Chopper and soft X-ray spectroscopy test system

Abstract

The invention relates to a chopper and a soft X-ray spectroscopy test system.The chopper comprises piezoelectric ceramics, a chopping tool bit, a support and a first flange, the piezoelectric ceramics are fixed to one end of the support, the other end of the support is fixed to the inner side of the first flange, two BNC connectors are fixed to the end, away from the piezoelectric ceramics, of the support, and each BNC connector penetrates through the first flange; a part of the BNC joint is positioned on the inner side of the first flange and a part of the BNC joint is positioned on the outer side of the first flange; the piezoelectric ceramic is provided with three electrodes, one electrode is grounded, and the other two electrodes are connected with the parts, located on the inner side of the first flange, of the two BNC connectors respectively. The parts, located on the outer side of the first flange, of the two BNC connectors are used for introducing external voltage into the piezoelectric ceramics, and the piezoelectric ceramics generate bending and straightening movement under the action of the voltage. And the chopping tool bit is fixed on the piezoelectric ceramic, responds to the bending and straightening movement of the piezoelectric ceramic, and moves in the direction perpendicular to the light path so as to cut the light.

Description

Technical Field

[0001] The present invention relates to the technical field of ultra-high vacuum devices, and more particularly to a chopper and a soft X-ray spectroscopy test system. Background Art

[0002] The chopper in ultra-high vacuum is a key device operating in an ultra-high vacuum environment, mainly used for precisely regulating the frequency and intensity of current or optical signals. Its core function is to modulate and process signals by quickly switching circuits or optical paths. With the rapid development of fields such as semiconductors, aerospace, and scientific research, the demand for choppers in ultra-high vacuum has been increasing day by day, and it has become an important tool for promoting related technological progress. In basic scientific research such as physics and chemistry, the chopper in ultra-high vacuum is widely used in scenarios such as particle accelerators and laser experiments, and its high-precision and fast-response characteristics provide reliable technical support for scientific research experiments.

[0003] When in-situ electrochemical characterization of an electrode-electrolyte or multi-electrode system is carried out using synchrotron radiation soft X-ray absorption spectroscopy (sXAS) experimental technology, a large external constant current will interfere with the effective collection of the weak total electron yield absorption spectrum current (TEY). However, the TEY current is a key signal for forming the X-ray absorption spectrum (XAS), which contains the material surface information that researchers hope to extract from the working electrode. In order to separate the weak current induced by the X-ray absorption process from the dominant Faraday current (usually 10 6 times larger than the TEY current), researchers usually chop the incident X-ray at a specific frequency ω and extract and measure the Fourier component of the signal corresponding to the frequency ω through a lock-in amplifier. Therefore, introducing a chopping system into the synchrotron radiation optical path to convert continuous synchrotron radiation light into an optical signal with a specific frequency, and then irradiating it onto the sample and converting it into a test signal, becomes a key step for achieving precise measurement.

[0004] However, traditional choppers in vacuum have problems such as large volume and the need to install the motor inside the ultra-high vacuum system, resulting in a significant increase in the volume of the device and the manufacturing and maintenance costs, and it is difficult to meet the strict requirements of synchrotron radiation beamlines for ultra-high vacuum. Summary of the Invention

[0005] The object of the present invention is to provide a chopper and a soft X-ray spectroscopy test system to solve the above problems and meet the high-precision requirements of synchrotron radiation experiments.

[0006] For the above purposes, on the one hand, the present invention provides a chopper, which includes a piezoelectric ceramic, a chopping blade head, a bracket, and a first flange. The piezoelectric ceramic is fixed at one end of the bracket, the other end of the bracket is fixed inside the first flange, and two BNC connectors are fixed at the end of the bracket far from the piezoelectric ceramic. Each BNC connector passes through the first flange, so that part of the BNC connector is inside the first flange and part is outside the first flange; the piezoelectric ceramic has three electrodes, one of which is grounded, and the other two electrodes are respectively connected to the parts of the two BNC connectors inside the first flange; the parts of the two BNC connectors outside the first flange are used to introduce an external voltage into the piezoelectric ceramic, and the piezoelectric ceramic generates a bending and straightening movement under the action of the voltage; the chopping blade head is fixed on the piezoelectric ceramic, and in response to the bending and straightening movement of the piezoelectric ceramic, the chopping blade head moves in a direction perpendicular to the optical path to cut the light.

