Automatic grinding equipment for gallium nitride multi-wafer wafer

Abstract

The invention discloses automatic grinding equipment for gallium nitride multi-wafer wafers, and relates to the technical field of grinding equipment, the automatic grinding equipment comprises a base, a grinding table is arranged in the middle of the upper end of the base, four groups of rotating tables are arranged at the upper end of the grinding table, and a group of rotating shafts are arranged at the lower ends of the four groups of rotating tables in the grinding table; a driven gear is arranged at the lower end of each set of rotating shaft, a set of driving gears are arranged among the side walls of the four sets of driven gears, the driving gears are engaged with the four sets of driven gears correspondingly, a first motor is arranged at the lower end of each driving gear, and a set of supporting columns are arranged at the four corners of the upper end of the base correspondingly; a top plate is arranged at the upper ends of the four supporting columns, and the outer walls of the four supporting columns are each provided with a sliding sleeve. According to the automatic grinding equipment for the gallium nitride multi-wafer, the multiple gallium nitride multi-wafer can be ground at the same time, the production efficiency is improved, and the large-scale production requirement is met.

Description

Technical Field

[0001] The present invention relates to the technical field of grinding equipment, and particularly relates to an automatic grinding equipment for gallium nitride multi-wafers. Background Art

[0002] As a third-generation semiconductor material, gallium nitride is widely used in fields such as 5G communication, new energy vehicles, and power devices. With the rapid development of the semiconductor industry, the production scale of gallium nitride wafers is continuously expanding, and the requirements for the automation, intelligence, and high efficiency of grinding equipment are increasing day by day. The grinding quality of its multi-wafers directly affects the device performance and yield.

[0003] Traditional grinding of gallium nitride wafers mostly uses single-wafer manual or semi-automatic grinding equipment, which has a high dependence on manual operation. It is not only inefficient and difficult to meet the needs of large-scale production, but also has large human errors in the control of parameters such as grinding pressure and speed, resulting in uneven wafer thickness and poor surface flatness, greatly affecting the quality stability and consistency of products. At the same time, such equipment lacks automated loading and unloading processes, and frequent manual intervention increases the risk of wafer contamination, reducing production efficiency and yield. To solve the deficiencies of the prior art, we propose an automatic grinding equipment for gallium nitride multi-wafers. Summary of the Invention

[0004] The main purpose of the present invention is to provide an automatic grinding equipment for gallium nitride multi-wafers, which can effectively solve the problems in the background art.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0006] An automatic grinding equipment for gallium nitride multi-wafer includes a base. In the middle of the upper end of the base, there is a grinding table. On the upper end of the grinding table, there are four rotating tables. Inside the grinding table at the lower ends of the four rotating tables, there is a rotating shaft in each group. At the lower end of each rotating shaft, there is a driven gear. Between the side walls of the four driven gears, there is a driving gear. The driving gear meshes with the four driven gears respectively. At the lower end of the driving gear, there is a No. 1 motor. At the four corners of the upper end of the base, there is a support column in each group. At the upper ends of the four support columns, there is a top plate. On the outer walls of the four support columns, there is a sliding sleeve in each group. Between the inner side walls of the four sliding sleeves, there is a lifting plate. In the middle of the lifting plate, there are four mounting blocks. At the lower ends of the four mounting blocks below the lifting plate, there is a connecting column in each group. At the lower ends of the four connecting columns, there is a grinding disc. The four grinding discs are respectively directly above the four rotating tables. In the middle of the top plate, there is a lifting cylinder. The lower end of the lifting cylinder is connected to the middle of the upper end of the lifting plate. On one side of the upper end of the base, there is a loading robotic arm. On the other side of the upper end of the base, there is an unloading robotic arm. At the lower end of the base, there is a control box. The control box is a PLC programmable logic controller. The control box is electrically connected to the grinding table, the loading robotic arm, the unloading robotic arm, and the lifting plate.

[0007] Preferably, mounting platforms are provided at the lower ends of the loading robotic arm and the unloading robotic arm. The two mounting platforms are respectively installed on both sides of the upper end of the base. Steering seats are provided at the upper ends of the two mounting platforms. Four - way motors are provided inside the two mounting platforms, and the four - way motors are respectively connected to the lower ends of the steering seats. First rotating connecting plates are provided at the upper ends of the steering seats. First rotating heads are provided in the middle of the first rotating connecting plates. Five - way motors are provided on the outer walls of the first rotating connecting plates, and the five - way motors are connected to the middle of the side walls of the first rotating heads. First cylinders are provided in the middle of the upper ends of the first rotating heads. Second rotating connecting plates are provided at the upper ends of the first cylinders. Four first telescopic rods are further provided between the lower ends of the second rotating connecting plates and the upper ends of the first rotating heads. Second rotating heads are provided in the middle of the second rotating connecting plates. Six - way motors are provided on the outer walls of the second rotating connecting plates, and the six - way motors are connected to the middle of the second rotating heads. Second cylinders are provided in the middle of the front ends of the second rotating heads. Third rotating connecting plates are provided at the front ends of the second cylinders. Four second telescopic rods are further provided between the rear ends of the third rotating connecting plates and the front ends of the second rotating heads. Third rotating heads are provided in the middle of the third rotating connecting plates. Seven - way motors are provided on the outer walls of the third rotating connecting plates, and the seven - way motors are connected to the middle of the third rotating heads. Mounting frames are provided at the lower ends of the third rotating heads. Air extractors are provided in the middle of the mounting frames. Suction frames are provided below the air extractors at the lower ends of the mounting frames. Rubber rings are provided at the lower ends of the suction frames.

