Fluid control device

Abstract

A fluid control device is provided. A fluid control device (10) is provided with a pump body (20), a housing, and an adhesive (60). The pump body (20) is provided with a first external connection conductor (232) and a second external connection conductor (242). The housing is provided with a side wall (312), accommodates the pump main body (20) therein, and has a first opening (341) and a second opening (342) penetrating through the side wall (312). The adhesive (60) fixes the housing and a portion of the pump body (20), and seals the inside of the housing from the outside. The first external connection conductor (232) protrudes to the outside of the housing through the first opening (341), and the second external connection conductor (242) protrudes to the outside of the housing through the second opening (342). The fluid control device (10) is provided with an auxiliary member (239) different from the adhesive (60). In the second opening (342), the auxiliary member (239) is disposed at a position overlapping the second external connection conductor (242) when viewed in a first direction parallel to the height direction of the side wall (312), and is disposed on the side of the first external connection conductor (232).

Description

Technical Field

[0001] The present invention relates to a fluid control device, which includes a pump body for controlling a fluid and a housing for mounting the pump body. Background Art

[0002] A fluid control device is described in Patent Document 1. The fluid control device of Patent Document 1 includes a pump body, an upper housing member, and a lower housing member. The lower housing member has a recess. The pump body is housed in the recess of the lower housing member. In this state, the upper housing member is arranged to cover the upper side (the upper side of the pump body) of the recess of the lower housing member.

[0003] The lower housing member has two openings in its side wall. The pump body includes two external connection conductors. The two external connection conductors of the pump body are respectively led out to the outside through the two openings.

[0004] The upper housing member, the pump body, and the lower housing member are fixed together by an adhesive. At this time, the adhesive is formed to cover the two openings. Thereby, the sealing property of the interior of the housing formed by the upper housing member and the lower housing member is improved.

[0005] Patent Document 1: International Publication No. 2022 / 149386

[0006] However, in the structure described in Patent Document 1, there is a case where the two external connection conductors are led out from positions different in the height direction. In this case, the gap between the external connection conductor on the lower side in the height direction and the upper housing member becomes large. Therefore, it is difficult to effectively seal this gap with an adhesive. Summary of the Invention

[0007] Therefore, an object of the present invention is to provide a fluid control device that more effectively seals an opening through which an external connection conductor protrudes to the outside of the housing.

[0008] The fluid control device according to one embodiment of the invention includes a pump body, a housing, and an adhesive. The pump body includes a piezoelectric element, a diaphragm on which the piezoelectric element is arranged, a first power supply conductor and a second power supply conductor for applying a drive signal supplied to the piezoelectric element, a first external connection conductor connected to the first power supply conductor, a second external connection conductor connected to the second power supply conductor, and an auxiliary component. The housing includes a side wall, the housing houses the pump body inside, and the housing has a first opening and a second opening penetrating the side wall. The adhesive fixes a part of the housing and the pump body and seals the interior of the housing from the outside. The first external connection conductor protrudes to the outside of the housing through the first opening, and the second external connection conductor protrudes to the outside of the housing through the second opening.

[0009] In a first direction parallel to the height direction of the side wall, the first external connection conductor and the second external connection conductor are arranged at different positions. When viewed in the first direction, the auxiliary component and the second external connection conductor are arranged at overlapping positions. In the first direction, the first external connection conductor and the auxiliary component are arranged on the same side with respect to the second external connection conductor.

[0010] In this structure, the auxiliary component is arranged between the second external connection conductor and the housing, whereby the gap for filling the adhesive between the second external connection conductor and the housing becomes smaller. As a result, the adhesive is more reliably filled in the second opening.

[0011] According to this invention, it is possible to more reliably seal the opening through which the external connection conductor protrudes to the outside of the housing. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is an exploded perspective view of a fluid control device according to a first embodiment of the present invention.

[0013] Figure 2 is an exploded perspective view of a pump body of a fluid control device according to a first embodiment of the present invention.

[0014] Figure 3 (A) is a perspective view enlarging a part of a terminal mounting portion of a fluid control device according to the first embodiment. Figure 3 (B) is a view after removing the cover in (A) of Figure 3 (A).

[0015] Figure 4 (A) is a top view enlarging a part of a terminal mounting portion of a fluid control device according to the first embodiment, Figure 4 (B) is a view seen from the outer end (top) side of the terminal mounting portion looking at this part of the terminal mounting portion, Figure 4 (C) is a view showing Figure 4 the cross-section taken along line A-A shown in (A) of

[0016] Figure 5 is an exploded perspective view of a fluid control device according to a second embodiment of the present invention.

[0017] Figure 6 (A) is a perspective view enlarging a part of a terminal mounting portion of a fluid control device according to the second embodiment. Figure 6 (B) is a view after removing the cover in (A) of Figure 6 (A).

[0018] Figure 7 is an exploded perspective view of a fluid control device according to a third embodiment of the present invention.

