High-sensitivity force measurement guide mechanism based on thirteen-level flexible hinge coupling

Abstract

The invention discloses a high-sensitivity force measurement guide mechanism based on thirteen-level flexible hinge coupling, and relates to the technical field of precise instruments. The main supporting assembly is fixedly installed in the middle of the surface of the base plate, the rotating beam assembly is suspended below the main supporting assembly, the fine adjustment assemblies are symmetrically installed at the two ends of the rotating beam assembly, and the two guiding modules are symmetrically arranged on the two sides of the bottom of the rotating beam assembly and fixedly installed on the surface of the base plate through the auxiliary supporting assembly. The rotating beam assembly is connected with the two guide modules through the four connecting plate spring assemblies. The rotating beam assembly is hung below the main supporting assembly through the main rotating flexible hinge, the two guiding modules are supported and installed below the two sides of the rotating beam assembly and connected through the four connecting plate spring assemblies, a thirteen-level flexible hinge coupling mechanism is formed, and the force measuring and guiding requirements can be met at the same time under specific conditions.

Description

Technical Field

[0001] The present invention relates to the technical field of precision instruments, and specifically to a high-sensitivity force-measuring and guiding mechanism based on a thirteen-stage flexible hinge coupling. Background Art

[0002] The high-sensitivity force-measuring and guiding device is an important component of many precision instruments. It requires that the stiffness in the force-measuring direction is small enough to obtain a high force-measuring sensitivity, and the straightness in the force-measuring direction is high enough to meet the guiding requirements.

[0003] In addition, some special high-sensitivity force-measuring and guiding mechanisms also put forward higher requirements for their use environments, such as vacuum and magnetic isolation environments. Common guiding mechanisms applied to precision instruments include ball screw guiding mechanisms, air-floating guide rail guiding mechanisms, and magnetic-floating guide rail guiding mechanisms. However, due to their own characteristics, these guiding mechanisms are difficult to be applied to the limited use environments.

[0004] Most common force-measuring devices use force sensors based on electronic components for measurement. However, since electronic components are easily affected by the external environment, the output electrical signal value of the sensor changes or the electrical signal output value cannot be output in real time, ultimately resulting in inaccurate measurement of the force value and hysteresis of the force-measuring timing. This requires the design of a high-sensitivity force-measuring and guiding mechanism that can simultaneously meet the requirements of force measurement and guiding and can be applied to specific use environments. Summary of the Invention

[0005] To solve the deficiencies in the background art, the present invention provides a high-sensitivity force-measuring and guiding mechanism based on a thirteen-stage flexible hinge coupling. A rotating beam assembly is suspended under the main support assembly through a main rotating flexible hinge, and two guiding modules are supported and installed under both sides of the rotating beam assembly and connected by four connecting plate spring assemblies to form a thirteen-stage flexible hinge coupling mechanism, which can simultaneously meet the requirements of force measurement and guiding under specific conditions.

[0006] To achieve the above object, the present invention adopts the following technical solution: A high-sensitivity force-measuring and guiding mechanism based on a thirteen-stage flexible hinge coupling, including a rotating beam assembly, a main support assembly, a third connecting plate spring assembly, a substrate, a sub-support assembly, a fourth connecting plate spring assembly, and a guiding module;

[0007] The main support assembly is fixedly installed in the middle of the surface of the substrate;

[0008] A cross beam is arranged above the main support assembly, and support brackets are installed side by side at both ends thereof, and a suspension member is installed at the middle position of the bottom of the cross beam;

[0009] A main rotary flexible hinge is vertically installed at the center of the top surface of the rotary beam assembly and is connected and fixed to the suspension member. Two guiding modules are symmetrically arranged on both sides of the bottom of the rotary beam assembly. Fine-tuning components are symmetrically installed at both ends of the rotary beam assembly for leveling. Two vertical through holes are symmetrically machined on both sides of the rotary beam assembly for the installation of the third connecting plate spring assembly;

