A laser cutting device for manufacturing a housing of a semiconductor processing apparatus

Abstract

The application discloses a kind of laser cutting device for manufacturing semiconductor processing equipment shell, belong to laser cutting field.It includes support mechanism, the upper portion of support mechanism is provided with transmission mechanism;The left of the upper surface of transmission mechanism is provided with push mechanism;The right of the upper surface of transmission mechanism is provided with laser cutting mechanism and located push mechanism;Transmission mechanism includes two mounting plates;Device can be placed for making shell plate by being provided with two material bins, the moving plate can be supported by being provided with two L-shaped support plates, and by being provided with T-shaped groove and T-shaped strip, so that the moving plate can slide back and forth along the inside of recess, so that two material bins can be used alternately, so as to facilitate the addition of new plate to the inside of another material bin when one material bin is storing plate for discharging, so that the device does not need to stop transmission when changing material bin.

Description

Technical Field

[0001] The present invention relates to the field of laser cutting, and in particular to a laser cutting device for manufacturing a housing of semiconductor processing equipment. Background Art

[0002] With the development of the electronics industry, semiconductor chips, as an important component of modern electronic devices, have important application value. The housing of semiconductor processing equipment (such as etchers, thin film deposition equipment, photolithography equipment, etc.) is a core component to ensure process stability and must meet stringent requirements such as high precision, high cleanliness, corrosion resistance, and high temperature resistance. Traditional housing manufacturing mostly uses stainless steel, aluminum alloy, or special alloy materials. During the processing and manufacturing of semiconductor housing equipment, cutting is usually performed, and cutting equipment is often used for this purpose.

[0003] Patent: CN221773720U discloses an acrylic sheet processing and cutting device, which relates to the technical field of cutting devices and includes a feeding mechanism, the top of which is fixedly mounted with a fixing mechanism, the fixing mechanism including four brackets. In this utility model, multiple acrylic sheets are placed into a storage box under the action of the feeding mechanism, and then a first motor delivers the sheets at the bottom layer through a feeding rack. A second motor drives a rotating roller to deliver the acrylic sheets to the bottom of the cutting device. This device does not require manual loading, which reduces the workload of the staff and improves work efficiency. At the same time, automatic loading can ensure that each acrylic sheet is accurately placed under the cutter, avoiding position deviation that affects the cutting effect. Automatic loading can also reduce human error and reduce the frequency of accidents.

[0004] In the above technology, when in use, the second motor drives the loading rack to rotate, and the plate at the bottom layer of the storage box is pushed out by the rotation of the loading rack, so as to achieve the effect of pushing the plates one by one for cutting. However, the loading rack in the above technology cannot be adjusted, so it cannot be adjusted according to the thickness of the plates to push the plates of different thicknesses out. In addition, the above technology needs to be driven by a motor alone, and cannot be used in conjunction with the rotating roller feeding part. Two motors need to be controlled and used separately. In addition, the above technology can only be stored through a single storage box. When the plates inside a storage box are cut, the device needs to be stopped and re-fed. When a large number of plates are cut, work efficiency is affected and needs to be improved. Summary of the Invention

[0005] Purpose of the invention: The purpose of the present invention is to provide a method that can be adjusted according to the thickness of the plate; another purpose of the present invention is to provide a method that is convenient for fast loading without affecting the efficiency of cutting work.

[0006] Technical solution: A laser cutting device for manufacturing a semiconductor processing equipment housing includes a support mechanism, and a transmission mechanism is provided above the support mechanism;

[0007] The upper surface of the transmission mechanism is provided with a pushing mechanism on the left side;

[0008] The upper surface of the transmission mechanism is provided with a laser cutting mechanism on the right side of the pushing mechanism;

[0009] The transmission mechanism comprises two mounting plates, a plurality of transmission rollers are rotatably connected to the opposite right sides of the two mounting plates through rotating shafts, the front ends of the transmission rollers located in front of the upper surface of the supporting mechanism are fixedly connected with transmission wheels, and the outer side walls of the plurality of transmission wheels are commonly connected with a transmission belt;

[0010] The front surface of the transmission wheel located on the left side of the front surface of the mounting plate is fixedly connected with a dial plate, and the outer side wall of the dial plate is integrally formed with dial teeth;

[0011] The opposite right sides of the two mounting plates are commonly rotatable about a shaft through a rotating shaft, the front end of the shaft is fixedly connected with a gear one, and the outer side wall of the shaft is fixedly connected with a plurality of cams;

[0012] The pushing mechanism comprises a moving plate, the upper surface of the moving plate is fixedly connected with two material boxes, a plurality of through-type pushing holes are formed in the left side of the interior of the material box, an L-shaped push plate is arranged on the left side of the material box, and a pushing piece is rotatably connected to the right side of the L-shaped push plate and located inside the pushing hole through a rotating shaft.