[0019] Figure 8 (A) is a perspective view of an enlarged portion of the terminal mounting portion of the fluid control device according to the third embodiment. Figure 8 (B) is a view after removing the Figure 8 cover in (A).

[0020] Figure 9 (A) is a top view of an enlarged portion of the terminal mounting portion of the fluid control device according to the third embodiment, Figure 9 (B) is a view of the terminal mounting portion as seen from the outer end (top) side of the terminal mounting portion.

[0021] Figure 10 is an exploded perspective view of the fluid control device according to the fourth embodiment of the present invention.

[0022] Figure 11 (A) is a perspective view of an enlarged portion of the terminal mounting portion of the fluid control device according to the fourth embodiment. Figure 11 (B) is a view after removing the Figure 11 cover in (A).

[0023] Figure 12 (A) is a top view of an enlarged portion of the terminal mounting portion of the fluid control device according to the fourth embodiment, Figure 12 (B) shows Figure 12 the B-B cross-sectional view shown in (A).

[0024] Figure 13 is a view for explaining an example of the manufacturing method of the first flat plate of the fluid control device according to the embodiment of the present invention.

[0025] Figure 14 (A)- Figure 14 (F) are views showing various derivative examples of the auxiliary member. Detailed Embodiments

[0026] [First Embodiment]

[0027] The fluid control device according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 is an exploded perspective view of the fluid control device according to the first embodiment of the present invention. In addition, in each of the drawings shown in the respective embodiments including this embodiment, in order to make the structure of the fluid control device easy to understand, the shapes of the respective constituent elements are exaggerated locally or as a whole.

[0028] As Figure 1As shown, the fluid control device 10 includes a pump main body 20, a main housing 30, and a cover 40. The "housing" of the present invention is constituted by the main housing 30 and the cover 40.

[0029] (Structure of the housing)

[0030] The main housing 30 includes a main member 31, a nozzle 321, and a nozzle 322. The main member 31, the nozzle 321, and the nozzle 322 are integrally formed of an insulating resin material, for example.

[0031] The main member 31 includes a bottom wall 311 and a side wall 312. The side wall 312 stands in a direction orthogonal to the main surface of the bottom wall 311. Due to this shape of the side wall 312, the main member 31 has a recess 33 that starts to recess from the top surface side. The direction in which the side wall 312 stands, that is, the height direction of the side wall 312, the height direction of the main member 31, or the direction parallel to the height direction of the main housing 30 ( Figure 1 the Z-axis direction) corresponds to the "first direction" of the present invention.

[0032] The recess 33 has three levels of depth and is constituted by a recess 331, a recess 332, and a recess 333. The recess 332 is deeper than the recess 331, and the recess 333 is deeper than the recess 332. When the main member 31 is viewed from above (viewed in the direction orthogonal to the bottom wall 311 ( Figure 1 the Z-axis direction)), the recess 333 is disposed at the center. The recess 332 is disposed along the outer periphery of the recess 333. The recess 331 is disposed along the outer periphery of the recess 332.

[0033] The main member 31 has a terminal mounting portion 35 that projects outward from the side wall 312. The surface of the terminal mounting portion 35 has a step and includes a first surface 351 and a second surface 352. The second surface 352 is disposed at a position lower than the first surface 351.

[0034] In the portion of the side wall 312 of the main member 31 where the terminal mounting portion 35 projects, a first opening 341 and a second opening 342 are formed. The first opening 341 and the second opening 342 are in a shape that penetrates the side wall 312 and reach the recess 332.

[0035] The nozzle 321 and the nozzle 322 are mounted at positions different from the position where the terminal mounting portion 35 is disposed on the side wall 312 of the main member 31. The through-hole of the nozzle 321 communicates with the recess 333 through a through-hole (not shown) that penetrates the side wall 312 in the thickness direction. The through-hole of the nozzle 322 communicates with the recess 332 through a through-hole (not shown) that penetrates the side wall 312 in the thickness direction.

[0036] The cover 40 is a flat plate, for example, made of an insulating resin material. The outer shape of the cover 40 is substantially the same as the inner shape of the side wall 312 of the main housing 30, that is, the outer shape of the recess 331.

[0037] The housing is formed by fitting the cover 40 into the recess 331 of the main housing 30. In this way, the internal space of the housing is realized by covering the recesses 332 and 333 of the main housing 30 with the cover 40.

[0038] (Structure of the pump body 20)

[0039] Figure 2 is an exploded perspective view of the pump body of the fluid control device according to the first embodiment of the present invention. As Figure 2 shown, the pump body 20 includes a diaphragm 21, a piezoelectric element 22, a first flat plate 23, a second flat plate 24, and an insulating layer 25.

[0040] The diaphragm 21 is made of a conductor. The diaphragm 21 includes a central flat plate 211, a frame 212, and a plurality of connecting members 213. The central flat plate 211 is a flat plate having a circular shape when viewed from above (when viewed in the thickness direction). The frame 212 is a flat plate disposed outside the outer edge of the central flat plate 211. The frame 212 has a circular opening in the center. The central flat plate 211 is disposed within this opening.

