Diaphragm valve with long service life and high response speed and ALD valve

Abstract

The invention discloses a diaphragm valve long in service life and high in response speed and an ALD valve. The diaphragm valve comprises a pneumatic actuator, a diaphragm head connected with the pneumatic actuator, a lock nut, a diaphragm pressing block, a valve body and a diaphragm. Wherein the diaphragm pressing block is connected to the diaphragm head in a sleeving mode, the lock nut is fixed to the valve body in a threaded mode, the diaphragm pressing block is fixed between the lock nut and the valve body, and the diaphragm pressing block is matched with the valve body to fix the diaphragm; and the membrane head and the membrane are respectively and correspondingly provided with a magnetic structure. According to the diaphragm valve with the long service life and the high response speed and the ALD valve, the diaphragm service life and the response speed of the diaphragm valve and the ALD valve can be effectively improved through repulsion or attraction of the sliding block and the diaphragm.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing, and relates to a valve with a high service life and a high response speed, and particularly relates to a semiconductor diaphragm valve and an ALD valve with a high service life and a high response speed. Background Art

[0002] The diaphragm valve isolates the mechanical drive structure and the fluid through a diaphragm to ensure the ultra-cleanliness and particle-free of the fluid, so as to meet the cleanliness requirements of semiconductor fluids. However, the most vulnerable part of each diaphragm valve is the diaphragm because it needs to deform every time it is opened and closed. Especially in the case of continuous large flow or sudden large flow, the diaphragm is not supported when it is impacted greatly and is prone to failure.

[0003] In the prior art, CN113544420B adopts that the first surface of the diaphragm can be positioned near the upper wall of the chamber or against the upper wall of the chamber. CN109764147A adopts a diaphragm that does not have to be supported by the upper part and is supported by a valve cover and a gasket. The above patents both utilize a diaphragm pressing block that can fit the highest position of the diaphragm to support the diaphragm when the diaphragm valve is opened. However, this kind of support will generate radial friction on the contact surface between the diaphragm and the diaphragm pressing block with the concave and convex deformation of the diaphragm, thereby reducing the service life of the diaphragm.

[0004] Moreover, in the prior art, the diaphragm valve is pressed down by the pneumatic actuator, and convexes upward through the self-elasticity of the diaphragm. With continuous use, the elasticity of the diaphragm decreases, resulting in a reduction in the switching response speed, especially the opening speed, and cannot meet the requirements of high response speed, high service life, and high temperature of the ALD valve.

[0005] Therefore, there is an urgent need to provide a valve body that can improve the service life and response speed of the diaphragms of the diaphragm valve and the ALD valve. Summary of the Invention

[0006] In order to solve the above problems, the present invention provides a valve that can improve the service life and response speed of the diaphragm, especially the diaphragm valve and the ALD valve, and can, in view of the technical problems of the existing device, realize the rapid response of the module by the repulsive or attractive force provided by the diaphragm pressing block to the diaphragm, reduce the radial friction on the contact surface between the diaphragm and the diaphragm pressing block, and improve the service life of the diaphragm.

[0007] In order to achieve the above object, the present invention provides the following technical solutions:

[0008] The present invention provides a diaphragm valve with a high service life and a high response speed, and the diaphragm valve includes a pneumatic actuator 100, a diaphragm head 200 connected to the pneumatic actuator 100, a lock nut 300, a diaphragm pressing block 400, a valve body 500, and a diaphragm 600;

[0009] Among them, the diaphragm pressing block 400 is sleeved on the diaphragm head 200, the lock nut 300 is fixedly threaded with the valve body 500, the diaphragm pressing block 400 is fixed between the lock nut 300 and the valve body 500, and the diaphragm pressing block 400 and the valve body 500 cooperate to fix the diaphragm 600;

[0010] The diaphragm head 200 and the diaphragm 600 are respectively provided with magnetic structures;

[0011] Or the diaphragm pressing block 400 and the diaphragm 600 are respectively provided with magnetic structures.

