A soft X-ray source device and a soft X-ray generating method

Abstract

The present invention discloses a soft X-ray source device and a method for generating soft X-rays. The soft X-ray source device includes a compact plasma ring assembly, which generates a compact plasma ring. A copper target serves as a stagnation target for the plasma ring and is used to convert the kinetic energy of the plasma ring into thermal energy and radiation energy through collision. Through energy exchange and thermal equilibrium between ions and electrons, electrons are stripped from ions, stimulating soft X-ray radiation. The soft X-ray energy is mainly derived from the kinetic energy of the plasma ring, rather than ohmic heating, fundamentally circumventing the limitation of the current rise rate. When the plasma ring impacts the stagnation target, the kinetic energy is converted into thermal pressure, triggering non-equilibrium ionization of target atoms, which dominates the soft X-ray emission. The soft X-ray yield is determined by the plasma momentum flux and has no direct correlation with the instantaneous change of the driving current. This allows the soft X-ray to be more accurately controlled and maintain a high energy, continuous and stable output.

Description

Technical Field

[0001] The present invention relates to the field of plasma physics and soft X-ray technology, and in particular to a soft X-ray source device and a soft X-ray generating method. Background Art

[0002] Soft X-rays are a type of electromagnetic radiation whose photon energy lies between ultraviolet light and hard X-rays, typically between 100 electron volts and 2 kiloelectron volts. Soft X-rays are primarily generated by high-speed electrons impacting metal targets and by plasma radiation. Soft X-rays have a lower energy, making them unable to penetrate thicker materials. They are primarily used for the detection and analysis of thinner materials or samples. Due to their limited penetrating power, soft X-rays are often used for surface or interface research. For example, soft X-rays can be used for compositional analysis and surface morphology observation of material surfaces. Soft X-rays can also be used for imaging, particularly in medicine, where they are often used for imaging soft tissues. For example, certain medical imaging techniques, such as mammography (breast X-ray examination), may use soft X-rays. The shorter wavelength of soft X-rays enables them to provide higher resolution, particularly in microstructural analysis.

[0003] In X-ray photoelectron spectroscopy (XPS), soft X-rays are important for surface analysis. XPS can be used to analyze the composition and chemical state of elements on the surface of materials. Among synchrotron radiation sources, many facilities (such as particle accelerators) are capable of producing soft X-rays, which are used for various studies in materials science, physics, chemistry, and biology. In the field of biomedical imaging, soft X-rays are also used in some medical imaging techniques, particularly in certain types of soft tissue imaging. Therefore, soft X-rays have important applications in materials analysis, medical imaging, the semiconductor industry, and other fields.

[0004] Traditional soft X-ray sources mostly rely on synchrotron radiation devices or laser plasma sources. Synchrotron radiation devices require the support of large particle accelerators, but such equipment is bulky and has high construction and maintenance costs. Laser plasma sources generally have the limitation of low repetition frequency, which makes it difficult to meet the needs of high-frequency applications. Although existing Z-pinch technology or plasma focus devices have achieved miniaturization and compactness in structure, they face the technical bottleneck of poor plasma stability. In addition, the soft X-ray output is severely restricted by the current rise rate, which further limits the continuous and stable output of soft X-rays. Summary of the Invention

[0005] The present invention provides a soft X-ray source device and a soft X-ray generating method, which can solve the problem in the prior art that the soft X-ray yield is severely restricted by the current rising rate and cannot be output continuously and stably.

[0006] A soft X-ray source device comprises: a compact plasma ring assembly, wherein the compact plasma ring assembly generates a compact plasma ring moving at high speed through the coordinated action of multiple stages;

[0007] The stages include gas injection, ionization breakdown, magnetic field confinement, and electromagnetic acceleration;

[0008] The compact plasma ring assembly is connected to a copper target vacuum chamber assembly, wherein the copper target vacuum chamber assembly includes a copper target, and the copper target serves as a stagnation target of the plasma ring, and is used to convert the kinetic energy of the plasma ring into heat energy and radiation energy through collision;

[0009] The compact plasma ring is injected into the copper target vacuum chamber assembly. When it strikes the copper target, a reverse shock wave is generated. The reverse shock wave passes through the compact plasma ring and heats the ions. Through energy exchange and thermal equilibrium between ions and electrons, the electrons are stripped from the ions, thereby stimulating soft X-ray radiation.

