Plasma generator operation parameter monitoring management system and method and medium

Abstract

The invention relates to a plasma generator operation parameter monitoring management system and method and a medium, and the system comprises a plasma generator monitoring module, a parameter exploration analysis module, a self-adaptive control module, a barrier evaluation module and an intelligent management end. According to the invention, data comparison is carried out through the parameter exploration and analysis module to identify the obstruction parameters, when the obstruction parameters are identified, the operation of the plasma generator is automatically regulated and controlled, and the parameter recovery process is continuously monitored, so that the automatic control of the operation process of the plasma generator is realized; the operation blocking degree of the plasma generator is analyzed through the blocking evaluation module, the data acquisition response condition aiming at the plasma generator is judged when a blocking controllable signal is generated, reasonable improvement and optimization measures can be taken in time, the supervision difficulty and the operation risk of the plasma generator are remarkably reduced, and the safety of the plasma generator is improved. And safe, stable and effective operation is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma generator control, and in particular to a plasma generator operation parameter monitoring and management system, method and medium. Background Art

[0002] A plasma generator ionizes gas molecules or atoms by applying a high voltage or a high-frequency electric field. During the ionization process, gas molecules or atoms lose or gain electrons to form positively or negatively charged ions. These ions and electrons form a highly active plasma under the action of an electric field. As a special state of matter, plasma has a wide range of applications in industrial production, scientific research and other fields;

[0003] As a key device for generating plasma, the stability and accuracy of the operation parameters of the plasma generator have an important impact on the generation and application effect of the plasma. However, it is difficult to effectively monitor and control the operation parameters of the plasma generator during its operation at present, and it is impossible to reasonably analyze the degree of operation obstruction and the data acquisition response performance of the plasma generator, which is not conducive to the management personnel to make reasonable improvement and optimization measures in time, and it is difficult to significantly reduce the supervision difficulty and operation risk of the plasma generator;

[0004] In view of the above technical defects, a solution is proposed now. Summary of the Invention

[0005] The purpose of the present invention is to provide a plasma generator operation parameter monitoring and management system, method and medium to solve the problems in the prior art that it is difficult to effectively monitor and control the operation parameters of the plasma generator, and it is impossible to reasonably analyze the degree of operation obstruction and the data acquisition response performance of the plasma generator, it is difficult to significantly reduce the operation supervision difficulty and operation risk of the plasma generator, and the intelligent level is low.

[0006] To achieve the above purpose, the present invention provides the following technical solution: A plasma generator operation parameter monitoring and management system includes a plasma generator monitoring module, a parameter exploration and analysis module, an adaptive control module, an obstruction assessment module and an intelligent management terminal;

[0007] The plasma generator monitoring module is connected to the plasma generator through a high-precision sensor, monitors the operation state of the plasma generator, collects real-time data of various operation parameters of the plasma generator and sends it to the parameter exploration and analysis module;

[0008] The parameter exploration and analysis module marks the operating parameters whose real-time data do not meet the corresponding preset data requirements as obstacle parameters, and sends the obstacle parameters to the adaptive control module and the intelligent management terminal; when the adaptive control module receives the obstacle parameters, it automatically regulates the operation of the plasma generator and sends the regulation information to the intelligent management terminal; the obstacle assessment module analyzes the degree of obstruction of the operation of the plasma generator, generates an obstacle alarm signal or an obstacle controllable signal through the analysis, and sends the obstacle alarm signal or the obstacle controllable signal to the intelligent management terminal, and the intelligent management terminal issues a corresponding warning when it receives the obstacle alarm signal.

[0009] Further, the adaptive control module is communicatively connected to the stability recovery detection module. When the adaptive control module performs regulation, the stability recovery detection module continuously monitors the corresponding obstacle parameters. If the real-time data of the corresponding obstacle parameters fails to recover to the corresponding preset data requirements within the corresponding specified time period, a control risk signal is generated and sent to the intelligent management terminal and the obstacle assessment module, and the intelligent management terminal issues a corresponding warning when it receives the control risk signal.

