Measurement system, control device, measurement method, and program

Abstract

The present invention suppresses the influence of interference between two spindles in a synchronous drive system. A measurement system (1) is provided with a command unit (10), a first acquisition unit (11), a second acquisition unit (12), and a calculation unit (14). The command unit (10) provides the same position command to the first control unit (31) and the second control unit (32), and causes the first control unit (31) and the second control unit (32) to control the first motor (M1) and the second motor (M2) so as to perform a test operation in which the first main axis (Y1) and the second main axis (Y2) move synchronously to a specified position. A first acquisition unit (11) acquires first information relating to a first force applied to a first main axis (Y1) and a second force applied to a second main axis (Y2) during a test operation. The second acquisition unit (12) acquires second information relating to the positions of the first motor (M1) and the second motor (M2) during the test operation. The calculation unit (14) calculates, on the basis of the first information and the second information, a position correction amount for the first motor (M1) or the second motor (M2) so as to correct a position offset between the first main axis (Y1) and the second main axis (Y2).

Description

Technical Field

[0001] The present disclosure generally relates to a measurement system, a control device, a measurement method, and a program. More specifically, the present disclosure relates to a measurement system, a control device for a synchronous drive system, a measurement method, and a program for measuring a position correction amount applied to a synchronous drive system that synchronously drives two parallel main shafts. Background Art

[0002] In Patent Document 1, a position control system is disclosed. The position control system includes a general-purpose personal computer (PC), an X-axis servo amplifier, a Y1-axis servo amplifier, and a Y2-axis servo amplifier. The Y2-axis servo amplifier controls the drive of the Y2-axis linear motor based on a Y-axis position command input from the general PC. The Y2-axis servo amplifier includes a correction value table storage unit that stores an inter-axis correction value corresponding to each given value of the Y-axis position command. The Y2-axis servo amplifier obtains an inter-axis correction value corresponding to the input Y-axis position command from the correction value table storage unit, and controls the drive of the Y2-axis linear motor based on a Y2-axis corrected position command obtained by adding or subtracting the inter-axis correction value from the input Y-axis position command.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2017-41075 Summary of the Invention

[0006] In the position control system described in Patent Document 1, in order to perform position correction between the Y1 axis and the Y2 axis, a correction value is obtained based on the positions (deviations) of the Y1 axis and the Y2 axis. However, in the correction based on the position deviation, it may not be possible to suppress the influence that may be caused by the interference between the Y1 axis (the first main shaft) and the Y2 axis (the second main shaft) (for example, device deterioration caused by shaft torsion, etc.).

[0007] In view of the above reasons, the present disclosure has been completed, and an object thereof is to provide a measurement system, a control device, a measurement method, and a program capable of suppressing the influence that may be caused by the interference between axes.

[0008] One aspect of the present disclosure relates to a measurement system applied to the determination of a position correction amount for a synchronous drive system. The synchronous drive system includes a first main shaft, a second main shaft, a first control unit, and a second control unit. The first main shaft and the second main shaft are connected to each other in parallel via a sub-shaft. The first main shaft and the second main shaft each have a first motor and a second motor. The first control unit and the second control unit respectively control the first motor and the second motor so that the first main shaft and the second main shaft move synchronously in the axial direction. The measurement system includes a command unit, a first acquisition unit, a second acquisition unit, and a calculation unit. The command unit provides the same position command to the first control unit and the second control unit, and causes the first control unit and the second control unit to execute the control of the first motor and the second motor so as to perform a test operation in which the first main shaft and the second main shaft move synchronously to a specified position. The first acquisition unit acquires first information related to a first force applied to the first main shaft and a second force applied to the second main shaft during the test operation. The second acquisition unit acquires second information related to the positions of the first motor and the second motor during the test operation. The calculation unit calculates the position correction amount of at least one of the first motor and the second motor based on the first information and the second information so as to correct the position offset between the first main shaft and the second main shaft.

[0009] Another aspect of the present disclosure relates to a control device including any one of the first control unit and the second control unit to which the position command is input from the above measurement system. The control unit executes the control of the corresponding motor among the first motor and the second motor based on the position command so as to perform the test operation in which the corresponding main shaft among the first main shaft and the second main shaft moves to the specified position. The control device further includes a first output unit and a second output unit. The first output unit outputs the first information related to the force applied to the main shaft during the test operation. The second output unit outputs the second information related to the position of the motor during the test operation.

[0010] Another aspect of the present disclosure relates to a control device including any one of the first control unit and the second control unit to which the position command is input from the above measurement system. The control device has at least a part of the functions related to the command unit, the first acquisition unit, the second acquisition unit, and the calculation unit in the above measurement system.

[0011] Another aspect of the present disclosure relates to a control device including either the first control unit or the second control unit that receives the position command from the measurement system described above. The control device further includes a storage unit that stores correction information including the position correction amount calculated by the calculation unit. In the test operation or normal operation, the control unit controls the corresponding motor among the first motor and the second motor based on the correction information stored in the storage unit.

[0012] Another aspect of the present disclosure relates to a measurement method for measuring a position correction amount applied to a synchronous drive system. The synchronous drive system includes a first main shaft, a second main shaft, a first control unit, and a second control unit. The first main shaft and the second main shaft are connected in parallel to each other via a sub-shaft. The first main shaft and the second main shaft each have a first motor and a second motor. The first control unit and the second control unit respectively control the first motor and the second motor so that the first main shaft and the second main shaft move synchronously in the axial direction. The measurement method includes an instruction processing step, a first acquisition processing step, a second acquisition processing step, and a calculation processing step. In the instruction processing step, the same position command is provided to the first control unit and the second control unit, and the first control unit and the second control unit execute control of the first motor and the second motor so that a test operation is performed in which the first main shaft and the second main shaft move synchronously to a specified position. In the first acquisition processing step, first information related to a first force applied to the first main shaft and a second force applied to the second main shaft during the test operation is acquired. In the second acquisition processing step, second information related to the positions of the first motor and the second motor during the test operation is acquired. In the calculation processing step, based on the first information and the second information, the position correction amount of at least one of the first motor and the second motor is calculated so as to correct the position deviation between the first main shaft and the second main shaft.

[0013] Another aspect of the present disclosure relates to a program for causing one or more processors to execute the measurement method described above.

[0014] According to the measurement system, control device, measurement method, and program of the present disclosure, there is an advantage that it is possible to suppress the influence that may be caused by the interference between the shafts. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic structural block diagram of a measurement system according to an embodiment and a synchronous drive system to which the measurement system is applied.

[0016] Figure 2 It is a schematic diagram of the synchronous drive system and the peripheral structure as described above.

[0017] Figure 3 It is a flowchart for explaining the operations related to the correction amount measurement process in the measurement system as described above.

[0018] Figure 4 It is a flowchart for explaining the operations related to the correction amount optimization process in the measurement system as described above.

[0019] Figure 5 It is a schematic block diagram for explaining the schematic structure of Variation 1 in the measurement system as described above.

[0020] Figure 6 It is a schematic block diagram for explaining the schematic structure of Variation 2 in the measurement system as described above.

[0021] Figure 7 It is a schematic block diagram for explaining the schematic structure of Variation 3 in the measurement system as described above.

[0022] Figure 8 It is a flowchart for explaining the operations related to the acquisition of the correction coefficient in Variation 4 of the measurement system as described above.

[0023] Figure 9 It is a conceptual diagram of the correction value confirmation screen in Variation 4 as described above.

[0024] Figure 10 It is a conceptual diagram of the operation screen in Variation 4 as described above.

[0025] Figure 11 It is a conceptual diagram of the parameter setting screen in Variation 4 as described above.

[0026] Figure 12 It is a conceptual diagram of the correction value confirmation screen in Variation 4 as described above.

[0027] Figure 13 It is a conceptual diagram of the thrust difference confirmation screen in Variation 4 as described above.

[0028] Figure 14 It is a conceptual diagram of the thrust difference confirmation screen in Variation 4 as described above.

[0029] Figure 15 It is a conceptual diagram of the thrust difference confirmation screen in Variation 4 as described above.

[0030] Figure 16 It is a conceptual diagram of the correction value confirmation screen in Variation 4 as described above.

[0031] Figure 17It is a conceptual diagram of a screen for explaining the first function (unit conversion function) of the fifth modification in the measurement system as described above.

[0032] Figure 18 It is a conceptual diagram of a screen for explaining the first function as described above.

[0033] Figure 19A It is a conceptual diagram of a screen for explaining the second function (transformation function into a graphical form) of the fifth modification as described above.

[0034] Figure 19B It is a conceptual diagram of a screen for explaining the second function (transformation function into a graphical form) of the fifth modification as described above.

[0035] Figure 20 It is a conceptual diagram of a screen for explaining the third function (date information association function) of the fifth modification as described above.

[0036] Figure 21A It is a conceptual diagram of a screen for explaining the fourth function (transformation function into a chart form) of the fifth modification as described above.

[0037] Figure 21B It is a conceptual diagram of a screen for explaining the fourth function (transformation function into a chart form) of the fifth modification as described above.

[0038] Figure 22A It is a conceptual diagram of a screen for explaining the fifth function (transformation function into a histogram form) of the fifth modification as described above.

[0039] Figure 22B It is a conceptual diagram of a screen for explaining the fifth function (transformation function into a histogram form) of the fifth modification as described above.

[0040] Figure 23 It is a conceptual diagram of a screen for explaining the sixth function (comparative display function of past data) of the fifth modification as described above.

[0041] Figure 24A It is a conceptual diagram of a screen for explaining the seventh function (comparative display function of past data in another display form) of the fifth modification as described above.

[0042] Figure 24B It is a conceptual diagram of a screen for explaining the seventh function (comparative display function of past data in another display form) of the fifth modification as described above. Detailed implementation

[0043] (Summary)

[0044] Hereinafter, a measurement system, a control device, a measurement method, and a program according to an embodiment and a modified example will be described with reference to the drawings. In addition, the following embodiments and modified examples are merely one of various embodiments of the present disclosure. Furthermore, the following embodiments and modified examples can be variously changed according to design and the like as long as the object of the present disclosure can be achieved. In addition, the structures of the modified examples can be appropriately combined.

[0045] Each drawing described in the following embodiments and modified examples is a schematic diagram, and the ratio of the size and thickness of each component does not necessarily reflect the actual size ratio.

[0046] Figure 1 It is a schematic structural block diagram of a measurement system 1 according to an embodiment and a synchronous drive system 2 to which the measurement system 1 is applied. Figure 2 It is a schematic diagram of a synchronous drive system 2 and its peripheral structure. The measurement system 1 according to one embodiment (refer to Figure 1 ) measures the position correction amount applied to the synchronous drive system 2 (refer to Figure 2 ). Hereinafter, as Figure 2 shown, it is assumed that the synchronous drive system 2 is a synchronous drive device (system) having a so-called rack mechanism. The Y1 axis, Y2 axis, and X axis in the rack mechanism respectively correspond to the first main shaft Y1, the second main shaft Y2, and the sub-shaft X1 in the present disclosure (refer to Figure 2 ). However, the synchronous drive system 2 may also be a multi-axis synchronous drive device (system) having a mechanism other than the rack mechanism.

[0047] The synchronous drive system 2 includes a first main shaft Y1, a second main shaft Y2, a first control unit 31, and a second control unit 32. The first main shaft Y1 and the second main shaft Y2 are connected in parallel to each other via a sub-shaft X1 (refer to Figure 2 ). The first main shaft Y1 and the second main shaft Y2 respectively have a first motor M1 and a second motor M2. The first control unit 31 and the second control unit 32 respectively control the first motor M1 and the second motor M2 so that the first main shaft Y1 and the second main shaft Y2 move synchronously in the axial direction D1 (refer to Figure 2 ). In the following embodiment, the first control unit 31 is provided in a first main shaft servo amplifier B1 (control device C1) that drives and controls the first motor M1 of the first main shaft Y1. In addition, the second control unit 32 is provided in a second main shaft servo amplifier B2 (control device C1) that drives and controls the second motor M2 of the second main shaft Y2.

[0048] Hereinafter, it is assumed that the first motor M1 and the second motor M2 are linear servo motors respectively. However, the first motor M1 and the second motor M2 are not limited to linear servo motors, and may also be rotary servo motors. In this case, for example, each of the first main shaft Y1 and the second main shaft Y2 may have a rotary servo motor and a ball screw mechanism or the like that converts the rotary motion transmitted from the output shaft of the rotary servo motor into a linear motion.

[0049] As an example, the synchronous drive system 2 is a three-axis drive device. As Figure 2 shown, the synchronous drive system 2 further includes a sub-shaft X1 corresponding to the X axis and a control device (sub-shaft servo amplifier B3) for controlling the sub-shaft X1, and is capable of driving and controlling the head Z1 provided on the sub-shaft X1 along the X axis. The synchronous drive system 2 may further include a motor and a control device for moving the head Z1 in the Z-axis direction. The head Z1 may be a robotic arm, and the synchronous drive system 2 may further include a control device for controlling the robotic arm.

[0050] The synchronous drive system 2 can be applied to an installation machine for semiconductor components, a processing machine for components, or a conveyor for finished products or semi-finished products in facilities such as factories. For example, the synchronous drive system 2 can use the head Z1 (robotic arm) of the sub-shaft X1 to pick up an object (workpiece), and drive and control the sub-shaft X1, the first main shaft Y1, and the second main shaft Y2 to move the workpiece in at least one of the directions of the X axis and the Y axis (referred to as the axial direction D1). Figure 2 For example, the synchronous drive system 2 can use the head Z1 (robotic arm) of the sub-shaft X1 to pick up an object (workpiece), and drive and control the sub-shaft X1, the first main shaft Y1, and the second main shaft Y2 to move the workpiece in at least one of the directions of the X axis and the Y axis (referred to as the axial direction D1).

[0051] In addition, it is assumed that when an operator newly installs or relocates the synchronous drive system 2 in a facility such as a factory, the operator performs operations of assembling various devices of the synchronous drive system 2. At this time, even if the operator wants to assemble the first main shaft Y1 and the second main shaft Y2 to be parallel to each other, a slight positional deviation may occur between the first main shaft Y1 and the second main shaft Y2. In addition, due to the aging deterioration of the synchronous drive system 2, a positional deviation may also occur between the first main shaft Y1 and the second main shaft Y2. However, such an inter-axis positional deviation may cause a decrease in positional accuracy in the synchronous drive control of the first main shaft Y1 and the second main shaft Y2. For example, in the installation process of semiconductor components or the like, due to the decrease in positional accuracy, it may be impossible to install the semiconductor components at the correct installation position. And such a positional deviation may also cause effects that may occur due to the interference between the first main shaft Y1 and the second main shaft Y2 (for example, device deterioration caused by torsion of the first main shaft Y1, the second main shaft Y2, or the sub-shaft X1).

[0052] Therefore, the measurement system 1 has the following structure, enabling the synchronous drive system 2 to perform a test operation to measure the position correction amount. During normal operation, the synchronous drive system 2 uses the position correction amount measured by the measurement system 1 to correct the position of at least one of the first motor M1 and the second motor M2, thereby canceling the position offset between the first main shaft Y1 and the second main shaft Y2.

[0053] Specifically, as Figure 1 shown, the measurement system 1 includes a command unit 10, a first acquisition unit 11, a second acquisition unit 12, and a calculation unit 14.

[0054] The command unit 10 provides the same position command to the first control unit 31 and the second control unit 32, causing the first control unit 31 and the second control unit 32 to control the first motor M1 and the second motor M2 so as to perform a test operation in which the first main shaft Y1 and the second main shaft Y2 move synchronously to a specified position. In the embodiments described later, it is assumed that the function of the command unit 10 is provided in the terminal 7. However, as also described in the modified examples later, the function of the command unit 10 can be provided in a device other than the terminal 7.

[0055] The first acquisition unit 11 acquires first information related to the first force applied to the first main shaft Y1 and the second force applied to the second main shaft Y2 during the test operation. The second acquisition unit 12 acquires second information related to the positions of the first motor M1 and the second motor M2 during the test operation. The calculation unit 14 calculates the position correction amount of at least one of the first motor M1 and the second motor M2 based on the first information and the second information so as to correct the position offset between the first main shaft Y1 and the second main shaft Y2. In the embodiments described later, it is assumed that the functions of the first acquisition unit 11, the second acquisition unit 12, and the calculation unit 14 are provided in the first main shaft servo amplifier B1 (control device C1) and the second main shaft servo amplifier B2 (control device C1) respectively. However, as also described in the modified examples later, at least a part of these functions can be provided in a device other than the control device C1. In addition, these functions can also be provided only in either the first main shaft servo amplifier B1 or the second main shaft servo amplifier B2. Further, even if these functions are provided in both the first main shaft servo amplifier B1 and the second main shaft servo amplifier B2, in any one of the main shaft servo amplifiers, a part or all of these functions can be utilized.

[0056] Based on the above measurement system 1, the position correction amount applied to the synchronous drive system 2 is calculated based on the first information related to the first force applied to the first main shaft Y1 and the second force applied to the second main shaft Y2, and the second information. Therefore, different from the position control system of Patent Document 1 that calculates the correction value based on the position deviation between the Y1 axis and the Y2 axis, not only from the perspective of improving the accuracy of drive control, but also for example, it is possible to suppress the influence that may be caused by the interference between the shafts (between the Y1 axis and the Y2 axis) such as device deterioration caused by shaft torsion. In addition, as will be described later, for the sake of convenience of explanation, it is assumed that the first force and the second force are thrust forces along the Y axis, but in addition to the thrust force, it can also include a force (torque) around the Y axis.

[0057] In addition, a measurement method according to one aspect is used to measure the position correction amount applied to the above-mentioned synchronous drive system 2. The measurement method includes an instruction processing step, a first acquisition processing step, a second acquisition processing step, and a calculation processing step. In the instruction processing step, the same position instruction is provided to the first control unit 31 and the second control unit 32, and the first control unit 31 and the second control unit 32 are made to execute the control of the first motor M1 and the second motor M2 so as to perform a test operation in which the first main shaft Y1 and the second main shaft Y2 move synchronously to a specified position. In the first acquisition processing step, the first information related to the first force applied to the first main shaft Y1 and the second force applied to the second main shaft Y2 during the test operation is acquired. In the second acquisition processing step, the second information related to the positions of the first motor M1 and the second motor M2 during the test operation is acquired. In the calculation processing step, based on the first information and the second information, the position correction amount of at least one of the first motor M1 and the second motor M2 is calculated so as to correct the position offset between the first main shaft Y1 and the second main shaft Y2. In the above measurement method, there is an advantage that it is possible to suppress the influence that may be caused by the interference between the shafts (between the Y1 axis and the Y2 axis).