[0010] The guiding module includes a first connecting plate spring assembly, a second connecting plate spring assembly, an indirect motion assembly, a fixed-end assembly, and a direct motion assembly. The fixed-end assembly consists of two columns arranged in parallel and a U-shaped connecting rod connecting the middle positions of the two. The indirect motion assembly adopts an arcuate structure and is relatively arranged on the closed side of the U-shaped connecting rod of the fixed-end assembly. The direct motion assembly is arranged between the two columns of the fixed-end assembly, and a load to be measured connecting member is installed at the middle position of its bottom. The top and both sides of the bottom of the direct motion assembly are connected to the indirect motion assembly by four of the first connecting plate spring assemblies. The top and both sides of the bottom of the indirect motion assembly are connected to the ends of the two columns of the fixed-end assembly by four of the second connecting plate spring assemblies;

[0011] The auxiliary support assembly mounts and fixes the fixed-end assemblies of the two guiding modules to the substrate surface;

[0012] The number of the third connecting plate spring assemblies is two, and the two third connecting plate spring assemblies connect the two sides of the rotary beam assembly to the indirect motion assemblies of the two guiding modules;

[0013] The number of the fourth connecting plate spring assemblies is two, and the two fourth connecting plate spring assemblies connect the two ends of the rotary beam assembly to the direct motion assemblies of the two guiding modules.

[0014] Furthermore, four limiting grooves are symmetrically machined on the surfaces of the two side walls of the rotary beam assembly in a rectangular arrangement. Four limiting components are symmetrically installed on the top of the support leg of the main support assembly in a rectangular arrangement. The main body of the limiting component is an L-shaped connecting arm. One side arm of it is connected and fixed to the support leg, and the other side arm is arranged in parallel with the surface of the side wall of the rotary beam assembly and a limiting screw is installed. The limiting screw extends into the corresponding limiting groove to limit the maximum deflection angle of the rotary beam assembly.

[0015] Furthermore, the length of the third connecting plate spring assembly is l1, the length of the fourth connecting plate spring assembly is l2, the distance from the third connecting plate spring assembly to the center of the main rotary flexible hinge is L2, and the distance from the fourth connecting plate spring assembly to the center of the main rotary flexible hinge is L1, and the relationship satisfies

[0016] Further, the fine-tuning component includes a screw rod, a U-shaped connecting frame, and a fine-tuning nut. The U-shaped connecting frame is horizontally arranged, and the open side is fixedly connected to the end of the rotating beam body. The screw rod is coaxially fixed outside the closed side of the U-shaped connecting frame, and the fine-tuning nut is in threaded connection with the screw rod.

[0017] Further, the openings on both sides of the main rotating flexible hinge are symmetric arcs, so that the main rotating flexible hinge gradually thickens from the center point to the upper and lower ends.

[0018] Further, both the first connecting plate spring assembly and the second connecting plate spring assembly adopt a structural form of a double-layer pressing plate with a flexible spring piece sandwiched in the middle.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows: The rotating beam assembly is suspended below the main support component through the main rotating flexible hinge. Fine-tuning components are arranged at both ends of the rotating beam assembly for leveling in the initial state. Two guiding modules are supported and installed below both sides of the rotating beam assembly. Each guiding module horizontally and oppositely arranges a direct motion component and an indirect motion component, and they are connected by four pairs of connecting plate spring assemblies. Both sides of the middle of the rotating beam assembly are connected to the indirect motion components of the two guiding modules through two connecting plate spring assemblies. Both ends of the rotating beam assembly are connected to the direct motion components of the two guiding modules through two connecting plate spring assemblies, forming a thirteen-level flexible hinge coupling mechanism. A load is applied below the direct motion components on both sides. By measuring the straightness along the guiding direction, the force difference can be calculated, which can simultaneously meet the requirements of force measurement and guiding under specific conditions, and has high measurement accuracy. Description of the Drawings

[0020] Figure 1 is the overall structural schematic diagram of the high-sensitivity force measurement and guiding mechanism of the present invention;

[0021] Figure 2 is the structural schematic diagram of the fine-tuning component in the present invention;

[0022] Figure 3 is the structural schematic diagram of the rotating beam assembly in the present invention;

[0023] Figure 4 is the structural schematic diagram of the limit component in the present invention;

[0024] Figure 5 is the structural schematic diagram of the main support component in the present invention;

[0025] Figure 6 is the structural schematic diagram of the auxiliary support component in the present invention;

