Holder, holder assembly, semiconductor processing system, and method of manufacturing holder assembly

Abstract

A bracket includes a bracket body having a base portion, first and second slotted portions, and a flange portion. The base portion defines a bracket axis. The first slotted portion and the second slotted portion are laterally offset from the base portion of the bracket body. The second slotted portion is further axially separated from the first slotted portion by the base portion of the stent body. The flange portion of the bracket body extends laterally the base portion of the bracket body in an opposite direction to the first and second slotted portions of the bracket body. The flange portion of the bracket body further extends parallel to the bracket axis to constrain a deflection angle of an interlock switch disposed on the bracket body relative to the bracket axis. Stent assemblies, mechanical devices, semiconductor processing systems, and related methods of manufacturing the stent assemblies are also described.

Description

Technical Field

[0001] The present disclosure generally relates to securing a part within an assembly, and more particularly to a bracket for securing a part within an assembly. Background Art

[0002] Brackets are commonly used to secure parts within a larger assembly, such as to support an interlock switch that protects personnel approaching potentially dangerous machinery. The bracket typically supports the interlock switch relative to an access panel or door such that when the access panel is removed or the door is opened, the machinery behind the access panel or door is inoperable. This generally limits the risk to personnel who may approach the potentially dangerous machinery during operation of the machinery.

[0003] In some installations, the interlock switch may be displaced, thereby limiting (or preventing) the interlock switch from sensing the position of the access panel or door. For example, when the interlock switch becomes loose and / or is bumped due to vibrations in the installation environment, the interlock switch may prevent operation of the machinery even though the access panel is properly positioned or the door is closed. Such unwanted tripping may unnecessarily prevent operation of the machinery and / or desensitize personnel to tripping events.

[0004] Such systems and methods are generally considered suitable for their intended purposes. However, there is still a need in the art for improved brackets, bracket assemblies, mechanical devices including brackets and bracket assemblies, and methods of manufacturing bracket assemblies. The present disclosure provides a solution to this need. Summary of the Invention

[0005] A bracket is provided. The bracket includes a bracket body having a base portion, a first slotted portion, a second slotted portion, and a flange portion. The base portion defines a bracket axis. The first slotted portion is laterally offset from the base portion of the bracket body. The second slotted portion is also laterally offset from the base portion and is axially separated from the first slotted portion by the base portion of the bracket body. The flange portion of the bracket body laterally extends the base portion of the bracket body in a direction opposite to the first slotted portion and the second slotted portion of the bracket body. The flange portion of the bracket body further extends parallel to the bracket axis to constrain the deflection angle of an interlock switch disposed on the bracket body relative to the bracket axis.

[0006] In addition to one or more of the above features, or alternatively, further examples of the bracket may include that the flange portion is a first flange portion and the bracket body has a second flange portion. The second flange portion may be separated from the first flange portion by the bracket axis. The second flange portion may be substantially parallel to the first flange portion.

[0007] In addition to one or more of the above features, or alternatively, another example of the bracket may include a base portion defining a base fixing hole therethrough. The base fixing hole may be axially offset from the first flange portion and the second flange portion along the bracket axis.

[0008] In addition to one or more of the above features, or alternatively, another example of the bracket may include a first slotted portion defining a pair of slots therethrough. The slots in the pair of slots may be axially offset from the first flange portion and the second flange portion of the bracket body along the bracket axis. The slots in the first pair of slots may be substantially orthogonal to the bracket axis defined by the base portion of the bracket body.

[0009] In addition to one or more of the above features, or alternatively, another example of the bracket may include a pin member fixed to the base portion of the bracket body. The pin member may extend from the base portion of the bracket body in a direction opposite to both the first slotted portion and the second slotted portion of the bracket body.

[0010] In addition to one or more of the above features, or alternatively, another example of the bracket may include a pin member separating the flange portion from the bracket axis. The pin member may separate the second flange portion from the first flange portion.

[0011] In addition to one or more of the above features, or alternatively, another example of the bracket may include that the pin member is a first pin member, and the bracket includes a second pin member. The second pin member may be fixed to the base portion. The second pin member may extend from the base portion in a direction opposite to both the first slotted portion and the second slotted portion of the bracket body. The second pin member may be separated from the first pin member by the bracket axis.

[0012] In addition to one or more of the above features, or alternatively, another example of the bracket may include that the second slotted portion of the bracket body defines a single slot therethrough. The single slot may be substantially orthogonal to the bracket axis. The first slotted portion may define a pair of slots therethrough, and the slots in the pair of slots may be substantially orthogonal to the bracket axis.

[0013] In addition to one or more of the above features, or alternatively, another example may include that the bracket body is formed of sheet metal material.

[0014] A bracket assembly is provided. The bracket assembly includes the bracket as described, wherein the bracket body is formed of sheet metal material. The interlock switch extends parallel to the flange portion of the bracket body, the piercing fastener is disposed in the base portion of the bracket body and fixes the interlock switch to the base portion of the bracket body, and the first pin member and the second pin member are disposed in the base portion of the bracket body and fix the interlock switch at a deflection angle relative to the bracket axis.

[0015] In addition to one or more of the above features, or alternatively, another example of a bracket assembly may include an interlocking circuit lead having a bayonet connector fixed to an interlocking switch. The bayonet connector may extend axially along the bracket axis and cover a first slotted portion of the bracket body.

[0016] In addition to one or more of the above features, or alternatively, another example of a bracket assembly may include that the interlocking switch has an interlocking member receiving portion. The interlocking member receiving portion may cover a base portion of the bracket body. The bracket assembly further includes an interlocking member that is movably supported relative to the interlocking switch and is received within the interlocking member receiving portion.

[0017] In addition to one or more of the above features, or alternatively, another example of a bracket assembly may include an interlocking circuit electrically connected to the interlocking switch. The interlocking switch may be configured to electrically disconnect when the interlocking member is displaced from an interlocking member receiving position defined within the housing of the interlocking switch.

