Fluid generator and fluid control device

Abstract

The present application relates to the technical field of fluid generator, especially to a fluid generator and a fluid control device, comprising a piezoelectric actuator, a spacer and a diaphragm, the piezoelectric actuator, the spacer and the diaphragm form a cavity; the convex position of the diaphragm vibration and the adjacent area of the convex position protrude from the surface of the diaphragm to form a convex part, thereby, the continuity of the diaphragm stiffness is broken, the stiffness mutation is formed at the outer peripheral edge of the convex part, when the diaphragm vibrates, the amplitude of the area outside the wave crest position and the adjacent area of the wave crest position is no longer a continuous gradient distribution, the area opposite to the convex part of the diaphragm can obtain greater vibration energy to produce greater amplitude, thereby improving the output flow; in addition, due to the stiffness mutation of the diaphragm at the outer peripheral edge of the convex part, at the same time, the first hole part arranged in the area opposite to each convex part of the diaphragm is simultaneously in or tends to the air outlet stroke or the exhaust stroke, and the output flow is further improved.

Description

Technical Field

[0001] This invention relates to the field of fluid generator technology, and more particularly to a fluid generator and a fluid control device. Background Technology

[0002] Chinese patent application CN118979867A discloses a conventional fluid generating device. This device includes an actuator composed of a substrate and a piezoelectric sheet, which vibrates under electrical signal excitation; a spacer portion joined to at least one main surface of the actuator, forming a groove with an opening at one end opposite to the actuator; and a diaphragm fixedly connected to the end of the spacer opposite to the actuator, sealing the opening of the groove, thus forming a chamber between the actuator, the groove, and the diaphragm. A hole communicating with the chamber is formed through the diaphragm in a region opposite to the chamber. When the actuator vibrates under electrical signal excitation, it transfers vibrational energy to the diaphragm, causing the diaphragm to vibrate in a high-order resonance mode with at least two antinodes. At least one hole is formed at or near the antinodes of the diaphragm's vibration. This fluid generating device provides a new breakthrough for improving vibrational energy utilization and increasing the output flow rate of a fluid generating device within a limited scale.

[0003] In order to explore the limits of the output performance of the above-mentioned fluid generating device, the inventors of this application have conducted further research on the above-mentioned fluid generating device.

[0004] In this type of fluid generator, the vibrational energy of the actuator is transferred to the diaphragm, causing it to vibrate. Because the diaphragm has a planar membrane / plate structure with continuous stiffness and is substantially constrained on all sides, on the one hand, during diaphragm vibration, the amplitude of the vibration is distributed in a continuous gradient from the antinodes and their adjacent areas towards the areas further outward from the antinodes, resulting in a non-concentrated distribution of vibrational energy. During operation, the orifices formed at or near the antinodes of the diaphragm independently draw in and discharge fluid. The working space during this process is mainly concentrated in the area of ​​the chamber opposite the orifices, thus the vibrational energy in the areas further outward from the antinodes is not effectively utilized. On the other hand, when the diaphragm generates a high-order resonance mode with at least two antinodes, the vibration directions of adjacent antinodes are opposite at the same time. That is, at the same time, some orifices at or near the antinodes are in or tend towards the exhaust stroke, while others are in or tend towards the intake stroke, thus limiting the output performance of the fluid generator. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art by providing a fluid generator and a fluid control device having the same.

[0006] The technical solution adopted by the present invention to solve its technical problem is: a fluid generator, including a piezoelectric actuator, a spacer and a diaphragm, wherein the diaphragm is connected to the piezoelectric actuator through the spacer, and the piezoelectric actuator, the spacer and the diaphragm form a cavity;

[0007] The diaphragm has a fixing part and a vibrating part. The fixing part is fixedly connected to one end of the spacer that is away from the piezoelectric actuator. The fixing part is connected to the vibrating part, and the vibrating part is formed as one end wall of the chamber in the thickness direction of the piezoelectric actuator.

[0008] When the piezoelectric actuator vibrates under the excitation of an electrical signal, it transmits vibration energy to the diaphragm to cause the diaphragm to vibrate. At least one first hole penetrating the diaphragm at or near the antinode of the vibration is connected to the chamber.

[0009] The antinodes of the diaphragm vibration and the adjacent areas of the antinodes protrude from the diaphragm surface to form convex portions. The convex portions are formed by a recess on one side of the diaphragm surface and a protrusion on the other side of the diaphragm surface. The first hole penetrates the convex portions.

[0010] Furthermore, the antinodes of the diaphragm vibration and the adjacent areas of the antinodes are shaped to form the protrusions.

[0011] Ideally, when the piezoelectric actuator vibrates under the excitation of an electrical signal, it transfers vibrational energy to the diaphragm to cause the diaphragm to vibrate with at least two antinodes, and at least one first hole through which a communicating chamber is formed at or near at least one antinode of the diaphragm vibration.

[0012] In this structure, preferably, at least one first hole is provided through at least two antinodes of the diaphragm vibration or in the adjacent region of the antinodes.

[0013] In this structure, more preferably, at least one first hole is provided through each antinode of the diaphragm vibration or in the adjacent region of the antinode.

[0014] Furthermore, a partition is provided on the diaphragm around the outer periphery of the protrusion or between two adjacent protrusions, and the area outside the partition of the vibration part is the vibration zone;

[0015] The region of the diaphragm opposite to the partition has a greater ability to resist elastic deformation when subjected to force than the region of the diaphragm opposite to the vibration zone.

[0016] Furthermore, the partition protrudes from the surface of the vibrating portion of the diaphragm.

[0017] The partition of the present invention can be constructed, but is not limited to, in the following ways:

[0018] Firstly, the diaphragm is formed by shaping a local area to create the partition portion. The partition portion is a rib that is disposed on the vibrating part and protrudes from the surface of the diaphragm. The rib protrudes from the surface of the diaphragm and is arranged around the outer periphery of the protrusion or between two adjacent protrusions.

[0019] Secondly, the partition is formed by providing reinforcing ribs in a local area on at least one side surface of the diaphragm. The reinforcing ribs have a main body section disposed on the vibrating part. The main body section protrudes from the surface of the diaphragm and is disposed around the outer periphery of the protrusion or between two adjacent protrusions.

[0020] Furthermore, the reinforcing rib also has an extension section extending from the main body section to the fixing portion of the diaphragm, the extension section protruding from the surface of the diaphragm;

[0021] The extension segment is fixedly clamped between the fixing part of the diaphragm and the spacer part, or / and the extension segment is fixedly connected to the side of the fixing part of the diaphragm opposite to the spacer part.

[0022] Furthermore, the spacer is an annular structure, and the inner peripheral wall of the spacer, together with the piezoelectric actuator and the diaphragm, forms a cavity. The end of the spacer facing away from the piezoelectric actuator is wholly or partially joined to the diaphragm on an annular path around the outer periphery of the cavity.

[0023] Alternatively, the spacer portion has multiple spacers, all of which are joined to the same side surface of the piezoelectric actuator. The multiple spacers are spaced apart along a ring path around the chamber to form the chamber with the piezoelectric actuator and the diaphragm. The end of each spacer facing away from the piezoelectric actuator is wholly or partially joined to the diaphragm.

[0024] Furthermore, the diaphragm is made of a polymer material or a composite material composed of a polymer material and a metal material.

[0025] Furthermore, the piezoelectric actuator has a vibrating plate, on one or both surfaces of the vibrating plate in the thickness direction, at least one piezoelectric sheet is joined thereto, and the piezoelectric sheet is joined to the vibrating plate to form the piezoelectric actuator.

[0026] The present invention also provides a fluid control device, including the fluid generator described above.

[0027] Furthermore, it also includes a counter plate, which is spaced apart on the side of the diaphragm away from the piezoelectric actuator, so that a cavity is formed between the counter plate and the diaphragm, and a second hole is provided on the counter plate at the part opposite to the first hole.

[0028] Furthermore, the flow area of ​​the second orifice is 1.1 to 10 times the flow area of ​​the corresponding first orifice.

