ATE calibration system and ATE test equipment

Abstract

The invention discloses an ATE calibration system and ATE test equipment, and belongs to the technical field of semiconductor test. An ATE function unit in the ATE calibration system comprises a first controller, a first DAC module and a first channel switching module. The first controller is connected with the input end of the first DAC module, and the first controller is connected with the control end of the first channel switching module; n output ends of the first DAC module are connected with n first ends of the first channel switching module; m second ends of the first channel switching module are connected with m input ends of a calibration unit in the ATE calibration system; the calibration unit detects a first voltage value of a voltage signal input by the input end of the calibration unit; the first controller determines voltage calibration parameters of the n output ends of the first DAC module according to the theoretical voltage value and the first voltage value. According to the invention, batch calibration can be carried out on the m output ends of the first DAC module each time, so that the ATE calibration time can be shortened, and the ATE calibration efficiency can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technologies, and particularly to an ATE calibration system and an ATE test device. Background Art

[0002] With the continuous development of technology, the method of using automatic test equipment (ATE) to test semiconductors has become very common. For example, DC testing (DC Test) of chips is performed through ATE. The ATE includes multiple channels, and these multiple channels can be connected to multiple pins of the chip to drive the ATE to output voltages to the multiple pins of the chip for measuring currents. Therefore, how to output accurate voltages is the key to improving the accuracy of DC testing.

[0003] In related technologies, a multimeter is sequentially connected to each channel of the ATE. After connecting the multimeter to one channel each time, the ATE is controlled to input a voltage signal with a preset voltage value to this channel, and the voltage value of the voltage signal output by this channel is collected through the multimeter. The collected voltage value is compared with the preset voltage value, and the calibration parameter of this channel is determined according to the comparison result. However, in the case of a large number of channels in the ATE, the calibration efficiency of this method is low. Summary of the Invention

[0004] This application provides an ATE calibration system and an ATE test device, which can improve the ATE calibration efficiency. The technical solutions are as follows:

[0005] In a first aspect, an ATE calibration system is provided. The ATE calibration system includes: an ATE function unit and a calibration unit; the ATE function unit includes a first controller, a first digital-to-analog converter (DAC) module, and a first channel switching module; a first end of the first controller is connected to an input end of the first DAC module, and a second end of the first controller is connected to a control end of the first channel switching module; n output ends of the first DAC module are connected to n first ends of the first channel switching module; m second ends of the first channel switching module are used to be connected to m input ends of the calibration unit, where n is an integer greater than or equal to 2, m is an integer greater than or equal to 2, and m is less than or equal to n;

[0006] The n first ends of the first channel switching module include k groups of first ends, each group of first ends in the k groups of first ends includes m first ends, and k is a positive integer; the first controller is configured to sequentially control each group of first ends in the k groups of first ends of the first channel switching module to communicate with the m second ends;

[0007] The first controller is configured to output a voltage signal through each of the n output terminals of the first DAC module every time a set of first terminals of the first channel switching module is connected to m second terminals, so that each of the m second terminals of the first channel switching module outputs a voltage signal; the calibration unit is configured to detect a first voltage value of the voltage signal input to each of the m input terminals of the calibration unit when the m input terminals of the calibration unit are connected to the m second terminals of the first channel switching module, and send the first voltage value to the first controller;

[0008] The first controller is configured to determine a voltage calibration parameter for each of the n output terminals of the first DAC module according to a theoretical voltage value and the first voltage value.

[0009] In this application, the first controller can sequentially control each set of the k sets of first terminals of the first channel switching module to be connected to the m second terminals. Every time a set of first terminals of the first channel switching module is connected to the m second terminals, the first controller outputs a voltage signal through each of the n output terminals of the first DAC module. The calibration unit can detect a first voltage value of the voltage signal input to each of the m input terminals of the calibration unit, and send the first voltage value to the first controller. The first controller can determine a voltage calibration parameter for each of the n output terminals of the first DAC module according to the theoretical voltage value and the first voltage value. In this way, the first controller can perform batch calibration on m of the n output terminals of the first DAC module each time, thereby reducing the ATE calibration time and improving the ATE calibration efficiency.

[0010] Optionally, the ATE calibration system further includes a first application program;

[0011] The first application program is configured to send an i-th first calibration instruction to the first controller, where i is an integer greater than or equal to 1 and less than or equal to k;

[0012] The first controller is configured to control the i-th set of the k sets of first terminals of the first channel switching module to be connected to the m second terminals according to the i-th first calibration instruction, so as to start the i-th calibration process;

[0013] The first application program is configured to send a first output instruction to the first controller;

[0014] The first controller is configured to set the voltage value of the first voltage signal to the minimum value of a preset voltage range and output the first voltage signal through each of the n output terminals of the first DAC module when it is determined that the currently received first output instruction is the first first output instruction in the i-th calibration process;

[0015] When it is determined that the currently received first output instruction is not the first first output instruction received during the i-th calibration process, the first controller is configured to increase the voltage value of the first voltage signal by a preset voltage value, and output the first voltage signal through each of the n output terminals of the first DAC module.

[0016] Optionally, the first controller is configured to determine a voltage calibration parameter of the target output terminal according to a plurality of voltage data of the target output terminal during the i-th calibration process. Each voltage data in the plurality of voltage data of the target output terminal includes the theoretical voltage value and the first voltage value. The target output terminal is any one of the m output terminals of the first DAC module connected to the i-th first terminal of the first channel switching module.

[0017] Optionally, the preset voltage range includes a plurality of voltage ranges;

[0018] The first controller is configured to determine multiple sets of voltage calibration parameters of the target output terminal according to multiple sets of voltage data of the target output terminal during the i-th calibration process. Each set of voltage data in the multiple sets of voltage data of the target output terminal includes a plurality of voltage data. The multiple sets of voltage data of the target output terminal correspond one-to-one to the plurality of voltage ranges. Each set of voltage calibration parameters in the multiple sets of voltage calibration parameters of the target output terminal is the voltage calibration parameter of the target output terminal in a corresponding voltage range.

[0019] Optionally, the ATE function unit further includes a first analog-to-digital converter ADC module, a second channel switching module, and n resistors;

[0020] A third terminal of the first controller is connected to an output terminal of the first ADC module, and a fourth terminal of the first controller is connected to a control terminal of the second channel switching module; the n input terminals of the first ADC module are connected to the n output terminals of the first DAC module, the n input terminals of the first ADC module are connected to the n first terminals of the second channel switching module, the n second terminals of the second channel switching module are connected to the first terminals of the n resistors, and the second terminals of the n resistors are grounded;

[0021] The first controller is configured to control the connection between n first ends of the second channel switching module and n second ends while sequentially controlling the connection between each group of k first ends of the first channel switching module and m second ends; the first controller is configured to, every time when a group of first ends of the first channel switching module is connected to m second ends, obtain a second voltage value of the voltage signal input to each of the m first target input ends among the m first target input ends detected by the first ADC module, where the m first target input ends are m input ends of the first ADC module connected to the m second ends of the first channel switching module;

[0022] The first controller is configured to determine a current calibration parameter for each of the n input ends of the first ADC module according to the first voltage value, the second voltage value, and the resistance values of the n resistors.

[0023] Optionally, the calibration unit includes a second ADC module and a second controller;

[0024] m input ends of the second ADC module are used to connect to m second ends of the first channel switching module; an output end of the second ADC module is connected to a first end of the second controller;

[0025] The second ADC module is configured to, when m input ends of the second ADC module are connected to m second ends of the first channel switching module, detect a fifth voltage value of the voltage signal input to each of the m input ends of the second ADC module, and send the fifth voltage value to the second controller;

[0026] The second controller is configured to process the fifth voltage value according to a voltage calibration parameter for each of the m input ends of the second ADC module to obtain the first voltage value.

