axis parallel to axis 102. As Figure 1 further shown, the cavities 302 and the cavities 402 are also aligned along axis 102. The top surface 206 of the strut 200a is attached to the lower surface 312 of the member 300 at the joint 312a. Similarly, the top surface 206 of the strut 200b is attached to the lower surface 312 of the member 300 at the joint 312b, and the top surface 206 of the strut 200c is attached to the lower surface 312 at the joint 312c. The bottom surface 208 of the strut 200a is attached to the top surface 410 of the member 400 at the joint 410a, the bottom surface 208 of the strut 200b is attached to the bottom surface 410 of the member 400 at the joint 410b, and the bottom surface 208 of the strut 200c is attached to the bottom surface 410 of the member 400 at the joint 410c.

[0040] As Figure 1As shown, this arrangement causes each slot 214 to form a triangle to support the wafer 550. Thus, the first wafer 550-1 can be supported by slots 214a-1, 214b-1, and 214c-2, the second wafer 550-2 can be supported by slots 214a-2, 214b-2, and 214c-2, and so on. In the exemplary embodiment provided herein, the boat 100 can support 25 wafers.

[0041] Figures 5A - 5C An example wafer 550 supported by one or more protruding elements 204 is shown. Figure 5A A side view of a portion of the support post 200 is shown. As Figure 5B shown, the wafer 550 rests on a small section 228 of the top protruding surface 232. In the exemplary embodiment, the section 228 is 3.5 mm long. Thus, the contact 552 between the wafer 550 and the protruding element 204 is minimized. Further, since the surface 232 is formed at an angle, the wafer 550 does not lie precisely flat on the top surface 232. Thus, the contact point 552 is further reduced. Accordingly, particulate residue due to contact between the wafer 550 and the boat 100 is greatly reduced.

[0042] Figure 5C A top view of the wafer 550 supported by the boat 100 is shown. The wafer 550 is supported by the protruding elements 204a of the support post 200a, the protruding elements 204b of the support post 200b, and the protruding elements 204c of the support post 200c. As Figure 5C shown, the protruding elements 204a, 204b, and 204c extend inwardly along the slot axis 104 (each axis 104 includes corresponding axes 104a, 104b, and 104c that intersect at the central axis 102). The wafer 550 rests on sections 228a, 228b, and 228c of the protruding elements 204a, 204b, and 204c. As Figure 5C shown, the hybrid between the triangular portion (including support posts 200a and 200b) and the rectangular portion (including support post 200c) provides stable support for the wafer 550 while keeping the contact between the wafer 550 and the support posts in each slot 214 to a minimum.

[0043] Advantageously, relative to a wafer storage rack having four struts (e.g., a four-strut arrangement), the inventors anticipate a 25% improvement in contamination performance, which is reflected by a specific count of relatively fewer wafer contact points relative to a wafer rack having four struts. Unexpectedly, experimental testing of the above-described wafer storage rack having three struts showed approximately 80% contamination relative to a wafer storage rack having four struts. In this regard, the experimental testing indicates that in the above-described three-strut configuration disclosed herein, defects, such as those associated with particles generated by contact between the wafer 550 and the wafer boat 100, are less than 20% of the particle generation in a wafer storage rack having four struts.

[0044] Reference Figure 6 , shows a method of manufacturing a boat, such as boat 100 ( Figure 1 shown). Method 600 includes defining a vertically extending central axis (e.g., axis 102), as shown in block 602. Method 600 also includes coupling a first strut (e.g., strut 200a) to a triangular top member (e.g., member 300) and a triangular bottom member (e.g., member 400) such that a first plurality of protruding elements extend from a first inner surface (e.g., surface 220) toward the central axis, as shown in block 604. In an exemplary embodiment, the first strut is coupled to the triangular top member and the triangular bottom member by coupling a first top surface (e.g., surface 206) of the first strut to a first top junction (e.g., junction point 312a) of the triangular top member and coupling a first bottom surface of the first strut to a first bottom junction (e.g., surface 412a) of the triangular bottom member.

[0045] Method 600 also includes coupling a second strut (e.g., strut 200b) to the triangular top member (e.g., member 300) and the triangular bottom member (e.g., member 400) such that a second plurality of protruding elements extend from a second inner surface (e.g., surface 220) toward the central axis, as shown in block 606. In an exemplary embodiment, the second strut is coupled to the triangular top member and the triangular bottom member by coupling a second top surface (e.g., surface 206) of the second strut to a second top junction (e.g., junction point 312b) of the triangular top member and coupling a second bottom surface of the second strut to a second bottom junction (e.g., surface 412b) of the triangular bottom member.

[0046] Method 600 further includes coupling a third strut (e.g., strut 200c) to a triangular top member (e.g., member 300) and a triangular bottom member (e.g., member 400) such that a third plurality of protruding elements extend from a third inner surface (e.g., surface 220) toward the central axis. In an exemplary embodiment, the third strut is coupled to the triangular top member and the triangular bottom member by coupling a third top surface (e.g., surface 206) of the third strut to a third top junction (e.g., junction point 312c) of the triangular top member and coupling a third bottom surface of the third strut to a third bottom junction (e.g., surface 412c) of the triangular bottom member.