[0007] Further, the bracket includes a first fixing frame and a base. The first fixing frame extends in a direction perpendicular to the optical path. The piezoelectric ceramic is fixed at one end of the first fixing frame, and the other end of the first fixing frame is fixed on the base. The base is fixed inside the first flange, and the two BNC connectors are fixed on the base.

[0008] Further, a receiving groove is formed inside the first flange, the base is located in the receiving groove and is fixed to the first flange through a fastener.

[0009] Further, the piezoelectric ceramic is bonded to the bracket; alternatively, a clamping mechanism is provided on the bracket, and the clamping mechanism is used to clamp the piezoelectric ceramic.

[0010] Further, the chopping blade head is bonded to the piezoelectric ceramic.

[0011] Further, a linear driving mechanism is further included. The linear driving mechanism is connected to the first flange and is used to drive the first flange to move in a direction perpendicular to the optical path.

[0012] Further, the linear drive mechanism includes a rotating mechanism, a transmission mechanism, a base, a moving frame, and a corrugated pipe. The rotating mechanism is connected to the transmission mechanism. The transmission mechanism is respectively connected to the base and the moving frame. The base and the moving frame are oppositely arranged along a direction perpendicular to the optical path. A first flange port is provided on the base, and a second flange port is provided on the moving frame. The first flange port and the second flange port are aligned along a direction perpendicular to the optical path. One end of the corrugated pipe is fixed to the base and aligned with the first flange port. The base is fixed to the vacuum pipe through the second flange port. The first flange is fixed to the first flange port. The first fixing frame passes through the moving frame, the corrugated pipe, and the second flange port and then extends into the vacuum pipe. The rotating mechanism is used for rotation, and the transmission mechanism is used to convert the rotation of the rotating mechanism into the movement of the moving frame relative to the base along a direction perpendicular to the optical path. The movement of the moving frame causes the corrugated pipe and the first flange to move along a direction perpendicular to the optical path.

[0013] Further, the material of the chopping blade head is carbon fiber, polyether ether ketone, ultra-thin metal sheet or mica sheet.

[0014] On the other hand, the present invention provides a soft X-ray spectroscopy test system, which includes a gold mesh, an electrochemical cell, an electrochemical workstation, a waveform generator, a first current-voltage conversion device, a first lock-in amplifier, a second current-voltage conversion device, a second lock-in amplifier, a host computer, and the chopper as described above. A sample is provided in the electrochemical cell, and the electrochemical workstation is connected to the electrochemical cell. The chopper, the gold mesh, and the sample are sequentially arranged along the soft X-ray transmission direction. The waveform generator is connected to two BNC connectors of the chopper and is used to generate a control signal and transmit the control signal to the piezoelectric ceramic of the chopper. The gold mesh is connected to the first current-voltage conversion device, and the first lock-in amplifier is connected to the first current-voltage conversion device and the waveform generator. The sample is connected to the second current-voltage conversion device, the second lock-in amplifier is connected to the second current-voltage conversion device and the waveform generator, and the host computer is connected to the first lock-in amplifier and the second lock-in amplifier.

[0015] Further, the control signal is a sine wave or square wave signal.

