Program-controlled internal circulation clean oven
Through the temperature difference control and hot air circulation technology of the program-controlled internal circulation clean oven, the problems of high energy consumption and temperature difference of the clean oven are solved, efficient and uniform curing of semiconductor chips are achieved, and the chip usage performance is improved.
Patent Information
- Application Number
- CN202510576235.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-06
- Publication Date
- 2025-07-11
AI Technical Summary
The existing clean ovens have high energy consumption and high operating costs for long-term high-load operation. At the same time, the temperature difference between the edges and center of large ovens is large, which affects the curing consistency and thus affects the chip's later use performance.
The program-controlled internal circulation clean oven is adopted, and the probe is distributed in the body of the PMC program control and the solidification chamber to monitor and control the temperature difference in real time. Combined with the hot air circulation and air regulating device, the hot air is evenly distributed and energy consumption is reduced.
It improves the consistency of semiconductor chip curing, reduces the energy consumption of long-term high-temperature operation, and ensures uniform heating and efficient curing of the chip.
Smart Images
Figure CN120292832A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of post-curing technology for plastic encapsulation in integrated circuit packaging, and specifically to a programmable internal circulation clean oven. Background Art
[0002] Semiconductor chips usually need to be cured after plastic encapsulation, and curing is a key process in integrated circuit packaging. The main purposes include protecting the chip. Through plastic encapsulation materials such as epoxy resin, the chip, metal leads and brackets are completely encapsulated to form a physical barrier to prevent damage to the chip caused by moisture, dust and mechanical stress; eliminating warping, making the plastic encapsulation body evenly heated during the curing process to reduce the warping phenomenon caused by material shrinkage; improving reliability, ensuring that the plastic encapsulation material is fully cross-linked and cured, and improving the heat resistance, impact resistance and long-term stability of the encapsulation body.
[0003] Currently, when performing the curing operation of semiconductor chips, a clean oven is usually used. The dust-free oven of the clean oven is a drying device specially designed for high-temperature purification environments. It realizes closed self-circulation through high-temperature resistant high-efficiency air filters to ensure that the cleanliness in the working chamber reaches Class100 or even higher. At the same time, precise temperature and humidity control are provided. The clean oven realizes curing through hot air circulation + precise temperature control. Its core components include a heating system, a heat preservation layer, a temperature control system, sensors, etc. The curing chamber is heated through heating tubes to cure the semiconductor chips. Summary of the Invention
[0004] Aiming at the deficiencies of the prior art, the present invention provides a programmable internal circulation clean oven, which solves the problems that the energy consumption of the clean oven is relatively high under the long-term high-temperature working state, the operation cost is high under the long-term high-load operation, and the temperature difference between the edge and the center of the large oven is large, affecting the curing consistency and further affecting the later use performance of the chip.
[0005] To achieve the above purposes, the present invention is realized through the following technical solutions: A programmable internal circulation clean oven, comprising: an outer shell module, the outer shell module includes an outer shell body and a tower lamp, a scanning gun is arranged at the front end of the outer shell body, the upper end of the outer shell body is fixedly connected with the tower lamp, a control device is arranged inside the outer shell body, a door module is arranged at the front end of the outer shell body, an inner shell module is arranged inside the outer shell body, and an air duct module is arranged at the bottom of the outer shell body;
[0006] The door module includes a door, a handle, a hinge and a sign;
[0007] The inner shell module includes a PC board card, a heating chamber, a heater, a curing chamber, a first layer board, a second layer board, a third layer board, a fourth layer board, a fifth layer board, a sixth layer board, and a temperature sensor;
[0008] The air duct module includes a circulation fan, an impeller, an air outlet, an air regulating device, and an air return opening.
[0009] Preferably, four feet are fixedly connected to the bottom of the outer housing, and the four feet are evenly distributed at the bottom of the outer housing.
[0010] Preferably, the door is located at the front end of the outer housing and is connected by a hinge. The front end of the door is fixedly connected to a handle and a sign.
