Stage unit and processing system

Abstract

To provide a technique advantageous for moving a stage on which an electronic component is placed.SOLUTION: A stage moving mechanism 13 for moving a stage 12 with respect to a base 11 comprises: XY moving devices 20 and 30 for moving the stage with respect to a base in XY directions dX and dY forming a right angle with respect to a rotation axis A; and a rotation moving device for rotating the stage with respect to the base in a rotation direction about the rotation axis. The rotation moving device includes: a rotation direction driving source 70; a rotation support portion 71 rotated in a rotation direction dR together with the stage by a driving force output from the rotation direction driving source; and a rotation relay portion 72 for transmitting the driving force output from the rotation direction driving source to the rotation support portion while allowing the rotation support portion to move in the XY directions with respect to the rotation direction driving source.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a stage unit on which electronic components are placed, and a processing system including such a stage unit. [Background technology]

[0002] In order to perform processes such as inspection of electronic components with high accuracy, the positions of the electronic components are adjusted.

[0003] For example, Patent Document 1 discloses a device for adjusting the positioning between a mounting surface and an electronic component to be mounted on the mounting surface. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2019-120564 Summary of the Invention [Problem to be solved by the invention]

[0005] To adjust the position of the electronic component, it is possible to use a stage unit that moves a stage on which the electronic component is placed in the X direction, Y direction, and θ direction (rotation direction).

[0006] Such a stage unit includes, for example, a drive source (X-axis motor) for moving the stage in the X direction, a drive source (Y-axis motor) for moving the stage in the Y direction, and a drive source (rotation motor) for moving (rotating) the stage in the θ direction. In this case, when moving the stage in the X direction, it may be necessary to move the Y-axis motor and rotation motor in the X direction together with the stage, and when moving the stage in the Y direction, it may be necessary to move the X-axis motor and rotation motor in the Y direction together with the stage.

[0007] The X-axis motor, the Y-axis motor, and the rotary motor usually have a certain size and weight. Therefore, it may not be desirable to move the entire X-axis motor, the Y-axis motor, and the rotary motor in response to the movement of the stage. For example, when moving the stage to adjust the position of an electronic component, the inertia acting on the entire moving part increases when the motor moves with the stage, making it difficult to increase the movement speed and movement accuracy of the stage.

[0008] An object of the present disclosure is to provide a technique that is advantageous for moving a stage on which an electronic component is placed. [Means for solving the problem]

[0009] One aspect of the present disclosure relates to a stage unit comprising a base, a stage on which an electronic component is placed, and a stage movement mechanism that moves the stage relative to the base, wherein the stage movement mechanism includes an XY movement device that moves the stage relative to the base in X and Y directions perpendicular to a rotation axis, and a rotation movement device that rotates the stage relative to the base in a rotational direction based on the rotation axis, wherein the rotation movement device includes a rotational drive source, a rotational support unit that is rotated in the rotational direction together with the stage by a driving force output from the rotational drive source, and a rotational relay unit that transmits the driving force output from the rotational drive source to the rotational support unit, allowing movement of the rotational support unit in the X and Y directions relative to the rotational drive source.

[0010] The rotation relay unit may have a first coupling attached to the rotation support unit, a second coupling attached to the rotation direction drive source, and a coupling connection unit connected to the first coupling and the second coupling and changing its posture depending on the relative position in the XY directions between the first coupling and the second coupling.

[0011] The rotation relay unit may include a first coupling attached to the rotation support unit and a second coupling attached to the rotational drive source, and the first coupling and the second coupling may be attached to each other so as to be slidable relative to each other in the XY directions.

[0012] The XY moving device may include a first direction drive unit having a first direction drive source and a first direction movable part that is moved in the first direction together with the stage by a drive force output from the first direction drive source; a second direction drive unit having a second direction drive source and a second direction movable part that is moved in the second direction together with the stage by a drive force output from the second direction drive source; a first direction guide unit attached to the base and the stage and positioned between one of the base and the stage and the second direction movable part, which allows the stage to move in the first direction relative to the base; and a second direction guide unit attached to the base and the stage and positioned between one of the base and the stage and the first direction movable part, which allows the stage to move in the second direction relative to the base.

[0013] The first direction and the second direction may be perpendicular to each other.

[0014] The first direction movable part may be attached to the stage via a second direction guide unit, and the second direction movable part may be attached to the stage via the first direction guide unit.

[0015] The first direction drive source, the second direction drive source and the rotation direction drive source may be fixedly supported by a base.

[0016] The stage unit may include a clearance partition that partitions at least a part of at least one of the movement path of the first direction movable part and the movement path of the second direction movable part.

[0017] Another aspect of the present disclosure relates to a processing system including the above-mentioned stage unit, a mounting device for placing electronic components on the stage, an imaging device for acquiring image data of the electronic components before they are placed on the stage, and a control unit for controlling a stage movement mechanism based on the image data, wherein the control unit adjusts the position and orientation of the stage by controlling the stage movement mechanism based on status information indicating the status of the electronic components obtained by analyzing the image data.

[0018] The state information may include position information indicating a deviation of the position of the electronic component from a reference position, and orientation information indicating a deviation of the orientation of the electronic component from the reference orientation.

[0019] The processing system may include an inspection device that inspects the electronic components placed on the stage. [Effects of the Invention]

[0020] The present disclosure is advantageous in moving a stage on which an electronic component is placed. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a perspective view showing an example of a stage unit. [Figure 2] FIG. 2 is a perspective view showing a part of another example of the stage unit. [Figure 3] FIG. 3 is a diagram illustrating a schematic configuration of an example of a processing system. [Figure 4] FIG. 4 is a flowchart showing an example of processing in the processing system. [Figure 5] FIG. 5 is an enlarged view showing a rotation relay portion of the first modified example. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings.

[0023] FIG. 1 is a perspective view showing an example of a stage unit 10. As shown in FIG.

[0024] The stage unit 10 includes a base 11 , a stage 12 on which an electronic component is placed, and a stage moving mechanism 13 that moves the stage 12 relative to the base 11 .

[0025] 1 has an upper base portion 11a located relatively higher and extending horizontally (X direction dX and Y direction dY), a lower base portion 11c located relatively lower and extending horizontally, a drive motor mounting plate 11d located between the upper base portion 11a and the lower base portion 11c and extending horizontally, and two side base portions 11b extending in the height direction (vertical direction) between the upper base portion 11a and the side base portion 11b. The horizontal direction and the height direction form a right angle with each other.

