Laminate

Abstract

The present application addresses the problem of providing a laminate having excellent durability. The laminate according to the present invention has a base material, an inorganic layer laminated on the base material, and a surface treatment layer in contact with the inorganic layer, the inorganic layer contains SiOxNy, x is 0.01-8 (inclusive), y is 0.01-8 (inclusive), and the surface treatment layer is formed using a surface treatment agent containing a fluorine-containing silane compound.

Description

Technical Field

[0001] The present invention relates to a laminate. Background Art

[0002] It is known that certain types of fluorine-containing compounds can provide excellent water repellency, oil repellency, stain resistance, etc. when used for surface treatment of substrates. A layer obtained from a surface treatment composition containing a fluorine-containing compound can be applied as a so-called functional thin film to various substrates such as glass, plastics, fibers, building materials, etc. Patent Document 1 describes a surface treatment agent containing a perfluoro(poly)ether group-containing silane compound.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: International Publication No. 2014 / 069592 Summary of the Invention

[0006] Technical Problem to be Solved by the Invention

[0007] An object of the present invention is to provide a laminate having good durability.

[0008] Technical Means for Solving the Technical Problem

[0009] The present invention includes the following aspects.

[0010] [1] A laminate having a substrate, an inorganic layer laminated on the substrate, and a surface treatment layer in contact with the inorganic layer,

[0011] wherein the inorganic layer contains SiO x N y ,

[0012] x is 0.01 or more and 8 or less,

[0013] y is 0.01 or more and 8 or less,

[0014] and the surface treatment layer is formed using a surface treatment agent containing a fluorosilane compound.

[0015] [2] The laminate according to [1], wherein the ratio y / x of y to x is 0.01 to 1.

[0016] [3] The laminate according to [1] or [2], wherein the thickness of the inorganic layer is 1 nm or more and 35 nm or less.

[0017] [4] The laminate according to any one of [1] to [3], wherein the refractive index of the inorganic layer for light with a wavelength of 550 nm is 1.3 or more and 2.0 or less.

[0018] [5] The laminate according to any one of [1] to [3], wherein,

[0019] The fluorosilane compound contains at least one fluorosilane compound represented by the following formula (1) or (2).

[0020] R F1 α -X A -R Si β (1)

[0021] R Si γ -X A -R F2 -X A -R Si γ (2)

[0022] [In the formula,

[0023] R F1 Each occurrence is independently Rf 1 -R F -O q - or a fluoroalkyl group;

[0024] R F2 is -Rf 2 p -R F -O q - or a fluoroalkylene group;

[0025] Rf 1 Each occurrence is independently a C alkyl group that may be substituted with one or more fluorine atoms 1-16 alkyl group;

[0026] Rf 2 is a C alkylene group that may be substituted with one or more fluorine atoms 1-6 alkylene group;

[0027] R F Each occurrence is independently a divalent fluoropolyether group;

[0028] p is 0 or 1;

[0029] q is independently 0 or 1 at each occurrence;

[0030] R Si Each occurrence is independently a monovalent group containing a Si atom bonded to a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a monovalent organic group;

[0031] At least one R Siis a monovalent group containing a Si atom bonded with a hydroxyl group or a hydrolyzable group;

[0032] X A are each independently a single bond or a divalent to decavalent organic group;

[0033] α is an integer from 1 to 9;

[0034] β is an integer from 1 to 9;

[0035] γ are each independently an integer from 1 to 9.]

[0036] [6] A method for manufacturing a laminate, comprising:

[0037] a step of forming an inorganic layer on a substrate by a reactive sputtering method; and

[0038] a step of applying a surface treatment agent on the surface of the inorganic layer to form a surface treatment layer,

[0039] the inorganic layer contains SiO x N y ,

[0040] x is 0.01 or more and 8 or less,

[0041] y is 0.01 or more and 8 or less,

[0042] the surface treatment layer contains a fluorosilane compound.

[0043] Advantages of the Invention

[0044] The laminate of the present invention has good durability. Detailed Embodiments

[0045] The laminate of the present invention has a substrate, an inorganic layer laminated on the substrate, and a surface treatment layer in contact with the inorganic layer. The inorganic layer contains SiO x N y , and the surface treatment layer is formed using a surface treatment agent containing a fluorosilane compound.

[0046] x is 0.01 or more and 8 or less, and y is 0.01 or more and 8 or less.

[0047] The present invention can provide a laminate with good durability, preferably a laminate with good resistance to artificial sweat, abrasion resistance with steel wool, and abrasion resistance with ethanol rubber.

[0048] (Substrate)

[0049] As the substrate that can be used in the present invention, it can be composed of, for example, glass, resin (natural or synthetic resin, for example, it can be common plastic materials), OCA (Optical Clear Adhesive), polarizer metal, ceramic, semiconductor (such as silicon, germanium, etc.), electronic device, fiber (fabric, non-woven fabric, etc.), fur, leather, wood, porcelain, stone, etc., building components, sanitary products, and any appropriate materials.

[0050] In a preferred embodiment, the above-mentioned substrate is glass, resin, polarizer, OCA (Optical Clear Adhesive) or metal, preferably glass, resin, polarizer or OCA (Optical Clear Adhesive).

[0051] As the above-mentioned glass, sapphire glass, soda-lime glass, alkali-silicate-aluminate glass, borosilicate glass, non-alkali glass, crystal glass, quartz glass are preferred, and chemically strengthened soda-lime glass, chemically strengthened alkali-silicate-aluminate glass and chemically combined borosilicate glass are particularly preferred.

[0052] For example, when the laminate to be manufactured is an optical component, the material constituting the surface of the substrate can be a material for optical components, such as glass or transparent plastic. In addition, when the laminate to be manufactured is an optical component, certain layers (or films), such as a hard coat or an antireflection layer, can be formed on the surface (outermost layer) of the substrate. The antireflection layer can use either a single-layer antireflection layer or a multilayer antireflection layer. Examples of inorganic substances that can be used as the antireflection layer include SiO2, SiO, ZrO2, TiO2, TiO, Ti2O3, Ti2O5, Al2O3, Ta2O5, Ta3O5, Nb2O5, HfO2, Si3N4, CeO2, MgO, Y2O3, SnO2, MgF2, WO3, etc. These inorganic substances can be used alone or in combination of two or more of these (for example, in the form of a mixture). When a multilayer antireflection layer is formed, it is preferred that the outermost layer uses SiO2 and / or SiO. When the laminate to be manufactured is an optical glass member for a touch panel, a part of the surface of the substrate (glass) can have a transparent electrode, a thin film using, for example, indium tin oxide (ITO) or indium zinc oxide. In addition, regarding the substrate, it can have an insulating layer, an adhesive layer, a protective layer, a decorative frame layer (I-CON), a fogging film layer, a hard coating film layer, a polarizing film, a retardation film, and a liquid crystal display module, etc., according to its specific form.

[0053] The shape of the above-mentioned base material is not particularly limited and may be, for example, plate-shaped, film, or other forms. In addition, the surface area of the base material on which the surface treatment layer should be formed may be at least a part of the surface of the base material, and can be appropriately determined according to the use and specific style of the laminate to be manufactured, etc.

[0054] (Inorganic layer)

[0055] The above-mentioned inorganic layer is laminated on the above-mentioned base material. The inorganic layer may or may not be in contact with the base material. In one mode, the inorganic layer is in contact with the base material. In another mode, there is another layer between the base material and the inorganic layer.

[0056] The above-mentioned inorganic layer contains SiO x N y . In the present invention, SiO x N y means an amorphous material containing Si, O, and N. It is considered that SiO x N y contains SiO2 and SiN, but is not limited thereto.

[0057] In the above-mentioned SiO x N y , x can be 0.01 or more and 8 or less, preferably 0.1 or more and 6 or less, more preferably 0.5 or more and 4 or less. In addition, in the above-mentioned SiO x N y , y can be 0.01 or more and 8 or less, preferably 0.01 or more and 5 or less, more preferably 0.01 or more and 2 or less.

[0058] In the above-mentioned SiO x N y , the ratio of y to x, y / x, is preferably 0.01 or more and 1 or less, more preferably 0.01 or more and 0.8 or less.

[0059] The above-mentioned x and y can be measured by X-ray photoelectron spectroscopy (XPS).

[0060] The proportion of SiO x N y contained in the above-mentioned inorganic layer is preferably 80% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, further preferably 95% by mass or more and 100% by mass or less.

[0061] The refractive index of the inorganic layer for light with a wavelength of 550 nm is preferably 1.2 or more and 2.0 or less, more preferably 1.3 or more and 2.0 or less, further preferably 1.35 or more and 2.0 or less, still more preferably 1.35 or more and 1.9 or less, and further preferably 1.35 or more and 1.8 or less. The refractive index of the above-mentioned inorganic layer can be measured using an ellipsometer.

[0062] The thickness of the above-mentioned inorganic layer is preferably 1 nm or more and 35 nm or less, more preferably 3 nm or more and 20 nm or less, and further preferably 5 nm or more and 15 nm or less. The thickness of the above-mentioned inorganic layer can be measured by a laser microscope.

[0063] The above-mentioned inorganic layer can be formed by reactive sputtering. Regarding the reactive sputtering method, a method of forming a film by reacting a metal target with oxygen and / or nitrogen is representative. In one mode, an inorganic layer can be formed by reacting a silicon target with oxygen and nitrogen to form a film on the above-mentioned substrate. When forming the film, an inert gas such as argon can coexist.

[0064] In one mode, an inorganic layer can be formed by sputtering a silicon target while flowing argon, oxygen, and nitrogen.

[0065] The discharge power during the above-mentioned sputtering is preferably 3 kW or more and 10 kW or less, more preferably 4 kW or more and 8 kW or less, and further preferably 5 kW or more and 7 kW or less.

[0066] The flow rate of the above-mentioned argon is preferably 100 sccm or more and 400 sccm or less, more preferably 150 sccm or more and 350 sccm or less, and further preferably 150 sccm or more and 200 sccm or less.

[0067] The flow rate of oxygen is preferably more than 0 sccm and 300 sccm or less, more preferably 10 sccm or more and 200 sccm or less, and further preferably 10 sccm or more and 150 sccm or less.

[0068] The flow rate of nitrogen is preferably more than 0 sccm and 300 sccm or less, more preferably 10 sccm or more and 200 sccm or less, and further preferably 10 sccm or more and 150 sccm or less.

[0069] The above-mentioned oxygen flow rate Q O2 and the nitrogen flow rate Q N2 The sum of which relative to the above-mentioned argon flow rate Q Ar The ratio (Q O2 +Q N2 ) / Q Ar is preferably 0.01 or more and 5 or less, more preferably 0.1 or more and 3 or less, and further preferably 0.25 or more and 2 or less.

[0070] The pressure during the above-mentioned sputtering is preferably 1×10 －1 Torr or less, more preferably 7×10 －2 Torr or less, and further preferably 5×10 －2 Torr or less. For example, it can be 1×1 －2 Torr or more.

[0071] The sputtering time is preferably 60 seconds or more and 1,200 seconds or less, more preferably 120 seconds or more and 900 seconds or less, and still more preferably 240 seconds or more and 600 seconds or less.

[0072] Before forming the inorganic layer on the substrate, the substrate can be cleaned.

[0073] (Surface treatment layer)

[0074] The above surface treatment layer is in contact with the above inorganic layer. The above surface treatment layer can be formed from a surface treatment agent containing a fluorosilane compound.

[0075] The above fluorosilane compound is a compound containing at least a fluorine group and a silane, and is preferably a fluorosilane compound containing at least one of the following formulas (1) and (2).

[0076] RF 1 α -X A -R Si β (1)

[0077] R Si γ -X A -R F2 -X A -R Si γ (2)

[0078] [In the formula,

[0079] R F1 is independently at each occurrence Rf 1 -R F -O q -;

[0080] R F2 is -Rf 2 p -R F -O q -;

[0081] Rf 1 is independently at each occurrence a C 1-16 alkyl group that can be substituted with one or more fluorine atoms;

[0082] Rf 2 is a C 1-6 alkylene group that can be substituted with one or more fluorine atoms;

[0083] R F is independently at each occurrence a divalent fluorinated polyether group;

[0084] p is 0 or 1;

[0085] q is independently 0 or 1 each time it appears;

[0086] R Si is independently a monovalent group containing a Si atom bonded to a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a monovalent organic group each time it appears;

[0087] At least one R Si is a monovalent group containing a Si atom bonded to a hydroxyl group or a hydrolyzable group;

[0088] X A are independently a single bond or a divalent to decavalent organic group;

[0089] α is an integer from 1 to 9;

[0090] β is an integer from 1 to 9;

[0091] γ is independently an integer from 1 to 9.

[0092] As used in this specification, the "hydrolyzable group" means a group capable of undergoing a hydrolysis reaction, that is, a group capable of detaching from the main skeleton of a compound by a hydrolysis reaction. Examples of the hydrolyzable group include -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO, a halogen (in these formulas, R j represents a substituted or unsubstituted C 1-4 alkyl), etc., and preferably -OR j (i.e., an alkoxy group). Examples of R j include unsubstituted alkyls such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyls such as chloromethyl. Among these, alkyls, especially unsubstituted alkyls, are preferred, and methyl or ethyl is more preferred. The hydroxyl group in the hydrolyzable silyl group is not particularly limited and may be formed by hydrolysis of the hydrolyzable group.

[0093] As used in this specification, an "organic group" refers to a monovalent group containing carbon. As the organic group, unless otherwise specified, it may be a hydrocarbon group or a derivative thereof. A derivative of a hydrocarbon group refers to a group having one or more N, O, S, Si, amide group, sulfonyl group, siloxanyl group, carbonyl group, carbonyloxy group, etc. at the end or in the molecular chain of the hydrocarbon group. Among them, when only denoted as "organic group", it means a monovalent organic group. In addition, a "divalent organic group" refers to a divalent group containing carbon. As such a divalent organic group, there is no particular limitation, and examples thereof include a divalent group obtained by further removing one hydrogen atom from an organic group.

[0094] As used in this specification, a "hydrocarbon group" is a group containing carbon and hydrogen, and refers to a group obtained by removing one hydrogen atom from a hydrocarbon. As such a hydrocarbon group, there is no particular limitation, and examples thereof include a C 1－20 hydrocarbon group which may be substituted with one or more substituents, such as an aliphatic hydrocarbon group, an aromatic hydrocarbon group, etc. The above-mentioned "aliphatic hydrocarbon group" may be any of linear, branched or cyclic, and may be either saturated or unsaturated. In addition, the hydrocarbon group may also contain one or more ring structures.

[0095] As used in this specification, as the substituent of the "hydrocarbon group", there is no particular limitation, and examples thereof include a group selected from a halogen atom, a C 1－6 alkyl group which may be substituted with one or more halogen atoms, a C 2－6 alkenyl group, a C 2－6 alkynyl group, a C 3－10 cycloalkyl group, a C 3－10 unsaturated cycloalkyl group, a 5- to 10-membered heterocyclic group, a 5- to 10-membered unsaturated heterocyclic group, a C 6－10 aryl group and a 5- to 10-membered heteroaryl group.