[0010] Preferably, the compact plasma ring assembly comprises: an inner electrode in a forming region, an inner electrode in an accelerating region, and an outer electrode, wherein inner and outer electrode insulating members are connected between the inner electrode in the forming region and the outer electrode.

[0011] Preferably, the compact plasma ring assembly includes: an electrode wiring block in the acceleration zone, the electrode in the acceleration zone includes a wiring copper circular plate, an extended copper cylinder, a compression section and an acceleration section, and the compression section cooperates with the corresponding outer electrode section to compress and accelerate the compact plasma ring.

[0012] Preferably, a solenoid coil is installed between the electrode in the forming zone and the electrode in the acceleration zone. After power is turned on, the vacuum chamber between the electrode in the forming zone and the outer electrode becomes the forming zone, and the forming zone generates a bias magnetic field for forming a spherical mark magnetic field configuration of the plasma.

[0013] Preferably, a pulse electromagnetic gas valve group is provided on the surface of the outer electrode for injecting neutral gas into the forming area according to a preset timing.

[0014] Preferably, the device further comprises a gate valve assembly and a vacuum pump assembly, wherein the vacuum pump assembly cooperates with the gate valve assembly to maintain the vacuum degree of the compact plasma ring assembly.

[0015] Preferably, the copper target vacuum chamber assembly comprises: a vacuum chamber, wherein the vacuum chamber is provided with a soft X-ray window and a conical inner electrode, and the conical inner electrode is installed at one end of the inner electrode of the acceleration zone.

[0016] Preferably, the copper target is fixed on the conical inner electrode and is located at the center of the vacuum chamber. The vacuum chamber is connected to the outer electrode to maintain a system vacuum environment.

[0017] Preferably, the soft X-ray window is provided in the vacuum chamber, and is used for guiding the soft X-rays generated in the chamber out of the vacuum environment.

[0018] A soft X-ray generation method, using the soft X-ray source device, comprising:

[0019] Neutral gas is injected into the forming area through the pulse electromagnetic gas valve group, and a high voltage of 5kV-35kV is applied to break down the neutral gas to form plasma;

[0020] The solenoid coil generates a bias magnetic field of 0.2T-1T, forming a compact plasma ring with a spherical Mark magnetic field configuration;

[0021] Apply a pulse current of 50kA-400kA to drive the plasma ring to accelerate to 100 km / s-3000 km / s;

[0022] The plasma ring is injected into the vacuum chamber and collides with the copper target to generate a reverse shock wave, which heats the ions to a temperature of 1keV-10keV. Through the energy exchange and thermal equilibrium between ions and electrons, the electrons are stripped from the ions, stimulating soft X-ray radiation.

[0023] Radiation is extracted through a soft X-ray window, and the output spectrum intensity is controlled by adjusting the pulse power supply timing and parameters.

[0024] Beneficial effects of the present invention:

[0025] (1) In the present invention, the compact plasma ring assembly generates a compact plasma ring that moves at high speed, and the stagnation target converts the kinetic energy of the plasma ring into heat energy and radiation energy through collision, so that the soft X-ray energy mainly comes from the kinetic energy of the plasma ring rather than ohmic heating, fundamentally circumventing the limitation of the current rise rate.

[0026] (2) In the present invention, the plasma ring impacts the stagnant target, and the kinetic energy is converted into thermal pressure, which triggers non-equilibrium ionization of the target atoms and dominates the emission of soft X-rays. The soft X-ray yield is determined by the plasma momentum flux and has no direct correlation with the instantaneous change of the driving current, so that the soft X-rays can be more accurately controlled and maintained at a higher energy and continuous and stable output. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic structural diagram of a soft X-ray source device provided by the present invention;

[0028] Figure 2 for Figure 1Schematic diagram of the structure of the medium compact plasma ring assembly;

[0029] Figure 3 for Figure 1 Cross-sectional view of the compact plasma ring assembly;

[0030] Figure 4 for Figure 1 Schematic diagram of the structure of the vacuum chamber assembly of the copper target;

[0031] Figure 5 for Figure 1 Cross-sectional view of the vacuum chamber assembly of the copper target;

[0032] Figure 6 It is a schematic diagram of the pulse power supply system and its working sequence;

[0033] Figure 7 The present invention provides a flow chart of a soft X-ray generation method.