[0026] One side base portion 11b is connected and fixed to one end of the upper base portion 11a in the X-direction dX and one end of the lower base portion 11c in the X-direction dX. The other side base portion 11b is connected and fixed to the other end of the upper base portion 11a in the X-direction dX and the other end of the lower base portion 11c in the X-direction dX. The drive motor mounting plate 11d is connected and fixed to each side base portion 11b at both ends in the X-direction dX. Therefore, the base 11 has an upper inner space (first inner space) surrounded by the upper base portion 11a, the side base portion 11b, and the drive motor mounting plate 11d, and a lower inner space (second inner space) surrounded by the drive motor mounting plate 11d, the side base portion 11b, and the lower base portion 11c.

[0027] The stage 12 is provided so as to be movable in each of the X direction (first direction) dX and the Y direction (second direction) dY by a stage moving mechanism 13, and is also provided so as to be movable (i.e., rotatable) in a rotation direction dR. The rotation direction dR is based on a rotation axis A that extends in the height direction so as to penetrate the stage 12 (particularly a reference mounting position (e.g., the center position of the stage 12)), and the stage 12 is provided so as to be rotatable around the rotation axis A. The X direction dX and the Y direction dY are directions that are perpendicular to the rotation axis A and are perpendicular to each other. Note that any direction along a plane (a horizontal plane in this example) extending along the X direction dX and the Y direction dY is referred to as the XY direction, and the XY direction does not necessarily have to coincide with the X direction dX or the Y direction dY.

[0028] In this embodiment, the X-direction position, Y-direction position and rotational position of the stage 12 can be adjusted for each electronic component by the stage moving mechanism 13 so that the electronic component placed on the stage 12 can be positioned at a desired position suitable for inspection of the electronic component by the inspection device 61.

[0029] In this embodiment, one target electronic component is transported from upstream by a mounting device (see reference numeral "46" in FIG. 3) and placed on stage 12, and after being inspected by inspection device 61 on stage 12, is transported downstream from stage 12 by the mounting device. This series of processes is performed consecutively for multiple target electronic components. In other words, immediately after the preceding electronic component has been inspected and transported from stage 12, the next electronic component transported from upstream is placed on stage 12 and inspected.

[0030] The inspection device 61 can perform desired inspections of the electronic components on the stage 12 and can have any desired device configuration and process. While the inspection device 61 is shown installed above the stage 12 in FIG. 1 , the installation position and installation form of the inspection device 61 are not limited, and it may be installed on the second stage support 42, for example. The inspection device 61 may, for example, capture and acquire images of the electronic components on the stage 12 and analyze the images to inspect for abnormalities that can be discerned from the appearance of the electronic components (e.g., cracks or chips in the electronic components). Furthermore, the inspection device 61 may contact the electronic components on the stage 12 and inspect for abnormalities in the electrical performance of the electronic components by, for example, passing a current through the electronic components on the stage 12 and measuring a state quantity of the electronic components related to the current (e.g., a voltage value).

[0031] The stage moving mechanism 13 of this embodiment can move the stage 12 two-dimensionally in the horizontal direction to place the stage 12 at a desired horizontal position, and can move the stage 12 in a rotational direction dR to place the stage 12 in a desired orientation (direction) with respect to the horizontal direction. Specifically, the stage moving mechanism 13 can move the stage 12 linearly a desired distance along each of the X direction dX and the Y direction dY, and can rotate the stage 12 a desired amount (desired angle) in the rotational direction dR.

[0032] The stage moving mechanism 13 shown in FIG. 1 includes an XY moving device that moves the stage 12 in the X and Y directions relative to the base 11, and a rotation moving device that rotates the stage 12 relative to the base 11 in a rotation direction dR.

[0033] The XY movement device includes X-direction drive units (first direction drive units) 20-25, Y-direction drive units (second direction drive units) 30-35, a stage X-axis guide unit (first direction guide unit) 15, and a stage Y-axis guide unit (second direction guide unit) 16.

[0034] The X-direction drive unit has an X-axis drive motor (first direction drive source) 20 and an X-axis movable table (first direction movable part) 21 that is moved in the X direction dX together with the stage 12 by the driving force output from the X-axis drive motor 20.

[0035] The Y-direction drive unit has a Y-axis drive motor (second-direction drive source) 30 and a Y-axis movable table (second-direction movable part) 31 that is moved in the Y direction dY together with the stage 12 by the driving force output from the Y-axis drive motor 30.

[0036] The X-axis drive motor 20 and the Y-axis drive motor 30 are fixedly supported by the base 11, and even if the stage 12 is moved in the horizontal directions dX, dY and the rotational direction dR by the stage movement mechanism 13, the X-axis drive motor 20 and the Y-axis drive motor 30 do not move in the horizontal directions dX, dY and the rotational direction dR.

[0037] In the example shown in FIG. 1, the X-axis drive motor body 20a of the X-axis drive motor 20 is disposed in the upper inner space of the base 11 and is fixedly supported by the upper base portion 11a. The X-axis drive motor shaft of the X-axis drive motor 20 protrudes upward from the X-axis drive motor body 20a and extends in the height direction so as to pass through a through-hole (first through-hole) in the upper base portion 11a. Similarly, the Y-axis drive motor of the Y-axis drive motor 30 is disposed in the upper inner space of the base 11 and is fixedly supported by the upper base portion 11a. The Y-axis drive motor shaft of the Y-axis drive motor 30 protrudes upward from the Y-axis drive motor body 30a and extends in the height direction so as to pass through a through-hole (second through-hole) in the upper base portion 11a.

[0038] The X-axis drive motor 20 and the Y-axis drive motor 30 are configured to be able to rotate the motor shafts by a desired amount under the control of a control unit (see reference numeral 50 in FIG. 3 described below), as will be described later. The specific configuration of such X-axis drive motor 20 and Y-axis drive motor 30 is not limited, and the X-axis drive motor 20 and Y-axis drive motor 30 may be configured by servo motors, for example.

[0039] An X-axis drive cam 22 is attached to the tip of the X-axis drive motor shaft (particularly, a portion located above the upper base portion 11a). The X-axis drive cam 22 rotates integrally with the X-axis drive motor shaft, which is driven to rotate by the X-axis drive motor body 20a, and the rotation axis of the X-axis drive cam 22 coincides with the rotation axis of the X-axis drive motor shaft. Meanwhile, an X-axis drive cam follower 23 is fixedly attached to the X-axis movable table 21, extending so as to protrude downward (vertically) from the underside of the X-axis movable table 21. The X-axis drive cam follower 23 comes into contact with the X-axis drive cam 22, and receives a force acting in the X direction dX from the X-axis drive cam 22 as the X-axis drive cam 22 rotates, so that the X-axis drive cam follower 23 is provided so as to be able to move back and forth in the X direction dX integrally with the X-axis movable table 21.

