A quartz boat flipping robot

Abstract

The present invention discloses a quartz boat flipping robot, comprising: a conveyor and a U-shaped frame, a connecting box fixedly mounted on the upper surface of the U-shaped frame, an H-shaped plate fixedly mounted on the upper surface of the connecting box, connecting tubes slidably mounted on both ends of the outer surface of the H-shaped plate, a connecting pipe connected to the upper surface of the connecting tube, a lifting mechanism provided in the connecting pipe and the H-shaped plate, and a flipping mechanism threadedly mounted on the outer surface of the lifting mechanism in the connecting pipe. The present application adopts the design of the flipping mechanism, so that in the process of clamping the quartz boat, it can adaptively extend and clamp the quartz boat according to the shape of the outer surface of the quartz boat, so that it can achieve a tight fitting clamping operation, and can also automatically detect the clamping force during the clamping process, so as to prevent the quartz boat from being crushed by excessive pressure, and ensure that the surface of the quartz boat is intact during the entire clamping process, thereby improving the product yield and reducing production costs.

Description

Technical Field

[0001] The invention relates to the technical field of mechanical clamps, in particular to a quartz boat turning robot. Background Art

[0002] In high-tech fields like semiconductor manufacturing and the photovoltaic industry, quartz boats serve as core equipment for carrying critical materials like silicon wafers. Their precise operation between process steps directly impacts product quality and production efficiency. Traditional manual operations are not only inefficient but also carry the risk of damaging the boat or the silicon wafers due to improper handling. Against this backdrop, the quartz boat flipping robot emerged as a crucial piece of equipment for automating production and improving process precision.

[0003] For example, the Chinese patent with announcement number CN220408753U discloses a flipping robot, including a workbench, a robotic arm, two clamping jaws and two expansion mechanisms, the expansion mechanism including a drive assembly, a gear, two tooth blocks, a connecting plate and two expansion plates, the workbench provides installation conditions for the robotic arm, and the robotic arm can drive the two clamping jaws to flip and clamp, when it is necessary to expand the clamping area of ​​the two clamping jaws, start the drive assembly, the drive assembly drives the gear to rotate, the gear drives the two tooth blocks away from each other, the two tooth blocks respectively drive the two connecting plates away from each other, and the two connecting plates drive the two expansion plates to move to the side away from the clamping jaws, until the two expansion plates move to the preset position, the clamping area of ​​the two clamping jaws can be adjusted, thereby solving the problem that the existing robotic claws cannot adjust the clamping area of ​​the clamping plate when clamping objects of different sizes.

[0004] However, the above-mentioned flipping robot is unable to adaptively clamp and automatically adjust the clamping force according to the shape of the object during the process of clamping and flipping the object, which will lead to uneven force when it is used for special-shaped parts with complex surface curvature and irregular contour, and even slip and fall off due to the small contact surface. The uncontrollable clamping force will lead to a fixed clamping force being applied to the surface of the workpiece. If the local structure of the workpiece is weak, such as thin-walled parts or hollow parts, it is easy to cause deformation, indentation or even damage due to excessive pressure, which will affect the assembly accuracy of the subsequent workpiece process. It is especially unsuitable for flipping quartz boat equipment. Summary of the Invention

[0005] The purpose of the present invention is to provide a quartz boat flipping robot to solve the problem raised in the above background technology that in the process of clamping and flipping objects, the clamping force cannot be adaptively adjusted according to the shape of the object.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] The cam is fixedly mounted on the upper surface of the H-shaped frame, and an H-shaped plate is fixedly mounted on the upper surface of the H-shaped frame. The connecting box and the H-shaped plate are both extended from the conveyor. The outer surface of the H-shaped plate is slidably mounted with connecting cylinders at both end areas along the length direction, that is, each group of the connecting cylinders can slide linearly along the transverse guide rails on the outer surface of the H-shaped plate. The upper surface of the connecting cylinder is connected and mounted with a connecting tube. The connecting tube and the H-shaped plate are both rotatably mounted with a lifting mechanism, and the outer surface of the lifting mechanism in the connecting tube is threadedly mounted with a turning mechanism. The turning mechanism slides through the connecting tube and is located at one end of the inner side of the connecting tube, so that the lifting mechanism can synchronously drive the two groups of turning mechanisms to perform lifting operations on the inner side of the connecting tube. The conveyor can transport the quartz boat, and then the turning mechanism driven to be lifted can be flush with the height of the quartz boat.

[0008] Preferably, transmission blocks are fixedly installed on the lower surfaces of the two groups of connecting cylinders, and the transmission blocks slide from the lower surface of the H-shaped plate into the connecting box and are threadedly installed on the outer surface of the transmission mechanism. The transmission mechanism is fixedly installed in the connecting box, so that the transmission mechanism can synchronously drive the two groups of transmission blocks to drive the connecting cylinders to slide synchronously outward or inward on the outer surface of the H-shaped plate, and the sliding connecting cylinders can drive the internal lifting mechanism and flipping mechanism to slide synchronously inward or outward, thereby driving the flipping mechanism to be clamped at both ends of the quartz boat by sliding synchronously toward the center.

[0009] Preferably, the transmission mechanism includes a first dual-axis motor, which is fixedly installed at the center of the connecting box. A rotating column is fixedly installed at one end of the output shaft at both ends of the first dual-axis motor, and threaded strips are fixedly installed on the outer surfaces of the two groups of the rotating columns, and the threaded strips installed on the outer surfaces of the two groups of the rotating columns are respectively in the shape of a positive spiral and a reverse spiral, and transmission blocks are threadedly installed on the outer surfaces of the two groups of the threaded strips, so that the two groups of the threaded strips can drive the two groups of transmission blocks to slide synchronously outward or inward through the first dual-axis motor.

[0010] Preferably, the other ends of the two groups of rotating columns are rotatably mounted in support plates respectively, and the support plates are fixedly mounted at both ends in the connection box, so that the support plates can provide supporting force for the rotating columns and threaded strips that are driven to rotate.