[0012] In an alternative embodiment, the diaphragm head 200 is provided with at least one sliding structure, and the sliding structure has a magnetic structure;

[0013] The sliding structure includes a slider 210 and a connecting rod 220. The two ends of the connecting rod 220 are respectively hinged to the diaphragm head 200 and the slider 210;

[0014] The magnetic structure provided on the diaphragm 600 is a magnet. The first magnet 610 and the second magnet 620 are provided on the surface of the diaphragm 600;

[0015] The slider 210 has a magnetic structure that repels the first magnet 610 and the second magnet 620;

[0016] The diaphragm pressing block 400 is provided with at least one chute 440. The slider 210 is received in the chute 440, and the slider 210 moves horizontally along the direction of the chute 440.

[0017] In an alternative embodiment, the positions of the first magnet 610 and the second magnet 620 correspond to the chute 440;

[0018] When the slider 210 is in the initial state and the final state of horizontal movement, the distances between the first magnet 610 and the second magnet 620 and the slider 210 are equal.

[0019] In an alternative embodiment, the first magnet 610 and the second magnet 620 are respectively connected to the slider 210 by a pull rope or an articulated connecting rod.

[0020] In an alternative embodiment, the diaphragm head 200 is provided with at least one connecting flange 230, and the connecting rod 220 is hinged to the diaphragm head 200 through the connecting flange 230.

[0021] In an alternative embodiment, the diaphragm pressing block 400 includes a convex portion 420 and a flat plate portion 430. The valve body 500 is provided with a receiving cavity 520 and an annular protrusion 530. The diaphragm 600 is disposed in the receiving cavity 520, and the edge of the diaphragm 600 is fixed in the receiving cavity 520 by the convex portion 420 and the annular protrusion 530.

[0022] In an alternative embodiment, eight connecting flanges 230 are arranged in a circumferential array on the diaphragm head 200, and each connecting flange 230 is hinged with a sliding structure; the diaphragm pressing block 400 is correspondingly provided with eight sliding grooves 440, and each sliding groove 440 houses a sliding structure; at each corresponding position of the diaphragm 600 and the sliding groove 440, a first magnet 610 and a second magnet 620 are arranged. The first magnet 610 and the second magnet 620 are arc-shaped and spaced from each other.

[0023] In an alternative embodiment, the slider 210 has a magnetic structure that attracts the first magnet 610 and the second magnet 620.

[0024] The present invention also provides an ALD valve with high service life and high response speed. The ALD valve includes a connecting rod 110, a sleeve 120, and the structure of the above diaphragm valve. The connecting rod 110 is located in the sleeve 120, and both ends of the connecting rod 110 are respectively connected to the diaphragm head 200 of the pneumatic actuator 100. A locking nut 300 is sleeved outside the sleeve 120;

[0025] Wherein, the cylinder of the pneumatic actuator 100 is provided with a sealing ring made of FFKM material, and the valve body 500 is provided with a sealing ring 540 made of PFA material.

[0026] Advantages of the present invention:

[0027] The diaphragm valve and the ALD valve with high service life and high response speed provided by the present invention can effectively improve the diaphragm life and response speed of the diaphragm valve and the ALD valve by the repulsion or attraction between the slider and the diaphragm, aiming at the disadvantages of the prior art. Description of the Drawings

[0028] Figure 1 is a schematic structural diagram of the valve in the open state of the present invention;

[0029] Figure 2 is a schematic structural diagram of the valve in the closed state of the present invention;

[0030] Figure 3 is a schematic structural diagram of partial parts of the valve in the open state of the present invention;

[0031] Figure 4 is a schematic structural diagram of partial parts of the valve in the closed state of the present invention;

[0032] Figure 5 It is a partial structural schematic diagram of the open state of the valve of the present invention;

[0033] Figure 6 It is a partial structural schematic diagram of the closed state of the valve of the present invention;

[0034] Figure 7 It is a sectional view of the A-A plane of the valve of the present invention;

[0035] Figure 8 It is a sectional perspective schematic diagram of the valve of the present invention;

[0036] Figure 9 It is a top view of the valve of the present invention;

[0037] Figure 10 It is a graph showing the relationship between the durability times and the change of CV value of the valve structure of the prior art;

[0038] Figure 11 It is a graph showing the relationship between the durability times and the change of CV value of the valve structure of the embodiment of the present invention.

