A control method for a handling robot

Abstract

The present invention discloses a control method for a handling robot. The control method includes a first controller sending a handling instruction to a second controller and a signal processor; the second controller controlling the movement of a robot arm according to the handling instruction and controlling the corresponding first fork to pick up a wafer according to the handling instruction; a first detection unit collecting a first signal indicating whether a first fork has picked up a wafer and sending the first signal to the signal processor; the signal processor comparing the first signal with the handling instruction to determine whether each first fork has a handling anomaly; if a first fork has a handling anomaly, the signal processor transmits information about the first fork to the first controller, and the second controller does not execute the next received handling instruction. This application can quickly locate the fork with the handling anomaly, facilitating troubleshooting.

Description

Technical Field

[0001] The present invention relates to the field of wafer transport equipment stations, and in particular to a control method for a transport robot. Background Art

[0002] During the wafer processing process, a handling robot is used for handling. The handling robot typically consists of a robotic arm and an end effector connected to the robotic arm. To improve wafer handling efficiency, existing end effectors are typically equipped with multiple forks, each capable of handling a single wafer. After receiving a handling command, the handling robot controls multiple forks to simultaneously handle the wafers. However, there may be an abnormal situation where a fork fails to carry a wafer. If the fork handling anomaly cannot be detected in time, subsequent wafer handling will be affected. Summary of the Invention

[0003] In order to overcome the above-mentioned shortcomings, the object of the present invention is to provide a control method for a handling robot, which can quickly locate the fork with abnormal handling and facilitate fault detection.

[0004] In order to achieve the above objectives, the technical solution adopted by the present invention is: a control method for a transport robot, the transport robot comprising:

[0005] A robotic arm; an end effector comprising a wrist connected to the robotic arm, a plurality of forks connected to the wrist, and a detection unit provided on each of the forks; a control device comprising a first controller, a second controller, and a signal processor, each of which is communicatively connected to the wrist, wherein the first controller and the second controller are remote from the robotic arm, and the signal processor is provided on the wrist and is communicatively connected to all of the detection units;

[0006] The control method includes: the first controller sends a handling instruction to the second controller and the signal processor; the second controller controls the movement of the robot arm according to the handling instruction and controls the corresponding fork to pick up the wafer according to the handling instruction; the detection unit collects a status signal of whether the fork has picked up the wafer and sends the status signal to the signal processor; the signal processor compares the status signal with the handling instruction to determine whether there is a handling abnormality for each fork; if there is no fork with a handling abnormality, the second controller obtains confirmation information from the signal processor, and the second controller executes the next received handling instruction; if there is a fork with a handling abnormality, the signal processor or the first controller obtains information about the fork with the handling abnormality.

[0007] Furthermore, the signal processor compares the status signal with the transport instruction to determine whether there is a transport abnormality for each of the forks, specifically including: sequentially forming a signal data from the status signals corresponding to each of the forks; comparing whether the values ​​of the signal data and the transport instruction are equal; if so, there is no transport abnormality for each of the forks; if not, there is a fork with a transport abnormality.

[0008] Furthermore, the signal processor obtains the information of the fork with abnormal transportation, specifically including: the signal processor compares the status signal corresponding to each fork with the corresponding instruction of each fork in the transportation instruction; and records the information of the fork for which the corresponding status signal and the corresponding instruction of the fork are inconsistent.

[0009] Furthermore, the first controller obtains the information of the fork with abnormal transportation, specifically including: the signal processor sends the status signal corresponding to each fork to the first controller; the first controller compares the status signal corresponding to each fork with the corresponding instruction of the fork in the transportation instruction; and records the information of the fork for which the corresponding status signal and the corresponding instruction of the fork are inconsistent.

[0010] Furthermore, the signal processor compares the status signal with the transport instruction to determine whether each of the forks has a transport abnormality, specifically comprising: the signal processor compares the status signal corresponding to each fork with the instruction of the fork corresponding to the transport instruction, and determines whether the status signal corresponding to each fork and the instruction of the fork corresponding to the transport instruction are consistent; if so, there is no fork with a transport abnormality; if not, there is a fork with a transport abnormality;

[0011] The signal processor obtains information about the fork that is transporting abnormally, including: when the status signal corresponding to the fork and the corresponding instruction of the fork are inconsistent, recording the fork whose corresponding status signal and the corresponding instruction of the fork are inconsistent.

