Improved probe for chip detection probe card

Abstract

The invention discloses an improved probe for a chip detection probe card, and relates to the technical field of probe cards. The device comprises a mounting shell, a plurality of telescopic bins are formed in the bottom of the mounting shell, T-shaped probe rods are slidably connected to the interiors of the telescopic bins, one ends of the T-shaped probe rods penetrate through the mounting shell and are fixedly connected with probes, jacking elastic pieces are fixedly connected to the tops of the T-shaped probe rods, and the jacking elastic pieces are mounted in the telescopic bins. When the adjusting rod is driven to move in the length direction of the adjusting sliding groove, the adjusting rod pushes the T-shaped probe rod in the length direction of the telescopic bin to drive the probe to move, and one end of the T-shaped probe rod extrudes the jacking elastic piece to deform; and the springback characteristic of the jacking elastic piece pushes the T-shaped probe rod to drive the probe to move reversely in the length direction of the telescopic bin, so that the distance of the T-shaped probe rod driving the probe to move in the length direction of the telescopic bin can be adjusted conveniently.

Description

Technical Field

[0001] The present application relates to the technical field of probe cards, and in particular to an improved probe for a probe card used for chip detection. Background Art

[0002] In the entire process of semiconductor manufacturing, IC design, wafer manufacturing, wafer testing, and wafer packaging are indispensable key steps. Among them, wafer testing, as a key step to verify the functions and performance of semiconductor devices, plays a crucial role. Wafer testing is mainly divided into two major parts: wafer probing and final testing. Wafer probing is an important step after wafer processing is completed, and final testing is the last checkpoint before the product leaves the factory. Wafer probing, also known as wafer-level testing, is an electrical performance test performed on a wafer before it is cut into individual chips. By using a special probe card to contact the pads on the wafer, each chip is tested individually. The main purpose of this process is to screen out defective chips, and if possible, specific technical means can be used for repair, such as laser repair of memory chips, so as to improve the yield.

[0003] Existing probe card technologies have developed various design types to meet different test requirements. For example, RF probe cards for high-frequency testing, high-voltage-resistant probe cards for high-voltage testing, etc. This technological progress enables wafer testing to more accurately reflect the performance of chips in actual applications. The probe card is an indispensable part of wafer probing, and it is the component that directly contacts the chip during the detection process. The design and application of the probe card require extremely high precision and complex processes. Since each wafer may contain thousands of chips, the probe card must ensure that the test of each die can be completed in an extremely short time to shorten the test cycle and improve production efficiency.

[0004] However, although probe card technology has made certain progress, it still faces some challenges in actual applications. The traditional method of adjusting the probes of the probe card is mostly to adjust the probe ejection length by adding or removing shims. Such a method requires frequent addition and removal of shims, which is not only time-consuming and laborious, but also easily damages the probes and reduces the service life of the probes. Summary of the Invention

[0005] The purpose of the present application is to solve the problem that the method of adjusting the probe ejection length by adding or removing shims requires frequent addition and removal of shims, which is not only time-consuming and laborious, but also easily damages the probes and reduces the service life of the probes. The present application provides an improved probe for a probe card used for chip detection.

[0006] The present application specifically adopts the following technical solutions to achieve the above purpose: An improved probe for a chip detection probe card comprises a mounting shell, a plurality of telescopic chambers are provided at the bottom of the mounting shell, a T-shaped probe rod is slidably connected to the inside of the telescopic chamber, one end of the T-shaped probe rod passes through the mounting shell and is fixedly connected to a probe head, a plurality of lifting spring pieces are evenly and fixedly connected to the inner bottom of the telescopic chamber, the plurality of lifting spring pieces are arranged in a circular shape, one end of the T-shaped probe rod is installed between the plurality of lifting spring pieces, an adjusting slide groove for connecting the plurality of telescopic chambers is provided inside the mounting shell, an adjusting rod is slidably connected to the inside of the adjusting slide groove, and the adjusting rod An installation bin is provided inside the installation shell, which is in conflict with the top of the T-shaped probe rod. A plurality of transmission grooves are provided on the inner bottom of the installation bin. A transmission rod is slidably connected inside the transmission groove. One end of the transmission rod is fixedly connected to the adjusting rod. An extension block is fixedly connected to the top of the installation shell. An extension block is extended at one end of the extension block. A buckle is fixedly connected at one end of the extension block. An adjustment mechanism for driving the transmission rod to move along the length direction of the transmission groove is installed inside the installation bin. A plurality of sealing components adapted to the telescopic bin are provided at the bottom of the installation shell.