[0058] This measurement method is used on a computer system (measurement system 1). That is to say, this measurement method can also be implemented by a computer program. The program according to one aspect is a program for causing one or more processors to execute the above measurement method. The program can also be recorded on a computer-readable non-transitory recording medium.

[0059] (Details)

[0060] (1) Overall Structure

[0061] Hereinafter, for the measurement system 1, the synchronous drive system 2, and the overall system including its peripheral structure according to the present embodiment, reference is made to Figure 1 and Figure 2 to explain in detail.

[0062] The measurement system 1 is configured to measure the position correction amount applied to the synchronous drive system 2. In the present embodiment, a plurality of functions of the measurement system 1 are dispersedly provided in the first main spindle servo amplifier B1 (control device C1), the second main spindle servo amplifier B2 (control device C1), and the terminal 7. In addition, the so-called peripheral structure, if illustrated by a Figure 2 figure example, is the upper controller 6. The upper controller 6 may also be treated as a structure of the synchronous drive system 2.

[0063] In the present disclosure, the operation of the synchronous drive system 2 and the like related to the measurement of the position correction amount according to the position command from the measurement system 1 is sometimes referred to as "test operation". In addition, the operation of the synchronous drive system 2 and the like related to the normal operation of the processing of the object (workpiece) using the position correction amount obtained by the measurement of the measurement system 1 is sometimes referred to as "normal operation action".

[0064] It is assumed that the test operation can be executed after the assembly operation of various devices of the synchronous drive system 2 when the synchronous drive system 2 is newly introduced or relocated in a factory or other facility. In addition, it is assumed that the test operation can be executed during the regular maintenance of the synchronous drive system 2, after a certain malfunction occurs in the synchronous drive system 2 and confirmation and recovery operations are performed, or after the replacement of devices / components in the synchronous drive system 2.

[0065] (2) Synchronous drive system

[0066] The synchronous drive system 2 includes a first main spindle Y1, a second main spindle Y2, a sub-spindle X1, a head Z1, a first main spindle servo amplifier B1 (control device C1), a second main spindle servo amplifier B2 (control device C1), and a sub-spindle servo amplifier B3. Hereinafter, for the sake of convenience, the first main spindle servo amplifier B1 may also be simply referred to as "the first amplifier B1", and the second main spindle servo amplifier B2 may be simply referred to as "the second amplifier B2".

[0067] The first main spindle Y1 and the second main spindle Y2 are connected to each other in parallel along the axial direction D1 via the sub-spindle X1. The sub-spindle X1 connects the first main spindle Y1 and the second main spindle Y2 so as to be orthogonal to each of the first main spindle Y1 and the second main spindle Y2.

[0068] The first main spindle Y1 has a first motor M1 (linear servo motor), a position detection unit 81 (linear scale), a thrust detection unit 82, and a vibration detection unit 83. In addition, the thrust detection unit 82 of the first main spindle Y1 is not an essential structure and can be appropriately omitted. In addition to this, the first main spindle Y1 may further have a speed sensor for detecting the speed of the first motor M1 and a thrust sensor for detecting the thrust of the first motor M1, etc.

[0069] In the present embodiment, as an example, the first motor M1 and the load driven by the power of the first motor M1 are defined as the drive system A1. The load can include the sub-shaft X1, the connecting portion connecting the sub-shaft X1 and the first motor M1, and the head Z1, etc.

[0070] Hereinafter, the drive system A1 on the first main shaft Y1 side is sometimes referred to as the first drive system A11. When the first motor M1 is a rotary servo motor and is connected to a ball screw mechanism, the rotary servo motor and the ball screw mechanism also become a part of the first drive system A11.

[0071] The second main shaft Y2 has substantially the same structure as the first main shaft Y1. The second main shaft Y2 has a second motor M2 (linear servo motor), a position detection unit 81 (linear scale), a thrust detection unit 82, and a vibration detection unit 83. In addition, the thrust detection unit 82 of the second main shaft Y2 is not an essential structure and can be appropriately omitted. In addition to this, the second main shaft Y2 may further have a speed sensor for detecting the speed of the second motor M2 and a thrust sensor for detecting the thrust of the second motor M2, etc.

[0072] In the present embodiment, as an example, the second motor M2 and the load driven by the power of the second motor M2 are defined as the drive system A1. The load can include the sub-shaft X1, the connecting portion connecting the sub-shaft X1 and the second motor M2, and the head Z1, etc.

[0073] Hereinafter, the drive system A1 on the second main shaft Y2 side is sometimes referred to as the second drive system A12. When the second motor M2 is a rotary servo motor and is connected to a ball screw mechanism, the rotary servo motor and the ball screw mechanism also become a part of the second drive system A12.

[0074] The first main shaft Y1 (the first motor M1) linearly drives the load along the Y-axis (axial direction D1) according to the control of the first amplifier B1. In addition, the second main shaft Y2 (the second motor M2) linearly drives the load along the Y-axis (axial direction D1) according to the control of the second amplifier B2. However, the first amplifier B1 and the second amplifier B2 respectively control the first motor M1 and the second motor M2 so that the first main shaft Y1 and the second main shaft Y2 move synchronously in the axial direction D1.

[0075] Here, detailed description is omitted, but the sub-shaft X1 has a motor (linear servo motor) and a position detection unit (linear scale). The sub-shaft X1 linearly drives the load (head Z1) along the X-axis according to the control of the sub-shaft servo amplifier B3.

[0076] The position detection units 81 for the first main shaft Y1 and the second main shaft Y2 are each composed of an encoder or the like. Each position detection unit 81 detects the position of the corresponding motor among the first motor M1 and the second motor M2. The position detection unit 81 of the first main shaft Y1 outputs a position detection signal (electrical signal) including a detection value related to the position of the first motor M1 to the first amplifier B1. The position detection unit 81 of the second main shaft Y2 outputs a position detection signal including a detection value related to the position of the second motor M2 to the second amplifier B2. The first amplifier B1 and the second amplifier B2 synchronously drive and control the first motor M1 and the second motor M2 based on the position detection signal and a control signal for operation from the upper controller 6 (hereinafter, simply referred to as the control signal), so as to perform a given operation while performing feedback control.

[0077] In addition, the first amplifier B1 and the second amplifier B2 synchronously drive and control the first motor M1 and the second motor M2 based on a control signal for testing (hereinafter, simply referred to as the test signal) including a position command described later, so as to perform a given test operation.

[0078] In the present embodiment, the "force applied to the motor" is calculated based on command values (for example, command values of thrust or torque) from the first amplifier B1 and the second amplifier B2 for the first motor M1 and the second motor M2. However, force sensors such as piezoelectric, magnetostrictive, or strain gauge type can be used to detect the force (thrust) applied to each motor by the thrust detection units 82 provided on the first main shaft Y1 and the second main shaft Y2 respectively.

[0079] The thrust detection units 82 for the first main shaft Y1 and the second main shaft Y2 are arranged on the corresponding motors among the first motor M1 and the second motor M2 to detect the force applied to the motor. Each thrust detection unit 82 includes, for example, a force sensor of piezoelectric, magnetostrictive, or strain gauge type.

[0080] The "force applied to the motor" as mentioned herein not only refers to the stress received from the load when driving the load, but can also include the force of torsion along the Y axis caused by receiving stress from the other motor side via the sub-axis X1 due to the positional offset between the shafts. In short, the "force applied to the motor" can include the thrust along the Y axis. Additionally, when there are positional offsets not only along the Y axis but also along the X and Z axes between the first main shaft Y1 and the second main shaft Y2, the "force applied to the motor" can also include the torsional force (torque) around the Y axis. However, hereinafter, for simplicity of explanation, it is assumed that the "force applied to the motor" is mainly the thrust for description. For example, the force applied to the first motor M1 can include the force of torsion along the Y1 axis caused by receiving stress from the second motor M2 side via the sub-axis X1 due to the positional offset between the shafts. In addition, the force applied to the second motor M2 can include the force of torsion along the Y2 axis caused by receiving stress from the first motor M1 side via the sub-axis X1 due to the positional offset between the shafts.

[0081] As described above, in the present embodiment, the thrusts applied to the first motor M1 and the second motor M2 are calculated based on the command values of the thrusts for the first motor M1 and the second motor M2, etc. However, in the case of using the thrust detection unit 82, it is as follows. The thrust detection unit 82 of the first main shaft Y1 outputs a thrust detection signal (electrical signal) including the detection value related to the thrust applied to the first motor M1 to the first amplifier B1. The thrust detection unit 82 of the second main shaft Y2 outputs a thrust detection signal including the detection value related to the thrust applied to the second motor M2 to the second amplifier B2.

[0082] The vibration detection units 83 of the first main shaft Y1 and the second main shaft Y2 are respectively arranged in the corresponding drive system A1 among the first drive system A11 and the second drive system A12 to detect the vibration of the drive system A1. Each vibration detection unit 83 includes, for example, an acceleration sensor or a gyro sensor, etc. The vibration detection unit 83 of the first main shaft Y1 outputs a vibration detection signal (electrical signal) including the detection value related to the vibration of the first drive system A11 to the first amplifier B1. The vibration detection unit 83 of the second main shaft Y2 outputs a vibration detection signal including the detection value related to the vibration of the second drive system A12 to the second amplifier B2.

[0083] The first amplifier B1 corresponds to the control device C1 involved in one mode. As Figure 1 shown, the first amplifier B1 includes a processing unit P1, a first storage unit 51 (corresponding to the storage unit 5), and a power conversion unit 53. In other words, the control device C1 (the first amplifier B1) includes the storage unit 5 (the first storage unit 51).

[0084] The processing unit P1 includes a computer system having one or more processors and a memory. At least part of the functions of the processing unit P1 are implemented by executing a program recorded in the memory of the computer system by the processor of the computer system. The program can be recorded in the memory, provided via a telecommunication line such as the Internet, or provided by being recorded in a non-transitory recording medium such as a memory card.

[0085] The processing unit P1 has a first control unit 31 (corresponding to the control unit 3), a first output unit 41, a second output unit 42, and a first measurement processing unit G1. In other words, the control device C1 (the first amplifier B1) includes the first output unit 41 and the second output unit 42.

[0086] The first control unit 31 determines the control value of the first drive system A11 according to the control signal related to the Y axis from the upper controller 6 and the position detection signal from the position detection unit 81 (that is, the current position of the first motor M1). The control value can include, for example, the command value of the position of the first motor M1 related to the Y1 axis, the command value of the thrust of the first motor M1, and the command value of the speed of the first motor M1. The first control unit 31 controls the power conversion unit based on the determined control value to adjust the power (drive current) supplied to the first motor M1. Thus, the first control unit 31 drives the first main shaft Y1 to a given position on the Y1 axis.

[0087] In addition, if a test signal including a position command is input from the measurement system 1 (the command unit 10 described later), the first control unit 31 performs a given test operation. In other words, the control device C1 (the first amplifier B1) includes the first control unit 31 (control unit 3) that receives a position command from the measurement system 1. The first control unit 31 (control unit 3) controls the first motor M1 based on the position command so as to perform a test operation of moving the first main shaft Y1 to a specified position. The specified position in the test operation is set within a specified movable range in which the main shafts (Y1, Y2) can move during normal operation.

[0088] In the present embodiment, as an example, it is assumed that one test operation is a movement operation in which the main shafts (the first main shaft Y1 and the second main shaft Y2) synchronously move from the origin position (start position) of the Y axis to the position on the positive side of the Y axis (end position) specified in the position command. In addition, the start position can also be other than the origin position. Hereinafter, the movement range from the start position to the end position in the test operation is referred to as the "calibration range". The position command includes, for example, information on the calibration range.

[0089] In addition, the test operation for one quantity is not limited to the moving operation as described above. The test operation for one quantity may also be a moving operation in which the main shaft synchronously moves from the origin position (starting position) of the Y-axis to a position on the negative side of the Y-axis (ending position). In addition, the test operation for one quantity may also be a reciprocating operation in which the main shaft synchronously moves from the origin position (starting position) of the Y-axis to a position on the positive side of the Y-axis and then returns to the origin position again (ending position). In addition, the test operation for one quantity may also include the following reciprocating operations on both the positive and negative sides: the main shaft synchronously moves from the origin position (starting position) of the Y-axis to a position on the positive side of the Y-axis, then returns to the origin position, further moves to a position on the negative side of the Y-axis, and then returns to the origin position again (ending position).

[0090] The first output unit 41 of the processing unit P1 outputs first information related to the force (thrust) applied to the main shaft during the test operation. Specifically, the processing unit P1 calculates a first thrust value based on the command value of the thrust of the first motor M1 and the like. The processing unit P1 generates first information including the first thrust value and outputs it from the first output unit 41. The command value of the thrust of the first motor M1 is one of the parameters of the control value that can be determined based on the position detection signal from the position detection unit 81 (that is, the current position of the first motor M1), the current speed of the first motor M1, and the like. Alternatively, it may be that if a thrust detection signal is input from the thrust detection unit 82 of the first main shaft Y1, the processing unit P1 generates first information including the first thrust value based on the detection value included in the thrust detection signal and outputs it from the first output unit 41. Here, the first output unit 41 outputs the first information to the first measurement processing unit G1 installed in the processing unit P1. In addition, the first measurement processing unit G1 is a part of the measurement system 1, and details will be described later.

[0091] The second output unit 42 of the processing unit P1 outputs second information related to the position of the motor during the test operation. Specifically, if a position detection signal is input from the position detection unit 81 of the first main shaft Y1 during the test operation, the processing unit P1 generates second information including the position of the first motor M1 based on the detection value included in the position detection signal and outputs it from the second output unit 42. Here, the second output unit 42 outputs the second information to the first measurement processing unit G1 installed in the processing unit P1. In addition, the detection value of the position detection signal is used not only during the test operation but also when determining the control value in the normal operation.

[0092] In addition, during the test operation, the processing unit P1 performs vibration excitation processing. In the drive control of the first motor M1, excitation forces of various vibration frequencies are applied to the first drive system A11 within a given range. If a vibration detection signal corresponding to this excitation force is input from the vibration detection unit 83 of the first main shaft Y1, the processing unit P1 outputs the information of the detection value included in the vibration detection signal to the first measurement processing unit G1.

[0093] The first storage unit 51 includes an electrically rewritable non-volatile semiconductor memory such as a flash memory. The first storage unit 51 is configured to be able to store (save) correction information including the position correction amount calculated by the measurement system (the calculation unit 14 described later). The correction information stored in the first storage unit 51 can be updated by the processing unit P1.

[0094] The second amplifier B2 corresponds to the control device C1 involved in one mode. In the present embodiment, as an example, the second amplifier B2 has substantially the same functions as the first amplifier B1. As Figure 1 shown, the second amplifier B2 includes a processing unit P2, a second storage unit 52 (corresponding to the storage unit 5), and a power conversion unit 53. In other words, the control device C1 (the second amplifier B2) includes the storage unit 5 (the second storage unit 52).

[0095] The processing unit P2 includes a computer system having one or more processors and a memory. At least part of the functions of the processing unit P2 are realized by the processor of the computer system executing a program recorded in the memory of the computer system. The program can be recorded in the memory, can be provided via a telecommunication line such as the Internet, or can be provided by being recorded in a non-transitory recording medium such as a memory card.

[0096] The processing unit P2 has a second control unit 32 (corresponding to the control unit 3), a first output unit 41, a second output unit 42, and a second measurement processing unit G2. In other words, the control device C1 (the second amplifier B2) includes the first output unit 41 and the second output unit 42.

[0097] The second control unit 32 determines the control value of the second drive system A12 according to the control signal related to the Y axis from the upper controller 6 and the position detection signal from the position detection unit 81 (that is, the current position of the second motor M2). The control value can include, for example, the command value of the position of the second motor M2 related to the Y2 axis, the command value of the thrust of the second motor M2, and the command value of the speed of the second motor M2. Based on the determined control value, the second control unit 32 controls the power conversion unit to adjust the power (drive current) supplied to the second motor M2. Thus, the second control unit 32 drives the second main shaft Y2 to a given position on the Y2 axis.

[0098] In addition, if a test signal including a position command is input from the measurement system 1 (command unit 10 described later), the second control unit 32 performs a given test operation. In other words, the control device C1 (second amplifier B2) includes the second control unit 32 (control unit 3) that receives a position command from the measurement system 1. Based on the position command, the second control unit 32 (control unit 3) controls the second motor M2 to perform a test operation in which the second main shaft Y2 moves to a specified position.

[0099] The first output unit 41 of the processing unit P2 outputs first information related to the force (thrust) applied to the main shaft during the test operation. Specifically, the processing unit P2 calculates a second thrust value based on the command value of the thrust of the second motor M2 and the like. The processing unit P2 generates first information including the second thrust value and outputs it from the first output unit 41. The command value of the thrust of the second motor M2 is one of the control value parameters that can be determined based on the position detection signal from the position detection unit 81 (that is, the current position of the second motor M2), the current speed of the second motor M2, and the like. Alternatively, if a thrust detection signal is input from the thrust detection unit 82 of the second main shaft Y2, the processing unit P2 generates first information including the second thrust value based on the detection value included in the thrust detection signal and outputs it from the first output unit 41. Here, the first output unit 41 outputs the first information to the second measurement processing unit G2 installed in the processing unit P2. In addition, the second measurement processing unit G2 is a part of the measurement system 1, and details will be described later.

[0100] The second output unit 42 of the processing unit P2 outputs second information related to the position of the motor during the test operation. Specifically, if a position detection signal is input from the position detection unit 81 of the second main shaft Y2 during the test operation, the processing unit P2 generates second information including the position of the second motor M2 based on the detection value included in the position detection signal and outputs it from the second output unit 42. Here, the second output unit 42 outputs the second information to the second measurement processing unit G2 installed in the processing unit P2. In addition, the detection value of the position detection signal is used not only during the test operation but also when determining the control value in the normal operation.

[0101] In addition, during the test operation, the processing unit P2 performs vibration excitation processing, and in the drive control of the second motor M2, applies an excitation force of various vibration frequencies to the second drive system A12 within a given range. If a vibration detection signal corresponding to the excitation force is input from the vibration detection unit 83 of the second main shaft Y2, the processing unit P2 outputs the information of the detection value included in the vibration detection signal to the second measurement processing unit G2.