[0040] Further, an X-axis drive spring (X-axis drive elastic portion) 24 and a table X-axis guide unit 25 are attached to the X-axis movable table 21.

[0041] The X-axis drive spring 24 in this example is a tension spring whose one end is supported by the X-axis movable table 21 and whose other end is supported by the upper base portion 11a via a connecting member. The X-axis drive spring 24 applies an elastic force (restoring force) to the X-axis movable table 21 in the direction opposite (X direction dX) to the direction of the force in the X direction dX that the X-axis movable table 21 receives from the X-axis drive cam 22 via the X-axis drive cam follower 23. In this manner, the X-axis drive spring 24 acts to ensure contact (close contact) between the X-axis drive cam 22 and the X-axis drive cam follower 23. Note that instead of the X-axis drive spring 24, an elastic body other than a spring may be used, or an arbitrary mechanism (e.g., a mechanism using a magnet) that applies an arbitrary force other than an elastic force (e.g., a magnetic force) to the X-axis movable table 21 in the direction opposite (X direction dX) to the direction of the force in the X direction dX that the X-axis movable table 21 receives from the X-axis drive cam 22 may be used.

[0042] In the above example, the X-axis movable table 21 moved by the X-axis drive cam 22 is returned to its original position by using an arbitrary mechanism such as a spring (elastic body) or a magnet, but such an arbitrary mechanism such as a spring (elastic body) or a magnet does not have to be provided. For example, if the X-axis drive cam 22 has a structure that can move the X-axis movable table 21 back and forth in the X direction dX, there is no need to install a mechanism for returning the X-axis movable table 21 to its original position.

[0043] Table X-axis guide unit 25 in this example is configured with an LM guide (Linear Motion Guide), and has an LM rail fixedly provided on the top surface of upper base portion 11a, and an LM block that slides on the LM rail fixedly attached to the underside of X-axis movable table 21. The LM rail of table X-axis guide unit 25 supports the LM block so as to allow the LM block to freely slide back and forth in the X direction dX, while restricting its movement in the Y direction dY.

[0044] Similarly, a Y-axis drive cam 32 is attached to the tip of the Y-axis drive motor shaft (particularly, a portion located above the upper base portion 11a). The Y-axis drive cam 32 rotates integrally with the Y-axis drive motor shaft, which is rotated by the Y-axis drive motor body 30a, and the rotation axis of the Y-axis drive cam 32 coincides with the rotation axis of the Y-axis drive motor shaft. Meanwhile, a Y-axis drive cam follower 33 is fixedly attached to the Y-axis movable table 31, extending so as to protrude downward (vertically) from the underside of the Y-axis movable table 31. The Y-axis drive cam follower 33 comes into contact with the Y-axis drive cam 32, and receives a force acting in the Y direction dY from the Y-axis drive cam 32 as the Y-axis drive cam 32 rotates, so that the Y-axis drive cam follower 33 is provided so as to be able to move back and forth along the Y direction dY integrally with the Y-axis movable table 31.

[0045] A Y-axis drive spring (Y-axis drive elastic portion) 34 and a table Y-axis guide unit 35 are also attached to the Y-axis movable table 31. In this example, the Y-axis drive spring 34 is a tension spring with one end supported by the Y-axis movable table 31 and the other end supported by the upper base portion 11a via a connecting member. The Y-axis drive spring 34 applies an elastic force (restoring force) to the Y-axis movable table 31 in the direction opposite to the direction of the force in the Y direction dY that the Y-axis movable table 31 receives from the Y-axis drive cam 32 via the Y-axis drive cam follower 33. In this way, the Y-axis drive spring 34 acts to ensure contact (close contact) between the Y-axis drive cam 32 and the Y-axis drive cam follower 33. Instead of the Y-axis drive spring 34, an elastic body other than a spring may be used, or any mechanism (for example, a mechanism using a magnet) may be used that applies any force other than elastic force (for example, magnetic force) to the Y-axis movable table 31 in the opposite direction (Y direction dY) to the direction of the force in the Y direction dY that the Y-axis movable table 31 receives from the Y-axis drive cam 32.

[0046] In the above example, the Y-axis movable table 31 moved by the Y-axis drive cam 32 is returned to its original position by using an arbitrary mechanism such as a spring (elastic body) or a magnet, but such an arbitrary mechanism such as a spring (elastic body) or a magnet does not have to be provided. For example, if the Y-axis drive cam 32 has a structure that allows the Y-axis movable table 31 to move back and forth in the Y direction dY, there is no need to install a mechanism for returning the Y-axis movable table 31 to its original position.

[0047] Table Y-axis guide unit 35 in this example is constituted by an LM guide, and has an LM rail fixedly provided on the top surface of upper base portion 11a, and an LM block that slides on the LM rail fixedly attached to the underside of Y-axis movable table 31. The LM rail of table Y-axis guide unit 35 supports the LM block so as to restrict movement of the LM block in the X-direction dX while allowing free reciprocating sliding movement of the LM block in the Y direction dY.

[0048] The stage X-axis guide unit 15 is attached to the upper base portion 11a and the stage 12, and allows movement of the stage 12 in the X direction dX relative to the upper base portion 11a while restricting movement in the Y direction dY. The stage X-axis guide unit 15 can be placed between one of the upper base portion 11a or the stage 12 and the Y-axis movable table 31. In the example shown in FIG. 1 , the stage X-axis guide unit 15 is placed between the stage 12 and the Y-axis movable table 31, and the Y-axis movable table 31 is attached to the stage 12 via the stage X-axis guide unit 15.

[0049] 1 is composed of LM guides, and has an LM rail fixedly provided on the upper surface of Y-axis movable table 31, and an LM block that slides on the LM rail and is fixedly attached to stage 12 via first stage support part 41, turntable 71, and second stage support part 42. The LM rail of stage X-axis guide unit 15 supports the LM block so as to allow the LM block to freely slide back and forth in the X direction dX, while restricting its movement in the Y direction dY.

[0050] The stage Y-axis guide unit 16 is attached to the upper base portion 11a and the stage 12, and restricts movement of the stage 12 in the X-axis direction dX while allowing movement of the stage 12 relative to the upper base portion 11a in the Y-direction dY. The stage Y-axis guide unit 16 can be arranged between one of the upper base portion 11a and the stage 12 and the X-axis movable table 21. In the example shown in FIG. 1 , the stage Y-axis guide unit 16 is arranged between the stage 12 and the X-axis movable table 21, and the X-axis movable table 21 is attached to the stage 12 via the stage Y-axis guide unit 16.

