Double-pulse excited vacuum switch vacuum degree detection method, system and device and computer equipment

Abstract

The invention relates to a double-pulse excited vacuum switch vacuum degree detection method, system and device and computer equipment. The method comprises the following steps: outputting laser to irradiate the surface of an internal targeting material of a vacuum switch to be detected by adopting a pulse laser so as to generate initial plasma; after the preset time is delayed, a fuel laser is adopted to output laser with the corresponding wavelength matched with the characteristic spectral line of the preset element, the initial plasma is irradiated, directional secondary excitation is carried out on the preset element in the initial plasma, and an enhanced plasma radiation signal is generated; acquiring an enhanced plasma radiation signal through an optical module; and determining a vacuum degree detection result of the vacuum switch to be detected according to the acquired enhanced plasma radiation signal. By adopting the method, the detection sensitivity can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of laser spectroscopy detection, and particularly to a method, system, device, computer equipment, computer-readable storage medium and computer program product for detecting the vacuum degree of a vacuum switch by double-pulse excitation. Background Art

[0002] As a key high-voltage switch device in the power system, the vacuum switch is widely used in the power transmission and distribution network and the industrial control system. Its main function is to realize the reliable breaking and closing of the circuit. The vacuum degree level inside the vacuum switch is directly related to its insulation performance and breaking ability. The high-vacuum state helps to suppress the generation and elongation of the arc, thus ensuring the safe operation of the equipment and the stability of the power system. Once the vacuum degree decreases, it is easy to cause faults such as the extension and breakdown of the arc inside the switch, seriously threatening the safe operation of the power grid.

[0003] However, existing vacuum degree detection methods such as the acoustic wave method, the electron beam method and the traditional laser-induced plasma spectroscopy technology have the problem of low detection sensitivity in a low-vacuum environment, and it is difficult to effectively sense the tiny changes in the vacuum degree, thus affecting the reliability of the detection results. Summary of the Invention

[0004] Based on this, it is necessary to provide a method, system, device, computer equipment, computer-readable storage medium and computer program product for detecting the vacuum degree of a vacuum switch by double-pulse excitation, which can improve the detection sensitivity, in view of the above technical problems.

[0005] In a first aspect, the present application provides a method for detecting the vacuum degree of a vacuum switch by double-pulse excitation, including:

[0006] Using a pulsed laser to output laser light to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate an initial plasma;

[0007] After a preset delay time, using a fuel laser to output laser light with a corresponding wavelength matching the characteristic spectral line of a preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma and generate an enhanced plasma radiation signal;

[0008] Collecting the enhanced plasma radiation signal through an optical module;

[0009] Determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

[0010] In one of the embodiments, the determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal includes:

[0011] Extract the intensity data of the characteristic spectral lines corresponding to the preset element in the enhanced plasma radiation signal;

[0012] Compare the intensity data with the reference intensities of the preset element in the standard database under different vacuum conditions to obtain a comparison result;

[0013] Based on the comparison result, determine the corresponding vacuum value as the vacuum degree detection result of the vacuum switch to be detected.

[0014] In one embodiment, before determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal, it further includes:

[0015] Obtain the standard spectral line wavelength range and reference intensity value corresponding to the preset element;

[0016] According to the difference between the actual spectral line position corresponding to the preset element in the enhanced plasma radiation signal and the standard spectral line wavelength range, perform wavelength calibration on the enhanced plasma radiation signal to obtain a calibrated plasma radiation signal;

[0017] According to the deviation between the spectral line intensity of the enhanced plasma radiation signal and the reference intensity value, correct the spectral line intensity of the calibrated plasma radiation signal to obtain a corrected plasma radiation signal;

[0018] The determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal includes:

[0019] Determine the vacuum degree detection result of the vacuum switch to be detected according to the corrected plasma radiation signal.

[0020] In one embodiment, before determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal, it further includes:

[0021] Repeatedly excite and collect a preset number of enhanced plasma radiation signals;

[0022] Perform superposition averaging on the multiple enhanced plasma radiation signals to obtain a target plasma radiation signal;

[0023] The determining the vacuum degree detection result of the vacuum switch to be detected according to the enhanced plasma radiation signal includes:

[0024] Determine the vacuum degree detection result of the vacuum switch to be detected according to the target plasma radiation signal.

[0025] In one embodiment, the superimposing and averaging process on the multiple enhanced plasma radiation signals to obtain a target plasma radiation signal includes:

[0026] Performing statistical analysis on the sampling point data of the same sampling points in the multiple enhanced plasma radiation signals, identifying and removing abnormal data in the sampling point data to obtain a cleaned plasma radiation signal;

[0027] Performing an averaging process on the data of each same sampling point in the cleaned plasma radiation signal to obtain the target plasma radiation signal.

[0028] In a second aspect, the present application further provides a vacuum degree detection system for a double-pulse-excited vacuum switch, including: a delay pulse generator, a pulse laser, a fuel laser, a vacuum switch to be detected, an optical module, and a spectral analysis module, wherein,

[0029] The delay pulse generator is configured to control the pulse laser to output a laser to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate an initial plasma. After a preset delay time, the fuel laser is controlled to output a laser with a wavelength matching the characteristic spectral line of a preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma to generate an enhanced plasma radiation signal;

[0030] The delay pulse generator is further configured to control the optical module to collect the enhanced plasma radiation signal;

[0031] The spectral analysis module is configured to determine the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

[0032] In a third aspect, the present application further provides a vacuum degree detection device for a double-pulse-excited vacuum switch, including:

[0033] A first laser module for using a pulse laser to output a laser to irradiate the surface of the internal target material of the vacuum switch to be detected to generate an initial plasma;

[0034] A second laser module for, after a preset delay time, using a fuel laser to output a laser with a corresponding wavelength matching the characteristic spectral line of a preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma to generate an enhanced plasma radiation signal;

[0035] A signal acquisition module for collecting the enhanced plasma radiation signal through the optical module;

[0036] A vacuum detection module for determining a vacuum degree detection result of the to-be-detected vacuum switch according to the collected enhanced plasma radiation signal.

