A waste gas tail gas emission device for photoresist production

Abstract

The application discloses a kind of photoresist production exhaust tail gas emission devices, it is related to photoresist production exhaust tail gas emission technical field, including exhaust tank;The application is filtered by filter cartridge and internal activated carbon and other filter materials cooperate with each other to photoresist production exhaust tail gas and carry out filtration treatment, then through slagging mechanism and impurity removal mechanism cooperate with each other, prevent the impurities in exhaust tail gas from being adsorbed and accumulated on inner wall, improve the convenience of exhaust device use, and then realize the function of impurity removal;Single exhaust composition and mixed simulation exhaust are respectively filtered by analysis module and the filtration efficiency is tested, and comprehensive comparison analysis can more accurately determine the actual filtration efficiency of filter material on different exhaust composition, which helps to select the most suitable filter material combination, improve the filtration effect, ensure that various pollutants in exhaust gas can be effectively treated, so that the finally discharged exhaust gas is more in line with environmental protection standards.

Description

Technical Field

[0001] The present invention relates to the technical field of waste gas and tail gas emission for photoresist production, and in particular to a waste gas and tail gas emission device for photoresist production. Background Art

[0002] As a key material in semiconductor manufacturing and other fields, photoresist produces a variety of complex waste gases during its production process. Volatile organic compounds (VOCs) such as benzene and organic amines are released during the raw materials and synthesis process of photoresist. These substances not only have a pungent odor but are also extremely harmful to human health. Long-term exposure can cause respiratory diseases, nervous system damage, and even cancer.

[0003] Traditional simple waste gas treatment methods, such as direct high-altitude discharge or simple adsorption treatment, cannot meet the increasingly stringent environmental protection regulations. Moreover, when the device is treating waste gas for a long time, impurities in the waste gas are easily adsorbed on the inner wall, resulting in reduced filtration effect.

[0004] Traditional waste gas treatment devices lack accurate analysis methods for the filtration efficiency of filter materials, making it difficult to determine the actual differences in the filtration effects of different filter materials in single-component and mixed exhaust gases. Furthermore, monitoring of filter material performance is not scientific enough, relying solely on manual experience or simple observation, which cannot promptly detect the decline in filter material performance, resulting in reduced filtration effectiveness and difficulty in consistently meeting waste gas emission standards. Furthermore, when the filter material needs to be replaced or adjusted, there is a lack of automated and intelligent operation execution mechanisms. Manual operation is not only inefficient but also prone to errors, failing to meet increasingly stringent environmental protection requirements and the needs of efficient production.

[0005] Therefore, the above technical problems need to be solved. Summary of the Invention

[0006] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a waste gas exhaust device for photoresist production.

[0007] To achieve the above-mentioned object, the present invention adopts the following technical solution: a waste gas exhaust device for photoresist production, comprising an exhaust tank and a cover plate provided on the upper end of the exhaust tank, a cavity structure being opened on the inner side of the exhaust tank, and a fixed cylinder being fixedly connected to the lower end of the exhaust tank, a fixed block being fixedly connected to one side of the fixed cylinder, a transmission mechanism being installed on the inner side of the fixed cylinder on one side of the transmission mechanism, a scraping mechanism being installed on the inner side of the fixed cylinder, a debris removal mechanism being installed on the lower end of the scraping mechanism, and a filtering mechanism being horizontally installed on one side of the exhaust tank;

[0008] A control component is provided inside the controller of the first servo motor, and the control component includes an acquisition module, an analysis module and an execution module;

[0009] The acquisition module detects the exhaust gas composition, the filtration efficiency of the corresponding filter material inside the movable frame, the pressure difference data of the movable frame, the flow data at the position of the movable frame, and transmits the detected data to the analysis module;

[0010] The analysis module processes and analyzes the filtration efficiency of the filter material to determine the filtration efficiency of the corresponding filter material for a certain exhaust gas component. If the outlet gas concentration data is greater than the outlet gas concentration corresponding to the emission standard, a plate replacement signal is generated and transmitted to the execution module. The pressure difference and flow rate data are processed and analyzed to determine whether the filter material inside the movable frame needs to be replaced. If replacement is determined to be necessary, a quality change signal is generated and transmitted to the execution module.

[0011] The execution module receives the signal transmitted by the analysis module and then performs the corresponding operation.