[0051] 1 is composed of an LM guide, and has an LM rail fixedly provided on the upper surface of X-axis movable table 21, and an LM block that slides on the LM rail and is fixedly attached to stage 12 via first stage support part 41, turntable 71, and second stage support part 42. The LM rail of stage Y-axis guide unit 16 supports the LM block so as to restrict movement of the LM block in the X-direction dX while allowing free reciprocating sliding movement of the LM block in the Y direction dY.

[0052] The rotational movement device includes a θ-axis drive motor (rotational direction drive source) 70 , a turntable (rotation support unit) 71 , and a rotation relay unit 72 .

[0053] The θ-axis drive motor 70 is fixedly supported by the base 11, and even if the stage 12 is moved in the horizontal directions dX, dY and the rotational direction dR by the stage movement mechanism 13, the θ-axis drive motor 70 does not move in the horizontal directions dX, dY and the rotational direction dR.

[0054] 1, a θ-axis drive motor body 70a of a θ-axis drive motor 70 is disposed in the lower inner space of the base 11 and is fixedly supported by a drive motor mounting plate 11d. A θ-axis drive motor shaft of the θ-axis drive motor 70 protrudes upward from the θ-axis drive motor body and extends in the height direction so as to pass through a through-hole in the drive motor mounting plate 11d. A rotation relay part 72 (a second coupling 74 in this example) is fixedly attached to the tip end of the θ-axis drive motor shaft (particularly, the part located above the drive motor mounting plate 11d).

[0055] The θ-axis drive motor 70 is configured to be able to rotate the motor shaft by a desired amount under the control of a control unit (see reference numeral "50" in FIG. 3 described later), as will be described later. The specific configuration of such a θ-axis drive motor 70 is not limited, and the θ-axis drive motor 70 may be configured by a servo motor, for example.

[0056] The turntable 71 is rotated together with the stage 12 in a rotation direction dR by a rotational driving force output from a θ-axis drive motor 70 and transmitted via a rotation relay unit 72 .

[0057] 1, the second stage support 42, which is fixed to the stage 12, is fixedly attached to the upper surface of the turntable 71, and the turntable 71 is fixedly attached to the stage 12 via the second stage support 42. A rotation support shaft extends vertically downward from the lower surface of the turntable 71. Although not visible in FIG. 1, the rotation support shaft extends so as to penetrate the stage movement mechanism 13 (e.g., the first stage support 41 and the X-axis movable table 21) and the upper base portion 11a, and is connected and fixed at one end (upper end) to the second stage support 42 and at the other end (lower end) to the rotation relay unit 72 (first coupling 73 in this example).

[0058] Therefore, when the θ-axis drive motor shaft of the θ-axis drive motor 70 is rotated, the rotary relay unit 72 rotates integrally with the θ-axis drive motor shaft. Then, when the rotary relay unit 72 rotates, the rotary support shaft and the turntable 71 rotate integrally with the rotary relay unit 72, and as a result, the stage 12 rotates integrally with the turntable 71 and second stage support unit 42.

[0059] In particular, the rotation relay unit 72 of this embodiment transmits the driving force output from the θ-axis drive motor 70 to the rotation support unit (the rotation support shaft and the turntable 71), and allows the rotation support unit (the rotation support shaft and the turntable 71) to move in the horizontal direction (X and Y directions) relative to the θ-axis drive motor 70. In other words, regardless of whether there is a horizontal positional misalignment between the rotation support unit (the rotation support shaft and the turntable 71) and the θ-axis drive motor 70, the rotation relay unit 72 transmits the rotation driving force from the θ-axis drive motor 70 to the rotation support unit, and thus can rotate the second stage support unit 42 and the stage 12 connected to the rotation support unit in the rotation direction dR.

[0060] 1 has a first coupling 73 fixedly attached to the rotation support shaft, a second coupling 74 fixedly attached to the θ-axis drive motor shaft of the θ-axis drive motor 70, and a turn joint shaft (coupling connector) 75 connected to the first coupling 73 and the second coupling 74. The position of the turn joint shaft 75 changes depending on the relative position between the first coupling 73 and the second coupling 74 in the horizontal direction (XY direction).

[0061] The first coupling 73 moves horizontally together with the rotation support shaft, turntable 71, second stage support part 42, and stage 12. Therefore, when the stage 12 is moved horizontally (in the X and Y directions) by the XY movement device described above, the first coupling 73 also moves horizontally together with the stage 12. Therefore, the horizontal position (position in the X and Y directions) of the first coupling 73 basically always coincides with the horizontal position of the stage 12. On the other hand, the second coupling 74, which is fixedly attached to the θ-axis drive motor 70, does not move horizontally like the θ-axis drive motor 70, and the horizontal position of the second coupling 74 coincides with the horizontal position of the θ-axis drive motor 70.

[0062] Therefore, when the first coupling 73 moves horizontally in accordance with the horizontal movement of the stage 12, a misalignment in the horizontal position may occur between the first coupling 73 and the second coupling 74. Even if a misalignment occurs between the first coupling 73 and the second coupling 74 in this way, the influence of the misalignment is absorbed by the turn joint shaft 75 taking an inclined posture according to the horizontal positions of the first coupling 73 and the second coupling 74. In other words, regardless of the amount of horizontal misalignment between the first coupling 73 and the second coupling 74, the first coupling 73 is appropriately connected while maintaining its relative position and posture (orientation) with respect to the rotation support shaft, turntable 71, second stage support unit 42, and stage 12, and the second coupling 74 is appropriately connected while maintaining its relative position and posture (orientation) with respect to the θ-axis drive motor 70.

[0063] Since a mechanism for absorbing misalignment between the θ-axis drive motor 70 and the rotation support unit (rotation support shaft and turntable 71) using such a rotation relay unit 72 is known, a more detailed explanation of a specific configuration example of the rotation relay unit 72 will be omitted.

[0064] The stage unit 10 shown in FIG. 1 is merely an example, and the stage unit 10 may be modified.

[0065] Fig. 2 is a perspective view showing a part of another example of the stage unit 10. In Fig. 2, elements that are the same as or correspond to elements shown in Fig. 1 are given the same reference numerals, and detailed description thereof will be omitted.

[0066] The movable parts of the stage unit 10 may be at least partially surrounded by another member (enclosing member). In this case, it is preferable that a portion of the enclosing member corresponding to the range of motion of the movable parts is provided as a clearance part (space) so that the movement of the movable parts is not hindered by the enclosing member. The movable parts referred to here are not limited, and for example, at least one of the X-axis movable table 21 and the Y-axis movable table 31 may correspond to the movable parts surrounded by the enclosing member. In this case, the clearance partition part (enclosing member) that defines the clearance part may define at least a part of at least one of the movement trajectory of the X-axis movable table 21 and the movement trajectory of the Y-axis movable table 31.

