Vacuum processing chamber and multi-chamber vacuum processing device

Abstract

The invention belongs to the technical field of workpiece vacuum treatment, and discloses a vacuum treatment cavity and a multi-cavity vacuum treatment device. A first matching piece is rotationally arranged at the top and / or the bottom of the vacuum processing chamber; the vacuum processing chamber comprises a workpiece loading mechanism, the workpiece loading mechanism is movably arranged in the vacuum processing chamber in the first direction and comprises a containing frame and a workpiece frame, a plurality of workpieces are loaded on the workpiece frame, the workpiece frame is provided with a center shaft in the vertical direction, the workpiece frame can be rotationally arranged in the containing frame around the center shaft, and the top and / or the bottom of the center shaft is connected with a second matching part. The workpiece loading mechanism can move in the second direction, so that the second matching piece and the first matching piece can be matched or separated from each other. The structure complexity and the manufacturing cost of the vacuum treatment cavity are reduced, the situation that the workpiece is independently unloaded and reloaded when transferred between the cavities is avoided, the pollution risk of a workpiece film layer is reduced, and the vacuum treatment efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of workpiece vacuum treatment, and in particular to a vacuum treatment chamber and a multi-chamber vacuum treatment device. Background Art

[0002] Sputtering coating is a physical vapor deposition technology in which ions bombard the surface of a target, causing target atoms or molecules to be sputtered onto the surface of a workpiece to form a thin film. This technology has advantages such as high deposition rate, good film layer uniformity, and strong adhesion, and is widely used in fields such as integrated circuits, flat panel displays, and solar cells.

[0003] Existing continuous sputtering coating equipment usually adopts a multi-chamber structure, and each chamber is independently equipped with a loading mechanism. When multi-layer film deposition is required, the workpiece needs to pass through multiple chambers in sequence to complete the preparation of different film layers. However, this structure has the following defects: First, each chamber needs to be equipped with an independent loading device, resulting in a complex equipment structure and high manufacturing cost; second, when the workpiece is transferred between chambers, it needs to go through the processes of unloading and reloading, increasing the risk of film layer contamination; third, multiple reloading operations lead to an extended production cycle and reduced production efficiency. Summary of the Invention

[0004] The purpose of the present invention is to provide a vacuum treatment chamber and a multi-chamber vacuum treatment device to solve the problems of complex equipment structure and high manufacturing cost in the prior art; when the workpiece is transferred between chambers, it needs to go through the processes of unloading and reloading, increasing the risk of film layer contamination; multiple reloading operations lead to an extended production cycle and reduced production efficiency.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] On the one hand, a vacuum treatment chamber is provided. A first fitting is rotatably provided at the top and / or bottom of the vacuum treatment chamber. The vacuum treatment chamber includes:

[0007] A workpiece loading mechanism, which is movably arranged in the vacuum treatment chamber along a first direction, includes a receiving frame and a workpiece rack. A plurality of workpieces are loaded on the workpiece rack. The workpiece rack is provided with a central axis in the vertical direction, and the workpiece rack can be rotatably arranged in the receiving frame around the central axis. A second fitting is connected to the top and / or bottom of the central axis;

[0008] The workpiece loading mechanism can move along a second direction, so that the second fitting and the first fitting can be engaged or disengaged.

[0009] As an optional technical solution of the vacuum treatment chamber, the vacuum treatment chamber further includes a first driving mechanism, which is arranged inside the vacuum treatment chamber to drive the workpiece loading mechanism to move along the second direction.

[0010] As an alternative technical solution for the vacuum processing chamber, the first driving mechanism includes a first displacement member and a second displacement member. The driving directions of the first displacement member and the second displacement member are opposite. The first output shaft of the first displacement member and the second output shaft of the second displacement member can abut against the accommodating frame and respectively drive the second fitting member and the first fitting member to cooperate or disengage from cooperation.

[0011] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a positioning mechanism. The positioning mechanism is provided at the top or bottom of the vacuum processing chamber. The positioning mechanism includes a positioning block. The positioning block can move in a direction close to or away from the workpiece loading mechanism to selectively limit the second fitting member in the second direction.

[0012] As an alternative technical solution for the vacuum processing chamber, the positioning mechanism further includes a third displacement member. The third displacement member is used to drive the positioning block to move in a direction close to or away from the workpiece loading mechanism.

