Etching liquid purification device and purification method

Abstract

The invention discloses an etching liquid purification device and a purification method, which relate to the technical field of etching liquid purification. The purification device comprises a stirring tank, a circulation device, a filtering device and a feeding pipeline. A plurality of feeding pipelines are provided, and the plurality of feeding pipelines are connected to the stirring tank pipeline. By setting up the plurality of feeding pipelines, the raw materials are added according to the mass according to the formula requirements. When the raw materials enter the stirring tank, they are automatically stirred, and an external circulation loop is opened by the circulation device to extract the liquid in the stirring tank and transport it through the circulation pipe. The circulation process itself also promotes mass transfer and preliminary heat exchange. By integrating the filtering device on the external circulation loop, particulate matter in the liquid, such as soluble particles and insoluble particles, is removed.

Description

Technical Field

[0001] The invention relates to the technical field of etching liquid purification, in particular to an etching liquid purification device and a purification method. Background Art

[0002] Etching liquid is a chemical agent commonly used in the production process of PCB boards. It is generally divided into alkaline etching liquid and acidic etching liquid, which completes the engraving by corroding the material.

[0003] The current production process for etching solutions requires adding both solid and liquid raw materials, then mixing the liquids. The raw materials are then circulated and mixed internally. Mixing is typically followed by filtration and purification, and then bottling. To ensure production efficiency, an external circulation process can be employed for integrated mixing and purification. However, in the initial stages, mixing is the primary focus, and the added solid particles accumulate in the filter layer, affecting the initial efficiency of the external circulation.

[0004] In addition, since small solid particles include soluble solids and insoluble impurities, they are easily deposited at the bottom of the filter layer. The conventional filtration mode is single, the fluid flow pattern is stable, and the direction of force applied to the solid particles is relatively fixed, which affects the stripping efficiency of solid particles on the surface of the filter layer. Summary of the Invention

[0005] The object of the present invention is to provide an etching solution purification device and a purification method to solve the problems raised in the prior art.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] The purification device includes a stirring tank, a circulation device, a filtering device and a feed pipeline. There are several feed pipelines, and several feed pipelines are connected to the stirring tank pipeline. A discharge port is provided at the lower end of the stirring tank, and a feed port is provided at the upper end of the stirring tank. The circulation device is connected to the discharge port pipeline of the stirring tank, and the liquid delivery end of the circulation device is connected to the feed port pipeline at the upper end of the stirring tank. The circulation device is located on the external circulation loop of the stirring tank, and the filtering device is located on the external circulation loop.

[0008] By setting up several feeding pipelines and adding materials by mass according to the formula requirements, when the raw materials enter the mixing tank, they are automatically stirred, and the external circulation loop is opened through the circulation device to extract the liquid in the mixing tank and transport it through the circulation pipe. The circulation process itself also promotes mass transfer and preliminary heat exchange. By integrating a filtering device on the external circulation loop, particulate matter in the liquid, such as soluble particles and insoluble particles, is removed.

[0009] Furthermore, the circulation device includes a circulation pump and a circulation pipe, one end of the circulation pump is connected to the discharge port of the stirring tank, and the other end is connected to the filter device pipeline;

[0010] The circulation pipe is a three-way pipe, which is provided with an inlet, a circulation port and an outlet in sequence. One end of the inlet is connected to the filtering device, and the other end of the inlet is connected to the circulation port and the outlet respectively. A stop valve is provided on the outlet, and the end of the circulation port is connected to the feed inlet pipe of the mixing tank.

[0011] The circulation pump serves as the main power source for external circulation of liquid. It is used to pump the liquid in the mixing tank to the filtration device through the pipeline for automatic filtration. After the filtration is completed, the liquid enters the circulation pipe through the inlet. The circulation pipe has three ports, one for feeding and the other two for discharging. When the solution has not yet reached the standard, the stop valve is closed and the solution is introduced into the mixing tank through the circulation port for continued stirring; when the solution reaches the standard, the stop valve is opened and the solution is discharged from the outlet for automatic filling.