[0039] Reference numerals: 100 - pneumatic actuator, 110 - connecting rod, 120 - sleeve, 200 - diaphragm head, 210 - slider, 220 - connecting rod, 230 - connecting flange, 240 - straight rod portion, 250 - protruding portion, 300 - lock nut, 400 - diaphragm pressing block, 410 - guide ring, 420 - convex portion, 430 - flat plate portion, 440 - chute, 500 - valve body, 510 - fluid hole, 520 - accommodating cavity, 530 - annular protrusion, 540 - sealing ring, 600 - diaphragm, 610 - first magnet, 620 - second magnet. Detailed implementation manners

[0040] In order to make the objectives, technical solutions and advantages of the present application clearer and more understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0041] Embodiments of the present invention are shown in the accompanying drawings, where like or similar reference numerals represent like or similar elements or elements with like or similar functions throughout. The terms "first", "second", "third", etc. (if any) in the description, claims, and drawings of the present invention are used to distinguish similar objects and do not necessarily describe a specific order or sequence. It should be understood that such described objects can be interchanged under appropriate circumstances. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. The directional terms mentioned in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only with reference to the directions in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention. In addition, the present invention repeats reference numerals and / or reference letters in different examples, and this repetition is for the purpose of simplicity and clarity and does not itself indicate the relationship between the various embodiments and / or arrangements discussed. In addition, the present invention provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0042] This application proposes a valve with high service life and high response speed, which can be a diaphragm valve with high service life and high response speed. Refer to the attached Figure 1 to the attached Figure 9 For, the structure of the valve in this embodiment includes a pneumatic actuator 100, a diaphragm head 200, a lock nut 300, a diaphragm pressing block 400, a valve body 500, and a diaphragm 600.

[0043] The diaphragm pressing block 400 is sleeved on the diaphragm head 200, the lock nut 300 is threadedly fixed to the valve body 500, the diaphragm pressing block 400 is fixed between the lock nut 300 and the valve body 500, and the diaphragm pressing block 400 and the valve body 500 cooperate to fix the diaphragm 600. The diaphragm head 200 and the diaphragm 600 are respectively provided with magnetic structures.

[0044] Optionally, the diaphragm pressing block 400 and the diaphragm 600 are respectively provided with magnetic structures.

[0045] Among them, a sealing ring (not shown in the figure) is provided on the cylinder of the pneumatic actuator 100. Preferably, this sealing ring is made of FKM material.

[0046] The diaphragm head 200 is connected to the pneumatic actuator 100, and the pneumatic actuator 100 drives the diaphragm head 200 to move in the vertical direction. At least one sliding structure is also installed on the diaphragm head 200, and the sliding structure moves within the diaphragm pressing block 400. The diaphragm head 200 includes a straight rod portion 240 and a protruding portion 250. Optionally, the sliding structure is installed on the protruding portion 250 of the diaphragm head 200. And, the sliding structure has a magnetic structure.

[0047] The diaphragm pressing block 400 is a circular structure with a central hole. The diaphragm pressing block 400 is sleeved on the straight rod portion 240 of the diaphragm head 200. There is a guiding ring 410 between the diaphragm pressing block 400 and the straight rod portion 240 of the diaphragm head 200. The diameter of the central hole of the diaphragm pressing block 400 is larger than the outer diameter of the straight rod portion 240 and smaller than the diameter of the protruding portion 250. Due to the guiding ring 410, the diaphragm head 200 can move in the vertical direction and does not contact the diaphragm pressing block 400. Due to the protruding portion 250, the vertical upward movement of the diaphragm head 200 can be effectively limited to prevent the diaphragm head 200 from falling off from the valve body 500.

[0048] Further, the diaphragm pressing block 400 includes a convex portion 420 and a flat plate portion 430. The upper surface of the diaphragm pressing block 400 is a plane, and the convex portion 420 is located at the peripheral part of the lower surface of the diaphragm pressing block 400.

[0049] The flat plate portion 430 is provided with at least one sliding groove 440. The sliding groove 440 is horizontally opened on the lower surface of the diaphragm pressing block 400. The sliding groove 440 is not a through groove, and one end of the sliding groove 440 communicates with the central hole of the diaphragm pressing block 400.

