Rotating disc type chip high-speed cleaning detection table and equipment

Abstract

The invention relates to the technical field of chip cleaning detection equipment, in particular to a rotating disc type chip high-speed cleaning detection table and equipment, and the detection table comprises a multi-station rotating disc mechanism, a position positioning mechanism, an end face detection mechanism, a cleaning mechanism and a gold thread detection mechanism; the multi-station rotary table mechanism comprises a rotary table and a plurality of turnover suction nozzles arranged around the rotary table at equal intervals in the circumferential direction. The plurality of turnover suction nozzles are arranged corresponding to the loading station, the unloading station and the plurality of turnover stations on the rotary table; the position positioning mechanism, the end face detection mechanism, the cleaning mechanism and the gold thread detection mechanism are sequentially arranged at the multiple turnover stations in the circumferential direction of the rotary table. The position positioning mechanism, the end face detection mechanism, the cleaning mechanism and the gold thread detection mechanism are correspondingly arranged on the outer sides of the multiple turnover suction nozzles in the radial direction of the rotary table. The position positioning mechanism can position the position of the chip. The rotating disc type layout shortens the turnover path of the chips among the stations, the multiple stations work at the same time, and the detecting and cleaning efficiency of the equipment on the chips is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip cleaning and detection equipment, and particularly relates to a rotary chip high-speed cleaning and detection table and equipment. Background Art

[0002] The chip cleaning and detection equipment is an integrated equipment that combines the cleaning function and the detection function of the chip. In the whole process, defect detection and dirt cleaning of the chip are carried out. The defect detection includes detecting the front surface, back surface, two end faces (side cavity surfaces) and gold wires of the chip, and the dirt on the chip is cleaned by the cleaning mechanism.

[0003] Since there are many parts of the chip that need to be defect-detected, and the end faces of the chip need to be re-inspected after being cleaned by the cleaning mechanism, there are many mechanisms on the existing chip cleaning and detection equipment, and the process path is usually set in a straight line, resulting in a long chip turnover path and a long turnover working hour. Secondly, the chip is turned over between each working station by a manipulator or a handling mechanism erected on the frame. The handling mechanism moves frequently between each working station, and the action of the handling mechanism for picking and placing the chip is slow, which further affects the cleaning and detection efficiency of the chip. Summary of the Invention

[0004] (1) Technical Problems to be Solved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a rotary chip high-speed cleaning and detection table and equipment, which solves the technical problems that the turnover working hour between each working station of the chip cleaning and detection equipment is long and the action of the handling mechanism for picking and placing the chip is frequent, resulting in low cleaning and detection efficiency of the chip.

[0006] (2) Technical Solutions

[0007] In order to achieve the above object, the rotary chip high-speed cleaning and detection table of the present invention includes a multi-station rotary table mechanism, a position positioning mechanism, an end face detection mechanism, a cleaning mechanism and a gold wire detection mechanism;

[0008] The multi-station rotary table mechanism includes a rotary table and a plurality of turnover suction nozzles circumferentially and equally spaced around the rotary table; the plurality of turnover suction nozzles are arranged corresponding to the loading station, the unloading station and a plurality of turnover stations on the rotary table;

[0009] The loading station and the unloading station are adjacent to each other; the position positioning mechanism, the end face detection mechanism, the cleaning mechanism and the gold wire detection mechanism are sequentially arranged along the circumferential direction of the rotary table at the plurality of turnover stations; and the position positioning mechanism, the end face detection mechanism, the cleaning mechanism and the gold wire detection mechanism are correspondingly arranged along the radial direction of the rotary table outside the plurality of turnover suction nozzles;

[0010] The position positioning mechanism can position the chip position.

[0011] Optionally, the turnover suction nozzle includes a connecting plate, a regulator, an adapter plate, and a suction nozzle body;

[0012] The connecting plate is connected to the top surface of the rotary table; the first end surface of the regulator is connected to the connecting plate, the second end surface of the regulator is connected to the adapter plate; the suction nozzle body is connected to the adapter plate;

[0013] The regulator, the adapter plate, and the suction nozzle body are all suspended outside the rotary table; the regulator can drive the first end surface and the second end surface to move towards each other.

[0014] Optionally, the turntable type high-speed chip cleaning and detection table further includes a bracket, and an angle positioning mechanism and a cleaning positioning mechanism arranged on the bracket;

[0015] The bracket is erected on one side of the rotary table, and the end surface detection mechanism and the cleaning mechanism are arranged on the other side of the bracket;

[0016] The angle positioning mechanism and the end surface detection mechanism are arranged at the same turnover station; the angle positioning mechanism can position the position angle of the chip;

[0017] The cleaning positioning mechanism and the cleaning mechanism are arranged at the same turnover station; the cleaning positioning mechanism can position the chip cleaning position.