[0007] By adopting the above technical scheme and setting the coordinated use of the adjusting mechanism and the sealing assembly, when the adjusting rod is driven to move along the length direction of the adjusting slot, the adjusting rod pushes the T-shaped probe rod to drive the probe to move along the length direction of the telescopic bin, and one end of the T-shaped probe rod squeezes the lifting spring sheet to deform, and then the rebound characteristics of the lifting spring sheet push the T-shaped probe rod to drive the probe to move in the opposite direction along the length direction of the telescopic bin, so as to facilitate the adjustment of the distance that the T-shaped probe rod drives the probe to move along the length direction of the telescopic bin, thereby realizing fast and accurate adjustment of the ejection length range of the T-shaped probe rod and the probe, thereby improving the efficiency of adjusting the ejection length of the T-shaped probe rod and the probe, and extending the service life of the device.

[0008] Furthermore, the adjustment mechanism includes a connecting rod slidably connected to the inside of the installation bin, the bottom of the connecting rod is fixedly connected to a plurality of inclined slide rails, the top of the transmission rod is fixedly connected to a resistance rod, one end of the resistance rod passes through the inside of the inclined slide rail, and a driving component for driving the connecting rod to move along the length direction of the installation bin is installed inside the installation bin.

[0009] By adopting the above technical solution, through the combined use of the driving component with the inclined slide rail and the abutting rod, rotating the driving component can drive the connecting rod to drive the inclined slide rail to move along the length direction of the installation bin, and push the inclined slide rail to abut against the abutting rod, thereby driving the abutting rod to drive the transmission rod to move along the length direction of the transmission chute, and further enabling the transmission rod to drive the adjusting rod to move along the length direction of the adjusting chute, so as to facilitate driving the adjusting rod to move along the length direction of the adjusting chute, effectively improving the practicability of the device.

[0010] Further, the driving component includes a threaded groove opened at one end of the connecting rod. A threaded rod is rotatably connected inside the installation bin. One end of the threaded rod is threadedly connected to the connecting rod through the threaded groove. A receiving hole is opened at one end of the installation shell. One end of the threaded rod extends into the receiving hole and is fixedly connected with a polygonal adjusting block. A cross insertion hole is opened at one end of the polygonal adjusting block.

[0011] By adopting the above technical solution, through the combined use of the threaded rod and the threaded groove, inserting the thimble into the cross insertion hole and rotating the polygonal adjusting block can drive the threaded rod to form a threaded connection with the threaded groove, and push the connecting rod to move along the length direction of the installation bin, effectively improving the practicability of the device.

[0012] Further, the plurality of T-shaped probe rods are arranged in a straight line and evenly along the length direction of the installation shell.

[0013] By adopting the above technical solution, by arranging the plurality of T-shaped probe rods in a straight line and evenly along the length direction of the installation shell, the plurality of T-shaped probe rods can drive a plurality of probes to simultaneously form multi-point contact with the main board to be measured, so as to improve the connection stability between the device and the main board to be measured.

[0014] Further, a contact roller sleeve is sleeved at one end of the abutting rod, and the contact roller sleeve forms a rolling contact with the inner wall of the inclined slide rail.

[0015] By adopting the above technical solution, through the combined use of the contact roller sleeve and the inclined slide rail, when driving the connecting rod to drive the inclined slide rail to move along the length direction of the installation bin, the inclined slide rail forms a rolling contact with the abutting rod through the contact roller sleeve, effectively reducing the wear between the inclined slide rail and the abutting rod, extending the service life of the device, and improving the smoothness of the device.

[0016] Further, a plurality of rubber gaskets are evenly and fixedly connected to the bottom of the adjusting rod, and the adjusting rod forms a flexible contact with one end of the T-shaped probe rod through the rubber gaskets.

[0017] By adopting the above technical solution, through the combined use of the rubber gasket with the T-shaped probe rod and the adjusting rod, when the T-shaped probe rod moves along the length direction of the telescopic bin, a flexible contact is formed between the rubber gasket and the adjusting rod, so as to reduce the wear between the T-shaped probe rod and the adjusting rod, reduce the rebound amplitude of the jacking elastic piece after being stressed, and further improve the stability of the device.