[0027] Optionally, the calibration unit includes a second DAC module and a third channel switching module;

[0028] A second end of the second controller is connected to an input end of the second DAC module, and a third end of the second controller is connected to a control end of the third channel switching module; an output end of the second DAC module is connected to a first end of the third channel switching module; m second ends of the third channel switching module are connected to m input ends of the second ADC module; the first end of the third channel switching module is used to connect to a voltage measurement unit;

[0029] The second controller is configured to sequentially control the connection between m second ends of the third channel switching module and the first end;

[0030] The second controller is configured to output a voltage signal through the second DAC module when one second end of the third-channel switching module is connected to the first end, and in the case that the first end of the third-channel switching module is connected to the voltage measurement unit, so that a voltage signal is output at one second end of the third-channel switching module; the second ADC module is configured to detect a third voltage value of the voltage signal input at one input end of the second ADC module, and send the third voltage value to the second controller;

[0031] The second controller is configured to determine a voltage calibration parameter for each input end among the m input ends of the second ADC module according to the fourth voltage value detected by the voltage measurement unit and the third voltage value detected by the second ADC module.

[0032] Optionally, the ATE calibration system further includes a second application program;

[0033] The second application program is configured to send a j-th second calibration instruction to the second controller, where j is an integer greater than or equal to 1 and less than or equal to m;

[0034] The second controller is configured to control the j-th second end of the third-channel switching module to be connected to the first end according to the j-th second calibration instruction, so as to start the j-th calibration process;

[0035] The second application program is configured to send a second output instruction to the second controller;

[0036] The second controller is configured to set the voltage value of the second voltage signal to the minimum value of a preset voltage range and output the second voltage signal through the second DAC module when it is determined that the currently received second output instruction is the first second output instruction in the j-th calibration process;

[0037] The second controller is configured to increase the voltage value of the second voltage signal by a preset voltage value and output the second voltage signal through the second DAC module when it is determined that the currently received second output instruction is not the first second output instruction received in the j-th calibration process.

[0038] Optionally, the second controller is configured to determine a voltage calibration parameter for the second target input end according to a plurality of voltage data of the second target input end in the j-th calibration process, each voltage data of the plurality of voltage data of the second target input end includes the fourth voltage value and the third voltage value, and the second target input end is an input end of the second ADC module connected to the first end of the third-channel switching module.

[0039] In a second aspect, an ATE test device is provided, and the ATE test device includes the ATE calibration system described in the first aspect above. The technical effects obtained in the second aspect above are similar to those obtained by the corresponding technical means in the first aspect, and will not be elaborated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0041] Figure 1 It is a schematic diagram of a circuit structure for calibrating an ATE provided by an embodiment of the present application;

[0042] Figure 2 It is a schematic diagram of a structure of a calibration unit provided by an embodiment of the present application;

[0043] Figure 3 It is a flowchart of a calibration method provided by an embodiment of the present application;

[0044] Figure 4 It is a schematic diagram of a structure of another calibration unit provided by an embodiment of the present application;

[0045] Figure 5 It is a schematic diagram of a structure of an ATE calibration system provided by an embodiment of the present application;

[0046] Figure 6 It is a flowchart of another calibration method provided by an embodiment of the present application;

[0047] Figure 7 It is a schematic diagram of a structure of another ATE calibration system provided by an embodiment of the present application;

[0048] Figure 8 It is a schematic diagram of a structure of another ATE calibration system provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0049] To make the objectives, technical solutions, and advantages of the present application clearer, the following will further describe the embodiments of the present application in detail with reference to the drawings.

[0050] It should be understood that the "multiple" mentioned in this application refers to two or more. In the description of this application, unless otherwise specified, " / " means "or". For example, A / B can mean A or B; the "and / or" in this article is just a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist simultaneously, and B exists alone. In addition, for the convenience of clearly describing the technical solution of this application, words such as "first" and "second" are used to distinguish the same items or similar items with basically the same functions and effects. Those skilled in the art can understand that words such as "first" and "second" do not limit the quantity and execution order, and words such as "first" and "second" do not necessarily limit to be different.

[0051] The statements such as "an embodiment" or "some embodiments" described in this application mean that the specific features, structures or characteristics described in the embodiment are included in one or more embodiments of this application. Thus, statements such as "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments" and the like that appear in different places in this application do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. In addition, the terms "include", "comprise", "have" and their variants all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0052] The application scenarios of the embodiments of this application are described below.

[0053] The embodiments of this application are applied to the scenario of calibrating an ATE before using the ATE to test a target object (such as a chip). Specifically, it is applied to the scenario of calibrating the n output terminals of the digital-to-analog converter (DAC) module in the ATE and the n input terminals of the analog-to-digital converter (ADC) module in the ATE to improve the accuracy of the ATE test results. It should be noted that the output terminals described in the embodiments of this application can also be referred to as output channels, and the input terminals described in the embodiments of this application can also be referred to as input channels.

[0054] Such as Figure 1As shown in the figure, in the related art, when calibrating the n output terminals of the DAC module in the ATE, a multimeter is usually connected to one of the n output terminals of the DAC module. Then, the controller in the ATE outputs a voltage signal with a preset voltage value through this output terminal of the DAC module, and the multimeter samples the voltage value of this voltage signal to obtain the actual voltage value. The application software determines the calibration parameters of this output terminal of the DAC module according to the preset voltage value and the actual voltage value. However, in this calibration method, since the multimeter needs to be connected to the n output terminals of the DAC module in sequence, when the number of output terminals of the DAC module is large, the time required for this calibration method is long and the calibration efficiency is low.

[0055] For this reason, the embodiment of the present application provides an ATE calibration system, which can save the ATE calibration time and improve the ATE calibration efficiency.

[0056] The ATE calibration system provided by the embodiment of the present application may include an ATE function unit and a calibration unit. The ATE function unit is used to implement the test function of the ATE, such as implementing the test function of the ATE for a chip. The calibration unit is used to calibrate the ATE function unit.

[0057] Optionally, the ATE can be referred to as an ATE test device, and the embodiment of the present application does not limit this.

[0058] In some embodiments, both the ATE function unit and the calibration unit may belong to the ATE and exist as a part of the ATE. In this case, before using the ATE for testing, the calibration unit in the ATE can be used to calibrate the ATE function unit in the ATE first. After the calibration is completed, the ATE can be used for testing to improve the test accuracy of the ATE.

[0059] In other embodiments, the ATE function unit may belong to the ATE, while the calibration unit may be a device independent of the ATE. In this case, before using the ATE for testing, the calibration unit can be used to calibrate the ATE function unit in the ATE first. After the calibration is completed, the ATE can be used for testing to improve the test accuracy of the ATE.

[0060] The calibration unit provided by the embodiment of the present application will be described below.

[0061] Figure 2 is a schematic structural diagram of a calibration unit provided by the embodiment of the present application. Refer to Figure 2 As shown in the figure, the calibration unit 20 may include a second controller 201, a second DAC module 202, a third channel switching module 203, and a second ADC module 204.

[0062] Among them, the second controller 201 includes a first end, a second end, and a third end. The second DAC module 202 includes an input end and an output end. The third channel switching module 203 includes a first end, m second ends, and a control end. The second ADC module 204 includes m input ends and an output end. Optionally, the second DAC module 202 may include one or more DAC chips. Optionally, the second ADC module 204 may include one or more ADC chips.

[0063] The second end of the second controller 201 is connected to the input end of the second DAC module 202.

[0064] The third end of the second controller 201 is connected to the control end of the third channel switching module 203.

[0065] The output end of the second DAC module 202 is connected to the first end of the third channel switching module 203.

[0066] The m second ends of the third channel switching module 203 are connected to the m input ends of the second ADC module 204, and here it is a one-to-one connection.

[0067] The output end of the second ADC module 204 is connected to the first end of the second controller 201.