[0010] Further, the specific analysis process of the obstacle assessment module includes:

[0011] Obtain the number of times the control risk signal is generated per unit time and mark it as the control risk coefficient. Compare the control risk coefficient with the preset control risk coefficient threshold. If the control risk coefficient exceeds the preset control risk coefficient threshold, generate an obstacle alarm signal;

[0012] If the control risk coefficient does not exceed the preset control risk coefficient threshold, define the number of times the corresponding operating parameter is marked as an obstacle parameter per unit time as the obstacle marking frequency value. Compare the obstacle marking frequency value with the corresponding preset obstacle marking frequency threshold. If the obstacle marking frequency value exceeds the corresponding preset obstacle marking frequency threshold, assign the obstacle risk symbol ZP-1 to the corresponding operating parameter; if there is an operating parameter assigned the obstacle risk symbol ZP-1 within a unit time, generate an obstacle alarm signal.

[0013] Further, if there is no operating parameter assigned the obstacle risk symbol ZP-1 within a unit time, calculate the time difference between the marking time of the corresponding obstacle parameter and the time when the real-time data recovers to the corresponding preset data requirements to obtain the stability recovery duration, and calculate the ratio of the stability recovery duration to the corresponding specified time period to obtain the stability recovery detection value;

[0014] Obtain all the stability detection values within a unit time, calculate their mean value to obtain the stability judgment value, calculate the ratio of the impedance standard frequency value of the corresponding operating parameter to the corresponding preset impedance standard frequency threshold value to obtain the impedance analysis value, calculate the mean value of the impedance analysis values of all operating parameters to obtain the impedance decision value, and calculate the sum of the impedance standard frequency values of all operating parameters within a unit time to obtain the impedance summary value;

[0015] By performing numerical calculations on the control risk coefficient, stability judgment value, impedance decision value, and impedance summary value to obtain the impedance evaluation coefficient, and numerically comparing the impedance evaluation coefficient with the preset impedance evaluation coefficient threshold value. If the impedance evaluation coefficient exceeds the preset impedance evaluation coefficient threshold value, an impedance alarm signal is generated; if the impedance evaluation coefficient does not exceed the preset impedance evaluation coefficient threshold value, an impedance controllable signal is generated.

[0016] Furthermore, the intelligent management terminal is communicatively connected to the comprehensive operation impact analysis module. Before starting the plasma generator, the comprehensive operation impact analysis module conducts a comprehensive operation impact analysis on the plasma generator, generates an operation impact alarm signal or an operation impact controllable signal accordingly, and sends the operation impact alarm signal or the operation impact controllable signal to the intelligent management terminal. When the intelligent management terminal receives the operation impact alarm signal, it issues a corresponding warning.

[0017] Furthermore, the specific analysis process of the comprehensive operation impact analysis includes:

[0018] Obtain the components that need to be managed in the plasma generator, mark the corresponding component as i, and i is a natural number greater than 1; analyze to determine whether component i is an easily affected component. If there are easily affected components on the plasma generator, an operation impact alarm signal is generated;

[0019] If there are no easily affected components on the plasma generator, perform numerical calculations on the component detection value, position non - good value, and component damage condition value of component i to obtain the component evaluation value, mark the ratio of the component evaluation value to the corresponding preset component evaluation value as the component judgment value, and calculate the mean value of the component judgment values of all components that need to be managed on the plasma generator to obtain the comprehensive operation impact evaluation value;

[0020] Numerically compare the comprehensive operation impact evaluation value with the preset comprehensive operation impact evaluation threshold value. If the comprehensive operation impact evaluation value exceeds the preset comprehensive operation impact evaluation threshold value, an operation impact alarm signal is generated; if the comprehensive operation impact evaluation value does not exceed the preset comprehensive operation impact evaluation threshold value, an operation impact controllable signal is generated.

[0021] Furthermore, the analysis and judgment method for easily affected components is as follows:

[0022] When the installation time of component i is collected, the interval duration between the current time and the installation time is marked as the existence duration; and when the time of the previous inspection and maintenance of component i is collected, the time difference between the current time and the time of the previous inspection and maintenance of component i is calculated to obtain the inspection interval duration; and a retrospective period with a duration of L1 is traced forward with the current time as the end point of time, and the number of failures of component i within the retrospective period is marked as the failure coefficient;

[0023] The component detection value is obtained by performing numerical calculations on the existence duration, inspection interval duration, and failure coefficient, and the component detection value is numerically compared with the corresponding preset component detection threshold. If the component detection value exceeds the preset component detection threshold, component i is marked as an easily affected component;

