A multi-stage power transmission system with tension compensation

Abstract

The present invention discloses a multi-stage power transmission system with tension compensation, comprising a mounting base, a first wheel group and a second wheel group, and further comprising: a support member fixedly connected to the mounting base, an arc-shaped guide portion being provided on the bearing surface of the support member; a deflection seat fixedly connected to the axial bearing end of the first wheel group and / or the second wheel group, the deflection seat having a deflection portion, the deflection portion being rotatable along the extension direction of the arc-shaped guide portion; an adjustment assembly for applying an actuating force between the deflection seat and the support member, the actuating force driving the deflection portion to rotate around the arc-shaped guide portion and to undergo relative angular displacement; the adjustment assembly driving the deflection seat to deflect to a preset angle and be fixed to the support member. By adopting the above scheme, the pulley shaft is always in a preset correction state during actual operation, thereby eliminating the uneven radial load caused by the superposition of multi-stage tensioning forces, and suppressing the cumulative effect of the pulley shaft offset from the source.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer conveying equipment, and in particular to a multi-stage power transmission system with tension compensation. Background Art

[0002] In the semiconductor manufacturing process, precise wafer transfer is crucial for ensuring stability and yield across all steps. To meet the dual requirements for transfer accuracy and efficiency, wafer transfer robots are widely used as key equipment in processes such as packaging, lithography, and etching. They utilize multi-degree-of-freedom robotic arms to achieve automated, high-precision transfer of wafers between chambers or workstations.

[0003] As semiconductor device structures evolve toward higher density and finer linewidths, the dynamic performance of wafer handling systems is increasingly demanding. Wafer handling robots must operate in extremely clean environments, requiring strong dynamic response and robust disturbance tolerance to accommodate complex and changing workloads and coordinated control requirements. This has driven the evolution of robot transmission systems toward multi-stage, multi-joint, and multi-actuator structures, enabling more refined motion control and positioning accuracy. However, to independently drive multiple robotic arms and end effectors, transmission systems often require a multi-stage transmission structure consisting of multiple synchronous belts and pulleys. In actual operation, the increasing number of transmission stages results in cumulative tension on each synchronous belt stage, placing greater radial loads on some pulley bearings. This load can cause slight angular deviations of the pulley shafts, which accumulate over the multi-stage transmission process, ultimately impacting the transfer accuracy of the robot end effector and becoming a potential risk that needs to be addressed in high-precision wafer handling systems.

[0004] Therefore, it is necessary to provide a multi-stage power transmission system with tension compensation to solve the above problems existing in the prior art. Summary of the Invention

[0005] The object of the present invention is to provide a multi-stage power transmission system with tension compensation, so as to compensate for the axle angle deviation caused by the multi-stage synchronous belt in the power transmission system and increase the transmission accuracy of the robot end.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A multi-stage power transmission system with tension compensation includes a mounting base, a first wheel set coaxially arranged with the center of the mounting base shoulder joint, a second wheel set coaxially arranged with the center of the mounting base elbow joint, and a multi-stage synchronous belt connecting the first wheel set and the second wheel set, including:

[0008] A supporting member fixedly connected to the mounting base, wherein a bearing surface of the supporting member is provided with an arc-shaped guide portion;

[0009] a deflection seat fixedly connected to the axial bearing end of the first wheel set and / or the second wheel set, wherein the deflection seat has a deflection portion, and the deflection portion is rotatable along the extension direction of the arc-shaped guide portion;

[0010] an adjusting assembly, configured to apply an actuating force between the deflection seat and the supporting member, wherein the actuating force drives the deflection portion to rotate around the arc-shaped guide portion and cause relative angular displacement;

[0011] In which, the adjustment component drives the deflection seat to deflect to a preset angle and is fixed to the supporting member. The adjustment component can generate a compensation torque on the first wheel set and / or the second wheel set that is opposite to the direction of the multi-stage synchronous belt tension accumulation and has the same magnitude to offset the radial load offset of the pulley shaft.