[0018] Further, the sealing assembly includes a plurality of sealing grooves formed at the bottom of the mounting housing and adapted to the telescopic bin. An elastic sealing sheet is fixedly connected to the inner bottom of the sealing groove, and one end of the elastic sealing sheet is fixedly connected to the T-shaped probe rod.

[0019] By adopting the above technical solution, through the combined use of the sealing groove and the elastic sealing sheet, when driving the T-shaped probe rod to eject the probe head along the length direction of the telescopic bin, it is convenient to drive one end of the elastic sealing sheet to generate tensile deformation, so as to use the elastic sealing sheet to form a sealed wrap on the bottom of the sealing groove, so as to reduce the entry of dust and other foreign matters into the interior of the telescopic bin when the T-shaped probe rod moves along the length direction of the telescopic bin, and effectively improve the sealing effect of the device.

[0020] Further, a plurality of elastic providing holes are formed at one end of the extension block.

[0021] By adopting the above technical solution, through the setting of the elastic providing holes, when the mounting housing abuts against the main board to be measured, it is convenient to provide a flowable elastic force for the mounting housing, reduce the damage to the main board to be measured, and improve the safety of the device.

[0022] In summary, the present application includes at least one of the following beneficial effects: 1. By the combined use of the adjusting mechanism and the sealing assembly, when driving the adjusting rod to move along the length direction of the adjusting chute, it is convenient to make the adjusting rod push the T-shaped probe rod along the length direction of the telescopic bin to drive the probe head to move, and make one end of the T-shaped probe rod squeeze the jacking elastic piece to generate deformation, and then the rebound characteristic of the jacking elastic piece pushes the T-shaped probe rod to drive the probe head to move reversely along the length direction of the telescopic bin, so as to facilitate adjusting the distance that the T-shaped probe rod drives the probe head to move along the length direction of the telescopic bin, thereby realizing the rapid and accurate adjustment of the ejection length range of the T-shaped probe rod and the probe head, improving the efficiency of adjusting the ejection length of the T-shaped probe rod and the probe head, and prolonging the service life of the device.

[0023] 2. By setting up the driving component for use with the inclined slide rail and the resistance rod, the rotating driving component can drive the connecting rod to drive the inclined slide rail to move along the length direction of the installation bin, and push the inclined slide rail to form a resistance with the resistance rod, thereby driving the resistance rod to drive the transmission rod to move along the length direction of the transmission slide groove, and then the transmission rod drives the adjusting rod to move along the length direction of the adjusting slide groove, thereby facilitating the driving of the adjusting rod to move along the length direction of the adjusting slide groove, and effectively improving the practicability of the device.

[0024] 3. By setting the rubber gasket in conjunction with the T-shaped probe rod and the adjusting rod, when the T-shaped probe rod moves along the length direction of the telescopic bin, a flexible contact is formed between the rubber gasket and the adjusting rod to reduce the wear between the T-shaped probe rod and the adjusting rod, thereby reducing the rebound amplitude of the lifting spring after being stressed, and further improving the stability of the device.

[0025] 4. By setting up the sealing groove and the elastic sealing sheet for use together, when the T-shaped probe rod is driven to push out the probe along the length direction of the telescopic bin, one end of the elastic sealing sheet is driven to produce tensile deformation, so that the elastic sealing sheet is used to form a sealing package for the bottom of the sealing groove, so as to reduce the T-shaped probe rod from moving along the length direction of the telescopic bin and driving dust and other foreign matter into the interior of the telescopic bin, thereby effectively improving the sealing effect of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the three-dimensional structure of the device body in this application.

[0027] Figure 2 It is a schematic diagram of the internal structure of the installation shell in this application.

[0028] Figure 3 It is an exploded view of the internal structure of the installation shell in this application.

[0029] Figure 4 It is an exploded view of the connection relationship between the adjustment rod, the T-shaped probe rod and the connecting rod in the present application.

[0030] Figure 5 It is an exploded view of the connection relationship between the threaded rod and the threaded groove in this application.