[0096] As used in this specification, unless otherwise specified, as the "alkyl group", for example, a C 1－12 (preferably C 1－6 , more preferably C 1－3 , still more preferably C1) alkyl group (such as methyl, ethyl, propyl, isopropyl). The "alkyl group" may be linear or branched, preferably linear. And the "alkyl group" may contain a functional group.

[0097] In the above formula (1), R F1 is independently Rf 1 -R F -O q - or a fluoroalkyl group each time it appears. In one embodiment, R F1 is preferably Rf 1 -R F -O q-, in another embodiment, R F1 is preferably a fluoroalkyl group. R F1 is Rf 1 -R F -O q -. In this case, the compound represented by formula (1) contains a fluoropolyether group and is equivalent to a fluoropolyether group-containing silane compound.

[0098] In the above formula (2), R F2 is -Rf 2 p -R F -O q - or a fluoroalkylene group. In one embodiment, R F2 is preferably Rf 2 p -R F -O q -. In another embodiment, R F2 is preferably a fluoroalkylene group. R F2 is Rf 2 p -R F -O q -. In this case, the compound represented by formula (2) contains a fluoropolyether group and is equivalent to a fluoropolyether group-containing silane compound.

[0099] In the above formula, Rf 1 is, each time it appears, independently a C 1－16 alkyl group which may be substituted with one or more fluorine atoms.

[0100] The "C 1－16 alkyl group" in the above C 1－16 alkyl group which may be substituted with one or more fluorine atoms may be linear or branched, preferably a linear or branched C 1－6 alkyl group, particularly a C 1－3 alkyl group, more preferably a linear C 1－6 alkyl group, particularly a C 1－3 alkyl group.

[0101] The above Rf 1 is preferably a C 1－16 alkyl group substituted with one or more fluorine atoms, more preferably a CF2H-C 1－15 perfluoroalkylene group, still more preferably a C 1－16 perfluoroalkyl group.

[0102] The above C 1－16 perfluoroalkyl group may be linear or branched, preferably a linear or branched C 1－6 perfluoroalkyl group, particularly a C 1－3 perfluoroalkyl group, more preferably a linear C1－6 Perfluoroalkyl, especially C 1－3 Perfluoroalkyl, specifically -CF3, -CF2CF3 or -CF2CF2CF3.

[0103] In the above formula, Rf 2 is a C 1－6 alkylene group which may be substituted with one or more fluorine atoms.

[0104] The above-mentioned C 1－6 alkylene group which may be substituted with one or more fluorine atoms, the "C 1－6 alkylene" in it may be straight-chain or branched-chain, preferably straight-chain or branched-chain C 1－3 alkylene, more preferably straight-chain C 1－3 alkylene.

[0105] The above Rf 2 is preferably a C 1－6 alkylene group substituted with one or more fluorine atoms, more preferably C 1－6 perfluoroalkylene, further preferably C 1－3 perfluoroalkylene.

[0106] The above C 1－6 perfluoroalkylene may be straight-chain or branched-chain, preferably straight-chain or branched-chain C 1－3 perfluoroalkylene, more preferably straight-chain C 1－3 perfluoroalkylene, specifically -CF2-, -CF2CF2- or -CF2CF2CF2-.

[0107] In the above formula, p is 0 or 1. In one embodiment, p is 0. In another embodiment, p is 1.

[0108] In the above formula, q is independently 0 or 1 each time it appears. In one embodiment, q is 0. In another embodiment, q is 1.

[0109] In the above formulas (1) and (2), R F is independently a divalent fluorinated polyether group each time it appears.

[0110] R F is preferably a group represented by the following formula:

[0111] -(OC h1 R Fa 2h1 ) h3 -(OC h2 R Fa 2h2－2 ) h4 -.

[0112] [In the formula,

[0113] R Fa is, each time it appears, independently of one another, a hydrogen atom, a fluorine atom or a chlorine atom,

[0114] h1 is an integer from 1 to 6,

[0115] h2 is an integer from 4 to 8,

[0116] h3 is an integer of 0 or more,

[0117] h4 is an integer of 0 or more,

[0118] wherein, the sum of h3 and h4 is 1 or more, preferably 2 or more, more preferably 5 or more, and the order of presence in the formula of each repeating unit in which h3 and h4 are marked and enclosed in parentheses is arbitrary.]

[0119] In one embodiment, R F may be linear or branched. R F is preferably a group represented by the following formula:

[0120] -(OC6F 12 ) a -(OC5F 10 ) b -(OC4F8) c -(OC3R Fa ) d -(OC2F4) e -(OCF2) f -.

[0121] [In the formula,

[0122] R Fa is, each time it appears, independently of one another, a hydrogen atom, a fluorine atom or a chlorine atom,

[0123] a, b, c, d, e and f are each independently an integer from 0 to 200, and the sum of a, b, c, d, e and f is 1 or more. The order of presence in the formula of each repeating unit in which a, b, c, d, e or f is marked and enclosed in parentheses is arbitrary. However, when all of the R Fa are hydrogen atoms or chlorine atoms, at least one of a, b, c, e and f is 1 or more.]

[0124] R Fa is preferably a hydrogen atom or a fluorine atom, more preferably a fluorine atom. However, when all of the R Fa are hydrogen atoms or chlorine atoms, at least one of a, b, c, e and f is 1 or more.

[0125] a, b, c, d, e and f are preferably each independently an integer from 0 to 100.

[0126] The sum of a, b, c, d, e and f is preferably 5 or more, more preferably 10 or more, and may be, for example, 15 or more or 20 or more. The sum of a, b, c, d, e and f is preferably 200 or less, more preferably 100 or less, further preferably 60 or less, and may be, for example, 50 or less or 30 or less.

[0127] These repeating units may be linear, branched, or may include a ring structure. For example, -(OC6F 12 )- may be -(OCF2CF2CF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2CF2CF2)-, -(OCF2CF(CF3)CF2CF2CF2)-, -(OCF2CF2CF(CF3)CF2CF2)-, -(OCF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF2CF(CF3))-, etc. -(OC5F 10 )- may be -(OCF2CF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2CF2)-, -(OCF2CF(CF3)CF2CF2)-, -(OCF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF(CF3))-, etc. -(OC4F8)- may be any one of -(OCF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2)-, -(OCF2CF(CF3)CF2)-, -(OCF2CF2CF(CF3))-, -(OC(CF3)2CF2)-, -(OCF2C(CF3)2)-, -(OCF(CF3)CF(CF3))-, -(OCF(C2F5)CF2)- and -(OCF2CF(C2F5))-. -(OC3F6)-(i.e., R in the above formula Fa is a fluorine atom) may be any one of -(OCF2CF2CF2)-, -(OCF(CF3)CF2)- and -(OCF2CF(CF3))-. -(OC2F4)- may be any one of -(OCF2CF2)- and -(OCF(CF3))-.

[0128] In one embodiment, the above repeating unit is linear. By making the above repeating unit linear, the surface slidability, wear durability, etc. of the surface treatment layer can be improved.

[0129] In one embodiment, the above repeating unit is branched. By making the above repeating unit branched, the dynamic friction coefficient of the surface treatment layer can be increased.

[0130] In one embodiment, R F may include a ring structure.

[0131] The above ring structure can be the following three-membered ring, four-membered ring, five-membered ring or six-membered ring.

[0132]

[0133] [In the formula, * represents the bonding position.]

[0134] The above ring structure is preferably a four-membered ring, five-membered ring or six-membered ring, and more preferably a four-membered ring or six-membered ring.

[0135] The repeating unit having a ring structure is preferably the following unit.

[0136]

[0137] [In the formula, * represents the bonding position.]

[0138] In one mode, the above repeating unit is linear. By making the above repeating unit linear, the surface slidability, wear durability, etc. of the surface treatment layer can be improved.

[0139] In one mode, the above repeating unit is branched. By making the above repeating unit branched, the dynamic friction coefficient of the surface treatment layer can be increased.

[0140] In one mode, R F Each time it appears, it is independently a group represented by any one of the following formulas (f1) to (f6).

[0141] -(OC3F6) d -(OC2F4) e -(f1)

[0142] [In the formula, d is an integer from 1 to 200, and e is 0 or 1.]

[0143] -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f -(f2)

[0144] [In the formula, c and d are independently integers of 0 or more and 30 or less, e and f are independently integers of 1 or more and 200 or less,

[0145] The sum of c, d, e and f is 2 or more,

[0146] The order of existence in the formula of each repeating unit with the subscripts c, d, e or f enclosed in parentheses is arbitrary.]

[0147] -(R 6 -R7 ) g -(f3)

[0148] [wherein, R 6 is OCF2 or OC2F4,

[0149] R 7 is a group selected from OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of 2 or 3 groups independently selected from these groups,

[0150] and g is an integer from 2 to 100.]

[0151] -(R 6 -R 7 ) g -R r -(R 7′ -R 6′ ) g′ -(f4)

[0152] [wherein, R 6 is OCF2 or OC2F4,

[0153] R 7 is a group selected from OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of 2 or 3 groups independently selected from these groups,

[0154] R 6′ is OCF2 or OC2F4,

[0155] R 7′ is a group selected from OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of 2 or 3 groups independently selected from these groups,

[0156] g is an integer from 2 to 100,

[0157] g′ is an integer from 2 to 100,

[0158] R r is

[0159]

[0160] (wherein, * represents the bonding position.)]

[0161] -(OC6F 12 )a -(OC5F 10 ) b -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f -(f5)

[0162] [In the formula, e is an integer of 1 or more and 200 or less, a, b, c, d, and f are each independently an integer of 0 or more and 200 or less, and the order of existence of each repeating unit enclosed in parentheses and labeled with a, b, c, d, e, or f in the formula is arbitrary.]

[0163] -(OC6F 12 ) a -(OC5F 10 ) b -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f -(f6)

[0164] [In the formula, f is an integer of 1 or more and 200 or less, a, b, c, d, and e are each independently an integer of 0 or more and 200 or less, and the order of existence of each repeating unit enclosed in parentheses and labeled with a, b, c, d, e, or f in the formula is arbitrary.]

[0165] In the above formula (f1), d is preferably an integer of 5 to 200, more preferably an integer of 10 to 100, still more preferably an integer of 15 to 50, for example, an integer of 25 to 35. OCF3 in the above formula (f1) is preferably (OCF2CF2CF2), (OCF(CF3)CF2), or (OCF2CF(CF3)), more preferably (OCF2CF2CF2). (OC2F4) in the above formula (f1) is preferably (OCF2CF2) or (OCF(CF3)), more preferably (OCF2CF2). In one embodiment, e is 0. In another embodiment, e is 1.

[0166] In the above formula (f2), e and f are each independently preferably an integer of 5 to 200, more preferably an integer of 10 to 200. In addition, the sum of c, d, e, and f is preferably 5 or more, more preferably 10 or more, for example, it can be 15 or more or 20 or more. In one embodiment, the above formula (f2) is preferably -(OCF2CF2CF2CF2) c -(OCF2CF2CF2) d -(OCF2CF2) e -(OCF2)f - the group shown. In another embodiment, formula (f2) can be -(OC2F4) e -(OCF2) f - the group shown.

[0167] In the above formula (f3), R 6 is preferably OCF2 or OC2F4, more preferably OCF2. In the above (f3), R 7 is preferably a group selected from OC2F4, OC3F6 and OC4F8, or a combination of 2 or 3 groups independently selected from these groups, more preferably a group selected from OC3F6 and OC4F8. As a combination of 2 or 3 groups independently selected from OC2F4, OC3F6 and OC4F8, there is no particular limitation, and examples thereof include -OC2F4OC3F6-, -OC2F4OC4F8-, -OC3F6OC2F4-, -OC3F6OC3F6-, -OC3F6OC4F8-, -OC4F8OC4F8-, -OC4F8OC3F6-, -OC4F8OC2F4-, -OC2F4OC2F4OC3F6-, -OC2F4OC2F4OC4F8-, -OC2F4OC3F6OC2F4-, -OC2F4OC3F6OC3F6-, -OC2F4OC4F8OC2F4-, -OC3F6OC2F4OC2F4-, -OC3F6OC2F4OC3F6-, -OC3F6OC3F6OC2F4- and -OC4F8OC2F4OC2F4-. In the above formula (f3), g is preferably an integer of 3 or more, more preferably an integer of 5 or more. The above g is preferably an integer of 50 or less. In the above formula (f3), OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 can be either straight-chain or branched-chain, preferably straight-chain. In this embodiment, the above formula (f3) is preferably -(OCF2 - OC2F4) g -(OC2F4 - OC3F6) g - or -(OC2F4 - OC4F8) g -.

[0168] In the above formula (f4), the meanings of R 6 , R 7 and g are the same as those described in the above formula (f3), and have the same embodiment. The meanings of R 6′ , R 7′ and g' are the same as the meanings of R 6 , R 7 and g described in the above formula (f3), respectively, and have the same embodiment. R r is preferably

[0169]

[0170] [In the formula, * indicates the bonding position.]

[0171] More preferably,

[0172]

[0173] [In the formula, * indicates the bonding position.]

[0174] In the above formula (f5), e is preferably an integer of 1 or more and 100 or less, more preferably an integer of 5 or more and 100 or less. The sum of a, b, c, d, e and f is preferably 5 or more, more preferably 10 or more, and for example, 10 or more and 100 or less.

[0175] In the above formula (f6), f is preferably an integer of 1 or more and 100 or less, more preferably an integer of 5 or more and 100 or less. The sum of a, b, c, d, e and f is preferably 5 or more, more preferably 10 or more, and for example, 10 or more and 100 or less.

[0176] In one embodiment, the above R F is the group represented by the above formula (f1).

[0177] In one embodiment, the above R F is the group represented by the above formula (f2).

[0178] In one embodiment, the above R F is the group represented by the above formula (f3).

[0179] In one embodiment, the above R F is the group represented by the above formula (f4).

[0180] In one embodiment, the above R F is the group represented by the above formula (f5).

[0181] In one embodiment, the above R F is the group represented by the above formula (f6).

[0182] In one embodiment, from the viewpoint of the slidability of the surface treatment layer, the fluorosilane compound contained in the surface treatment layer preferably contains the structure represented by the above formula (f1), (f2), (f3), (f5) or (f6), more preferably contains the structure represented by the above formula (f1) or (f2), and further preferably contains the structure represented by the above formula (f1).

[0183] In another aspect, the fluorosilane compound contained in the above surface treatment layer preferably contains the structure represented by the above formula (f1), (f2), (f3), (f4), (f5) or (f6), more preferably contains the structure represented by the above formula (f1) or (f2), and further preferably contains the structure represented by the above formula (f2).