[0012] Furthermore, the filtering device includes a shell, a folding plate, and a cabinet. The cabinet is provided with a accommodating cavity, the shell is placed in the accommodating cavity, the shell is provided with a filter cavity, the lower end of the filter cavity is provided with a liquid inlet, the circulation pump and the liquid inlet pipe are connected, a liquid outlet is provided on one side of the filter cavity, a filter layer is provided in the filter cavity, the filter layer divides the filter cavity into a filtration cavity and a purification cavity, the liquid inlet and the filtration cavity pipe are connected, and the liquid outlet and the purification cavity pipe are connected.

[0013] The cabinet adopts a door structure, which is convenient for opening for maintenance. The shell is installed by setting a receiving cavity. The shell provides a filtering space through the filter cavity, and the filter cavity is divided into chambers by setting a filter layer, including a filter cavity facing the liquid inlet direction and a purification cavity where filtration has been completed. The liquid is pumped into the filter cavity by a circulation pump, and the solid particles are filtered by the filter layer and intercepted in the filter cavity. The filtered liquid is discharged through the liquid outlet and enters the subsequent circulation.

[0014] Furthermore, the filtering device also includes a rotary motor, a driving cavity is provided on the housing, the rotary motor is placed in the driving cavity, the output end of the rotary motor is fastened to the folding plate, the folding plate includes a bottom plate and a distribution plate, the output end of the rotary motor is fastened to the bottom plate, the end of the bottom plate away from the rotation center is rotatably connected to the distribution plate, a wedge is provided at the lower end of the distribution plate, and sealing plates are provided on both sides of the distribution plate;

[0015] Filtering state: the bottom plate and the transfer plate are at the same level, the sealing plate is in contact with the side of the bottom plate, and the liquid inlet is facing the bottom plate;

[0016] Impurity removal state: the bottom plate and the folding plate are in a vertical state, one side of the wedge block is in contact with the bottom plate, and the liquid inlet faces the transfer plate.

[0017] The rotary motor is installed through the drive chamber. The rotary motor is used to output torque to drive the folding plate to rotate and switch the shape. The entire filtration process is divided into two states. The first state is the filtration state when the bottom plate and the distribution plate are at the same horizontal plane. The liquid is pumped into the filtration chamber. Under the action of the pressure difference, the liquid penetrates into the filter layer, completes the filtration, and enters the purification chamber. As the filtration proceeds, small solid particles continue to accumulate on the surface of the filter layer, affecting the filtration rate. The rotary motor drives the bottom plate to rotate, causing the distribution plate to rotate accordingly until the bottom plate and the folding plate are in a vertical state. At this time, one side of the wedge block maintains contact with the bottom plate, entering the impurity removal state. The sealing plates, bottom plate and distribution plate on both sides form a relatively sealed impurity removal space. At this time, liquid is pumped into the impurity removal space, causing the incoming liquid to flow disorderly. The bottom of the filter layer is automatically flushed by local turbulence to avoid local blockage affecting the filtration efficiency.

[0018] Furthermore, the folding plate also includes an opening plate, an opening groove is provided on the bottom plate, one end of the opening groove is set through, and an opening spring is provided in the other end of the opening groove. The opening plate and the opening groove are slidingly connected, and one end of the opening plate is tightly connected to the opening spring. The opening spring is located in the opening groove near one end of the dividing plate, and a flushing slope is provided on the opening plate.

[0019] The opening slot is designed in sections, including a bearing cavity for mounting the opening spring and a through-groove for diversion. During impurity filtration, the opening spring is in a horizontal position, and under the elastic force, the opening plate retracts into the bearing cavity, allowing liquid to continuously enter the filtration cavity for continuous filtration. When entering the impurity removal state, the bottom plate gradually becomes vertical, and the opening plate moves under the action of gravity, sealing the through-groove and forming a relatively sealed impurity removal space. By providing a liquid flushing slope, when liquid hits the slope, it pushes the opening plate toward the opening spring, facilitating automatic reset efficiency and continuous filtration.

[0020] Furthermore, the filtering device also includes a dust removal component and a heating wire. The heating wire is placed in the liquid inlet. The heating wire and the rotary motor are connected to the same signal source. The dust removal component includes an extension plate and an extension spring. An extension groove is provided on the rotating plate. The two ends of the extension spring are respectively fastened to the wall of the extension groove and one side of the extension plate. The extension plate and the extension groove are slidably connected. The extension plate is away from the side of the extension spring and abuts against the filter layer.

