A vertical optical detection device

Abstract

The present invention discloses a vertical optical detection device, which relates to the field of optical detection technology and includes an interference component, a plurality of optical components, an optical platform, and a support frame fixed to the support platform. The support frame includes a first frame body and a second frame body arranged side by side. At least one first layer plate is fixed in the first frame body, and all the first layers divide the first space of the first frame body into at least two first placement areas. The interference component is selectively placed in the first placement area. At least one second layer plate is provided in the second frame body, and the height of at least one second layer plate in the second frame body is adjustable. All the second layers divide the second space of the second frame body into at least two second placement areas, and all the optical components are selectively placed in the second placement area. The relative positions of the interference component and each optical component are adjusted by various combinations to form a variety of different detection light paths, thereby ensuring that the interference component and all the optical components can form a preset detection light path and meet diverse detection needs.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection, and in particular to a vertical optical detection device. Background Art

[0002] Interference detection has become the mainstream technical means in the field of high-precision surface detection of optical components due to its advantages such as high precision and non-contact measurement, and plays an irreplaceable role in key fields such as precision optical manufacturing and integrated circuit lithography systems.

[0003] Traditional optical inspection devices typically utilize a fixed optical path design, a structural layout that limits inspection flexibility and applicability. Taking vertical inspection devices as an example, typical designs can be categorized into two types: bottom-mounted and top-mounted. In the bottom-mounted design, the interferometer assembly is fixed directly below the inspected mirror, while the optical component under test is mounted on a multi-dimensional stage fixed on the Z-axis. Coaxial alignment of the interferometer assembly and the inspected mirror creates a vertically upward inspection optical path. While this design is structurally stable, the fixed position of the interferometer assembly prevents adjustment of the optical path. In the top-mounted design, the interferometer assembly is fixed on the Z-axis, while the inspected mirror is placed on a multi-dimensional adjustment mount, which is placed on the platform. Inspection utilizes a fixed, vertically downward optical path. While this design facilitates adjustment of the test component's height, it also suffers from the limitation of an unadjustable optical path. Therefore, both designs utilize a rigidly fixed optical path. While they can achieve nanometer-level inspection accuracy, the fixed optical path orientation and limited adjustment freedom make it difficult to adapt to test components of varying sizes, shapes, and specific mounting requirements, resulting in significant compatibility issues. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a vertical optical detection device, in which the interference component and the optical component can be arbitrarily combined within the support frame to achieve flexible orientation of the detection light path, meet different detection requirements, and solve the technical problem of poor adaptability of existing detection devices.

[0005] To achieve the above-mentioned object, the present invention provides a vertical optical detection device, comprising an interference assembly, a plurality of optical assemblies, an optical platform, and a support frame fixed to the optical platform; the support frame comprises a first frame body and a second frame body arranged side by side;

[0006] At least one first layer plate is fixedly disposed in the first frame, and all the first layers divide the first space of the first frame into at least two first placement areas, and the interference component is selectively placed in one of the first placement areas;

[0007] At least one second layer board is provided in the second frame, and the height of at least one second layer board in the second frame is adjustable; all the second layer boards divide the second space of the second frame into at least two second placement areas, all the optical components are selectively placed in the second placement areas, and the interference component and all the optical components together constitute a preset detection light path.

[0008] In some embodiments, the first layer plate includes a first upper layer plate and a first middle layer plate fixed in the first frame from top to bottom;

[0009] The first placement area includes a first upper placement area located above the first upper plate, a first middle placement area located between the first upper plate and the first middle plate, and a first lower placement area located between the first middle plate and the optical platform;

[0010] The second layer includes a second upper fixed plate, a second upper movable plate, a second lower fixed plate, and a second lower movable plate fixed in sequence from top to bottom in the second frame body; at least two vertical guide rails are fixed in the second frame body, and the second upper movable plate and the second lower movable plate can be slidably mounted on all the vertical guide rails; the second upper movable plate and the second lower movable plate are fixed to the vertical guide rails at designated positions by means of a locking assembly;

[0011] The second placement area includes a second uppermost placement area located above the second upper fixed plate, a second upper middle placement area located between the second upper fixed plate and the second upper movable plate, a second middle placement area located between the second upper movable plate and the second lower fixed plate, a second lower middle placement area located between the second lower fixed plate and the second lower movable plate, and a second lowermost placement area located between the second lower movable plate and the optical platform.

[0012] In some embodiments, the interference component is placed in the first upper placement area;

[0013] The optical assembly includes a folding assembly, a standard mirror frame and a six-dimensional adjustment mechanism arranged in sequence from top to bottom; the standard mirror frame is equipped with a standard mirror, and the six-dimensional adjustment mechanism is used to adjust the position of the installed mirror to be inspected;

[0014] The folding assembly is placed in the second uppermost placement area, the standard frame is placed in the second upper middle placement area, and the six-dimensional adjustment mechanism is placed in the second lowermost placement area;

[0015] The detection light generated by the interference component is reflected by the folding component and then transmitted vertically downward, and vertically enters the inspected mirror. The reflected light after being reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component to form interference fringes, thereby realizing the surface shape detection of the inspected mirror.

[0016] In some embodiments, the interference component is placed in the first lower placement area;

[0017] The optical assembly includes a folding assembly, a standard mirror frame and a six-dimensional adjustment mechanism arranged in sequence from bottom to top; the standard mirror frame is equipped with a standard mirror, and the six-dimensional adjustment mechanism is used to adjust the posture of the installed mirror to be inspected;

[0018] The folding assembly is placed in the second lowest placement area, the standard frame is placed in the second upper middle placement area, and the six-dimensional adjustment mechanism is placed in the second uppermost placement area;

[0019] The detection light generated by the interference component is reflected by the folding component and then transmitted vertically upward, and vertically enters the inspected mirror. The reflected light after being reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component to form interference fringes, thereby realizing the surface shape detection of the inspected mirror.