[0184] In the above R F Among them, the ratio of e to f (hereinafter referred to as "e / f ratio") is 0.1 to 10, preferably 0.2 to 5, more preferably 0.2 to 2, further preferably 0.2 to 1.5, and further more preferably 0.2 to 0.85. By making the e / f ratio 10 or less, the slidability, wear durability, and chemical resistance (for example, durability against artificial sweat) of the surface treatment layer obtained from this compound are further improved. The smaller the e / f ratio, the higher the slidability and wear durability of the surface treatment layer. On the other hand, by making the e / f ratio 0.1 or more, the stability of the compound can be further improved. The larger the e / f ratio, the higher the stability of the compound.

[0185] R F1 The fluoroalkyl group represented by is a group in which the hydrogen atoms contained in the alkyl group are replaced by fluorine atoms, and it can be linear or branched. The fluoroalkyl group represented by the above R F1 The fluoroalkyl group represented by is preferably a C 1－50 fluoroalkyl group, more preferably a C 1－20 fluoroalkyl group, further preferably a C 1－16 fluoroalkyl group, for example, it can be a C 1－10 fluoroalkyl group, and further can be a C 1－6 fluoroalkyl group, especially a C 1－3 fluoroalkyl group. In one aspect, the fluoroalkyl group represented by R F1 is a perfluoroalkyl group in which all hydrogen atoms are replaced by fluorine atoms. In this aspect, the above perfluoroalkyl group is preferably a linear or branched C 1－50 perfluoroalkyl group, more preferably a linear or branched C 1－20 perfluoroalkyl group, further preferably a linear or branched C 1－16 perfluoroalkyl group, for example, it can be a linear or branched C 1－10 perfluoroalkyl group, and further can be a linear or branched C 1－6 perfluoroalkyl group, especially a linear or branched C 1－3 perfluoroalkyl group.

[0186] R F2 The fluoroalkylene group represented by is a group in which the hydrogen atoms contained in the alkylene group are replaced by fluorine atoms, and it can be linear or branched. The fluoroalkylene group represented by the above R F2 The fluoroalkylene group represented by is preferably a C 1－50 fluoroalkylene group, more preferably a C1－20 Fluoroalkylene group, more preferably C 1－16 Fluoroalkylene group, for example, can be C 1－10 Fluoroalkylene group, further can be C 1－6 Fluoroalkylene group, especially C 1－3 Fluoroalkylene group. In one embodiment, R F2 The fluoroalkylene group shown is a perfluoroalkylene group in which all hydrogen atoms are replaced by fluorine atoms. In this embodiment, the above-mentioned perfluoroalkylene group is preferably a linear or branched C 1－50 Perfluoroalkylene group, more preferably a linear or branched C 1－20 Perfluoroalkylene group, further preferably a linear or branched C 1－16 Perfluoroalkylene group, for example, can be a linear or branched C 1－10 Perfluoroalkylene group, further can be a linear or branched C 1－6 Perfluoroalkylene group, especially a linear or branched C 1－3 Perfluoroalkylene group.

[0187] In the above-mentioned fluorosilane compound, R F1 and R F2 The number average molecular weight of the part has no particular limitation, for example, it is 500 to 30,000, preferably 1,500 to 30,000, more preferably 2,000 to 10,000. In this specification, the number average molecular weight of R F1 and R F2 is the value measured by 19 F-NMR.

[0188] In another embodiment, the number average molecular weight of R F1 and R F2 is 500 to 30,000, preferably 1,000 to 20,000, more preferably 2,000 to 15,000, further preferably 2,000 to 10,000, and for example, it can be 3,000 to 6,000.

[0189] In another embodiment, the number average molecular weight of R F1 and R F2 can be 4,000 to 30,000, preferably 5,000 to 10,000, more preferably 6,000 to 10,000.

[0190] In the above formulas (1) and (2), R Si are each independently a monovalent group containing a Si atom bonded to a hydroxyl group, a hydrolyzable group, a hydrogen atom or a monovalent organic group each time it appears, and at least one R Si is a monovalent group containing a Si atom bonded to a hydroxyl group or a hydrolyzable group.

[0191] Herein, the "hydrolyzable group" means a group capable of undergoing a hydrolysis reaction, that is, a group capable of detaching from the main skeleton of the compound by a hydrolysis reaction. Examples of the hydrolyzable group include -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO, halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl), etc.

[0192] In a preferred embodiment, R Si is a monovalent group containing a Si atom bonded to a hydroxyl group or a hydrolyzable group.

[0193] In a preferred embodiment, R Si is a group represented by the following formula (S1), (S2), (S3), or (S4).

[0194]

[0195] In the above formula, R 11 is independently a hydroxyl group or a hydrolyzable group each time it appears.

[0196] R 11 is preferably independently a hydrolyzable group each time it appears.

[0197] R 11 is preferably independently -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO or halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl), more preferably -OR j (i.e., an alkoxy group). Examples of R j include unsubstituted alkyls such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, and substituted alkyls such as chloromethyl. Among these, alkyls, especially unsubstituted alkyls, are preferred, and methyl or ethyl is more preferred. In one embodiment, R j is methyl, and in another embodiment, R j is ethyl.

[0198] In the above formula, R 12 is independently a hydrogen atom or a monovalent organic group each time it appears. This monovalent organic group is a monovalent organic group other than the above hydrolyzable group.

[0199] In R 12 , the monovalent organic group is preferably a C 1－20 alkyl group, more preferably a C 1－6 alkyl group, and even more preferably a methyl group.

[0200] In the above formula, n1 is independently an integer of 0 to 3 in each (SiR 11 n1 R 12 3－n1 ) unit. Among them, when R Si is a group represented by formula (S1) or formula (S2), at least one n1 of 1 to 3 (SiR Si exists in the R 11 n1 R 12 3－n1 ) units at the ends of formula (1) and formula (2) (hereinafter also simply referred to as the "end portions" of formula (1) and formula (2)). That is, in this end portion, all n1 are not simultaneously 0. In other words, in the end portions of formula (1) and formula (2), there is at least one Si atom bonded to a hydroxyl group or a hydrolyzable group.

[0201] n1 is independently preferably an integer of 1 to 3 in each (SiR 11 n1 R 12 3－n1 ) unit, more preferably 2 to 3, and even more preferably 3.

[0202] In the above formula, X 11 is independently a single bond or a divalent organic group each time it appears. The divalent organic group is preferably -R 28 -O x -R 29 - (wherein, R 28 and R 29 are independently a single bond or a C 1－20 alkylene group each time they appear, and x is 0 or 1). The C 1－20 alkylene group can be straight-chain or branched-chain, and is preferably straight-chain. The C 1－20 alkylene group is preferably a C 1－10 alkylene group, more preferably a C 1－6 alkylene group, and even more preferably a C 1－3 alkylene group.

[0203] In one embodiment, X 11 is independently -C 1－6 alkylene-O-C 1－6 alkylene- or -O-C 1－6 alkylene- each time it appears.

[0204] In a preferred embodiment, X 11 is, each occurrence independently, a single bond or a straight-chain C 1－6 alkylene group, preferably a single bond or a straight-chain C 1－3 alkylene group, more preferably a single bond or a straight-chain C 1－2 alkylene group, still more preferably a straight-chain C 1－2 alkylene group.

[0205] In the above formula, R 13 is, each occurrence independently, a hydrogen atom or a monovalent organic group. The monovalent organic group is preferably a C 1－20 alkyl group. The C 1－20 alkyl group can be straight-chain or branched-chain, preferably straight-chain.

[0206] In a preferred embodiment, R 13 is, each occurrence independently, a hydrogen atom or a straight-chain C 1－6 alkyl group, preferably a hydrogen atom or a straight-chain C 1－3 alkyl group, more preferably a hydrogen atom or a methyl group.

[0207] In the above formula, t is, each occurrence independently, an integer of 2 or more.

[0208] In a preferred embodiment, t is, each occurrence independently, an integer from 2 to 10, preferably an integer from 2 to 6.

[0209] In the above formula, R 14 is, each occurrence independently, a hydrogen atom, a halogen atom or -X 11 -SiR 11 n1 R 12 3－n1 . The halogen atom is preferably an iodine atom, a chlorine atom or a fluorine atom, more preferably a fluorine atom. In a preferred embodiment, R 14 is a hydrogen atom.

[0210] In the above formula, R 15 is, each occurrence independently, a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms.

[0211] In one embodiment, R 15 is, each occurrence independently, an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms.

[0212] In a preferred embodiment, R 15 is a single bond.

[0213] In one embodiment, formula (S1) is the following formula (S1-a).

[0214]

[0215] [wherein,

[0216] R 11 、R 12 、R 13 、X 11 and n1 have the same meanings as described in formula (S1) above;

[0217] t1 and t2 are each independently an integer of 1 or more each time they appear, preferably an integer of 1 to 10, more preferably an integer of 2 to 10, for example an integer of 1 to 5 or an integer of 2 to 5;

[0218] The order of existence in the formula of each repeating unit marked with t1 and t2 and enclosed in parentheses is arbitrary.]

[0219] In a preferred embodiment, formula (S1) is the following formula (S1-b).

[0220]

[0221] [wherein, R 11 、R 12 、R 13 、X 11 、n1 and t have the same meanings as described in formula (S1) above.]

[0222] In the above formula, R a1 is each independently -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 .

[0223] The above Z 1 is each independently an oxygen atom or a divalent organic group each time it appears. Among them, the right side of the structure denoted as Z 1 is bonded to (SiR 21 p1 R 22 q1 R 23 r1 ).

[0224] In a preferred embodiment, Z 1 is a divalent organic group.

[0225] In a preferred embodiment, Z 1 does not include a bond with Z1 The case where the bonded Si atoms form siloxane bonds. Preferably, in formula (S3), (Si-Z 1 -Si) does not contain a siloxane bond.

[0226] The above-mentioned Z 1 is preferably C 1－6 alkylene, -(CH2) z1 -O-(CH2) z2 -(wherein, z1 is an integer from 0 to 6, for example, an integer from 1 to 6, z2 is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH2) z3 -substituted phenyl-(CH2) z4 -(wherein, z3 is an integer from 0 to 6, for example, an integer from 1 to 6, z4 is an integer from 0 to 6, for example, an integer from 1 to 6). The C 1－6 alkylene can be linear or branched, and is preferably linear. These groups can be substituted by one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl, and C 2－6 alkynyl, but is preferably unsubstituted.

[0227] In a preferred embodiment, Z 1 is C 1－6 alkylene or -(CH2) z3 -substituted phenyl-(CH2) z4 -, preferably -substituted phenyl-(CH2) z4 -. When Z 1 is this group, the light resistance, especially the ultraviolet resistance, is further improved.

[0228] In another preferred embodiment, the above-mentioned Z 1 is C 1－3 alkylene. In one embodiment, Z 1 can be -CH2CH2CH2-. In another embodiment, Z 1 can be -CH2CH2-.

[0229] The above-mentioned R 21 is independently -Z 1′ -SiR 21′ p1′ R 22′ q1′ R 23′ r1′ .

[0230] The above-mentioned Z 1′ is independently an oxygen atom or a divalent organic group each time it appears. Among them, Z is hereinafter denoted as 1′The right side of the structure is bonded to (SiR 21′ p1′ R 22′ q1′ R 23′ r1′ ).

[0231] In a preferred embodiment, Z 1′ is a divalent organic group.

[0232] In a preferred embodiment, Z 1′ does not include a case where a siloxane bond is formed with the Si atom to which Z 1′ is bonded. Preferably, (Si-Z 1′ -Si) in formula (S3) does not contain a siloxane bond.

[0233] The above Z 1′ is preferably C 1－6 alkylene, -(CH2) z1′ -O-(CH2) z2′ -(wherein, z1′ is an integer from 0 to 6, for example, an integer from 1 to 6, z2′ is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH2) z3′ -arylene-(CH2) z4′ -(wherein, z3′ is an integer from 0 to 6, for example, an integer from 1 to 6, z4′ is an integer from 0 to 6, for example, an integer from 1 to 6). This C 1－6 alkylene can be straight-chain or branched-chain, and is preferably straight-chain. These groups can be substituted with one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl, and C 2－6 alkynyl, but is preferably unsubstituted.

[0234] In a preferred embodiment, Z 1′ is C 1－6 alkylene or -(CH2) z3′ -arylene-(CH2) z4′ -, and is preferably -arylene-(CH2) z4′ -. When Z 1′ is this group, the light resistance, especially the ultraviolet resistance, is further improved.

[0235] In another preferred embodiment, the above Z 1′ is C 1－3 alkylene. In one embodiment, Z 1′ can be -CH2CH2CH2-. In another embodiment, Z 1′ can be -CH2CH2-.

[0236] The above R 21′-Z, independently at each occurrence 1″ -SiR 22″ q1″ R 23″ r1″ .

[0237] The above Z 1″ , independently at each occurrence, is an oxygen atom or a divalent organic group. Hereinafter, it is denoted as Z 1″ The right side of the structure of is bonded to (SiR 22″ q1″ R 23″ r1″ ).

[0238] In a preferred embodiment, Z 1″ is a divalent organic group.

[0239] In a preferred embodiment, Z 1″ does not include the case where a siloxane bond is formed with the Si atom to which Z 1″ is bonded. Preferably, in formula (S3), (Si-Z 1″ -Si) does not contain a siloxane bond.

[0240] The above Z 1″ is preferably C 1－6 alkylene, -(CH2) z1″ -O-(CH2) z2″ -(wherein, z1″ is an integer from 0 to 6, for example, an integer from 1 to 6, z2″ is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH2) z3″ -phenylene-(CH2) z4″ -(wherein, z3″ is an integer from 0 to 6, for example, an integer from 1 to 6, z4″ is an integer from 0 to 6, for example, an integer from 1 to 6). The above C 1－6 alkylene can be linear or branched, and is preferably linear. These groups can be substituted with one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl, and C 2－6 alkynyl, but is preferably unsubstituted.

[0241] In a preferred embodiment, Z 1″ is C 1－6 alkylene or -(CH2) z3″ -phenylene-(CH2) z4″ -, and is preferably -phenylene-(CH2) z4″ -. When Z 1″ is these groups, the light resistance, especially the ultraviolet resistance, is further improved.

[0242] In another preferred embodiment, the above-mentioned Z 1″ is C 1－3 alkylene. In one embodiment, Z 1″ may be -CH2CH2CH2-. In another embodiment, Z 1″ may be -CH2CH2-.

[0243] The above-mentioned R 22″ is independently a hydroxyl group or a hydrolyzable group each time it appears.

[0244] The above-mentioned R 22″ is preferably independently a hydrolyzable group each time it appears.

[0245] The above-mentioned R 22″ is preferably independently -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO or halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl), more preferably -OR j (i.e., an alkoxy group). As R j , non-substituted alkyls such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, and substituted alkyls such as chloromethyl can be cited. Among these, alkyls, especially non-substituted alkyls, are preferred, and methyl or ethyl is more preferred. In one embodiment, R j is methyl, and in another embodiment, R j is ethyl.

[0246] The above-mentioned R 23″ is independently a hydrogen atom or a monovalent organic group each time it appears. The monovalent organic group is a monovalent organic group other than the above-mentioned hydrolyzable groups.

