Laser marking equipment for power generation glass and method for marking transparent lines of power generation glass

Abstract

The present invention belongs to the technical field of power generation glass production, and specifically relates to a power generation glass laser scribing device and a method for scribing a translucent line of power generation glass. The scribing unit of the device includes a first laser system and a second laser system. The first laser system consists of a green picosecond laser, a beam expander, several total reflection mirrors, a DOE shaper, a high-speed galvanometer, and a focusing lens. The first laser system is used to scribing the translucent line of the film layer; the second laser system consists of an ultraviolet nanosecond laser, a beam expander, a total reflection mirror, and a focusing lens. The second laser system is used to scribing the insulating line of the film layer. The method comprises: 1) dynamically adjusting the position of the scribing laser spot by detecting the warpage of the glass substrate; and 2) compensating the spot position by adjusting the galvanometer by monitoring the deformation of the optical element. The present invention improves the precision of scribing the translucent line of power generation glass and enhances the translucent line groove forming effect.

Description

Technical Field

[0001] The present invention belongs to the technical field of power generation glass production, and in particular relates to a power generation glass laser scribing device and a power generation glass transmissive line scribing method. Background Art

[0002] Currently, thin-film solar power generation glass generally uses laser scribing technology to divide the thin film layer of the entire power generation glass into sub-cells of equal width. At the same time, the sub-cells are connected in series in combination with the coating process. The lines made to divide the sub-cells are called sub-cell scribing lines.

[0003] When power generation glass is used as building glass, it often requires a certain degree of light transmittance, so it is also necessary to perform light transmission scratching on the power generation glass. In the light transmission scratching process, green second laser with high material absorption efficiency is currently used for light transmission scratching, so that the non-transparent material absorbs the laser energy and instantly sublimates at high temperature, leaving only the TCO transparent conductive layer. The direction of laser scratching is perpendicular to the sub-cell scratching direction. During laser scratching, the power generation material is ablated by controlling the high-frequency emitted laser spot, thereby forming light transmission grooves on the surface of the power generation glass.

[0004] The existing technology for scratching the light-transmitting lines of power generation glass has the following defects:

[0005] 1) Since the heat-affected zone (HAZ) of the power-generating material layer of the power-generating glass is uncontrollable, when traditional green second lasers are used to scribe insulating lines, the HAZ is greater than 20μm, the material sublimates instantly, and the laser irradiation time is difficult to accurately control. If the light spot irradiation time is slightly longer, cracks are very likely to appear on both sides of the transparent line groove, causing microcracks in the back electrode layer and degradation of electrical performance; if the light spot irradiation time is short, the film is not completely removed, and adjacent sub-cells are prone to short circuits, seriously affecting the function of the power-generating glass.

[0006] 2) In the existing technology, the laser spot of the scoring laser is mostly circular. If the spot moves faster to increase the scoring speed, the overlap rate of the front and rear circular spots will be insufficient, and the groove will have burrs. If the groove forming effect is improved, it is necessary to repeat the scan 2-3 times to complete the scoring, which will greatly affect the production cycle.

[0007] 3) Borosilicate glass is a common substrate for making power generation glass. When a film is applied to its surface, the glass plate is moved by a roller. The roller will inevitably come into contact with the undried film material, causing damage to the film. The damage to the film causes the sub-cells in that area to fail. In the existing technology, roller mark damage is often ignored when scratching the light transmission line, resulting in a large area of ​​material waste. Some practices also remove the roller mark damage to reduce the size of the power generation glass, which increases the difficulty of construction.

[0008] 4) The production temperature of float glass is between 400-500℃ when depositing the absorption layer. The film layer needs to be cooled immediately after the deposition of the absorption layer. The glass will deform by about 2mm during the heating and cooling process, and warp will occur. The existing production equipment is a static processing platform, that is, the distance between the engraving laser and the processing fixed platform is fixed. The warping of the glass makes it impossible for the focus to fall accurately on the film layer, resulting in unclear engraving of the transmitted light, large transmittance deviation, and reduced yield. Summary of the Invention

[0009] The technical problem to be solved by the present invention is that the translucent line grooves produced by the prior art scratching process for the translucent line of power generation glass have poor forming effects.

[0010] The present invention solves the above problems by adopting the following technical solutions:

[0011] A laser scribing device for power generation glass is used to scribing a power generation glass substrate through a translucent line. The glass substrate is composed of a glass base layer and a film layer. The film layer includes a TCO translucent conductive layer, an absorption layer, a buffer layer, and a back conductive layer from the surface of the glass base layer upwards. The scribing device includes:

[0012] The base includes a front wall and a rear wall. A gap is set between the front wall and the rear wall to form an inlet on the left end and an outlet on the right end. A Y-axis linear motor is installed on the top of the front wall and the rear wall. A clamping claw for clamping the edge of the glass substrate is installed on the surface of the moving block of the Y-axis linear motor.

[0013] The substrate positioning unit is installed in the base and includes:

[0014] Feeding module, supporting the middle of the glass substrate and adjusting the position of the glass substrate;

[0015] Scribing and fixing module, which fixes the glass substrate during the light transmission scribing process;

[0016] The discharging module takes the scribed glass substrate out of the scribed fixed module;

[0017] A scribing unit, passing through the base and disposed on the lower side of the glass substrate, is used to scribble the film layer of the glass substrate through light transmission;

[0018] The dust removal unit is arranged on the upper side of the glass substrate, is arranged opposite to the scribing unit and moves synchronously;

[0019] The scribing unit comprises a first laser system and a second laser system,

[0020] The first laser system consists of a green picosecond laser, a beam expander, several total reflection mirrors, a DOE shaper, a high-speed galvanometer, and a focusing lens. The first laser system is used to perform transparent line scribing on the film layer.