[0020] In some embodiments, the interference component is placed in the first intermediate placement area;

[0021] The optical assembly includes an upper six-dimensional adjustment mechanism, an upper standard mirror frame, a folding assembly, a lower standard mirror frame and a lower six-dimensional adjustment mechanism, which are arranged in sequence from top to bottom; the upper six-dimensional adjustment mechanism is used to adjust the posture of the installed upper inspection mirror, the upper standard mirror frame is equipped with an upper standard mirror, the lower standard mirror frame is equipped with a lower standard mirror, and the lower six-dimensional adjustment mechanism is used to adjust the posture of the installed lower inspection mirror;

[0022] The upper six-dimensional adjustment mechanism is placed in the second uppermost placement area, the upper standard frame is placed in the second upper-middle placement area, the folding assembly is placed in the second middle placement area, the lower standard frame is placed in the second lower-middle placement area, and the lower six-dimensional adjustment mechanism is placed in the second lowermost placement area;

[0023] The detection light generated by the interference component is reflected by the folding component and then transmitted vertically upward, and vertically enters the upper inspected mirror. The reflected light after being reflected by the upper inspected mirror and the reference light provided by the upper standard mirror are superimposed and interfered at the interference component to form interference fringes, thereby realizing the surface detection of the upper inspected mirror; the detection light is transmitted vertically downward by adjusting the folding component and vertically enters the lower inspected mirror. The reflected light after being reflected by the lower inspected mirror and the reference light provided by the lower standard mirror are superimposed and interfered at the interference component to form interference fringes, thereby realizing the surface detection of the lower inspected mirror.

[0024] In some embodiments, the interference component is placed in the first upper placement area;

[0025] The optical assembly includes a folding assembly, a standard mirror frame, an adjustment bracket and a six-dimensional adjustment mechanism which are arranged in sequence from top to bottom. The standard mirror frame is equipped with a standard mirror, the adjustment bracket is equipped with a diffraction optical element, and the six-dimensional adjustment mechanism is used to adjust the position of the installed inspected mirror.

[0026] The folding assembly is placed in the second uppermost placement area, the standard frame is placed in the second upper-middle placement area, the adjustment bracket is placed in the second lower-middle placement area, and the six-dimensional adjustment mechanism is placed in the second lowermost placement area;

[0027] The detection light generated by the interference component is reflected by the folding component and then transmitted vertically downward, and is incident on the diffraction optical element and the inspected mirror in turn. The reflected light after being reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component to form interference fringes, thereby realizing the aspheric surface shape detection of the inspected mirror.

[0028] In some embodiments, the interference component is placed in the first upper placement area;

[0029] The optical assembly includes a folding assembly, a standard mirror frame, a lens holder and a six-dimensional adjustment mechanism which are arranged in sequence from top to bottom. The standard mirror frame is equipped with an upper standard mirror, the lens holder is equipped with a lens to be inspected, and the six-dimensional adjustment mechanism is used to adjust the posture of the installed lower standard mirror.

[0030] The folding assembly is placed in the second uppermost placement area, the standard frame is placed in the second upper-middle placement area, the lens holder is placed in the second lower-middle placement area, and the six-dimensional adjustment mechanism is placed in the second lowermost placement area;

[0031] The detection light generated by the interference component is reflected by the folding component and then transmitted vertically downward. It enters the upper standard mirror and is reflected to form reference light. The transmitted light passing through the upper standard mirror passes downward through the lens to be inspected. The formed transmitted light continues to be transmitted downward to the lower standard mirror. The reflected return light coincides with the reference light provided by the upper standard mirror at the interference component to form interference fringes, thereby realizing the surface shape detection of the lens to be inspected.

[0032] In some embodiments, the interference component is placed in the first upper placement area;

[0033] The optical assembly includes a folding assembly, a standard mirror frame, an optical wedge bracket and a six-dimensional adjustment mechanism which are arranged in sequence from top to bottom. The standard mirror frame is equipped with a standard mirror, the optical wedge bracket is equipped with a double optical wedge assembly, and the six-dimensional adjustment mechanism is used to adjust the posture of the installed inspected mirror.

[0034] The folding assembly is placed in the second uppermost placement area, the standard mirror frame is placed in the second upper-middle placement area, the optical wedge bracket is placed in the second lower-middle placement area, and the six-dimensional adjustment mechanism is placed in the second lowermost placement area;

[0035] The detection light generated by the interference component is reflected by the folding component and then transmitted vertically downward, entering the double wedge component. After being adjusted by the double wedge component, it is incident obliquely downward on the inspected mirror. The reflected light after being reflected by the inspected mirror is then reversely compensated by the double wedge component and restored to vertical upward transmission. The reflected light and the reference light provided by the standard mirror are superimposed and interfered at the interference component to form interference fringes, thereby realizing oblique incident surface shape detection of the inspected mirror.

[0036] Alternatively, the detection light generated by the interference component is reflected by the folding component and then transmitted vertically downward, enters the double optical wedge component, is obliquely upward incident on the inspected mirror after being adjusted by the double optical wedge component, and the reflected light after being reflected by the inspected mirror is reversely compensated by the double optical wedge component and restored to be transmitted vertically upward. The reflected light and the reference light provided by the reference mirror are superimposed and interfered at the interference component to form interference fringes, so as to realize the detection of the oblique incident surface shape of the inspected mirror.

[0037] In some embodiments, vibration isolation supports are provided at the bottom of the optical platform.