[0011] Preferably, the lifting mechanism includes a second dual-axis motor, the second dual-axis motor is fixedly installed at the center of the H-shaped plate, one end of the output shaft at both ends of the second dual-axis motor is fixedly installed with a T-shaped rotating rod, the outer surfaces of the two groups of the T-shaped rotating rods are slidably installed with a rotating tube, a T-shaped slide groove adapted to the T-shaped rotating rod is provided in the rotating tube, the T-shaped rotating rod is slidably inserted into the T-shaped slide groove, the side wall of the H-shaped plate is provided with a rectangular through groove, the inner wall of the connecting cylinder is fixed with a first bearing seat inserted into the rectangular through groove, the first bearing seat is fixed with a first bearing, the rotating tube is fixedly connected to the inner ring of the first bearing, and one end of the two groups of the rotating tubes are A first bevel gear is fixedly installed, the first bevel gear is meshed with the second bevel gear, the second bevel gear is fixedly installed on the lower surface of the threaded rod, the threaded rod is rotatably installed on the top of the connecting tube, and second bearing seats are fixed at both ends of the inside of the connecting tube, and a second bearing is fixed in the second bearing seat. The two ends of the threaded rod pass through the second bearing and are fixedly connected to the inner ring of the second bearing. A turning mechanism is threadedly installed on the outer surface of the threaded rod, so that the two groups of threaded rods can be driven by a group of second dual-axis motors to drive the two groups of turning mechanisms to perform lifting operations. The first bevel gear and the second bevel gear are rotatably located in the connecting tube.

[0012] Preferably, the rotating tube at one end of the first bevel gear rotates simultaneously in the L-shaped plate, and the other end of the L-shaped plate is rotatably mounted on the outer surface of the rotating rod of the second bevel gear, and the outer surface of the threaded rod at one end of the second bevel gear rotates simultaneously in the limiting ring, and the limiting ring is also fixedly mounted in the connecting tube.

[0013] Preferably, the flipping mechanism includes a connecting block, which is slidably installed in the connecting tube and is simultaneously threadedly installed on the outer surface of the threaded rod, one end of the connecting block slides out from the inner end of the connecting tube, and the end of the connecting block that slides out from the connecting tube is fixedly installed with a cone block, a first transmission disk is rotatably installed in the cone block, a connecting disk is fixedly installed at one end of the first transmission disk, multiple groups of piston cavities are provided at one end of the connecting disk, piston columns are slidably installed in the multiple groups of piston cavities, a pushing rod is fixedly installed at one end of the piston column, the pushing rod passes through the piston cavity and a rubber pad is fixedly installed at the other end.

[0014] Preferably, a pressure plate is installed in the connecting plate in a transversely sliding manner, one end of the pressure plate is in contact with and connected to an annular air pipe, the other end of the annular air pipe is fixedly installed in the connecting plate, and an air outlet pipe is provided at the other end of the annular air pipe, and each group of air outlet pipes is connected to each group of the piston chambers, the air inlet of the annular air pipe passes through the upper end of the outer surface of the connecting plate and is installed in communication with the air outlet of the air pump, the air pump is fixedly installed on the upper surface of the mounting plate, and the mounting plate is fixedly installed on the upper end of the outer surface of the cone block.

[0015] Preferably, the air pump can inject air into multiple groups of piston cavities through an annular air pipe to push multiple groups of piston rods to slide toward one end in the piston cavity. The other end of the annular air pipe can push the pressure plate against one end of the pressure sensor through air pressure. The pressure sensor is embedded and fixedly installed in the first transmission plate. The signal transmitting end of the pressure sensor is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the air pump and the electrical control end of the first dual-axis motor.

[0016] Preferably, the outer surface of the first transmission disc is covered with a transmission belt, the other end of the transmission belt slides out from the cone block and is covered on the outer surface of the second transmission disc, the second transmission disc is fixedly mounted on one end of the output shaft of the reduction motor, the reduction motor is fixedly mounted in the docking plate, the docking plate is fixedly mounted on one end of the outer surface of the cone block, and the electrical control end of the reduction motor is electrically connected to the control output end of the controller.

[0017] Preferably, the models of the pressure sensor and controller are GML669 and S7-1200 respectively.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. Accurate positioning and efficient compatibility

[0020] By linking the lifting mechanism with the transmission mechanism, the flip mechanism is driven to achieve cross-directional sliding, which can quickly match the height and horizontal position of quartz boats of different batches and sizes without manual adjustment, thereby improving production line efficiency.

[0021] The step-by-step operation of "height positioning first, then horizontal positioning" combined with the high-precision control of bevel gear pairs and threaded transmission avoids collision damage caused by positioning deviation and greatly enhances the equipment's compatibility with quartz boats of different specifications.

[0022] 2. Adaptive clamping and low-loss flipping

[0023] The flip mechanism has built-in air-pressure-driven piston rods and rubber pads, which can adaptively extend and touch the surface of the quartz boat according to irregular structures such as bosses and grooves, maximizing the contact area and avoiding the slippage or local stress concentration problems of traditional rigid clamps.

[0024] The pressure sensor is linked to the controller to monitor the clamping force in real time and automatically adjust it to ensure that thin, fragile quartz boats (such as those used for semiconductor wafers) are stable and shake-free during flipping, significantly reducing the risk of breakage and improving product integrity.

[0025] 3. Full automation and seamless connection

[0026] The entire process from conveying, positioning, clamping, flipping to resetting is automated without manual intervention, reducing production line bottlenecks and improving production continuity.

[0027] After the flipping is completed, the mechanism automatically resets and releases the quartz boat, cooperating with the conveyor to achieve seamless process connection, shorten the cycle time and improve the overall production capacity.

[0028] 4. Structural reliability and stability control

[0029] Structural designs such as limit rings and bearings constrain the radial runout of transmission components, ensure the transmission accuracy of bevel gear pairs, threaded strips, etc., and avoid position deviations caused by mechanical hard contact.