[0016] In the soft X-ray spectroscopy test system of the present invention, the continuous optical signal is changed into an alternating optical signal by using the chopper in the above embodiment, and then the tiny current generated by photoexcitation is separated from the external current by using the lock-in amplification device, so as to realize the accurate measurement of the photoexcitation current. Description of the Drawings

[0017] Figure 1Schematic structural diagram of a chopper according to an embodiment of the present invention;

[0018] Figure 2 Schematic bottom view of a chopper according to an embodiment of the present invention;

[0019] Figure 3 Schematic structural diagram of a chopper after removing the first flange according to an embodiment of the present invention;

[0020] Figure 4 Schematic structural diagram of another view of a chopper after removing the first flange according to an embodiment of the present invention;

[0021] Figure 5 Schematic structural diagram of a chopper with a linear drive mechanism according to an embodiment of the present invention;

[0022] Figure 6 For Figure 5 Schematic structural diagram of the chopper installed on a four-way interface;

[0023] Figure 7 Schematic block diagram of a soft X-ray spectroscopy test system according to an embodiment of the present invention;

[0024] Figure 8 Total electron yield absorption spectrum of element F measured without using a chopper;

[0025] Figure 9 Total electron yield absorption spectrum of element F measured after using a chopper. Specific embodiments

[0026] The following combines the accompanying drawings to give a preferred embodiment of the present invention and describes it in detail.

[0027] As Figure 1 、 Figure 2 、 Figure 3 And Figure 4As shown in the figure, an embodiment of the present invention provides a chopper 100, which includes a piezoelectric ceramic 110, a chopping tool head 120, a bracket 130, and a first flange 140. The piezoelectric ceramic 110 is fixed to the first end of the bracket 130, the second end of the bracket 130 is fixed to the inner side of the first flange 140, and two BNC connectors (bayonet nut connectors) 150 are provided on the second end of the bracket 130. At least a part of the two BNC connectors 150 passes through the first flange 140 and extends to the outside of the first flange 140 (that is, part of the BNC connector 150 is located inside the first flange 140, and part is located outside the first flange 140); the piezoelectric ceramic 110 has three electrodes 111, one of the three electrodes 111 is grounded, and the other two are respectively electrically connected to the parts of the two BNC connectors 150 located inside the first flange 140 (for example, the electrical connection can be achieved through wires). The parts of the two BNC connectors 150 located outside the first flange 140 are used to be connected to an external controller, so that the external controller applies a voltage to the piezoelectric ceramic 110 through the two BNC connectors 150. Under the action of the voltage, the piezoelectric ceramic 110 will generate a bending and straightening movement. The chopping tool head 120 is fixed to the piezoelectric ceramic 110. When the piezoelectric ceramic 110 generates a bending and straightening movement, the chopping tool head 120 will move up and down in a direction perpendicular to the optical path to cut the light. For the convenience of understanding, in Figure 1 the optical path direction is represented by the Y direction, and the direction perpendicular to the optical path is represented by the Z direction.

[0028] The piezoelectric ceramic 110 can adopt an existing bending type piezoelectric ceramic, which is usually composed of two layers of piezoelectric ceramic sheets bonded together. The polarization directions of the two layers of piezoelectric ceramic sheets are the same or opposite. When an electric field is applied, one layer expands and the other layer contracts, resulting in overall bending.

[0029] In some embodiments, the bracket 130 includes a first fixing frame 131 and a base 132. The first fixing frame 131 extends along the Z direction. The piezoelectric ceramic 110 is fixed to one end of the first fixing frame 131, and the other end of the first fixing frame 131 is fixed to the base 132. The two BNC connectors 150 are also fixed to the base 132, and the base 132 is fixed to the inner side of the first flange 140.

[0030] In some embodiments, a receiving groove can be opened on the inner side of the first flange 140 for receiving the base 132. The base 132 is located in the receiving groove and is fixed to the first flange 140 through fasteners (such as screws).

[0031] In some embodiments, the piezoelectric ceramic 110 can be fixed on the bracket 130 by an ultra-high vacuum adhesive. Alternatively, a clamping mechanism can be provided on the bracket 130, and the clamping mechanism is used to clamp the piezoelectric ceramic 110 so as to fix it on the bracket 130. The clamping mechanism can include two fastening screws 133. The two fastening screws 133 are fixed on the first fixing frame 131 and are arranged oppositely. One end of the piezoelectric ceramic 110 is clamped between the two fastening screws 133 to achieve fixation, and the chopping tool head 120 is fixed at the end of the piezoelectric ceramic 110 far from the two fastening screws 133.