[0021] The second laser system consists of an ultraviolet nanosecond laser, a beam expander, a total reflection mirror and a focusing lens. The second laser system is used to scribe the insulating lines of the film layer.

[0022] Compared with the prior art, the present invention adopting the above structure has the following beneficial effects:

[0023] The present invention uses two lasers to etch the grooves of the power-generating glass, thereby reducing the power and irradiation time of the green picosecond laser, thereby reducing uncontrolled damage to the back electrode caused by the heat-affected zone. This solves the problem of frequent cracks in the back electrode when etching with a transparent light beam using only a green laser, and improves the groove formation effect. A secondary scriber with a violet laser is used to further remove the remaining opaque layer and to sever the TCO transparent conductive layer, preventing short circuits between sub-cells.

[0024] As a preferred embodiment, a further technical solution of the above structure is:

[0025] The green picosecond laser has a peak power of ≥80W and a pulse width of <15ps; the beam expander has a 2-8x adjustable lens; the DOE shaper generates a uniform square light spot with a spot size of 0.3mm²×0.3mm²; the high-speed galvanometer deflection speed is ≥30m / s, and the focal length of the focusing lens is 254mm; the ultraviolet nanosecond laser has an average power of ≥10W, a pulse width of 10ns-100ns, and a pulse energy of 0.1mJ~1mJ; the focusing lens has a focal length of 100mm, a focal diameter of 15μm, and a Gaussian light spot.

[0026] Beneficial effects obtained from the above features: This example reduces cracks on the edges of the translucent line grooves by reasonably setting the laser operating parameters, avoids jagged edges of the grooves by using a square light spot for translucent line engraving, and improves the translucent line forming effect.

[0027] The scribing unit also includes: an assembly platform for assembling optical elements of the first laser system and the second laser system; an X-axis linear motor, arranged in the culvert at the bottom of the front wall and the rear wall, with a Z-axis linear motor installed on the moving block of the X-axis linear motor, and the moving block of the Z-axis linear motor is fixedly connected to the side wall of the assembly platform; a laser rangefinder, installed on the assembly platform, for detecting the distance to the glass substrate film layer, and the laser rangefinder is associated with the displacement stroke control of the Z-axis moving block.

[0028] The beneficial effects obtained by the above features are as follows: This scheme adds a Z-axis motion structure to the engraving unit, and cooperates with the laser rangefinder to compensate for the focus position, which greatly improves the accuracy of the light spot position and improves the cleanliness of the translucent line groove etching.

[0029] The assembly platform is also provided with a temperature sensor for detecting the ambient temperature of the assembly platform, and the temperature sensor is associated with the high-speed galvanometer control.

[0030] Beneficial effects obtained by the above features: This example uses a temperature sensor to compensate for laser deviation caused by fluctuations in the working environment temperature of the laser optical path system, thereby ensuring the straightness of the transmitted light.

[0031] The clamping jaws are composed of a fixed seat, a sliding seat, a fixed push cylinder and a chuck. The fixed seat is fixedly connected to the moving block of the Y-axis linear motor, the sliding seat is slidably connected to the fixed seat, the fixed push cylinder is arranged on the rear side of the sliding seat and its piston head is connected to the rear end of the sliding seat, the chuck is installed at the front end of the sliding seat, and the chuck includes a support plate, and the front side wall of the support plate is installed with upper clamping fingers and lower clamping fingers that can move relative to each other.

[0032] Beneficial effects obtained by the above features: The clamp provided in this example fixes the edge of the glass substrate and drives the glass substrate to move stably throughout the production equipment. The clamp is retractable and the clamping fingers are movable, which is suitable for the production of power generation glass of different thicknesses.

[0033] The feeding module includes: a conveyor belt, which is arranged at intervals in the feeding module, and extends from the left end to the right end of the feeding module, and its surface belt contacts the glass substrate and drives the glass substrate to move through friction; a supporting bar, which is staggered between the conveyor belts, and a universal ball seat and a suction cup are provided on the top surface thereof, and the suction cup is connected to the negative pressure device; a lifting device, which is arranged under the conveyor belt, and drives the conveyor belt to move up and down at the height of the supporting bar; a hard limit block, which is arranged at the rear end of the feeding module, and includes a positioning seat fixed to the feeding module base frame, and a guide wheel is installed on the top surface of the positioning seat; an elastic limit block, which is arranged on the opposite side of the hard limit block, and includes a connecting seat fixed to the feeding module base frame, and an L-shaped slider is slidably installed on the connecting seat, the back side of the horizontal part of the L-shaped slider is connected to the push-pull cylinder, and the top surface of the vertical part of the L-shaped slider is installed with a push wheel; The CCD deflection corrector includes an industrial camera, which is arranged on one side of the hard limit block in the feeding module and is used to detect the dynamic position of the glass substrate. It is associated with the telescopic stroke control of the push-pull cylinder of the elastic limit block; the AOI camera is arranged at the right end of the feeding module and is used to detect the position and range of the roller mark on the glass substrate. The AOI camera is associated with the control of the engraving unit.

[0034] The beneficial effects obtained by the above features are: This example automatically corrects the glass position and identifies film defects through the AOI camera, providing conditions for optimizing the design of translucent light and insulation lines. This solution refers to isolating the roller area from the power generation battery area to avoid the impact of film defects on the performance of the power generation glass, maintain the integrity of the entire power generation glass, and facilitate the installation and construction of the power generation glass.

[0035] To solve the above problem, the present invention also provides a method for scratching the light-transmitting line of power generation glass, using the above-mentioned power generation glass laser scratching equipment. The specific working process is as follows:

[0036] The first step is to design the scribing data according to the size of the glass substrate to be produced. The scribing data includes at least the starting position, ending position, line width and transmittance of the transmission line; the starting position, ending position and line width of the insulation line;

[0037] Step 2: After the glass substrate is fed in, its position and direction are corrected. Then, the glass substrate is grasped by the clamp and moved linearly along the Y-axis to the scribing fixed module.