[0030] The reduction motor accurately controls the flip angle (e.g. 180°), and combined with the pressure threshold and air pressure stability monitoring (fluctuation <0.05MPa, lasting 2 seconds), ensures the stability and repeatability of the operation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic diagram of the overall structure of the quartz boat flipping robot of the present invention;

[0032] Figure 2 It is a structural schematic diagram of the conveyor, connection box and H-shaped plate of the present invention;

[0033] Figure 3 It is a schematic cross-sectional structural diagram of the overall side of the present invention;

[0034] Figure 4 It is a structural schematic diagram of the transmission mechanism and the lifting mechanism of the present invention;

[0035] Figure 5 This is a schematic structural diagram of the annular air pipe and the air pump connected to each other in the present invention;

[0036] Figure 6 This is a schematic diagram of the structure of the annular air pipe of the present invention fixedly installed in the piston cavity;

[0037] Figure 7 Schematic diagram of the structure of the annular air pipe and the pressure plate of the present invention;

[0038] Figure 8 It is a structural schematic diagram of the turning mechanism of the present invention.

[0039] In the figure: 1. Conveyor; 101. U-shaped frame; 102. Connecting pipe; 103. Connecting box; 104. H-shaped plate; 105. Connecting cylinder; 106. Support plate; 107. L-shaped plate; 108. Limiting ring; 109. Transmission block; 2. Turning mechanism; 201. Connecting block; 202. First transmission plate; 203. Connecting plate; 204. Annular air pipe; 205. Mounting plate; 206. Air pump; 207. Pressure sensor; 208. Pressure plate; 209. Piston Cavity; 210, docking plate; 211, reduction motor; 212, second transmission plate; 213, transmission belt; 214, piston column; 215, pressure rod; 216, rubber pad; 217, cone block; 3, transmission mechanism; 301, first dual-axis motor; 302, rotating column; 303, threaded strip; 4, lifting mechanism; 401, second dual-axis motor; 402, T-shaped rotating rod; 403, rotating tube; 404, first bevel gear; 405, second bevel gear; 406, threaded rod. DETAILED DESCRIPTION

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0041] See also Figures 1-8 , this embodiment provides the following technical solutions:

[0042] like Figure 1-Figure 3 As shown, a quartz boat turning robot comprises: a conveyor 1 and a U-shaped frame 101, a connection box 103 is fixedly mounted on the upper surface of the U-shaped frame 101, an H-shaped plate 104 is fixedly mounted on the upper surface of the connection box 103, the connection box 103 and the H-shaped plate 104 are both passed through the conveyor 1, and the outer surface of the H-shaped plate 104 is slidably mounted with connection cylinders 105 at both ends along the length direction, that is, each group of connection cylinders 105 can be moved along the H The transverse guide rail on the outer surface of the H-shaped plate realizes linear sliding, and the upper surface of the connecting cylinder 105 is connected to the connecting tube 102. The connecting tube 102 and the H-shaped plate 104 are both rotatably installed with a lifting mechanism 4, and the outer surface of the lifting mechanism 4 in the connecting tube 102 is threadedly installed with a flipping mechanism 2. The flipping mechanism 2 slides out from the connecting tube 102 and is located at the inner end of the connecting tube 102, so that the lifting mechanism 4 can synchronously drive the two sets of flipping mechanisms 2 to perform lifting operations on the inner side of the connecting tube 102, and the conveyor 1 can transport the quartz boat, so that the flipping mechanism 2 driven to be lifted and lowered can be flush with the height of the quartz boat.

[0043] The lower surfaces of the two sets of connecting cylinders 105 are fixedly mounted with transmission blocks 109, which slide from the lower surface of the H-shaped plate 104 into the connecting box 103 and are threadedly mounted on the outer surface of the transmission mechanism 3. The transmission mechanism 3 is fixedly mounted in the connecting box 103, so that the transmission mechanism 3 can synchronously drive the two sets of transmission blocks 109 to drive the connecting cylinders 105 to slide synchronously outward or inward on the outer surface of the H-shaped plate 104, and the sliding connecting cylinders 105 can drive the internal lifting mechanism 4 and the flipping mechanism 2 to slide synchronously inward or outward, thereby driving the flipping mechanism 2 to be clamped at both ends of the quartz boat by sliding synchronously toward the center.

[0044] Through the design of the conveyor 1, H-shaped plate 104, connecting cylinder 105, connecting tube 102, turning mechanism 2, transmission mechanism 3 and lifting mechanism 4, when turning over the quartz boat, the quartz boat can be placed on the surface of the conveyor 1 and transported between the two sets of connecting tubes 102, and then the lifting mechanism 4 and transmission mechanism 3 can be started. The started lifting mechanism 4 can drive the two sets of turning mechanisms 2 to perform lifting operations until they rise or fall to the same height as the quartz boat and can stop. The started transmission mechanism 3 can synchronously drive the two sets of transmission blocks 109 to drive the connecting cylinder 105 to The outer surface of the H-shaped plate 104 slides inward synchronously, and the inward sliding connecting tube 105 can drive the internal lifting mechanism 4 and the flip mechanism 2 to slide inward synchronously, thereby enabling the flip mechanism 2 to slide in a cross direction through the transmission mechanism 3 and the lifting mechanism 4, thereby achieving the ability to quickly match the height and horizontal position of quartz boats of different specifications, such as quartz boats of different batches and sizes, and also avoiding collision damage and inaccurate clamping position caused by mechanical hard contact, thereby improving the compatibility of the equipment, thereby enabling the flip mechanism 2 to contact the quartz boat by being driven to slide toward the center. The two ends of the boat can then be turned over by starting the flipping mechanism 2 to perform adaptive convexities and concavities according to the shapes of the two ends of the quartz boat to match the surfaces of the two ends of the quartz boat for clamping operations, so that it can maximize the contact area for quartz boats with irregular surfaces, such as structures with bosses and grooves, and avoid slipping or local stress concentration caused by mismatched contact surfaces of traditional rigid clamps, thereby reducing the shaking of the quartz boat during the flipping process. It is especially suitable for thin and fragile quartz boats, such as quartz boats for semiconductor wafers, to reduce the risk of breakage. After the quartz boat is clamped inside, the lifting mechanism can be started again. 4 drives the flipping mechanism 2 to lift the quartz boat, and then the flipping mechanism 2 can be started again to flip the clamped quartz boat. After the quartz boat is flipped, the lifting mechanism 4 can be started again to drive the flipping mechanism 2 to return to its original position, and the quartz boat can be placed on the surface of the conveyor 1 again. Then, the flipping mechanism 2 and the transmission mechanism 3 can be started again to slide synchronously toward both ends to release the clamping of the quartz boat, allowing it to be transported away, realizing seamless connection to the next process, that is, realizing full automation from transportation, positioning, clamping, flipping to resetting, without manual intervention, reducing production line bottlenecks.