[0021] By setting up a heating wire, which is not powered under normal conditions and is controlled by the same signal source as the rotary motor, when the pressure in the filter chamber is detected to increase, that is, when solid impurities partially block the filter layer, the rotary motor outputs torque to switch modes. At the same time, the heating wire is used to locally heat the filter to increase solubility, thereby dissolving small soluble solid particles, assisting in local scouring and improving the efficiency of impurity removal on the filter layer surface. The extension spring is installed through the extension slot. Under the action of the extension spring, the extension plate and the filter layer are pushed into contact. During the upward movement of the extension plate, the filter layer surface is initially cleaned. After the initial cleaning is completed, local turbulent scouring and local heating are used to improve the efficiency of impurity removal on the filter layer surface.

[0022] As an optimization, the filtration device also includes two baffles, one end of which is connected to the outlet pipe of the rear section of the housing, and the other end is connected to the inlet pipe of the rear section of the housing. By providing two housings and adopting a method of gradually decreasing particle size, layer-by-layer filtration is performed. The baffles are provided to connect the outlet of the front section and send the initially filtered liquid to the inlet of the rear section for re-filtration, thereby improving the filtration effect.

[0023] As an optimization, the circulation device also includes a booster pump, and the terminal outlet is connected to the inlet pipe through the booster pump. By setting up the booster pump to assist in pumping the filtered liquid into the mixing tank for circulation, the circulation efficiency is improved by increasing the pressure difference.

[0024] Compared with the prior art, the present invention has the following beneficial effects: the filtration process is divided into two states. The first state is the impurity filtering state when the bottom plate and the diverter plate are at the same horizontal plane. Liquid is pumped into the impurity filtering chamber. Under the action of the pressure difference, the liquid penetrates into the filter layer, completes the filtration, and enters the purification chamber. As the filtration proceeds, small solid particles continue to accumulate on the surface of the filter layer, affecting the filtration rate. The rotary motor drives the bottom plate to rotate, causing the diverter plate to rotate accordingly until the bottom plate and the folding plate are in a vertical state. At this time, one side of the wedge block maintains contact with the bottom plate, entering the impurity removal state. The sealing plates, bottom plate and diverter plate on both sides form a relatively sealed impurity removal space. At this time, liquid is pumped into the impurity removal space, causing the incoming liquid to flow in a disordered manner. The bottom of the filter layer is automatically flushed by local turbulence, avoiding local blockage that affects the filtration efficiency. The mode is switched by the output torque of the rotary motor. At the same time, the electric heating wire is used for local heating to increase the solubility, thereby dissolving the soluble solid small particles, assisting in local flushing, and improving the impurity removal efficiency on the surface of the filter layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 It is a schematic structural diagram of the filtering device of the present invention;

[0027] Figure 3 Schematic diagram of the housing structure of the present invention;

[0028] Figure 4 It is a schematic diagram of the folding plate structure of the present invention;

[0029] Figure 5 It is a schematic diagram of the impurity removal state of the present invention;

[0030] Figure 6 Schematic diagram of the opening plate structure of the present invention;

[0031] Figure 7 This is a schematic diagram of the state switching power transmission of the present invention;

[0032] Figure 8 for Figure 4 A magnified view of detail A of the view.

[0033] In the figure: 1. stirring tank; 2. circulation device; 21. circulation pump; 22. circulation pipe; 221. inlet; 222. circulation port; 223. outlet; 23. stop valve; 24. booster pump; 3. filter device; 31. shell; 311. filter chamber; 312. liquid inlet; 313. liquid outlet; 314. drive chamber; 32. folding plate; 321. bottom plate; 3211. opening groove; 322. distribution plate; 3221. extension groove; 323. opening plate; 3231. flushing slope; 324. opening spring; 325. sealing plate; 326. wedge; 33. impurity removal component; 331. extension plate; 332. extension spring; 34. rotary motor; 35. deflector; 36. heating wire; 37. cabinet; 38. filter layer; 4. feed pipeline. DETAILED DESCRIPTION

[0034] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of the present invention.

[0035] Example: Figures 1-8 As shown, the present invention provides a technical solution of an etching liquid purification device and a purification method.