[0018] In addition to one or more of the above features, or alternatively, another example of a bracket assembly may include a lock nut. The lock nut may be tethered between the piercing fastener and the base portion of the bracket body. The bracket assembly may include an elastic member. The elastic member formed of an elastic material is tethered between the piercing fastener and the interlocking switch.

[0019] A semiconductor processing system is provided. The semiconductor processing system includes a housing that includes a frame member and an access panel or door removably fixed relative to the frame member. A processing module is disposed within the housing, and a bracket as described above is fixed to the frame member of the housing. An interlocking switch is disposed within the housing and fixed to the bracket, and an interlocking circuit is electrically connected to the interlocking switch. The interlocking switch is configured to electrically close the interlocking circuit when the access panel or door is fixed to the frame member. The interlocking switch is configured to electrically disconnect the interlocking circuit when the access panel or door is displaced from the frame.

[0020] A method of manufacturing a bracket assembly is provided. The method includes forming a bracket that includes a bracket body having a base portion defining a bracket axis, a first slotted portion laterally offset from the base portion of the bracket body, a second slotted portion laterally offset from the base portion and axially separated from the first slotted portion by the base portion of the bracket body, and a flange portion extending from the base portion and parallel to the bracket axis. An interlocking switch is disposed on the base portion of the bracket body, and the deflection angle of the interlocking switch relative to the bracket axis is constrained by the flange portion of the bracket body.

[0021] In addition to one or more of the above features, or alternatively, further examples of the method may include connecting an interlock circuit lead to an interlock switch and securing a bracket to a frame member of a housing that houses a machine in a mechanical device. Forming the bracket may further include separating the natural frequency of the bracket assembly from an excitation frequency or range of excitation frequencies associated with the operation of the machine housed within the housing that includes the bracket assembly secured to the bracket member.

[0022] In addition to one or more of the above features, or alternatively, further examples of the method may include: securing one or more pin members to a base portion of a bracket body; slidably receiving the one or more pin members within an interlock switch; and using the one or more pin members to further constrain a deflection angle of the interlock switch relative to a bracket axis.

[0023] In addition to one or more of the above features, or alternatively, further examples of the method may include positioning an interlock switch on a base portion of a bracket body including securing the interlock switch to the base portion of the bracket body with one or more vibration counteracting structures.

[0024] In addition to one or more of the above features, or alternatively, further examples of the method may include positioning an interlock switch on a base portion of a bracket body further including: (a) securing a housing of the interlock switch to the base portion of the bracket body adjacent to a flange portion of the bracket body, or (b) securing the housing of the interlock switch to the base portion of the bracket body such that a gap is defined therebetween by the housing and the flange portion.

[0025] The present invention content is provided to introduce a selection of concepts in a simplified form. These concepts are further described in detail in the following detailed description of examples of the present disclosure. The present invention content is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The following describes these and other features, aspects, and advantages of the present invention disclosed herein with reference to the drawings of certain embodiments, which are intended to illustrate rather than limit the present invention.

[0027] Figure 1 is a schematic view of a mechanical device including a bracket assembly according to the present disclosure, showing a bracket supporting an interlock switch relative to an access panel or door of a housing;

[0028] Figure 2 is according to an example of the present disclosure Figure 1 side view of a bracket assembly of, showing an interlock switch assembled to a bracket body adjacent to a flange portion of the bracket body and connected to an interlock circuit by an interlock circuit lead;

[0029] Figure 3 is of a bracket assembly according to an example of the present disclosure Figure 1 exploded view, showing the interlock switch and pin members of the bracket assembly separated from the bracket;

[0030] Figure 4 and Figure 5 is of a portion of a bracket assembly according to an example of the present disclosure Figure 1 and perspective and plan views of the bracket assembly, showing the placement of the pin members and interlock switch relative to the flange portion of the bracket; and

[0031] Figures 6 to 8 is a block diagram of manufacturing a bracket assembly according to an example of the present disclosure Figure 1 of the bracket assembly, showing the operations of a method according to illustrative and non - limiting examples of the method.

[0032] It should be understood that the elements in the drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the relative sizes of some elements in the drawings may be exaggerated relative to other elements to help improve the understanding of the illustrated embodiments of the present disclosure. DETAILED DESCRIPTION

[0033] Reference will now be made to the drawings, in which like reference numerals identify similar structural features or aspects of the subject disclosure. For purposes of explanation and illustration, and not limitation, a partial view of an example of a mechanical device including a bracket assembly having a bracket is shown in Figure 1 and is generally designated by reference numeral 100. Other examples or aspects of the bracket, bracket assembly, and mechanical device including a bracket assembly having a bracket, and related methods of manufacturing the bracket assembly and mechanical device are provided in Figures 2 - 8 as will be described. The systems and methods of the present disclosure can be used to support an interlock switch relative to an access panel and / or door within a housing that houses a machine, such as in a semiconductor processing system, which can be potentially dangerous to personnel approaching the semiconductor processing system during operation, but the present disclosure is generally not limited to semiconductor processing systems or to supporting interlock switches.

[0034] Reference Figure 1, shows a mechanical device 10. The mechanical device 10 includes a machine 12, a housing 14 having an access panel or door 16, and a bracket assembly 200 including a bracket 100. The machine 12 is housed within the housing 14, separated from the external environment 2 outside the housing 14, and is accessible from the external environment 2 by removing (or opening) the access panel or door 16. The access panel or door 16 is removably fixed to a frame member 18 of the housing 14 and is configured to be removed from or displaced relative to the frame member 18 of the housing 14 that supports the access panel or door 16. The bracket assembly 200 includes an interlock switch 202 that is disposed on the bracket 100 and coupled to the housing 14 thereby. It is contemplated that the interlock switch 202 cooperates with an interlock circuit 20 to prevent (or stop) the operation of the machine 12 when the access panel or door 16 is removed (or opened) from the housing 14. In some examples, the mechanical device 10 may include a semiconductor processing system. In such an example, the machine 12 may include one or more of a substrate handling robot and / or a processing module. Examples of processing modules include processes configured for material layer deposition, etching, polishing, and lithography.