[0038] Step 3: The clamping jaws move and position according to the scratching data, and the scratching and fixing module fixes the glass substrate as a whole;

[0039] Step 4: The scribing unit moves along the X-axis to scribe the glass substrate; the dust removal unit moves along the X-axis synchronously with the scribing unit to absorb the debris generated during the scribing process of the glass substrate;

[0040] Step 5: The clamp drives the glass substrate to move to the discharge module.

[0041] Among them, in the fourth step, for the groove designed with both transparent wire and insulating wire, the specific operation process is:

[0042] S1: Start the laser rangefinder, and use the X-axis linear motor to drive the assembly platform to move the entire X-axis. The laser rangefinder evenly picks points on the glass substrate and measures the distance from the laser rangefinder to the glass substrate film layer to obtain the distance from d1 to d n ; Using d1 to d n obtaining a bending curve of the glass substrate;

[0043] S2: Divide the glass substrate into multiple BOX areas along the X-axis according to the suction range of the dust collection hood of the dust removal unit, and synchronously move the dust removal unit and the scribing unit to locate them in the first BOX area;

[0044] S3: Collect all d values ​​in the BOX area, calculate the travel of the Z-axis moving block, and adjust the laser focus to the position where the height difference between the highest point and the lowest point in the BOX area is centered. The travel formula of the Z-axis moving block is: ,in is the measuring point position, For The distance value of the position, h is the local height deviation;

[0045] S4: starting the first laser system to scribe the transparent light in the first BOX area according to the scribe data determined in the first step, so as to form a first groove on the upper surface of the glass substrate;

[0046] S5: Start the second laser system and perform scribing along the first groove according to the scribing data determined in the first step, forming a second groove at the bottom of the first groove. The second groove cuts through the TCO light-transmitting conductive layer, and the second groove is an insulating line.

[0047] During the scoring of the glass substrate by the first laser system:

[0048] P1: Detection temperature sensor detects the ambient temperature of the assembly platform;

[0049] P2: Predict the offset of the green picosecond laser based on the measured ambient temperature value;

[0050] P3: Correct the deflection angle of the high-speed galvanometer according to the obtained offset so that the light spot falls on the precise position. The correction formula for the deflection angle of the high-speed galvanometer is: ,in is the expansion coefficient, / ℃, is the temperature change, is the overall optical path length of the ruling laser beam.

[0051] Compared with the prior art, the present invention using the above method has the following beneficial effects:

[0052] This method uses two lasers to scratch the transparent lines of the power generation glass to reduce cracks in the back electrode; a purple laser is used to perform a second scratching on the bottom of the transparent line groove, which, on the one hand, further removes the remnants of the opaque layer, and on the other hand, cuts the TCO transparent conductive layer, which can isolate the damaged area of ​​the film layer and avoid short circuits between sub-cells, reducing the impact of damage to the glass substrate film layer on the functionality of the power generation glass, isolating the damaged area, and retaining the effective area of ​​the power generation film layer to the maximum extent while maintaining the size of the original glass material; the Z-axis movement adjustment amount is added to the scratching unit, and the glass warping is detected by laser ranging. The spot position is adjusted according to the warping to avoid large errors in local groove etching and improve the accuracy of transmittance control; the etching deviation caused by ambient temperature fluctuations is compensated by temperature detection to improve etching accuracy.

[0053] Before designing and engraving data in the first step, A1: The overall position of the glass substrate is monitored using a CCD deflection corrector. The position and direction of the glass substrate are corrected based on the CCD deflection corrector to make the glass substrate parallel to the Y-axis. A2: The position and range of the roller mark on the glass substrate are detected using an AOI camera. A3: Insulation lines are designed on both sides of the roller mark to isolate the roller mark area from the battery area circuit. The position of other insulation lines is then determined based on the position of these insulation lines.

[0054] The beneficial effects obtained by the above characteristics are: reducing the impact of damage to the glass substrate film layer on the functionality of the power generation glass, isolating the damaged area, and retaining the effective area of ​​the power generation film layer to the maximum extent while maintaining the size of the original glass material. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 This is a structural diagram of the equipment for marking the light-transmitting lines in the production of power generation glass according to the present invention;

[0056] Figure 2 It is the displacement drive structure of the assembly platform of the present invention;

[0057] Figure 3 It is a structural diagram of a unit of the present invention;

[0058] Figure 4 This is a schematic diagram of the optical path structure of the first laser system of the present invention;

[0059] Figure 5 This is a schematic diagram of the optical path structure of the second laser system of the present invention;

[0060] Figure 6 Schematic diagram of the shape of the first groove and the second groove of the present invention;

[0061] Figure 7 This is a schematic diagram of the BOX partition of the present invention;

[0062] Figure 8 This is a schematic diagram of a high-speed galvanometer controlling the refraction of green laser light to perform multi-transmittance line drawing in the BOX partition.

[0063] Figure 9 Schematic diagram of the laser rangefinder of the present invention for detecting warpage of a glass substrate;

[0064] Figure 10 It is a schematic diagram of the position of the scribing laser according to the detection structure of the laser rangefinder of the present invention being dynamically adjusted;

[0065] Figure 11 This is a structural diagram of an embodiment of the clamping jaws of the present invention;

[0066] Figure 12 The feeding module structure of the present invention Figure 1 ;

[0067] Figure 13 The feeding module structure of the present invention Figure 2 ;

[0068] Figure 14 This is a schematic diagram of the relative hard limit block and elastic limit block structure in the feeding module;

[0069] Figure 15 This is a structural diagram of the fixed module of the present invention;

[0070] Figure 16 This is a structural diagram of the discharge module of the present invention;

[0071] Figure 17 This is a schematic diagram of the AOI camera of the present invention performing roller printing image processing;

[0072] Figure 18 It is a schematic diagram of the present invention for planning insulation wires based on roller printing.