[0036] The purification device includes a stirring tank 1, a circulation device 2, a filtering device 3 and a feed pipeline 4. There are several feed pipelines 4, and several feed pipelines 4 are connected to the stirring tank 1 through a pipeline. The lower end of the stirring tank 1 is provided with a discharge port, and the upper end of the stirring tank 1 is provided with a feed port. The circulation device 2 is connected to the discharge port pipeline of the stirring tank 1, and the liquid delivery end of the circulation device 2 is connected to the feed port pipeline of the upper end of the stirring tank 1. The circulation device 2 is located on the external circulation loop of the stirring tank 1, and the filtering device 3 is located on the external circulation loop.

[0037] By setting up several feeding pipelines 4, the raw materials are added according to the mass required by the formula. When the raw materials enter the mixing tank 1, they are automatically stirred, and the external circulation loop is opened through the circulation device 2 to extract the liquid in the mixing tank 1 and transport it through the circulation pipe. The circulation process itself also promotes mass transfer and preliminary heat exchange. By integrating the filtering device 3 on the external circulation loop, particulate matter in the liquid, such as soluble particles and insoluble particles, is removed.

[0038] Furthermore, the circulation device 2 includes a circulation pump 21 and a circulation pipe 22. One end of the circulation pump 21 is connected to the discharge port of the stirring tank 1, and the other end is connected to the filter device 3 through a pipeline.

[0039] The circulation pipe 22 is a three-way pipe, and an inlet 221, a circulation port 222 and an outlet 223 are sequentially provided on the circulation pipe 22. One end of the inlet 221 is connected to the filtering device 3, and the other end of the inlet 221 is respectively connected to the circulation port 222 and the outlet 223. A stop valve 23 is provided on the outlet 223, and the end of the circulation port 222 is connected to the feed port pipeline of the stirring tank 1.

[0040] The circulation pump 21 serves as the main power source for the external circulation of the liquid. It is used to pump the liquid in the stirring tank 1 to the filtering device 3 through the pipeline for automatic filtration. After the filtration is completed, the liquid enters the circulation pipe 22 through the inlet 221. The three ports of the circulation pipe 22 are used for feeding and the other two for discharging. When the solution has not yet reached the standard, the stop valve 23 is closed and the solution is introduced into the stirring tank 1 through the circulation port 222 for continued stirring; when the solution reaches the standard, the stop valve 23 is opened and the solution is discharged from the outlet 223 for automatic filling.

[0041] Furthermore, the filtering device 3 includes a shell 31, a folding plate 32, and a cabinet 37. The cabinet 37 is provided with a accommodating chamber, the shell 31 is placed in the accommodating chamber, the shell 31 is provided with a filter chamber 311, the lower end of the filter chamber 311 is provided with a liquid inlet 312, the circulation pump 21 is connected to the liquid inlet 312 through a pipeline, a liquid outlet 313 is provided on one side of the filter chamber 311, a filter layer 38 is provided in the filter chamber 311, the filter layer 38 divides the filter chamber 311 into a filtration chamber and a purification chamber, the liquid inlet 312 is connected to the filtration chamber pipeline, and the liquid outlet 313 is connected to the purification chamber pipeline.

[0042] The cabinet 37 adopts a door-type structure, which is convenient for opening for maintenance. The shell 31 is installed by setting a receiving cavity. The shell 31 provides a filtering space through the filter cavity 311, and the filter cavity 311 is divided into chambers by setting a filter layer 38, including a filter cavity facing the liquid inlet direction and a purification cavity where filtration has been completed. The liquid is pumped into the filter cavity by the circulation pump 21, and the solid particles are filtered by the filter layer 38 and intercepted in the filter cavity. The filtered liquid is discharged through the liquid outlet 313 and enters the subsequent circulation.

[0043] Furthermore, the filter device 3 also includes a rotary motor 34. A drive chamber 314 is provided on the housing 31. The rotary motor 34 is placed in the drive chamber 314. The output end of the rotary motor 34 is fastened to the folding plate 32. The folding plate 32 includes a bottom plate 321 and a distribution plate 322. The output end of the rotary motor 34 is fastened to the bottom plate 321. The end of the bottom plate 321 away from the rotation center is rotatably connected to the distribution plate 322. A wedge 326 is provided at the lower end of the distribution plate 322. Sealing plates 325 are provided on both sides of the distribution plate 322.