[0018] Optionally, both the angle positioning mechanism and the cleaning positioning mechanism include a front detection camera and a mounting plate;

[0019] One end of the mounting plate is connected to the top end of the bracket, and the other end is connected to the front detection camera;

[0020] The camera of the front detection camera is arranged above the turnover suction nozzle.

[0021] Optionally, the multi-station turntable mechanism further includes a rotating shaft and a cover plate;

[0022] Concentric holes are formed on the rotary table; multiple arc-shaped plates are coaxially arranged at the bottom end of the cover plate; a diversion hole is formed on the cover plate, and the diversion hole is communicated with the concentric holes;

[0023] The rotating shaft passes through the concentric holes and is coaxially connected to the bottom end of the cover plate; the arc-shaped plates are coaxially connected to the top end of the rotary table.

[0024] Optionally, in the radial direction of the rotary table, the arc-shaped plates and the turnover suction nozzles are arranged in a staggered manner.

[0025] Optionally, the rotary chip high-speed cleaning and detection table further includes an end face re-inspection mechanism;

[0026] The end face re-inspection mechanism and the cleaning mechanism are arranged at the same turnover station.

[0027] Optionally, the cleaning mechanism adopts solid micro-particle cleaning.

[0028] Furthermore, the present invention also provides a chip detection device, which includes the rotary chip high-speed cleaning and detection table as described above; the chip detection device further includes a frame, a loading mechanism, a pusher mechanism, a front detection mechanism, a picking and handling mechanism, a back detection mechanism, a discharging and handling mechanism, and an unloading mechanism;

[0029] The loading mechanism, the rotary chip high-speed cleaning and detection table, and the unloading mechanism are sequentially arranged horizontally on the frame;

[0030] The front detection mechanism, the picking and handling mechanism, and the discharging and handling mechanism are sequentially arranged horizontally on the frame, and the three are slidably connected to the frame along the horizontal direction;

[0031] The pusher mechanism and the back detection mechanism are both arranged on the frame, and both can lift vertically and penetrate the top surface of the frame;

[0032] Among them, the loading mechanism can move above the pusher mechanism; the front detection mechanism can move above the pusher mechanism; the picking and handling mechanism can move between the pusher mechanism, the back detection mechanism, and the loading station; the discharging and handling mechanism can move between the unloading station and the unloading mechanism.

[0033] Optionally, both the picking and handling mechanism and the discharging and handling mechanism include a horizontal sliding mechanism, a lifting mechanism, a rotary adjuster, and a handling suction nozzle;

[0034] The horizontal sliding mechanism is arranged on the frame, and the two are slidably connected along the horizontal direction;

[0035] The lifting mechanism is installed on the horizontal sliding mechanism;

[0036] The rotary adjuster is installed on the lifting mechanism;

[0037] The handling suction nozzle is connected to the output shaft of the rotary adjuster, so that the handling suction nozzle can rotate self about the vertical direction.

[0038] (III) Beneficial effects

[0039] The beneficial effects of the present invention are:

[0040] A plurality of turnover suction nozzles are circumferentially and equally spaced around the turntable. The angle formed by the connection lines between adjacent turnover suction nozzles and the center point of the turntable (set angle) is the angle by which the turntable rotates once. By equally spacing the plurality of turnover suction nozzles, the replacement of the plurality of turnover suction nozzles between the upper and lower workstations can be completed after the turntable rotates by the set angle. The turnover mode of the chip is simple and practical. Compared with the linear process path, the turntable-type process path is shorter, effectively shortening the turnover working hours of the chip.

[0041] Along the radial direction of the turntable, a plurality of mechanisms are correspondingly arranged outside the plurality of turnover suction nozzles one by one. The radial layout method can not only shorten the moving paths of the mechanisms and the corresponding turnover suction nozzles, improving the chip detection efficiency, but also enable more mechanisms to be arranged around the circumference of the turntable. By rotating the turntable in one direction, the entire production line for chip detection and cleaning is integrated on the turntable-type high-speed chip cleaning and detection platform. Compared with the linear mechanism layout method, the turntable-type mechanism layout method reduces the frequency of using the handling mechanism. The handling mechanism only needs to perform loading at the loading station and unloading at the unloading station. The turnover of the chip between multiple workstations in the multi-station turntable mechanism can be completed by rotating the turntable, and there is no need to pick and place the chip through the handling mechanism again, greatly improving the chip cleaning and detection efficiency.