[0013] Furthermore, a double-headed rack is arranged below the dial teeth, the upper surface of the double-headed rack is meshingly connected with the outer side wall of the dial teeth and the outer side wall of the gear one respectively, the outer side wall of the cam is in abutment with the outer side wall of the L-shaped push plate, a through-type discharge opening is formed in the right side of the material box, a plurality of springs two are fixedly connected between the L-shaped push plate and the material box, the supporting mechanism comprises a bottom plate, a plurality of supporting legs are arranged on the upper surface of the bottom plate, and the top of the supporting leg is fixedly connected with the lower surface of the mounting plate.

[0014] Furthermore, an L-shaped support is fixedly connected to the right side of the front surface of the mounting plate located in front of the upper surface of the supporting mechanism, a motor one is fixedly connected to the inner side of the L-shaped support, and the output shaft rear end of the motor one is fixedly connected with the front end of the transmission wheel located on the right side of the front surface of the mounting plate.

[0015] Furthermore, a notch is formed in the left side of the upper surface of the mounting plate, two through-type T-shaped grooves are formed in the inner side of the notch, the moving plate is located in the inner side of the notch, and a T-shaped strip is fixedly connected to the inner side of the T-shaped groove and located at the bottom of the moving plate.

[0016] Furthermore, two fixed plates are fixedly connected to the front surface of the mounting plate located in front of the upper surface of the support mechanism and to the left of the toggle plate, a cross bar is fixedly connected between the two fixed plates, a slider is slidably connected to the outer wall of the cross bar, a spring 1 is sleeved on the outer wall of the cross bar, two ends of the spring 1 are respectively fixedly connected to the opposite sides of the slider and the fixed plate, and the bottom of the slider is fixedly connected to the upper surface of the double-headed rack.

[0017] Furthermore, the right end of the central axis of the push piece is located on the left side of the L-shaped push plate and is fixedly connected to gear 2. A gear rod is provided on the left side of the two L-shaped push plates. The two gear rods are respectively meshed with multiple gears 2. The opposite ends of the two gear rods respectively pass through the opposite sides of the two L-shaped push plates and are fixedly connected with a connecting sleeve. The opposite sides of the two material boxes are rotatably connected with an adjusting screw through a rotating shaft. The outer wall of the adjusting screw is threaded with an adjusting rod. The left end of the adjusting rod passes through the connecting sleeve and is slidably connected to the connecting sleeve.

[0018] Furthermore, a lifting groove is integrally formed on the inner upper surface of the discharge port, and a baffle is slidably connected to the inside of the lifting groove. A plurality of springs are fixedly connected between the baffle and the lifting groove. A rotating head is fixedly connected to the upper surface of the baffle, and the outer side wall of the rotating head is rotatably connected to a traction rod via a rotating shaft. The top of the traction rod is rotatably connected to a connecting rod via a rotating shaft. The opposite sides of the two connecting rods respectively penetrate to the opposite sides of the two material boxes and are fixedly connected to the opposite sides of the two adjusting rods respectively, and the connecting rod is slidably connected to the material box.

[0019] Furthermore, the front surface and the rear surface of the movable plate are both fixedly connected to an L-shaped support plate, and the bottom of the L-shaped support plate is fixedly connected to two movable wheels.

