Carbon dioxide foaming machine and cutting machine linkage system

Abstract

The invention discloses a carbon dioxide foaming machine (CO2 Bubble) and cutting machine linkage system, and belongs to the technical field of wafer cutting. Compared with the prior art, the water resistance value state can be monitored in real time in an omnibearing and uninterrupted mode, meanwhile, monitoring data can be stored in real time, a complete historical record is formed, technicians can be helped to backtrack the water resistance value condition in the production process at any time, and detailed data support can be provided for subsequent production optimization, troubleshooting and process improvement; when the water resistance value exceeds the set upper and lower limit range, the system can quickly transmit abnormal information to the cutting machine through wireless signal transmission, the cutting machine can immediately trigger an alarm shutdown program after receiving a signal, and the cutting machine cannot continue to work as long as the water resistance value is not recovered to the normal range. The shutdown protection mechanism can cut off the abnormal production process in the first time, effectively avoids the problems of electrostatic breakdown and the like caused by abnormal water resistance values, greatly reduces the defective rate of products, and improves the product quality and the production stability.

Description

Technical Field

[0001] The present invention belongs to the technical field of wafer cutting, and particularly relates to a linkage system between a carbon dioxide foaming machine and a cutting machine. Background Art

[0002] In current related industries such as semiconductor manufacturing, a CO2 bubble (carbon dioxide foaming machine) and a wafer sawmachine (wafer cutting machine) usually operate independently, and there is a lack of an effective linkage mechanism between them. During the actual operation process, the main function of the carbon dioxide foaming machine is to inject carbon dioxide into ultrapure water, causing a chemical reaction to generate ions, thereby increasing the conductivity of the ultrapure water and reducing the resistivity, so as to meet the requirements of specific production processes for the resistivity of water quality. However, when the carbon dioxide foaming machine fails or operates abnormally and alarms, due to the lack of linkage with the cutting machine, the cutting machine will not automatically stop.

[0003] In this case, the cutting operation continues, which is likely to cause electrostatic breakdown problems. Electrostatic breakdown can cause irreversible damage to precision electronic components such as wafers, seriously affecting product quality and production efficiency. Moreover, this problem is difficult to detect in a timely manner during the operation process, and it is necessary to invest a large amount of manpower, material resources, and time to check the entire production process, collect various data and analyze them, which not only consumes a large amount of costs but also delays the product delivery time. Summary of the Invention

[0004] In view of the above situation, to overcome the defects of the prior art, the present invention uses a resistance value signal controller to monitor the resistance value change of ultrapure water during the operation of the carbon dioxide foaming machine in real time. Once the resistance value is abnormal, it uses a signal transmission channel built by a wireless transmitter and a wireless receiver to quickly transmit the information to the machine controller of the cutting machine. After receiving the abnormal signal, the machine controller can immediately respond and trigger the alarm and stop signal of the cutting machine, thereby avoiding production accidents caused by water quality problems. At the same time, a download receiver is set to record and store all water resistance values, providing support for subsequent data analysis and production optimization.

[0005] To achieve the above object, the following technical solution is adopted: The present invention provides a linkage system between a carbon dioxide foaming machine and a cutting machine, including:

[0006] A carbon dioxide foaming machine, which is used to increase the conductivity of ultrapure water and reduce the resistivity;

[0007] A resistance value signal controller, which monitors the resistance value change of the carbon dioxide foaming machine in real time;

[0008] A wireless transmitter, when the water resistance value exceeds the upper and lower limits set by the carbon dioxide foaming machine, the wireless transmitter transmits a signal to the wireless receiver of the cutting machine;

[0009] A cutting machine, which is used to cut wafers;

[0010] A wireless receiver, which receives the signal from the wireless transmitter and feeds it back to the machine tool controller;

[0011] A machine tool controller, which receives the feedback from the wireless receiver and triggers the alarm shutdown signal of the cutting machine;

[0012] A download receiver, which stores all water resistance value records in real time.

[0013] Furthermore, when the cutting machine triggers an alarm shutdown and the water resistance value has not returned to normal, the cutting machine cannot continue to operate.

