Actuating structure for improving vibration amplitude of flexible vibrating diaphragm

Abstract

The actuating structure for improving the vibration amplitude of the flexible vibrating diaphragm comprises a support, an actuating unit and the flexible vibrating diaphragm, the flexible vibrating diaphragm is arranged on the support, the actuating unit is arranged at the joint of the flexible vibrating diaphragm and the support, and various concave-convex structures are manufactured on the flexible vibrating diaphragm in the horizontal direction to increase the surface area and flexibility of the vibrating diaphragm. According to the invention, the actuating unit is arranged on the flexible vibrating diaphragm, so that the flexible vibrating diaphragm can be correspondingly released and tightened according to design requirements when being driven, thereby greatly increasing the amplitude of the flexible vibrating diaphragm in various driving modes, and further improving the performance of the device.

Description

Technical Field

[0001] The present invention relates to the field of actuators, and particularly to an actuation structure for increasing the vibration amplitude of a flexible diaphragm. Background Art

[0002] An actuator is a device that converts electrical energy, thermal energy, mechanical energy, or other forms of energy into mechanical displacement or force. Actuators include various thin-film actuators or simply supported beam actuators such as coil magnet actuators, electrostatic actuators, piezoelectric actuators, shape memory alloy actuators, etc., especially micro actuators such as camera motors, micropumps, micromirrors, speakers, etc. In a conventional thin-film structure or a structure with both ends fixed, the flexible diaphragm is usually fixed at both ends of the actuator or between the actuator and the bracket. Once the actuation starts, the flexible diaphragm will be tightened due to the increase in surface area caused by deformation. The amplitude of the increase in surface area is limited by the elongation rate of the flexible diaphragm material itself, thus restricting the amplitude of the flexible diaphragm. And the amplitude is a very critical performance index in many similar actuation devices.

[0003] The present invention aims to greatly increase the amplitude of the flexible diaphragm in the actuation device, thereby significantly improving the performance of related devices. Summary of the Invention

[0004] The object of the present invention is to provide an actuation structure for increasing the vibration amplitude of a flexible diaphragm in view of the above deficiencies. Its structural design is reasonable and scientific. By making various concave and convex structures on the flexible diaphragm in the horizontal direction to increase the surface area and flexibility of the diaphragm, and arranging the actuation unit on the flexible diaphragm, the flexible diaphragm can be released and tightened accordingly according to the design requirements when being driven, thereby greatly increasing the amplitude of the flexible diaphragm under various driving methods, and further improving the performance of the device.

[0005] The present invention specifically adopts the following technical solutions to achieve the above object:

[0006] An actuation structure for increasing the vibration amplitude of a flexible diaphragm, comprising a bracket, an actuation unit, and a flexible diaphragm. The flexible diaphragm is arranged on the bracket, and the actuation unit is arranged at the connection between the flexible diaphragm and the bracket.

[0007] The bracket is any one of two parallel and symmetric structures, a rectangular closed structure, a circular closed structure, an arbitrary polygon structure, and an arbitrary polygon discontinuous structure.

[0008] The actuation unit is any one of electromagnetic, electrostatic, piezoelectric, and shape memory alloy types.

[0009] The flexible diaphragm is composed of a plurality of continuous concave and convex structures. The concave and convex structures are any one of square, trapezoidal, triangular, wavy, and arbitrary polygon shapes. The material of the flexible diaphragm (3) adopts the following media:

[0010] Any one of aluminum, aluminum alloy, and stainless steel with a thickness of 0.1 to 10 μm;

[0011] Any one of silicon and silicon oxide with a thickness of 0.1 to 5 μm;

[0012] Any one of graphite and graphene with a thickness of 0.01 to 5 μm;

[0013] A polymer with a thickness of 1 to 50 μm.

[0014] The actuating unit is provided in several groups, respectively on each edge where the flexible diaphragm is connected to the rectangular structural bracket;

[0015] The actuating unit is provided in several groups, evenly distributed on the annular edge where the flexible diaphragm is connected to the annular structural bracket;

[0016] The actuating unit is provided in several groups, respectively on each edge where the flexible diaphragm is connected to the arbitrary polygon structural bracket (1);

[0017] The actuating unit is provided in several groups, respectively on each edge where the flexible diaphragm is connected to the arbitrary polygon discontinuous structural bracket.