[0012] Furthermore, the wrist includes a first wrist and a second wrist that can rotate coaxially, and the first wrist and the second wrist are provided with one or more forks and the detection parts corresponding to the forks, and the detection parts corresponding to all the forks on the first wrist and the second wrist are communicatively connected to the signal processor.

[0013] Furthermore, the wrist includes a first wrist and a second wrist that can rotate coaxially, the first wrist is arranged above the second wrist, the first wrist is provided with multiple forks, and the second wrist is provided with a single fork, the detection parts corresponding to the multiple forks on the first wrist are communicated with the signal processor, and the detection part corresponding to the single fork on the second wrist is communicated with the second controller, and the second controller compares the status signal of the fork on the second wrist with the corresponding fork instruction in the transport instruction to determine whether the fork corresponding to the second wrist is transported abnormally.

[0014] Furthermore, the end effector further includes a driving module, and the fork further includes a fixing part. The second controller can control the driving module to drive the fixing part to fix and release the wafer, and the detection part can detect the fixing part to send the status signal of fixing or releasing the wafer to the signal processor.

[0015] Furthermore, the fork is a clamping fork, the fixing portion is a clamping member for clamping the wafer, the driving module is a telescopic rod, and the detection portion can send a signal to the signal processor indicating whether the clamping member clamps the wafer.

[0016] Furthermore, the blade fork is an adsorption type blade fork, the fixing part is the vacuum channel of the adsorption type blade fork, the driving module is a switch valve capable of opening and closing the vacuum channel, and the detection part can detect the vacuum degree of the vacuum channel between the switch valve and the adsorption end of the adsorption type blade fork, and send a signal to the signal processor indicating whether the vacuum degree is greater than or equal to a set threshold. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a structural diagram of a transport robot in one embodiment of the present invention;

[0018] Figure 2 This is a block diagram of a control system of a handling robot in one embodiment of the present invention;

[0019] Figure 3 A block diagram of a control system of a handling robot in another embodiment of the present invention;

[0020] Figure 4 The flow chart of the control method in one embodiment of the present invention is as follows: Figure 1 ;

[0021] Figure 5 The flow chart of the control method in one embodiment of the present invention is as follows: Figure 2 ;

[0022] Figure 6The flow chart of the control method in one embodiment of the present invention is as follows: Figure 3 ;

[0023] Figure 7 The flow chart of the control method in one embodiment of the present invention is as follows: Figure 4 ;

[0024] Figure 8 The flow chart of the control method in one embodiment of the present invention is as follows: Figure 5 .

[0025] In the picture:

[0026] 1. Robotic arm; 2. Wrist; 21. First wrist; 22. Second wrist; 3. Fork; 4. Drive module; 5. Signal processor. DETAILED DESCRIPTION

[0027] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.

[0028] See attached Figure 1 As shown, a handling robot of the present invention includes a robot arm 1, an end effector and a control device. The end effector is connected to the robot arm 1 and moves driven by the robot arm 1; the end effector is used to pick up wafers; the control device is communicated with the robot arm 1 and the end effector, and is used to control the movements of the robot arm 1 and the end effector.

[0029] See attached Figure 2 As shown, the end effector includes a wrist 2 connected to a robotic arm 1, multiple forks 3 connected to wrist 2, and a detection unit on each fork. The multiple forks are connected to the robotic arm 1 via wrist 2. The detection unit detects the wafer handling status of the corresponding fork. Wafer handling status includes normal handling and abnormal handling. If the fork handles the wafer abnormally, the handling should be stopped to prevent damage to the wafer.

[0030] The control device includes a first controller, a second controller and a signal processor 5 which are communicatively connected in pairs. The second controller is control-connected to the robot arm and the end effector, and the signal processor 5 is communicatively connected to all detection parts.