[0011] Preferably, the heating chamber is located at the bottom of the outer housing, and the heater is installed inside the heating chamber.
[0012] Preferably, the first layer board, the second layer board, the third layer board, the fourth layer board, the fifth layer board, and the sixth layer board are respectively installed inside the curing chamber, and the curing chamber is located inside the outer housing.
[0013] Preferably, the temperature sensors are installed above the first layer board and are evenly distributed at the left rear, right rear, left front, and right front. The temperature sensors are installed at the middle position of the third layer board. The temperature sensors are installed above the sixth layer board and are evenly distributed at the left rear, right rear, left front, and right front.
[0014] Preferably, the circulation fan is located at the rear end of the outer housing, the impeller is located on one side of the outer housing, the air outlet is located at the right rear side of the outer housing, the air return opening is located at the left rear side of the outer housing, and the air regulating device is located inside the outer housing.
[0015] Preferably, the PC board card is located inside the outer housing and is electrically connected to the temperature sensors.
[0016] The present invention provides a programmable internal circulation clean oven, which has the following beneficial effects:
[0017] By adopting PMC programming control and evenly distributed probes in the curing chamber body, the temperature difference between the edge and the center of the oven is monitored and controlled in real time to be reduced, improving the consistency of semiconductor chip curing.
[0018] Hot air circulation is used to dry the materials. The hot air is sent into the working chamber of the oven through the air duct, and the used hot air is inhaled into the air duct again to become the air source for recycling and heating. With the cooperation of the air regulating device, the internal gas is evenly distributed, so that the products are evenly heated, effectively reducing the energy consumption of the oven during long-term high-temperature operation. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the internal structure of the present invention;
[0020] Figure 2Schematic diagram of the outer tank module structure of the present invention;
[0021] Figure 3 Schematic diagram of the inner tank module structure of the present invention;
[0022] Figure 4 Schematic diagram of the door module structure of the present invention;
[0023] Figure 5 Schematic diagram of the distribution of temperature sensors of the present invention;
[0024] Figure 6 Schematic diagram of the structure of the circulation system of the present invention.
[0025] Among them, 1. Outer tank module; 2. Inner tank module; 3. Door module; 4. Air duct module; 5. Outer shell; 6. Tower lamp; 7. Scanning gun; 8. Circulation fan; 9. Floor feet; 10. Curing chamber; 11. First layer board; 12. Second layer board; 13. Third layer board; 14. Fourth layer board; 15. Fifth layer board; 16. Sixth layer board; 17. Impeller; 18. Heater; 19. Door; 20. Handle; 21. Hinge; 22. Sign plate; 23. Air outlet; 24. Air return port; 25. Temperature sensor; 26. Heating chamber; 27. Air adjustment device; 28. PC board; 29. Control device. Detailed implementation mode
[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.
[0027] Embodiment 1
[0028] As Figure 1-6 shown, the embodiment of the present invention provides a program-controlled internal circulation clean oven, including an outer tank module 1. The outer tank module 1 includes an outer shell 5 and a tower lamp 6. A scanning gun 7 is provided at the front end of the outer shell 5. The upper end of the outer shell 5 is fixedly connected to the tower lamp 6. A control device 29 is provided inside the outer shell 5. Floor feet 9 are fixedly connected to the bottom of the outer shell 5. The number of floor feet 9 is four and they are evenly distributed at the bottom of the outer shell 5 to ensure the stable placement of the device. A door module 3 is provided at the front end of the outer shell 5. An inner tank module 2 is provided inside the outer shell 5. An air duct module 4 is provided at the bottom of the outer shell 5.
[0029] The door module 3 includes a door 19, a handle 20, a hinge 21, and a sign 22. The door 19 is located at the front end of the outer casing 5 and is hinged through the hinge 21. The front end of the door 19 is fixedly connected to the handle 20, and the front end of the door 19 is fixedly connected to the sign 22. The connection methods and functions of each component facilitate the entry and exit of materials and equipment management.
