Excimer laser energy absorption device and optical shutter mechanism

Abstract

The invention discloses an excimer laser energy absorption device which is characterized in that an opening in one end of an outer sleeve forms a laser incidence port for laser incidence, the cavity wall of an inner cavity of the outer sleeve is in a cone frustum shape to form a first reflecting surface capable of reflecting laser, a cone-shaped reflecting cone is arranged in the outer sleeve, and the peripheral surface of the reflecting cone forms a second reflecting surface; and the vertex of the reflection cone points to the laser entrance port. The invention further discloses an optical shutter mechanism adopting the absorption device, a laser entrance, a first laser exit and a second laser exit are formed in the shell, the laser entrance is communicated with the second laser exit, a reflector assembly is rotationally connected into the shell, when the reflector assembly is located at the second position, laser is emitted from the first laser exit, and when the reflector assembly is located at the second position, the laser is emitted from the second laser exit. When the reflective mirror assembly is located at the first position, the laser is reflected by the reflective mirror assembly and then is emitted to the excimer laser energy absorption device from the second laser emitting port. The absorption device is good in absorptivity, and the optical shutter can achieve high industrial production efficiency.

Description

Technical Field

[0001] The present invention relates to an excimer laser energy absorption device. The present invention also relates to a light shutter mechanism.

Background Art

[0002] Excimer lasers are the laser devices with the highest output power in the ultraviolet band. The characteristics of short wavelength and high power enable them to be widely used in the fields of industry, scientific research, medical treatment, etc. In recent years, with the progress of material technology, optical processing technology, and high-voltage fast discharge technology, excimer lasers have been continuously developing towards higher frequencies and higher powers. High-power ≥300W excimer lasers have become the core light sources of key equipment in some industrial manufacturing industries and play an irreplaceable role in many key fields.

[0003] Before a high-power excimer laser reaches high-power output, it requires a relatively long warm-up time. The output power is increased by gradually increasing the excitation voltage and discharge frequency. The longer warm-up time can effectively extend the service life of electrical components and improve the stability of laser output energy. Therefore, in industrial production, in order to pursue higher production efficiency, it is very necessary to keep the laser continuously outputting at high power. However, the demand for laser beams in industrial production is intermittent. During the time when laser energy is not required, the machine needs to be shut down, and after shutdown, it takes a long warm-up time for the next startup, which also reduces the production efficiency.

[0004] In addition, the unexpected laser radiation generated during the operation of a high-power excimer laser needs to be fully enclosed by a beam terminator. Usually, a laser energy absorption device is set to absorb the excess laser. The existing laser energy absorption devices are generally divided into coating types and mechanical types. The coating type directly absorbs and converts laser energy by using a special coating, and the price is very expensive. The mechanical type uses a complex structural design to reflect the laser in a complex mechanical structure and gradually disperse and consume the laser energy by using a metal surface. However, the existing mechanical types have complex structures, and most of them are for medium and low-power (≤100W) ultraviolet lasers or lasers in other bands and cannot meet the application requirements of energy absorption for high-power (≥300W) excimer lasers.

[0005] Therefore, the present invention is precisely generated based on the above deficiencies.

Summary of the Invention

[0007] The object of the present invention is to overcome the deficiencies of the prior art and provide an excimer laser energy absorption device with a simple structure, low cost, and good absorbability.

[0008] The present invention also provides a light shutter mechanism. By using this light shutter mechanism, when laser energy is not required in industrial production, the laser can be reflected to an absorption device for absorption, so that the laser system can always be in a high-power output state without shutting down, and high industrial production efficiency can be achieved.

[0009] The present invention is realized through the following technical solutions:

[0010] An excimer laser energy absorption device includes an outer sleeve. One end of the outer sleeve is open to form a laser incident port for laser to enter. The inner cavity wall of the outer sleeve is in the shape of a frustum of a cone to form a first reflecting surface capable of reflecting laser. A reflecting cone in the shape of a cone is arranged inside the outer sleeve. The outer peripheral surface of the reflecting cone forms a second reflecting surface. The vertex of the reflecting cone points to the laser incident port so that the laser entering from the laser incident port can be reflected multiple times on the first reflecting surface and the second reflecting surface.