[0031] Description of reference numerals: 1. Install the shell; 2. Telescopic bin; 3. T-shaped probe rod; 4. Probe; 5. Lifting spring; 6. Adjustment slide; 7. Adjustment rod; 8. Install the bin; 9. Transmission slide; 10. Transmission rod; 11. Connecting rod; 12. Inclined slide rail; 13. Resistance rod; 14. Threaded groove; 15. Threaded rod; 16. Storage hole; 17. Multilateral adjustment block; 18. Resistance roller sleeve; 19. Rubber gasket; 20. Sealing groove; 21. Elastic sealing sheet; 22. Extension block; 23. Extension block; 24. Buckle; 25. Elasticity providing hole; 26. Cross socket. DETAILED DESCRIPTION

[0032] The following is combined with Figure 1 —5 further describes this application in detail.

[0033] The embodiment of the present application discloses an improved probe for a chip detection probe card.

[0034] Reference Figure 1 - Figure 3 , an improved probe for a chip detection probe card, comprising a mounting shell 1, a plurality of telescopic chambers 2 are provided at the bottom of the mounting shell 1, a T-shaped probe rod 3 is slidably connected inside the telescopic chamber 2, one end of the T-shaped probe rod 3 passes through the mounting shell 1 and is fixedly connected to a probe 4, a plurality of lifting spring pieces 5 are evenly and fixedly connected to the inner bottom of the telescopic chamber 2, the plurality of lifting spring pieces 5 are arranged in a circular shape, one end of the T-shaped probe rod 3 is installed between the plurality of lifting spring pieces 5, an adjusting slide groove 6 for connecting the plurality of telescopic chambers 2 is provided inside the mounting shell 1, an adjusting rod 7 is slidably connected inside the adjusting slide groove 6, and the adjusting rod 7 is connected to the T-shaped probe The top of the needle rod 3 conflicts with each other, an installation bin 8 is provided inside the installation shell 1, a plurality of transmission slide grooves 9 are provided at the inner bottom of the installation bin 8, a transmission rod 10 is slidably connected inside the transmission slide groove 9, one end of the transmission rod 10 is fixedly connected to the adjusting rod 7, an extension block 22 is fixedly connected to the top of the installation shell 1, an extension block 23 is extended at one end of the extension block 22, a buckle 24 is fixedly connected to one end of the extension block 23, an adjusting mechanism for driving the transmission rod 10 to move along the length direction of the transmission slide groove 9 is installed inside the installation bin 8, and a plurality of sealing components adapted to the telescopic bin 2 are provided at the bottom of the installation shell 1.

[0035] When in use, first manually rotate the adjusting mechanism to drive the transmission rod 10 to drive the adjusting rod 7 to move along the length direction of the adjusting slot 6, and at the same time drive the adjusting rod 7 to push the T-shaped probe rod 3 to squeeze the lifting spring piece 5 along the length direction of the telescopic bin 2, and cause the lifting spring piece 5 to deform, and at the same time cause the T-shaped probe rod 3 to push the probe head 4 out a certain distance along the length direction of the telescopic bin 2, and then when the adjusting mechanism is reversely rotated to drive the adjusting rod 7 to move along the inner wall of the adjusting slot 6, the adjusting rod 7 releases the resistance to the T-shaped probe rod 3, and utilizes the rebound characteristics of the lifting spring piece 5 to make the lifting spring piece 5 rebound and push the T-shaped probe rod 3 to move upward along the length direction of the telescopic bin 2, and at the same time cause the T-shaped probe rod 3 to drive one end of the probe head 4 to move closer to the mounting shell 1 along the length direction of the telescopic bin 2, and cause the T-shaped probe rod 3 to drive the sealing assembly to form a sealing protection for the bottom of the telescopic bin 2; At the same time, the picking area of the mounting shell 1 is expanded by setting the extension block 22, thereby reducing the unstable gripping of the mounting shell 1. Then, the mounting shell 1 is pulled to drive the extension block 23 and the buckle 24 to be inserted into the card slot of the probe card, and a fixed connection is formed between the buckle 24 and the probe card, so as to facilitate the rapid and accurate adjustment of the ejection length range of the T-shaped probe rod 3 and the probe 4, thereby improving the efficiency of adjusting the ejection length of the T-shaped probe rod 3 and the probe 4 and extending the service life of the device.