[0102] The second storage unit 52 includes an electrically rewritable non-volatile semiconductor memory such as a flash memory. The second storage unit 52 is configured to be able to store (save) correction information including a position correction amount calculated by a measurement system (a calculation unit 14 described later). The correction information stored in the second storage unit 52 can be updated by the processing unit P2.

[0103] The first amplifier B1 and the second amplifier B2 configured in this way receive synchronized control signals from the host controller 6, and drive the first main shaft Y1 and the second main shaft Y2 synchronously to a given position. In addition to this synchronous drive, the sub-axis servo amplifier B3 also determines a control value of the drive system according to the control signal related to the X axis from the host controller 6 and the position detection signal from the position detection unit, and drives the sub-axis X1 to a given position on the X axis. As a result, the synchronous drive system 2 performs drive control of the X-Y coordinate position related to the head Z1.

[0104] In particular, during a test operation or a normal operation, the control unit 3 executes control of the corresponding motor among the first motor M1 and the second motor M2 based on the correction information stored in the storage unit 5.

[0105] Specifically, the first control unit 31 of the first amplifier B1, for example, during a normal operation, corrects the position of the first motor M1 based on the position correction amount stored in the first storage unit 51. The first control unit 31 determines a control value based on the corrected position (corrected position), and adjusts the drive current to execute control of the first motor M1.

[0106] In addition, the second control unit 32 of the second amplifier B2, for example, during a normal operation, corrects the position of the second motor M2 based on the position correction amount stored in the second storage unit 52. The second control unit 32 determines a control value based on the corrected position, and adjusts the drive current to execute control of the second motor M2.

[0107] In addition, the first control unit 31 and the second control unit 32 not only perform correction based on the latest position correction amount stored in the storage unit 5 during a normal operation, but also sometimes during a test operation. Details will be described later, but in order to optimize the position correction amount, the test operation may be repeatedly executed. In this case, correction can also be performed based on the position correction amount stored in the storage unit 5 during the test operation, thereby performing control of the corresponding motor. In addition, when the test operation is first executed after the assembly of the device at the time of new introduction of the synchronous drive system 2, the correction information may not be saved in the storage unit 5 (the first storage unit 51, the second storage unit 52). In this case, the control unit 3 (the first control unit 31, the second control unit 32) executes control of the corresponding motor without correction information during the test operation.

[0108] (3) Upper controller

[0109] The upper controller 6 includes a computer system having one or more processors and a memory. At least part of the functions of the upper controller 6 are implemented by executing a program recorded in the memory of the computer system by the processor of the computer system. The program can be recorded in the memory, provided via a telecommunication line such as the Internet, or provided by being recorded in a non-transitory recording medium such as a memory card.

[0110] The upper controller 6 is constituted by, for example, a programmable logic controller (PLC) or the like, and controls the operations of the first amplifier B1, the second amplifier B2, and the sub-axis servo amplifier B3. The upper controller 6 is communicably connected to the first amplifier B1, the second amplifier B2, and the sub-axis servo amplifier B3, and outputs control signals to these servo amplifiers. Thereby, the upper controller 6 controls the operations of the first amplifier B1, the second amplifier B2, and the sub-axis servo amplifier B3. The communication method can be either wireless or wired. The control signal includes data for specifying the X-Y coordinate positions and operations of loads including the head Z1 and the like.

[0111] (4) Terminal

[0112] In the present embodiment, as an example, as Figure 2 shown, it is assumed that the terminal 7 is a notebook personal computer. However, the terminal 7 can also be a portable terminal such as a tablet terminal or a smart phone, or a desktop personal computer or a server device.

[0113] The terminal 7 is communicably connected to the first amplifier B1 and the second amplifier B2. The following usage is assumed: For example, during normal operation, the terminal 7 is set to be not connected to the first amplifier B1 and the second amplifier B2, and is only connected to the first amplifier B1 and the second amplifier B2 when performing a test operation.

[0114] As Figure 1 shown, the terminal 7 includes a display unit 70 (refer to Figure 2 ), a processing unit 71, an operation unit 72, and a storage unit 73.

[0115] The processing unit 71 includes a computer system having one or more processors and a memory. At least part of the functions of the processing unit 71 are implemented by executing a program recorded in the memory of the computer system by the processor of the computer system. The program can be recorded in the memory, provided via a telecommunication line such as the Internet, or provided by being recorded in a non-transitory recording medium such as a memory card.

[0116] The processing unit 71 has an instruction unit 10. The instruction unit 10 is part of the measurement system 1. In other words, the processing unit 71 has the function of the instruction unit 10 of the measurement system 1. A dedicated application software is pre-installed in the terminal 7. The dedicated application software communicates with the first amplifier B1 and the second amplifier B2, and is used to also have the function of the instruction unit 10.

[0117] The instruction unit 10 outputs (sends) the same position instruction (test signal) related to the positions on the Y-axis of the first main shaft Y1 and the second main shaft Y2 to the first amplifier B1 and the second amplifier B2. In the first amplifier B1 and the second amplifier B2, based on the input test signal, the control of the first motor M1 and the second motor M2 is performed so that the first main shaft Y1 and the second main shaft Y2 perform test actions synchronously. That is to say, the instruction unit 10 generates a test signal that serves as a trigger for starting the test action, and outputs (sends) it to the first amplifier B1 and the second amplifier B2.

[0118] The display unit 70 is constituted by, for example, a liquid crystal display or an organic EL (Electro-Luminescence) display. The display unit 70 can be constituted by a touch panel type display.

[0119] The operation unit 72 includes, for example, one or more of a mouse, a keyboard, and a pointing device. The operator operates the operation unit 72 while referring to the information displayed on the display unit 70 and inputs information. For example, in order to start the test action, the operator uses the operation unit 72 to start the dedicated application software and performs operation inputs related to the output execution of the above-mentioned position instructions for the first amplifier B1 and the second amplifier B2. When the display unit 70 is constituted by a touch panel type display, it also has the function of the operation unit 72.

[0120] The storage unit 73 includes an electrically rewritable non-volatile semiconductor memory such as a flash memory. The storage unit 73 stores (saves), for example, information related to position instructions and the like. The storage unit 73 can also be the memory of the processing unit 71.

[0121] (5) Measurement System

[0122] Hereinafter, the structure of the measurement system 1 will be described in detail.

[0123] The measurement system 1 includes a computer system having one or more processors and a memory. At least a part of the functions of the measurement system 1 are realized by the processor of the computer system executing a program recorded in the memory of the computer system. The program can be recorded in the memory, can be provided through a telecommunication line such as the Internet, or can be provided by being recorded in a non-transitory recording medium such as a memory card.

[0124] As shown in Figure 1 FIG. Figure 1 , the measurement system 1 includes a command unit 10, a first measurement processing unit G1, and a second measurement processing unit G2. However, in the present embodiment, as an example, the functions of the command unit 10, the first measurement processing unit G1, and the second measurement processing unit G2 are dispersedly provided in a plurality of devices. That is, the function of the command unit 10 is installed in the processing unit 71 of the terminal 7. On the other hand, the function of the first measurement processing unit G1 is installed in the processing unit P1 of the first amplifier B1 (control device C1), and the function of the second measurement processing unit G2 is installed in the processing unit P2 of the second amplifier B2 (control device C1).

[0125] The first measurement processing unit G1 has a first acquisition unit 11, a second acquisition unit 12, a third acquisition unit 13, a calculation unit 14, and a coefficient operation unit 15. In other words, the first measurement processing unit G1 has the functions of the first acquisition unit 11, the second acquisition unit 12, the third acquisition unit 13, the calculation unit 14, and the coefficient operation unit 15. Therefore, it can be said that the control device C1 of the present embodiment has at least a part of the functions related to the command unit 10, the first acquisition unit 11, the second acquisition unit 12, and the calculation unit 14 in the measurement system 1 (here, the first acquisition unit 11, the second acquisition unit 12, and the calculation unit 14).

[0126] The second measurement processing unit G2 has substantially the same functions as the first measurement processing unit G1 (the first acquisition unit 11, the second acquisition unit 12, the third acquisition unit 13, the calculation unit 14, and the coefficient operation unit 15).

[0127] The first acquisition unit 11 acquires first information related to the first force (e.g., thrust) applied to the first main shaft Y1 and the second force (e.g., thrust) applied to the second main shaft Y2 during the test operation from the first output unit 41. In the present embodiment, the function of the first acquisition unit 11 is divided between the first measurement processing unit G1 and the second measurement processing unit G2. That is, the first acquisition unit 11 of the first measurement processing unit G1 acquires the first information related to the calculated first thrust value as the first force applied to the first main shaft Y1 during the test operation. Alternatively, the first acquisition unit 11 of the first measurement processing unit G1 may also acquire the first information related to the first thrust value applied to the first main shaft Y1 during the test operation based on the detection value included in the thrust detection signal from the thrust detection unit 82 of the first main shaft Y1. The first acquisition unit 11 of the first measurement processing unit G1 inputs the first information to the calculation unit 14 of the local machine.

[0128] In addition, the first acquisition unit 11 of the second measurement processing unit G2 acquires first information related to the calculated second thrust value as the second force applied to the second main shaft Y2 during the test operation. Alternatively, the first acquisition unit 11 of the second measurement processing unit G2 may also acquire the first information related to the second thrust value applied to the second main shaft Y2 during the test operation based on the detection value included in the thrust detection signal from the thrust detection unit 82 of the second main shaft Y2. The first acquisition unit 11 of the second measurement processing unit G2 inputs the first information into the calculation unit 14 of the present machine.

[0129] In addition, each of the first amplifier B1 and the second amplifier B2 has a function of directly or via a terminal 7 or the like sending the first information acquired by the first acquisition unit 11 of the present machine to the other spindle servo amplifier side. The communication method can be either wireless or wired.

[0130] The second acquisition unit 12 acquires second information related to the positions of the first motor M1 and the second motor M2 during the test operation from the second output unit 42. In the present embodiment, the function of the second acquisition unit 12 is divided between the first measurement processing unit G1 and the second measurement processing unit G2. That is, the second acquisition unit 12 of the first measurement processing unit G1 acquires the second information related to the position of the first motor M1 during the test operation based on the detection value included in the position detection signal from the position detection unit 81 of the first main shaft Y1. The second acquisition unit 12 of the first measurement processing unit G1 inputs the second information into the calculation unit 14 of the present machine.

[0131] In addition, the second acquisition unit 12 of the second measurement processing unit G2 acquires the second information related to the position of the second motor M2 during the test operation based on the detection value included in the position detection signal from the position detection unit 81 of the second main shaft Y2. The second acquisition unit 12 of the second measurement processing unit G2 inputs the second information into the calculation unit 14 of the present machine.

[0132] In addition, each of the first amplifier B1 and the second amplifier B2 has a function of directly or via a terminal 7 or the like sending the second information acquired by the second acquisition unit 12 of the present machine to the other spindle servo amplifier side. The communication method can be either wireless or wired.

[0133] The third acquisition unit 13 acquires third information related to the frequency characteristics of vibrations in the drive system A1 including the first motor M1 and the second motor M2 respectively. In the present embodiment, the function of the third acquisition unit 13 is divided between the first measurement processing unit G1 and the second measurement processing unit G2. That is, the third acquisition unit 13 of the first measurement processing unit G1 acquires third information related to the frequency characteristics (such as resonance frequency and anti-resonance frequency) of vibrations in the first drive system A11 including the first motor M1 based on the detection values included in the vibration detection signals from the vibration detection unit 83 of the first main shaft Y1. The third acquisition unit 13 of the first measurement processing unit G1 inputs the third information into the calculation unit 14 of the present device.

[0134] In addition, the third acquisition unit 13 of the second measurement processing unit G2 acquires third information related to the frequency characteristics (such as resonance frequency and anti-resonance frequency) of vibrations in the second drive system A12 including the second motor M2 based on the detection values included in the vibration detection signals from the vibration detection unit 83 of the second main shaft Y2. The third acquisition unit 13 of the second measurement processing unit G2 inputs the third information into the calculation unit 14 of the present device.

[0135] In addition, each of the first amplifier B1 and the second amplifier B2 has a function of directly or via the terminal 7 or the like sending the third information acquired by the third acquisition unit 13 of the present device to the other main shaft servo amplifier side. The communication method can be either wireless or wired.

[0136] The third acquisition unit 13, for example, performs frequency analysis (Fast Fourier Transform (FFT)) on each of the detection values included in the vibration detection signals from the vibration detection unit 83, calculates the difference thereof, and thereby acquires (measures) the resonance frequency and anti-resonance frequency of the corresponding drive system A1.

[0137] In addition, as a means for obtaining the frequency characteristics of vibrations, it is not necessary to use the vibration detection unit 83. In other words, the means for measuring the frequency characteristics of vibrations is not particularly limited. For example, it is also possible to indirectly measure the frequency characteristics of vibrations based on the input information (command values such as motor speed and thrust) from the first amplifier B1 and the second amplifier B2 to the first drive system A11 and the second drive system A12 and the output information (measured values such as motor speed and thrust) from the first drive system A11 and the second drive system A12.

[0138] In addition, in the above excitation process, the frequency of the provided vibration is not particularly limited. For example, a signal including all frequency components may be generated and provided to the first drive system A11 and the second drive system A12 (measurement using white noise). In addition, a signal having a waveform in which the frequency changes with time may be generated and provided to the first drive system A11 and the second drive system A12 (measurement using sine wave scanning). In addition, alternatively, a signal having a waveform obtained by synthesizing a plurality of sine waves within a given frequency range may be generated and provided to the first drive system A11 and the second drive system A12 (measurement using multi-sine).

[0139] The measurement system 1 may also perform the test operation for obtaining the first information (thrust) and the test operation for obtaining the frequency characteristics (e.g., using white noise) separately at different times.

[0140] Based on the first information and the second information, the calculation unit 14 calculates a correction amount related to the position of at least one of the first motor M1 and the second motor M2, that is, a position correction amount, so as to correct the position offset between the first main shaft Y1 and the second main shaft Y2 (execution of the correction amount measurement process). The calculation unit 14 stores (newly adds or updates) the calculated position correction amount in the storage unit 5 (of the own device).

[0141] In the present embodiment, the calculation unit 14 functions are provided in both the first measurement processing unit G1 and the second measurement processing unit G2. Therefore, the calculation unit 14 of the first measurement processing unit G1 can execute the correction amount measurement process for the position of the first motor M1. In addition, the calculation unit 14 of the second measurement processing unit G2 can also execute the correction amount measurement process for the position of the second motor M2.

[0142] For example, in one test operation, the position correction amount may be calculated separately by the first amplifier B1 and the second amplifier B2. In this case, the calculation unit 14 of the first measurement processing unit G1 can calculate the position correction amount of the first motor M1 based on the position of the second motor M2 in the second information obtained from the second amplifier B2 and store it in the first storage unit 51. In addition, the calculation unit 14 of the second measurement processing unit G2 can calculate the position correction amount of the second motor M2 based on the position of the first motor M1 in the second information obtained from the first amplifier B1 and store it in the second storage unit 52. However, if the position correction amount is calculated separately by the first amplifier B1 and the second amplifier B2 in this way, it may be difficult to adjust the motor positions when observing the entire synchronous drive system 2.

[0143] Therefore, in one test operation, only one of the calculation units 14 of the first measurement processing unit G1 and the calculation unit 14 of the second measurement processing unit G2 can be made to execute the correction amount measurement process, and the other calculation unit 14 can be placed in a standby state where it does not execute the correction amount measurement process. In other words, the calculation unit 14 can calculate the position correction amount of the other based on the position of either the first motor M1 or the second motor M2. For example, only the calculation unit 14 of the first measurement processing unit G1 can be made to execute the correction amount measurement process, and the calculation unit 14 calculates the correction amount (position correction amount) related to the position of the first motor M1 based on the position of the second motor M2 in the second information obtained from the second amplifier B2.

[0144] Regarding which of the first amplifier B1 and the second amplifier B2 calculates the position correction amount, it can be set such that an operator can operate the operation unit 72 of the terminal 7 to specify, and the specified information can be included in the test signal output from the terminal 7.

[0145] Next, an example of a specific calculation method for the position correction amount will be described.

[0146] The calculation unit 14 obtains the difference value between the first force (first thrust value) and the second force (second thrust value) at the same time, and multiplies the correction coefficient by the difference value to calculate the position correction amount. However, the position correction amount is not limited to being obtained based on the difference value between the first force (first thrust value) and the second force (second thrust value) at the same time. For example, the calculation unit 14 can obtain it based on the difference value between the first force and the second force, such as the change amount, average value, maximum value, minimum value, or central value in the sampled data within a certain given period.

[0147] The correction coefficient multiplied by the above difference value can also be a predetermined given value stored in the storage unit 5, but the measurement system 1 of the present embodiment has a function of calculating this correction coefficient. That is, the coefficient calculation unit 15 calculates the correction coefficient based on the load mass of each of the first main shaft Y1 and the second main shaft Y2 and the third information. The coefficient calculation unit 15, for example, accepts an operation instruction from the calculation unit 14 to calculate the correction coefficient.

[0148] In the present embodiment, the function of the coefficient calculation unit 15 is provided in both the first amplifier B1 and the second amplifier B2. The coefficient calculation unit 15 of the first amplifier B1 uses the frequency characteristics in the third information obtained by the third acquisition unit 13 of its own and the frequency characteristics in the third information obtained from the second amplifier B2. The coefficient calculation unit 15 of the second amplifier B2 uses the frequency characteristics in the third information obtained by the third acquisition unit 13 of its own and the frequency characteristics in the third information obtained from the first amplifier B1.

[0149] Here, the correction coefficient represents the magnitude of the coupling rigidity between the first main axis Y1 and the second main axis Y2. The larger the load mass and the vibration frequency characteristics (resonance frequency, anti-resonance frequency) of each drive system A1, the larger the value of the correction coefficient. As a result, the coefficient calculation unit 15 calculates the correction coefficient using, for example, a function F(f1, f2, M) related to the resonance frequency f1, anti-resonance frequency f2, and load mass M of the first drive system A11 and the second drive system A12. The first amplifier B1 and the second amplifier B2 each store the load mass of the drive system A1 corresponding to the local machine in the storage unit 5 of the local machine, and when sending the third information to another spindle servo amplifier, include the information of the load mass in the third information for transmission. Alternatively, the load mass of each drive system A1 can also be input from the terminal 7.