[0045] like Figure 4 As shown, the transmission mechanism 3 includes a first dual-axis motor 301, which is fixedly installed at the center of the connecting box 103. One end of the output shaft at both ends of the first dual-axis motor 301 is fixedly installed with a rotating column 302, and the outer surfaces of the two groups of rotating columns 302 are fixedly installed with threaded strips 303, and the threaded strips 303 installed on the outer surfaces of the two groups of rotating columns 302 are respectively in the shape of a positive spiral and a reverse spiral, and the outer surfaces of the two groups of threaded strips 303 are threadedly installed with transmission blocks 109, so that the two groups of threaded strips 303 can drive the two groups of transmission blocks 109 to slide synchronously outward or inward through the first dual-axis motor 301.

[0046] The other ends of the two groups of rotating columns 302 are rotatably mounted in the support plates 106 respectively, and the support plates 106 are fixedly mounted at both ends of the connection box 103, so that the support plates 106 can provide support force for the rotating columns 302 and threaded bars 303 driven to rotate.

[0047] The lifting mechanism 4 includes a second dual-axis motor 401, which is fixedly installed at the center of the H-shaped plate 104. One end of the output shaft at both ends of the second dual-axis motor 401 is fixedly installed with a T-shaped rotating rod 402, and the outer surfaces of the two sets of T-shaped rotating rods 402 are slidably installed with a rotating tube 403. In order to improve stability, a T-shaped slideway adapted to the T-shaped rotating rod 402 is provided in the rotating tube 403, and the T-shaped rotating rod 402 is slidably inserted into the T-shaped slideway. A rectangular through groove is provided on the side wall of the H-shaped plate 104, and a first bearing seat inserted into the rectangular through groove is fixed on the inner wall of the connecting cylinder 105. A first bearing is fixed in the first bearing seat, and the rotating tube 403 is fixedly connected to the inner ring of the first bearing; one end of the two sets of rotating tubes 403 is fixedly installed with a first bevel gear 404, the first bevel gear 404 is meshed with the second bevel gear 405, the second bevel gear 405 is fixedly mounted on the lower surface of the threaded rod 406, and the threaded rod 406 is rotatably mounted on the top of the connecting tube 102. In order to improve the stability of the threaded rod 406, second bearing seats are respectively fixed at both ends inside the connecting tube 102, and a second bearing is fixed in the second bearing seat. The two ends of the threaded rod 406 pass through the second bearing and are fixedly connected to the inner ring of the second bearing. The outer surface of the threaded rod 406 is threadedly mounted with a flip mechanism 2, so that the two groups of threaded rods 406 can be driven by a group of second dual-axis motors 401 to drive the two groups of flip mechanisms 2 to perform lifting operations, and the first bevel gear 404 and the second bevel gear 405 are rotatably located in the connecting tube 105.

[0048] The rotating tube 403 at one end of the first bevel gear 404 rotates simultaneously in the L-shaped plate 107, and the other end of the L-shaped plate 107 is rotatably mounted on the outer surface of the rotating rod of the second bevel gear 405. The outer surface of the threaded rod 406 at one end of the second bevel gear 405 rotates simultaneously in the limiting ring 108, and the limiting ring 108 is also fixedly mounted in the connecting tube 105.

[0049] By designing the first dual-axis motor 301, the threaded strip 303, the second dual-axis motor 401, the T-shaped rotating rod 402, the rotating tube 403, the first bevel gear 404, the second bevel gear 405 and the threaded rod 406, when the quartz boat is turned over, the quartz boat can be placed on the conveyor 1, so that the conveyor 1 conveys the quartz boat toward the U-shaped rack 101 at a constant speed. When the quartz boat approaches the target position under the conveyor 1, the second dual-axis motor 401 in the H-shaped plate 104 is started first to drive the T-shaped rotating rods 402 at both ends to rotate, and the T-shaped rotating rods 402 pass through the outer surface. The rotating tube 403 of the sliding sleeve drives the first bevel gear 404 to rotate, and the rotating first bevel gear 404 can mesh with the second bevel gear 405 to drive the threaded rod 406 to rotate in the connecting tube 102, and the turning mechanism 2 threadedly mounted on the outer surface of the threaded rod 406 can be driven to move vertically. At this time, the L-shaped plate 107 and the limiting ring 108 respectively constrain the radial runout of the rotating tube 403 and the threaded rod 406 through the bearing structure to ensure the meshing accuracy of the bevel gear pair. When the turning mechanism 2 is flush with the quartz boat, the second dual-axis motor 401 can stop to complete the height positioning;

[0050] Then, the first dual-axis motor 301 can be started to drive the rotating columns 302 at both ends to rotate synchronously, and the threaded strips 303 on the outer surfaces of the two sets of rotating columns 302 are respectively in forward and reverse directions, so that the two sets of threaded strips 303 can respectively drive the transmission blocks 109 on the outer surfaces to slide synchronously inward along the axial direction of the rotating columns 302 under the drive of the threads, so that the transmission blocks 109 can drive the two sets of connecting tubes 105 to translate inward on the outer surface of the H-shaped plate 104. In this process, the driven connecting tube 102 will push the rotating tube 403 to slide on the outer surface of the T-shaped rotating rod 402 through the L-shaped plate 107 until the connecting tube 105 drives the flipping mechanism 2 in the connecting tube 102 to touch the two ends of the quartz boat, so that the pressure sensing end in the flipping mechanism 2 can receive the feedback signal and stop the first Dual-axis motor 301, during this process, the support plate 106 supports the rotating column 302 through the bearing, offsetting the radial force to avoid bending deformation, that is, driving the flip mechanism 2 to perform a cross-directional sliding operation, wherein the second dual-axis motor 401 first drives the flip mechanism 2 to rise and fall vertically, and accurately align with the height of the quartz boat, and then the first dual-axis motor 301 drives the transmission block 109 to make the flip mechanism 2 slide horizontally inward, realizing the precise operation of "height positioning first, then horizontal positioning". This step-by-step positioning method can quickly adapt to quartz boats of different heights and sizes. Regardless of height difference or horizontal position offset, precise alignment can be achieved through the autonomous adjustment of the mechanical structure, avoiding collision and damage to the quartz boat due to positioning deviation, and greatly improving the compatibility of the equipment with quartz boats of different specifications.