[0067] 2, the X-axis drive cam 22, the X-axis drive cam follower 23, the Y-axis drive cam 32, and the Y-axis drive cam follower 33 are at least partially surrounded in the horizontal direction by the upper base portion 11a. Therefore, the upper base portion 11a has an X-axis cam recess 83, an X-axis cam follower recess 85, a Y-axis cam recess 84, and a Y-axis cam follower recess 86, each of which is provided as a space. The X-axis cam recess 83 is included in the operating range of the X-axis drive cam 22, the X-axis cam follower recess 85 is included in the operating range of the X-axis drive cam follower 23, the Y-axis cam recess 84 is included in the operating range of the Y-axis drive cam 32, and the Y-axis cam follower recess 86 is included in the operating range of the Y-axis drive cam follower 33. Therefore, the X-axis drive cam 22, X-axis drive cam follower 23, Y-axis drive cam 32, and Y-axis drive cam follower 33 can operate without being hindered by the upper base portion 11a. In this way, the upper base portion 11a functions as a surrounding member for each of the X-axis drive cam 22, X-axis drive cam follower 23, Y-axis drive cam 32, and Y-axis drive cam follower 33, and also functions as a relief partition portion that partitions the relief portion.

[0068] The stage X-axis guide unit 15 may be at least partially surrounded in the horizontal direction by the X-axis guide cover member 65. In this case, the X-axis guide cover member 65 may have an X-axis guide recess 81 that is provided as a space and is included in the operating range of the stage X-axis guide unit 15. In this case, the stage X-axis guide unit 15 can operate without its movement being hindered by the X-axis guide cover member 65. Furthermore, the stage Y-axis guide unit 16 may be at least partially surrounded in the horizontal direction by the Y-axis guide cover member 66. In this case, the Y-axis guide cover member 66 may have a Y-axis guide recess 82 that is provided as a space and is included in the operating range of the stage Y-axis guide unit 16. In this case, the stage Y-axis guide unit 16 can operate without its movement being hindered by the Y-axis guide cover member 66.

[0069] Next, an example of a method for driving the stage unit 10 shown in FIG. 1 will be described.

[0070] When the stage 12 is to be moved a desired distance in the X-direction dX, the X-axis drive motor 20 is driven under the control of a control unit (see reference numeral "50" in FIG. 3 described later), and the X-axis drive motor shaft is rotated by an amount of rotation (desired rotation amount) corresponding to the desired distance. As a result, the X-axis drive cam 22 rotates by the desired amount of rotation, and the X-axis drive cam follower 23 is moved by the desired distance in the X-direction dX. By moving the X-axis drive cam follower 23 in this manner, the X-axis movable table 21, the stage Y-axis guide unit 16, and the first stage support part 41 connected to the X-axis drive cam follower 23 are also moved integrally by the desired distance in the X-direction dX. As a result, the stage 12 attached to the first stage support part 41 is also moved by the desired distance in the X-direction dX.

[0071] Similarly, when moving the stage 12 a desired distance in the Y direction dY, the Y-axis drive motor 30 is driven under the control of the control unit, and the Y-axis drive motor shaft is rotated by an amount of rotation (desired rotation amount) corresponding to the desired distance. As a result, the Y-axis drive cam 32 rotates by the desired amount of rotation, moving the Y-axis drive cam follower 33 by the desired distance in the Y direction dY. By moving the Y-axis drive cam follower 33 in this manner, the Y-axis movable table 31, the stage X-axis guide unit 15, and the first stage support part 41 connected to the Y-axis drive cam follower 33 are also moved integrally by the desired distance in the Y direction dY. As a result, the stage 12 attached to the first stage support part 41 is also moved by the desired distance in the Y direction dY.

[0072] Furthermore, when the stage 12 is moved a desired distance in the rotation direction dR (i.e., when it is rotated a desired angle around the rotation axis A), the θ-axis drive motor 70 is driven under the control of the control unit, and the θ-axis drive motor shaft is rotated an amount of rotation (desired amount of rotation) corresponding to the desired angle. As a result, the rotation relay unit 72, the rotation support shaft, the turntable 71, and the second stage support unit 42 rotate by the desired amount of rotation, and thus the stage 12 attached to the second stage support unit 42 is also rotated by the desired amount of rotation and moved by the desired distance (i.e., desired angle) in the rotation direction dR.

[0073] The above-mentioned movement driving of the stage 12 in the X direction dX, the movement driving of the stage 12 in the Y direction dY, and the movement driving (rotation driving) of the stage 12 in the rotation direction dR may be performed simultaneously or at different timings.

[0074] Next, an example of a processing system 1 including the above-described stage unit 10 will be described.

[0075] FIG. 3 is a diagram showing a schematic configuration of an example of the processing system 1. As shown in FIG.

[0076] The processing system 1 shown in FIG. 3 includes a front stage mounting part 45 provided in the first station St1, an imaging device 55 provided in the second station St2, and a stage unit 10 and an inspection device 61 provided in the third station St3.

[0077] The target electronic component W is placed on the preceding stage placement section 45. The electronic component W on the preceding stage placement section 45 is held by a placement device 46 and intermittently transported from the first station St1 to the third station St3 via the second station St2, and then placed on the stage 12 of the stage unit 10.

[0078] The placement device 46 of this embodiment includes a component holding nozzle 47 that releasably holds an electronic component W under the control of the control unit 50. The component holding nozzle 47 can hold the electronic component W at the nozzle opening by vacuum suction, for example, by making the internal pressure lower than the external pressure, and can release the electronic component W by making the internal pressure equal to or greater than the external pressure.

[0079] The component holding nozzle 47 moves so as to stop intermittently at a plurality of stations (including the first to third stations St1 to St3) in sequence, and circulates through the plurality of stations. In this embodiment, the stations are arranged at equal intervals along a circular track, and the placement device 46 is equipped with a plurality of component holding nozzles 47, the same number as the number of the stations, and each of the plurality of component holding nozzles 47 stops intermittently at all the stations simultaneously.

[0080] Therefore, at the same time that the preceding component holding nozzle 47 holds an electronic component W at the first station St1 and moves with that electronic component W to place it at the second station St2, the next component holding nozzle 47 is placed at the first station St1 to hold another electronic component W. In this way, the placement device 46 holds the electronic components W on the preceding placement section 45 one at a time and transports them to the second station St2.

