Manufacturing method of integrated piezoelectric ceramic piece capable of multi-segment focusing and focused ultrasonic transducer

Abstract

The invention relates to a manufacturing method of an integrated piezoelectric ceramic piece capable of multi-segment focusing and a focused ultrasonic transducer, and is characterized in that when an electrode of a cylindrical arc-shaped piece-shaped ceramic piece is manufactured, one surface of the ceramic piece is coated with an electrode material layer, and the other opposite surface of the ceramic piece is coated with an upper electrode material layer at an interval along the axial direction; the two ends of each strip-shaped electrode material layer at intervals on the other opposite surface extend along the directions of the two sides of the circumference of the ceramic chip, so that the area which is not covered with the electrode materials is in the shape of a plurality of cylindrical surface arc-shaped strips which are sequentially and orderly arranged at intervals along the axial direction. In the polarization process, piezoelectric effects are generated at the positions, corresponding to the electrode material layers, of the concave face and the convex face of the ceramic piece, the positions, not coated with the electrode material layers, in the concave face are not polarized and do not have the piezoelectric effects, and after the piezoelectric ceramic piece is manufactured into the focused ultrasonic transducer, focusing is presented on the axis L which is line segments arranged on the same straight line at intervals; the size can be made according to requirements, and the size can be large or small.

Description

Technical Field

[0001] The present invention relates to the technical field of piezoelectric ceramic ultrasonic transducers, and particularly to a manufacturing method of an integral piezoelectric ceramic sheet capable of multi-segment focusing and a focused ultrasonic transducer thereof. Background Art

[0002] Focused ultrasonic transducers are widely used in the medical beauty industry to rejuvenate the skin. Utilizing the characteristics of ultrasonic waves such as strong penetrability, good directivity, and concentrated energy, these characteristics enable ultrasonic waves to penetrate deep into the skin without damaging the skin surface, accurately reach the desired location, precisely concentrate the ultrasonic energy within the target tissue, and change the tissue. In the beauty treatment of the skin, sometimes an ultrasonic transducer that can focus ultrasonic energy into discrete multi-segments, i.e., similar to the dotted lines in an engineering drawing, is required. To achieve the energy focusing with such a shape characteristic, the currently common method is to combine a number of individual cylindrical surface arc-shaped piezoelectric ceramic sheets at a certain distance and assemble them coaxially to obtain the required ultrasonic transducer. The shape of the piezoelectric ceramic sheet in this ultrasonic transducer is a cylindrical surface arc-shaped sheet structure, which is like the shape of a side wall sheet cut axially on the side wall of a cylindrical tube. When this shape of piezoelectric ceramic sheet works, its energy can be focused on the central axis L of the cylinder where the ceramic sheet is located.

[0003] By arranging and combining multiple axially narrow cylindrical surface arc-shaped piezoelectric ceramic sheets at intervals, although the energy can be focused into a discrete multi-segment shape, the manufacturing process is cumbersome. Firstly, individual deviations are likely to occur in the manufacturing process of a single ceramic sheet, and the consistency after combination is poor. Secondly, the fixation of multiple juxtaposed piezoelectric ceramic sheets is a problem. Each piezoelectric ceramic sheet corresponds to an installation and support structure on the back, and a relatively high process is required to achieve the overall positioning and accuracy. Such a structure limits the overall size, and too small a size cannot be achieved. Moreover, each piezoelectric ceramic sheet needs to be connected to a driving power supply, making the overall structure complex. Multiple piezoelectric ceramic sheets need to be individually processed, and the cumulative error of precision is large, resulting in differences in the frequencies of the short segments L1 of the focus. Slight deviations will affect the overall energy output, making the energy focusing effect of the dotted line shape formed by the entire ultrasonic transducer poor, the formed dotted line shape energy unstable, and the consistency poor. Most importantly, for a beauty instrument made of a focused ultrasonic transducer in the medical beauty industry, in order to adapt to different parts of the human body and ensure the flexibility of use, its characteristic is to be small and easy to hold in order to adapt to the changing contours of the face. The above-mentioned structure is not only difficult to achieve a small size, but also has poor energy focusing consistency, and cannot form a dense, discrete multi-segment shape with both the overall length and the individual length being short, which does not meet the requirements of the internal space limitation of the beauty instrument and the precision of the energy wave. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a manufacturing method of an integrated piezoelectric ceramic sheet capable of multi-segment focusing and its focused ultrasonic transducer, and to solve the problem that due to the narrow internal space of the beauty instrument and the high precision requirement of the energy wave, a piezoelectric ceramic sheet and a focused transducer with a small overall size, a dense discrete multi-segment energy shape formed by focusing, stable energy, and good consistency are needed.