[0247] In the above-mentioned R 23″ , the monovalent organic group is preferably C 1－20 alkyl, more preferably C 1－6 alkyl, and even more preferably methyl.

[0248] The above-mentioned q1″ is independently an integer from 0 to 3 each time it appears, and the above-mentioned r1″ is independently an integer from 0 to 3 each time it appears. Among them, the sum of q1″ and r1″ is 3 in the (SiR 22″ q1″ R 23″ r1″ ) unit.

[0249] The above-mentioned q1″ in each (SiR 22″q1″ R 23″ r1″ The integers independently preferably range from 1 to 3, more preferably from 2 to 3, and still more preferably 3, each time it appears in the unit.

[0250] The above-mentioned R 22′ is independently a hydroxyl group or a hydrolyzable group each time it appears.

[0251] R 22′ is preferably independently a hydrolyzable group each time it appears.

[0252] R 22′ is preferably independently -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO or a halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl group), more preferably -OR j (i.e., an alkoxy group). As R j , unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl, and substituted alkyl groups such as chloromethyl can be cited. Among these, an alkyl group, particularly an unsubstituted alkyl group, is preferred, and methyl or ethyl is more preferred. In one embodiment, R j is methyl, and in another embodiment, R j is ethyl.

[0253] The above-mentioned R 23′ is independently a hydrogen atom or a monovalent organic group each time it appears. The monovalent organic group is a monovalent organic group other than the above-mentioned hydrolyzable groups.

[0254] In R 23′ , the monovalent organic group is preferably a C 1－20 alkyl group, more preferably a C 1－6 alkyl group, and still more preferably methyl.

[0255] The above-mentioned p1' is independently an integer from 0 to 3 each time it appears, q1' is independently an integer from 0 to 3 each time it appears, and r1′ is independently an integer from 0 to 3 each time it appears. Among them, the sum of p′, q1′, and r1′ is 3 in the (SiR 21′ p1′ R 22′ q1′ R 23′ r1′ ) unit.

[0256] In one embodiment, p1' is 0.

[0257] In one embodiment, p1' is independently an integer from 1 to 3, an integer from 2 to 3, or 3 in each (SiR 21′ p1′ R 22′ q1′ R 23′ r1′ ) unit. In a preferred embodiment, p1' is 3.

[0258] In one embodiment, q1' is independently an integer from 1 to 3, preferably an integer from 2 to 3, more preferably 3 in each (SiR 21′ p1′ R 22′ q1′ R 23′ r1′ ) unit.

[0259] In one embodiment, p1' is 0 and q1' is independently an integer from 1 to 3, preferably an integer from 2 to 3, further preferably 3 in each (SiR 21′ p1′ R 22′ q1′ R 23′ r1′ ) unit.

[0260] The above R 22 is independently a hydroxyl group or a hydrolyzable group each time it appears.

[0261] R 22 Preferably, it is independently a hydrolyzable group each time it appears.

[0262] R 22 Preferably, it is independently -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO or a halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl), more preferably -OR j (i.e., an alkoxy group). As R j , unsubstituted alkyls such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, and substituted alkyls such as chloromethyl can be mentioned. Among these, alkyl, especially unsubstituted alkyl, is preferred, and methyl or ethyl is more preferred. In one embodiment, R j is methyl, and in another embodiment, R j is ethyl.

[0263] The above R23 Each occurrence is independently a hydrogen atom or a monovalent organic group. The monovalent organic group is a monovalent organic group other than the above hydrolyzable groups.

[0264] In R 23 the monovalent organic group is preferably a C 1－20 alkyl group, more preferably a C 1－6 alkyl group, and even more preferably a methyl group.

[0265] Each occurrence of the above p1 is independently an integer from 0 to 3, each occurrence of q1 is independently an integer from 0 to 3, and each occurrence of r1 is independently an integer from 0 to 3. Among them, the sum of p1, q1, and r1 is 3 in the (SiR 21 p1 R 22 q1 R 23 r1 ) unit.

[0266] In one mode, p1 is 0.

[0267] In one mode, p1 is independently an integer from 1 to 3, an integer from 2 to 3, or 3 in each (SiR 21 p1 R 22 q1 R 23 r1 ) unit. In a preferred mode, p1 is 3.

[0268] In one mode, q1 is independently an integer from 1 to 3, preferably an integer from 2 to 3, and more preferably 3 in each (SiR 21 p1 R 22 q1 R 23 r1 ) unit.

[0269] In one mode, p1 is 0, and q1 is independently an integer from 1 to 3, preferably an integer from 2 to 3, and even more preferably 3 in each (SiR 21 p1 R 22 q1 R 23 r1 ) unit.

[0270] In the above formula, R b1 each occurrence is independently a hydroxyl group or a hydrolyzable group.

[0271] The above R b1 is preferably each occurrence independently a hydrolyzable group.

[0272] The above R b1 is preferably, each time it appears, independently of one another, -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO or a halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl), more preferably -OR j (i.e., an alkoxy group). As R j , unsubstituted alkyls such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, etc., and substituted alkyls such as chloromethyl can be cited. Among these, an alkyl group, particularly an unsubstituted alkyl group, is preferred, and methyl or ethyl is more preferred. In one embodiment, R j is methyl, and in another embodiment, R j is ethyl.

[0273] In the above formula, R c1 is, each time it appears, independently of one another, a hydrogen atom or a monovalent organic group. The monovalent organic group is a monovalent organic group other than the above hydrolyzable groups.

[0274] In the above R c1 , the monovalent organic group is preferably a C 1－20 alkyl group, more preferably a C 1－6 alkyl group, and even more preferably methyl.

[0275] The above k1 is, each time it appears, independently of one another, an integer from 0 to 3, l1 is, each time it appears, independently of one another, an integer from 0 to 3, and m1 is, each time it appears, independently of one another, an integer from 0 to 3. Among them, the sum of k1, l1, and m1 is 3 in the (SiR a1 k1 R b1 l1 R c1 m1 ) unit.

[0276] In one embodiment, k1 is, in each (SiR a1 k1 R b1 l1 R c1 m1 ) unit, independently of one another, an integer from 1 to 3, preferably 2 or 3, and more preferably 3. In a preferred embodiment, k1 is 3.

[0277] In the above formulas (1) and (2), in R SiIn the case of a group represented by formula (S3), it is preferred that at least two Si atoms to which a hydroxyl group or a hydrolyzable group is bonded exist at the terminal parts of formula (1) and formula (2).

[0278] In a preferred embodiment, the group represented by formula (S3) has -Z 1 -SiR 22 q1 R 23 r1 (wherein, q1 is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1 is an integer of 0 to 2), -Z 1′ -SiR 22′ q1′ R 23′ r1′ (wherein, q1′ is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1′ is an integer of 0 to 2) or -Z 1″ -SiR 22″ q1″ R 23″ r1″ (wherein, q1″ is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1″ is an integer of 0 to 2). 1 , Z 1′ , Z 1″ , R 22 , R 23 , R 22′ , R 23′ , R 22″ and R 23″ Same meaning as above.

[0279] In a preferred embodiment, in formula (S3) there is R 21′ In the case of at least one, preferably all, R 21′ Here, q1″ is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0280] In a preferred embodiment, in formula (S3) there is R 21 In the case of at least one, preferably all, R 21 Here, p1′ is 0, and q1′ is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0281] In a preferred embodiment, in formula (S3) there is R a1 In the case of at least one, preferably all, R a1 Here, p1 is 0, and q1 is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0282] In a preferred embodiment, in formula (S3), k1 is 2 or 3, preferably 3, p1 is 0, q1 is 2 or 3, preferably 3.

[0283] R d1 is, each time it appears, independently of one another, -Z 2 -CR 31 p2 R 32 q2 R 33 r2 .

[0284] Z 2 is, each time it appears, independently of one another, a single bond, an oxygen atom or a divalent organic group. Herein, the following is denoted as Z 2 the right side of the structure of is bonded to (CR 31 p2 R 32 q2 R 33 r2 ).

[0285] In a preferred embodiment, Z 2 is a divalent organic group.

[0286] The above-mentioned Z 2 is preferably C 1－6 alkylene, -(CH2) z5 -O-(CH2) z6 -(wherein, z5 is an integer from 0 to 6, for example, an integer from 1 to 6, z6 is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH2) z7 -phenylene-(CH2) z8 -(wherein, z7 is an integer from 0 to 6, for example, an integer from 1 to 6, z8 is an integer from 0 to 6, for example, an integer from 1 to 6). This C 1－6 alkylene may be straight-chain or branched-chain, preferably straight-chain. These groups may be substituted with one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl and C 2－6 alkynyl, but is preferably unsubstituted.

[0287] In a preferred embodiment, Z 2 is C 1－6 alkylene or -(CH2) z7 -phenylene-(CH2) z8 -, preferably -phenylene-(CH2) z8 -. In the case where Z 2 is this group, the light resistance, especially the ultraviolet resistance, is further improved.

[0288] In another preferred embodiment, the above Z 2 is C 1－3 alkylene. In one embodiment, Z 2 can be -CH2CH2CH2-. In another embodiment, Z 2 can be -CH2CH2-.

[0289] R 31 is independently at each occurrence -Z 2′ -CR 32′ q2′ R 33′ r2′ .

[0290] Z 2′ is independently at each occurrence a single bond, an oxygen atom or a divalent organic group. Among them, the right side of the structure denoted as Z 2′ is bonded to (CR 32′ q2′ R 33′ r2′ ).

[0291] The above Z 2′ is preferably C 1－6 alkylene, -(CH2) z5′ -O-(CH2) z6′ -(wherein, z5' is an integer from 0 to 6, such as an integer from 1 to 6, and z6' is an integer from 0 to 6, such as an integer from 1 to 6) or -(CH2) z7′ -arylene-(CH2) z8′ -(wherein, z7' is an integer from 0 to 6, such as an integer from 1 to 6, and z8' is an integer from 0 to 6, such as an integer from 1 to 6). The above C 1－6 alkylene can be straight-chain or branched-chain, preferably straight-chain. These groups can be substituted by one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl and C 2－6 alkynyl, but is preferably unsubstituted.

[0292] In a preferred embodiment, Z 2′ is C 1－6 alkylene or -(CH2) z7′ -arylene-(CH2) z8′ -, preferably -arylene-(CH2) z8′ -. When Z 2′ is this group, the light resistance, especially the ultraviolet resistance, is further improved.

[0293] In another preferred embodiment, the above Z 2′ is C 1－3Alkylene. In one embodiment, Z 2′ may be -CH2CH2CH2-. In another embodiment, Z 2′ may be -CH2CH2-.

[0294] Each occurrence of the above R 32′ is independently, each time it appears, -Z 3 -SiR 34 n2 R 35 3－n2 .

[0295] Each occurrence of the above Z 3 is independently, each time it appears, a single bond, an oxygen atom or a divalent organic group. Among them, the right side of the structure denoted as Z 3 is bonded to (SiR 34 n2 R 35 3－n2 ).

[0296] In one embodiment, Z 3 is an oxygen atom.

[0297] In one embodiment, Z 3 is a divalent organic group.

[0298] Each occurrence of the above Z 3 is preferably C 1－6 alkylene, -(CH2) z5″ -O-(CH2) z6″ -(wherein, z5″ is an integer from 0 to 6, for example, an integer from 1 to 6, and z6″ is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH2) z7″ -arylene-(CH2) z8″ -(wherein, z7″ is an integer from 0 to 6, for example, an integer from 1 to 6, and z8″ is an integer from 0 to 6, for example, an integer from 1 to 6). The C 1－6 alkylene may be straight-chain or branched-chain, preferably straight-chain. These groups may be substituted with one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl and C 2－6 alkynyl, but is preferably unsubstituted.

[0299] In a preferred embodiment, Z 3 is C 1－6 alkylene or -(CH2) z7″ -arylene-(CH2) z8″ -, preferably -arylene-(CH2) z8″ -. In Z 3When this group is present, the light resistance, especially the ultraviolet resistance, is further improved.

[0300] In another preferred embodiment, the above-mentioned Z 3 is C 1－3 alkylene. In one embodiment, Z 3 can be -CH2CH2CH2-. In another embodiment, Z 3 can be -CH2CH2-.

[0301] The above-mentioned R 34 is independently a hydroxyl group or a hydrolyzable group each time it appears.

[0302] R 34 is preferably independently a hydrolyzable group each time it appears.

[0303] R 34 is preferably independently -OR j , -OCOR j , -O-N=CR j 2, -NR j 2, -NHR j , -NCO or halogen (in these formulas, R j represents a substituted or unsubstituted C 1－4 alkyl), more preferably -OR j (i.e., an alkoxy group). As R j , unsubstituted alkyls such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, and substituted alkyls such as chloromethyl can be cited. Among these, alkyls, especially unsubstituted alkyls, are preferred, and methyl or ethyl is more preferred. In one embodiment, R j is methyl, and in another embodiment, R j is ethyl.

[0304] The above-mentioned R 35 is independently a hydrogen atom or a monovalent organic group each time it appears. This monovalent organic group is a monovalent organic group other than the above-mentioned hydrolyzable groups.

[0305] In the above-mentioned R 35 , the monovalent organic group is preferably C 1－20 alkyl, more preferably C 1－6 alkyl, and even more preferably methyl.

[0306] In the above formula, n2 is independently an integer of 0 to 3 in each (SiR 34 n2 R 35 3－n2 ) unit. Among them, in R SiIn the case of the group represented by the formula (S4), there is at least one (SiR 34 n2 R 35 3－n2 ) unit where n2 is an integer from 1 to 3 at the terminal portions of the formulas (1) and (2). That is, in this terminal portion, all n2 are not simultaneously 0. In other words, there is at least one Si atom bonded to a hydroxyl group or a hydrolyzable group at the terminal portions of the formulas (1) and (2).

[0307] n2 is independently preferably an integer from 1 to 3, more preferably 2 to 3, and further preferably 3 in each (SiR 34 n2 R 35 3－n2 ) unit.

[0308] Each occurrence of the above R 33′ is independently a hydrogen atom, a hydroxyl group, or a monovalent organic group. This monovalent organic group is a monovalent organic group other than the above hydrolyzable groups.

[0309] In the above R 33′ , the monovalent organic group is preferably a C 1－20 alkyl group or -(C s H 2s ) t1 -(O-C s H 2s ) t2 (wherein s is an integer from 1 to 6, preferably an integer from 2 to 4, t1 is 1 or 0, preferably 0, and t2 is an integer from 1 to 20, preferably an integer from 2 to 10, and more preferably an integer from 2 to 6), more preferably a C 1－20 alkyl group, and further preferably a C 1－6 alkyl group, and particularly preferably a methyl group.

[0310] In one embodiment, R 33′ is a hydroxyl group.

[0311] In another embodiment, R 33′ is a monovalent organic group, preferably a C 1－20 alkyl group, and more preferably a C 1－6 alkyl group.