[0081] Only one electronic component W may be placed simultaneously on the preceding stage placement section 45, or multiple electronic components W may be placed simultaneously. When only one electronic component W is placed simultaneously on the preceding stage placement section 45, the next electronic component W may be placed on the preceding stage placement section 45 by a supply device (not shown) after the preceding component holding nozzle 47 has transported the electronic component W from the preceding stage placement section 45 toward the second station St2 (for example, before the next component holding nozzle 47 is placed at the first station St1). On the other hand, when multiple electronic components W are placed simultaneously on the pre-stage placement section 45, after the electronic component W is transported from the pre-stage placement section 45 to the second station St2 by the preceding component holding nozzle 47 (for example, before the next component holding nozzle 47 is placed at the first station St1), the next electronic component W may be moved to a holding position by a moving mechanism (not shown), or the pre-stage placement section 45 may be moved by a moving mechanism (not shown) so that the next electronic component W is placed in a holding position to be held by the next component holding nozzle 47.

[0082] In the second station St2, the imaging device 55 acquires image data D of the electronic component W before it is placed on the stage 12 of the stage unit 10, and transmits the image data D to the control unit 50. In the example shown in FIG. 3, the second station St2 is provided with the imaging device 55, an annular illumination device 57 having a central light-transmitting portion through which light for photographing the electronic component W can pass, and an imaging optical system 56 that guides the light for photographing the electronic component W to the imaging device (particularly an image sensor such as a CMOS). The imaging optical system 56 may include, for example, one or more optical elements (e.g., lenses and mirrors) that refract or reflect light. Therefore, although the electronic components W and component holding nozzles 47, the imaging optical system 56, and the imaging device 55, which are intermittently arranged in the second station St2, are positioned on the same straight line (the same vertical line) in the example shown in FIG. 3, they do not necessarily have to be positioned on the same straight line. For example, imaging light traveling vertically (downward) from the electronic component W may be reflected horizontally by the imaging optical system 56, and the imaging device 55 may receive the imaging light traveling horizontally.

[0083] Illumination light (e.g., visible light) from the illumination device 57 is directed at the electronic components W that are intermittently stopped together with the component holding nozzles 47 at the second station St2, and the reflected light, which is imaging light of the electronic components W, is received by the image sensor of the imaging device 55 via the light-transmitting portion of the illumination device 57 and the imaging optical system 56, thereby acquiring image data D of the electronic components W. The image data D may include an image of the illumination device 57 in addition to the image of the electronic components W, or it may not include an image of the illumination device 57.

[0084] The electronic component W held by the component holding nozzle 47 undergoes imaging processing at the second station St2, then moves from the second station St2, is intermittently stopped at the third station St3, and is placed on the stage 12 of the stage unit 10.

[0085] In this embodiment, the control unit 50 controls the stage movement mechanism 13 (particularly the X-axis drive motor 20, the Y-axis drive motor 30, and the θ-axis drive motor 70) based on the image data D. That is, the control unit 50 adjusts the position and orientation of the stage 12 by controlling the stage movement mechanism 13 based on status information indicating the status of the electronic component W obtained by analyzing the image data D. The status information referred to here may include various information, and typically includes position information indicating the deviation of the position of the electronic component W from a reference position and orientation information indicating the deviation of the orientation (orientation) of the electronic component W from the reference orientation. The position information of the electronic component W referred to here may include, for example, not only information indicating the geometric position (e.g., outer dimensions) of the electronic component W but also information indicating the electrode position deviation of the electronic component W. Therefore, by controlling the stage movement mechanism 13 based on the position information of the electronic component W, the control unit 50 can correct not only the geometric position of the electronic component W but also the electrode position deviation of the electronic component W.

[0086] 3, the control unit 50 includes an image analysis unit 51 that analyzes image data D of the electronic component W output from the imaging device 55. The image analysis unit 51 can analyze the image data D using any method to acquire status information such as position information and orientation information of the electronic component W.

[0087] As an example, the image analysis unit 51 may store reference image data in advance, and may acquire status information such as position information and orientation information by comparing image data D of the electronic component W acquired by the imaging device 55 with the reference image data. The reference image data referred to here is image data including an image of the electronic component W disposed at a desired appropriate position and orientation, and may be, for example, image data D acquired by the imaging device 55 while the electronic component W is held by the component holding nozzle 47 at the desired appropriate position and orientation. In this case, the image analysis unit 51 may identify the position and orientation of the target electronic component W in the image data D (e.g., the position and orientation of the entire or part (electrodes, etc.) of the target electronic component W) and compare it with the position and orientation of the electronic component W in the reference image data to acquire status information such as position information and orientation information regarding the target electronic component W. Alternatively, the image analysis unit 51 may acquire status information such as position information and orientation information regarding the target electronic component W by comparing the position and orientation of the electronic component W in the image data D of the electronic component W acquired by the imaging device 55 with a reference position and reference orientation in the image data D (for example, a position and orientation that directly or indirectly indicates the component holding nozzle 47).

[0088] In this example, the component holding nozzle 47 places an electronic component W on the stage 12 after its position has been adjusted by the stage moving mechanism 13 under the control of the control unit 50 as described above. The electronic component W placed on the stage 12 is then inspected by the inspection device 61, and after the inspection, the electronic component W is transported downstream from the third station St3 by the component holding nozzle 47. Note that in this example, the position adjustment of the stage 12 by the stage moving mechanism 13 is performed before the target electronic component W stops at the third station St3.

[0089] Next, an example of processing performed by the processing system 1 shown in Fig. 3 will be described. The processing described below is appropriately performed by driving various devices of the processing system 1 under the control of the control unit 50.

[0090] FIG. 4 is a flowchart showing an example of processing in the processing system 1.

[0091] In this example, the target electronic component W located on the pre-stage placement section 45 is transferred from the first station St1 to the second station St2 by the component holding nozzle 47 of the placement device 46, and is intermittently placed at the second station St2 (S1).

[0092] Thereafter, the target electronic component W is imaged by the imaging device 55 while positioned at the second station St2, and image data D of the target electronic component W is sent from the imaging device 55 to the control unit 50 (S2).

[0093] Thereafter, before the target electronic component W is transferred to the third station St3, the image analysis unit 51 acquires status information (such as positional information and orientation information of the target electronic component W) from the image data D (S3), and the stage movement mechanism 13 adjusts the position and orientation of the stage 12 based on the status information (S4). Thereafter, the target electronic component W to be transferred to the third station St3 by the component holding nozzle 47 is placed on the stage 12 (S5).