[0024] If the component detection value does not exceed the preset component detection threshold, the real-time positions of several detection points of component i on the plasma generator are obtained, and the offset distance of the real-time position of the corresponding detection point compared with the corresponding initial position is marked as the displacement coefficient. The mean value of the displacement coefficients of all detection points is calculated to obtain the position non-good value, and the position non-good value is numerically compared with the corresponding preset position non-good threshold. If the position non-good value exceeds the preset position non-good threshold, component i is marked as an easily affected component;

[0025] If the position non-good value exceeds the preset position non-good threshold, the scanned image of component i is obtained, surface defect recognition is performed based on the scanned image of component i, and the surface defects of component i are obtained through surface defect recognition. The distribution area and quantity of the surface defects are respectively marked as the defect distribution condition value and the defect quantity condition value, and the component damage condition value is obtained by performing numerical calculations on the defect distribution condition value and the defect quantity condition value. The component damage condition value is numerically compared with the corresponding preset component damage condition threshold. If the component damage condition value exceeds the preset component damage condition threshold, component i is marked as an easily affected component.

[0026] Furthermore, the obstruction evaluation module is communicatively connected to the acquisition response alarm module. The obstruction evaluation module sends an obstruction controllable signal to the acquisition response alarm module. When the acquisition response alarm module receives the obstruction controllable signal, it performs acquisition response risk analysis, obtains all data acquisition times for the corresponding operating parameters, calculates the time difference between two adjacent data acquisition times to obtain the acquisition interval duration, and numerically compares the acquisition interval duration with the corresponding preset acquisition interval duration threshold. If the acquisition interval duration exceeds the corresponding preset acquisition interval duration threshold, the corresponding acquisition interval duration is marked as the response delay duration;

[0027] Obtain the number of response delay durations corresponding to the corresponding operating parameters within a unit time and mark it as the response delay detection value, and calculate the average value of all sampling interval durations corresponding to the corresponding operating parameters within a unit time to obtain the response characteristic value. Numerically compare the response delay detection value and the response characteristic value with the preset response delay detection threshold and the preset response characteristic threshold respectively. If the response delay detection value or the response characteristic value exceeds the corresponding preset threshold, assign the response anomaly symbol TP-1 to the corresponding operating parameter; if there is an operating parameter assigned with the response anomaly symbol TP-1 within a unit time, generate a response alarm signal, and send it to the intelligent management terminal when generating the response alarm signal. When the intelligent management terminal receives the response alarm signal, issue a corresponding early warning.

[0028] The present invention also proposes a method for monitoring and managing the operating parameters of a plasma generator, including the following steps:

[0029] Step 1: Monitor the operating state of the plasma generator and collect real-time data of various operating parameters of the plasma generator;

[0030] Step 2: Compare the real-time data with the corresponding preset data requirements, and mark the operating parameters that do not meet the corresponding preset data requirements as obstructive parameters;

[0031] Step 3: When the adaptive control module receives an obstructive parameter, automatically regulate the operation of the plasma generator;

[0032] Step 4: Continuously monitor the corresponding obstructive parameter. If the real-time data of the corresponding obstructive parameter fails to recover to the corresponding preset data requirements within the corresponding specified duration, generate a control risk signal;

[0033] Step 5: The obstruction evaluation module analyzes the degree of obstruction of the operation of the plasma generator, generates an obstruction alarm signal or an obstruction controllable signal through analysis, and makes the intelligent management terminal issue an early warning when generating the obstruction alarm signal.

[0034] Among them, the present invention proposes a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the above-mentioned method for monitoring and managing the operating parameters of the plasma generator is implemented.

[0035] Compared with the prior art, the beneficial effects of the present invention are:

[0036] 1. In the present invention, the parameter exploration and analysis module is used to compare data to identify obstructive parameters. When obstructive parameters are identified, the operation of the plasma generator is automatically regulated and the parameter recovery process is continuously monitored, realizing the automatic control of the operation process of the plasma generator. By analyzing the degree of operation obstruction and the data acquisition response status of the plasma generator, reasonable improvement and optimization measures can be made in a timely manner, significantly reducing the supervision difficulty and operation risk of the plasma generator, and ensuring its safe, stable and effective operation.