[0005] To solve the above technical problems, the technical solution adopted by the present invention is: A manufacturing method of an integrated piezoelectric ceramic sheet capable of multi-segment focusing Step 1: Prepare the raw materials of the piezoelectric ceramic sheet into blank-making materials; Step 2: Blank forming Make the blank-making materials into a blank; Step 3: Sintering Sinter the blank to form a dense ceramic blank; Step 4: Cut and grind the ceramic blank into a cylindrical arc-shaped ceramic sheet. The arc length in the circumferential direction of the ceramic sheet is less than half of the circumference, and the length of the ceramic sheet along the axial direction is not less than the total length of the required ultrasonic energy focused along the axis; Step 5: Electrode manufacturing The cylindrical arc-shaped ceramic sheet has two opposite surfaces, a concave surface and a convex surface. The surface facing the central axis L is the concave surface, and the back of the concave surface is the convex surface. An electrode material layer is coated on one of the two opposite surfaces of the ceramic sheet. The other opposite surface of the ceramic sheet is axially and sequentially separated into multiple regions coated with electrode material layers and regions not coated with electrode material layers. Then, electrode material layers are coated on the regions coated with electrode material layers that are axially separated on the other opposite surface of the ceramic sheet. The regions between the separated and adjacent electrode material layers on the other opposite surface of the ceramic sheet are regions not coated with electrode material layers. The electrode material layers and the regions not coated with electrode material layers on the other opposite surface of the ceramic sheet are axially and sequentially spaced into a strip shape and neatly arranged. The separated electrode material layers on the other opposite surface of the ceramic sheet extend along the circumferential two-side direction of the ceramic sheet, and the arc length of the separated electrode material layers extending in the circumferential direction is greater than the width along the axial direction; Step 6: Polarization Apply a voltage to the electrode material layer on the concave surface and the electrode material layer on the convex surface of the ceramic sheet, so that the ceramic sheet is polarized in the thickness direction in the regions of the electrode material layers corresponding to the concave surface and the convex surface, forming a piezoelectric ceramic sheet with piezoelectric effect.

[0006] As a preferred implementation, in step 4, the thickness accuracy of the ground ceramic sheet is ±5 μm, the thickness uniformity equal thickness difference is ±5 μm, and the cylindricity tolerance of the ceramic sheet is ±5 μm.

[0007] As a preferred embodiment, in step 5, after coating one side of the ceramic sheet with an electrode material layer, it is dried, then the other opposite side of the ceramic sheet is coated with an electrode material layer, and then dried again.

[0008] As a preferred embodiment, in step 5, the width of each spaced bar-shaped electrode material layer along the axial direction is the length of the energy of the piezoelectric ceramic sheet focused on a single short segment L1 on the axis L, and the width of each bar-shaped uncoated electrode material region along the axial direction is the spacing distance between adjacent focused short segments L1.

[0009] As a preferred embodiment, in step 5, the convex surfaces of the ceramic sheets are all coated with electrode material layers, and the concave surfaces of the ceramic sheets are axially and sequentially separated from each other into a plurality of coated electrode material layer regions and uncoated electrode material regions.