[0094] In this example, the horizontal position of the stage 12 is adjusted so that the target electronic component W is placed at the reference placement position of the stage 12 (e.g., the center position of the stage 12). The component holding nozzles 47 are basically always placed at their predetermined positions without any misalignment at each station. However, the target electronic component W, particularly at the first station St1 and the second station St2, is not necessarily positioned in a constant manner, and its relative position with respect to the corresponding component holding nozzle 47 may deviate from the reference position. In this example, the control unit 50 acquires the amount of misalignment of the target electronic component W from the reference position based on status information (e.g., position information) obtained from the image data D, and adjusts the horizontal position of the stage 12 in advance to offset the amount of misalignment. As a result, the target electronic component W is placed at the reference placement position of the stage 12 regardless of whether or not there is any misalignment from the reference position.

[0095] Furthermore, the orientation of the stage 12 relative to the rotation axis A is adjusted so that the target electronic component W is placed on the stage 12 in the reference placement orientation. The component holding nozzles 47 basically always maintain a predetermined orientation without any orientation deviation at each station. Meanwhile, the orientation of the target electronic component W, particularly at the first station St1 and the second station St2, is not necessarily constant, and the orientation relative to the corresponding component holding nozzle 47 may deviate from the reference orientation. In this example, the control unit 50 acquires the amount of orientation deviation of the target electronic component W from the reference orientation based on status information (such as orientation information) obtained from the image data D, and adjusts the orientation of the stage 12 in advance to offset the amount of orientation deviation. As a result, the target electronic component W is placed on the stage 12 in the reference placement orientation, regardless of whether or not there is any orientation deviation from the reference orientation.

[0096] After the target electronic component W is placed on the stage 12 at the reference placement position in the reference placement orientation in this manner, the stage 12 is returned together with the electronic component W to the reference stage position and reference stage orientation by the stage moving mechanism 13 under the control of the control unit 50 (S6). The target electronic component W on the stage 12 is then inspected by the inspection device 61 (S7). The reference stage position here is the optimal position for inspection by the inspection device 61. The reference stage orientation is the optimal orientation for inspection by the inspection device 61. Therefore, even if the target electronic component W is misaligned from the reference position and / or misaligned from the reference orientation at the first station St1 and the second station St2, it can be inspected at the optimal position and orientation at the third station St3.

[0097] Thereafter, the target electronic component W on the stage 12 is held and transported downstream by the component holding nozzle 47 (S8). At this time, since the target electronic component W is always positioned at a fixed position (optimal position for inspection) and in a fixed orientation (optimal orientation for inspection), the component holding nozzle 47 can basically always hold the electronic component W in the correct position and with the correct attitude, and transport it stably from the third station St3 to the subsequent stage.

[0098] Although the processing flow shown in FIG. 4 is shown for one target electronic component W, the processing system 1 performs the above-described series of processes successively for each of a plurality of target electronic components W.

[0099] As described above, according to this embodiment, the stage 12 can be moved in the horizontal direction and the rotational direction dR without moving the entire X-axis drive motor 20, the Y-axis drive motor 30, and the θ-axis drive motor 70 in the horizontal direction and the rotational direction dR. Therefore, for example, the stage 12 can be moved while suppressing the inertia acting on the entire moving portion of the stage unit 10, and the moving speed and movement accuracy of the stage 12 can be increased.

[0100] [First Modification] 5 is an enlarged view showing a rotation relay part 72 of the first modified example. In this modified example, elements that are the same as or correspond to elements shown in the above-described embodiment are given the same reference numerals, and detailed description thereof will be omitted.

[0101] The rotation relay unit 72 is not limited to the example shown in FIG. 1, and the first coupling 73 and the second coupling 74 may be attached to each other so as to be slidable relative to each other in the X and Y directions.

[0102] In the example shown in FIG. 5, a first coupling 73 is fixed to the lower tip of the rotation support shaft 37, and a second coupling 74 is fixed to the upper tip of the drive connecting shaft 38. The rotation support shaft 37 extends vertically from the underside of the turntable 71 (see FIG. 1), passes through a first through-hole 11A in the upper base portion 11a, and protrudes downward beyond the upper base portion 11a. The drive connecting shaft 38 is fixedly connected to the θ-axis drive motor shaft of the θ-axis drive motor 70 (see FIG. 1), extends upward, and passes through a second through-hole 11B in the intermediate base portion 11d, protruding upward beyond the intermediate base portion 11d. The first coupling 73 and the second coupling 74 are attached to each other via a slide mechanism 90 so as to be slidable relative to each other in the X and Y directions.

[0103] The slide mechanism 90 of this example includes an X-direction sliding portion 91, a Y-direction sliding portion 92, and a sliding support portion 93 that is disposed between the X-direction sliding portion 91 and the Y-direction sliding portion 92 and is fixed to the X-direction sliding portion 91 and the Y-direction sliding portion 92. The X-direction sliding portion 91 supports the first coupling 73 so that it can slide freely in the X-direction dX (the left-right direction in FIG. 5), and the Y-direction sliding portion 92 supports the second coupling 74 so that it can slide freely in the Y-direction dY (the front / depth direction in FIG. 5). The X-direction sliding portion 91 and the Y-direction sliding portion 92 are fixedly supported by the base 11 (for example, the intermediate base portion 11d) via support blocks (not shown).

[0104] According to this modification, positional deviations in the X direction dX and the Y direction dY between the rotation support shaft 37 and the drive connecting shaft 38 are absorbed by the slide mechanism 90. Therefore, even if positional deviation (misalignment) occurs between the first coupling 73 and the second coupling 74 as the stage 12 (see FIG. 1) moves in the horizontal direction, the effects of such misalignment are absorbed by the slide mechanism 90. For example, positional deviations in the X direction dX between the first coupling 73 and the second coupling 74 are absorbed by the first coupling 73 sliding in the X direction dX relative to the X-direction slide permitting portion 91. Furthermore, positional deviations in the Y direction dY between the first coupling 73 and the second coupling 74 are absorbed by the second coupling 74 sliding in the Y direction dY relative to the Y-direction slide permitting portion 92.

[0105] In this way, regardless of the amount of horizontal positional misalignment between the first coupling 73 and the second coupling 74, the first coupling 73 is appropriately connected to the rotation support shaft 37, the turntable 71 (see FIG. 1), the second stage support section 42, and the stage 12 while maintaining its relative position and attitude (orientation), and the second coupling 74 is appropriately connected to the θ-axis drive motor 70 (see FIG. 1) while maintaining its relative position and attitude (orientation). Therefore, the stage 12 can be moved in the horizontal direction and in the rotational direction dR without moving the X-axis drive motor 20, the Y-axis drive motor 30, and the θ-axis drive motor 70 as a whole in the horizontal direction (XY directions) and in the rotational direction dR. Therefore, for example, the stage 12 can be moved while suppressing the inertia acting on the entire moving portion of the stage unit 10.