[0037] In a fourth aspect, the present application further provides a computer device, including a memory and a processor, where the memory stores a computer program, and when the processor executes the computer program, the following steps are implemented:

[0038] Using a pulsed laser to output laser light to irradiate the surface of the internal target material of the to-be-detected vacuum switch to generate an initial plasma;

[0039] After delaying a preset time, using a fuel laser to output laser light with a corresponding wavelength matching the characteristic spectral line of a preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma to generate an enhanced plasma radiation signal;

[0040] Collecting the enhanced plasma radiation signal through an optical module;

[0041] Determining a vacuum degree detection result of the to-be-detected vacuum switch according to the collected enhanced plasma radiation signal.

[0042] In a fifth aspect, the present application further provides a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the following steps are implemented:

[0043] Using a pulsed laser to output laser light to irradiate the surface of the internal target material of the to-be-detected vacuum switch to generate an initial plasma;

[0044] After delaying a preset time, using a fuel laser to output laser light with a corresponding wavelength matching the characteristic spectral line of a preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma to generate an enhanced plasma radiation signal;

[0045] Collecting the enhanced plasma radiation signal through an optical module;

[0046] Determining a vacuum degree detection result of the to-be-detected vacuum switch according to the collected enhanced plasma radiation signal.

[0047] In a sixth aspect, the present application further provides a computer program product, including a computer program, and when the computer program is executed by a processor, the following steps are implemented:

[0048] Using a pulsed laser to output laser light to irradiate the surface of the internal target material of the to-be-detected vacuum switch to generate an initial plasma;

[0049] After a preset delay time, a fuel laser is used to output a laser with a corresponding wavelength matching the characteristic spectral line of the preset element, and irradiate the initial plasma to perform directional secondary excitation on the preset element in the initial plasma, generating an enhanced plasma radiation signal.

[0050] The enhanced plasma radiation signal is collected through an optical module.

[0051] Based on the collected enhanced plasma radiation signal, the vacuum degree detection result of the vacuum switch to be detected is determined.

[0052] For the above vacuum degree detection method, system, device, computer device, computer-readable storage medium and computer program product of double-pulse excitation, first, a pulsed laser is used to output a laser and irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate an initial plasma and form a high-temperature excited gas environment containing target element atoms or ions, laying a physical foundation for subsequent spectral line enhancement and vacuum degree analysis; then, after a preset delay time, a fuel laser is used to output a laser with a corresponding wavelength matching the characteristic spectral line of the preset element and irradiate the initial plasma to perform directional secondary excitation on the preset element in the initial plasma, generating an enhanced plasma radiation signal. After the initial plasma is formed, through delay control, a fuel laser is used to emit a laser matching the characteristic spectral line of the preset element to perform directional secondary excitation on specific elements in the plasma, which can effectively enhance the emission intensity of the characteristic spectral line of this element, improve the signal-to-noise ratio, and make up for the defect of weak single-pulse excitation signal in a low-vacuum environment; then, the enhanced plasma radiation signal is collected through an optical module, which can effectively guide, separate and stably receive the target spectral line, reduce background stray interference, and improve the data quality and reliability of the spectral measurement system; finally, based on the collected enhanced plasma radiation signal, the vacuum degree detection result of the vacuum switch to be detected is determined. According to the intensity change of the characteristic spectral line of the target element in the enhanced plasma radiation signal, comparison and analysis are carried out, and the accurate calculation of the internal vacuum degree of the vacuum switch can be realized, with good accuracy and field adaptability. In the above method, by adopting a double-pulse excitation mechanism, the internal target material of the vacuum switch is excited at different times, combined with the directional enhancement of the specific element spectral line, the plasma signal intensity and spectral line signal-to-noise ratio can be significantly improved in a low-vacuum environment. By setting the laser emission timing, precisely controlling the secondary excitation wavelength, and cooperating with optical acquisition and spectral analysis, the intensity of the target spectral line can be extracted more stably and accurately and the vacuum degree can be calculated, solving the problem of insufficient detection sensitivity of the prior art under low-vacuum conditions and improving the stability and reliability of the detection result. Description of the Drawings

[0053] To more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following will briefly introduce the drawings required for the description of the embodiments of the present application or related technologies. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0054] Figure 1 It is an application environment diagram of the vacuum degree detection method for a vacuum switch with double-pulse excitation in an embodiment;

[0055] Figure 2 It is a schematic flowchart of the vacuum degree detection method for a vacuum switch with double-pulse excitation in an embodiment;

[0056] Figure 3 It is a schematic diagram of a vacuum degree detection system for a vacuum switch with double-pulse excitation in an embodiment;

[0057] Figure 4 It is a schematic diagram of a vacuum degree detection system for a vacuum switch with double-pulse excitation in another embodiment;

[0058] Figure 5 It is a structural block diagram of a vacuum degree detection device for a vacuum switch with double-pulse excitation in an embodiment;

[0059] Figure 6 It is an internal structure diagram of a computer device in an embodiment. Specific Embodiments

[0060] In order to make the objectives, technical solutions and advantages of the present application more clear and understandable, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0061] The vacuum degree detection method for a vacuum switch with double-pulse excitation provided by the embodiments of the present application can be applied to, for example Figure 1In the application environment shown. Among them, the terminal 102 is communicatively connected to the pulsed laser 106, the fuel laser 108, and the optical module 110. The terminal 102 uses the pulsed laser 106 to output a laser beam to irradiate the surface of the internal target material of the vacuum switch 104 to be detected, so as to generate an initial plasma; after a preset delay time, the fuel laser 108 is used to output a laser beam with a corresponding wavelength matching the preset element characteristic spectrum to irradiate the initial plasma, so as to perform directional secondary excitation on the preset elements in the initial plasma and generate an enhanced plasma radiation signal; through the optical module 110, the enhanced plasma radiation signal is collected; according to the collected enhanced plasma radiation signal, the vacuum degree detection result of the vacuum switch to be detected is determined. Among them, the terminal 102 can be but is not limited to various personal computers, laptop computers, smart phones, tablet computers, etc. In addition, the terminal 102 can also be replaced by a server, which can be an independent physical server, a server cluster or a distributed system composed of multiple physical servers, or a cloud server providing cloud computing services.