[0041] The plurality of connecting members 213 are in the shape of beams. The plurality of connecting members 213 are disposed between the central flat plate 211 and the frame 212. The plurality of connecting members 213 are connected to the outer edge of the diaphragm 21 and the inner edge of the frame 212. A plurality of gaps 214 penetrate the diaphragm 21 in the thickness direction. The plurality of gaps 214 are disposed between the central flat plate 211 and the frame 212. The plurality of gaps 214 are portions surrounded by the central flat plate 211, the frame 212, and the plurality of connecting members 213 in the region between the central flat plate 211 and the frame 212.

[0042] The piezoelectric element 22 includes a disc-shaped piezoelectric body and driving electrodes. The driving electrodes are respectively formed on two main surfaces of the piezoelectric body.

[0043] The first flat plate 23 includes a main body 231, a first external connection conductor 232, a first power supply conductor 233, and an auxiliary member 239. The main body 231, the first external connection conductor 232, the first power supply conductor 233, and the auxiliary member 239 are integrally formed from a single flat conductor.

[0044] The main body 231 is annular and has an opening 230. The main body 231 is approximately the same shape as the frame 212 of the diaphragm 21. The first external connection conductor 232 is in a straight line shape with a specified width. The first external connection conductor 232 protrudes outward from the outer peripheral end of the main body 231. The first power supply conductor 233 is in a straight line shape with a specified width. The first power supply conductor 233 protrudes into the opening 230 of the main body 231 from the inner peripheral end of the main body 231.

[0045] The auxiliary component 239 is in a straight line shape with a specified width. The auxiliary component 239 protrudes outward from the outer peripheral end of the main body 231 by a length L (refer to (A) of Figure 4 . The auxiliary component 239 has an opening 2391. As shown in the drawings, the opening shape of the opening 2391 is, for example, circular. The opening 2391 corresponds to the "first through hole" of the present invention.

[0046] The second flat plate 24 includes a main body 241 and a second external connection conductor 242. The main body 241 and the second external connection conductor 242 are integrally formed from a single flat plate conductor.

[0047] The main body 241 is annular and has an opening 240. The main body 241 is approximately the same shape as the frame 212 of the diaphragm 21. The main body 241 corresponds to the second power supply conductor of the present invention. The second external connection conductor 242 is in a straight line shape with a specified width. The second external connection conductor 242 protrudes outward from the outer peripheral end of the main body 241.

[0048] The insulating layer 25 is annular and has an opening 250. The insulating layer 25 is approximately the same shape as the frame 212 of the diaphragm 21.

[0049] The piezoelectric element 22, the insulating layer 25, and the first flat plate 23 are arranged on the upper side of the diaphragm 21. The second flat plate 24 is arranged on the lower side of the diaphragm 21.

[0050] More specifically, the piezoelectric element 22 is provided on the upper surface of the central flat plate 211 of the diaphragm 21. The piezoelectric element 22 is fixed to the central flat plate 211 by physical means, and the lower drive electrode of the piezoelectric element 22 is electrically connected to the central flat plate 211.

[0051] The insulating layer 25 is arranged on the upper surface of the frame 212 of the diaphragm 21. The first flat plate 23 is arranged such that the main body 231 overlaps with the upper surface of the insulating layer 25. The first power supply conductor 233 of the first flat plate 23 is electrically connected to the upper drive electrode of the piezoelectric element 22. The second flat plate 24 is arranged such that the main body 241 overlaps with the lower surface of the frame 212 of the diaphragm 21. The main body 241 of the second flat plate 24 is fixed to the frame 212 of the diaphragm 21 by physical means and is electrically connected to the frame 212 of the diaphragm 21.

[0052] (The fixing form of the pump main body 20 to the housing)

[0053] The pump main body 20 is embedded in the recess 332. Thus, the pump main body 20 is housed inside the housing. At this time, in the pump main body 20, the second flat plate 24 faces the bottom wall 311 side, and the first flat plate 23 faces the cover 40 side. The space formed by the recess 333 on the lower side of the pump main body 20 communicates with the through hole of the nozzle 321. The space formed by the recess 332 on the upper side of the pump main body 20 communicates with the through hole of the nozzle 322.

[0054] In this state, the main housing 30 and the pump main body 20 are fixed by an adhesive applied to the bottom surface of the recess 332. Further, the surface of the recess 331 of the main housing 30, the inner wall surface of the side wall 312, and the cover 40 are bonded together by an adhesive (not shown).

[0055] Thus, the pump main body 20 is fixed in the space surrounded by the main housing 30 and the cover 40 (the space inside the housing). And although the details will be described below, the first opening 341 and the second opening 342 are sealed by using an adhesive, so that the inside of the housing that houses the pump main body 20 is sealed from the outside except for the through holes of the nozzle 321 and the nozzle 322.