[0012] The beneficial effect of the multi-stage power transmission system with tension compensation provided by the present invention lies in: by providing an active angle compensation device consisting of an arc-shaped guide, an adjustable deflection seat, and an adjustment assembly at the axial load-bearing end of the first and / or second wheel sets, it achieves precise correction of slight wheel axle deviations caused by the multi-stage synchronous belt tension gradient. By locking the adjustment assembly, the pulley shaft is always in a preset correction state during actual operation, thereby eliminating the uneven radial load caused by the superposition of multiple stages of tension, and suppressing the cumulative effect of pulley shaft deviation at the source.

[0013] Preferably, the arc-shaped guide portion is provided with an arc-shaped guide groove, the horizontal extension direction of the arc-shaped guide groove is parallel to the main tension direction of the multi-level synchronous belt, and the deflection seat includes an integrally formed deflection body and an arc-shaped guide block, and the arc-shaped guide block slides along the curved surface of the arc-shaped guide groove.

[0014] By adopting the above technical solution, an arc-shaped guide groove parallel to the main force direction of the synchronous belt is opened on the supporting part, and the deflection body is tightly matched with the integrally formed arc-shaped guide block, so that the deflection bearing seat only slides along the predetermined trajectory, ensuring the positioning accuracy of the compensation mechanism during the angle adjustment process, and effectively eliminating the swing error of the traditional guide part caused by assembly tolerance or wear.

[0015] Preferably, at least two adjusting screw holes are provided on the supporting member, and the at least two adjusting screw holes are spaced apart along the horizontal extension direction of the arc-shaped guide groove. The adjusting assembly includes an adjusting top screw, and after the adjusting top screw is screwed into the adjusting screw hole, the end of the adjusting top screw abuts against the deflection seat.

[0016] By adopting the above technical solution and using the adjusting screw to perform angle compensation, the deflection angle of the pulley shaft can be accurately achieved by adjusting the screw-in depth of the screw, and rigid contact can be formed after the adjusting screw is locked, ensuring that the compensation angle is stable for a long time without rebound.

[0017] Preferably, a plurality of waist-shaped holes are provided on the supporting member, and a locking screw hole corresponding to and connected to the waist-shaped holes is provided on the deflection body. The adjustment assembly also includes a pre-tightening positioning bolt, which passes through the waist-shaped hole and is screwed into the locking screw hole of the deflection body.

[0018] By adopting the above technical solution, a waist-shaped hole is used in combination with a pre-tightening positioning bolt, and during installation, the pre-tightening positioning bolt can be first screwed into the waist-shaped hole and locked into the locking screw hole of the deflection body; the pre-tightening positioning bolt cooperates with the waist-shaped hole and the locking screw hole to accurately constrain the supporting part to a predetermined horizontal position during the installation stage, thereby achieving horizontal positioning; secondly, when the pre-tightening positioning bolt is screwed into the locking screw hole, the supporting part and the deflection body are combined to achieve preliminary locking.

[0019] Preferably, the waist-shaped holes are symmetrically and spaced apart on both sides of the arc-shaped guide groove, and the adjusting screw hole is located between adjacent waist-shaped holes.

[0020] By adopting the above technical solution, the waist-shaped holes are symmetrically arranged on both sides of the arc-shaped guide groove, and the adjusting screw holes are set between adjacent waist-shaped holes, so that a more balanced horizontal pre-positioning and mechanical support can be achieved in the overall structure: the symmetrical distribution of the waist-shaped holes ensures that the supporting parts are evenly stressed during installation, are not prone to tilting, and improve the stability of the pre-locking stage; and placing the adjusting screw holes between adjacent waist-shaped holes makes the action point of the adjusting top screw centered, shortens the lever arm length of the deflection seat, and further improves the sensitivity and positioning accuracy of angle fine-tuning.

[0021] Preferably, the deflection body includes an upper column and a lower column that are integrally formed, and an annular boss is formed between the upper column and the lower column.