[0042] The turntable-type layout shortens the turnover path of the chip between each workstation, and multiple workstations can operate simultaneously, further improving the chip detection and cleaning efficiency of the turntable-type high-speed chip cleaning and detection platform. Secondly, the loading station and the unloading station are adjacent. After the unloading is completed at the unloading station, the turntable can move the turnover suction nozzle at the original unloading station to the loading station. While the end face detection mechanism performs end face detection on the chip, the turnover suction nozzle at the loading station can be loaded with the next chip to be detected. The loading and unloading processes are closely linked, with high turnover efficiency. There is no need to wait for one chip to be unloaded before loading the next chip to be detected, greatly shortening the waiting working hours for loading the next chip to be detected. Description of the Drawings

[0043] Figure 1 It is a schematic structural diagram of the multi-station turntable mechanism of the present invention;

[0044] Figure 2 It is a schematic structural diagram of the chip detection device of the present invention;

[0045] Figure 3 It is a top view of the chip detection device of the present invention;

[0046] Figure 4 It is a schematic structural diagram of the position positioning mechanism of the present invention;

[0047] Figure 5Schematic diagram of the end face detection mechanism or the end face re-inspection mechanism of the present invention;

[0048] Figure 6 Schematic diagram of the cleaning mechanism of the present invention;

[0049] Figure 7 Schematic diagram of the gold wire detection mechanism of the present invention;

[0050] Figure 8 Schematic diagram of the angle positioning mechanism or the cleaning positioning mechanism of the present invention;

[0051] Figure 9 Schematic diagram of the feeding mechanism of the present invention;

[0052] Figure 10 Schematic diagram of the ejecting mechanism of the present invention;

[0053] Figure 11 Connection diagram of the front detection mechanism of the present invention;

[0054] Figure 12 Schematic diagram of the material taking and handling mechanism of the present invention;

[0055] Figure 13 Schematic diagram of the back detection mechanism of the present invention;

[0056] Figure 14 Schematic diagram of the discharging mechanism of the present invention.

[0057]

Explanation of reference numerals

[0058] 1: Multi-station turntable mechanism; 11: Rotary table; 111: Concentric hole; 12: Transfer suction nozzle; 121: Connecting plate; 122: Regulator; 123: Adapter plate; 124: Suction nozzle body; 13: Feeding station; 14: Discharging station; 15: Rotating shaft; 16: Cover plate; 161: Arc plate; 162: Flow guiding hole;

[0059] 2: Positioning mechanism;

[0060] 3: End face detection mechanism;

[0061] 4: Cleaning mechanism;

[0062] 5: Gold wire detection mechanism;

[0063] 6: Bracket; 61: Angle positioning mechanism; 611: Front detection camera; 612: Mounting plate; 62: Cleaning positioning mechanism;

[0064] 7: End face re-inspection mechanism;

[0065] 8: Frame; 81: Loading mechanism; 82: Ejecting mechanism; 83: Front detection mechanism; 84: Pick-and-carry mechanism; 841: Lateral sliding mechanism; 842: Rotary regulator; 843: Handling suction nozzle; 844: Lifting mechanism; 85: Back detection mechanism; 86: Unloading pick-and-carry mechanism; 87: Unloading mechanism. Detailed implementation manner

[0066] For better explaining the present invention for easy understanding, the present invention will be described in detail below in conjunction with the accompanying drawings through specific implementation manners.

[0067] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0068] In addition, in the present invention, descriptions such as "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0069] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or integrated; "connection" can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0070] See Figures 1 to 7, the present invention provides a rotary chip high-speed cleaning and detection table. The self-locking ureteral sheath includes a multi-station turntable mechanism 1, a position positioning mechanism 2, an end face detection mechanism 3, a cleaning mechanism 4, and a gold wire detection mechanism 5; the multi-station turntable mechanism 1 includes a rotary table 11 and a plurality of turnover suction nozzles 12 circumferentially and equally spaced around the rotary table 11; the plurality of turnover suction nozzles 12 are correspondingly arranged at the loading station 13, the unloading station 14 and a plurality of turnover stations on the rotary table 11; the loading station 13 and the unloading station 14 are adjacent to each other; the position positioning mechanism 2, the end face detection mechanism 3, the cleaning mechanism 4, and the gold wire detection mechanism 5 are sequentially arranged along the circumference of the rotary table 11 at a plurality of turnover stations; and the position positioning mechanism 2, the end face detection mechanism 3, the cleaning mechanism 4, and the gold wire detection mechanism 5 are correspondingly arranged radially along the rotary table 11 outside the plurality of turnover suction nozzles 12; the position positioning mechanism 2 can position the chip position.