[0038] In some embodiments, the support frame includes a top side frame, a bottom side frame, and a front side frame, a right side frame, a rear side frame, and a left side frame that are sequentially connected end to end. Among them, the top side frame and the bottom side frame are oppositely arranged and both are in the shape of a Chinese character 'Ri'; the front side frame and the rear side frame are oppositely arranged and both are in the shape of a Chinese character 'Tian'; the left side frame and the rear side frame are oppositely arranged and both are in the shape of a Chinese character 'Ri';

[0039] The front cross beam of the front side frame, the right cross beam of the right side frame, the right cross beam of the rear side frame, and the left cross beam of the left side frame are sequentially connected end to end to enclose an intermediate frame.

[0040] Compared with the background art, the vertical optical detection device in the present invention includes an interference component, a plurality of optical components, an optical platform, and a support frame. The support frame is fixedly arranged on the support platform. The support frame includes a first frame body and a second frame body arranged side by side.

[0041] At least one first layer board is fixedly arranged in the first frame body. All the first layer boards divide the first space of the first frame body into at least two first placement areas. The interference component is selectively placed in the first placement area to flexibly adjust the placement position of the interference component in the first frame body. At least one second layer board is arranged in the second frame body. The height of at least one second layer board in the second frame body is adjustable. All the second layer boards divide the second space of the second frame body into at least two second placement areas. All the optical components are selectively placed in the second placement area to flexibly adjust the placement position of each optical component in the second frame body.

[0042] The present invention adjusts the relative positions of the interference component and each optical component through various combination methods to jointly form a variety of different detection optical paths; no matter which combination method is adopted, it is only necessary to ensure that the interference component and all the optical components can finally form a preset detection optical path. This design can realize the flexible orientation and rapid switching of the detection optical path, meet the diversified optical detection requirements, and has good adaptability. Description of the Drawings

[0043] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0044] Figure 1 A schematic diagram of a vertical optical detection device provided by a specific embodiment of the present invention;

[0045] Figure 2 A schematic diagram of a vertical optical detection device provided in another specific embodiment of the present invention;

[0046] Figure 3 This is a schematic diagram of a vertical optical detection device provided in yet another specific embodiment of the present invention.

[0047] The reference numerals are as follows:

[0048] Interference assembly 1, optical assembly 2, optical platform 3 and support frame 4;

[0049] Folding assembly 21, standard frame 22 and six-dimensional adjustment mechanism 23;

[0050] an upper standard mirror frame 221 and a lower standard mirror frame 222;

[0051] Upper six-dimensional adjustment mechanism 231 and lower six-dimensional adjustment mechanism 232;

[0052] A first frame 41 and a second frame 42;

[0053] A first upper plate 411, a first middle plate 412, a first upper placement area 413, a first middle placement area 414, and a first lower placement area 415;

[0054] The second upper fixed plate 420, the second upper movable plate 421, the second lower fixed plate 422, the second lower movable plate 423, the vertical guide rail 424, the second uppermost placement area 425, the second middle upper placement area 426, the second middle placement area 427, the second middle lower placement area 428 and the second lowermost placement area 429. DETAILED DESCRIPTION

[0055] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0056] In order to enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0057] The embodiment of the present invention discloses a vertical optical detection device, as shown in the attached Figure 1 As shown, the system comprises an interferometer assembly 1, several optical components 2, an optical platform 3, and a support frame 4. The interferometer assembly 1 is specifically an interferometer, and its structure and operating principle are comparable to those of conventional technology. The type of optical component 2 can be flexibly selected based on test requirements, as detailed below. The support frame 4 is fixed to the optical platform 3, serving as a positioning reference for the support frame 4. This ensures high positioning accuracy for each optical platform 3 within the support frame 4, effectively improving detection accuracy.

[0058] The support frame 4 includes a first frame body 41 and a second frame body 42 arranged side by side. Specifically, the first frame body 41 and the second frame body 42 are both frame structures.

[0059] At least one first layer plate is fixedly provided in the first frame 41 , and all the first layers are parallel to the optical platform 3 . Moreover, all the first layers divide the first space of the first frame 41 into at least two first placement areas. The interference assembly 1 is placed in one of the first placement areas, thereby realizing flexible adjustment of the placement position of the interference assembly 1 in the first frame 41 .

[0060] At least one second layer plate is disposed within the second frame 42, and all second layers are parallel to the optical platform 3. The height of at least one second layer plate within the second frame 42 is adjustable, while all remaining second layers divide the second space of the second frame 42 into at least two second placement areas. All optical components 2 are selectively placed in the second placement areas, enabling flexible adjustment of the placement of each optical component 2 within the second frame 42.

[0061] The present invention uses various combinations to adjust the relative positions of the interference assembly 1 and each optical assembly 2, thereby forming a variety of different detection light paths. Regardless of the combination, the only requirement is to ensure that the interference assembly 1 and all optical assemblies 2 ultimately form a predetermined detection light path. This design enables flexible orientation and rapid switching of detection light paths, meeting diverse optical detection needs and exhibiting good adaptability.

[0062] As a preferred embodiment, to control costs and accuracy, two first-layer plates are preferably provided within the first frame 41. These two first-layer plates are located at the top and middle of the first frame 41, respectively. That is, the end of the first frame 41 facing the optical platform 3 does not require a first-layer plate, which is replaced by the optical platform 3. During testing, the interference assembly 1 can be placed directly on the optical platform 3. This saves materials and reduces manufacturing costs while ensuring improved detection accuracy with the help of the optical platform 3. Specifically, the first-layer plates include a first upper plate 411 and a first middle plate 412, which are fixed sequentially from top to bottom within the first frame 41. It should be noted that the first upper plate 411 is mounted on the top side frame of the first frame 41, and the first middle plate 412 can specifically be the middle frame of the first frame 41. Of course, the number and location of the first-layer plates are not limited to this, and can be appropriately reduced based on testing requirements.