[0073] In the figure: 1, base; 101, front wall; 102, rear wall; 2, Y-axis linear motor;

[0074] 3. Clamping jaws; 301. Push cylinder; 302. Fixed seat; 303. Sliding seat; 304. Support plate; 305. Chuck;

[0075] 4. X-axis linear motor; 5. Dust hood;

[0076] 6. Feeding module; 601. CCD deviation corrector; 602. Support bar; 603. Conveyor belt; 604. Hard limit block; 605. Elastic limit block; 606. AOI camera; 6041. Positioning seat; 6042. Guide wheel; 6051. Connecting seat; 6052. Push-pull cylinder; 6053. L-shaped slider; 6054. Push wheel;

[0077] 7. Scribing and fixing module; 701. Support plate; 702. Scribing interval; 703. Universal ball seat; 704. Suction cup;

[0078] 8. Discharging module; 9. Z-axis linear motor; 901. Z-axis moving block; 10. Assembly platform; 11. Focusing lens; 12. Condensing lens; 13. Laser rangefinder; 14. Green picosecond laser; 15. Total reflection mirror; 16. Beam expander; 17. DOE shaper; 18. High-speed galvanometer; 19. UV nanosecond laser; 20. Glass base layer; 21. Film layer; 22. Transparent light; 23. Insulating wire; 24. BOX area; 25. Roller printing. DETAILED DESCRIPTION

[0079] The present invention will be further described below with reference to the embodiments, the purpose of which is only to provide a better understanding of the content of the present invention. Therefore, the examples given do not limit the scope of protection of the present invention.

[0080] The present invention provides a laser scribing device for power generation glass, which is used to scribe a transparent line 22 on a power generation glass substrate. The glass substrate is composed of a glass base layer 20 and a film layer 21. The film layer 21 includes a TCO transparent conductive layer, an absorption layer, a buffer layer and a back electric layer from the surface of the glass base layer 20 upward.

[0081] See also Figures 1 to 6 , the scoring equipment includes:

[0082] The base 1 includes a front wall 101 and a rear wall 102. A gap is set between the front wall 101 and the rear wall 102 to form an inlet on the left end and an outlet on the right end. A Y-axis linear motor 2 is mounted on the top of the front wall 101 and the rear wall 102. A clamping claw 3 for clamping the edge of the glass substrate is mounted on the surface of the moving block of the Y-axis linear motor 2.

[0083] The substrate positioning unit is installed in the base 1 and includes:

[0084] Feeding module 6, supports the middle of the glass substrate and adjusts the position of the glass substrate;

[0085] A scoring and fixing module 7 is used to fix the glass substrate during the scoring process of the transparent light 22;

[0086] The discharging module 8 takes the scribed glass substrate out of the scribed fixing module 7;

[0087] A scribing unit, which passes through the base 1 and is disposed on the lower side of the glass substrate, and performs light-transmitting scribing on the film layer 21 of the glass substrate;

[0088] The dust removal unit is arranged on the upper side of the glass substrate, is arranged opposite to the scribing unit and moves synchronously.

[0089] The scribing unit comprises a first laser system and a second laser system. The first laser system is used to scribble the transparent line 22 and the second laser system is used to scribble the insulating line on the basis of the transparent line groove.

[0090] See also Figure 3 、 Figure 4 The first laser system consists of a green picosecond laser 14, a beam expander 16, several total reflection mirrors 15, a DOE shaper 17, a high-speed galvanometer 18 and a focusing lens 11. The first laser system is used to scribe the film layer 21 with a transparent light 22.

[0091] Preferably, the output wavelength of the green picosecond laser 14 is 532nm. In this solution, its peak power is set to ≥80W and the pulse width is <15ps. The green picosecond laser 14 outputs laser light, and the light beam is input to the total reflection mirror ① at an incident angle of 45°. The total reflection mirror ① turns the laser beam 90 degrees and outputs it to the beam expander 16. The beam expander 16 expands the beam diameter by 2-8 times. Then, according to the structural requirements, the total reflection mirror ②, the total reflection mirror ③, and the total reflection mirror ④ are used to redirect the light beam in the horizontal and vertical directions. The laser beam is delivered to the scoring head, and a DOE is set in the scoring head. The shaper 17 is used to adjust the laser spot into a square with a specific size of 0.3×0.3mm²; a high-speed galvanometer 18 is set below the DOE shaper 17. The high-speed galvanometer 18 is a high lens. By adjusting its deflection angle, the refraction angle of the laser is adjusted. After each movement and positioning, multiple parallel transparent light lines 22 can be engraved respectively. The first laser system moves once along the X-axis to complete the engraving of multiple transparent light lines 22. The deflection speed of the high-speed galvanometer 18 is ≥30m / s; below the high-speed galvanometer 18 is the focusing lens 11, and the focal length of the focusing lens 11 is 254mm.

[0092] The laser is irradiated from the glass side to remove the film layer 21. The laser can easily pass through the glass. After passing through the glass, the laser pulse energy is absorbed at the interface between the glass base layer 20 and the first film layer, causing the first layer to vaporize. The plasma flow then separates the entire film layer 21.

[0093] See also Figure 3 、 Figure 5 ; The second laser system consists of an ultraviolet nanosecond laser 19, a beam expander 16, a total reflection mirror 15 and a focusing lens 12.