[0036] Reference Figure 3 - Figure 5 The adjustment mechanism includes a connecting rod 11 slidably connected to the inside of the installation bin 8, a plurality of inclined slide rails 12 are fixedly connected to the bottom of the connecting rod 11, a resisting rod 13 is fixedly connected to the top of the transmission rod 10, one end of the resisting rod 13 passes through the inside of the inclined slide rail 12, and a driving component for driving the connecting rod 11 to move along the length direction of the installation bin 8 is installed inside the installation bin 8; The driving assembly includes a threaded groove 14 provided at one end of the connecting rod 11, a threaded rod 15 is rotatably connected to the interior of the mounting chamber 8, one end of the threaded rod 15 is threadedly connected to the connecting rod 11 through the threaded groove 14, a receiving hole 16 is provided at one end of the mounting housing 1, one end of the threaded rod 15 extends into the receiving hole 16 and is fixedly connected to a multilateral adjustment block 17, and a cross socket 26 is provided at one end of the multilateral adjustment block 17; Furthermore, a plurality of T-shaped probe rods 3 are evenly arranged in a straight line along the length direction of the mounting housing 1; Moreover, a resistance roller sleeve 18 is sleeved on one end of the resistance rod 13 , and the resistance roller sleeve 18 forms a rolling resistance with the inner wall of the inclined slide rail 12 .

[0037] During use, first insert the thimble into the interior of the cross-shaped jack 26, then push the thimble to drive the multi-sided adjustment block 17 to drive the threaded rod 15 to rotate, and make the threaded rod 15 form a threaded connection with the connecting rod 11 through the thread groove 14, and push the connecting rod 11 to move along the length direction of the installation bin 8, so that the connecting rod 11 drives the inclined slide rail 12 to form a rolling contact with the contact rod 13 through the contact roller sleeve 18, and push the contact rod 13 to drive the transmission rod 10 to move along the length direction of the transmission chute 9, and at the same time make the transmission rod 10 drive the adjustment rod 7 to move along the length direction of the adjustment chute 6, so as to facilitate driving the adjustment rod 7 to move along the length direction of the adjustment chute 6, effectively improving the practicability of the device; And by arranging a plurality of T-shaped probe rods 3 in a straight line along the length direction of the installation housing 1, the plurality of T-shaped probe rods 3 drive the probe heads 4 and the main board to be measured to move out at the same time, thereby effectively improving the bonding property between the T-shaped probe rods 3, the probe heads 4 and the main board to be measured, and strengthening the connection stability between the device and the main board to be measured.

[0038] Refer to Figure 2 - Figure 4 As shown in Fig. - and Fig., a plurality of rubber gaskets 19 are uniformly fixedly connected to the bottom of the adjustment rod 7, and the adjustment rod 7 forms a flexible contact with one end of the T-shaped probe rod 3 through the rubber gaskets 19.

[0039] During use, when the elastic return characteristic of the jacking elastic piece 5 is used to push the T-shaped probe rod 3 to move along the length direction of the telescopic bin 2 and form a contact with the top of the adjustment rod 7, the T-shaped probe rod 3 collides with the rubber gasket 19 and deforms, so that a flexible contact is formed between the T-shaped probe rod 3 and the adjustment rod 7 through the rubber gasket 19, so as to reduce the wear between the T-shaped probe rod 3 and the adjustment rod 7, and at the same time reduce the return amplitude of the jacking elastic piece 5 after being stressed, further improving the stability of the device.

[0040] Refer to Figure 1 and Figure 3 As shown in Fig. and Fig., the sealing assembly includes a plurality of sealing grooves 20 opened at the bottom of the installation housing 1 and adapted to the telescopic bin 2. An elastic sealing piece 21 is fixedly connected to the inner bottom of the sealing groove 20, and one end of the elastic sealing piece 21 is fixedly connected to the T-shaped probe rod 3.

[0041] During use, when driving the T-shaped probe rod 3 to eject the probe head 4 along the length direction of the telescopic bin 2, one end of the T-shaped probe rod 3 drives one end of the elastic sealing piece 21 to pass through the sealing groove 20 and extend to the outside of the sealing groove 20, and at the same time the elastic sealing piece 21 is stressed and undergoes tensile deformation; Then, when driving the T-shaped probe rod 3 to drive the probe 4 to retract into the interior of the telescopic chamber 2, the T-shaped probe rod 3 drives one end of the elastic sealing sheet 21 to embed into the interior of the sealing groove 20. At this time, the elastic sealing sheet 21 shrinks and deforms, so that the elastic deformation of the elastic sealing sheet 21 is used to wrap the bottom of the sealing groove 20 to reduce the risk of dust and other foreign matter entering the interior of the telescopic chamber 2 when the T-shaped probe rod 3 moves along the length direction of the telescopic chamber 2, thereby effectively improving the sealing effect of the device.