[0063] The two first panels divide the first space of the first frame 41 into three first placement areas, allowing the interference assembly 1 to be placed in three different locations within the first frame 41, meeting various testing requirements. Specifically, the first placement areas include a first upper placement area 413, a first middle placement area 414, and a first lower placement area 415. The first upper placement area 413 is located above the first upper panel 411, the first middle placement area 414 is located between the first upper panel 411 and the first middle panel 412, and the first lower placement area 415 is located between the first middle panel 412 and the optical platform 3.

[0064] In order to meet the diverse detection requirements, four second layer boards are placed in the second frame 42, and the optical platform 3 is used to replace one second layer board. This is equivalent to using five second layer boards to divide the second space of the second frame 42 into five second placement areas.

[0065] Specifically, the second deck includes, from top to bottom, a second upper fixed plate 420, a second upper movable plate 421, a second lower fixed plate 422, and a second lower movable plate 423, which are fixed to the second frame 42. In other words, of the four second decks, the second upper movable plate 421 and the second lower movable plate 423 are movable decks with adjustable heights, while the second upper fixed plate 420 and the second lower fixed plate 422 are fixed decks fixed to the second frame 42.

[0066] At least two vertical guide rails 424 are fixedly provided in the second frame 42, and both the second upper movable plate 421 and the second lower movable plate 423 can be slidably arranged on the vertical guide rails 424. When the second upper movable plate 421 and the second lower movable plate 423 slide along the vertical guide rails 424 to the specified positions, the second upper movable plate 421 and the second lower movable plate 423 are fixed on the vertical guide rails 424 by means of locking assemblies to prevent the second upper movable plate 421 and the second lower movable plate 423 from accidentally sliding during the detection process and affecting the detection accuracy.

[0067] Combined with the structural advantages of the second frame 42, the second upper fixing plate 420 can be specifically the top side frame of the second frame 42, and the second lower fixing plate 422 can be specifically the middle frame of the second frame 42. There is no need to set up a second layer of plate, which can reduce consumables and improve the installation accuracy of each optical component 2.

[0068] The second placement area includes a second uppermost placement area 425 located above the second upper fixed plate 420, a second middle-upper placement area 426 located between the second upper fixed plate 420 and the second upper movable plate 421, a second middle placement area 427 located between the second upper movable plate 421 and the second lower fixed plate 422, a second middle-lower placement area 428 located between the second lower fixed plate 422 and the second lower movable plate 423, and a second lowermost placement area 429 located between the second lower movable plate 423 and the optical platform 3. The five second placement areas, namely, the second uppermost placement area 425, the second middle-upper placement area 426, the second middle placement area 427, the second middle-lower placement area 428, and the second lowermost placement area 429, are arranged sequentially from top to bottom, with each second placement area housing an optical component 2. This allows for a variety of combinations to meet various testing requirements. Of course, the number and placement of the second layer of plates are not limited to this and can be appropriately reduced based on testing requirements.

[0069] As a preferred embodiment, as shown in the attached Figure 1 Specifically, the interference assembly 1 is placed in the first upper placement area 413 , and is preferably placed on the first upper plate 411 , or the top side frame of the first frame 41 .

[0070] The optical assembly 2 includes a folding assembly 21, a standard mirror frame 22, and a six-dimensional adjustment mechanism 23, arranged sequentially from top to bottom. The standard mirror frame 22 is equipped with a standard mirror, and the six-dimensional adjustment mechanism 23 is used to adjust the position of the installed test mirror. Specifically, the folding assembly 21 is a 90° folding assembly 21, which is equipped with a right-angle prism and a reflector. These components are used to change the transmission direction of the detection light, converting the horizontal light path into a vertical light path, and ensuring that the deflected detection light remains collimated. The standard mirror frame 22 is equipped with a standard mirror. The standard mirror frame 22 is used to precisely control the angle and position of the standard mirror, ensuring that the return light spot formed after reflection from the standard mirror coincides with the center of the field of view, making the detection light and the reference light coaxial. The six-dimensional adjustment mechanism 23 is equipped with the test mirror and has two degrees of freedom for adjusting the position of the test mirror so that the light spot of the test mirror is centered in the field of view, ensuring that the test mirror is aligned with the reference light, and creating conditions for the generation of interference fringes.

[0071] Specifically, the folding assembly 21 is placed in the second uppermost placement area 425, the standard mirror holder 22 is placed in the second upper middle placement area 426, and the six-dimensional adjustment mechanism 23 is placed in the second lowermost placement area 429. Specifically, the folding assembly 21 is placed on the second upper fixed plate 420, which is fixed to the top side frame of the second frame 42; the standard mirror holder 22 is placed on the second upper movable plate 421, and the six-dimensional adjustment mechanism 23 is placed on the optical platform 3. In this way, by adjusting the position of the second upper movable plate 421, the distance between the standard mirror and the inspected mirror is adjusted, ensuring that the optical path difference between the two mirrors is within the coherence length of the interferometer and that the reflected light spot of the inspected mirror and the reflected light spot of the standard mirror are coaxially aligned at the center of the field of view, creating conditions for the generation of interference fringes.

[0072] The detection light generated by the interference component 1 is transmitted vertically downward after being reflected by the folding component 21, and is vertically incident on the inspected mirror. The reflected light after being reflected by the inspected mirror carries its surface error information and returns along the original path. The reflected light of the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component 1 to form interference fringes. By observing the distribution, density and deformation of the fringes, the surface error of the inspected mirror can be intuitively judged, thereby realizing the surface detection of the inspected mirror.