[0013] As an alternative technical solution for the vacuum processing chamber, an arc-shaped notch is formed at the edge of the positioning block. When the positioning block moves in a direction close to the workpiece loading mechanism, the arc-shaped notch can be engaged with the central axis to limit the second fitting member. When the positioning block moves in a direction away from the workpiece loading mechanism, the positioning block can avoid the second fitting member.

[0014] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a conveying mechanism. The conveying mechanism includes a support base and guide wheels. The support base extends in the first direction. The guide wheels are rotatably provided on the support base and are arranged at intervals in the first direction. The workpiece loading mechanism can be slidably engaged with the guide wheels to move in the first direction.

[0015] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a bearing mechanism. The bearing mechanism includes a guiding member. The guiding member is relatively stationary with respect to the accommodating frame in the first direction. A guiding groove is formed on one side of the guiding member in the first direction. The guiding groove can be in rolling or sliding engagement with the guide wheels.

[0016] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a sliding mechanism, the sliding mechanism includes a floating member, the floating member is connected to the bottom of the accommodating frame, the carrying mechanism further includes a carrying member, the carrying member is connected to the guiding member, one side of the carrying member has an opening and a carrying cavity inside, the floating member is in floating cooperation with the carrying cavity and can move relative to the carrying cavity along the second direction.

[0017] On the other hand, a multi-chamber vacuum processing device is provided, including a loading chamber, an unloading chamber and at least one vacuum processing chamber, the loading chamber, at least one of the vacuum processing chambers and the unloading chamber are arranged in sequence along the first direction and can be selectively communicated.

[0018] Advantages of the present invention:

[0019] The present application discloses a vacuum processing chamber and a multi-chamber vacuum processing device. Among them, a first fitting is rotatably arranged at the top and / or bottom of the vacuum processing chamber; the workpiece loading mechanism is movably arranged in the vacuum processing chamber along the first direction, including an accommodating frame and a workpiece rack, a plurality of workpieces are loaded on the workpiece rack, the workpiece rack is provided with a central axis along the vertical direction, the workpiece rack can be rotatably arranged in the accommodating frame around the central axis, and the top and / or bottom of the central axis is connected with a second fitting; the workpiece loading mechanism can move along the second direction, so that the second fitting and the first fitting can be engaged or disengaged. By arranging the first fitting in each vacuum processing chamber, loading a plurality of workpieces on the workpiece rack, and integrally moving the workpiece loading mechanism along the second direction, when the second fitting and the first fitting are engaged, the first fitting drives the workpiece rack to rotate to complete the vacuum processing of a plurality of workpieces. When the vacuum processing of the workpieces is completed, the second fitting and the first fitting are disengaged, avoiding the setting of loading devices in each vacuum processing chamber, reducing the structural complexity and manufacturing cost of the vacuum processing chamber; the workpiece loading mechanism moves along the first direction, driving a plurality of workpieces to other chambers, avoiding the need for separate unloading and reloading processes when the workpieces are transferred between chambers, reducing the risk of film layer pollution of the workpieces, avoiding the extension of the production cycle caused by the operation of repeatedly loading and unloading the workpieces, and improving the efficiency of workpiece vacuum processing. Description of the Drawings

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present invention and these drawings.

[0021] Figure 1 It is a schematic structural diagram of the vacuum processing chamber provided by the embodiment of the present invention;

[0022] Figure 2 is one of the partial structural schematic diagrams of the vacuum processing chamber provided by an embodiment of the present invention;

[0023] Figure 3 is the second of the partial structural schematic diagrams of the vacuum processing chamber provided by an embodiment of the present invention.

[0024] In the figure:

[0025] 10. Vacuum processing chamber; 11. First fitting; 12. Rotating shaft;

[0026] 20. Workpiece loading mechanism; 21. Accommodating frame; 22. Central shaft; 23. Second fitting;

[0027] 31. First displacement member; 311. First output shaft; 32. Second displacement member; 321. Second output shaft;

[0028] 40. Positioning mechanism; 41. Positioning block; 42. Third displacement member;

[0029] 50. Conveying mechanism; 51. Support base; 52. Guide wheel;

[0030] 60. Detection member;

[0031] 70. Carrying mechanism; 71. Guide member; 72. Carrying member;

[0032] 80. Sliding mechanism; 81. Floating member; 82. Connecting member. Detailed implementation manners

[0033] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that for the sake of description, only parts related to the present invention are shown in the drawings, rather than all structures.