[0035] Reference Figure 2 , shows the bracket assembly 200. The bracket assembly 200 generally includes a bracket 100 and an interlock switch 202. The bracket 100 is configured to couple the interlock switch 202 to the housing 14 ( Figure 1 shown) by, for example, supporting a frame member 18 of the access panel or door 16 ( Figure 1 shown). The interlock switch 202 is configured to safely interlock the access panel or door 16 when placed or in a closed position 28 relative to the frame member 18 and is electrically connected to the interlock circuit 20 ( Figure 1 shown) in this regard by an interlock circuit lead 24. The electrical connection may be through a connector 210, which may be a bayonet connector. The connector 210 may axially extend along a bracket axis defined by a bracket body 102 of the bracket 100. The connector 210 may further cover a first slotted portion 108 of the bracket body 102.

[0036] It is contemplated that the interlock switch 202 is configured to house an interlock member 26 therein. When the access panel or door 16 is in a closed position 30 ( Figure 1 shown), the interlock member 26 may be carried by (or fixed relative to) the access panel or door 16 and housed within the interlock switch 202, and in this regard, the interlock member 26 defines an interlock member receiving portion 216 therein, and the interlock member receiving portion 216 is configured to house the interlock member therein when the access panel or door 16 is in the closed position 30. As will be understood by those skilled in the art in view of the present disclosure, other types of interlock switches (such as electromagnetically and / or optically coupled interlock switches) may be coupled to the housing 14 and remain within the scope of the present disclosure.

[0037] Reference Figure 3 , the support assembly 200 is shown in an exploded view. The interlock switch 202 is configured to provide an indication of whether the access panel or door 16 ( Figure 1 as shown) has been removed or is secured against the frame member 18 ( Figure 1 as shown), and in this regard includes a housing 206, switch circuit elements 208 ( Figure 2 as shown) and an electrical connector 210 ( Figure 2 as shown). The switch circuit elements 208 are disposed within the interior 212 ( Figure 2 as shown) of the housing 206, and are coupled to the electrical connector 210 by switch leads 214 ( Figure 2 as shown), which are also disposed within the interior 212 of the housing 206. The electrical connector 210 is secured to the housing 206, projects from an axial end face of the housing 206, and is configured to electrically couple the switch leads 214 to the interlock circuit leads 24 ( Figure 2 as shown) and thereby to the interlock circuit 20 ( Figure 1 as shown). In this regard, the electrical connector 210 may be threaded and / or include bayonet-type features to secure the corresponding connector of the interlock circuit leads 24 to the interlock switch 202.

[0038] The housing 206 of the interlock switch 202 defines an interlock member receiving portion 216 within an outer face of the housing 206. The interlock member receiving portion 216 is configured to receive an interlock member 26 therein. The interlock member 26 is in turn carried by the access panel or door 16 ( Figure 1 as shown), and is movable relative to the frame member 18 with the access panel or door 16 between an access panel or door first position 28 ( Figure 1 as shown) and an access panel or door second position 30 ( Figure 1 as shown). It is contemplated that when the access panel or door 16 is in the access panel or door first position 28, the interlock member 26 is received within the interlock member receiving portion 216, the interlock member 26 mechanically engages the switch circuit elements 208 ( Figure 2 as shown) and electrically closes the interlock circuit 20 ( Figure 1 as shown). It is also contemplated that when the access panel or door 16 is displaced, e.g., when the access panel or door 16 is in the access panel or door second position 30, the interlock member 26 disengages the switch circuit elements 208, the interlock member 26 is thereby removed from the interlock member receiving portion 216 in this case, and the interlock circuit 20 is thereby electrically opened. Examples of suitable interlock switches include Cadet TM 3-pole interlock switches, which are available from Rockwell Automation, Inc. of Milwaukee, Wisconsin.

[0039] As those skilled in the art will appreciate in view of the present disclosure, when the switch circuit element 208 is electrically closed due to the service panel or door 16 being placed on the housing 14 ( Figure 1 as shown) when in the service panel or door first position 28, the interlock circuit 20 may permit the operation of the machine 12 ( Figure 1 as shown), and the machine 12 is thus in a safe condition for operation; and when the switch circuit element 208 is electrically opened due to the service panel or door 16 having been moved to the service panel or door second position 30, such as when the machine is being repaired or maintained, the interlock circuit 20 may not permit the operation of the machine 12, thereby preventing the operation of the machine 12 from injuring personnel who may be near the machine 12 during a repair or maintenance event. As those skilled in the art will also appreciate in view of the present disclosure, the displacement of the interlock switch 202 relative to the frame member 18 ( Figure 1 as shown) may limit the reliability of the interlock circuit 20 ( Figure 1 as shown). For example, in some machines, the interlock switch may be displaced in the event of a collision, such as during the repair or maintenance of a machine housed within a housing protected by the interlock switch. Alternatively (or additionally), the interlock switch may become loose, such as due to vibratory forces, which may be characteristic of the operation of certain types of machines, potentially causing the switch circuit element within the interlock switch to remain electrically open when the service panel or door is placed or closed. To avoid displacement, loosening, and / or to facilitate troubleshooting of the interlock switch 202 in the event of displacement and / or loosening, the bracket 100 is provided.

[0040] The bracket 100 includes a bracket body 102. The bracket body 102 is configured to fix the interlock switch 202 relative to the frame member 18 and, in this regard, has a base portion 104 that couples a first slotted portion 106 to a second slotted portion 108. The base portion 104 defines a bracket axis 110 and has a substantially planar mounting surface 112. The mounting surface 112 is generally rectangular in shape and may be bisected by the bracket axis 110. It is contemplated that the base portion 104 of the bracket body 102 axially separates the first slotted portion 106 of the bracket body 102 from the second slotted portion 108 of the bracket body 102. In certain examples, the bracket body 102 may be formed from sheet metal material 114. In this regard, the bracket body 102 may be formed from an aluminum-containing material (such as an aluminum alloy). Examples of suitable aluminum alloys include 5053 aluminum alloy. In a further aspect, the bracket body 102 may be formed from an iron-containing material, such as stainless steel or carbon steel material. Examples of suitable stainless steel and carbon steel materials include 304 stainless steel and A36 steel alloy, which may be powder coated. Advantageously, forming the bracket body from sheet metal material 114 may simplify the manufacture of the bracket 100, such as by enabling the use of stamping and / or pressing operations to form the bracket 100.