[0042] Reference Figure 1 One end of the expansion block 22 is provided with a plurality of elasticity providing holes 25 .

[0043] During use, when the driving installation shell 1 drives the probe 4 to approach the mainboard to be tested and causes the installation shell 1 to collide with the mainboard to be tested, the installation shell 1 is subjected to force to push the expansion block 22 to cooperate with the elastic providing hole 25 to produce elastic deformation, thereby providing the installation shell 1 with a flowable elastic force, reducing damage to the mainboard to be tested and improving the safety of the device.

[0044] The implementation principle of the improved probe for chip detection probe card of the present embodiment is as follows: firstly, the ejector pin is inserted into the inside of the cross plug hole 26, and then the ejector pin is pushed to push the multilateral adjustment block 17 to drive the threaded rod 15 to rotate, and the threaded rod 15 is threadedly connected with the connecting rod 11 through the thread groove 14, and the connecting rod 11 is pushed to move along the length direction of the installation bin 8, so that the connecting rod 11 drives the inclined slide rail 12 to form a rolling contact with the contact rod 13 through the contact roller sleeve 18, and the contact rod 13 is pushed to drive the transmission rod 10 to move along the length direction of the transmission slide groove 9, and at the same time, the transmission rod 10 drives the adjustment rod 7 to move along the length direction of the adjustment slide groove 6, so as to facilitate driving the adjustment rod 7 to move along the length direction of the adjustment slide groove 6; At the same time, it drives the adjusting rod 7 to push the T-shaped probe rod 3 to squeeze the lifting spring piece 5 along the length direction of the telescopic bin 2, and causes the lifting spring piece 5 to deform, and at the same time, causes the T-shaped probe rod 3 to push the probe head 4 out a certain distance along the length direction of the telescopic bin 2. Then, when the adjusting mechanism is rotated in the reverse direction to drive the adjusting rod 7 to move along the inner wall of the adjusting slide groove 6, the adjusting rod 7 releases the resistance to the T-shaped probe rod 3, and utilizes the rebound characteristics of the lifting spring piece 5 to make the lifting spring piece 5 rebound and push the T-shaped probe rod 3 to move upward along the length direction of the telescopic bin 2, and at the same time, causes the T-shaped probe rod 3 to drive one end of the probe head 4 to move closer to the mounting shell 1 along the length direction of the telescopic bin 2. Then, the T-shaped probe rod 3 is pushed to move along the length direction of the telescopic bin 2 by utilizing the rebound characteristics of the lifting spring piece 5, and while forming a conflict with the top of the adjusting rod 7, the T-shaped probe rod 3 collides with the rubber gasket 19 and is deformed, so that the rubber gasket 19 forms a flexible conflict between the T-shaped probe rod 3 and the adjusting rod 7, thereby reducing the wear between the T-shaped probe rod 3 and the adjusting rod 7, and at the same time reducing the rebound amplitude of the lifting spring piece 5 after being stressed, thereby further improving the stability of the device; At the same time, one end of the T-shaped probe rod 3 drives one end of the elastic sealing sheet 21 to pass through the sealing groove 20 and extend to the outside of the sealing groove 20, and at the same time, the elastic sealing sheet 21 is subjected to force to produce tensile deformation, and when the T-shaped probe rod 3 is driven to drive the probe 4 to retract toward the inside of the telescopic bin 2, the T-shaped probe rod 3 drives one end of the elastic sealing sheet 21 to embed into the inside of the sealing groove 20, and at this time, the elastic sealing sheet 21 is caused to produce contraction deformation, so that the elastic deformation of the elastic sealing sheet 21 is used to wrap the bottom of the sealing groove 20, effectively improving the sealing effect of the device, so as to reduce the T-shaped probe rod 3 from driving dust and other foreign matter into the telescopic bin 2 when it moves along the length direction of the telescopic bin 2; And by setting the expansion block 22 to expand the picking area of the installation shell 1, the unstable grasping of the installation shell 1 is reduced, and then the installation shell 1 is pulled to drive the extension block 23 and the buckle 24 to be inserted into the card slot of the probe card, and a fixed connection is formed between the buckle 24 and the probe card.