[0056] (Outline of the fluid control operation of the fluid control device 10)

[0057] The fluid control device 10 receives the supply of a drive signal from the outside via the first external connection conductor 232 and the second external connection conductor 242. The drive signal is supplied to the piezoelectric element via the first power supply conductor 233 of the first flat plate 23 and the main body 241 (the second power supply conductor) of the second flat plate 24.

[0058] The piezoelectric element 22 of the pump main body 20 generates strain due to this drive signal. The central flat plate 211 of the diaphragm 21 forms vibrations due to the strain of the piezoelectric element 22. Due to this vibration, fluid (for example, a gas such as air) is sucked into the housing through the through hole of the nozzle 321 and is sent out through the through hole of the nozzle 322.

[0059] At this time, the inside of the housing is sealed (closed) from the outside, whereby the fluid control device 10 can suck and send out fluid with high efficiency.

[0060] (Structure of the part of the first external connection conductor 232, the second external connection conductor 242, the first opening 341, and the second opening 342)

[0061] Figure 3 (A) is a perspective view of an enlarged part of the terminal mounting portion of the fluid control device according to the first embodiment. Figure 3 (B) is a view withFigure 3 The figure after the cover in (A) thereof. In addition, in Figure 3 (A) thereof, Figure 3 In (B) thereof, the illustration of the adhesive is omitted. Figure 4 (A) thereof is a top view showing an enlarged view of the terminal mounting portion of the fluid control device according to the first embodiment, Figure 4 (B) thereof is a view seen from the outer end (top end) side of the terminal mounting portion looking at the terminal mounting portion, Figure 4 (C) thereof shows Figure 4 The view of the A - A cross section shown in (A) thereof.

[0062] (The first opening 341)

[0063] The first external connection conductor 232 hooks the first opening 341 and protrudes to the outside of the main housing 30 (outside the side wall 312) and extends to the first surface 351 of the terminal mounting portion 35. Thus, at the first opening 341, the first external connection conductor 232 is disposed between the cover 40 and the main housing 30.

[0064] At the first opening 341, an insulating adhesive 60 is filled. The first surface 351 of the terminal mounting portion 35 is at a position higher than the second surface 352 and is close to the cover 40. Therefore, the gap between the cover 40 and the first external connection conductor 232 is small. Thus, at the first opening 341, the adhesive 60 can be easily filled. Thereby, the first opening 341 can be easily and more surely sealed by the adhesive 60.

[0065] (The second opening 342)

[0066] The second external connection conductor 242 protrudes to the outside of the main housing 30 (outside the side wall 312) via the second opening 342 and extends to the second surface 352 of the terminal mounting portion 35.

[0067] The auxiliary member 239 is disposed on the upper side of the second external connection conductor 242 (on the side of the first external connection conductor 232 in the height direction of the housing of the fluid control device 10). The width of the auxiliary member 239 is substantially the same as the width of the second external connection conductor 242. The auxiliary member 239 is disposed at a position opposed to the second external connection conductor 242. The auxiliary member 239 is disposed at a position opposed to the portion overlapping with the cover 40 in the part of the root side connected to the main body 241 at the second external connection conductor 242.

[0068] Thus, at the second opening 342, the auxiliary member 239 and the second external connection conductor 242 are disposed between the cover 40 and the main housing 30.

[0069] An insulating adhesive 60 is filled at the second opening 342. The second surface 352 of the terminal mounting portion 35 is located lower than the first surface 351 and is far from the cover 40. Therefore, the gap between the cover 40 and the second external connection conductor 242 is large.

[0070] However, in this structure, an auxiliary member 239 is disposed between the cover 40 and the second external connection conductor 242. As a result, the adhesive 60 is filled between the cover 40 and the auxiliary member 239 and between the auxiliary member 239 and the second external connection conductor 242. The gap between the cover 40 and the auxiliary member 239 and the gap between the auxiliary member 239 and the second external connection conductor 242 are smaller than the gap between the cover 40 and the second external connection conductor 242.

[0071] Therefore, in the second opening 342, even if the second external connection conductor 242 is far from the cover 40, due to the presence of the auxiliary member 239, the adhesive 60 can be easily filled. Therefore, the second opening 342 can be easily and more reliably sealed with the adhesive 60.

[0072] Moreover, the auxiliary member 239 has an opening 2391. The opening 2391 is a hole that penetrates from the upper surface to the lower surface of the auxiliary member 239. In the part where the opening 2391 is formed in the auxiliary member 239, the remaining part of the conductor is less than other parts of the auxiliary member 239, and thus corresponds to the "narrow width portion" of the present invention. According to this structure, when the adhesive 60 is coated on the upper surface side of the auxiliary member 239, the adhesive 60 easily enters between the auxiliary member 239 and the second external connection conductor 242. As a result, the adhesive 60 is easily filled between the auxiliary member 239 and the second external connection conductor 242. Therefore, the second opening 342 can be more easily and more reliably sealed with the adhesive 60.