[0020] Furthermore, the laser cutting mechanism includes a cutting frame, the front surface of the cutting frame is fixedly connected to the second motor, the front end of the output shaft of the second motor is located on the inner side of the cutting frame and is fixedly connected to a reciprocating screw, the outer side wall of the reciprocating screw is threadedly mounted with a cutter body, the top of the cutter body is in contact with the inner upper surface of the cutting frame, and the bottom of the cutting frame is fixedly connected to the tops of the two mounting plates;

[0021] Furthermore, a plurality of positioning holes are provided on the opposite sides of the two material boxes and the opposite sides of the two adjusting rods, the end of the adjusting screw away from the material box is fixedly connected to a hand-held disk, a positioning column is provided on the side of the hand-held disk away from the material box, the positioning column passes through the hand-held disk at one end close to the material box and is slidably connected to the hand-held disk, a spring four is fixedly connected between the positioning column and the hand-held disk, the plurality of positioning holes on the same side are located on the outside of the adjusting screw and are distributed in a circle, and the positioning column is adapted to the positioning hole.

[0022] Beneficial effect: The device can place plates for making the shell through the two material boxes provided, and the movable plate can be supported by the two L-shaped support plates. The movable plate can slide back and forth along the inner side of the notch through the T-shaped grooves and T-shaped bars provided, so that the two material boxes can be used alternately, so that when one material box is storing plates for unloading, new plates can be added to the inside of the other material box, so that when the material box is replaced, there is no need to stop the device transmission;

[0023] By rotating the hand-held adjusting screw, the adjusting rod is controlled to move closer to or away from the material box, which can push the gear rod to move. The gear rod drives multiple gears to rotate, and the push piece is adjusted to rotate along the inside of the push hole to change the degree of inclination. This makes it easy to adjust different inclinations according to the thickness of the plate, making it easier to push plates of different thicknesses.

[0024] When the push piece pushes plates of different thicknesses, the opening of the discharge port can be adjusted to accommodate plates of different thicknesses, preventing the push piece from pushing the bottom plate of the material box, causing the bottom plate to move along with the upper plate due to friction and come out of the discharge port, thereby affecting the plate transmission and feeding;

[0025] When pushing plates of different thicknesses, the rotation of the push piece is controlled and the degree of inclination is changed to adapt to plates of different thicknesses. As the plate becomes thinner, the contact range between the push piece with increasing inclination and the thin plate becomes larger, thereby increasing the contact range. By controlling the inclination of the push piece, it is convenient to push plates of different thicknesses. At the same time, as the plate becomes thinner, the contact area can be increased. This method can avoid the deformation or breakage of thinner plates due to local uneven force during movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a front view structural schematic diagram of the present invention;

[0027] Figure 2 It is a side structural schematic diagram of the present invention;

[0028] Figure 3 It is a structural schematic diagram of the transmission mechanism of the present invention;

[0029] Figure 4 It is a structural schematic diagram of the material pushing mechanism of the present invention;

[0030] Figure 5 It is a schematic cross-sectional structural diagram of the push box of the present invention;

[0031] Figure 6 Schematic diagram of the side view of the connection structure of the L-shaped push plate, the push piece, the gear 1 and the gear rod of the present invention;

[0032] Figure 7 It is a structural schematic diagram of the movable plate of the present invention;

[0033] Figure 8 1 is a side structural schematic diagram of the laser cutting mechanism of the present invention;

[0034] Figure 9 The present invention Figure 3 A schematic diagram of the enlarged structure at point A;

[0035] Figure 10 This is a schematic diagram of the structure of the state in which the pusher sheet contacts material plates of different thicknesses in the present invention;

[0036] Figure 11 It is a schematic diagram of the connection structure of the push piece, the adjustment rod, the adjustment bolt and the baffle of the present invention;

[0037] Figure 12 The present invention Figure 4 Schematic diagram of the enlarged structure at point B.

[0038] In the figure: 1. Support mechanism; 2. Transmission mechanism; 3. Pushing mechanism; 4. Laser cutting mechanism; 101. Bottom plate; 102. Support leg; 201. Mounting plate; 202. Transmission roller; 203. Transmission wheel; 204. Transmission belt; 205. L-shaped bracket; 206. Motor 1; 207. Toggle plate; 208. Toggle gear; 209. Fixed plate; 210. Crossbar; 211. Slider; 212. Spring 1; 213. Double-headed rack; 214. Shaft; 215. Gear 1; 216. Cam; 217. Notch; 218. T-slot; 301. Moving plate; 302. Material box; 303. Pushing hole; 304, L-shaped push plate; 305, push piece; 306, discharge port; 307, spring two; 308, gear two; 309, gear rod; 310, connecting sleeve; 311, adjusting screw; 312, adjusting rod; 313, lifting slot; 314, baffle; 315, spring three; 316, rotating head; 317, traction rod; 318, connecting rod; 319, L-shaped support plate; 320, moving wheel; 321, T-shaped bar; 322, positioning hole; 323, positioning column; 324, spring four; 325, handheld disk; 401, cutting frame; 402, motor two; 403, reciprocating screw; 404, cutter body. DETAILED DESCRIPTION