[0037] 2. In the present invention, the comprehensive operation impact analysis module conducts a comprehensive operation impact analysis before the plasma generator is started, generates an operation impact alarm signal or an operation impact controllable signal accordingly. When the operation impact alarm signal is generated, the administrator is reminded not to start the plasma generator temporarily, and component inspection and replacement are carried out on the plasma generator, ensuring the startup safety and smooth operation of the plasma generator, with a high level of intelligence. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] For the convenience of those skilled in the art to understand, the present invention will be further described below in conjunction with the accompanying drawings.

[0039] Figure 1 It is the system block diagram of the first embodiment in the present invention.

[0040] Figure 2 It is the system block diagram of the second embodiment in the present invention.

[0041] Figure 3 It is the method flow chart of the third embodiment in the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0042] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0043] Embodiment 1: As Figure 1 shown, a plasma generator operation parameter monitoring and management system proposed by the present invention includes a plasma generator monitoring module, a parameter exploration and analysis module, an adaptive control module, a back-steady detection module, an obstruction assessment module, a collection response alarm module, and an intelligent management terminal.

[0044] The plasma generator monitoring module is connected to the plasma generator through high-precision sensors to monitor the operating status of the plasma generator, collect real-time data of various operating parameters of the plasma generator (including parameters such as voltage, current, and the temperatures of the cathode, anode, and coil during the operation of the plasma generator), and send them to the parameter exploration and analysis module;

[0045] The parameter exploration and analysis module compares the real-time data of the corresponding operating parameters with the corresponding preset data requirements, marks the operating parameters whose real-time data do not meet the corresponding preset data requirements as obstacle parameters, and sends the obstacle parameters to the adaptive control module and the intelligent management terminal; when the adaptive control module receives the obstacle parameters, it automatically regulates the operation of the plasma generator, realizes the automatic control of the operation process of the plasma generator, reduces the workload of the administrator, and sends the regulation information to the intelligent management terminal.

[0046] When the adaptive control module is regulating, the stability recovery detection module continuously monitors and times the corresponding obstacle parameters. If the real-time data of the corresponding obstacle parameters fail to recover to the corresponding preset data requirements within the corresponding specified time, a control risk signal is generated and sent to the intelligent management terminal and the obstacle assessment module. When the intelligent management terminal receives the control risk signal, it issues a corresponding warning to remind the administrator to perform manual regulation in time to ensure the timeliness of the recovery of the corresponding operating parameters and the operating stability of the plasma generator.

[0047] The obstacle assessment module analyzes the degree of obstruction of the operation of the plasma generator, generates an obstacle alarm signal or an obstacle controllable signal through the analysis, and sends the obstacle alarm signal or the obstacle controllable signal to the intelligent management terminal. When the intelligent management terminal receives the obstacle alarm signal, it issues a corresponding warning to remind the administrator to suspend the operation of the plasma generator, conduct a cause investigation, and make corresponding improvement measures to ensure the safe, stable and effective operation of the plasma generator, significantly reducing the difficulty of operation supervision for the plasma generator and having a high level of intelligence; the specific analysis process of the obstacle assessment module is as follows:

[0048] Obtain the number of times the control risk signal is generated per unit time and mark it as the control risk coefficient, compare the control risk coefficient with the preset control risk coefficient threshold. If the control risk coefficient exceeds the preset control risk coefficient threshold, indicating that the operation control risk of the plasma generator is relatively high, an obstacle alarm signal is generated;

[0049] If the control risk coefficient does not exceed the preset control risk coefficient threshold, the number of times the corresponding operating parameter is marked as an obstructive parameter within a unit time is defined as the obstructive frequency value. The obstructive frequency value is numerically compared with the corresponding preset obstructive frequency threshold. If the obstructive frequency value exceeds the corresponding preset obstructive frequency threshold, indicating that the corresponding operating parameter is difficult to control within a unit time, then an obstructive risk symbol ZP-1 is assigned to the corresponding operating parameter. If there is an operating parameter assigned with the obstructive risk symbol ZP-1 within a unit time, indicating that the operation control risk of the plasma generator is relatively high, then an obstructive alarm signal is generated.

[0050] Moreover, if there is no operating parameter assigned with the obstructive risk symbol ZP-1 within a unit time, the marking time and real-time data of the corresponding obstructive parameter are restored to the time corresponding to the preset data requirement for calculating the stabilization duration of the time difference. Among them, the larger the value of the stabilization duration, the slower the regulation efficiency for the corresponding operating parameter in this instance. The stabilization duration is calculated as a ratio with the corresponding specified duration to obtain the stabilization detection value.