[0008] Preferably, a rotating interface is provided between the lower end of the steering seat and the upper end of the mounting platform. The lower end of the steering seat is rotationally connected to the upper end of the mounting platform through the provided rotating interface. A rotating interface is provided between the first rotating head and the inner wall of the first rotating connecting plate. The first rotating connecting plate is rotationally connected to the inner wall of the first rotating connecting plate through the provided rotating interface.

[0009] Preferably, a rotating interface is provided between the second rotating head and the inner wall of the second rotating connecting plate. The second rotating head is rotationally connected to the inner wall of the second rotating head through the provided rotating interface. A rotating interface is provided between the third rotating head and the inner wall of the third rotating connecting plate. The third rotating head is rotationally connected to the inner wall of the third rotating connecting plate through the provided rotating interface.

[0010] Preferably, a rotating interface is provided between the lower ends of the four groups of rotating platforms and the upper end of the grinding table. The lower ends of the four groups of rotating platforms are respectively rotationally connected to the upper end of the grinding table through the provided rotating interfaces. A rotating interface is respectively provided between the four groups of rotating shafts and the inner wall of the grinding table. The four groups of rotating shafts are respectively rotationally connected to the inner wall of the grinding table through the provided rotating interfaces. A rotating interface is provided between the driving gear and the inner wall of the grinding table. The driving gear is rotationally connected to the inner wall of the grinding table through the provided rotating interface. A sliding hole is provided in the middle of the sliding sleeve. The sliding sleeve is slidably connected to the outer wall of the support column through the provided sliding hole.

[0011] Preferably, fixing plates are provided on both sides of the upper ends of the four groups of rotating platforms. A first sliding rod is provided in the middle of each group of fixing plates. A fixed clamping plate is provided at the front end of each first sliding rod on the upper end of the rotating platform. A connecting rod is provided at the rear end of each first sliding rod. Slide rails are provided on both side walls below the four groups of rotating platforms. A slider is provided in the middle of each group of slide rails. The lower ends of each group of connecting rods are respectively connected to the upper ends of a group of sliders. A second sliding rod is respectively provided on the side wall of each group of sliders in the middle of the slide rail. Every two groups of the second sliding rods extend into the interior of a group of rotating platforms. An electric push rod is provided between the ends of every two groups of the second sliding rods inside the rotating platform. A sliding hole is provided between the first sliding rod and the fixing plate. The first sliding rod is slidably connected to the fixing plate through the provided sliding hole. The slider is slidably connected to the inner wall of the slide rail. A sliding hole is provided between the second sliding rod and the side wall of the rotating platform. The second sliding rod is slidably connected to the side wall of the rotating platform through the provided sliding hole.

[0012] Preferably, a group of support frames are provided on both sides of the upper end of the lifting plate. A grinding agent barrel is provided at the upper end of one group of support frames, and a water barrel is provided at the upper end of the other group of support frames. Water outlet pipes are provided below the support frames at the lower ends of the grinding agent barrel and the water barrel. Electric ball valves are provided on the side walls of the two water outlet pipes. A fixing frame is provided at the lower end of the lifting plate. Four connecting frames are provided at the lower end of the fixing frame. A rotating frame is provided in the middle of the lower ends of the four connecting frames. A grinding agent spray gun is provided in the middle of the lower ends of the two rotating frames, and a flushing spray gun is provided in the middle of the lower ends of the other two rotating frames. The two grinding agent spray guns and the two flushing spray guns are distributed alternately. A group of hoses are provided between the two water outlet pipes and the side walls of the two grinding agent spray guns and the two flushing spray guns respectively. A drainage groove is provided around the upper end of the grinding table. A drain pipe is provided on the front side wall of the grinding table. The drain pipe is communicated with the drainage groove. A valve is provided at the upper end of the drain pipe.