[0034] Description of reference numerals:

[0035] 1. Compact plasma ring assembly; 11. Electrode in the forming zone; 12. Electrode in the accelerating zone; 13. Outer electrode; 14. Solenoid coil; 15. Pulsed electromagnetic gas valve group; 16. Electrode wiring block in the forming zone; 17. Electrode wiring block in the accelerating zone; 18. Outer electrode epitaxial wiring frame; 19. Pumping adapter; 110. Diagnostic window; 111. Support frame; 112. Insulating sleeve; 113. Inner and outer electrode insulation; 114. Inner electrode insulation; 2. Copper target vacuum chamber assembly; 21. Copper target; 22. Vacuum chamber; 23. Soft X-ray window; 24. Conical inner electrode; 3. Plug-in valve assembly; 4. Vacuum pump assembly; 5. Lifting platform. DETAILED DESCRIPTION

[0036] The specific embodiments of the present invention are described in detail below, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0037] The inventors discovered that traditional soft X-ray sources mostly rely on synchrotron radiation devices or laser plasma sources. Synchrotron radiation devices require the use of large particle accelerators, but such equipment has the problem of being bulky and having high construction and operation and maintenance costs. Laser plasma sources generally have the limitation of low repetition frequency, which makes it difficult to meet the needs of high-frequency applications. Although the existing Z-pinch technology or plasma focus device has achieved miniaturization and compactness in structure, it faces the technical bottleneck of poor plasma stability, and the soft X-ray output is severely restricted by the current rise rate, which further limits the continuous and stable output of soft X-rays.

[0038] like Figure 1As shown, an embodiment of the present invention provides a soft X-ray source device, comprising a compact plasma ring assembly 1, a copper target vacuum chamber assembly 2, a gate valve assembly 3, a vacuum pump assembly 4, and a lifting platform 5. The compact plasma ring assembly 1 is provided with a support frame 111 so that it can be firmly supported on the lifting platform 5. The compact plasma ring assembly 1 generates a compact plasma ring moving at high speed (100 km / s-3000 km / s) through the coordinated action of multiple stages (including gas injection, ionization breakdown, magnetic field confinement, and electromagnetic acceleration). The plasma ring is then injected into the copper target vacuum chamber assembly 2, causing it to collide with a stagnant target in the copper target vacuum chamber assembly 2, thereby stimulating soft X-ray radiation.

[0039] Among them, the compact plasma ring is injected into the copper target vacuum chamber assembly 2. When it hits the stagnant target, a reverse shock wave is generated. The reverse shock wave passes through the compact plasma ring and heats the ions. Through the energy exchange and thermal equilibrium between ions and electrons, the electrons are stripped from the ions, stimulating soft X-ray radiation.

[0040] Specifically, such as Figure 2-Figure 3 As shown, the compact plasma ring assembly 1 includes at least an electrode 11 in the forming region, an electrode 12 in the accelerating region, an outer electrode 13, a solenoid coil 14, a pulse electromagnetic gas valve group 15, an electrode wiring block 16 in the forming region, an electrode wiring block 17 in the accelerating region, an outer electrode epitaxial wiring frame 18, an exhaust adapter 19, a diagnostic window 110, a support frame 111, an insulating sleeve 112, inner and outer electrode insulators 113 and an inner electrode insulator 114.

[0041] In this embodiment, the inner electrode 11 and the outer electrode 13 in the forming area are electrically insulated and structurally connected by inner and outer electrode insulators 113. The two are firmly fixed by bolts inserted into the insulating sleeve 112. The outer electrode 13 adopts a segmented design and consists of at least three sections: the forming section, the compression section, and the acceleration section. The sections are connected by vacuum flanges. The vacuum degree is 10 - 6 Pa-10 -4 The inner conductor of the pulse power supply coaxial line in the forming area is connected to the electrode 11 in the forming area through the electrode connection pressing block 16 in the forming area.