[0012] Preferably, an air intake pipe is fixedly connected to the lower end of the fixed cylinder, a cross support plate is horizontally fixedly connected to the inner side of the air intake pipe, and an air intake fan is installed in the cross support plate.

[0013] Preferably, the scraping mechanism includes a first servo motor vertically installed in the middle of the upper end of the cover plate, the output end of the first servo motor passes through the cover plate and is sleeved on the upper end of the fixed plate, the fixed plate and the output end of the first servo motor are fixed by fixing bolts, and positioning plates are fixed at both ends of the fixed plate by bolts, and a brush is equidistantly fixed to one side of the positioning plate, and the brush fits tightly against the inner wall of the exhaust tank.

[0014] Preferably, the transmission mechanism includes a fixing block fixed to one side of the fixed cylinder, the inner side of the fixing block is a cavity structure, and a second servo motor is installed on one side of the fixing block, and the output end of the second servo motor passes through the fixing block and is fixed to a worm.

[0015] Preferably, the debris discharge mechanism includes an outer gear ring installed between the fixed cylinder and the exhaust tank, the outer gear ring is meshed with the worm, and a scraper is fixedly connected to the inner side of the outer gear ring at equal distances, and a slag discharge port is vertically opened on one side of the fixed cylinder at the lower end of the outer gear ring, and L-shaped limit blocks are fixedly connected on both sides of the fixed cylinder at the lower end of the slag discharge port, and a residue collection trough is slidably installed between the L-shaped limit blocks.

[0016] Preferably, the filtering mechanism includes an exhaust hole horizontally opened at the upper end of the exhaust tank, a connecting pipe is horizontally fixed to the exhaust hole, a filter cartridge is fixed to the middle of the connecting pipe, activated carbon and other filter materials are installed on the inside of the filter cartridge, and the other end of the filter cartridge is fixed to an exhaust pipe, and an exhaust fan is installed on the inside of the exhaust pipe.

[0017] Preferably, a plurality of movable frames are provided inside the filter cartridge, each movable frame contains different types of filter materials, and a partition is provided in the middle position of the movable frame. A support frame is installed at the position of the movable frame corresponding to the outside of the filter cartridge, and an electric push rod is installed at the position of each movable frame corresponding to the inside of the support frame. The change in the length of the electric push rod drives the movable frame to adjust its position inside the filter cartridge. The length of the movable frame is twice the diameter of the exhaust pipe.

[0018] Preferably, the analysis module performs the following steps to analyze the filtration efficiency of the filtered material:

[0019] S1: Analyze the exhaust gas components, label each exhaust gas component, and then select a single exhaust gas component with a set concentration of simulated gas to pass into the movable frame equipped with the corresponding common filter material, keep other conditions the same, and use a high-precision analytical instrument to monitor the concentration of the component after filtration at the outlet. By comparing the intake and outlet concentrations, use the formula, Calculate the filtration efficiency DY of the corresponding common filter material for this single exhaust gas component n , n is the number of the corresponding exhaust gas component;

[0020] S2: After completing the collection of the single filtration efficiency of each component in the photoresist production waste gas, a mixed simulated waste gas is prepared according to the proportion of each component in the actual photoresist production waste gas, and passed into the movable frame equipped with the corresponding common filter material. A comprehensive component analysis is also performed at the outlet to obtain the filtration efficiency HS of each common filter material for each component in the mixed waste gas. n , n is the number of the corresponding exhaust gas component;

[0021] S3: The detected filtration efficiency DY n and HS n Compare, if the preset difference threshold a>|DY n -HS n |, it means that the filtering effect of the corresponding filter material on the exhaust gas component is not much different when it is single and mixed, and the filtering efficiency of the corresponding filter material on the exhaust gas component is determined. On the contrary, it means that the filtering effect of the corresponding filter material on the exhaust gas component is quite different when it is single and mixed. When the proportion of the exhaust gas component does not exceed the preset proportion of the mixed exhaust gas, the filtering efficiency GL of the corresponding filter material on the exhaust gas component is n =HS n Otherwise, a board-changing signal is generated and passed to the execution module;

[0022] S4: The filtration efficiency of a filter cartridge with m movable frames for a certain component in the exhaust gas is equal to the sum of the filtration efficiencies of the ordinary filter materials in the m movable frames for that component ZGL n ; According to the filtration efficiency formula, the sum of filtration efficiency ZGLn The outlet gas concentration data is calculated from the inlet gas concentration data. If the outlet gas concentration data is greater than the outlet gas concentration corresponding to the emission standard, a plate change signal is generated and transmitted to the execution module.