[0031] See attached Figure 4As shown, the transport method includes: when a wafer needs to be transported, the first controller sends a transport instruction to the second controller and the signal processor; after receiving the transport instruction, the second controller drives the robot arm and the end effector to transport the specified wafer; the detection part corresponding to each fork detects whether the wafer is picked up; the detection part corresponding to each fork sends a status signal of whether each fork has picked up the wafer to the signal processor; the signal processor compares the transport instruction received from the first controller with the status signal received from the detection part to determine whether each fork transports the wafer correctly; when each fork transports the wafer correctly, the signal processor sends a confirmation message to the second controller through a cable; after obtaining the confirmation message, the second controller executes the next transport instruction from the first controller, and the robot arm and the end effector are controlled by the second controller to transport the wafer again; when there is a transport abnormality with a fork, the signal processor does not send a confirmation message or sends an error message to the second controller, and the second controller does not execute the next transport instruction from the first controller. At the same time, the signal processor or the first controller obtains information about the abnormal fork.

[0032] The present application connects a signal processor to all detection units, and the signal processor is respectively connected to the first controller and the second controller. The signal processor can compare the handling instructions issued by the first controller with the status signals detected by the corresponding detection units of each fork, thereby determining whether each fork is correctly handling the wafer. The second controller can obtain a signal of whether to execute the next handling instruction through only a single cable connected to the signal processor, thereby preventing the fork from damaging the wafer during the subsequent wafer handling process if one of the multiple forks handles the wafer abnormally.

[0033] At the same time, by arranging the signal processor on the wrist, the length of the multiple cables between the signal processor and the corresponding detection parts of each fork can be shortened. There is no need to pass the multiple cables between the corresponding detection parts of each fork through the robotic arm. Only a single cable needs to be set between the signal processor and the second controller. The single cable set between the signal processor and the second controller can be easily hidden in the narrow cavity of the robotic arm. This can avoid the situation where the cables connected to the multiple detection parts pass through the narrow space in the robotic arm and are squeezed and rubbed against each other due to the movement of the robotic arm, thereby loosening the connection between the cables and the detection parts and causing the second controller to fail to receive the confirmation signal.

[0034] In addition, by connecting the signal processor to all detection parts and the first controller respectively, the status signal corresponding to each fork can be sent to the signal processor or the first controller through the detection part. The signal processor or the first controller can compare the handling instruction with the status signal corresponding to each fork, so as to obtain the information of the abnormal fork. Personnel can quickly check and find the specific abnormal fork through the information of the abnormal fork.

[0035] The signal processing module may be a PCB board, and the first controller and the second controller may be of various types, such as a computer or a PLC.

[0036] In some embodiments, see Appendix Figure 5 As shown, the signal processor compares the status signal with the transport instruction to determine whether there is a transport abnormality for each fork. Specifically, the status signals corresponding to each fork are sequentially formed into a signal data, and the values ​​of the signal data and the transport instruction are compared to see whether they are equal; if so, there is no transport abnormality for each fork; if not, there is a fork with a transport abnormality.

[0037] When determining whether each fork has a handling anomaly, the state signals corresponding to each fork can first be sequentially formed into a signal data, and then the signal data and the numerical value of the handling instruction can be compared to determine whether they are equal. The numerical values ​​of the signal data and the handling instruction can both be binary values ​​or decimal values. This embodiment does not limit the numerical type of the two. When the signal data and the handling instruction numerical value are equal, each fork has no handling anomaly. Since the number of times the robot handles multiple times is usually the majority, the probability of each fork having a handling anomaly is a small event. When comparing in this way, only one comparison is required to determine whether each fork has a handling anomaly, thereby reducing the number of comparisons and judgments and saving the time of handling wafers.

[0038] When the signal data and the transport instruction value are not equal, there is a fork that is transporting abnormally. It is necessary to further determine which fork is abnormal. The signal processor or the first controller can make this determination and obtain information about the fork that is transporting abnormally.

[0039] See attached Figure 6 As shown, when the signal processor needs to obtain the information of the abnormal fork, the signal processor will compare the status signal corresponding to each fork with the instructions of each fork corresponding to the transport instruction, and record the information of the fork whose corresponding status signal and the corresponding fork instruction are inconsistent.