[0042] The outer electrode epitaxial wiring frame 18 is installed at one end of the outer electrode 13 and is used to connect the outer copper braided mesh of the pulse power supply coaxial line, so as to realize the grounding of the end of the outer electrode 13. The outer electrode epitaxial wiring frame 18 is composed of a transfer copper circular plate, a connecting copper column, an insulating outer sleeve, a wiring copper circular plate and a copper pressure block. The transfer copper circular plate, the connecting copper column and the wiring copper circular plate form a conductive path that can carry the large pulse current generated when the system is running (the current peak is in the range of 50kA to 400kA). The insulating outer sleeve can effectively isolate the various components and prevent high-voltage sparks. The copper pressure block plays a role of pressing and fixing, ensuring that the outer copper braided mesh of the coaxial line is tightly connected to the wiring copper circular plate, thereby improving the overall reliability of the wiring frame.

[0043] The electrode 12 in the acceleration zone achieves the dual functions of structural support and electrical isolation from the electrode 11 in the forming zone through the inner electrode insulator 114. The electrode 12 in the acceleration zone is composed of a wiring copper circular plate, an extended copper cylinder, a compression section, and an acceleration section. The inner conductor of the acceleration zone pulse power supply coaxial line is connected to the electrode 12 in the acceleration zone through the acceleration zone electrode wiring clamp 17. The compression section and the corresponding outer electrode section achieve efficient compression of the compact plasma ring. The acceleration section and the corresponding outer electrode section achieve acceleration of the compact plasma ring, with an exit velocity in the range of 100 km / s to 3000 km / s, thereby meeting the kinetic energy requirements generated by soft X-ray radiation.

[0044] In the compact plasma ring assembly 1, the solenoid coil 14 is installed between the electrode 11 in the forming zone and the electrode 12 in the accelerating zone. After power is turned on, the vacuum chamber between the electrode 11 in the forming zone and the outer electrode 13 is the forming zone. The forming zone will generate a stable bias magnetic field (the maximum magnetic field is in the range of 0.2T-1T) to form the spherical mark magnetic field configuration of the plasma.

[0045] In addition, several pulse electromagnetic gas valve assemblies 15 are positioned on the surface of the outer electrode 13. These assemblies 15 consist of multiple (2, 4, 8, 16, or 32) pulse electromagnetic gas injection valves arranged angularly and evenly to form a gas inlet array. These assemblies are used to rapidly inject large quantities of working gas into the forming area according to a preset timing sequence. Neutral gases include, but are not limited to, hydrogen, deuterium, helium, nitrogen, and argon. These neutral gases rapidly ionize and break down under the action of a strong electric field (voltage range of 5kV-35kV), thereby forming a plasma.

[0046] Diagnostic windows 110 are provided on the surface of the outer electrode 13, primarily consisting of vertical and horizontal windows. These windows are used to mount various plasma diagnostic instruments, such as Mirnov magnetic probes, electrostatic probes, laser interferometers, impurity spectrometers, and photodetectors. These allow for real-time monitoring of the evolution of the plasma magnetic field, electron density, electron temperature, chord-averaged electron density, impurity line radiation intensity, and radiation intensity within the device.

[0047] like Figure 1-Figure 2 As shown, the compact plasma ring assembly 1 is connected to the plug valve assembly 3 and the vacuum pump assembly 4 through the exhaust adapter 19. The vacuum pump assembly 4 is used to vacuum the compact plasma ring assembly 1 to a vacuum degree of 10 -6 Pa-10 -4 Pa range. The plug valve assembly 3 controls the opening and closing of the exhaust port, and the vacuum pump assembly 4 is the core equipment for the system vacuum protection. Through the cooperation of the mechanical pump and the molecular pump multi-stage pump body, the whole system is continuously and efficiently exhausted to maintain the vacuum degree required by each component. The vacuum degree is within 10 -6 -10 -4 Pa range.