[0029] Furthermore, in some structures, the second hole is provided with a plurality of spoke ribs extending from the hole wall toward the center. The plurality of spoke ribs are distributed circumferentially along the second hole to form a hollow structure. A fluid passage is formed between adjacent spoke ribs to allow fluid to flow. The flow area of ​​the fluid passage is smaller than the flow area of ​​the second hole.

[0030] Alternatively, the spokes may converge in the central region of the second hole to form a connecting portion.

[0031] Furthermore, the connecting part is provided with a flow hole that passes through the connecting part.

[0032] In this distributed spoke rib structure, the flow area of ​​the hollow structure is 50%-90% of the flow area of ​​the second hole.

[0033] Furthermore, in some structures, the second orifice is provided with a mesh structure extending from the orifice wall toward the center to allow fluid to flow through. The mesh structure includes a plurality of through holes, and the flow area of ​​the mesh is smaller than the flow area of ​​the second orifice.

[0034] In this structure with a mesh structure, the area of ​​the mesh structure opposite to the second hole is the direct flow passage area, and the flow passage area of ​​the direct flow passage area is 50%-90% of the flow passage area of ​​the second hole.

[0035] Furthermore, some structures also include flow plates;

[0036] The flow plate is disposed between the diaphragm and the opposing plate or / and the opposing plate. At least the area of ​​the flow plate opposite to the second orifice has a mesh structure that allows fluid to flow through. The mesh structure includes a plurality of mesh holes penetrating the flow plate. The flow area of ​​the mesh holes is smaller than the flow area of ​​the second orifice.

[0037] Furthermore, the flow plate is engaged with the side surface of the opposing plate facing the diaphragm.

[0038] In this structure with a flow plate, the area opposite to the second hole in the mesh structure is the direct flow passage area, and the flow passage area of ​​the direct flow passage area is 50%-90% of the flow passage area of ​​the second hole.

[0039] Furthermore, it also includes an elastic support structure, through which the fluid generator is elastically supported on the opposing plate.

[0040] The beneficial effects of this invention are:

[0041] 1) In the fluid generator of the present invention, when the piezoelectric actuator vibrates under the excitation of an electrical signal, it transmits vibration energy to the diaphragm, causing the diaphragm to vibrate. The antinodes and adjacent areas of the diaphragm vibration protrude from the diaphragm surface, forming convexities. This breaks the continuity of the diaphragm stiffness, creating a sudden change in stiffness at the outer periphery of the convexities. During diaphragm vibration, the amplitude distribution from the antinodes and adjacent areas towards the areas further outward from the antinodes no longer exhibits a continuous gradient. The vibration energy is relatively concentrated, and the area of ​​the diaphragm opposite the convexities receives greater vibration energy and generates a larger amplitude. The chamber and the first The regions opposite the orifices have a larger volume change during the air intake and exhaust process, thereby increasing the output flow rate. In addition, due to the abrupt change in stiffness at the outer periphery of the diaphragm at the protrusion, the vibration mode of the diaphragm changes compared to the vibration mode of a flat diaphragm with continuous stiffness. When the diaphragm generates a high-order resonance mode with at least two antinodes, it has a vibration mode with the same vibration direction as the regions opposite each protrusion at the same time. That is to say, at the same time, the first orifice provided in the regions opposite each protrusion of the diaphragm is simultaneously in or tends to be in the exhaust stroke or the exhaust stroke, and the output flow rate is further increased.

[0042] 2) The fluid generator of the present invention, by setting a partition on the diaphragm around the outer periphery of the protrusion or between two adjacent protrusions, the area outside the partition is the vibration zone; the area of ​​the diaphragm opposite to the partition has a greater ability to resist elastic deformation when subjected to force than the area of ​​the diaphragm opposite to the vibration zone, so that the vibration energy transmitted to the diaphragm by the piezoelectric actuator mainly acts on the area of ​​the diaphragm opposite to the protrusion, causing the area of ​​the diaphragm opposite to the protrusion to generate a larger amplitude vibration, reducing the energy loss of the diaphragm at the partition, and improving the utilization rate of vibration energy; at the same time, by setting the partition, it is beneficial to further strengthen the stiffness change formed by the outer periphery of the diaphragm at the protrusion, further optimize the vibration mode of the diaphragm, and ensure that the diaphragm can generate a vibration mode with the same vibration direction in the area of ​​the diaphragm opposite to each protrusion at the same time, thereby increasing the output flow rate.

[0043] 3) The fluid control device of the present invention, by providing spokes or mesh structures that allow fluid flow within the second orifice, or by providing a flow-through plate between the diaphragm and the opposing plate or / and on the opposing plate, and by making at least the area of ​​the flow-through plate opposite to the second orifice a mesh structure that allows fluid flow, reduces the velocity difference between the center and the edge of the airflow as it passes through the second orifice, and makes the velocity gradient distribution from the center to the edge of the airflow more gradual, thereby effectively suppressing outflow noise.

[0044] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0045] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0046] Figure 1 This is a schematic diagram of the structure formed by the spacer and the vibrating plate enclosing the groove.

[0047] Figure 2 This is a schematic diagram of a structure in which the spacer and the piezoelectric sheet are disposed on the same side surface of the vibrating plate in the thickness direction;

[0048] Figure 3 This is a schematic diagram of a piezoelectric actuator with spacers on both sides of the main surface that are connected to the vibrating plate, and a piezoelectric sheet is provided on either side of the vibrating plate in the thickness direction.

[0049] Figure 4 This is a schematic diagram of a piezoelectric actuator with piezoelectric plates and spacers on both sides of the main surface, and the spacers are joined to the piezoelectric plates.

[0050] Figure 5 This is a schematic diagram of a piezoelectric actuator with spacers on both sides of the main surface, one side of which is connected to the piezoelectric sheet and the other side of which is connected to the vibrating plate.

[0051] Figure 6 This is a schematic diagram of the cavity formed by the piezoelectric actuator, the spacer, and the diaphragm;

[0052] Figure 7 This is a schematic diagram of the diaphragm bulging and deforming in one direction during vibration.

[0053] Figure 8 This is a schematic diagram showing the diaphragm bulging and deforming in another direction when it vibrates;

[0054] Figure 9 This is a schematic diagram of a fluid generator in Embodiment 1, which has a recessed portion formed on the side of the diaphragm near the piezoelectric actuator and a protruding portion on the side of the diaphragm away from the piezoelectric actuator.

[0055] Figure 10 This is a schematic diagram of a fluid generator in Embodiment 1, which has a recessed portion formed on the side of the diaphragm facing away from the piezoelectric actuator and a protruding portion on the side of the diaphragm facing the piezoelectric actuator.

[0056] Figure 11 This is a three-dimensional schematic diagram of the first hole being opened on the protrusion of the diaphragm;

[0057] Figure 12 This is a three-dimensional schematic diagram of a fluid generator;

[0058] Figure 13 This is a schematic diagram showing that one end of the convex part forms a dome-shaped shape;

[0059] Figure 14 This is a schematic diagram showing external fluid entering the chamber through the first orifice when the diaphragm vibrates;

[0060] Figure 15 This is a schematic diagram showing the fluid exiting the chamber along the first orifice when the diaphragm vibrates;

[0061] Figure 16 It is a schematic diagram of multiple spacers that are discretely distributed in a ring shape in the spacer section;

[0062] Figure 17 This is a schematic diagram of a fluid generator with partitions on a diaphragm;

[0063] Figure 18 This is a schematic diagram when the partition on the diaphragm is a rib;

[0064] Figure 19 This is a schematic diagram of a fluid generator with multiple discretely arranged partitions on the diaphragm.

[0065] Figure 20 This is a schematic diagram of a fluid generator with reinforcing ribs on the side of the diaphragm facing away from the piezoelectric actuator.

[0066] Figure 21 This is a bottom view of a fluid generator with reinforcing ribs and an extension section on the side of the diaphragm facing away from the piezoelectric actuator.