[0150] During the test operation, the measurement system 1 acquires the first information, the second information, and the third information at any time with a sampling period. The calculation unit 14 calculates the position correction amount, for example, for each sampling period (or for each interval longer than the sampling period). In short, the calculation unit 14 calculates a plurality of position correction amounts related to a plurality of positions of the motor (M1 or M2) that moves during the test operation. The calculation unit 14 stores the calculated plurality of position correction amounts in the storage unit 5 as correction information, for example, in a table form. It is not necessary to store the position correction amount in a table form, and it is sufficient to store the plurality of positions and the plurality of position correction amounts in a one-to-one correspondence in the storage unit 5.

[0151] The correction information stored in the storage unit 5 by the measurement system 1 can include, in addition to the information of the position correction amount, for example, information on the difference value (thrust difference) between the first force (first thrust value) and the second force (second thrust value), information on the correction coefficient, information on the correction position, and information on the vibration frequency characteristics.

[0152] (6) Operation of the measurement system (correction amount measurement process)

[0153] Hereinafter, a series of processes of the operation including the correction amount measurement process in the measurement system 1 will be described with reference to Figure 3 for illustration. Figure 3 is a flowchart for explaining the operation related to the correction amount measurement process in the measurement system 1 of an embodiment. Figure 3 The flowchart shown is merely an example of the operation process related to the measurement system 1. The order of processing can be appropriately changed, and processing can be appropriately added or omitted. In Figure 3In this case, for the first main axis Y1 and the second main axis Y2, they are respectively labeled only as the Y1 axis and the Y2 axis. Hereinafter, it is assumed that the measurement system 1 only causes the calculation unit 14 of the first amplifier B1 to execute the correction amount measurement process, and the calculation unit 14 of the first amplifier B1 calculates the position correction amount of the first motor M1 based on the position of the second motor M2 of the second information from the second amplifier B2.

[0154] For example, it is assumed that when a worker newly installs the synchronous drive system 2 in a facility such as a factory, the worker has completed the operation of assembling various devices of the synchronous drive system 2. However, even if the worker wants to assemble the first main axis Y1 and the second main axis Y2 to be parallel to each other, there may be a slight position offset between the first main axis Y1 and the second main axis Y2. The worker connects the terminal 7 to the first amplifier B1 and the second amplifier B2 (either wirelessly or wiredly) so that they can communicate with each other.

[0155] The worker starts a dedicated application software on the terminal 7 and performs an operation input for sending a test signal serving as a trigger to execute a test action. As a result, the instruction unit 10 (a part of the measurement system 1) of the terminal 7 sends a test signal of a synchronized position instruction to the first amplifier B1 and the second amplifier B2 (ST1: communication synchronization in the Y1 axis and the Y2 axis). This step of sending the test signal of the position instruction corresponds to the instruction processing step of the measurement method involved in one mode.

[0156] The first amplifier B1 (the first control unit 31) and the second amplifier B2 (the second control unit 32) control the first motor M1 and the second motor M2 based on the position instruction so as to execute a test action (a movement action from the start position to the end position of the correction range). That is, the first control unit 31 and the second control unit 32 move the first main axis Y1 and the second main axis Y2 to the start position of the correction range specified in the position instruction (ST2). Then, the first control unit 31 and the second control unit 32 start the movement of the first main axis Y1 and the second main axis Y2 until reaching the end position of the correction range specified in the position instruction (ST3).

[0157] During the test action, that is, during the process in which the first main axis Y1 and the second main axis Y2 synchronously move continuously from the start position to the end position, the measurement system 1 acquires the first information (thrust), the second information (position), and the third information (vibration frequency characteristics) (ST4). This step of acquiring the first information and the step of acquiring the second information respectively correspond to the first acquisition processing step and the second acquisition processing step of the measurement method involved in one mode.

[0158] The measurement system 1 (the calculation unit 14 of the first amplifier B1) performs a correction amount measurement process, and calculates a difference value (thrust difference) between the first force (first thrust value) applied to the first main shaft Y1 and the second force (second thrust value) applied to the second main shaft Y2 (ST5). Also, in the correction amount measurement process, the measurement system 1 (the coefficient operation unit 15 of the first amplifier B1) operates a correction coefficient, and the measurement system 1 (the calculation unit 14 of the first amplifier B1) multiplies the correction coefficient by the thrust difference to calculate a position correction amount (ST6). The step of calculating the position correction amount corresponds to the calculation processing step of the measurement method related to one mode.

[0159] If the movement of the two main shafts, the first main shaft Y1 and the second main shaft Y2, to the end positions is completed (ST7: Yes), the measurement system 1 stores, as correction information, a plurality of position correction amounts related to a plurality of positions calculated for each sampling period or at intervals longer than the sampling period, in a table form, in the storage unit 5. That is, the calculation unit 14 of the first amplifier B1 stores information on a plurality of position correction amounts related to a plurality of positions of the first motor M1 in the first storage unit 51 of the local machine. Then, the measurement system 1 ends the test operation. The measurement system 1 repeats steps ST4 to ST6 until the movement of the two main shafts to the end positions is completed (ST7: No). That is, the measurement system 1 repeats the correction amount measurement process of calculating the position correction amount while the first main shaft Y1 and the second main shaft Y2 are moving continuously from the start position to the end position synchronously. In the measurement system 1 of the present embodiment, during the movement from the start position to the end position, it is possible to measure the position correction amount by performing continuous movement without temporarily stopping the first main shaft Y1 and the second main shaft Y2.

[0160] The measurement system 1 may also cause the display unit 70 of the terminal 7 to display the correction information stored in the storage unit 5, so that the operator can visually confirm the correction information. Alternatively, the operator may be able to manually correct a part of the correction information on the terminal 7 using the operation unit 72. In the case of the above operation example, the terminal 7 may also update the correction information stored in the first storage unit 51 of the first amplifier B1 according to the operator's operation input.

[0161] If the operator ends the test operation and the confirmation of the correction information is also completed, the terminal 7 that is in a connected state with respect to the first amplifier B1 and the second amplifier B2 is set to a non-connected state.

[0162] In addition, in the synchronous drive system 2, during normal operation, the first amplifier B1 uses the correction information including the position correction amount and the like stored in the first storage unit 51 of the machine itself. During normal operation, the first amplifier B1 corrects the position of the first motor M1 while referring to the correction information, so as to correct the position deviation between the first main shaft Y1 and the second main shaft Y2. For example, when the first control unit 31 receives an instruction from the host controller 6 to move the first motor M1 from the first position to the second position during normal operation, it determines the control value based on the corrected positions (added with the position correction amount) corresponding to each position from the first position to the second position, and controls the power conversion unit to adjust the power (drive current) supplied to the first motor M1.

[0163] (7) Operation of the measurement system (correction amount optimization process)

[0164] In addition, in the above item “(6) Operation of the measurement system (correction amount measurement process)”, as an example, the measurement system 1 saves the position correction amount (correction information) calculated by performing a test operation once in the storage unit 5 and ends the process. However, the measurement system 1 can be configured to perform the test operation again, but on the basis of taking into account the position correction amount (correction information) stored in the storage unit 5, execute the correction amount measurement process to optimize the position correction amount (execute the correction amount optimization process). Specifically, as the correction amount optimization process, the measurement system 1 repeats the test operation and the correction amount measurement process until a specific condition is satisfied. As an example, the “specific condition” is that the difference between the position correction amount calculated in the Nth (N is an integer greater than or equal to 1) test operation and the position correction amount calculated in the (N + 1)th test operation is below the threshold. The position correction amounts of the Nth test operation and the (N + 1)th test operation to be compared can be the sum or average of multiple position correction amounts related to multiple positions, or the maximum values of multiple position correction amounts, or the position correction amounts for a certain same position.

[0165] In the present embodiment, it is assumed that the measurement system 1 is configured to be able to select the validity / invalidity of the correction amount optimization process through the terminal 7, for example. When the invalidity of the correction amount optimization process is selected, the measurement system 1 executes the operation flow as described in the above item “(6) Operation of the measurement system (correction amount measurement process)”. When the validity of the correction amount optimization process is selected, the measurement system 1 executes the operation flow described later.

[0166] Hereinafter, regarding the correction amount optimization process, refer to Figure 4 for explanation. Figure 4This is a flowchart for explaining the operations related to the optimization process of correction amounts in the measurement system 1 according to an embodiment. Figure 4 The flowchart shown is merely an example of the operation process related to the measurement system 1. The order of processing can be appropriately changed, and processing can be appropriately added or omitted. Additionally, regarding the operation process related to the calculation of the position correction amount, it is assumed to be the same as the operation process described in the above " (6) Operations of the measurement system (correction amount measurement process)", so the detailed description is appropriately omitted here.

[0167] The operator starts a dedicated application software on the terminal 7 and performs an operation input for sending a test signal serving as a trigger to execute a test operation. At this time, for example, the operator designates "valid" for the correction amount optimization process by using the operation unit 72, thereby generating a test signal including this designated information. The instruction unit 10 of the terminal 7 sends the test signal of the synchronized position instruction to the first amplifier B1 and the second amplifier B2. The first amplifier B1 and the second amplifier B2 that have received the test signal start the test operation (ST11), and the measurement system 1 (the calculation unit 14 of the first amplifier B1) performs the correction amount optimization process and the correction amount measurement process.

[0168] Then, the measurement system 1 (the calculation unit 14 of the first amplifier B1) completes the measurement of the position correction amount for the first test operation (ST12). The calculation unit 14 of the first amplifier B1 stores the information of the multiple position correction amounts related to the multiple positions of the first motor M1 for the first test operation in the first storage unit 51 (storage unit 5) of the local machine (ST13).

[0169] Next, the first amplifier B1 and the second amplifier B2 start the second test operation (ST14). The first amplifier B1 determines the control value based on the position corrected by the most recent position correction amount (the position correction amount of the first test operation) stored in the first storage unit 51, and controls the first motor M1.

[0170] Then, the measurement system 1 (the calculation unit 14 of the first amplifier B1) completes the measurement of the position correction amount for the second test operation (ST15). The calculation unit 14 of the first amplifier B1 stores the information of the multiple position correction amounts related to the multiple positions of the first motor M1 for the second test operation in the first storage unit 51 (storage unit 5) of the local machine (ST16).

[0171] Here, the measurement system 1 (e.g., the calculation unit 14) determines whether a specific condition is satisfied, that is, determines whether the difference between the position correction amount of the previous (here, the 1st) test operation and the position correction amount of the current (here, the 2nd) test operation is below a threshold value (ST17). If the specific condition is satisfied, that is, if the difference is below the threshold value (ST17: Yes), the measurement system 1 determines the position correction amount of the most recent test operation as the optimal position correction amount. Then, the measurement system 1 stops measuring the test operation and the position correction amount and ends the correction amount optimization process. On the other hand, if the specific condition is not satisfied, that is, if the difference is greater than the threshold value (ST17: No), the measurement system 1 returns to step ST14 and starts the next test operation.

[0172] The measurement system 1 can also cause the display unit 70 of the terminal 7 to display correction information so that the operator can visually confirm the correction information including the optimal position correction amount and the like. It can also be set such that the operator can manually correct a part of the correction information on the terminal 7 using the operation unit 72. For example, the terminal 7 can also update the optimal position correction amount (correction information) stored in the first storage unit 51 of the first amplifier B1 according to the operator's operation input.

[0173] In addition, in the synchronous drive system 2, during normal operation, the first amplifier B1 uses the optimal position correction amount (correction information) stored in its own first storage unit 51.

[0174] (8) Advantages

[0175] As described above, according to the measurement system 1 according to the present embodiment, the position correction amount applied to the synchronous drive system 2 is calculated based on the first information (e.g., thrust force) related to the first force applied to the first main shaft Y1 and the second force applied to the second main shaft Y2, and the second information (position). The synchronous drive system 2 can, for example, perform drive control of the first motor M1 and the second motor M2 by applying the position correction amount during normal operation, thereby reducing force interference. Therefore, different from the position control system disclosed in Patent Document 1 that calculates the correction value based on the position deviation between the Y1 axis and the Y2 axis, not only from the perspective of improving the accuracy of drive control, but also, for example, it is possible to suppress the influence that may be caused by the interference between the shafts (between the Y1 axis and the Y2 axis) such as device deterioration caused by shaft torsion.

[0176] In addition, in the measurement system 1, the position correction amount is calculated based on the difference value (thrust force difference) between the first force (the first thrust force value) and the second force (the second thrust force value). Therefore, the accuracy related to the position correction amount becomes better, and the influence that may be caused by the interference between the shafts can be further suppressed.

[0177] In addition, in the measurement system 1, as a test operation, the first main shaft Y1 and the second main shaft Y2 are synchronously moved continuously from the start position to the end position, whereby the measurement of the position correction amount can be performed. Therefore, for example, compared with the case where the first main shaft Y1 and the second main shaft Y2 are stopped at a specified measurement position each time to execute the process for measurement, shortening of the measurement time can be achieved.

[0178] In addition, in the measurement system 1, independently of the normal operation, a test operation is performed in advance to measure the position correction amount. Then, correction information including the position correction amount calculated by the measurement system 1 is stored in the storage unit 5 of at least one of the first amplifier B1 and the second amplifier B2 (the first storage unit 51 of the first amplifier B1 in the above operation example). At least one of the first amplifier B1 and the second amplifier B2 (the first amplifier B1 in the above operation example) refers to the correction information stored in the storage unit 5 of its own device to drive and control the corresponding motor during the normal operation. Therefore, during the normal operation, communication between the first amplifier B1 and the second amplifier B2 (including communication via the host controller 6) can be dispensed with.

[0179] (9) Modification examples

[0180] Hereinafter, modification examples of the above-described embodiment will be listed. The modification examples described below can be applied in appropriate combination.

[0181] The same functions as those of the measurement system 1 according to the above-described embodiment can also be embodied by a measurement method, a computer program, or a non-transitory recording medium recording the computer program, etc.

[0182] The measurement system 1 in the present disclosure includes a computer system. The computer system has a processor and a memory as the main structure. The functions of the measurement system 1 in the present disclosure are implemented by executing a program recorded in the memory of the computer system by the processor. The program can be pre-recorded in the memory of the computer system, provided through a telecommunication line, or provided by being recorded in a non-transitory recording medium such as a memory card, an optical disc, or a hard disk drive readable by the computer system. The processor of the computer system is composed of one or more electronic circuits including semiconductor integrated circuits (ICs) or large-scale integrated circuits (LSIs). The integrated circuits such as the ICs or LSIs mentioned here have different names according to the degree of integration, including integrated circuits called system LSIs, VLSIs (Very Large Scale Integration), or ULSIs (Ultra Large Scale Integration). Also, for an FPGA (Field-Programmable Gate Array) that can be programmed after the manufacture of the LSI, or a logic device that can reconstruct the connection relationship inside the LSI or reconstruct the circuit partition inside the LSI, it can also be adopted as the processor. The multiple electronic circuits can also be concentrated on one chip, or can be dispersedly arranged on multiple chips. The multiple chips can also be concentrated in one device, or can be dispersedly arranged in multiple devices. The computer system mentioned here includes a microcontroller having one or more processors and one or more memories. Therefore, for the microcontroller, it is also composed of one or more electronic circuits including semiconductor integrated circuits or large-scale integrated circuits.

[0183] In addition, it is not a necessary structure that the multiple functions in the measurement system 1 are concentrated in one housing. For example, the components of the measurement system 1 can also be dispersedly arranged in multiple housings.

[0184] Conversely, the multiple functions in the measurement system 1 can also be concentrated in one housing. Also, at least a part of the functions of the measurement system 1, for example, a part of the functions of the measurement system 1, can also be implemented through the cloud (cloud computing), etc.

[0185] In the above embodiment, the measurement system 1 has both the first measurement processing unit G1 and the second measurement processing unit G2, but it is not necessary to have both, and it can have only either one. However, the spindle servo amplifier without a measurement processing unit preferably has a function of outputting the first information, the second information, and the third information to an external device.

[0186] The exchange of the first information, the second information, and the third information between the first amplifier B1 and the second amplifier B2 can also be recorded on a non-transitory recording medium such as a memory card. Calibration information such as a position correction amount can also be recorded on a non-transitory recording medium such as a memory card and used.

[0187] In the above-described embodiment, the measurement system 1 calculates the position correction amount at any time during the test operation. However, the first information, the second information, and the third information obtained during the test operation can also be used to calculate the position correction amount after the end of the test operation.

[0188] In the above-described embodiment, regarding the third information (vibration frequency characteristics), like the first information (thrust), the measurement system 1 acquires it during the same test operation. However, the third information (vibration frequency characteristics) can also be acquired through a test operation independent of the above-described test operation.

[0189] In the above-described embodiment, the function of the instruction unit 10 of the measurement system 1 is installed in the processing unit 71 of the terminal 7. However, for example, as Figure 5 shown, the function of the instruction unit 10 can also be installed in the upper controller 6. Figure 5 is a schematic structural block diagram for explaining a first modification example in the measurement system 1. The operator uses the user interface attached to the upper controller 6 to perform an operation input for sending a test signal. Thereby, the instruction unit 10 of the upper controller 6 sends a test signal of a synchronized position command to the first amplifier B1 and the second amplifier B2. The exchange of the first information, the second information, and the third information during the test operation can also be performed by direct communication between the first amplifier B1 and the second amplifier B2, or can be performed by indirect communication via another device (such as the upper controller 6, etc.).

[0190] Or, for example, as Figure 6 shown, the function of the instruction unit 10 can also be installed in the control device C1. Figure 6 is a schematic structural block diagram for explaining a second modification example in the measurement system 1. In Figure 6In the illustrated example of the figure, the function of the instruction unit 10 is installed only in the first amplifier B1, but it can also be installed only in the second amplifier B2, or it can be installed in the spindle servo amplifiers of both. The operator uses the user interface attached to the first amplifier B1 to perform an operation input for sending a test signal. As a result, the instruction unit 10 of the first amplifier B1 sends the test signal of the synchronized position command to the first measurement processing unit G1 in the machine and the second measurement processing unit G2 of the second amplifier B2. The exchange of the first information, the second information, and the third information during the test operation can also be performed by direct communication between the first amplifier B1 and the second amplifier B2, or can be performed by indirect communication via another device (such as the upper controller 6, etc.).