[0062] In an exemplary embodiment, as Figure 2 shown, a method for detecting the vacuum degree of a vacuum switch with dual-pulse excitation is provided, taking the method applied to Figure 1 the terminal 102 in

[0063] Step S201: Use a pulsed laser to output a laser beam to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate an initial plasma.

[0064] Among them, the pulsed laser refers to a laser device that can output a high-energy pulsed laser beam on a nanosecond time scale, and has a high peak power, a short pulse width, and good focusing characteristics; the surface of the target material refers to the material area inside the arc extinguishing chamber of the vacuum switch that can be directly irradiated by the laser and generate plasma, usually a metal or alloy contact material.

[0065] Exemplarily, the terminal controls the pulsed laser to output a laser pulse with a set energy, and focuses the laser beam onto the surface of the internal target material of the vacuum switch through a focusing optical system. The laser beam acts on the target material, and the energy density in the local area rises rapidly, causing the surface of the material to vaporize and ionize, forming a high-temperature and high-electron-density initial plasma. This plasma contains various elemental ions from the target material and is the basic signal source for subsequent directional enhancement and spectral analysis.

[0066] Step S202: After a preset delay time, use a fuel laser to output a laser beam with a corresponding wavelength matching the preset element characteristic spectrum to irradiate the initial plasma, so as to perform directional secondary excitation on the preset elements in the initial plasma and generate an enhanced plasma radiation signal.

[0067] Among them, the fuel laser refers to a laser emission device with wavelength tuning ability, which is used as the laser of the second pulse source in the double-pulse excitation system. Its output wavelength matches the characteristic spectral line of the target detection element, and it has wavelength selectivity and emission timing control ability. This laser is not used for direct material ablation or plasma generation, but for the directional excitation of preset elements in the initial plasma after its formation, so as to enhance the target spectral line signal intensity. Specifically, the fuel laser can be a laser device with wavelength tuning function, such as a dye laser, an optical parametric oscillator, or a solid-state laser with a filter structure to achieve a fixed output wavelength. Its emission timing is precisely controlled by a delay control circuit to ensure secondary excitation within the effective lifetime of the plasma.

[0068] Among them, the preset element refers to the target element corresponding to the spectral line to be enhanced, such as metal elements like copper, iron, chromium, etc.; the directional secondary excitation refers to the re-excitation of the target element in the plasma by using a laser with a specific wavelength after the initial plasma is formed, so as to significantly enhance its spectral line emission intensity.

[0069] Exemplarily, after the terminal generates plasma by initial laser excitation, it controls the delay pulse generator to trigger the fuel laser to emit a laser pulse after a preset delay time (such as 200 - 500 nanoseconds). The laser wavelength is preset to match the characteristic spectral line of the selected element (such as 515.3 nm or 521.8 nm for copper, 248.3 nm or 372.0 nm for iron, 425.4 nm for chromium, 341.4 nm for nickel, 328.1 nm for silver, 400.8 nm for tungsten, or 213.9 nm for zinc, etc.), and irradiates the plasma region formed by the previous pulse through the spatial optical path. Through directional excitation, the transition emission process of the preset element is significantly enhanced, so as to obtain an enhanced plasma radiation signal with a higher signal-to-noise ratio and lower background interference for subsequent spectral analysis.

[0070] Step S203, collect the enhanced plasma radiation signal through the optical module.

[0071] Among them, the optical module refers to an optical system used to effectively collect, transmit, and convert the enhanced plasma radiation signal into analyzable spectral data, usually including a focusing lens, a dichroic mirror, a narrowband filter, and an ICCD camera (Intensified Charge-Coupled Device). The ICCD camera has nanosecond-level time resolution ability and high sensitivity, and can accurately capture the spectral line information during the transient process of plasma emission.

[0072] Exemplarily, the terminal controls the optical module to collect the enhanced plasma radiation signal. Specifically, when the target spectral line is directionally excited and enhanced, the generated emission light is transmitted to the dichroic mirror through the optical path system and is reflected into the signal collection path. The signal is then focused by the focusing lens and the non-target wavelengths are filtered out by the narrowband filter, and finally received by the ICCD camera to form time-gated two-dimensional spectral image data. This process can combine multiple sampling superposition and background subtraction techniques to improve the signal-to-noise ratio and detection stability of the signal, providing a high-quality data basis for subsequent spectral analysis.

[0073] Step S204, determine the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

[0074] Among them, the vacuum degree detection result refers to a quantitative index of the current vacuum level inside the vacuum switch obtained by analyzing and back-calculating based on the intensity change of the target spectral line in the plasma radiation signal and combining with the standard database, usually expressed in pascal (Pa) or millitorr (mTorr). This index reflects the degree of gas rarefaction in the arc extinguishing chamber and is an important parameter for judging the operating state of the vacuum switch.

[0075] Exemplarily, the terminal processes the enhanced plasma radiation signal collected by the optical module, extracts the characteristic spectral line intensity corresponding to the preset element, and compares it with the reference intensity in the standard spectral database under different vacuum degree conditions. The system can calculate the vacuum degree value inside the vacuum switch based on the spectral line intensity change trend, normalization model or empirical fitting curve. This processing process can combine the preset threshold for result determination, support the output of "normal / abnormal" status information, and be used as the basis for subsequent operation and maintenance or early warning decision-making.