[0011] The outer sleeve and the reflecting cone are made of aluminum metal.

[0012] The effective height H of the reflecting cone is set to 75 mm, the maximum diameter Φ of the reflecting cone is set to 26.5 mm, the cone angle β of the reflecting cone is set to 20 degrees, and the cone angle α between the inner side wall of the outer sleeve and the outer side wall of the reflecting cone in the axial section is set to not exceed 20 degrees.

[0013] A plurality of spaced annular grooves are provided on the outer side wall of the outer sleeve.

[0014] An installation port is provided at one end of the outer sleeve far from the laser incident port. A connecting seat is provided on the reflecting cone. When the vertex of the reflecting cone is inserted into the outer sleeve from the installation port, the connecting seat is connected to one end of the installation port of the outer sleeve.

[0015] A sunk groove is provided on the outer sleeve, and the connecting seat is installed in the sunk groove.

[0016] A light shutter mechanism includes a housing. A laser entrance, a first laser exit, and a second laser exit communicating with the laser entrance are provided on the housing. The above-mentioned excimer laser energy absorption device is connected to the position of the second laser exit. The laser entrance is in communication with the second laser exit. A reflecting mirror assembly capable of changing the laser transmission direction is rotatably connected in the housing. The positions where the reflecting mirror assembly can stay include a first position and a second position. When the reflecting mirror assembly is in the second position, the reflecting mirror assembly deviates from the first laser exit so that the laser incident from the laser entrance exits from the first laser exit. When the reflecting mirror assembly is in the first position, the reflecting mirror assembly deviates from the second laser exit so that the laser incident from the laser entrance is reflected by the reflecting mirror assembly and exits from the second laser exit to the excimer laser energy absorption device. The second laser exit is hermetically docked with the laser entrance. A driving assembly capable of driving the reflecting mirror assembly to switch between the first position and the second position is further provided on the housing. Lenses are provided at both the laser entrance and the first laser exit positions.

[0017] The reflecting mirror assembly includes a rotating shaft penetrating through the housing. A rotating plate fixedly connected to the rotating shaft and capable of rotating therewith is provided on the rotating shaft. A reflecting mirror is provided on the rotating plate.

[0018] The housing includes a left housing and a right housing. The left housing and the right housing are hermetically docked to form a closed inner cavity for accommodating the reflecting mirror assembly. An installation cavity isolated from the closed inner cavity is provided on the right housing. The driving assembly includes a rotary electromagnet provided in the installation cavity. The core shaft of the rotary electromagnet extends outside the housing and a transmission assembly capable of driving the rotating shaft to rotate is provided between the core shaft and the rotating shaft.

[0019] The transmission assembly includes a first crank fixedly connected to the core shaft and a second crank fixedly connected to the rotating shaft. A connecting rod hinged to both of them and capable of driving the rotating shaft to rotate when the core shaft is driven to rotate by the rotary electromagnet is provided between the first crank and the second crank.

[0020] Compared with the prior art, the present invention has the following advantages:

[0021] 1. When the excimer laser energy absorption device of the present invention works, the laser enters from the laser entrance, is reflected after reaching the first reflecting surface and the second reflecting surface, and the reflected light reaches the second reflecting surface and the first reflecting surface again, so that multiple reflections occur repeatedly to achieve the absorption of laser energy. The entire absorption device is assembled by an outer sleeve with a conical frustum-shaped inner cavity wall and a conical reflecting cone, with a simple structure and low cost. It can achieve multiple reflections and absorption of the laser, meet the requirements for laser energy absorption, and is suitable for popularization and application.