[0191] And, or, for example, as Figure 7 shown, all the functions of the measurement system 1 can also be installed in the processing unit 71 of the terminal 7. Figure 7 It is a schematic structural block diagram for explaining Modification Example 3 in the measurement system 1. In this case, the first output unit 41 of each of the first amplifier B1 and the second amplifier B2 outputs the first information (thrust force) during the test operation to the terminal 7. The second output unit 42 of each of the first amplifier B1 and the second amplifier B2 outputs the second information (position of the motor) during the test operation to the terminal 7. In addition, each of the first amplifier B1 and the second amplifier B2 outputs the third information (vibration frequency characteristics) during the test operation to the terminal 7. On the other hand, the terminal 7 sends correction information including the position correction amount calculated by the calculation unit 14 to at least one of the first amplifier B1 and the second amplifier B2 and stores it in the storage unit 5.

[0192] (10)Modification Example Related to Correction Coefficient

[0193] Hereinafter, regarding Modification Example 4 (this modification example) in the measurement system 1, refer to Figures 8 - 16 for explanation.

[0194] In the above-described embodiment, the calculation unit 14 obtains the difference value between the first force (thrust force or torque) and the second force (thrust force or torque) at the same time, and multiplies the correction coefficient by the difference value to calculate the position correction amount. In addition, in the above-described embodiment, regarding this correction coefficient, the coefficient operation unit 15 operates using a function F(f1, f2, M) related to the resonance frequency f1, the anti-resonance frequency f2, and the load mass M of the first drive system A11 and the second drive system A12.

[0195] The measurement system 1 of this modified example, similar to the measurement system 1 of the above-described embodiment, includes a coefficient calculation unit 15 that calculates a correction coefficient. However, in the measurement system 1 of this modified example, its calculation method is different from that of the measurement system 1 of the above-described embodiment. In the measurement system 1 of this modified example, the instruction unit 10 executes the control of the first motor M1 and the second motor M2 so as to perform a test operation for calculating the correction coefficient.

[0196] Specifically, the test operation further includes the following "specific test operation": different position commands are provided so as to generate an offset of a given movement amount between the first main shaft Y1 and the second main shaft Y2, and the first main shaft Y1 and the second main shaft Y2 move synchronously to a specified position. The coefficient calculation unit 15 calculates the correction coefficient based on the fourth information related to the first force and the second force in the specific test operation and the given movement amount.

[0197] The "offset of the given movement amount" mentioned here refers to an offset within the allowable movement amount, for example, an offset of about 90% of the allowable movement amount is assumed. The allowable movement amount is the allowable amount at which it is considered that the first main shaft Y1 and the second main shaft Y2 connected in parallel via the sub-shaft X1 will not malfunction or break due to the "offset".

[0198] For example, an offset of a given movement amount is set for the first main shaft Y1. That is, it can be set that the first main shaft Y1 is offset by a given movement amount to the positive side (or negative side) of the Y-axis (axial direction D1) with respect to the second main shaft Y2 that has moved to the reference position. The "reference position" mentioned here refers to, for example, a position that does not take into account the position correction amount described in the above embodiment.

[0199] Alternatively, for example, an offset of a given movement amount can also be set for the second main shaft Y2. That is, it can be set that the second main shaft Y2 is offset by a given movement amount to the positive side (or negative side) of the Y-axis with respect to the first main shaft Y1 that has moved to the reference position.

[0200] Furthermore, alternatively, for example, an offset of a given movement amount can be set for both the first main shaft Y1 and the second main shaft Y2. That is, it can be set that the first main shaft Y1 is offset by a first movement amount to the positive side (or negative side) of the Y-axis with respect to the reference position, and the second main shaft Y2 is offset by a second movement amount to the side opposite to the side where the first main shaft Y1 is offset, that is, the negative side (or positive side) of the Y-axis, with respect to the reference position. In this case, the sum of the first movement amount and the second movement amount becomes the given movement amount.

[0201] The fourth information is acquired by the first acquisition unit 11. That is, the first acquisition unit 11 acquires the fourth information related to the first force (e.g., thrust) applied to the first main shaft Y1 and the second force (e.g., thrust) applied to the second main shaft Y2 in a specific test operation from the first output unit 41.

[0202] In this modification example, as an example, in addition to the specific test operation, the test operation further includes a "reference test operation" in which the same position command is provided and the first main shaft Y1 and the second main shaft Y2 move synchronously to a specified position as the test operation for calculating the correction coefficient. The coefficient calculation unit 15 calculates the correction coefficient based on the fourth information, the given movement amount, and the fifth information related to the first force and the second force in the reference test operation. In the reference test operation, no "offset of the given movement amount" as in the specific test operation is set, and the first main shaft Y1 and the second main shaft Y2 move to the reference position.

[0203] The fifth information is acquired by the first acquisition unit 11. That is, the first acquisition unit 11 acquires the fifth information related to the first force (e.g., thrust) applied to the first main shaft Y1 and the second force (e.g., thrust) applied to the second main shaft Y2 in the reference test operation from the first output unit 41.

[0204] In this modification example, as an example, the fourth information includes information related to the difference value, i.e., the specific difference value, between the first force and the second force at the same time in the specific test operation. The fifth information includes information related to the difference value, i.e., the reference difference value, between the first force and the second force at the same time in the reference test operation. The coefficient calculation unit 15 calculates the correction coefficient based on the change amount of the specific difference value relative to the reference difference value and the given movement amount.

[0205] For example, the coefficient calculation unit 15 calculates the reference difference value Δt1 (e.g., the first thrust value - the second thrust value in the reference test operation), and in addition, calculates the specific difference value Δt2 (e.g., the first thrust value - the second thrust value in the specific test operation). In addition, the coefficient calculation unit 15 calculates the position difference Δd between the position of the first main shaft Y1 and the position of the second main shaft Y2 caused by the "offset of the given movement amount".

[0206] The coefficient calculation unit 15 calculates Δt2 - Δt1 as the change amount of the specific difference value relative to the reference difference value. Then, the coefficient calculation unit 15 calculates Δd / (Δt2 - Δt1) as the correction coefficient. Δd can be a representative value (average value, central value, mode value, etc.) of the position differences calculated for each position. In addition, Δt2 - Δt1 can be a representative value (average value, central value, mode value, etc.) of the change amounts calculated for each position.

[0207] In addition, as the test operation for calculating the correction coefficient, it is not necessary to perform the reference test operation. For example, the given movement amount can be changed to perform two specific test operations, and the correction coefficient can be calculated based on these change amounts. In addition, the order of performing the reference test operation and the specific test operation is not particularly limited.

[0208] Hereinafter, regarding a series of processes of the operations related to the acquisition of the correction coefficient and the measurement of the correction amount in the measurement system 1 according to this modification example, refer to Figure 8 the flowchart shown in Figures 9 - 16 and, as appropriate, refer to the conceptual diagram showing the UI (user interface) screen Figure 8 to explain. Figure 9 is a flowchart for explaining the operations related to the acquisition of the correction coefficient in the measurement system of this modification example. Figure 10 is a conceptual diagram of the correction value confirmation screen in this modification example. Figure 11 is a conceptual diagram of the operation screen in this modification example. Figure 12 is a conceptual diagram of the correction value confirmation screen in this modification example. Figure 13 is a conceptual diagram of the thrust difference confirmation screen in this modification example. Figure 14 is a conceptual diagram of the thrust difference confirmation screen in this modification example. Figure 15 is a conceptual diagram of the thrust difference confirmation screen in this modification example. Figure 16 is a conceptual diagram of the correction value confirmation screen in this modification example. Figure 8 The flowchart shown in

[0209] is merely an example of the operation process related to the acquisition of the correction coefficient of the measurement system 1, and the order of processing can be appropriately changed, and processing can be appropriately added or omitted.

[0210] Figures 9 - 16 The UI screen shown in Figure 2 can be displayed on the display unit 70 of the terminal 7 (refer to Figures 9 - 16 ). Figures 9 - 16 The numerical values displayed on each UI screen in

[0211] are merely examples and are not particularly limited. In addition, Figures 9 - 16 the "thrust difference" displayed on the UI screen in

[0211] can also be "torque difference".

[0211] For example, in order to start the test operation, the operator uses the operation unit 72 (refer to Figure 1)( ) to start a dedicated application software and perform operation inputs related to the output execution of position commands for the first amplifier B1 and the second amplifier B2.

[0212] First, when an operator starts the dedicated application software, the processing unit 71 of the terminal 7 displays an operation screen G102 on the screen of the display unit 70 (refer to Figure 10 ).

[0213] The operation screen G102 includes an operation area R1 showing a plurality of (nine in the illustrated example) instruction contents CMD1 (string data), and a plurality of (nine in the illustrated example) status display areas R2 respectively corresponding to the plurality of instruction contents CMD1.

[0214] Each operation area R1 is an area that functions as an execution button for executing the corresponding instruction content CMD1. If any operation area R1 is pressed with an indicator of a mouse (operation unit 72) or the like, the process of the instruction content CMD1 corresponding to the operation area R1 is executed. For example, when the measurement system 1 is executing the process of the instruction content CMD1 of "start auto - calibration", the corresponding operation area R1 becomes gray.

[0215] Each status display area R2 is an area that displays whether the process of the corresponding instruction content CMD1 is being executed. For example, when the measurement system 1 is executing the process of the instruction content CMD1 of "start auto - calibration", the corresponding status display area R2 becomes a green - lit state. For example, when the measurement system 1 is not executing the process of the instruction content CMD1 of "start auto - calibration", the corresponding status display area R2 becomes an unlit state.

[0216] In addition, in response to the start of the application software, the processing unit 71 of the terminal 7 automatically reads the calibration information (such as position correction amount) stored in the first storage unit 51 of the first amplifier B1. Additionally, when the calibration information is stored in the second storage unit 52 of the second amplifier B2, the processing unit 71 reads the calibration information from the second storage unit 52.

[0217] When the processing unit 71 cannot accept the specified instruction content CMD1 in the current state, for notifying this meaning, it performs screen control so that the operation area R1 is displayed in gray and cannot be pressed with an indicator of a mouse (operation unit 72). For example, when data such as calibration information is being read, the processing unit 71 performs screen control to notify the operator that the specification of all instruction contents CMD1 cannot be accepted, so that all operation areas R1 are displayed in gray and none of the operation areas R1 can be pressed.

[0218] In addition, the processing unit 71 displays a correction value confirmation screen G101 (refer to Figure 9 ; in Figures 9 - 16 , the position correction amount is recorded as the "correction value") on the display unit 70.

[0219] The correction value confirmation screen G101 includes a display area A100 showing the numbers of a plurality of correction points (from "1" to "10" in Figure 9 ), a display area A101 showing the "correction position [pulses]" for each correction point, and a display area A102 showing the "correction value [pulses]" for each correction point. In the correction value confirmation screen G101, as an example, the correction position and the correction value (position correction amount) are shown in units of the command pulse amount to a motor (for example, the first motor M1). In addition, the correction position is the position to be corrected and corresponds to the above-mentioned "reference position". The correction position of the default value is shown in Figure 9 , but the number of correction points (number of correction points) and the correction position can be set and changed through a parameter setting screen G103 (refer to Figure 11 ) described later.

[0220] In addition, the correction value confirmation screen G101 includes a display area A103 showing the thrust difference [0.1%] in the "go (outward stroke during reciprocating motion)" for a plurality of correction points and a display area A104 showing the thrust difference [0.1%] in the "return (return stroke during reciprocating motion)". In addition, the value obtained by averaging the thrust difference in "go" and the thrust difference in "return" for each correction position is used as the "thrust difference", and thus the position correction amount (thrust difference × correction coefficient) is calculated.

[0221] In this modified example, it is assumed that one trial operation is a reciprocating motion in which the main shaft synchronously moves from the start position (first origin position) of the Y-axis to a position on the positive side of the Y-axis and then returns to the end position (second origin position; may be the same as or different from the first origin position). In addition, the start position of the start measurement and the end position of the end measurement are not necessarily the same as the first origin position and the second origin position, and can be located, for example, on the positive side of the first origin position and the second origin position.

[0222] In Figure 9 , as an example, a state in which the "correction value", "go", and "return" are all cleared is shown.

[0223] When the application software is started for the first time, if the correction amount measurement process has not been executed even once, the correction values (position correction amounts) on the correction value confirmation screen G101 can all be zero.

[0224] If a calibration amount measurement process has been performed once, a value other than zero can be displayed as the calibration value (position calibration amount) on the calibration value confirmation screen G101. When the operator wants to clear the calibration value, the operator presses the operation area R1 corresponding to the instruction content CMD1 of "clear calibration value table" displayed on the operation screen G102. As a result, the processing unit 71 executes a process of clearing all calibration values (position calibration amounts).

[0225] In addition, the processing unit 71 displays a parameter setting screen G103 (see Figure 11 ) for setting values of various parameters related to the test operation on the display unit 70.

[0226] The parameter setting screen G103 includes a display area R3 showing the names (string data) of various parameters and an input area R4 for accepting input of the values of the parameters. Hereinafter, various parameters displayed on the parameter setting screen G103 will be described.

[0227] The parameter "number of calibration points" is the number of calibration points for measuring the calibration value (position calibration amount). In the example of Figure 11 , "101" is input. In this case, on the calibration value confirmation screen G101, the calibration positions and calibration values for calibration points "1" to "101" can be confirmed (only calibration points "1" to "10" are illustrated in Figure 9 ).

[0228] The parameter "calibration interval [pulses]" is the interval between calibration points, shown in units of the command pulse amount to the motor (for example, the first motor M1). If the calibration interval is multiplied by the number of calibration points, the distance to be calibrated is obtained. In the example of Figure 11 , "2700" is input. In the calibration value confirmation screen G101 shown in Figure 12 reflecting this value, the calibration positions of calibration points "2", "3", "4",... become 2700, 5400, 8100,....

[0229] The parameter "measurement start position [pulses]" is the position of the first calibration point, shown in units of the command pulse amount to the motor (for example, the first motor M1). In the example of Figure 11 , "0" is input. In the calibration value confirmation screen G101 shown in Figure 12 reflecting this value, the calibration position of calibration point "1" becomes 0.

[0230] The parameter "number of reciprocating movements" is the number of reciprocating movements performed when obtaining data on the thrust difference. The data on the thrust difference for this number of times is obtained, and its representative value (for example, the average value) is adopted as the true thrust difference.

[0231] The parameter "correction coefficient" is a parameter that is multiplied by the thrust difference in order to obtain a correction value (position correction amount). In Figure 11 the example of

[0232] "0.100" is preset as the initial value. The correction coefficient can be updated by performing the above-mentioned specific test operation and reference test operation and executing the arithmetic processing of the correction coefficient. That is to say, this "correction coefficient" is a parameter that is automatically updated and is a parameter that does not require the operator (user) to directly input.

[0233] The parameter "reciprocating motion start point [pulses]" is the above-mentioned first origin position of the test operation, that is, the position that becomes the start point of the reciprocating motion when obtaining the thrust difference data, and is shown in the unit of the command pulse amount to the motor (for example, the first motor M1). The parameter "reciprocating motion start point [pulses]" is preferably set to a value smaller than the start position of the start measurement.

[0234] The parameter "reciprocating motion end point [pulses]" is the above-mentioned second origin position of the test operation, that is, the position that becomes the end point of the reciprocating motion when obtaining the thrust difference data, and is shown in the unit of the command pulse amount to the motor (for example, the first motor M1). The parameter "reciprocating motion end point [pulses]" is preferably set to a value larger than the position of the last correction point.

[0235] The parameter "correction coefficient calculation use movement amount (offset)" is the "given movement amount" used in the above-mentioned specific test operation. In this modified example, as an example, "10" (unit: [pulses]) is preset. The parameter "correction coefficient calculation use movement amount (offset)" is preferably set to be equal to or less than the above-mentioned allowable movement amount.

[0236] If the setting operation of the above various parameters is completed in the parameter setting screen G103, the operator presses the operation area R1 corresponding to the instruction content CMD1 of "parameter writing" in the operation screen G102 (refer to Figure 10 ). As a result, the various set parameters are stored in the storage unit 73 of the terminal 7 (or it may be the first storage unit 51 of the first amplifier B1 or the second storage unit 52 of the second amplifier B2, etc.).

[0237] On the other hand, if the operator presses the operation area R1 corresponding to the instruction content CMD1 of "parameter reading" on the operation screen G102, various parameters saved last time in the storage unit 73 (or the first storage unit 51, the second storage unit 52, etc.) are displayed on the parameter setting screen G103.

[0238] [Obtaining Correction Coefficient]

[0239] Before the operator performs the correction amount measurement process, the operator executes the obtaining of the correction coefficient. The operator presses the operation area R1 corresponding to the instruction content CMD1 of "correction coefficient obtaining" on the operation screen G102 (refer to Figure 10 ). As a result, the measurement system 1 starts a series of operations related to the obtaining of the correction coefficient (refer to the flowchart in Figure 8 ).

[0240] First, the measurement system 1 obtains communication synchronization between the first main shaft Y1 and the second main shaft Y2 (step ST21).

[0241] The measurement system 1 executes a "reference test operation" in which the same position command is provided and the first main shaft Y1 and the second main shaft Y2 move synchronously to a specified position (step ST22). In the reference test operation, at least a part of the parameters set in the parameter setting screen G103 (for example, the number of correction points, the correction interval, etc.) can also be applied.

[0242] The measurement system 1 calculates the difference between the first thrust value of the first main shaft Y1 and the second thrust value of the second main shaft Y2 at each correction point obtained in the reference test operation, that is, the reference difference value Δt1 (step ST23).

[0243] Next, the measurement system 1 executes a "specific test operation" (step ST24), in which different position commands are provided and the first main shaft Y1 and the second main shaft Y2 move synchronously to a specified position so that an offset of a given movement amount (10 [pulses] in the example of Figure 11 ) is generated between the first main shaft Y1 and the second main shaft Y2. One of the first main shaft Y1 and the second main shaft Y2 (here the first main shaft Y1) moves so as to be offset by a given movement amount at all of the correction points. In the specific test operation, at least a part of the parameters set in the parameter setting screen G103 (for example, the movement amount (offset), the number of correction points, or the correction interval, etc.) can also be applied.

[0244] For each calibration point, the measurement system 1 calculates the position difference Δd between the position of the first main shaft Y1 and the position of the second main shaft Y2 caused by the offset of the movement amount (step ST25). In addition, the measurement system 1 calculates the average value (which can also be a representative value other than the average value) of the position differences at all calibration points, and sets this average value as the final position difference Δd.

[0245] In addition, the measurement system 1 calculates the difference between the first thrust value of the first main shaft Y1 and the second thrust value of the second main shaft Y2 at each calibration point obtained in a specific test operation, that is, the specific difference value Δt2 (step ST26).