[0041] The first slotted portion 106 of the bracket body 102 is axially offset from the base portion 104 along the bracket axis 110 and may be spaced apart from the bracket axis 110. The first slotted portion 106 may also be generally planar in shape and extend generally parallel to the bracket axis 110. In some examples, the first slotted portion 106 may define a pair of slots 116 therethrough. The pair of slots 116 may include two slots, each extending through the thickness of the bracket body 102 and laterally across a portion of the lateral width of the first slotted portion 106. The slots in the pair of slots 116 may be axially spaced apart from each other along the bracket axis 110, generally parallel to each other, and generally orthogonal to the bracket axis 110. The second slotted portion 108 of the bracket body 102 may be similar to the first slotted portion 106 of the bracket body 102, additionally axially separated from the first slotted portion 106 of the bracket body 102 by the base portion 104 of the bracket body 102, and further define a single slot 118 therethrough. The single slot 118 may similarly extend through the thickness of the bracket body 102, laterally across a portion of the lateral width of the bracket body 102, and generally parallel to the slots in the pair of slots 116.

[0042] It is contemplated that the pair of slots 116 and the single slot 118 are configured to receive a plurality of bracket-to-frame member fasteners 218 therethrough. The frame member 18 ( Figure 1 shown) may define a first and second slotted portion fastener pattern 32 that is configured to threadedly receive a plurality of bracket-to-frame member fasteners 218 therein. The first and second slotted portion fastener patterns 32 ( Figure 2 shown) may in turn include a plurality of threaded holes that are positioned to correspond to the axial position of the pair of slots 116 defined by the first slotted portion 106 of the bracket body 102. The first and second slotted portion fastener patterns 32 may further define a threaded hole that spatially corresponds to the single slot 118 of the second slotted portion 108 of the bracket body 102. As will be understood by those skilled in the art in view of the present disclosure, the slots in the pair of slots 116 and the single slot 118 may cooperate to enable the bracket assembly 200 to be secured to the housing 14 ( Figure 1 shown), such as on the frame member 18, in a manner that enables the bracket assembly 200 to be adjusted relative to the housing 14 to accommodate variations in the form and fit of the access panel or door 16 ( Figure 1 shown). As will also be understood by those skilled in the art in view of the present disclosure, although shown and described herein as having three (3) slots, it should be understood and recognized that the bracket body 102 may have fewer or more slots and still be within the scope of the present disclosure.

[0043] Reference Figure 4, the support body 102 may have a first intermediate portion 120 and a second intermediate portion 122. The first intermediate portion 120 is axially disposed between the first slotted portion 106 and the base portion 104 of the support body 102, connects the first slotted portion 106 to the base portion 104 of the support body 102, and defines a first base offset 124 between the first slotted portion 106 and the base portion 104 of the support body 102. The first intermediate portion 120 may be substantially orthogonal (at least in part) to the base portion 104 of the support body 102. The first intermediate portion 120 may be inclined (at least in part) relative to the base portion 104 of the support body 102. The second intermediate portion 122 may be similar to the first intermediate portion 120, and in addition is axially separated from the first intermediate portion 120 along the support axis 110, and connects the base portion 104 of the support body 102 to the second slotted portion 108 of the support body 102. It is contemplated that the second intermediate portion 122 defines a second base offset 126 between the second slotted portion 108 of the support body 102 and the base portion 104 of the support body 102. It is also contemplated that the first base offset 124 and the second base offset 126 cooperate to space the base portion 104 from the frame member 18 ( Figure 1 as shown) by a distance sufficient to enable a nut 220 ( Figure 2 as shown) to be threadedly received on a piercing fastener 222 ( Figure 2 as shown) to secure an interlock switch 202 ( Figure 1 as shown) to the support member 18 for securing the support assembly 200 within the housing 14 ( Figure 1 as shown). The nut 220 may be retained between the piercing fastener 222 and the base portion 104 of the support body 102.

[0044] In some examples, the second base offset 126 may be substantially equal to the first base offset 124. According to some examples, the base portion 104 of the support body 102 may be configured such that the interlock switch 202 ( Figure 1 as shown) can be secured to the support 100 by a piercing fastener 222 ( Figure 2 as shown). In this regard, it is contemplated that a housing fixing hole 224 is defined through a housing 206 of the interlock switch 202 ( Figure 2 as shown), a base fixing hole 128 is defined through the base portion 104, and the piercing fastener 222 extends through the housing fixing hole 224 and the base fixing hole 128 to secure the interlock switch 202 to the support 100. In the example shown, the interlock switch 202 is secured to the support 100 by two or more piercing fasteners. In this regard, it is contemplated that the housing fixing hole 224 is a first housing fixing hole 224, and the housing 206 defines a second housing fixing hole 226 ( Figure 3as shown); the base fixing hole 128 is the first base fixing hole 128, and the base portion 104 of the bracket body 102 defines a second base fixing hole 130; and the piercing fastener 222 is the first piercing fastener 222, and the bracket assembly 200 further includes a second piercing fastener 228 that extends through the second housing fixing hole 226 and the second base fixing hole 130 to secure the interlock switch 202 to the bracket 100.