[0048] like Figure 1 、 Figure 4-Figure 5 As shown, the compact plasma ring assembly 1 is connected to a copper target vacuum chamber assembly 2, which is positioned at the exit of the compact plasma ring assembly 1. The copper target vacuum chamber assembly 2 includes at least a copper target 21, a vacuum chamber 22, a soft X-ray window 23, and a conical inner electrode 24. The copper target vacuum chamber assembly 2 is used to guide the compact plasma ring into the assembly, causing it to collide with the copper target 21, thereby radiating soft X-rays. The copper target 21 acts as a stagnation target for the plasma ring, converting the kinetic energy of the plasma ring into heat and radiation energy through collision.

[0049] The conical inner electrode 24 is mounted on one end of the accelerating region inner electrode 12. The copper target 21 is fixed on the conical inner electrode 24 and is located in the center of the vacuum chamber 22. The vacuum chamber 22 is connected to the outer electrode 13 and the vacuum degree is maintained at 10 -6 Pa to 10 -4 The soft X-ray window 23 is provided on the vacuum chamber 22 to effectively guide the soft X-rays generated in the chamber out of the vacuum environment.

[0050] like Figure 6 As shown, in this embodiment, power is supplied to the solenoid coil 14, the pulse electromagnetic valve group 15, the electrode 11 in the forming zone, the electrode 12 in the acceleration zone, and the outer electrode 13 respectively. The pulse power supply of the solenoid coil 14 generates current (the current peak value is in the range of 10A-500A) to drive the solenoid coil 14 to generate a bias magnetic field (the magnetic field peak value is in the range of 0.2T-1T). The pulse power supply of the pulse electromagnetic valve group 15 generates current (the current peak value is in the range of 1A-20A) to cause the valve piston to open and realize the intake operation (the intake particle number is within 10 19 -10 21The pulse power supply in the forming zone applies high voltage (voltage range of 5kV-35kV), breaking down the neutral gas to generate plasma. The pulse power supply in the acceleration zone outputs high current (current peak range of 50kA-400kA), further accelerating the plasma.

[0051] All four sets of pulse power supplies require a control system to complete voltage parameter settings and timing settings, and operate in sequence according to a specific timing. The pulse power supply trigger time of the solenoid coil 14 is 0ms, and the pulse width is in the range of 50μs to 1ms. The pulse power supply trigger time of the pulse electromagnetic valve group 15 is 6ms, and the pulse width is in the range of 50μs to 500μs. The pulse power supply trigger time of the forming zone is delayed in the range of 50μs-500μs relative to the pulse power supply trigger time of the pulse electromagnetic valve group 15, and the pulse width is in the range of 50μs-500μs. The pulse power supply trigger time of the acceleration zone is delayed in the range of 1μs-50μs relative to the pulse power supply trigger time of the forming zone, and the pulse width is in the range of 50μs-500μs.

[0052] All four pulse power supplies utilize pulse power technology, charging the pulse capacitor via a charger and then discharging it to the load via a pulse switch. The solenoid coil 14 has a capacitance value between 100μF and 500μF, an operating voltage between 0-2kV, and a pulse thyristor as the switch. The pulse solenoid valve assembly 15 has a capacitance value between 100μF and 500μF, an operating voltage between 0-2kV, and a pulse thyristor as the switch. The forming zone has a capacitance value between 20μF and 200μF, an operating voltage between 5kV and 60kV, and an igniter, pulse thyristor, or thyratron as the switch. The acceleration zone has a capacitance value between 20μF and 1mF, an operating voltage between 5kV and 120kV, and an igniter, pulse thyristor, or thyratron as the switch.

[0053] The soft X-ray source device provides key technical support for high-speed controllable acceleration and on-demand energy release of the plasma ring, and is the core enabling component for the present invention to achieve an efficient, compact, and tunable soft X-ray source.

[0054] In this application, a compact plasma ring with high-speed motion is generated by a compact plasma ring assembly 1, which is then injected into a copper target vacuum chamber assembly 2, where it collides with the copper target 21 and generates an energy release process, thereby stimulating soft X-ray radiation. By precisely controlling the motion speed and energy release process of the compact plasma ring, precise control and high-energy output of soft X-rays can be achieved. The photon energy of the soft X-rays has characteristics of the order of magnitude of the electron temperature. This generation process has high efficiency, and its efficiency is closely related to the parameters of the compact plasma ring, including density, speed, size and ion species.