[0044] Filtering state: the bottom plate 321 and the transfer plate 322 are on the same horizontal plane, the sealing plate 325 is in contact with the side of the bottom plate 321, and the liquid inlet 312 faces the bottom plate 321;

[0045] Impurity removal state: the bottom plate 321 and the distribution plate 322 are in a vertical state, one side of the wedge block 326 is in contact with the bottom plate 321 , and the liquid inlet 312 faces the distribution plate 322 .

[0046] The rotary motor 34 is installed through the driving cavity 314. The rotary motor 34 is used to output torque to drive the folding plate 32 to rotate and switch the shape. The entire filtration process is divided into two states. The first state is the impurity filtering state when the bottom plate 321 and the distribution plate 322 are at the same horizontal plane. The liquid is pumped into the impurity filtering chamber. Under the action of the pressure difference, the liquid penetrates toward the filter layer 38, completes the filtration, and enters the purification chamber; as the filtration proceeds, small solid particles continue to accumulate on the surface of the filter layer, affecting the filtration rate. The rotary motor 34 drives the bottom plate 321 to rotate, causing the distribution plate 322 to rotate accordingly until the bottom plate 321 and the folding plate 32 are in a vertical state. At this time, one side of the wedge block 326 maintains contact with the bottom plate 321 and enters the impurity removal state. The sealing plates 325, the bottom plate 321 and the distribution plate 322 on both sides constitute a relatively sealed impurity removal space. At this time, liquid is pumped into the impurity removal space, causing the incoming liquid to flow disorderly, and the bottom of the filter layer 38 is automatically flushed by local turbulence to avoid local blockage affecting the filtration efficiency.

[0047] Furthermore, the folding plate 32 also includes an opening plate 323, an opening groove 3211 is provided on the bottom plate 321, one end of the opening groove 3211 is set to be through, and an opening spring 324 is provided in the other end of the opening groove 3211, the opening plate 323 and the opening groove 3211 are slidably connected, and one end of the opening plate 323 is fastened to the opening spring 324, the opening spring 324 is located at the end of the opening groove 3211 close to the dividing plate 322, and a flushing slope 3231 is provided on the opening plate 323.

[0048] The opening groove 3211 is arranged in sections, including a bearing cavity for installing the opening spring 324 and a through groove for diversion. When filtering impurities, since the opening spring 324 is in a horizontal state, the elastic force causes the opening plate 323 to retract into the bearing cavity, allowing liquid to continuously enter the filtering cavity for continuous filtration. When entering the impurity removal state, the bottom plate 321 gradually tends to be vertical, and the opening plate 323 moves under the action of gravity, blocking the through groove to form a relatively sealed impurity removal space. By providing a liquid flushing slope 3231, when liquid hits the slope, it will push the opening plate 323 toward the opening spring 324, facilitating the improvement of automatic reset efficiency and continuous filtration.

[0049] Furthermore, the filter device 3 also includes a debris removal component 33 and a heating wire 36. The heating wire 36 is placed in the liquid inlet 312. The heating wire 36 and the rotary motor 34 are connected to the same signal source. The debris removal component 33 includes an extension plate 331 and an extension spring 332. An extension groove 3221 is provided on the distribution plate 322. The two ends of the extension spring 332 are respectively fastened to the wall of the extension groove 3221 and one side of the extension plate 331. The extension plate 331 and the extension groove 3221 are slidably connected. The extension plate 331 is away from the side of the extension spring 332 and abuts against the filter layer 38.

[0050] The heating wire 36 is normally de-energized and controlled by the same signal source as the rotary motor 34. When a pressure increase is detected within the filter chamber, indicating that solid impurities are partially blocking the filter layer 38, the rotary motor 34 outputs torque to switch modes. Simultaneously, the heating wire 36 provides local heating to increase solubility, thereby dissolving soluble solid particles and assisting in local flushing, thereby improving the efficiency of impurity removal on the surface of the filter layer 38. The extension spring 332 is installed through the extension slot 3221. The extension spring 332 pushes the extension plate 331 into contact with the filter layer 38. During the upward movement of the extension plate 331, the surface of the filter layer 38 is initially cleaned. After the initial cleaning is completed, local turbulent flushing and local heating are used to improve the efficiency of impurity removal on the surface of the filter layer 38.