[0013] Preferably, there are rotating interfaces provided between the four groups of the rotating frames and the inner walls of a group of connecting frames respectively. The four groups of rotating frames are respectively rotationally connected to the inner walls of the connecting frames through the provided rotating interfaces. A group of third motors are provided on the side walls of the four groups of connecting frames respectively. The four groups of third motors are respectively connected to the middle of the rotating frames. There is a steering shaft provided between the upper ends of the four groups of connecting frames and the fixing frame respectively. The four groups of connecting frames are respectively rotationally connected to the fixing frame through the provided steering shafts. Four groups of second motors are provided at the upper end of the fixing frame. The four groups of second motors are respectively connected to the upper ends of a group of steering shafts.

[0014] Preferably, a group of hot air blowers are further provided on both sides of the upper end of the fixing frame respectively. Air outlets are provided below the lower ends of the two groups of hot air blowers respectively under the fixing frame. Four groups of support legs are provided at the lower end of the base.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. In the present invention, the corresponding settings of the four rotating platforms and the grinding disks, and at the same time, the driving of the driven gears by the driving gears is used to realize the synchronous rotation of the four rotating platforms, so as to realize the synchronous rotation grinding of multiple gallium nitride multi-wafer sheets. Combining with the lifting functions of the lifting cylinders and the lifting plates, the four grinding disks can be respectively brought into contact with the gallium nitride multi-wafer sheets on the upper ends of the four rotating platforms and apply pressure, so that multiple gallium nitride multi-wafer sheets can be ground simultaneously, greatly improving the production efficiency and meeting the large-scale production requirements.

[0017] 2. In the present invention, the PLC programmable logic controller is used to accurately control each component of the equipment, the automatic rotation of the rotating platform, the precise lifting of the grinding disk, and the precise clamping of the gallium nitride multi-wafer sheet by the fixed clamping plate under the action of the electric push rod, ensuring the stable position of the wafer sheet during the grinding process, and the grinding pressure and speed are controllable, effectively guaranteeing the grinding quality and consistency of the gallium nitride multi-wafer sheet.

[0018] 3. In the present invention, the loading robotic arm and the unloading robotic arm are equipped with multi-stage rotating joints and air extractor adsorption structures, which can realize the precise grasping and placement of the wafer sheets, making the loading and unloading processes more convenient and automated, and improving the loading and unloading efficiency; under the control of the control box, the grinding agent spray gun, the flushing spray gun and the hot air blower automatically complete the processes of grinding agent spraying, cleaning and drying, forming a fully automated production process of loading, grinding, cleaning, drying and unloading, reducing manual intervention and reducing the pollution risk.

[0019] 4. In the present invention, the independent settings of the grinding agent barrel and the clean water barrel, combined with the electric ball valves and the spray guns with adjustable angles, can flexibly adjust the supply of the grinding agent and the clean water according to different process requirements, making the grinding agent supply and the clean water flushing processes more convenient and efficient; the hot air drying function of the hot air blower can quickly remove the moisture on the surface of the wafer sheet, adapting to the diverse production process requirements. Brief Description of the Drawings

[0020] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 is a schematic diagram of the robotic arm structure of the present invention;

[0022] Figure 3 is a schematic diagram of the air extractor suction structure of the present invention;

[0023] Figure 4 is a schematic diagram of the rotating table rotation structure of the present invention;

[0024] Figure 5 is a schematic diagram of the movable structure of the fixed clamping plate of the present invention;

[0025] Figure 6 is a schematic diagram of the lifting plate structure of the present invention;

[0026] Figure 7 is a schematic diagram of the fixed frame structure of the present invention;

[0027] Figure 8 is a schematic diagram of the hot air blower structure of the present invention;

[0028] Figure 9 is a schematic diagram of the connection structure of the abrasive spray gun and the flushing spray gun of the present invention.

[0029] In the figure: 1, base; 2, grinding table; 21, drain trough; 22, drain pipe; 23, valve; 3, rotating table; 31, rotating shaft; 32, driven gear; 33, driving gear; 34, first motor; 35, fixing plate; 351, first slide bar; 352, connecting rod; 353, slider; 354, slide rail; 355, fixing clamp; 356, second slide bar; 357, electric push rod; 4, support column; 5, top plate; 6, lifting plate; 61, lifting cylinder; 611, sliding sleeve; 62, mounting block; 621, connecting column; 622, grinding disc; 63, support frame; 631, abrasive bucket; 632, clean water bucket; 633, water outlet pipe; 634, electric ball valve; 635, hose; 64, fixing frame; 65, abrasive spray gun; 651, connecting frame; 652, steering shaft; 653, second motor; 654, rotating frame; 655, third motor; 66, flushing spray gun; 67, hot air blower; 671, air outlet; 7, loading robot arm; 71, mounting table; 711, steering base; 712, fourth motor; 72, first rotating connecting plate; 721, first rotating head; 722, fifth motor; 73, first cylinder; 731, first telescopic rod; 74, second rotating connecting plate; 741, second rotating head; 742, sixth motor; 75, second cylinder; 751, second telescopic rod; 76, third rotating connecting plate; 761, third rotating head; 762, seventh motor; 77, mounting frame; 771, air extractor; 772, suction frame; 773, rubber ring; 8, unloading robot arm; 9, control box; 10, support leg. Detailed implementation manners