[0246] Finally, the measurement system 1 calculates the average value (which can also be a representative value other than the average value) of (Δt2 - Δt1) at all calibration points, sets this average value as the final (Δt2 - Δt1), and calculates Δd / (Δt2 - Δt1) as the calibration coefficient (step ST27). Thus, a series of operations related to the acquisition of the calibration coefficient are completed. Alternatively, the measurement system 1 can calculate the average value of Δt1 at all calibration points, calculate the average value of Δt2 at all calibration points, set the difference between the average values as the final (Δt2 - Δt1), and calculate Δd / (Δt2 - Δt1) as the calibration coefficient.

[0247] The calibration coefficient obtained in this way is automatically updated as the parameter "calibration coefficient". The initial calibration coefficient "0.100" (refer to Figure 11 ) is automatically updated to the newly obtained calibration coefficient (for example, "0.080"). The operator can confirm the updated parameter "calibration coefficient" on the parameter setting screen G103 (refer to Figure 11 ).

[0248] [Execution of Automatic Calibration Action]

[0249] Next, the operator presses the operation area R1 corresponding to the instruction content CMD1 of "start automatic calibration" on the operation screen G102 (refer to Figure 10 ). As a result, the measurement system 1 starts the automatic calibration action, that is, a series of actions including the calibration amount measurement process (refer to the flowchart shown in Figure 3 ). In addition, as described above, the test operation for calibration amount measurement and the calibration amount measurement process are repeated the number of times of the adjustment times (the number of times of the calibration amount optimization process) set in the parameter setting screen G103. In addition, if the operation screen G102 (refer to Figure 10If the operation area R1 corresponding to the indication content CMD1 of "start of reciprocating motion" in ) is pressed, the measurement system 1 performs a reciprocating motion, but does not perform processes such as calculation of correction values (position correction amounts). The operation area R1 of "start of reciprocating motion" can be used, for example, to confirm the current state of the thrust difference.

[0250] During the execution of the automatic calibration operation, as Figure 12 shown in the calibration value confirmation screen G101 and Figure 13 shown in the thrust difference confirmation screen G104, the appearance of calculating the calibration value (position correction amount) at each calibration point or the average value of the thrust differences at each calibration point, etc. is displayed in real time.

[0251] Here, the thrust difference confirmation screen G104 will be described. The processing unit 71 displays the thrust difference confirmation screen G104 (refer to Figures 13 - 15 ) for confirming the thrust difference (which can also be a torque difference) as the measurement result on the display unit 70.

[0252] The thrust difference confirmation screen G104 shows a display area C100 indicating the number of adjustment times (for example, "1" is the first adjustment, that is, the first correction amount optimization process). In addition, the thrust difference confirmation screen G104 includes a display area R6 showing "average thrust difference of go (outward stroke)" (displayed as an absolute value, for example) for each adjustment, a display area R7 showing "average thrust difference of return (return stroke)" (displayed as an absolute value, for example), and a display area R5 showing "the larger one of the average values of the thrust differences of go / return" (displayed as an absolute value, for example). In addition, the thrust difference confirmation screen G104 includes an input area R8 for accepting a selection input of "data selection to be applied" for each adjustment.

[0253] The "average thrust difference of go" refers to the average value of the thrust differences between the first thrust value and the second thrust value of the outward stroke of the reciprocating motion in each adjustment, for all calibration points. In addition, the "average thrust difference of return" refers to the average value of the thrust differences between the first thrust value and the second thrust value of the return stroke of the reciprocating motion in each adjustment, for all calibration points. The "the larger one of the average values of the thrust differences of go / return" refers to the larger value between the "average thrust difference of go" and the "average thrust difference of return" in each adjustment. Using Figure 13 as an example, when the number of adjustments is the first time (that is, "1"), among "average thrust difference of go" = 528 and "average thrust difference of return" = 400, the "average thrust difference of the outward stroke" = 528 is larger, so 528 is displayed in the "the larger one of the average values of the thrust differences of go / return".

[0254] The conditions for the completion of the automatic correction operation are, for example, the following two conditions: the "first condition" and the "second condition". If either one is satisfied, the measurement system 1 completes the automatic correction operation.

[0255] The "first condition" is that the measurement of the number of times of adjustment set in the parameter setting screen G103 (the test operation for calibration amount measurement and the calibration amount measurement process) is completed.

[0256] The "second condition" is that the operation area R1 corresponding to the instruction content CMD1 of "forced completion of automatic correction" in the operation screen G102 (refer to Figure 10 ) is pressed. If "forced completion of automatic correction" is instructed during the execution of the automatic correction operation, the measurement system 1 forcibly completes the automatic correction operation at the time point when the acquisition of the thrust difference in the current measurement is completed, even if the measurement of the number of times of adjustment has not been completed.

[0257] For example, the operator confirms the thrust difference confirmation screen G104, etc. When it is judged that the thrust difference converges to a certain extent and no further effect can be obtained even if further adjustment (optimization process) is continued, the operator can select "forced completion of automatic correction" on the operation screen G102 in order to shorten the time. For example, in Figure 14 the shown thrust difference confirmation screen G104, the thrust differences corresponding to the adjustment times from the 11th to the 17th shown within the frame D100 converge to around "45" to a certain extent, and it is expected that the thrust difference will not become smaller even if the adjustment is continued. The operator can also select "forced completion of automatic correction" at the time point when the 17th adjustment (optimization) is completed.

[0258] After the automatic correction operation is completed when the first condition or the second condition is satisfied, the operator confirms the thrust difference of the adjusted amount on the thrust difference confirmation screen G104 and selects which adjusted thrust difference to apply, in other words, selects which correction value (position correction amount) of the adjustment to apply. For example, in Figure 15 the example, the operator selects the adjustment with the 19th adjustment number showing the smallest "44" among the "larger average of the forward / return thrust differences" of the 21st adjustment (optimization process). That is, if the operator presses the input area R8 corresponding to the 19th adjustment number with the mouse pointer or the like, the corresponding input area R8 will be displayed as "selected" as Figure 15 shown.

[0259] In the state where the 19th adjustment number is selected, the operator presses the operation screen G102 (refer to Figure 10The operation area R1 corresponding to the indication content CMD1 of "select data correction value reflection" in ) is shown. As a result, the measurement system 1 uses the reflected correction coefficient calculated as described above to calculate the correction value (position correction amount) related to each correction point in the 19th adjustment number = thrust difference (as described above, the average of the thrust difference of "go" and the thrust difference of "return" at this correction position) × correction coefficient, and reflects the result. For example, as shown in Figure 16 The correction value confirmation screen G101 shows the thrust difference of "go", the thrust difference of "return", and the reflected correction value (position correction amount) related to each correction point in the 19th adjustment number. The reflected correction value (position correction amount) is also sent to the first amplifier B1 (in the case where the correction value is saved in the second amplifier B2, it is sent to the second amplifier B2).

[0260] Before the operator presses and executes "auto correction start" on the operation screen G102 again, the operator can perform the operation of selecting another adjustment number on the thrust difference confirmation screen G104 and executing "select data correction value reflection" on the operation screen G102 any number of times.

[0261] If the operator confirms the reflected correction value, etc. on the correction value confirmation screen G101 and decides to set it with this content, the operator presses the operation area R1 corresponding to the indication content CMD1 of "EEPROM write" on the operation screen G102. As a result, the data of the reflected correction value (position correction amount) is saved in the first storage unit 51 (EEPROM (Electrically Erasable and Programmable Read Only Memory)) of the first amplifier B1.

[0262] In this way, in this modification example, the measurement system 1 calculates the correction coefficient based on the measurement results obtained from the specific test actions, and uses this correction coefficient to calculate the correction value (position correction amount), so that the influence that may be caused by the interference between the axes can be further suppressed.

[0263] In addition, in Figure 11 In the example, in order to simplify the table design of the correction value (position correction amount), three parameters are envisioned: the correction interval [pulses], the starting point [pulses] of the reciprocating motion, and the ending point [pulses] of the reciprocating motion are respectively input and specified by the operator (user). And by the operator inputting the values of these parameters, the measurement system 1 automatically calculates and sets the number of correction points (in other words, the number of divisions). In the case of specifying the correction interval like this, a design based on the number of pulses equivalent to the physical distance can be guaranteed.

[0264] However, not limited thereto, the number of calibration points (number of divisions) may be specified by the operator instead of the calibration interval. That is, in order to simplify the table design of the position correction amount, it may also be the case that three parameters: the number of calibration points (number of divisions), the starting point of the reciprocating motion, and the ending point of the reciprocating motion are input by the operator, and the measurement system 1 automatically calculates and sets the calibration interval.

[0265] In other words, the measurement system 1 includes a processing unit (here, as an example, the processing unit 71 of the terminal 7). The processing unit 71 acquires the starting point of the test motion, the ending point of the test motion, and the number of points for calculating the position correction amount between the starting point and the ending point, that is, the number of calibration points (number of divisions), as parameters applied to the test motion (such as a reciprocating motion). The processing unit 71 calculates the calibration interval based on the number of calibration points, the starting point, and the ending point.

[0266] In the case where the number of calibration points (number of divisions) is specified by the user in this way, to what extent the storage amount (such as that of the storage unit 5, etc.) required to store the data of the position correction amount increases can be ensured, and a design based on the storage amount can be ensured.

[0267] (11) Variation examples related to various auxiliary functions

[0268] Hereinafter, regarding the measurement system 1 related to Variation Example 5 (this variation example), refer to Figures 17 - 24B for explanation. Figure 17 It is a conceptual diagram of a screen for explaining the first function (unit conversion function) in the measurement system of this variation example. Figure 18 It is a conceptual diagram of a screen for explaining the first function of this variation example. Figure 19A It is a conceptual diagram of a screen for explaining the second function (transformation function into a graphical form) of this variation example. Figure 19B It is a conceptual diagram of a screen for explaining the second function (transformation function into a graphical form) of this variation example. Figure 20 It is a conceptual diagram of a screen for explaining the third function (date information association establishment function) of this variation example. Figure 21A It is a conceptual diagram of a screen for explaining the fourth function (transformation function into a chart form) of this variation example. Figure 21B It is a conceptual diagram of a screen for explaining the fourth function (transformation function into a chart form) of this variation example. Figure 22A It is a conceptual diagram of a screen for explaining the fifth function (transformation function into a histogram form) of this variation example. Figure 22B It is a conceptual diagram of a screen for explaining the fifth function (transformation function into a histogram form) of this variation example. Figure 23 It is a conceptual diagram of a screen for explaining the sixth function (comparative display function of past data) of this variation example. Figure 24AThis is a conceptual diagram of a screen for explaining the 7th function (comparative display function in a different display format for past data) of this modified example. Figure 24B This is a conceptual diagram of a screen for explaining the 7th function (comparative display function in a different display format for past data) of this modified example. The measurement system 1 according to Modified Example 5 has various auxiliary functions (1st to 7th functions) to assist an operator (user). Figures 17 - 24B The various user screens (window screens) shown can be displayed on the display unit 70 of the terminal 7 (refer to Figure 2 ). The numerical values displayed on each user screen in Figures 17 - 24B are just examples and are not particularly limited. In addition, the "torque difference" (between the Y1 axis and the Y2 axis) on the user screen in several of the attached drawings shown in Figures 17 - 24B can also be a "thrust difference".

[0269] The auxiliary function in Modified Example 5 is mainly a function to assist the user when the user confirms information related to the measurement of the position correction amount on the user screen. The so-called "information related to the measurement of the position correction amount" can include setting conditions related to the test operation, the states of the Y1 axis and the Y2 axis during the test operation, and data related to the measurement results of the position correction amount (including past data).

[0270] [1st Function]

[0271] The measurement system 1 according to Modified Example 5 has the 1st function (unit conversion function) as one of the auxiliary functions. Hereinafter, regarding the 1st function, refer to Figure 17 、 Figure 18 for explanation.

[0272] The measurement system 1 can display the Figure 17 shown user screen G201 on the display unit 70 of the terminal 7. If the user, for example, starts a dedicated application software on the terminal 7 using the operation unit 72 (refer to Figure 1 ) and makes an operation input for starting the test operation, the user screen G201 is displayed. The user screen G201 can also be a screen displayed by executing an operation for opening a past data file FL1 described later.

[0273] As an example, the user screen G201 includes a 1st area H1 that displays setting conditions and states related to the 1st main axis Y1 (i.e., the Y1 axis), and a 2nd area H2 that displays setting conditions and states related to the 2nd main axis Y2 (i.e., the Y2 axis). The user screen G201 shows an example in the case of calculating the position correction amount of the Y2 axis based on the position of the Y1 axis. As a result, the Y1 axis is marked as the "reference axis" and the Y2 axis is marked as the "correction axis".

[0274] In addition, the user screen G201 includes a table display area H3 that shows the measurement results related to the calibration position, calibration value (position correction amount), etc. in the form of a table. This table display area H3 can also be said to be Figure 9 a modified example of the display example of the calibration value confirmation screen G101 shown in the figure, which includes the calibration position, calibration value, etc. In Figure 17 this example, for convenience, the calibration position, calibration value, etc. corresponding to the numbers of three calibration points ("No.1" to "No.3") are shown, but the number of calibration points is not particularly limited. For example, it can be 10 or more.

[0275] In addition, the user screen G201 includes a setting area H4 where setting conditions (such as numerical values of parameters) such as the moving speed and acceleration during the test operation can be input. These setting conditions can be set (input) by the user as preparations before the test operation.

[0276] The [command unit] displayed on the user screen G201 is, for example, the same as that of the Figure 9 calibration value confirmation screen G101, which is the unit of the command pulse quantity to the motors (M1, M2), namely [pulse].

[0277] On the user screen G201, the user confirms the first area H1 and the second area H2. If the input of the setting conditions is completed in the setting area H4 and the preparations for the test operation are completed, the user operates the mouse (operation unit 72) with an indicator on the screen or the like to press the operation area H5 in the lower right that shows "Adjustment Start". Then, the test operation (measurement of the position correction amount) starts. In addition, when stopping the test operation (measurement of the position correction amount), the user can stop the test operation by pressing the operation area H6 that shows "Adjustment Stop" with an indicator or the like.

[0278] In short, the first area H1, the second area H2, the table display area H3, the setting area H4, etc. are simultaneously displayed on one screen (user screen G201), which can achieve the convenience of the user.

[0279] Here, the user screen G201 also includes a selection area H7 for the user to select (specify) the display unit. If the user presses the downward arrow mark in the selection area H7 with an indicator on the screen or the like, a list of multiple selectable display units is displayed as a list (so-called drop-down function). In Figure 17 this example, the list includes four display units: [command unit (pulse)], distance units [mm], [μm], and [inch], and [command unit (pulse)] is selected as the initial setting.

[0280] The user selects one display unit other than the [instruction unit] from this list, so that the value displayed as the [instruction unit] in the user screen G201 is transformed into the value in the selected display unit and displayed.

[0281] In other words, the measurement system 1 includes a processing unit (here, as an example, the processing unit 71 of the terminal 7). The processing unit 71 causes data including at least the position correction amount (correction value) to be displayed on the display unit 70. The processing unit 71 performs a display unit transformation so that the value of the data displayed in a specific unit on the screen of the display unit 70 is displayed in another unit selected according to the (user's) selection operation.

[0282] Figure 18 The user screen G202 showing that the [instruction unit] is transformed into the distance [mm] because the user selects the distance [mm] as the display unit in the selection area H7 is shown. That is, because the display unit [mm] is selected, the corresponding value is transformed and displayed in the user screen G202. The user screen G202 is the same as the Figure 17 user screen G201 except for the display unit [mm] and its value. If the user selects the [instruction unit (pulse)] again in the selection area H7, then it returns to the Figure 17 user screen G201.

[0283] For the user, the value displayed in the instruction unit (pulse) is sometimes difficult to intuitively understand. In the first function, the user can select any one of the actual distances [mm], [μm], [inch] in the selection area H7. As a result, the user can confirm the setting conditions, measurement results, etc. with values that are easy to intuitively understand.

[0284] In addition, if the user selects a display unit in the selection area H7 of the user screen G201, then in the user screens related to the second to seventh functions described later, the values in the unit selected in the user screen G201 are also automatically displayed. Specifically, for example, if the distance [mm] is selected in the user screen G201, then in the Figure 19A , Figure 19B shown user screens G301, G302, the values are also automatically displayed in the unit of the distance [mm]. In addition, it can be set that the selection area H7 is also displayed in the user screens related to the second to seventh functions, and the user can also select a display unit in the user screens related to the second to seventh functions.

[0285] [Second function]

[0286] The measurement system 1 involved in Modification 5 has a second function (transformation function into a graph form) as one of the auxiliary functions. Hereinafter, regarding the second function, refer to Figure 19A, Figure 19B is described as follows.

[0287] The measurement system 1 can display Figure 19A the user screen G301 shown in Figure 19B and the user screen G302 shown in on the display unit 70 of the terminal 7.

[0288] The user screen G301, for example, is similar to Figure 17 the user screen G201 and Figure 18 the user screen G202, and includes a table display area H3. The user screen G301 can be a part of the user screen G201 or G202, or can be a screen displayed independently of the user screens G201 and G202. The user screen G301 can also be a screen displayed by performing an operation to open a later-described past data file FL1.

[0289] In addition, the user screen G301 further includes a selection area H8, and the selection area H8 is used for the user to select (specify) a display form related to data including a calibration position, a calibration value, a torque difference, etc. If the user presses the down arrow mark of the selection area H8 with an indicator on the screen, a list of multiple selectable display forms is displayed as a list (drop-down function).

[0290] In Figure 19A 's example, the list includes two display forms, [table form] and [graph form], and [table form] like the table display area H3 is selected as the initial setting.

[0291] The user selects one display form other than [table form] from this list, and here selects [graph form]. As a result, as Figure 19B shown, the user screen G302 in which data including a calibration position, a calibration value, a torque difference, etc. is marked in graph form is displayed. The user screen G302 can be additionally displayed while maintaining the state where the user screen G301 is displayed, or can be displayed by closing the user screen G301 and replacing it. In short, the measurement system 1 has a second function of changing data including a calibration value, etc. displayed in a specific display form on the screen to another display form selected according to the user's selection operation (in this example, changing from the table form to the graph form) and displaying it.

[0292] The user screen G302 includes a graph display area H9. The graph display area H9 depicts a horizontal axis in which the Y1 axis and the Y2 axis are schematized. On this horizontal axis, the numbers (“1” to “3”) of three calibration points are shown, and the calibration position, the calibration value, and the torque difference of the position of the Y2 axis of the calibration axis relative to the Y1 axis of the reference axis are shown.