[0094] The UV nanosecond laser 19 has an output wavelength of 355nm. This solution sets its average power to ≥10W, its pulse width to 10ns-100ns, and its pulse energy to 0.1mJ-1mJ, adjustable in increments of 0.01mJ. This allows it to be used with different film layer 21 thicknesses (TCO transparent conductive layer thickness ranges from 0.2μm to 0.8μm). The UV nanosecond laser 19 emits laser light toward a beam expander 16, which expands the beam diameter by 10-20 times. The beam then passes through a total reflection mirror 15 (different from the total reflection mirror in the first laser system) and is output to a focusing lens 12, which has a focal length of 100mm. The second laser system uses a circular Gaussian spot with a focal diameter of 15μm.

[0095] As an alternative, see Figure 2 、 Figure 3 , the scoring unit of the present invention further comprises:

[0096] An assembly platform 10 is used to assemble optical elements of the first laser system and the second laser system;

[0097] The X-axis linear motor 4 is arranged in the culvert at the bottom of the front wall 101 and the rear wall 102. The Z-axis linear motor 9 is installed on the moving block of the X-axis linear motor 4. The moving block of the Z-axis linear motor 9 is fixedly connected to the side wall of the assembly platform 10.

[0098] The laser rangefinder 13 is installed on the assembly platform 10 and is used to detect the distance to the glass substrate film layer. The laser rangefinder 13 is associated with the displacement stroke control of the Z-axis moving block 901.

[0099] Due to warping and deformation, the glass substrate cannot completely conform to the plane of the processing platform. In the prior art, the scoring head of the scoring equipment is installed on the moving block of the X-axis linear motor 4. Its height is fixed after debugging based on the position of the processing platform plane and the focal length data. The upward warping position deviates far from the laser focus, resulting in incomplete removal of the film layer 21 by the laser, and residual film layer in the transmission line 22. As a result, the transmittance of the power generation glass does not meet the design, the transmittance error is greater than ±5%, and good products become defective. After testing, the film layer 21 can be completely removed within the range of ±1mm above and below the focus. In this solution, the Z-axis linear motor 9 is combined with the laser rangefinder 13 to achieve dynamic adjustment of the scoring head height, thereby compensating for the focal length. The specific compensation method is to scan the glass substrate through the laser rangefinder 13, use multiple laser distance measurement data to construct the bending curve of the glass substrate, and then drive the Z-axis moving block 901. The Z-axis moving block 901 drives the assembly platform 10, and the assembly platform 10 drives the first laser system or the second laser system, so that the focus of the green light or purple light falls at the center height of the bending curve amplitude, so that the highest point and the lowest point of the glass are both within the range of ±1 mm above and below the laser spot, thereby improving the clarity of the transmitted light 22.

[0100] In this solution, the stroke of the Z-axis moving block 901 is ±25mm, and the response speed of 1ms can fully meet the requirements. The focusing lens 11 of the first laser system and the focusing lens 12 of the second laser system are fixed structures relative to the assembly platform 10. Therefore, adjusting the Z-axis height of the assembly platform 10 is equivalent to adjusting the height of the focusing lens 11 head.

[0101] The base 1 of the present invention is made of marble. Marble has a very low thermal expansion coefficient and the ability to absorb vibrations, and is the best material for eliminating external thermal and mechanical influences on the shaft.

[0102] The dust removal unit includes a negative pressure device, a multi-stage filter, a dust collection pipe, and a dust collection hood 5. The dust collection hood 5 is connected to the dust collection pipe, which is connected to the multi-stage filter, which is connected to the negative pressure device. It also includes a support frame located above the base 1, with a sliding beam mounted on the top of the support frame, and the dust collection pipe is slidably connected to the sliding beam. The dust collection hood 5 is set on the upper side of the glass substrate. The opening of the dust collection hood 5 can absorb debris from the multiple light transmission lines 22. Figure 7In this solution, the glass substrate is divided into multiple BOX areas 24 along the X-axis according to the size of the dust hood 5. The dust hood 5 moves synchronously with the engraving unit and stops at each BOX area 24. The first laser system adjusts the angle of the laser through the high-speed galvanometer 18 to scribe all the transparent light lines 22 of a BOX area 24. After engraving a BOX area 24, it moves to the next BOX area 24.

[0103] Both the first and second laser systems are optical systems. When the ambient temperature fluctuates, the glass material undergoes surface deformation due to thermal expansion, causing changes in the optical path and ultimately affecting the focal point. To further improve laser scribing accuracy, the present invention also provides a method for correcting the deflection angle of the high-speed galvanometer 18. Specifically, a temperature sensor (not shown) is provided on the assembly platform 10 to monitor the ambient temperature of the assembly platform 10. This temperature sensor has an accuracy of ±0.1°C and is linked to the high-speed galvanometer 18. By compensating for the laser deflection angle, the straightness of the transmissive line 22 and the insulating line 23 is maintained during temperature fluctuations. This prevents misalignment of the same transmissive line 22 when scribing the next lower BOX area.

[0104] See also Figure 11 The clamping jaw 3 of the present invention comprises a fixed base 302, a sliding base 303, a fixed thrust cylinder 301, and a chuck 305. The fixed base 302 is fixedly connected to the moving block of the Y-axis linear motor 2, the sliding base 303 is slidably connected to the fixed base 302, the fixed thrust cylinder 301 is arranged at the rear side of the sliding base 303, and its piston head is connected to the rear end of the sliding base 303. The chuck 305 is mounted at the front end of the sliding base 303. The chuck 305 includes a support plate 304, and the front side wall of the support plate 304 is mounted with upper and lower gripping fingers that can move relative to each other. At least one of the upper and lower gripping fingers is movable.

[0105] As an alternative, see Figures 12 to 14 , the feeding module 6 includes:

[0106] Conveyor belts 603 are arranged at intervals in the feeding module 6. The conveyor belts 603 extend from the left end to the right end of the feeding module 6. The surface of the conveyor belts contacts the glass substrate and drives the glass substrate to move through friction.