[0106] [Other variations] In the above-described embodiment, before the electronic component W is placed on the stage 12, the position and orientation of the stage 12 are adjusted in accordance with the positional and orientation misalignment of the electronic component W. However, after the electronic component W is placed on the stage 12, the position and orientation of the stage 12 may be adjusted in accordance with the positional and orientation misalignment of the electronic component W while the electronic component W is still placed on the stage 12.

[0107] Furthermore, in the above-described embodiment, an inspection device 61 that inspects the electronic component W placed on the stage 12 is provided, but the inspection device 61 is not necessarily provided. Furthermore, in addition to or instead of the inspection device 61, any processing device that performs processing on the electronic component W on the stage 12 may be provided. By adjusting the position and orientation of the stage 12 in response to the positional and orientational deviations of the electronic component W, the electronic component W is placed on the stage 12 at an appropriate position and orientation (posture) where the positional and orientational deviations are eliminated. Therefore, when the electronic component W is transported downstream from the stage 12 by the component holding nozzle 47 (placement device 46), the electronic component W is basically always held by the component holding nozzle 47 in the appropriate position and orientation. In this way, the position and orientation (posture) of the electronic component W are corrected by the stage unit 10. As a result, the electronic component W can be subjected to various processes downstream of the stage unit 10 in the appropriate position and orientation, and various processes can be performed with high accuracy.

[0108] It should be noted that the embodiments and modifications disclosed in this specification are merely illustrative in all respects and should not be construed as limiting. The above-described embodiments and modifications may be omitted, substituted, and modified in various ways without departing from the scope and spirit of the appended claims. For example, the above-described embodiments and modifications may be combined in whole or in part, and embodiments other than those described above may be combined with the above-described embodiments or modifications. Furthermore, the effects of the present disclosure described in this specification are merely illustrative, and other effects may be obtained.

[0109] The technical category that embodies the above technical idea is not limited. For example, the above technical idea may be embodied by a computer program that causes a computer to execute one or more procedures (steps) included in a method of manufacturing or using the above device. The above technical idea may also be embodied by a computer-readable non-transitory recording medium on which such a computer program is recorded. [Explanation of symbols]

[0110] 1 Processing system, 10 Stage unit, 11 Base, 11a Upper base portion, 11b Side base portion, 11c Lower base portion, 11d Drive motor mounting plate, 12 Stage, 13 Stage movement mechanism, 15 Stage X-axis guide unit, 16 Stage Y-axis guide unit, 20 X-axis drive motor, 21 X-axis movable table, 22 X-axis drive cam, 23 X-axis drive cam follower, 24 X-axis drive spring, 25 Table X-axis guide unit, 30 Y-axis drive motor, 31 Y-axis movable table, 32 Y-axis drive cam, 33 Y-axis drive cam follower, 34 Y-axis drive spring, 35 Table Y-axis guide unit, 41 First stage support portion, 42 Second stage support portion, 45 Pre-stage placement portion, 46 Placement device, 47 Component holding nozzle, 50 Control unit, 51 Image analysis unit, 55 Imaging device, 56 Imaging optical system, 57 Illumination device, 61 inspection device, 65 X-axis guide cover member, 66 Y-axis guide cover member, 70 θ-axis drive motor, 71 turntable, 72 rotation relay unit, 73 first coupling, 74 second coupling, 75 turn joint shaft, 81 X-axis guide recess, 82 Y-axis guide recess, 83 X-axis cam recess, 84 Y-axis cam recess, 85 X-axis cam follower recess, 86 Y-axis cam follower recess, A rotation axis, dX X direction, dY Y direction, dR rotation direction, D image data, St1 first station, St2 second station, St3 third station, W electronic component

Claims

1. With the base, a stage on which electronic components can be placed; a stage moving mechanism that moves the stage relative to the base, The stage moving mechanism includes: an XY moving device that moves the stage relative to the base in X and Y directions perpendicular to the rotation axis; a rotational movement device that rotates the stage relative to the base in a rotational direction based on the rotation axis, The rotational movement device is A rotational drive source; a rotation support unit that is rotated together with the stage in the rotation direction by a driving force output from the rotation direction driving source; a rotation relay unit that transmits a driving force output from the rotational direction drive source to the rotation support unit, and that allows movement of the rotation support unit in the X and Y directions relative to the rotational direction drive source, Stage unit.

2. The rotary relay unit is a first coupling attached to the rotation support portion; a second coupling attached to the rotational drive source; a coupling connecting portion that is connected to the first coupling and the second coupling and changes its posture depending on the relative positions between the first coupling and the second coupling in the XY directions, The stage unit according to claim 1 .

3. The rotary relay unit is a first coupling attached to the rotation support portion; a second coupling attached to the rotational drive source, the first coupling and the second coupling are attached to each other so as to be slidable relative to each other in the X and Y directions; The stage unit according to claim 1 .

4. The XY movement device a first direction drive unit having a first direction drive source and a first direction movable part that is moved together with the stage in a first direction by a driving force output from the first direction drive source; a second direction drive unit having a second direction drive source and a second direction movable part that is moved together with the stage in the second direction by a driving force output from the second direction drive source; a first direction guide unit attached to the base and the stage and disposed between one of the base and the stage and the second direction movable unit, the first direction guide unit allowing movement of the stage relative to the base in the first direction; a second direction guide unit attached to the base and the stage and disposed between one of the base and the stage and the first direction movable unit, the second direction guide unit allowing movement of the stage relative to the base in the second direction; Including, The stage unit according to claim 1 .

5. the first direction and the second direction are perpendicular to each other; The stage unit according to claim 4 .

6. the first direction movable portion is attached to the stage via the second direction guide unit, the second direction movable unit is attached to the stage via the first direction guide unit; The stage unit according to claim 4 .

7. the first direction drive source, the second direction drive source, and the rotation direction drive source are fixedly supported by the base; The stage unit according to claim 4 .

8. a relief partition that partitions at least a part of at least one of the movement path of the first direction movable part and the movement path of the second direction movable part, The stage unit according to claim 4 .

9. A stage unit according to any one of claims 1 to 8; a mounting device that mounts the electronic component on the stage; an imaging device for acquiring image data of the electronic component before it is placed on the stage; a control unit that controls the stage movement mechanism based on the image data, the control unit adjusts the position and orientation of the stage by controlling the stage movement mechanism based on status information indicating the status of the electronic component obtained by analyzing the image data. Processing system.

10. the state information includes position information indicating a deviation of a position of the electronic component from a reference position, and orientation information indicating a deviation of an orientation of the electronic component from a reference orientation; The processing system of claim 9 .

11. an inspection device that inspects the electronic components placed on the stage; The processing system of claim 9 .

Images