[0067] Figure 22 yes Figure 21 Schematic diagram of the AA section;

[0068] Figure 23 This is a cross-sectional schematic diagram of a fluid generator with reinforcing ribs on the side of the diaphragm near the piezoelectric actuator.

[0069] Figure 24 This is a cross-sectional schematic diagram of a fluid generator with a first reinforcing rib and a second reinforcing rib on each side of the diaphragm;

[0070] Figure 25 This is a cross-sectional schematic diagram of a fluid control device;

[0071] Figure 26 This is a cross-sectional schematic diagram of a fluid control device with a flow plate.

[0072] Figure 27 This is a schematic diagram of the longitudinal section of the second hole with a hollow structure.

[0073] Figure 28This is a cross-sectional schematic diagram of the hollow structure set inside the second hole;

[0074] Figure 29 This is a cross-sectional schematic diagram of a hollow structure with a connecting part installed inside the second hole;

[0075] Figure 30 This is a schematic diagram showing the flow holes passing through the connecting part of the hollow structure;

[0076] Figure 31 This is a schematic diagram of the longitudinal section of the mesh structure installed inside the second hole;

[0077] Figure 32 This is a schematic diagram of a cross-section showing a mesh structure installed inside the second hole.

[0078] Figure 33 This is a cross-sectional schematic diagram of a fluid control device with an elastic support structure.

[0079] In the figure: 1. Piezoelectric actuator, 11. Vibrating plate, 12. Piezoelectric sheet, 1a. First main surface, 1b. Second main surface;

[0080] 2. Diaphragm; 2-1. Fixing part; 2-2. Vibrating part; 21. Recessed part; 22. Protruding part; 221. First hole part;

[0081] 3. Spacer section; 31. Groove section; 32. Spacer body;

[0082] 4. Chamber;

[0083] 5. Opposing plate, 51. Second hole, 511. Spoke rib, 512. Fluid passage, 513. Connecting part, 514. Flow hole.

[0084] 6. Separator; 61. First reinforcing rib; 62. Second reinforcing rib; 63. Reinforcing rib; 631. Main section; 632. Extension section; 64. Separator; 6a. Separator strip;

[0085] 7. Diaphragm;

[0086] 8. Flow plate; 81. Mesh structure; 811. Mesh.

[0087] 9. Elastic support structure; 91. Frame; 92. Elastic arm;

[0088] A. Location of the antinode. Detailed Implementation

[0089] The invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention in a schematic manner. Therefore, they only show the components relevant to the invention, and the orientations and references (e.g., up, down, left, right, etc.) are only used to aid in the description of the features in the drawings. Therefore, the following specific embodiments are not intended to be limiting, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0090] Example 1

[0091] like Figure 9 and 10 As shown, a fluid generator, which can be used as a fan, includes a piezoelectric actuator 1, a spacer 3 and a diaphragm 2 stacked and positioned in sequence. The diaphragm 2 is connected to the piezoelectric actuator 1 through the spacer 3, and the piezoelectric actuator 1, the spacer 3 and the diaphragm 2 form a chamber 4.

[0092] The piezoelectric actuator 1 has a vibrating plate 11, and at least one piezoelectric sheet 12 is attached to one or both surfaces of the vibrating plate 11 in the thickness direction. The piezoelectric sheet 12 can be a piezoelectric ceramic sheet. The piezoelectric sheet 12 and the vibrating plate 11 constitute the piezoelectric actuator 1. The piezoelectric actuator 1 has a first main surface 1a and a second main surface 1b that are arranged opposite to each other in the thickness direction. Under the excitation of an electrical signal, the piezoelectric sheet 12 causes the piezoelectric actuator 1 to vibrate.

[0093] The vibrating plate 11 can be, but is not limited to, circular, rectangular, polygonal, or elliptical shapes. In this embodiment, the vibrating plate 11 is circular. A single piezoelectric sheet 12 can be attached to either side of the vibrating plate 11 in the thickness direction to form a single-crystal piezoelectric actuator 1; or two piezoelectric sheets 12 can be respectively disposed on both sides of the vibrating plate 11 in the thickness direction to form a dual-crystal piezoelectric actuator 1; or multiple piezoelectric sheets 12 can be disposed on the same side of the vibrating plate 11 in the thickness direction to form a composite multilayer piezoelectric actuator 1, etc. Under the excitation of an external periodic electrical signal, the piezoelectric sheet 12 causes the piezoelectric actuator 1 to vibrate.

[0094] The first main surface 1a and / or the second main surface 1b of the piezoelectric actuator 1 are joined with a spacer 3. The end of the spacer 3 near the piezoelectric actuator 1 is joined with the piezoelectric actuator 1, and the spacer 3 and the piezoelectric actuator 1 form a groove 31 with an opening at one end away from the piezoelectric actuator 1.

[0095] Specifically:

[0096] The spacer 3 can be joined to one or both surfaces of the vibrating plate 11 constituting the piezoelectric actuator 1 in the thickness direction. It is easy to understand that the spacer 3 can be joined to either one surface of the vibrating plate 11 in the thickness direction or the other surface of the base vibrating plate 11 in the thickness direction, such as... Figure 1 and 2 As shown, when multiple spacers 3 exist simultaneously, for example, the fluid generator of this application can have a bidirectional working function. In this case, spacers 3 are provided on both main surfaces of the piezoelectric actuator 1. The spacers 3 can be respectively provided on both sides of the vibrating plate 11 in the thickness direction, such as... Figure 3 As shown; in this structure, when the spacer 3 and the piezoelectric sheet 12 are disposed on the same side surface of the vibrating plate 11 in the thickness direction, the piezoelectric sheet 12 is located within the groove 31 of the spacer 3, and the spacer 3 has a height protruding beyond the surface of the piezoelectric sheet 12, such as... Figure 2 and Figure 3 As shown; when the spacer 3 and the piezoelectric sheet 12 are respectively disposed on the two sides of the vibrating plate 11 in the thickness direction, this limitation does not apply; the joint between the spacer 3 and the vibrating plate 11 can be adhesive or integrally formed.

[0097] Additionally, the spacer 3 can also be joined to the surface of the piezoelectric sheet 12 constituting the piezoelectric actuator 1 that faces away from the actuator. Under this structure, it is easy to understand that when the piezoelectric actuator 1 constitutes the aforementioned monocrystalline piezoelectric actuator 1, the spacer 3 can be joined to the surface of the piezoelectric sheet 12 constituting the monocrystalline piezoelectric actuator 1 that faces away from the vibrating plate 11; when the piezoelectric actuator 1 constitutes the aforementioned bicrystalline piezoelectric actuator 1, the spacer 3 can be joined to the surface of either side of the bicrystalline piezoelectric sheet 12 constituting the bicrystalline piezoelectric actuator 1 that faces away from the vibrating plate 11. Of course, when multiple spacers 3 exist simultaneously, for example, the fluid generator of this application can have a bidirectional operating function. In this case, both the first main surface 1a and the second main surface 1b of the piezoelectric actuator 1 are provided with spacers 3, and the spacers 3 can be respectively provided on the surfaces of the two piezoelectric sheets 12 constituting the bicrystalline piezoelectric actuator 1 that face away from the vibrating plate 11, such as... Figure 4 As shown.

[0098] Furthermore, it is easy to understand that when multiple spacers 3 exist simultaneously, the engagement methods of the aforementioned spacers 3 can also be combined with each other. For example, the fluid generator of this application can have a bidirectional working function. In this case, spacers 3 are provided on both the first main surface 1a and the second main surface 1b of the piezoelectric actuator 1. At least one spacer 3 is engaged with the surface of the piezoelectric sheet 12 constituting the piezoelectric actuator 1 on the side away from the piezoelectric actuator 1, and at least one spacer 3 is engaged with the side of the vibrating plate 11 on the side away from the piezoelectric actuator 1. Figure 5 As shown; in this structure, the connection between the spacer 3 and the vibrating plate 11 can be adhesive or integrally formed.