[0022] 2. When laser energy is not required in industrial production, the mirror assembly is switched to the first position. The laser beam entering through the laser inlet is reflected by the mirror assembly and enters the inner part of the outer sleeve, where it undergoes multiple reflections and is absorbed. At this time, the excimer laser system can maintain a high-power output state all the time, and no laser beam is emitted from the first laser outlet. When laser energy is required for production and processing in industrial production, the mirror assembly is switched to the second position, and the laser beam is emitted from the first laser outlet to maintain normal production requirements. Therefore, by switching the position of the mirror assembly, the working state of the excimer laser can be changed to achieve the function of mode switching, avoiding the low efficiency caused by shutting down the machine when laser is not needed in production. Moreover, the absorption device for absorbing the laser beam reflected by the mirror assembly has a simple structure, low cost, and good absorption effect.

BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a perspective view of the excimer laser energy absorption device of the present invention;

[0024] Figure 2 is an exploded view of the excimer laser energy absorption device of the present invention;

[0025] Figure 3 is a cross-sectional view of the excimer laser energy absorption device of the present invention;

[0026] Figure 4 is a cross-sectional view of the outer sleeve of the excimer laser energy absorption device of the present invention;

[0027] Figure 5 is a perspective view of the light shutter mechanism of the present invention;

[0028] Figure 6 is an exploded view of the light shutter mechanism of the present invention;

[0029] Figure 7 is a perspective view of the components of the light shutter mechanism of the present invention;

[0030] Figure 8 is a partial cross-sectional view of the light shutter mechanism of the present invention;

[0031] Figure 9 is a schematic cross-sectional view of the cooperation between the light shutter mechanism and the absorption device of the present invention.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] The present invention will be further described below with reference to the accompanying drawings:

[0033] As Figures 1 to 4 and Figure 9As shown in the figure, an excimer laser energy absorption device 10 includes an outer sleeve 11. One end of the outer sleeve 11 is open to form a laser incident port 12 for laser incidence. The inner cavity wall of the outer sleeve 11 is in the shape of a frustum of a cone to form a first reflecting surface 111 capable of reflecting laser. A conical reflecting cone 13 is provided inside the outer sleeve 11. The outer peripheral surface of the reflecting cone 13 forms a second reflecting surface 131. The vertex of the reflecting cone 13 points to the laser incident port 12 so that the laser incident from the laser incident port 12 can be reflected multiple times on the first reflecting surface 111 and the second reflecting surface 131. The laser enters from the laser incident port 12, is reflected after reaching the first reflecting surface 111 and the second reflecting surface 131, and the reflected light reaches the second reflecting surface 131 and the first reflecting surface 111 again, repeating like this to have multiple reflections, realizing the absorption of laser energy. The entire absorption device is assembled by the interference fit of the outer sleeve 11 with a frustum-shaped inner cavity wall and the conical reflecting cone 13. It has a simple structure and low cost, can achieve multiple reflections and absorption of laser, and meets the requirements for absorbing the laser energy of high-power excimer lasers. In this embodiment, the outer sleeve 11 and the reflecting cone 13 are made of aluminum. As a metal material, aluminum usually has a high reflectivity, especially in the visible light and near-infrared bands. While excimer lasers usually operate in the ultraviolet band, and metals have a high absorption coefficient in the ultraviolet band because the ultraviolet photon energy is high, which may cause electron transitions. Therefore, using aluminum outer sleeve 11 and reflecting cone 13 can increase absorption. When the excimer laser energy absorption device 10 absorbs laser energy, heat will be generated. Therefore, a plurality of annular grooves 14 spaced from each other are provided on the outer side wall of the outer sleeve 11 to increase the contact area with the external air, and the outer sleeve 11 and the reflecting cone 13 are in interference fit to achieve the purpose of rapid heat dissipation.