[0030] The inner liner module 2 includes a PC board 28, a heating chamber 26, a heater 18, a curing chamber 10, a first layer board 11, a second layer board 12, a third layer board 13, a fourth layer board 14, a fifth layer board 15, a sixth layer board 16, and a temperature sensor 25.
[0031] The air duct module 4 includes a circulation fan 8, an impeller 17, an air outlet 23, an air adjustment device 27, and an air return port 24.
[0032] Embodiment 2
[0033] As Figure 1-6 shown, an embodiment of the present invention provides a programmable internal circulation clean oven, including an outer liner module 1. The outer liner module 1 includes an outer casing 5 and a tower light 6. A scanning gun 7 is provided at the front end of the outer casing 5. The upper end of the outer casing 5 is fixedly connected to the tower light 6. A control device 29 is provided inside the outer casing 5. The bottom of the outer casing 5 is fixedly connected to a floor foot 9. The number of floor feet 9 is four and they are evenly distributed at the bottom of the outer casing 5 to ensure the stable placement of the equipment. A door module 3 is provided at the front end of the outer casing 5. An inner liner module 2 is provided inside the outer casing 5. An air duct module 4 is provided at the bottom of the outer casing 5.
[0034] The door module 3 includes a door 19, a handle 20, a hinge 21, and a sign 22.
[0035] The inner liner module 2 includes a PC board 28, a heating chamber 26, a heater 18, a curing chamber 10, a first layer board 11, a second layer board 12, a third layer board 13, a fourth layer board 14, a fifth layer board 15, a sixth layer board 16, and a temperature sensor 25. The heating chamber 26 is located at the bottom of the outer casing 5. The heater 18 is installed inside the heating chamber 26 to ensure efficient heating. The first layer board 11, the second layer board 12, the third layer board 13, the fourth layer board 14, the fifth layer board 15, and the sixth layer board 16 are respectively installed inside the curing chamber 10 to facilitate the uniform heating of materials. The curing chamber 10 is located inside the outer casing 5. The temperature sensor 25 is installed above the first layer board 11 and is evenly distributed at the left rear, right rear, left front, and right front. The temperature sensor 25 is installed at the middle position of the third layer board 13. The temperature sensor 25 is installed above the sixth layer board 16 and is evenly distributed at the left rear, right rear, left front, and right front to achieve precise temperature monitoring. The PC board 28 is located inside the outer casing 5. The PC board 28 is electrically connected to the temperature sensor 25 to achieve precise temperature control.
[0036] The air duct module 4 includes a circulation fan 8, an impeller 17, an air outlet 23, an air regulating device 27, and an air return port 24.
[0037] Embodiment III
[0038] As Figure 1-6 As shown, an embodiment of the present invention provides a programmable internal circulation clean oven, including an outer casing module 1. The outer casing module 1 includes an outer casing 5 and a tower lamp 6. A scanning gun 7 is provided at the front end of the outer casing 5. The upper end of the outer casing 5 is fixedly connected to the tower lamp 6. A control device 29 is provided inside the outer casing 5. The bottom of the outer casing 5 is fixedly connected to a floor foot 9. The number of floor feet 9 is four and they are evenly distributed at the bottom of the outer casing 5 to ensure the stable placement of the device. A door module 3 is provided at the front end of the outer casing 5. An inner casing module 2 is provided inside the outer casing 5. An air duct module 4 is provided at the bottom of the outer casing 5.
[0039] The door module 3 includes a door 19, a handle 20, a hinge 21, and a sign 22.
[0040] The inner casing module 2 includes a PC board 28, a heating chamber 26, a heater 18, a curing chamber 10, a first layer board 11, a second layer board 12, a third layer board 13, a fourth layer board 14, a fifth layer board 15, a sixth layer board 16, and a temperature sensor 25.