[0107] The support bars 602 are interlaced between the conveyor belts 603, and the top surface of the support bars 602 is provided with a universal ball seat 703 and a suction cup 704, and the suction cup 704 is connected to the negative pressure device;

[0108] A lifting device is provided under the conveyor belt 603, which drives the conveyor belt 603 to move up and down at the height of the support bar 602;

[0109] The hard limit block 604 is provided at the rear end of the feeding module 6 and includes a positioning seat 6041 fixed to the base frame of the feeding module 6, and a guide wheel 6042 is installed on the top surface of the positioning seat 6041;

[0110] The elastic limit block 605 is provided on the opposite side of the hard limit block 604 and includes a connecting seat 6051 fixed to the base frame of the feeding module 6. An L-shaped slider 6053 is slidably mounted on the connecting seat 6051. The back side of the horizontal portion of the L-shaped slider 6053 is connected to the push-pull cylinder 6052. The top surface of the vertical portion of the L-shaped slider 6053 is mounted with a push wheel 6054.

[0111] CCD deflection corrector 601, a 5-megapixel industrial camera with a field of view ≥5×5 mm², is used to detect the dynamic position of the glass substrate. It uses an edge detection algorithm (Sobel operator) to achieve a positioning accuracy of ±2 μm. It is linked to the telescopic stroke control of the push-pull cylinder 6052 of the elastic limit block 605;

[0112] The AOI camera 606 is provided at the right end of the feeding module 6 and is used to detect the position and range of the roller mark 25 on the glass substrate. The AOI camera 606 is controlled and associated with the scribing unit.

[0113] The glass substrate is introduced into the feed module via a conveyor belt 603. A hard stopper 604 stops the glass substrate. An elastic stopper 605 pushes the other side of the glass substrate to align it. A lifting device 604 lowers the conveyor belt 603, allowing the glass substrate to land on the support bar 602. A CCD deflection corrector 601 monitors the position and tilt of the glass substrate as it enters the feed module, and uses visual analysis to determine whether some or all of the elastic stoppers 605 are used to align the glass substrate.

[0114] See also Figure 17 The AOI camera 606 dynamically collects the image of the roller mark 25 on the surface of the glass substrate and dynamically calculates the center offset of the insulating line 23 according to the position of the transmission line 22. The offset formula is:

[0115] , is the width of the transmission line; is the offset coefficient, ; The position error of the roller print is 25.

[0116] See also Figure 18The AOI camera 606's inspection data is transmitted to the scribing unit's control system. Based on the location of the roller mark 25, the scribing unit's control system places two insulating wires 23 on either side of it. These two insulating wires 23 isolate the roller mark 25 from the power generation area. After determining these two insulating wires 23, the scribing unit's control system then positions additional insulating wires 23 at appropriate intervals based on design requirements. In this solution, the insulating wires 23 serve both to isolate the roller mark 25 and to prevent short circuits between sub-cells.

[0117] See also Figure 15 The scoring and fixing module 7 includes a support plate 701, on which universal ball seats 703 and suction cups 704 are evenly and alternately arranged. A scoring gap 702 is defined in the center of the support plate 701, along which the scoring unit moves. The universal ball seats 703 form a sliding surface for supporting the glass substrate, while the suction cups 704 securely hold the glass substrate in place.

[0118] See also Figure 16 The discharging module 8 includes a supporting bar 602 and a conveyor belt 603 , and the structure and arrangement of the supporting bar 602 and the conveyor belt 603 are consistent with those of the feeding module 6 .

[0119] The method for scribing the light-transmitting lines of power generation glass provided by the present invention uses the above-mentioned power generation glass laser scribing equipment. The specific working process is as follows:

[0120] The first step is to design the scribing data according to the size of the produced glass substrate. The scribing data includes at least the starting position, ending position, line width and transmittance of the transmission line 22; the starting position, ending position and line width of the insulation line 23;

[0121] Step 2: After the glass substrate is fed in, its position and direction are corrected, and then the glass substrate is grasped by the clamping jaw 3 and moved linearly along the Y axis to the scribing and fixing module 7;

[0122] Step 3: The clamping jaw 3 moves and positions according to the scribing data, and the scribing and fixing module 7 fixes the glass substrate as a whole;

[0123] Step 4: The scribing unit moves along the X-axis to scribe the glass substrate; the dust removal unit moves along the X-axis synchronously with the scribing unit to absorb the debris generated during the scribing process of the glass substrate;

[0124] Step 5: The clamping jaw 3 drives the glass substrate to move to the discharge module 8.

[0125] In the fourth step, for the grooves designed with both transparent lines and insulating lines, the specific operation process is as follows: Figures 7 to 10 :

[0126] S1: Start the laser rangefinder 13, and drive the assembly platform 10 to move along the entire X-axis through the X-axis linear motor 4. The laser rangefinder 13 evenly picks points on the glass substrate and measures the distance from the laser rangefinder 13 to the glass substrate film layer 21 to obtain the distances from d1 to d n ; Using d1 to d n obtaining a bending curve of the glass substrate;

[0127] S2: Divide the glass substrate into multiple BOX areas 24 along the X-axis according to the suction range of the dust removal unit hood 5, and synchronously move the dust removal unit and the scribing unit to position them at the first BOX area 24;

[0128] S3: Collect all d values ​​in the BOX area 24 and calculate the travel of the Z-axis moving block 901. That is, sum up the d values ​​and take the average value. The average value is calculated with the deviation coefficient to obtain the travel of the Z-axis moving block 901. Adjust the laser focus to a position centered between the highest and lowest elevations in the BOX area 24. Specifically, the travel formula of the Z-axis moving block 901 is: ,in is the measuring point position, For The distance value of the position, h is the local height deviation;

[0129] S4: starting the first laser system to scribe the transparent line 22 in the first BOX area 24 according to the scribe data determined in the first step, so as to form a first groove on the upper surface of the glass substrate. The first groove is the transparent line 22;

[0130] S5: Start the second laser system and perform scribing along the first groove according to the scribing data determined in the first step, forming a second groove at the bottom of the first groove. The second groove cuts through the TCO light-transmitting conductive layer to form an insulating line 23.