Claims

1. An improved probe for a chip detection probe card, comprising a mounting housing (1), characterized in that: The bottom of the installation shell (1) is provided with a plurality of telescopic bins (2), the interior of the telescopic bin (2) is slidably connected with a T-shaped probe rod (3), one end of the T-shaped probe rod (3) passes through the installation shell (1) and is fixedly connected with a probe (4), the inner bottom of the telescopic bin (2) is evenly and fixedly connected with a plurality of lifting springs (5), the plurality of lifting springs (5) are arranged in a circular shape, one end of the T-shaped probe rod (3) is installed between the plurality of lifting springs (5), the interior of the installation shell (1) is provided with an adjustment slot (6) for connecting the plurality of telescopic bins (2), the interior of the adjustment slot (6) is slidably connected with an adjustment rod (7), the adjustment rod (7) is in conflict with the top of the T-shaped probe rod (3), and the installation A mounting chamber (8) is provided inside the housing (1), a plurality of transmission slide grooves (9) are provided at the inner bottom of the mounting chamber (8), a transmission rod (10) is slidably connected inside the transmission slide groove (9), one end of the transmission rod (10) is fixedly connected to the adjustment rod (7), an extension block (22) is fixedly connected to the top of the mounting housing (1), an extension block (23) is extended from one end of the extension block (22), a buckle (24) is fixedly connected to one end of the extension block (23), an adjustment mechanism for driving the transmission rod (10) to move along the length direction of the transmission slide groove (9) is installed inside the mounting chamber (8), and a plurality of sealing components adapted to the telescopic chamber (2) are provided at the bottom of the mounting housing (1).

2. An improved probe for a chip detection probe card according to claim 1, wherein: The adjustment mechanism comprises a connecting rod (11) slidably connected to the interior of the installation bin (8); the bottom of the connecting rod (11) is fixedly connected to a plurality of inclined slide rails (12); the top of the transmission rod (10) is fixedly connected to a resistance rod (13); one end of the resistance rod (13) passes through the interior of the inclined slide rail (12); and a driving assembly for driving the connecting rod (11) to move along the length direction of the installation bin (8) is installed inside the installation bin (8).

3. An improved probe for a chip detection probe card according to claim 1, characterized in that: The drive assembly comprises a threaded groove (14) formed at one end of a connecting rod (11); a threaded rod (15) is rotatably connected to the interior of the mounting chamber (8); one end of the threaded rod (15) is threadedly connected to the connecting rod (11) via the threaded groove (14); a receiving hole (16) is formed at one end of the mounting housing (1); one end of the threaded rod (15) extends into the receiving hole (16) and is fixedly connected to a multilateral adjustment block (17); one end of the multilateral adjustment block (17) is formed with a cross socket (26).

4. An improved probe for a chip detection probe card according to claim 1, characterized in that: The plurality of T-shaped probe rods (3) are evenly arranged in a straight line along the length direction of the mounting housing (1).

5. An improved probe for a chip detection probe card according to claim 2, characterized in that: One end of the resistance rod (13) is sleeved with a resistance roller sleeve (18), and the resistance roller sleeve (18) forms a rolling resistance with the inner wall of the inclined slide rail (12).

6. The improved probe for a chip detection probe card according to claim 1, characterized in that: A plurality of rubber gaskets (19) are evenly and fixedly connected to the bottom of the adjustment rod (7), and the adjustment rod (7) forms a flexible contact with one end of the T-shaped probe rod (3) via the rubber gasket (19).

7. An improved probe for a chip detection probe card according to claim 1, characterized in that: The sealing assembly includes a plurality of sealing grooves (20) formed in the bottom of the mounting housing (1) and adapted to the telescopic bin (2), and an elastic sealing sheet (21) is fixedly connected to the inner bottom of the sealing groove (20), and one end of the elastic sealing sheet (21) is fixedly connected to the T-shaped probe rod (3).

8. An improved probe for a chip detection probe card according to claim 1, characterized in that: One end of the expansion block (22) is provided with a plurality of elastic supply holes (25).

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