[0051] like Figure 5-Figure 8 As shown, the flip mechanism 2 includes a connecting block 201, which is slidably installed in the connecting tube 102 and is simultaneously threadedly installed on the outer surface of the threaded rod 406, one end of the connecting block 201 slides out from the inner end of the connecting tube 102, and the end of the connecting block 201 that slides out from the connecting tube 102 is fixedly installed with a cone block 217, a first transmission disk 202 is rotatably installed in the cone block 217, a connecting disk 203 is fixedly installed at one end of the first transmission disk 202, a plurality of groups of piston cavities 209 are provided at one end of the connecting disk 203, a piston column 214 is slidably installed in each of the plurality of piston cavities 209, a push rod 215 is fixedly installed at one end of the piston column 214, the push rod 215 passes through the piston cavity 209 and a rubber pad 216 is fixedly installed at the other end.

[0052] A pressure plate 208 is installed in a horizontally sliding manner in the connecting plate 203, and one end of the pressure plate 208 is in contact with and connected to an annular air pipe 204, and the other end of the annular air pipe 204 is fixedly installed in the connecting plate 203, and an air outlet pipe port is provided at the other end of the annular air pipe 204, and each group of air outlet pipe ports is connected to each group of piston chambers 209. The air inlet of the annular air pipe 204 passes through the upper end of the outer surface of the connecting plate 203 and is connected to the air outlet of the air pump 206. The air pump 206 is fixedly installed on the upper surface of the mounting plate 205, and the mounting plate 205 is fixedly installed on the upper end of the outer surface of the cone block 217.

[0053] The air pump 206 can inject air into multiple groups of piston chambers 209 through the annular air pipe 204 to push multiple groups of piston rods 214 to slide toward one end in the piston chamber 209. The other end of the annular air pipe 204 can push the pressure plate 208 to press against one end of the pressure sensor 207 through air pressure. The pressure sensor 207 is embedded and fixedly installed in the first transmission plate 202. The signal transmitting end of the pressure sensor 207 is connected to the signal receiving end of the controller. The control output end of the controller is electrically connected to the air pump 206 and the electric control end of the first dual-axis motor 301. The electric control end of the reduction motor 211 is electrically connected to the control output end of the controller.

[0054] The outer surface of the first transmission disc 202 is covered with a transmission belt 213, and the other end of the transmission belt 213 slides out from the cone block 217 and is covered on the outer surface of the second transmission disc 212. The second transmission disc 212 is fixedly mounted on one end of the output shaft of the reduction motor 211, and the reduction motor 211 is fixedly mounted in the docking plate 210, and the docking plate 210 is fixedly mounted on one end of the outer surface of the cone block 217.

[0055] The models of the pressure sensor 207 and the controller are GML669 and S7-1200 respectively.

[0056] Through the design of the connecting block 201, the pressure sensor 207, the connecting plate 203, the piston chamber 209, the piston column 214, the pressing rod 215, the rubber pad 216, the pressure plate 208, the air pump 206 and the reduction motor 211, when the flip mechanism 2 is lifted and slid horizontally, the piston column 214 sliding in the piston chamber 209 of the internal connecting plate 203 touches the two ends of the quartz boat through the pressing rod 215 and the rubber pad 216, so that the rubber pad 216 can push the pressing rod 215 to drive the piston column 214 in the piston chamber 209. 09 moves backward, and the piston rod 214 moves backward in the piston chamber 209, so that gas can be injected into the annular air pipe 204, and the injected gas can push the pressure plate 208 to press one end of the pressure sensor 207, and the pressurized pressure sensor 207 can convert the pressure signal into an electrical signal in real time and transmit it to the controller, and the built-in program of the controller immediately compares the current pressure value with the preset clamping force threshold value, until the current pressure value reaches the set threshold value, the controller controls the first dual-axis motor 301 to stop The connecting tube 102 is pushed, and then the controller starts the air pump 206 to inject high-pressure air into the annular air pipe 204, so that the annular air pipe 204 can evenly rush the air into each group of piston chambers 209 to push the multiple groups of piston rods 214, and the multiple groups of pushed piston rods 214 can drive the multiple groups of push rods 215 and rubber pads 216 to extend from there and touch different parts of the quartz boat, and in the process of touching, they will adaptively extend and touch according to the shape of the outer surface of the quartz boat, and the started air pump 206 will continue to push High-pressure gas is injected into the annular air pipe 204 and the piston chamber 209. The rubber pad 216, which contacts the outer surface of the quartz boat, can increase the pressing force by allowing the piston rod 214 to remain in its current position in the piston chamber 209. The piston rod 214, which stops being pushed, allows the high-pressure air to remain in the annular air pipe 204 and push against one end of the pressure plate 208. The pressure plate 208 can press the pressure of the high-pressure gas against one end of the pressure sensor 207 for detection until the pressure value reaches a preset threshold range and the fluctuation amplitude is less than 0.05MPa, after the duration reaches the set time of 2 seconds, the controller can determine that the quartz boat has been stably clamped and turn off the air pump 206 to stop injecting high-pressure air into the annular air pipe 204, and then the second dual-axis motor 401 can be started again to drive the connecting block 201 to lift, so that the connecting block 201 can drive the quartz boat clamped between the connecting disks 203 to lift the operation, and then the controller can start the reduction motor 211 to drive the second transmission disk 212 to rotate, and the rotating second transmission disk 212 can drive the transmission belt 213 on the outer surface to drive the first transmission disk 202 to rotate, and the first transmission disk 202 can drive the connecting disk 203 to rotate, and then can drive the quartz boat clamped between them to flip over, and in the flipping process, the controller will monitor the number of rotations of the reduction motor 211 in real time, and accurately convert it into the flipping angle of the quartz boat. When the preset flipping angle, such as 180°, is reached, the controller immediately turns the reduction motor 211 to the reduction motor 211 A braking command is sent to turn off the reduction motor 211. After the flipping is completed, the second dual-axis motor 401 and the first dual-axis motor 301 can be started again, and the second dual-axis motor 401 can drive the connecting plate 203 to return to its original position, so that the quartz boat can be placed at the upper end of the conveyor 1. The started first dual-axis motor 301 can drive the two sets of connecting tubes 102 to slide outward synchronously, thereby driving the rubber pad 216 in the connecting plate 203 to release the clamping of the quartz boat. Then, the controller can control the air pump 206 to extract the air in the annular air pipe 204, so that the high-pressure gas in the annular air pipe 204 and the piston chamber 209 is quickly discharged, and the piston rod 214 that loses air pressure and has air sucked in can retract inward along the piston chamber 209 to return to its original position, and the flipped quartz boat can be conveyed by the conveyor 1 to the next process to achieve seamless connection. The multiple sets of piston rods 214 are pushed by air pressure, and cooperate with the rubber pad 216 to adaptively extend and touch according to the shape of the outer surface of the quartz boat. Quartz boats come in various shapes and may have uneven surfaces. This adaptive clamping method allows the rubber pad 216 to fit tightly against the surface of the quartz boat, ensuring uniform pressure on all parts and preventing damage to the boat from localized stress concentration. This design can significantly improve the boat's integrity rate and reduce product loss.