[0073] At this time, the length L of the auxiliary member 239 is preferably more than twice the gap GAP between the auxiliary member 239 and the second external connection conductor 242. According to this structure, the adhesive 60 that enters between the auxiliary member 239 and the second external connection conductor 242 is not likely to flow out from between them. As a result, the state where the adhesive 60 is filled between the auxiliary member 239 and the second external connection conductor 242 is more reliably maintained.

[0074] In addition, the width of the auxiliary member 239 (for example, the width W239 in (B) as shown in Figure 9 is preferably more than twice the gap GAP between the auxiliary member 239 and the second external connection conductor 242. According to this structure, the adhesive 60 that enters between the auxiliary member 239 and the second external connection conductor 242 is not likely to flow out from between them. As a result, the state where the adhesive 60 is filled between the auxiliary member 239 and the second external connection conductor 242 is more reliably maintained.

[0075] In addition, it is also possible that the auxiliary component 239 is not integrally formed with the first flat plate 23. However, by integrally forming the auxiliary component 239 with the first flat plate 23, when the first external connection conductor 232 passes through the first opening 341, the position of the auxiliary component 239 can be easily and surely achieved, so that the positional relationship that the auxiliary component 239 passes through the second opening 342 is formed.

[0076] In addition, a groove 51 is formed on the first surface 351, and a groove 52 is formed on the second surface 352. However, the grooves 51 and 52 can be omitted. However, by providing the grooves 51 and 52, the following effects can be obtained.

[0077] The first external connection conductor 232 is fixed to the first surface 351 by an adhesive 60. At this time, since the first surface 351 is provided with the groove 51, for example, the excessively applied adhesive 60 is received in the groove 51. As a result, the adhesive 60 is appropriately arranged with respect to the bottom surface and the side surface of the first external connection conductor 232. Therefore, the first external connection conductor 232 is more surely fixed to the terminal mounting portion 35, and a more reliable electrical connection to the outside can be achieved. Similarly, since the second surface 352 is provided with the groove 52, the adhesive 60 is appropriately arranged with respect to the bottom surface and the side surface of the second external connection conductor 242. Therefore, the second external connection conductor 242 is more surely fixed to the terminal mounting portion 35, and a more reliable electrical connection to the outside can be achieved.

[0078] In addition, the adhesive 60 that fixes the first external connection conductor 232 to the first surface 351 is connected to the adhesive 60 that seals the first opening 341. The adhesive 60 that fixes the second external connection conductor 242 to the second surface 352 is connected to the adhesive 60 that seals the second opening 342. Thus, the fluid control device 10 can simultaneously maintain the sealed state at the first opening 341 and the second opening 342 and the fixed state at the first external connection conductor 232 and the second external connection conductor 242 by using the adhesive 60. Moreover, the fluid control device 10 can stably maintain these sealed state and fixed state.

[0079] [Second Embodiment]

[0080] The fluid control device according to the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 5 It is an exploded perspective view of the fluid control device according to the second embodiment of the present invention. Figure 6 (A) is a perspective view of enlarging the terminal mounting portion of the fluid control device according to the second embodiment. Figure 6 (B) is the figure after removing the cover in (A) of Figure 6 (A). In addition, in Figure 6(A) of Figure 6 In (B), the illustration of the adhesive is omitted.

[0081] As Figure 5 and Figure 6 (A) of Figure 6 As shown in (B), compared with the fluid control device 10 according to the first embodiment, the fluid control device 10A according to the second embodiment is different in the shape of the auxiliary member 239A of the pump main body 20A. Other structures of the fluid control device 10A are the same as those of the fluid control device 10 according to the first embodiment, and the description of the same parts is omitted.

[0082] The auxiliary member 239A has a groove 2392. The groove 2392 is shaped to be recessed from both side ends of the auxiliary member 239A toward the center in the width direction. In the part of the auxiliary member 239A where the groove 2392 is formed, the part of the conductor is smaller than other parts and becomes a narrow-width part.

[0083] With such a structure, the adhesive 60 supplied from the side of the auxiliary member 239A close to the cover 40 easily flows through the groove 2392 and into the space between the auxiliary member 239A and the second external connection conductor 242. Thus, the fluid control device 10A has the same effect as the fluid control device 10.

[0084] [Third Embodiment]

[0085] The fluid control device according to the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 7 is an exploded perspective view of the fluid control device according to the third embodiment of the present invention. Figure 8 (A) is a perspective view enlarging the terminal mounting portion of the fluid control device according to the third embodiment. Figure 8 (B) is a view after removing the cover in Figure 8 (A). In addition, in Figure 8 (A), Figure 8 (B), the illustration of the adhesive is omitted. Figure 9 (A) is a top view enlarging the terminal mounting portion of the fluid control device according to the third embodiment, Figure 9 (B) is a view seen from the outer end (top end) side of the terminal mounting portion looking at the terminal mounting portion.