[0045] In some examples, the nut 220 ( Figure 2 as shown) can be a lock nut. As those skilled in the art will appreciate in view of the present disclosure, using a lock nut to secure the piercing fastener 222 in the bracket assembly 200 can limit the risk of the interlock switch 202 ( Figure 1 as shown) becoming loose due to vibrations associated with the operation of the machine 12 ( Figure 1 as shown). According to some examples, an elastic member 230 ( Figure 3 as shown) formed of an elastomeric material can be tethered between the interlock switch 202 and the piercing fastener 222, such as an O-ring. As those skilled in the art will also appreciate in view of the present disclosure, the elastic member 230 can absorb vibrations associated with the operation of the machine 12 and also limit the risk of the interlock switch 202 becoming loose over time due to vibrations transmitted, for example, through the bracket member 18 ( Figure 1 as shown) to the bracket assembly 200 to which the bracket 100 is fastened. Advantageously, using either (or both) of the lock nut and the elastic member 230 as vibration countermeasure means can enable an extended interval between interlock switch inspections, thereby improving availability and thus increasing the output of the machine device 10 ( Figure 1 as shown).

[0046] In some examples, the bracket assembly 200 can include a pin member 232. In such examples, the pin member 232 can be configured to secure the interlock switch 202 ( Figure 1 as shown) at a deflection angle ( Figure 5 as shown) relative to the bracket axis 110 on the base portion 104 of the bracket body 102. In this regard, the pin member 232 can extend through the base portion 104 of the bracket body 102 at a location where the pin member 232 axially separates the base fixing hole 128 from the first slotted portion 106 (or the second slotted portion 108) of the bracket body 102. In a further aspect, the pin member 232 can extend from the base portion 104 of the bracket body 102 in a direction opposite to the first slotted portion 106 and the second slotted portion 108 of the bracket body 102. It is contemplated that when the interlock switch 202 is disposed on the bracket 100, the pin member 232 can be slidably received in a housing 206 ( Figure 3in a corresponding pin recess 234 within the bracket-facing surface as shown Figure 3 shown). In this regard, the base portion 104 of the bracket body 102 may define a pin member hole 132 therethrough, and the pin member 232 may be fixedly disposed within the pin member hole 132. Advantageously, even if the interlock switch 202 is struck, the pin member 232 may resist displacement of the interlock switch 202, such as during repair or maintenance of the apparatus 10 Figure 1 shown). The pin member 232 may also operate to maintain the deflection angle of the interlock switch 202 in the event that the fastener 220 becomes loose, also enhancing the reliability of the apparatus 10.

[0047] In certain examples of the present disclosure, the pin member 232 may be fixedly disposed within the base portion 104 of the bracket body 102 by a self-tightening device. As will be understood by those skilled in the art in view of the present disclosure, the self-tightening device may simplify the manufacture of the bracket assembly 200. For example, employing a tightening device may eliminate the need to form threads within the pin member hole 132 defined by the base portion 104 of the bracket body 102. Eliminating the threads in turn enables the bracket body 102 to be formed from a relatively thin (or soft) sheet metal material, thereby limiting the cost of the bracket 100 and / or the bracket assembly 200.

[0048] In certain examples, the pin member 232 may be a first pin member 232, and the bracket 100 may include a second pin member 236. In such examples, the second pin member 236 may be similar to the first pin member 232 and, additionally, project from the base portion 104 of the bracket body 102 in a direction opposite to the first slotted portion 106 and the second slotted portion 108 of the bracket body 102 at a location separated from the first pin member 232 by the bracket axis 110. In such examples, the pin member hole 132 may also be a first pin member hole 132, and the base portion 104 of the bracket body 102 may define a second pin member hole 134. The second pin member hole 134 may be similar to the first pin member hole 132 and, additionally, be separated from the first pin member hole 132 by the bracket axis 110. It is contemplated that the second pin member hole 134 and the first pin member hole 132 may be located at a common axial position along the bracket axis 110, but it should be understood and appreciated that the second pin member hole 134 may be axially offset from the first pin member hole 132 and still be within the scope of the present disclosure. As will be understood by those skilled in the art in view of the present disclosure, even if the interlock switch 202 is struck, the second pin member 236 may provide further resistance to displacement of the interlock switch 202 and / or operate to maintain the deflection angle of the interlock switch 202 in the event that the fastener 220 becomes loose, further enhancing the reliability of the apparatus 10. Although two (2) pin members are shown, it should be understood and appreciated that the bracket 100 may include a single pin member or more than two (2) pin members and still be within the scope of the present disclosure.

[0049] Reference Figure 5 And continuing the reference Figure 4 , it can be envisioned that the stent body 102 has a flange portion 136. The flange portion 136 can project from the base portion 104 of the stent body 102 in a direction opposite to the first slotted portion 106 and the second slotted portion 108 of the stent body 102. The flange portion 136 can extend axially along the stent body 102, for example, in a direction substantially parallel to the stent axis 110. The flange portion 136 can further extend only partially along the axial length of the stent body 102. In this regard, the flange portion 136 can extend only partially along the axial length 138 of the base portion 104 of the stent body 102, and the flange portion 136 has an axial length 140 that is less than the axial length 138 of the base portion 104 of the stent body 102. In certain examples, the flange portion 136 of the stent body 102 can be axially offset from the seat fixing hole 128 along the stent axis 110. According to certain examples, the flange portion 136 can axially overlap with the pin member 232. Advantageously, in the case where the interlock switch 202 ( Figure 1 shown) is struck and / or the piercing fastener 222 ( Figure 3 shown) becomes loose, the flange portion 136 can operate as a countermeasure device to change the deflection angle of the interlock switch 202 relative to the stent axis 110 ( Figure 5 shown).