[0071] In this embodiment, the position positioning mechanism 2 includes a vision camera, which positions the chip adsorbed on the turnover suction nozzle 12 through the vision camera. Of course, it can also position the chip position and the suction nozzle position together to improve the detection or cleaning accuracy of the chip by subsequent mechanisms such as the cleaning mechanism 4 and the gold wire detection mechanism 5, and avoid bumping and damaging the chip. The end face detection mechanism 3 detects the end face of the chip through a detection camera. If the detection is OK, the rotary table 11 rotates the chip to the next station. If NG, the device stops and alarms, and the operator takes out the NG product to make the device operate normally, so as to separate the defective products from the device in time and prevent the defective products from flowing into the next process, thereby improving the detection efficiency of the chip. The cleaning mechanism 4 cleans the dirt on the surface of the chip. The gold wire detection mechanism 5 detects the gold wire on the front of the chip, including the detection of wire bonding and the number of gold wires, effectively preventing defective products from flowing into the next process.

[0072] In this embodiment, the multi-station turntable mechanism 1 is a six-station turntable mechanism. The rotary table 11 rotates counterclockwise. The loading station 13 performs chip loading. The plurality of turnover stations are correspondingly provided with the position positioning mechanism 2, the end face detection mechanism 3, the cleaning mechanism 4, and the gold wire detection mechanism 5 to respectively perform chip position positioning, end face defect detection, dirt cleaning, and gold wire defect detection. Finally, it rotates to the unloading station 14 for chip unloading.

[0073] The plurality of turnover suction nozzles 12 are circumferentially and equally spaced around the rotary table 11. The angle (set angle) formed by the connection lines of the adjacent turnover suction nozzles 12 corresponding to the center point of the rotary table 11 is the angle of rotation of the rotary table 11 for one start. By equally spacing the plurality of turnover suction nozzles 12, after the rotary table 11 rotates the set angle, the replacement of the plurality of turnover suction nozzles 12 between the upper and lower stations can be completed. The turnover mode of the chip is simple and practical. Compared with the linear process path, the rotary table type process path is shorter, effectively shortening the chip turnover working hours.

[0074] Radially along the rotary table 11, a plurality of mechanisms are correspondingly arranged outside the plurality of revolving suction nozzles 12 one by one. The radial layout method can not only shorten the moving paths of the mechanisms and the corresponding revolving suction nozzles 12, improving the chip detection efficiency, but also enable more mechanisms to be arranged circumferentially around the rotary table 11. By rotating the rotary table 1 unidirectionally, the entire production line for chip detection and cleaning is integrated on the rotary table type high-speed chip cleaning and detection platform. Compared with the linear arrangement method of the mechanisms, the rotary table type arrangement method reduces the frequency of using the handling mechanism. The handling mechanism only needs to perform loading at the loading station 13 and unloading at the unloading station 14. The turnover of the chip between multiple stations in the multi-station rotary table mechanism 1 can be completed by rotating the rotary table 11, and there is no need to pick and place the chip through the handling mechanism anymore, greatly improving the chip cleaning and detection efficiency.

[0075] The present invention aims to emphasize the layout method of rotary table type rotation. In theory, more mechanisms can also be arranged circumferentially around the rotary table 11, such as the chip defect detection mechanism and the circuit detection mechanism. The rotary table type layout shortens the turnover path of the chip between each station, and multiple stations can operate simultaneously, further improving the chip detection and cleaning efficiency of the rotary table type high-speed chip cleaning and detection platform. Secondly, the loading station 13 and the unloading station 14 are arranged adjacent to each other. After the unloading station 14 completes unloading, the rotary table 11 can move the revolving suction nozzle 12 at the original unloading station 14 to the loading station 13. While the end face detection mechanism 3 performs end face detection on the chip, the revolving suction nozzle 12 at the loading station 13 can be loaded with the next chip to be detected. The loading and unloading processes are closely linked and have high turnover efficiency; there is no need to wait for a chip to be unloaded and then load the next chip to be detected, greatly shortening the waiting time for loading the next chip to be detected.