[0051] As an optimization, the filter device 3 further includes a baffle 35. The housing 31 is provided with two baffles 35. One end of the baffle 35 is connected to the liquid outlet 313 of the rear housing 31, and the other end is connected to the liquid inlet 312 of the rear housing 31. By providing two housings 31 and gradually reducing particle size, layer-by-layer filtration is performed. The baffles 35 connect the liquid outlet 313 of the front section and deliver the preliminarily filtered liquid to the liquid inlet 312 of the rear section for further filtration, thereby improving the filtration effect.

[0052] As an optimization, the circulation device 2 further includes a booster pump 24, and the terminal liquid outlet 313 is connected to the inlet 221 through a pipeline of the booster pump 24. By providing the booster pump 24 to assist in pumping the filtered liquid into the mixing tank 1 for circulation, the circulation efficiency is improved by increasing the pressure difference.

[0053] The purification method comprises the following steps:

[0054] S1. Inject raw materials into the mixing tank 1 through multiple feeding pipelines 4 and perform preliminary stirring.

[0055] S2 , the etching liquid in the stirring tank 1 is guided into the housing 31 by the circulation pump 21 .

[0056] S3. Filter through the filter layer 38.

[0057] S4. Dissolve soluble solids through heating and local shear flow.

[0058] S5. When the liquid index is detected to be up to standard, the stop valve 23 is opened to automatically fill the liquid.

[0059] The working principle of the present invention is as follows: the filtration process is divided into two states. The first state is the filtration state when the bottom plate 321 and the distribution plate 322 are at the same horizontal plane. The liquid is pumped into the filtration chamber. Under the action of the pressure difference, the liquid penetrates toward the filter layer 38, completes the filtration, and enters the purification chamber. As the filtration proceeds, small solid particles are continuously deposited on the surface of the filter layer, affecting the filtration rate. The bottom plate 321 is driven to rotate by the rotary motor 34, so that the distribution plate 322 rotates accordingly until the bottom plate 321 and the folding plate 32 are in a vertical state. At this time, one side of the wedge block 326 and the bottom plate 321 maintains contact and enters the impurity removal state. The sealing plates 325, bottom plate 321 and transfer plate 322 on both sides constitute a relatively sealed impurity removal space. At this time, liquid is pumped into the impurity removal space to make the incoming liquid flow disorderly, and the bottom of the filter layer 38 is automatically flushed through local turbulence to avoid local blockage affecting the filtration efficiency; the mode is switched by outputting torque through the rotary motor 34, and local heating is performed through the electric heating wire 36 to increase the solubility, thereby dissolving the soluble solid small particles, assisting local flushing, and improving the impurity removal efficiency on the surface of the filter layer 38.