[0018] The flexible diaphragm spans across the bracket, and several groups of the actuating units are discontinuously arranged on the flexible diaphragm.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] An actuating structure for improving the vibration amplitude of a flexible diaphragm according to the present invention includes a bracket, an actuating unit, and a flexible diaphragm. The flexible diaphragm is arranged on the bracket, and the actuating unit is arranged at the connection between the flexible diaphragm and the bracket. By making various concave and convex structures on the flexible diaphragm in the horizontal direction to increase the surface area and flexibility of the diaphragm, and arranging the actuating unit on the flexible diaphragm, the flexible diaphragm can be released and tightened accordingly according to design requirements when being driven, thereby greatly increasing the amplitude of the flexible diaphragm under various driving methods, and further improving the performance of the device. Description of the Drawings

[0021] Figure 1 It is a schematic diagram of the first embodiment of the actuating structure of the present invention;

[0022] Figure 2 It is a schematic diagram of the second embodiment of the actuating structure of the present invention;

[0023] Figure 3 It is a schematic diagram of the third embodiment of the actuating structure of the present invention;

[0024] Figure 4It is a schematic diagram of the fourth embodiment of the actuation structure of the present invention;

[0025] Figure 5 It is a schematic diagram of the fifth embodiment of the actuation structure of the present invention;

[0026] Figure 6 It is a schematic diagram of the sixth embodiment of the actuation structure of the present invention;

[0027] Figure 7 It is a schematic diagram of the first embodiment of the bracket of the present invention;

[0028] Figure 8 It is a schematic diagram of the second embodiment of the bracket of the present invention;

[0029] Figure 9 It is a schematic diagram of the third embodiment of the bracket of the present invention;

[0030] Figure 10 It is a schematic diagram of the fourth embodiment of the bracket of the present invention;

[0031] Figure 11 It is a schematic diagram of the fifth embodiment of the bracket of the present invention;

[0032] Figure 12 It is a schematic diagram of the simulated amplitude change in the implementation of the present invention. Detailed implementation manners

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0034] As Figures 1 to 6 shown: An actuation structure for increasing the vibration amplitude of a flexible diaphragm according to the present invention includes a bracket 1, an actuation unit 2, and a flexible diaphragm 3. The flexible diaphragm 3 is disposed on the bracket 1, and the actuation unit 2 is disposed at the connection between the flexible diaphragm 3 and the bracket 1.

[0035] The bracket 1 is any one of two parallel and symmetric structures, a rectangular closed structure, a circular closed structure, an arbitrary polygon structure, and an arbitrary polygon discontinuous structure.

[0036] The actuation unit 2 is any one of electromagnetic, electrostatic, piezoelectric, and shape memory alloy types.

[0037] The flexible diaphragm 3 is composed of a plurality of continuous concave and convex structures, and the concave and convex structures are any one of square, trapezoidal, triangular, wavy, and arbitrary polygon shapes. The material of the flexible diaphragm 3 uses the following media:

[0038] Any one of aluminum, aluminum alloy, and stainless steel with a thickness of 0.1~10μm;

[0039] Any one of silicon and silicon oxide with a thickness of 0.1~5μm;

[0040] Any one of graphite and graphene with a thickness of 0.01~5μm;

[0041] A polymer with a thickness of 1~50μm.

[0042] The actuating unit 2 is provided in several groups, respectively on each edge where the flexible diaphragm 3 is connected to the rectangular structure bracket 1;

[0043] The actuating unit 2 is provided in several groups, evenly distributed on the annular edge where the flexible diaphragm 3 is connected to the annular structure bracket 1;

[0044] The actuating unit 2 is provided in several groups, respectively on each edge where the flexible diaphragm 3 is connected to the arbitrary polygon structure bracket 1;

[0045] The actuating unit 2 is provided in several groups, respectively on each edge where the flexible diaphragm 3 is connected to the arbitrary polygon discontinuous structure bracket 1.

[0046] The flexible diaphragm 3 spans across the bracket 1, and several groups of the actuating unit 2 are discontinuously provided on the flexible diaphragm 3.

[0047] Example 1, as Figure 1 Figure 2 As shown, the actuating unit 2 is provided at both ends of the flexible diaphragm 3, and the actuating unit 2 is provided between the flexible diaphragm 3 and the bracket 1, so that the flexible diaphragm 3 releases the tension between it and the bracket 1, increasing the amplitude of the flexible diaphragm;

[0048] Example 2, as Figure 3 Figure 4 As shown, the actuating unit 2 is provided in the middle section of the flexible diaphragm 3, so that the flexible diaphragm can release the tension correspondingly according to the design requirements when being driven, thereby greatly increasing the amplitude of the flexible diaphragm under various driving modes;