[0076] In the above method for detecting the vacuum degree of a vacuum switch with double-pulse excitation, first, a pulsed laser is used to output laser light to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate initial plasma and form a high-temperature excited gas environment containing target element atoms or ions, laying a physical foundation for subsequent spectral line enhancement and vacuum degree analysis; then, after a preset delay time, a fuel laser is used to output laser light with a wavelength corresponding to the characteristic spectral line of the preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma and generate an enhanced plasma radiation signal. After the initial plasma is formed, by delaying the control, a fuel laser is used to emit laser light matching the characteristic spectral line of the preset element to perform directional secondary excitation on a specific element in the plasma, which can effectively enhance the emission intensity of the characteristic spectral line of this element, improve the signal-to-noise ratio, and make up for the defect of weak single-pulse excitation signals in a low-vacuum environment; then, through an optical module, the enhanced plasma radiation signal is collected, which can effectively guide, separate, and stably receive the target spectral line, reduce background stray interference, and improve the data quality and reliability of the spectral measurement system; finally, according to the collected enhanced plasma radiation signal, the vacuum degree detection result of the vacuum switch to be detected is determined. According to the intensity change of the characteristic spectral line of the target element in the enhanced plasma radiation signal, comparison and analysis are carried out, and the accurate calculation of the internal vacuum degree of the vacuum switch can be realized, with good accuracy and on-site adaptability. In the above method, by adopting a double-pulse excitation mechanism, the internal target material of the vacuum switch is excited at different times, combined with the directional enhancement of the specific element spectral line, the plasma signal intensity and spectral line signal-to-noise ratio can be significantly improved in a low-vacuum environment. By setting the laser emission timing, precisely controlling the secondary excitation wavelength, and cooperating with optical acquisition and spectral analysis, the target spectral line intensity can be extracted more stably and accurately, and the vacuum degree can be calculated, solving the problem of insufficient detection sensitivity in the prior art under low-vacuum conditions and improving the stability and reliability of the detection result.

[0077] In an exemplary embodiment, the above step S204 of determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal further includes: extracting the intensity data of the characteristic spectral line corresponding to the preset element in the enhanced plasma radiation signal; comparing the intensity data with the reference intensity of the preset element under different vacuum degree conditions in the standard database to obtain a comparison result; and based on the comparison result, determining the corresponding vacuum degree value as the vacuum degree detection result of the vacuum switch to be detected.

[0078] Among them, the intensity data of the characteristic spectral line refers to the spectral intensity value at the target wavelength in the plasma radiation signal, usually including parameters such as the peak intensity of the spectral line, the full width at half maximum, or the integral area, which can reflect the emission state of the corresponding element in the plasma; the standard database is a pre-established data set containing the corresponding relationship between the spectral line intensities of the target element under multiple vacuum conditions, which can be obtained through experimental calibration or constructed based on theoretical calculations and simulations; the comparison result refers to the relative relationship between the currently detected spectral line intensity and the reference value, which can be the matching degree, the fitting error, or the interval mapping result, and is used to infer the current vacuum level.

[0079] Exemplarily, the terminal first extracts the characteristic spectral line region of the preset element in the enhanced plasma radiation signal, such as at the wavelength of 521.8 nm of the copper element, and calculates its peak intensity.

[0080] After that, the terminal compares the processed spectral line intensity value with the reference intensity value of the characteristic spectral line of this element measured under different vacuum conditions recorded in the standard database. This comparison can be completed by means of curve fitting, interpolation calculation, or piecewise look-up table to construct the intensity corresponding relationship between the currently detected signal and the standard data. For example, if the current spectral line intensity is between two data points corresponding to 10 Pa and 20 Pa in the standard database, the exact value of the current vacuum degree in this interval can be calculated by linear interpolation.

[0081] Finally, the terminal outputs the calculation result as the vacuum degree detection result of the vacuum switch to be detected, and can simultaneously generate the corresponding vacuum state evaluation (such as qualified, metastable, or failed), and record it in the equipment full life cycle database for subsequent trend analysis or intelligent diagnosis.

[0082] In this embodiment, by extracting the characteristic spectral line intensity of the target element and comparing it with the standard database, the vacuum degree inside the vacuum switch can be accurately deduced under low vacuum conditions, significantly improving the sensitivity of the vacuum degree detection and the reliability of the result. Using the enhanced spectral line after directional secondary excitation as the analysis basis effectively suppresses the influence of background interference on the measurement accuracy, and is particularly suitable for application scenarios with weak plasma signals or complex detection environments. At the same time, this method has good engineering practicability, can realize the online state evaluation of the vacuum switch and high-frequency data update, and supports the intelligent operation and maintenance requirements.

[0083] In an exemplary embodiment, before determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal in step S204 above, the following steps are further included: obtaining the standard spectral line wavelength range and reference intensity value corresponding to a preset element; performing wavelength calibration on the enhanced plasma radiation signal according to the difference between the actual spectral line position corresponding to the preset element in the enhanced plasma radiation signal and the standard spectral line wavelength range to obtain the calibrated plasma radiation signal; correcting the spectral line intensity of the calibrated plasma radiation signal according to the deviation between the spectral line intensity of the enhanced plasma radiation signal and the reference intensity value to obtain the corrected plasma radiation signal;

[0084] In step S204 above, determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal further includes: determining the vacuum degree detection result of the vacuum switch to be detected according to the corrected plasma radiation signal.

[0085] Among them, the standard spectral line wavelength range refers to the theoretical reference value range in which the spectral line position changes little under the condition of vacuum degree change according to the characteristic emission spectral line of the preset element; the reference intensity value refers to the characteristic spectral line intensity of the preset element in the standard database under different vacuum degree conditions, which is usually obtained through experimental calibration and is used for comparison with the measured data; wavelength calibration refers to correcting the entire spectral data in the wavelength axis direction according to the spectral line position offset to eliminate the systematic error caused by equipment drift or environmental disturbance; intensity correction refers to further adjusting the amplitude of the spectral line intensity according to the deviation between the measured spectral line intensity and the reference value on the basis of wavelength calibration to improve the accuracy and comparability of the data.