[0039] In order to make the technical scheme of the present application clearer, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0040] EMBODIMENT

[0041] As shown in Figure 1 , Figure 2 and Figure 9 , a laser cutting device for manufacturing a semiconductor processing equipment shell is provided, comprising a supporting mechanism 1;

[0042] The supporting mechanism 1 comprises a bottom plate 101, and a plurality of supporting legs 102 are arranged on the upper surface of the bottom plate 101;

[0043] The device as a whole is supported to ensure stable placement of the device as a whole.

[0044] As shown in Figure 2 and Figure 3 , a transmission mechanism 2 is arranged above the supporting mechanism 1;

[0045] The transmission mechanism 2 comprises two mounting plates 201, a plurality of transmission rollers 202 are rotatably connected to the opposite right sides of the two mounting plates 201 through shafts, a transmission wheel 203 is fixedly connected to the front end of the transmission roller 202 located in the front of the upper surface of the supporting mechanism 1, and a transmission belt 204 is commonly connected to the outer side walls of the plurality of transmission wheels 203;

[0046] The top of the supporting leg 102 is fixedly connected to the lower surface of the mounting plate 201;

[0047] The front surface of the transmission wheel 203 located in the left side of the front surface of the mounting plate 201 is fixedly connected with a dial 207, and the outer side wall of the dial 207 is integrally formed with a dial gear 208;

[0048] A double-headed rack 213 is arranged below the dial gear 208;

[0049] An axle 214 is commonly rotatable to the opposite right sides of the two mounting plates 201 through shafts, a gear one 215 is fixedly connected to the front end of the axle 214, and a plurality of cams 216 are fixedly connected to the outer side wall of the axle 214;

[0050] The upper surfaces of the two sides of the double-headed rack 213 are respectively meshingly connected with the outer side walls of the dial gear 208 and the gear one 215;

[0051] The front surface right side of the mounting plate 201 located in the front of the upper surface of the supporting mechanism 1 is fixedly connected with an L-shaped bracket 205, the inner side of the L-shaped bracket 205 is fixedly connected with a motor one 206, and the rear end of the output shaft of the motor one 206 is fixedly connected with the front end of the transmission wheel 203 located in the right side of the front surface of the mounting plate 201.

[0052] The upper surface of the mounting plate 201 is provided with a notch 217 on the left side, and two through T-shaped grooves 218 are formed on the inner side of the notch 217;

[0053] The front surface of the mounting plate 201 located on the upper surface of the supporting mechanism 1 in front of the dial plate 207 is fixedly connected with two fixed plates 209 on the left side, and the two fixed plates 209 are commonly fixedly connected with a horizontal rod 210, the outer side wall of the horizontal rod 210 is slidably connected with a sliding block 211, the outer side wall of the horizontal rod 210 is sleeved with a spring 212, the two ends of the spring 212 are respectively fixedly connected with the sliding block 211 and the opposite side of the fixed plate 209, and the bottom of the sliding block 211 is fixedly connected with the upper surface of a double-headed rack 213;

[0054] The outer side wall of the transmission wheel 203 and the inner side wall of the transmission belt 204 are provided with stripes for cooperation transmission;

[0055] When the device is used, the multiple transmission rollers 202 located on the upper surface of the supporting mechanism 1 in front of the multiple transmission wheels 203 and the transmission belt 204 can be driven to rotate under the cooperation transmission of the multiple transmission wheels 203 and the transmission belt 204, so that the plate-shaped shell material can be driven to move from left to right by the transmission roller 202 when passing through the multiple transmission rollers 202, thereby achieving the feeding effect;