[0034] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0035] In the present invention, the term "and / or" describes the relationship between associated objects and indicates that three relationships can exist. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. Additionally, in this application, the character " / " generally indicates that the associated objects before and after are in an "and / or" relationship.

[0036] In the present invention, those of ordinary skill in the art will understand that the functions performed by components can be performed by one component, multiple components, one part, or multiple parts. Similarly, the functions performed by parts can also be performed by one part, one component, or a combination of multiple parts.

[0037] In the present invention, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over", and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath", and "underneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0038] In the description of this embodiment, the orientation or positional relationships such as "up", "down", "right", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. Additionally, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0039] Existing continuous sputtering coating equipment usually adopts a multi-chamber structure, and each chamber is independently equipped with a loading mechanism. When multi-layer film deposition is required, the workpiece needs to pass through multiple chambers in sequence to complete the preparation of different film layers. However, this structure has the following defects: First, each chamber needs to be equipped with an independent loading device, resulting in a complex equipment structure and high manufacturing cost; Second, when the workpiece is transferred between chambers, it needs to go through the processes of unloading and reloading, increasing the risk of film layer contamination; Third, multiple reloading operations lead to an extended production cycle and reduced production efficiency.

[0040] To solve the above problems, this embodiment provides a vacuum processing chamber 10, refer to Figure 1, a first fitting member 11 is rotatably provided at the top and / or bottom of the vacuum processing chamber 10. Specifically, a shaft hole is provided between the top and the bottom of the vacuum processing chamber 10. A rotating shaft 12 is provided on one side of the first fitting member 11 close to the top and / or bottom of the vacuum processing chamber 10. The rotating shaft 12 can pass through the shaft hole and be rotatably matched with the shaft hole. Further, the vacuum processing chamber 10 further includes a second driving mechanism which is provided outside the vacuum processing chamber 10 and connected to the rotating shaft 12. The second driving mechanism can drive the rotating shaft 12 to rotate so as to drive the first fitting member 11 to rotate. Specifically, the second driving mechanism includes a rotating motor and a magnetic fluid. The magnetic fluid is provided between the rotating shaft 12 and the shaft hole to increase the sealing performance between the rotating shaft 12 and the shaft hole and prevent the gas in the vacuum processing chamber 10 from leaking.

[0041] Further, the vacuum processing chamber 10 includes a workpiece loading mechanism 20 which is movably provided in the vacuum processing chamber 10 along a first direction. The workpiece loading mechanism 20 includes a receiving frame 21 and a workpiece rack. A plurality of workpieces are loaded on the workpiece rack. A central axis 22 is provided on the workpiece rack in the vertical direction. The workpiece rack can be rotatably provided in the receiving frame 21 around the central axis 22. A second fitting member 23 is connected to the top and / or bottom of the central axis 22; the workpiece loading mechanism 20 can move along a second direction so that the second fitting member 23 can be engaged or disengaged with the first fitting member 11. In one embodiment, the second direction is perpendicular to the first direction. The first direction is the Y-axis direction and the second direction is the X-axis direction. The central axis 22 is the Z-axis direction (or, the central axis 22 is perpendicular to the first direction and the second direction). In other embodiments, the second direction and the first direction can be perpendicular or at an angle. It should be noted that the position and the number of the first fitting members 11 correspond to the position and the number of the second fitting members 23 one by one. That is: when the first fitting member 11 is provided at the top of the vacuum processing chamber 10, the second fitting member 23 is provided at the top of the central axis 22; when the first fitting member 11 is provided at the bottom of the vacuum processing chamber 10, the second fitting member 23 is provided at the bottom of the central axis 22; when the first fitting members 11 are provided at both the top and the bottom of the vacuum processing chamber 10, the second fitting members 23 are correspondingly provided at both the top and the bottom of the central axis 22.

[0042] In this embodiment, the top and / or bottom of the central axis 22 protrudes from the receiving frame 21 and the protruding end is connected to the second fitting member 23. In other embodiments, the second fitting member 23 can be directly connected to the receiving frame 21.