[0073] As attached Figure 2 As shown in FIG. 4 , as a preferred embodiment, the vertical upward detection mode is used to detect the surface error of the inspected mirror. Specifically, the interference assembly 1 is placed in the first lower placement area 415 , and the interference assembly 1 is preferably placed on the optical platform 3 .

[0074] The optical assembly 2 includes a folding assembly 21, a standard mirror frame 22, and a six-dimensional adjustment mechanism 23, which are arranged in sequence from bottom to top; the standard mirror frame 22 is equipped with a standard mirror, and the six-dimensional adjustment mechanism 23 is used to adjust the position of the installed mirror under inspection. The structure and working principle of each optical assembly 2 can refer to the above content. The folding assembly 21 is placed in the second lowest placement area 429, the standard mirror frame 22 is placed in the second upper middle placement area 426, and the six-dimensional adjustment mechanism 23 is placed in the second uppermost placement area 425. Specifically, the folding assembly 21 is placed on the optical platform 3, the standard mirror frame 22 is placed on the second upper movable plate 421, and the six-dimensional adjustment mechanism 23 is placed on the second upper fixed plate 420, that is, the top side frame of the second frame 42.

[0075] The detection light generated by the interference component 1 is reflected by the folding component 21 and then transmitted vertically upward, and is vertically incident on the inspected mirror. The reflected light after being reflected by the inspected mirror carries its surface error information and returns along the original path. The reflected light of the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component 1 to form interference fringes. By observing the distribution, density and deformation of the fringes, the surface error of the inspected mirror can be intuitively judged, thereby realizing surface detection of the inspected mirror.

[0076] As a preferred embodiment, as shown in the attached Figure 3Specifically, the interference assembly 1 is placed in the first middle placement area 414 , preferably placed on the first middle plate 412 , ie, the middle frame of the first frame 41 .

[0077] The optical assembly 2 includes, from top to bottom, an upper six-dimensional adjustment mechanism 231, an upper standard mirror frame 221, a folding assembly 21, a lower standard mirror frame 222, and a lower six-dimensional adjustment mechanism 232. The upper six-dimensional adjustment mechanism 231 is used to adjust the position of the upper inspection mirror. The upper standard mirror frame 221 is mounted with an upper standard mirror, and the lower standard mirror frame 222 is mounted with a lower standard mirror. The lower six-dimensional adjustment mechanism 232 is used to adjust the position of the lower inspection mirror. The structure and operating principle of each optical assembly 2 can be found in the above description.

[0078] The upper six-dimensional adjustment mechanism 231 is placed in the second uppermost placement area 425, the upper standard frame 221 is placed in the second upper-middle placement area 426, the folding assembly 21 is placed in the second middle placement area 427, the lower standard frame 222 is placed in the second lower-middle placement area 428, and the lower six-dimensional adjustment mechanism 232 is placed in the second lowermost placement area 429. Specifically, the upper six-dimensional adjustment mechanism 231 is placed on the second upper fixed plate 420, i.e., the top side frame of the second frame 42; the upper standard frame 221 is placed on the second upper movable plate 421; the folding assembly 21 is placed on the second lower fixed plate 422, i.e., the middle frame of the second frame 42; the lower standard frame 222 is placed on the second lower movable plate 423; and the lower six-dimensional adjustment mechanism 232 is placed on the optical platform 3.

[0079] The detection light generated by the interference component 1 is reflected by the deflection component 21 and then transmitted vertically upward, vertically entering the upper inspection mirror. The reflected light from the upper inspection mirror and the reference light provided by the upper standard mirror are superimposed and interfered at the interference component 1, forming interference fringes to achieve surface shape detection of the upper inspection mirror. The detection light is then transmitted vertically downward through the deflection component 21 and vertically entering the lower inspection mirror. The reflected light from the lower inspection mirror and the reference light provided by the lower standard mirror are superimposed and interfered at the interference component 1, forming interference fringes to achieve surface shape detection of the lower inspection mirror. By observing the distribution, density, and deformation of the fringes, the surface shape errors of the two inspection mirrors can be intuitively judged, achieving simultaneous surface shape error detection of both mirrors, with high detection efficiency.

[0080] As a preferred embodiment, a diffractive optical element is used to detect the aspheric surface of the inspected mirror. Specifically, the interference assembly 1 is placed in the first upper placement area 413 , preferably on the first upper plate 411 , on the top side frame of the first frame 41 .

[0081] The optical assembly 2 comprises, arranged in order from top to bottom, a deflection assembly 21, a standard mirror frame 22, an adjustment bracket, and a six-dimensional adjustment mechanism 23. The standard mirror frame 22 is mounted with a standard mirror, the adjustment bracket is equipped with a diffractive optical element, and the six-dimensional adjustment mechanism 23 is used to adjust the position of the mounted mirror under inspection. The diffractive optical element is preferably a CGH device, which is used to precisely control the phase distribution of light waves using computer-generated holographic patterns. CGH in this article stands for Computer-Generated Holograms (CGH).

[0082] The folding assembly 21 is placed in the second uppermost storage area 425, the standard frame 22 is placed in the second upper-middle storage area 426, the adjustment bracket is placed in the second lower-middle storage area 428, and the six-dimensional adjustment mechanism 23 is placed in the second lowermost storage area 429. Specifically, the folding assembly 21 is placed on the second upper fixed plate 420, which is fixed to the top side frame of the second frame body 42; the standard frame 22 is placed on the second upper movable plate 421, the adjustment bracket is placed on the second lower movable plate 423, and the six-dimensional adjustment mechanism 23 is placed on the optical platform 3.

[0083] The detection light generated by the interference component 1 is reflected by the deflection component 21 and then transmitted vertically downward, and is successively incident on the diffraction optical element and the inspected mirror. The reflected light after being reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component 1 to form interference fringes. The fringe phase is solved by an algorithm to realize the aspheric surface shape detection of the inspected mirror, which is suitable for complex optical elements such as aspheric surfaces and free-form surfaces.