[0056] The dial gear 208 is fixed on the outer side wall of the dial plate 207, is a small section of arc-shaped rack, and during the transmission process driven by the motor 206, the dial gear 208 provided on the dial plate 207 will intermittently mesh with the right end of the double-headed rack 213, thereby pushing the double-headed rack 213 to slide to the left, and during the sliding, the sliding block 211 will slide along the horizontal rod 210, at this time, the spring 212 is compressed, and when the double-headed rack 213 moves to the left, the left end meshes with the gear 215, thereby driving the shaft rod 214 to rotate clockwise, so that the multiple cams 216 are driven to move together;

[0057] When the motor 206 drives the transmission wheel 203 to rotate, after the dial gear 208 is disengaged from the double-headed rack 213, the spring 212 loses the compression and resets, thereby pulling the sliding block 211 to move to the right and reset, and driving the double-headed rack 213 to move to the right and reset, at this time, the gear 215 is meshed, thereby driving the shaft rod 214 to rotate counterclockwise, and driving the cam 216 to move together and reset;

[0058] The surface of the transmission roller 202 is provided with anti-skid lines for increasing friction, thereby facilitating the transmission of the plate body, and avoiding the problem that the plate body is not easy to be transmitted along the transmission roller 202 after being pushed out;

[0059] As Figure 3 、 Figure 4 、 Figure 5 , Figure 6 and Figure 7 As shown, a pushing mechanism 3 is provided on the left side of the upper surface of the transmission mechanism 2;

[0060] The pushing mechanism 3 includes a movable plate 301, the upper surface of which is fixedly connected to two material boxes 302, a plurality of through-type pushing holes 303 are opened on the left side of the interior of the material box 302, an L-shaped pushing plate 304 is provided on the left side of the material box 302, and the right side of the L-shaped pushing plate 304 is located inside the pushing hole 303 and is rotatably connected to a pushing piece 305 via a rotating shaft;

[0061] The outer side wall of the cam 216 fits in contact with the outer side wall of the L-shaped push plate 304;

[0062] A through-type discharge port 306 is provided on the right side of the material box 302;

[0063] A plurality of springs 307 are fixedly connected between the L-shaped push plate 304 and the material box 302;

[0064] The movable plate 301 is located inside the notch 217 , and the bottom of the movable plate 301 is located inside the T-slot 218 and is fixedly connected to a T-bar 321 ;

[0065] The right end of the central axis of the push piece 305 is located on the left side of the L-shaped push plate 304 and is fixedly connected to the gear 2 308. A gear rod 309 is provided on the left side of the two L-shaped push plates 304. The two gear rods 309 are respectively engaged with multiple gears 2 308. The opposite ends of the two gear rods 309 respectively pass through the opposite sides of the two L-shaped push plates 304 and are fixedly connected with a connecting sleeve 310. The opposite sides of the two material boxes 302 are rotatably connected with an adjusting screw 311 through a rotating shaft. The outer wall of the adjusting screw 311 is threaded with an adjusting rod 312. The left end of the adjusting rod 312 passes through the connecting sleeve 310 and is slidably connected to the connecting sleeve 310.

[0066] A lifting groove 313 is integrally formed on the inner upper surface of the discharge port 306, and a baffle 314 is slidably connected to the inside of the lifting groove 313. A plurality of springs 315 are fixedly connected between the baffle 314 and the lifting groove 313. A rotating head 316 is fixedly connected to the upper surface of the baffle 314. The outer side wall of the rotating head 316 is rotatably connected to a traction rod 317 through a rotating shaft. The top of the traction rod 317 is rotatably connected to a connecting rod 318 through a rotating shaft. The opposite sides of the two connecting rods 318 respectively extend to the opposite sides of the two material boxes 302, and are fixedly connected to the opposite sides of the two adjusting rods 312 respectively. The connecting rod 318 is slidably connected to the material box 302.

[0067] The front and rear surfaces of the movable plate 301 are fixedly connected to an L-shaped support plate 319 , and the bottom of the L-shaped support plate 319 is fixedly connected to two movable wheels 320 ;

[0068] The device is provided with two material boxes 302, each of which can be used to place plates for making the shell. The two L-shaped support plates 319 are provided to support the movable plate 301. The T-shaped grooves 218 and T-shaped bars 321 are provided to allow the movable plate 301 to slide back and forth along the inner side of the recess 217, so that the two material boxes 302 can be used alternately, so that when one material box 302 is storing plates for discharge, new plates can be added to the inside of the other material box 302.