[0099] Of course, the joining method of the spacer 3 is not limited to this. The joining method of the spacer 3 follows the principle that the end of the spacer 3 near the piezoelectric actuator 1 is connected to the piezoelectric actuator 1, and the spacer 3 and the piezoelectric actuator 1 form a groove 31 with an opening at the end away from the piezoelectric actuator 1.

[0100] This embodiment is described in the form of a single-crystal piezoelectric actuator 1 with a single spacer 3, wherein the spacer 3 is attached to the surface of the vibrating plate 11 located on the side where the second main surface 1b of the piezoelectric actuator 1 is located, in order to facilitate understanding.

[0101] The spacer 3 is joined to the surface of the vibrating plate 11 located on the side where the second main surface 1b is located. One end of the spacer 3 near the vibrating plate 11 is connected to the vibrating plate 11, and the spacer 3 and the vibrating plate 11 form a groove 31 with an opening at one end opposite to the vibrating plate 11. Figure 1 As shown; the connection between the spacer 3 and the vibrating plate 11 can be by bonding or integral molding. The spacer 3 has a ring structure, so that the inner peripheral wall of the spacer 3 itself forms a groove 31.

[0102] One end of the spacer 3 near the vibrating plate 11 is joined to the surface of the vibrating plate 11 located on the side of the second main surface 1b. The diaphragm 2 is connected to the end of the spacer 3 away from the vibrating plate 11. In this way, the vibration of the piezoelectric actuator 1 can directly drive the spacer 3 and the diaphragm 2 to vibrate, so as to transfer the vibration energy to the diaphragm 2.

[0103] The diaphragm 2 has a fixing part 2-1 and a vibrating part 2-2. The fixing part 2-1 is fixedly connected to one end of the spacer 3 away from the piezoelectric actuator 1, so that the diaphragm 2 covers the opening of the groove 31 and encloses the piezoelectric actuator 1, the groove 31 and the diaphragm 2 to form a chamber 4. The fixing part 2-1 and the vibrating part 2-2 are integrally formed or fixedly connected. The vibrating part 2-2 is formed as one end wall of the chamber 4 in the thickness direction of the piezoelectric actuator 1. Thus, the diaphragm 2 is fixedly connected to the piezoelectric actuator 1 through the spacer 3. The piezoelectric actuator 1 vibrates, causing the diaphragm 2 to vibrate. When the piezoelectric actuator 1 vibrates under the excitation of an electrical signal, it transfers vibrational energy to the diaphragm 2, causing the diaphragm 2 to vibrate. At least one first hole 221, communicating with the chamber 4, penetrates the diaphragm 2 at or near the antinode position A. The area near the antinode position A refers to the region within the interval between the node position and the antinode position A of the diaphragm 2, close to but not including the side where the antinode position A is located. Figures 6-8 As shown, Figure 7 and Figure 8The "+" indicates that the diaphragm 2 bulges and deforms in one direction, and the "-" indicates that the diaphragm 2 bulges and deforms in another direction. The area circled by the long and double short lines indicates the area where the antinode A is located. The diaphragm 2 has four antinodes that are axially symmetrically distributed.

[0104] The cross-sectional shape of the first hole 221 can be circular, square, rectangular, elliptical or other shapes, and is not limited here. In this embodiment, the cross-sectional shape of the first hole 221 is circular, but this does not constitute a limitation of the present invention.

[0105] It should be noted that in this embodiment, the number of antinodes generated by the vibration of the diaphragm 2, the position A of the antinodes, and the adjacent region of the antinode position A are determined under the condition that the diaphragm 2 is excited in the state of having a planar membrane / plate structure with continuous stiffness, for example, as shown in... Figures 6-8 The illustration shows the vibration of the diaphragm 2 producing four antinodes, but this does not constitute a limitation of the invention. In engineering, finite element analysis software can typically be used to simulate the vibration mode of the diaphragm 2. After determining the number of antinodes generated by the vibration of the diaphragm 2, the antinode position A, and the adjacent region of the antinode position A, the diaphragm 2 is reconstructed so that the antinode position A and the adjacent region of the antinode position A protrude from the surface of the diaphragm 2, forming a protrusion 22. The protrusion 22 is formed by a recess 21 on one side of the surface of the diaphragm 2 and a protrusion 22 on the other side of the surface of the diaphragm 2. The first hole 221 penetrates the protrusion 22. The protrusion 22 can be formed by the diaphragm 2 protruding towards the side away from the piezoelectric actuator 1. Figure 9 As shown; alternatively, the diaphragm 2 can protrude towards the piezoelectric actuator 1 to form a protrusion 22, such as... Figure 10 As shown; for a single protrusion 22, its protruding shape can be either a flat-bottomed shape formed at one end of the protrusion 22, such as... Figures 9-12 As shown, a dome-shaped form can also be formed at one end of the protrusion 22, such as... Figure 13 As shown, the specific shape of the protrusion 22 does not constitute a limitation on the scope of protection of this invention.

[0106] The diaphragm 2 is formed by shaping the antinodes A and the adjacent areas of the antinodes A. The reconstruction of the diaphragm 2 includes, but is not limited to: blow molding, which directly blow molds the diaphragm 2 with the convex 22 in a local area using a molding die; mechanical or hot pressing, which applies mechanical pressure to a local area of ​​the diaphragm 2, which originally has a planar membrane / plate structure with continuous stiffness, to force the convex 22 to be formed, or by applying pressurized gas to a local area of ​​the diaphragm 2 under heating, to force the convex 22 to be formed in a local area of ​​the diaphragm 2 due to shaping. The local area here refers to the antinodes A and the adjacent areas of the antinodes A as described above. Two methods of reconstructing the diaphragm 2 to form the convex 22 are given here, but this does not constitute a limitation on the scope of protection of the present invention.

[0107] During operation, the piezoelectric element 12, under the excitation of an electrical signal, causes the piezoelectric actuator 1 to vibrate, transferring the vibrational energy to the diaphragm 2, thereby causing the diaphragm 2 to vibrate. Each of the first holes 221 formed at the antinode A and its adjacent region on the diaphragm 2 independently draws in and discharges fluid during operation. When the area containing the first hole 221 deforms away from the piezoelectric actuator 1, the local volume of the area corresponding to the first hole 221 in the chamber 4 increases, the pressure decreases, and external fluid enters the chamber 4 along the first hole 221. Figure 14 As shown; when the area where the first orifice 221 is located deforms toward the piezoelectric actuator 1, the local volume of the area corresponding to the first orifice 221 in the chamber 4 decreases, the pressure increases, and the fluid that was sucked into the chamber 4 in the previous process is discharged from the chamber 4 along the first orifice 221, and has a certain momentum. After the fluid with a certain momentum flows out of the first orifice 221, it forms a jet and can entrain the surrounding fluid, further increasing the output flow rate, such as Figure 15 As shown, this process repeats.

[0108] It should be noted that, under this structure, the height of the chamber 4 in the thickness direction of the piezoelectric actuator 1 can be greater than the sum of the maximum displacements of the piezoelectric actuator 1 and the diaphragm 2 when they vibrate and deform in opposite directions, so as to avoid motion interference between the piezoelectric actuator 1 and the diaphragm 2 during vibration and to make full use of vibration energy. In addition, under this structure, if the height of the chamber 4 is too large, the pressure and velocity of the fluid discharged from the first hole 221 into the chamber 4 will decrease, which will affect the formation of the jet, or even prevent the formation of the jet, and thus prevent the entrainment of the surrounding fluid, resulting in a decrease in the final output flow rate. Preferably, the height of the chamber 4 in the thickness direction of the piezoelectric actuator 1 is not greater than 20 times the sum of the maximum displacements of the piezoelectric actuator 1 and the diaphragm 2 when they vibrate and deform in opposite directions.