[0032] In some embodiments, the chopping tool head 120 can be bonded to the piezoelectric ceramic 110 by an ultra-high vacuum adhesive. In this way, when the piezoelectric ceramic 110 performs bending and straightening movements, the chopping tool head 120 will move up and down in the Z direction. The chopping tool head 120 can be made of lightweight materials, such as carbon fiber, polyether ether ketone (PEEK), ultra-thin metal sheet or mica sheet, etc. These materials not only have excellent lightweight characteristics, but also have good light irradiation resistance, and can meet the use requirements in the ultra-high vacuum environment. The movement range of the chopping tool head 120 can be selected according to the performance of the piezoelectric ceramic 110. For example, it can be adjusted between 0 and 1000 μm, and the working frequency can be between 0 and 2000 Hz.

[0033] Thanks to the compact structural design, the chopper 100 can be directly installed on a vacuum pipeline for transmitting light (such as soft X-rays) through the first flange 140, that is, the first flange 140 is directly connected to the flange opening of the vacuum pipeline (which is adapted to the first flange). The bracket 130, the piezoelectric ceramic 110, and the chopping tool head 120 extend into the vacuum pipeline, and part of the BNC connector 150 is located outside the vacuum pipeline, which is convenient for leading out the electrodes of the piezoelectric ceramic 110 from the vacuum pipeline. In this way, not only the installation space is significantly saved, but also the system cost is reduced.

[0034] As Figure 5As shown, the chopper 100 further includes a linear drive mechanism 160. The linear drive mechanism 160 is connected to the first flange 140 and is used to drive the first flange 140 to move in the Z direction, thereby adjusting the Z-direction position of the chopping blade head 120 to achieve precise beam cutting. The linear drive mechanism 160 includes a rotating mechanism 161, a transmission mechanism 162, a base 163, a moving frame 164, and a bellows 165. The rotating mechanism 161 is connected to the transmission mechanism 162, and the transmission mechanism 162 is connected to the base 163 and the moving frame 164. The base 163 and the moving frame 164 are arranged opposite to each other in a direction perpendicular to the optical path. A first flange opening is provided on the base 163, and a second flange opening 166 is provided on the moving frame 164. The first flange opening and the second flange opening are aligned in a direction perpendicular to the optical path. One end of the bellows 165 is fixed to the base 163 and aligned (and sealed) with the first flange opening, and the other end of the bellows 165 is fixed to the moving frame 164 and aligned (and sealed) with the second flange opening 166; the base 163 is used to be fixed to the vacuum pipeline, the first flange 140 is fixed to the first flange opening, and the first fixing frame 131 extends into the vacuum pipeline after passing through the moving frame 164, the bellows 165, and the second flange opening 166, so that the chopping blade head 120 and the piezoelectric ceramic 110 are located inside the vacuum pipeline; the rotating mechanism 161 is used for rotation, the transmission mechanism 162 is used to convert the rotation of the rotating mechanism 161 into the movement of the moving frame 164 relative to the base 163 in a direction perpendicular to the optical path, and the movement of the moving frame 164 causes the bellows 165 and the first flange 140 to also move in a direction perpendicular to the optical path. In this way, the chopping blade head 120 and the piezoelectric ceramic 110 will also move in a direction perpendicular to the optical path, thereby adjusting the Z-direction position of the chopping blade head 120; the bellows 165 always seals the first flange opening and the second flange opening 166 during the movement process, thereby preventing the vacuum degree inside the vacuum pipeline from being damaged. The rotating mechanism 161 can be a motor or a manual rocker to achieve electric or manual rotation; the transmission mechanism 162 can be a lead screw. One end of the lead screw is fixed to the base 163 and extends in the Z direction. The moving frame 164 is threadedly connected to the lead screw and forms a ball screw structure. When the rotating mechanism 161 rotates electrically or manually, it will drive the lead screw to rotate, and the rotation of the lead screw causes the moving frame 164 to move in the Z direction. The linear drive mechanism 160 may further include a guide post 167 arranged in the Z direction. One end of the guide post 167 is fixed to the base 163, and the other end passes through the moving frame 164. The moving frame 164 is slidably connected to the guide post 167. A scale may be provided on the guide post 167 for marking the Z-direction movement amount of the moving frame 164.