[0069] When the movable plate 301 is controlled to move along the notch 217, when the material box 302 is replaced, the cam 216 can be pushed when the shaft 214 rotates counterclockwise to return to its original position, so that the device does not need to be stopped when the material box 302 is replaced;

[0070] By rotating the hand-held adjusting screw 311 and controlling the adjusting rod 312 to move closer to or away from the material box 302, the gear rod 309 can be pushed to move, and the gear rod 309 can be used to rotate the multiple gears 2 308 to adjust the push piece 305 to rotate along the inner side of the push hole 303, thereby changing the degree of inclination. This makes it easy to adjust different inclinations according to the thickness of the plate body, so as to facilitate the pushing of plates of different thicknesses. The pushed plate body will extend out of the discharge port 306 and contact the transmission roller 202, thereby transmitting the plate body.

[0071] At the same time, when the adjusting rod 312 moves, it will drive the connecting rod 318 to move forward or backward, thereby pulling the traction rod 317 to move. Through the traction rod 317 and the rotating head 316, the baffle 314 can be pulled up or down along the lifting groove 313, so that plates of different thicknesses can be intercepted and blocked, so that when the pushing piece 305 pushes plates of different thicknesses, the opening of the discharge port 306 can be adjusted to adapt to plates of different thicknesses, so as to avoid that when the pushing piece 305 pushes the lowermost plate of the material box 302, the lowermost plate is easily driven by friction to move together with the upper plate and disengage from the inside of the discharge port 306, thereby affecting the plate transmission and feeding;

[0072] Moreover, in the above mechanism, when pushing plates of different thicknesses, the push piece 305 is controlled to rotate and the degree of inclination is changed to adapt to plates of different thicknesses. As the plate becomes thinner, the push piece 305, whose inclination gradually increases, has a larger contact range with the thin plate. By increasing the contact range, it is convenient to push plates of different thicknesses by controlling the inclination of the push piece 305. At the same time, as the plate becomes thinner, the contact area can be increased. This method can avoid deformation or breakage of thinner plates due to local uneven force during movement.

[0073] like Figure 10As shown, the thickness of the plate gradually becomes thinner from left to right, and the push piece contacts the plates of different thicknesses at different degrees as it is adjusted. As the thickness of the plate becomes thinner, the contact area gradually increases after the push piece adjusts its inclination.

[0074] like Figure 11 As shown, by rotating the adjusting screw 311, the adjusting rod 312 can be controlled to move backward. At this time, the pushing plate 315 will rotate to change the inclination angle, and the connecting rod 318 will push backward, and then the inclination of the traction rod 317 will change, driving the baffle 314 to descend, so that the thickness of the pushed plate can gradually become thinner, and the angle of the pushing plate 315 can be controlled to gradually tilt toward the horizontal, which is convenient for adapting to pushing plates of different thicknesses. At the same time, the baffle 314 descends and adjusts the size of the discharge port 306 to block the upper plate of the pushed plate, so as to adapt to the push of plates of different thicknesses from the discharge port 306 and prevent the upper plate of the pushed plate from being brought out due to friction between the pushed plate and the pushed plate.

[0075] like Figure 8 As shown, a laser cutting mechanism 4 is provided on the upper surface of the transmission mechanism 2 to the right of the pushing mechanism 3;

[0076] The laser cutting mechanism 4 includes a cutting frame 401. The front surface of the cutting frame 401 is fixedly connected to the second motor 402. The front end of the output shaft of the second motor 402 is located inside the cutting frame 401 and is fixedly connected to a reciprocating screw rod 403. The outer wall of the reciprocating screw rod 403 is threadedly mounted with a cutter body 404. The top of the cutter body 404 is in contact with the inner upper surface of the cutting frame 401. The bottom of the cutting frame 401 is fixedly connected to the tops of the two mounting plates 201.

[0077] By starting the cutter body 404, the plate driven on the transmission roller 202 can be laser cut, and the reciprocating screw rod 403 can be driven to rotate by starting the motor 2 402. Since the top of the cutter body 404 abuts against the cutting frame 401 and is limited, it will not rotate with the reciprocating screw rod 403, so that it can move forward or backward along the outer wall of the reciprocating screw rod 403, so that the cutting position can be adjusted, which is convenient for adjustment according to different cutting requirements.