[0010] As a preferred embodiment, in step 5, edge electrode material layers are axially coated on both sides of the ceramic sheet near the circumference of the concave surface, and the edge electrode material layers connect all the spaced electrode material layers on the concave surface of the ceramic sheet.

[0011] As a preferred embodiment, in step 5, in order to neatly and spacedly coat the electrode material layers on the concave surface of the ceramic sheet, the position on the concave surface of the ceramic sheet is standardized with a template ruler, and then the electrode material layer is coated.

[0012] As a preferred embodiment, bar-shaped holes corresponding to the spaced uncoated electrode material regions are formed on the template ruler. The template ruler is attached and stacked on the concave surface of the ceramic sheet. Then the diaphragm is sequentially attached to the concave surface of the ceramic sheet through the holes of the template ruler. Then the template ruler is removed, and the concave surface of the ceramic sheet with the diaphragm is coated with an electrode material layer, and then the electrode material layer on the concave surface of the ceramic sheet is dried. After drying is completed, the diaphragm on the concave surface of the ceramic sheet is removed.

[0013] As a preferred embodiment, blocking bars corresponding to the uncoated electrode material regions are provided on the template ruler. The same ends of all the blocking bars are connected by a connecting edge along the axial direction. The part of the template ruler except the blocking bars and the connecting plate is hollowed out. The connecting edge of the template ruler is flush with one side edge of the ceramic sheet along the axial direction, and the two ends of the connecting edge along the axial direction are flush with the two ends of the ceramic sheet along the axial direction. The template ruler is attached and stacked on the concave surface of the ceramic sheet. The unblocked part of the ceramic sheet by the blocking bars is coated with an electrode material layer, and then the electrode material layer on the concave surface of the ceramic sheet is dried. After drying is completed, an electrode material layer is attached to the corresponding part of the connecting edge on the concave surface of the ceramic sheet, and then dried again.

[0014] A focused ultrasound transducer, the focused ultrasound transducer includes a piezoelectric ceramic sheet formed by the manufacturing method of any one of the above-mentioned integrally formed piezoelectric ceramic sheets capable of multi-segment focusing.

[0015] The beneficial effects of the present invention are as follows: In order to meet the requirements of a relatively small overall size, dense focusing of separated multi-segments, and high energy focusing precision, when manufacturing the ceramic sheet, the shape of the ceramic sheet is cut and ground into a whole cylindrical arc-shaped sheet. The high-precision grinding carried out at the same time effectively ensures the thickness-direction frequency consistency of the piezoelectric ceramic sheet, and the size of the ceramic sheet can be made similar to that of a coin or even smaller. During the manufacturing process of the electrodes, within the concave surface of the ceramic sheet, strip-shaped specific positions with separated intervals are selected and no electrode material layer is coated, while on the convex surface, the entire surface is coated with the electrode material layer. For example, the axial width of the spaced electrode material layer can be 2 mm or even smaller, and the length of the short line segment L1 formed by corresponding focusing is the axial width of the electrode material layer, that is, 2 mm or smaller. The sizes of the ceramic sheet and the electrode material layer are easy to achieve with high precision, making the formed short line segments L1 with discrete focusing dense. During the polarization process, the electric dipoles of the internal grains of the electrode material layers corresponding to the concave and convex surfaces of the ceramic sheet are arranged and polarized along the thickness direction. Piezoelectric effects are generated at the positions of the electrode material layers corresponding to the concave and convex surfaces of the ceramic sheet. The positions on the concave surface of the ceramic sheet where no electrode material layer is coated and the corresponding positions on the convex surface are not polarized, so that there is no piezoelectric effect along the thickness direction at the positions on the concave surface of the ceramic sheet where no electrode material layer is coated and the corresponding positions on the convex surface. After such a piezoelectric ceramic sheet is made into a focused ultrasound transducer, the focusing presents as short line segments L1 arranged at intervals on the same straight line on the axis L, that is, in the shape of a dotted line. Short line segments L1 with very small lengths can be achieved. In this way, the energy of the separated and focused multi-segments not only has high size precision but also has a stable focusing effect. When the piezoelectric ceramic sheet is connected to a driving power supply, the overall vibration can be achieved. The overall structure of the ultrasound transducer made of the above-mentioned integral piezoelectric ceramic sheet is simple, easy to install, and the size can be made according to requirements, can be large or small, and can be made into a very small size, with strong adaptability. Moreover, the formed dotted-line-shaped energy focusing effect is stable, and the energy focusing consistency is good, which is suitable for application in the field of medical beauty. The beauty instrument probe the size of a coin fits well on the face, such as around the corners of the eyes, and the energy focusing of dense discrete short line segments L1 is formed when it penetrates into the skin, changing the internal structure of the skin. The energy focusing has a small size and high precision, and the energy is stable. Description of the Drawings