[0050] In certain examples, the flange portion 136 can be configured to shift the natural frequency 238 of the stent assembly 200 ( Figure 2 shown) away from the excitation frequency or frequency range 34 of the operating characteristics of the mechanical device 10 ( Figure 1 shown), including the excitation frequency within the environment of the stent assembly 200. For example, the machine 12 ( Figure 1 shown) housed in the housing 14 ( Figure 1 shown) can include an excitation source. Due to the rotational speed of the motor, the excitation source can transmit excitation vibration forces through the frame member 18 to the stent assembly 200 having the frequency or frequency range 34 ( Figure 1 shown) characteristics of the machine 12, potentially causing the stent assembly 200 to ring (e.g., resonate, such that relatively small vibration forces are amplified) in the case where the natural frequency 238 of the stent assembly 200 ( Figure 1 shown) is not sufficiently spaced from the frequency or frequency range 34 of the machine 12. The shift can be achieved, for example, by one or more of the height and length of the flange portion 136 and the sheet metal material 114 of the stent body 102 ( Figure 1 shown) Figure 3is achieved by the stiffness cooperation as shown. As those skilled in the art will appreciate in view of the present disclosure, avoiding the resonance response to the exciting vibration within the environment of the bracket assembly 200 can limit the tendency of the interlock switch 202 to become loose during the operation of the machine 12, thereby limiting (or eliminating) the need to inspect and / or periodically tighten the piercing fastener 222 ( Figure 3 as shown). Avoiding resonance can also enable the elastic member 230 ( Figure 3 as shown) to absorb (dampen) the residual vibration force, enabling the nut 220 to remain tightened over an extended service interval and also limiting (or eliminating) the need to inspect and / or periodically tighten the piercing fastener 222.

[0051] In some examples, the axial length 140 of the flange portion 136 can be between about 25% and about 75% of the axial length 138 of the base portion 104 to achieve the above-mentioned natural frequency separation. According to some examples, the axial length 140 of the flange portion 136 can be between about 25% and about 60% of the axial length 138 of the base portion 104 of the bracket body 102, or between about 25% and about 50% of the axial length 138 of the base portion 104 of the bracket body 102, or even between about 25% and about 40% of the axial length 138 of the base portion 104 of the bracket body 102. As those skilled in the art will appreciate in view of the present disclosure, other types of reinforcement structures can be employed and still be within the scope of the present disclosure.

[0052] In some examples, the flange portion 136 can be a first flange portion 136, and the bracket body 102 can have a second flange portion 142. The second flange portion 142 can be similar to the first flange portion 136 and is additionally separated from the first flange portion 136 by one or more of the bracket axis 110, the seat fixing hole 128, and the pin member 232. In some examples, the second flange portion 138 can axially overlap the first flange portion 136 of the bracket body 102 along the bracket axis 110, and the first flange portion 136 and the second flange portion 142 are located at a common axial position along the bracket axis 110. It is contemplated that the second flange portion 142 can have an axial length 144 that is substantially equal to the axial length 140 of the first flange portion 136 and can overlap the first flange portion 136 along substantially the entire axial length 140 of the first flange portion 136. As those skilled in the art will appreciate in view of the present disclosure, the second flange portion 142 can further constrain the deflection angle of the interlock switch 202 relative to the bracket axis 110, so the second flange portion 142 also limits the displacement and / or change in the deflection angle of the interlock switch 202 ( Figure 1 as shown) in the event that the interlock switch 202 is struck and / or the piercing fastener 222 becomes loose.

[0053] It is contemplated that the second flange portion 138 may be laterally spaced apart from the first flange portion 136 by a distance 146. In some examples, the distance 146 may be substantially equal to the lateral width 240 of the housing 206 of the interlock switch 202. In such examples, the housing 206 may be adjacent to (e.g., in close mechanical engagement with) the first flange portion 136 and / or the second flange portion 142 of the bracket body 102. As will be understood by those skilled in the art in view of the present disclosure, abutment of the housing 206 against either (or both) of the first flange portion 136 and the second flange portion 142 may reduce (or prevent) displacement of the interlock switch 202 and / or a change in the deflection angle in the event that the interlock switch 202 is struck or the piercing fastener 222 becomes loose.

[0054] In some examples, the distance 146 may be greater than the lateral width 240 of the housing 206 of the interlock switch 202. In such examples, either (or both) of the first flange portion 136 and the second flange portion 142 may be separated from the housing 206 by a lateral gap 242. While also operating to limit displacement of the interlock switch 202 and / or a change in the deflection angle in the event that the interlock switch 202 is struck or the piercing fastener 222 becomes loose, the lateral gap 242 may further provide a visual indication of whether the interlock switch 202 has been struck and / or whether the piercing fastener 222 has become loose. Additionally, in examples where the lateral gap extends continuously along the axial length 140 of either (or both) of the first flange portion 136 and the second flange portion 142, the lateral gap 242 may additionally provide a tactile indication of whether the interlock switch 202 has been struck and / or whether the piercing fastener 222 has become loose. For example, a maintenance person may evaluate the position of the interlock switch 202 relative to the bracket 100 by passing a feeler gauge through the lateral gap 242 and extending it along its axial length to determine whether the interlock switch 202 has been displaced and / or whether the deflection angle of the interlock switch 202 relative to the bracket axis 110 has changed.

[0055] Reference Figures 6 to 8 , a method 300 of manufacturing a bracket assembly, such as bracket assembly 200 ( Figure 1 shown), is illustrated. As Figure 6 shown, method 300 includes forming a bracket, such as bracket 100 ( Figure 1 shown), as shown in block 302. Method 300 further includes positioning an interlock switch on a base portion of the bracket body of the bracket, such as positioning interlock switch 202 ( Figure 1 shown) on the base portion 104 ( Figure 2 shown) of bracket body 102 ( Figure 2 shown), as shown in block 304. It is contemplated that method 300 may further include constraining the interlock switch relative to a bracket axis defined by the base portion of the bracket body (e.g., bracket axis 110 (Figure 1 deflected as shown in block 306, as shown in the figure. In some examples, method 300 may further include connecting an interlock circuit lead to an interlock switch, such as interlock circuit lead 24( Figure 2 shown), and fixing the bracket to a frame member of the housing mechanically, such as fixing to frame member 18( Figure 2 shown), as shown in blocks 308 and 310.

[0056] As Figure 7 shown, forming bracket 302 may include forming a first slotted portion and a second slotted portion that are coupled to each other through a base portion of the bracket body, such as first slotted portion 106( Figure 2 shown) and second slotted portion 108( Figure 2 shown), as shown in block 312. Forming bracket 302 may include forming a first intermediate portion that couples the first slotted portion to the base portion, such as first intermediate portion 120( Figure 4 shown), as shown in block 314. Forming bracket 302 may include forming a second intermediate portion that couples the second slotted portion to the base portion, such as second intermediate portion 122( Figure 4 shown), as shown in block 316. Forming bracket 302 may include forming one or more flange portions that extend from the base portion in a direction opposite to the first slotted portion and the second slotted portion of the bracket body, such as first flange portion 136( Figure 3 shown) and second flange portion 142( Figure 3 shown), either (or both) of which, as shown in block 318.