[0030] To make the technical means, creative features, achieved purposes and functions of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0031] Such as Figure 1As shown in the figure, the base 1 is used to install the whole device. A grinding table 2 is provided at the upper end of the base 1. Four groups of rotating tables 3 are provided at the upper end of the grinding table 2. The grinding table 2 is used to install the four groups of rotating tables 3. The rotating table 3 can rotate on the upper end of the grinding table 2. The rotating table 3 is used to fix the gallium nitride multi-wafer and drive it to rotate. One set of mounting tables 71 are provided on both sides of the upper end of the base 1. A loading robot arm 7 and an unloading robot arm 8 are respectively provided at the upper ends of the two sets of mounting tables 71. The loading robot arm 7 and the unloading robot arm 8 are respectively used for loading and unloading the gallium nitride multi-wafer. One set of support columns 4 are provided at the four corners of the upper end of the base 1. A top plate 5 is provided at the upper ends of the four groups of support columns 4. A lifting plate 6 is provided in the middle of the four groups of support columns 4. A lifting cylinder 61 is provided in the middle of the top plate 5. The lower end of the lifting cylinder 61 is connected to the middle of the upper end of the lifting plate 6 to drive the lifting plate 6 to perform lifting activities. The lifting plate 6 is used to install the grinding device. Drain pipes 22 are provided around the grinding table 2. The drain pipes 22 are used to collect the clear water for flushing. A drain pipe 22 is provided on the front side wall of the grinding table 2. The drain pipe 22 is used to discharge the clear water collected inside the drainage tank 21. A valve 23 is provided at the upper end of the drain pipe 22. The valve 23 is used to control the opening and closing of the drain pipe 22.

[0032] As Figure 1 and Figure 2As shown in the figure, a swivel base 711 is provided at the upper end of the mounting table 71. A fourth motor 712 is provided inside the mounting table 71. The fourth motor 712 can drive the swivel base 711 to rotate on the upper end of the mounting table 71, enabling the robotic arm to turn. A first rotating connecting plate 72 is provided at the upper end of the swivel base 711. A first rotating head 721 is provided in the middle of the first rotating connecting plate 72. The first rotating head 721 can rotate in the middle of the first rotating connecting plate 72. A fifth motor 722 is provided on the outer wall of the first rotating connecting plate 72. The fifth motor 722 can drive the first rotating head 721 to rotate in the middle of the first rotating connecting plate 72. A first air cylinder 73 is provided at the upper end of the first rotating head 721. A second rotating connecting plate 74 is provided at the upper end of the first air cylinder 73. Four groups of first telescopic rods 731 are also provided between the second rotating connecting plate 74 and the first rotating head 721. The telescopic movement of the first air cylinder 73 can drive the second rotating connecting plate 74 to move. The first telescopic rods 731 make the movement of the first air cylinder 73 more stable. A second rotating head 741 is provided in the middle of the second rotating connecting plate 74. The second rotating head 741 can rotate in the middle of the second rotating connecting plate 74. A sixth motor 742 is provided on the outer wall of the second rotating connecting plate 74. The sixth motor 742 is connected to the second rotating head 741 to drive the second rotating head 741 to rotate. A second air cylinder 75 is provided at the front end of the second rotating head 741. A third rotating connecting plate 76 is provided at the end of the second air cylinder 75. Four groups of second telescopic rods 751 are provided between the third rotating connecting plate 76 and the second rotating head 741. The telescopic movement of the second air cylinder 75 can drive the third rotating connecting plate 76 to move. The second telescopic rods 751 can make the telescopic movement of the second air cylinder 75 more stable. A third rotating head 761 is provided in the middle of the third rotating connecting plate 76. The third rotating head 761 can rotate in the middle of the third rotating connecting plate 76. A seventh motor 762 is provided on the outer wall of the third rotating connecting plate 76. The seventh motor 762 is connected to the third rotating head 761 to drive the third rotating head 761 to rotate in the middle of the third rotating connecting plate 76. An installation frame 77 is provided at the lower end of the third rotating head 761. An air extractor 771 is provided in the middle of the installation frame 77. The air extractor 771 is used for air extraction. The installation frame 77 is used to install the air extractor 771.

[0033] As Figure 3 shown, a suction frame 772 is provided below the air extractor 771 and below the installation frame 77. The suction frame 772 is used to suck the gallium nitride multi-wafer to perform the loading and unloading operation. A rubber ring 773 is provided at the lower end of the suction frame 772. The rubber ring 773 is used to maintain airtightness.