[0068] The second controller 201 is configured to output a voltage signal through the second DAC module 202. Optionally, the second controller 201 may input a digital voltage signal to the second DAC module 202, and the second DAC module 202 may convert the digital voltage signal into an analog voltage signal and then output it.

[0069] The second controller 201 is further configured to control the connection or disconnection between the first end of the third channel switching module 203 and each of the m second ends.

[0070] The second ADC module 204 is configured to detect the voltage values of the voltage signals input to its m input ends and send the detected voltage values to the second controller 201.

[0071] It should be noted that since the quality of the second ADC module 204 in the calibration unit 20 is uncontrollable when it leaves the factory, the second ADC module 204 may have problems such as low detection accuracy, which may cause errors in the voltage values detected by the second ADC module 204.

[0072] In this case, the embodiment of the present application provides a calibration method, which is used to calibrate the voltage of the m input ends of the second ADC module 204 in the calibration unit 20 to improve the detection accuracy of the calibration unit 20. The following is an explanation of this calibration method:

[0073] It should be noted that the first end of the third channel switching module 203 is used to connect to the voltage measuring unit. Before calibrating the voltage of the second ADC module 204 in the embodiments of the present application, the voltage measuring unit can be connected to the first end of the third channel switching module 203. The detection accuracy of this voltage measuring unit is very high. Exemplarily, this voltage measuring unit can be a high-precision multimeter, a high-precision voltmeter, an oscilloscope, etc., and the embodiments of the present application do not limit this.

[0074] In some embodiments, this voltage measuring unit can belong to the ATE and exist as a part of the ATE; or, this voltage measuring unit can be a device independent of the ATE, and the embodiments of the present application do not limit this.

[0075] Figure 3 It is a flowchart of a calibration method provided by the embodiments of the present application. Refer to Figure 3 , this method includes the following steps:

[0076] Step 301: The second controller 201 sequentially controls the m second ends of the third channel switching module 203 to communicate with the first end.

[0077] Since the second controller 201 sequentially controls each of the m second ends of the third channel switching module 203 to communicate with the first end, each of the m input ends of the second ADC module 204 can be calibrated sequentially.

[0078] In some embodiments, as Figure 4 shown, this ATE calibration system further includes a second application program. In some embodiments, the second application program can be an application program installed in the ATE; in other embodiments, the second application program can be an application program installed in other electronic devices except the ATE.

[0079] In this case, the operation of step 301 can include the following steps a to c:

[0080] Step a: The second application program sets j = 1 and sends the j-th second calibration instruction to the second controller 201.

[0081] j is an integer greater than or equal to 1 and less than or equal to m.

[0082] The j-th second calibration instruction is an instruction to start the j-th calibration process, and the j-th calibration process is used to calibrate the j-th input end of the second ADC module 204.

[0083] Step b: After receiving the j-th second calibration instruction, the second controller 201 controls the j-th second end of the third channel switching module 203 to communicate with the first end according to the j-th second calibration instruction to start the j-th calibration process.

[0084] After the j-th second terminal of the third channel switching module 203 is connected to the first terminal, the j-th input terminal of the second ADC module 204 is connected to the output terminal of the second DAC module 202.

[0085] Step c: After the second application program completes the j-th calibration process, determine whether j is equal to m; if j is not equal to m, then set j = j + 1, and re-execute the step of sending the j-th second calibration instruction to the second controller 201; if j is equal to m, then end the operation.

[0086] If j is not equal to m, it means that the second controller 201 has not completed the m calibration processes, that is, it has not completed the calibration of each of the m input terminals of the second ADC module 204. Therefore, j can be set to j + 1 to start the next calibration process; if j is equal to m, it means that the second controller 201 has completed the m calibration processes, that is, it has completed the calibration of each of the m input terminals of the second ADC module 204. Therefore, the operation can be ended.

[0087] Step 302: Each time a second terminal of the third channel switching module 203 is connected to the first terminal, when the first terminal of the third channel switching module 203 is connected to the voltage measurement unit, the second controller 201 outputs a voltage signal through the second DAC module 202, so that a voltage signal is output from a second terminal of the third channel switching module 203.

[0088] If a second terminal of the third channel switching module 203 is connected to the first terminal, and the first terminal of the third channel switching module 203 is connected to the voltage measurement unit, it means that the second DAC module 202 is connected to an input terminal of the second ADC module 204 through the third channel switching module 203, and the voltage measurement unit can detect the voltage value of this input terminal of the second ADC module 204. Therefore, in this case, the second controller 201 can output a voltage signal through the second DAC module 202 to calibrate this input terminal of the second ADC module 204 accordingly.

[0089] Optionally, after the second application program sends the j-th second calibration instruction to the second controller 201, it can sequentially send a second output instructions to the second controller 201.

[0090] a is the total number of second output instructions that the second application program needs to send to the second controller 201 during one calibration process. a is an integer greater than or equal to 2. Exemplarily, a can be obtained by dividing the interval length of the preset voltage range by the preset voltage value.

[0091] The preset voltage range can be set in advance. Exemplarily, the preset voltage range can be set by a technician according to requirements. For example, the preset voltage range can be set to 1 volt (V) to 25V, 1V to 30V, etc., and the embodiments of the present application do not limit this.

[0092] The preset voltage value can be set in advance. Exemplarily, the preset voltage value can be set by a technician according to requirements. For example, the preset voltage value can be set to 1V, 2V, 3V, etc., and the embodiments of the present application do not limit this.

[0093] In this case, the operation of step 302 may include the following steps A to D:

[0094] Step A: After the second application sends the j-th second calibration instruction to the second controller 201, set b = 1, and send the b-th second output instruction to the second controller 201.

[0095] Step B: After the second controller 201 receives the b-th second output instruction, when it is determined that the currently received second output instruction is the first second output instruction during the j-th calibration process, set the voltage value of the second voltage signal to the minimum value of the preset voltage range, and output the second voltage signal through the second DAC module 202; or, when it is determined that the currently received second output instruction is not the first second output instruction received during the j-th calibration process, increase the voltage value of the second voltage signal by the preset voltage value, and output the second voltage signal through the second DAC module 202.

[0096] The first second output instruction during the j-th calibration process is the first second output instruction received by the second controller 201 after receiving the j-th second calibration instruction.

[0097] During one calibration process, the second controller 201 can start from the minimum value of the preset voltage range and output second voltage signals with a voltage value of a different voltages at intervals of the preset voltage value, so that the voltage calibration parameters can be determined based on the a third voltage values detected by the second ADC module 204 at its j-th input end and the a fourth voltage values detected by the voltage measurement unit.

[0098] For example, the preset voltage range is 1V to 30V, and the preset voltage value is 1V. After the second controller 201 receives the first second output instruction during the j-th calibration process, it can set the voltage value of the second voltage signal to 1V, and then output a second voltage signal of 1V through the second DAC module 202; after the second controller 201 receives the second second output instruction during the j-th calibration process, it increases the voltage value of the second voltage signal by 1V. At this time, the voltage value of the second voltage signal is 2V, and then it outputs a second voltage signal of 2V through the second DAC module 202. And so on, until after the second controller 201 receives the 30th second output instruction during the j-th calibration process, it increases the voltage value of the second voltage signal by 1V. At this time, the voltage value of the second voltage signal is 30V, and the second controller 201 outputs a second voltage signal of 30V through the second DAC module 202. In this way, during the j-th calibration process, the second controller 201 inputs 30 second voltage signals with different voltage values to the j-th input terminal of the second ADC module 204 in sequence.

[0099] Step C: The voltage measurement unit detects the fourth voltage value and sends the fourth voltage value to the second application program.

[0100] The fourth voltage value is the voltage value of the second voltage signal input to the j-th input terminal of the second ADC module 204 detected by the voltage measurement unit.