[0086] As Figure 7 and Figure 8 (A) of Figure 8 (B) of Figure 9 (A) of Figure 9As shown in (B), compared with the fluid control device 10 according to the first embodiment, the fluid control device 10B according to the third embodiment is different in the shape of the auxiliary component 239B of the pump main body 20B. Other structures of the fluid control device 10B are the same as those of the fluid control device 10 according to the first embodiment, and descriptions of the same parts are omitted.

[0087] The auxiliary component 239B does not have an opening or a groove. The width W239 of the auxiliary component 239B is smaller than the width W242 of the second external connection conductor 242. That is, the entire auxiliary component 239B is a small-width part.

[0088] The auxiliary component 239B is arranged at a position where both side ends of the second external connection conductor 242 are exposed toward the cover 40 side. That is, the distance WG239 between the side surface of the auxiliary component 239B and the side end surface 3122 of the second opening 342 of the side wall 312 is larger than the distance WG242 between the side surface of the second external connection conductor 242 and the side end surface 3122 of the second opening 342 of the side wall 312.

[0089] With such a structure, the adhesive 60 supplied from the side of the auxiliary component 239B closer to the cover 40 easily flows into the space between the auxiliary component 239B and the second external connection conductor 242. Thus, the fluid control device 10B exhibits the same effect as the fluid control device 10.

[0090] In addition, although the width W239 of the auxiliary component 239B may be approximately the same as or the same as the width W242 of the second external connection conductor 242, it is difficult to obtain the above-mentioned ease of inflow. Therefore, it is preferable that the width W239 of the auxiliary component 239B is smaller than the width W242 of the second external connection conductor 242.

[0091] However, it is preferable that the width W239 of the auxiliary component 239B is more than half of the width W242 of the second external connection conductor 242. Thereby, it is easy to fill the adhesive 60 between the auxiliary component 239B and the second external connection conductor 242. And if the width W239 of the auxiliary component 239B is about half of the width W242 of the second external connection conductor 242, it is possible to achieve the ease of filling the adhesive 60 between the auxiliary component 239B and the second external connection conductor 242 and the effect of using the auxiliary component 239B to seal the second opening 342 in a balanced manner. In addition, this concept is not limited to the width W239 of the auxiliary component 239B in the third embodiment, and can also be applied to the diameter φ of the opening 2391 in the first embodiment and the depth of the groove 2392 in the second embodiment.

[0092] [Fourth Embodiment]

[0093] The fluid control device according to the fourth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 10 It is an exploded perspective view of the fluid control device according to the fourth embodiment of the present invention. Figure 11 (A) thereof is a perspective view enlarging the terminal mounting portion of the fluid control device according to the fourth embodiment. Figure 11 (B) thereof is a view after removing the cover in Figure 11 (A). In addition, in Figure 11 (A), Figure 11 (B), the illustration of the adhesive is omitted. Figure 12 (A) thereof is a top view enlarging the terminal mounting portion of the fluid control device according to the fourth embodiment, Figure 12 (B) thereof is a view showing the B-B cross section shown in Figure 12 (A).

[0094] As shown in Figure 10 , Figure 11 (A), Figure 11 (B), Figure 12 (A), Figure 12 (B), compared with the fluid control device 10 according to the first embodiment, the shape of the second external connection conductor 242C of the fluid control device 10C according to the fourth embodiment is different. Other structures of the fluid control device 10C are the same as those of the fluid control device 10 according to the first embodiment, and the description of the same parts is omitted.

[0095] The second external connection conductor 242C has a through hole 2421. The through hole 2421 is formed at a position overlapping with the opening 2391 of the auxiliary member 239. The through hole 2421 corresponds to the second through hole of the present invention.

[0096] With such a structure, the adhesive 60 below the second external connection conductor 242C also flows into the space between the auxiliary member 239 and the second external connection conductor 242C. That is, the adhesive 60 for fixing the second external connection conductor 242C to the second surface 352 also flows into the space between the auxiliary member 239 and the second external connection conductor 242C. Therefore, the adhesive 60 easily flows into the space between the auxiliary member 239 and the second external connection conductor 242C. Thus, the fluid control device 10C has the same function and effect as the fluid control device 10.

[0097] In addition, it is also possible that the through hole 2421 and the opening 2391 do not overlap. However, by overlapping the through hole 2421 and the opening 2391, the area where the conductor portion of the auxiliary component 239 and the conductor portion of the second external connection conductor 242C face each other can be obtained. Thereby, the fixing strength at the auxiliary component 239 and the second external connection conductor 242C can be improved.

[0098] (An example of the manufacturing method of the first flat plate)

[0099] Figure 13 is a diagram for explaining an example of the manufacturing method of the first flat plate of the fluid control device according to the embodiment of the present invention. As Figure 13 shown, the first flat plate 23 is supported by the frames FM23 arranged on both sides. Moreover, this structure can be obtained by blanking a flat plate of such a size that a plurality of first flat plates 23 can be arranged and formed using a mold.