[0109] The spacer portion 3 has an annular structure. The inner peripheral wall of the spacer portion 3 and the vibrating plate 11 of the piezoelectric actuator 1 form an annular groove 31. The end of the spacer portion 3 facing away from the piezoelectric actuator 1 is wholly or partially joined to the diaphragm 2 along the annular path around the groove 31; or, the spacer portion 3 has a plurality of discrete, annularly distributed spacers 32, such as Figure 16 As shown, the spacers 32 of the same spacer 3 are all joined to the first main surface 1a or the second main surface 1b of the piezoelectric actuator 1. The multiple spacers 32 are distributed at intervals around the chamber 4 along an annular path to form a groove 31 with the piezoelectric actuator 1. The end of the spacer 32 facing away from the piezoelectric actuator 1 is wholly or partially joined to the diaphragm 2.

[0110] That is, the piezoelectric actuator 1, the diaphragm 2, and the spacer 3 form a chamber 4. The spacer 3 forms the inner peripheral wall of the chamber 4. The inner peripheral wall of the chamber 4 can be closed, without any channels communicating with the outside, and the spacer 3 has an annular structure; or the inner peripheral wall of the chamber 4 can be open, and the spacer 3 has a plurality of discretely arranged spacers 32 in an annular pattern. The gaps between the spacers 32 form channels communicating with the outside, and the channels connect to the chamber 4. Although external gas can enter the chamber 4 through the above channels, it moves towards the chamber 4. The fluid flows through the center, but because the pressure changes more drastically in the area of ​​the chamber 4 opposite to the first orifice 221 compared to the orifice formed on the periphery of the chamber 4, the fluid is mainly drawn in and discharged through the first orifice 221. The fluid entering the chamber 4 from the orifice has not yet reached the area of ​​the chamber 4 opposite to or adjacent to the first orifice 221 before its flow direction reverses and it flows out of the chamber 4 along the original path. Therefore, it does not have a substantial or very small impact on the fluid's intake and discharge from the first orifice 221. Thus, the inner periphery of the chamber 4 can be open.

[0111] In this way, when the piezoelectric actuator 1 vibrates under the excitation of the electrical signal, it transmits the vibration energy to the diaphragm 2, causing the diaphragm 2 to vibrate. The antinode position A and the adjacent area of ​​the antinode position A of the diaphragm 2 protrude from the surface of the diaphragm 2 to form a protrusion 22. As a result, compared with the prior art, the continuity of the stiffness of the diaphragm 2 is broken, and a sudden change in stiffness is formed at the outer periphery of the protrusion 22. When the diaphragm 2 vibrates, the amplitude of the vibration from the antinode position A and the adjacent area of ​​the antinode position A toward the area further outward from the antinode no longer shows a continuous gradient distribution. The vibration energy is relatively concentrated, and the area of ​​the diaphragm 2 opposite to the protrusion 22 can obtain greater vibration energy and generate a larger amplitude. The area of ​​the chamber 4 opposite to the first orifice 221 has a larger volume change during the air intake and exhaust process, thereby increasing the output flow rate.

[0112] Preferredly, when the piezoelectric actuator 1 vibrates under the excitation of an electrical signal, it transfers vibrational energy to the diaphragm 2, causing the diaphragm 2 to vibrate with at least two antinodes. At least one first hole 221 communicating with the chamber 4 can be provided through at least one antinode position A of the diaphragm 2 or in a region adjacent to antinode position A; alternatively, at least one first hole 221 communicating with the chamber 4 can be provided through at least two antinode positions A of the diaphragm 2 or in a region adjacent to antinode position A; or at least one first hole 221 communicating with the chamber 4 can be provided through each antinode position A of the diaphragm 2 or in a region adjacent to antinode position A. Compared with the prior art, with the same arrangement of the first hole 221, the antinode position A and the region adjacent to antinode position A of the diaphragm 2 in this application protrude from the surface of the diaphragm 2 to form a protrusion 22, thereby achieving higher output performance.

[0113] Of course, more preferably, when the piezoelectric actuator 1 vibrates under the excitation of an electrical signal, it transmits vibrational energy to the diaphragm 2, causing the diaphragm 2 to vibrate with at least two antinodes. At least one first hole 221, communicating with the chamber 4, is provided at each antinode position A or in the adjacent region of antinode position A. Since the diaphragm 2 forms a sudden change in stiffness at the outer periphery of the protrusion 22, the vibration mode of the diaphragm 2 changes relative to the vibration mode of the flat plate diaphragm 2 with continuous stiffness. When the diaphragm 2 vibrates in a high-order resonance mode with at least two antinodes, it has a vibration mode with the same vibration direction as the region of the diaphragm 2 opposite to each protrusion 22 at the same time. That is, at the same time, the first hole 221 provided in the region of the diaphragm 2 opposite to each protrusion 22 is simultaneously in or tends to be in the exhaust stroke or the outlet stroke, and the output flow rate is further improved.

[0114] The piezoelectric actuator 1 vibrates under external excitation and transmits the vibration energy to the diaphragm 2, thereby causing the diaphragm 2 to vibrate. The resonance mode of the coordinated vibration of the piezoelectric actuator 1 and the diaphragm 2 is related to the structural shape of the vibrating plate 11, the structural shape of the diaphragm 2, and the way they are joined. The above factors do not constitute a limitation on the scope of protection of the claims of this invention. The vibrating plate 11 can be, but is not limited to, circular, rectangular, polygonal, or elliptical, etc. The shape of the diaphragm 2 can also be, but is not limited to, circular, rectangular, polygonal, or elliptical, etc. The spacer 3 joined between the vibrating plate 11 and the diaphragm 2 can also be, but is not limited to, a circular ring structure, a rectangular ring structure, a polygonal ring structure, or an elliptical ring structure, etc.

[0115] The diaphragm 2 can be made of a metallic membrane material, such as copper foil, titanium foil, stainless steel foil, etc. Preferably, the diaphragm 2 is made of a polymer material, such as PET, PI, PPS, PEI, FEP or other polymer membrane materials, or the diaphragm 2 is made of a composite material composed of polymer materials and other metallic materials, such as PI copper-clad laminate / film, PET copper-clad laminate / film, PET nickel-plated laminate / film, carbon fiber metal composite board / film, etc. Compared with metallic materials, both polymer materials and composite materials exhibit the characteristics of being lightweight and having a high elastic strain limit. The limiting amplitude at resonance is usually much higher than that of metallic materials, making it particularly suitable for applications with high flow output requirements, such as heat dissipation in smart 3C terminal products.

[0116] Example 2

[0117] like Figures 17-24 As shown, the structural principle of this embodiment is basically the same as that of embodiment 1. The difference is that a partition 6 is provided on the diaphragm 2 around the outer periphery of the protrusion 22 or between two adjacent protrusions 22. The area of ​​the vibration part 2-2 outside the partition 6 is the vibration zone.

[0118] The area of ​​diaphragm 2 opposite to the partition 6 has a greater ability to resist elastic deformation when subjected to force than the area of ​​diaphragm 2 opposite to the vibration zone.

[0119] In other words, the area of ​​diaphragm 2 opposite to the partition 6 has a greater ability to resist elastic deformation when subjected to force than the area of ​​diaphragm 2 other than the area opposite to the partition 6. Therefore, the energy required to cause vibration in the area of ​​diaphragm 2 opposite to the partition 6 is much greater than the energy required to cause vibration in the area of ​​diaphragm 2 opposite to the protrusion 22. Essentially, the area of ​​diaphragm 2 opposite to the partition 6 is substantially constrained, and vibration is suppressed. The vibrational energy transmitted to diaphragm 2 by piezoelectric actuator 1 will primarily act on the area of ​​diaphragm 2 opposite to the protrusion 22, thereby causing a larger amplitude vibration in that area, while the area of ​​diaphragm 2 opposite to the partition 6 will not vibrate or will vibrate only slightly. By setting the partition 6, the energy loss of the diaphragm 2 at the partition 6 is reduced, and the utilization rate of vibration energy is improved. At the same time, by setting the partition 6, it is beneficial to further strengthen the stiffness change formed at the outer periphery of the diaphragm 2 at the outer periphery of the protrusion 22, further optimize the vibration mode of the diaphragm 2, and ensure that when the diaphragm 2 generates a high-order resonance mode vibration, it can generate a vibration mode with the same vibration direction as the region of the diaphragm 2 opposite to each protrusion 22 at the same time, thereby improving the output flow rate.