[0016] The following further details the specific embodiments of the present invention in conjunction with the drawings, where: Figure 1 is a schematic structural diagram of the piezoelectric ceramic sheet of the present invention; Figure 2 is a schematic diagram of the first embodiment of the template ruler-assisted coating of the electrode material layer on the ceramic sheet of the present invention; Figure 3 is a schematic diagram of the second embodiment of the template ruler-assisted coating of the electrode material layer on the ceramic sheet of the present invention; Figure 4 This is a physical diagram of the piezoelectric ceramic sheet of the present invention; Figures 1-4 Explanation of reference numerals in the figure: 1. Piezoelectric ceramic sheet; 2. Template ruler; 3. Diaphragm; 4. Ceramic sheet; 11. Area without electrode material; 12. Electrode material layer; 21. Hole; 22. Stop bar; 23. Connecting edge. Specific embodiments

[0017] The present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation schemes.

[0018] See Figures 1-4 As shown, it is a manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to the present invention, specifically as follows: Step 1: Prepare the raw materials of the piezoelectric ceramic sheet 1 into a blank-making material; Step 2: Forming of the blank Make the blank-making material into a blank; the formed blank needs to be dried to remove excess moisture to avoid cracks during subsequent sintering.

[0019] Step 3: Sintering Sinter the blank. At high temperature, the particles in the blank undergo sintering to form a dense ceramic blank; Step 4: Cut and grind the ceramic blank into a cylindrical arc-shaped ceramic sheet 4. The arc length of the ceramic sheet 4 in the circumferential direction is less than half of the circumference, so that the axis is outside the ceramic sheet 4. During application, the energy is focused on the axis outside, so as to penetrate into the human skin. The axial length of the ceramic sheet 4 is not less than the total length of the ultrasonic energy focused along the axis; According to the need of energy focusing, determine the size of the ceramic sheet 4. Now the size of the ceramic sheet 4 is set as follows: the axial length is 20 mm, the width is 10 mm, the thickness of the ceramic sheet 4 is 3 mm, the circumferential radius where the ceramic sheet 4 is located is 25 mm, the arc surface of the ceramic sheet 4 in the circumferential direction is one-sixth of the circumference where it is located, the thickness accuracy of the ground ceramic sheet 4 is ±5 μm, the thickness uniformity equal thickness difference of the ceramic sheet 4 is ±5 μm, and the cylindricity tolerance of the ceramic sheet 4 is ±5 μm. It is necessary to ensure the overall processing accuracy of the ceramic sheet 4 to make the overall dimensional accuracy of the sheet-shaped ceramic sheet 4 high, because the ultrasonic energy frequency of the piezoelectric ceramic sheet 1 is related to the thickness, and the energy focusing position is related to the circumferential position. High accuracy can ensure the consistency of the ultrasonic energy frequency and position of the piezoelectric ceramic sheet 1; Step 5: Electrode manufacturing The ceramic sheet 4 in the shape of a cylindrical surface arc has two opposite surfaces, a concave surface and a convex surface. The surface facing the central axis L is the concave surface, and the back of the concave surface is the convex surface. An electrode material layer 12 is coated on one of the two opposite surfaces of the ceramic sheet 4. On the other opposite surface of the ceramic sheet 4, it is axially and sequentially separated into multiple regions coated with the electrode material layer 12 and regions not coated with the electrode material 11 at intervals. Electrodes need to be made on the two opposite surfaces respectively to exert its piezoelectric effect. The electrode material is selected as silver paste, and the manufacturing method of the electrode is to evenly apply it with a writing brush.