[0041] The air duct module 4 includes a circulation fan 8, an impeller 17, an air outlet 23, an air regulating device 27, and an air return port 24. The circulation fan 8 is located at the rear end of the outer casing 5. The impeller 17 is located on one side of the outer casing 5. The air outlet 23 is located at the right rear side of the outer casing 5. The air return port 24 is located at the left rear side of the outer casing 5. The air regulating device 27 is located inside the outer casing 5 to ensure the effective circulation and regulation of hot air.
[0042] Working principle: The curing chamber 10 is made of SUS201 stainless steel mirror panel. This material has good corrosion resistance and smoothness, which can effectively prevent problems such as rust caused by environmental factors during the drying process, ensure the cleanliness of the product curing environment. The multi-layer boards provided inside the chamber provide sufficient space for placing the materials to be dried, and the reasonable layout of the boards helps the hot air to be evenly distributed inside the curing chamber 10, enabling the materials to receive heat comprehensively and evenly. The heating chamber 26 is also made of SUS201 stainless steel mirror panel, providing a stable and durable working environment for the heater 18, ensuring that the heater 18 generates heat efficiently and continuously.
[0043] When the device is connected to a 50Hz, three-phase four-wire, 380V, 25A power supply and the circuit with a power of 18kW is turned on, the control and information processing system starts the initialization work. Subsequently, the control device 29 sends a start command to the PC board 28 according to the preset program. The PC board 28 controls the heater 18 located in the heating chamber 26 to be powered on. The heater 18 quickly converts electrical energy into heat energy, heats the air in the heating chamber 26, causes the air temperature to rise rapidly, and forms the initial hot air. The circulation fan 8 starts to operate under the drive of the control device 29. The high-speed rotation of the motor drives the impeller 17 to rotate. The rotation of the impeller 17 generates a strong suction force, and blows out the heated hot air in the heating chamber 26 through the air outlet 23. The blown hot air is conveyed along a specific air duct to the curing chamber 10 of the oven. In the curing chamber 10, the hot air will flow through each layer board in turn, make full contact with the materials placed on the layer board, and take away the moisture in the materials through heat transfer, achieving the purpose of drying the materials. Since the curing chamber is made of stainless steel mirror panels, it can effectively reduce heat loss and enhance the efficiency of hot air circulation.
[0044] Nine detection probes are set inside the device. Temperature sensors 25 are installed above the first layer board 11 at the left rear, right rear, left front, and right front positions, at the middle position of the third layer board 13, and above the sixth layer board 16 at the left rear, right rear, left front, and right front positions. These sensors continuously collect the air temperature information at their respective positions and transmit the temperature signals in the form of electrical signals to the PC board 28 electrically connected to them. After receiving these temperature signals, the PC board 28 will accurately compare them with the preset temperature values. If it detects that the actual temperature is lower than the preset temperature value, the PC board 28 will increase the heating power of the heater 18 through the control device 29, so as to generate more heat in the heating chamber 26, thereby raising the temperature of the circulating hot air. If it detects that the actual temperature is higher than the preset temperature value, the PC board 28 will reduce the heating power of the heater 18 or even temporarily stop the heater 18 from working.
[0045] At the same time, the rotation speed of the circulation fan 8 may also be adjusted to control the circulation speed of the hot air, ensuring that the temperature in the oven can be maintained within a uniform range of ±5°C in the full-load constant temperature stable section. The used hot air is not directly discharged from the oven, but under the suction of the circulation fan 8, it is sucked into the air duct again through the air return port 24 and returns to the heating chamber 26 to become a new hot air source. The hot air returning to the heating chamber 26 is mixed with the heat newly generated by the heater 18, heated and raised in temperature again, and then driven by the circulation fan 8 into the curing chamber 10 for a new round of drying work. This way of circulating and heating the hot air source greatly improves the energy utilization efficiency, reduces energy waste, and lowers the energy consumption of the entire drying process.