[0034] As Figure 1 and Figure 4As shown in the figure, at the lower end of each of the four groups of rotating platforms 3, a rotating shaft 31 is provided inside the grinding table 2. The rotating shaft 31 is used to drive the rotation of the rotating platform 3. At the lower end of each of the four groups of rotating shafts 31, a driven gear 32 is provided. Between the side walls of the four groups of driven gears 32, a driving gear 33 is provided. The driving gear 33 meshes with the four groups of driven gears 32 respectively. At the lower end of the driving gear 33, a first motor 34 is provided to drive the rotation of the driving gear 33. The driving gear 33 can drive the rotation of the rotating shaft 31 and the rotating platform 3 through the driven gear 32. The driven gear 32, the driving gear 33, and the first motor 34 are all installed inside the grinding table 2. On both sides of the upper end of each of the four groups of rotating platforms 3, a fixing plate 35 is provided. In the middle of each group of fixing plates 35, a first sliding rod 351 is provided. The first sliding rod 351 can slide in the middle of the fixing plate 35. At the end of the first sliding rod 351, a fixing clamp 355 is provided. The fixing clamp 355 is used to clamp and fix the gallium nitride multi-wafer. At the rear end of each of the first sliding rods 351, a connecting rod 352 is provided. On both side walls of the rotating platform 3, slide rails 354 are provided. In the middle of each of the slide rails 354, a slider 353 is provided. The lower end of the connecting rod 352 is connected to the slider 353. The slider 353 can slide in the middle of the slide rail 354, and then drive the first sliding rod 351 to move through the connecting rod 352, so that the fixing clamp 355 clamps and fixes the gallium nitride multi-wafer.

[0035] As Figure 4 and Figure 5 shown, on the side wall of each slider 353, a second sliding rod 356 is provided. The second sliding rod 356 extends into the inside of the rotating platform 3. The second sliding rod 356 can move in the middle of the side wall of the rotating platform 3. Between the ends of every two groups of second sliding rods 356, a push rod 357 is provided inside the rotating platform 3. The telescopic movement of the push rod 357 can drive the second sliding rods 356 at both ends to move, and then drive the slider 353 to move, and then drive the connecting rod 352, the first sliding rod 351, and the fixing clamp 355 to move.

[0036] As Figure 1 and Figure 6 shown, at the four corners of the lifting plate 6, a sliding sleeve 611 is provided. In the middle of each of the four groups of sliding sleeves 611, a sliding hole is provided. The sliding sleeve 611 is sleeved on the outer wall of the support column 4 and can slide on the outer wall of the support column 4 through the sliding hole. In the middle of the lifting plate 6, four mounting blocks 62 are installed. At the lower end of each of the four groups of mounting blocks 62, a connecting column 621 is provided. At the lower end of each of the connecting columns 621, a grinding disc 622 is provided. The four grinding discs 622 are respectively aligned with the four groups of rotating platforms 3 to grind the gallium nitride multi-wafer fixed at the upper end of the rotating platform 3. On both sides of the upper end of the lifting plate 6, a support frame 63 is provided. The two support frames 63 are respectively used to support and fix the grinding agent barrel 631 and the water barrel 632. At the lower end of the lifting plate 6, a fixing frame 64 is also provided.

[0037] As Figure 6 and Figure 7 shown, there are two sets of abrasive spray guns 65 and two sets of rinsing spray guns 66 arranged below the fixing frame 64. The positions of the two sets of abrasive spray guns 65 and the two sets of rinsing spray guns 66 are staggered with each other. Outlet pipes 633 are provided at the lower ends of the abrasive bucket 631 and the clean water bucket 632. Electric ball valves 634 are provided on the side walls of the outlet pipes 633. The electric ball valves 634 are used to control the opening and closing of the outlet pipes 633. Two groups of hoses 635 are provided between the side walls of the two outlet pipes 633 and the two sets of abrasive spray guns 65 and the two sets of rinsing spray guns 66 respectively. The four groups of hoses 635 and the two sets of outlet pipes 633 are respectively used to supply abrasive and clean water to the interiors of the two sets of abrasive spray guns 65 and the two sets of rinsing spray guns 66.

[0038] As Figure 8 shown, a set of hot air blower 67 is provided on both sides of the upper end of the fixing frame 64. Air outlets 671 are provided below the hot air blower 67 under the fixing frame 64. The hot air blower 67 can generate hot air through the air outlets 671 to dry the gallium nitride multi-wafer after being polished and cleaned.