[0312] Each occurrence of the above q2' is independently an integer from 0 to 3, and each occurrence of the above r2' is independently an integer from 0 to 3. Among them, the sum of q2' and r2' is 3 in the (CR 32′ q2′ R 33′ r2′ ) unit.

[0313] q2' in each (CR32′ q2′ R 33′ r2′ ) is preferably an integer of 1 to 3, more preferably 2 to 3, and still more preferably 3, independently for each unit.

[0314] R 32 is independently -Z at each occurrence 3 -SiR 34 n2 R 35 3－n2 . This -Z 3 -SiR 34 n2 R 35 3－n2 has the same meaning as that described in the above R 32′ .

[0315] The above R 33 is independently a hydrogen atom, a hydroxyl group, or a monovalent organic group at each occurrence. This monovalent organic group is a monovalent organic group other than the above hydrolyzable group.

[0316] In the above R 33 , the monovalent organic group is preferably a C 1－20 alkyl group or -(C s H 2s ) t1 -(O-C s H 2s ) t2 (wherein s is independently an integer of 1 to 6, preferably an integer of 2 to 4, t1 is 1 or 0, preferably 0, and t2 is an integer of 1 to 20, preferably an integer of 2 to 10, and still more preferably an integer of 2 to 6) at each occurrence, more preferably a C 1－20 alkyl group, still more preferably a C 1－6 alkyl group, and particularly preferably a methyl group.

[0317] In one embodiment, R 33 is a hydroxyl group.

[0318] In another embodiment, R 33 is a monovalent organic group, preferably a C 1－20 alkyl group, and more preferably a C 1－6 alkyl group.

[0319] The above p2 is independently an integer of 0 to 3 at each occurrence, q2 is independently an integer of 0 to 3 at each occurrence, and r2 is independently an integer of 0 to 3 at each occurrence. Among them, the sum of p2, q2, and r2 in each (CR 31 p2 R 32q2 R 33 r2 ) is 3 in the unit.

[0320] In one mode, p2 is 0.

[0321] In one mode, p2 is in each (CR 31 p2 R 32 q2 R 33 r2 ) unit can be independently an integer from 1 to 3, an integer from 2 to 3, or 3 respectively. In a preferred mode, p2 is 3.

[0322] In one mode, q2 is in each (CR 31 p2 R 32 q2 R 33 r2 ) unit is independently an integer from 1 to 3, preferably an integer from 2 to 3, and more preferably 3.

[0323] In one mode, p2 is 0 and q2 is in each (CR 31 p2 R 32 q2 R 33 r2 ) unit is independently an integer from 1 to 3, preferably an integer from 2 to 3, and further preferably 3.

[0324] The above R e1 is independently -Z 3 -SiR 34 n2 R 35 3－n2 . The -Z 3 -SiR 34 n2 R 35 3－n2 has the same meaning as described in the above R 32′ .

[0325] The above Rf 1 is independently a hydrogen atom, a hydroxyl group, or a monovalent organic group each time it appears. The monovalent organic group is a monovalent organic group other than the above hydrolyzable groups.

[0326] In the above Rf 1 , the monovalent organic group is preferably a C 1－20 alkyl group or -(C s H 2s ) t1-(O-C s H 2s ) t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4, t1 is 1 or 0, preferably 0, and t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), more preferably C 1－20 alkyl, still more preferably C 1－6 alkyl, particularly preferably methyl.

[0327] In one embodiment, Rf 1 is a hydroxyl group.

[0328] In another embodiment, Rf 1 is a monovalent organic group, preferably C 1－20 alkyl, more preferably C 1－6 alkyl.

[0329] Each occurrence of k2 above is independently an integer of 0 to 3, each occurrence of l2 is independently an integer of 0 to 3, and each occurrence of m2 is independently an integer of 0 to 3. Among them, the sum of k2, l2 and m2 is 3 in the (CR d1 k2 R e1 l2 R f1 m2 ) unit.

[0330] In the above formulas (1) and (2), when R Si is the group represented by formula (S4), it is preferred that at least 2 Si atoms bonded to a hydroxyl group or a hydrolyzable group are present at the terminal portions of formulas (1) and (2).

[0331] In one embodiment, when R Si is the group represented by formula (S4), n2 is 1 to 3, preferably 2 or 3, more preferably 3 (SiR 34 n2 R 35 3－n2 ) units are present in more than 2 at each terminal portion of formulas (1) and (2), for example, 2 to 27 are present, preferably 2 to 9 are present, more preferably 2 to 6 are present, still more preferably 2 to 3 are present, and particularly preferably 3 are present.

[0332] In a preferred embodiment, when R 32′ is present in formula (S4), in at least 1, preferably in all R 32′ among them, n2 is an integer of 1 to 3, preferably 2 or 3, more preferably 3.

[0333] In a preferred embodiment, when R32 In the case of, in at least 1, preferably in all R 32 Among them, n2 is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0334] In a preferred embodiment, in formula (S4), there is R e1 In the case of, in at least 1, preferably in all R a1 Among them, n2 is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0335] In a preferred embodiment, in formula (S4), k2 is 0, l2 is 2 or 3, preferably 3, and n2 is 2 or 3, preferably 3.

[0336] The above R g1 and R h1 Each independently represents -Z 4 -SiR 11 n1 R 12 3－n1 、-Z 4 -SiR a1 k1 R b1 l1 R c1 m1 、-Z 4 -CR d1 k2 R e1 l2 R f1 m2 . Among them, the meanings of R 11 , R 12 , R a1 , R b2 , R c1 , R d1 , R e1 , R f1 , n1, k1, l1, m1, k2, l2 and m2 are the same as above.

[0337] In a preferred embodiment, R g1 and R h1 Each independently represents -Z 4 -SiR 11 n1 R 12 3－n1 .

[0338] The above Z 4 Each independently represents a single bond, an oxygen atom or a divalent organic group each time it appears. Among them, the right side of the structure denoted as Z 4 is connected to (SiR 11n1 R 12 3－n1 ) Bonding.

[0339] In one mode, Z 4 is an oxygen atom.

[0340] In one mode, Z 4 is a divalent organic group.

[0341] The above Z 4 is preferably C 1－6 alkylene, -(CH2) z5″ -O-(CH2) z6″ -(wherein, z5″ is an integer from 0 to 6, for example an integer from 1 to 6, z6″ is an integer from 0 to 6, for example an integer from 1 to 6) or -(CH2) z7″ -phenylene-(CH2) z8″ -(wherein, z7″ is an integer from 0 to 6, for example an integer from 1 to 6, z8″ is an integer from 0 to 6, for example an integer from 1 to 6). The C 1－6 alkylene can be straight-chain or branched-chain, preferably straight-chain. These groups can be substituted by one or more substituents selected from, for example, a fluorine atom, C 1－6 alkyl, C 2－6 alkenyl and C 2－6 alkynyl, but is preferably unsubstituted.

[0342] In a preferred mode, Z 4 is C 1－6 alkylene or -(CH2) z7″ -phenylene-(CH2) z8″ -, preferably -phenylene-(CH2) z8″ -. When Z 3 is this group, the light resistance, especially the ultraviolet resistance, is further improved.

[0343] In another preferred mode, the above Z 4 is C 1－3 alkylene. In one mode, Z 4 can be -CH2CH2CH2-. In another mode, Z 4 can be -CH2CH2-.

[0344] In one mode, R Si is a group represented by formula (S2), formula (S3), formula (S4) or formula (S5). These compounds can form a surface treatment layer with high surface slidability.

[0345] In one mode, R SiIs a group represented by formula (S3), formula (S4) or formula (S5). Since these compounds have a plurality of hydrolyzable groups at one end, they are firmly adhered to the substrate and can form a surface treatment layer having high wear durability.

[0346] In one embodiment, R Si Is a group represented by formula (S3) or formula (S4). Since these compounds have a plurality of hydrolyzable groups branched from one Si atom or C atom at one end, they can form a surface treatment layer having higher wear durability.

[0347] In one embodiment, R Si Is a group represented by formula (S1).

[0348] In one embodiment, R Si Is a group represented by formula (S2).

[0349] In one embodiment, R Si Is a group represented by formula (S3).

[0350] In one embodiment, R Si Is a group represented by formula (S4).

[0351] In one embodiment, R Si Is a group represented by formula (S5).

[0352] In the above formulas (1) and (2), X A Can be understood as a connecting portion that connects the fluorinated polyether moiety (R F1 And R F2 ) that mainly provides water repellency and surface slipperiness, etc., and the portion (R Si ) that provides the binding ability to the above inorganic layer. Therefore, as long as the compounds represented by formulas (1) and (2) can stably exist, this X A Can be a single bond or any group.

[0353] In the above formula (1), α is an integer from 1 to 9, and β is an integer from 1 to 9. These α and β can vary corresponding to the valence of X A . The sum of α and β is the same as the valence of X A . For example, when X A Is a 10-valent organic group, the sum of α and β is 10. For example, α can be 9 and β can be 1, α can be 5 and β can be 5, or α can be 1 and β can be 9. In addition, when X A Is a divalent organic group, α and β are 1.

[0354] In the above formula (2), γ is an integer from 1 to 9. γ can vary corresponding to the valence of X A . That is, γ is XA The value obtained by subtracting 1 from the valence number.

[0355] X A Each independently represents a single bond or a divalent to decavalent organic group.

[0356] The above X A Among the divalent to decavalent organic groups, those having 2 to 8 valence are preferred. In one embodiment, the divalent to decavalent organic group is preferably a divalent to tetravalent organic group, more preferably a divalent organic group. In another embodiment, the divalent to decavalent organic group is preferably a trivalent to octavalent organic group, more preferably a trivalent to hexavalent organic group.

[0357] In one embodiment, X A is a single bond or a divalent organic group, α is 1, and β is 1.

[0358] In one embodiment, X A is a single bond or a divalent organic group, and γ is 1.

[0359] In one embodiment, X A is a trivalent to hexavalent organic group, α is 1, and β is 2 to 5.

[0360] In one embodiment, X A is a trivalent to hexavalent organic group, and γ is 2 to 5.

[0361] In one embodiment, X A is a trivalent organic group, α is 1, and β is 2.

[0362] In one embodiment, X A is a trivalent organic group, and γ is 2.

[0363] When X A is a single bond or a divalent organic group, Formula (1) and Formula (2) are represented by the following Formula (1') and Formula (2').

[0364] R F1 -X A -R Si (1’)

[0365] R Si -X A -R F2 -X A -R Si (2’)

[0366] In one embodiment, X A is a single bond.

[0367] In another embodiment, X A is a divalent organic group.

[0368] In one embodiment, as X A , for example, a single bond or the following formula can be cited: -(R 51 ) p5 -(X 51 ) q5 - the divalent organic group shown.

[0369] [In the formula,

[0370] R 51 represents a single bond, -(CH2) s5 -, or o-phenylene, m-phenylene or p-phenylene, preferably -(CH2) s5 -,

[0371] s5 is an integer from 1 to 20, preferably an integer from 1 to 6, more preferably an integer from 1 to 3, and even more preferably 1 or 2,

[0372] X 51 represents -(X 52 ) 15 -,

[0373] X 52 each independently represents, each time it appears, a group selected from -O-, -S-, o-phenylene, m-phenylene or p-phenylene, -C(O)O-, -Si(R 53 )2-, -(Si(R 53 )2O) m5 -Si(R 53 )2-, -CONR 54 -, -O-CONR 54 -, -NR 54 - and -(CH2) n5 -,

[0374] R 53 each independently represents, each time it appears, phenyl, C 1－6 alkyl or C 1－6 alkoxy, preferably phenyl or C 1－6 alkyl, more preferably methyl,

[0375] R 54 each independently represents, each time it appears, a hydrogen atom, phenyl or C 1－6 alkyl (preferably methyl),

[0376] m5 is each independently an integer from 1 to 100, preferably an integer from 1 to 20,

[0377] n5 is each independently an integer from 1 to 20, preferably an integer from 1 to 6, more preferably an integer from 1 to 3,

[0378] l5 is an integer from 1 to 10, preferably an integer from 1 to 5, more preferably an integer from 1 to 3,

[0379] p5 is 0 or 1,

[0380] q5 is 0 or 1,

[0381] wherein at least one of p5 and q5 is 1, and the order of presence of each repeating unit labeled with p5 or q5 and enclosed in parentheses is arbitrary.]

[0382] Here, X A (typically a hydrogen atom of X A ) can be substituted by one or more substituents selected from a fluorine atom, a C 1－3 alkyl group, and a C 1－3 fluoroalkyl group. In a preferred embodiment, X A is not substituted by these groups.

[0383] In a preferred embodiment, the above X A are each independently -(R 51 ) p5 -(X 51 ) q5 -R 52 -. R 52 represents a single bond, -(CH2) t5 -, or ortho-phenylene, meta-phenylene, or para-phenylene, preferably -(CH2) t5 -. t5 is an integer from 1 to 20, preferably an integer from 2 to 6, more preferably an integer from 2 to 3. Wherein, R 52 (typically a hydrogen atom of R 52 ) can be substituted by one or more substituents selected from a fluorine atom, a C 1－3 alkyl group, and a C 1－3 fluoroalkyl group. In a preferred embodiment, R 56 is not substituted by these groups.

[0384] Preferably, the above X A are each independently:

[0385] a single bond,

[0386] a C 1－20 alkylene group,

[0387] -R 51 -X 53 -R 52 -, or

[0388] -X 54 -R 52 -.

[0389] [In the formula, R51 and R 52 has the same meaning as above,

[0390] X 53 represents

[0391] -O-、

[0392] -S-、

[0393] -C(O)O-、

[0394] -CONR 54 -、

[0395] -O-CONR 54 -、

[0396] -Si(R 53 )2-、

[0397] -(Si(R 53 )2O) m5 -Si(R 53 )2-、

[0398] -O-(CH2) u5 -(Si(R 53 )2O) m5 -Si(R 53 )2-、

[0399] -O-(CH2) u5 -Si(R 53 )2-O-Si(R 53 )2-CH2CH2-Si(R 53 )2-O-Si(R 53 )2-、

[0400] -O-(CH2) u5 -Si(OCH3)2OSi(OCH3)2-、

[0401] -CONR 54 -(CH2) u5 -(Si(R 53 )2O) m5 -Si(R 53 )2-、

[0402] -CONR 54 -(CH2) u5 -N(R 54 )-、or

[0403] -CONR 54 -(o-phenylene, m-phenylene or p-phenylene)-Si(R 53 )2-,

[0404] (wherein, the meanings of R 53 , R 54 and m5 are the same as above,

[0405] u5 is an integer from 1 to 20, preferably an integer from 2 to 6, and more preferably an integer from 2 to 3.)

[0406] X 54 represents

[0407] -S-,

[0408] -C(O)O-,

[0409] -CONR 54 -,

[0410] -O-CONR 54 -,

[0411] -CONR 54 -(CH2) u5 -(Si(R 54 )2O) m5 -Si(R 54 )2-,

[0412] -CONR 54 -(CH2) u5 -N(R 54 )-, or

[0413] -CONR 54 -(o-phenylene, m-phenylene or p-phenylene)-Si(R 54 )2-.