[0034] As Figure 3 shown, assuming that the absorption rate of each reflection is °a, the reflection rate is °r, and the transmittance can be ignored (t≈0), the reflectivity of non-mirror aluminum at a wavelength of 308nm is about 40%, and the absorption rate is 60%. According to the cone diagram, the Nth incident angle is 90° - 1 / 2β - (N - 1)α, that is, the cone angles β and α and N satisfy an inverse relationship. After N reflections, the total absorption efficiency is: η(N) = 1 - (1 - a)·r n, the total absorption rate η(N) is positively correlated with the number of reflections N (η∝N). After the laser is reflected 5 times on the aluminum surface, the total absorption rate reaches 99.6%, which can basically meet the requirement of absorbing the laser energy of the excimer laser. And the internal structure of the laser is compact and the space is limited. To meet the installation restrictions, the maximum effective height of the reflection cone 13 can reach H = 75 mm, and the maximum diameter of its base is D = 26.5 mm. Considering the processing technology, the smaller the cone angle, the higher the processing difficulty. When the effective height of the reflection cone 13 takes the maximum value, it is more conducive to processing, reducing the cone angle and increasing the number of reflections, which is more beneficial to laser energy absorption. When the effective height of the reflection cone 13 takes H = 75 mm and the diameter of the base of the reflection cone 13 Φ≤26.5 mm, β = 20° is obtained. Combining with the fact that the total absorption rate ≥99.6% after the laser is reflected at least 5 times on the aluminum surface, then α≤20° is obtained, achieving the balance of reasonable structural layout, good laser energy absorption effect and convenient processing.

[0035] As Figures 2 to 4 shown, an installation port 15 is provided at one end of the outer sleeve 11 away from the laser inlet 12. A connecting seat 16 is provided on the reflection cone 13. When the vertex of the reflection cone 13 is inserted into the outer sleeve 11 from the installation port 15, the connecting seat 16 is connected to the sunk groove 17 at one end of the installation port 15 of the outer sleeve 11. The connecting seat 16 and the bottom of the sunk groove 17 can be connected by screws, and the assembly is convenient.

[0036] As shown in FIGS. 5 to Figure 9 shown, the shutter mechanism of the present invention can change the working state of the excimer laser to achieve the function of mode switching, and avoid the low efficiency caused by the shutdown of the excimer laser system when laser is not required in production. Its specific structure includes a housing 2. A laser inlet 23, a first laser outlet 21 and a second laser outlet 22 communicating with the laser inlet 23 are provided on the housing 2. Lenses (not shown in the figure) are provided at the positions of the laser inlet 23 and the first laser outlet 21. The laser emitted by the excimer laser is incident from the laser inlet 23 and exits from the first laser outlet 21 to the industrial production and processing station to realize industrial production. When industrial production stops, the laser exits from the second laser outlet 22 to the aforementioned excimer laser energy absorption device 10 connected thereto, so as to ensure that the excimer laser system keeps high-power output all the time when laser is not required, and the laser energy is absorbed by the absorption device 10. The laser inlet 12 is communicated with the second laser outlet 22. In this embodiment, the absorption device 10 is connected to the housing 2 through a connecting member 20.

[0037] As Figures 7 to 9As shown, a reflecting mirror assembly 3 capable of changing the laser transmission direction is rotatably connected inside the housing 2. The reflecting mirror assembly 3 is used to change the transmission direction of the laser entering from the laser inlet 23, so that the laser exits from the first laser outlet 21 for industrial production or exits from the second laser outlet 22 to be absorbed.

[0038] As Figures 7 to 9 shown, the positions where the reflecting mirror assembly 3 can stay include a first position and a second position. When the reflecting mirror assembly 3 is driven by the driving assembly 4 on the housing 2 and moves to the second position, the reflecting mirror assembly 3 deviates from the first laser outlet 21 so that the laser entering from the laser inlet 23 exits from the first laser outlet 21 to the processing station for industrial production; when the reflecting mirror assembly 3 is driven by the driving assembly 4 and moves to the first position, the reflecting mirror assembly 3 deviates from the second laser outlet 22 so that the laser entering from the laser inlet 23 is reflected by the reflecting mirror assembly 3 and exits from the second laser outlet 22 to the excimer laser energy absorption device 10. That is, when laser is needed in industrial production, the first laser outlet 21 is opened. When laser is not needed in industrial production, the laser is reflected to the absorption device 10 through the reflecting mirror assembly 3, avoiding environmental or personnel injuries caused by the laser exiting from the first laser outlet 21 when industrial production stops, and ensuring that the high-power output state of the excimer laser is maintained all the time without stopping the machine, avoiding the need for additional warm-up time when the next industrial production starts, thereby improving production efficiency.