[0026] Figure 7 is the structural schematic diagram of the first connecting plate spring assembly in the present invention;

[0027] Figure 8It is a schematic structural diagram of the second connecting plate spring assembly in the present invention;

[0028] Figure 9 It is a schematic structural diagram of the third connecting plate spring assembly in the present invention;

[0029] Figure 10 It is a schematic structural diagram of the fourth connecting plate spring assembly in the present invention;

[0030] Figure 11 It is a schematic structural diagram of the direct motion assembly in the present invention;

[0031] Figure 12 It is a schematic structural diagram of the guiding module in the present invention;

[0032] Figure 13 It is a dimension information marking diagram of the upper connecting plate spring assembly of the rotating beam assembly in the present invention;

[0033] Figure 14 It is a physical diagram of the application of the measurement scheme in the present invention.

[0034] In the figure: 1. Fine-tuning assembly; 2. Rotating beam assembly; 3. Limiting assembly; 4. Main support assembly; 5. First connecting plate spring assembly; 6. Second connecting plate spring assembly; 7. Third connecting plate spring assembly; 8. Indirect motion assembly; 9. Substrate; 10. Sub-support assembly; 11. Fixed-end assembly; 12. Direct motion assembly; 13. Fourth connecting plate spring assembly; 1-1. Screw; 1-2. U-shaped connecting frame; 1-3. Fine-tuning nut; 2-1. Main rotating flexible hinge; 2-2. Rotating beam body; 2-21. Limiting groove; 2-22. Perforation; 3-1. Limiting screw; 3-2. L-shaped connecting arm; 4-1. Main support frame; 4-2. Suspension member; 4-3. Main support base; 4-4. Cross beam; 5-1. Spring end pressing plate one; 5-2. Flexible spring one; 5-3. Spring middle section pressing plate one; 6-1. Spring end pressing plate two; 6-2. Flexible spring two; 6-3. Spring middle section pressing plate two; 7-1. Hinge cover plate one; 7-2. Leaf spring connecting piece one; 7-3. Flexible leaf spring one; 10-1. Sub-support frame; 10-2. Sub-support base; 12-1. Direct motion end; 12-2. Test load connecting piece; 13-1. Hinge cover plate two; 13-2. Leaf spring connecting piece two; 13-3. Flexible leaf spring two. Detailed implementation manners

[0035] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.

[0036] This solution is for the NQI special project of the National Key Research and Development Program, project number 2023YFF0612501. As Figures 1 to 13 shown, a high-sensitivity force-measuring guiding mechanism based on a thirteen-stage flexible hinge coupling includes a rotating beam assembly 2, a main support assembly 4, a third connecting plate spring assembly 7, a substrate 9, a secondary support assembly 10, a fourth connecting plate spring assembly 13, and a guiding module.