[0051] All the stabilization detection values within a unit time are obtained and their mean value is calculated to obtain the stabilization judgment value. Also, the ratio of the obstructive frequency value of the corresponding operating parameter to the corresponding preset obstructive frequency threshold is calculated to obtain the obstructive analysis value. The mean value of the obstructive analysis values of all operating parameters is calculated to obtain the obstructive decision value, and the sum of the obstructive frequency values of all operating parameters within a unit time is calculated to obtain the obstructive summary value.

[0052] The control risk coefficient WS, the stabilization judgment value ZW, the obstructive decision value NP, and the obstructive summary value SY are numerically calculated through the formula HX = (wq×WS + rw×SY) / 2 + tu×ZW + ng×NP to obtain the obstructive evaluation coefficient HX. Among them, wq, rw, tu, and ng are preset proportionality coefficients with values greater than zero. Moreover, the larger the value of the obstructive evaluation coefficient HX, the more serious the obstruction condition of the plasma generator's operation within a unit time, and the less smooth the overall operation process.

[0053] The obstructive evaluation coefficient HX is numerically compared with the preset obstructive evaluation coefficient threshold. If the obstructive evaluation coefficient HX exceeds the preset obstructive evaluation coefficient threshold, indicating that the obstruction condition of the plasma generator's operation within a unit time is relatively serious and the overall operation process is not smooth, then an obstructive alarm signal is generated. If the obstructive evaluation coefficient HX does not exceed the preset obstructive evaluation coefficient threshold, indicating that the overall operation process of the plasma generator within a unit time is relatively smooth, then an obstructive controllable signal is generated.

[0054] Furthermore, the obstruction evaluation module sends an obstruction controllable signal to the acquisition response alarm module. When the acquisition response alarm module receives the obstruction controllable signal, it conducts an acquisition response risk analysis, obtains all data acquisition moments for the corresponding operating parameters, calculates the time difference between two adjacent groups of data acquisition moments to obtain the acquisition interval duration, compares the acquisition interval duration with the corresponding preset acquisition interval duration threshold. If the acquisition interval duration exceeds the corresponding preset acquisition interval duration threshold, the corresponding acquisition interval duration is marked as the response delay duration;

[0055] Obtain the number of response delay durations corresponding to the corresponding operating parameters within a unit time and mark it as the response delay detection value, and calculate the average value of all acquisition interval durations corresponding to the corresponding operating parameters within a unit time to obtain the response characteristic value. Compare the response delay detection value and the response characteristic value with the preset response delay detection threshold and the preset response characteristic threshold respectively;

[0056] If the response delay detection value or the response characteristic value exceeds the corresponding preset threshold, indicating that the data acquisition for the corresponding operating parameters within a unit time is not timely, then assign a response anomaly symbol TP-1 to the corresponding operating parameters; if there are operating parameters assigned with the response anomaly symbol TP-1 within a unit time, indicating that the data acquisition response status for the plasma generator is poor, then generate a response alarm signal;

[0057] When generating the response alarm signal, send it to the intelligent management terminal. When the intelligent management terminal receives the response alarm signal, issue a corresponding warning to remind the administrator to conduct a cause investigation and make reasonable improvement and optimization measures to ensure the timeliness of data acquisition for various operating parameters of the plasma generator, and further reduce the supervision difficulty and operation risk of the plasma generator.

[0058] Embodiment 2: As Figure 2 shown, the difference between this embodiment and Embodiment 1 is that the intelligent management terminal is communicatively connected to the operation impact comprehensive analysis module. Before starting the plasma generator, the operation impact comprehensive analysis module conducts an operation impact comprehensive analysis on the plasma generator, generates an operation impact alarm signal or an operation impact controllable signal accordingly, and sends the operation impact alarm signal or the operation impact controllable signal to the intelligent management terminal. When the intelligent management terminal receives the operation impact alarm signal, it issues a corresponding warning to remind the administrator not to start the plasma generator temporarily and conduct component inspection and replacement for the plasma generator to ensure the startup safety and operation smoothness of the plasma generator; the specific analysis process is as follows:

[0059] Obtain the components in the plasma generator that need to be managed, mark the corresponding component as i, and i is a natural number greater than 1; determine whether component i is an easily affected component by analysis, specifically: collect the installation time of component i, and mark the interval duration between the current time and the installation time as the existence duration; and collect the time of the previous inspection and maintenance of component i, calculate the time difference between the current time and the time of the previous inspection and maintenance of component i to obtain the inspection interval duration; and set a retrospective period with a duration of L1 tracing forward from the current time as the time end point, and mark the number of failures of component i within the retrospective period as the failure coefficient;

[0060] Perform numerical calculation on the existence duration SMi, inspection interval duration WYi, and failure coefficient ZWi through the formula TLi=(sq1×SMi + sq2×WYi) / 2 + sq3×ZWi to obtain the component detection value TLi, where sq1, sq2, and sq3 are preset proportionality coefficients, and sq3>sq2>sq1>0; moreover, the larger the value of the component detection value TLi, the more difficult it is for component i to operate safely and smoothly at present;

[0061] Perform a numerical comparison between the component detection value TLi and the corresponding preset component detection threshold. If the component detection value TLi exceeds the preset component detection threshold, indicating that component i is currently difficult to operate safely and smoothly, then mark component i as an easily affected component;

[0062] If the component detection value TLi does not exceed the preset component detection threshold, obtain the real-time positions of several detection points of component i on the plasma generator, mark the offset distance of the real-time positions of the corresponding detection points compared with the corresponding initial positions as the displacement coefficient, calculate the average value of the displacement coefficients of all detection points to obtain the position non-good value, and perform a numerical comparison between the position non-good value and the corresponding preset position non-good threshold. If the position non-good value exceeds the preset position non-good threshold, indicating that the position of component i on the plasma generator is more inaccurate and there are greater potential safety hazards, then mark component i as an easily affected component;

[0063] If the position non-good value exceeds the preset position non-good threshold, obtain the scanned image of component i, perform surface defect recognition based on the scanned image of component i, and obtain the surface defects of component i (including defects such as rust and cracks) through surface defect recognition, and mark the distribution area and quantity of the surface defects as the defect distribution condition value and defect quantity condition value respectively;

[0064] The defect condition value YPi and the defect quantity value FXi are numerically calculated through the formula XTi = uy × YPi + te × FXi to obtain the component damage condition value XTi, where uy and te are preset proportionality coefficients, and te > uy > 0; moreover, the larger the numerical value of the component damage condition value XTi, the more serious the damage condition of component i; the component damage condition value XTi is numerically compared with the corresponding preset component damage threshold. If the component damage condition value XTi exceeds the preset component damage threshold, indicating that the damage condition of component i is relatively serious, then component i is marked as an easily affected component;

[0065] If there is an easily affected component on the plasma generator, an operation influence alarm signal is generated; if there is no easily affected component on the plasma generator, the component detection value TLi, the position non - good value HFi, and the component damage condition value XTi of component i are numerically calculated through the formula PXi = (eg × TLi + up × HFi + sw × XTi) / 3 to obtain the component evaluation value PXi; where eg, up, and sw are preset proportionality coefficients with values greater than zero, and moreover, the larger the numerical value of the component evaluation value PXi, the greater the overall potential safety hazard of component i;

[0066] The ratio of the component evaluation value PXi to the corresponding preset component evaluation value is marked as the component judgment value, and the average value of the component judgment values of all components to be managed on the plasma generator is calculated to obtain the comprehensive evaluation value of operation influence; the comprehensive evaluation value of operation influence is numerically compared with the preset comprehensive evaluation threshold of operation influence. If the comprehensive evaluation value of operation influence exceeds the preset comprehensive evaluation threshold of operation influence, indicating that the start - up risk of the plasma generator is relatively high overall, then an operation influence alarm signal is generated; if the comprehensive evaluation value of operation influence does not exceed the preset comprehensive evaluation threshold of operation influence, indicating that the start - up risk of the plasma generator is relatively low overall, then an operation influence controllable signal is generated.