[0076] Furthermore, the turnover suction nozzle 12 includes a connecting plate 121, a regulator 122, an adapter plate 123 and a suction nozzle body 124; the connecting plate 121 is connected to the top surface of the rotary table 11; the first end face of the regulator 122 is connected to the connecting plate 121, and the second end face of the regulator 122 is connected to the adapter plate 123; the suction nozzle body 124 is connected to the adapter plate 123; the regulator 122, the adapter plate 123 and the suction nozzle body 124 are all suspended outside the rotary table 11; the regulator 122 can drive the first end face and the second end face to move towards each other. Specifically, the connecting plate 121 is connected to the top surface of the rotary table 11 by screws, so that the turnover suction nozzle 12 can be lapped at the side of the rotary table 11, effectively avoiding the interference between other mechanisms and the rotary table 11. The regulator 122 can be a slide table with an existing screw rod slider structure. The regulator 122 can drive the suction nozzle body 124 to move horizontally, longitudinally and / or vertically to improve the adaptability of the turnover suction nozzle 12 to adsorb chips of different sizes and models; the way of suspending the regulator 122 also facilitates the adjustment of the regulator 122. The suction nozzle body 124 is externally connected to an air pipe and adsorbs the chip by means of negative pressure adsorption. In this embodiment, the adapter plate 123 includes a horizontal plate and a vertical plate connected in an L shape. The vertical plate is connected to the second end face of the regulator 122, and the suction nozzle body 124 is arranged on the horizontal plate, and the suction nozzle of the suction nozzle body 124 is vertically upward. Compared with the setting where the suction nozzle is horizontally oriented, the adapter plate 123 realizes the vertical upward orientation of the suction nozzle, which not only reduces the occupied space of the multi-station turntable mechanism 1, but also improves the stability of chip turnover.

[0077] Secondly, the rotary chip high-speed cleaning and detection table further includes a bracket 6, and an angle positioning mechanism 61 and a cleaning positioning mechanism 62 arranged on the bracket 6; the bracket 6 is erected on one side of the rotary table 11, and the end face detection mechanism 3 and the cleaning mechanism 4 are arranged on the other side of the bracket 6; the angle positioning mechanism 61 and the end face detection mechanism 3 are arranged at the same turnover station; the angle positioning mechanism 61 can position the position and angle of the chip; the cleaning positioning mechanism 62 and the cleaning mechanism 4 are arranged at the same turnover station; the cleaning positioning mechanism 62 can position the cleaning position of the chip. Specifically, the position positioning mechanism 2 positions the placement position of the chip on the turnover suction nozzle 12; the angle positioning mechanism 61 positions the angle of the chip placed on the turnover suction nozzle 12, and at the same time, the defect detection of the two end faces of the chip is carried out by the end face detection mechanism 3; the cleaning positioning mechanism 62 positions the cleaning position of the chip, and then the end face of the chip is cleaned by the cleaning positioning mechanism 62; the gold wire detection mechanism 5 detects the defects of the gold wires on the front of the chip. The erection structure of the bracket 6 further improves the integration of the rotary chip high-speed cleaning and detection table. On the basis of the rotary layout, the erection structure is integrated, so that more mechanisms can be arranged on the rotary chip high-speed cleaning and detection table, and these mechanisms can operate synchronously with the existing mechanisms arranged at multiple turnover stations, which not only improves the equipment integration, but also optimizes the detection and cleaning working hours of the chip.

[0078] As Figure 8 shown, both the angle positioning mechanism 61 and the cleaning positioning mechanism 62 include a front detection camera 611 and a mounting plate 612; one end of the mounting plate 612 is connected to the top of the bracket 6, and the other end is connected to the front detection camera 611; the camera of the front detection camera 611 is arranged above the turnover suction nozzle 12. Specifically, the mounting plate 612 realizes the suspended installation of the front detection camera 611, improves the flexibility of the installation of the front detection camera 611, and enables the camera of the front detection camera 611 to be arranged above the turnover suction nozzle 12, facilitating the direct positioning of the position and angle of the front of the chip or the cleaning position.