[0043] Specifically, the accommodation frame 21 is set as a square frame structure. The central axis 22 is disposed through the center of the workpiece rack. Shaft holes are provided on both the upper side and the lower side of the accommodation frame 21. Both ends of the central axis 22 pass through the two shaft holes respectively and are in clearance fit with the shaft holes. In order to increase the smoothness of the rotation of the workpiece rack, bearings can also be provided between the central axis 22 and the shaft holes. Specifically, the workpiece rack is set as a rotary workpiece loading rack, and the coated surface of the workpiece faces outward and is hung on the rotary workpiece loading rack. Since the rotary workpiece loading rack is a prior art, its structure and principle will not be specifically described herein one by one.

[0044] By providing the first fitting 11 in each vacuum processing chamber 10, a plurality of workpieces are loaded on the workpiece rack. The workpiece loading mechanism 20 is integrally moved along the second direction. When the second fitting 23 cooperates with the first fitting 11, the first fitting 11 drives the workpiece rack to rotate, completing the vacuum processing of a plurality of workpieces. When the vacuum processing of the workpieces is completed, the second fitting 23 is disengaged from the first fitting 11, avoiding the need to provide a loading device in each vacuum processing chamber 10, reducing the structural complexity and manufacturing cost of the vacuum processing chamber 10; the workpiece loading mechanism 20 moves along the first direction, driving a plurality of workpieces to other chambers, avoiding the need for the workpieces to go through a separate unloading and reloading process when being transferred between chambers, reducing the risk of film layer contamination of the workpieces, avoiding the extension of the production cycle caused by the operation of reloading the workpieces multiple times, and improving the efficiency of the vacuum processing of the workpieces; in this embodiment, when the workpiece loading mechanism 20 is transferred between multiple chambers, it does not need to move up and down, only involving horizontal movement, further reducing the risk of film layer contamination of the workpieces.

[0045] Furthermore, the vacuum processing chamber 10 further includes a detection mechanism. The detection mechanism includes a plurality of detection elements 60. The detection elements 60 are provided on the inner wall of the vacuum processing chamber 10 and the detection direction extends along the second direction to detect whether the projections of the central axes of the first fitting 11 and the second fitting 23 in the second direction coincide. Specifically, a plurality of detection elements 60 are provided to increase the detection accuracy. Specifically, the detection element 60 is a distance measuring sensor, and the error of the distance measuring sensor is plus or minus 1 mm. It should be noted that since the distance measuring sensor is a prior art, its specific structure and principle will not be specifically described herein.

[0046] In this embodiment, both the first fitting 11 and the second fitting 23 are set as gears. After the workpiece loading mechanism 20 moves into the detection range of the detector 60 along the first direction, the moving speed of the workpiece loading mechanism 20 along the first direction slows down. When the projections of the central axes of the first fitting 11 and the second fitting 23 on the second direction coincide, at this time the workpiece loading mechanism 20 reaches the fitting station, and the workpiece loading mechanism 20 stops moving along the first direction. At this time, the tooth gap between the first fitting 11 and the second fitting 23 is relatively large. The workpiece loading mechanism 20 moves along the second direction to reduce the tooth gap between the first fitting 11 and the second fitting 23 and increase the meshing degree between the first fitting 11 and the second fitting 23, so as to increase the smoothness of the transmission between the first fitting 11 and the second fitting 23. In other embodiments, both the first fitting 11 and the second fitting 23 can be set as magnets, or one of them can be set as a magnet and the other as a ferromagnetic material. At this time, the heights of the first fitting 11 and the second fitting 23 in the vertical direction are different. After the workpiece loading mechanism 20 moves, the first fitting 11 is located above the second fitting 23 to drive the second fitting 23 to rotate.

[0047] Furthermore, the vacuum processing chamber 10 further includes a first driving mechanism, which is arranged inside the vacuum processing chamber 10 to drive the workpiece loading mechanism 20 to move along the second direction. Specifically, the first driving mechanism can be arranged inside the vacuum processing chamber 10 through a bracket, or can be directly fixed to the inner wall of the vacuum processing chamber 10. In this embodiment, the first driving mechanism includes a first displacement component 31 and a second displacement component 32. The driving directions of the first displacement component 31 and the second displacement component 32 are opposite. The first output shaft 311 of the first displacement component 31 and the second output shaft 321 of the second displacement component 32 can abut against the accommodating frame 21 and drive the second fitting 23 and the first fitting 11 to cooperate or disengage respectively. Specifically, a plurality of first displacement components 31 and second displacement components 32 are provided. Preferably, four first displacement components 31 and four second displacement components 32 are provided, so that the first output shaft 311 and the second output shaft 321 abut against the four corners of the accommodating frame 21 on the same side, increasing the force uniformity of the accommodating frame 21 and preventing the workpiece loading mechanism 20 from shifting or tilting during the movement along the second direction, which may affect the fitting state of the first fitting 11 and the second fitting 23. In this embodiment, the first displacement component 31 and the second displacement component 32 are set as displacement cylinders. In other embodiments, the first displacement component 31 and the second displacement component 32 can be set as stepping motors or hydraulic cylinders.