[0120] It should be noted that the partition 6 can be provided on the diaphragm 2 either before the protrusion 22 is formed or after the protrusion 22 is formed. In this embodiment, the partition 6 is provided on the diaphragm 2 after the protrusion 22 is formed.

[0121] By having the partition 6 protrude from the surface of the vibrating part 2-2 of the diaphragm 2, the region of the diaphragm 2 opposite to the partition 6 can be made to resist elastic deformation more effectively than the vibrating part of the diaphragm 2. However, this is not a limitation. For example, the diaphragm 2 itself can also be made of a non-homogeneous material, or other rigid media (such as metal ribs) can be embedded in the region of the diaphragm 2 opposite to the partition 6. This can also achieve the same effect of the region of the diaphragm 2 opposite to the partition 6 resisting elastic deformation more effectively than the vibrating part of the diaphragm 2.

[0122] In this embodiment, the partition 6 can be constructed in, but is not limited to, the following ways:

[0123] Firstly, a partition 6 is formed in a local area of ​​the diaphragm 2 through shaping. The partition 6 is a rib 64 provided on the vibrating part 2-2 and protruding from the surface of the diaphragm 2. That is, the partition 6 is formed by shaping a local area of ​​the diaphragm 2. The rib 64 protrudes from the surface of the diaphragm 2 and is arranged around the outer periphery of the protrusion 22 or between two adjacent protrusions 22.

[0124] Specifically:

[0125] The rib 64 protrudes from the surface of the diaphragm 2. The rib 64 can protrude entirely towards the side of the diaphragm 2 away from the piezoelectric actuator 1, or towards the side of the diaphragm 2 facing the actuator. Figure 17 and 18 As shown; some of the ribs 64 may protrude towards the side of the diaphragm 2 away from the piezoelectric actuator 1, while other parts of the ribs 64 may protrude towards the side of the diaphragm 2 towards the piezoelectric actuator 1; or the ribs 64 protruding from the diaphragm 2 may simultaneously have portions protruding towards the side of the diaphragm 2 away from the piezoelectric actuator 1 and towards the side of the diaphragm 2 towards the piezoelectric actuator 1. No limitations are imposed here; the cross-sectional shape of the ribs 64 may be angular, sawtooth, or wavy, and no limitations are imposed here either.

[0126] Additionally, it should be noted that the partition 6 can be a continuous, integral structure, such as... Figure 17 and 18 As shown, the partition 6 can also be a plurality of spaced partition bars 6a, that is, the partition 6 is a plurality of discretely arranged partition bars 6a, such as... Figure 19 As shown, in principle, it is sufficient to achieve the separation of the protrusions 22 of the diaphragm 2.

[0127] Secondly, the partition 6 is formed by providing a reinforcing rib 63 in a local area on at least one side surface of the diaphragm 2, the reinforcing rib 63 protruding from the diaphragm 2. The reinforcing rib 63 has a main body section 631 provided in the vibrating part 2-2, the main body section 631 protruding from the surface of the diaphragm 2, and the main body section 631 is arranged around the outer periphery of the protrusion 22 or between two adjacent protrusions 22.

[0128] Alternatively, the separator 6 can be constructed by providing reinforcing ribs 63 on the surface of the diaphragm 2 facing away from the piezoelectric actuator 1. The main body segment 631 of the reinforcing rib 63 is provided on the side of the vibrating part 2-2 of the diaphragm 2 facing away from the piezoelectric actuator 1, such as... Figure 20 As shown.

[0129] Preferably, the reinforcing rib 63 may also have an extension section 632 extending from the main body section 631 to the fixing portion 2-1 of the diaphragm 2. The extension section 632 protrudes from the surface of the diaphragm 2 and is fixedly connected to the fixing portion 2-1 of the diaphragm 2 on the side opposite to the spacer portion 3. Figure 21 and 22 As shown.

[0130] Similarly, the partition 6 is a continuous integral structure, that is, the reinforcing ribs 63 constituting the partition 6 are formed as a continuous integral; or, the partition 6 is formed as a plurality of spaced partition strips 6a, that is, the reinforcing ribs 63 constituting the partition 6 are discretely arranged, which will not be elaborated here.

[0131] The reinforcing rib 63 is integrally formed or fixedly connected to the diaphragm 2. The reinforcing rib 63 can be made of the same material as the diaphragm 2, or it can be made of a different material. For example, when the diaphragm 2 is made of polyimide film, the reinforcing rib 63 can be made of polyimide film or SUS304 stainless steel. There is no limitation on the material of the reinforcing rib 63, but the principle is to ensure that the area of ​​the diaphragm 2 opposite to the partition 6 has a greater ability to resist elastic deformation when subjected to force than the area of ​​the diaphragm 2 other than the area opposite to the partition 6.

[0132] In addition, the reinforcing ribs 63 constituting the partition 6 can be of equal or variable cross-section, and there is no limitation here.

[0133] Alternatively, the separator 6 can be constructed by providing reinforcing ribs 63 on the surface of the diaphragm 2 facing the piezoelectric actuator 1. The main body segment 631 of the reinforcing rib 63 is provided on the side of the vibrating part 2-2 of the diaphragm 2 facing the piezoelectric actuator 1, such as... Figure 23 As shown.

[0134] Similarly, the reinforcing rib 63 also has an extension 632 extending from the main body section 631 to the fixing part 2-1 of the diaphragm 2. The extension 632 protrudes from the surface of the diaphragm 2 and is fixedly clamped between the fixing part 2-1 of the diaphragm 2 and the spacer 3.

[0135] Similarly, the partition 6 is a continuous integral structure, that is, the reinforcing ribs 63 constituting the partition 6 are formed as a continuous integral; or, the partition 6 is formed as multiple spaced partition strips 6a, that is, the reinforcing ribs 63 constituting the partition 6 are discretely arranged, which will not be elaborated here.

[0136] Similarly, the reinforcing rib 63 is integrally formed or fixedly connected to the diaphragm 2; the reinforcing rib 63 can be made of the same material as the diaphragm 2, or it can be made of a different material. For example, when the diaphragm 2 is made of polyimide film, the reinforcing rib 63 can be made of polyimide film or SUS304 stainless steel. There is no limitation on the material of the reinforcing rib 63, but the principle is to ensure that the area of ​​the diaphragm 2 opposite to the partition 6 has a greater ability to resist elastic deformation when subjected to force than the area of ​​the diaphragm 2 other than the area opposite to the partition 6.

[0137] In addition, the reinforcing ribs 63 constituting the partition 6 can be of equal or variable cross-section, and there is no limitation here.

[0138] Alternatively, the separator 6 can be constructed by simultaneously providing a first reinforcing rib 61 facing the piezoelectric actuator 1 and a second reinforcing rib 62 facing away from the piezoelectric actuator 1 on both sides of the diaphragm 2. Both the first reinforcing rib 61 and the second reinforcing rib 62 protrude from the surface of the diaphragm 2. Figure 24 As shown.

[0139] The first reinforcing rib 61 has a first main body section 631 disposed on the vibrating part 2-2 of the diaphragm 2, and the first main body section 631 protrudes from the diaphragm 2;

[0140] The second reinforcing rib 62 has a second main body section 631 disposed on the vibration part 2-2 of the diaphragm 2, and the second main body section 631 protrudes from the diaphragm 2;

[0141] In addition, the first reinforcing rib 61 also has a first extension section 632 extending from the first main body section 631 to the fixing part 2-1 or / and the second reinforcing rib 62 has a second extension section 632 extending from the second main body section 631 to the fixing part 2-1;

[0142] The first extension 632 protrudes from the surface of the diaphragm 2 and is fixedly clamped between the fixing part 2-1 and the spacer part 3 of the diaphragm 2.