[0079] Refer to again Figure 1, the multi-station turntable mechanism 1 further includes a rotating shaft 15 and a cover plate 16; a concentric hole 111 is provided on the rotary table 11; a plurality of arc-shaped plates 161 are coaxially arranged at the bottom end of the cover plate 16; a diversion hole 162 is provided on the cover plate 16, and the diversion hole 162 communicates with the concentric hole 111; the rotating shaft 15 passes through the concentric hole 111 and is coaxially connected to the bottom end of the cover plate 16; the arc-shaped plate 161 is coaxially connected to the top end of the rotary table 11. Specifically, the rotating shaft 15 drives the cover plate 16 to rotate, and the cover plate 16 drives the rotary table 11 to rotate synchronously. In this embodiment, the cover plate 16 is in the shape of a clover, and the diversion hole 162 communicates with the concentric hole 111, and the two form a diversion channel. When the cleaning mechanism 4 cleans the chip (gas cleaning or liquid cleaning), it can relieve pressure through the diversion channel, avoiding the influence of the cleaning mechanism 4 on the stability of other turnover nozzles 12 adsorbing the chip during the cleaning process. The cover plate 16 and the arc-shaped plate 161 are integrally arranged, and are threaded to the top end of the rotary table 11 by sequentially passing screws through the cover plate 16 and the arc-shaped plate 161. The arc-shaped plate 161 itself can enhance the connection strength between the cover plate 16 and the rotary table 11, and improve the adaptability when different numbers of turnover nozzles 12 are provided for the multi-station turntable mechanism 1; the arc-shaped plate 161 also increases the volume of the diversion channel and improves the pressure relief efficiency.

[0080] Optionally, in the radial direction of the rotary table 11, the arc-shaped plate 161 is arranged offset from the turnover nozzle 12, so that the nozzle of the cleaning mechanism 4 can always face the diversion hole 162, further improving the pressure relief efficiency of the multi-station turntable mechanism 1.

[0081] In addition, the turntable type high-speed chip cleaning and detection platform further includes an end face re-inspection mechanism 7; the end face re-inspection mechanism 7 and the cleaning mechanism 4 are arranged at the same turnover station. The end face re-inspection mechanism 7 is used to re-inspect the two end faces of the chip after cleaning, preventing chips with end face defect errors caused by cleaning from flowing into the next process, and improving the reliability of the equipment for chip detection.

[0082] Optionally, the cleaning mechanism 4 adopts solid micro-particle cleaning. The cleaning mechanism 4 can be a CO2 snow cleaner. The CO2 snow cleaner uses the environmentally friendly carbon dioxide snow cleaning technology to efficiently clean the end face of the chip. The cleaning method is relatively gentle and the cleaning efficiency is high. Moreover, snow cleaning does not produce waste water, eliminating the potential equipment safety hazards caused by cleaning waste water.

[0083] In addition, as Figure 2 , Figure 3 and Figures 9 to 14As shown, the present invention also provides a chip detection device, the chip detection device includes the above-mentioned turntable chip high-speed cleaning detection table; the chip detection device also includes a frame 8, a loading mechanism 81, a lifting mechanism 82, a front detection mechanism 83, a material picking and conveying mechanism 84, a back detection mechanism 85, a material unloading and conveying mechanism 86 and a material unloading mechanism 87; the loading mechanism 81, the turntable chip high-speed cleaning detection table and the material unloading mechanism 87 are sequentially arranged on the frame 8 along the horizontal direction; the front detection mechanism 83, the material picking and conveying mechanism 84 and the material unloading and conveying mechanism 86 are sequentially arranged on the frame 8 along the horizontal direction The three parts are mounted on the frame 8, and are connected to the frame 8 in a horizontal sliding manner; the ejecting mechanism 82 and the back detection mechanism 85 are both arranged on the frame 8, and both can be lifted and lowered vertically and pass through the top surface of the frame 8; among them, the loading mechanism 81 can move to the top of the ejecting mechanism 82; the front detection mechanism 83 can move to the top of the ejecting mechanism 82; the material picking and conveying mechanism 84 can move between the ejecting mechanism 82, the back detection mechanism 85 and the loading station 13; the material unloading and conveying mechanism 86 can move between the unloading station 14 and the unloading mechanism 87.

[0084] The whole process flow of the chip detection equipment is as follows: manually loading materials on the tray of the loading mechanism 81, including the blue film and multiple chips adhered to the blue film; the loading mechanism 81 drives the tray longitudinally to the top of the ejecting mechanism 82, and the front detection mechanism 83 performs defect detection on the front of the first chip; the ejector pin of the ejecting mechanism 82 is lifted from the inside of the tray to separate the first chip that has completed the front defect detection from the blue film; the material picking and transporting mechanism 84 moves horizontally to the top of the first chip to pick up the materials, and moves the first chip to the top of the back detection mechanism 85, and the back detection mechanism 85 performs defect detection on the back of the first chip; The material picking and transporting mechanism 84 unloads the first chip to the rotary suction nozzle 12 of the loading station 13, and the rotary suction nozzle 12 opens the negative pressure to adsorb the first chip; the turntable chip high-speed cleaning and testing table rotates counterclockwise to perform front position positioning, front position angle positioning (and end face defect detection), cleaning position positioning (and cleaning operation and end face defect re-inspection), and front gold wire defect detection on the first chip in sequence, and then moves to the unloading station 14; the material unloading and transporting mechanism 86 moves horizontally to the top of the first chip, and after picking up the material, unloads the first chip to the blue film on the material tray of the unloading mechanism 87; the unloading mechanism 87 drives the material tray to unload the material longitudinally.