[0020] In this embodiment, on the concave surface of the ceramic sheet 4, it is axially and sequentially separated into multiple regions coated with the electrode material layer and regions not coated with the electrode material 11 at intervals. The electrode material layer 12 is coated in each axially separated region coated with the electrode material layer on the concave surface of the ceramic sheet 4. The width of each electrode material layer 12 in the axial direction on the concave surface is set to 2 mm. The region between the axially separated and adjacent electrode material layers 12 on the concave surface of the ceramic sheet 4 is the region not coated with the electrode material 11, and the width of each region not coated with the electrode material 11 in the axial direction is 3 mm. Each electrode material layer 12 and each region not coated with the electrode material 11 are axially and sequentially spaced into a strip shape and neatly arranged, and the number of spaced arrangements is 4 groups. The axially separated electrode material layers 12 on the concave surface of the ceramic sheet 4 extend along both circumferential sides of the ceramic sheet 4. The arc length of each axially separated electrode material layer 12 extending in the circumferential direction is greater than the width in the axial direction. The width of each strip-shaped spaced electrode material layer 12 in the axial direction is the energy length for the piezoelectric ceramic sheet 1 to focus on a single short line segment L1 on the axis L, that is, the length of L1 is 2 mm, and the width of the region of each region not coated with the electrode material 11 in the axial direction is the spacing distance between adjacent focused short line segments L1, and the spacing distance is 3 mm; In step 5, in order to make the electrode material layers 12 spaced and arranged neatly on the concave surface of the ceramic sheet 4 and make the size and position of the electrode material layer 12 on the concave surface of the ceramic sheet 4 accurate, when applying the electrode material layer 12, first, the position on the concave surface of the ceramic sheet 4 is standardized with a template ruler 12, and then the electrode material layer 12 is coated. For the convenience of operation, there are various types of template rulers 12, and the following two embodiments are given; As Figure 2This is the first embodiment of the template ruler 2. A template consistent with the concave shape and size of the ceramic sheet 4 is made, and then strip-shaped holes 21 corresponding one by one to the non-coated electrode material regions 11 arranged at intervals are formed on the template to form the template ruler 2. The template ruler 2 is aligned and laminated on the concave surface of the ceramic sheet 4, and then the diaphragm 3 is successively attached to the concave surface of the ceramic sheet 4 through the holes 21 of the template ruler 2. The diaphragm 3 is positioned and attached to the concave surface of the ceramic sheet 4 through the template ruler 2. Then, the template ruler 4 is removed, and a writing brush is dipped in silver paste to apply the electrode material layer 12 on the concave surface of the ceramic sheet 4. The electrode material layer 12 is applied between adjacent diaphragms 3 on the concave surface. The edge electrode material layer is applied axially along both sides near the circumference on the concave surface of the ceramic sheet 4, and the edge electrode material layer connects all the spaced electrode material layers 12 on the concave surface of the ceramic sheet 4, which is convenient for the connection of the voltage positions during polarization and also convenient for the connection of the electrode leads of the made piezoelectric ceramic sheet 1. Then, the electrode material layer 12 on the concave surface of the ceramic sheet 4 is dried, and after drying is completed, the diaphragm 3 on the concave surface of the ceramic sheet 4 is removed.