[0035] As Figure 6 shown, the chopper 100 with the linear drive mechanism 160 can be directly installed on the four-way interface 170 of the vacuum pipeline. Specifically, the second flange opening 166 can be directly fixed to the third flange opening 171 of the four-way interface 170.

[0036] The chopper 100 according to the embodiment of the present invention can be applied in an ultra-high vacuum. The chopping blade head 120 is moved by the piezoelectric ceramic 110 to achieve light chopping, which can significantly reduce the volume and manufacturing cost of the chopper 100. Since the vibration amplitude of the piezoelectric ceramic 110 is tiny and there is no need to install a vacuum motor inside, the vacuum degree of the system can be greatly improved. When a fault occurs, only the piezoelectric ceramic 110 needs to be replaced, which greatly simplifies the maintenance process and reduces the maintenance cost compared with the complex maintenance of the motor and chopping blade in the prior art. The chopper 100 can be directly integrated on the vacuum pipeline, which not only significantly saves the installation space but also reduces the system cost.

[0037] Such as Figure 7As shown in the figure, an embodiment of the present invention further provides a soft X-ray spectroscopy test system, which includes a chopper 100, a gold mesh 200, an electrochemical cell 310, an electrochemical workstation 320, a waveform generator 400, a first current-voltage conversion device 510, a first lock-in amplifier 520, a second current-voltage conversion device 610, a second lock-in amplifier 620, and a host computer 700. A sample is provided in the electrochemical cell 310, and the sample undergoes electrochemical testing in the electrochemical cell 310. The electrochemical workstation 320 is electrically connected to the reference electrode, counter electrode, and working electrode in the electrochemical cell 310, and is used to accurately apply the required current or voltage to control the electrochemical environment of the electrochemical cell 310. The chopper 100, the gold mesh 200, and the sample are arranged in sequence along the soft X-ray transmission direction. The waveform generator 400 is electrically connected to the two BNC connectors 150 of the chopper 100, and is used to generate a sine wave or square wave control signal with a fixed frequency and voltage amplitude, and transmit it to the piezoelectric ceramic 110, so as to control the vibration frequency and amplitude of the piezoelectric ceramic 110 through this control signal, so that the chopper 100 modulates the synchrotron radiation soft X-ray monochromatic light passing through it into an alternating light signal in the form of a sine wave or square wave. The specific structure of the chopper 100 can refer to the description of the above embodiment, and will not be elaborated here. The gold mesh 200 is connected to the first current-voltage conversion device 510, the first lock-in amplifier 520 is connected to the first current-voltage conversion device 510 and the waveform generator 400, the second current-voltage conversion device 610 is connected to the sample, the second lock-in amplifier 620 is connected to the second current-voltage conversion device 610 and the waveform generator 400, and the host computer 700 is respectively connected to the first lock-in amplifier 520 and the second lock-in amplifier 620. After the alternating light signal irradiates on the gold mesh 200 and the sample, a first current signal will be generated on the gold mesh 200, and a second current signal will be generated on the sample. The first current-voltage conversion device 510 is used to convert the first current signal into a first voltage signal. The first lock-in amplifier 520 will receive the control signal of the waveform generator 400, and screen the frequency and phase of the first voltage signal according to the control signal, so as to output a voltage signal with the same frequency and phase as the control signal as the first output signal. The second current-voltage conversion device 610 is used to convert the second current signal into a second voltage signal. The second lock-in amplifier 620 will receive the control signal of the waveform generator 400, and screen the frequency and phase of the second voltage signal according to the control signal, so as to output a voltage signal with the same frequency and phase as the control signal as the second output signal. The host computer 700 is used to collect the first output signal and the second output signal, and obtain the total electron yield absorption spectrum of the sample according to the first output signal and the second output signal.