[0060] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An etching liquid purification device, characterized in that: The purification device comprises a stirring tank (1), a circulation device (2), a filtering device (3) and a feed pipeline (4), wherein a plurality of the feed pipelines (4) are provided, and a plurality of the feed pipelines (4) are connected to the stirring tank (1) through a pipeline, a discharge port is provided at the lower end of the stirring tank (1), a feed port is provided at the upper end of the stirring tank (1), the circulation device (2) is connected to the discharge port pipeline of the stirring tank (1), a liquid delivery end of the circulation device (2) is connected to the feed port pipeline at the upper end of the stirring tank (1), the circulation device (2) is located on the external circulation loop of the stirring tank (1), and the filtering device (3) is located on the external circulation loop; The filtering device (3) comprises a housing (31) and a folding plate (32); The filtering device (3) further comprises a rotary motor (34), a driving chamber (314) is provided on the housing (31), the rotary motor (34) is placed in the driving chamber (314), an output end of the rotary motor (34) is fastened to the folding plate (32), the folding plate (32) comprises a bottom plate (321) and a distribution plate (322), the output end of the rotary motor (34) is fastened to the bottom plate (321), an end of the bottom plate (321) away from the rotation center is rotatably connected to the distribution plate (322), a wedge block (326) is provided at the lower end of the distribution plate (322), and sealing plates (325) are provided on both sides of the distribution plate (322); The circulation device (2) includes a circulation pump (21); A filter chamber (311) is provided on the housing (31), a liquid inlet (312) is provided at the lower end of the filter chamber (311), the circulation pump (21) and the liquid inlet (312) are connected by a pipeline, a liquid outlet (313) is provided on one side of the filter chamber (311), a filter layer (38) is provided in the filter chamber (311), the filter layer (38) divides the filter chamber (311) into a filtration chamber and a purification chamber, the liquid inlet (312) and the filtration chamber pipeline are connected, and the liquid outlet (313) and the purification chamber pipeline are connected; Filtering state: the bottom plate (321) and the transfer plate (322) are on the same horizontal plane, the sealing plate (325) and the side of the bottom plate (321) are in contact, and the liquid inlet (312) faces the bottom plate (321); Impurity removal state: the bottom plate (321) and the distribution plate (322) are in a vertical state, one side of the wedge block (326) is in contact with the bottom plate (321), and the liquid inlet (312) faces the distribution plate (322); The folding plate (32) further includes an opening plate (323), an opening groove (3211) is provided on the bottom plate (321), one end of the opening groove (3211) is provided through, and an opening spring (324) is provided in the other end of the opening groove (3211), the opening plate (323) and the opening groove (3211) are slidably connected, one end of the opening plate (323) is fastened to the opening spring (324), the opening spring (324) is located at one end of the opening groove (3211) close to the distribution plate (322), and a flushing inclined surface (3231) is provided on the opening plate (323); During impurity filtering, since the opening spring (324) is in a horizontal state, the opening plate (323) retracts into the bearing cavity under the elastic force, so that the liquid can continuously enter the impurity filtering cavity for continuous filtration. When entering the impurity removal state, the bottom plate (321) gradually tends to be vertical, and the opening plate (323) moves under the action of gravity and blocks the through groove, forming a relatively sealed impurity removal space.

2. The etching solution purification device according to claim 1, characterized in that: The circulation device (2) includes a circulation pipe (22), one end of the circulation pump (21) is connected to the discharge port of the stirring tank (1), and the other end is connected to the pipeline of the filtering device (3); The circulation pipe (22) is a three-way pipe. An inlet (221), a circulation port (222), and an outlet (223) are sequentially provided on the circulation pipe (22). One end of the inlet (221) is connected to the filter device (3), and the other end of the inlet (221) is respectively connected to the circulation port (222) and the outlet (223). A stop valve (23) is provided on the outlet (223). The end of the circulation port (222) is connected to the feed inlet pipeline of the stirring tank (1).

3. The etching solution purification device according to claim 2, characterized in that: The filtering device (3) comprises a cabinet (37), the cabinet (37) is provided with an accommodating cavity, and the housing (31) is placed in the accommodating cavity.

4. The etching solution purification device according to claim 3, characterized in that: The filtering device (3) further comprises an impurity removal component (33) and an electric heating wire (36), wherein the electric heating wire (36) is placed in the liquid inlet (312), and the electric heating wire (36) and the rotary motor (34) are connected to the same signal source. The impurity removal component (33) comprises an extension plate (331) and an extension spring (332), and an extension groove (3221) is provided on the rotary plate (322). Both ends of the extension spring (332) are respectively fastened to the wall surface of the extension groove (3221) and one side of the extension plate (331). The extension plate (331) and the extension groove (3221) are slidably connected, and the side of the extension plate (331) away from the extension spring (332) abuts against the filter layer (38).

5. The etching solution purification device according to claim 4, characterized in that: The filtering device (3) further comprises a baffle tube (35), two of which are provided in the housing (31), one end of the baffle tube (35) being in communication with a liquid outlet (313) of the rear housing (31) through a pipeline, and the other end of the baffle tube (35) being in communication with a liquid inlet (312) of the rear housing (31) through a pipeline.

6. The etching solution purification device according to claim 5, characterized in that: The circulation device (2) further comprises a booster pump (24), and the liquid outlet (313) at the end is connected to the inlet (221) through a pipeline of the booster pump (24).

7. The purification method of the etching solution purification device according to claim 6, characterized in that: The purification method comprises the following steps: S1, feeding; S2, external loop; S3, filtering; S4, local forced dissolution; S5. Filling.

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