[0022] Preferably, the first wheel set and the second wheel set each include at least three axially distributed pulley sets, and adjacent pulley sets are axially staggered.

[0023] By adopting the above technical solution, by arranging at least three pulleys in the first wheel group and the second wheel group in a multi-staggered manner along the axial direction, not only is the axial cross-sectional thickness of the robot arm significantly thinned while ensuring the balanced distribution of multi-level transmission levels and tensioning force, but also a more compact overall layout is achieved, meeting the space utilization efficiency required for semiconductor manufacturing.

[0024] Preferably, the first wheel group includes a first pulley group, a second pulley group and a third pulley group, and the second wheel group includes a fourth pulley, a fifth pulley and a sixth pulley; the first pulley group and the fourth pulley are connected by a synchronous belt transmission; the second pulley group and the fifth pulley are connected by a synchronous belt transmission; the third pulley group and the sixth pulley are connected by a synchronous belt transmission.

[0025] Preferably, the first pulley group includes a first pulley and a first linking disk, the first pulley is hollow inside, the first pulley is provided with a first slot, the first linking disk is provided with a second slot, the first slot and the second slot form a clamping space for clamping the bearing, and the bottom of the first linking disk is provided with a first space for accommodating the second pulley group.

[0026] Preferably, the second pulley group includes a second pulley and a second linking disk, the second pulley is hollow inside, the second linking disk is provided with a first support portion, and the first support portion extends into the first space; the second pulley is provided with a third slot, and the second linking disk is provided with a fourth slot, the third slot and the fourth slot form a clamping space for clamping the bearing, and the bottom of the second linking disk is provided with a second space for accommodating the third pulley group.

[0027] Preferably, the third pulley assembly includes a third pulley, the top of the third pulley has a second support portion, and the second support portion is provided in the second space. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A top view of a multi-stage power transmission system with tension compensation according to the present invention;

[0029] Figure 2 A cross-sectional view of a multi-stage power transmission system with tension compensation according to the present invention;

[0030] Figure 3 This is a schematic structural diagram of a deflection seat and a supporting member according to an embodiment of the present invention;

[0031] Figure 4 This is a schematic diagram of the deflection seat structure according to an embodiment of the present invention;

[0032] Figure 5 This is a schematic structural diagram of a supporting member according to an embodiment of the present invention;

[0033] Figure 6 is a cross-sectional view of a deflection seat and a supporting member according to an embodiment of the present invention;

[0034] Figure 7 2. It is a cross-sectional view of the first wheel assembly and the second wheel assembly according to an embodiment of the present invention;

[0035] Figure 8 A top view of the first wheel assembly according to an embodiment of the present invention;

[0036] Figure 9 is a cross-sectional view of the first wheel assembly according to an embodiment of the present invention;

[0037] Figure 10 is a cross-sectional view of the first pulley assembly according to an embodiment of the present invention;

[0038] Figure 11 is a cross-sectional view of the second pulley assembly according to an embodiment of the present invention;

[0039] Figure 12 This is a cross-sectional view of the third pulley assembly according to an embodiment of the present invention.

[0040] Figure markings: 1. mounting base; 2. first wheel group; 21. first pulley; 211. first slot; 22. first linking plate; 221. second slot; 222. first space; 23. second pulley; 231. third slot; 24. second linking plate; 241. fourth slot; 242. second space; 243. first support portion; 25. third pulley; 251. second support portion; 26. bearing; 261. pressure cover; 3. second wheel group; 31. fourth pulley; 32. fifth pulley; 33. sixth pulley; 4. supporting member; 41. arc-shaped guide groove; 42. adjusting screw hole; 43. waist-shaped hole; 5. deflection seat; 51. arc-shaped guide block; 52; upper column; 53. lower column; 531. locking screw hole; 54. annular boss; 6. first power shaft; 7. second power shaft; 8. third power shaft. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0042] The following is combined with Figure 1 - Attachment Figure 12 , the specific implementation methods of the present invention are further described in detail.