[0086] Exemplarily, the terminal first obtains the characteristic spectral line of copper element from the standard database, such as the standard wavelength range of 521.8nm and its reference intensity value under different vacuum degree conditions. In the collected enhanced plasma radiation signal, the actual position of this spectral line may deviate due to factors such as spectrometer thermal drift, laser energy fluctuation or optical error. After the terminal calculates the offset amount, it performs translation calibration on the entire spectral data on the wavelength axis to obtain the calibrated spectral signal with aligned positions. For example, the terminal obtains the standard wavelength of the characteristic spectral line of copper element from the standard database as 521.8nm. It is found during the detection process that this spectral line actually appears at the position of 522.1nm in the collected spectrum. Based on this, the terminal performs wavelength calibration operation and translates the entire spectral data 0.3nm to the left.

[0087] Subsequently, the terminal calculates the intensity value of the spectral line in the calibrated signal and compares it with the standard reference intensity value. If a deviation beyond the set tolerance range is detected between the spectral line intensity and the standard reference intensity value, the terminal corrects the spectral line intensity according to a preset correction method. The correction methods include, but are not limited to: linearly scaling the measured intensity according to the scale factor in the standard curve, or performing interpolation fitting through the established vacuum degree - spectral line intensity mapping curve in the standard database to obtain the equivalent correction value of the target spectral line under the current conditions, eliminating the measurement errors caused by energy input fluctuations or sensing response differences, and outputting the corrected spectral line intensity data. Finally, based on the corrected spectral line intensity, the terminal determines the vacuum degree value inside the vacuum switch in combination with the vacuum degree - intensity mapping relationship in the standard database and outputs it as the final detection result. For example, the peak intensity of copper at 521.8 nm is extracted. Subsequently, the terminal performs amplitude correction on the measured intensity according to the standard reference intensity value set in the calibration stage. This standard reference intensity value does not correspond to a specific vacuum degree, but represents the typical emission intensity when the laser energy, optical response, and detection sensitivity are at normal levels under standard conditions of the device, and is used as a unified comparison benchmark for detection data. For example, under stable laser energy conditions, the standard intensity of collecting this spectral line by the same optical system should be between 900 - 1000. If the measured intensity is significantly lower than this benchmark value, for example, lower than 90%, it is determined that there are factors such as low laser output, optical path energy attenuation, or sensor response decline. Then the terminal will scale up the measured intensity proportionally to the expected level equivalent to the standard laser conditions, and then perform normalization adjustment on the measured intensity to restore it to the equivalent standard state level. The corrected spectral line intensity is not used to determine the vacuum degree, but as a unified and standardized data basis for subsequent comparison with the vacuum degree - spectral line intensity mapping relationship in the standard database, thereby avoiding the influence of intensity deviation caused by system state changes on the vacuum degree judgment result.

[0088] In this embodiment, by introducing the wavelength calibration and intensity correction mechanism, the problems of spectral line position and intensity errors caused by spectrometer drift, laser instability, or other environmental factors are effectively solved, thereby improving the accuracy and consistency of vacuum degree detection. Especially in on-site application scenarios, it can ensure the consistency and reliability between multiple detection results, enhance the credibility of the vacuum switch state assessment results, and provide high-quality basic data support for intelligent operation and maintenance and fault warning.

[0089] In an exemplary embodiment, before determining the vacuum degree detection result of the to-be-detected vacuum switch according to the collected enhanced plasma radiation signal in step S204 above, it further includes: repeatedly exciting and collecting a preset number of enhanced plasma radiation signals; performing superposition averaging processing on the multiple enhanced plasma radiation signals to obtain a target plasma radiation signal;

[0090] The above step S204 determines the vacuum degree detection result of the vacuum switch to be detected according to the enhanced plasma radiation signal, and further includes: determining the vacuum degree detection result of the vacuum switch to be detected according to the target plasma radiation signal.

[0091] Exemplarily, the terminal controls the laser to continuously perform a number of excitation operations, and collects a set of complete enhanced plasma radiation spectra through the optical module after each excitation. The terminal processes the intensity values of the same wavelength points in these several sets of spectral data point by point. First, through an outlier rejection strategy (such as removing the maximum and minimum values), and then arithmetic-averaging the remaining values to obtain the representative intensity of each wavelength point in a statistical sense. The stacking and averaging process can significantly suppress the single-measurement error caused by laser energy micro-fluctuations, detector thermal noise, or environmental interference, and improve the signal-to-noise ratio of the spectral line and the result stability.

[0092] In this embodiment, by introducing the mechanism of multiple sampling and stacking averaging, the uncertainty of the plasma emission signal under single-excitation conditions is effectively reduced, the stability and anti-interference ability of the spectral line intensity data are enhanced, providing a higher-quality and more reliable data basis for subsequent vacuum degree judgment, and helping to improve the repeatability and accuracy of the entire detection system.

[0093] In an exemplary embodiment, the above-mentioned stacking and averaging process of multiple enhanced plasma radiation signals to obtain the target plasma radiation signal further includes: statistically analyzing the sampling point data of the same sampling points in multiple enhanced plasma radiation signals, identifying and removing the abnormal data in the sampling point data to obtain the cleaned plasma radiation signal; averaging the data of each same sampling point in the cleaned plasma radiation signal to obtain the target plasma radiation signal.

[0094] Among them, the sampling point data of the same sampling points refers to the set of intensity values corresponding to the same wavelength position in different excitations; the abnormal data refers to the values that significantly deviate from other data in the same sampling point data, which may be caused by laser instability, electromagnetic interference, or transient distortion; the cleaned plasma radiation signal refers to the signal set composed of only normal sampling data after removing the outliers, which is used for subsequent averaging processing; the target plasma radiation signal refers to the final spectral line data formed by averaging the cleaned data and used for vacuum degree analysis.