[0055] The inventors discovered that in the existing technology, the X-ray yield of the laser plasma device directly depends on the current rise rate. Rapid current changes trigger magnetic fluid instabilities (such as sausage mode and twist mode), resulting in energy dissipation and reduced yield, which has become a bottleneck of traditional technology.

[0056] This invention overcomes this technical bottleneck. The decoupling of soft X-ray yield (photon flux) from the current rise rate stems from a unique design of the energy conversion pathway and plasma dynamics. The soft X-ray energy originates primarily from the kinetic energy of the plasma ring, rather than ohmic heating, fundamentally circumventing the current rise rate limitation. Furthermore, the plasma ring strikes the stagnant target at velocities ranging from 100 km / s to 3000 km / s. The kinetic energy is directly converted into thermal pressure, triggering non-equilibrium ionization of target atoms, which dominates the soft X-ray emission. Consequently, the soft X-ray yield is determined by the plasma momentum flux, independent of instantaneous changes in the drive current. This allows for more precise control and sustained, high-energy soft X-ray output.

[0057] Compared with traditional plasma drive and X-ray generation technologies, this invention overcomes the technical bottleneck of poor plasma stability through multi-stage electromagnetic drive, a dynamic collision balance mechanism (energy exchange and thermalization balance between ions and electrons), and a compact design. The synergy between pre-acceleration in the compression stage and high voltage in the acceleration stage reduces energy dissipation and achieves multi-stage energy coupling. The dynamic collision balance mechanism, combining reverse shock heating with Coulomb collisions (the process by which electrons and ions in the plasma exchange energy and momentum), achieves a directional conversion of kinetic energy to thermal energy. Furthermore, the plasma ring is accelerated by magnetic field confinement, preventing direct discharge and ablation of the electrodes.

[0058] The pulse interval can be shortened by controlling the timing. The pulse power supply system is integrated with the solenoid coil 14 to reduce energy transmission loss.

[0059] Compared with laser drive, the present invention eliminates the need for lenses and reflectors, and its volume, construction and operation and maintenance costs are smaller than those of synchrotron radiation devices, thereby reducing equipment costs.

[0060] like Figure 7 As shown, the present invention provides a soft X-ray generation method using a soft X-ray source device, the soft X-ray generation method comprising:

[0061] S1. Neutral gas is injected into the forming area through the pulse electromagnetic gas valve group 15, and a high voltage of 5kV-35kV is applied to break down the neutral gas to form plasma.

[0062] The plasma density can be controlled in stages through multi-stage compression design, which can extend the energy release time.

[0063] S2, the solenoid coil 14 generates a bias magnetic field of 0.2T-1T, forming a compact plasma ring with a spherical Mark magnetic field configuration.

[0064] S3. The pulse power supply in the acceleration zone applies a pulse current of 50kA-400kA to drive the plasma ring to accelerate to 100km / s-3000km / s.

[0065] S4. Inject the plasma ring into the vacuum chamber 22, collide with the copper target 21 to generate a reverse shock wave, heat the ions to a temperature of 1keV-10keV, and through energy exchange and thermal equilibrium between ions and electrons, cause the electrons to be stripped from the ions, thereby stimulating soft X-ray radiation.

[0066] S5. The radiation is extracted through the soft X-ray window 23, and the output spectrum intensity is controlled by adjusting the pulse power supply timing and parameters.

[0067] In the present invention, precise control of the energy spectrum can be achieved by adjusting the plasma speed (100 km / s-3000 km / s) and the atomic number of the target material.

[0068] The above disclosures are only a few specific embodiments of the present invention. However, the embodiments of the present invention are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the scope of protection of the present invention.