[0043] Reference Figure 1-Figure 3 In one embodiment of the present invention, a multi-stage power transmission system with tension compensation includes a mounting base 1, a first wheel set 2 and a second wheel set 3 arranged on the mounting base 1 and connected by a multi-stage synchronous belt transmission, as well as a supporting member 4, a deflection seat 5 and an adjustment component.

[0044] Reference Figure 2 and Figure 3In some embodiments of the present invention, the mounting base 1 is a frame having an internal accommodation space, and the first wheel group 2 and the second wheel group 3 are installed in the accommodation space. The first wheel group 2 and the second wheel group 3 are a shoulder joint pulley group and an elbow joint pulley group or any other adjacent joint pulley groups. Taking the shoulder joint pulley group and the elbow joint pulley group as an example, the shoulder pulley and the elbow pulley are driven by a double relative belt, and there are at least three transmission levels between the shoulder joint pulley group and the elbow joint pulley group, one of which is used to drive the forearm of the manipulator to rotate independently, and at least two other transmission levels drive at least two end effectors to rotate relatively independently.

[0045] Reference Figure 2 In some embodiments of the present invention, a support member 4 is fixedly connected to the mounting base 1, and an arc-shaped guide portion is provided on the top bearing surface of the support member 4. A deflection seat 5 is fixedly connected to the axial bearing end of the first wheel assembly 2 or the second wheel assembly 3. In some other embodiments, a deflection seat 5 is provided on the axial bearing end of both the first wheel assembly 2 and the second wheel assembly 3. The bottom of the deflection seat 5 has a deflection portion that can rotate along the arc-shaped extension direction of the arc-shaped guide portion of the support member 4.

[0046] Reference Figure 4-Figure 6 In some specific embodiments of the present invention, the arcuate guide portion is provided with an arcuate guide groove 41. The horizontal extension of the arcuate guide groove 41 is parallel to the main tension direction of the multi-level synchronous belt, thereby ensuring that the main force generated by the multi-level synchronous belt during operation is parallel to the adjustment direction of the pulley shaft formed by the arcuate guide groove 41. The deflection seat 5 comprises an integrally formed deflection body and an arcuate guide block 51, with the arcuate guide portion positioned on the arcuate guide block. The arcuate guide block 51 slides along the curved surface of the arcuate guide groove 41. By providing the arcuate guide groove 41 on the support member 4, which is parallel to the main tension direction of the synchronous belt, and closely fitting the deflection body and the integrally formed arcuate guide block 51, the deflection bearing seat slides only along a predetermined trajectory, ensuring the positioning accuracy of the compensation mechanism during angle adjustment and effectively eliminating the swing error caused by assembly tolerances or wear in traditional guide components. Furthermore, the integrally formed deflection body and arcuate guide block 51 reduce the number of components and assembly steps, improving the overall rigidity and cleanliness of the power transmission system.

[0047] Reference Figure 4 In some specific embodiments of the present invention, the deflection body includes an upper column 52 and a lower column 53 that are integrally formed, and an annular boss 54 is formed between the upper column 52 and the lower column 53. The annular stepped groove formed by the annular boss 54 is used to support the axial bearing end of the first wheel group 2 or the second wheel group 3.

[0048] Reference Figure 3-Figure 5In some embodiments of the present invention, an adjustment assembly is used to apply an actuating force between the deflection seat 5 and the support member 4. This actuating force drives the deflection member to rotate about the arcuate guide portion and produce relative angular displacement. The adjustment assembly is used to deflect the deflection seat 5 to a preset angle and secure it to the support member 4. The adjustment assembly is capable of generating a compensating torque on the first wheel set 2 and / or the second wheel set 3 that is opposite in direction and of equal magnitude to the accumulated multi-stage synchronous belt tension. The arcuate guide portion, the adjustable deflection seat 5, and the adjustment assembly together constitute a tension compensation device for the pulley shaft, enabling precise correction of minor wheel shaft offsets caused by the multi-stage synchronous belt tension gradient. During the assembly or maintenance stage, the deflection seat 5 can be preset to a preset compensation angle according to the accumulated tension of each transmission level, and locked by adjusting the component, so that the pulley shaft is always in a preset correction state during actual operation, thereby eliminating the uneven radial load caused by the superposition of multi-level tension forces, and suppressing the cumulative effect of the pulley shaft offset from the source, thereby ensuring that the end effector moves smoothly along the predetermined trajectory; and compared with traditional passive load-bearing or external spring and damping element methods, the present invention does not require additional sensor control or real-time monitoring, has a simple structure and is easy to maintain, and is more suitable for high-cleanliness semiconductor production environments.