[0095] Exemplarily, after the terminal control system completes multiple laser excitations and radiation signal acquisitions, it establishes a cross-sampling data list for each wavelength sampling point. For example, ten intensity values at 521.8 nanometers recorded during ten excitations. The terminal sorts and analyzes the standard deviation of these data, eliminates outliers that deviate from the average value by more than a set threshold (such as one standard deviation or a 10% range), and forms a cleaned data set. Then, it performs an arithmetic average on the remaining normal data to obtain the target intensity value at this sampling point. This processing process is carried out one by one at all wavelength sampling points, and finally forms a set of complete, smooth, and highly anti-interference plasma radiation spectra for subsequent vacuum degree analysis.

[0096] In this embodiment, by eliminating outliers and averaging and fusing multiple data at the same sampling point, it effectively avoids the deviation caused by laser pulse energy fluctuations, arc disturbances, or spectral acquisition jitters to the results, improves the signal-to-noise ratio, spectral quality, and data stability of the plasma spectral line, and provides a more accurate and reliable raw data basis for vacuum degree detection.

[0097] In an exemplary embodiment, as Figure 3 shown, the present application provides a vacuum degree detection system for a double-pulse excitation vacuum switch, which includes: a delay pulse generator 301, a pulse laser 302, a fuel laser 303, a vacuum switch 304 to be detected, an optical module 305, and a spectral analysis module 306. Among them,

[0098] The delay pulse generator 301 is used to control the pulse laser 302 to output laser light to irradiate the surface of the internal target material of the vacuum switch 304 to be detected, so as to generate initial plasma. After a preset delay time, it controls the fuel laser 303 to output laser light with a wavelength matching the characteristic spectral line of the preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma and generate an enhanced plasma radiation signal;

[0099] The delay pulse generator 301 is also used to control the optical module 305 to collect the enhanced plasma radiation signal;

[0100] The spectral analysis module 306 is used to determine the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

[0101] In this embodiment, by making the dual-pulse excitation structure composed of a pulsed laser and a fuel laser work in coordination with a delay control system, staged excitation of the target material inside the vacuum switch and directional enhancement of specific element spectral lines are achieved, significantly enhancing the plasma signal intensity and detection sensitivity. The delay pulse generator realizes unified control of the laser emission timing and the optical acquisition process, ensuring the synchronization and accuracy of excitation and acquisition. The spectral analysis module analyzes and calculates based on the enhanced spectral line signals, enabling accurate detection and status judgment of the vacuum degree, thereby improving the detection reliability, anti-interference ability, and on-site adaptability of the entire system.

[0102] In another exemplary embodiment, as Figure 4 shown, the present application provides a vacuum degree detection system for a vacuum switch with dual-pulse excitation, including: a pulsed laser 1, a fuel laser 2, an optical system (a focusing lens 3 and a dichroic mirror 4), a spatial optical path 5, a vacuum test platform 6, a plasma collection optical path 7, a spectral measurement system (a spectrometer 8 and an ICCD camera 9), a delay pulse generator 10, and a spectral processing terminal 11.

[0103] Among them, the pulsed laser 1 is used to output a first pulsed laser, which passes through the dichroic mirror 4 after being focused by the focusing lens, and irradiates the surface of the target material inside the arc extinguishing chamber 6 of the vacuum switch through the laser transmission optical path 5 to excite and form an initial plasma.

[0104] The fuel laser 2 can be configured to output pulse sequences with different wavelengths and different energy combinations to adapt to the detection requirements of vacuum switches with different material compositions and improve the detection universality. The fuel laser 2 is used to emit a second pulsed laser, and its wavelength is specifically tuned to match the characteristic emission spectrum line of copper elements, for directional secondary excitation of specific copper elements in the initial plasma to enhance the copper element spectral line signal.

[0105] The time interval between the first pulse and the second pulse is adjustable, with a range from dozens of nanoseconds to several microseconds, and is specifically optimized and set according to the density and lifetime of the initial plasma to achieve the best enhancement effect.

[0106] The laser forms a small spot through the focusing lens and precisely irradiates the surface of the target material inside the arc extinguishing chamber to achieve efficient and stable plasma excitation.

[0107] The vacuum test platform 6 includes a vacuum switch arc extinguishing chamber, a vacuum gauge, and auxiliary connection devices. The arc extinguishing chamber serves both as a vacuum degree detection environment and as a container for laser-excited target materials. The auxiliary connection devices include a three-dimensional stepper motor and a bellows connection device. The stepper motor is used to avoid multiple laser ablations concentrating on the same position and extend the life of the test area.

[0108] The plasma radiation signal generated by the excitation propagates backward along the original path to the dichroic mirror 4 and is reflected to the plasma collection optical path 7, achieving an effective separation of the laser and the plasma emission light;

[0109] The delay pulse generator 10 is used to precisely control the double-pulse timing of the pulsed laser and the fuel laser 2 and synchronously trigger the ICCD camera 9 during the acquisition process to ensure that the secondary excitation and imaging timing are consistent;

[0110] The spectral measurement system includes a high-resolution spectrometer 8 and an ICCD camera 9, which are used to record the spectral signals enhanced by the plasma.

[0111] The spectral processing terminal 11 is used to analyze the spectral line intensity changes, spectral line composition, estimate the plasma temperature and density, and finally obtain the information on the change of the internal vacuum degree of the vacuum switch.

[0112] The above system can achieve spectral acquisition at different emission times or emission regions, and further optimize the vacuum degree measurement results by analyzing the spectral line intensity changes.

[0113] The execution process of the above system includes:

[0114] Step 1, equipment installation and calibration: Install the pulsed laser, fuel laser, spectrometer, ICCD and related auxiliary equipment, and complete the optical path alignment and system calibration.

[0115] Step 2, preliminary excitation: The pulsed laser emits the first pulsed laser, which is focused and irradiated on the surface of the target material inside the arc extinguishing chamber of the vacuum switch to generate an initial plasma. The laser energy and wavelength are reasonably selected according to the characteristics of the copper target material.

[0116] Step 3, directional element excitation: Within a short time after the initial plasma is generated (the delay time is in the order of nanoseconds to microseconds), the fuel laser emits the second pulsed laser, and the wavelength is specifically matched with the emission spectrum line of copper elements to directionally excite the copper elements in the initial plasma, greatly enhancing the emission intensity of its characteristic spectral lines and improving the signal-to-noise ratio.