[0038] In some embodiments, the piezoelectric ceramic 110 comes with a built-in controller. The control signal of the waveform generator 400 (signal range: 0 - 10V) is input into the built-in controller of the piezoelectric ceramic 110, and then the built-in controller amplifies the control signal to the range of -60V to 60V. The bending direction of the piezoelectric ceramic 110 can be controlled by the positive and negative polarities of the voltage, and the vibration amplitude can be adjusted by the magnitude of the voltage. The vibration frequency can be adjusted by the frequency of the control signal.

[0039] Both the first lock-in amplifier 520 and the second lock-in amplifier 620 can adopt existing lock-in amplifiers. A lock-in amplifier includes a signal input channel, a reference signal input channel, a phase-sensitive detector, a low-pass filter, an oscillator, a control and display unit, etc. In the embodiments of the present invention, the control signal of the waveform generator 400 is input into the reference signal input channel of the lock-in amplifier, and at the same time, the real signal to be measured (the first or second voltage signal) is connected to the signal input channel. When the chopper 100 starts to operate, the chopped photo-induced signal enters the lock-in amplifier through the signal input channel. At this time, the lock-in amplifier will display the phase difference between the input signal and the reference signal and the intensity of the output signal after phase locking. By adjusting the phase inside the lock-in amplifier, the phases of the input signal and the reference signal are calibrated to be basically the same. When the phase difference is close to zero and the output signal reaches the strongest, it indicates that the phase locking is successful.

[0040] In the soft X-ray spectroscopy test system of the embodiments of the present invention, the current signal can be converted into a voltage signal through a current-voltage conversion device, and the noise interference brought by low-frequency vibration can be effectively filtered out. By using the lock-in amplification technology, an effective signal with the same frequency and phase as the reference signal can be extracted from the constant-current background, so as to realize the accurate measurement of the total electron yield absorption spectrum. In the soft X-ray spectroscopy test system of the embodiments of the present invention, the continuous optical signal is changed into an alternating optical signal by using the chopper in the above embodiments, and then the tiny current generated by photoexcitation is separated from the external current by using a lock-in amplification device to realize the accurate measurement of the photoexcitation current.

[0041] To verify the effect of the chopper 100, the K absorption edge of the F (fluorine) element in the electrolyte Zn(TFSI)2 was measured by using the soft X-ray spectroscopy test system of the embodiments of the present invention. In the two-electrode system, the electrodes are Pt (platinum) and Zn (zinc). When the chopper 100 is not enabled, as Figure 8 shown, due to a strong external current interference superimposed on the sample, the TEY spectrum is almost a straight line and the required signal cannot be detected; however, when the chopper 100 is enabled, as Figure 9 shown, even under the condition of applying an electric field, the required current signal can be successfully measured.

[0042] The above are only the preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various changes can be made to the above embodiments of the present invention. That is, all simple, equivalent changes and modifications made in accordance with the claims and the content of the specification of the present invention application fall within the scope of protection of the claims of the present invention patent. Those not described in detail in the present invention are all conventional technical contents.