[0084] It should be noted that the detection light enters the diffraction optical element, is modulated by the diffraction optical element, and then vertically enters the aspheric surface of the inspected mirror. If the aspheric surface of the inspected mirror has no error, the reflected light returns along the original path and is reconverted into a plane wave by the diffraction optical element, perfectly matching the reference light. If there is an error in the aspheric surface of the inspected mirror, the reflected light will produce a phase difference with the reference light after conversion by the diffraction optical element. The wavefront phase distribution of the reflected light corresponds one-to-one to the surface error of the inspected mirror. After inverse diffraction by the diffraction optical element, the residual phase difference interferes with the reference light to generate fringes.

[0085] Of course, the detection light for aspheric surface shape detection is not limited to being directed vertically downward, but may also be directed vertically upward, or vertically upward and downward simultaneously, and the position of each optical component 2 is adjusted accordingly.

[0086] As a preferred embodiment, the surface shape of the inspected lens is detected. Specifically, the interference assembly 1 is placed in the first upper placement area 413 , and the interference assembly 1 is preferably placed on the first upper plate 411 , or the top side frame of the first frame 41 .

[0087] The optical assembly 2 includes a folding assembly 21, a standard mirror frame 22, a lens holder and a six-dimensional adjustment mechanism 23 arranged in sequence from top to bottom. The standard mirror frame 22 is equipped with an upper standard mirror, the lens holder is equipped with a lens to be inspected, and the six-dimensional adjustment mechanism 23 is used to adjust the position of the installed lower standard mirror.

[0088] The folding assembly 21 is placed in the second uppermost storage area 425, the standard mirror frame 22 is placed in the second upper-middle storage area 426, the lens holder is placed in the second lower-middle storage area 428, and the six-dimensional adjustment mechanism 23 is placed in the second lowermost storage area 429. Specifically, the folding assembly 21 is placed on the second upper fixed plate 420, which is fixed to the top side frame of the second frame body 42; the standard mirror frame 22 is placed on the second upper movable plate 421, the lens holder is placed on the second lower movable plate 423, and the six-dimensional adjustment mechanism 23 is placed on the optical platform 3.

[0089] The detection light generated by the interference component 1 is reflected by the folding component 21 and then transmitted vertically downward. It enters the upper standard mirror and is reflected to form reference light. The transmitted light passing through the upper standard mirror passes downward through the inspected lens, and the formed transmitted light continues to be transmitted downward to the lower standard mirror. The reflected return light coincides with the reference light provided by the upper standard mirror at the interference component 1 to form interference fringes. By observing the distribution, density and deformation of the fringes, the surface errors of the two inspected lenses can be intuitively judged, thereby realizing the surface detection of the inspected lenses.

[0090] Of course, in the surface shape detection of the inspected lens, the detection light is not limited to being directed vertically downward, but may also be directed vertically upward, or vertically upward and downward at the same time, and the position of each optical component 2 is adjusted accordingly.

[0091] As a preferred embodiment, the oblique incident surface shape test is performed on the inspected mirror. Specifically, the interference assembly 1 is placed in the first upper placement area 413 , and the interference assembly 1 is preferably placed on the first upper plate 411 , on the top side frame of the first frame 41 .

[0092] The optical assembly 2 includes a folding assembly 21, a standard mirror frame 22, a wedge bracket and a six-dimensional adjustment mechanism 23 arranged in sequence from top to bottom. The standard mirror frame 22 is equipped with a standard mirror, the wedge bracket is equipped with a double wedge assembly, and the six-dimensional adjustment mechanism 23 is used to adjust the position of the installed test mirror.

[0093] The folding assembly 21 is placed in the second uppermost placement area 425, the standard lens frame 22 is placed in the second upper-middle placement area 426, the optical wedge holder is placed in the second lower-middle placement area 428, and the six-dimensional adjustment mechanism 23 is placed in the second lowermost placement area 429. Specifically, the folding assembly 21 is placed on the second upper fixed plate 420, which is fixed to the top side frame of the second frame 42; the standard lens frame 22 is placed on the second upper movable plate 421, the optical wedge holder is placed on the second lower movable plate 423, and the six-dimensional adjustment mechanism 23 is placed on the optical platform 3.

[0094] The detection light generated by the interference component 1 is reflected by the folding component 21 and then transmitted vertically downward, enters the double optical wedge component. After being adjusted by the double optical wedge component, it is obliquely downward incident on the inspected mirror. The reflected light after being reflected by the inspected mirror is reversely compensated by the double optical wedge component and restored to be transmitted vertically upward. The reflected light and the reference light provided by the reference mirror are superimposed and interfered at the interference component 1 to form interference fringes, so as to realize the detection of the oblique incident surface shape of the inspected mirror;

[0095] And / or, the detection light generated by the interference component 1 is reflected by the folding component 21 and then transmitted vertically downward, enters the double optical wedge component. After being adjusted by the double optical wedge component, it is obliquely upward incident on the inspected mirror. The reflected light after being reflected by the inspected mirror is reversely compensated by the double optical wedge component and restored to be transmitted vertically upward. The reflected light and the reference light provided by the reference mirror are superimposed and interfered at the interference component 1 to form interference fringes, so as to realize the detection of the oblique incident surface shape of the inspected mirror.

[0096] Of course, the detection light for the detection of the oblique incident surface shape is not limited to being vertically downward, and can also be vertically upward, or vertically upward and downward at the same time, and the positions of the respective optical components 2 are adjusted accordingly.