[0050] In an alternative embodiment, the sliding groove 440 does not communicate with the central hole of the diaphragm pressing block 400, so as to limit the sliding structure and restrict the moving position of the sliding structure in the sliding groove 440.

[0051] The sliding structure can be accommodated in the sliding groove 440 and move laterally along the direction of the sliding groove 440 in the sliding groove 440.

[0052] Specifically, the sliding structure includes a slider 210 and a connecting rod 220. Both ends of the connecting rod 220 are hinged to the diaphragm head 200 and the slider 210 respectively. The slider 210 is accommodated in the sliding groove 440 and moves along the direction of the sliding groove 440.

[0053] In order to be able to connect with the sliding structure, at least one connecting flange 230 is provided on the diaphragm head 200. The connecting rod 220 is hinged to the diaphragm head 200 through the connecting flange 230. Preferably, the connecting flange 230 is arranged on the outer edge of the protruding portion 250.

[0054] Optionally, an articulated flange is also provided on the slider 210, and the connecting rod 220 is hinged to the articulated flange of the slider 210.

[0055] Since the connecting flange 230 is hinged to the connecting rod 220, the slider 210 is received in the chute 440, and the chute 440 defines the moving direction of the slider 210, that is, it can only move horizontally within the chute 440. When the diaphragm head 200 moves downward, the slider 210 moves horizontally under the action of the connecting rod 220 in the direction close to the diaphragm head 200 and the center of the diaphragm 600. When the diaphragm head 200 moves upward, the slider 210 moves horizontally under the action of the connecting rod 220 in the direction away from the diaphragm head 200 and close to the outer end of the diaphragm 600.

[0056] In order to support or attract the diaphragm 600 when the diaphragm head 200 presses down the diaphragm, at least one magnetic structure corresponding to the sliding structure is provided on the diaphragm 600.

[0057] Specifically, the magnetic structure is a magnet, and at least one magnet structure is provided on the surface of the diaphragm 600. Preferably, a first magnet 610 and a second magnet 620 are provided on the surface of the diaphragm 600.

[0058] The positions of the first magnet 610 and the second magnet 620 correspond to the chute 440. When the slider 210 is in the initial state and the final state of horizontal movement, the distances between the first magnet 610 and the second magnet 620 and the slider 210 are equal.

[0059] Specifically, the connecting lines between the center points of the first magnet 610 and the second magnet 620 and the center point of the slider 210 always form a triangle. When the slider 210 moves horizontally and the diaphragm 600 is pressed down or rebounds, and the diaphragm 600 is in the open or closed position, at this time the slider 210 is in the initial state or the final state, the distances between the first magnet 610 and the slider 210 are equal, and the distances between the second magnet 620 and the slider 210 are equal.

[0060] Furthermore, the slider 210 has a magnetic structure that repels the first magnet 610 and the second magnet 620. Preferably, the slider 210 is made of a material that repels the first magnet 610 and the second magnet 620.

[0061] Furthermore, in order to prevent the CV value of the valve from decreasing after the diaphragm 600 ages, the first magnet 610 and the second magnet 620 are respectively connected to the slider 210. Optionally, the first magnet 610 and the second magnet 620 can be connected to the slider 210 by a pull rope or an articulated connecting rod.

[0062] Specifically, when the diaphragm head 200 presses down the diaphragm 600, as the diaphragm head 200 moves downward, it drives the slider 210 to move horizontally along the diaphragm pressing block 400, so that the first magnet 610 and the second magnet 620 that repel the slider 210 can continuously press down the diaphragm 600, making the diaphragm 600 not only pressed down by the middle diaphragm head 200, but also evenly pressed and supported circumferentially on the diaphragm 600 due to the magnetic force; when the diaphragm head 200 moves upward away from the diaphragm 600, the diaphragm 600 bounces upward by its own elasticity, and the slider 210 also moves horizontally along the diaphragm pressing block 400 due to the hinge accordingly.