[0040] If you need to use the first controller to obtain the abnormal fork information, see the attached Figure 7 As shown, the signal processor sends the status signal corresponding to each fork to the first controller. The first controller compares the status signal corresponding to each fork with the instruction of the corresponding fork in the handling instruction and records the information of the fork whose corresponding status signal and instruction do not match. In this way, the first controller processes multiple operations to compare the status signal corresponding to each fork with the instruction of the corresponding fork in the handling instruction, which can reduce the computational pressure of the signal processor and increase the speed at which the signal processor sends confirmation signals to the second controller, further reducing the time of wafer handling.

[0041] In some embodiments, see Appendix Figure 8As shown, the signal processor compares the status signal with the handling instruction to determine whether there is a handling abnormality for each fork. Specifically, the process includes: searching for the instruction of each fork in the handling instruction, and the signal processor comparing the status signal corresponding to each fork with the instruction of the corresponding fork. If the status signal corresponding to each fork and the instruction of the corresponding fork are consistent, then there is no fork with handling abnormality; if they are inconsistent, then there is a fork with handling abnormality.

[0042] The signal processor obtains information about the abnormally transported fork, including: when the status signal corresponding to the fork is inconsistent with the corresponding fork instruction, recording the fork whose corresponding status signal is inconsistent with the corresponding fork instruction.

[0043] When the signal processor receives the status signal sent by the detection unit corresponding to each fork, it can compare the status signal corresponding to each fork with the instruction of the corresponding fork in the handling instruction. After multiple comparisons, it can determine and record which fork has a handling abnormality, and at the same time send information to the second controller whether to execute the next handling instruction. When the status signal corresponding to each fork is consistent with the instruction content of the corresponding fork in the handling instruction, a confirmation signal is sent to the second controller, and the second controller executes the next handling instruction. When they are inconsistent, no confirmation signal is sent to the second controller. If the second controller does not receive the confirmation signal, it will not execute the next handling instruction. Alternatively, when the status signal corresponding to each fork is consistent with the instruction content of the corresponding fork in the handling instruction, a high-level signal is sent to the second controller, and the second controller executes the next handling instruction. When they are inconsistent, a low-level signal is sent to the second controller, and the second controller does not execute the next handling instruction.

[0044] In some embodiments, see Appendix Figure 1 As shown, the wrist 2 includes a first wrist 21 and a second wrist 22 that can rotate coaxially. The first wrist and the second wrist are provided with one or more forks and detection parts corresponding to the forks. The detection parts corresponding to all the forks on the first wrist and the second wrist are communicatively connected to the signal processor.

[0045] The detection parts corresponding to one or more forks on the first wrist are communicatively connected to the signal processor, and the detection parts corresponding to one or more forks on the second wrist are communicatively connected to the signal processor. After the signal processor compares the status signal sent by the detection part with the fork instruction content in the handling instruction, the information on whether to execute the next handling instruction can be sent to the second controller only through one cable. There is no need to connect the cable connected to the detection part corresponding to the fork on the first wrist or the second wrist to the second controller through the robotic arm, thereby further reducing the number of cables in the robotic arm 1 and reducing the mutual squeezing and friction of the cables inside the robotic arm, thereby avoiding loosening of the connection between the cable and the second detection part.

[0046] In some embodiments, see Appendix Figure 3As shown, the wrist includes a first wrist and a second wrist that can rotate coaxially, the first wrist is arranged above the second wrist, the first wrist is provided with multiple forks, and the second wrist is provided with a single fork, the detection parts corresponding to the multiple forks on the first wrist are communicated with the signal processor, and the detection part corresponding to the single fork on the second wrist is communicated with the second controller, and the second controller compares the status signal of the fork corresponding to the second wrist with the instruction of the corresponding fork in the transport instruction to determine whether the transport of the fork corresponding to the second wrist is abnormal.