[0046] The three - level over - temperature protection mechanism monitors the temperature at all times during the operation of the equipment. When the temperature sensor 25 detects that the temperature exceeds a certain range of the normal preset value, the first - level over - temperature protection is activated, and the PC board 28 will reduce the power of the heater 18. If the temperature continues to rise, the second - level over - temperature protection is activated to further restrict the operation of the heater 18 and may even temporarily stop the circulation fan 8. If the temperature still continues to rise abnormally, the third - level over - temperature protection will immediately cut off the power supply of the equipment to prevent safety accidents. The anti - scald configuration for the door 19 is achieved by setting heat - insulating materials and warning signs around the door 19 body, reminding the operator that there is a risk of scalding when opening the door 19 during the operation of the equipment. The multi - path motor protection grounding ensures that in the event of a leakage when motors such as the circulation fan 8 are operating, the current can be quickly introduced into the ground to ensure the safety of the operator and the equipment. The product over - temperature alarm function is closely related to the temperature sensor 25 and the PC board 28. Once the temperature at the product location exceeds the temperature tolerance range of the product, the equipment will issue an alarm to remind the operator. The alarm for not reaching the set temperature after long - term operation is triggered when the equipment has been running for a certain time and the temperature still has not reached the preset value, and the control and information processing system will trigger an alarm to prompt the operator to check for equipment failures.
[0047] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A programmed internal circulation clean oven, characterized in that, Comprising: An outer tank module (1), the outer tank module (1) includes an outer housing (5) and a tower light (6), a scanning gun (7) is provided at the front end of the outer housing (5), the upper end of the outer housing (5) is fixedly connected to the tower light (6), a control device (29) is provided inside the outer housing (5), a door module (3) is provided at the front end of the outer housing (5), an inner tank module (2) is provided inside the outer housing (5), and an air duct module (4) is provided at the bottom of the outer housing (5); The door module (3) includes a door (19), a handle (20), a hinge (21) and a sign (22); The inner tank module (2) includes a PC board (28), a heating chamber (26), a heater (18), a curing chamber (10), a first layer board (11), a second layer board (12), a third layer board (13), a fourth layer board (14), a fifth layer board (15), a sixth layer board (16), and a temperature sensor (25); The air duct module (4) includes a circulation fan (8), an impeller (17), an air outlet (23), an air regulating device (27) and an air return port (24).
2. The programmable internal circulation clean oven according to claim 1, wherein: Four feet (9) are fixedly connected to the bottom of the outer housing (5), and the four feet (9) are evenly distributed at the bottom of the outer housing (5).
3. The programmable internal circulation clean oven according to claim 1, characterized in that: The door (19) is located at the front end of the outer housing (5) and is hinged by a hinge (21), the front end of the door (19) is fixedly connected to the handle (20), and the front end of the door (19) is fixedly connected to the sign (22).
4. A programmable internal circulation clean oven according to claim 1, characterized in that: The heating chamber (26) is located at the bottom of the outer housing (5), and the heater (18) is installed inside the heating chamber (26).
5. A programmed internal circulation clean oven according to claim 1, characterized in that: The first layer board (11), the second layer board (12), the third layer board (13), the fourth layer board (14), the fifth layer board (15) and the sixth layer board (16) are respectively installed inside the curing chamber (10), and the curing chamber (10) is located inside the outer housing (5).
6. A programmed internal circulation clean oven according to claim 1, characterized in that: The temperature sensors (25) are installed above the first layer board (11) and are evenly distributed at the left rear, right rear, left front and right front, the temperature sensors (25) are installed at the middle position of the third layer board (13), and the temperature sensors (25) are installed above the sixth layer board (16) and are evenly distributed at the left rear, right rear, left front and right front.
7. A programmable internal circulation clean oven according to claim 1, characterized in that: The circulation fan (8) is located at the rear end of the outer housing (5), the impeller (17) is located on one side of the outer housing (5), the air outlet (23) is located at the right rear side of the outer housing (5), the air return port (24) is located at the left rear side of the outer housing (5), and the air regulating device (27) is located inside the outer housing (5).
8. A programmable internal circulation clean oven according to claim 1, characterized in that: The PC board (28) is located inside the outer housing (5), and the PC board (28) is electrically connected to the temperature sensor (25).