[0067] Embodiment 3: As Figure 3 shown, the difference between this embodiment and Embodiment 1 and Embodiment 2 is that the present invention also proposes a method for monitoring and managing the operation parameters of a plasma generator, including the following steps:

[0068] Step 1: Monitor the operation state of the plasma generator and collect real - time data of various operation parameters of the plasma generator;

[0069] Step 2: Compare the real - time data with the corresponding preset data requirements, and mark the operation parameters that do not meet the corresponding preset data requirements as obstructive parameters;

[0070] Step 3: When the adaptive control module receives the obstructive parameters, automatically regulate the operation of the plasma generator;

[0071] Step 4: Continuously monitor the corresponding obstruction parameters. If the real-time data of the corresponding obstruction parameters fails to recover to the corresponding preset data requirements within the corresponding specified duration, a control risk signal is generated;

[0072] Step 5: The obstruction evaluation module analyzes the degree of obstruction of the operation of the plasma generator, generates an obstruction alarm signal or an obstruction controllable signal through the analysis, and when the obstruction alarm signal is generated, the intelligent management terminal issues a warning.

[0073] The present invention also proposes a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the above-mentioned method for monitoring and managing the operation parameters of the plasma generator is implemented. Those of ordinary skill in the art can understand that all or part of the steps of implementing the above-mentioned method embodiments can be completed by hardware related to the computer program. The foregoing computer program can be stored in a computer-readable storage medium. When the program is executed, it executes the steps including the above-mentioned method embodiments, and the foregoing storage medium includes: various media such as ROM, RAM, magnetic disk or optical disc that can store program codes.

[0074] The working principle of the present invention: When in use, the operation state of the plasma generator is monitored by the plasma generator monitoring module, the parameter exploration and analysis module performs data comparison to identify the obstruction parameters, the adaptive control module automatically regulates the operation of the plasma generator when receiving the obstruction parameters, and the recovery detection module continuously monitors the recovery process of the corresponding obstruction parameters, realizing the automatic control of the operation process of the plasma generator, reducing the workload of the administrator, and analyzing the degree of obstruction of the operation of the plasma generator through the obstruction evaluation module. When the obstruction controllable signal is generated, the data acquisition response status of the plasma generator is accurately judged through the acquisition response risk analysis. When the obstruction alarm signal or the response alarm signal is generated, the administrator is reminded to conduct a cause investigation and make reasonable improvement and optimization measures, significantly reducing the supervision difficulty and operation risk of the plasma generator, ensuring its safe, stable and effective operation, and having a high level of intelligence.

[0075] The above formulas are all dimensionless and take their numerical values for calculation. The formulas are obtained by software simulation of a large amount of collected data to obtain a formula closest to the real situation. The preset parameters in the formulas are set by those skilled in the art according to the actual situation. The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not elaborate on all the details, nor do they limit the invention to only the specific implementation manners.

[0076] Obviously, many modifications and variations can be made in accordance with the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can well understand and utilize the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. A monitoring and management system for operating parameters of a plasma generator, characterized in that, It includes a plasma generator monitoring module, a parameter exploration and analysis module, an adaptive control module, an obstruction assessment module, and an intelligent management terminal; The plasma generator monitoring module collects real-time data of various operating parameters of the plasma generator and sends it to the parameter exploration and analysis module. The parameter exploration and analysis module marks the operating parameters whose real-time data do not meet the corresponding preset data requirements as obstruction parameters; When the adaptive control module receives the obstruction parameters, it automatically regulates the operation of the plasma generator. The obstruction assessment module analyzes the degree of obstruction of the operation of the plasma generator, generates an obstruction alarm signal or an obstruction controllable signal through the analysis, and sends the obstruction alarm signal or the obstruction controllable signal to the intelligent management terminal. When the intelligent management terminal receives the obstruction alarm signal, it issues a corresponding warning.

2. The plasma generator operating parameter monitoring and management system according to claim 1, wherein, The adaptive control module is communicatively connected to the stability recovery detection module. When the adaptive control module conducts regulation, the stability recovery detection module continuously monitors the corresponding obstruction parameters. If the real-time data of the corresponding obstruction parameters fail to return to the corresponding preset data requirements within the corresponding specified time period, a control risk signal is generated. When the intelligent management terminal receives the control risk signal, it issues a corresponding warning.

3. The plasma generator operating parameter monitoring and management system according to claim 2, wherein The specific analysis process of the obstruction assessment module includes: Obtain the number of times the control risk signal is generated per unit time and mark it as the control risk coefficient. If the control risk coefficient exceeds the preset control risk coefficient threshold, an obstruction alarm signal is generated; if the control risk coefficient does not exceed the preset control risk coefficient threshold, it is judged whether there are operating parameters assigned with the obstruction risk symbol ZP-1; if there are operating parameters assigned with the obstruction risk symbol ZP-1 per unit time, an obstruction alarm signal is generated.