[0057] It is contemplated that forming the bracket body of 302 may include forming the bracket body from a sheet metal material (e.g., sheet metal material 114( Figure 3 shown)), as shown in bracket 302. It is also contemplated that forming bracket 302 may include defining one or more base fixing holes in the base portion of the bracket body, such as first base fixing hole 128( Figure 4 shown) and second base fixing hole 130( Figure 4 shown), one or more of which, as shown in block 320. In this regard, forming the bracket may include defining a first base fixing hole and a second base fixing hole in the base portion of the bracket body, as shown in blocks 322 and 324. In some examples, forming one or more flange portions of 318 may include separating the natural frequency of the bracket assembly from an excitation frequency or range of excitation frequencies associated with the operation of a machine housed within a housing having a flange portion of the bracket body, such as separating the natural frequency 238 of the bracket assembly( Figure 1 shown) from the excitation frequency or range of excitation frequencies 36 transmitted to the bracket assembly( Figure 1Separation, as shown in block 326, can be achieved by forming either (or both) of the first flange portion and the second flange portion according to the excitation frequency or frequency range characteristics of the machine, and once installed, it is transmitted to the interlock switch, as shown in blocks 328 and 330.

[0058] As Figure 8 shown, disposing the interlock switch 304 on the bracket can include disposing the interlock switch adjacent to one or more flange portions of the bracket body, such as between a first flange portion and a second flange portion of the bracket body, as shown in block 332. Disposing the interlock switch 304 on the bracket can include registering one or more housing fixing holes to one or more base fixing holes, such as registering one or more of the first housing fixing hole 224 ( Figure 3 shown) and the second housing fixing hole 226 ( Figure 3 shown) to one or more base fixing holes, as shown in block 334. Disposing 304 can include using one or more piercing fasteners (such as one or more of the first piercing fastener 222 ( Figure 2 shown) and the second piercing fastener 228 ( Figure 2 shown)) to fasten the housing of the interlock switch to the base portion of the bracket body, as shown in block 336. In some examples, fastening the housing 328 to the base portion can include using vibration resistance to fasten the housing, as shown in block 338. For example, one or more lock nuts and / or tethering elastic members can be used to fasten (and thus fix) the respective interlock switch to the bracket, as shown in blocks 340 and 342.

[0059] In some examples, disposing the interlock switch 304 on the bracket can include disposing the interlock switch against anti-deflection features, as shown in block 344. For example, one or more pin members (such as the first pin member 232 ( Figure 4 shown) and the second pin member 236 ( Figure 4as shown)) can be secured to the second portion of the bracket body, and one or more pin members are slidably received within the housing body to limit deflection of the interlock switch relative to the bracket axis in the event of the interlock switch being struck and / or in the event of one or more of the piercing fasteners becoming loose, as shown in block 346 and block 348. Alternatively (or additionally), the interlock switch can be positioned such that the housing abuts either (or both) the first flange portion and the second flange portion of the bracket body to limit deflection of the interlock switch relative to the bracket axis in the event of the interlock switch being struck and / or one or more of the piercing fasteners becoming loose, as shown in block 350. It is also contemplated that the interlock switch can be disposed on the base portion of the bracket body such that the housing is spaced a certain gap from one of the first flange portion and the second portion to provide a visual and / or tactile indication that the interlock switch has been struck and / or one or more of the piercing fasteners have become loose, as shown in block 352.

[0060] An interlock switch is generally employed to prevent operation of a machine in a setting where operation of the machine can be hazardous to personnel in the vicinity of the machine, typically by cooperation with an interlock member carried by an access panel or door. When the access panel is placed on the enclosure housing the machine or the door is closed, the interlock member generally electrically closes a switch circuit element arranged with the enclosure of the interlock circuit such that the interlock switch can operate the machine housed within the enclosure. When the access panel is removed or the door is opened, the interlock member generally renders the switch circuit element electrically open and the machine housed within the enclosure thereby ceases operation and / or is prevented from resuming operation. While generally suitable for their intended purpose, such interlock switches can sometimes become unreliable during operation of the machine protected by the interlock switch, such as in the event that fasteners securing the interlock switch to the enclosure become loose due to vibrations transmitted to the interlock switch and / or in the event that the interlock switch is struck (e.g., by maintenance personnel or personnel servicing the machine). Once displaced, the interlock device can prevent operation of the machine despite the presence of the protected access panel or the protected door being closed, thereby limiting the output of the machine housed within the enclosure protected by the interlock device switch.

[0061] In the examples described herein, an interlock switch is mounted on a bracket that includes a flange portion. The flange portion extends along the interlock switch, limits a change in a deflection angle of the interlock switch relative to the bracket in the event that a fastener securing the interlock switch to the bracket becomes loose, and may further provide a visual or tactile indication as to whether the interlock switch has become loose. In some examples, the flange portion may cooperate with one or more pin members that are secured to the bracket and received within the housing of the interlock switch, the one or more pin members further limiting the deflection of the interlock switch relative to the bracket on which the interlock switch is disposed. According to some examples, the flange portion may prevent the bracket assembly (and / or limit switch) from ringing in response to vibratory excitation that may accompany the operation of a machine housed within the enclosure, thereby limiting (or eliminating) a tendency for the natural frequency of the bracket assembly to promote displacement of the interlock switch. It is also contemplated that the bracket assembly may include one or more vibration counteracting structures, such as locknuts and / or O-rings, that are configured to prevent the fasteners from loosening that otherwise secure the interlock switch to the bracket and / or absorb vibrations transmitted to the bracket assembly through a frame member to which the bracket assembly is secured.