[0047] In some embodiments, the end effector further includes a drive module 4, and the forks further include a fixing portion (not shown). The second controller can control the drive module 4 to drive the fixing portion to secure and release the wafer. The detection unit can detect the fixing portion and transmit a status signal indicating whether the wafer is secured or released to the signal processor. It should be noted that the status signal indicating the wafer is secured by the fixing portion refers to a signal indicating that the fixing portion has secured the wafer. The status signal indicating whether the wafer is released includes a signal indicating that the fixing portion has secured the wafer but has not secured the wafer, and a signal indicating that the fixing portion has not secured the wafer. When the detection unit detects that the fixing portion is secured to the wafer, the detection unit transmits a status signal to the signal processor. When the detection unit does not detect that the fixing portion is secured to the wafer, the detection unit transmits another status signal to the signal processor. The status signal can be, for example, a high or low level signal. After receiving the status signal corresponding to each fork from the detection unit, the signal processor compares the transport signal with the status signal. If the fork instruction in the transport signal matches the status signal corresponding to each fork, the signal processor transmits a confirmation signal to the second controller, which then executes the next transport instruction. If they do not match, the signal processor either does not transmit a signal or transmits another signal to the second controller, which then does not execute the next transport instruction.

[0048] In some embodiments, the fork is a clamping fork, the fixing portion is a clamping member for clamping the wafer, the driving module is a telescopic rod, and the detection portion can send a signal to the signal processor as to whether the clamping member has reached the position for clamping the wafer.

[0049] The telescopic rod can be an electric cylinder or a pneumatic cylinder, and the clamping member is connected to the telescopic rod. The clamping member can move and clamp the wafer under the push of the telescopic rod. The detection unit is a sensor that can detect position or pressure. When the detection unit is a sensor that can detect position, the detection unit can be a photoelectric sensor or a limit switch. When the clamping member is not clamped or is pushed by the telescopic rod but does not clamp the wafer, the detection unit does not detect that the telescopic rod is in a position capable of clamping the wafer, and the detection unit outputs a low-level signal to the signal processor. When the detection unit is pushed by the telescopic rod and clamps the wafer, the detection unit outputs a high-level signal to the signal processor. When the detection unit is a sensor that detects pressure, the detection unit can be a pressure sensor. The pressure sensor is connected to the telescopic rod or the clamping member. When the clamping member clamps the wafer, the pressure sensor outputs a high-level signal to the signal processor. When the clamping member is not clamped or is pushed by the telescopic rod but does not clamp the wafer, the pressure sensor outputs a low-level signal to the signal processor.

[0050] In some embodiments, the blade fork is an adsorption type blade fork, the fixing part is the vacuum channel of the adsorption type blade fork, the driving module is a switch valve that can open and close the vacuum channel, and the detection part can detect the vacuum degree of the vacuum channel between the switch valve and the adsorption end of the adsorption type blade fork, and send a signal to the signal processor indicating whether the vacuum degree is greater than or equal to a set threshold.

[0051] The detection part can be a vacuum sensor, which is located on the vacuum channel between the switch valve and the adsorption end. When the switch valve is opened, the vacuum channel on the adsorption fork can generate adsorption force on the adsorption end. After the adsorption end of the adsorption fork is adsorbed to the wafer, the vacuum degree detected by the vacuum sensor is greater than or equal to the set threshold, and the vacuum sensor sends a high-level signal to the signal processor. When the switch valve is closed or the switch valve is opened and no wafer is placed on the adsorption end of the adsorption fork, the vacuum degree detected by the vacuum sensor is less than the set threshold, and the vacuum sensor sends a low-level signal to the signal processor.

[0052] The above embodiments are only for illustrating the technical concept and features of the present invention. Its purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. It cannot be used to limit the scope of protection of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A control method for a handling robot, characterized in that: The handling robot comprises: robotic arm; An end effector comprises a wrist connected to the robotic arm, a plurality of forks connected to the wrist, and a detection unit provided on each fork; The control device includes a first controller, a second controller, and a signal processor that are communicatively connected in pairs, wherein the first controller and the second controller are remote from the robotic arm, and the signal processor is located on the wrist and is communicatively connected to all the detection units. The control method includes: The first controller sends a transport instruction to both the second controller and the signal processor; The second controller controls the movement of the robot arm according to the transport instruction and controls the corresponding fork to pick up the wafer according to the transport instruction; The detection unit collects a status signal of whether the wafer is taken by the wafer fork and sends the status signal to the signal processor; The signal processor compares the status signal with the transport instruction to determine whether there is a transport abnormality for each of the forks; If there is no fork with abnormal transport, the second controller obtains confirmation information from the signal processor and executes the next received transport instruction; If there is a piece fork with abnormal transportation, the signal processor or the first controller obtains information of the piece fork with abnormal transportation.