[0085] Among them, the material fetching and handling mechanism 84 moves linearly between the feeding mechanism 81 and the feeding station 13, with fewer turnover stations and fewer chip picking and placing operations. The same applies to the discharging and handling mechanism 86. The defect detection and cleaning operations of the chips are concentrated on the rotary high-speed chip cleaning and detection table. The rotary layout of the rotary high-speed chip cleaning and detection table effectively shortens the turnover path between each station, and no handling mechanism is required to assist during chip turnover, saving the chip turnover man-hours and improving the chip detection and cleaning efficiency. Moreover, each time the rotary high-speed chip cleaning and detection table rotates by a set angle, the turnover suction nozzle 12 at the feeding station 13 can feed the next chip, greatly shortening the feeding waiting man-hours of the chip detection equipment and improving the chip detection and cleaning efficiency.

[0086] Further, both the material fetching and handling mechanism 84 and the discharging and handling mechanism 86 include a lateral sliding mechanism 841, a lifting mechanism 844, a rotary regulator 842, and a handling suction nozzle 843. The lateral sliding mechanism 841 is mounted on the frame 8, and the two are slidably connected along the lateral direction. The lifting mechanism 844 is installed on the lateral sliding mechanism 841. The rotary regulator 842 is installed on the lifting mechanism 844. The handling suction nozzle 843 is connected to the output shaft of the rotary regulator 842 so that the handling suction nozzle 843 can rotate self about the vertical direction. Specifically, the lateral sliding mechanism 841 is slidably connected to the cross beam of the frame 8 along the lateral direction. The lifting mechanism 844 can drive the rotary regulator 842 to lift vertically. The rotary regulator 842 can be a motor or a motor. In this embodiment, a driving wheel is sleeved on the rotating shaft of the rotary regulator 842, and the top end of the handling suction nozzle 843 is connected with a driven wheel. The driving wheel and the driven wheel are connected by a belt to realize the compensation adjustment of the rotation angle of the chip in the horizontal plane through the rotary regulator 842, thereby improving the detection accuracy of the back surface detection mechanism 85 and the discharging accuracy at the feeding station 13. The same applies to the discharging and handling mechanism 86, improving the discharging accuracy of the chips in the tray of the discharging mechanism 87 and avoiding the situation of mutual collision and damage between the chips.

[0087] It should be understood that the above description of the specific embodiments of the present invention is only for explaining the technical route and features of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. However, the present invention is not limited to the above specific embodiments. Any changes or modifications made within the scope of the claims of the present invention should be covered by the protection scope of the present invention.

Claims

1. A rotary chip high-speed cleaning and detection table, characterized in that The turntable-type high-speed chip cleaning and testing platform comprises a multi-station turntable mechanism (1), a position positioning mechanism (2), an end surface detection mechanism (3), a cleaning mechanism (4) and a gold wire detection mechanism (5); The multi-station turntable mechanism (1) comprises a turntable (11) and a plurality of turnover suction nozzles (12) equally spaced around the turntable (11); the plurality of turnover suction nozzles (12) are arranged corresponding to a loading station (13), an unloading station (14) and a plurality of turnover stations on the turntable (11); The loading station (13) and the unloading station (14) are arranged adjacent to each other; the positioning mechanism (2), the end face detection mechanism (3), the cleaning mechanism (4) and the gold wire detection mechanism (5) are sequentially arranged at the plurality of turnover stations along the circumference of the turntable (11); and the positioning mechanism (2), the end face detection mechanism (3), the cleaning mechanism (4) and the gold wire detection mechanism (5) are correspondingly arranged at the outer sides of the plurality of turnover suction nozzles (12) along the radial direction of the turntable (11); The position positioning mechanism (2) is capable of positioning the chip.

2. The turntable type high-speed chip cleaning and detection table according to claim 1, wherein The revolving suction nozzle (12) comprises a connecting plate (121), a regulator (122), an adapter plate (123) and a suction nozzle body (124); The connecting plate (121) is connected to the top surface of the turntable (11); the first end surface of the regulator (122) is connected to the connecting plate (121), and the second end surface of the regulator (122) is connected to the adapter plate (123); the suction nozzle body (124) is connected to the adapter plate (123); The regulator (122), the adapter plate (123) and the suction nozzle body (124) are all suspended outside the turntable (11); the regulator (122) can drive the first end surface and the second end surface to move towards each other.