[0047] In an exemplary embodiment, each protruding element (e.g., protruding element 204) includes a top protruding surface (e.g., top surface 232) and a bottom protruding surface (e.g., bottom surface 226), wherein the bottom protruding surface is perpendicular to the central axis, and wherein the top protruding surface is coupled to the bottom protruding surface at a protruding angle to form an inclined protruding element. In an exemplary embodiment, method 600 includes identifying a first top surface by identifying a first linear cut mark on a first outer surface of a first strut, identifying a second top surface of a second strut by identifying a second linear cut mark on a second outer surface of the second strut, and identifying a third top surface of a third strut by identifying a third linear cut mark on a third outer surface of the third strut.

[0048] In an exemplary embodiment, method 600 further includes identifying the triangular top member as a member having a single cavity and identifying the triangular bottom member as a member having a plurality of cavities. In an exemplary embodiment of method 600, the triangular top member further includes a top triangular portion (e.g., triangular portion 350) that is adjacent to a top rectangular portion (e.g., rectangular portion 360) to form the triangular top member such that the top triangular portion further includes a top triangular hole. In an exemplary embodiment of method 600, the triangular bottom member includes a bottom triangular portion (e.g., triangular portion 450) that is adjacent to a bottom rectangular portion (e.g., rectangular portion 460) to form the triangular bottom member such that the bottom triangular portion further includes a bottom triangular hole. In an exemplary embodiment, method 600 further includes aligning the top triangular hole and the bottom triangular hole parallel to each other such that a hole axis parallel to the central axis perpendicularly passes through the top triangular hole and the bottom triangular hole.

[0049] Although the present disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that the present disclosure extends to other alternative embodiments and / or uses of the embodiments beyond the specifically described embodiments and their obvious modifications and equivalents. Additionally, although several variations of the embodiments of the present disclosure have been shown and described in detail, other modifications within the scope of the present disclosure will be apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or sub - combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that the various features and aspects of the disclosed embodiments may be combined with or substituted for one another in order to form different modes of the embodiments of the present disclosure. Accordingly, the scope of the present disclosure should not be limited by the above - described specific embodiments.

[0050] The headings (if any) provided herein are for convenience only and do not necessarily affect the scope or meaning of the devices and methods disclosed herein.

Claims

1. A wafer boat configured to support one or more wafers, the wafer boat comprising: a first pillar having a first plurality of protruding elements, wherein the first pillar is defined by a first inner surface, a first outer surface, a first top surface, and a first bottom surface, wherein the first plurality of protruding elements extend from the first inner surface; a second pillar having a second plurality of protruding elements, wherein the second pillar is defined by a second inner surface, a second outer surface, a second top surface, and a second bottom surface, wherein the second plurality of protruding elements extend from the second inner surface; a third strut having a third plurality of protruding elements, wherein the third strut is defined by a third inner surface, a third outer surface, a third top surface, and a third bottom surface, wherein the third plurality of protruding elements extend from the third inner surface; a triangular top member having a first top joint, a second top joint, and a third top joint, wherein the triangular top plate is coupled to the first, second, and third struts such that the first top surface is coupled to the first top joint, the second top surface is coupled to the second top joint, and the third top surface is coupled to the third top joint; a triangular base member having a first base joint, a second base joint, and a third base joint, wherein the triangular base plate is coupled to the first, second, and third struts such that the first base surface is coupled to the first base joint, the second base surface is coupled to the second base joint, and the third base surface is coupled to the third base joint; wherein the triangular top member and the triangular bottom member are parallel to each other, wherein the wafer boat defines a central axis extending vertically and further parallel to the first pillar, the second pillar, and the third pillar, and wherein a first plurality of protruding elements, a second plurality of protruding elements, and a third plurality of protruding elements extend toward the central axis to define a plurality of wafer slots, wherein each wafer slot is configured to support a wafer.

2. The wafer boat according to claim 1, wherein: Each protruding element includes a top protruding surface and a bottom protruding surface, wherein the bottom protruding surface is perpendicular to the central axis, and wherein the top protruding surface is coupled to the bottom protruding surface at a protruding angle to form an inclined protruding element.

3. The wafer boat according to claim 2, wherein: The protrusion angle is 5 degrees.

4. The wafer boat according to claim 2, wherein: Each protruding element further includes a side protruding surface such that the bottom protruding surface is coupled to the side protruding surface, and wherein the side protruding surface is coupled to the top protruding surface and is 3 millimeters.

5. The wafer boat according to claim 2, wherein: The bottom protruding surface is 20 mm.

6. The wafer boat according to claim 2, wherein: The top protruding surface of each protruding element includes the wafer segment so that a wafer supported by the protruding element is confined to contact only within the wafer segment.

7. The wafer boat according to claim 6, wherein: The crystal segment is 3.5 mm.

8. The wafer boat according to claim 1, wherein: The first outer surface includes a first linear cutting mark such that the first linear cutting mark is closer to the first top surface than to the first bottom surface, wherein the second outer surface includes a second linear cutting mark such that the second linear cutting mark is closer to the second top surface than to the second bottom surface, and wherein the third outer surface includes a third linear cutting mark such that the third linear cutting mark is closer to the third top surface than to the third bottom surface.