[0293] According to the second function, the user can, according to the selection operation, simply display the data including the correction value, etc. in tabular form or in graphical form. Therefore, it is easier for the user to confirm the data including the correction value, etc. In particular, by displaying the data including the correction value, etc. in graphical form, it is easier for the user to understand more intuitively.

[0294] In addition, in this example, it has been described that the data already being displayed in a specific display form is transformed into another display form for display according to the user's selection operation, but it is not necessary to perform the "transformation from a specific display form to another display form". That is to say, the processing unit of the measurement system 1 (here it is the processing unit 71) can also display the data including at least the position correction amount (correction value) in the display form (here it is tabular form or graphical form) selected according to the (user's) selection operation on the display unit 70.

[0295] [Third function]

[0296] The measurement system 1 involved in Modification 5 has a third function (date information association establishment function) as one of the auxiliary functions. Hereinafter, regarding the third function, reference will be made to Figure 20 for explanation.

[0297] The measurement system 1 can display Figure 20 the user screen G401 shown in the display unit 70 of the terminal 7.

[0298] The user screen G401, for example, is similar to Figure 17 the user screen G201 and Figure 18 the user screen G202, and includes a table display area H3, a setting area H4, etc. The user screen G401 can be a part of the user screen G201 or G202, or can be a screen independently displayed from the user screens G201 and G202.

[0299] The user screen G401, for example, is a screen that can be displayed by the user selecting one of one or more data files FL1 (refer to Figure 20 ) on the screen with an indicator, etc. and performing an operation to open the data file FL1. The data file FL1 can contain at least part of the data such as the measurement results including the correction value (position correction amount) when performing the test operation in the past and the setting conditions (numerical values of parameters) set during the measurement. In Figure 20 the example, the measurement results when performing the test operation in the past are displayed in the table display area H3, and the numerical values of the parameters set during the measurement are displayed in the setting area H4.

[0300] The data file FL1 does not necessarily have to contain both the measurement results and the set conditions. For example, the data file FL1 may contain only the set conditions for management among the measurement results and the set conditions, or conversely, may contain only the measurement results for management of the measurement results. The data file FL1 can be saved in the storage unit 73 etc. after the measurement is completed, for example, and the content can be displayed at any time.

[0301] Here, the measurement system 1 has a third function of associating the above data with the date information of the execution of the test operation (measurement of the correction value) when generating the data file FL1. In other words, the measurement system generates and saves a data file FL1 in which the above data is associated with the date information every time it executes a test operation. The user screen G401 displayed by opening the data file FL1 also includes a date display area H10. In Figure 20 the example, the date display area H10 shows the date information related to the test operation, and this test operation is executed using the numerical values of the parameters displayed in the setting area H4 etc., and the measurement results are obtained and displayed in the table display area H3. In Figure 20 the example, the date information shows the year, month, day, and time (for example, the time when the measurement of the correction value ends) when the correction value is measured, such as "Measurement Date: 2023 / 07 / 10 14:27".

[0302] According to the third function, it is easy for the user to manage past data (data file FL1). In addition, when the user views the past measurement results, the set conditions used in the past measurement, or uses the set conditions used in the past measurement again and then starts measurement, the user can confirm the date information of the measurement in the date display area H10. Therefore, the convenience is further improved. In addition, when using the past set conditions again for measurement, if the "Adjustment Start" in the lower right of the user screen G401 in Figure 20 is pressed with an indicator etc., the test operation using the numerical values of the parameters displayed in the setting area H4 etc. can be executed.

[0303] [Fourth Function]

[0304] The measurement system 1 according to Modification 5 has a fourth function (function of transforming into a chart form) as one of the auxiliary functions. Hereinafter, regarding the fourth function, refer to Figure 21A 、 Figure 21B for explanation. The fourth function is a function similar to the second function described with reference to Figure 19A 、 Figure 19B above.

[0305] The measurement system 1 can Figure 21A the user screen G501 shown in Figure 21BThe user screen G502 shown is displayed on the display unit 70 of the terminal 7.

[0306] The user screen G501, for example, is the same as Figure 17 the user screen G201 of Figure 18 the user screen G202 of Figure 19A the user screen G301 of, and Figure 20 the user screen G401 of, and includes a table display area H3. The user screen G501 can be a part of the user screen G201 or G202, can also be the user screen G301, or can be a screen independently displayed from the user screens G201, G202, and G301. That is to say, the user screen G501 can also be a screen displayed by the start of a test operation like the user screen G201, or can be a screen displayed by performing an operation for opening a past data file FL1 like Figure 20 the user screen G401 of.

[0307] In addition, the user screen G501 also includes a change area H11, and the change area H11 is used for the user to change (transform) the display form of data including correction position, correction value, torque difference, etc. from a table form to another display form. If the user presses the downward arrow mark in the change area H11 with an indicator on the screen, a list of multiple selectable display forms is displayed as a list (drop-down function). In Figure 21A the example of, the list includes two display forms: [Chart] and [Histogram].

[0308] By the user selecting [Chart] from this list, as Figure 21B shown, the user screen G502 marked in a chart form is displayed based on data including correction position, correction value, torque difference, etc. The user screen G502 can be additionally displayed while keeping the user screen G501 displayed, or can close the user screen G501 and be displayed in its place.

[0309] In this way, the measurement system 1 has a fourth function, and the fourth function enables data including correction values, etc. displayed in a specific display form (here, a table form) on the screen to be displayed in another display form (here, a chart form) selected according to the user's selection operation.

[0310] The user screen G502 includes a chart display area H12. The chart display area H12 sets the correction points as the horizontal axis (also records the position of the Y1 axis), and sets the correction value of the position of the Y2 axis relative to the position of the Y1 axis as the vertical axis. In the chart display area H12, a line graph based on the measurement results shown in the table display area H3 is shown. In the chart display area H12, the torque difference of the measurement results is also recorded.

[0311] According to the fourth function, the user can easily display data including correction values and the like in the form of a table or in the form of a graph. Therefore, it is easier for the user to confirm the data including correction values and the like. In particular, by displaying the data including correction values and the like in the form of a graph, it is easier for the user to intuitively understand the change ratio of the correction values between the correction points.

[0312] In addition, in this example, it is assumed that the data that has been displayed in a specific display form is changed to another display form for display according to the user's selection operation, and thus an explanation has been given. However, it is not necessary to perform "transformation from a specific display form to another display form". That is, the processing unit of the measurement system 1 (here, the processing unit 71 of the terminal 7) can also display the data including at least the position correction amount (correction value) in the display form (here, the graph form) selected according to the (user's) selection operation on the display unit 70.

[0313] [Fifth Function]

[0314] The measurement system 1 according to Modification 5 has the fifth function (function of transformation into a histogram form) as one of the auxiliary functions. Hereinafter, regarding the fifth function, reference will be made to Figure 22A , Figure 22B for explanation. The fifth function is a function corresponding to a modification of the fourth function described with reference to Figure 21A , Figure 21B .

[0315] The measurement system 1 can display the user screen G503 shown in Figure 22A and the user screen G504 shown in Figure 21B on the display unit 70 of the terminal 7.

[0316] Figure 22A The user screen G503 of Figure 21A similarly includes a table display area H3 as the user screen G501 and the like. In addition, in Figure 22A , the number of correction points, the numerical value of the measurement result, and the Figure 21A different table display areas H3 are illustrated. In addition, the user screen G503 similarly includes a change area H11 as the user screen G501. In the example of Figure 22A , the list also includes two display forms, [Graph] and [Histogram].

[0317] By the user selecting [Histogram] from this list, as shown in Figure 22B , a user screen G504 marked in the form of a histogram is displayed based on the data including correction values and the like. The user screen G504 can be additionally displayed while keeping the user screen G503 displayed, or the user screen G503 can be closed and displayed in place of it.

[0318] In this way, the measurement system 1 has a fifth function that causes data including correction values and the like, which are displayed in a specific display form (here, a table form) on the screen, to be displayed in another display form (here, a histogram form) selected according to a user's selection operation.

[0319] The user screen G504 includes a histogram display area H13 that uses the frequency (frequency) as the vertical axis, the grade (interval) related to the correction value as the horizontal axis, and shows the distribution characteristics (histogram) of the number (frequency) of correction values (of the measurement results) included in each interval.

[0320] According to the fifth function, the user can easily display data including correction positions, correction values, torque differences, etc. in a table form or in a histogram form. Therefore, it is easier for the user to confirm this data. In particular, when this data is displayed in a histogram form, it is easier for the user to intuitively understand the deviation of the correction value.

[0321] In addition, in this example, it is also described that data that is already being displayed in a specific display form is changed to another display form according to a user's selection operation and displayed, but it is not necessary to perform "transformation from a specific display form to another display form". That is, the processing unit of the measurement system 1 (here, the processing unit 71 of the terminal 7) can also display data including at least the position correction amount (correction value) in a display form (here, a histogram form) selected according to a (user's) selection operation on the display unit 70. The display form of the data selected according to the selection operation is preferably any of a table form, a graph form, a chart form, and a histogram form.

[0322] In addition, Figure 21B the chart display area H12 and Figure 22B the histogram display area H13 can not only be switched alternatively, but also be displayed simultaneously on one screen. For example, the table display area H3 can also be included, and the chart display area H12 and the histogram display area H13 can be displayed simultaneously on one screen.

[0323] [Sixth function]

[0324] The measurement system 1 according to Modification 5 has a sixth function (comparative display function of past data) as one of the auxiliary functions. Hereinafter, the sixth function will be described with reference to Figure 23 as follows.

[0325] The measurement system 1 can display Figure 23 the user screen G601 and the user screen G602 shown in on the display unit 70 of the terminal 7.

[0326] The user performs the following operations: For example, on a specific screen showing a folder that stores multiple data files FL1 each containing at least measurement results, any two or more data files FL1 that the user deems suitable for comparing their respective measurement results are selected using an indicator or the like. Additionally, since the data file FL1 has been described in the third function column, detailed description here is omitted. Furthermore, hereinafter, as an example, the case where two data files FL1 are selected is described, but three or more (e.g., three) data files FL1 can also be selected and compared.

[0327] The user screen G601 is an example of a screen showing the first data file FL11 and the second data file FL12 selected by the user as comparison objects.

[0328] In Figure 23 this example, the first data file FL11 is a past data file containing measurement results obtained at 14:27 on July 10, 2023. Additionally, the second data file FL12 is a past data file containing measurement results obtained at 15:14 on August 3, 2023.

[0329] For example, the second data file FL12 contains the most recent data, and the first data file FL11 can contain data older than that in the second data file FL12. More specifically, the user sometimes selects the second data file FL12 generated from the current measurement and the first data file FL11 generated from the previous measurement, compares correction values, etc., and judges the degree of secular deterioration of devices such as the Y1 axis and Y2 axis.

[0330] If the user selects the first data file FL11 and the second data file FL12 and presses an operation button for executing comparison on the screen using an indicator or the like, the user screen G602 is displayed. The user screen G602 can be additionally displayed while the user screen G601 is being displayed, or the user screen G601 can be closed and replaced for display.

[0331] The user screen G602 includes a table display area H14 in which measurement results such as correction values in the first data file FL11 and measurement results such as correction values in the second data file FL12 are arranged side by side in a [table form].

[0332] Here, the measurement system 1 performs an emphasized display H15 in the table display area H14 for the value of the measurement result of the second data file FL12 determined to have a difference greater than a given value from the value of the measurement result of the first data file FL11. As the emphasized display H15, the measurement system 1, for example, surrounds the target value with a frame or displays it by coloring. That is, the measurement system 1 performs the emphasized display H15 in the table display area H14 to draw the user's attention to the existence of such a value.

[0333] That is, the measurement system 1 has a sixth function that displays two or more (here, two as an example) pieces of past data specified according to the user's selection operation in a table form for easy comparison. In addition, the measurement system 1 also has the following function: for two or more (here, two as an example) pieces of past data specified, it automatically performs a comparison determination, and if a value is determined to have a difference greater than a given value, it performs an emphasized display H15 for that value.

[0334] In this way, the measurement system 1 includes a processing unit and a storage unit (here, as an example, the processing unit 71 and the storage unit 73). The processing unit 71 causes data including at least a position correction amount (correction value) to be displayed on the display unit 70. Whenever a test operation is executed, the storage unit 73 stores the data as history information (storage of the data file FL1). The processing unit 71 causes two or more pieces of data (data file FL1) selected according to a selection operation among a plurality of past data (data file FL1) stored in the storage unit 73 to be displayed in a comparable manner. In addition, the processing unit 71 causes two or more pieces of data to be displayed in a display form (here, a table form) selected according to a selection operation.

[0335] According to the sixth function, two or more pieces of past data including at least a correction value are displayed in a table form on one screen, so it is possible to assist the user in easily confirming the characteristics of devices such as the Y1 axis and the Y2 axis. In particular, when the user compares two (or two or more) pieces of data, namely new data and old data, and the correction value of the new data is larger than that of the old data, it is easy to judge that the aging deterioration of devices such as the Y1 axis and the Y2 axis is progressing.

[0336] The above determination condition for performing the emphasized display, such as "if there is a value determined to have a difference greater than a given value", is only an example and is not limited to this. For example, conversely, if a value is determined to have a difference less than a specified value, an emphasized display H15 may be performed for that value, or if the difference is a value "outside (or within) a given range", an emphasized display H15 may be performed for that value.

[0337] Further, alternatively, with a determination condition of "if there is a value determined to be greater than 5% (or less than 5%) of the value of (for example, the first data file FL11) that is the comparison object", that is, with a determination condition using "ratio", the highlighting display H15 is performed. In addition, the determination condition can be appropriately changed according to the type of the parameter with a difference.

[0338] In addition, it can also be that the above-mentioned given value, specified value, given range, and ratio can be appropriately specified by the user on the user screen.

[0339] [Seventh function]

[0340] The measurement system 1 according to Modification 5 has a seventh function (comparison display function in the form of a graph and comparison display function in the form of a histogram) as one of the auxiliary functions. Hereinafter, regarding the seventh function, refer to Figure 24A 、 Figure 24B for description. The seventh function is a function corresponding to the modification of the sixth function described in Figure 23 the description.

[0341] The measurement system 1 can display Figure 24A the user screen G603 shown in Figure 24B and the user screen G604 shown in

[0342] on the display unit 70 of the terminal 7. For example, the user performs the following operation: On a specific screen showing a folder storing a plurality of data files FL1 each containing at least measurement results, any two or more data files FL1 that the user deems want to compare their measurement results with each other are selected using an indicator or the like. Here, as an example, it is assumed that the first data file FL11 and the second data file FL12 described in the sixth function are selected. That is, the case where two data files FL1 are selected is described. However, three or more (for example, three) data files FL1 can also be selected. Since the data file FL1, the first data file FL11, and the second data file FL12 have been described in the third function column and the sixth function column, the detailed description here is omitted.

[0343] If the user selects the first data file FL11 and the second data file FL12 and presses an operation button for performing comparison on the screen using an indicator or the like, the user screen G603 (refer to Figure 24A ) is displayed. The user screen G603 can also be displayed in a group with Figure 23 the tabular user screen G602.

[0344] The user screen G603 is, for example, Figure 21BSimilarly, the user screen G502 includes a graph display area H16 that sets the calibration points on the horizontal axis (also recording the position of the Y1 axis) and sets the calibration value of the position of the Y2 axis relative to the position of the Y1 axis on the vertical axis. The graph display area H16 shows, for example, a line graph W1 representing the measurement results (calibration values) of the first data file FL11 in the table display area H3 shown in Figure 23 and a line graph W2 representing the measurement results (calibration values) of the second data file FL12.

[0345] In addition, the user screen G603 also includes a selection area H17 for the user to select one display form from two display forms: the graph form and the histogram form. If the user presses the down arrow mark in the selection area H17 with an indicator on the screen, a list of multiple selectable display forms is displayed as a list (drop-down function). In the Figure 24A example, the list includes two display forms: [Graph] and [Histogram]. Here, [Graph] is selected as the initial setting. The user can switch the display form to the graph form (refer to Figure 24A ) or the histogram form (refer to Figure 24B ) by selecting [Graph] or [Histogram] from this list.

[0346] As Figure 24B shown, for example, similar to the user screen G504 shown in Figure 22B , the user screen G604 includes a histogram display area H18. The histogram display area H18 sets the frequency (frequency) on the vertical axis, sets the grade (interval) related to the calibration value on the horizontal axis, and shows a distribution graph (histogram) of the number of times (frequency) of the calibration values included in each interval. Similar to the user screen G603, the user screen G604 also includes a selection area H17.

[0347] The histogram display area H18 shows, for example, the distribution characteristics Q1 of the number of calibration values in each interval based on the measurement results of the first data file FL11 and the distribution characteristics Q2 of the number of calibration values in each interval based on the measurement results of the second data file FL12.

[0348] In this way, the measurement system 1 has a seventh function. The seventh function displays two or more past data specified according to the user's selection operation in a display form (graph form, histogram form) corresponding to the user's selection operation, making it easy to compare.

[0349] According to the seventh function, two or more pieces of past data including correction values are displayed in a chart form or a histogram form on one screen, so that assistance can be provided to make it easier for the user to confirm the characteristics of the device such as the Y1 axis and the Y2 axis. In particular, the user compares two (or more) pieces of new and old data displayed in a chart form, and based on the difference in the change ratio of the correction values between the correction points, it is easier to more intuitively understand the progress of the aging deterioration of the device such as the Y1 axis and the Y2 axis. In addition, the user compares two (or more) pieces of new and old data displayed in a histogram form, and based on the difference in the deviation of the correction values, it is easier to more intuitively understand the progress of the aging deterioration of the device such as the Y1 axis and the Y2 axis.

[0350] In addition, the chart display area H16 and the histogram display area H18 can be not only alternatively switched, but also simultaneously displayed on one screen. For example, it is also possible to Figure 23 include the table display area H14, and simultaneously display the chart display area H16 and the histogram display area H18 on one screen.

[0351] In addition, the selection area H17 can also be displayed on Figure 23 the user screen G602. In the list, it is also possible to include the three display forms of table form, chart form, and histogram form, and the user can select from the three display forms.