[0037] Combined with Figures 1 to 5 shown, the main support assembly 4 is fixedly installed in the middle of the surface of the substrate 9. Combined with Figure 5 shown, the main support assembly 4 includes a main support frame 4-1, a suspension member 4-2, a main support base 4-3, and a cross beam 4-4. The cross beam 4-4 is arranged above the substrate 9. The suspension member 4-2 is fixedly installed at the middle position of the bottom of the cross beam 4-4 through bolts. Two support legs are installed in parallel at both ends of the cross beam 4-4 and are fixedly connected to the substrate 9 through bolts. The support legs are composed of the main support frame 4-1 and the main support base 4-3. The top end of the main support frame 4-1 is fixedly connected to the cross beam 4-4 through bolts, the bottom end of the main support frame 4-1 is fixedly connected to the top end of the main support base 4-3 through bolts, and the bottom end of the main support base 4-3 is fixedly connected to the substrate 9 through bolts. The rotating beam assembly 2 is suspended and installed below the main support assembly 4. Combined with Figure 3 shown, the rotating beam assembly 2 includes a main rotating flexible hinge 2-1 and a rotating beam body 2-2. A prefabricated installation groove is provided at the center of the top surface of the rotating beam body 2-2, and the main rotating flexible hinge 2-1 is vertically installed and fixed. The top end of the main rotating flexible hinge 2-1 extends out of the installation groove and is fixedly connected to the suspension member 4-2 through bolts. The openings on both sides of the main rotating flexible hinge 2-1 are symmetric arcs, so that the main rotating flexible hinge 2-1 gradually thickens from the center point to the upper and lower ends. In addition, two vertical through holes 2-22 are symmetrically processed on both sides of the installation groove of the rotating beam body 2-2 for the subsequent installation cooperation of the third connecting plate spring assembly 7. Four limiting grooves 2-21 are processed on the surface of both side walls of the rotating beam body 2-2 in a rectangular arrangement centered on the installation groove for the subsequent limiting cooperation of the limiting assembly 3. Fine adjustment components 1 are symmetrically installed at both ends of the rotating beam assembly 2. Combined with Figure 2 shown, the fine adjustment component 1 includes a screw 1-1, a U-shaped connecting frame 1-2, and a fine adjustment nut 1-3. The U-shaped connecting frame 1-2 is horizontally arranged, and the opening side is fixedly connected to the end of the rotating beam body 2-2 through bolts. The screw 1-1 is coaxially fixed outside the closed side of the U-shaped connecting frame 1-2. The fine adjustment nut 1-3 is screwed with the screw 1-1. The leveling operation of the rotating beam assembly 2 before testing is realized by adjusting the positions of the fine adjustment nuts 1-3 at both ends. Four limiting components 3 are symmetrically installed at the top of the support legs on both sides of the main support assembly 4 in a rectangular arrangement. Combined with Figure 4As shown, the limiting component 3 includes a limiting screw 3-1 and an L-shaped connecting arm 3-2. One side arm of the L-shaped connecting arm 3-2 is fixedly connected to the main support frame 4-1 by bolts. The other side arm of the L-shaped connecting arm 3-2 is arranged parallel to the side wall surface of the rotating beam body 2-2 and the limiting screw 3-1 is installed through a prefabricated screw hole. The limiting screw 3-1 extends into the corresponding limiting groove 2-21 on the side wall surface of the rotating beam body 2-2 to limit the maximum deflection angle at both ends of the rotating beam assembly 2.

[0038] Combined with Figure 1 , Figures 7 to 8 and Figures 11 to 12 shown, two guiding modules are symmetrically arranged on both sides of the bottom of the rotating beam assembly 2. Combined with Figure 12 shown, the guiding module includes a first connecting plate spring assembly 5, a second connecting plate spring assembly 6, an indirect motion assembly 8, a fixed-end assembly 11 and a direct motion assembly 12. Among them, the fixed-end assembly 11 is composed of two columns arranged in parallel and a U-shaped connecting rod connecting the middle positions of the two. The indirect motion assembly 8 adopts an arcuate structure and is relatively arranged on the closed side of the U-shaped connecting rod of the fixed-end assembly 11. The direct motion assembly 12 is arranged between the two columns of the fixed-end assembly 11. Combined with Figure 11 shown, the direct motion assembly 12 includes a direct motion end 12-1 and a test load connecting piece 12-2. The direct motion end 12-1 is arranged in a plate-like structure with a gap between the two columns of the fixed-end assembly 11. The test load connecting piece 12-2 is fixedly installed at the middle position of the bottom of the direct motion end 12-1 for the loading and assembly of the test piece to be tested. The top and both sides of the bottom of the direct motion end 12-1 are connected to the indirect motion assembly 8 by four first connecting plate spring assemblies 5, and the top and both sides of the bottom of the indirect motion assembly 8 are further connected to the ends of the two columns of the fixed-end assembly 11 by four second connecting plate spring assemblies 6. Both the first connecting plate spring assembly 5 and the second connecting plate spring assembly 6 adopt a structural form with a double-layer pressing plate sandwiching a flexible spring piece. Combined with Figure 7 shown, the first connecting plate spring assembly 5 includes a first spring piece end pressing plate 5-1, a first flexible spring piece 5-2 and a first spring piece middle section pressing plate 5-3. The middle of the first flexible spring piece 5-2 is clamped by two layers of the first spring piece middle section pressing plates 5-3 and then fixed by bolts. Both ends of the first flexible spring piece 5-2 are clamped by two layers of the first spring piece end pressing plates 5-1, and after overlapping with the direct motion end 12-1 and the indirect motion assembly 8, they are fixed by bolts; Combined with Figure 8As shown, the second connecting leaf spring assembly 6 includes a leaf spring end pressing plate two 6-1, a flexible leaf spring two 6-2, and a leaf spring middle section pressing plate two 6-3. The middle of the flexible leaf spring two 6-2 is clamped by two layers of the leaf spring middle section pressing plates two 6-3 and then fixed by bolts. Both ends of the flexible leaf spring two 6-2 are respectively clamped by two layers of the leaf spring end pressing plates two 6-1, and after overlapping with two columns of the indirect motion assembly 8 and the fixed end assembly 11, they are fixed by bolts.