[0063] Since the slider 210 repels the first magnet 610 and the second magnet 620, the valve of this embodiment can use a diaphragm 600 with stronger elasticity to ensure a small change in the flow coefficient (CV value). Moreover, for supporting the diaphragm 600 with strong elasticity when high-pressure fluid flows through, the valve of this embodiment does not need to use a larger pneumatic actuator 100.

[0064] Compared with only pressing down the diaphragm by the pneumatic actuator 100, the diaphragm 600 supported at multiple angles has a better lifespan. Moreover, a diaphragm 600 with a larger elasticity can be selected, and the lifespan of the diaphragm 600 itself is also better.

[0065] As an alternative embodiment, the slider 210 has a magnetic structure that attracts the first magnet 610 and the second magnet 620. Preferably, the slider 210 is made of a material that attracts the first magnet 610 and the second magnet 620.

[0066] Since the slider 210 is also attracted by the first magnet 610 and the second magnet 620 on the diaphragm 600 at an equal distance, due to maintaining the same attractive force, the force uniformity of the diaphragm 600 is improved, and the lifespan of the diaphragm 600 is increased.

[0067] In addition, the valve body 500 has a fluid hole 510, and a sealing ring 540 is arranged on the outer ring of the fluid hole 510. Optionally, the sealing ring 540 is made of PI, PFA or PTFE material. Preferably, the sealing ring 540 is made of PFA material. The valve body 500 is provided with a receiving cavity 520 and a ring-shaped protrusion 530. The diaphragm 600 is arranged in the receiving cavity 520, and the edge of the diaphragm 600 is fixed in the receiving cavity 520 through the protrusion 420 of the diaphragm pressing block 400 and the ring-shaped protrusion 530, thereby fixing the position of the diaphragm 600. When the diaphragm head 200 presses down the diaphragm 600, the diaphragm 600 covers and closes the fluid hole 510.

[0068] The lock nut 300 is threadedly fixed to the valve body 500, the diaphragm pressing block 400 is fixed between the lock nut 300 and the valve body 500, and the diaphragm pressing block 400 cooperates with the valve body 500 to fix the diaphragm 600.

[0069] In a specific embodiment, the valve of this embodiment is provided with a plurality of sliders 210.

[0070] Specifically, 8 connecting flanges 230 are arranged in an array in the circumferential direction of the protruding portion 250 of the diaphragm head 200. Each connecting flange 230 is hinged with a sliding structure. Each sliding structure includes a slider 210 and a connecting rod 220. The diaphragm pressing block 400 is correspondingly provided with 8 sliding grooves 440 at corresponding positions. Each sliding groove 440 houses a sliding structure. Each slider 210 can move horizontally in the sliding groove 440 along the direction of the diaphragm pressing block 400. 8 groups of magnetic structures are arranged on the diaphragm 600. Each magnetic structure includes a first magnet 610 and a second magnet 620. At each corresponding position of the sliding groove 440, a first magnet 610 and a second magnet 620 are provided. The first magnet 610 and the second magnet 620 are arc-shaped and are spaced apart from each other. The 8 groups of first magnets 610 and second magnets 620 respectively form a concentric circle structure. When the diaphragm head 200 presses down the diaphragm 600, except for the center position of the diaphragm 600 being pressed down by the diaphragm head 200, the 8 sliders 210 are all repelled by the corresponding first magnet 610 and second magnet 620, so that the diaphragm 600 is evenly pressed down and supported flexibly in the circumferential direction.

[0071] The verification data of the structure of this embodiment is shown in Table 1 - Table 2, Figures 10 - 11 As shown, Table 1 is the verification data of the diaphragm in the valve structure of the prior art, Figure 10 which is the relationship between the durability times of the diaphragm and the change of the CV value in the valve structure of the prior art. Table 2 is the verification data of the diaphragm in the valve structure of the embodiment of the present application, Figure 11 which is the relationship between the durability times of the diaphragm and the change of the CV value in the valve structure of the embodiment of the present application.

[0072] Table 1 Verification data of the diaphragm in the valve structure of the prior art

[0073]

[0074] Table 2 Verification data of the diaphragm in the valve structure of the embodiment of the present application

[0075]

[0076] It should be noted that although the diaphragm 600 gradually loses its elasticity with the increase of the number of uses, resulting in a decrease in the CV value. However, since the sealing ring 540 is made of PFA material, the sealing ring 540 will also lose a certain amount of elasticity as it is repeatedly squeezed by the diaphragm, resulting in an increase in the CV value. Therefore, the line chart of the above data is not monotonically decreasing.