[0048] Exemplarily, when the workpiece loading mechanism 20 reaches the mating station of the first mating part 11 and the second mating part 23, both the first output shaft 311 and the second output shaft 321 extend and abut against the accommodating frame 21. When the workpiece loading mechanism 20 needs to move in the direction close to the first displacement part 31, the first displacement part 31 drives the first output shaft 311 to contract, and the second displacement part 32 drives the second output shaft 321 to extend synchronously; when the workpiece loading mechanism 20 needs to move in the direction close to the second displacement part 32, the second displacement part 32 drives the second output shaft 321 to contract, and the first displacement part 31 drives the first output shaft 311 to extend synchronously.

[0049] Further, referring to Figure 2 and Figure 3 , the vacuum processing chamber 10 further includes a positioning mechanism 40. The positioning mechanism 40 is provided at the top or bottom of the vacuum processing chamber 10. The positioning mechanism 40 includes a positioning block 41. The positioning block 41 can move in a direction close to or away from the workpiece loading mechanism 20 to selectively limit the second mating part 23 in the second direction. Specifically, an arc-shaped notch is formed at the edge of the positioning block 41. When the positioning block 41 moves in the direction close to the workpiece loading mechanism 20, the arc-shaped notch can be engaged with the central axis 22 to limit the second mating part 23. When the positioning block 41 moves in the direction away from the workpiece loading mechanism 20, the positioning block 41 can avoid the second mating part 23. By providing the positioning block 41 and using the arc-shaped notch to limit the central axis 22, it is possible to prevent the tooth blocks between the first mating part 11 and the second mating part 23 from colliding after the workpiece loading mechanism 20 moves in the second direction, thus causing damage to the parts. It should be noted that the positioning block 41 starts to descend after the second mating part 23 moves in place in the first direction to prevent the second mating part 23 from overshooting during the movement towards the first mating part 11.

[0050] Further, the positioning mechanism 40 further includes a third displacement part 42. The third displacement part 42 is used to drive the positioning block 41 to move in a direction close to or away from the workpiece loading mechanism 20. It should be noted that since the displacement part is a prior art, its structure and principle will not be described in detail here.

[0051] Further, the vacuum processing chamber 10 further includes a conveying mechanism 50. The conveying mechanism 50 includes a support base 51 and guide wheels 52. The support base 51 extends in the first direction. The guide wheels 52 are rotatably arranged on the support base 51 and are arranged at intervals in the first direction. The workpiece loading mechanism 20 can be in rolling or sliding cooperation with the guide wheels 52 to move in the first direction. Specifically, the vacuum processing chamber 10 further includes a carrying mechanism 70. The carrying mechanism 70 includes a guiding member 71. The guiding member 71 is relatively stationary with respect to the accommodation frame 21 in the first direction. A guiding groove is formed on one side of the guiding member 71 in the first direction, and the guiding groove can be in sliding cooperation with the guide wheels 52. In other embodiments, a sprocket, a slide rail, a lead screw, etc. can be provided to replace the guide wheels 52, which is not limited herein. When a sprocket and a slide rail are provided, pulleys are adaptively provided at the bottom of the workpiece loading mechanism 20. When a lead screw is provided, nuts or threaded holes are adaptively provided at the bottom of the workpiece loading mechanism 20. Specifically, the support base 51 and the guide wheels 52 are connected by a rotating shaft, and a limiting member is arranged on the rotating shaft to limit the axial movement of the guide wheels 52. Since the limiting member is a prior art, it will not be described in detail herein. Specifically, the plurality of guide wheels 52 are driven by a chain and sprocket. Since the chain and sprocket are prior art, it will not be described in detail herein. In this embodiment, two conveying mechanisms 50 and two carrying mechanisms 70 are both arranged at intervals in the horizontal direction perpendicular to the first direction.