[0101] During the j-th calibration process, the voltage measurement unit can detect the fourth voltage values of a second voltage signals input to the j-th input terminal of the second ADC module 204 in sequence.

[0102] Step D: After receiving the fourth voltage value, the second application program sends the fourth voltage value to the second controller 201, and then determines whether b is equal to a: if b is equal to a, it determines that the j-th calibration process is completed; if b is not equal to a, it makes b = b + 1 and re-executes the step of sending the b-th second output instruction to the second controller 201.

[0103] If b is equal to a, it means that the second application program has sent a second output instructions to the second controller 201 during this calibration process, so it can be determined that this calibration process is completed; if b is not equal to a, it means that the second application program has not sent all a second output instructions to the second controller 201 during this calibration process, so it can make b = b + 1 to continue sending the next second output instruction to the second controller 201.

[0104] Step 303: The second ADC module 204 detects the third voltage value of the voltage signal input to one input terminal of the second ADC module 204 and sends the third voltage value to the second controller 201.

[0105] During the j-th calibration process, the second ADC module 204 can sequentially detect the third voltage values of a second voltage signals input to the j-th input terminal of the second ADC module 204.

[0106] Step 304: The second controller 201 determines the voltage calibration parameters of each input terminal among the m input terminals of the second ADC module 204 according to the fourth voltage value detected by the voltage measurement unit and the third voltage value detected by the second ADC module 204.

[0107] Since the detection accuracy of the voltage measurement unit is very high, the fourth voltage value detected by the voltage measurement unit can be used as the theoretical voltage value. The second controller 201 can determine the voltage calibration parameters of each input terminal among the m input terminals of the second ADC module 204 according to the difference between the third voltage value detected by the second ADC module 204 and the theoretical voltage value.

[0108] In the embodiment of the present application, the second controller 201 can determine the voltage calibration parameters of each input terminal among the m input terminals of the second ADC module 204. Then, when the calibration unit 20 calibrates the ATE functional unit subsequently, after the second ADC module 204 sends the detected voltage value to the second controller 201, the second controller 201 can calibrate the voltage value according to the voltage calibration parameters to obtain a more accurate voltage value, thereby improving the detection accuracy of the calibration unit 20.

[0109] In some embodiments, the operation of step 304 can be: the second controller 201 determines the voltage calibration parameters of the second target input terminal according to multiple voltage data of the second target input terminal during the j-th calibration process, and each voltage data of the multiple voltage data of the second target input terminal includes a fourth voltage value and a third voltage value.

[0110] The second target input terminal is an input terminal of the second ADC module 204 connected to the first end of the third channel switching module 203, and is also the j-th input terminal of the second ADC module 204 during the j-th calibration process.

[0111] During the j-th calibration process, each time the second controller 201 receives a second output instruction sent by the second application and outputs a second voltage signal through the second DAC module 202, it can obtain the third voltage value of the second target input terminal detected by the second ADC module 204 and the fourth voltage value detected by the voltage measurement unit. The second controller 201 can use the third voltage value and the fourth voltage value as a voltage data of the second target input terminal. The second application will send a second output instructions to the second controller 201 during the j-th calibration process. Therefore, the second controller 201 will obtain a voltage data of the second target input terminal during the j-th calibration process. The second controller 201 can determine the voltage calibration parameter of the second target input terminal according to the a voltage data of the second target input terminal.

[0112] In some embodiments, the second controller 201 can determine a set of voltage calibration parameters corresponding to the second target input terminal and a preset voltage range according to the a voltage data of the second target input terminal.

[0113] Optionally, the second controller 201 can use the method of least squares fitting a straight line to obtain a set of voltage calibration parameters of the second target input terminal. The method of least squares fitting a straight line is to use a given set of sample data to fit an optimal fitting straight line. The formula for the method of least squares fitting a straight line is y = kx + b, where k and b are the parameters of the fitting straight line, k is the slope, b is the intercept, x is the abscissa, and y is the ordinate.

[0114] In this case, when the second controller 201 determines a set of voltage calibration parameters of the second target input terminal according to the a voltage data of the second target input terminal, it can use each voltage data in the a voltage data of the second target input terminal as a sample data to obtain a sample data, and the abscissa of each sample data is the third voltage value and the ordinate is the fourth voltage value; perform a straight line fitting according to the a sample data to obtain the slope k and the intercept b of the fitting straight line, that is, obtain the function y = kx + b; determine the slope k and the intercept b of the fitting straight line as a set of voltage calibration parameters of the second target input terminal.

[0115] In some embodiments, the preset voltage range includes multiple voltage ranges, and the a voltage data of the second target input terminal are divided into multiple voltage data sets, and the multiple voltage data sets correspond to the multiple voltage ranges one by one. That is, each voltage data set in the multiple voltage data sets includes multiple voltage data, and the third voltage value and the fourth voltage value in a voltage data set are detected when the second controller 201 outputs a second voltage signal corresponding to a voltage range through the second DAC module 202.

[0116] The second controller 201 may determine multiple sets of voltage calibration parameters for the second target input terminal according to multiple voltage data sets of the second target input terminal. Each set of voltage calibration parameters in the multiple sets of voltage calibration parameters of the second target input terminal is the voltage calibration parameter of the second target input terminal in a corresponding voltage range.

[0117] In this case, for any one of the multiple voltage data sets of the second target input terminal, the second controller 201 may determine the voltage calibration parameter of the second target input terminal in a voltage range corresponding to the voltage data set according to all the voltage data in the voltage data set. Optionally, the second controller 201 may use the method of least squares fitting of a straight line to obtain the voltage calibration parameter of the second target input terminal in a voltage range. The specific operation is similar to that above and will not be elaborated here.

[0118] Through this segmented determination method, the voltage calibration parameters of each input terminal among the m input terminals of the second ADC module 204 in each voltage range of the multiple voltage ranges can be obtained. Then, when the calibration unit 20 calibrates the ATE functional unit subsequently, precise calibration can be performed according to the voltage range in which the voltage value of the voltage signal input to the calibration unit 20 is located. In this way, the detection accuracy of the calibration unit 20 can be further improved.

[0119] In some embodiments, after determining the voltage calibration parameters of each input terminal among the m input terminals of the second ADC module 204, the second controller 201 may control the first end of the third channel switching module 203 to be disconnected from its m second ends. After that, the voltage measurement unit may be disconnected from the first end of the third channel switching module 203. So as to use the calibration unit 20 to calibrate the ATE functional unit subsequently.

[0120] In this case, the calibration unit 20 in the ATE calibration system provided by the embodiments of the present application may be the calibration unit 20 calibrated by the calibration method described in the above Figure 3 embodiments. The second controller 201 in the calibration unit 20 stores the voltage calibration parameters of each input terminal among the m input terminals of the second ADC module 204, and the detection accuracy of the calibration unit 20 is relatively high.

[0121] Figure 5 is a schematic structural diagram of an ATE calibration system provided by an embodiment of the present application. Refer to Figure 5 , the ATE calibration system may include an ATE functional unit 50 and a calibration unit 20. Among them, the ATE functional unit 50 includes a first controller 501, a first DAC module 502, and a first channel switching module 503.

[0122] The first controller 501 includes a first end and a second end. The first DAC module 502 includes an input end and n output ends. The first channel switching module 503 includes n first ends, n second ends and a control end. The calibration unit 20 includes m input ends. n is an integer greater than or equal to 2, m is an integer greater than or equal to 2, and m is less than or equal to n. Optionally, the first DAC module 502 may include one or more DAC chips.

[0123] The first end of the first controller 501 is connected to the input end of the first DAC module 502.

[0124] The second end of the first controller 501 is connected to the control end of the first channel switching module 503.

[0125] The n output ends of the first DAC module 502 are connected to the n first ends of the first channel switching module 503, with one-to-one connection here.

[0126] m of the n second ends of the first channel switching module 503 are used to be connected to the m input ends of the calibration unit 20, with one-to-one connection here.