[0057] Among them, the dynamic regulation of the clamping force satisfies the following equation:

[0058]

[0059] in:

[0060] F(t) is the real-time clamping force (unit: N);

[0061] k is the safety factor, which is set according to the material and structure of the quartz boat (value range: 0.8~1.2);

[0062] P is the air pressure output by the air pump (unit: Pa);

[0063] A is the effective cross-sectional area of ​​a single piston rod (unit: m²);

[0064] S(t) is the real-time contact area (unit: m²), which is calculated through the deformation feedback of the pressure sensor and the rubber pad;

[0065] S max is the contact area corresponding to the maximum stroke of the piston rod (unit: m²);

[0066] τ is the system response time constant (unit: s), which is set according to the dynamic characteristics of the mechanical structure;

[0067] t is the time of the clamping process (unit: s).

[0068] Example: When there are irregular protrusions on the surface of the quartz boat, the contact area S(t) decreases. The controller automatically reduces the air pressure P according to the equation, reducing the clamping force F(t) and avoiding local overpressure. When the contact area S(t) increases, P is gradually increased to enhance the clamping stability. For example, set k=1.0, A=0.005m², S max =0.02m², τ=0.5s, when S(t)=0.01m² and t=1s:

[0069] F(t)≈1.0·P·0.005·(0.01 / 0.02)·(1-e -2 )≈0.00216P, and by adjusting P, F(t) can accurately match the preset safety threshold.

[0070] Technical effect:

[0071] Dynamic self-adaptation: real-time adjustment of the clamping force based on the contact area S(t) to avoid local stress concentration caused by irregular shapes;

[0072] Anti-shock protection: progressive loading of clamping force is achieved through the time constant τ to reduce mechanical shock;

[0073] Precise control: Combining the air pressure P and the safety factor k ensures that the clamping force is always within the tolerance of the quartz boat;

[0074] Improved compatibility: Applicable to quartz boats of different sizes and shapes, automatically adapting clamping parameters through equations.

[0075] Working principle process:

[0076] 1. Contact detection: After the rubber pad contacts the quartz boat, the pressure sensor provides real-time feedback of the contact area S(t);

[0077] 2. Equation calculation: The controller calculates the target clamping force F(t) based on S(t) and preset parameters;

[0078] 3. Air pressure regulation: Dynamically adjust the air pump output P so that the actual clamping force approaches F(t);

[0079] 4. Closed-loop feedback: Continuously monitor pressure sensor data and fine-tune P to maintain F(t) stability;

[0080] 5. Safety lock: When F(t) reaches the preset threshold and stabilizes, adjustment stops and clamping is completed.

[0081] This equation combines contact area, time response and air pressure control, breaking through the limitations of traditional clamping force fixed threshold and achieving nonlinear adaptive adjustment. , solves the problem of instantaneous impact during clamping, and uses S(t) / S max Dynamic correction of clamping force distribution.

[0082] According to the above technical solution, the working steps of this solution are summarized and sorted out: when the quartz boat is turned over, the quartz boat can be placed on the surface of the conveyor 1 and conveyed between the two sets of connecting tubes 102, and the second dual-axis motor 401 can be started to drive the T-shaped rotating rods 402 at both ends to rotate, and the T-shaped rotating rods 402 drive the first bevel gear 404 to rotate through the rotating tube 403 of the outer surface sliding sleeve, and the rotating first bevel gear 404 can mesh with the second bevel gear 405 to drive the threaded rod 406 to rotate in the connecting tube 102. The second dual-axis motor 401 can stop when the connecting block 201 is driven to be flush with the height of the quartz boat, and the connecting block 201, which is threadedly mounted on the outer surface of the threaded rod 406, can be driven to move vertically up and down. At this time, the L-shaped plate 107 and the limiting ring 108 respectively constrain the radial runout of the rotating tube 403 and the threaded rod 406 through the bearing structure to ensure the meshing accuracy of the bevel gear pair. When the connecting block 201 is driven to be flush with the height of the quartz boat, the second dual-axis motor 401 can stop, and the connecting block 201 can drive the connecting disk 203 fixed at one end to be flush with the height position of the quartz boat to complete the height positioning;

[0083] Then, the first dual-axis motor 301 can be started to drive the rotating columns 302 at both ends to rotate synchronously, and the threaded strips 303 on the outer surfaces of the two sets of rotating columns 302 are respectively in forward and reverse directions, so that the two sets of threaded strips 303 can respectively drive the transmission blocks 109 on the outer surfaces to slide synchronously inward along the axial direction of the rotating columns 302 under the drive of the threads, so that the transmission blocks 109 can drive the two sets of connecting cylinders 105 and connecting tubes 102 to translate inward on the outer surface of the H-shaped plate 104. In this process, the driven connecting tubes 102 will push the rotating tube 403 to slide on the outer surface of the T-shaped rotating rod 402 through the L-shaped plate 107, so that the two sets of connecting tubes 102 can drive the piston column 214 sliding in the piston cavity 209 of the connecting disk 203 through After the top pressure rod 215 and the rubber pad 216 touch the two ends of the quartz boat, the rubber pad 216 can push the top pressure rod 215 to drive the piston rod 214 to move backward in the piston chamber 209. The backward movement of the piston rod 214 in the piston chamber 209 can allow it to inject gas into the annular air pipe 204, and the injected gas can push the pressure plate 208 to press on one end of the pressure sensor 207. The pressurized pressure sensor 207 can convert the pressure signal into an electrical signal in real time and transmit it to the controller. The built-in program of the controller immediately compares the current pressure value with the preset clamping force threshold. After the current pressure value reaches the set threshold, the controller controls the first dual-axis motor 301 to stop pushing the connecting tube 102.