[0021] Such as Figure 3 This is the second embodiment of the template ruler 2. A template consistent with the concave shape and size of the ceramic sheet 4 is made, and then a retaining strip 22 corresponding one by one to the non-coated electrode material region 11 is provided on the template. The same ends of all the retaining strips 22 are connected by an axial connecting edge 23. The part of the template other than the retaining strips 22 and the connecting plate 23 is hollowed out to form the template ruler 2, and the connecting edge 23 of the template ruler 2 is flush with one side of the ceramic sheet 4 parallel to the axis, and the two ends of the connecting edge 23 along the axis are flush with the two ends of the ceramic sheet 4 along the axis. The template ruler 2 is aligned and laminated on the concave surface of the ceramic sheet 4, and the electrode material layer 12 is applied to the part of the ceramic sheet 4 not blocked by the retaining strips 22. Then, the electrode material layer 12 on the concave surface of the ceramic sheet 4 is dried. After drying is completed, the electrode material layer 12 is applied to the corresponding part of the connecting edge 23 on the concave surface of the ceramic sheet 4, and then dried again.

[0022] The above two operation methods are both for the accuracy of the coating positions of the spaced electrode material layers 12 on the concave surface of the ceramic sheet 4, so that the shape of the non-coated electrode material region 11 is multiple spaced strip-shaped ones arranged neatly in sequence along the axis, and the electrode material layer 12 is coated on the concave surface of the ceramic sheet 4; After that, the electrode material layer 12 is applied to the convex surface of the ceramic sheet 4. The coating position of the electrode material layer 12 on the convex surface should correspond to the spaced electrode material layers 12 on the concave surface at intervals. For the convenience of coating, the entire convex surface can be coated with the electrode material layer 12, so that the manufacturing process of the electrodes of the ceramic sheet 4 can be completed more conveniently and quickly. After the electrode material layer 12 is applied to the convex surface of the ceramic sheet 4, it also needs to be dried; The coating and drying of the two opposite surface electrodes on the concave and convex surfaces of the ceramic sheet 4 are completed. The ceramic sheet 4 coated with the electrode material layer 12 needs to be subjected to silver firing treatment so that the electrode material layers 12 on the concave and convex surfaces of the ceramic sheet 4 are firmly attached to the ceramic sheet 4 and can conduct electricity uniformly respectively.

[0023] Step 6: Polarization Polarization is one of the key steps to endow the ceramic sheet 4 with piezoelectric effect. The ceramic sheet 4 is placed in high-temperature oil, and a high-voltage electric field is applied to the two electrode material layers 12 on the concave and convex surfaces of the ceramic sheet 4. A voltage difference is generated in the thickness direction between the electrode material layers 12 arranged at intervals and separated from each other on the concave surface of the ceramic sheet 4 and the corresponding electrode material layers 12 on the convex surface. Under the action of the high-voltage electric field of the electrode material layers 12 corresponding to the concave and convex surfaces of the ceramic sheet 4, the electric dipoles of the internal grains of the ceramic sheet 4 are arranged and polarized along the thickness direction, forming a piezoelectric ceramic sheet 1 with piezoelectric effect. When the electrode material layers 12 on the two opposite surfaces of the piezoelectric ceramic sheet 1 are driven by an electric signal, the interior of the piezoelectric ceramic sheet 1 vibrates at the positions where there are electrode material layers 12 on both opposite surfaces, and ultrasonic energy focusing can be formed along the axis L of the cylindrical surface where the piezoelectric ceramic sheet 1 is located; In the area of the ceramic sheet 4 on the concave surface where the electrode material layer 12 is not coated and arranged at intervals and separated from each other, there is no conductive electrode material layer 12. No voltage can be formed between the concave and convex surfaces in the thickness direction at this position. Therefore, this part of the interior of the ceramic sheet 4 is not polarized and does not have piezoelectric effect, and ultrasonic energy focusing cannot be formed when driven by an electric signal; The integrated piezoelectric ceramic sheet 1 prepared by the method of the present invention, wherein the ceramic sheet 4 to which each electrode material layer 12 adheres is an integrated ceramic sheet 4 formed integrally at one time, so as to effectively ensure the dimensional accuracy and overall consistency, and can also better uniformly coat the electrode material layers 12 spaced on the concave surface of the integrated ceramic sheet and the electrode material layers 12 coated on the convex surface. When the ceramic sheet 4 is polarized, the polarization effect of each part is uniform, and the energy focusing generated by the formed piezoelectric ceramic sheet 1 has good consistency. Such a structural arrangement only requires one polarization process to complete the polarization process, which not only reduces the workload of polarization, but also has small individual differences generated by polarization, and can ensure the consistency of the overall output power of the piezoelectric ceramic sheet 1; When the formed piezoelectric ceramic sheet 1 is applied, the electrode material layers 12 on the concave and convex surfaces are respectively connected to the electrodes. Such a piezoelectric ceramic sheet 1 can focus on the axis LL of the cylindrical surface where the piezoelectric ceramic sheet 1 is located under the action of an electric signal. And the shape is that of discontinuous separated short line segments L1.