[0023] S5: Detect the exhaust gas components arriving at the filter cartridge position, and then sort them from large to small according to the proportion of the detected components. Mark the exhaust gas components that account for more than half of the mixed exhaust gas, and generate a plate change signal. The plate change signal is then transmitted to the execution module to adjust the filtration efficiency of the marked exhaust gas components.

[0024] Preferably, the analysis module performs the following steps to determine the performance of the filtered material:

[0025] M1: The initial pressure difference is ΔP0, and the pressure difference at a certain moment is ΔP t , the initial flow is Q0, and the flow at a certain moment is Q t ; Pressure difference variation coefficient Flow rate variation coefficient

[0026] M2: Comprehensive prediction coefficient K = w1*K is obtained by combining the influence of flow rate and pressure difference. ΔP +w2*K Q , when the preset comprehensive warning threshold K max When ≤K, it is determined that the filter material inside the active frame needs to be replaced, a quality change signal is generated, and the quality change signal is transmitted to the execution module.

[0027] Preferably, the steps of executing the operation by the execution module are as follows:

[0028] N1: After receiving the plate-changing signal, the corresponding electric push rod on the movable frame that generates the plate-changing signal is controlled to shorten its length, and the movable frame moves halfway upward, so that the high-efficiency filter material on the lower side of the movable frame can filter the exhaust gas components;

[0029] N2: After receiving the quality change signal, the controller controls the electric push rod corresponding to the movable frame that generates the quality change signal to shorten the length so that the movable frame is completely pulled out, and sends a buzzer warning through the buzzer module inside the controller to inform the staff to replace the movable frame.

[0030] Compared with the prior art, the present invention has the following beneficial effects:

[0031] 1. The filter cartridge cooperates with the activated carbon and other filtering materials inside to filter the exhaust gas used in photoresist production. The scraping mechanism and the impurity removal mechanism cooperate with each other to prevent impurities in the exhaust gas from being adsorbed and accumulated on the inner wall, thereby improving the convenience of using the exhaust device and realizing the function of removing impurities. Ultimately, it solves the problem of not being able to meet environmental protection regulations and reducing the filtering effect.

[0032] 2. The analysis module tests the filtration efficiency of single exhaust gas components and mixed simulated exhaust gas respectively, and conducts comprehensive comparative analysis to more accurately determine the actual filtration efficiency of the filter material for different exhaust gas components. This helps to select the most appropriate filter material combination, improve the filtration effect, ensure that all types of pollutants in the exhaust gas can be effectively treated, and make the final exhaust gas more in line with environmental protection standards;

[0033] 3. By using the pressure difference and flow rate variation coefficient to calculate the comprehensive prediction coefficient, the performance of the filter material is monitored in real time. Once the comprehensive prediction coefficient reaches the preset threshold, the system automatically generates a quality change signal to prompt the staff to replace the filter material in time, thereby realizing dynamic monitoring and intelligent early warning of the filter material performance, avoiding poor exhaust gas treatment effect due to the decline of filter material performance, and ensuring the stable operation of the exhaust gas emission device. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0035] Figure 1 This is a schematic diagram of the overall three-dimensional structure proposed by the present invention;

[0036] Figure 2 This is a schematic diagram of the bottom-up three-dimensional structure proposed by the present invention;

[0037] Figure 3 This is a schematic diagram of the other side of the overall three-dimensional structure proposed by the present invention;

[0038] Figure 4 A schematic diagram of the internal structure proposed by the present invention from a first perspective;

[0039] Figure 5 A schematic diagram of the internal structure proposed by the present invention from a second perspective;

[0040] Figure 6 This is a schematic side cross-sectional structural diagram of the present invention;

[0041] Figure 7 This is a flow chart of the system proposed by the present invention.