[0131] During the scoring of the glass substrate by the first laser system:

[0132] P1: Detection temperature sensor detects the ambient temperature of the assembly platform 10;

[0133] P2: Calculate the offset of the green picosecond laser according to the measured ambient temperature;

[0134] P3: Correct the deflection angle of the high-speed galvanometer 18 according to the obtained offset so that the focus returns to the designed position. The correction formula for the deflection angle of the high-speed galvanometer 18 is: ,in is the expansion coefficient, / ℃; is the temperature change, is the overall optical path length from the laser to the focusing lens 11.

[0135] Furthermore, the above characterization method further includes: before the first step of characterizing the design data,

[0136] A1: The overall position of the glass substrate is monitored by the CCD deflection corrector 601 , and the position and direction of the glass substrate are corrected according to the CCD deflection corrector 601 so that the glass substrate is parallel to the Y axis;

[0137] A2: The position and range of the roller mark 25 on the glass substrate are detected by the AOI camera 606;

[0138] A3: Design insulating lines 23 on both sides of the roller mark 25 to isolate the roller mark 25 area from the battery area circuit; then rule the positions of other insulating lines 23 based on the positions of the insulating lines 23.

[0139] The beneficial effects of the present invention are:

[0140] 1) This method uses two lasers to scribe the transparent lines of the power generation glass, which can reduce the power and irradiation time of the green picosecond laser, thereby reducing the uncontrollable damage (cracks) caused by the heat-affected zone to the back electrode;

[0141] 2) A second scribe process is performed on the bottom of the transparent line groove using a violet laser. This not only further removes the remaining opaque layer, but also cuts through the TCO transparent conductive layer, isolating the damaged area of ​​the film layer and preventing short circuits between sub-cells. This reduces the impact of damage to the glass substrate film layer on the functionality of the power generation glass, isolates the damaged area, and preserves the effective area of ​​the power generation film layer to the maximum extent possible while maintaining the original size of the glass.

[0142] 3) By using a square light spot, the smoothness of the edge of the transparent light groove is improved to avoid jagged edges in the groove;

[0143] 4) Add Z-axis movement adjustment to the scoring unit, detect glass warping through laser ranging, dynamically adjust the focus position according to the warping situation, improve the clarity of the transmitted light, and improve the transmittance control accuracy;

[0144] 5) Compensate for the scratching deviation caused by ambient temperature fluctuations through temperature detection to improve the straightness of the transmitted light.

[0145] The above description is only a preferred embodiment of the present invention and does not limit the scope of the present invention. Any equivalent changes made using the contents of the present invention specification and its drawings are included in the scope of the present invention.

Claims

1. A laser scribing device for power generation glass, used for scribing the translucent lines of a power generation glass substrate. The glass substrate is composed of a glass base layer and a film layer. The film layer includes a TCO translucent conductive layer, an absorption layer, a buffer layer, and a back conductive layer from the surface of the glass base layer upwards. The scribing device includes: The base includes a front wall and a rear wall. A gap is set between the front wall and the rear wall to form an inlet on the left end and an outlet on the right end. A Y-axis linear motor is installed on the top of the front wall and the rear wall. A clamping claw for clamping the edge of the glass substrate is installed on the surface of the moving block of the Y-axis linear motor. The substrate positioning unit is installed in the base, and the substrate positioning unit includes: Feeding module, supporting the middle of the glass substrate and adjusting the position of the glass substrate; Scribing and fixing module, which fixes the glass substrate during the light transmission scribing process; The discharging module takes the scribed glass substrate out of the scribed fixed module; The scribing unit penetrates the base and is disposed on the lower side of the glass substrate to perform light-transmitting scribing on the film layer of the glass substrate; The dust removal unit is arranged on the upper side of the glass substrate, is arranged opposite to the scribing unit and moves synchronously; Its characteristics are: The scribing unit includes a first laser system and a second laser system. The first laser system consists of a green picosecond laser, a beam expander, several total reflection mirrors, a DOE shaper, a high-speed galvanometer, and a focusing lens. The first laser system is used to scribing the transparent line of the film layer. The second laser system consists of an ultraviolet nanosecond laser, a beam expander, a total reflection mirror, and a focusing lens. The second laser system is used to scribing the insulating line of the film layer. The characterization unit also includes: An assembly platform for assembling optical elements of the first laser system and the second laser system; The X-axis linear motor is installed in the culvert at the bottom of the front wall and the rear wall. The Z-axis linear motor is installed on the moving block of the X-axis linear motor, and the Z-axis moving block is fixedly connected to the side wall of the assembly platform; A laser rangefinder, mounted on the assembly platform, is used to detect the distance to the glass substrate film layer. The laser rangefinder is linked to the displacement stroke control of the Z-axis moving block; The assembly platform is also provided with a temperature sensor for detecting the ambient temperature of the assembly platform, and the temperature sensor is associated with the high-speed galvanometer control; An AOI camera is installed on the right side of the feeding module to detect the position and range of the roller mark on the glass substrate. The AOI camera is linked to the control of the scoring unit. The AOI camera dynamically collects the roller mark image on the surface of the glass substrate and dynamically calculates the center offset of the insulation line based on the transmission line position. The offset formula is: , is the width of the transmission line; is the offset coefficient, =0.2; is the roller printing position error.