[0039] Combined with Figure 1 and Figure 6 As shown, both sides of the fixed end assembly 11 of the two guiding modules are respectively surface-mounted and fixed to the substrate 9 through the secondary support assembly 10. Combined with Figure 6 As shown, the secondary support assembly 10 includes a secondary support frame 10-1 and a secondary support base 10-2. The top end of the secondary support frame 10-1 is connected and fixed to the U-shaped connecting rod of the fixed end assembly 11 by bolts. The bottom end of the secondary support frame 10-1 is connected and fixed to the top end of the secondary support base 10-2 by bolts. The bottom end of the secondary support base 10-2 is connected and fixed to the substrate 9 by bolts. The two guiding modules are supported by four secondary support assemblies 10 arranged symmetrically in a rectangle.

[0040] Combined with Figure 1 、 Figures 9 to 10 As shown, the middle two sides of the rotary beam assembly 2 are connected to the indirect motion assemblies 8 of the two guiding modules through two third connecting leaf spring assemblies 7. Combined with Figure 9 As shown, the third connecting leaf spring assembly 7 includes a hinge cover plate one 7-1, a leaf spring connecting piece one 7-2, and a flexible leaf spring one 7-3. The upper end of the flexible leaf spring one 7-3 is clamped by the hinge cover plate one 7-1 and the leaf spring connecting piece one 7-2 and then fixed by bolts. The leaf spring connecting piece one 7-2 passes through the corresponding perforation 2-22 of the rotary beam assembly 2 and is connected and fixed to the top surface of the rotary beam body 2-2 by bolts. The lower end of the flexible leaf spring one 7-3 is clamped by the hinge cover plate one 7-1 and the corresponding indirect motion assembly 8 and then fixed by bolts. The two ends of the rotary beam assembly 2 are connected to the direct motion assemblies 12 of the two guiding modules through two fourth connecting leaf spring assemblies 13. Combined with Figure 10 As shown, the fourth connecting leaf spring assembly 13 includes a hinge cover plate two 13-1, a leaf spring connecting piece two 13-2, and a flexible leaf spring two 13-3. The upper end of the flexible leaf spring two 13-3 is clamped by the hinge cover plate two 13-1 and the leaf spring connecting piece two 13-2 and then fixed by bolts. The leaf spring connecting piece two 13-2 passes through the corresponding fine adjustment assembly 1 and is connected and fixed to the top surface of the end of the rotary beam body 2-2 by bolts. The lower end of the flexible leaf spring two 13-3 is clamped by the hinge cover plate two 13-1 and the corresponding direct motion assembly 12 and then fixed by bolts.

[0041] Through the above design, the overall high-sensitivity force-measuring and guiding mechanism of the present invention is in a symmetric structure form. Take the form of the minimum motion unit on one side of the symmetric structure. In this form, there are two first connecting leaf spring assemblies 5, which are counted as four flexible hinges, two second connecting leaf spring assemblies 6, which are counted as four flexible hinges, one third connecting leaf spring assembly 7, which is counted as two flexible hinges, one fourth connecting leaf spring assembly 13, which is counted as two flexible hinges, and the main rotating flexible hinge 2-1, which is counted as one flexible hinge, for a total of thirteen-level flexible hinge coupling structure.