[0042] Serial numbers in the figure: 1. Exhaust tank; 2. Cover plate; 3. Fixed cylinder; 4. Inlet pipe; 5. Residue collection tank; 6. First servo motor; 7. Filter cylinder; 8. Exhaust pipe; 9. Suction fan; 10. Fixing block; 11. Second servo motor; 12. Fixed plate; 13. Fixing bolt; 14. Positioning plate; 15. Brush; 16. Outer gear ring; 17. Slag discharge port; 18. Worm; 19. Activated carbon; 20. Exhaust fan. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0044] Example: See Figure 1-7 The exhaust gas exhaust device for photoresist production in the present invention comprises an exhaust tank 1 and a cover plate 2 provided on the upper end of the exhaust tank 1, a cavity structure is opened on the inner side of the exhaust tank 1, and a fixed cylinder 3 is fixedly connected to the lower end of the exhaust tank 1, a fixed block 10 is fixedly connected to one side of the fixed cylinder 3, a transmission mechanism is installed on the inner side of the fixed block 10, a scraping mechanism is installed on the inner side of the fixed cylinder 3 on one side of the transmission mechanism, a debris removal mechanism is installed on the lower end of the scraping mechanism, a filtering mechanism is horizontally installed on one side of the exhaust tank 1, and the exhaust tank 1 and the cover plate 2 are convenient to form the overall shell of the exhaust device; an air intake pipe 4 is fixedly connected to the lower end of the fixed cylinder 3, a cross support plate is horizontally fixedly connected to the inner side of the air intake pipe 4, an air intake fan 9 is installed in the cross support plate, and the exhaust gas to be treated is conveniently inhaled through the air intake pipe 4 and the air intake fan 9.

[0045] In the present invention, the scraping mechanism includes a first servo motor 6 vertically installed in the middle of the upper end of the cover plate 2, the output end of the first servo motor 6 passes through the cover plate 2 and is sleeved on the upper end of the fixed plate 12, the fixed plate 12 and the output end of the first servo motor 6 are fixed by fixing bolts 13, and positioning plates 14 are fixed at both ends of the fixed plate 12 by bolts, and brushes 15 are equidistantly fixed to one side of the positioning plate 14. The brushes 15 are tightly attached to the inner wall of the exhaust tank 1, and the brushes 15 are convenient for scraping off the impurities adsorbed on the inner wall of the exhaust tank 1 through the positioning plate 14; the transmission mechanism includes a fixing block 10 fixed to one side of the fixed cylinder 3, the inner side of the fixing block 10 is a cavity structure, and a second servo motor 11 is installed on one side of the fixing block 10, the output end of the second servo motor 11 passes through the fixing block 10 and is fixed to a worm 18, and the second servo motor 11 and the worm 18 are convenient for providing power to the internal impurity removal mechanism.

[0046] In the present invention, the impurity discharge mechanism includes an outer gear ring 16 installed between the fixed cylinder 3 and the exhaust tank 1, the outer gear ring 16 and the worm 18 are meshed with each other, and a scraper is fixedly connected to the inner side of the outer gear ring 16 at equal distances, and a slag discharge port 17 is vertically opened on one side of the fixed cylinder 3 at the lower end of the outer gear ring 16, and L-shaped limit blocks are fixedly connected to both sides of the fixed cylinder 3 at the lower end of the slag discharge port 17, and a residue collection trough 5 is slidably installed between the L-shaped limit blocks, and impurities are easily discharged from the slag discharge port 17 through the outer gear ring 16 and the scraper; the filtering mechanism includes an exhaust hole horizontally opened at the upper end of the exhaust tank 1, a connecting pipe is horizontally fixed to the exhaust hole, a filter cylinder 7 is fixedly connected to the middle of the connecting pipe, activated carbon 19 and other filtering materials are installed on the inside of the filter cylinder 7, and the other end of the filter cylinder 7 is fixedly connected to the exhaust pipe 8, an exhaust fan 20 is installed on the inside of the exhaust pipe 8, and the exhaust gas is easily filtered and discharged through the filter cylinder 7 and the exhaust fan 20.

[0047] m movable frames are provided inside the filter cartridge 7, each of which contains different types of filter materials, and a partition is provided in the middle of the movable frame. The filter material on the lower side of the partition is a common filter material, and the filter material on the upper side of the partition is selected according to the exhaust gas composition. Each selected filter material has a high filtering effect on a certain component in the exhaust gas composition, so that the filter materials on both sides will not affect each other during the filtering operation; a support frame is installed on the outside of the filter cartridge 7 at the position corresponding to the movable frame, and an electric push rod is installed on the inside of the support frame at the position corresponding to each movable frame. The change in the length of the electric push rod drives the movable frame to adjust its position inside the filter cartridge 7. The length of the movable frame is twice the diameter of the exhaust pipe;