[0414] (wherein, the meanings of each symbol are the same as above.)]

[0415] More preferably, the above X A are each independently:

[0416] a single bond,

[0417] C 1－20 alkylene,

[0418] -(CH2) s5 -X 53 (wherein, the meanings of each symbol are the same as above.)]

[0419] -(CH2) s5 -X 53 -(CH2) t5 -

[0420] -X 54 -(wherein, the meanings of each symbol are the same as above.)]

[0421] -X54 -(CH2) t5 -.

[0422] [Wherein, X 53 , X 54 , s5 and t5 have the same meanings as above.]

[0423] More preferably, the above X A are each independently:

[0424] a single bond,

[0425] C 1－20 alkylene,

[0426] -(CH2) s5 -X 53 -(CH2) t5 -, or

[0427] -X 54 -(CH2) t5 -.

[0428] [Wherein, the meanings of the respective symbols are the same as above.]

[0429] In a preferred embodiment, the above X A are each independently:

[0430] a single bond,

[0431] C 1－20 alkylene,

[0432] -(CH2) s5 -X 53 -, or

[0433] -(CH2) s5 -X 53 -(CH2) t5 -.

[0434] [Wherein,

[0435] X 53 is -O-, -CONR 54 -, or -O-CONR 54 -,

[0436] R 54 each independently represents a hydrogen atom, a phenyl group or a C 1－6 alkyl group each time it appears,

[0437] s5 is an integer from 1 to 20,

[0438] t5 is an integer from 1 to 20.]

[0439] In a preferred embodiment, the above XA Each independently is:

[0440] -(CH2) s5 -O-(CH2) t5 -,

[0441] -CONR 54 -(CH2) t5 -.

[0442] [In the formula,

[0443] R 54 each independently represents a hydrogen atom, a phenyl group or a C 1－6 alkyl group,

[0444] s5 is an integer from 1 to 20,

[0445] t5 is an integer from 1 to 20.]

[0446] In one embodiment, the above X A each independently is:

[0447] a single bond,

[0448] C 1－20 alkylene,

[0449] -(CH2) s5 -O-(CH2) t5 -,

[0450] -(CH2) s5 -(Si(R 53 )2O) m5 -Si(R 53 )2-(CH2) t5 -,

[0451] -(CH2) s5 -O-(CH2) u5 -(Si(R 53 )2O) m5 -Si(R 53 )2-(CH2) t5 -, or

[0452] -(CH2) s5 -O-(CH2) t5 -Si(R 53 )2-(CH2) u5 -Si(R 53 )2-(C v H 2v ).

[0453] [In the formula, R 53The meanings of m5, s5, t5, and u5 are the same as above, and v5 is an integer from 1 to 20, preferably an integer from 2 to 6, and more preferably an integer from 2 to 3.

[0454] In the above formula, -(C v H 2v )- can be linear or branched, for example, it can be -CH2CH2-, -CH2CH2CH2-, -CH(CH3)-, -CH(CH3)CH2-.

[0455] The above X A can each be independently substituted with one or more substituents selected from a fluorine atom, C 1－3 alkyl, and C 1－3 fluoroalkyl (preferably C 1－3 perfluoroalkyl). In one embodiment, X A is unsubstituted.

[0456] Among them, the left side of each of the above X A is bonded to R F1 or R F2 , and the right side is bonded to R Si .

[0457] In one embodiment, X A are each independently a group other than -O-C 1－6 alkylene.

[0458] In another embodiment, examples of X A include the following groups:

[0459]

[0460]

[0461] [In the formula, R 41 are each independently a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or a C 1－6 alkoxy group, preferably a methyl group;

[0462] D is a group selected from the following groups:

[0463] -CH2O(CH2)2-,

[0464] -CH2O(CH2)3-,

[0465] -CF2O(CH2)3-,

[0466] -(CH2)2-,

[0467] -(CH2)3-,

[0468] -(CH2)4-,

[0469] -CONH-(CH2)3-,

[0470] -CON(CH3)-(CH2)3-,

[0471] -CON(Ph)-(CH2)3- (where Ph represents a phenyl group), and

[0472]

[0473] (wherein, R 42 independently represents a hydrogen atom, C 1－6 alkyl or C 1－6 alkoxy, preferably represents a methyl group or a methoxy group, more preferably represents a methyl group.)

[0474] E is -(CH2) n - (n is an integer from 2 to 6),

[0475] D is bonded to R F1 or R F2 in the main chain of the molecule, and E is bonded to R Si .)

[0476] As a specific example of the above X A , for example, the following can be listed:

[0477] A single bond,

[0478] -CH2OCH2-,

[0479] -CH2O(CH2)2-,

[0480] -CH2O(CH2)3-,

[0481] -CH2O(CH2)4-,

[0482] -CH2O(CH2)5-,

[0483] -CH2O(CH2)6-,

[0484] -CH2O(CH2)3Si(CH3)2OSi(CH3)2(CH2)2-,

[0485] -CH2O(CH2)3Si(CH3)2OSi(CH3)2OSi(CH3)2(CH2)2-,

[0486] -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)2Si(CH3)2(CH2)2-,

[0487] -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)3Si(CH3)2(CH2)2-、

[0488] -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O) 10 Si(CH3)2(CH2)2-、

[0489] -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O) 20 Si(CH3)2(CH2)2-、

[0490] -CH2OCF2CHFOCF2-、

[0491] -CH2OCF2CHFOCF2CF2-、

[0492] -CH2OCF2CHFOCF2CF2CF2-、

[0493] -CH2OCH2CF2CF2OCF2-、

[0494] -CH2OCH2CF2CF2OCF2CF2-、

[0495] -CH2OCH2CF2CF2OCF2CF2CF2-、

[0496] -CH2OCH2CF2CF2OCF(CF3)CF2OCF2-、

[0497] -CH2OCH2CF2CF2OCF(CF3)CF2OCF2CF2-、

[0498] -CH2OCH2CF2CF2OCF(CF3)CF2OCF2CF2CF2-、

[0499] -CH2OCH2CHFCF2OCF2-、

[0500] -CH2OCH2CHFCF2OCF2CF2-、

[0501] -CH2OCH2CHFCF2OCF2CF2CF2-、

[0502] -CH2OCH2CHFCF2OCF(CF3)CF2OCF2-、

[0503] -CH2OCH2CHFCF2OCF(CF3)CF2OCF2CF2-、

[0504] -CH2OCH2CHFCF2OCF(CF3)CF2OCF2CF2CF2-、

[0505] -CH2OCF2CHFOCF2CF2CF2-C(O)NH-CH2-、

[0506] -CH2OCH2(CH2)7CH2Si(OCH3)2OSi(OCH3)2(CH2)2Si(OCH3)2OSi(OCH3)2(CH2)2-、

[0507] -CH2OCH2CH2CH2Si(OCH3)2OSi(OCH3)2(CH2)3-、

[0508] -CH2OCH2CH2CH2Si(OCH2CH3)2OSi(OCH2CH3)2(CH2)3-、

[0509] -CH2OCH2CH2CH2Si(OCH3)2OSi(OCH3)2(CH2)2-、

[0510] -CH2OCH2CH2CH2Si(OCH2CH3)2OSi(OCH2CH3)2(CH2)2-、

[0511] -(CH2)2-Si(CH3)2-(CH2)2-、

[0512] -CH2-、

[0513] -(CH2)2-、

[0514] -(CH2)3-、

[0515] -(CH2)4-、

[0516] -(CH2)5-、

[0517] -(CH2)6-、

[0518] -CO-、

[0519] -CONH-、

[0520] -CONH-CH2-、

[0521] -CONH-(CH2)2-、

[0522] -CONH-(CH2)3-、

[0523] -CONH-(CH2)4-、

[0524] -CONH-(CH2)5-、

[0525] -CONH-(CH2)6-、

[0526] -CON(CH3)-CH2-、

[0527] -CON(CH3)-(CH2)2-、

[0528] -CON(CH3)-(CH2)3-、

[0529] -CON(CH3)-(CH2)4-、

[0530] -CON(CH3)-(CH2)5-、

[0531] -CON(CH3)-(CH2)6-、

[0532] -CON(Ph)-CH2-(where Ph represents phenyl)、

[0533] -CON(Ph)-(CH2)2-(where Ph represents phenyl)、

[0534] -CON(Ph)-(CH2)3-(where Ph represents phenyl)、

[0535] -CON(Ph)-(CH2)4-(where Ph represents phenyl)、

[0536] -CON(Ph)-(CH2)5-(where Ph represents phenyl)、

[0537] -CON(Ph)-(CH2)6-(where Ph represents phenyl)、

[0538] -CONH-(CH2)2NH(CH2)3-、

[0539] -CONH-(CH2)6NH(CH2)3-、

[0540] -CH2O-CONH-(CH2)3-、

[0541] -CH2O-CONH-(CH2)6-、

[0542] -S-(CH2)3-、

[0543] -(CH2)2S(CH2)3-、

[0544] -CONH-(CH2)3Si(CH3)2OSi(CH3)2(CH2)2-、

[0545] -CONH-(CH2)3Si(CH3)2OSi(CH3)2OSi(CH3)2(CH2)2-,

[0546] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O)2Si(CH3)2(CH2)2-,

[0547] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O)3Si(CH3)2(CH2)2-,

[0548] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O) 10 Si(CH3)2(CH2)2-,

[0549] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O) 20 Si(CH3)2(CH2)2-,

[0550] -C(O)O-(CH2)3-,

[0551] -C(O)O-(CH2)6-,

[0552] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-(CH2)2-,

[0553] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-CH(CH3)-,

[0554] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-(CH2)3-,

[0555] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-CH(CH3)-CH2-,

[0556] -OCH2-,

[0557] -O(CH2)3-,

[0558] -OCFHCF2-,

[0559] etc.

[0560] In yet another embodiment, X A is independently, respectively, of the formula: -(R 16 ) x1 -(CFR 17 )y1 -(CH2) z1 - the group shown. In the formula, x1, y1 and z1 are each independently an integer from 0 to 10, the sum of x1, y1 and z1 is 1 or more, and the order of existence of each repeating unit enclosed in parentheses in the formula is arbitrary.

[0561] In the above formula, R 16 is each independently, upon each occurrence, an oxygen atom, a phenylene group, a carbazolylene group, -NR 18 -(wherein R 18 represents a hydrogen atom or an organic group) or a divalent organic group. Preferably, R 18 is an oxygen atom or a divalent polar group.

[0562] As the above "divalent polar group", there is no particular limitation, and examples thereof may include -C(O)-, -C(=NR 19 )-, and -C(O)NR 19 -(in these formulas, R 19 represents a hydrogen atom or a lower alkyl group). The "lower alkyl group" is, for example, an alkyl group having 1 to 6 carbon atoms, such as a methyl group, an ethyl group, or a n-propyl group, and they may be substituted with one or more fluorine atoms.

[0563] In the above formula, R 17 is each independently, upon each occurrence, a hydrogen atom, a fluorine atom, or a lower fluoroalkyl group, preferably a fluorine atom. The "lower fluoroalkyl group" is, for example, a fluoroalkyl group having 1 to 6 carbon atoms, preferably 1 to 3 carbon atoms, preferably a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably a trifluoromethyl group or a pentafluoroethyl group, and further preferably a trifluoromethyl group.

[0564] In another embodiment, as an example of X A , the following groups may be listed:

[0565]

[0566] [In the formula,

[0567] R 41 are each independently a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or a C 1－6 alkoxy group, preferably a methyl group;

[0568] In each X A group, any several of T are the following groups bonded to R F1 or R F2 of the main molecular chain:

[0569] -CH2O(CH2)2-,

[0570] -CH2O(CH2)3-,

[0571] -CF2O(CH2)3-、

[0572] -(CH2)2-、

[0573] -(CH2)3-、

[0574] -(CH2)4-、

[0575] -CONH-(CH2)3-、

[0576] -CON(CH3)-(CH2)3-、

[0577] -CON(Ph)-(CH2)3- (wherein Ph represents a phenyl group), or

[0578]

[0579] [wherein, R 42 is independently hydrogen atom, C 1－6 alkyl or C 1－6 alkoxy, preferably methyl or methoxy, more preferably represents methyl.]

[0580] Several of the additional Ts are bonded to the R of the molecular backbone. In the case of existence, the remaining Ts are independently methyl, phenyl, C Si alkoxy or a radical scavenging group or an ultraviolet absorbing group. 1－6 The radical scavenging group is not particularly limited as long as it is a group capable of scavenging radicals generated by light irradiation. For example, residues of benzophenones, benzotriazoles, benzoates, phenyl salicylates, crotonic acids, malonic esters, organic acrylates, hindered amines, hindered phenols or triazines can be cited.

[0581] The ultraviolet absorbing group is not particularly limited as long as it is a group capable of absorbing ultraviolet rays. For example, residues of benzotriazoles, hydroxydibenzophenones, esters of substituted and unsubstituted benzoic acids or salicylic acid compounds, acrylate esters or alkoxycinnamate esters, oxamides, oxanilides, benzoxazinones, benzoxazoles can be cited.

[0582] In a preferred embodiment, as preferred radical scavenging groups or ultraviolet absorbing groups, the following can be cited:

[0583] In this embodiment, X

[0584]

[0585] In this embodiment, X A can be independently 3- to 10-valent organic groups.

[0586] In another embodiment, as X AExamples include the following groups:

[0587]

[0588] [In the formula, R 25 , R 26 and R 27 are each independently a divalent to hexavalent organic group,

[0589] R 25 is bonded to at least one R F1 , R 26 and R 27 are each bonded to at least one R Si .]

[0590] In one embodiment, the above R 25 is a single bond, C 1－20 alkylene, C 3－20 cycloalkylene, C 5－20 arylene, -R 57 -X 58 -R 59 -, -X 58 -R 59 - or -R 57 -X 58 -. The above R 57 and R 59 are each independently a single bond, C 1－20 alkylene, C 3－20 cycloalkylene or C 5－20 arylene. The above X 58 is -O-, -S-, -CO-, -O-CO- or -COO-.

[0591] In one embodiment, the above R 26 and R 27 are each independently a hydrocarbon group, or a group having at least one atom selected from N, O and S in the end or main chain of the hydrocarbon, preferably C 1－6 alkyl, -R 36 -R 37 -R 36 -, -R 36 -CHR 38 2-, etc. Among them, R 36 are each independently a single bond or an alkyl group having 1 to 6 carbon atoms, preferably an alkyl group having 1 to 6 carbon atoms. R 37 is N, O or S, preferably N or O. R 38 is -R 45 -R 46 -R 45 -, -R 46 -R 45 - or -R45 -R 46 - wherein, R 45 is independently an alkyl group having 1 to 6 carbon atoms. R 46 is N, O or S, preferably O.

[0592] In this mode, X A is independently an organic group having a valence of 3 to 10.