[0143] The second extension 632 protrudes from the surface of the diaphragm 2 and is fixedly connected to the side of the fixing part 2-1 of the diaphragm 2 opposite to the spacer part 3.

[0144] Similarly, the partition 6 is a continuous integral structure in the same area on the diaphragm 2, that is, the first reinforcing rib 61 or / and the second reinforcing rib 62 that constitute the partition 6 and are located on both sides of the diaphragm 2 respectively form a continuous integral structure; the partition 6 can also be a plurality of discretely arranged partition strips 6a, that is, the first reinforcing rib 61 or / and the second reinforcing rib 62 that constitute the partition 6 and are located on both sides of the diaphragm 2 respectively are discretely arranged.

[0145] The first reinforcing rib 61 and / or the second reinforcing rib 62 are integrally formed or fixedly connected to the diaphragm 2. The materials of the first reinforcing rib 61 and the second reinforcing rib 62 can be the same or different. For example, when the diaphragm 2 is made of polyimide film, the materials of the first reinforcing rib 61 and the second reinforcing rib 62 can be polyimide film material, or the materials of the first reinforcing rib 61 and the second reinforcing rib 62 can be SUS304 stainless steel, or the material of the first reinforcing rib 61 can be brass and the material of the second reinforcing rib 62 can be SUS304 stainless steel. Here, the materials of the first reinforcing rib 61 and the second reinforcing rib 62 are not limited, but the principle is to ensure that the area of ​​the diaphragm 2 opposite to the partition 6 has a greater ability to resist elastic deformation when subjected to force than the area of ​​the diaphragm 2 other than the area opposite to the partition 6 when subjected to force.

[0146] In addition, the first reinforcing rib 61 and / or the second reinforcing rib 62 constituting the partition 6 can be of equal or variable cross-section, and there is no limitation here.

[0147] Example 3

[0148] like Figures 25-33 As shown, a fluid control device includes the fluid generator described in Embodiments 1 and 2, and further includes a counter plate 5. The counter plate 5 is spaced apart on the side of the diaphragm 2 away from the piezoelectric actuator 1, forming a cavity 7 between the counter plate 5 and the diaphragm 2. A second hole 51 is correspondingly provided on the counter plate 5 at a position opposite to the first hole 221. Figure 25 As shown.

[0149] Similarly, the cross-sectional shape of the second hole 51 can be circular, square, rectangular, elliptical, or other shapes, without limitation. In this embodiment, the cross-sectional shape of the second hole 51 is circular, but this does not constitute a limitation of the present invention. The flow area of ​​the second hole 51 is larger than the flow area of ​​the corresponding first hole 221. Preferably, the flow area of ​​the second hole 51 is 1.1 to 10 times the flow area of ​​the corresponding first hole 221, so that the airflow ejected from the first hole 221 can be contained by the second hole 51, avoiding flow loss caused by wall reflection.

[0150] Let's take any one of the second holes 51 as an example for further explanation:

[0151] Alternatively, the second hole 51 may have multiple spoke ribs 511 extending from the hole wall toward the center. These spoke ribs 511 are spaced apart circumferentially along the second hole 51 to form a perforated structure. Fluid passages 512 are formed between adjacent spoke ribs 511, allowing fluid to flow. The flow area of ​​the fluid passages 512 is smaller than the flow area of ​​the second hole 51. Figures 27-28 As shown. It should be noted that the shape, number, and arrangement of the spoke ribs 511 are not limited here. The hollow structure formed by the spoke ribs 511 helps reduce the velocity difference between the center and edge of the airflow as it passes through the second hole 51, resulting in a gentler velocity gradient distribution from the center to the edge, effectively suppressing outflow noise. Furthermore, the spoke ribs 511 can converge in the central region of the second hole 51 to form a connecting portion 513, such as... Figure 29 As shown. Furthermore, the connecting portion 513 is provided with a flow hole 514 penetrating the connecting portion 513, such as... Figure 30 As shown.

[0152] In order to minimize the impact of the spoke ribs 511 on the output performance of the fluid control device, preferably, in the structure with spoke ribs 511, the flow area of ​​the hollow structure is 50%-90% of the flow area of ​​the second hole 51, and the flow area of ​​the fluid inlet and the flow area of ​​the flow hole 514 in the same second hole 51 are both part of the flow area of ​​the hollow structure.

[0153] Alternatively, the second orifice may have a mesh structure 81 extending from the orifice wall toward the center, allowing fluid to flow through. The mesh structure 81 includes multiple through-holes 811, and the flow area of ​​the mesh 811 is smaller than the flow area of ​​the second orifice 51. Figures 31-32 As shown.

[0154] Similarly, in order to minimize the impact of the spoke ribs 511 on the output performance of the fluid control device, preferably, in the structure with the mesh structure 81, the area opposite to the second hole 51 is the direct flow passage area, and the flow passage area of ​​the direct flow passage area is 50%-90% of the flow passage area of ​​the second hole 51.

[0155] When the material constituting the opposing plate 5 is a metal material, the spoke rib 511 or the mesh structure can be formed by half-etching the area of ​​the opposing plate 5 opposite to the second hole 51. When the material constituting the opposing plate 5 is a polymer material, the opposing plate 5 can be formed by stacking multiple layers of polymer film. The spoke rib 511 or the mesh structure 81 can be provided in at least one layer of the multiple layers of film constituting the opposing plate 5, but is not limited thereto.

[0156] To simplify the manufacturing process, it is ideal that the aforementioned spoke ribs 511 and mesh structure 81 are arranged independently from the opposing plate 5. For example, the fluid control device also includes a flow plate 8, which is disposed between the diaphragm 2 and the opposing plate 5, or / and on the opposing plate 5. At least the area of ​​the flow plate 8 opposite to the second hole 51 has a mesh structure 81 that allows fluid to flow through. The mesh structure 81 includes a plurality of mesh holes 811 penetrating the flow plate 8, and the flow area of ​​the mesh holes 811 is smaller than the flow area of ​​the second hole 51. By providing the flow plate 8, it is beneficial to reduce the velocity difference between the center and the edge of the airflow when it passes through the second hole 51, and the velocity gradient distribution from the center to the edge of the airflow becomes gentler, which can effectively suppress outflow noise. Ideally, the flow plate 8 is joined to the surface of the opposing plate 5 facing the diaphragm 2, such as... Figure 26 As shown, this is to rectify and reduce noise in the airflow before it enters the second orifice 51.

[0157] Similarly, in order to minimize the impact of the mesh structure 81 of the flow plate 8 on the output performance of the fluid control device, preferably, the area of ​​the mesh structure 81 opposite to the second hole 51 is a direct flow passage area, and the flow passage area of ​​the direct flow passage area is 50%-90% of the flow passage area of ​​the second hole 51.

[0158] It also includes an elastic support structure 9, which elastically supports the fluid generator to the opposing plate 5 in a substantially unrestrained manner. For example, as Figure 33 As shown, the elastic support structure 9 may include a frame portion 91 disposed on the outer periphery of the fluid generator for fixed connection with the opposing plate 5. A plurality of elastic arms 92 with elasticity are provided between the frame portion 91 and the fluid generator. One end of the elastic arm 92 is connected to the frame portion 91 and the other end is connected to the fluid generator, thereby realizing the elastic support of the fluid generator on the opposing plate 5 in a substantially unrestrained manner. For example, the other end of the elastic arm 92 may be connected to the outer peripheral wall of the piezoelectric actuator 1.

[0159] The above description, based on the preferred embodiments of the present invention, provides inspiration. Those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification but must be determined according to the claims.