[0014] Furthermore, the resistance value signal controller compares and monitors all resistance value signals.

[0015] The beneficial effects of the present invention are:

[0016] (1) The present invention can conduct all-round and uninterrupted real-time monitoring of the water resistance value state. At the same time, these monitoring data will be stored in real time to form a complete historical record, which helps technicians to trace back the water resistance value situation during the production process at any time, and can also provide detailed data support for subsequent production optimization, fault troubleshooting, and process improvement;

[0017] (2) When the water resistance value exceeds the set upper and lower limit ranges, the system will quickly transmit the abnormal information to the cutting machine through wireless signal transmission. After receiving the signal, the cutting machine will immediately trigger the alarm shutdown program. Moreover, as long as the water resistance value has not returned to the normal range, the cutting machine cannot continue to operate. This shutdown protection mechanism can cut off the abnormal production process in the first time, effectively avoid problems such as electrostatic breakdown caused by abnormal water resistance value, greatly reduce the product defective rate, and improve the product quality and production stability. Description of the Drawings

[0018] Figure 1 It is the schematic diagram of the linkage system of the carbon dioxide foaming machine and the cutting machine of the present invention.

[0019] The drawings are used to provide a further understanding of the present invention, and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention, and do not constitute a limitation to the present invention. Detailed Embodiments

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0021] Unless otherwise defined, all professional and scientific terms used herein have the same meaning as those familiar to those skilled in the art. In addition, any methods and materials similar or equivalent to the described content can be applied to the present invention. The preferred implementation methods and materials described herein are only for demonstration purposes and do not limit the content of this application.

[0022] The experimental methods in the following embodiments are all conventional methods unless otherwise specified. The test materials used in the following embodiments are all purchased from commercial channels unless otherwise specified.

[0023] Refer to Figure 1 , the embodiments of the linkage system of the carbon dioxide foaming machine and the cutting machine provided by the present invention are as follows:

[0024] Carbon dioxide foaming machine: A high-performance carbon dioxide foaming machine commonly used in the industry is adopted. Its working principle is to inject carbon dioxide into ultrapure water by precisely controlling the injection amount of carbon dioxide, promoting a chemical reaction between carbon dioxide and ultrapure water to generate ions, thereby achieving the purpose of increasing the conductivity of ultrapure water and reducing the resistivity. During actual installation, the carbon dioxide foaming machine is installed near the ultrapure water supply source to ensure that it can efficiently process ultrapure water and is convenient for subsequent connection to the resistance value signal controller.

[0025] Resistance value signal controller: A high-precision resistance value signal controller is adopted. This controller has data processing capabilities and a fast response speed. It is connected to the carbon dioxide foaming machine through a sensor and can monitor the resistance value change of the water produced during the operation of the carbon dioxide foaming machine in real time and accurately. To ensure the accuracy and stability of the data, the sensor is calibrated and debugged during installation, and an independent regulated power supply is equipped for the resistance value signal controller to prevent the accuracy of the monitoring data from being affected by voltage fluctuations.

[0026] Wireless transmitter: A wireless transmitter with a long transmission distance and strong anti-interference ability is adopted. When the resistance value signal controller monitors that the water resistance value exceeds the upper and lower limits set by the carbon dioxide foaming machine, it immediately transmits the abnormal signal to the wireless transmitter. The wireless transmitter encodes and modulates the received signal and sends it out in the form of a wireless signal. During installation, the wireless transmitter is installed in a position without signal transmission obstacles, and its transmission frequency is optimized to avoid interference with the wireless signals of other devices.

[0027] Cutting Machine: A high-precision wafer cutting machine is used for cutting wafers. This cutting machine features high automation and high cutting precision, and can meet the strict requirements for wafer cutting in industries such as semiconductor manufacturing. In the control system of the cutting machine, an interface for connecting to a wireless receiver is reserved to receive signals from a wireless transmitter.

[0028] Wireless Receiver: Installed near the cutting machine, it can stably and quickly receive signals sent by the wireless transmitter. After receiving the signal, the wireless receiver decodes and processes the signal, and then feeds it back to the machine tool controller. To ensure the stability of signal reception, the antenna of the wireless receiver has been optimized to improve its signal reception sensitivity.