[0127] The n first ends of the first channel switching module 503 include k groups of first ends. Each group of first ends in these k groups includes m first ends, and k is a positive integer. In this case, the n output ends of the first DAC module 502 connected to the first channel switching module 503 are also divided into k groups. Subsequently, voltage calibration is performed on each group of output ends in the k groups of output ends of the first DAC module 502.

[0128] The first controller 501 is used to output a voltage signal through the first DAC module 502. Optionally, the first controller 501 may input a digital voltage signal to the first DAC module 502, and the first DAC module 502 may convert the digital voltage signal into an analog voltage signal and then output it.

[0129] The first controller 501 is further used to control the connection or disconnection between each group of the k groups of first ends and the m second ends of the first channel switching module 503.

[0130] The calibration unit 20 is used to detect the voltage values of the voltage signals input to its m input ends and send the detected voltage values to the first controller 501.

[0131] The process of calibrating the ATE functional unit 50 based on this ATE calibration system will be explained in detail below.

[0132] Before calibrating the ATE functional unit 50 in the embodiment of the present application, the m input ends of the calibration unit 20 can be connected to the m second ends of the first channel switching module 503, with one-to-one connection here.

[0133] Figure 6 This is a flowchart of a calibration method provided by an embodiment of the present application. Refer to Figure 6 , the method includes the following steps:

[0134] Step 601: The first controller 501 sequentially controls each of the k groups of first ends of the first channel switching module 503 to communicate with m second ends.

[0135] Since the second controller 201 sequentially controls each of the k groups of first ends of the first channel switching module 503 to communicate with m second ends, each of the k groups of output ends of the first DAC module 502 can be calibrated sequentially.

[0136] In some embodiments, as Figure 7 shown, the ATE calibration system further includes a first application program. In some embodiments, the first application program may be an application program installed in the ATE; in other embodiments, the first application program may be an application program installed in other electronic devices other than the ATE. Optionally, the first application program and the second application program may be the same application program or different application programs, and the embodiments of the present application do not limit this.

[0137] In this case, the operation of step 601 may include the following steps a to c:

[0138] Step a: The first application program sets i = 1 and sends the i-th first calibration instruction to the first controller 501.

[0139] i is an integer greater than or equal to 1 and less than or equal to k.

[0140] The i-th first calibration instruction is an instruction to start the i-th calibration process, and the i-th calibration process is used to calibrate the i-th group of output ends of the first DAC module 502.

[0141] Step b: After receiving the i-th first calibration instruction, the first controller 501 controls the i-th group of the k groups of first ends of the first channel switching module 503 to communicate with m second ends according to the i-th first calibration instruction to start the i-th calibration process.

[0142] Here, m first ends among the i-th group of first ends of the first channel switching module 503 are in one-to-one communication with m second ends.

[0143] After the i-th group of first ends of the first channel switching module 503 communicates with m second ends, m output ends among the i-th group of output ends of the first DAC module 502 are in one-to-one communication with m input ends of the calibration unit 20.

[0144] Step c: After the first application completes the i-th calibration process, it determines whether i is equal to k. If i is not equal to k, then let i = i + 1, and re-execute the step of sending the i-th first calibration instruction to the first controller 501. If i is equal to k, then end the operation.

[0145] If i is not equal to k, it means that the first controller 501 has not completed k calibration processes, that is, has not completed the calibration of each output terminal in the k groups of output terminals of the first DAC module 502. Therefore, i can be set to i + 1 to start the next calibration process. If i is equal to k, it means that the first controller 501 has completed k calibration processes, that is, has completed the calibration of each output terminal in the k groups of output terminals of the first DAC module 502. Therefore, the operation can be ended.

[0146] Step 602: Each time the first controller 501 connects a group of first terminals of the first channel switching module 503 to m second terminals, it outputs a voltage signal through each of the n output terminals of the first DAC module 502, so that each of the m second terminals of the first channel switching module 503 outputs a voltage signal.

[0147] If a group of first terminals of the first channel switching module 503 is connected to m second terminals, it means that a group of output terminals of the first DAC module 502 is connected to m input terminals of the calibration unit 20 through the first channel switching module 503, and the calibration unit 20 can detect the voltage value of this group of output terminals of the first DAC module 502. Therefore, in this case, the first controller 501 can output a voltage signal through each of the n output terminals of the first DAC module 502 to calibrate this group of output terminals of the first DAC module 502 accordingly.

[0148] Optionally, after the first application sends the i-th first calibration instruction to the first controller 501, it can sequentially send a first output instructions to the first controller 501.

[0149] a is the total number of first output instructions that the first application needs to send to the first controller 501 during one calibration process. a is an integer greater than or equal to 2. For example, a can be obtained by dividing the interval length of the preset voltage range by the preset voltage value. The preset voltage range and the preset voltage value have been explained above and will not be elaborated here.

[0150] In this case, the operation of step 602 can include the following steps A to D:

[0151] Step A: After the first application sends the i-th first calibration instruction to the first controller 501, let d = 1, and send the d-th first output instruction to the first controller 501.

[0152] Step B: After the first controller 501 receives the d-th first output instruction, when it is determined that the currently received first output instruction is the first first output instruction during the i-th calibration process, the voltage value of the first voltage signal is set to the minimum value of the preset voltage range, and the first voltage signal is output through each of the n output terminals of the first DAC module 502; or, when it is determined that the currently received first output instruction is not the first first output instruction received during the i-th calibration process, the voltage value of the first voltage signal is increased by a preset voltage value, and the first voltage signal is output through each of the n output terminals of the first DAC module 502.

[0153] The first first output instruction during the i-th calibration process is the first first output instruction that the first controller 501 receives for the first time after receiving the i-th first calibration instruction.

[0154] During one calibration process, the first controller 501 can start from the minimum value of the preset voltage range and output first voltage signals with a preset voltage value as the interval and a different voltage values in sequence, so that the voltage calibration parameters can be determined according to the a first voltage values detected by the calibration unit 20 at each of its m input terminals and the theoretical voltage value.

[0155] Exemplarily, the preset voltage range is 1V to 30V, the preset voltage value is 1V. After the first controller 501 receives the first first output instruction during the i-th calibration process, the voltage value of the first voltage signal can be set to 1V, and then the first voltage signal of 1V is output through each of the n output terminals of the first DAC module 502; after the first controller 501 receives the second first output instruction during the i-th calibration process, the voltage value of the first voltage signal is increased by 1V. At this time, the voltage value of the first voltage signal is 2V, and then the first voltage signal of 2V is output through each of the n output terminals of the first DAC module 502. And so on, until after the first controller 501 receives the 30th first output instruction during the i-th calibration process, the voltage value of the first voltage signal is increased by 1V. At this time, the voltage value of the first voltage signal is 30V, and the first controller 501 outputs the first voltage signal of 30V through each of the n output terminals of the first DAC module 502. In this way, the first controller 501 outputs first voltage signals with 30 different voltage values through the first DAC module 502 in sequence during the i-th calibration process.

[0156] Step C: The calibration unit 20 detects the first voltage value and sends the first voltage value to the first application program.

[0157] The first voltage value is the voltage value of the first voltage signal input to each of the m input terminals detected by the calibration unit 20.

[0158] During the i-th calibration process, the calibration unit 20 can sequentially detect the first voltage values of a first voltage signals input to the input end of the calibration unit 20.

[0159] Step D: After receiving the first voltage value, the first application program sends the first voltage value to the first controller 501, and then determines whether d is equal to a: if d is equal to a, it is determined that the i-th calibration process is completed; if d is not equal to a, then make d = d + 1, and re-execute the step of sending the d-th first output instruction to the first controller 501.