[0117] Step 4, spectral detection: Collect the plasma emission signal through the spatial optical path, and the spectrometer captures the enhanced specific spectral lines (such as copper 515.3 nm, 521.8 nm) in real time, records the intensity changes, and is used for subsequent vacuum degree estimation.

[0118] Step 5, data processing and analysis: The spectral processing terminal compares and corrects the collected spectral data with the standard database, and estimates the gas component concentration and vacuum degree inside the arc extinguishing chamber according to the change of the target spectral line intensity.

[0119] In this embodiment, the dual-pulse timing control technology of the pulsed laser and the fuel laser, combined with the spatial optical path system, can perform directional secondary excitation on the characteristic spectral lines of copper elements, greatly improving the intensity of the laser-induced plasma signal, and significantly enhancing the sensitivity, accuracy, and anti-interference ability of the vacuum degree detection of vacuum switches. By reasonably regulating the dual-pulse laser timing and energy distribution, it can flexibly adapt to different vacuum environments and material characteristics. The detection process is simple, safe, and reliable, with broad engineering application prospects and important promotion value.

[0120] It should be understood that although the steps in the flowcharts involved in the above-described embodiments are shown in sequence according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless there is a clear indication in this article, the execution of these steps has no strict order limit, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-described embodiments may include multiple steps or multiple stages. These steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be executed alternately or alternately with at least a part of other steps or steps in other steps.

[0121] Based on the same inventive concept, the embodiment of the present application also provides a dual-pulse excitation vacuum switch vacuum degree detection device for implementing the above-mentioned dual-pulse excitation vacuum switch vacuum degree detection method. The solution provided by this device to solve the problem is similar to the solution described in the above method. Therefore, the specific limitations in one or more embodiments of the dual-pulse excitation vacuum switch vacuum degree detection device provided below can refer to the limitations on the dual-pulse excitation vacuum switch vacuum degree detection method in the above text, and will not be repeated here.

[0122] In an exemplary embodiment, as Figure 5 shown, a dual-pulse excitation vacuum switch vacuum degree detection device is provided, including: a first laser module 501, a second laser module 502, a signal acquisition module 503, and a vacuum detection module 504, where:

[0123] The first laser module 501 is used to output a laser using a pulsed laser to irradiate the surface of the internal target material of the vacuum switch to be detected to generate an initial plasma;

[0124] The second laser module 502 is used to output a laser with a wavelength matching the preset element characteristic spectral line using a fuel laser after a preset delay time to irradiate the initial plasma to perform directional secondary excitation on the preset element in the initial plasma and generate an enhanced plasma radiation signal;

[0125] The signal acquisition module 503 is configured to acquire the enhanced plasma radiation signal through the optical module;

[0126] The vacuum detection module 504 is configured to determine the vacuum degree detection result of the vacuum switch to be detected according to the acquired enhanced plasma radiation signal.

[0127] In one embodiment, the above-mentioned vacuum detection module 504 is further configured to extract the intensity data of the characteristic spectral lines corresponding to the preset elements in the enhanced plasma radiation signal; compare the intensity data with the reference intensities of the preset elements in the standard database under different vacuum conditions to obtain a comparison result; based on the comparison result, determine the corresponding vacuum degree value as the vacuum degree detection result of the vacuum switch to be detected.

[0128] In one embodiment, the above-mentioned vacuum degree detection device for a vacuum switch with double-pulse excitation further includes a calibration and correction module, which is configured to obtain the standard spectral line wavelength range and reference intensity value corresponding to the preset element; perform wavelength calibration on the enhanced plasma radiation signal according to the difference between the actual spectral line position corresponding to the preset element in the enhanced plasma radiation signal and the standard spectral line wavelength range to obtain the calibrated plasma radiation signal; correct the spectral line intensity of the calibrated plasma radiation signal according to the deviation between the spectral line intensity of the enhanced plasma radiation signal and the reference intensity value to obtain the corrected plasma radiation signal.

[0129] In one embodiment, the above-mentioned vacuum detection module 504 is further configured to determine the vacuum degree detection result of the vacuum switch to be detected according to the corrected plasma radiation signal.

[0130] In one embodiment, the above-mentioned vacuum degree detection device for a vacuum switch with double-pulse excitation further includes a superposition and averaging module, which is configured to repeatedly excite and acquire a preset number of enhanced plasma radiation signals; perform superposition and averaging processing on the multiple enhanced plasma radiation signals to obtain a target plasma radiation signal.

[0131] In one embodiment, the above-mentioned vacuum detection module 504 is further configured to determine the vacuum degree detection result of the vacuum switch to be detected according to the target plasma radiation signal.

[0132] In one embodiment, the above-mentioned superposition and averaging module is further configured to perform statistical analysis on the sampling point data of the same sampling points in the multiple enhanced plasma radiation signals, identify and remove the abnormal data in the sampling point data to obtain the cleaned plasma radiation signal; perform averaging processing on the data of each same sampling point in the cleaned plasma radiation signal to obtain the target plasma radiation signal.

[0133] Each module in the above-mentioned vacuum degree detection device for double-pulse excitation vacuum switch can be implemented in whole or in part by software, hardware, or a combination thereof. Each of the above modules can be embedded in or independent of a processor in a computer device in the form of hardware, or stored in a memory in the computer device in the form of software, so that the processor can call and execute the operations corresponding to each of the above modules.