3. The turntable type high-speed chip cleaning and detection table according to claim 1, characterized in that, The turntable chip high-speed cleaning and testing platform further comprises a bracket (6), and an angle positioning mechanism (61) and a cleaning positioning mechanism (62) arranged on the bracket (6); The support (6) is mounted on one side of the turntable (11), and the end surface detection mechanism (3) and the cleaning mechanism (4) are arranged on the other side of the support (6); The angle positioning mechanism (61) and the end face detection mechanism (3) are arranged at the same turnover station; the angle positioning mechanism (61) is capable of positioning the chip position angle; The cleaning positioning mechanism (62) and the cleaning mechanism (4) are arranged at the same turnover station; the cleaning positioning mechanism (62) can locate the chip cleaning position.

4. The rotary chip high-speed cleaning and detection table according to claim 3, characterized in that, The angle positioning mechanism (61) and the cleaning positioning mechanism (62) both include a front detection camera (611) and a mounting plate (612); One end of the mounting plate (612) is connected to the top end of the bracket (6), and the other end is connected to the front detection camera (611); The camera head of the front detection camera (611) is arranged above the turnover suction nozzle (12).

5. The rotary chip high-speed cleaning and detection table according to any one of claims 1-4, characterized in that, The multi-station turntable mechanism (1) further includes a rotating shaft (15) and a cover plate (16); A concentric hole (111) is provided on the turntable (11); A plurality of arc-shaped plates (161) are coaxially arranged at the bottom end of the cover plate (16); A diversion hole (162) is provided on the cover plate (16), and the diversion hole (162) communicates with the concentric hole (111); The rotating shaft (15) passes through the concentric hole (111) and is coaxially connected to the bottom end of the cover plate (16); The arc-shaped plate (161) is coaxially connected to the top end of the turntable (11).

6. The rotary chip high-speed cleaning and detection table according to claim 5, wherein In the radial direction of the turntable (11), the arc-shaped plate (161) is arranged offset from the turnover suction nozzle (12).

7. The turntable type high-speed chip cleaning and detection table according to any one of claims 1-4, characterized in that The turntable type high-speed chip cleaning and detection table further includes an end face re-inspection mechanism (7); The end face re-inspection mechanism (7) and the cleaning mechanism (4) are arranged at the same turnover station.

8. The rotary chip high-speed cleaning and detection table according to any one of claims 1-4, characterized in that The cleaning mechanism (4) uses solid micro-particles for cleaning.

9. A chip detection device, characterized in that, The chip detection device includes the turntable type high-speed chip cleaning and detection table according to any one of claims 1-8; The chip detection device further includes a frame (8), a loading mechanism (81), a pusher mechanism (82), a front detection mechanism (83), a pick-up and transfer mechanism (84), a back detection mechanism (85), a discharging and transfer mechanism (86) and a blanking mechanism (87); The loading mechanism (81), the turntable type high-speed chip cleaning and detection table and the blanking mechanism (87) are sequentially arranged horizontally on the frame (8); The front detection mechanism (83), the pick-up and transfer mechanism (84) and the discharging and transfer mechanism (86) are sequentially horizontally mounted on the frame (8), and the three are slidably connected to the frame (8) along the horizontal direction; The pusher mechanism (82) and the back detection mechanism (85) are both arranged on the frame (8), and both can be lifted vertically and penetrate through the top surface of the frame (8); Among them, the loading mechanism (81) can move above the pusher mechanism (82); The front detection mechanism (83) can move above the pusher mechanism (82); The pick-up and transfer mechanism (84) can move between the pusher mechanism (82), the back detection mechanism (85) and the loading station (13); The discharging and transfer mechanism (86) can move between the blanking station (14) and the blanking mechanism (87).

10. The chip detection device according to claim 9, wherein, The pick-up and transfer mechanism (84) and the discharging and transfer mechanism (86) both include a horizontal sliding mechanism (841), a lifting mechanism (844), a rotary adjuster (842) and a transfer suction nozzle (843); The horizontal sliding mechanism (841) is mounted on the frame (8), and the two are slidably connected along the horizontal direction; The lifting mechanism (844) is installed on the horizontal sliding mechanism (841); The rotary adjuster (842) is installed on the lifting mechanism (844); The handling suction nozzle (843) is connected to the output shaft of the slewing regulator (842) so that the handling suction nozzle (843) can rotate about the vertical axis.

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