[0042] In the initial state of the mechanism, the load connectors 12-2 on both sides do not bear the load, and the two direct motion components 12 do not move. Therefore, the rotation beam assembly 2 will not be deflected by the fourth connecting leaf spring assembly 13, and the rotation beam assembly 2 will not drive the indirect motion component 8 to move through the third connecting leaf spring assembly 7. Since neither the direct motion component 12 nor the indirect motion component 8 moves, the first connecting leaf spring assemblies 5 and the second connecting leaf spring assemblies 6 of the two guiding modules do not deform. In this state, none of the flexible hinges at all levels deform, and the leveling of the rotating beam body 2-2 can be adjusted by adjusting the positions of the fine-tuning nuts 1-3 at both ends of the rotation beam assembly 2.

[0043] In the force-measuring and guiding mode, the load connectors 12-2 on both sides are respectively subjected to forces. Under the action of the mass difference, the two direct motion components 12 move. Therefore, the direct motion component 12 drives the rotation beam assembly 2 to deflect through the fourth connecting leaf spring assembly 13, and the rotation beam assembly 2 simultaneously drives the indirect motion component 8 to move through the third connecting leaf spring assembly 7. Since both the direct motion component 12 and the indirect motion component 8 move, the first connecting leaf spring assemblies 5 and the second connecting leaf spring assemblies 6 of the two guiding modules deform. In this mode, all the flexible hinges at all levels deform. The force-measuring sensitivity k of the high-sensitivity force-measuring and guiding mechanism can be calibrated through the deformation of the hinges. Then, through the distance measuring sensor, the displacement x of the direct motion component 12 can be measured. By calculating the force-measuring sensitivity k and the measured displacement x, the applied force F can be calculated, and the calculation formula is F = kx.

[0044] The guiding function of the high-sensitivity force-measuring and guiding mechanism is realized through the guiding module. As shown in Figure 13 When the relationship between the length l1 of the first flexible leaf spring 7-3, the length l2 of the second flexible leaf spring 13-3, the distance L2 from the first flexible leaf spring 7-3 to the center of the main rotating flexible hinge 2-1, and the distance L1 from the second flexible leaf spring 13-3 to the center of the main rotating flexible hinge 2-1 satisfies the displacement x of the direct motion component 12 and the displacement y of the indirect motion component 8 satisfy the relationship of 2:1, so that the motion trajectory of the direct motion component 12 is a straight line, thus realizing the guiding function.

[0045] When the high-sensitivity force-measuring guiding mechanism is actually applied, a load is applied to the bottom of the direct motion components 12 on both sides. By measuring the displacement of one of the direct motion components 12, the force difference between the two sides can be calculated. The straightness of the force direction (guiding direction) of the direct motion component 12 is measured by an autocollimator. For an actual measurement scheme, combined with Figure 14 as shown, which includes the high-sensitivity force-measuring guiding mechanism, the autocollimator equipment component, a 45-degree reflecting prism, and a reflector. By using the 45-degree reflecting prism arranged under one of the direct motion components 12, the measurement mode of the autocollimator equipment component in the horizontal direction is converted into the measurement mode in the vertical direction. And by installing a reflector on the direct motion component 12 or at the bottom of the load, the optical path is reflected to the 45-degree reflecting prism and then reflected back to the autocollimator equipment component through the 45-degree reflecting prism again. Thus, the straightness of the direct motion component 12 in the guiding direction measured by the autocollimator equipment component is 5 μm / 15 mm.