[0084] Then the controller can start the air pump 206 to inject high-pressure air into the annular air pipe 204, so that the annular air pipe 204 can evenly rush the air into each group of piston chambers 209 to push multiple groups of piston rods 214, and the multiple groups of pushed piston rods 214 can drive multiple groups of push rods 215 and rubber pads 216 to extend out and touch different parts of the quartz boat, and in the process of touching, they will adaptively extend and touch according to the shape of the outer surface of the quartz boat, and the started air pump 206 will continue to inject high-pressure gas into the annular air pipe 204 and the piston chamber 209, and the rubber pad 216 touching the outer surface of the quartz boat can increase the pushing pressure by allowing the piston rod 214 to stay at the current position in the piston chamber 209 , and the piston rod 214 that stops being pushed can allow the high-pressure air to stay in the annular air pipe 204 and push against one end of the pressure plate 208, and the pressure plate 208 can press the pressure of the high-pressure gas to one end of the pressure sensor 207 for detection, until the pressure value reaches the preset threshold range, and the fluctuation amplitude is less than 0.05MPa, and the duration reaches the set time of 2 seconds, the controller can determine that the quartz boat has been stably clamped and turn off the air pump 206 to stop injecting high-pressure air into the annular air pipe 204, and then can start the second dual-axis motor 401 again to drive the connecting block 201 to lift, so that the connecting block 201 can drive the quartz boat clamped between the connecting disks 203 to lift, and then can The controller starts the reduction motor 211 to drive the second transmission disk 212 to rotate, and the rotating second transmission disk 212 then drives the transmission belt 213 on the outer surface to drive the first transmission disk 202 to rotate, and the first transmission disk 202 can drive the connecting disk 203 to rotate, and then can drive the quartz boat clamped therebetween to flip over. In the flipping process, the controller will monitor the number of rotations of the reduction motor 211 in real time, and accurately convert it into the flipping angle of the quartz boat. When the preset flipping angle, such as 180 degrees, is reached, the controller immediately sends a braking command to the reduction motor 211 to turn off the reduction motor 211. After the flip is completed, the second dual-axis motor 401 and the first dual-axis motor 401 can be started again. A dual-axis motor 301 is used, and the second dual-axis motor 401 can drive the connecting plate 203 to return to its original position, so that the quartz boat can be placed at the upper end of the conveyor 1. The started first dual-axis motor 301 can drive the two sets of connecting tubes 102 to slide outward synchronously, thereby driving the rubber pad 216 in the connecting plate 203 to break away from the clamping of the quartz boat. Then the controller can control the air pump 206 to extract the air in the annular air pipe 204, so that the high-pressure gas in the annular air pipe 204 and the piston chamber 209 can be quickly discharged, and the piston column 214 that loses the air pressure and is sucked into the air can retract inward along the piston chamber 209 to return to its original position, and the flipped quartz boat can be transported by the conveyor 1 to the next process to achieve seamless connection.

[0085] In summary: During the process of clamping the quartz boat, the quartz boat flipping robot can adaptively extend and clamp the quartz boat according to the shape of the outer surface of the quartz boat, so that it can achieve a tight fitting clamping operation. In the process of clamping, it can also automatically detect the clamping force to prevent excessive pressure from damaging the quartz boat, ensuring that the surface of the quartz boat is intact during the entire clamping process, improving product yield and reducing production costs.