[0077] The valve structure of this embodiment adopts a diaphragm with a large repulsive force and a slider with a repulsive force, which can keep the CV value in a good state after 17 million repetitions, especially meeting the requirements of high response speed and high durability of the valve.

[0078] Furthermore, since the diaphragm 600 has a downward repulsive force, a diaphragm 600 with greater elasticity and greater thickness can be selected to improve the response speed and extend the service life, so as to be applicable to scenarios where the diaphragm 600 may be damaged due to large flow rates.

[0079] The working principle of the valve of this application is as follows:

[0080] When the fluid hole 510 needs to be closed:

[0081] A large charging air pressure is adopted, and the pneumatic actuator 100 drives the diaphragm head 200 to move downward. While the diaphragm head 200 presses down the diaphragm 600, the diaphragm head 200 drives the slider 210 that moves horizontally along the diaphragm pressing block 400 to move horizontally through the connecting rod 220 hinged to it. The first magnet 610 and the second magnet 620 that repel the slider 210 can continuously press down the diaphragm 600, so that the diaphragm 600 is not only pressed down by the middle diaphragm head 200, but also flexibly pressed and supported uniformly in its circumferential direction. Therefore, a better diaphragm shape can be maintained, the local pressure can be reduced, and the damage to the diaphragm 600 caused by metal ductility can be reduced.

[0082] When the fluid hole 510 needs to be opened:

[0083] The pneumatic actuator 100 does not move the diaphragm head 200 downward. The pneumatic actuator 100 needs to be filled with 0.4 MPa of gas to offset the elastic force of the spring in the pneumatic actuator 100. The diaphragm 600 rebounds upward by its own elasticity, and the slider 210 also moves horizontally along the diaphragm pressing block 400 accordingly, thereby opening the fluid hole 510.

[0084] The distances between the first magnet 610 and the second magnet 620 and the slider 210 are equal at the open and closed positions to ensure a stable supporting force, prevent the diaphragm 600 from being damaged by impact during large flow rates, and always press down the diaphragm 600 uniformly to support the diaphragm 600.

[0085] In another embodiment, the slider 210 is made of a material that attracts the first magnet 610 and the second magnet 620, and the slider 210 maintains equal distances and the same attractive force when attracting the first magnet 610 and the second magnet 620 respectively, thereby improving the force uniformity on the diaphragm and extending the diaphragm life.

[0086] The usage scenarios of this embodiment can be that the diaphragm 600 is used multiple times or the elasticity of the diaphragm 600 is small.

[0087] When in the open state, the elastic force of the diaphragm 600 becomes smaller and the opening response speed decreases. Therefore, since the slider 210 is attracted to the first magnet 610 and the second magnet 620, it can be applied to scenarios with a relatively small flow rate but higher requirements for response speed and longer service life.

[0088] In this embodiment, due to the upward attraction of the diaphragm 600, scenarios with thinner, better sealing, higher requirements for service life, and faster response speed can be selected.

[0089] In another embodiment, the valve of the present application is an ALD valve with a long service life and high response speed. The structure of the ALD valve includes, in addition to the structure of the above diaphragm valve, a connecting rod 110 and a sleeve 120. The connecting rod 110 is located inside the sleeve 120, and both ends of the connecting rod 110 are respectively connected to the diaphragm head 200 of the pneumatic actuator 100. A lock nut 300 is sleeved outside the sleeve 120.

[0090] In this embodiment, the sealing ring (not shown in the figure) of the cylinder of the pneumatic actuator 100 of the ALD valve is made of FFKM material, and the sealing ring 540 of the valve body 500 is made of PFA material.

[0091] In this embodiment, the ALD valve needs to be in a high-temperature environment. Since the pneumatic actuator 100 is not resistant to high temperatures, a thermal isolation connecting rod 110 and its peripheral sleeve 120 are configured to increase the distance between the diaphragm 600 and the pneumatic actuator 100, thereby preventing the sealing ring of the pneumatic actuator 100 from failing.