Claims

1. A fluid generator, characterized in that: It includes a piezoelectric actuator (1), a spacer (3) and a diaphragm (2), the diaphragm (2) being joined to the piezoelectric actuator (1) through the spacer (3), and the piezoelectric actuator (1), the spacer (3) and the diaphragm (2) forming a chamber (4). The diaphragm (2) has a fixing part (2-1) and a vibrating part (2-2). The fixing part (2-1) is fixedly connected to one end of the spacer (3) away from the piezoelectric actuator (1). The fixing part (2-1) is connected to the vibrating part (2-2). The vibrating part (2-2) is formed as one end wall of the chamber (4) in the thickness direction of the piezoelectric actuator (1). When the piezoelectric actuator (1) vibrates under the excitation of an electrical signal, it transmits vibration energy to the diaphragm (2) to cause the diaphragm (2) to vibrate. At least one first hole (221) of the communicating chamber (4) is penetrating the antinode (A) of the diaphragm (2) or the region adjacent to the antinode (A). The antinode (A) of the diaphragm (2) vibration and the adjacent area of ​​the antinode (A) protrude from the surface of the diaphragm (2) to form a protrusion (22). The protrusion (22) is a recessed part (21) formed by a depression on one side surface of the diaphragm (2) and a protrusion (22) protruding on the other side surface of the diaphragm (2). The first hole (221) penetrates the protrusion (22). The convex portion (22) is formed by the shaping of the antinode position (A) of the diaphragm (2) and the adjacent area of ​​the antinode position (A).

2. The fluid generator according to claim 1, characterized in that: When the piezoelectric actuator (1) vibrates under the excitation of an electrical signal, it transmits vibration energy to the diaphragm (2) to cause the diaphragm (2) to vibrate with at least two antinodes. At least one first hole (221) of the communicating chamber (4) is passed through at least one antinode position (A) of the diaphragm (2) or in the adjacent region of the antinode position (A).

3. The fluid generator according to claim 2, characterized in that: At least one first hole (221) of the communicating chamber (4) is passed through at least two antinode positions (A) of the diaphragm (2) or in the adjacent region of the antinode position (A).

4. The fluid generator according to claim 2, characterized in that: At least one first hole (221) of the communicating chamber (4) is passed through each antinode (A) of the diaphragm (2) or the adjacent region of the antinode (A).

5. The fluid generator according to any one of claims 1-4, characterized in that: A partition (6) is also provided on the diaphragm (2) around the outer periphery of the protrusion (22) or between two adjacent protrusions (22). The area outside the partition (6) of the vibration part (2-2) is the vibration zone. The region of the diaphragm (2) opposite to the partition (6) has a greater ability to resist elastic deformation when subjected to force than the region of the diaphragm (2) opposite to the vibration zone.

6. The fluid generator according to claim 5, characterized in that: The partition (6) protrudes from the surface of the vibrating part (2-2) of the diaphragm (2).

7. The fluid generator according to claim 6, characterized in that: The diaphragm (2) is formed by shaping a local area to form the partition (6). The partition (6) is a rib (64) provided on the vibrating part (2-2) and protruding from the surface of the diaphragm (2). The rib (64) protrudes from the surface of the diaphragm (2) and is arranged around the outer periphery of the protrusion (22) or between two adjacent protrusions (22).

8. The fluid generator according to claim 6, characterized in that: The partition (6) is formed by providing a reinforcing rib (63) in a local area on at least one side surface of the diaphragm (2). The reinforcing rib (63) has a main body section (631) provided on the vibrating part (2-2). The main body section (631) protrudes from the surface of the diaphragm (2) and is arranged around the outer periphery of the protrusion (22) or between two adjacent protrusions (22).

9. The fluid generator according to claim 8, characterized in that: The reinforcing rib (63) also has an extension section (632) extending from the main body section (631) to the fixing part (2-1) of the diaphragm (2), the extension section (632) protruding from the surface of the diaphragm (2); The extension segment (632) is fixedly clamped between the fixing part (2-1) of the diaphragm (2) and the spacer part (3), or / and the extension segment (632) is fixedly connected to the side of the fixing part (2-1) of the diaphragm (2) opposite to the spacer part (3).

10. The fluid generator according to claim 1, characterized in that: The spacer (3) is an annular structure. The inner peripheral wall of the spacer (3) and the piezoelectric actuator (1) and the diaphragm (2) form a cavity (4). The end of the spacer (3) away from the piezoelectric actuator (1) is wholly or partially connected to the diaphragm (2) on an annular path around the outer periphery of the cavity (4). Alternatively, the spacer (3) has a plurality of spacers (32), and the spacers (32) of the same spacer (3) are all joined to the same side surface of the piezoelectric actuator (1). The plurality of spacers (32) are distributed at intervals along a ring path around the chamber (4) to form the chamber (4) together with the piezoelectric actuator (1) and the diaphragm (2). The end of the spacer (32) facing away from the piezoelectric actuator (1) is wholly or partially joined to the diaphragm (2).

11. The fluid generator according to claim 1, characterized in that: The diaphragm (2) is made of polymer material or a composite material of polymer material and metal material.

12. The fluid generator according to claim 1, characterized in that: The piezoelectric actuator (1) has a vibrating plate (11) on one or both sides of the vibrating plate (11) with at least one piezoelectric sheet (12) attached thereto, and the piezoelectric sheet (12) is attached to the vibrating plate (11) to form the piezoelectric actuator (1).

13. A fluid control device, characterized in that: Includes the fluid generator described in any one of 1-12 above.

14. The fluid control device according to claim 13, characterized in that: It also includes a counter plate (5), which is spaced apart on the side of the diaphragm (2) away from the piezoelectric actuator (1), so that a cavity (7) is formed between the counter plate (5) and the diaphragm (2), and a second hole (51) is provided on the counter plate (5) at the part opposite to the first hole (221).

15. The fluid control device according to claim 14, characterized in that: The flow area of ​​the second hole (51) is 1.1 to 10 times that of the flow area of ​​the corresponding first hole (221).

16. The fluid control device according to claim 14, characterized in that: The second hole (51) is provided with a plurality of spoke ribs (511) extending from the hole wall toward the center. The plurality of spoke ribs (511) are distributed circumferentially along the second hole (51) to form a hollow structure. A fluid passage (512) is formed between adjacent spoke ribs (511) to allow fluid to flow. The flow area of ​​the fluid passage (512) is smaller than the flow area of ​​the second hole (51).

17. The fluid control device according to claim 16, characterized in that: The spokes (511) converge in the central region of the second hole (51) to form a connecting part (513).

18. The fluid control device according to claim 17, characterized in that: The connecting part (513) is provided with a flow hole (514) that passes through the connecting part (513).

19. The fluid control device according to claim 16, characterized in that: The flow area of ​​the hollow structure is 50%-90% of the flow area of ​​the second hole (51).

20. The fluid control device according to claim 14, characterized in that: The second hole (51) is provided with a mesh structure (81) extending from the hole wall toward the center to allow fluid to flow. The mesh structure (81) includes a plurality of through mesh holes (811), and the flow area of ​​the mesh holes (811) is smaller than the flow area of ​​the second hole (51).

21. The fluid control device according to claim 20, characterized in that: The area opposite to the mesh structure (81) and the second hole (51) is the direct flow passage area, and the flow passage area of ​​the direct flow passage area is 50%-90% of the flow passage area of ​​the second hole (51).

22. The fluid control device according to claim 14, characterized in that: It also includes the flow plate (8); The flow plate (8) is disposed between the diaphragm (2) and the opposing plate (5) or / and on the opposing plate (5). At least the area of ​​the flow plate (8) opposite to the second hole (51) is a mesh structure (81) that allows fluid to flow. The mesh structure (81) includes a plurality of mesh holes (811) penetrating the flow plate (8). The flow area of ​​the mesh holes (811) is smaller than the flow area of ​​the second hole (51).

23. The fluid control device according to claim 22, characterized in that: The flow plate (8) is engaged with the side surface of the opposing plate (5) facing the diaphragm (2).

24. The fluid control device according to claim 22, characterized in that: The area opposite to the mesh structure (81) and the second hole (51) is the direct flow passage area, and the flow passage area of ​​the direct flow passage area is 50%-90% of the flow passage area of ​​the second hole (51).

25. The fluid control device according to claim 14, characterized in that: It also includes an elastic support structure (9), through which the fluid generator is elastically supported on the opposing plate (5).

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