[0086] Parts not described in the present invention are the same as those in the prior art or can be implemented using the prior art. Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz boat turning robot, characterized in that: include: The conveyor (1) and the U-shaped frame (101) are provided with a connection box (103) fixedly mounted on the upper surface of the U-shaped frame (101), and an H-shaped plate (104) fixedly mounted on the upper surface of the connection box (103). The connection box (103) and the H-shaped plate (104) are both extended from the conveyor (1), and the outer surface of the H-shaped plate (104) is provided with connection tubes (105) slidably mounted at both end regions along the length direction, that is, each group of the connection tubes (105) can be moved along the H-shaped plate (104). The transverse guide rail on the outer surface of the H-shaped plate realizes linear sliding, and the upper surface of the connecting cylinder (105) is connected to the connecting tube (102), and the connecting tube (102) and the H-shaped plate (104) are both rotatably installed with a lifting mechanism (4), and the outer surface of the lifting mechanism (4) in the connecting tube (102) is threadedly installed with a flip mechanism (2), and the flip mechanism (2) slides out from the connecting tube (102) and is located at one end of the inner side of the connecting tube (102), so that the lifting mechanism (4) can synchronously drive the two groups of flip mechanisms (2) to perform lifting operations on the inner side of the connecting tube (102), and the conveyor (1) can perform a conveying operation on the quartz boat, thereby enabling the flip mechanism (2) driven to be lifted to be flush with the height of the quartz boat; A transmission block (109) is fixedly mounted on the lower surface of the two groups of connecting cylinders (105); the transmission block (109) slides from the lower surface of the H-shaped plate (104) into the connection box (103) and is threadedly mounted on the outer surface of the transmission mechanism (3); and the transmission mechanism (3) is fixedly mounted in the connection box (103); The transmission mechanism (3) comprises a first dual-axis motor (301), the first dual-axis motor (301) being fixedly mounted at the center of the connection box (103), a rotating column (302) being fixedly mounted on one end of the output shafts at both ends of the first dual-axis motor (301), and threaded strips (303) being fixedly mounted on the outer surfaces of the two groups of rotating columns (302), the threaded strips (303) mounted on the outer surfaces of the two groups of rotating columns (302) being respectively in the shape of a positive spiral and a negative spiral, and a transmission block (109) being threadedly mounted on the outer surfaces of the two groups of threaded strips (303); The lifting mechanism (4) includes a second dual-axis motor (401), the second dual-axis motor (401) is fixedly mounted at the center of the H-shaped plate (104), one end of the output shaft at both ends of the second dual-axis motor (401) is fixedly mounted with a T-shaped rotating rod (402), the outer surfaces of the two sets of the T-shaped rotating rods (402) are slidably mounted with rotating tubes (403), a T-shaped sliding groove adapted to the T-shaped rotating rod (402) is provided in the rotating tubes (403), and the T-shaped rotating rod (402) is slidably inserted into the T-shaped sliding groove; One end of each of the two sets of rotating tubes (403) is fixedly mounted with a first bevel gear (404), the first bevel gear (404) is meshed with a second bevel gear (405), the second bevel gear (405) is fixedly mounted on the lower surface of a threaded rod (406), and the threaded rod (406) is rotatably mounted on the top of the connecting tube (102); The outer surface of the threaded rod (406) is threadedly mounted with a turning mechanism (2), and the first bevel gear (404) and the second bevel gear (405) are rotatably located in the connecting cylinder (105); The flip mechanism (2) includes a connecting block (201), the connecting block (201) is slidably mounted in the connecting tube (102) and is simultaneously threadedly mounted on the outer surface of the threaded rod (406), one end of the connecting block (201) slides out from the inner end of the connecting tube (102), and a cone block (217) is fixedly mounted on one end of the connecting block (201) that slides out from the connecting tube (102), a first transmission disk (202) is rotatably mounted in the cone block (217), a connecting disk (203) is fixedly mounted on one end of the first transmission disk (202), a plurality of groups of piston cavities (209) are provided at one end of the connecting disk (203), a piston column (214) is slidably mounted in each of the plurality of groups of piston cavities (209), a pressing rod (215) is fixedly mounted on one end of the piston column (214), the pressing rod (215) passes through the piston cavity (209) and a rubber pad (216) is fixedly mounted on the other end; A pressure plate (208) is installed in the connecting plate (203) in a transversely sliding manner. One end of the pressure plate (208) is in contact with an annular air pipe (204). The other end of the annular air pipe (204) is fixedly installed in the connecting plate (203). An air outlet is provided at the other end of the annular air pipe (204). Each group of air outlets is connected to each group of piston chambers (209). The air inlet of the annular air pipe (204) passes through the upper end of the outer surface of the connecting plate (203) and is connected to the air outlet of the air pump (206). The air pump (206) is fixedly installed on the upper surface of the mounting plate (205). The mounting plate (205) is fixedly installed on the upper end of the outer surface of the cone block (217). The air pump (206) can inject air into the multiple piston chambers (209) through the annular air tube (204) to push the multiple piston rods (214) to slide toward one end in the piston chamber (209); the other end of the annular air tube (204) can push the pressure plate (208) against one end of the pressure sensor (207) through air pressure; the pressure sensor (207) is embedded and fixedly installed in the first transmission plate (202); the signal transmitting end of the pressure sensor (207) is connected to the signal receiving end of the controller; the control output end of the controller is electrically connected to the air pump (206) and the electric control end of the first dual-axis motor (301); The clamping force of the flip mechanism (2) on the quartz boat is controlled by the following dynamic adjustment equation: ； Where: F(t) is the real-time clamping force, unit: N; k is the safety factor, which is set according to the material and structure of the quartz boat and has a value range of 0.8~1.2; P is the air pressure output by the air pump, unit: Pa; A is the effective cross-sectional area of ​​a single piston rod, unit: m²; S(t) is the real-time contact area, in m², calculated through the deformation feedback of the pressure sensor and rubber pad; S max The contact area corresponding to the maximum stroke of the piston rod, unit: m²; τ is the system response time constant, unit: s, set according to the dynamic characteristics of the mechanical structure; t is the time of the clamping process, unit: s.

2. The quartz boat turning robot according to claim 1, characterized in that: The other ends of the two groups of rotating columns (302) are respectively rotatably mounted in support plates (106), and the support plates (106) are fixedly mounted at both ends in the connection box (103), so that the support plates (106) can provide support force for the rotating columns (302) and the threaded strips (303) that are driven to rotate.

3. The quartz boat turning robot according to claim 2, characterized in that: A rectangular through slot is formed on the side wall of the H-shaped plate (104); a first bearing seat inserted into the rectangular through slot is fixed on the inner wall of the connecting tube (105); a first bearing is fixed in the first bearing seat; the rotating tube (403) is fixedly connected to the inner ring of the first bearing; second bearing seats are fixed at both ends of the interior of the connecting tube (102); a second bearing is fixed in the second bearing seat; and both ends of the threaded rod (406) pass through the second bearing and are fixedly connected to the inner ring of the second bearing.

4. The quartz boat turning robot according to claim 3, characterized in that: The rotating tube (403) at one end of the first bevel gear (404) rotates simultaneously in the L-shaped plate (107), while the other end of the L-shaped plate (107) is rotatably mounted on the outer surface of the rotating rod of the second bevel gear (405). The outer surface of the threaded rod (406) at one end of the second bevel gear (405) rotates simultaneously in the limiting ring (108), and the limiting ring (108) is also fixedly mounted in the connecting tube (105).

5. The quartz boat turning robot according to claim 4, characterized in that: The outer surface of the first transmission disc (202) is sleeved with a transmission belt (213), the other end of the transmission belt (213) slides out from the cone block (217) and is sleeved on the outer surface of the second transmission disc (212), the second transmission disc (212) is fixedly mounted on one end of the output shaft of the reduction motor (211), the reduction motor (211) is fixedly mounted in the docking plate (210), the docking plate (210) is fixedly mounted on one end of the outer surface of the cone block (217), and the electric control end of the reduction motor (211) is electrically connected to the control output end of the controller.

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