[0092] The valve with a long service life and high response speed of the present invention can effectively improve the service life and response speed of the diaphragm of the diaphragm valve and the ALD valve by the repulsion or attraction between the slider and the diaphragm.

[0093] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

Claims

1. A diaphragm valve with high service life and high response speed, characterized in that, The diaphragm valve includes a pneumatic actuator (100), a diaphragm head (200) connected to the pneumatic actuator (100), a lock nut (300), a diaphragm pressing block (400), a valve body (500), and a diaphragm (600); Wherein, the diaphragm pressing block (400) is sleeved on the diaphragm head (200), the lock nut (300) is threadedly fixed to the valve body (500), the diaphragm pressing block (400) is fixed between the lock nut (300) and the valve body (500), and the diaphragm pressing block (400) and the valve body (500) cooperate to fix the diaphragm (600); The diaphragm head (200) and the diaphragm (600) are respectively provided with magnetic structures; Or, the diaphragm pressing block (400) and the diaphragm (600) are respectively provided with magnetic structures.

2. The diaphragm valve according to claim 1, wherein The diaphragm head (200) is installed with at least one sliding structure, and the sliding structure has a magnetic structure; The sliding structure includes a slider (210) and a connecting rod (220), and both ends of the connecting rod (220) are respectively hinged to the diaphragm head (200) and the slider (210); The magnetic structure provided on the diaphragm (600) is a magnet, and a first magnet (610) and a second magnet (620) are provided on the surface of the diaphragm (600); The slider (210) has a magnetic structure that repels the first magnet (610) and the second magnet (620); The diaphragm pressing block (400) is provided with at least one chute (440), the slider (210) is received in the chute (440), and the slider (210) moves laterally along the direction of the chute (440).

3. The diaphragm valve according to claim 2, wherein, The positions of the first magnet (610) and the second magnet (620) correspond to the chute (440); In the initial state and the final state of the lateral movement of the slider (210), the distances between the first magnet (610) and the second magnet (620) and the slider (210) are equal.

4. The diaphragm valve according to claim 3, characterized in that, The first magnet (610) and the second magnet (620) are respectively connected to the slider (210) by a pull rope or a mutually hinged connecting rod.

5. The diaphragm valve according to claim 4, wherein At least one connecting flange (230) is provided on the diaphragm head (200), and the connecting rod (220) is hinged to the diaphragm head (200) through the connecting flange (230).

6. The diaphragm valve according to claim 5, wherein The diaphragm pressing block (400) includes a convex portion (420) and a flat portion (430), the valve body (500) is provided with a receiving cavity (520) and an annular protrusion (530), the diaphragm (600) is disposed in the receiving cavity (520), and the edge of the diaphragm (600) is fixed in the receiving cavity (520) through the convex portion (420) and the annular protrusion (530).

7. The diaphragm valve according to claim 6, characterized in that, Eight connecting flanges (230) are arranged in a circumferential direction array on the membrane head (200), and a sliding structure is hinged to each of the connecting flanges (230); eight sliding grooves (440) are correspondingly arranged on the diaphragm pressing block (400), and a sliding structure is accommodated in each of the sliding grooves (440); first magnets (610) and second magnets (620) are arranged at corresponding positions of each of the diaphragms (600) and the sliding grooves (440), and the first magnets (610) and the second magnets (620) are arc-shaped and spaced from each other.

8. The diaphragm valve according to claim 2, wherein The slider (210) has a magnetic structure that attracts the first magnet (610) and the second magnet (620).

9. An ALD valve with high service life and high response speed, characterized in that, The ALD valve includes a connecting rod (110), a sleeve (120), and the structure of the diaphragm valve according to any one of claims 1-8 above. The connecting rod (110) is located inside the sleeve (120), and both ends of the connecting rod (110) are respectively connected to the membrane head (200) of the pneumatic actuator (100). A lock nut (300) is sleeved outside the sleeve (120). Among them, the cylinder of the pneumatic actuator (100) is provided with a sealing ring made of FFKM material, and the valve body (500) is provided with a sealing ring (540) made of PFA material.

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