[0024] The application method of the piezoelectric ceramic sheet 1 prepared by this method in a focused ultrasound transducer is as follows: Such as Figure 4As shown, the piezoelectric ceramic sheet 1 prepared by the method steps of the present invention, in actual use, takes the piezoelectric ceramic sheet 1 as the core functional element of a focused ultrasound transducer. Electrode leads are respectively welded to the two-sided electrode material layers 12 on the concave and convex surfaces of the piezoelectric ceramic sheet 1. The electrode leads on the two opposite surfaces are connected to a driving power supply. The electrode material layer 12 on the concave surface of the piezoelectric ceramic sheet 1 is connected to the negative electrode, and the electrode material layer 12 on the convex surface of the piezoelectric ceramic sheet 1 is connected to the positive electrode. The piezoelectric ceramic sheet 1 is encapsulated in a housing, with the concave surface of the piezoelectric ceramic sheet 1 facing outward, forming a discrete multi-segment focused ultrasound transducer that can focus on the axis L, forming an energy focus with each length of the short segment L1 being 2 mm. The interval between the short segments L1 is 3 mm, and the number of separated short segments L1 is 4. The overall energy focus straight-line length is 20 mm, and the overall size is similar to that of a coin. It is applied in the medical beauty industry, inserted into the skin to form an intermittent short-segment L1 energy focus. The energy focus is stable and has high precision, with a wide range of application scenarios. And only one driving power supply is needed to achieve stable driving of both power and frequency. By changing the manufacturing method of the piezoelectric ceramic sheet 1 and optimizing the structure, the product is simple, easy to install and use.

[0025] The above embodiments merely illustrate the principle and efficacy of the present invention and some applied embodiments, rather than limiting the present invention. It should be noted that for those of ordinary skill in the art, without departing from the inventive concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention.

Claims

1. A manufacturing method of an integrated piezoelectric ceramic sheet capable of multi-segment focusing, characterized in that Step 1: Prepare the blank-making material from the raw materials of the piezoelectric ceramic sheet; Step 2: Forming the blank Make the blank-making material into a blank; Step 3: Sintering Sinter the blank to form a dense ceramic blank; Step 4: Cut and grind the ceramic blank into a cylindrical surface arc-shaped ceramic sheet, the arc length in the circumferential direction of the ceramic sheet is less than half of the circumference, and the length of the ceramic sheet along the axial direction is not less than the total length of the ultrasonic energy focused along the axis; Step 5: Electrode making The cylindrical surface arc-shaped ceramic sheet has two opposite surfaces, a concave surface and a convex surface. The surface facing the central axis L is the concave surface, and the back of the concave surface is the convex surface. An electrode material layer is coated on one of the two opposite surfaces of the ceramic sheet. The other opposite surface of the ceramic sheet is axially and sequentially separated into multiple regions coated with electrode material layers and regions not coated with electrode material layers. Then, electrode material layers are coated on the regions coated with electrode material layers that are axially separated from each other on the other opposite surface of the ceramic sheet. The regions between the separated and adjacent electrode material layers on the other opposite surface of the ceramic sheet are regions not coated with electrode material layers. The electrode material layers and the regions not coated with electrode material layers on the other opposite surface of the ceramic sheet are axially and sequentially spaced into a strip shape and neatly arranged. The separated electrode material layers on the other opposite surface of the ceramic sheet extend along both circumferential sides of the ceramic sheet, and the arc length of each separated electrode material layer extending in the circumferential direction is greater than the width in the axial direction; Step 6: Polarization Apply voltage to the electrode material layers on the concave surface and the convex surface of the ceramic sheet, so that the ceramic sheet is polarized in the thickness direction in the regions of the electrode material layers corresponding to the concave surface and the convex surface, forming a piezoelectric ceramic sheet with piezoelectric effect.

2. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 1, characterized in that, In Step 4, the thickness accuracy of the ground ceramic sheet is ±5 μm, the thickness uniformity equal thickness difference is ±5 μm, and the cylindricity tolerance of the ceramic sheet is ±5 μm.

3. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 1, characterized in that, In Step 5, after coating the electrode material layer on one surface of the ceramic sheet, dry it, then coat the electrode material layer on the other opposite surface of the ceramic sheet, and then dry it again.

4. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 1, characterized in that, In Step 5, the width of each spaced strip-shaped electrode material layer in the axial direction is the length of the piezoelectric ceramic sheet focused on the corresponding single short segment L1 of the energy on the axis L, and the width of each strip-shaped region not coated with electrode material in the axial direction is the spacing distance between adjacent focused short segments L1.

5. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 1 or 2 or 3 or 4, characterized in that, In Step 5, coat the convex surface of the ceramic sheet with an electrode material layer, and axially and sequentially separate the concave surface of the ceramic sheet into multiple regions coated with electrode material layers and regions not coated with electrode material layers.

6. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 5, characterized in that In Step 5, edge electrode material layers are axially coated on the concave surface of the ceramic sheet near both circumferential edges, and the edge electrode material layers connect all the spaced electrode material layers on the concave surface of the ceramic sheet.

7. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 6, characterized in that, In Step 5, in order to neatly and spacedly coat the electrode material layers on the concave surface of the ceramic sheet, use a template ruler to standardize the position on the concave surface of the ceramic sheet, and then coat the electrode material layer.

8. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 7, characterized in that, The template ruler is provided with strip-shaped holes corresponding one by one to the regions where the electrode material is not coated and arranged at intervals. The template ruler is attached and stacked on the concave surface of the ceramic sheet, and then the diaphragm is successively attached to the concave surface of the ceramic sheet through the holes of the template ruler. Then, the template ruler is removed, the electrode material layer is coated on the concave surface of the ceramic sheet with the diaphragm, and then the electrode material layer on the concave surface of the ceramic sheet is dried. After drying is completed, the diaphragm on the concave surface of the ceramic sheet is removed.

9. The manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to claim 7, characterized in that, The template ruler is provided with stop bars corresponding one by one to the regions where the electrode material is not coated. The same ends of all the stop bars are connected by a connecting edge along the axial direction. The parts of the template ruler other than the stop bars and the connecting plate are hollowed out. The connecting edge of the template ruler is flush with one side edge of the ceramic sheet along the axial direction, and the two ends of the connecting edge along the axial direction are flush with the two ends of the ceramic sheet along the axial direction. The template ruler is attached and stacked on the concave surface of the ceramic sheet, the electrode material layer is coated on the unshielded part of the stop bars on the ceramic sheet, and then the electrode material layer on the concave surface of the ceramic sheet is dried. After drying is completed, the electrode material layer is coated on the corresponding part of the connecting edge on the concave surface of the ceramic sheet, and then dried again.

10. A focused ultrasound transducer, characterized in that, The focused ultrasound transducer includes a piezoelectric ceramic sheet formed by the manufacturing method of the integrated piezoelectric ceramic sheet capable of multi-segment focusing according to any one of claims 1-9.

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