2. The control method of the transport robot according to claim 1, characterized in that: The signal processor compares the status signal with the transport instruction to determine whether there is a transport abnormality for each fork, specifically including: The state signals corresponding to the respective forks sequentially form a signal data; comparing the signal data and the transport instruction to see if their values ​​are equal; If so, then there is no abnormality in the handling of each of the forks; If not, there is said fork that is transported abnormally.

3. The control method of the transport robot according to claim 2, characterized in that: The signal processor obtains the information of the fork with abnormal transport, specifically including: The signal processor compares the status signal corresponding to each of the forks with the instruction corresponding to each of the forks in the transport instruction; Record the information of the slice fork whose corresponding status signal is inconsistent with the corresponding instruction of the slice fork.

4. The control method of the transport robot according to claim 2, wherein: The first controller obtains the information of the fork with abnormal transportation, specifically including: the signal processor sends the status signal corresponding to each fork to the first controller; the first controller compares the status signal corresponding to each fork with the instruction of the corresponding fork in the transportation instruction; and records the information of the fork for which the corresponding status signal and the corresponding instruction of the fork are inconsistent.

5. The control method of the transport robot according to claim 1, wherein: The signal processor compares the status signal with the transport instruction to determine whether there is a transport abnormality for each of the slices. Specifically, the signal processor compares the status signal corresponding to each of the slices with the instruction of the slice corresponding to the transport instruction, and determines whether the status signal corresponding to each of the slices is consistent with the instruction of the slice corresponding to the transport instruction. If so, there is no slice with a transport abnormality; if not, there is a slice with a transport abnormality. The signal processor obtains information about the fork that is transporting abnormally, including: when the status signal corresponding to the fork and the corresponding instruction of the fork are inconsistent, recording the fork whose corresponding status signal and the corresponding instruction of the fork are inconsistent.

6. The control method of the transport robot according to claim 1, characterized in that: The wrist includes a first wrist and a second wrist that can rotate coaxially. The first wrist and the second wrist are provided with one or more forks and the detection parts corresponding to the forks. The detection parts corresponding to all the forks on the first wrist and the second wrist are communicatively connected to the signal processor.

7. The control method of the transport robot according to claim 1, characterized in that: The wrist includes a first wrist and a second wrist that can rotate coaxially. The first wrist is arranged above the second wrist. The first wrist is provided with multiple forks, and the second wrist is provided with a single fork. The detection parts corresponding to the multiple forks on the first wrist are communicated with the signal processor, and the detection part corresponding to the single fork on the second wrist is communicated with the second controller. The second controller compares the status signal of the fork on the second wrist with the corresponding fork instruction in the transport instruction to determine whether the fork corresponding to the second wrist is transported abnormally.

8. The control method of the transport robot according to claim 1, characterized in that: The end effector further includes a driving module, and the fork further includes a fixing part. The second controller can control the driving module to drive the fixing part to fix and release the wafer. The detection part can detect the fixing part to send the status signal of fixing or releasing the wafer to the signal processor.

9. The control method of the transport robot according to claim 8, characterized in that: The fork is a clamping fork, the fixing portion is a clamping member for clamping the wafer, the driving module is a telescopic rod, and the detection portion can send a signal to the signal processor indicating whether the clamping member clamps the wafer.

10. The control method of the transport robot according to claim 8, characterized in that: The slice fork is a suction type slice fork, the fixing part is the vacuum channel of the suction type slice fork, the driving module is a switch valve that can open and close the vacuum channel, and the detection part can detect the vacuum degree of the vacuum channel between the switch valve and the suction end of the suction type slice fork, and send a signal to the signal processor indicating whether the vacuum degree is greater than or equal to a set threshold.

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