[0039] As Figures 6 to 9 shown, the housing 2 includes a left housing 201 and a right housing 202. The left housing 201 and the right housing 202 are hermetically butted to form a closed inner cavity 203 for accommodating the reflecting mirror assembly 3. The second laser outlet 22 is hermetically butted with the laser inlet 12 to form a closed reflection space inside the absorption device 10. The reflecting mirror assembly 3 includes a rotating shaft 31 penetrating through the housing 2. A rotating plate 32 capable of rotating with it is fixedly connected to the rotating shaft 31. A reflecting mirror 33 is provided on the rotating plate 32. An installation cavity 24 isolated from the closed inner cavity 203 is provided on the right housing 202. The driving assembly 4 includes a rotary electromagnet 41 provided in the installation cavity 24. The core shaft 411 of the rotary electromagnet 41 extends outside the housing 2, and a transmission assembly 42 capable of driving the rotating shaft 31 to rotate is provided between the core shaft 411 and the rotating shaft 31. The rotary electromagnet 41 drives the rotating shaft 31 to rotate through the transmission assembly 42, thereby changing the position of the reflecting mirror assembly 3 to achieve the purpose of changing the laser transmission direction.

[0040] As Figure 6 and Figure 7As shown in the figure, the transmission assembly 42 includes a first crank 421 fixedly connected to the mandrel 411 and a second crank 422 fixedly connected to the rotating shaft 31. A connecting rod 423 is provided between the first crank 421 and the second crank 422. The connecting rod 423 is hinged to both of them and can drive the rotating shaft 31 to rotate when the rotating electromagnet 41 drives the mandrel 411 to rotate. When the rotating electromagnet 41 drives the mandrel 411 to rotate, the mandrel 411 drives the first crank 421 to rotate. The first crank 421 pulls or pushes the connecting rod 423, the connecting rod 423 pulls or pushes the second crank 422, and the second crank 422 makes the rotating shaft 31 rotate, thereby driving the mirror assembly 3 to switch between the first position and the second position. By providing the connecting rod 423, the rotational motion of the mandrel 411 can be converted into the swinging motion of the mirror assembly 3 when the rotating electromagnet 41 and the mirror assembly 3 are at a certain distance, so as to ensure the flexible movement of the mirror assembly 3 on the basis of a reasonable structural layout of the shutter structure. Some of the electronic wire harnesses and switches of the present invention can also be installed in the installation cavity 24 to ensure a compact structure.

[0041] The above has described this embodiment in detail with reference to the accompanying drawings. However, the present invention is not limited to the above embodiment. Within the knowledge scope of those of ordinary skill in the art in the said technical field, various changes can be made without departing from the purpose of the present invention.

Claims

1. An excimer laser energy absorption device (10), characterized in that: A kind of excimer laser energy absorption device (10) includes an outer sleeve (11). One end of the outer sleeve (11) is open to form a laser incident port (12) for laser to enter. The inner cavity wall of the outer sleeve (11) is in the shape of a frustum of a cone to form a first reflecting surface (111) capable of reflecting laser. A conical reflecting cone (13) is arranged inside the outer sleeve (11). The outer peripheral surface of the reflecting cone (13) forms a second reflecting surface (131). The vertex of the reflecting cone (13) points to the laser incident port (12) so that the laser entering from the laser incident port (12) can be reflected multiple times on the first reflecting surface (111) and the second reflecting surface (131). It is characterized in that: it includes an outer sleeve (11). One end of the outer sleeve (11) is open to form a laser incident port (12) for laser to enter. The inner cavity wall of the outer sleeve (11) is in the shape of a frustum of a cone to form a first reflecting surface (111) capable of reflecting laser. A conical reflecting cone (13) is arranged inside the outer sleeve (11). The outer peripheral surface of the reflecting cone (13) forms a second reflecting surface (131). The vertex of the reflecting cone (13) points to the laser incident port (12) so that the laser entering from the laser incident port (12) can be reflected multiple times on the first reflecting surface (111) and the second reflecting surface (131).