[0160] If d is equal to a, it means that the first application program has sent a first output instructions to the first controller 501 during this calibration process, so it can be determined that this calibration process is completed; if d is not equal to a, it means that the first application program has not sent a first output instructions to the first controller 501 during this calibration process, so d = d + 1 can be made to continue sending the next first output instruction to the first controller 501.

[0161] Step 603: When m input ends of the calibration unit 20 are connected to m second ends of the first channel switching module 503, the calibration unit 20 detects the first voltage values of the voltage signals input to each of the m input ends of the calibration unit 20, and sends the first voltage value to the first controller 501.

[0162] In some embodiments, m input ends of the second ADC module 204 in the calibration unit 20 are connected to m second ends of the first channel switching module 503, and here it is a one-to-one connection. In this case, the second ADC module 204 can detect the fifth voltage value of the voltage signal (i.e., the first voltage signal) input to each of its m input ends, and send the fifth voltage value to the second controller 201. The second controller 201 can process the fifth voltage value according to the voltage calibration parameters of each of the m input ends of the second ADC module 204 to obtain the first voltage value, and then send the first voltage value to the first controller 501. Optionally, the second controller 201 can send the first voltage value to the first application program, and the first application program sends the first voltage value to the first controller 501.

[0163] In the embodiments of the present application, the first controller 501 can control a group of first ends of the first channel switching module 503 to communicate with m second ends, so that the calibration unit 20 can detect the voltage values of the voltage signals output from m output ends in a group of output ends of the first DAC module 502 at one time. In this way, the time required for calibrating the ATE function unit can be greatly reduced, and the calibration efficiency can be improved.

[0164] Step 604: The first controller 501 determines the voltage calibration parameters for each output terminal of the n output terminals of the first DAC module 502 based on the theoretical voltage value and the first voltage value.

[0165] The theoretical voltage value is the voltage value set by the first controller 501 for the output voltage signal before the voltage signal is output through the first DAC module 502. The first voltage value is the actual voltage value of the voltage signal output by the first DAC module 502 detected by the calibration unit 20. The second controller can determine the voltage calibration parameters for each output terminal of the n output terminals of the first DAC module 502 according to the difference between the actual voltage value and the theoretical voltage value.

[0166] In some embodiments, the operation of step 604 may be: the first controller 501 determines the voltage calibration parameters of the target output terminal according to multiple voltage data of the target output terminal during the i-th calibration process, and each voltage data of the multiple voltage data of the target output terminal includes the theoretical voltage value and the first voltage value.

[0167] The target output terminal is any one of the m output terminals of the first DAC module 502 connected to the i-th group of first terminals of the first channel switching module 503, and is also any one of the i-th group of output terminals of the first DAC module 502 during the i-th calibration process.

[0168] During the i-th calibration process, every time the first controller 501 receives a first output instruction sent by the first application program and outputs a first voltage signal through the first DAC module 502, it can predict the theoretical voltage value of the target output terminal and obtain the first voltage value of the target output terminal detected by the calibration unit 20. The first controller 501 can use the theoretical voltage value and the first voltage value as a voltage data of the target output terminal. The first application program will send a first output instructions to the first controller 501 during the i-th calibration process in total. Therefore, the first controller 501 will obtain a voltage data of the target output terminal during the i-th calibration process in total. The first controller 501 can determine the voltage calibration parameters of the target output terminal according to the a voltage data of the target output terminal.

[0169] In some embodiments, the first controller 501 can determine a set of voltage calibration parameters corresponding to the target output terminal and the preset voltage range according to the a voltage data of the target output terminal.

[0170] Optionally, the first controller 501 can use the method of least squares fitting a straight line to obtain a set of voltage calibration parameters of the target output terminal. The specific operation is similar to the above, and will not be elaborated here.

[0171] In some embodiments, the preset voltage range includes multiple voltage ranges, and a voltage data of the target output terminal is divided into multiple voltage data sets. The multiple voltage data sets correspond to the multiple voltage ranges one by one. That is, each voltage data set in the multiple voltage data sets includes multiple voltage data. The theoretical voltage value and the first voltage value in a voltage data set are determined when the first controller 501 outputs a first voltage signal of a corresponding voltage range through the first DAC module 502.

[0172] The first controller 501 can determine multiple sets of voltage calibration parameters of the target output terminal according to the multiple voltage data sets of the target output terminal. Each set of voltage calibration parameters in the multiple sets of voltage calibration parameters of the target output terminal is the voltage calibration parameter of the target output terminal in a corresponding voltage range.

[0173] In this case, for any one of the multiple voltage data sets of the target output terminal, the first controller 501 can determine the voltage calibration parameter of the target output terminal in a voltage range corresponding to the voltage data set according to all the voltage data in the voltage data set. Optionally, the first controller 501 can use the method of least squares to fit a straight line to obtain the voltage calibration parameter of the target output terminal in a voltage range. The specific operation is similar to the above, and will not be repeated here.

[0174] Through this segmented determination method, the voltage calibration parameter of each output terminal of the first DAC module 502 in each voltage range of the multiple voltage ranges can be obtained. Then, when the target object is tested through the ATE function unit 50 later, the first controller 501 can perform precise voltage compensation on the first DAC module 502 according to the voltage range in which the voltage value of the voltage signal to be output through the first DAC module 502 is located. In this way, the ATE test accuracy can be improved.

[0175] In some embodiments, as Figure 8 shown, the ATE function unit 50 may further include a first ADC module 504, a second channel switching module 505, and n resistors R. Optionally, the first ADC module 504 may include one or more ADC chips.

[0176] The third terminal of the first controller 501 is connected to the output terminal of the first ADC module 504.

[0177] The fourth terminal of the first controller 501 is connected to the control terminal of the second channel switching module 505.

[0178] The n input terminals of the first ADC module 504 are connected to the n output terminals of the first DAC module 502, and here it is a one-to-one connection.

[0179] The n input ends of the first ADC module 504 are connected to the n first ends of the second channel switching module 505, where the connection is one-to-one.

[0180] The n second ends of the second channel switching module 505 are connected to the first ends of n resistors R, where the connection is one-to-one. The second ends of the n resistors R are grounded.

[0181] The first controller 501 is used to control the connection or disconnection between the n first ends and the n second ends of the second channel switching module 505.

[0182] The first ADC module 504 is used to detect the voltage values of the voltage signals input to its n input ends and send the detected voltage values to the first controller 501.

[0183] It should be noted that the cost of the n resistors R is relatively low. In the embodiment of the present application, the n resistors R are used to realize the current calibration of the n input ends of the first ADC module 504, which can reduce the calibration cost.

[0184] The resistance value of each resistor R in the n resistors R is predictable, and the first controller 501 can pre-store the resistance value of each resistor R in the n resistors R. The resistance values of each resistor R in the n resistors R can be the same or different, and the embodiment of the present application does not limit this. Exemplarily, the n resistors R can be high-precision resistors.

[0185] In the embodiment of the present application, during the process of voltage calibration of the n output ends of the first DAC module 502 by the first controller 501, the current calibration of the n input ends of the first ADC module 504 can also be performed.

[0186] The following describes the process of the first controller 501 performing current calibration on the n input ends of the first ADC module 504. This current calibration process may include the following steps 1 to 3:

[0187] Step 1: When the first controller 501 sequentially controls each group of the k groups of first ends of the first channel switching module 503 to be connected to the m second ends, it controls the n first ends and the n second ends of the second channel switching module 505 to be connected.

[0188] Exemplarily, after receiving the first calibration instruction sent by the first application program, the first controller 501 can control the n first ends and the n second ends of the second channel switching module 505 to be connected.

[0189] Step 2: Each time the first controller 501 connects a group of first ends of the first channel switching module 503 to the m second ends, it obtains the second voltage value of the voltage signal input to each of the m first target input ends detected by the first ADC module 504.

[0190] The m first target input terminals are the m input terminals of the first ADC module 504 that are connected to the m second terminals of the first channel switching module 503.