[0039] As Figure 9 shown, rotating frames 654 are provided outside both the abrasive spray gun 65 and the rinsing spray gun 66. The rotating frames 654 are used to drive the abrasive spray gun 65 and the rinsing spray gun 66 to rotate. Connecting frames 651 are provided on the outer walls of the upper ends of the rotating frames 654. The rotating frames 654 can rotate in the middle of the abrasive spray gun 65. A third motor 655 is provided on the outer wall of the connecting frame 651. The third motor 655 is used to drive the rotating frame 654 to rotate. A steering shaft 652 is provided at the upper end of the connecting frame 651. The steering shaft 652 can rotate at the lower end of the fixing frame 64 to adjust the direction of the connecting frame 651. A second motor 653 is provided at the upper end of the rotating frame 654. The second motor 653 is connected to the upper end of the steering shaft 652 to drive the steering shaft 652 to rotate. The steering shaft 652, the connecting frame 651 and the rotating frame 654 are all used to adjust the angles of the abrasive spray gun 65 or the rinsing spray gun 66.

[0040] It should be noted that the present invention is an automatic grinding device for gallium nitride multi-wafers. When in use, through the instructions issued by the logic controller inside the control box 9, the loading robotic arm 7 is activated. The fourth motor 712 drives the swivel base 711 to rotate, the fifth motor 722 drives the first rotating head 721 to rotate, the first cylinder 73 expands and contracts, the sixth motor 742 drives the second rotating head 741 to rotate, the second cylinder 75 expands and contracts, the seventh motor 762 drives the third rotating head 761 to rotate, adjusts the position of the suction frame 772, the mounting frame 77 is activated to generate suction, and the suction frame 772 sucks the gallium nitride multi-wafers. Then, through the coordinated movement of the multi-joints of the loading robotic arm 7, the four groups of gallium nitride multi-wafers are successively placed on the upper ends of the four groups of rotating tables 3. The electric push rod 357 expands and contracts, enabling the two second sliding rods 356 at both ends to move between the middle of the side walls on both sides of the rotating table 3 and the middle of the two slide rails 354 on both sides. Furthermore, through the slider 353, the connecting rod 352, and the first sliding rod 351, the fixing plate 35 is driven to move on the upper end of the rotating table 3, so that the fixing plate 35 can clamp and fix the gallium nitride multi-wafers on the upper end of the rotating table 3. The first motor 34 inside the grinding table 2 is started, and through the driving gear 33, the four driven gears 32 are driven to rotate. Furthermore, through the rotating shaft 31, the rotating table 3 is driven to rotate on the upper end of the grinding table 2, causing the gallium nitride multi-wafers to rotate. The lifting cylinder 61 extends downward, causing the lifting plate 6 to move downward through the sliding sleeve 611 and the support column 4. The electric ball valve 634 at the lower end of the abrasive agent barrel 631 opens the water outlet pipe 633, and the abrasive agent inside the abrasive agent barrel 631 enters the inside of the two abrasive agent spray guns 65 through the hose 635. The second motor 653 is started to adjust the angle of the connecting frame 651 through the steering shaft 652. The third motor 655 is started to drive the rotating frame 654 to rotate, adjusting the angles of the two abrasive agent spray guns 65, so that the two abrasive agent spray guns 65 spray the abrasive agent on the gallium nitride multi-wafers at the upper ends of the four groups of rotating tables 3 respectively. Then the lifting plate 6 continues to descend, and the four grinding discs 622 will respectively contact the gallium nitride multi-wafers at the upper ends of the four groups of rotating tables 3. Since the gallium nitride multi-wafers are in a high-speed rotating state relative to the grinding discs 622, the grinding discs 622 will grind the gallium nitride multi-wafers. After grinding is completed, the electric ball valve 634 at the lower end of the water bucket 632 is opened, and the clean water inside the water bucket 632 will enter the inside of the two flushing spray guns 66 through the water outlet pipe 633 and the two hoses 635. The flushing spray guns 66 flush the four groups of gallium nitride multi-wafers through angle adjustment. After flushing is completed, the two hot air blowers 67 are started, and hot air is blown downward through the air outlet 671 to dry the four groups of gallium nitride multi-wafers. After that, the unloading robotic arm 8 is activated, and through the movement of the multi-joints and the suction of the air extractor 771, the unloading operation of the gallium nitride multi-wafers at the upper ends of the four groups of rotating tables 3 is carried out. The water flow generated during the flushing process will flow into the drainage groove 21 around the upper end of the grinding table 2. Opening the valve 23 can discharge the water flow inside the drainage groove 21 through the drain pipe 22 to the outside.