[0593] In another mode, as X A examples, the following groups can be cited:

[0594]

[0595] [In the formula, X a is a single bond or a divalent organic group.]

[0596] The above X a is a single bond or a divalent linking group directly bonded to the isocyanuric acid ring. As X a , it is preferably a single bond, an alkylene group, or a divalent group containing at least one bond selected from an ether bond, an ester bond, an amide bond, and a thioether bond, more preferably a single bond, an alkylene group having 1 to 10 carbon atoms, or a divalent organic group having 1 to 10 carbon atoms and containing at least one bond selected from an ether bond, an ester bond, an amide bond, and a thioether bond.

[0597] As X a , it is more preferably a group represented by the following formula:

[0598] -(CX 121 X 122 ) x1 -(X a1 ) y1 -(CX 123 X 124 ) z1 -.

[0599] (In the formula, X 121 to X 124 are independently H, F, OH or -OSi(OR 121 )3 (in the formula, the 3 R 121 are independently alkyl groups having 1 to 4 carbon atoms),

[0600] The above X a1 is -C(=O)NH-, -NHC(=O)-, -O-, -C(=O)O-, -OC(=O)-, -OC(=O)O- or -NHC(=O)NH- (the left side of each bond is bonded to CX 121 X 122 ),

[0601] x1 is an integer from 0 to 10, y1 is 0 or 1, and z1 is an integer from 1 to 10.)

[0602] As the above X a1 , preferably -O- or -C(=O)O-.

[0603] As the above X a , particularly preferably:[[]]

[0604] The following formula: -(CF2) m11 -(CH2) m12 -O-(CH2) m13 -(wherein, m11 is an integer from 1 to 3, m12 is an integer from 1 to 3, and m13 is an integer from 1 to 3) the group shown,

[0605] -(CF2) m14 -(CH2) m15 -O-CH2CH(OH)-(CH2) m16 -(wherein, m14 is an integer from 1 to 3, m15 is an integer from 1 to 3, and m16 is an integer from 1 to 3) the group shown,

[0606] -(CF2) m17 -(CH2) m18 -(wherein, m17 is an integer from 1 to 3, m18 is an integer from 1 to 3) the group shown,

[0607] -(CF2) m19 -(CH2) m20 -O-CH2CH(OSi(OCH3)3)-(CH2) m21 -(wherein, m19 is an integer from 1 to 3, m20 is an integer from 1 to 3, and m21 is an integer from 1 to 3) the group shown, or

[0608] -(CH2) m22 -(wherein, m22 is an integer from 1 to 3) the group shown.

[0609] As the above X a , there is no particular limitation, and specifically, -CH2-, -C2H4-, -C3H6-, -C4H8-, -C4H8-O-CH2-, -CO-O-CH2-CH(OH)-CH2-, -(CF2) n5 -(n5 is an integer from 0 to 4), -(CF2) n5 -(CH2) m5-(n5 and m5 are each independently an integer from 0 to 4), -CF2CF2CH2OCH2CH(OH)CH2-, -CF2CF2CH2OCH2CH(OSi(OCH3)3)CH2-, etc.

[0610] In this method, X A are each independently a divalent or trivalent organic group.

[0611] The fluorosilane compound represented by the above formula (1) or formula (2) may have an average molecular weight of 5×10 2 to 1×10 5 , but there is no particular limitation. Among this range, from the viewpoint of wear durability, it preferably has an average molecular weight of 2,000 to 32,000, more preferably 2,500 to 12,000. Among them, this "average molecular weight" refers to the number-average molecular weight, and the "average molecular weight" is a value measured by 19 F-NMR.

[0612] Regarding the content rate of the fluorosilane compound represented by the above formula (1) or (2), in the total 100% by mass of the above fluorosilane compound, it is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less.

[0613] Regarding the content rate of the above fluorosilane compound, in 100% by mass of the above surface treatment agent, it is preferably 0.02 to 40.0% by mass, more preferably 0.02 to 30.0% by mass, further preferably 0.04 to 25.0% by mass, and particularly preferably 0.05 to 20.0% by mass. By making the content of the above fluorosilane compound within the above range, higher water and oil repellency can be obtained.

[0614] Regarding the content rate of the above fluorinated polyether group-containing silane compound, in 100% by mass of the above surface treatment agent, it is preferably 0.02 to 40.0% by mass, more preferably 0.02 to 30.0% by mass, further preferably 0.04 to 25.0% by mass, and particularly preferably 0.05 to 20.0% by mass. By making the content of the above fluorinated polyether group-containing silane compound within the above range, higher water and oil repellency can be obtained.

[0615] In the composition of the present invention, the non-volatile component may be the part obtained by removing the solvent from the total amount of the composition.

[0616] The above surface treatment agent may further contain a solvent. By containing a solvent, the operability of the composition is good. When forming a layer using such a composition, the formed layer can become a continuous thin film. And such a composition helps to form a thin film with an arbitrary film thickness.

[0617] As the above solvent, there is no particular limitation, and for example, perfluoroaliphatic hydrocarbons having 5 to 12 carbon atoms (e.g., perfluorohexane, perfluoromethylcyclohexane, and perfluoro-1,3-dimethylcyclohexane); polyfluoroaromatic hydrocarbons (e.g., bis(trifluoromethyl)benzene); polyfluoroaliphatic hydrocarbons (e.g., C6F 13 CH2CH3 (e.g., ASAHIKLIN (registered trademark) AC-6000 manufactured by Asahi Glass Co., Ltd.), 1,1,2,2,3,3,4-heptafluorocyclopentane (e.g., ZEORORA (registered trademark) H manufactured by Zeon Corporation, Japan); hydrofluoroethers (HFE) (e.g., perfluoropropyl methyl ether (C3F7OCH3) (e.g., Novec (trademark) 7000 manufactured by Sumitomo 3M Limited), perfluorobutyl methyl ether (C4F9OCH3) (e.g., Novec (trademark) 7100 manufactured by Sumitomo 3M Limited), perfluorobutyl ethyl ether (C4F9OC2H5) (e.g., Novec (trademark) 7200 manufactured by Sumitomo 3M Limited), perfluorohexyl methyl ether (C2F5CF(OCH3)C3F7) (e.g., Novec (trademark) 7300 manufactured by Sumitomo 3M Limited), etc. alkyl perfluoroalkyl ethers (the perfluoroalkyl group and the alkyl group may be linear or branched), or CF3CH2OCF2CHF2 (e.g., ASAHIKLIN (registered trademark) AE-3000 manufactured by Asahi Glass Co., Ltd.), etc. These solvents may be used alone or as a mixture of two or more. Among them, hydrofluoroethers are preferred, and perfluorobutyl methyl ether (C4F9OCH3) and / or perfluorobutyl ethyl ether (C4F9OC2H5) are particularly preferred.

[0618] The boiling point (under atmospheric pressure) of the above solvent is preferably below 105 °C, more preferably 90 °C or below, and further preferably 80 °C or below. By having a boiling point within the above range, when applying the surface treatment agent of the present invention to the above inorganic layer, it can be easily vaporized without heating or the like, and the time and energy required for the surface treatment process can be reduced. The lower limit of this boiling point is not particularly limited and may be, for example, 30 °C or above, preferably 50 °C or above.

[0619] In the total 100% by mass of the above surface treatment agent, the content of the above solvent is preferably 50 to 99.7% by mass, more preferably 60 to 99.7% by mass, further preferably 70 to 99.7% by mass, and particularly preferably 80 to 99.7% by mass.

[0620] The surface treatment agent of the present invention may further contain a (non-reactive) fluorinated polyether compound that can be understood as a fluorinated oil, preferably a perfluoro(poly)ether compound (collectively referred to as "fluorinated oil" hereinafter), a (non-reactive) silicone compound that can be understood as a silicone oil (hereinafter referred to as "silicone oil"), alcohols, catalysts, surfactants, polymerization inhibitors, sensitizers, etc. In addition, other components are components different from the above-mentioned fluorosilane compounds and solvents.

[0621] The fluorinated oil is not particularly limited, and for example, compounds (perfluoro(poly)ether compounds) represented by the following general formula (4) can be cited.

[0622] Rf 5 -(OC4F8) a″ -(OC3F6) b″ -(OC2F4) c″ -(OCF2) d″ -Rf 6 ···(4)

[0623] In the formula, Rf 5 represents a C 1－16 alkyl group (preferably a C 1－16 perfluoroalkyl group) that can be substituted with one or more fluorine atoms, Rf 6 represents a C 1－16 alkyl group (preferably a C 1－16 perfluoroalkyl group), a fluorine atom or a hydrogen atom, Rf 5 and Rf 6 are more preferably each independently a C 1－3 perfluoroalkyl group.

[0624] a″, b″, c″, and d″ respectively represent the numbers of 4 repeating units of the perfluoro(poly)ether constituting the polymer main skeleton, and are each independently an integer of 0 or more and 300 or less. The sum of a″, b″, c″, and d″ is greater than 30, preferably 40 to 300, more preferably 50 to 300. The order of presence of each repeating unit with the subscript a″, b″, c″, or d″ enclosed in parentheses in the formula is arbitrary. Among these repeating units, -(OC4F8)- can be any one of -(OCF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2)-, -(OCF2CF(CF3)CF2)-, -(OCF2CF2CF(CF3))-, -(OC(CF3)2CF2)-, -(OCF2C(CF3)2)-, -(OCF(CF3)CF(CF3))-, -(OCF(C2F5)CF2)-, and (OCF2CF(C2F5))-, and is preferably -(OCF2CF2CF2CF2)-. -(OC3F6)- can be any one of -(OCF2CF2CF2)-, -(OCF(CF3)CF2)-, and (OCF2CF(CF3))-, and is preferably -(OCF2CF2CF2)-. -(OC2F4)- can be any one of -(OCF2CF2)- and (OCF(CF3))-, and is preferably -(OCF2CF2)-.

[0625] As examples of the perfluoro(poly)ether compound represented by the above general formula (4), compounds represented by any one of the following general formulas (4a) and (4b) (which may be a mixture of one or more than two kinds) can be cited.

[0626] Rf 5 -(OCF2CF2CF2) b″ -Rf 6 ···(4a)

[0627] Rf 5 -(OCF2CF2CF2CF2) a″ -(OCF2CF2CF2) b″ -(OCF2CF2) c″ -(OCF2) d″ -Rf 6 ···(4b)

[0628] In these formulas, Rf 5 and Rf 6As described above; in formula (4a), b″ is an integer of 1 or more and 100 or less; in formula (4b), a″ and b″ are each independently an integer of 0 or more and 30 or less, and c″ and d″ are each independently an integer of 1 or more and 300 or less. The order of existence of each repeating unit with subscripts a″, b″, c″, d″ enclosed in parentheses in the formula is arbitrary.

[0629] In addition, from other viewpoints, the fluorinated oil may also be a compound represented by the general formula Rf 3 -F (wherein Rf 3 is a C 5－16 perfluoroalkyl group). In addition, it may also be a chlorotrifluoroethylene oligomer.

[0630] The above-mentioned fluorinated oil preferably has a number average molecular weight of 1000 or more, more preferably 1500 or more, and further preferably 2000 or more. And the above-mentioned fluorinated oil has a number average molecular weight preferably of 30000 or less, more preferably 20000 or less, and further preferably 10000 or less. The molecular weight of the fluorinated oil can be measured using GPC.

[0631] Relative to the above-mentioned surface treatment agent, the above-mentioned fluorinated oil may contain, for example, 0 to 50% by mass, preferably 0 to 30% by mass, and more preferably 0 to 5% by mass. In one mode, the surface treatment agent of the present invention substantially does not contain a fluorinated oil. Substantially not containing a fluorinated oil means completely not containing a fluorinated oil, or may contain a very small amount of a fluorinated oil.

[0632] In one mode, the number average molecular weight of the fluorinated oil can be made smaller than the number average molecular weight of the fluorinated silane compound. By forming such an average molecular weight, it is possible to suppress a decrease in the transparency of the surface treatment layer obtained from the compound, and to form a cured product having high wear durability and high surface slidability.

[0633] The fluorinated oil helps to improve the surface slidability of the layer formed from the surface treatment agent of the present invention.

[0634] As the above-mentioned silicone oil, for example, a linear or cyclic silicone oil having a siloxane bond of 2,000 or less can be used. The linear silicone oil can be a so-called ordinary silicone oil (straight silicone) and a modified silicone oil. As the ordinary silicone oil, dimethyl silicone oil, methylphenyl silicone oil, and methylhydrogen silicone oil can be mentioned. As the modified silicone oil, silicone oils obtained by modifying ordinary silicone oils with alkyl groups, aralkyl groups, polyethers, higher fatty acid esters, fluoroalkyl groups, amino groups, epoxy groups, carboxyl groups, alcohols, etc. can be mentioned. As the cyclic silicone oil, cyclic dimethylsiloxane oil, etc. can be mentioned.

[0635] In the surface treatment agent of the present invention, based on a total of 100 parts by mass of the fluorosilane compound of the present invention (the total when there are two or more types, the same hereinafter), the silicone oil can contain, for example, 0 to 300 parts by mass, preferably 50 to 200 parts by mass.

[0636] The silicone oil helps to improve the surface slipperiness of the surface treatment layer.

[0637] Examples of the above-mentioned alcohols include alcohols having 1 to 6 carbon atoms substituted with one or more fluorine atoms, such as methanol, ethanol, isopropanol, tert-butanol, CF3CH2OH, CF3CF2CH2OH, and (CF3)2CHOH. By adding these alcohols to the surface treatment agent, the stability of the surface treatment agent can be improved, and the compatibility between the fluorosilane compound and the solvent can be improved.

[0638] In the surface treatment agent, based on the above-mentioned metal compound, the above-mentioned alcohols are preferably contained in a molar ratio of 0.1 to 5 times, more preferably 0.5 to 3 times, and further preferably 0.8 to 1.2 times. By making the content ratio of the alcohols within the above range, the stability of the surface treatment layer can be further improved.

[0639] Examples of the above-mentioned catalyst include acids (such as acetic acid, trifluoroacetic acid, etc.), bases (such as ammonia, triethylamine, diethylamine, etc.), transition metals (such as Ti, Ni, Sn, etc.), and the like.

[0640] The catalyst promotes the hydrolysis and dehydration condensation of the fluorosilane compound of the present invention and promotes the formation of the layer formed by the surface treatment agent of the present invention.

[0641] As other components, in addition to the above components, for example, tetraethoxysilane, methyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, methyltriacetoxysilane, etc. can also be listed.

[0642] The above-mentioned surface treatment layer can be formed by applying a surface treatment agent on the above-mentioned inorganic layer. The application of the surface treatment agent can be carried out by coating the above-mentioned inorganic layer. The coating method is not particularly limited. For example, wet coating methods and dry coating methods can be used.

[0643] Examples of the wet coating method include dip coating, spin coating, brush coating, flow coating, spray coating, roll coating, gravure coating, and similar methods, and spray coating is preferred.