9. The wafer boat according to claim 1, in, the triangular top member being defined by a top triangular portion and a top rectangular portion such that the top triangular portion includes the first top joint and the second top joint and the top rectangular portion includes the third top joint; and Wherein, the triangular bottom member is defined by a bottom triangular portion and a bottom rectangular portion, such that the bottom triangular portion includes the first bottom joint and the second bottom joint, and the bottom rectangular portion includes the third bottom joint.

10. The wafer boat according to claim 9, wherein: The triangular top member includes a triangular top hole, wherein the triangular bottom member includes a triangular bottom hole, and wherein the triangular top hole and the triangular bottom hole are vertically aligned along an axis parallel to the central axis.

11. The wafer boat according to claim 9, wherein: The triangular shaped top member includes a top central bore, and wherein the triangular shaped bottom member includes a bottom central bore, and wherein the top central bore and the bottom central bore are aligned along the central axis.

12. The wafer boat according to claim 9, wherein: The triangular bottom member includes a plurality of cavities.

13. The wafer boat according to claim 12, wherein: The multiple cavity holes include a first cavity hole formed at the third bottom joint, a second cavity hole formed between the bottom center cavity hole and the second cavity hole, a third cavity hole formed between the triangular bottom hole and the bottom center cavity hole, and a fourth cavity hole formed between the first bottom joint and the second bottom joint, wherein the first cavity hole, the second cavity hole, the third cavity hole, the fourth cavity hole and the bottom center cavity hole are aligned along the slot axis relative to the third pillar.

14. A method of manufacturing a wafer boat, comprising: defining a vertically extending central axis; coupling the first leg to the triangular top member and the triangular bottom member by coupling a first top surface of the first leg to a first top junction of the triangular top member and coupling a first bottom surface of the first leg to a first bottom junction of the triangular bottom member such that a first plurality of protruding elements extend from the first inner surface toward the central axis; coupling the second leg to the triangular top member and the triangular bottom member by coupling a second top surface of the second leg to a second top junction of the triangular top member and coupling a second bottom surface of the second leg to a second bottom junction of the triangular bottom member such that a second plurality of protruding elements extend from the second inner surface toward the central axis; as well as The third pillar is connected to the triangular top member and the triangular bottom member by connecting the third top surface of the third pillar to the third top joint of the triangular top member and connecting the third bottom surface of the third pillar to the third bottom joint of the triangular bottom member, so that a third plurality of protruding elements extend from the third inner surface toward the central axis.

15. The method according to claim 14, in, Each protruding element includes a top protruding surface and a bottom protruding surface, wherein the bottom protruding surface is perpendicular to the central axis, and wherein the top protruding surface is coupled to the bottom protruding surface at a protruding angle to form an inclined protruding element.

16. The method according to claim 14, in, coupling the first top surface of the first leg to the first top joint of the triangular-shaped top member further comprises identifying the first top surface of the first leg by identifying a first linear cut mark on a first outer surface of the first leg; wherein coupling the second top surface of the second pillar to the second top joint of the triangular top member further comprises identifying the second top surface of the second pillar by identifying a second linear cut mark on a second outer surface of the second pillar; and Wherein, coupling the third top surface of the third pillar to the third top joint of the triangular top member further comprises identifying the third top surface of the third pillar by identifying a third linear cut mark on a third outer surface of the third pillar.

17. The method according to claim 14, in, Connecting the first leg to the triangular top member and the triangular bottom member, connecting the second leg to the triangular top member and the triangular bottom member, and connecting the third leg to the triangular top member and the triangular bottom member also includes identifying the triangular top member as a member having a single cavity and identifying the triangular bottom member as a member having multiple cavities.

18. The method according to claim 14, in, The triangular top member includes a top triangular portion adjoining the top rectangular portion to form a triangular top member, such that the top triangular portion also includes a top triangular aperture, wherein the triangular bottom member includes a bottom triangular portion that abuts the bottom rectangular portion to form a triangular bottom member, such that the bottom triangular portion also includes a bottom triangular hole, and Among them, connecting the first pillar with the triangular top member and the triangular bottom member, connecting the second pillar with the triangular top member and the triangular bottom member, and connecting the third pillar with the triangular top member and the triangular bottom member also includes aligning the top triangular hole and the bottom triangular hole parallel to each other so that the hole axis parallel to the center axis passes vertically through the top triangular hole and the bottom triangular hole.

19. A load lock chamber comprising: A wafer boat having a plurality of pillars, wherein each of the plurality of pillars comprises a plurality of protruding elements, wherein each protruding element comprises a top protruding surface and a bottom protruding surface, wherein the bottom protruding surface is perpendicular to a central axis, and wherein the top protruding surface is coupled to the bottom protruding surface at a protruding angle to form an inclined protruding element.

20. The load lock chamber of claim 19, further comprising: a triangular top member coupled to each of the plurality of struts; as well as A triangular bottom member is coupled to each of the plurality of struts such that the triangular top member and the triangular bottom member are coupled parallel to each other.

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