[0041] The foregoing has shown and described the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments, and what is described in the above embodiments and the specification is only to illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will also have various changes and improvements, and these changes and improvements fall within the scope of the present invention claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic grinding device for gallium nitride multi-wafers, comprising a base (1), characterized in that: A grinding table (2) is provided in the middle of the upper end of the base (1). Four rotating tables (3) are provided at the upper end of the grinding table (2). A rotating shaft (31) is provided inside the grinding table (2) at the lower end of each of the four rotating tables (3). A driven gear (32) is provided at the lower end of each group of rotating shafts (31). A driving gear (33) is provided between the side walls of the four driven gears (32). The driving gear (33) meshes with the four driven gears (32) respectively. A first motor (34) is provided at the lower end of the driving gear (33). A support column (4) is provided at each of the four corners of the upper end of the base (1). A top plate (5) is provided at the upper ends of the four support columns (4). A sliding sleeve (611) is provided on the outer wall of each of the four support columns (4). A lifting plate (6) is provided between the inner side walls of the four sliding sleeves (611). Four mounting blocks (62) are provided in the middle of the lifting plate (6). A connecting column (621) is provided below the lifting plate (6) at the lower end of each of the four mounting blocks (62). A grinding disc (622) is provided at the lower end of each of the four connecting columns (621). The four grinding discs (622) are respectively located directly above the four rotating tables (3). A lifting cylinder (61) is provided in the middle of the top plate (5). The lower end of the lifting cylinder (61) is connected to the middle of the upper end of the lifting plate (6). A loading manipulator (7) is provided on one side of the upper end of the base (1). An unloading manipulator (8) is provided on the other side of the upper end of the base (1). A control box (9) is provided at the lower end of the base (1). The control box (9) is electrically connected to the grinding table (2), the loading manipulator (7), the unloading manipulator (8), and the lifting plate (6).

2. The automatic grinding equipment for a gallium nitride multi-wafer according to claim 1, wherein: At the lower ends of the feeding robotic arm (7) and the discharging robotic arm (8), mounting platforms (71) are provided. The two groups of mounting platforms (71) are respectively installed on both sides of the upper end of the base (1). At the upper ends of the two groups of mounting platforms (71), swivel seats (711) are provided. Inside the two groups of mounting platforms (71), fourth motors (712) are provided. The fourth motors (712) are respectively connected to the lower ends of the swivel seats (711). At the upper ends of the swivel seats (711), first rotating connecting plates (72) are provided. At the middle of the first rotating connecting plates (72), first rotating heads (721) are provided. On the outer walls of the first rotating connecting plates (72), fifth motors (722) are provided. The fifth motors (722) are connected to the middle of the side walls of the first rotating heads (721). At the middle of the upper ends of the first rotating heads (721), first cylinders (73) are provided. At the upper ends of the first cylinders (73), second rotating connecting plates (74) are provided. Between the lower ends of the second rotating connecting plates (74) and the upper ends of the first rotating heads (721), four groups of first telescopic rods (731) are further provided. At the middle of the second rotating connecting plates (74), second rotating heads (741) are provided. On the outer walls of the second rotating connecting plates (74), sixth motors (742) are provided. The sixth motors (742) are connected to the middle of the second rotating heads (741). At the middle of the front ends of the second rotating heads (741), second cylinders (75) are provided. At the front ends of the second cylinders (75), third rotating connecting plates (76) are provided. Between the rear ends of the third rotating connecting plates (76) and the front ends of the second rotating heads (741), four groups of second telescopic rods (751) are further provided. At the middle of the third rotating connecting plates (76), third rotating heads (761) are provided. On the outer walls of the third rotating connecting plates (76), seventh motors (762) are provided. The seventh motors (762) are connected to the middle of the third rotating heads (761). At the lower ends of the third rotating heads (761), mounting frames (77) are provided. At the middle of the mounting frames (77), air extractors (771) are provided. Below the air extractors (771) and below the mounting frames (77), suction frames (772) are provided. At the lower ends of the suction frames (772), rubber rings (773) are provided.

3. The automatic grinding equipment for gallium nitride multi-wafer sheets according to claim 2, wherein: A rotating interface is provided between the lower end of the swivel seat (711) and the upper end of the mounting platform (71). The lower end of the swivel seat (711) is rotationally connected to the upper end of the mounting platform (71) through the provided rotating interface. A rotating interface is provided between the first rotating head (721) and the inner wall of the first rotating connecting plate (72). The first rotating connecting plate (72) is rotationally connected to the inner wall of the first rotating connecting plate (72) through the provided rotating interface.

4. The automatic grinding equipment for gallium nitride multi-wafer according to claim 2, wherein: A rotating interface is provided between the second rotating head (741) and the inner wall of the second rotating connecting plate (74). The second rotating head (741) is rotationally connected to the inner wall of the second rotating connecting plate (741) through the provided rotating interface. A rotating interface is provided between the third rotating head (761) and the inner wall of the third rotating connecting plate (76). The third rotating head (761) is rotationally connected to the inner wall of the third rotating connecting plate (76) through the provided rotating interface.