2. The excimer laser energy absorption device (10) according to claim 1, wherein: The outer sleeve (11) and the reflecting cone (13) are made of aluminum metal.

3. The excimer laser energy absorption device (10) according to claim 2, wherein: The effective height H of the reflecting cone (13) is set to 75 mm, the maximum diameter Φ of the reflecting cone (13) is set to 26.5 mm, the cone angle β of the reflecting cone (13) is set to 20 degrees, and the cone angle α of the inner side wall of the outer sleeve (11) and the outer side wall of the reflecting cone (13) in the axial section is set to not exceed 20 degrees.

4. The excimer laser energy absorption device (10) according to claim 1, characterized in that: A plurality of spaced annular grooves (14) are arranged on the outer side wall of the outer sleeve (11).

5. The excimer laser energy absorption device (10) according to claim 1, characterized in that: An installation port (15) is arranged at one end of the outer sleeve (11) far from the laser incident port (12). A connecting seat (16) is arranged on the reflecting cone (13). When the vertex of the reflecting cone (13) is inserted into the outer sleeve (11) from the installation port (15), the connecting seat (16) is connected to one end of the installation port (15) of the outer sleeve (11).

6. The excimer laser energy absorption device (6) according to claim 5, characterized in that: A sunk groove (17) is arranged on the outer sleeve (11). The connecting seat (16) is installed in the sunk groove (17).

7. A light shutter mechanism, characterized in that: Comprising a housing (2), a laser inlet (23) is provided on the housing (2), as well as a first laser outlet (21) and a second laser outlet (22) that communicate with the laser inlet (23). The position of the second laser outlet (22) is connected to an excimer laser energy absorption device (10) as described in any one of claims 1 to 5. The laser inlet (12) is in communication with the second laser outlet (22). A mirror assembly (3) that can change the laser transmission direction is rotatably connected within the housing (2). The positions where the mirror assembly (3) can stay include a first position and a second position. When the mirror assembly (3) is in the second position, the mirror assembly (3) deviates from the first laser outlet (21) so that the laser incident from the laser inlet (23) is emitted from the first laser outlet (21). When the mirror assembly (3) is in the first position, the mirror assembly (3) deviates from the second laser outlet (22) so that the laser incident from the laser inlet (23) is reflected by the mirror assembly (3) and then emitted from the second laser outlet (22) to the excimer laser energy absorption device (10). The second laser outlet (22) is in sealed butt joint with the laser inlet (12). A drive assembly (4) that can drive the mirror assembly (3) to switch between the first position and the second position is further provided on the housing (2). Lenses are provided at the positions of the laser inlet (23) and the first laser outlet (21).

8. The light shutter with a reflection device according to claim 7, characterized in that: The mirror assembly (3) includes a rotating shaft (31) passing through the housing (2). A rotating plate (32) that can rotate with it is fixedly connected to the rotating shaft (31). A mirror lens (33) is provided on the rotating plate (32).

9. The light shutter with a reflection device according to claim 8, characterized in that: The housing (2) includes a left housing (201) and a right housing (202). The left housing (201) and the right housing (202) are in sealed butt joint to form a closed inner cavity (203) for accommodating the mirror assembly (3). An installation cavity (24) isolated from the closed inner cavity (203) is provided on the right housing (202). The drive assembly (4) includes a rotary electromagnet (41) provided in the installation cavity (24). A core shaft (411) of the rotary electromagnet (41) extends outside the housing (2), and a transmission assembly (42) that can drive the rotating shaft (31) to rotate is provided between the core shaft (411) and the rotating shaft (31).

10. The light shutter with a reflection device according to claim 9, characterized in that: The transmission assembly (42) includes a first crank (421) fixedly connected to the core shaft (411) and a second crank (422) fixedly connected to the rotating shaft (31). A connecting rod (423) that is hinged to both of them and can drive the rotating shaft (31) to rotate when the core shaft (411) is driven to rotate by the rotary electromagnet (41) is provided between the first crank (421) and the second crank (422).

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