[0029] Machine Tool Controller: As the core control unit of the cutting machine, the machine tool controller has logical processing capabilities. When it receives the signal fed back by the wireless receiver, the machine tool controller immediately triggers the alarm shutdown signal of the cutting machine. In terms of alarm shutdown, not only is a prominent alarm message displayed on the operation interface of the cutting machine, but also an external audible and visual alarm device is used to issue an alarm to remind the operator to handle it in a timely manner. At the same time, the machine tool controller also has data recording and query functions, and can record information such as the time and cause of each alarm shutdown, which is convenient for subsequent fault analysis and production management.

[0030] Download Receiver: A large-capacity and high-speed data storage device is selected as the download receiver, which can store all water resistance value records in real time. In terms of data storage, a database management system is adopted to classify, organize and index the stored data, which is convenient for technicians to query and call historical data at any time. At the same time, to ensure data security, the download receiver is equipped with a data backup function to regularly back up the stored data to an external storage device to prevent data loss due to equipment failure.

[0031] Result Analysis

[0032] Real-time monitoring and data storage effect: During the actual operation process, the resistance value signal controller has successfully achieved all-round and uninterrupted real-time monitoring of the water resistance state. Through the download receiver, all water resistance data are recorded in real time and accurately, forming a complete historical record. Technicians can, through specialized data query software, trace back the water resistance situation at any time period. These data provide strong support for subsequent production optimization. By analyzing the historical data, technicians can find out the potential relationship between the water resistance and product quality, thereby optimizing the working parameters of the carbon dioxide foaming machine and improving the yield rate of products. In terms of troubleshooting, when abnormal situations occur during the production process, technicians can, based on the data in the download receiver, quickly locate the time point when the problem occurred and the water resistance state at that time, greatly shortening the troubleshooting time and improving production efficiency.

[0033] Alarm and shutdown protection mechanism effect: When the water resistance exceeds the set upper and lower limit ranges, the system's alarm and shutdown protection mechanism performs excellently. The wireless transmitter can transmit the abnormal signal to the wireless receiver of the cutting machine within an extremely short time. The entire signal transmission process is stable and reliable, with almost no signal loss or delay. After receiving the signal, the machine controller of the cutting machine quickly triggers the alarm and shutdown program, and the alarm information can be displayed on the operation interface in a timely and accurate manner. At the same time, the audible and visual alarm device also immediately sounds an alarm. As long as the water resistance does not return to the normal range, the cutting machine cannot continue to operate, and this feature greatly reduces the defective rate of products.

[0034] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

[0035] The above has described the present invention and its implementation manners. This description is not restrictive, and what is shown in the drawings is only one of the implementation manners of the present invention. The actual application is not limited to this. Generally speaking, if those of ordinary skill in the art are inspired by it and, without departing from the purpose of the present invention creation, design in a non-creative way similar ways and embodiments to this technical solution, they should all fall within the protection scope of the present invention.

Claims

1. A linkage system for a carbon dioxide foaming machine and a cutting machine, characterized in that: Including: A carbon dioxide foaming machine, which is used to increase the conductivity of ultrapure water and reduce the resistivity; A resistance value signal controller, which monitors the change of the resistance value of the carbon dioxide foaming machine in real time; A wireless transmitter. When the water resistance value exceeds the upper and lower limits set by the carbon dioxide foaming machine, the wireless transmitter transmits the signal to the wireless receiver of the cutting machine; A cutting machine, which is used to cut wafers; A wireless receiver, which receives the signal from the wireless transmitter and feeds it back to the machine platform controller; A machine platform controller, which receives the feedback from the wireless receiver and triggers the alarm shutdown signal of the cutting machine; A download receiver, which stores all the water resistance value records in real time.

2. The carbon dioxide foaming machine and cutting machine linkage system according to claim 1, wherein: When the cutting machine triggers an alarm shutdown and the water resistance value does not return to normal, the cutting machine cannot continue to operate.

3. The carbon dioxide foaming machine and cutting machine linkage system according to claim 2, wherein: The resistance value signal controller compares and monitors all resistance value signals.

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