[0100] In the case of performing such blanking, a distance capable of forming the first external connection conductor 232 needs to be separated between the main body 231 of the first flat plate 23 and one side frame FM23. Therefore, an auxiliary component 239 is arranged in the blanked portion between the main body 231 and the frame FM23. Thereby, even if the auxiliary component 239 is not separately formed with respect to the main body 231 including the first external connection conductor 232, the auxiliary component 239 can be formed using the portion that is originally discarded due to blanking. Furthermore, the auxiliary component 239 and the first external connection conductor 232 can be easily arranged in the horizontal direction, and the position of the auxiliary component 239 relative to the first external connection conductor 232 can be easily and accurately achieved.

[0101] (Derivative examples of the shape of the auxiliary component)

[0102] Figure 14 of (A)- Figure 14 of (F) is a diagram showing various derivative examples of the auxiliary component.

[0103] In Figure 14 of (A), the auxiliary component 239E has a plurality of through holes 2393. In Figure 14 of (B), the auxiliary component 239F has a through hole 2394 with a rectangular opening shape. In Figure 14 of (C), the auxiliary component 239G has a shape with a narrowed tip.

[0104] In Figure 14 of (D), the auxiliary component 239H has a concave portion 2395 that is recessed from the tip toward the main body 231 side. In Figure 14 of (E), the auxiliary component 239I has a plurality of grooves 2396 that are recessed from both side ends.Figure 14 In (F), when viewed from above, the auxiliary member 239J is semi-elliptical.

[0105] These auxiliary members have in common that they have a small-width portion. Thus, by having the small-width portion, the adhesive can easily flow between the auxiliary member and the second external connection conductor as described above.

[0106] In addition, in each of the above-described embodiments, an example is shown in which the auxiliary member is connected to and integrally formed with the main body 231 of the first flat plate 23. However, the auxiliary member may be separated from the main body 231. In addition, the auxiliary member is not limited to a conductive material and may be an insulating material.

[0107] Furthermore, the above-described embodiments, manufacturing examples, and derivative examples can be appropriately combined, and the effects corresponding to each combination can be achieved.

[0108] (1) A fluid control device, wherein,

[0109] The above fluid control device includes:

[0110] A pump main body, including a piezoelectric element, a diaphragm on which the piezoelectric element is disposed, a first power supply conductor and a second power supply conductor for applying a drive signal supplied to the piezoelectric element, a first external connection conductor connected to the first power supply conductor, a second external connection conductor connected to the second power supply conductor, and an auxiliary member;

[0111] A housing, including a side wall that houses the pump main body therein, the housing having a first opening and a second opening that penetrate the side wall; and

[0112] An adhesive that fixes a part of the housing and the pump main body and seals the inside of the housing from the outside,

[0113] The first external connection conductor protrudes to the outside of the housing through the first opening,

[0114] The second external connection conductor protrudes to the outside of the housing through the second opening,

[0115] In a first direction parallel to the height direction of the side wall, the first external connection conductor and the second external connection conductor are disposed at different positions,

[0116] When viewed along the first direction, the auxiliary member and the second external connection conductor are disposed at overlapping positions,

[0117] In the first direction, the first external connection conductor and the auxiliary member are disposed on the same side with respect to the second external connection conductor.

[0118] (2), based on the fluid control device described in (1), wherein,

[0119] The above auxiliary component has a small-width portion that is smaller than the above second external connection conductor in the width direction.

[0120] (3), based on the fluid control device in (2), wherein,

[0121] The above auxiliary component has the above small-width portion by having a first through-hole or groove.

[0122] (4), based on the fluid control device in any one of (1) to (3), wherein,

[0123] The length between both ends of the above auxiliary component in the direction parallel to the direction in which the above second external connection conductor protrudes is more than twice the interval between the above auxiliary component and the above second external connection conductor.

[0124] (5), based on the fluid control device in any one of (1) to (4), wherein,

[0125] The width between both ends of the above auxiliary component in the direction orthogonal to the direction in which the above second external connection conductor protrudes and the direction in which the above second external connection conductor and the above auxiliary conductor are arranged is more than twice the interval between the above auxiliary component and the above second external connection conductor.

[0126] (6), based on the fluid control device in any one of (1) to (5), wherein,

[0127] The distance between the above auxiliary component and the side wall surface of the above second opening is larger than the distance between the above second external connection conductor and the side wall surface of the above second opening.

[0128] (7), based on the fluid control device in any one of (1) to (6), wherein,

[0129] The above second external connection conductor has a second through-hole at the portion facing the above auxiliary component.

[0130] (8), based on the fluid control device in any one of (1) to (7), wherein,

[0131] The above housing includes:

[0132] A main housing, having the above side wall and having a recess for housing the above pump body; and

[0133] A cover for covering the above recess of the above main housing,

[0134] The interior of the housing is formed by a space surrounded by the main housing and the lid described above.