[0052] Further, the vacuum processing chamber 10 further includes a sliding mechanism 80. The sliding mechanism 80 includes a floating member 81. The floating member 81 is connected to the bottom of the accommodation frame 21. The carrying mechanism 70 further includes a carrier 72. The carrier 72 is connected to the guiding member 71. One side of the carrier 72 has an opening and a carrying cavity inside. The floating member 81 is in floating cooperation with the carrying cavity and can move relative to the carrying cavity in the second direction. In this embodiment, the floating member 81 is set as a universal ball or an air rubber ball and is placed inside the carrying cavity. When the workpiece loading mechanism 20 moves in the second direction, relative sliding occurs between the air rubber ball and the inner wall of the carrying cavity. In other embodiments, magnets can be provided on the bottom wall of the mating station and the bottom of the accommodation frame 21. When the workpiece loading mechanism 20 reaches the mating station, the same poles of the two magnets approach each other to generate a repulsive force, causing the workpiece loading mechanism 20 to float in the vertical direction and reducing the friction force of the workpiece loading mechanism 20 moving in the second direction.

[0053] Further, the sliding mechanism 80 further includes a connecting member 82. The connecting member 82 is arranged at the bottom of the accommodation frame 21. The floating member 81 is arranged on the connecting member 82, and the floating member 81 and the connecting member 82 are adhesively bonded. In this embodiment, there are a plurality of floating members 81.

[0054] Exemplarily, when the vacuum processing chamber 10 provided in this embodiment is in operation, the workpiece loading mechanism 20 moves into the vacuum processing chamber 10 along the first direction. After the workpiece loading mechanism 20 enters the detection range of the detector 60, the moving speed of the workpiece loading mechanism 20 along the first direction slows down, and the detector 60 detects the position of the workpiece loading mechanism 20. When the workpiece loading mechanism 20 reaches the mating station, that is, when the central axes of the first mating member 11 and the second mating member 23 coincide in the projection in the second direction, the workpiece loading mechanism 20 stops moving along the first direction. The detector 60 sends a signal to the third displacement member 42, and the third displacement member 42 drives the positioning block 41 to approach the workpiece loading mechanism 20. After the positioning block 41 is in place, the third displacement member 42 sends a signal to the first drive mechanism. The first displacement member 31 and the second displacement member 32 extend the first output shaft 311 and the second output shaft 321 and abut against the receiving frame 21. After the abutment, the first displacement member 31 drives the first output shaft 311 to extend, and the second displacement member 32 drives the second output shaft 321 to contract, driving the workpiece loading mechanism 20 to move along the second direction. When the arc-shaped notch of the positioning block 41 is engaged with the central shaft 22, the cooperation between the first mating member 11 and the second mating member 23 is completed, and the first displacement member 31 and the second displacement member 32 stop operating. At this time, the second drive mechanism starts to operate, driving the first mating member 11 and the second mating member 23 to rotate, thereby driving the workpiece rack to rotate, and then the vacuum processing mechanism performs vacuum processing on the workpiece; when the vacuum processing of the workpiece is completed, the second drive mechanism stops operating, the second displacement member 32 drives the second output shaft 321 to extend, and the first displacement member 31 drives the first output shaft 311 to contract, thereby driving the workpiece loading mechanism 20 to move along the second direction, driving the first mating member 11 and the second mating member 23 to disengage, and then both the first output shaft 311 and the second output shaft 321 contract, and the third displacement member 42 drives the positioning block 41 away from the workpiece loading mechanism 20. Then, the workpiece loading mechanism 20 moves along the first direction to reach other chambers.

[0055] This embodiment also provides a multi-chamber vacuum processing device, which includes a loading chamber, an unloading chamber, and at least one vacuum processing chamber 10. The loading chamber, at least one vacuum processing chamber 10, and the unloading chamber are arranged in sequence along the first direction and can be selectively communicated. Specifically, gates can be provided between the loading chamber, the vacuum processing chamber 10, and the unloading chamber to maintain the independence of each chamber and avoid mutual influence on the vacuum processing between multiple chambers. In one embodiment, the structures of the loading chamber and the unloading chamber are the same as that of the vacuum processing chamber 10 to reduce the design cost and facilitate adding other vacuum processing mechanisms in the loading chamber and the unloading chamber, increasing the versatility of the loading chamber and the unloading chamber. In one embodiment, the structures of the loading chamber and the unloading chamber are different from that of the vacuum processing chamber 10. For example, no vacuum processing source is provided, so the structures in the loading chamber and the unloading chamber are relatively simple to save material costs and maintenance costs.