[0049] Reference Figure 3-Figure 5 In some specific embodiments of the present invention, at least two adjusting screw holes 42 are provided on the support member 4. The at least two adjusting screw holes 42 are spaced apart along the horizontal extension direction of the arc-shaped guide groove 41. The adjustment assembly includes a plurality of adjusting screws. After the adjusting screws are screwed into the adjusting screw holes 42, the ends of the adjusting screws abut against the deflection seat 5. By using the adjusting screws for angle compensation, the deflection angle of the pulley shaft can be accurately adjusted by adjusting the screw insertion depth. After the adjusting screws are locked, a rigid contact is formed to ensure that the compensation angle is stable and does not rebound over a long period of time. In addition, by arranging a plurality of adjusting screws at both ends of the arc-shaped guide groove 41, differential fine-tuning of the angle deviation can be performed, effectively eliminating assembly errors and further improving the terminal positioning accuracy of the power transmission system.

[0050] Reference Figure 3-Figure 5In some specific embodiments of the present invention, a plurality of waist-shaped holes 43 are provided on the supporting member 4, and a locking screw hole 531 corresponding to and connected to the waist-shaped holes 43 is provided on the lower column 53 of the deflection body. The adjustment component also includes a pre-tightening positioning bolt, which passes through the waist-shaped hole 43 and is screwed into the locking screw hole 531 of the deflection body. The waist-shaped hole 43 is used in conjunction with a pre-tightening bolt. During installation, the pre-tightening bolt can be first screwed into the waist-shaped hole 43 and locked into the locking screw hole 531 of the deflection body. The pre-tightening bolt, in conjunction with the waist-shaped hole 43 and the locking screw hole 531, can firstly, by fixing the number of turns screwed into the locking screw hole 531, precisely constrain the support member 4 to a predetermined horizontal position during the installation phase, thereby achieving horizontal positioning of the support member 4, facilitating subsequent angle fine-tuning by adjusting the top screw. Secondly, when the pre-tightening bolt is screwed into the locking screw hole 531, it combines the support member 4 with the deflection body to achieve preliminary locking. The pre-tightening bolt is not fully locked in the initial state, and the slight sliding space in the horizontal direction provided by the waist-shaped hole establishes a stable reference support for subsequent fine-tuning of the top screw, thereby avoiding positioning drift caused by component movement during the subtle angle compensation process. The adjustment component can adjust the axial angle of the first wheel group 2 or the second wheel group 3 within a range of 0.05° to 0.15°.

[0051] Reference Figure 3-Figure 5 In some specific embodiments of the present invention, there are six waist-shaped holes 43 that are symmetrically and spaced apart on both sides of the arc-shaped guide groove 41, with three on each side of the arc-shaped guide groove 41. There are four adjusting screw holes 42, all of which are located between adjacent waist-shaped holes 43. By arranging the waist-shaped holes 43 symmetrically on both sides of the arc-shaped guide groove 41 and setting the adjusting screw holes 42 between adjacent waist-shaped holes 43, a more balanced horizontal pre-positioning and mechanical support can be achieved in the overall structure: the symmetrical distribution of the waist-shaped holes 43 ensures that the supporting part 4 is evenly stressed during installation, is not prone to tilting, and improves the stability of the pre-locking stage; and placing the adjusting screw holes 42 between adjacent waist-shaped holes 43 centers the action point of the adjusting top screw, shortens the lever arm length of the deflection seat 5, and further improves the sensitivity and positioning accuracy of the angle fine-tuning.