[0049] Example 3, as Figure 5 As shown in 6, multiple groups of the actuating unit 2 are provided at any position of the flexible diaphragm 3, so that the flexible diaphragm can release the tension correspondingly according to the design requirements when being driven, thereby greatly increasing the amplitude of the flexible diaphragm under various driving modes, and further improving the performance of the device;

[0050] An actuation structure for increasing the vibration amplitude of a flexible diaphragm according to the present invention includes a bracket, an actuating unit, and a flexible diaphragm. The bracket can be two parallel and symmetric structures, a rectangular closed structure, an annular closed structure, an arbitrary polygon structure, or an arbitrary polygon discontinuous structure. The actuating unit can be electromagnetic, electrostatic, piezoelectric, or shape memory alloy type. The flexible diaphragm is composed of a plurality of continuous concave-convex structures, and the concave-convex structures can be square, trapezoidal, triangular, wavy, or arbitrary polygon. By fabricating various concave-convex structures on the flexible diaphragm in the horizontal direction to increase the surface area and flexibility of the diaphragm, and arranging the actuating unit on the flexible diaphragm, the flexible diaphragm can be released and tightened correspondingly according to the design requirements when being driven, thereby greatly increasing the amplitude of the flexible diaphragm under various driving methods, and further improving the performance of the device.

[0051] The amplitude of the diaphragm is a key factor determining the performance of many devices. For example, in a speaker, the sound pressure level pushed out by the diaphragm is positively correlated with the amplitude of the diaphragm. For every doubling of the amplitude, the sound pressure level will increase by approximately 6 decibels.

[0052] As Figure 12 shown, in the piezoelectric drive simulation evaluation of a silicon diaphragm with a diameter of 4 mm and a thickness of 1 μm based on the COMSOL simulation software, the diaphragm without the features of the present invention generated an amplitude of approximately 14 μm under this drive, while the silicon diaphragm incorporating the present invention generated an amplitude of approximately 45 μm under the same piezoelectric drive. In the figure, the data comparison between the upper and lower is intuitive and the change is clearly visible.

[0053] The above are only the preferred embodiments of the present invention. Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An actuation structure for increasing the vibration amplitude of a flexible diaphragm, comprising a bracket (1), an actuation unit (2), and a flexible diaphragm (3), characterized in that: The flexible diaphragm (3) is arranged on the bracket (1), and the actuating unit (2) is arranged at the connection between the flexible diaphragm (3) and the bracket (1).

2. The actuating structure for increasing the vibration amplitude of a flexible diaphragm according to claim 1, wherein: The bracket (1) is any one of two parallel and symmetrical structures, rectangular closed structures, annular closed structures, arbitrary polygon structures, and arbitrary polygon discontinuous structures.

3. The actuation structure for increasing the vibration amplitude of a flexible diaphragm according to claim 1, wherein: The actuating unit (2) is any one of electromagnetic, electrostatic, piezoelectric, and shape memory alloy types.

4. The actuation structure for increasing the vibration amplitude of a flexible diaphragm according to claim 1, characterized in that: The flexible diaphragm (3) is composed of a number of continuous concave-convex structures, and the concave-convex structures are any one of square, trapezoidal, triangular, wavy, and arbitrary polygon shapes. The material of the flexible diaphragm (3) uses the following media: Any one of aluminum, aluminum alloy, and stainless steel with a thickness of 0.1~10μm; Any one of silicon and silicon oxide with a thickness of 0.1~5μm; Any one of graphite and graphene with a thickness of 0.01~5μm; Polymers with a thickness of 1~50μm.

5. The actuating structure for increasing the vibration amplitude of a flexible diaphragm according to claim 1, characterized in that: The actuating unit (2) is provided in several groups, and is respectively arranged on the upper surface of each edge where the flexible diaphragm (3) is connected to the rectangular structure bracket (1); The actuating unit (2) is provided in several groups, and is evenly distributed on the upper surface of the annular edge where the flexible diaphragm (3) is connected to the annular structure bracket (1); The actuating unit (2) is provided in several groups, and is respectively arranged on the upper surface of each edge where the flexible diaphragm (3) is connected to the arbitrary polygon structure bracket (1); The actuating unit (2) is provided in several groups, and is respectively arranged on the upper surface of each edge where the flexible diaphragm (3) is connected to the arbitrary polygon discontinuous structure bracket (1).

6. The actuation structure for increasing the vibration amplitude of a flexible diaphragm according to claim 1, wherein: The flexible diaphragm (3) spans across the bracket (1), and several groups of the actuating unit (2) are intermittently arranged on the flexible diaphragm (3).

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