[0078] like Figure 12As shown, a plurality of positioning holes 322 are provided on the opposite sides of the two material boxes 302 and the opposite sides of the two adjustment rods 312. The end of the adjusting screw 311 away from the material box 302 is fixedly connected to a handheld disk 325. A positioning post 323 is provided on the side of the handheld disk 325 away from the material box 302. The end of the positioning post 323 close to the material box 302 passes through the handheld disk 325 and is slidably connected to the handheld disk 325. A spring 324 is fixedly connected between the positioning post 323 and the handheld disk 325. The multiple positioning holes 322 on the same side are located on the outside of the adjusting screw 311 and are distributed in a circular pattern. The positioning post 323 is adapted to the positioning holes 322.

[0079] The device can position the adjusted screw 311 after rotation by inserting the positioning post 323 into the positioning hole 322 at different positions, and limit the rotation of the adjusted screw 311. The spring four 324 is a tension spring. When it is released, it will pull the positioning post 323 to be inserted into the positioning hole 322. When it is necessary to rotate the adjusting screw 311 through the handheld disk 325, it is only necessary to pull the positioning post 323 forward so that the positioning post 323 is disengaged from the positioning hole 323. At this time, the spring four 324 is pulled and stretched. After releasing the positioning post 323, the positioning post 323 can be re-inserted into the corresponding positioning hole 322 for positioning under the pull of the spring four 324.

[0080] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A laser cutting device for manufacturing a housing of a semiconductor processing equipment, comprising a support mechanism (1), characterized in that: A transmission mechanism (2) is provided above the support mechanism (1); A material pushing mechanism (3) is provided on the left side of the upper surface of the transmission mechanism (2); A laser cutting mechanism (4) is provided on the upper surface of the transmission mechanism (2) and located to the right of the pushing mechanism (3); The transmission mechanism (2) comprises two mounting plates (201), and the right sides of the two mounting plates (201) are both rotatably connected to a plurality of transmission rollers (202) via a rotating shaft, and the front end of the transmission roller (202) located in front of the upper surface of the support mechanism (1) is fixedly connected to a transmission wheel (203), and the outer side walls of the plurality of transmission wheels (203) are commonly connected to a transmission belt (204); the front surface of the transmission wheel (203) located on the left side of the front surface of the mounting plate (201) is fixedly connected to a toggle plate (207), and the outer side wall of the toggle plate (207) is integrally formed with a toggle tooth (208); A shaft (214) is provided on the right side of the two mounting plates (201) on opposite sides thereof and is rotated together via a rotating shaft. A front end of the shaft (214) is fixedly connected to a gear 1 (215). An outer side wall of the shaft (214) is fixedly connected to a plurality of cams (216). The pushing mechanism (3) includes a movable plate (301), the upper surface of the movable plate (301) is fixedly connected to two material boxes (302), a plurality of through-type pushing holes (303) are opened on the left side of the interior of the material box (302), an L-shaped pushing plate (304) is provided on the left side of the material box (302), and the right side of the L-shaped pushing plate (304) is located inside the pushing hole (303) and is rotatably connected to a pushing piece (305) via a rotating shaft; The right end of the central axis of the push piece (305) is located on the left side of the L-shaped push plate (304) and is fixedly connected to the gear 2 (308). A gear rod (309) is provided on the left side of the two L-shaped push plates (304). The two gear rods (309) are respectively engaged with the plurality of gears 2 (308). The opposite ends of the two gear rods (309) respectively pass through the opposite sides of the two L-shaped push plates (304) and are fixedly connected to the connecting sleeve (310). The opposite sides of the two material boxes (302) are rotatably connected to the adjusting screw (311) through the rotating shaft. The outer wall of the adjusting screw (311) is threadedly provided with an adjusting rod (312). The left end of the adjusting rod (312) passes through the connecting sleeve (310) and is slidably connected to the connecting sleeve (310). A through-type discharge port (306) is provided on the right side of the material box (302); The upper inner surface of the discharge port (306) is integrally formed with a lifting groove (313), the lifting groove (313) is slidably connected to a baffle (314), a plurality of springs (315) are fixedly connected between the baffle (314) and the lifting groove (313), the upper surface of the baffle (314) is fixedly connected to a rotating head (316), the outer wall of the rotating head (316) is rotatably connected to a traction rod (317) via a rotating shaft, the top end of the traction rod (317) is rotatably connected to a connecting rod (318) via a rotating shaft, the opposite sides of the two connecting rods (318) respectively penetrate the opposite sides of the two material boxes (302), and are fixedly connected to the opposite sides of the two adjusting rods (312), and the connecting rod (318) is slidably connected to the material box (302); A plurality of positioning holes (322) are provided on opposite sides of the two material boxes (302) and on opposite sides of the two adjusting rods (312). The end of the adjusting screw (311) away from the material box (302) is fixedly connected to a handheld disk (325). A positioning column (323) is provided on the side of the handheld disk (325) away from the material box (302). The end of the positioning column (323) close to the material box (302) passes through the handheld disk (325) and is slidably connected to the handheld disk (325). A spring (324) is fixedly connected between the positioning column (323) and the handheld disk (325). The plurality of positioning holes (322) on the same side are located outside the adjusting screw (311) and are distributed in a circumferential manner. The positioning column (323) is adapted to the positioning holes (322).