[0097] As can be seen from the above, the vertical optical detection device in the present invention can realize multiple detection modes, meet different detection requirements, and has a relatively high adaptation range and good adaptability.

[0098] As a preferred embodiment, vibration isolation supports are provided at the bottom of the optical platform 3 to avoid the jitter of the interference fringes caused by the vibration of the optical platform 3 and effectively improve the detection accuracy. The vibration isolation supports are specifically air floating supports.

[0099] As a preferred embodiment, the support frame 4 includes a top side frame, a bottom side frame, and a front side frame, a right side frame, a rear side frame, and a left side frame that are sequentially connected end to end. Among them, the top side frame and the bottom side frame are arranged opposite to each other and both are in the shape of a Chinese character 'Ri'; the front side frame and the rear side frame are arranged opposite to each other and both are in the shape of a Chinese character 'Tian'; the left side frame and the rear side frame are arranged opposite to each other and both are in the shape of a Chinese character 'Ri'; the front cross beam of the front side frame, the right cross beam of the right side frame, the right cross beam of the rear side frame, and the left cross beam of the left side frame are sequentially connected end to end to enclose an intermediate frame. The structure of the support frame 4 is simple and can provide reliable support for the respective optical components 2.

[0100] It should be noted that in this specification, relational terms such as first and second are only used to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0101] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A vertical optical detection device, characterized in that: It comprises an interference assembly (1), a plurality of optical assemblies (2), an optical platform (3), and a support frame (4) fixed to the optical platform (3); the support frame (4) comprises a first frame body (41) and a second frame body (42) arranged side by side; At least one first layer of plate is fixedly provided in the first frame (41), and all the first layers of plate divide the first space of the first frame (41) into at least two first placement areas, and the interference component (1) is selectively placed in one of the first placement areas; At least one second layer plate is provided in the second frame (42), and the height of the at least one second layer plate in the second frame (42) is adjustable; all the second layer plates divide the second space of the second frame (42) into at least two second placement areas, all the optical components (2) are selectively placed in the second placement areas, and the interference component (1) and all the optical components (2) together constitute a preset detection light path.

2. The vertical optical detection device according to claim 1, characterized in that: The first layer plate comprises a first upper layer plate (411) and a first middle layer plate (412) fixed in sequence from top to bottom in the first frame (41); The first placement area includes a first upper placement area (413) located above the first upper plate (411), a first middle placement area (414) located between the first upper plate (411) and the first middle plate (412), and a first lower placement area (415) located between the first middle plate (412) and the optical platform (3); The second layer comprises a second upper fixed plate (420), a second upper movable plate (421), a second lower fixed plate (422) and a second lower movable plate (423) which are fixed in sequence from top to bottom in the second frame (42); at least two vertical guide rails (424) are fixed in the second frame (42); the second upper movable plate (421) and the second lower movable plate (423) can be slidably mounted on all the vertical guide rails (424); the second upper movable plate (421) and the second lower movable plate (423) are fixed to the vertical guide rails (424) at designated positions by means of a locking assembly; The second placement area includes a second uppermost placement area (425) located above the second upper fixed plate (420), a second middle-upper placement area (426) located between the second upper fixed plate (420) and the second upper movable plate (421), a second middle placement area (427) located between the second upper movable plate (421) and the second lower fixed plate (422), a second middle-lower placement area (428) located between the second lower fixed plate (422) and the second lower movable plate (423), and a second lowermost placement area (429) located between the second lower movable plate (423) and the optical platform (3).

3. The vertical optical detection device according to claim 2, characterized in that: The interference component (1) is placed in the first upper placement area (413); The optical assembly (2) comprises a folding assembly (21), a standard mirror frame (22) and a six-dimensional adjustment mechanism (23) arranged in sequence from top to bottom; the standard mirror frame (22) is equipped with a standard mirror, and the six-dimensional adjustment mechanism (23) is used to adjust the posture of the installed test mirror; The folding assembly (21) is placed in the second uppermost placement area (425), the standard frame (22) is placed in the second upper middle placement area (426), and the six-dimensional adjustment mechanism (23) is placed in the second lowermost placement area (429); The detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically downward, and vertically enters the inspected mirror. The reflected light after being reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component (1), forming interference fringes, so as to realize the surface shape detection of the inspected mirror.

4. The vertical optical detection device according to claim 2, characterized in that: The interference component (1) is placed in the first lower placement area (415); The optical assembly (2) comprises a folding assembly (21), a standard mirror frame (22) and a six-dimensional adjustment mechanism (23) arranged in sequence from bottom to top; the standard mirror frame (22) is equipped with a standard mirror, and the six-dimensional adjustment mechanism (23) is used to adjust the posture of the installed test mirror; The folding assembly (21) is placed in the second lowermost placement area (429), the standard frame (22) is placed in the second upper middle placement area (426), and the six-dimensional adjustment mechanism (23) is placed in the second uppermost placement area (425); The detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically upward, and vertically enters the inspected mirror. The reflected light reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component (1), forming interference fringes, so as to realize the surface shape detection of the inspected mirror.