[0191] Since the first controller 501 outputs a voltage signal through each of the n output terminals of the first DAC module 502 every time a group of first terminals of the first channel switching module 503 is connected to the m second terminals, the first ADC module 504 can detect the second voltage value of the voltage signal input to each of the m first target input terminals and send the second voltage value to the first controller 501.

[0192] Step 3: The first controller 501 determines the current calibration parameter of each of the n input terminals of the first ADC module 504 according to the first voltage value, the second voltage value, and the resistance values of the n resistors R.

[0193] Since the detection accuracy of the calibration unit 20 is relatively high, the first voltage value detected by the calibration unit 20 can be used as the theoretical voltage value. The first controller 501 can determine the theoretical current value according to the theoretical voltage value and the resistance value of the resistor R, determine the detected current value according to the second voltage value detected by the first ADC module 504 and the resistance value of the resistor R, and then determine the current calibration parameter of each of the n input terminals of the first ADC module 504 according to the difference between the detected current value and the theoretical current value.

[0194] In the embodiment of the present application, when the first controller 501 sequentially controls each group of the k groups of first terminals of the first channel switching module 503 to be connected to the m second terminals, it controls the n first terminals of the second channel switching module 505 to be connected to the n second terminals. Every time a group of first terminals of the first channel switching module 503 is connected to the m second terminals, not only can the voltage calibration of the m output terminals of the first DAC module 502 be performed, but also the current calibration of the m input terminals of the first ADC module 504 can be performed, thereby reducing the calibration time of the ATE functional unit and improving the calibration efficiency of the ATE functional unit.

[0195] In some embodiments, the operation of Step 3 may be: The first controller 501 determines the current calibration parameter of the first target input terminal according to multiple current data of the first target input terminal during the i-th calibration process, and each current data of the multiple current data of the first target input terminal includes a theoretical current value and a detected current value.

[0196] During the i-th calibration process, each time the first controller 501 receives a first output instruction sent by the first application and outputs a first voltage signal through the first DAC module 502, it can obtain the second voltage value of the first target input terminal detected by the first ADC module 504, and obtain the first voltage value of an output terminal of the first DAC module 502 connected to the first target input terminal detected by the calibration unit 20. The first controller 501 can divide the second voltage value by the resistance value of the resistor R connected to the first target input terminal to obtain the detected current value, and divide the first voltage value by the resistance value of the resistor R connected to the first target input terminal to obtain the theoretical current value. The first controller 501 can use the theoretical current value and the detected current value as a current data of the first target input terminal. The first application will send a first output instructions to the first controller 501 during the i-th calibration process, so the first controller 501 will obtain a current data of the first target input terminal during the i-th calibration process. The first controller 501 can determine the current calibration parameter of the first target input terminal according to the a current data of the first target input terminal.

[0197] In some embodiments, the first controller 501 can determine a set of current calibration parameters corresponding to the first target input terminal and a preset voltage range according to the a current data of the first target input terminal.

[0198] Optionally, the first controller 501 can use the method of least squares fitting a straight line to obtain a set of current calibration parameters of the first target input terminal. The specific operation is similar to the above, and will not be elaborated here.

[0199] In some embodiments, the preset voltage range includes multiple voltage ranges, and the a current data of the first target input terminal are divided into multiple current data sets. The multiple current data sets correspond to the multiple voltage ranges one by one. That is, each current data set in the multiple current data sets includes multiple current data, and the theoretical current value and the detected current value in a current data set are determined when the first controller 501 outputs a first voltage signal of a corresponding voltage range through the first DAC module 502.

[0200] The first controller 501 can determine multiple sets of current calibration parameters of the first target input terminal according to the multiple current data sets of the first target input terminal. Each set of current calibration parameters in the multiple sets of current calibration parameters of the first target input terminal is the current calibration parameter of the first target input terminal in a corresponding voltage range.

[0201] In this case, for any one of the multiple current data sets of the first target input terminal, the first controller 501 can determine the current calibration parameter of the first target input terminal within a voltage range corresponding to the current data set according to all the current data in the current data set. Optionally, the first controller 501 can use the method of least squares fitting of a straight line to obtain the current calibration parameter of the first target input terminal within a voltage range. The specific operation is similar to that above and will not be elaborated here.

[0202] Through this way of piecewise determination, the current calibration parameter of each input terminal of the n input terminals of the first ADC module 504 within each of the multiple voltage ranges can be obtained. Then, when the target object is tested through the ATE functional unit 50 later, the first controller 501 can perform precise current compensation for the first ADC module 504 according to the voltage range in which the voltage value of the voltage signal output by the first DAC module 502 is located. In this way, the ATE test accuracy can be improved.

[0203] In some cases, if the first controller 501 obtains the voltage calibration parameter of each output terminal of the n output terminals of the first DAC module 502 and obtains the current calibration parameter of each input terminal of the n input terminals of the first ADC module 504, it can determine that the ATE calibration process is completed. Then, it can control the n first ends of the first channel switching module 503 to be connected to the n second ends one by one, and control the n first ends of the second channel switching module 505 to be disconnected from the n second ends one by one. Subsequently, the ATE can be used to test the target object. For example, when testing a certain chip, the n pins of the chip can be connected to the n second ends of the first channel switching module 503 one by one to start testing the chip. During the testing process, the ATE functional unit 50 can perform corresponding voltage compensation and current compensation according to the voltage calibration parameter of each output terminal of the n output terminals of the first DAC module 502 and the current calibration parameter of each input terminal of the n input terminals of the first ADC module 504 determined above to improve the testing accuracy.

[0204] In the embodiment of the present application, the ATE calibration system includes an ATE functional unit and a calibration unit. The ATE functional unit includes a first controller, a first DAC module, and a first channel switching module. A first end of the first controller is connected to an input end of the first DAC module, a second end of the first controller is connected to a control end of the first channel switching module, n output ends of the first DAC module are connected to n first ends of the first channel switching module, and m second ends of the first channel switching module are used to be connected to m input ends of the calibration unit. The n first ends of the first channel switching module include k groups of first ends, and each group of first ends in the k groups of first ends includes m first ends. The first controller can sequentially control each group of first ends in the k groups of first ends of the first channel switching module to communicate with the m second ends. Each time a group of first ends of the first channel switching module communicates with the m second ends, the first controller outputs a voltage signal through each of the n output ends of the first DAC module. The calibration unit can detect a first voltage value of the voltage signal input to each of the m input ends of the calibration unit, and send the first voltage value to the first controller. The first controller can determine a voltage calibration parameter for each of the n output ends of the first DAC module according to a theoretical voltage value and the first voltage value. Thus, the first controller can perform batch calibration on m of the n output ends of the first DAC module each time, thereby reducing the ATE calibration time and improving the ATE calibration efficiency.

[0205] In some embodiments, an ATE test device is further provided, and the ATE test device may include the above ATE test system.

[0206] The ATE test device is used to test a target object. For example, the ATE test device can perform a DC test on a chip. Of course, this is not limited thereto, and the ATE test device can also perform other tests on other objects, and the embodiments of the present application do not make limitations in this regard.

[0207] Since the ATE test device is calibrated by the above ATE test system before testing the target object, the test accuracy of the ATE test device is relatively high.

[0208] In the above embodiments, the descriptions of the respective embodiments have their own focuses. For parts not detailed or recorded in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0209] Those of ordinary skill in the art will realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are executed in hardware or software depends on the specific application and design constraints of the technical solution. A professional technician can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of this application.

[0210] In the embodiments provided in this application, it should be understood that the disclosed device / computer equipment and method can be implemented in other ways. For example, the device / computer equipment embodiments described above are only illustrative. For example, the division of modules or units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection to each other can be through some interfaces. The indirect coupling or communication connection of the device or unit can be in an electrical, mechanical or other form.