[0048] A control component is provided inside the controller of the first servo motor 6, and the control component includes an acquisition module, an analysis module and an execution module;

[0049] Analyze the exhaust gas components, label each exhaust gas component, and then select a single exhaust gas component with a set concentration of simulated gas to pass into the movable frame equipped with the corresponding common filter material, keep other conditions the same, and use a high-precision analytical instrument to monitor the concentration of the component after filtration at the outlet. By comparing the intake and outlet concentrations, use the formula, Calculate the filtration efficiency DY of the corresponding common filter material for this single exhaust gas component n , n is the number of the corresponding exhaust gas component;

[0050] After completing the collection of the single filtration efficiency of each component in the photoresist production waste gas, a mixed simulated waste gas is prepared according to the proportion of each component in the actual photoresist production waste gas, and passed into the movable frame equipped with the corresponding common filter material. A comprehensive component analysis is also performed at the outlet to obtain the filtration efficiency HS of each common filter material for each component in the mixed waste gas. n , n is the number of the corresponding exhaust gas component;

[0051] The detected filtration efficiency DY n and HS n Compare, if the preset difference threshold a>|DY n -HS n |, it means that the filtering effect of the corresponding filter material on the exhaust gas component is not much different when it is single and mixed, and the filtering efficiency of the corresponding filter material on the exhaust gas component is determined. On the contrary, it means that the filtering effect of the corresponding filter material on the exhaust gas component is quite different when it is single and mixed. When the proportion of the exhaust gas component does not exceed the preset proportion of the mixed exhaust gas, the filtering efficiency GL of the corresponding filter material on the exhaust gas component is n =HS n Otherwise, a board-changing signal is generated and passed to the execution module;

[0052] The filtration efficiency of the filter cartridge 7 with m movable frames for a certain component in the exhaust gas is equal to the sum of the filtration efficiencies of the ordinary filter materials in the m movable frames for the component ZGL n ; According to the filtration efficiency formula, the sum of filtration efficiency ZGL n The outlet gas concentration data is calculated from the inlet gas concentration data. If the outlet gas concentration data is greater than the outlet gas concentration corresponding to the emission standard, a plate-changing signal is generated and transmitted to the execution module.

[0053] The exhaust gas components arriving at the filter cartridge 7 are detected, and then sorted from large to small according to the proportion of the detected components. The exhaust gas components that account for more than half of the mixed exhaust gas are marked, and a plate-changing signal is generated. The plate-changing signal is then transmitted to the execution module to adjust the filtration efficiency of the marked exhaust gas components.

[0054] The initial pressure difference is ΔP0, and the pressure difference at a certain moment is ΔP t , the initial flow is Q0, and the flow at a certain moment is Q t As the filter material absorbs more impurities, the pressure difference will increase, the residual filtration effect will decrease, and the pressure difference variation coefficient will increase. As the performance of the filter material decreases, the resistance increases, the flow rate decreases, and the flow rate variation coefficient The comprehensive prediction coefficient K = w1*K is obtained by combining the influence of flow rate and pressure difference. ΔP +w2*K Q , when the preset comprehensive warning threshold K max When ≤K, it is determined that the filter material inside the active frame needs to be replaced, a quality change signal is generated, and the quality change signal is transmitted to the execution module.

[0055] Working principle: When the present invention is used, the exhaust gas during the production of photoresist is first absorbed through the air inlet pipe 4 and the air suction fan 9, and then stored through the fixed cylinder 3 and the exhaust tank 1. The inhaled exhaust gas itself has a high temperature, so when the exhaust gas contacts the inner wall of the exhaust tank 1 and the fixed cylinder 3 with a lower temperature, the particles with greater adsorption in the exhaust gas will be adsorbed to form a dirt layer, and then the exhaust gas is filtered through the filter cylinder 7 and the activated carbon 19 and other filter materials, and then the filtered exhaust gas is filtered through the exhaust pipe 8 and the exhaust fan 20. The exhaust gas exhaust discharge device is then driven by the cover plate 2 and the first servo motor 6 to rotate the fixed plate 12, and the fixing bolt 13 is used to prevent the device from falling off during operation. Then, the positioning plate 14 and the brush 15 are used to scrape off the adsorptive particles adsorbed on the inner wall of the exhaust tank 1. Then, the second servo motor 11 and the worm 18 are used to engage with the outer gear ring 16, so that the adsorptive particles are discharged from the slag discharge port 17 through the scraper on the outer gear ring 16, and then the adsorptive particles are collected through the residue collecting trough 5. Then, the transmission mechanism is protected by the fixing block 10.