Claims

1. A soft X-ray source device, characterized in that: include: A compact plasma ring assembly (1), wherein the compact plasma ring assembly (1) generates a compact plasma ring with high-speed motion through the coordinated action of multiple stages; The stages include gas injection, ionization breakdown, magnetic field confinement, and electromagnetic acceleration; The compact plasma ring assembly (1) is connected to a copper target vacuum chamber assembly (2), wherein the copper target vacuum chamber assembly (2) comprises a copper target (21), and the copper target (21) serves as a stagnation target of the plasma ring and is used to convert the kinetic energy of the plasma ring into heat energy and radiation energy through collision; The compact plasma ring is injected into the copper target vacuum chamber assembly (2), and in the process of colliding with the copper target (21), a reverse shock wave is generated. The reverse shock wave passes through the compact plasma ring and heats the ions. Through the energy exchange and thermal equilibrium between the ions and the electrons, the electrons are stripped from the ions, thereby stimulating soft X-ray radiation.

2. The soft X-ray source device according to claim 1, characterized in that: The compact plasma ring assembly (1) comprises: an electrode in a forming region (11), an electrode in an accelerating region (12), and an outer electrode (13); an inner and outer electrode insulating member (113) is connected between the electrode in the forming region (11) and the outer electrode (13).

3. The soft X-ray source device according to claim 2, characterized in that: The compact plasma ring assembly (1) comprises: an electrode wiring block (17) in an acceleration region; the electrode (12) in the acceleration region comprises a wiring copper circular plate, an extended copper cylinder, a compression section and an acceleration section; the compression section cooperates with a corresponding outer electrode section to compress and accelerate the compact plasma ring.

4. The soft X-ray source device according to claim 2, wherein: A solenoid coil (14) is installed between the electrode (11) in the forming zone and the electrode (12) in the accelerating zone. After power is turned on, the vacuum chamber between the electrode (11) in the forming zone and the outer electrode (13) becomes a forming zone, and the forming zone generates a bias magnetic field for forming a spherical magnetic field configuration of the plasma.

5. The soft X-ray source device according to claim 4, characterized in that: A pulse electromagnetic gas valve group (15) is provided on the surface of the outer electrode (13) for injecting neutral gas into the forming area according to a preset time sequence.

6. The soft X-ray source device according to claim 1, characterized in that: It also includes a gate valve assembly (3) and a vacuum pump assembly (4), wherein the vacuum pump assembly (4) cooperates with the gate valve assembly (3) to maintain the vacuum degree of the compact plasma ring assembly (1).

7. The soft X-ray source device according to claim 2, characterized in that: The copper target vacuum chamber assembly (2) comprises a vacuum chamber (22), wherein the vacuum chamber (22) is provided with a soft X-ray window (23) and a conical inner electrode (24), and the conical inner electrode (24) is mounted on one end of the acceleration zone inner electrode (12).

8. The soft X-ray source device according to claim 7, characterized in that: The copper target (21) is fixed on the conical inner electrode (24) and is located at the center of the vacuum chamber (22). The vacuum chamber (22) is connected to the outer electrode (13) to maintain a system vacuum environment.

9. The soft X-ray source device according to claim 7, characterized in that: The soft X-ray window (23) is arranged in the vacuum chamber (22) and is used to guide the soft X-rays generated in the chamber out of the vacuum environment.

10. A method for generating soft X-rays, using the soft X-ray source device according to any one of claims 1 to 9, characterized in that: include: Injecting neutral gas into the forming area through a pulse electromagnetic gas valve group (15), and applying a high voltage of 5kV-35kV to break down the neutral gas to form plasma; The solenoid coil (14) generates a bias magnetic field of 0.2T-1T, forming a compact plasma ring with a spherical Mark magnetic field configuration; Apply a pulse current of 50kA-400kA to drive the plasma ring to accelerate to 100 km / s-3000 km / s; Injecting the plasma ring into a vacuum chamber (22) and colliding with a copper target (21) to generate a reverse shock wave, heating the ions to a temperature of 1keV-10keV, and stripping the electrons from the ions through energy exchange and thermal equilibrium between the ions and electrons, thereby stimulating soft X-ray radiation; Radiation is extracted through a soft X-ray window (23), and the output spectrum intensity is controlled by adjusting the pulse power supply timing and parameters.

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