[0135] (9), based on the fluid control device of any one of (1) to (8), wherein

[0136] The auxiliary component is integrally formed with the first external connection conductor.

[0137] (10), based on the fluid control device of any one of (1) to (9), wherein

[0138] A first flat plate and a second flat plate each having conductivity are provided.

[0139] The first flat plate and the second flat plate are arranged such that the piezoelectric element and the diaphragm are sandwiched between the first flat plate and the second flat plate in the first direction.

[0140] The first power supply conductor, the first external connection conductor, and the auxiliary component are formed by the first flat plate.

[0141] The second power supply conductor and the second external connection conductor are formed by the second flat plate.

[0142] Explanation of reference numerals

[0143] 10, 10A, 10B, 10C: Fluid control devices; 20, 20A, 20B, 20C... Pump main body; 21... Diaphragm; 22... Piezoelectric element; 23... First flat plate; 24... Second flat plate; 25... Insulating layer; 30... Main housing; 31... Main component; 33... Recess; 35... Terminal mounting part; 40... Cover; 51, 52... Groove; 60... Adhesive; 211... Central flat plate; 212... Frame; 213... Connecting component; 214... Gap; 230... Opening; 231... Main body; 232... First external connection conductor; 233... First power supply conductor; 239, 239A, 239B, 239E, 239F, 239G, 239H, 239I, 239J... Auxiliary components; 240... Opening; 241... Main body; 242, 242C... Second external connection conductor; 250... Opening; 311... Bottom wall; 312... Side wall; 321, 322... Nozzles; 331, 332, 333... Recesses; 341... First opening; 342... Second opening; 351... First surface; 352... Second surface; 2391... Opening; 2392... Groove; 2393, 2394... Through holes; 2395... Recess; 2396... Groove; 2421... Through hole; 3122... Side end face; FM23... Frame.

Claims

1. A fluid control device, wherein, the fluid control device includes: a pump body including a piezoelectric element, a diaphragm on which the piezoelectric element is disposed, a first power supply conductor and a second power supply conductor for applying a drive signal supplied to the piezoelectric element, a first external connection conductor connected to the first power supply conductor, a second external connection conductor connected to the second power supply conductor, and an auxiliary component; a housing including side walls that house the pump body therein, the housing having a first opening and a second opening penetrating the side walls; and an adhesive that fixes a part of the housing and the pump body and seals the inside of the housing from the outside, the first external connection conductor protrudes to the outside of the housing through the first opening, the second external connection conductor protrudes to the outside of the housing through the second opening, in a first direction parallel to the height direction of the side wall, the first external connection conductor and the second external connection conductor are disposed at different positions, when viewed in the first direction, the auxiliary component and the second external connection conductor are disposed at overlapping positions, in the first direction, the first external connection conductor and the auxiliary component are disposed on the same side with respect to the second external connection conductor.

2. The fluid control device according to claim 1, wherein, the auxiliary component has a small-width portion that is smaller than the second external connection conductor in the width direction.

3. The fluid control device according to claim 2, wherein, the auxiliary component has the small-width portion by having a first through hole or a groove.

4. The fluid control device according to any one of claims 1 to 3, wherein, a length between both ends of the auxiliary component in a direction parallel to the direction in which the second external connection conductor protrudes is more than twice the interval between the auxiliary component and the second external connection conductor.

5. The fluid control device according to any one of claims 1 to 4, wherein, a width between both ends of the auxiliary component in a direction orthogonal to the direction in which the second external connection conductor protrudes and the direction in which the second external connection conductor and the auxiliary component are arranged is more than twice the interval between the auxiliary component and the second external connection conductor.

6. The fluid control device according to any one of claims 1 to 5, wherein, a distance between the auxiliary component and a side end surface of the second opening is larger than a distance between the second external connection conductor and a side wall surface of the second opening.

7. The fluid control device according to any one of claims 1 to 6, wherein, the second external connection conductor has a second through hole at a portion facing the auxiliary component.

8. The fluid control device according to any one of claims 1 to 7, wherein, the housing includes: a main housing having the side walls and having a recess for housing the pump body; and a lid that covers the recess of the main housing, the inside of the housing is formed by a space surrounded by the main housing and the lid.

9. The fluid control device according to any one of claims 1 to 8, wherein, The auxiliary component is integrally formed with the first external connection conductor.

10. The fluid control device according to any one of claims 1 to 9, wherein a first flat plate and a second flat plate each having conductivity are provided, the first flat plate and the second flat plate are arranged such that the piezoelectric element and the diaphragm are sandwiched between the first flat plate and the second flat plate in the first direction, the first power supply conductor, the first external connection conductor, and the auxiliary component are formed by the first flat plate, the second power supply conductor and the second external connection conductor are formed by the second flat plate.

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