[0352] In addition, in this example, it is also assumed that the data that has been displayed in a specific display form is changed to another display form for display according to the user's selection operation, but it is not necessary to perform the "transformation from a specific display form to another display form". That is to say, the processing unit 71 can also display two or more pieces of data (data file FL1) selected according to the selection operation among the past multiple pieces of data (data file FL1) stored in the storage unit 73 in a comparable manner. In addition, the processing unit 71 can also display two or more pieces of data in the display form (here, chart form or histogram form) selected according to the selection operation. In addition, the display form of two or more pieces of data selected according to the selection operation is preferably any of the table form, graph form, chart form, and histogram form.

[0353] (Summary)

[0354] According to the embodiments described above, the following methods are disclosed.

[0355] The measurement system (1) according to the first method measures the position correction amount applied to the synchronous drive system (2). The synchronous drive system (2) includes a first main shaft (Y1), a second main shaft (Y2), a first control unit (31), and a second control unit (32). The first main shaft (Y1) and the second main shaft (Y2) are connected in parallel to each other via a sub-shaft (X1). The first main shaft (Y1) and the second main shaft (Y2) respectively have a first motor (M1) and a second motor (M2). The first control unit (31) and the second control unit (32) respectively control the first motor (M1) and the second motor (M2) so that the first main shaft (Y1) and the second main shaft (Y2) move synchronously in the axial direction (D1). The measurement system (1) includes a command unit (10), a first acquisition unit (11), a second acquisition unit (12), and a calculation unit (14). The command unit (10) provides the same position command to the first control unit (31) and the second control unit (32), and causes the first control unit (31) and the second control unit (32) to execute the control of the first motor (M1) and the second motor (M2) so as to perform a test operation in which the first main shaft (Y1) and the second main shaft (Y2) move synchronously to a specified position. The first acquisition unit (11) acquires first information related to the first force applied to the first main shaft (Y1) and the second force applied to the second main shaft (Y2) during the test operation. The second acquisition unit (12) acquires second information related to the positions of the first motor (M1) and the second motor (M2) during the test operation. The calculation unit (14) calculates the position correction amount of at least one of the first motor (M1) and the second motor (M2) based on the first information and the second information so as to correct the position offset between the first main shaft (Y1) and the second main shaft (Y2).

[0356] According to the above method, the position correction amount applied to the synchronous drive system (2) is calculated based on the first information and the second information related to the first force applied to the first main shaft (Y1) and the second force applied to the second main shaft (Y2). Therefore, in the measurement system (1), there is an advantage that it is possible to suppress the influence that may be caused by the interference between the shafts.

[0357] In the measurement system (1) according to the second method, in the first method, the calculation unit (14) obtains the difference value between the first force and the second force at the same time, and multiplies the correction coefficient by the difference value to calculate the position correction amount.

[0358] According to the above method, the accuracy related to the position correction amount becomes better, and it is possible to further suppress the influence that may be caused by the interference between the shafts.

[0359] The measurement system (1) according to the third method further includes a third acquisition unit (13) and a coefficient calculation unit (15) in the second method. The third acquisition unit (13) acquires third information related to the frequency characteristics of vibrations in the drive system (A1) including the first motor (M1) and the second motor (M2) respectively. The coefficient calculation unit (15) calculates a correction coefficient based on the load masses of the first main shaft (Y1) and the second main shaft (Y2) respectively and the third information.

[0360] According to the above method, the accuracy related to the position correction amount becomes better, and the influence that may be caused by the interference between the shafts can be further suppressed.

[0361] The measurement system (1) according to the fourth method further includes a coefficient calculation unit (15) that calculates a correction coefficient in the second method. The test operation further includes a specific test operation that provides different position commands, and the first main shaft (Y1) and the second main shaft (Y2) move synchronously to the specified positions, so that an offset of a given movement amount is generated between the first main shaft (Y1) and the second main shaft (Y2). The coefficient calculation unit (15) calculates a correction coefficient based on the fourth information related to the first force and the second force in the specific test operation and the given movement amount.

[0362] According to the above method, the accuracy related to the position correction amount becomes better, and the influence that may be caused by the interference between the shafts can be further suppressed.

[0363] The measurement system (1) according to the fifth method, in the fourth method, the test operation further includes a reference test operation that provides the same position command, so that the first main shaft (Y1) and the second main shaft (Y2) move synchronously to the specified positions. The coefficient calculation unit (15) calculates a correction coefficient based on the fourth information, the given movement amount, and the fifth information related to the first force and the second force in the reference test operation.

[0364] According to the above method, the accuracy related to the position correction amount becomes better, and the influence that may be caused by the interference between the shafts can be further suppressed.

[0365] The measurement system (1) according to the sixth method, in the fifth method, the fourth information includes information related to a specific difference value, which is the difference value between the first force and the second force at the same time in the specific test operation. The fifth information includes information related to a reference difference value, which is the difference value between the first force and the second force at the same time in the reference test operation. The coefficient calculation unit (15) calculates a correction coefficient based on the change amount of the specific difference value relative to the reference difference value and the given movement amount.

[0366] According to the above method, the accuracy related to the position correction amount becomes better, and the influence that may be caused by the interference between the axes can be further suppressed.

[0367] In the measurement system (1) according to the seventh method, in any of the first to sixth methods, the calculation unit (14) calculates the position correction amount of the other based on the position of either the first motor (M1) or the second motor (M2).

[0368] According to the above method, compared with the case where the reference position is set independently of the positions of the first motor (M1) and the second motor (M2), it is easier to calculate the position correction amount.

[0369] The measurement system (1) according to the eighth method further includes a processing unit (71) in any of the first to seventh methods. The processing unit (71) acquires the start point of the test operation, the end point of the test operation, and the number of correction points as parameters applied to the test operation. The number of correction points is the number of points at which the position correction amount is calculated between the start point and the end point. The processing unit (71) calculates the correction interval based on the number of correction points, the start point, and the end point.

[0370] According to the above method, for example, when the user specifies the number of correction points, it is ensured to what extent the storage amount (such as the storage unit 5, etc.) required to store the data of the position correction amount increases, and the design based on the storage amount can be ensured.

[0371] The measurement system (1) according to the ninth method further includes a processing unit (71) in any of the first to seventh methods. The processing unit (71) causes the display unit (70) to display at least the data including the position correction amount. The processing unit (71) performs a conversion of the display unit so that the numerical value of the data displayed in a specific unit on the screen of the display unit (70) is displayed in another unit selected according to the selection operation.

[0372] According to the above method, the user can confirm the setting conditions, measurement results, etc. with values that are easier to understand more intuitively.

[0373] The measurement system (1) according to the tenth method further includes a processing unit (71) in any of the first to seventh methods. The processing unit (71) causes the display unit (70) to display at least the data including the position correction amount. The processing unit (71) causes the data to be displayed in a display form selected according to the selection operation. The display form is any of a table form, a graph form, a chart form, and a histogram form.

[0374] According to the above method, it is easier for the user to confirm the data.

[0375] In any of the first to seventh modes, the measurement system (1) according to the eleventh mode further includes a processing unit (71) and a storage unit (73). The processing unit (71) causes the display unit (70) to display data including at least a position correction amount. Each time a test operation is performed, the storage unit (73) stores the data as history information. The processing unit (71) causes two or more pieces of data selected according to a selection operation among a plurality of past data stored in the storage unit (73) to be displayed in a comparable manner.

[0376] According to the above mode, it is easy for the user to compare two or more pieces of past data including the position correction amount.

[0377] In the eleventh mode, the measurement system (1) according to the twelfth mode, the processing unit (71) causes two or more pieces of data to be displayed in a display form selected according to a selection operation. The display form is any one of a table form, a graph form, a chart form, and a histogram form.

[0378] According to the above mode, it is even easier for the user to compare two or more pieces of past data including the position correction amount.

[0379] The control device (C1) according to the thirteenth mode includes any one of the first control unit (31) and the second control unit (32) that receives a position command from the measurement system (1) in any of the first to twelfth modes. The control unit (3) controls the corresponding motor among the first motor (M1) and the second motor (M2) based on the position command so as to perform a test operation in which the corresponding main shaft among the first main shaft (Y1) and the second main shaft (Y2) moves to a specified position. The control device (C1) further includes a first output unit (41) and a second output unit (42). The first output unit (41) outputs first information related to the force applied to the main shaft during the test operation. The second output unit (42) outputs second information related to the position of the motor during the test operation.

[0380] According to the above mode, it is possible to provide a control device (C1) that can suppress the influence that may be caused by the interference between the shafts.

[0381] The control device (C1) according to the fourteenth mode includes any one of the first control unit (31) and the second control unit (32) that receives a position command from the measurement system (1) in any of the first to twelfth modes. The control device (C1) has at least a part of the functions related to the command unit (10), the first acquisition unit (11), the second acquisition unit (12), and the calculation unit (14) in the measurement system (1).

[0382] According to the above method, a control device (C1) can be provided that can suppress the possible influence caused by the interference between the shafts.

[0383] The control device (C1) according to the 15th mode includes any one of the first control unit (31) and the second control unit (32) that receives a position command from the measurement system (1) in any one of the first to twelfth modes. The control device (C1) further includes a storage unit (5) that stores correction information including the position correction amount calculated by the calculation unit (14). In the test operation or normal operation, the control unit (3) controls the corresponding motor among the first motor (M1) and the second motor (M2) based on the correction information stored in the storage unit (5).

[0384] According to the above method, a control device (C1) can be provided that can suppress the possible influence caused by the interference between the shafts.

[0385] The measurement method according to the 16th mode is used to measure the position correction amount applied to the synchronous drive system (2). The synchronous drive system (2) includes a first main shaft (Y1) and a second main shaft (Y2), and a first control unit (31) and a second control unit (32). The first main shaft (Y1) and the second main shaft (Y2) are connected in parallel via a sub-shaft (X1). The first main shaft (Y1) and the second main shaft (Y2) are respectively provided with a first motor (M1) and a second motor (M2). The first control unit (31) and the second control unit (32) respectively control the first motor (M1) and the second motor (M2) so that the first main shaft (Y1) and the second main shaft (Y2) move synchronously in the axial direction (D1). The measurement method includes an instruction processing step, a first acquisition processing step, a second acquisition processing step, and a calculation processing step. In the instruction processing step, the same position command is provided to the first control unit (31) and the second control unit (32), and the first control unit (31) and the second control unit (32) are made to control the first motor (M1) and the second motor (M2) so that a test operation of synchronously moving the first main shaft (Y1) and the second main shaft (Y2) to a specified position is performed. In the first acquisition processing step, first information related to the first force applied to the first main shaft (Y1) and the second force applied to the second main shaft (Y2) during the test operation is acquired. In the second acquisition processing step, second information related to the positions of the first motor (M1) and the second motor (M2) during the test operation is acquired. In the calculation processing step, based on the first information and the second information, a position correction amount of at least one of the first motor (M1) and the second motor (M2) is calculated so as to correct the position offset between the first main shaft (Y1) and the second main shaft (Y2).

[0386] According to the above method, a measurement method can be provided that can suppress the possible influence caused by the interference between axes.

[0387] The program according to the 17th aspect is a program for causing one or more processors to execute the measurement method in the 16th aspect.

[0388] According to the above method, a function can be provided that can suppress the possible influence caused by the interference between axes.

[0389] Regarding the structures according to the 2nd to 12th aspects, they are not essential structures of the measurement system (1) and can be appropriately omitted.

[0390] Industrial applicability

[0391] According to the measurement system, control device, measurement method, and program of the present disclosure, it is possible to suppress the possible influence caused by the interference between axes. Therefore, the disclosed measurement system, control device, measurement method, and program are industrially useful.

[0392] Explanation of reference numerals

[0393] 1 Measurement system

[0394] 10 Instruction unit

[0395] 11 First acquisition unit

[0396] 12 Second acquisition unit

[0397] 13 Third acquisition unit

[0398] 14 Calculation unit

[0399] 15 Coefficient operation unit

[0400] 2 Synchronous drive system

[0401] 3 Control unit

[0402] 31 First control unit

[0403] 32 Second control unit

[0404] 41 First output unit

[0405] 42 Second output unit

[0406] 5 Storage unit

[0407] 51 First storage unit

[0408] 52 Second storage unit

[0409] 53 Power conversion unit

[0410] 70 Display unit

[0411] 71 Processing unit

[0412] 73 Storage unit

[0413] A1 Drive system

[0414] A11 First drive system

[0415] A12 Second drive system

[0416] C1 Control device

[0417] D1 Axis direction

[0418] M1 First motor

[0419] M2 Second motor

[0420] P1, P2 Processing unit

[0421] X1 Sub-axis

[0422] Y1 First main axis

[0423] Y2 Second main axis.

Claims

1. A measurement system for determining a position correction amount applied to a synchronous drive system, The synchronous drive system includes: a first main shaft and a second main shaft, which are connected in parallel to each other via a sub-shaft and respectively have a first motor and a second motor; and a first control unit and a second control unit, which respectively control the first motor and the second motor so that the first main shaft and the second main shaft move synchronously in the axial direction. The measurement system includes: An instruction unit that provides the same position instruction to the first control unit and the second control unit, and causes the first control unit and the second control unit to execute the control of the first motor and the second motor so as to perform a test operation in which the first main shaft and the second main shaft move synchronously to a specified position. A first acquisition unit that acquires first information related to a first force applied to the first main shaft and a second force applied to the second main shaft during the test operation. A second acquisition unit that acquires second information related to the positions of the first motor and the second motor during the test operation; and A calculation unit that calculates the position correction amount of at least one of the first motor and the second motor based on the first information and the second information so as to correct the position offset between the first main shaft and the second main shaft.

2. The measurement system according to claim 1, wherein The calculation unit obtains a difference value between the first force and the second force at the same time, and multiplies the correction coefficient by the difference value to calculate the position correction amount.

3. The measurement system according to claim 2, wherein The measurement system further includes: A third acquisition unit that acquires third information related to the frequency characteristics of vibrations in the drive system including the first motor and the second motor respectively; and A coefficient calculation unit that calculates the correction coefficient based on the load masses of the first main shaft and the second main shaft respectively and the third information.

4. The measurement system according to claim 2, wherein The measurement system further includes a coefficient calculation unit that calculates the correction coefficient, The test operation further includes: a specific test operation that provides different position instructions, and the first main shaft and the second main shaft move synchronously to a specified position so as to generate an offset of a given movement amount between the first main shaft and the second main shaft. The coefficient calculation unit calculates the correction coefficient based on fourth information related to the first force and the second force during the specific test operation and the given movement amount.

5. The measurement system according to claim 4, wherein The test operation further includes: a reference test operation that provides the same position instruction, and the first main shaft and the second main shaft move synchronously to a specified position. The coefficient calculation unit calculates the correction coefficient based on the fourth information, the given movement amount, and fifth information related to the first force and the second force during the reference test operation.

6. The measurement system according to claim 5, wherein The 4th information includes information related to a specific difference value, which is the difference value between the 1st force and the 2nd force at the same time in the specific test action. The 5th information includes information related to a reference difference value, which is the difference value between the 1st force and the 2nd force at the same time in the reference test action. The coefficient calculation unit calculates the correction coefficient based on the change amount of the specific difference value relative to the reference difference value and the given movement amount.

7. The measurement system according to claim 1, wherein The calculation unit calculates the position correction amount of the other based on the position of any one of the 1st motor and the 2nd motor as a reference.

8. The measurement system according to claim 1, wherein The measurement system further includes: a processing unit that acquires the start point of the test action, the end point of the test action, and the number of correction points as parameters applied to the test action, and the number of correction points is the number of points for calculating the position correction amount between the start point and the end point. The processing unit calculates the correction interval based on the number of correction points, the start point, and the end point.

9. The measurement system according to claim 1, wherein The measurement system further includes: a processing unit that causes the display unit to display data including at least the position correction amount. The processing unit performs a conversion of the display unit so that the numerical value of the data displayed in a specific unit on the screen of the display unit is displayed in another unit selected according to a selection operation.

10. The measurement system according to claim 1, wherein The measurement system further includes: a processing unit that causes the display unit to display data including at least the position correction amount. The processing unit causes the data to be displayed in a display form selected according to a selection operation. The display form is any of a table form, a graph form, a chart form, and a histogram form.

11. The measurement system according to claim 1, wherein The measurement system further includes: a processing unit that causes the display unit to display data including at least the position correction amount; and a storage unit that stores the data as history information whenever the test action is executed. The processing unit causes two or more of the past data stored in the storage unit selected according to a selection operation to be displayed in a comparable manner.

12. The measurement system according to claim 11, wherein The processing unit causes two or more of the data to be displayed in a display form selected according to a selection operation. The display form is any of a table form, a graph form, a chart form, and a histogram form.

13. A control device includes any one of the 1st control unit and the 2nd control unit that receives the position instruction from the measurement system according to claim 1. The control unit controls the corresponding motor among the 1st motor and the 2nd motor based on the position instruction, so as to perform the test action of moving the corresponding main shaft among the 1st main shaft and the 2nd main shaft to the specified position. The control device further includes: a first output unit that outputs the first information related to the force applied to the main shaft during the test operation; and a second output unit that outputs the second information related to the position of the motor during the test operation.

14. A control device includes any one of the first control unit and the second control unit that receives the position command from the measurement system according to claim 1, and the control device has at least a part of the functions related to the command unit, the first acquisition unit, the second acquisition unit, and the calculation unit in the measurement system.

15. A control device includes any one of the first control unit and the second control unit that receives the position command from the measurement system according to claim 1, the control device further includes: a storage unit that stores correction information including the position correction amount calculated by the calculation unit, and the control unit controls the corresponding motor among the first motor and the second motor based on the correction information stored in the storage unit during the test operation or the normal operation.

16. A measurement method for measuring a position correction amount applied to a synchronous drive system, wherein the synchronous drive system includes: a first main shaft and a second main shaft that are connected in parallel to each other via a sub-shaft and each have a first motor and a second motor; and a first control unit and a second control unit that respectively control the first motor and the second motor so that the first main shaft and the second main shaft move synchronously in the axial direction, the measurement method includes: a command processing step of providing the same position command to the first control unit and the second control unit, and causing the first control unit and the second control unit to control the first motor and the second motor so as to perform a test operation in which the first main shaft and the second main shaft move synchronously to a specified position; a first acquisition processing step of acquiring first information related to a first force applied to the first main shaft and a second force applied to the second main shaft during the test operation; a second acquisition processing step of acquiring second information related to the positions of the first motor and the second motor during the test operation; and a calculation processing step of calculating the position correction amount of at least one of the first motor and the second motor based on the first information and the second information so as to correct the position offset between the first main shaft and the second main shaft.

17. A program for causing one or more processors to execute the measurement method according to claim 16.

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