[0052] The specific angle adjustment process is as follows: First, the pre-tightening positioning bolt is passed through the waist-shaped hole 43 on the support member 4 and screwed into the locking screw hole 531 corresponding to the deflection body to achieve horizontal pre-positioning of the deflection seat 5; then, the adjusting top screw is screwed into the adjusting screw hole 42 located on the deflection body, and its end extends out and abuts against the bottom surface of the deflection body. The further screwing of the top screw end generates a torque opposite to the tensioning force of the synchronous belt, driving the deflection body to rotate clockwise around the arc-shaped guide portion to a preset compensation angle of between 0.05° and 0.15°; finally, the pre-tightening positioning bolt and the locking screw hole 531 are tightened again to fix the deflection seat 5 at the adjusted angle position. This process not only ensures the initial horizontal positioning, but also achieves fine angle compensation by adjusting the top screw, and finally ensures the long-term stability of the compensation state by locking the pre-tightening bolt.

[0053] Reference Figure 7 and Figure 8 In some specific embodiments of the present invention, each of the first and second wheel assemblies 2 and 3 includes at least three axially distributed pulley assemblies, with adjacent pulley assemblies axially staggered. By arranging at least three pulleys in the first and second wheel assemblies 2 and 3 in a multi-staggered manner along the axial direction, the axial cross-sectional thickness of the robot arm is significantly reduced while ensuring multi-stage transmission and balanced tension distribution. Furthermore, a more compact overall layout is achieved, meeting the space utilization efficiency requirements of semiconductor manufacturing. The first and second wheel assemblies 2 and 3 are located at the same transmission height, and power is transmitted via a synchronous belt.

[0054] Reference Figure 9 and Figure 10 In some specific embodiments of the present invention, the first wheel assembly 2 includes a first pulley 21, a second pulley, and a third pulley. The second wheel assembly 3 includes a fourth pulley 31, a fifth pulley 32, and a sixth pulley 33. The first pulley 21 and the fourth pulley 31 are connected by a synchronous belt transmission; the second pulley assembly and the fifth pulley 32 are connected by a synchronous belt transmission; and the third pulley assembly and the sixth pulley 33 are connected by a synchronous belt transmission. Three transmission levels are formed between the first wheel assembly 2 and the second wheel assembly 3: the first transmission level consists of the first pulley 21, the synchronous belt, and the fourth pulley 31; the second transmission level consists of the second pulley 23, the synchronous belt, and the fifth pulley 32; and the third transmission level consists of the third pulley 25, the synchronous belt, and the sixth pulley 33. Multiple transmission levels will produce multiple tensioning forces when transmitting power. The multiple tensioning forces are accumulated step by step, resulting in an increase in the radial load on the pulley bearing 26 of the first wheel group 2 or the second wheel group 3, which in turn causes a slight angular deviation of the pulley shaft; after multiple levels of amplification, it affects the terminal transmission positioning accuracy.

[0055] In some specific embodiments of the present invention, the first pulley group includes a first pulley 21 and a first linking disk 22, and the interior of the first pulley 21 is hollow. Taking the longitudinal section of the first pulley group as a direction reference as an example, an annular first groove 211 is provided on the upper right side of the inner ring surface of the first pulley 21, and an annular second groove 221 is provided on the lower left side of the first linking disk 22. The first groove 211 and the second groove 221 form a clamping space for clamping the bearing 26, which is used to press the outer ring of the bearing 26. The bottom of the first linking disk 22 is provided with a first space 222 for accommodating the second pulley group. A bearing 26 is provided between the first pulley group and the second pulley group; a bearing 26 is provided between the second pulley group and the third pulley group; and a bearing 26 is provided at the bottom of the third pulley group.