[0056] Obviously, the above-mentioned embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all implementation manners here. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A vacuum processing chamber, characterized in that, A first fitting member (11) is rotatably provided at the top and / or bottom of the vacuum processing chamber, and the vacuum processing chamber includes: A workpiece loading mechanism (20) movably provided in the vacuum processing chamber along a first direction, including a receiving frame (21) and a workpiece rack. A plurality of workpieces are loaded on the workpiece rack. A central axis (22) is provided on the workpiece rack in the vertical direction. The workpiece rack is rotatably provided in the receiving frame (21) around the central axis (22), and a second fitting member (23) is connected to the top and / or bottom of the central axis (22); The workpiece loading mechanism (20) can move along a second direction so that the second fitting member (23) can cooperate with or disengage from the first fitting member (11).

2. The vacuum processing chamber according to claim 1, wherein The vacuum processing chamber further includes a first driving mechanism provided inside the vacuum processing chamber to drive the workpiece loading mechanism (20) to move along the second direction.

3. The vacuum processing chamber according to claim 2, wherein The first driving mechanism includes a first displacement member (31) and a second displacement member (32). The driving directions of the first displacement member (31) and the second displacement member (32) are opposite. A first output shaft (311) of the first displacement member (31) and a second output shaft (321) of the second displacement member (32) can abut against the receiving frame (21) and respectively drive the second fitting member (23) to cooperate with or disengage from the first fitting member (11).

4. The vacuum processing chamber according to claim 1, characterized in that, The vacuum processing chamber further includes a positioning mechanism (40) provided at the top or bottom of the vacuum processing chamber. The positioning mechanism (40) includes a positioning block (41) that can move in a direction close to or away from the workpiece loading mechanism (20) to selectively limit the second fitting member (23) in the second direction.

5. The vacuum processing chamber according to claim 4, wherein The positioning mechanism (40) further includes a third displacement member (42) for driving the positioning block (41) to move in a direction close to or away from the workpiece loading mechanism (20).

6. The vacuum processing chamber according to claim 4, wherein An arc-shaped notch is formed at the edge of the positioning block (41). When the positioning block (41) moves in a direction close to the workpiece loading mechanism (20), the arc-shaped notch can be engaged with the central axis (22) to limit the second fitting member (23). When the positioning block (41) moves in a direction away from the workpiece loading mechanism (20), the positioning block (41) can avoid the second fitting member (23).

7. The vacuum processing chamber according to any one of claims 1-6, characterized in that, The vacuum processing chamber further includes a conveying mechanism (50). The conveying mechanism (50) includes a support base (51) and guide wheels (52). The support base (51) extends along the first direction. The guide wheels (52) are rotatably provided on the support base (51) and a plurality of them are arranged at intervals along the first direction. The workpiece loading mechanism (20) can be slidably engaged with the guide wheels (52) to move along the first direction.

8. The vacuum processing chamber according to claim 7, wherein, The vacuum processing chamber further includes a carrying mechanism (70), the carrying mechanism (70) includes a guide member (71), the guide member (71) is relatively stationary with respect to the accommodating frame (21) in the first direction, a guide groove is formed on one side of the guide member (71) along the first direction, and the guide groove can be in rolling or sliding cooperation with the guide wheel (52).

9. The vacuum processing chamber according to claim 8, wherein, The vacuum processing chamber further includes a sliding mechanism (80), the sliding mechanism (80) includes a floating member (81), the floating member (81) is connected to the bottom of the accommodating frame (21), the carrying mechanism (70) further includes a carrying member (72), the carrying member (72) is connected to the guide member (71), one side of the carrying member (72) has an opening and a carrying cavity inside, and the floating member (81) is in floating cooperation with the carrying cavity and can move relative to the carrying cavity in the second direction.

10. A multi-chamber vacuum processing device, characterized in that, It includes a loading chamber, an unloading chamber and at least one vacuum processing chamber as described in any one of claims 1-9, and the loading chamber, at least one of the vacuum processing chambers and the unloading chamber are arranged in sequence along the first direction and can be selectively communicated with each other.

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