5. The vertical optical detection device according to claim 2, characterized in that: The interference component (1) is placed in the first middle placement area (414); The optical assembly (2) comprises an upper six-dimensional adjustment mechanism (231), an upper standard mirror frame (221), a folding assembly (21), a lower standard mirror frame (222), and a lower six-dimensional adjustment mechanism (232) which are sequentially arranged from top to bottom; the upper six-dimensional adjustment mechanism (231) is used to adjust the posture of the installed upper inspection mirror, the upper standard mirror frame (221) is equipped with an upper standard mirror, the lower standard mirror frame (222) is equipped with a lower standard mirror, and the lower six-dimensional adjustment mechanism (232) is used to adjust the posture of the installed lower inspection mirror; The upper six-dimensional adjustment mechanism (231) is placed in the second uppermost placement area (425), the upper standard frame (221) is placed in the second upper-middle placement area (426), the folding assembly (21) is placed in the second middle placement area (427), the lower standard frame (222) is placed in the second lower-middle placement area (428), and the lower six-dimensional adjustment mechanism (232) is placed in the second lowermost placement area (429); The detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically upward, and vertically enters the upper inspection mirror. The reflected light after being reflected by the upper inspection mirror and the reference light provided by the upper standard mirror are superimposed and interfered at the interference component (1), forming interference fringes, so as to realize the surface shape detection of the upper inspection mirror; by adjusting the folding component (21) to transmit vertically downward and vertically enter the lower inspection mirror, the reflected light after being reflected by the lower inspection mirror and the reference light provided by the lower standard mirror are superimposed and interfered at the interference component (1), forming interference fringes, so as to realize the surface shape detection of the lower inspection mirror.

6. The vertical optical detection device according to claim 2, characterized in that: The interference component (1) is placed in the first upper placement area (413); The optical assembly (2) comprises a folding assembly (21), a standard mirror frame (22), an adjustment bracket and a six-dimensional adjustment mechanism (23) arranged in sequence from top to bottom, the standard mirror frame (22) is equipped with a standard mirror, the adjustment bracket is equipped with a diffraction optical element, and the six-dimensional adjustment mechanism (23) is used to adjust the posture of the installed test mirror; The folding assembly (21) is placed in the second uppermost placement area (425), the standard frame (22) is placed in the second upper-middle placement area (426), the adjustment bracket is placed in the second lower-middle placement area (428), and the six-dimensional adjustment mechanism (23) is placed in the second lowermost placement area (429); The detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically downward, and is sequentially incident on the diffraction optical element and the inspected mirror. The reflected light reflected by the inspected mirror and the reference light provided by the standard mirror are superimposed and interfered at the interference component (1), forming interference fringes, so as to realize the aspheric surface shape detection of the inspected mirror.

7. The vertical optical detection device according to claim 2, characterized in that: The interference component (1) is placed in the first upper placement area (413); The optical assembly (2) comprises a folding assembly (21), a standard mirror frame (22), a lens holder and a six-dimensional adjustment mechanism (23) arranged in sequence from top to bottom, the standard mirror frame (22) is equipped with an upper standard mirror, the lens holder is equipped with a lens to be inspected, and the six-dimensional adjustment mechanism (23) is used to adjust the posture of the installed lower standard mirror; The folding assembly (21) is placed in the second uppermost placement area (425), the standard frame (22) is placed in the second upper-middle placement area (426), the lens holder is placed in the second lower-middle placement area (428), and the six-dimensional adjustment mechanism (23) is placed in the second lowermost placement area (429); The detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically downward, entering the upper standard mirror and being reflected to form reference light. The transmitted light passing through the upper standard mirror passes downward through the inspected lens, and the formed transmitted light continues to be transmitted downward to the lower standard mirror. The reflected return light and the reference light provided by the upper standard mirror coincide at the interference component (1), forming interference fringes, thereby realizing the surface shape detection of the inspected lens.

8. The vertical optical detection device according to claim 2, characterized in that: The interference component (1) is placed in the first upper placement area (413); The optical component (2) includes a folding component (21), a standard mirror frame (22), a prism holder, and a six-axis adjustment mechanism (23) arranged in sequence from top to bottom. The standard mirror frame (22) is equipped with a standard mirror, the prism holder is equipped with a double prism component, and the six-axis adjustment mechanism (23) is used to adjust the position and pose of the inspected mirror installed thereon; The folding component (21) is placed in the second uppermost placement area (425), the standard mirror frame (22) is placed in the second middle upper placement area (426), the prism holder is placed in the second middle lower placement area (428), and the six-axis adjustment mechanism (23) is placed in the second lowermost placement area (429); The detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically downward, enters the double prism component, is adjusted by the double prism component and then obliquely downward into the inspected mirror. The reflected light after being reflected by the inspected mirror is compensated in the reverse direction by the double prism component and restored to be transmitted vertically upward. The reflected light and the reference light provided by the standard mirror are superimposed and interfered at the interference component (1) to form interference fringes, so as to realize the detection of the inclined incident surface shape of the inspected mirror; And / or, the detection light generated by the interference component (1) is reflected by the folding component (21) and then transmitted vertically downward, enters the double prism component, is adjusted by the double prism component and then obliquely upward into the inspected mirror. The reflected light after being reflected by the inspected mirror is compensated in the reverse direction by the double prism component and restored to be transmitted vertically upward. The reflected light and the reference light provided by the standard mirror are superimposed and interfered at the interference component (1) to form interference fringes, so as to realize the detection of the inclined incident surface shape of the inspected mirror.

9. The vertical optical detection device according to any one of claims 1 to 8, characterized in that: Vibration isolation supports are provided at the bottom of the optical platform (3).

10. The vertical optical detection device according to any one of claims 1 to 8, characterized in that: The support frame (4) includes a top side frame, a bottom side frame, and a front side frame, a right side frame, a rear side frame, and a left side frame that are sequentially connected end to end. Among them, the top side frame and the bottom side frame are arranged opposite to each other and both are in the shape of a Chinese character 'Ri'; the front side frame and the rear side frame are arranged opposite to each other and both are in the shape of a Chinese character 'Tian'; the left side frame and the rear side frame are arranged opposite to each other and both are in the shape of a Chinese character 'Ri'; The front cross beam of the front side frame, the right cross beam of the right side frame, the right cross beam of the rear side frame, and the left cross beam of the left side frame are sequentially connected end to end to enclose a middle frame.

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