[0056] Reference Figure 11 In some specific embodiments of the present invention, the second pulley assembly includes a second pulley 23 and a second linking disc 24. The interior of the second pulley 23 is hollow. Taking the longitudinal section of the second pulley assembly as an example, the second linking disc 24 is provided with a first support portion 243, which extends into the first space 222. A third annular retaining groove 231 is provided on the upper right portion of the inner ring of the second pulley 23, and a fourth annular retaining groove 241 is provided on the lower left portion of the second linking disc 24. The third and fourth retaining grooves 231 and 241 form a clamping space for clamping the bearing 26, which is used to press the outer ring of the bearing 26. A second space 242 is provided at the bottom of the second linking disc 24 for accommodating the third pulley assembly. A bearing 26 is provided between the fourth pulley 31 and the fifth pulley 32; a bearing 26 is provided between the fifth pulley 32 and the sixth pulley 33; and a bearing 26 is provided at the bottom of the sixth pulley 33. In some specific embodiments of the present invention, a pressure cover 261 is provided on the bearing 26 to ensure stable operation of the bearing 26 .

[0057] Reference Figure 12 In some specific embodiments of the present invention, the third pulley group includes a third pulley 25, and the top of the third pulley 25 has a second support portion 251, and the second support portion 251 is arranged in the second space 242. In some other embodiments of the present invention, a first power shaft 6 is provided at the bottom of the first linking disk 22, a second power shaft 7 is provided at the bottom of the second linking disk 24, and a third power shaft 8 is provided at the bottom of the third pulley 25, and the power shaft is used to drive the first pulley 21, the second pulley 23 and the third pulley 25 to rotate. In some specific embodiments of the present invention, the inner ring of the first linking disk 22 is provided with an accommodating cavity at both ends, and a through hole is provided in the middle, and the accommodating cavity and the through hole are used to accommodate the first power shaft 6; the inner ring of the second linking disk 24 is provided with an accommodating cavity at the bottom, for accommodating the second power shaft 7; and the bottom of the third pulley 25 is provided with an accommodating cavity for accommodating the third power shaft 8.

[0058] By arranging the first pulley 21 group, the second pulley group and the third pulley group in an axially staggered manner and equipping them with corresponding linking discs and power shafts, not only is the compact integration of the three-stage synchronous belt transmission level achieved within a limited installation height, but also a clamping space is formed by the hollow pulley and the slots on the linking discs, which firmly presses the bearing 26 into the pulley group, ensuring axial and radial load support; in addition, the power shafts established at the bottom of the first linking disc 22, the second linking disc 24 and the third pulley 25 directly drive the corresponding pulleys, reducing transmission losses in the transmission power circuit.

[0059] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A multi-stage power transmission system with tension compensation, comprising a mounting base (1), a first wheel set (2) coaxially arranged with the center of the shoulder joint of the mounting base (1), a second wheel set (3) coaxially arranged with the center of the elbow joint of the mounting base (1), and a multi-stage synchronous belt connecting the first wheel set (2) and the second wheel set (3), characterized in that: include: A supporting member (4) is fixedly connected to the mounting base (1), and an arc-shaped guide portion is provided on the bearing surface of the supporting member (4); A deflection seat (5) is fixedly connected to the axial bearing end of the first wheel set (2) and / or the second wheel set (3), and the deflection seat (5) has a deflection portion, and the deflection portion can rotate along the extension direction of the arc-shaped guide portion; An adjusting assembly, used for applying an actuating force between the deflection seat (5) and the supporting member (4) to drive the deflection portion to rotate around the arc-shaped guide portion and cause relative angular displacement; The adjusting assembly drives the deflection seat (5) to deflect to a preset angle and is fixed to the supporting member (4). The adjusting assembly can generate a compensating torque on the first wheel set (2) and / or the second wheel set (3) that is opposite to the direction of the multi-stage synchronous belt tension accumulation and has the same magnitude as that of the multi-stage synchronous belt tension accumulation, so as to offset the radial load offset of the pulley shaft.