[0056] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A waste gas exhaust device for photoresist production, comprising an exhaust tank (1) and a cover plate (2) provided on the upper end of the exhaust tank (1), characterized in that: A cavity structure is provided on the inner side of the exhaust tank (1), and a fixed cylinder (3) is fixedly connected to the lower end of the exhaust tank (1), a fixed block (10) is fixedly connected to one side of the fixed cylinder (3), a transmission mechanism is installed on the inner side of the fixed block (10), a scraping mechanism is installed on the inner side of the fixed cylinder (3) on one side of the transmission mechanism, a debris removal mechanism is installed on the lower end of the scraping mechanism, and a filtering mechanism is horizontally installed on one side of the exhaust tank (1); the filtering mechanism includes an exhaust hole horizontally provided on the upper end of the exhaust tank (1), a connecting pipe is fixedly connected to the exhaust hole horizontally, a filter cylinder (7) is fixedly connected to the middle of the connecting pipe, and a plurality of movable frames are provided inside the filter cylinder (7); A control component is provided inside the controller of the first servo motor (6), and the control component includes an acquisition module, an analysis module and an execution module; The acquisition module detects the exhaust gas composition, the filtration efficiency of the corresponding filter material inside the movable frame, the pressure difference data of the movable frame, the flow data at the position of the movable frame, and transmits the detected data to the analysis module; The analysis module processes and analyzes the filtration efficiency of the filter material to determine the filtration efficiency of the corresponding filter material for a certain exhaust gas component. If the outlet gas concentration data is greater than the outlet gas concentration corresponding to the emission standard, a plate replacement signal is generated and transmitted to the execution module. The pressure difference and flow rate data are processed and analyzed to determine whether the filter material inside the movable frame needs to be replaced. If replacement is determined to be necessary, a quality change signal is generated and transmitted to the execution module. The execution module receives the signal transmitted by the analysis module and then performs the corresponding operation.

2. The exhaust gas exhaust device for photoresist production according to claim 1, characterized in that: An air intake pipe (4) is fixedly connected to the lower end of the fixed cylinder (3), a cross support plate is horizontally fixedly connected to the inner side of the air intake pipe (4), and an air intake fan (9) is installed in the cross support plate.

3. The exhaust gas exhaust device for photoresist production according to claim 1, characterized in that: The scraping mechanism comprises a first servo motor (6) vertically mounted at the middle of the upper end of the cover plate (2); the output end of the first servo motor (6) passes through the cover plate (2) and is sleeved on the upper end of the fixed plate (12); the fixed plate (12) and the output end of the first servo motor (6) are fixed by fixing bolts (13); and positioning plates (14) are fixed at both ends of the fixed plate (12) by bolts; a brush (15) is fixedly connected to one side of the positioning plate (14) at equal distances, and the brush (15) is tightly fitted to the inner wall of the exhaust tank (1).

4. The exhaust gas exhaust device for photoresist production according to claim 3, characterized in that: The transmission mechanism comprises a fixing block (10) fixed to one side of the fixing cylinder (3), the inner side of the fixing block (10) is a cavity structure, and a second servo motor (11) is installed on one side of the fixing block (10), and the output end of the second servo motor (11) passes through the fixing block (10) and is fixed to a worm (18).

5. The exhaust gas exhaust device for photoresist production according to claim 4, characterized in that: The debris discharge mechanism comprises an outer gear ring (16) installed between a fixed cylinder (3) and an exhaust tank (1), wherein the outer gear ring (16) and a worm (18) are meshed with each other, and a scraper is fixedly connected to the inner side of the outer gear ring (16) at equal intervals, and a slag discharge port (17) is vertically opened on one side of the fixed cylinder (3) at the lower end of the outer gear ring (16), and L-shaped limit blocks are fixedly connected to both sides of the fixed cylinder (3) at the lower end of the slag discharge port (17), and a residue collection trough (5) is slidably installed between the L-shaped limit blocks.

6. The exhaust gas exhaust device for photoresist production according to claim 1, characterized in that: Activated carbon (19) and other filter materials are installed inside the filter cartridge (7), and an exhaust pipe (8) is fixedly connected to the other end of the filter cartridge (7), and an exhaust fan (20) is installed inside the exhaust pipe (8).