2. The laser scribing device for power generation glass according to claim 1, characterized in that The green picosecond laser has a peak power of ≥80W and a pulse width of <15ps; the beam expander is a 2-8x adjustable lens; the DOE shaper generates a uniform square spot with a spot size of 0.3 mm × 0.3 mm; the high-speed galvanometer deflection speed is ≥30 m / s, and the focal length of the focusing lens is 254 mm; The ultraviolet nanosecond laser has an average power of ≥10W, a pulse width of 10ns-100ns, and a pulse energy of 0.1mJ-1mJ; the focusing lens has a focal length of 100mm, a focus diameter of 15μm, and a Gaussian spot.

3. The laser scribing device for power generation glass according to claim 1, characterized in that The clamping jaws are composed of a fixed seat, a sliding seat, a fixed push cylinder and a chuck. The fixed seat is fixedly connected to the moving block of the Y-axis linear motor, the sliding seat is slidably connected to the fixed seat, the fixed push cylinder is arranged on the rear side of the sliding seat and its piston head is connected to the rear end of the sliding seat, the chuck is installed at the front end of the sliding seat, the chuck includes a support plate, and the front side wall of the support plate is installed with upper clamping fingers and lower clamping fingers that can move relative to each other.

4. The power generation glass laser scribing device according to claim 1, characterized in that ,The feeding module also includes: Conveyor belts are arranged at intervals in the feeding module. The conveyor belts extend from the left end to the right end of the feeding module. The surface of the conveyor belt contacts the glass substrate and drives the glass substrate to move through friction. The support bars are staggered between the conveyor belts, and the top surface of the support bars is provided with a universal ball seat and a suction cup, which is connected to the negative pressure device; A lifting device is provided under the conveyor belt, which drives the conveyor belt to move up and down at the height of the support bar; The hard limit block is arranged at the rear end of the feeding module, and includes a positioning seat fixed to the base frame of the feeding module, and a guide wheel is installed on the top surface of the positioning seat; The elastic limit block is arranged on the opposite side of the hard limit block, including a connecting seat fixed to the base frame of the feeding module, an L-shaped slider is slidably installed on the connecting seat, the back side of the horizontal part of the L-shaped slider is connected to the push-pull cylinder, and the top surface of the vertical part of the L-shaped slider is equipped with a push wheel; The CCD deviation corrector includes an industrial camera, which is set on one side of the hard limit block of the feeding module and is used to detect the dynamic position of the glass substrate. It is associated with the telescopic stroke control of the push-pull cylinder of the elastic limit block.

5. The power generation glass laser scribing device according to claim 1, characterized in that: The scoring and fixing module comprises a supporting plate, on which universal ball seats and suction cups are evenly and staggeredly arranged, and a scoring interval is provided in the middle of the supporting plate.

6. The laser scribing device for power generation glass according to claim 4, characterized in that ,The discharging module includes a supporting bar and a conveying belt. The structure and arrangement of the supporting bar and the conveying belt are consistent with the feeding ,module.

7. A method for scratching a transparent line of a power generation glass, characterized in that: The specific working process of the laser scribing device for power generation glass according to any one of claims 1 to 6 is as follows: The first step is to design the scribing data according to the size of the glass substrate to be produced. The scribing data includes at least the starting position, ending position, line width and transmittance of the transmission line; the starting position, ending position and line width of the insulation line; Step 2: After the glass substrate is fed in, its position and direction are corrected. Then, the glass substrate is grasped by the clamp and moved linearly along the Y-axis to the scribing fixed module. Step 3: The clamping jaws move and position according to the scratching data, and the scratching and fixing module fixes the glass substrate as a whole; Step 4: The scribing unit moves along the X-axis to scribe the glass substrate; the dust removal unit moves along the X-axis synchronously with the scribing unit to absorb the debris generated during the scribing process of the glass substrate; Step 5: The clamp drives the glass substrate to move to the discharge module; Among them, in the fourth step, for the groove designed with both transparent wire and insulating wire, the specific operation process is: S1: Start the laser rangefinder, and use the X-axis linear motor to drive the assembly platform to move the entire X-axis. The laser rangefinder evenly picks points on the glass substrate and measures the distance from the laser rangefinder to the glass substrate film layer to obtain the distance from d1 to d n ; Using d1 to d n obtaining a bending curve of the glass substrate; S2: Divide the glass substrate into multiple BOX areas along the X-axis according to the suction range of the dust collection hood of the dust removal unit, and synchronously move the dust removal unit and the scribing unit to locate them in the first BOX area; S3: Collect all d values ​​in the BOX area, calculate the travel of the Z-axis moving block, and adjust the laser focus to the position where the height difference between the highest point and the lowest point in the BOX area is centered. The travel formula of the Z-axis moving block is: ,in is the measuring point position, is the distance value, h is the local height deviation; S4: starting the first laser system to scribe the transparent light in the first BOX area according to the scribe data determined in the first step, so as to form a first groove on the upper surface of the glass substrate; S5: Start the second laser system and scribe along the first groove according to the scribe data determined in the first step, forming a second groove at the bottom of the first groove. The second groove cuts through the TCO light-transmitting conductive layer, and the second groove is an insulating line. During the scoring of the glass substrate by the first laser system: P1: Detection temperature sensor detects the ambient temperature of the assembly platform; P2: Predict the offset of the green picosecond laser based on the measured ambient temperature value; P3: Correct the deflection angle of the high-speed galvanometer according to the obtained offset so that the light spot falls on the precise position. The correction formula for the deflection angle of the high-speed galvanometer is: , where 𝛼 is the expansion coefficient, / ℃, is the temperature change, is the overall optical path length of the ruling laser beam.

8. The method for scratching the translucent line of power generation glass according to claim 7, characterized in that: The characterization data design steps include: A1: Monitor the overall position of the glass substrate and correct its position and direction to make it parallel to the Y-axis. A2: Detect the position and range of the roller mark on the glass substrate; A3: Design insulation lines on both sides of the roller mark to isolate the roller mark area from the battery area circuit; A4: Design other insulation line positions based on the insulation line positions on both sides of the roller mark.

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