2. The laser cutting device for manufacturing a semiconductor processing equipment housing according to claim 1, characterized in that: A double-headed rack (213) is provided below the shifting tooth (208), and the two sides of the upper surface of the double-headed rack (213) are respectively engaged with the outer wall of the shifting tooth (208) and the outer wall of the gear one (215), and the outer wall of the cam (216) is in contact with the outer wall of the L-shaped push plate (304), and a plurality of springs (307) are fixedly connected between the L-shaped push plate (304) and the material box (302); the support mechanism (1) includes a bottom plate (101), and a plurality of support legs (102) are provided on the upper surface of the bottom plate (101), and the top of the support leg (102) is fixedly connected to the lower surface of the mounting plate (201).

3. The laser cutting device for manufacturing a semiconductor processing equipment housing according to claim 1, characterized in that: An L-shaped bracket (205) is fixedly connected to the right side of the front surface of the mounting plate (201) located in front of the upper surface of the support mechanism (1), and a motor 1 (206) is fixedly connected to the inner side of the L-shaped bracket (205). The rear end of the output shaft of the motor 1 (206) is fixedly connected to the front end of the transmission wheel (203) located on the right side of the front surface of the mounting plate (201).

4. The laser cutting device for manufacturing a semiconductor processing equipment housing according to claim 1, characterized in that: A notch (217) is provided on the left side of the upper surface of the mounting plate (201), and two through-type T-shaped slots (218) are provided on the inner side of the notch (217). The movable plate (301) is located on the inner side of the notch (217), and the bottom of the movable plate (301) is located on the inner side of the T-shaped slot (218) and is fixedly connected to a T-shaped bar (321).

5. The laser cutting device for manufacturing a semiconductor processing equipment housing according to claim 1, characterized in that: Two fixed plates (209) are fixedly connected to the front surface of the mounting plate (201) located in front of the upper surface of the support mechanism (1) and to the left of the dial (207), and a cross bar (210) is fixedly connected between the two fixed plates (209). The outer wall of the cross bar (210) is slidably connected to a slider (211), and the outer wall of the cross bar (210) is provided with a spring (212). The two ends of the spring (212) are fixedly connected to the slider (211) and the opposite sides of the fixed plate (209), respectively, and the bottom of the slider (211) is fixedly connected to the upper surface of the double-headed rack (213).

6. The laser cutting device for manufacturing a semiconductor processing equipment housing according to claim 1, characterized in that: The front surface and the rear surface of the movable plate (301) are both fixedly connected to an L-shaped support plate (319), and the bottom of the L-shaped support plate (319) is fixedly connected to two movable wheels (320).

7. The laser cutting device for manufacturing a semiconductor processing equipment housing according to claim 1, characterized in that: The laser cutting mechanism (4) comprises a cutting frame (401), the front surface of the cutting frame (401) is fixedly connected to a second motor (402), the front end of the output shaft of the second motor (402) is located on the inner side of the cutting frame (401) and is fixedly connected to a reciprocating screw rod (403), the outer wall of the reciprocating screw rod (403) is threadedly mounted with a cutter body (404), the top of the cutter body (404) is in contact with the inner upper surface of the cutting frame (401), and the bottom of the cutting frame (401) is fixedly connected to the tops of the two mounting plates (201).

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