[0644] As examples of the dry coating method, vapor deposition (usually vacuum vapor deposition), sputtering, CVD, and similar methods can be cited. As specific examples of the vapor deposition method (usually the vacuum vapor deposition method), resistance heating, electron beam, high-frequency heating using microwaves or the like, ion beam, and similar methods can be cited. As specific examples of the CVD method, plasma CVD, optical CVD, thermal CVD, and similar methods can be cited.

[0645] In addition, coating can also be carried out using the atmospheric pressure plasma method.

[0646] When using the wet coating method, the surface treatment agent of the present invention can be diluted with a solvent and applied to the surface of the substrate. From the viewpoints of the stability of the composition of the present invention and the volatility of the solvent, the following solvents are preferably used: perfluoroaliphatic hydrocarbons having 5 to 12 carbon atoms (e.g., perfluorohexane, perfluoromethylcyclohexane, and perfluoro-1,3-dimethylcyclohexane); polyfluoroaromatic hydrocarbons (e.g., bis(trifluoromethyl)benzene); polyfluoroaliphatic hydrocarbons (e.g., C6F 13 CH2CH3 (e.g., ASAHIKLIN (registered trademark) AC-6000 manufactured by Asahi Glass Co., Ltd.), 1,1,2,2,3,3,4-heptafluorocyclopentane (e.g., ZEORORA (registered trademark) H manufactured by Nippon Zeon Co., Ltd.); hydrofluoroethers (HFEs) (e.g., perfluoropropyl methyl ether (C3F7OCH3) (e.g., Novec (trademark) 7000 manufactured by Sumitomo 3M Limited), perfluorobutyl methyl ether (C4F9OCH3) (e.g., Novec (trademark) 7100 manufactured by Sumitomo 3M Limited), perfluorobutyl ethyl ether (C4F9OC2H5) (e.g., Novec (trademark) 7200 manufactured by Sumitomo 3M Limited), perfluorohexyl methyl ether (C2F5CF(OCH3)C3F7) (e.g., Novec (trademark) 7300 manufactured by Sumitomo 3M Limited), etc. alkyl perfluoroalkyl ethers (the perfluoroalkyl group and the alkyl group may be linear or branched), or CF3CH2OCF2CHF2 (e.g., ASAHIKLIN (registered trademark) AE-3000 manufactured by Asahi Glass Co., Ltd.), etc. These solvents can be used alone or in the form of a mixture of two or more. Among them, hydrofluoroethers are preferred, and perfluorobutyl methyl ether (C4F9OCH3) and / or perfluorobutyl ethyl ether (C4F9OC2H5) are particularly preferred.

[0647] When using the dry coating method, the surface treatment agent of the present invention can be directly used for the dry coating method, or it can also be used for the dry coating method after being diluted with the above-mentioned solvent.

[0648] The formation of the layer of the surface treatment agent is preferably carried out in such a way that the surface treatment agent of the present invention coexists with a catalyst for hydrolysis and dehydration condensation in the layer. For the sake of simplicity, in the case of using the wet coating method, the surface treatment agent of the present invention can also be diluted with a solvent and then, immediately before being applied to the surface of the inorganic layer, a catalyst can be added to the diluted solution of the surface treatment agent of the present invention.

[0649] Any suitable acid or base can be used as the catalyst. As the acid catalyst, for example, acetic acid, formic acid, trifluoroacetic acid, etc. can be used. In addition, as the base catalyst, for example, ammonia, organic amines, etc. can be used.

[0650] After applying the surface treatment agent, drying can be carried out as needed. Through this drying, the hydrolysis and dehydration condensation of the fluorosilane compound described later are promoted, and solvents, etc. are removed.

[0651] The drying of the above-mentioned precursor layer is preferably carried out at a temperature of 0 °C or higher and 60 °C or lower, more preferably 5 °C or higher and 50 °C or lower, and further preferably 10 °C or higher and 30 °C or lower, and preferably carried out for a time of 1 hour or longer and 48 hours or shorter, more preferably 3 hours or longer and 24 hours or shorter, and further preferably 6 hours or longer and 12 hours or shorter.

[0652] According to the present invention, a laminate with good durability can be provided. In one aspect, in this laminate, it is preferable to have good resistance to artificial sweat, abrasion resistance with steel wool, and abrasion resistance with an ethanol eraser. Therefore, the laminate of the present invention is suitable for use as a functional film. It is preferably used for various substrates, such as substrates for electronic devices.

[0653] Therefore, the present invention also relates to an optical material including the laminate.

[0654] As the optical material, in addition to the optical materials related to displays etc. exemplified later, various optical materials are preferably listed, for example: cathode ray tubes (CRT, such as personal computer monitors), liquid crystal displays, plasma displays, organic EL displays, inorganic thin film EL dot matrix displays, rear projection displays, fluorescent display tubes (VFD), field emission displays (FED, Field Emission Display), etc. displays or protective plates for these displays, or materials having an antireflection film treatment applied to the surfaces thereof.

[0655] The laminate of the present invention is not particularly limited and can be an optical component. Examples of the optical component can include the following items: lenses for glasses etc.; front protective plates, antireflection plates, polarizing plates, antiglare plates for displays such as PDP and LCD; touch screen sheets for devices such as mobile phones and portable information terminals; surfaces of optical discs such as Blu-ray (registered trademark) discs, DVD discs, CD-R, MO; optical fibers; display surfaces of watches etc.

[0656] In addition, the laminate of the present invention can also be a medical device or a medical material. Moreover, a laminate having a layer obtained by the present invention can also be an interior or exterior automotive decoration material. Examples of exterior parts include the following components: windows, lamp housings, and housings for exterior vehicle cameras. Examples of interior parts include the following components: instrument panel covers, touch panels for navigation systems, and decorative interior parts.

[0657] Furthermore, the laminate of the present invention can also be an electronic device. Examples of such electronic devices include portable terminal devices such as smartphones, tablet computers, notebook PCs, and cameras; wearable devices such as smartwatches; and display devices such as televisions, liquid crystal displays, organic EL displays, and inorganic EL displays.

[0658] As described above, the laminate of the present invention has been described in detail, but the laminate of the present invention and the method for manufacturing the laminate are not limited to the above-exemplified contents.

[0659] Examples

[0660] The present invention will be described in more detail by the following examples, but the present invention is not limited to these.

[0661] (Examples 1 to 6, Comparative Examples 1 to 3)

[0662] (1) A polysilicon target with a purity of 99.999% or more was installed in the chamber of a vacuum magnetron sputtering apparatus (NVT-1600A). 0.12 g of a solution prepared by dissolving the following fluorosilane compound in hydrofluoroether (produced by 3M Company, Novec7200) at a solid content of 20% by mass and steel wool were respectively filled into 16 copper particles, and uniformly installed in the chamber. And chemically strengthened glass was installed in the chamber.

[0663] CF3O-(CF2CF2O) m (CF2O) n CF2CH2OCH2CH2CH2Si(CH2CH2CH2Si(OCH3)3)3

[0664] (m = 22, n = 19)

[0665] (2) Using a vacuum pump, the vacuum degree in the chamber of the vacuum magnetron sputtering apparatus was made lower than 4.0×10 -2 Torr, and the glass substrate was irradiated with an ion beam to clean the surface of the substrate. (Ion source voltage: 790 V, Ar flow rate: 1000 sccm, O2 flow rate: 300 sccm, irradiation time: 600 seconds)

[0666] (3) After cleaning the substrate, the vacuum state was maintained, and the vacuum degree was made lower than 3.0×10 -5Torr. Ar, O2, and N2 gases were introduced from both ends of the target, and a voltage was applied to form SiO under the conditions (power, Ar flow rate / O2 flow rate / N2 flow rate, sputtering time) shown in Examples 1 to 6 and Comparative Examples 1 to 5. x N y layer.

[0667] (4) After that, the copper particles filled with the fluorosilane compound were resistively heated under the conditions of a power of 25%, a current of 2.2 A, and a time of 900 s for evaporation to form a surface treatment layer on the substrate.

[0668] [Table 1]

[0669]

[0670] SiO x N y For the x and y of the SiO layer, X-ray photoelectron spectroscopy (XPS) was used for measurement.

[0671] Device: PHI5000Versaprobe - III manufactured by ULVAC - PHI

[0672] X-ray source: Monochromatic AlKα (25 W)

[0673] Detection area: 100 × 100 μm

[0674] Detection angle: 45 degrees

[0675] Pass energy: 56 eV

[0676] The x:y ratio was quantified by the percentages of Si2p, O1s, and N1s in the obtained spectrum.

[0677] For the treated substrates described in Examples 1 to 6 and Comparative Examples 1 to 3, steel wool abrasion durability evaluation, ethanol rubber abrasion durability evaluation, and alkaline artificial sweat durability evaluation were carried out.

[0678] Regarding the steel wool abrasion durability, the substrate with the surface treatment layer formed was horizontally placed on a reciprocating wear device, brought into contact with the steel wool (#0000, size 5 mm × 10 mm × 10 mm), and a load of 1000 gf was applied thereto. After that, with the load applied, the steel wool was reciprocated at a speed of 60 rpm and a distance of 60 mm. The water contact angle (2 μL) was measured every 2000 wear cycles, and the evaluation was terminated when the contact angle was lower than 100 degrees.

[0679] Regarding the ethanol rubber abrasion durability, the substrate with a surface treatment layer is horizontally placed on a reciprocating abrasion device, brought into contact with a rubber (produced by Minoan, diameter 6 mm), 2 mL of ethanol (purity 99.7% or higher) is dropped, a load of 1000 gf is applied thereon, and then, with the load applied, the rubber is reciprocated at a speed of 40 rpm and a distance of 40 mm. The water contact angle (2 μL) is measured every 1500 abrasion cycles, and the evaluation is terminated when the contact angle is lower than 100 degrees.

[0680] Regarding the alkaline artificial sweat durability, the treated substrate is wrapped with a clean dust-free cloth, placed in a plastic sealed bag, and then 25 mL of artificial sweat is added to fully moisten the dust-free cloth. (The artificial sweat is prepared by mixing 20 g of NaCl, 17.5 g of NH4Cl, 5 g of urea, 15 mL of 85% lactic acid, and 2.5 mL of acetic anhydride, and then adding an aqueous NaOH solution to adjust the pH to 9.5.)

[0681] After that, the sealed bag is placed in a high-temperature and high-humidity machine in a sealed state and stored under the condition of 70 °C for 48 hours. After storage, the surface of the substrate is washed with water, left standing at room temperature for 2 hours, and then the water contact angle and appearance are evaluated. The water contact angle is measured at 5 locations on the surface of the substrate. When evaluating the appearance, water vapor is sprayed on the surface of the substrate, and the degree of change in appearance is visually observed.

[0682] When the measured values of the water contact angle at all 5 locations reach 110 degrees or more and the appearance does not change at all, it is judged as "◎"; when the average value of the water contact angle at 5 locations is 110 degrees or more and the number of locations where the appearance has changed (area is 4 mm 2 or less) is 3 or less, it is judged as "〇"; when the average value of the water contact angle at 5 locations is 100 degrees or more and less than 110 degrees, and the number of locations where the appearance has changed (area is 100 mm 2 or less) is 5 or less, it is judged as "△"; when the average value of the water contact angle at 5 locations is less than 100 degrees and the number of locations where the appearance has changed (area is 30% or more of the entire substrate) is 5 or less, it is judged as "×".

[0683] For the laminates of Examples 1 to 6, excellent steel wool abrasion durability, ethanol rubber abrasion durability, and alkaline artificial sweat durability were confirmed.

[0684] Industrial Applicability

[0685] The laminate of the present invention has good durability and can be applied to: cathode ray tubes (CRTs, such as personal computer monitors), liquid crystal displays, plasma displays, organic EL displays, inorganic thin film EL dot matrix displays, rear projection displays, fluorescent display tubes (VFDs), field emission displays (FEDs, Field Emission Displays), etc., or protective plates for these displays, or optical materials with an antireflection film treatment or the like applied to their surfaces; lenses for glasses, etc.; front protective plates, antireflection plates, polarizing plates, antiglare plates for displays such as PDPs and LCDs; touch screen sheets for devices such as mobile phones and portable information terminals; the surfaces of optical discs such as Blu-ray (registered trademark) discs, DVD discs, CD-Rs, and MOs; optical fibers; display surfaces of clocks, etc.; medical devices or medical materials; windows, lamp shades, and covers for vehicle exterior cameras; examples of interior components include the following materials: automotive interior and exterior components such as instrument panel covers, navigation system touch panels, and decorative interior components; portable terminal devices such as smartphones, tablet computers, notebook PCs, and cameras; wearable devices such as smart watches; display devices such as televisions, liquid crystal displays, organic EL displays, and inorganic EL displays, etc.

Claims

1. A laminate, characterized in that: it has a substrate, an inorganic layer laminated on the substrate, and a surface treatment layer in contact with the inorganic layer; The inorganic layer contains SiO x N y , x is 0.01 or more and 8 or less; y is 0.01 or more and 8 or less; the surface treatment layer is formed using a surface treatment agent containing a fluorosilane compound.

2. The laminate according to claim 1, characterized in that: the ratio of y to x, y / x, is 0.01 to 1.

3. The laminate according to claim 1, characterized in that: the thickness of the inorganic layer is 1 nm or more and 35 nm or less.

4. The laminate according to claim 1, characterized in that: the refractive index of the inorganic layer for light with a wavelength of 550 nm is 1.3 or more and 2.0 or less.

5. The laminate according to any one of claims 1 to 4, characterized in that: the fluorosilane compound contains at least one fluorosilane compound represented by the following formula (1) or (2); R F1 α -X A -R Si β (1) R Si γ -X A -R F2 -X A -R Si γ (2) wherein, R F1 Each occurrence is independently Rf 1 -R F -O q - or fluoroalkyl; R F2 is -Rf 2 p -R F -O q - or fluoroalkylene; Rf 1 Each occurrence is independently, at each occurrence, a C 1-16 alkyl group which may be substituted with one or more fluorine atoms; Rf 2 is a C alkylene group which may be substituted with one or more fluorine atoms 1-6 ; R F a divalent fluorinated polyether group that is independently divalent at each occurrence; p is 0 or 1; q is independently 0 or 1 each time it appears; R Si each independently at each occurrence, a monovalent group containing a Si atom bonded to a hydroxyl group, a hydrolyzable group, a hydrogen atom or a monovalent organic group; At least one R Si is a monovalent group containing a Si atom bonded to a hydroxyl group or a hydrolyzable group; X A are each independently a single bond or an organic group having a valence of 2 to 10; α is an integer from 1 to 9; β is an integer from 1 to 9; γ is independently an integer from 1 to 9.

6. A method for manufacturing a laminate, characterized in that, It includes: a step of forming an inorganic layer on a substrate by reactive sputtering; and a step of applying a surface treatment agent on the surface of the inorganic layer to form a surface treatment layer, The inorganic layer contains SiO x N y , x is 0.01 or more and 8 or less, y is 0.01 or more and 8 or less, the surface treatment layer contains a fluorosilane compound.

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