Claims

1. A chopper, characterized in that, It includes a piezoelectric ceramic, a chopping tool head, a bracket and a first flange. The piezoelectric ceramic is fixed at one end of the bracket, and the other end of the bracket is fixed inside the first flange. Two BNC connectors are fixed at the end of the bracket away from the piezoelectric ceramic. Each BNC connector passes through the first flange, so that part of the BNC connector is inside the first flange and part is outside the first flange; the piezoelectric ceramic has three electrodes, one of which is grounded, and the other two electrodes are respectively connected to the parts of the two BNC connectors inside the first flange; the parts of the two BNC connectors outside the first flange are used to introduce an external voltage into the piezoelectric ceramic, and the piezoelectric ceramic generates a bending and straightening movement under the action of the voltage; the chopping tool head is fixed on the piezoelectric ceramic, and in response to the bending and straightening movement of the piezoelectric ceramic, the chopping tool head moves in a direction perpendicular to the optical path to cut the light.

2. The chopper according to claim 1, characterized in that, The bracket includes a first fixing frame and a base. The first fixing frame extends in a direction perpendicular to the optical path. The piezoelectric ceramic is fixed at one end of the first fixing frame, and the other end of the first fixing frame is fixed on the base. The base is fixed inside the first flange, and two BNC connectors are fixed on the base.

3. The chopper according to claim 2, characterized in that, A receiving groove is provided inside the first flange. The base is located in the receiving groove and is fixed to the first flange by a fastener.

4. The chopper according to claim 1, characterized in that, The piezoelectric ceramic is bonded to the bracket; or, a clamping mechanism is provided on the bracket, and the clamping mechanism is used to clamp the piezoelectric ceramic.

5. The chopper according to claim 1, characterized in that The chopping tool head is bonded to the piezoelectric ceramic.

6. The chopper according to claim 2, characterized in that, It further includes a linear driving mechanism. The linear driving mechanism is connected to the first flange and is used to drive the first flange to move in a direction perpendicular to the optical path.

7. The chopper according to claim 6, characterized in that, The linear driving mechanism includes a rotating mechanism, a transmission mechanism, a base, a moving frame and a bellows. The rotating mechanism is connected to the transmission mechanism. The transmission mechanism is respectively connected to the base and the moving frame. The base and the moving frame are arranged opposite to each other in a direction perpendicular to the optical path. A first flange opening is provided on the base, and a second flange opening is provided on the moving frame. The first flange opening and the second flange opening are aligned in a direction perpendicular to the optical path. One end of the bellows is fixed to the base and is aligned with the first flange opening. The base is fixed to a vacuum pipeline through the second flange opening. The first flange is fixed to the first flange opening. The first fixing frame passes through the moving frame, the bellows and the second flange opening and then extends into the vacuum pipeline; the rotating mechanism is used for rotation, the transmission mechanism is used to convert the rotation of the rotating mechanism into the movement of the moving frame relative to the base in a direction perpendicular to the optical path, and the movement of the moving frame causes the bellows and the first flange to move in a direction perpendicular to the optical path.

8. The chopper according to claim 1, wherein The material of the chopping tool head is carbon fiber, polyether ether ketone, ultra-thin metal sheet or mica sheet.

9. A soft X-ray spectroscopy test system, characterized in that, It includes a gold mesh, an electrochemical cell, an electrochemical workstation, a waveform generator, a first current-voltage conversion device, a first lock-in amplifier, a second current-voltage conversion device, a second lock-in amplifier, a host computer and a chopper as described in any one of claims 1-8. A sample is provided in the electrochemical cell, and the electrochemical workstation is connected to the electrochemical cell; the chopper, the gold mesh and the sample are arranged in sequence along the soft X-ray transmission direction. The waveform generator is connected to two BNC connectors of the chopper for generating a control signal and transmitting the control signal to the piezoelectric ceramic of the chopper; the gold mesh is connected to the first current-voltage conversion device, and the first lock-in amplifier is connected to the first current-voltage conversion device and the waveform generator; the sample is connected to the second current-voltage conversion device, the second lock-in amplifier is connected to the second current-voltage conversion device and the waveform generator, and the host computer is connected to the first lock-in amplifier and the second lock-in amplifier.

10. The soft X-ray spectroscopy test system according to claim 9, wherein The control signal is a sine wave or square wave signal.

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