[0134] In an exemplary embodiment, a computer device is provided. The computer device can be a terminal, and its internal structure diagram can be as Figure 6 shown. The computer device includes a processor, a memory, an input / output interface, a communication interface, a display unit, and an input device. Among them, the processor, the memory, and the input / output interface are connected through a system bus, and the communication interface, the display unit, and the input device are connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The input / output interface of the computer device is used to exchange information between the processor and external devices. The communication interface of the computer device is used to communicate with external terminals in a wired or wireless manner. The wireless manner can be implemented through WIFI, a mobile cellular network, near field communication (NFC), or other technologies. The computer program, when executed by the processor, implements a method for detecting the vacuum degree of a double-pulse excitation vacuum switch. The display unit of the computer device is used to form a visually visible picture, which can be a display screen, a projection device, or a virtual reality imaging device. The display screen can be a liquid crystal display screen or an electronic ink display screen. The input device of the computer device can be a touch layer covering the display screen, or a button, a trackball, or a touchpad provided on the housing of the computer device, or an external keyboard, touchpad, or mouse, etc.

[0135] Those skilled in the art can understand that Figure 6 the structure shown in

[0136] is only a block diagram of some structures related to the solution of this application, and does not constitute a limitation on the computer device to which the solution of this application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different component layout.

[0137] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the foregoing method embodiments are implemented.

[0138] In one embodiment, a computer program product is provided, including a computer program. When the computer program is executed by a processor, the steps in the foregoing method embodiments are implemented.

[0139] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data for analysis, stored data, displayed data, etc.) involved in this application are all information and data that have been authorized by the user or fully authorized by all parties, and the collection, use, and processing of relevant data need to comply with relevant regulations.

[0140] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above methods. Among them, any reference to a memory, database, or other medium used in the embodiments provided in the present application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc. The databases involved in the embodiments provided in the present application can include at least one of relational databases and non-relational databases. Non-relational databases can include distributed databases based on blockchain, etc., without limitation. The processors involved in the embodiments provided in the present application can be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, data processing logics based on quantum computing, artificial intelligence (AI) processors, etc., without limitation.

[0141] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in the present application.

[0142] The above-described embodiments merely represent several implementation manners of the present application. The description thereof is relatively specific and detailed, but it should not be construed as a limitation to the patent scope of the present application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several deformations and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.

Claims

1. A method for detecting the vacuum degree of a vacuum switch excited by double pulses, characterized in that, The method includes: Using a pulsed laser to output laser light to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate initial plasma; After a preset delay time, using a fuel laser to output laser light with a corresponding wavelength matching the characteristic spectral line of the preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma and generate an enhanced plasma radiation signal; Collecting the enhanced plasma radiation signal through an optical module; Determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

2. The method according to claim 1, wherein The determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal includes: Extracting the intensity data of the characteristic spectral line corresponding to the preset element in the enhanced plasma radiation signal; Comparing the intensity data with the reference intensity of the preset element under different vacuum degree conditions in the standard database to obtain a comparison result; Based on the comparison result, determining the corresponding vacuum degree value as the vacuum degree detection result of the vacuum switch to be detected.

3. The method according to claim 1, characterized in that, Before determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal, it further includes: Obtaining the standard spectral line wavelength range and reference intensity value corresponding to the preset element; Performing wavelength calibration on the enhanced plasma radiation signal according to the difference between the actual spectral line position corresponding to the preset element in the enhanced plasma radiation signal and the standard spectral line wavelength range to obtain a calibrated plasma radiation signal; Correcting the spectral line intensity of the calibrated plasma radiation signal according to the deviation between the spectral line intensity of the enhanced plasma radiation signal and the reference intensity value to obtain a corrected plasma radiation signal; The determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal includes: Determining the vacuum degree detection result of the vacuum switch to be detected according to the corrected plasma radiation signal.

4. The method according to claim 1, wherein Before determining the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal, it further includes: Repeatedly exciting and collecting a preset number of enhanced plasma radiation signals; Performing superposition averaging processing on the multiple enhanced plasma radiation signals to obtain a target plasma radiation signal; The determining the vacuum degree detection result of the vacuum switch to be detected according to the enhanced plasma radiation signal includes: Determining the vacuum degree detection result of the vacuum switch to be detected according to the target plasma radiation signal.

5. The method according to claim 4, characterized in that The performing superposition averaging processing on the multiple enhanced plasma radiation signals to obtain a target plasma radiation signal includes: Performing statistical analysis on the sampling point data of the same sampling points in the multiple enhanced plasma radiation signals, identifying and removing the abnormal data in the sampling point data to obtain a cleaned plasma radiation signal; Average the data of each same sampling point in the cleaned plasma radiation signal to obtain the target plasma radiation signal.

6. A vacuum degree detection system for a vacuum switch excited by double pulses, characterized in that, The system includes: a delay pulse generator, a pulsed laser, a fuel laser, a vacuum switch to be detected, an optical module, and a spectral analysis module, where the delay pulse generator is configured to control the pulsed laser to output a laser to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate an initial plasma. After a preset delay time, the fuel laser is controlled to output a laser with a wavelength matching the characteristic spectral line of the preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma to generate an enhanced plasma radiation signal; the delay pulse generator is further configured to control the optical module to collect the enhanced plasma radiation signal; the spectral analysis module is configured to determine the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

7. A vacuum degree detection device for a vacuum switch excited by double pulses, characterized in that, The device includes: a first laser module, which uses a pulsed laser to output a laser to irradiate the surface of the internal target material of the vacuum switch to be detected, so as to generate an initial plasma; a second laser module, which, after a preset delay time, uses a fuel laser to output a laser with a corresponding wavelength matching the characteristic spectral line of the preset element to irradiate the initial plasma, so as to perform directional secondary excitation on the preset element in the initial plasma to generate an enhanced plasma radiation signal; a signal acquisition module, which is configured to collect the enhanced plasma radiation signal through the optical module; a vacuum detection module, which is configured to determine the vacuum degree detection result of the vacuum switch to be detected according to the collected enhanced plasma radiation signal.

8. A computer device, comprising a memory and a processor, the memory storing a computer program, characterized in that, When the processor executes the computer program, the steps of the method according to any one of claims 1 to 5 are implemented.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, the steps of the method according to any one of claims 1 to 5 are implemented.

10. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by the processor, the steps of the method according to any one of claims 1 to 5 are implemented.

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