4. The plasma generator operating parameter monitoring and management system according to claim 3, wherein If there are no operating parameters assigned with the obstruction risk symbol ZP-1 per unit time, the obstruction assessment coefficient is obtained through numerical calculation of the control risk coefficient, the stability recovery judgment value, the obstruction decision value, and the obstruction summary value. If the obstruction assessment coefficient exceeds the preset obstruction assessment coefficient threshold, an obstruction alarm signal is generated; if the obstruction assessment coefficient does not exceed the preset obstruction assessment coefficient threshold, an obstruction controllable signal is generated.

5. The plasma generator operating parameter monitoring and management system according to claim 3, wherein, The intelligent management terminal is communicatively connected to the comprehensive operation impact analysis module. Before starting the plasma generator, the comprehensive operation impact analysis module conducts a comprehensive operation impact analysis on the plasma generator, generates an operation impact alarm signal or an operation impact controllable signal accordingly, and sends the operation impact alarm signal or the operation impact controllable signal to the intelligent management terminal. When the intelligent management terminal receives the operation impact alarm signal, it issues a corresponding warning.

6. The plasma generator operating parameter monitoring and management system according to claim 5, characterized in that, The specific analysis process of the comprehensive operation impact analysis is as follows: Obtain the components that need to be managed in the plasma generator, mark the corresponding components as i, and i is a natural number greater than 1; through analysis, it is judged whether component i is an easily affected component. If there are easily affected components on the plasma generator, an operation impact alarm signal is generated. If there are no easily affected components on the plasma generator, the comprehensive operation impact evaluation value is numerically compared with the preset comprehensive operation impact evaluation threshold. If the comprehensive operation impact evaluation value exceeds the preset comprehensive operation impact evaluation threshold, an operation impact alarm signal is generated; otherwise, an operation impact controllable signal is generated.

7. A plasma generator operating parameter monitoring and management system according to claim 6, characterized in that, The analysis and judgment method for components prone to being affected is as follows: Calculate the component detection value by numerically calculating the existence duration, inspection interval duration, and failure coefficient. If the component detection value exceeds the preset component detection threshold, mark component i as a component prone to being affected; If the component detection value does not exceed the preset component detection threshold, obtain the real-time positions of component i at several detection points on the plasma generator. If the non-optimal position exceeds the preset non-optimal position threshold, mark component i as a component prone to being affected.

8. A plasma generator operating parameter monitoring and management system according to claim 7, characterized in that, If the non-optimal position exceeds the preset non-optimal position threshold, calculate the component damage value by numerically calculating the defect distribution value and the defect quantity value. If the component damage value exceeds the preset component damage threshold, mark component i as a component prone to being affected.

9. The plasma generator operating parameter monitoring and management system according to claim 3, characterized in that The obstruction evaluation module is communicatively connected to the acquisition response alarm module. The obstruction evaluation module sends an obstruction controllable signal to the acquisition response alarm module. When the acquisition response alarm module receives the obstruction controllable signal, it conducts an acquisition response risk analysis. If there are operating parameters assigned with the response anomaly symbol TP-1 within a unit time, a response alarm signal is generated. When the intelligent management terminal receives the response alarm signal, it issues a corresponding early warning.

10. A method for monitoring and managing the operating parameters of a plasma generator, which uses a system for monitoring and managing the operating parameters of a plasma generator according to any one of claims 1-9, characterized in that, It includes the following steps: Step 1: Collect the real-time data of various operating parameters of the plasma generator; Step 2: Compare the real-time data with the corresponding preset data requirements, and mark the operating parameters that do not meet the corresponding preset data requirements as obstruction parameters; Step 3: When the adaptive control module receives the obstruction parameters, it automatically regulates the operation of the plasma generator; Step 4: Continuously monitor the corresponding obstruction parameters. If the real-time data of the corresponding obstruction parameters fails to recover to the corresponding preset data requirements within the corresponding specified duration, a control risk signal is generated; Step 5: The obstruction evaluation module analyzes the degree of obstruction of the operation of the plasma generator, and when generating an obstruction alarm signal, makes the intelligent management terminal issue an early warning.

11. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the method for monitoring and managing the operating parameters of the plasma generator as described in claim 10.

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