2. A multi-stage power transmission system with tension compensation according to claim 1, characterized in that: The arc-shaped guide portion is provided with an arc-shaped guide groove (41), the horizontal extension direction of the arc-shaped guide groove (41) is parallel to the main tension direction of the multi-level synchronous belt, the deflection seat (5) comprises an integrally formed deflection body and an arc-shaped guide block (51), and the arc-shaped guide block (51) is slidably engaged along the curved surface of the arc-shaped guide groove (41).

3. A multi-stage power transmission system with tension compensation according to claim 2, characterized in that: At least two adjusting screw holes (42) are provided on the supporting member (4), and the at least two adjusting screw holes (42) are spaced apart along the horizontal extension direction of the arc-shaped guide groove (41). The adjusting assembly includes an adjusting top screw, and after the adjusting top screw is screwed into the adjusting screw hole (42), the end of the adjusting top screw abuts against the deflection seat (5).

4. A multi-stage power transmission system with tension compensation according to claim 3, characterized in that: The supporting member (4) is provided with a plurality of waist-shaped holes (43), the deflection body is provided with locking screw holes (531) corresponding to and communicating with the waist-shaped holes (43), and the adjustment assembly further comprises a pre-tightening positioning bolt, the pre-tightening positioning bolt passes through the waist-shaped hole (43) and is screwed into the locking screw hole (531) of the deflection body.

5. A multi-stage power transmission system with tension compensation according to claim 4, characterized in that: The waist-shaped holes (43) are symmetrically and spaced apart on both sides of the arc-shaped guide groove (41), and the adjusting screw hole (42) is located between adjacent waist-shaped holes (43).

6. The multi-stage power transmission system with tension compensation according to claim 2, characterized in that: The deflection body comprises an upper column (52) and a lower column (53) formed in one piece, and an annular boss (54) is formed between the upper column (52) and the lower column (53).

7. The multi-stage power transmission system with tension compensation according to claim 1, characterized in that: The first wheel set (2) and the second wheel set (3) each comprise at least three axially distributed pulley sets, and adjacent pulley sets are axially staggered.

8. The multi-stage power transmission system with tension compensation according to claim 7, characterized in that: The first wheel group (2) includes a first pulley group, a second pulley group and a third pulley group, and the second wheel group (3) includes a fourth pulley (31), a fifth pulley (32) and a sixth pulley (33); the first pulley group and the fourth pulley (31) are connected by a synchronous belt transmission; the second pulley group and the fifth pulley (32) are connected by a synchronous belt transmission; and the third pulley group and the sixth pulley (33) are connected by a synchronous belt transmission.

9. The multi-stage power transmission system with tension compensation according to claim 8, characterized in that: The first pulley assembly comprises a first pulley (21) and a first linking disc (22); the first pulley (21) is hollow inside, the first pulley (21) is provided with a first clamping groove (211), the first linking disc (22) is provided with a second clamping groove (221), the first clamping groove (211) and the second clamping groove (221) form a clamping space for clamping a bearing (26), and the bottom of the first linking disc (22) is provided with a first space (222) for accommodating the second pulley assembly.

10. A multi-stage power transmission system with tension compensation according to claim 9, characterized in that: The second pulley assembly comprises a second pulley (23) and a second linking disc (24); the second pulley (23) is hollow inside, and the second linking disc (24) is provided with a first support portion (243), and the first support portion (243) extends into the first space (222); the second pulley (23) is provided with a third clamping groove (231), and the second linking disc (24) is provided with a fourth clamping groove (241); the third clamping groove (231) and the fourth clamping groove (241) form a clamping space for clamping a bearing (26); and the bottom of the second linking disc (24) is provided with a second space (242) for accommodating the third pulley assembly.

11. A multi-stage power transmission system with tension compensation according to claim 10, characterized in that: The third pulley assembly comprises a third pulley (25), the top of the third pulley (25) is provided with a second support portion (251), and the second support portion (251) is arranged in the second space (242).

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