[0062] Although the present disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that the present disclosure extends beyond the specifically described embodiments to other alternative embodiments and / or uses thereof and their obvious modifications and equivalents. Additionally, while several variations of the embodiments of the present disclosure have been shown and described in detail, other modifications within the scope of the present disclosure will be apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or sub-combinations of specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that the various features and aspects of the disclosed embodiments may be combined with or substituted for one another in order to form varying modes of the disclosed embodiments. Accordingly, it is intended that the scope of the present disclosure not be limited by the above-described specific embodiments.

[0063] The headings (if any) provided herein are for convenience only and do not necessarily affect the scope or meaning of the devices and methods disclosed herein.

Claims

1. A bracket, the bracket comprising: A bracket body having: A base portion that defines a bracket axis; A first slotted portion that is laterally offset from the base portion of the bracket body; A second slotted portion that is laterally offset from the base portion and is axially separated from the first slotted portion by the base portion of the bracket body; And A flange portion that extends from the base portion of the bracket body in a direction opposite to the first and second slotted portions, the flange portion further extending parallel to the bracket axis to constrain the deflection angle of an interlock switch disposed on the bracket body relative to the bracket axis.

2. The bracket according to claim 1, wherein, The flange portion is a first flange portion, and the bracket body has a second flange portion that is separated from the first flange portion by the bracket axis, the second flange portion being parallel to the first flange portion.

3. The bracket according to claim 2, wherein The base portion defines a base fixing hole therethrough, which is axially offset from the first and second flange portions.

4. The bracket according to claim 2, wherein The first slotted portion defines a pair of slots therethrough, the slots in the pair of slots being axially offset from the first and second flange portions of the bracket body, and the slots in the first pair of slots being further orthogonal to the bracket axis defined by the base portion of the bracket body.

5. The bracket according to claim 1, further comprising a pin member that is fixed to the base portion and extends from the base portion in a direction opposite to the first and second slotted portions of the bracket body.

6. The bracket according to claim 5, wherein, The pin member separates the flange portion from the bracket axis.

7. The bracket according to claim 6, wherein The pin member is a first pin member, and further comprises a second pin member that is fixed to the base portion and extends from the base portion in a direction opposite to the first and second slotted portions of the bracket body, the second pin member being separated from the first pin member by the bracket axis.

8. The bracket according to claim 1, wherein, The second slotted portion defines a single slot therethrough, the single slot being orthogonal to the bracket axis, and wherein the first base portion defines a pair of slots therethrough, the pair of slots being orthogonal to the bracket axis.

9. The bracket according to claim 1, wherein, The bracket body is formed of sheet metal material.

10. A bracket assembly, comprising: The bracket according to claim 1, the bracket body being formed of sheet metal material; An interlock switch that extends parallel to the flange portion of the bracket body; A piercing fastener that is disposed in the base portion of the bracket body and secures the interlock switch to the base portion of the bracket body; And A first pin member and a second pin member that are disposed in the base portion of the bracket body and fix the interlock switch at a deflection angle relative to the bracket axis.

11. The bracket assembly according to claim 10, further comprising an interlock circuit lead having a bayonet connector fixed to the interlock switch, the bayonet connector extending axially along the bracket axis and covering the first slotted portion of the bracket body.

12. The stent assembly according to claim 10, wherein, The interlock switch has an interlock member receiving portion that covers a base portion of the bracket body, and wherein the bracket assembly further includes an interlock member that is movably supported relative to the interlock switch and is received within the interlock member receiving portion.

13. The bracket assembly according to claim 10, further comprising an interlock circuit connected to the interlock switch, wherein the interlock switch is configured to electrically disconnect when the interlock member is displaced from an interlock member receiving position defined in the interlock switch.

14. The bracket assembly according to claim 10, further comprising at least one of the following: A lock nut that is retained between the piercing fastener and a base portion of the bracket body; and An elastic member formed of an elastic material that is retained between the piercing fastener and the interlock switch.

15. A semiconductor processing system, comprising: A housing that includes a frame member and a service panel or door that is removably fixed relative to the frame member; A processing module that is disposed within the housing; A bracket as claimed in claim 1, which is fixed to a frame member of the housing; An interlock switch that is disposed within the housing and fixed to the bracket; An interlock circuit that is connected to the interlock switch; wherein the interlock switch is configured to electrically close the interlock circuit when the service panel or door abuts the frame member; and wherein the interlock switch is configured to electrically disconnect the interlock circuit when the service panel or door is displaced from the frame member.

16. A method of manufacturing a bracket assembly, comprising: Forming a bracket that includes a bracket body having a base portion that defines a bracket axis, a first slotted portion that is laterally offset from the base portion of the bracket body, a second slotted portion that is laterally offset from the base portion and axially separated from the first slotted portion by the base portion of the bracket body, and a flange portion that extends from the base portion and is parallel to the bracket axis; Disposing an interlock switch on the base portion of the bracket body; And Constraining a deflection angle of the interlock switch relative to the bracket axis using the flange portion of the bracket body.

17. The method according to claim 16, further comprising: Connecting an interlock circuit lead to the interlock switch; Fixing the bracket to a frame member of a housing that houses machinery in a machine; And wherein forming the bracket includes separating a natural frequency of the bracket assembly from an excitation frequency or excitation frequency range associated with operation of the machinery housed within the housing.

18. The method according to claim 16, further comprising: Fixing one or more pin members to the base portion of the bracket body; Slidably receiving the one or more pin members within the interlock switch; And Using the one or more pin members to further constrain the deflection angle of the interlock switch relative to the bracket axis.

19. The method according to claim 16, wherein, Disposing the interlock switch on the base portion of the bracket body further includes fastening the interlock switch to the base portion of the bracket body using one or more vibration counteracting structures.

20. The method according to claim 16, wherein, Positioning the interlock switch on the base portion of the bracket body further includes: (a) fixing the housing of the interlock switch to the base portion of the bracket body, adjacent to the flange portion of the bracket body, or (b) fixing the housing of the interlock switch to the base portion of the bracket body such that a gap is defined between the housing and the flange portion.

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