[0211] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place, or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0212] The above-described embodiments are only used to illustrate the technical solutions of this application, rather than to limit it; although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included in the protection scope of this application.

Claims

1. An ATE calibration system, characterized in that, The ATE calibration system includes: an ATE functional unit and a calibration unit; the ATE functional unit includes a first controller, a first digital-to-analog converter (DAC) module, and a first channel switching module; a first end of the first controller is connected to an input end of the first DAC module, and a second end of the first controller is connected to a control end of the first channel switching module; n output ends of the first DAC module are connected to n first ends of the first channel switching module; m second ends of the first channel switching module are used to be connected to m input ends of the calibration unit, where n is an integer greater than or equal to 2, m is an integer greater than or equal to 2, and m is less than or equal to n. The n first ends of the first channel switching module include k groups of first ends, each group of first ends in the k groups of first ends includes m first ends, and k is a positive integer; the first controller is configured to sequentially control each group of first ends in the k groups of first ends of the first channel switching module to be connected to the m second ends. When each group of first ends of the first channel switching module is connected to the m second ends, the first controller is configured to output a voltage signal through each of the n output ends of the first DAC module, so that each of the m second ends of the first channel switching module outputs a voltage signal; when the m input ends of the calibration unit are connected to the m second ends of the first channel switching module, the calibration unit is configured to detect a first voltage value of the voltage signal input to each of the m input ends of the calibration unit, and send the first voltage value to the first controller. The first controller is configured to determine a voltage calibration parameter for each of the n output ends of the first DAC module according to a theoretical voltage value and the first voltage value.

2. The ATE calibration system according to claim 1, wherein The ATE calibration system further includes a first application program. The first application program is configured to send an i-th first calibration instruction to the first controller, where i is an integer greater than or equal to 1 and less than or equal to k. The first controller is configured to control the i-th group of first ends in the k groups of first ends of the first channel switching module to be connected to the m second ends according to the i-th first calibration instruction, so as to start the i-th calibration process. The first application program is configured to send a first output instruction to the first controller. When it is determined that the currently received first output instruction is the first first output instruction in the i-th calibration process, the first controller is configured to set the voltage value of the first voltage signal to the minimum value of a preset voltage range, and output the first voltage signal through each of the n output ends of the first DAC module. When it is determined that the currently received first output instruction is not the first first output instruction received in the i-th calibration process, the first controller is configured to increase the voltage value of the first voltage signal by a preset voltage value, and output the first voltage signal through each of the n output ends of the first DAC module.

3. The ATE calibration system according to claim 2, wherein The first controller is configured to determine a voltage calibration parameter of the target output terminal according to a plurality of voltage data of the target output terminal during the i-th calibration process. Each voltage data among the plurality of voltage data of the target output terminal includes the theoretical voltage value and the first voltage value. The target output terminal is any one of the m output terminals of the first DAC module connected to the i-th group of first ends of the first channel switching module.

4. The ATE calibration system according to claim 3, wherein The preset voltage range includes a plurality of voltage ranges; The first controller is configured to determine multiple sets of voltage calibration parameters of the target output terminal according to a plurality of voltage data sets of the target output terminal during the i-th calibration process. Each voltage data set among the plurality of voltage data sets of the target output terminal includes a plurality of voltage data. The plurality of voltage data sets of the target output terminal correspond to the plurality of voltage ranges one by one. Each set of voltage calibration parameters among the multiple sets of voltage calibration parameters of the target output terminal is the voltage calibration parameter of the target output terminal in a corresponding voltage range.

5. The ATE calibration system according to claim 1, wherein The ATE functional unit further includes a first analog-to-digital converter ADC module, a second channel switching module, and n resistors; The third terminal of the first controller is connected to the output terminal of the first ADC module, and the fourth terminal of the first controller is connected to the control terminal of the second channel switching module; the n input terminals of the first ADC module are connected to the n output terminals of the first DAC module, the n input terminals of the first ADC module are connected to the n first ends of the second channel switching module, the n second ends of the second channel switching module are connected to the first ends of the n resistors, and the second ends of the n resistors are grounded; The first controller is configured to control the n first ends and the n second ends of the second channel switching module to be connected while sequentially controlling each of the k groups of first ends of the first channel switching module to be connected to the m second ends; the first controller is configured to obtain, each time a group of first ends of the first channel switching module is connected to the m second ends, a second voltage value of the voltage signal input to each of the m first target input terminals detected by the first ADC module. The m first target input terminals are the m input terminals of the first ADC module connected to the m second ends of the first channel switching module. The first controller is configured to determine a current calibration parameter of each of the n input terminals of the first ADC module according to the first voltage value, the second voltage value, and the resistance values of the n resistors.

6. The ATE calibration system according to any one of claims 1 to 5, characterized in that, The calibration unit includes a second ADC module and a second controller; The m input terminals of the second ADC module are configured to be connected to the m second ends of the first channel switching module; the output terminal of the second ADC module is connected to the first terminal of the second controller; The second ADC module is configured to detect a fifth voltage value of a voltage signal input to each of the m input terminals of the second ADC module when the m input terminals of the second ADC module are connected to the m second terminals of the first channel switching module, and send the fifth voltage value to the second controller; The second controller is configured to process the fifth voltage value according to a voltage calibration parameter of each of the m input terminals of the second ADC module to obtain the first voltage value.

7. The ATE calibration system according to claim 6, wherein The calibration unit includes a second DAC module and a third channel switching module; A second terminal of the second controller is connected to an input terminal of the second DAC module, and a third terminal of the second controller is connected to a control terminal of the third channel switching module; an output terminal of the second DAC module is connected to a first terminal of the third channel switching module; the m second terminals of the third channel switching module are connected to the m input terminals of the second ADC module; the first terminal of the third channel switching module is configured to be connected to a voltage measurement unit; The second controller is configured to sequentially control the m second terminals of the third channel switching module to be communicated with the first terminal; When the second controller makes one of the second terminals of the third channel switching module communicate with the first terminal and the first terminal of the third channel switching module is connected to the voltage measurement unit, the second controller is configured to output a voltage signal through the second DAC module to enable a voltage signal to be output from one of the second terminals of the third channel switching module; the second ADC module is configured to detect a third voltage value of a voltage signal input to one of the input terminals of the second ADC module, and send the third voltage value to the second controller; The second controller is configured to determine a voltage calibration parameter of each of the m input terminals of the second ADC module according to a fourth voltage value detected by the voltage measurement unit and a third voltage value detected by the second ADC module.

8. The calibration system according to claim 7, wherein The ATE calibration system further includes a second application program; The second application program is configured to send a j-th second calibration instruction to the second controller, where j is an integer greater than or equal to 1 and less than or equal to m; The second controller is configured to control the j-th second terminal of the third channel switching module to be communicated with the first terminal according to the j-th second calibration instruction to start the j-th calibration process; The second application program is configured to send a second output instruction to the second controller; When the second controller determines that the currently received second output instruction is the first second output instruction in the j-th calibration process, the second controller is configured to set the voltage value of the second voltage signal to the minimum value of a preset voltage range, and output the second voltage signal through the second DAC module; When the second controller determines that the currently received second output instruction is not the first second output instruction received in the j-th calibration process, the second controller is configured to increase the voltage value of the second voltage signal by a preset voltage value, and output the second voltage signal through the second DAC module.

9. The ATE calibration system according to claim 8, wherein The second controller is configured to determine a voltage calibration parameter of the second target input terminal according to a plurality of voltage data of the second target input terminal during the j-th calibration process. Each voltage data among the plurality of voltage data of the second target input terminal includes the fourth voltage value and the third voltage value. The second target input terminal is an input terminal of the second ADC module connected to the first end of the third channel switching module.

10. An ATE test device, characterized in that, The ATE test equipment includes the ATE calibration system according to any one of claims 1 to 9.

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