7. The exhaust gas exhaust device for photoresist production according to claim 1, characterized in that: Each movable frame contains different types of filter materials, and a partition is provided in the middle of the movable frame. A support frame is installed at the position of the movable frame corresponding to the outer side of the filter cartridge (7). An electric push rod is installed at the position of each movable frame corresponding to the inner side of the support frame. The change in the length of the electric push rod drives the movable frame to adjust its position inside the filter cartridge (7). The length of the movable frame is twice the diameter of the exhaust pipe.

8. The exhaust gas exhaust device for photoresist production according to claim 1, characterized in that: The analysis steps for the analysis module to analyze the filtration efficiency of the filtered material are as follows: S1: Analyze the exhaust gas components, label each exhaust gas component, and then select a single exhaust gas component with a set concentration of simulated gas to pass into the movable frame equipped with the corresponding common filter material, keep other conditions the same, and use a high-precision analytical instrument to monitor the concentration of the component after filtration at the outlet. By comparing the intake and outlet concentrations, use the formula, Calculate the filtration efficiency DY of the corresponding common filter material for this single exhaust gas component n , n is the number of the corresponding exhaust gas component; S2: After completing the collection of the single filtration efficiency of each component in the photoresist production waste gas, a mixed simulated waste gas is prepared according to the proportion of each component in the actual photoresist production waste gas, and passed into the movable frame equipped with the corresponding common filter material. A comprehensive component analysis is also performed at the outlet to obtain the filtration efficiency HS of each common filter material for each component in the mixed waste gas. n , n is the number of the corresponding exhaust gas component; S3: The detected filtration efficiency DY n and HS n Compare, if the preset difference threshold a>|DY n -HS n |, it means that the filtering effect of the corresponding filter material on the exhaust gas component is not much different when it is single and mixed, and the filtering efficiency of the corresponding filter material on the exhaust gas component is determined. On the contrary, it means that the filtering effect of the corresponding filter material on the exhaust gas component is significantly different when it is single and mixed. When the proportion of the exhaust gas component does not exceed the preset proportion of the mixed exhaust gas, the filtering efficiency GL of the corresponding filter material on the exhaust gas component is n =HS n Otherwise, a board-changing signal is generated and passed to the execution module; S4: The filtration efficiency of the filter cartridge (7) with m movable frames for a certain component in the exhaust gas is equal to the sum of the filtration efficiencies of the ordinary filter materials in the m movable frames for the component ZGL n ; According to the filtration efficiency formula, the sum of filtration efficiency ZGL n The outlet gas concentration data is calculated from the inlet gas concentration data. If the outlet gas concentration data is greater than the outlet gas concentration corresponding to the emission standard, a plate change signal is generated and transmitted to the execution module. S5: Detect the exhaust gas components arriving at the filter cartridge (7), and then sort them from large to small according to the proportion of the detected components. Mark the exhaust gas components that account for more than half of the mixed exhaust gas, and generate a plate change signal. The plate change signal is then transmitted to the execution module to adjust the filtration efficiency of the marked exhaust gas components.

9. The exhaust gas exhaust device for photoresist production according to claim 8, characterized in that: The analysis module determines the performance of the filtered material in the following steps: M1: The initial pressure difference is ΔP0, and the pressure difference at a certain moment is ΔP t , the initial flow is Q0, and the flow at a certain moment is Q t ; Pressure difference variation coefficient Flow rate variation coefficient M2: Comprehensive prediction coefficient K = w1*K is obtained by combining the influence of flow rate and pressure difference. ΔP +w2*K Q , when the preset comprehensive warning threshold K max When ≤K, it is determined that the filter material inside the active frame needs to be replaced, a quality change signal is generated, and the quality change signal is transmitted to the execution module.

10. The exhaust gas exhaust device for photoresist production according to claim 9, characterized in that: The steps for executing the module to perform operations are as follows: N1: After receiving the plate-changing signal, the corresponding electric push rod on the movable frame that generates the plate-changing signal is controlled to shorten its length, and the movable frame moves halfway upward, so that the high-efficiency filter material on the lower side of the movable frame can filter the exhaust gas components; N2: After receiving the quality change signal, the controller controls the electric push rod corresponding to the movable frame that generates the quality change signal to shorten the length so that the movable frame is completely pulled out, and sends a buzzer warning through the buzzer module inside the controller to inform the staff to replace the movable frame.

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