5. The automatic grinding equipment for gallium nitride multi-wafer sheets according to claim 1, characterized in that: Rotating interfaces are provided between the lower ends of the four groups of rotating platforms (3) and the upper end of the grinding platform (2). The lower ends of the four groups of rotating platforms (3) are respectively rotationally connected to the upper end of the grinding platform (2) through the provided rotating interfaces. Rotating interfaces are respectively provided between the four groups of rotating shafts (31) and the inner wall of the grinding platform (2). The four groups of rotating shafts (31) are respectively rotationally connected to the inner wall of the grinding platform (2) through the provided rotating interfaces. A rotating interface is provided between the driving gear (33) and the inner wall of the grinding platform (2). The driving gear (33) is rotationally connected to the inner wall of the grinding platform (2) through the provided rotating interface. A sliding hole is provided in the middle of the sliding sleeve (611). The sliding sleeve (611) is slidably connected to the outer wall of the support column (4) through the provided sliding hole.

6. The automatic grinding equipment for gallium nitride multi-wafer according to claim 1, characterized in that: Fixing plates (35) are provided on both sides of the upper ends of the four groups of rotating platforms (3). A first sliding rod (351) is provided in the middle of each group of fixing plates (35). A fixing clamping plate (355) is provided at the front end of each group of first sliding rods (351) on the upper end of the rotating platform (3). A connecting rod (352) is provided at the rear end of each group of first sliding rods (351). Slide rails (354) are provided on both sides of the lower sides of the four groups of rotating platforms (3). A slider (353) is provided in the middle of each group of slide rails (354). The lower ends of each group of connecting rods (352) are respectively connected to the upper ends of a group of sliders (353). A second sliding rod (356) is provided on the side wall of each group of sliders (353) in the middle of the slide rail (354). Every two groups of second sliding rods (356) extend into the interior of a group of rotating platforms (3). An electric push rod (357) is provided between the ends of every two groups of second sliding rods (356) inside the rotating platform (3). A sliding hole is provided between the first sliding rod (351) and the fixing plate (35). The first sliding rod (351) is slidably connected to the fixing plate (35) through the provided sliding hole. The slider (353) is slidably connected to the inner wall of the slide rail (354). A sliding hole is provided between the second sliding rod (356) and the side wall of the rotating platform (3). The second sliding rod (356) is slidably connected to the side wall of the rotating platform (3) through the provided sliding hole.

7. An automatic grinding device for gallium nitride multi-wafer, according to claim 1, characterized in that: On both sides of the upper end of the lifting plate (6), a set of support frames (63) are provided. At the upper ends of a set of the support frames (63), an abrasive bucket (631) is provided. At the upper ends of the other set of support frames (63), a clean water bucket (632) is provided. At the lower ends of the abrasive bucket (631) and the clean water bucket (632) below the support frames (63), water outlet pipes (633) are provided. Electric ball valves (634) are provided on the side walls of the two groups of water outlet pipes (633). At the lower end of the lifting plate (6), a fixing frame (64) is provided. At the lower end of the fixing frame (64), four connecting frames (651) are provided. In the middle of the lower ends of the four connecting frames (651), a set of rotating frames (654) are provided. In the middle of the lower ends of the two groups of rotating frames (654), abrasive spray guns (65) are provided. In the middle of the lower ends of the other two groups of rotating frames (654), flushing spray guns (66) are provided. The two groups of abrasive spray guns (65) and the two groups of flushing spray guns (66) are staggered. A set of hoses (635) are provided between the two groups of water outlet pipes (633) and the side walls of the two groups of abrasive spray guns (65) and the two groups of flushing spray guns (66). A drainage groove (21) is provided around the upper end of the grinding table (2). A drain pipe (22) is provided on the front side wall of the grinding table (2). The drain pipe (22) is communicated with the drainage groove (21). A valve (23) is provided at the upper end of the drain pipe (22).

8. An automatic grinding device for gallium nitride multi-wafer, according to claim 1, characterized in that: Rotating interfaces are provided between the four groups of rotating frames (654) and the inner walls of a set of connecting frames (651). The four groups of rotating frames (654) are respectively rotationally connected to the inner walls of the connecting frames (651) through the provided rotating interfaces. A set of third motors (655) are provided on the side walls of the four groups of connecting frames (651). The four groups of third motors (655) are respectively connected to the middle of the rotating frames (654). A set of steering shafts (652) are respectively provided between the upper ends of the four groups of connecting frames (651) and the fixing frame (64). The four groups of connecting frames (651) are respectively rotationally connected to the fixing frame (64) through the provided steering shafts (652). Four groups of second motors (653) are provided at the upper end of the fixing frame (64). The four groups of second motors (653) are respectively connected to the upper ends of a set of steering shafts (652).

9. An automatic grinding device for gallium nitride multi-wafer sheets according to claim 1, characterized in that: The interior of the control box (9) is a PLC. On both sides of the upper end of the fixing frame (64), a set of hot air blowers (67) are further provided. At the lower ends of the two groups of hot air blowers (67) below the fixing frame (64), air outlets (671) are provided. Four support legs (10) are provided at the lower end of the base (1).

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