[0046] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other forms of devices. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent conditions of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0047] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A high-sensitivity force-measuring guiding mechanism based on thirteen-level flexible hinge coupling, characterized in that: It includes a rotating beam assembly (2), a main support assembly (4), a third connecting leaf spring assembly (7), a substrate (9), a secondary support assembly (10), a fourth connecting leaf spring assembly (13), and a guiding module; The main support assembly (4) is fixedly installed in the middle of the surface of the substrate (9); A cross beam (4-4) is arranged above the main support assembly (4), and support brackets are installed side by side at both ends thereof. A suspension member (4-2) is installed at the middle position of the bottom of the cross beam (4-4); A main rotating flexible hinge (2-1) is vertically installed at the center of the top surface of the rotating beam assembly (2) and is fixedly connected to the suspension member (4-2). Two guiding modules are symmetrically arranged on both sides of the bottom of the rotating beam assembly (2). Fine adjustment components (1) are symmetrically installed at both ends of the rotating beam assembly (2) for leveling. Two vertical through holes (2-22) are symmetrically machined on both sides of the rotating beam assembly (2) for the installation of the third connecting leaf spring assembly (7); The guiding module includes a first connecting leaf spring assembly (5), a second connecting leaf spring assembly (6), an indirect motion assembly (8), a fixed end assembly (11), and a direct motion assembly (12). The fixed end assembly (11) consists of two columns arranged side by side and a U-shaped connecting rod connecting the middle positions of the two. The indirect motion assembly (8) adopts an arcuate structure and is relatively arranged on the closed side of the U-shaped connecting rod of the fixed end assembly (11). The direct motion assembly (12) is arranged between the two columns of the fixed end assembly (11), and a load to be measured connecting member (12-2) is installed at the middle position of its bottom. The top and both sides of the bottom of the direct motion assembly (12) are connected to the indirect motion assembly (8) through four of the first connecting leaf spring assemblies (5). The top and both sides of the bottom of the indirect motion assembly (8) are connected to the ends of the two columns of the fixed end assembly (11) through four of the second connecting leaf spring assemblies (6); The secondary support assembly (10) fixedly installs the fixed end assemblies (11) of the two guiding modules on the surface of the substrate (9); The number of the third connecting leaf spring assemblies (7) is two, and the two third connecting leaf spring assemblies (7) connect both sides of the rotating beam assembly (2) to the indirect motion assemblies (8) of the two guiding modules; The number of the fourth connecting leaf spring assemblies (13) is two, and the two fourth connecting leaf spring assemblies (13) connect both ends of the rotating beam assembly (2) to the direct motion assemblies (12) of the two guiding modules.

2. The highly sensitive force-measuring guiding mechanism based on a thirteen-level flexible hinge coupling according to claim 1, characterized in that: Four limiting grooves (2-21) are symmetrically machined in a rectangular arrangement on the surface of both side walls of the rotating beam assembly (2). Four limiting components (3) are symmetrically installed in a rectangular arrangement on the top of the support brackets of the main support assembly (4). The main body of the limiting component (3) is an L-shaped connecting arm (3-2). One side arm of it is fixedly connected to the support bracket, and the other side arm is arranged in parallel with the surface of the side wall of the rotating beam assembly (2) and a limiting screw (3-1) is installed. The limiting screw (3-1) extends into the corresponding limiting groove (2-21) to limit the maximum deflection angle of the rotating beam assembly (2).

3. A highly sensitive force-measuring guiding mechanism based on a thirteen-level flexible hinge coupling according to claim 1 or 2, characterized in that: The length of the third connecting leaf spring assembly (7) is l1, the length of the fourth connecting leaf spring assembly (13) is l2, the distance between the third connecting leaf spring assembly (7) and the center of the main rotary flexure hinge (2-1) is L2, and the distance between the fourth connecting leaf spring assembly (13) and the center of the main rotary flexure hinge (2-1) is L1. The relationship satisfies 4. A highly sensitive force-measuring guiding mechanism based on a thirteen-level flexible hinge coupling according to claim 1, characterized in that: The fine-tuning component (1) includes a screw rod (1-1), a U-shaped connecting frame (1-2) and a fine-tuning nut (1-3). The U-shaped connecting frame (1-2) is horizontally arranged and the opening side is fixedly connected to the end of the rotating beam body (2-2). The screw rod (1-1) is coaxially fixed outside the closed side of the U-shaped connecting frame (1-2), and the fine-tuning nut (1-3) is in threaded connection with the screw rod (1-1).

5. A highly sensitive force-measuring guiding mechanism based on a thirteen-level flexible hinge coupling according to claim 1, characterized in that: The openings on both sides of the main rotating flexible hinge (2-1) are symmetric arcs, so that the main rotating flexible hinge (2-1) gradually thickens from the center point to the upper and lower ends.

6. The highly sensitive force measuring and guiding mechanism based on a thirteen-level flexible hinge coupling according to claim 1, characterized in that: Both the first connecting plate spring assembly (5) and the second connecting plate spring assembly (6) adopt a structural form of double-layer pressing plates with flexible spring sheets sandwiched in the middle.

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